TW256932B - Process of synthesizing boron-doped diamond membrane by chemical vapor deposition - Google Patents

Process of synthesizing boron-doped diamond membrane by chemical vapor deposition

Info

Publication number
TW256932B
TW256932B TW83110183A TW83110183A TW256932B TW 256932 B TW256932 B TW 256932B TW 83110183 A TW83110183 A TW 83110183A TW 83110183 A TW83110183 A TW 83110183A TW 256932 B TW256932 B TW 256932B
Authority
TW
Taiwan
Prior art keywords
vapor deposition
chemical vapor
doped diamond
diamond membrane
synthesizing boron
Prior art date
Application number
TW83110183A
Other languages
Chinese (zh)
Inventor
Jia-Fuh Chen
Sheng-Shyong Chen
Jau-Ming Horng
Original Assignee
Nat Science Committee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Science Committee filed Critical Nat Science Committee
Priority to TW83110183A priority Critical patent/TW256932B/en
Application granted granted Critical
Publication of TW256932B publication Critical patent/TW256932B/en

Links

Abstract

A process of synthesizing boron-doped diamond membrane by chemical vapor deposition, in which the raw material is selected from the group consisting gaseous CxHy-CO2 and CxHyOz-CO2 or liquid binary material, and the doping source is trimethyl borate.
TW83110183A 1994-11-04 1994-11-04 Process of synthesizing boron-doped diamond membrane by chemical vapor deposition TW256932B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83110183A TW256932B (en) 1994-11-04 1994-11-04 Process of synthesizing boron-doped diamond membrane by chemical vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83110183A TW256932B (en) 1994-11-04 1994-11-04 Process of synthesizing boron-doped diamond membrane by chemical vapor deposition

Publications (1)

Publication Number Publication Date
TW256932B true TW256932B (en) 1995-09-11

Family

ID=51401678

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83110183A TW256932B (en) 1994-11-04 1994-11-04 Process of synthesizing boron-doped diamond membrane by chemical vapor deposition

Country Status (1)

Country Link
TW (1) TW256932B (en)

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