TW296112U - External-adjustment type free-elevating filament mechanism of hot-filament chemical vapor deposition system - Google Patents

External-adjustment type free-elevating filament mechanism of hot-filament chemical vapor deposition system

Info

Publication number
TW296112U
TW296112U TW085209362U TW85209362U TW296112U TW 296112 U TW296112 U TW 296112U TW 085209362 U TW085209362 U TW 085209362U TW 85209362 U TW85209362 U TW 85209362U TW 296112 U TW296112 U TW 296112U
Authority
TW
Taiwan
Prior art keywords
filament
elevating
hot
external
vapor deposition
Prior art date
Application number
TW085209362U
Other languages
Chinese (zh)
Inventor
guang-hua Ma
Jiun-Da Chen
Jiun-Rung Huang
Chang-Yi Lin
Original Assignee
Metal Ind Res & Dev Ct
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metal Ind Res & Dev Ct filed Critical Metal Ind Res & Dev Ct
Priority to TW085209362U priority Critical patent/TW296112U/en
Publication of TW296112U publication Critical patent/TW296112U/en

Links

TW085209362U 1996-06-21 1996-06-21 External-adjustment type free-elevating filament mechanism of hot-filament chemical vapor deposition system TW296112U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW085209362U TW296112U (en) 1996-06-21 1996-06-21 External-adjustment type free-elevating filament mechanism of hot-filament chemical vapor deposition system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW085209362U TW296112U (en) 1996-06-21 1996-06-21 External-adjustment type free-elevating filament mechanism of hot-filament chemical vapor deposition system

Publications (1)

Publication Number Publication Date
TW296112U true TW296112U (en) 1997-01-11

Family

ID=54614180

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085209362U TW296112U (en) 1996-06-21 1996-06-21 External-adjustment type free-elevating filament mechanism of hot-filament chemical vapor deposition system

Country Status (1)

Country Link
TW (1) TW296112U (en)

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