TW330911B - The inspection apparatus, storing unit & convey system for wafer - Google Patents

The inspection apparatus, storing unit & convey system for wafer

Info

Publication number
TW330911B
TW330911B TW085113733A TW85113733A TW330911B TW 330911 B TW330911 B TW 330911B TW 085113733 A TW085113733 A TW 085113733A TW 85113733 A TW85113733 A TW 85113733A TW 330911 B TW330911 B TW 330911B
Authority
TW
Taiwan
Prior art keywords
wafer
inspection apparatus
cassette
referencing
storing unit
Prior art date
Application number
TW085113733A
Other languages
Chinese (zh)
Inventor
Manabu Komatsu
Haruuto Sakai
Osamu Yamashita
Masashi Takahashi
Kurata Honma
Original Assignee
Nicon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP29507595A external-priority patent/JPH09139415A/en
Priority claimed from JP30240995A external-priority patent/JP3713772B2/en
Priority claimed from JP7302407A external-priority patent/JPH09148394A/en
Priority claimed from JP7302408A external-priority patent/JPH09148391A/en
Application filed by Nicon Kk filed Critical Nicon Kk
Application granted granted Critical
Publication of TW330911B publication Critical patent/TW330911B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/109—Programme-controlled manipulators characterised by positioning means for manipulator elements comprising mechanical programming means, e.g. cams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Abstract

A wafer inspection apparatus, it includes: - Lifting unit has an arranging surface for fixing the cassette that stores wafer inside; - Wafer convey system for conveying a selected wafer stored inside the cassette; - Observation system for observing the wafer fixed on determined observation referencing surface and conveyed by wafer conveying system; In which, when the cassette is fixed on the arranging surface of lifting unit, the arranging surface is referencing to the main surface of operation table in wafer inspection apparatus, and fixed on a position lower than the observation referencing surface.
TW085113733A 1995-11-14 1996-11-09 The inspection apparatus, storing unit & convey system for wafer TW330911B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP29507595A JPH09139415A (en) 1995-11-14 1995-11-14 Wafer housing device
JP30240995A JP3713772B2 (en) 1995-11-21 1995-11-21 Wafer observation equipment
JP7302407A JPH09148394A (en) 1995-11-21 1995-11-21 Wafer conveyer
JP7302408A JPH09148391A (en) 1995-11-21 1995-11-21 Wafer observing apparatus

Publications (1)

Publication Number Publication Date
TW330911B true TW330911B (en) 1998-05-01

Family

ID=58262641

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085113733A TW330911B (en) 1995-11-14 1996-11-09 The inspection apparatus, storing unit & convey system for wafer

Country Status (2)

Country Link
KR (1) KR970030586A (en)
TW (1) TW330911B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6707544B1 (en) * 1999-09-07 2004-03-16 Applied Materials, Inc. Particle detection and embedded vision system to enhance substrate yield and throughput

Also Published As

Publication number Publication date
KR970030586A (en) 1997-06-26

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent