TW290710B - - Google Patents

Info

Publication number
TW290710B
TW290710B TW84112086A TW84112086A TW290710B TW 290710 B TW290710 B TW 290710B TW 84112086 A TW84112086 A TW 84112086A TW 84112086 A TW84112086 A TW 84112086A TW 290710 B TW290710 B TW 290710B
Authority
TW
Taiwan
Application number
TW84112086A
Other languages
Chinese (zh)
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/357,001 external-priority patent/US5527438A/en
Priority claimed from US08/357,695 external-priority patent/US5516403A/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of TW290710B publication Critical patent/TW290710B/zh

Links

TW84112086A 1994-12-16 1995-11-15 TW290710B (cs)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/357,001 US5527438A (en) 1994-12-16 1994-12-16 Cylindrical sputtering shield
US08/357,695 US5516403A (en) 1994-12-16 1994-12-16 Reversing orientation of sputtering screen to avoid contamination

Publications (1)

Publication Number Publication Date
TW290710B true TW290710B (cs) 1996-11-11

Family

ID=51398276

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84112086A TW290710B (cs) 1994-12-16 1995-11-15

Country Status (1)

Country Link
TW (1) TW290710B (cs)

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