TW259883B - - Google Patents

Info

Publication number
TW259883B
TW259883B TW83104683A TW83104683A TW259883B TW 259883 B TW259883 B TW 259883B TW 83104683 A TW83104683 A TW 83104683A TW 83104683 A TW83104683 A TW 83104683A TW 259883 B TW259883 B TW 259883B
Authority
TW
Taiwan
Application number
TW83104683A
Other languages
Chinese (zh)
Original Assignee
Tokyo Electron Co Ltd
Tel Kyushu Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Co Ltd, Tel Kyushu Kk filed Critical Tokyo Electron Co Ltd
Application granted granted Critical
Publication of TW259883B publication Critical patent/TW259883B/zh

Links

TW83104683A 1993-05-10 1994-05-24 TW259883B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP13259493 1993-05-10
JP18344293 1993-06-30
JP18344393 1993-06-30
JP34371793 1993-12-16
JP34372293 1993-12-16

Publications (1)

Publication Number Publication Date
TW259883B true TW259883B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1995-10-11

Family

ID=51401845

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83104683A TW259883B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-10 1994-05-24

Country Status (1)

Country Link
TW (1) TW259883B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI393591B (zh) * 2009-03-04 2013-04-21 Tokyo Electron Ltd Liquid handling device, liquid handling method and memory medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI393591B (zh) * 2009-03-04 2013-04-21 Tokyo Electron Ltd Liquid handling device, liquid handling method and memory medium

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent