經濟部中央標準局員工消费合作社印装 A7 B7 五、發明説明（） S-1發明領域： 本發明係有關於一種運用於半導體工廠中，監測粉塵 (Particle)多寡以及大小之裝置’特别是指能在不同偵測 點從事切換，以測試該偵測點粉塵情況之監控装置》不僅 能利用現成之元件組合完成改良，亦能使用較少的成本以 完成習知之功能。 5·2發明背景： 對半導趙工麻而言，粉塵之控制爲一相當重要的課 題，原因即爲粉塵實爲影響半導鳢產品品質良朦之—大因 素。就習知而言，可於一粉塵監控裝置中選擇複數個该測 點，並在該點設立集塵器，用以收集該點之粉塵樣品；上 述之粉塵樣品輪入一多點切換器（Manifoldswitch)，並在 固定時間中切換各偵測點所送達之粉塵樣品；接著，一粉 塵計數器（Particle counter)，將所送達之粉塵樣品測出 該點的粉塵大小、數量多寡等數據，並將該數據轉換爲電 子信號傳送至一監視器；該監視器接收上述之電子信號， 並利用一監控軟體將該粉塵樣品之電子信號顯示於監控 裝置之螢幕上。 上述之粉塵監控装置將随著偵測點之增加，而增加上 述之多點切換器與粉塵計數器之使用數量。以粉塵計數器 本紙張尺度適用中國國家標隼（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) .裝. 訂 經濟部中央樣準局員工消費合作社印製 300316 a? B7 五、發明説明（） 而言，其售償约爲每台60萬台幣，實爲一相當昂貴的儀 器；每當偵測黠超過1 2點時又必須增加一台粉塵計數 器，就成本效益而言實有改進的必要。 5-3發明目的及概述： 鑒於上述之發明背景中，習知的粉塵監控装置在偵測 點較多之時，出現不敷成本效益之情事。本發明即針對習 知之装置提出改良方式，使該装置能在偵測點增加之時， 只需增加少許之成本添購必要的設備，而且達到相同功 能。 第1騙描述的是習知所用的粉塵監控装置，該圈中顯 示36個偵測點，分别由集塵器1〇1、102、103、104、 105、以及1〇6接收第1、第12、第13、第24、第25、 以及第36點的粉塵樣品；第1點至第12點的粉塵樣品送 往一多點切換器111，第13點至第24點的粉塵樣品被送 往一多點切換器1 1 2 ’第25點至第36點的粉塵樣品則送 往一多點切換器113。 上述之多點切換器111、112、和113又分别受線路 122、124、和126而來之控制信號所控制，將其粉塵樣 品分别透過管線121、123、和125輸出至粉塵計數器 131、132、及133中。上述之粉塵計數器131、I”、 本纸張尺度適用中國國家標隼（CNS)A4規格（2i〇x297公釐） (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作杜印製 A7 B7 五、發明説明（） 及133又分别測試所輸入粉塵樣品的粉塵資訊（諸如粉塵 數目多寡、粉塵大小等>，將該資訊轉換爲電子信號後， 再透過線路141、142、及143輸出至監控顯示產生裝置 151以供顯示之用。該監控顯示產生装置151爲一計算機 (Computer)系統，所產之監控資訊則顯示於該計算機系 統的勞幕（Monitor)之上。 在操作上，每隔一固定時間對一偵測點做粉塵取樣， 例如第1分鐘在第1點做粉塵取樣（利用集塵器101來完 成），第12分鐘則在第12點做粉塵取樣（利用禁塵器1〇2 來完成）；第13分鐘則由集塵器103取得粉塵樣品···， 如此循環下去，第37分鐘時又再次對第1點做粉塵取樣。 習知系统中所使用之多點切換器111 、 112 、和 113 ’爲 PMS 公司（Particle Measuring System Inc·}所 生產之 Aerosol Manifold AM-12(往後以 AM-12 簡稱之）； 由於該AM -1 2機型只能對1 2個偵測點做切換，所以在36 個偵測點之下必須使用3台AM-1 2 ;相對於多點切換器 的數量’粉塵計數器（Particle counter)以亦須有同樣的 數量方可。但由於粉塵計數器係利用一雷射槍對所接收之 粉塵樣品以掃描方式做測試，習知此藝的人皆知，該雷射 搶之造價十分昂貴，因而粉塵計數器的價格居高不下，在 需要麻多偵測點的情形下，習知的粉塵監控装置相當不符 成本效益。 本紙張从適财s s家轉（CNS) A4^ Q χ 297公瘦） (請先閱讀背面之注意事項再填寫本頁) 訂 ^! 經濟部中央標準局員工消費合作杜印製 A7 ---------B7_^_五、發明説明（） 根據以上所述之目的，本發明在習知之裝置中，將粉 塵计數器的數量減爲1 ，並增加一集塵管切換器（Tube switch)，用切換方式收禁上述禁塵器所送達的粉塵樣品 (Particle sample);與一控制器（controller)，用以控制 該禁塵管切換裝置的動作。上述之集塵管切換器與控制器 皆可由現成的元件所組成，附加成本亦隨之降低，就提高 成本效益而言，實爲一頗具價値之發明。5-4圈式簡單説明： 本創作的較佳實施例將於往後之説明文字中輔以下 列圖形做更詳細的闡述： 第1圖爲習知的粉塵監控装置的架構方塊圈； 第2®爲本發明之較佳實施例之方塊圖； 第3圏爲較佳實施例中’集塵管切換器之内部結構圖； 第4圖爲較佳實施例中，控制器之内部結構囷·，及 第5囷爲一時序圖，描述較佳實施例之實際運作情形。 5·5發明詳細説明： 本創作之較佳實施例將於此後闡述之。 第2圈描述的是本發明較佳實施例的結構方塊圖。同 樣的’圈中顯示36個偵測點，分别由集塵器2〇1、2〇2、 203、204、205、以及20β分别接收第]、第12、篦 (請先閱讀背面之注意事項再填寫本頁) -丁 、-·β ^! 本紙張尺度適用中國國家標準（CMS ) Α4規格（210X297公釐） 經濟部中央橾準局員工消費合作社印装 300316五、發明説明（ 13、第24、第25、以及第36點的粉塵樣品；第，點至 第12點的粉塵樣品送往多點切換器211 ，第η點至第 24點的粉塵樣品被送往多點切換器212，第25點至第％ 點的粉塵樣品則送往多點切換器21 3 。該多點切換器 211、212、和213，亦爲卩|^公司所生產之八从_12 上述之多點切換器211、212 '和213又分别接受線 路222、2 24、和226而來之控制信號所控制，將其粉塵 樣品分别透過管線221、223、和225輸出至集塵管切換 器231中。該集塵管切換器231由線路233而來之控信號 所控制’於管線221、223、和225間從事切換之動作， 再於二者中擇其一輸出其粉塵樣品於管線241中。控制器 232產生控制信號，透過線路222 ' 224、226、233、 和242分别輸出至上述之多點切換器211 、 212 、和 213、禁塵管切換器231、以及粉塵計數器25*1中。 上述之粉塵計數器251被由線路242而來之控制信 號所控制，其測試由管線241所輸入粉塵樣品的粉塵資訊 (諸如粉塵數目多寡、粉塵大小等>，並將該資訊轉換爲電 子信號後，再透過線路261輸出至監控顯示產生裝置271 以供顯示之用。於本較佳實施例中，該監控顯示產生裝置 271亦爲一計算機（Computer)系統，所產之監控資訊則類 示於該計算機系統的螢幕（Monitor)之上。A7 B7 Printed by the Employees ’Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy V. Description of the invention () S-1 Field of invention: This invention relates to a device used in semiconductor factories to monitor the amount and size of particles The monitoring device that can switch between different detection points to test the dust situation of the detection point can not only use the existing component combination to complete the improvement, but also use less cost to complete the conventional functions. 5. 2 Background of the invention: For semi-conducting Zhao Gongma, the control of dust is a very important subject, because the dust is a major factor that affects the quality of semiconducting snakehead products. As far as is known, a plurality of measuring points can be selected in a dust monitoring device, and a dust collector is set up at the point to collect the dust sample at the point; the above dust sample turns into a multi-point switch ( Manifoldswitch), and switch the dust samples delivered at each detection point in a fixed time; then, a particle counter (Particle counter), the dust samples delivered to measure the dust size, quantity and other data at that point, and The data is converted into an electronic signal and sent to a monitor; the monitor receives the above-mentioned electronic signal, and displays the electronic signal of the dust sample on the screen of the monitoring device using a monitoring software. The above-mentioned dust monitoring device will increase the number of multi-point switches and dust counters used as described above. The paper standard of the dust counter is applicable to China National Standard Falcon (CNS) A4 specification (210X297mm) (please read the precautions on the back and then fill out this page). Installed. Printed by the Employees Consumer Cooperative of the Central Bureau of Samples of the Ministry of Economic Affairs 300316 a? B7 Fifth, the description of the invention (), the sales reimbursement is about 600,000 Taiwan dollars per unit, which is a very expensive instrument; every time the detection point exceeds 12 points, a dust counter must be added. There is a need for improvement in terms of cost efficiency. 5-3 Purpose and summary of the invention: In view of the background of the invention described above, the conventional dust monitoring device is not cost-effective when there are many detection points. The present invention proposes an improved method for the conventional device, so that when the detection point is increased, the device can be purchased with only a small cost to purchase the necessary equipment, and the same function can be achieved. The first scam describes the dust monitoring device used in the prior art, and 36 detection points are displayed in the circle, which are received by the dust collectors 101, 102, 103, 104, 105, and 106, respectively. 12. The dust samples at points 13, 24, 25, and 36; the dust samples at points 1 to 12 are sent to a multipoint switch 111, and the dust samples at points 13 to 24 are sent The dust samples from the 25th to the 36th points of a multi-point switch 1 1 2 'are sent to a multi-point switch 113. The above multi-point switches 111, 112, and 113 are controlled by control signals from lines 122, 124, and 126, respectively, and output their dust samples to dust counters 131, 132 through lines 121, 123, and 125, respectively. , And 133. The above dust counters 131, I ”, and the size of this paper apply to the Chinese National Standard Falcon (CNS) A4 specification (2i〇x297 mm) (please read the precautions on the back before filling out this page). Consumer Cooperation Du Printed A7 B7 V. Description of the invention () and 133 separately tested the dust information (such as the number of dust, the size of the dust, etc.) of the input dust sample. After converting this information into an electronic signal, it then passed the line 141 , 142, and 143 are output to the monitor display generating device 151 for display. The monitor display generating device 151 is a computer system, and the monitoring information produced is displayed on the monitor of the computer system. In operation, the dust is sampled at a detection point every fixed time, for example, the dust sample is taken at the first point in the first minute (using the dust collector 101), and the sample is taken at the 12th minute Dust sampling (completed with dust control device 102); at the 13th minute, the dust sample was obtained by the dust collector 103, and so on, and the dust was sampled again at the first point at the 37th minute. Knowing that the multi-point switches 111, 112, and 113 used in the system are Aerosol Manifold AM-12 (hereinafter referred to as AM-12) produced by PMS (Particle Measuring System Inc.); due to the AM- 1 2 models can only switch 12 detection points, so under 36 detection points must use 3 AM-1 2; relative to the number of multi-point switch 'dust counter (Particle counter) to The same quantity is also required. However, since the dust counter uses a laser gun to test the received dust samples by scanning, everyone who knows this art knows that the cost of the laser grab is very expensive, so The price of the dust counter is high, and the conventional dust monitoring device is not cost-effective in the case of a large number of detection points. The paper is transferred from CNS A4 ^ Q χ 297 () Please read the precautions on the back before filling out this page) Order ^! A7 --------- B7 _ ^ _ 5, the consumer consumption cooperation of the Central Standards Bureau of the Ministry of Economic Affairs, and the invention description () According to the above The purpose of this invention is to use a dust counter in a conventional device The number is reduced to 1 and a tube switch is added to control the dust sample (Particle sample) delivered by the above dust control device by a switching method; and a controller to control the The operation of the dust control tube switching device. The above-mentioned dust collection tube switch and controller can be composed of off-the-shelf components, and the additional cost is also reduced. In terms of improving cost efficiency, it is a very valuable invention. Brief description of the 5-4 circle type: The preferred embodiment of this creation will be explained in more detail in the following description text with the following graphics: Figure 1 is the block circle of the conventional dust monitoring device; ® is a block diagram of the preferred embodiment of the present invention; the third circle is the internal structure diagram of the dust collector switch in the preferred embodiment; FIG. 4 is the internal structure of the controller in the preferred embodiment. , And No. 5 is a timing diagram describing the actual operation of the preferred embodiment. 5. 5 Detailed description of the invention: The preferred embodiment of this creation will be described later. Circle 2 describes the block diagram of the preferred embodiment of the present invention. The same 'circle shows 36 detection points, which are respectively received by the dust collectors 〇1, 2〇2, 203, 204, 205, and 20β), 12, and grate (please read the notes on the back first (Fill in this page again) -Ding,-· β ^! This paper scale is applicable to the Chinese National Standard (CMS) Α4 specifications (210X297 mm) Printed by the Central Consortium Bureau of the Ministry of Economic Affairs, Employee Consumer Cooperatives 300316 V. Description of invention (13, No. 24. The dust samples at the 25th and 36th points; first, the dust samples from the point to the 12th point are sent to the multi-point switch 211, and the dust samples from the η point to the 24th point are sent to the multi-point switch 212, The dust samples from point 25 to point% are sent to the multi-point switch 21 3. The multi-point switches 211, 212, and 213 are also produced by the company. The devices 211, 212 'and 213 are controlled by control signals from lines 222, 24, and 226, respectively, and output their dust samples to the dust collection tube switcher 231 through lines 221, 223, and 225, respectively. The dust collecting tube switcher 231 is controlled by the control signal from the line 233, engaged in the pipelines 221, 223, and 225 Switching action, then choose one of the two to output its dust sample in the pipeline 241. The controller 232 generates a control signal and outputs it to the multi-point switch 211 through the lines 222 '224, 226, 233, and 242 respectively , 212, and 213, the dust control switch 231, and the dust counter 25 * 1. The above dust counter 251 is controlled by the control signal from the line 242, which tests the dust information of the dust sample input by the pipeline 241 (Such as the number of dust, the size of the dust, etc.), and after converting this information into an electronic signal, it is output to the monitor display generating device 271 through line 261 for display. In this preferred embodiment, the monitor display The generating device 271 is also a computer system, and the generated monitoring information is displayed on the monitor of the computer system.
本紙张尺度適用中國國家標率（CNS ) Α4規格（210Χ297公釐） (請先閲讀背面之注意事項再填寫本頁)This paper scale is applicable to China National Standard Rate (CNS) Α4 specification (210Χ297mm) (Please read the precautions on the back before filling this page)
U ^. ，?τ 經濟部中央標隼局員工消費合作社印製 A7 B7 一 "" — —丨·丨 _ 五、發明説明（） 由第2圈可知，所使用之粉塵計數器（partic|e counter)已降至1個，而且不論偵測點之數量爲何，皆只 需1個粉塵計數器，所需附加的只是禁塵管切換器231 與控制器232而已，於成本上已降低許多。再者，於往後 描述該集塵管切換器231與控制器232内部結構時將明 白，只需利用廣爲運用的現成電子元件即能完成上述之附 加裝置，相較於粉塵計數器而言，所需付出之額外成本實 爲微不足道。 第3圏爲集塵管切換器231的内部結構圖，與該集塵 管切換器231相接的管線221、223、225、和241，以 及控制信號送達之線路233亦同樣顯示於圈中。該禁塵管 切換器231包含3個電磁閥301、302和303，做爲控制 管線221、223、225開關之用，1個蘇輪電释3〇4作爲 上迷之電磁閥301、302和30 3的中繼站，其接收來自線 路2 33的控制信號，用以控制上述電磁閥的開/關之動 作。此外，現成的電磁閥與蘇輪電驛皆不需經過额外之變 更，即能用以完成該集塵管切換器231的所有動作。 第4圏爲控制器232的内部結構圈，與該控制器232 相接的線路222、224、226、和242，亦同樣類示於圖 中。該控制器232包含一計數器402，其在每一固定時間 後増量一次（例如：每一分鐘累加1 )，俟到達一上限後該 計數器即歸零，且每次增量之累加結果作爲輪出至線路 本紙張尺度適财國1]家制L ( CNS )从規格（21Qx297公瘦） (諳先閱讀背面之注意事項再填寫本頁) 裝· 訂- A7U ^.,? Τ Printed A7 B7 I " " — — 丨 丨 丨 丨 _ of the Central Standard Falcon Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs-V. Invention description () From the second circle, we can see that the dust counter (partic | e counter) has been reduced to one, and no matter what the number of detection points is, only one dust counter is needed. All that is required is the dust-proof tube switcher 231 and the controller 232, which has greatly reduced the cost. Furthermore, when describing the internal structure of the dust collector switch 231 and the controller 232 later, it will be understood that the above additional device can be completed only by using widely used off-the-shelf electronic components. Compared with the dust counter, The extra cost is negligible. The third ring is an internal structure diagram of the dust collection tube switch 231, and the pipelines 221, 223, 225, and 241 connected to the dust collection tube switch 231, and the line 233 to which the control signal is delivered are also displayed in the circle. The dust control switch 231 includes three solenoid valves 301, 302, and 303, which are used to control the switching of the pipelines 221, 223, and 225, and one Su-wheel electric release 304 is used as the solenoid valves 301, 302 and The relay station 30 3 receives the control signal from line 2 33 to control the on / off operation of the above solenoid valve. In addition, the off-the-shelf solenoid valve and the Su-lun relay can be used to complete all actions of the dust collector switch 231 without additional changes. The fourth ring is the internal structure circle of the controller 232, and the lines 222, 224, 226, and 242 connected to the controller 232 are also shown in the figure. The controller 232 includes a counter 402, which is incremented after each fixed time (for example: 1 is accumulated every minute), and the counter is reset to zero after reaching an upper limit, and the accumulated result of each increment is used as a round out To the size of this paper, suitable for the country 1] Home-made L (CNS) from the specifications (21Qx297 male thin) (know first read the precautions on the back and then fill out this page) Pack · Order-A7
經濟部中央標準局員工消費合作社印製 U3(至集塵管切換器231)和資料切換裝置4〇1 ;以及一 資料切換裝置401,其接收來自計數器4〇 2的控制信號， 並透過線路222、224、和226控制多點切換器211、 212、213之切換動作。 實際操作情形可利用第5圈來説明。圈中之T1代表 上述每個集塵器採禁粉塵樣品的取樣時間（往後以“取樣 週期“簡稱之），每12個取樣週期爲_個循環遇期，TM1、 TM2、和TM3分别代表3個循環週期。由於粉塵計數器 2 51的原始設計只能針對】2個偵測點做取樣俟，2個偵 测點皆完成取樣後，該粉塵計數器251即會重設回初始 値，再由第1個偵測點開始取樣。 本發明較佳實施例中，在每個循環週期結束時，將利 用集塵管切換器231與控制器232，把了一個偵測點的粉 塵樣品送往粉塵計數器251。譬如：在TM1結束後，控 制器232將送出控制信號（經由線路224)，使第13點所取 得之粉塵樣品（由集塵器203所收禁）送達管線223 ;同 時，集塵管切換器231亦收到來自控制器232的控制信號 (來自線路233>，而接收管線223的粉塵樣品，並經由管 線241送絲塵計數器251。類似之情㈣發生在雇 結束後，接下來送至粉塵計數器的粉塵樣品爲第25點所 測得（由集塵器205所得”再者，當ΤΜ3結束之後又再切 回第1點取樣。 (請先聞讀背面之注意事項再填离本頁) -東· 訂The U3 (to the dust collector switch 231) and the data switching device 401 are printed by the employee consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs; and a data switching device 401, which receives the control signal from the counter 402 and passes the line 222 , 224, and 226 control the switching actions of the multipoint switches 211, 212, and 213. The actual operation situation can be explained by the fifth circle. The T1 in the circle represents the sampling time of the above prohibited dust samples collected by each dust collector (hereinafter referred to as "sampling cycle"), each 12 sampling cycles is _ cycle encounter period, TM1, TM2, and TM3 respectively represent 3 cycles. Since the original design of the dust counter 2 51 can only be used for sampling at two detection points, after the two detection points have been sampled, the dust counter 251 will be reset to the initial value, and then the first detection Click to start sampling. In the preferred embodiment of the present invention, at the end of each cycle period, the dust sample at a detection point is sent to the dust counter 251 using the dust collector switch 231 and the controller 232. For example: after the end of TM1, the controller 232 will send a control signal (via line 224), so that the dust sample obtained at the 13th point (accepted by the dust collector 203) is sent to the pipeline 223; at the same time, the dust collector switch 231 also receives the control signal from the controller 232 (from line 233>, and receives the dust sample of line 223, and sends the wire dust counter 251 through line 241. A similar situation occurs after the end of employment, and then sent to the dust The dust sample of the counter is measured at the 25th point (obtained by the dust collector 205). After the TM3 is over, switch back to the 1st point for sampling. (Please read the precautions on the back before filling out this page) -East · Order
各紙張尺度適用中國國家標準（CNS ) Α4規格（210X297^7 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明（） 第5圈之實際運作情形如下所述：在初始之時， 禁塵器201於取樣遇期T1中採集第，個價測點之粉塵樣 品；俟12個取樣週期結束後，亦即循環週期TM1結束之 時，控制器232送出控制信號’並操控篥塵器2〇3開始Z 作收蓽粉塵樣品，該控制信號並使集塵管切換器231切換 内部管線’使其接收來自禁塵器203所採集之第13偵測 點的粉塵樣品。 又過了 12個取樣遇期後，亦即循環週期TM2結束之 時’控制器232又送出控制信號，並操控集塵器2〇5開始 動作收禁粉塵樣品，該控制信號並使禁塵管切換器231 切換内部管線，使其接收來自禁塵器2〇5所採集之第Μ 偵測點的粉塵樣品；同樣的，又過了 12個取樣週期後， 亦即循環遇期結束之時，控制器232又送出控制信 號，回頭操控集塵器201開始動作收集粉塵樣品，該控制 信號並使集塵管切換器231切換内部管線，使其接收來自 集塵器201所採集之第1偵測點的粉塵樣品。 由於一個粉塵計數器只能對12個點做偵測，其顯示 於監控器螢幕上之資料亦只有彳2筆，俟偵測下一點之粉 塵資訊時，該粉塵資訊將蓋掉原先顯示於螢幕上第i點之 粉塵資訊，所以習知的粉塵監控系统之顯示軟體部份必須 做小部份足修正，俾使原先顯示於螢幕之粉塵資訊不會被 ^ r---^------、βτ------^ , (誚先閱讀背面之注意事項再填寫本頁) 本紙張尺度適财關家樣丰（CNS ) A4規格（21〇χ297公瘦· A7 B7 300316 五、發明説明（ 蓋住。該軟體修正部份只需在每個循環遇期之後將所測 得之粉塵資訊顯示於螢幕之下一類示列中，保留原先之顯 示資訊即可，待所有偵測點完成取樣之後，再回過頭蓋住 第1點所顯示之粉塵資訊即可，而且所顯示於勞幕之粉塵 資訊亦附上偵測時間，因而不會發生顯示資訊錯亂之情 事。 以上所述僅爲本發明之較佳實施例而已，並非用以限 定本發明之申請專利範園；凡其它未脱離本發明所揭示之 精神下所完成之等效改變或修飾，均應包含在下述之申請 專利範面内。 (誚先閱讀背面之注意事項再填寫本頁} •潔· -訂· 經濟部中央標準局貝工消費合作社印踅 10 表紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）Each paper standard applies the Chinese National Standard (CNS) Α4 specification (210X297 ^ 7 A7 B7 Printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Invention Description () The actual operation of circle 5 is as follows: At the beginning, The dust suppressor 201 collects the dust sample at the first and second price measurement point in the sampling period T1; after the end of 12 sampling cycles, that is, at the end of the cycle TM1, the controller 232 sends a control signal and controls the dust collector 2〇3 Start Z as a long dust sample, the control signal makes the dust collector switch 231 switch the internal pipeline to make it receive the dust sample from the 13th detection point collected by the dust prohibitor 203. Another 12 has passed After a sampling period, that is, when the cycle period TM2 ends, the controller 232 sends a control signal and controls the dust collector 2〇5 to start collecting dust samples. The control signal causes the dust control tube switch 231 to switch. Internal pipeline, so that it receives the dust sample from the Mth detection point collected by the dust prohibitor 205; similarly, after another 12 sampling cycles, that is, when the cycle encounter period ends, the controller 232 Send control letter No., turn around and control the dust collector 201 to start collecting dust samples. The control signal causes the dust tube switch 231 to switch the internal pipeline to receive the dust sample from the first detection point collected by the dust collector 201. A dust counter can only detect 12 points, and the data displayed on the monitor screen is only 2 pens. When the dust information of the next point is detected, the dust information will cover up the original display on the screen. The dust information at point i, so the display software part of the conventional dust monitoring system must be modified to a small extent so that the dust information originally displayed on the screen will not be ^ r --- ^ ------ 、 Βτ ------ ^, (Immediately read the notes on the back and fill in this page) The paper size is suitable for CNS A4 (21〇χ297 g · A7 B7 300316 V. Invention Description (covered. The correction part of the software only needs to display the measured dust information in the display column under the screen after each cycle encounter period, and retain the original display information, until all detection points are completed After sampling, go back and cover the point 1 The dust information is sufficient, and the dust information displayed on the labor screen is also accompanied by the detection time, so that the display information will not be confused. The above is only the preferred embodiment of the present invention, and is not intended to limit the present invention. Patent application for the invention; all other equivalent changes or modifications made without departing from the spirit disclosed by the present invention should be included in the following application for patent application. (Immediately read the precautions on the back before filling in This page} • Clean ·-Order · The Central Standards Bureau of the Ministry of Economic Affairs, Beigong Consumer Cooperatives, Printed 10 Table paper scales apply to China National Standards (CNS) A4 specifications (210X297 mm)
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