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A process of synthesizing boron-doped diamond membrane by chemical vapor deposition, in which the raw material is selected from the group consisting gaseous CxHy-CO2 and CxHyOz-CO2 or liquid binary material, and the doping source is trimethyl borate.
TW83110183A1994-11-041994-11-04Process of synthesizing boron-doped diamond membrane by chemical vapor deposition
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