TW273595B - A probe card with air duct - Google Patents
A probe card with air ductInfo
- Publication number
- TW273595B TW273595B TW084107245A TW84107245A TW273595B TW 273595 B TW273595 B TW 273595B TW 084107245 A TW084107245 A TW 084107245A TW 84107245 A TW84107245 A TW 84107245A TW 273595 B TW273595 B TW 273595B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- air duct
- probe
- probe card
- disposed
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
To lengthen the interval of cleaning operation of the probe cardand prevent the adherence on chip resistor or probe, etc. ofashes generated when applied laser beams from laser trimmer. It is provided with a fixed number of probes 110 contacting the electrode pad of the object tested, a substrate 120 for fixing the probe 110, and an air duct 130 connected to the substrate 120, the air duct 130 having a suction unit 131 connected to the duct collector, the suction unit 131 is disposed at the substrate 120 facing the opening 121 disposed on the substrate 120.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7149587A JPH08316275A (en) | 1995-05-23 | 1995-05-23 | Probe card with air duct |
Publications (1)
Publication Number | Publication Date |
---|---|
TW273595B true TW273595B (en) | 1996-04-01 |
Family
ID=15478470
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW084107245A TW273595B (en) | 1995-05-23 | 1995-07-13 | A probe card with air duct |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPH08316275A (en) |
KR (1) | KR960042072A (en) |
TW (1) | TW273595B (en) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0236545A (en) * | 1988-07-27 | 1990-02-06 | Nec Corp | Measuring device for semiconductor element |
-
1995
- 1995-05-23 JP JP7149587A patent/JPH08316275A/en active Pending
- 1995-07-13 TW TW084107245A patent/TW273595B/en active
- 1995-09-13 KR KR1019950029824A patent/KR960042072A/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JPH08316275A (en) | 1996-11-29 |
KR960042072A (en) | 1996-12-19 |
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