TW328850U - Sputtering device - Google Patents

Sputtering device

Info

Publication number
TW328850U
TW328850U TW086210347U TW86210347U TW328850U TW 328850 U TW328850 U TW 328850U TW 086210347 U TW086210347 U TW 086210347U TW 86210347 U TW86210347 U TW 86210347U TW 328850 U TW328850 U TW 328850U
Authority
TW
Taiwan
Prior art keywords
sputtering device
sputtering
Prior art date
Application number
TW086210347U
Other languages
Chinese (zh)
Inventor
Young-Kyu Park
Yeon-Hong Jee
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Priority to TW086210347U priority Critical patent/TW328850U/en
Publication of TW328850U publication Critical patent/TW328850U/en

Links

TW086210347U 1996-09-16 1996-09-16 Sputtering device TW328850U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086210347U TW328850U (en) 1996-09-16 1996-09-16 Sputtering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086210347U TW328850U (en) 1996-09-16 1996-09-16 Sputtering device

Publications (1)

Publication Number Publication Date
TW328850U true TW328850U (en) 1998-03-21

Family

ID=54629384

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086210347U TW328850U (en) 1996-09-16 1996-09-16 Sputtering device

Country Status (1)

Country Link
TW (1) TW328850U (en)

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