TW326573B - Fabrication method of SRAM and its polysilicon loading resistance - Google Patents
Fabrication method of SRAM and its polysilicon loading resistanceInfo
- Publication number
- TW326573B TW326573B TW085111431A TW85111431A TW326573B TW 326573 B TW326573 B TW 326573B TW 085111431 A TW085111431 A TW 085111431A TW 85111431 A TW85111431 A TW 85111431A TW 326573 B TW326573 B TW 326573B
- Authority
- TW
- Taiwan
- Prior art keywords
- driver
- inter
- poly
- supply voltage
- layer
- Prior art date
Links
Landscapes
- Semiconductor Memories (AREA)
Abstract
A fabrication method of SRAM and its polysilicon loading resistance includes the following steps: a. forming a MOS driver on the substrate, depositing a inter-poly-dielectric layer on the MOS driver and defining a pattern on the above layer to form one or plural holes. b. depositing a thick polysilicon layer on the inter-poly-dielectric layer c. using the first ion implanting to uniformly dope the thick polysilicon layer d. defining the polysilicon layer to be a driver coupling area which is connected to the driver and the supply voltage coupling through the holes on the inter-poly-dielectric layer. e. depositing a thin polysilicon layer on the driver, the supply voltage coupling area, and the part of the inter-poly-dielectric layer between the driver and the supply voltage coupling area. f. Using the second ion implanting on the thin polysilicon layer to form a loading resistance area which is conncted to the driver coupling and the supply voltage coupling.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW085111431A TW326573B (en) | 1996-09-18 | 1996-09-18 | Fabrication method of SRAM and its polysilicon loading resistance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW085111431A TW326573B (en) | 1996-09-18 | 1996-09-18 | Fabrication method of SRAM and its polysilicon loading resistance |
Publications (1)
Publication Number | Publication Date |
---|---|
TW326573B true TW326573B (en) | 1998-02-11 |
Family
ID=58262287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085111431A TW326573B (en) | 1996-09-18 | 1996-09-18 | Fabrication method of SRAM and its polysilicon loading resistance |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW326573B (en) |
-
1996
- 1996-09-18 TW TW085111431A patent/TW326573B/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |