TW309510B - - Google Patents

Description

A7 B7 V. Description of the invention (1) [Industrial application field] The present invention relates to an invention for manufacturing a quartz glass article formed by forming protrusions on at least one surface of a quartz glass body, and particularly relates to a product used in the semiconductor industry Quartz glass components are efficiently manufactured, such as the flange part of the furnace core tube, the top plate or bottom plate of the vertical wafer carrier, the lateral plate of the horizontal wafer carrier, and the quartz glass cap of the furnace core tube. The inventor of a quartz glass article having protrusions, fitting parts, flange parts, etc., for a mold and its parts. 〔Conventional technology〕 In the past, when a quartz glass member with such a complicated shape was to be manufactured, a quartz glass flat plate was heated by a burner to perform heating of a quartz glass welding rod. After welding, a filler was applied in sequence, and the filler portion was ground by machining. The specified shape, or manufactured by cutting out of the quartz block. However, due to the longer processing time required for the processing of the filler of the welding rod, and if the welding speed and heating temperature are not adjusted satisfactorily, bubbles are generated. Therefore, a high degree of proficiency in the operation is required, and there are The problem of poor working environment. In addition, the cutting of the block material has a problem that the yield of the material is large, and it takes a long time to grind the processing. In order to solve these shortcomings, a heat forming method for forming the protrusions by heating and softening the quartz glass body in a forming mold is reviewed. In this forming process, in order to form the projections with good accuracy, the forming temperature must be about 1750 ~ 1900 ° C higher than the heating and softening temperature (1600 ° C) of quartz glass. The size of this paper is printed in Chinese National Standard (CNS> A4 size (210X297mm) (please read the note on the back first.-Matter Γ: write this page) Printed by the Ministry of Economic Affairs Central Standards Bureau Beigong Consumer Cooperative Printed-4 -300510 A7 £ 7_ printed by the Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy V. Description of the invention (2) At high temperatures, CO or C02 is produced due to the reaction between graphite and quartz glass, and S 02 'Evaporated gas' and these gases enter the softened quartz glass, no bubbles will be generated, and si C generated according to the above reaction adheres to the surface of the quartz glass, and when the temperature is lowered to normal temperature, cracks will occur due to the difference in thermal expansion rate of the two. Therefore, For example, in Japanese Patent Publication No. Sho 6-2-5 0 4 1 4, it is designed that the inner surface of the above-mentioned forming frame is covered with a graphite-like fabric to escape CO or CO 2 or Si 02 steam from the fiber layer. Technical Department The actual embodiment disclosed in the specification is maintained at 1 8 5 0 ± 5 ° C for 30 minutes, and is successfully formed by pressure forming at 0.4cg / cm2 in an inert gas N2 ambient atmosphere. This is the graphite covered inside The quality of the fabric escapes the steam gas such as Si02, and prevents the gas from becoming bubbles and mixing into the product to improve the yield. [Problems to be solved by the invention] However, the composition of the above-mentioned suspected maintenance layer is covered if the raw material When the ingot is melted and adheres to the buffer material of the side wall, the exhaust passage is only the air hole portion of the buffer material of the side wall portion, and the gas stays on the bottom side. The gas stay at the bottom is related to extremely serious defects. In order to prevent such defects, Japanese Patent Publication No. 5-1 7 1 7 4 proposes to set the above heating temperature at a lower temperature of 1 600 ° C to 1 700 ° C, and the through hole uses a forming hole with an air hole of about 3mm and is applied with no pressure to form the device. The paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210X297 mm): (Please read the back first Note Gong Ming thing Complete this page)

X Ding-5-A 7 B7 printed by the employee consumer cooperative of the Central Bureau of Standards of the Ministry of Economy V. Description of the invention (3) However, in this type of organization, the heating temperature is 1 6 0 0 ° C ~ 1 7 0 0 ° C lower The viscosity becomes higher, and because there is no pressurization, when the article of the present invention is used, the projection of the flat surface cannot fully carry out the spreading of molten glass, and the processing with excellent accuracy cannot be performed. The present invention has been made in view of such shortcomings in the past, and its object is to provide a method for manufacturing a quartz glass article having protrusions that can produce no bubbles and no devitrification or cracks on the surface, and can achieve excellent accuracy The inventor of quartz glass articles processed in degrees. [Means for Solving the Problems] First, the forming method of the present invention will be described. This processing department sets the heating temperature at 1 7 5 0 ~ 2 1 0 0 ° C left

Right, ideally set at 1840 ~ 1960 ° C. At this time, when the natural quartz glass manufactured by the oxyhydrogen flame is used, the heating temperature is set to about 1 8 4 0 ~ 1 900 0 ° C, and when the natural quartz glass manufactured by the electric melting method is set, the heating temperature is set Around 1 9 0 0 ~ 1 9 6 0 ° C. Therefore, since there is no conventional technology like the latter mentioned above, the heating temperature is not too low and the viscosity becomes low, which can improve the ease of forming. As such, the forming can also be performed without pressure, but if it is performed without pressure, It is less ideal to change the pressure by the weight of the die. On the one hand, when the pressure is set to increase as described above, the contact between the graphite frame and the fused silica glass will be excessively strengthened, resulting in the generation of reactive gas and the devitrification effect according to S i C fixation , And the crystalline recrystallized paper size adopts the Chinese National Standard (CNS) A4 specification (210X297mm) (please read the precautions on the back first / fill in this page) -β τ -6-309510 a? Β7 5. DESCRIPTION OF THE INVENTION (4) The problem of the formation of a layer of crystal (barytes). The forming processing method used in the present invention is to perform pressure forming under the above high-temperature heating and with a slight pressing force in the range of 0.001 to 1 kg / cm2. In this way, the molding frame of the quartz glass article is in a molding space with a graphite frame around it, a mother mold corresponding to the protrusion is arranged on the lower side through the quartz glass body, and a bearing of the glass body is arranged on the upper side The table is fixed to the receiving table, and the micro-pressure is applied to the back side of the master mold to perform pressure molding. The above-mentioned minute pressure is the temperature range before the quartz glass body starts to deform. Ideally, the pre-press is applied to the master mold from a temperature range below about 1 6 0 0 ~ 1 6 5 0 ° C to maintain the pressurized state. It is suitable to carry out press forming under high temperature heating while moving the master mold a certain distance as the above-mentioned quartz glass body softens. In addition, the press forming is performed at a temperature in the forming space of about 1 7 5 0 ~ 2 1 00 ° C, preferably when the temperature reaches the above heating temperature range of 1 840 ~ 1 900 0 ° C. The moving stroke position of the master mold is maintained for a predetermined time. Specifically, although it is maintained for 5 to 20 minutes according to the shape of the protrusion, it is preferably maintained for 10 to 15 minutes. It is best to wait for the deformation of the quartz glass body to be completed. After molding, the master mold is lowered to the restoration direction and the pressure is released. Furthermore, the moving speed of the master mold until the completion of the movement is a slow speed of 2 to 10 mm / mi η, preferably set at 3 to 5 mm mi η. In addition, the heating rate is in order to quickly reach the above 1 7 5 0 ~ This paper scale is applicable to the Chinese national standard falcon (CNS > Α4 specification (210X297 mm) ι-ί Printed by the Employee Consumer Cooperative of the Central Prototype Bureau of the Ministry of Economic Affairs * -* (Please read the notes on the back 'fill this page)

-7-A7 __B7_ 5. Description of the invention (5) The heating temperature of 2100 ° C is preferably set at 35 ~ 183 ° C / mi η. After the forming of the glass body is completed, lower the table to the outside of the furnace while keeping the temperature in the furnace at a predetermined temperature, and then take out the forming frame on the cooling table and close the top with a quartz glass cover. Avoid chilling on the cold side. In addition, the forming frame includes a graphite frame surrounding the forming space, a master mold corresponding to the protrusions in the graphite frame with the quartz glass body interposed therebetween, and a receiver. The composition of the two graphite molds is different. That is, the mother mold and the bearing table that are in contact with the quartz glass body during pressure forming have a gas permeability of 0 lcm2 / sec (p: l. 5 kgf / cm2 ) The above and the compressive strength is 100 kgf / cm2 or more, more preferably 1 50 ~ 600kg f / cm2, Shore hardness is more than 10, more preferably about 15 ± 2 sintered graphite has Most tiny gas perforation holes are made of high-purity graphite materials with gas permeability. It is ideal to form a graphite material with large bending strength in several stages with the bearing table (hereinafter, the mother die and the bearing table are called push-out dies). At this time, the apparent density of the above-mentioned master mold and the bearing table is set to 1.5 g / cm 3 or less, preferably 1_ 2 ± 0_ 2g / cm3, and the flexural strength is set to 3 0 kg / cm2 or more ’, more preferably 5 0 ~ 30〇kg / cm2. This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 1: 8-(please read the notes on the back first?-Fill in this page) Λ Order the Central Sample Bureau of the Ministry of Economic Affairs Beigong Consumer Cooperative Printed this year Month I a. Z5 λ7

St. 5. Description of the invention (6) In addition, the purity of the graphite of the master mold and the bearing table is set to be higher than that of the quartz glass body. Specifically, Na, Li, Ca, Mg, Fe The metal elements that are the cause of the semiconductor cracked body or the crystalline metal layer of crista0 balite are set at 0.1 to 0.2 ppm or less ". The average of the mother mold of the above-mentioned ejection mold and the graphite of the bearing table will be formed. The particle size is set to 3 0 ~ 1 5 0, preferably set to 50 ~ 100 from [action] The present invention sets the heating temperature to about 1 7 5 0 ~ 2 1 0 0 ° C and higher than before, in In the state of reducing the viscosity of the quartz glass body, and from the mother mold used to form the protrusions, in other words, one is facing the direction of anti-gravity, the pressure is applied to the small pressure side, and the forming is carried out. There is a change, and the pressure is slightly pressurized. Therefore, the contact between the graphite frame and the fused silica glass will not become excessively strong, which can suppress the generation of reaction gas and the devitrification effect caused by the si C fixing. Also, in the above-mentioned first prior art Reveals the method of applying pressure from two directions symmetrical to the base material to perform press forming, but in this method, especially at small pressures, the stress generated by the self-weight of the pushing die above can easily change and cannot be performed with excellent accuracy Degree of shaping. Furthermore, in the present invention, a master mold is arranged below, because the master mold has a structure in which the softened quartz glass skull is directly recessed, and it becomes a protruding shape with excellent accuracy. In addition, because the upper side of the forming frame bears the fixed pressure of the platform system, it is not necessary to open the paper. The standard of the paper is applicable to the Chinese National Standard (CNS > A4 specification (210X297 mm) -9------------ -------. tT ------ ^ (Please read the notes on the back ^ item first and then fill out this page) Printed by the Employees Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 309510 A7 B7 Printed by the consumer cooperative V. Description of the invention (7) The upper side of the furnace is only opened on the lower side of the furnace where the master mold is moved. The result is that in the previous configuration of the upper opening of the furnace, every time the furnace is opened The temperature in the furnace is lowered to around normal temperature and below-the temperature rise time of the forming process was time-consuming, but it can be left as a high-temperature ambient atmosphere in the furnace below the open furnace, so it is very advantageous as a device for performing continuous forming. The small pressure on the master mold is caused by the deformation of the quartz glass body. The pre-pressing temperature is applied to the master mold in the previous temperature field. Therefore, slowly forming, in other words, slowly forming with the degree of heating and softening, can perform the above-mentioned excellent precision forming processing. Also, the present invention achieves a temperature of 1 7 5 0 in the forming space. 2 1 0 0 ° C. Move the master mold ^ 1 at a time, keep the position of the dynamic stroke for a predetermined time, and allow the slight pressure of the master mold to move only a minute to wait for the deformation of the quartz glass body to sleep. Even if the above protrusions are complex shapes No sagging or the like can be easily performed. The molding process with excellent accuracy can be easily performed. Then, when the above-mentioned molding is completed, the master mold is immediately lowered to the restoration direction to release the pressure. Therefore, even if the temperature difference is caused by the difference in thermal engraving expansion rate The shrinkage of the frame can also be escaped on the side of the bearing table with fixed pressure There is no risk of damage to the forming frame. After completing the forming of the glass body, the table is lowered to the outside of the furnace under the state of maintaining the temperature in the furnace at the predetermined temperature. Then »Close the top of the frame with a quartz glass cap— * Face to avoid rapid cooling—. Face to implement rapid cooling 0. In the above device, increase the heating rate at 3 5 8 1 3 ° C / Please read the back page Λ Italian I. The paper size is applicable to the Chinese national standard (CNS> Α4 specification (210X297 Mm) Λ 10 A7 B7 V. Description of the invention (8) The rapid increase of mi η and the rapid completion of the formation can suppress the devitrification caused by the formation of the reaction gas and the fixed installation of S i C. The protruding shape of the above-mentioned master mold is a complex shape, and it can be formed with excellent accuracy without generating seat curvature. Therefore, the moving speed of the master mold is set below 10 mm / mi η, preferably 5 mm / ni η or less ο At this time, if the above moving speed is 2mm / mi η Since the forming time will be uselessly delayed, the lower limit is set at 2 mm / mi η °. Also, according to the method of the present invention in which a flat article with protrusions is formed by applying pressure from one side of the master mold, As shown in Fig. 2 and Fig. 3, the mother mold and the bearing table are often in contact with the quartz glass body during pressure forming, so C0 or C02 is generated by the reaction with the quartz glass, and the S i C steam is only pushed out of the mold Contact surfaces. Also * Even if the Si 02 evaporative gas is generated on the outer periphery of the glass body due to the heating of the glass body, it is still printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs just before the formation of the quartz glass body (please read the notes on the back% H 'Fill in this page) It becomes non-contact with the graphite frame around it, so it is not necessary to consider the gas escape. Therefore, it is sufficient to set the gas escape path only in the above-mentioned pair of ejection molds, but it is impossible to correspond to the graphite graphite web of the prior art in the former Deformed due to the shape of the protrusion of the master mold. On the one hand, as in the latter's prior art, if the pores are perforated by about 3mm, there will be no problem in the high-viscosity quartz glass at 1 6 0 0 ~ 1 7 0 0 ° C, but if the temperature is increased to 1 9 0 0 ° When C, the size of the quartz paper is greatly reduced. The Chinese National Standard (CNS) A4 specification (210X297 mm) is applied. -11 1 £ 1. J. V. Description of the invention (9 Guang — the viscosity of the glass, which is formed in the The surface of the quartz glass article will have irregularities. So * The present invention uses materials such as sintered graphite, the graphite material body has gas permeability to form the ejection die. On the one hand, the forming accessory is completed on the above quartz glass body, because it comes from the softened quartz The bulging force of the outer peripheral surface of the glass body is accumulated and elastically pressed against the inner wall surface of the graphite frame. Therefore, the bending strength of the graphite frame is set to be greater than that of the extrusion die. Because the extrusion die system is often in contact with the quartz glass body during press molding, so If impurities are present on the graphite side according to the contact, semiconductor poison or white silica will be formed on the surface of the quartz glass body in proportion to this, and it will still become devitrification or cracks The cause of occurrence. In the above-mentioned launching station, the metal elements that will be the cause of semiconductor poisons such as Na, K, Li, Ca, Mg, Fe, etc. or the white silica layer are set at 0. 1 ~ 0 · 2ppm or less [Embodiments] Hereinafter, the present invention will be described in detail using the illustrated embodiments. However, the dimensions, materials, shapes, relative arrangements, etc. of the component parts described in this embodiment are not specifically described unless they are not specified. An example of explanation beyond the scope of the scope of the present invention. First, the forming frame used in the device will be described. FIG. 2 is a diagram showing an example of the shape of the forming frame, revealing that press forming is shown in the same figure (C) The horizontal wood 5 0 side plate 5 1 formed wood paper size is suitable for China National Standard (CNS> A4 specification (210X297mm) -12--------- "installed-(please read the back first Note: Please fill out this page again.) 309510 η A7 B7 printed by the Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. 5. The description of the frame of the invention (10). 5 1 The protrusion 5 1 a corresponds to the concave portion 1 3 a that opens on the upper side. As shown in the second (A) circle, this molding frame is arranged in a square shape graphite frame forming a molding space formed by a graphite frame 15 made of sensitive graphite and a bottom plate 12 through the quartz The glass body 8 has a female mold 1 3 having a concave portion 1 3 a corresponding to the protruding portion 5 1 a, and a receiving table 10. The receiving table 10 and the female mold 13 can be reduced in width. The receiving table 10 and The outer shape of the female mold 13 is set to be slightly smaller than the inner shape of the square graphite frame 15. Furthermore, an arm-shaped escape portion 10a is provided at a predetermined position of the receiving platform 10 corresponding to the concave portion 13a of the female mold 13 The escape portion is set to be equal to or slightly larger than the concave portion 13 a of the female mold 13. The above-mentioned female mold 13 and the bearing table 10 form a thicker one that can withstand compressive stress during a press load, and the graphite frame 15 forms a thin square frame with good heat absorption. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling in this page). Figure 3 shows an example of other shapes of the shaped frame. The quartz glass items in this example are shown in Article 3 (C ) As shown in the circle, with a protrusion 5 5, for example, as a function of the flange portion 5 6 of the vertical furnace core tube 5 5, a ring-shaped protrusion 5 is provided in the third (A) round master mold 13 opening 6 a Corresponding concave part 1 3 a. As shown in the third (A) circle, this molding frame is arranged in a circular shape graphite frame forming a graphite space 15 made of dense graphite and a molding space 11 composed of a bottom plate 12 through the above The quartz glass body 8 has a female mold 1 3 with a recess 1 3 a corresponding to the above protrusion 5 6 a, and the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). 13-Yueping B7 Economy Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry 5. Description of the invention (11) Bearing platform 10, which can be narrowed between the receiving platform 10 and the female mold 1 3, between the receiving platform 10 and the female mold 13 The outer diameter is set to be slightly smaller than the inner diameter of the simple graphite graphite 15. In addition, the stem 16 is used to place the center hole 5 6 d on the flange 56 and planted in the female mold 13, but the center hole 5 6 d may be cut after the forming is completed, which is not necessarily Necessary. In any of the above embodiments, the graphite constituting the master mold 13 and the bearing table 10 has a value of 1 cm2 / sec (p: 1 · 5kg f / cm2) or more, preferably about 0.9 cm 2 / sec. The micro gas permeation hole group, the apparent density system is set to 1.5g / cm3 or less, preferably 1.2g / cm3, the compressive strength system is set to more than 100kg f / cm2, more preferably about 1 60kg / cm2, Xiao The hardness system is set above 10, preferably about 15; the bending strength system is set above 30 kg / cm 2 and preferably about 6 9 kg / cm2; and the inherent resistance system is set at 40 # Ω · cm ο The purity of the above graphite is Na, K, Li, Mg, Ca,

Cu, Ai? Are set to 0.001 ppm or less, Fe is set to 0.15 ppm or less, and are manufactured at least from the purity of the quartz glass to be processed with high purity. In addition, the graphite materials of the receiving table 10 and the master mold 13 are formed by sintering, etc. However, at this time, the average particle size of graphite is set at 30 to 150 / m, preferably at 50 to 10,000 mm. On the one hand, the dense graphite that constitutes the graphite frame 15 and the bottom plate 12, the size of this paper is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling this page) • f order- 14-

Ϊ09510 V. Description of the invention (12) The apparent density is set at 1.8-8. 9g / cm3, the compressive strength is set (please read the precautions on the back before filling in this page), set at 700 ~ 1 050kg f / cm2, Xiao The hardness is set at about 50 ~ 80, the bending strength is set at 370 ~ 900kg / cm2, and the inherent resistance is set at 0.9 ~ 1 · 8 # 0 * cm. In addition, the pillar 16 implanted in the above-mentioned master mold 13 is preferably formed of the same material as the master mold 13, but it is not always contacted during the heating process, so it is not necessarily limited to this type. Hereinafter, the forming apparatus using the forming frame will be described. The first circle is the basic configuration circle of the quartz glass article forming device of the embodiment of the present invention. In the same circle, the lower part is opened, and the frame body 1 made of a cross-section door-shaped stone is provided with The graphite induction heater 2 is heated by the electromagnetic induction action of the electromagnetic induction heating coil 2 A in the frame 1 of the frame 1 * The heater 2 is constituted by the temperature and other control devices not shown in the circle outside the frame 1 The electric power controls the induction heating coil 2 A to control the set temperature at room temperature. The printed workbench 3a of the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs is set at the upper end. The movable dust pusher 3 is formed of graphite and constitutes the piston part 5a that connects the lower end to the hydraulic cylinder 5. Via a load tube ( load cell) 3 c can be moved up and down by the movement of the piston part 5 a. . The above-mentioned forming frame 7 is placed on the working table 3 a. The forming frame 7 is pushed upward by the drive of the hydraulic cylinder, but it is located above the bearing table 10 of the forming frame 7 by the fixed pressing rod 19. The molding frame 7 is in a state of being pushed from above and below. The fixed push rod 19 is formed of graphite and is integrally fixed to the frame 1 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) -15-A7 _ _B7_ V. Description of the invention (13) 〇 The load tube 3 c disposed between the piston portion 5 a of the hydraulic cylinder 5 and the movable pushing rod 3 is configured to measure the load during the above pushing. On the side of the hydraulic cylinder 5, a scale is vertically set up to form a pointer 3b that can extend horizontally from the side of the push rod 3 to confirm the rising distance of the movable push rod 3. As a result, the amount of displacement of the pushing frame 3 against the forming frame 7 is constituted. By observing the pointer 3 b on the scale 4 can be recognized, and confirming the rising position of the pointer 3 b, the completion of forming can be visually recognized. In addition, the completion of the detection shaping can convert the movement amount of the pointer 3b into an electrical signal such as a resistance change or a capacitor, or a lamp or buzzer can be used as a signal. The lower entrance portion of the frame 1 is closable by a shutter 6 which is made of heat-resistant carbon felt and is formed by a cylinder (not shown) along the lower surface of the frame 1 Can be opened and closed. After closing the shutter 6, it is possible to replace the inside of the housing 1 with an inert gas such as N 2 or Ar, He, etc. by means not shown. The movable push rod 3, the hydraulic cylinder 5 and the scale 4 are integrated into a frame 1 which can be moved up and down by a ball screw or other lifting mechanism not shown, which can move up and down, thus opening the shutter 6 These can be lowered via the lifting mechanism and the table can be replaced below 70 by pulling the table out of the frame 1, and the forming operation will be described in accordance with the above device. In Figure 1, open the shutter 6, and operate the lifting mechanism not shown in the figure. A paper standard is applicable to the Chinese National Standard (CNS) Μ specification (21〇 > < 297 g *). Please read the back note first Printed by the Central Bureau of Standards of the Ministry of Economic Affairs, printed by the Consumer Labor Cooperative of the Central Standardization Bureau of the Ministry of Economic Affairs, printed by the Peking Consumer Cooperative of the Central Standardization Bureau of the Ministry of Economic Affairs A7 Β7 As shown in Fig. 2 (A), Fig. 3 (A) and Fig. 4, the forming frame 7 placed on the quartz glass body 8 is placed on the table 3 a, the frame 1 is raised, and then the table The top of 10 rises to approximately contact with the vicinity of the fixed pressing rod. "In this state, the quartz glass body 8 is applied with a pressing force of 0.03 ~ 0.04 kgf / cm2 through the bottom plate 12 and the female mold 13 by the hydraulic cylinder. . After closing the shutter 6, when an airtight state is formed inside and outside the frame 1, the inert gas is replaced and set at about 1 atmosphere. "The graphite heater 2 is heated by the induction heating coil 2 A-the surface is not shown. The temperature is measured by a thermometer, and the temperature is 3 5 ~ 5 5 ° C / mi η. Ideally, when the forming space is rapidly heated at a temperature increase rate of 45 ~ 50 ° C / mi η, the temperature is about 1 6 5 0 ° C. Such as heating deformation, and follow this * in order to maintain the pressure of 0. 03 ~ 0. 04kgf / cm 2 to implement the rise of the hydraulic cylinder. The ascent speed at this time is to perform the ascent measurement at a constant speed of 2 to 10 mm / m i η, preferably 3 to 5 mm / n i η while measuring with the scorching scale. After the above scale rises to the top dead center (maximum rise position) above the master mold and the temperature rises to the forming temperature of 1 8 4 0 ° C ~ 1 9 6 0 ° C, perform 5mi n / 20mi η at this position The position is maintained until the forming is completed. In addition, the amount of ascent (movement stroke amount) up to the maximum ascent position is calculated in advance. This paper scale is suitable for China National Standard (CNS) Α4 specification (210Χ297 mm) Λ— In nn n ^ i— ml In I ^ n ^ i ml km mum · \ y l-1--throw (please read the back first Note fill in this page) -17-A7 B7 Printed by the Beigong Consumer Cooperative of the Central Bureau of Economic Development of the Ministry of Economic Affairs 5. Description of the invention (15) In the state of forming processing, quartz glass da and graphite anti-rzfe should be as shown in No. 4 ren Rong. The generated gas system, such as C 0 C 0 2 S 0 SLC, etc., escapes to the forming space 0 through the ventilation part of the receiving table 10 and the ventilation part of the female mold 1 3 as shown by arrows. The escape part 9 of the vent part of the mold 1 3 can also be perforated in the above-mentioned bottom plate 1 2 and the bottom plate 1 2 is not provided, and the female mold 1 3 can also be used as the bottom plate 1 3. It can also be 0. 4 scale pointer 3 b »Check according to the flute method made by calculating the displacement in advance When the displacement of the quartz glass is completed, the shutter 6 is opened and the table 3 is lowered by a lifting mechanism (not shown). While still heated, the forming frame 7 is taken out from the table 3 a and the mold for high temperature is moved to the unillustrated The cooling stage shown uses the quartz cover 2 3 shown in Figure 5 as a cover to prevent quenching Cbst and prevent graphite oxidation. Also pressing is applied during the above-mentioned position holding time, so the scale 3 of the pointer 3 b The scale will rise slightly, so by observing the rising temperature of the pointer 3 b, the deformation of the quartz glass body 8 can be detected in vain. Then, after holding at 1 1 5 0 ° C for 3 0 mi η, Xu Leng is subjected to annealing treatment. Formed products can be formed to remove the burrs etc. by cutting in a timely manner, which becomes 0 — * After moving to the cooling table Place the lower 1 ~~~ on the workbench. The forming frame is formed in the same order as above. At this time, because the above forming space is heated, the paper size can be applied to the Chinese National Kneading (CNS) A4 specification (210X297 %) -18-A7 B7 printed by the Consumer Labor Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs V. Description of the invention (irr " `` I --- 1 129 ~ 183 ° C / min high-speed heating. In addition, since the second time afterwards, the temperature in the furnace has been maintained at about 1 5 0 0 ° C ~ 1 6 0 0 ° C close to the melting temperature of the glass. The pre-pressing temperature pre-pressed to the master j is about 1 500 ° C ~ 1 600 ° C. However, the material of quartz glass is slightly different when compared with the oxyhydroxide and electrical fusion products The experimental results · Both are conditions for well-formed quartz glass articles. The first heating rate is 46.5 ° C / mi η, the second is 129 ~ 183 ° C / mi η, but For other data, the melting pressure of the hydrogen-oxygen fusion strain is: 1 860 ° C, the holding time: 10mi η, the deformation speed: 4mm / mi η, the pushing pressure: 0.03kg / cm2, and the electrical fusion strain is melting Pushing temperature: 1950 ° C, holding time: 15 min, deformation speed: 3 mm / min, pushing pressure: 0.04 kg / cm2, from which, good molded products of quartz glass articles can be obtained. According to this embodiment * in the above Pushing force is applied on the 1 3 side of the master mold, and the pushing force is set by 0. 0 1 ~ 0. Lkgf / cm2 Fanyuan ’s small pressure can maintain excellent accuracy of the molding process on one side and minimize the contact area between the quartz glass hip 8 and graphite * with protrusions 5 on the molding side The device for quartz glass a of a is easy to flow into the softened quartz glass in the concave part from the back side of the master mold 13 by the pressure of the back pressure. If this structure is adopted, it will flow into this paper size. It is suitable for China National Standard (CNS) Α4 specification (210 X 47mm) (please read the precautions on the back before filling this page),? Τ -19-Printed by Beigong Consumer Cooperative of Central Bureau of Standards of the Ministry of Economy :: Today i A7 Rolling years H f- > b7 --- 4-¾ ~~ 80. 3. --- V. Description of the invention (1 out of 1 --- The separation of the female mold part will be on the back side of the bearing platform 10 A concave portion is formed on one side of the opposing surface, and therefore sags. The escape portion 10a is provided at a predetermined position of the receiving table 10 corresponding to the concave portion of the female mold 13, more specifically, the setting is set to be equal to the female mold 1 3. The recessed part of the recessed part with the same or slightly larger volume is 10 a, where one side collects the softened quartz The glass is formed on one side * Therefore, it is possible to prevent the formation of a concave portion on the side opposite to the receiving table 10 a. At this time, after the forming of the escape portion 10 a is completed, it becomes a convex portion, but the convex portion can be removed by cutting afterwards. The above-mentioned forming frame is applied with pushing force through the bottom plate 12 from the back side of the female mold 13 through the hydraulic cylinder, but at this time, if the pushing force is too large, the softened glass may produce a seat curvature or an abnormal shape, or a roll of bubbles may occur. Pay attention. Moreover, since this embodiment sets the heating temperature at a high temperature of 1 8 4 0 ° C to 1 9 6 0 ° C, if the pressure is set to be large, the temperature between the master mold 1 3 and the fused silica glass The contact will become excessively strong, resulting in the generation of reactive gas and the devitrification caused by the fixing of S i C, and the problems caused by the formation of the white silica layer. Therefore, in the present embodiment, the pressing force is set at a pressing force of 0.01 kg / cm2 to 0.1 kg / cm2. The pushing pressure is pre-pressed by the temperature before the quartz glass body 8 is softened and deformed, that is, the pre-pressing is preferably performed before 160 ° C, and the deformation speed of the glass is based on the pushing pressure and / or glass melting The temperature is not the same, but the result of the experiment is 0 · 07mm / min ~ 8mm / mi η, hopefully 0. 〇7mm / mi η ~ 5mm / mi η This paper scale applies the Chinese National Standard (CNS) A4 specification (210X 297 Mm) (Please read the precautions on the back before filling out this page) Order -20-309510 A7 ___B7 5. The description of the invention (18) is ideal. Such deviations are caused by the fact that the deformation rate of the glass is more than 10 times faster than the second time after preheating compared to the first time from normal temperature g during continuous operation. This is caused after the second time, in order to maintain the temperature in the furnace which is close to the glass melting temperature of 1 5 0 0 ° C ~ 1 6 0 0 ° C. In addition, as described above, maintaining the temperature in the furnace is to set the inlet side of the frame 1 below, and it is also possible to maintain high heat in the molding space. During the press molding, the mother mold 18 and the receiving table 10 that are often in contact with the quartz glass body 8 are formed by using a material with graphite body having gas permeability. Therefore, CO, C02, S i generated by reacting quartz glass with graphite can be formed Gases such as C easily escape outside the forming space. In addition, it can easily escape CO, CO2, SiC and other gases into the forming space, which can prevent silicon carbide from forming on the glass surface, and solve the shortcomings of cracks after cooling due to the difference in thermal expansion, or deteriorate the yield. And, it can solve the shortcoming that the sliding of the fixed mold and glass due to the silicon carbide will deteriorate and the glass cannot enter the details of the mold. Printed bag of Beigong Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs (please read the precautions K on the back to fill in this page) [Effect] As mentioned above, according to the present invention, even when processing quartz glass articles with protrusions, In addition to manufacturing quartz glass articles with excellent accuracy, it can also be easily formed continuously and is extremely practical and other effects. This paper scale is applicable to the Chinese National Standard (CNS) A4 (210X297mm) printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs; A7 ”B7 V. Description of the invention (19) [Simple description of the diagram] The first circle A schematic view of a quartz glass hip heating and forming device according to an embodiment of the present invention. The second (A) system represents the cross-section circle of the forming frame. The second (B) series represents the squint circle of the molded product. The 2nd (C) circle represents the side plate of the horizontal vessel * The 3rd (A) diagram represents the profile circle of the forming frame. The third (B) series represents the squint circle of the molded product. The third (C) circle indicates the flange part of the furnace core tube. The fourth circle shows the pressing state of the molding frame of the second circle. The fifth circle shows the state where the quartz cover is applied to the molding frame of the second circle. [Explanation of symbols] 1: frame, 2: graphite heater, 2A: heating coil, 3: movable push rod, 3a: working table, 3b: pointer, 3 c: load tube, 4: spur scale, 5 : Hydraulic cylinder, 5a: Piston part, 6: Retaining door, 7: Forming frame, 8: Quartz glass body, 10: Bearing platform * 10a: Escape part, 11: Forming space, 1 2: Base plate, 1 2 a: Penetration Holes, 13: female mold, 13a: concave part, 15: figure cylindrical graphite frame, 16: stem, 17: top plate, 19: fixed push rod, 22: gas skull, 23: quartz cover, 50: horizontal Utensils, 51: side plate, 51a: protrusion, 55: vertical furnace core tube, 56: flange, 56a: protrusion, 56d: center hole (Please read the precautions on the back before filling out this page)

Claims (1)

309510 A8 B8 C8 D8 VI. Patent application 1. A method for manufacturing quartz glass articles, which belongs to a method for manufacturing quartz glass articles with protrusions on the planar side by press-forming quartz glass bodies under high-temperature heating, characterized by: In the forming space with a graphite frame around it, a female mold corresponding to the protrusion is arranged on the lower side through the quartz glass body, and a receiving table of the glass body is arranged on the upper side, the receiving table is fixed, and the female mold is raised side by side. The fused quartz glass is pressurized by heating at a high temperature of 1,750 to 2,100 ° C under a pressure in the range of 0.01 to 1 kg f / cm2 from the backside of the master mold. 2. The method for manufacturing a quartz glass article according to item 1 of the scope of the patent application, wherein a pre-press is applied to the master mold in the temperature range before the quartz glass body starts to deform, and the quartz glass body Soften the one that raises the master mold by a predetermined distance while performing pressure forming under high temperature heating. 3. The method for manufacturing a quartz glass article as described in item 1 of the patent application scope, wherein when the temperature in the forming space reaches a temperature range of about 1 7 5 0 ~ 2 1 0 0 ° C, the master mold is moved Stroke position / Please read the notes on the back side-4 fill in this page) V-shirt. Ordered by the Ministry of Economic Affairs, Central Standards Bureau, Employee Consumer Cooperatives will be printed 5 2 after the production of 3 in the finished product in the final product, the final product is set, The glass is glass-shaped. The degree of change of the degree of vitrification of the glass, the glass of the rapid movement of the glass, the temperature of the stone, the rising of the glass, and the description of the glass. After descending the surrounding stone again. Waiting for the following description, the fan will wait for the benefit of the η η 利 'side to specialize in the ii special request, mm please re-apply when \\ The application is as if its Pm is as the model., 3m holding the mother 4 law 8 ο 5 Bao Shufang 1 1 Set up to make ~ ~ This paper standard uses the Chinese National Standard (CNS) A4 specification (210X297 mm) -23-A8 B8 C8 D8 Six, patent application scope manufacturing method, in which gas permeability Is 〇g \ kf 5 gk 0 1 o gas • · ο small Ρ1 micro C has a strong degree of strong contraction and pressure ο and 1 above is in degrees > Hard value of the number of Xiao and m2 above 2 m C The bearing and die of the table are described in the section of the forming material with a high degree of blackness. The mother describes the Mobi stone on the frame. The upper side is square I. The stone is made of 6 stone. The glass of the Taiwanese crop made by the French method, such as the glass, is raised from the stone drop in the set item 1 frame. Admiral Cheng Fanshuli invited, Shen Zhongru to hold the temperature if his temperature is fixed. The inside of the furnace will be placed 'and the outside of the furnace will be shaped to the bottom of the body. The body glass will be made up and down and the glass will be finished up and down. »--------- fprivate— (Please read the notes on the back first (Fill in this page) The size of the paper printed by the Staff Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs uses the Chinese National Standard (CNS) A4 specification (210X297mm) -24-