TW202422979A - Light adjustment device, laser processing device, and light adjustment method - Google Patents
Light adjustment device, laser processing device, and light adjustment method Download PDFInfo
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- TW202422979A TW202422979A TW112142787A TW112142787A TW202422979A TW 202422979 A TW202422979 A TW 202422979A TW 112142787 A TW112142787 A TW 112142787A TW 112142787 A TW112142787 A TW 112142787A TW 202422979 A TW202422979 A TW 202422979A
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- Prior art keywords
- acousto
- laser light
- optic element
- passed
- light adjustment
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- 238000000034 method Methods 0.000 title abstract 3
- 238000005259 measurement Methods 0.000 abstract 5
- 230000003287 optical effect Effects 0.000 abstract 3
Abstract
[課題]本發明提供一種能夠分別適當地調整通過了光學元件之複數種光的狀態之光調整裝置等。 <br/>[解決手段]雷射加工裝置具備：第1調溫部，其係調整對第1雷射光(MP1)實施第1光學處理之第1聲光元件(34)的溫度；第2調溫部，其係調整對第2雷射光(MP2)實施第2光學處理之第2聲光元件(44)的溫度；第1光束感測器(36)，其係取得通過了第1聲光元件(34)之第1雷射光(MP1)的第1測定結果；第2光束感測器(46)，其係取得通過了第2聲光元件(44)之第2雷射光(MP2)的第2測定結果；溫度控制部(63)，其係根據第1測定結果與第2測定結果的比較，對第1調溫部及第2調溫部的至少任一者進行控制；第1加工部，其係將通過了第1聲光元件(34)之第1雷射光(MP1)照射到第1被加工物；以及第2加工部，其係將通過了第2聲光元件(44)之第2雷射光(MP2)照射到第2被加工物。 [Topic] The present invention provides a light adjustment device that can appropriately adjust the states of a plurality of lights passing through an optical element. <br/> [Solution] A laser processing device comprises: a first temperature adjustment section that adjusts the temperature of a first acousto-optic element (34) that performs a first optical process on a first laser light (MP1); a second temperature adjustment section that adjusts the temperature of a second acousto-optic element (44) that performs a second optical process on a second laser light (MP2); a first beam sensor (36) that obtains a first measurement result of the first laser light (MP1) that has passed through the first acousto-optic element (34); and a second beam sensor (46) that obtains a first measurement result of the first laser light (MP1) that has passed through the first acousto-optic element (34). a second measurement result of the second laser light (MP2) that has passed through the second acousto-optic element (44); a temperature control section (63) that controls at least one of the first temperature control section and the second temperature control section based on a comparison between the first measurement result and the second measurement result; a first processing section that irradiates the first laser light (MP1) that has passed through the first acousto-optic element (34) onto the first workpiece; and a second processing section that irradiates the second laser light (MP2) that has passed through the second acousto-optic element (44) onto the second workpiece.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022-183304 | 2022-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202422979A true TW202422979A (en) | 2024-06-01 |
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