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Priority claimed from JP6044182Aexternal-prioritypatent/JP2922417B2/en
Priority claimed from JP6080468Aexternal-prioritypatent/JP2641698B2/en
Application filed by Nabhikhi ItoufiledCriticalNabhikhi Itou
Application grantedgrantedCritical
Publication of TW245678BpublicationCriticalpatent/TW245678B/en
A wax-like substance, which is characterized in that main components of the saturated linear hydrocarbon are at 5.839~6.018 of C/H, and the total weight percentage of carbon and hydrogen is 98.5~100%, the number average molecular weight (Mn) of the substance is 3.0x1000~1.0x10000 and the weight average molecular weight (Mw) of the substance is 1.0x10000~5.0x10000 and Mw/Mn is 1.0~5.0.
TW083106048A1994-03-151994-07-02Wax-like substance and molding method by using wax-like substance
TW245678B
(en)
A base resin for use in chemically amplified resist and a manufacturing method thereof the invention relates to a base resin for use in a chemically amplified resist and a manufacturing method thereof, the base resin containing two t-butyl groups