315312 A7 B7 五、發明説明（'） 本發明是鬭於一套真空条统，其具有淨化廢氣.之功能 ,此廢氣含有在高於室a下可凝结的成份；其具有至少 * 一套真空幫浦設備以産生一《介於.吸氣管輿氣《接管間 到5倍的β差；其具有至少一具連接在其後的淨化裝置 ，其具有至少一具由吸收器、燃燒爐、氣«淸洗器、氣 匾反應器和中和器等所組成之設備，以用於由真空幫浦 裝置所供襄之液«介質。以上所提之真空幫浦装置輿淨 化装置奋至少一具共同形成一套组件單元。 此種真空糸统可舆例如半導鼸工業的生窿設備结合蓮 用，其中使用大的有毒及反應性氣鼸。所以在例如化 學塗層方法中，即所諝之CVD程序中，會使用例如特定 之矽氫、磷氫、硼氫、TEOS等氣鼸。在乾式蝕刻過程中 會使用大量的《及氯化合物。因為逭些有《的*理程序 是在真空狀態下進行，所以前面所述技蕕的各類氣鱧持 鑛的被抽出。也因為逭對環塊有相當大程度的危害，因 此必須對真空幫浦之廢氣加以淸潔淨化，對此，會有一 条列的廢氣淨化方法/系统可供使用。 在真空幫浦之後安裝的廢氣淨化条统，在其内會進行 下列的淨化程序是缳所周知的： 經濟部中央橾準局貝工消费合作社印製 (請先閲讀背面之注意事項再填寫本頁) -将氣臞轉化成》類，如此，則氣臞會轉化為憎性的固 體〇 -以随後的中和作用來燃燒及洗淨氣釀，使得原始的氣體 可被轉化為已溶解的固讎，然後可被除去。 -以待殊吸附酋吸收氣使氣謹與吸附&的表面銪合 本纸張尺度逋用中國國家摞準（CNS ) Α4规格（210X297公釐） 315312 經濟部中央梂準局貝工消费合作社印策 A7 B7五、發明説明（> ) >且此吸附塾則鎮入繊罐或套筒之中（例如活性硪和 沸石>。 許多半導讎元件的生産設備會輿收集管路相連接也是 已知的。因為逭些在鵪別生産設備中蓮作的生産過程並 非同步發生，所以會在收集管路中形成混合氣醮，其一 部份之成分會相互反謳且形成新的，有些是有害的化合 物。 在先前技術中，有可能會出現下列缺酤：至少有一部 份的氣釀會在有矚的管輅中凝结，而在稍後的時刻再昇 華為氣逭不但造成高的維修及淨化成本，且對執行 此工作之人眞造成危寄。遴裡尤其危除的是某些《化物 ，其會輿空氣薄度反醮形成氫氱酸，並以液釀形式存在 於上述的管路条统中。只要少許幾滴氫氟酸即會黢重腐 蝕皮虜，而蒸氣和氣》形式的氟化栴則會對呼吸器官造 成重大傷害。 因為會在廢氣淨化条統中産生只是表面上的更佳淨化 效果，所以前述之有窨物霣於管路中凝结，有些會被將 就接受。 然而管路的淸潔淨化顯示出對瓖塊、人證以及對設備 的一種很大的風險性：因為逭些嫌结杨有些曾使凸»連 接形成不密封狀，或甚至腐蝕穿透管路。另外，廢氣反 向擴敢（Rueckdiffusion)至真空泵中會被觀察到，其中 ,例如乾燥泵之程序會受到干j»。 經由專利第DE 43 1 4 942 Α1»可知：将一分離器和 -4 -. (請先聞讀背面之注^^項再填寫本頁) ----Λ--裝. 訂 ^丨線 本纸張又度逋用中國困家標準（CNS > A4洗格（210X297公釐） 經濟部中央梂準局貝工消費合作社印装 A7 __B7_ 五、發明説明（4 ) 一抽風a設置於一共同的基座框上·且此抽ae安置在 分離器之後。因為經由抽iaa只能産生一般的飫壓，所 以逭«已知的設ίι是既不被預先考盧且不適合被用作真 空蓮轉。連接管路之污染两理並不會因分離器輿抽風庙 已知的排列順序而産生。 本發明的目的在於：提出一β在鬩隳已描述的類型， 其具有明願之減少安置面積的真空糸统，在逭之中«结 的形成會以先前提及的结果而停止，但至少在整《主要 質μ上會受限制。 依據本發明，此目的的解決方法可藉由两頭所述的真 空条統來逹成：谊届真空泵装置具有一銪三蕖乾式轉子 泵，此泵蓮作於一介於1(Γ2 «巴和1100毫巴之間的κ力 範園。 此種三葉乾式轉子泵有以下的特性和®黏： 1. 有离的氣臞釋出粗度。 2. 低的壓力波動。 逭些泵依照本發明的使用方法，鞴由舆淨化装置整合 為一組件單元來獲得很大之擾貼，除此之外.可提升已 考盧的淨化裝置之蓮轉方法，持别是在，牽涉到以火焰 操作的燃燒爐時。 除此之外，可以不用排氣消音器。逭櫬有額外的好處 就是：廢氣路徑並不會因為消音器及其内部表面積而加 大。能源的損耗也因此減少了，以及具潛在危敝性的淸 潔位置消失了，因為消音器是一種謳有寄物質容易凝結 本紙張尺度逍用中國國家揉率（〔泌）入4规格（210乂297公釐） _·· __ * __- U _L _ . ϋ^—· —^1 ·ϋ B_i^i t^i n ϋϋ n (請先閲讀背*之注^|^項再填寫本頁) 訂 經濟部中央標率局負工消费合作社印装 A7 _B7_五、發明説明（4) 在此處的装置。 埴是是有鼷一種協同作用（synergistischen)的效果 :由真空幫浦装置釋出的熱S氣以雄可能短的途徑、以 最短的時間和很高的粗度到建淨化装置處。在冷起動時 逭種凝结的風險依下述方式排除，首先利用空氣將氣鼸 連接管瘺節至希望的湛度，然後再引導含有有害物質的 廢氣進入氣體連接管。 以廢氣的流動方向來看，如果将三藥乾式轉子泵當 作第一段設置在魯氏泵（Rootspuipe)之前是特别有利的 。該魯氏泵操作在K力範鼷為1<Γ3毫巴與10毫巴之間。 一種待別堅固又有效的淨化条統将會産生，笛 a) 淨化裝置具有一燃嬈爐，且燃嬈鑪設有一能用於待淨 化之廢氣的输送管、一燃蟯氣醴输送管、一空氣輸送 管和一用於淸洗液之輸送管。 b) 在燃嬈爐下方設有一反《室以作為燃燒廢氣和淸洗液 之接鼸用。 c) 反*室經一回收営與一收集槽連接，收集槽設於反 窿檐下方在真空泵裝童旁，逋«此泵，在循瓛中的淸 洗液可回流至燃嬈爐内。 若魯氏泵和三葉乾式轉子泵是上下裝設在一起.且三葉 乾式轉子泵的氣醱連接管在魯氏泵和反*室旁往上引導至 燃燒燼，則结構尺寸會繼鑛變小。 為了避免囔出之霧狀氣饑曾進入廢氣管，在燃蠊艙和 廢氣管之間裝設一氣體溶0遇濾器是很有利的，在此遇 (請先閲讀背面之注$項再填寫本頁) Λ ^^1 —^1 1^1 I In ml ! I: ^^1 .Lr— HI —Lr In m m tan 本纸張尺度逋用中國國家梂準（CNS ) A4规格（2丨0X297公釐> 經濟部中央梂準局貝工消费合作社印製 A7 B7 五、發明説明（r) 濾器内會有另外一條管子注入，以用來输送一部份的淸 洗液。 此氣體溶顧a濾器例如是一叢或一圃金颺線、及/或 一组有洞的鐵皮、濾網、及/或余羼嫌》所组成，以用 來接收喷出的水或掖狀》。此淸洗液會由上往下噴出（ 例如經由一錐形嘖嘴），然後在氣麵溶騙遇濾器中輿由 下注上升起之廢氣再次作密集之交換作用，使淸潔淨化 的效果更強。 B有優黏是：若在氣齷建接管中裝設一轉換N,經由 此可讓磨氣龌择性地输送調燃蠊譫和廢氣管。藉此，使 得設備在替換淨化装置時蓮能繼鑛蘧作。 逭籲淨化裝置有利的方式是由至少一鴒含吸收器、燃 规遽、氣體淸洗器、氣體反窿器和中和器的裝置所構成。 在以下，依*圔一和Η二來更進一步曙述兩鲡本發明 ft件的實施例。 其中： 1 一籲完整淨化糸統之部分两放的前視圈，和 2根癱111之物件的變型之下半部。 1中顔示了 一儀淨化条统1 :在一錮四方形、水平 的基座框2上，有一镇魯氏泵4a和三藥乾式轉泵4b依序 排列組成的真空泵装置4固定於其上。整镇傳動是經由 別之霣動馬連5和正曲輪装置6來逢成，逋也是真空泵 4a和4b的完轚組件。 真空泵裝置4具有一吸管7,吸管經遇一管路連接器 本紙張尺度適用中國國家揉準（CNS ) A4规格（210X297公釐） (請先閲讀背面之注$項再填寫本頁) •裝 -練 315312 經濟部中央橾準局貝工消费合作社印装 A7 B7 五、發明説明（6 ) 8舆一傾在此圈未顯示之半導龌结構元件之生産設備相 連。裏空泵装置4的S力例是經由一僱氣釀建接管9達 接在一《淨化装置10上，此淨化裝置在目前的情況，設 置成一具有燃蟯器的燃蟯瀘，且具有一垂直之主轅A-A 。一镰逋樣的淨化裝置之建構方式會在以下更進一步詳 述，因此前面提供之内部结構纗節只略作提示。燃燒氣 讎會經由管路11翰送，而淨化邊的輿符合TA-空氣法律 規定的廢氣，會經由一廢氣管12耷即或缦遇一條在此_ 未顧示之收集管排出至大氣中（「ΤΑ-空氣j英文是「 TLV= T h r e s h ο 1 d - L e v e 1 - v a 1 u e j for a i r ) 〇 基座框2由四褊支»13、一 «中靥框14和一禳上跚框 15來完成一承載架構，此架構至少在基座框2和中層框 14之間的B域可用在一未示出之供壁元件來鎮住。必須 芘知的：在一想像之矩形方塊内装設真空泵裝置4和淨 化裝置10，而此方塊之水平横切面由基座框2的外豳和 垂直的支»13來確定。 此淨化装置10配備了一燃蟯爐21,氣讎輪送管9會經 遇一轉換閥22和一截管9a注入此燃蟯鑪内。燃燒氣Μ則 經由管11來輪送。管23是作為输送特定董的燃纗空氣， 使燃嬈能在氣氣遇下進行。淸洗液，例如氫氣化鉀 溶液（Κ0Η),則經由0 —管24來輪送，且藉由來進一步 顯示之錐形噴嘴以維狀喷出。此淸洗液經由收集槽25被 引導回路中。 再往下是一連接在燃蟯爐21的反應室26,在此室内繼 本紙張尺度逋用中困國家梂準（CNS > A4规格（210XW7公釐） m·' m 1 ^ ^ I 1^1 i (請先閲讀背面之注意事項再填寫本頁) " 線 經濟部中央梂準局貝工消费合作社印装 A7 B7 五、發明説明（^ ) 鑛以淸洗液來轉換燃嬈氣鼸，而淸洗液最終經由收集管 27導囲到收集槽25内。 燃燒氣讎最後向上流動，且受引導而流» 一氣驩溶® »濾器28,另一管子29注入此遍濾器28之中以輪送來自 收集榷25之淸洗液，逋條管的末靖邐有一未進一步顯示 的錐形« _。 S有一截管9b從轉換閥22 至廢氣管12。在正常的 設備運轉中，截管9b是封閉的。只有在很短的片刻，也 躭是在更換或淸潔燃燒《21及/或反謳室26時，廢氣才 能直接導入廢氣管12中。 2顯示：整籲真空条统也可以安装渗轔3,使得移 動位置比較方便。然而在管路達接器8和真空泵装置4 的吸氣澜之間的組件單元内裝設有一遇濾器31和一封閉 閥32。後者有一優點：在真空泵装置麵轉時，也可以作 .淨化装置的替換及/或維修，以便直到重新鬭工起動都 能維待瀛度。因此，此設備可以準備馬上全速蓮轉，可 避免在真空泵裝置内有害物質的凝結。此封閉閥32是由 装配其中的控制器16所操控，有了逋镶，就不需要外部 的控牖和接線了。 谊整籲组件是完掌密封的，所以不會有太多的污染産 生。 . 在中靥框14上方安装有一中央控制器16,控制器16具 有一输入鍵盤17和一顯示装置18。此控制器16是經由一 些資料線和控制鎳19輿真空泵裝置4及/或所颶的Μ節 本紙張尺度逋用中國8家輮準（CNS ) Α4规格（210X297公釐） • ; f , ml- .ϋ^— - nn -^1^1 fl^i (请先閲讀背面之注$項再填寫本頁) 訂 線 經濟部中央搮準局貝工消费合作杜印«. 315312 A7 B7 五、發明説明（？） 器相連接，此處檩示之二條嫌19代表所有線路。藉由中 央控制器16和嫌19,可傅送例如馬逢两η、冲洗閥和冷 水蘭的控制指令。相反地.調節.信號會透遢線19來通知 控制器15 ,必要之時，資訊亦會傳到顯示装置18以麇示 出來。 另外，中央控制器16藉由許多資料線路和控制繍路20 輿淨化裝置10達接在一起，如同上例逭些鑲路只由兩條 嫌路做為代表呈現於上。在氣驩逢接管9中，例如氣 讎的S力和湛度是經由嫌路20傅遞至控餺器16。同樣地 ，火焰監控、溫度監控、水流流量控制和重董拥量装置的隹號也經 由同懞方式傅蠹。藉著商量圾管的重董，來頋示吸筒的 捎耗置。控制侑號由控制器16以相反的方向傳送至淨化 裝置10。以用於水洗、熱流開_和一或許存在之旁《管 之中。於是，淨化裝置10的β別讕節器之澜量資料和控 制信號可以顯示於顧示裝置18中。且調節指令、額定值 等資料也可透《輸入鍵盤17鍵乂控Μ器16中。 由_1可得知：唯一的控制器可藉一方面由真空泵裝 置4及另一方面由淨化装置1〇的狹窄空間配置，而使用 於此二装置上。控制器同樣地也不霱要額外的放置位置 ，而可以安裝於真空泵装置4之上。由此便组成一非常 緊密的真空糸統，它可最短期間内被替代条统所替換。 而石糸统及淨化裝置的全部賫料都在操作人貝的視»内 ，可以避免分两的控制器之間的控制路徑•若前述 的裝置安置在不同的放置處•有趙擇性地安裝相當畏的 -1 〇 - 本紙張又度適用中國國象標準（CNS ) Α4规格（210><297公釐） ^^^1· utt n^— I n^i I (請先閲讀背面之注$項再填寫本頁) 訂 線315312 A7 B7 5. Description of the invention (') The present invention is a set of vacuum system, which has the function of purifying exhaust gas. This exhaust gas contains components that can be condensed above the chamber a; it has at least * a set of vacuum Pump equipment to produce a "between. Suction pipe and gas" between the pipe to 5 times the β difference; it has at least one purification device connected behind it, it has at least one by the absorber, combustion furnace, The equipment composed of gas «washer, gas plaque reactor and neutralizer, etc., is used for the liquid« medium supplied by the vacuum pump device. The vacuum pump device and the purification device mentioned above have at least one unit to form a set of unit units. Such a vacuum system can be used, for example, in combination with lotus equipment of the semiconducting industry, where large toxic and reactive gas monks are used. Therefore, in the chemical coating method, that is, the CVD process, for example, specific gas silan, phosphine, boron, TEOS, etc., are used. In the dry etching process, a large amount of "and chlorine compounds are used. Because some of the procedures of "Science" are carried out under vacuum, the various types of gas-branch ore holdings mentioned above were withdrawn. Also, because of the considerable harm to the ring block, the exhaust gas of the vacuum pump must be cleaned. For this, a series of exhaust gas purification methods / systems are available. The exhaust gas purification system installed after the vacuum pump is known to carry out the following purification procedures: Printed by the Beigong Consumer Cooperative of the Central Bureau of Economic Affairs of the Ministry of Economic Affairs (please read the precautions on the back before filling in this Page)-Convert the gas hydra into "" category, so that the gas hydra will be converted into an abominable solid.-The gas will be burned and cleaned by the subsequent neutralization, so that the original gas can be converted into dissolved The solid jade can then be removed. -Be prepared to absorb air from the chieftain, so that the surface of the paper is in conformity with the surface of the adsorbent & coupling. This paper uses the Chinese National Standard (CNS) Α4 specifications (210X297 mm). 315312 Ministry of Economic Affairs Central Bureau of Industry and Engineering Cooperative Ince A7 B7 V. Description of the invention (>) > The adsorption column is then contained in a tank or sleeve (such as active column and zeolite). Many production equipment for semi-conducting components will collect pipelines The connection is also known. Because some of the lotus production processes in the quail production equipment do not occur simultaneously, a mixed gas mixture will form in the collection pipeline, and some of its components will repulse each other and form new Yes, some are harmful compounds. In the prior art, there may be the following defects: at least a part of the gas brew will condense in the conspicuous tube, and it will not only be sublimated at a later time. It causes high maintenance and purification costs, and poses a danger to the people who perform this work. Linli especially endangers certain "chemicals" whose meeting air thinness reverses the formation of hydrotalic acid, in the form of liquid brewing Exist in the pipeline system mentioned above . Only a few drops of hydrofluoric acid will cause heavy corrosion of the skin, and the fluorinated castor in the form of steam and gas will cause significant damage to the respiratory organs. Because it will produce better purification on the surface in the exhaust gas purification system. Effect, so some of the aforementioned condensate condensed in the pipeline, and some will be accepted. However, the cleanliness of the pipeline shows a great risk to the lumps, witnesses and equipment: because of Some of the suspicions have caused the convex »connection to form an unsealed shape, or even corrode through the pipeline. In addition, the exhaust gas reverse expansion (Rueckdiffusion) will be observed in the vacuum pump, where, for example, the drying pump process will be affected Dry j ». According to the patent No. DE 43 1 4 942 Α1»: a separator and -4-. (Please read the note ^^ on the back and fill in this page) ---- Λ--install. Order ^ 丨 The line paper is again in line with the Chinese standard for poor families (CNS > A4 wash grid (210X297 mm) Printed and printed on the A7 __B7_ by the Ministry of Economic Affairs, Central Bureau of Economics and Development, Beigong Consumer Cooperative. V. Invention description (4) a is set on a common base frame and this pumping ae is placed on the separator Afterwards, because the general pressure can only be generated by pumping iaa, so the «known device is neither pre-Culu and is not suitable for use as a vacuum lotus. The pollution of the connecting pipe will not be separated due to separation The known arrangement order of Qiyu Fengfeng Temple is produced. The purpose of the present invention is to propose a type of β that has been described in Changyang, which has a vacuum system that clearly reduces the installation area, in the formation of «knots. It will stop with the results mentioned earlier, but at least it will be limited in the main quality μ. According to the present invention, the solution to this object can be achieved by the vacuum system described at the two ends: Yiyi vacuum pump The device has a europium, three-lobe, dry-type rotor pump, which is used for a kappa fan between 1 (Γ2 «bar and 1100 mbar. This type of three-blade dry rotor pump has the following characteristics and viscosity: 1. The release of coarse gas from the gas. 2. Low pressure fluctuations. According to the usage method of the present invention, the pumps are integrated into a component unit from the purification device to obtain a large disturbance. In addition to this, the lotus transfer method of the purification device in Kalu can be improved. , When it involves a furnace operated by flame. In addition, exhaust silencers can be eliminated. There is an additional benefit of 歭 榇: the exhaust gas path is not increased by the silencer and its internal surface area. As a result, the energy consumption is reduced, and the potentially dangerous cleaning position disappears, because the muffler is a kind of mailing material that is easy to condense. This paper scale is easy to use. The Chinese national rubbing rate (〔secret) into 4 specifications (210 297 mm) _ ·· __ * __- U _L _. Ϋ ^ — · — ^ 1 · ϋ B_i ^ it ^ in ϋϋ n (please read the back note * | ^ item before filling this page) The A7 _B7_ printed by the Negative Labor Consumer Cooperative of the Central Standardization Bureau of the Ministry of Economic Affairs. 5. Description of the invention (4) The device here. It is a synergistischen effect: the hot S gas released by the vacuum pump device can be used to construct the purification device in the shortest possible time, with the shortest time and a high thickness. The risk of seed condensation during cold start is ruled out as follows. First, use air to connect the gas fistula to the desired degree of fistula, and then guide the exhaust gas containing harmful substances into the gas connection pipe. From the perspective of the flow direction of the exhaust gas, it is particularly advantageous if the three-drug dry rotor pump is placed as the first stage before the Rootspuipe. The Lusch pump operates at a K force range between 1 < Γ3 mbar and 10 mbar. A kind of sturdy and effective purification system will be produced. The flute a) The purification device has a combustion furnace, and the combustion furnace is provided with a conveying pipe that can be used for the exhaust gas to be purified, and a combustion gas conveying pipe. An air delivery pipe and a delivery pipe for washing liquid. b) There is a reverse chamber under the furnace for the connection of combustion exhaust gas and washing liquid. c) The reverse chamber is connected to a collection tank via a recovery tank. The collection tank is located under the reverse eaves and is installed next to the vacuum pump. The washing liquid in the pump can be returned to the furnace. If the Lusch pump and the three-blade dry rotor pump are installed together from above and below, and the gas connection pipe of the three-blade dry rotor pump is led up to the combustion ember next to the Lusch pump and the reverse chamber, the structural size will follow the mine Become smaller. In order to avoid the mist-like gas from entering the exhaust pipe, it is very advantageous to install a gas-soluble filter between the cockroach cabin and the exhaust pipe. In this case (please read the note $ item on the back and fill in This page) Λ ^^ 1 — ^ 1 1 ^ 1 I In ml! I: ^^ 1 .Lr— HI —Lr In mm tan This paper scale adopts China National Standards (CNS) A4 specification (2 丨 0X297 Mm> A7 B7 printed by the Beigong Consumer Cooperative of the Central Bureau of Economic Affairs of the Ministry of Economy V. Description of the invention (r) There will be another tube injected into the filter to transport part of the wash liquid. This gas dissolves a filter is composed of, for example, a clump or a row of Jinyang wire, and / or a set of holes in the metal sheet, filter screen, and / or Yu Yi suspected to receive the sprayed water or tuck. The cleaning liquid will be sprayed from top to bottom (for example, through a conical nozzle), and then the exhaust gas rising from the bet will be intensively exchanged again in the gas surface decoupling filter to make the cleaning effect of the liquid more Strong. B has excellent stickiness: if a conversion N is installed in the Qiqiang construction takeover, the milling gas can be selectively transported to the combustion cockroach and exhaust pipe. The equipment can replace the purification device when the lotus is able to continue the operation. The advantageous method of the purification device is that at least one device containing an absorber, a fuel gauge, a gas scrubber, a gas reverser and a neutralizer is used. In the following, the embodiment of the ft piece of the present invention is further elaborated according to * 圔 一 and Η 二. Among them: 1 a complete purification of the two parts of the front view circle of the system, and 2 paralysis 111 The lower part of the variant of the object. 1. The middle shows a cleansing system 1: on a square, horizontal base frame 2, there is a town's Lusch pump 4a and a three-drug dry pump 4b in order The arranged vacuum pump device 4 is fixed on it. The whole town transmission is completed by moving the horse 5 and the positive curved wheel device 6, which is also the complete assembly of the vacuum pumps 4a and 4b. The vacuum pump device 4 has a suction pipe 7, a suction pipe After meeting a pipeline connector, the paper size is applicable to China National Standard (CNS) A4 (210X297mm) (please read the note $ item on the back and then fill in this page) • Install-Lian 315312 Central Ministry of Economic Affairs Printed by Aigong Consumer Cooperative A7 B7 V. Description of invention (6) 8 Yuyi The production equipment of semi-conducting structural elements that are not shown in this circle is connected. The S-force example of the hollow pump device 4 is connected to a purification device 10 through a gas-brewing take-over 9 and this purification device is currently The situation is that it is set up as a burner with a burner, and has a vertical main shaft AA. The construction method of a sickle-like purification device will be described in further detail below, so the internal structure provided above is only A little reminder. Combustion gas will be sent through the pipeline 11 and the exhaust gas that meets the TA-Air law in the purification side will be passed through a waste gas pipe 12 or will encounter a collection pipe here _ unconsidered Exhaust into the atmosphere ("ΤΑ- 空气 j in English is" TLV = T hresh ο 1 d-L eve 1-va 1 uej for air) 〇The base frame 2 is composed of four branches »13, a« medium frame 14 and A frame 15 is completed to complete a load-bearing structure. At least the B area between the base frame 2 and the middle frame 14 can be squeezed by a wall supply element (not shown). It must be known that the vacuum pump device 4 and the purification device 10 are installed in an imaginary rectangular block, and the horizontal cross section of this block is determined by the outer frame of the base frame 2 and the vertical branch »13. The purification device 10 is equipped with a burner furnace 21, and the gas feeder pipe 9 is injected into the burner furnace through a switching valve 22 and a cut tube 9a. The combustion gas M is rotated through the tube 11. The pipe 23 is used to convey the combustion air of a specific Dong, so that the combustion can be carried out under the condition of the gas. The washing solution, for example, potassium hydroxide solution (Κ0Η), is rotated through the 0-tube 24, and the cone-shaped nozzle further shown is sprayed in a dimensional manner. This washing liquid is guided into the circuit through the collecting tank 25. Further down is a reaction chamber 26 connected to the burn-in furnace 21, in this room following the paper standard, the national standard of the middle and poor countries (CNS > A4 specification (210XW7 mm) m · 'm 1 ^ ^ I 1 ^ 1 i (please read the precautions on the back before filling in this page) " A7 B7 printed by Beigong Consumer Cooperative of the Central Bureau of Economics and Development of the Ministry of Economic Affairs 5. Description of invention (^) The mine converts the fuel gas with the washing liquid The washing liquid is finally guided into the collection tank 25 through the collection tube 27. The combustion gas finally flows upwards and is guided to flow »Yiqi Huanrong®» filter 28, another tube 29 is injected into the filter 28 China-Israel rotates the washing liquid from the collection 25. At the end of the pipe, there is a cone «_ which is not further shown. S has a cut-off pipe 9b from the switching valve 22 to the exhaust pipe 12. In normal equipment operation , The cut-off pipe 9b is closed. Only in a short moment, when it is replaced or cleaned and burned "21 and / or the retort chamber 26, the exhaust gas can be directly introduced into the exhaust pipe 12. 2 shows: the whole vacuum The system can also be installed with seepage 3, which makes the moving position more convenient. However, in the pipeline reach adapter 8 and vacuum pump device 4 The module unit between the suction tank is equipped with a filter 31 and a closing valve 32. The latter has an advantage: it can also be used for the replacement and / or maintenance of the purification device when the vacuum pump device is turned on the surface, so that The start can be maintained at all times. Therefore, this equipment can be ready to rotate at full speed immediately to avoid the condensation of harmful substances in the vacuum pump device. The closing valve 32 is controlled by the controller 16 equipped with it, , There is no need for external control and wiring. The assembly is completely sealed, so there will not be too much pollution.. A central controller 16 is installed above the middle frame 14 and the controller 16 has An input keyboard 17 and a display device 18. The controller 16 controls the nickel pump 19 and the vacuum pump device 4 and / or the current M paper format through some data lines and uses the Chinese 8 standard (CNS) A4 specifications (210X297mm) •; f, ml- .ϋ ^ —-nn-^ 1 ^ 1 fl ^ i (please read the note $ item on the back and then fill in this page) Cooperation Du Yin «.315312 A7 B7 V. Description of invention (?) The controller is connected, and the two lines shown here represent all 19 lines. With the central controller 16 and 19, control commands such as Ma Fengliang, flush valve and cold water blue can be sent. Conversely, the adjustment signal The controller 15 will be notified via the line 19, and if necessary, the information will also be transmitted to the display device 18 for display. In addition, the central controller 16 is controlled by many data lines and control channels 20 and the purification device 10 Together, as in the above example, some of the roads are only represented by two suspected roads. In the Qi Huanfeng takeover 9, for example, the S force and Zhandu of the Qiju are passed to the control through the suspected 20 Fu器 16. 16. Similarly, the flame monitoring, temperature monitoring, water flow control, and the device of the Dong Dong holding device are also controlled by the same method. By discussing the important director of the waste pipe, we came to show the handling of the suction tube. The control yoke number is transmitted from the controller 16 to the purification device 10 in the opposite direction. Used for water washing, heat flow, and one that may exist in the tube. Thus, the volume data and the control signal of the beta device of the purification device 10 can be displayed in the indicator device 18. In addition, information such as adjustment commands and rated values can also be entered into the keyboard 16 keys to control the M 16. It can be known from _1 that the only controller can be used on the two devices by configuring the vacuum pump device 4 on the one hand and the purification device 10 on the other by the narrow space. The controller also does not require an additional placement position, but can be installed on the vacuum pump device 4. This results in a very compact vacuum system, which can be replaced by the replacement system in the shortest period of time. The whole material of the Shitou system and the purification device are in the view of the operator shell, which can avoid the control path between the two controllers. • If the aforementioned devices are placed in different places Installation is quite daunting -1 〇- This paper is again applicable to the Chinese National Elephant Standard (CNS) Α4 specifications (210 > < 297mm) ^^^ 1 · utt n ^ — I n ^ i I (please read the back first Note $ item and then fill this page)
B 9 /_V 明 説 明 發 、 五 用 B 以有 可一 也作 ,製 下以 況 ， 情中 I 6 的 1 要器 霱 _ 在控 。央 的中 要入 必加 是機。 路表件 管列文 料或的 *器數 及錄參 制記轉 控一蓮 (請先閲讀背面之注意Ϋ項再填寫本頁) •裝_ 訂 線 經濟部中央揉準局貝工消费合作社印製 本紙張尺度逋用中國國家梂準（CNS ) A4規格（210X297公釐）B 9 / _V clearly shows that hair, five-purpose B can also be done with one or the other, under the following circumstances, in the case of I 6 1 key device _ in control. The central entry must be added to the opportunity. The number of documents and the number of devices in the road surface management and the record of the record and the transfer control of a lotus (please read the note Ϋ on the back and then fill out this page) The size of the printed paper adopts China National Standards (CNS) A4 specification (210X297mm)