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Priority claimed from US08/357,695external-prioritypatent/US5516403A/en
Priority claimed from US08/357,001external-prioritypatent/US5527438A/en
Application filed by Applied Materials IncfiledCriticalApplied Materials Inc
Application grantedgrantedCritical
Publication of TW290710BpublicationCriticalpatent/TW290710B/zh