TW328938B - The safety apparatus between SMIF arm & wafer testing machine - Google Patents

The safety apparatus between SMIF arm & wafer testing machine

Info

Publication number
TW328938B
TW328938B TW086101920A TW86101920A TW328938B TW 328938 B TW328938 B TW 328938B TW 086101920 A TW086101920 A TW 086101920A TW 86101920 A TW86101920 A TW 86101920A TW 328938 B TW328938 B TW 328938B
Authority
TW
Taiwan
Prior art keywords
wafer
arm
circuit
control
smif
Prior art date
Application number
TW086101920A
Other languages
Chinese (zh)
Inventor
Bor-Yueh Tsay
Yuh-Fuh Lin
Ruey-Chyan Wang
Der-Yun Liou
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW086101920A priority Critical patent/TW328938B/en
Application granted granted Critical
Publication of TW328938B publication Critical patent/TW328938B/en

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A safety apparatus located between SMIF arm & wafer testing machine, which is used to detect whether the wafer testing machine is finished testing work or not, includes: - Control loop, serially composed by a test-finished switch, a control switch and control circuit of SMIF arm, in which, the control circuit is connected with other loop of SMIF arm; - Emitting circuit, installed at side of SMIF arm for emitting a medium; - Detecting loop, serially composed by detecting circuit, electric power device and control switch, and corresponding to emitting circuit for detecting emitting circuit whether it is emitted medium or not; The elevating path of elevating arm of SMIF arm is intersected with medium path of emitting circuit and detecting circuit during the wafer is tested. When wafer is finished testing, the wafer boat placed on the elevating arm of SMIF arm is just blocking off the medium path, and the control switch of control loop is placed in closed status. When wafer is not finished test, the wafer boat is not blocking off the medium path, and the control switch of control loop is placed in cutting-off status. Therefore, when wafer is not finished test, whether the testing switch is activated or not, the control circuit can not be acted.
TW086101920A 1997-02-18 1997-02-18 The safety apparatus between SMIF arm & wafer testing machine TW328938B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086101920A TW328938B (en) 1997-02-18 1997-02-18 The safety apparatus between SMIF arm & wafer testing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086101920A TW328938B (en) 1997-02-18 1997-02-18 The safety apparatus between SMIF arm & wafer testing machine

Publications (1)

Publication Number Publication Date
TW328938B true TW328938B (en) 1998-04-01

Family

ID=58262470

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086101920A TW328938B (en) 1997-02-18 1997-02-18 The safety apparatus between SMIF arm & wafer testing machine

Country Status (1)

Country Link
TW (1) TW328938B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101350288B (en) * 2007-07-20 2010-05-19 中芯国际集成电路制造(上海)有限公司 Method for testing automatic material-feeding/discharging machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101350288B (en) * 2007-07-20 2010-05-19 中芯国际集成电路制造(上海)有限公司 Method for testing automatic material-feeding/discharging machine

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Legal Events

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