TW238403B - - Google Patents

Info

Publication number
TW238403B
TW238403B TW83102146A TW83102146A TW238403B TW 238403 B TW238403 B TW 238403B TW 83102146 A TW83102146 A TW 83102146A TW 83102146 A TW83102146 A TW 83102146A TW 238403 B TW238403 B TW 238403B
Authority
TW
Taiwan
Application number
TW83102146A
Other languages
Chinese (zh)
Original Assignee
Advanced Tech Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/032,984 external-priority patent/US5337651A/en
Priority claimed from US08/178,933 external-priority patent/US5362328A/en
Application filed by Advanced Tech Materials filed Critical Advanced Tech Materials
Application granted granted Critical
Publication of TW238403B publication Critical patent/TW238403B/zh

Links

TW83102146A 1993-03-18 1994-03-12 TW238403B (cg-RX-API-DMAC10.html)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/032,984 US5337651A (en) 1990-07-06 1993-03-18 Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids
US08/178,933 US5362328A (en) 1990-07-06 1994-01-07 Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem

Publications (1)

Publication Number Publication Date
TW238403B true TW238403B (cg-RX-API-DMAC10.html) 1995-01-11

Family

ID=51484008

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83102146A TW238403B (cg-RX-API-DMAC10.html) 1993-03-18 1994-03-12

Country Status (1)

Country Link
TW (1) TW238403B (cg-RX-API-DMAC10.html)

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