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Investigating Or Analysing Materials By Optical Means
(AREA)
Length Measuring Devices By Optical Means
(AREA)
Abstract
A photometric ellipsometry comprising (1) a polarized light source composed of a light source and a polarization plate to provide the polarized light needed for the measurement; and (2) a detectionsystem composed of a light analyzing plate and a brightness measuring device to measure consecutively three brightness data of the polarized light emitted from the polarized light source and reflected by the measured object whereby ellipsometric parameter is calculated from the three brightness data, characterized in that: after the polarization plate and light analyzing plate are coarsely adjusted, two specific brightness ratios under two incident angles are made equal such that the relative position of reflective face to polarization plate and light analyzing plate is determined, whereby three brightness data are determined at specific angular distance.
TW84113550A1995-12-191995-12-19Photometric ellipsometry without a compensator
TW290637B
(en)
Method for measuring the angle of incidence of a light beam, measuring device for carrying out the method, and distance measuring device utilising same