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Application filed by United Microelectronics CorpfiledCriticalUnited Microelectronics Corp
Priority to TW83100153ApriorityCriticalpatent/TW228605B/en
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Publication of TW228605BpublicationCriticalpatent/TW228605B/en
A furance tube architecture to provide even doping and to prevent BPSG's recrystallization, which forms a gas tube on the inner spacer for injecting gas from axis direction to the furance tube to proceed gas injecting to the gap portion of a placed wafer.
Use of 6,7-substituted-2-aminotetralines for preparing pharmaceutical compositions useful for the treatment of septic shock, and antipyretic and antiinflammatory pharmaceutical compositions