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Priority claimed from JP02127994Aexternal-prioritypatent/JP3148879B2/ja
Priority claimed from JP02128094Aexternal-prioritypatent/JP3169301B2/ja
Application filed by Shinetsu Chem Ind CofiledCriticalShinetsu Chem Ind Co
Application grantedgrantedCritical
Publication of TW257718BpublicationCriticalpatent/TW257718B/zh