TW277007B - - Google Patents

Info

Publication number
TW277007B
TW277007B TW83105409A TW83105409A TW277007B TW 277007 B TW277007 B TW 277007B TW 83105409 A TW83105409 A TW 83105409A TW 83105409 A TW83105409 A TW 83105409A TW 277007 B TW277007 B TW 277007B
Authority
TW
Taiwan
Application number
TW83105409A
Other languages
Chinese (zh)
Original Assignee
Tokyo Electron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP25468293A external-priority patent/JPH0786188A/en
Priority claimed from JP5254681A external-priority patent/JP3066691B2/en
Priority claimed from JP25468093A external-priority patent/JP2741156B2/en
Priority claimed from JP25650793A external-priority patent/JPH0794489A/en
Priority claimed from JP5256506A external-priority patent/JP2881371B2/en
Application filed by Tokyo Electron Co Ltd filed Critical Tokyo Electron Co Ltd
Application granted granted Critical
Publication of TW277007B publication Critical patent/TW277007B/zh

Links

TW83105409A 1993-09-17 1994-06-15 TW277007B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP25468293A JPH0786188A (en) 1993-09-17 1993-09-17 Carrying chamber and cleaning method therefor
JP5254681A JP3066691B2 (en) 1993-09-17 1993-09-17 Multi-chamber processing apparatus and cleaning method thereof
JP25468093A JP2741156B2 (en) 1993-09-17 1993-09-17 Cleaning method for multi-chamber processing equipment
JP25650793A JPH0794489A (en) 1993-09-20 1993-09-20 Cleaning method of treating apparatus
JP5256506A JP2881371B2 (en) 1993-09-20 1993-09-20 Vacuum processing apparatus and method of cleaning vacuum processing apparatus assembly

Publications (1)

Publication Number Publication Date
TW277007B true TW277007B (en) 1996-06-01

Family

ID=51397368

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83105409A TW277007B (en) 1993-09-17 1994-06-15

Country Status (1)

Country Link
TW (1) TW277007B (en)

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