TW228605B - Furance tube architecture - Google Patents

Furance tube architecture

Info

Publication number
TW228605B
TW228605B TW83100153A TW83100153A TW228605B TW 228605 B TW228605 B TW 228605B TW 83100153 A TW83100153 A TW 83100153A TW 83100153 A TW83100153 A TW 83100153A TW 228605 B TW228605 B TW 228605B
Authority
TW
Taiwan
Prior art keywords
furance
tube
gas
architecture
tube architecture
Prior art date
Application number
TW83100153A
Other languages
Chinese (zh)
Inventor
Jenn-Chyou Shyu
Chii-Jyh Horng
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW83100153A priority Critical patent/TW228605B/en
Application granted granted Critical
Publication of TW228605B publication Critical patent/TW228605B/en

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

A furance tube architecture to provide even doping and to prevent BPSG's recrystallization, which forms a gas tube on the inner spacer for injecting gas from axis direction to the furance tube to proceed gas injecting to the gap portion of a placed wafer.
TW83100153A 1994-01-10 1994-01-10 Furance tube architecture TW228605B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83100153A TW228605B (en) 1994-01-10 1994-01-10 Furance tube architecture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83100153A TW228605B (en) 1994-01-10 1994-01-10 Furance tube architecture

Publications (1)

Publication Number Publication Date
TW228605B true TW228605B (en) 1994-08-21

Family

ID=51348484

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83100153A TW228605B (en) 1994-01-10 1994-01-10 Furance tube architecture

Country Status (1)

Country Link
TW (1) TW228605B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8142838B2 (en) 2008-02-22 2012-03-27 Tsinghua University Method for making liquid crystal display screen
US8269932B2 (en) 2008-02-01 2012-09-18 Tsinghua University Liquid crystal display screen having carbon nanotubes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8269932B2 (en) 2008-02-01 2012-09-18 Tsinghua University Liquid crystal display screen having carbon nanotubes
US8142838B2 (en) 2008-02-22 2012-03-27 Tsinghua University Method for making liquid crystal display screen

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