TW273595B - A probe card with air duct - Google Patents

A probe card with air duct

Info

Publication number
TW273595B
TW273595B TW084107245A TW84107245A TW273595B TW 273595 B TW273595 B TW 273595B TW 084107245 A TW084107245 A TW 084107245A TW 84107245 A TW84107245 A TW 84107245A TW 273595 B TW273595 B TW 273595B
Authority
TW
Taiwan
Prior art keywords
substrate
air duct
probe
probe card
disposed
Prior art date
Application number
TW084107245A
Other languages
Chinese (zh)
Inventor
Keiji Sugiyama
Naoai Asahi
Original Assignee
Tokai High Tec Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai High Tec Kk filed Critical Tokai High Tec Kk
Application granted granted Critical
Publication of TW273595B publication Critical patent/TW273595B/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

To lengthen the interval of cleaning operation of the probe cardand prevent the adherence on chip resistor or probe, etc. ofashes generated when applied laser beams from laser trimmer. It is provided with a fixed number of probes 110 contacting the electrode pad of the object tested, a substrate 120 for fixing the probe 110, and an air duct 130 connected to the substrate 120, the air duct 130 having a suction unit 131 connected to the duct collector, the suction unit 131 is disposed at the substrate 120 facing the opening 121 disposed on the substrate 120.
TW084107245A 1995-05-23 1995-07-13 A probe card with air duct TW273595B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7149587A JPH08316275A (en) 1995-05-23 1995-05-23 Probe card with air duct

Publications (1)

Publication Number Publication Date
TW273595B true TW273595B (en) 1996-04-01

Family

ID=15478470

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084107245A TW273595B (en) 1995-05-23 1995-07-13 A probe card with air duct

Country Status (3)

Country Link
JP (1) JPH08316275A (en)
KR (1) KR960042072A (en)
TW (1) TW273595B (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0236545A (en) * 1988-07-27 1990-02-06 Nec Corp Measuring device for semiconductor element

Also Published As

Publication number Publication date
JPH08316275A (en) 1996-11-29
KR960042072A (en) 1996-12-19

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