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A manufacturing method of glass diaphragm in wafer microstructure is used for silicon wafer with a groove, includes: - Form a glass layer on wafer and groove by flame hydrolysis deposition; - Consolidate the glass into the glass diaphragm, which binds tightly with wafer and contracts into part of diaphragm main body in groove position.
TW84106953A1995-07-041995-07-04The manufacturing method of glass diaphragm in wafer microstructure
TW291604B
(en)