TW333631B - Modification method and apparatus of defects - Google Patents

Modification method and apparatus of defects

Info

Publication number
TW333631B
TW333631B TW085114535A TW85114535A TW333631B TW 333631 B TW333631 B TW 333631B TW 085114535 A TW085114535 A TW 085114535A TW 85114535 A TW85114535 A TW 85114535A TW 333631 B TW333631 B TW 333631B
Authority
TW
Taiwan
Prior art keywords
defects
modification method
steps
portions
defect
Prior art date
Application number
TW085114535A
Other languages
Chinese (zh)
Inventor
Masahiro Saruta
Akihiro Yamanaka
Hiroshi Ideguchi
Takami Osaki
Kazunari Maeda
Original Assignee
Ntn Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4235496A external-priority patent/JPH0961296A/en
Priority claimed from JP4344196A external-priority patent/JP2997642B2/en
Priority claimed from JP7606296A external-priority patent/JP3338285B2/en
Priority claimed from JP7606396A external-priority patent/JPH09265007A/en
Priority claimed from JP10665496A external-priority patent/JPH09292621A/en
Application filed by Ntn Kk filed Critical Ntn Kk
Application granted granted Critical
Publication of TW333631B publication Critical patent/TW333631B/en

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

A modification method of defects used to modify the defects forming on the patterns of substrate which includes: steps of expand the defect portion; steps of eliminating the necessary defect portions; steps of using modification liquid to paint the defect portions or the above eliminated portions.
TW085114535A 1996-02-29 1996-11-25 Modification method and apparatus of defects TW333631B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP4235496A JPH0961296A (en) 1995-06-15 1996-02-29 Method and apparatus for correcting defect of color filter
JP4344196A JP2997642B2 (en) 1996-02-29 1996-02-29 Defect repair device
JP7606296A JP3338285B2 (en) 1996-03-29 1996-03-29 Defect repair device
JP7606396A JPH09265007A (en) 1996-03-29 1996-03-29 Defect correcting device
JP10665496A JPH09292621A (en) 1996-04-26 1996-04-26 Correcting device for liquid crystal substrate and correcting method of the same

Publications (1)

Publication Number Publication Date
TW333631B true TW333631B (en) 1998-06-11

Family

ID=58262899

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085114535A TW333631B (en) 1996-02-29 1996-11-25 Modification method and apparatus of defects

Country Status (1)

Country Link
TW (1) TW333631B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392595B (en) * 2006-11-08 2013-04-11 Ntn Toyo Bearing Co Ltd Pattern correction device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392595B (en) * 2006-11-08 2013-04-11 Ntn Toyo Bearing Co Ltd Pattern correction device

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent