TW252214B - Fabricating method of polysilicon oxide - Google Patents

Fabricating method of polysilicon oxide

Info

Publication number
TW252214B
TW252214B TW83111063A TW83111063A TW252214B TW 252214 B TW252214 B TW 252214B TW 83111063 A TW83111063 A TW 83111063A TW 83111063 A TW83111063 A TW 83111063A TW 252214 B TW252214 B TW 252214B
Authority
TW
Taiwan
Prior art keywords
fabricating method
polysilicon
polysilicon oxide
oxide
forming
Prior art date
Application number
TW83111063A
Other languages
Chinese (zh)
Inventor
Horng-Nan Chen
Chorng-Ren Lii
Tian-Fwu Lei
Original Assignee
Horng-Nan Chen
Chorng-Ren Lii
Tian-Fwu Lei
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horng-Nan Chen, Chorng-Ren Lii, Tian-Fwu Lei filed Critical Horng-Nan Chen
Priority to TW83111063A priority Critical patent/TW252214B/en
Application granted granted Critical
Publication of TW252214B publication Critical patent/TW252214B/en

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

A fabricating method of polysilicon oxide that is applicable to a polysilicon material includes the following steps: - forming a amorphous layer on the polysilicon material; - proceeding oxide process to oxidize all the amorphous layer, and forming a polysilicon layer on the polysilicon material.
TW83111063A 1994-11-28 1994-11-28 Fabricating method of polysilicon oxide TW252214B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83111063A TW252214B (en) 1994-11-28 1994-11-28 Fabricating method of polysilicon oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83111063A TW252214B (en) 1994-11-28 1994-11-28 Fabricating method of polysilicon oxide

Publications (1)

Publication Number Publication Date
TW252214B true TW252214B (en) 1995-07-21

Family

ID=51401441

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83111063A TW252214B (en) 1994-11-28 1994-11-28 Fabricating method of polysilicon oxide

Country Status (1)

Country Link
TW (1) TW252214B (en)

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