TW298343U - Apparatus for cleaning both sides of substrate - Google Patents

Apparatus for cleaning both sides of substrate

Info

Publication number
TW298343U
TW298343U TW084215779U TW84215779U TW298343U TW 298343 U TW298343 U TW 298343U TW 084215779 U TW084215779 U TW 084215779U TW 84215779 U TW84215779 U TW 84215779U TW 298343 U TW298343 U TW 298343U
Authority
TW
Taiwan
Prior art keywords
cleaning
substrate
sides
Prior art date
Application number
TW084215779U
Other languages
Chinese (zh)
Inventor
Hiroyuki Matsukawa
Akira Yonemizu
Michiaki Matsushita
Takahide Fukuda
Akihiro Fujimoto
Hidetami Yaegashi
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP30098593A external-priority patent/JP3066422B2/en
Priority claimed from JP05307132A external-priority patent/JP3099253B2/en
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW298343U publication Critical patent/TW298343U/en

Links

TW084215779U 1993-11-05 1994-11-08 Apparatus for cleaning both sides of substrate TW298343U (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP30098593A JP3066422B2 (en) 1993-11-05 1993-11-05 Single wafer type double-sided cleaning equipment
JP05307132A JP3099253B2 (en) 1993-11-12 1993-11-12 Processing equipment

Publications (1)

Publication Number Publication Date
TW298343U true TW298343U (en) 1997-02-11

Family

ID=54615205

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084215779U TW298343U (en) 1993-11-05 1994-11-08 Apparatus for cleaning both sides of substrate

Country Status (1)

Country Link
TW (1) TW298343U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI748265B (en) * 2019-03-29 2021-12-01 日商Ｊｘ金屬股份有限公司 Manufacturing method and transportation method of sputtering target packaging

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI748265B (en) * 2019-03-29 2021-12-01 日商Ｊｘ金屬股份有限公司 Manufacturing method and transportation method of sputtering target packaging

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