TW224492B - - Google Patents

Info

Publication number
TW224492B
TW224492B TW081109905A TW81109905A TW224492B TW 224492 B TW224492 B TW 224492B TW 081109905 A TW081109905 A TW 081109905A TW 81109905 A TW81109905 A TW 81109905A TW 224492 B TW224492 B TW 224492B
Authority
TW
Taiwan
Application number
TW081109905A
Other languages
Chinese (zh)
Inventor
Takaya Matsushita
Original Assignee
Tokyo Electron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP03352074A external-priority patent/JP3083898B2/ja
Priority claimed from JP03331077A external-priority patent/JP3124599B2/ja
Application filed by Tokyo Electron Co Ltd filed Critical Tokyo Electron Co Ltd
Application granted granted Critical
Publication of TW224492B publication Critical patent/TW224492B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
TW081109905A 1991-12-13 1992-12-10 TW224492B (cs)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP03352074A JP3083898B2 (ja) 1991-12-13 1991-12-13 ドライエッチング方法
JP03331077A JP3124599B2 (ja) 1991-12-16 1991-12-16 エッチング方法

Publications (1)

Publication Number Publication Date
TW224492B true TW224492B (cs) 1994-06-01

Family

ID=26573733

Family Applications (1)

Application Number Title Priority Date Filing Date
TW081109905A TW224492B (cs) 1991-12-13 1992-12-10

Country Status (2)

Country Link
KR (1) KR100246117B1 (cs)
TW (1) TW224492B (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW365029B (en) * 1995-09-28 1999-07-21 Mitsui Chemicals Inc Dry processing gas

Also Published As

Publication number Publication date
KR930014814A (ko) 1993-07-23
KR100246117B1 (ko) 2000-05-01

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent