TW326970U - Device for transferring plate-like objects - Google Patents

Device for transferring plate-like objects

Info

Publication number
TW326970U
TW326970U TW086210352U TW86210352U TW326970U TW 326970 U TW326970 U TW 326970U TW 086210352 U TW086210352 U TW 086210352U TW 86210352 U TW86210352 U TW 86210352U TW 326970 U TW326970 U TW 326970U
Authority
TW
Taiwan
Prior art keywords
objects
transferring plate
transferring
plate
Prior art date
Application number
TW086210352U
Other languages
Chinese (zh)
Inventor
Katsumi Ishii
Hisashi Kikuchi
Original Assignee
Tokyo Electron Ltd
Tokyo Electron Tohoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Tokyo Electron Tohoku Kk filed Critical Tokyo Electron Ltd
Publication of TW326970U publication Critical patent/TW326970U/en

Links

TW086210352U 1993-10-04 1994-10-26 Device for transferring plate-like objects TW326970U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27130793A JPH07106402A (en) 1993-10-04 1993-10-04 Platelike material transfer system

Publications (1)

Publication Number Publication Date
TW326970U true TW326970U (en) 1998-02-11

Family

ID=17498229

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086210352U TW326970U (en) 1993-10-04 1994-10-26 Device for transferring plate-like objects

Country Status (2)

Country Link
JP (1) JPH07106402A (en)
TW (1) TW326970U (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6481956B1 (en) * 1995-10-27 2002-11-19 Brooks Automation Inc. Method of transferring substrates with two different substrate holding end effectors
JPH10284577A (en) * 1997-04-09 1998-10-23 Tokyo Electron Ltd Method for transferring substrate to be processed
JPH1111663A (en) * 1997-06-27 1999-01-19 Tokyo Electron Ltd Substrate conveying device
US6450755B1 (en) * 1998-07-10 2002-09-17 Equipe Technologies Dual arm substrate handling robot with a batch loader
JP2007005582A (en) 2005-06-24 2007-01-11 Asm Japan Kk Substrate transfer apparatus and semiconductor substrate manufacturing apparatus mounted with the same
KR100774981B1 (en) * 2006-07-24 2007-11-08 세메스 주식회사 Apparatus and method for transferring substrate
JP5100179B2 (en) 2007-03-30 2012-12-19 大日本スクリーン製造株式会社 Substrate processing equipment
JP2010067871A (en) * 2008-09-12 2010-03-25 Dainippon Screen Mfg Co Ltd Substrate conveying apparatus and substrate processing apparatus including the same
KR101181560B1 (en) 2008-09-12 2012-09-10 다이닛뽕스크린 세이조오 가부시키가이샤 Substrate processing apparatus and substrate conveying apparatus for use in the same
JP5303301B2 (en) * 2009-02-06 2013-10-02 日本電産サンキョー株式会社 Industrial robot
JP4973675B2 (en) * 2009-02-26 2012-07-11 東京エレクトロン株式会社 Substrate processing apparatus and substrate processing method
JP6122256B2 (en) * 2011-08-12 2017-04-26 芝浦メカトロニクス株式会社 Processing system and processing method
JP2021197374A (en) * 2020-06-09 2021-12-27 川崎重工業株式会社 Substrate holding device

Also Published As

Publication number Publication date
JPH07106402A (en) 1995-04-21

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