TW202417896A - Composition, light-shielding film, solid-state imaging element, image display device, infrared sensor, method for manufacturing cured film - Google Patents

Composition, light-shielding film, solid-state imaging element, image display device, infrared sensor, method for manufacturing cured film Download PDF

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TW202417896A
TW202417896A TW112137192A TW112137192A TW202417896A TW 202417896 A TW202417896 A TW 202417896A TW 112137192 A TW112137192 A TW 112137192A TW 112137192 A TW112137192 A TW 112137192A TW 202417896 A TW202417896 A TW 202417896A
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group
composition
formula
repeating unit
resin
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横山憲文
阿部鉄平
出井宏明
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日商富士軟片股份有限公司
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Abstract

本發明的主要課題為提供一種組成物,其能夠形成密接性優異且對紅外光的低反射性亦優異之硬化膜,並且顯影殘渣的產生亦少。又,本發明的另一課題為提供一種遮光膜、固體攝像元件、圖像顯示裝置、紅外線感測器及硬化膜之製造方法。本發明的組成物包含:樹脂,包含具有式(A1)所表示之基團之重複單元A、具有酸基之重複單元B及具有聚合性基之重複單元C;聚合性化合物;及顏料。The main subject of the present invention is to provide a composition that can form a cured film with excellent adhesion and low reflectivity to infrared light, and also produces little development residue. In addition, another subject of the present invention is to provide a light-shielding film, a solid-state imaging element, an image display device, an infrared sensor, and a method for manufacturing a cured film. The composition of the present invention includes: a resin including a repeating unit A having a group represented by formula (A1), a repeating unit B having an acid group, and a repeating unit C having a polymerizable group; a polymerizable compound; and a pigment.

Description

組成物、遮光膜、固體攝像元件、圖像顯示裝置、紅外線感測器、硬化膜之製造方法Composition, light shielding film, solid-state imaging element, image display device, infrared sensor, and method for manufacturing cured film

本發明有關一種組成物、遮光膜、固體攝像元件、圖像顯示裝置、紅外線感測器及硬化膜之製造方法。The present invention relates to a composition, a light shielding film, a solid-state imaging element, an image display device, an infrared sensor and a method for manufacturing a hardened film.

在液晶顯示裝置等圖像顯示裝置、以及CCD(Charge Coupled Device:電荷偶合器件)影像感測器及CMOS(Complementary Metal-Oxide Semiconductor:互補式金屬氧化物半導體)影像感測器等固體攝像裝置中,在規定位置配置有濾色器或遮光膜的情況較多。例如,在液晶顯示裝置中,以遮蔽著色像素間的光來提高對比度為目的,有時在濾色器上的著色像素間配置被稱為黑矩陣之遮光膜。又,在固體攝像元件中,以防止產生雜訊及提高畫質等為目的,有時會適用遮光膜。In image display devices such as liquid crystal display devices, and solid-state imaging devices such as CCD (Charge Coupled Device) image sensors and CMOS (Complementary Metal-Oxide Semiconductor) image sensors, color filters or light shielding films are often arranged at predetermined positions. For example, in liquid crystal display devices, a light shielding film called a black matrix is sometimes arranged between colored pixels on the color filter in order to shield the light between the colored pixels to improve the contrast. In addition, in solid-state imaging devices, a light shielding film is sometimes used to prevent the generation of noise and improve image quality.

例如,在專利文獻1中,作為能夠提供於上述用途之感光性樹脂組成物,揭示出包含具有下述式(1)所表示之結構單元之共聚物之組成物。下述式(1)中,R 2~R 4各自獨立地表示氫原子、碳原子數1~6的烷基或碳原子數1~6的烷氧基,R 2~R 4中的至少一個表示氫原子或碳原子數1~6的烷基。 For example, Patent Document 1 discloses a copolymer composition having a structural unit represented by the following formula (1) as a photosensitive resin composition that can be used for the above-mentioned purpose. In the following formula (1), R2 to R4 each independently represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms, and at least one of R2 to R4 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

[化學式1] [Chemical formula 1]

[專利文獻1]國際公開第2022/085389號[Patent Document 1] International Publication No. 2022/085389

然而,除了遮光性以外,還期望遮光膜對紅外光具有低反射性。 本發明人等藉由製備專利文獻1中記載之組成物並對其硬化膜進行研究之結果,發現存在能夠進一步減少對紅外光的反射性之餘地。又,發現存在能夠以更少的曝光量形成密接性優異之硬化膜之餘地。 此外,組成物通常提供於圖案(圖案狀硬化膜)形成時,作為基本性能而要求顯影殘渣的產生量少。 However, in addition to the light-shielding property, the light-shielding film is also expected to have low reflectivity to infrared light. The inventors of the present invention prepared the composition described in Patent Document 1 and studied its cured film, and found that there is room for further reducing the reflectivity to infrared light. In addition, it was found that there is room for forming a cured film with excellent adhesion with a smaller exposure amount. In addition, the composition is usually provided when a pattern (pattern-shaped cured film) is formed, and as a basic performance, it is required that the amount of development residue generated is small.

因此,本發明的課題為提供一種組成物,其能夠形成密接性優異且對紅外光的低反射性亦優異之硬化膜,並且顯影殘渣的產生亦少。 又,本發明的課題亦在於提供一種遮光膜、固體攝像元件、圖像顯示裝置、紅外線感測器及硬化膜之製造方法。 Therefore, the subject of the present invention is to provide a composition that can form a cured film with excellent adhesion and low reflectivity to infrared light, and produces less development residue. In addition, the subject of the present invention is also to provide a light-shielding film, a solid-state imaging element, an image display device, an infrared sensor, and a method for manufacturing a cured film.

本發明人為了解決上述課題而深入研究之結果,發現能夠藉由以下構成解決上述課題。As a result of in-depth research to solve the above-mentioned problem, the inventors found that the above-mentioned problem can be solved by the following structure.

〔1〕一種組成物,其包含: 樹脂,包含具有式(A1)所表示之基團之重複單元A、具有酸基之重複單元B及具有聚合性基之重複單元C; 聚合性化合物;及 顏料。 式(A1)  *-Si(R A13式中,R A1表示可以具有取代基之烷基、可以具有取代基之芳基或式(A2)所表示之基團。 *表示鍵結位置。 其中,3個R A1中的至少2個表示式(A2)所表示之基團。 式(A2)  *-OSi(R A23式中,R A2表示非水解性基。 *表示鍵結位置。 另外,式(A1)中存在複數個之R A1彼此及式(A2)中存在複數個之R A2彼此可以各自相同,亦可以不同。 〔2〕如〔1〕所述之組成物,其中 上述重複單元C包含後述式(CX2)所表示之重複單元。 〔3〕如〔1〕或〔2〕所述之組成物,其中 上述重複單元A包含後述式(AX1)所表示之重複單元。 〔4〕如〔1〕至〔3〕之任一項所述之組成物,其中 上述樹脂的酸值為60~170mgKOH/g。 〔5〕如〔1〕至〔4〕之任一項所述之組成物,其中 上述樹脂的酸值為70~170mgKOH/g。 〔6〕如〔1〕至〔5〕之任一項所述之組成物,其中 上述樹脂中的矽原子的含量相對於上述樹脂的總質量為17.0質量%以上。 〔7〕如〔1〕至〔6〕之任一項所述之組成物,其中 上述樹脂的雙鍵價為0.35mmol/g以上。 〔8〕如〔1〕至〔7〕之任一項所述之組成物,其中 上述顏料包含黑色顏料。 〔9〕如〔8〕所述之組成物,其中 上述黑色顏料包含氮氧化鈦。 〔10〕如〔1〕至〔9〕之任一項所述之組成物,其為遮光膜形成用組成物。 〔11〕一種遮光膜,其包含由〔1〕至〔10〕之任一項所述之組成物形成之硬化膜。 〔12〕一種固體攝像元件,其包含由〔1〕至〔10〕之任一項所述之組成物形成之硬化膜。 〔13〕一種圖像顯示裝置,其包含由〔1〕至〔10〕之任一項所述之組成物形成之硬化膜。 〔14〕一種紅外線感測器,其包含由〔1〕至〔10〕之任一項所述之組成物形成之硬化膜。 〔15〕一種硬化膜之製造方法,其包括: 組成物層形成步驟,在支撐體上使用〔1〕至〔10〕之任一項所述之組成物形成組成物層; 曝光步驟,照射活化光線或放射線而將上述組成物層曝光成圖案狀;及 顯影步驟,對曝光後的上述組成物層實施顯影處理。 [發明效果] [1] A composition comprising: a resin comprising a repeating unit A having a group represented by formula (A1), a repeating unit B having an acid group, and a repeating unit C having a polymerizable group; a polymerizable compound; and a pigment. Formula (A1) *-Si( RA1 ) 3 In the formula, RA1 represents an alkyl group which may have a substituent, an aryl group which may have a substituent, or a group represented by formula (A2). * represents a bonding position. At least two of the three RA1s represent a group represented by formula (A2). Formula (A2) *-OSi( RA2 ) 3 In the formula, RA2 represents a non-hydrolyzable group. * represents a bonding position. In addition, plural RA1s in formula (A1) and plural RA2s in formula (A2) may be the same or different from each other. [2] The composition as described in [1], wherein the repeating unit C comprises a repeating unit represented by the formula (CX2) described below. [3] The composition as described in [1] or [2], wherein the repeating unit A comprises a repeating unit represented by the formula (AX1) described below. [4] The composition as described in any one of [1] to [3], wherein the acid value of the resin is 60 to 170 mgKOH/g. [5] The composition as described in any one of [1] to [4], wherein the acid value of the resin is 70 to 170 mgKOH/g. [6] The composition as described in any one of [1] to [5], wherein the content of silicon atoms in the resin is 17.0 mass % or more relative to the total mass of the resin. [7] A composition as described in any one of [1] to [6], wherein the double bond valence of the resin is 0.35 mmol/g or more. [8] A composition as described in any one of [1] to [7], wherein the pigment comprises a black pigment. [9] A composition as described in [8], wherein the black pigment comprises titanium oxynitride. [10] A composition as described in any one of [1] to [9], which is a composition for forming a light-shielding film. [11] A light-shielding film comprising a cured film formed from the composition as described in any one of [1] to [10]. [12] A solid-state imaging element comprising a cured film formed from the composition as described in any one of [1] to [10]. [13] An image display device comprising a cured film formed from the composition as described in any one of [1] to [10]. [14] An infrared sensor comprising a cured film formed from a composition described in any one of [1] to [10]. [15] A method for manufacturing a cured film, comprising: a composition layer forming step, forming a composition layer on a support using a composition described in any one of [1] to [10]; an exposure step, irradiating the composition layer with activating light or radiation to expose the composition layer into a pattern; and a development step, performing a development process on the exposed composition layer. [Effect of the Invention]

依據本發明,能夠提供一種組成物,其能夠形成密接性優異且對紅外光的低反射性亦優異之硬化膜,並且顯影殘渣的產生亦少。 又,依據本發明,能夠提供遮光膜、固體攝像元件、圖像顯示裝置、紅外線感測器及硬化膜之製造方法。 According to the present invention, a composition can be provided, which can form a cured film having excellent adhesion and low reflectivity to infrared light, and also produces little development residue. In addition, according to the present invention, a light shielding film, a solid-state imaging element, an image display device, an infrared sensor, and a method for manufacturing a cured film can be provided.

以下,對本發明進行詳細說明。 以下記載之構成要件的說明有時依據本發明的代表性實施態樣而完成,但本發明並不限於此類實施態樣。 另外,在本說明書中,使用“~”表示之數值範圍係指將“~”前後所記載之數值作為下限值及上限值而包含之範圍。 The present invention is described in detail below. The description of the constituent elements described below is sometimes completed based on representative implementations of the present invention, but the present invention is not limited to such implementations. In addition, in this specification, the numerical range expressed by "~" means a range that includes the numerical values described before and after "~" as the lower limit and upper limit.

又,本說明書中的基團(原子團)這一標記中,未標註經取代及未經取代之標記不僅包括不含有取代基之基團,亦包括包含取代基之基團。例如,“烷基”不僅包括不含有取代基之烷基(無取代烷基),亦包括包含取代基之烷基(取代烷基)。In addition, in the term "radical" in this specification, the term "unsubstituted" or "unsubstituted" includes not only radicals without substituents but also radicals with substituents. For example, "alkyl" includes not only radicals without substituents (unsubstituted alkyl) but also radicals with substituents (substituted alkyl).

又,本說明書中的“活化光線”或“放射線”係指例如遠紫外線、極紫外線(EUV:Extreme ultraviolet lithography)、X射線及電子束等。又,在本說明書中,光係指活化光線及放射線。本說明書中的“曝光”只要沒有特別指定,則不僅包含使用遠紫外線、X射線及EUV光等進行之曝光,而且還包含使用電子束及離子束等粒子束進行之描繪。In addition, "activating light" or "radiation" in this specification refers to, for example, far ultraviolet light, extreme ultraviolet light (EUV: Extreme ultraviolet lithography), X-rays, and electron beams. In addition, in this specification, light refers to activating light and radiation. Unless otherwise specified, "exposure" in this specification includes not only exposure using far ultraviolet light, X-rays, and EUV light, but also drawing using particle beams such as electron beams and ion beams.

又,本說明書中,“(甲基)丙烯酸酯”表示丙烯酸酯及甲基丙烯酸酯,“(甲基)丙烯酸”表示丙烯酸及甲基丙烯酸,“(甲基)丙烯醯基”表示丙烯醯基及甲基丙烯醯基,“(甲基)丙烯醯胺”表示丙烯醯胺及甲基丙烯醯胺。 又,在本說明書中,“單體”與“monomer:單體”的含義相同。 In addition, in this specification, "(meth)acrylate" means acrylate and methacrylate, "(meth)acrylic acid" means acrylic acid and methacrylic acid, "(meth)acryl" means acryl and methacryl, and "(meth)acrylamide" means acrylamide and methacrylamide. In addition, in this specification, "monomer" and "monomer: monomer" have the same meaning.

又,在本說明書中,重量平均分子量(Mw)為基於GPC(Gel Permeation Chromatography:凝膠滲透層析)法之聚苯乙烯換算值。基於GPC法之重量平均分子量基於如下方法,亦即利用HLC-8020GPC(Tosoh Corporation製造),作為管柱使用TSKgel Super HZM-H、TSKgel Super HZ4000、TSKgel SuperHZ2000(Tosoh Corporation製造,4.6mmID×15cm),作為洗提液使用THF(四氫呋喃)。In this specification, the weight average molecular weight (Mw) is a polystyrene conversion value based on the GPC (Gel Permeation Chromatography) method. The weight average molecular weight based on the GPC method is based on the following method, that is, using HLC-8020GPC (manufactured by Tosoh Corporation), using TSKgel Super HZM-H, TSKgel Super HZ4000, TSKgel SuperHZ2000 (manufactured by Tosoh Corporation, 4.6 mmID×15 cm) as a column, and using THF (tetrahydrofuran) as an eluent.

又,在本說明書中,“組成物中的固體成分”係指使用組成物形成之組成物層,組成物包含溶劑時,係指除溶劑以外的所有成分。又,只要為形成組成物層之成分,則液體狀成分亦視為固體成分。In this specification, "solid components in a composition" refers to a composition layer formed using the composition, and when the composition contains a solvent, it refers to all components other than the solvent. In addition, liquid components are also regarded as solid components as long as they are components that form a composition layer.

[組成物] 本發明的組成物包含:樹脂(以下,亦稱為“特定樹脂”。),包含具有後述式(A1)所表示之基團之重複單元A(以下,亦簡稱為“重複單元A”。)、具有酸基之重複單元B(以下,亦簡稱為“重複單元B”。)及具有聚合性基之重複單元C(以下,亦簡稱為“重複單元C”。);聚合性化合物;及顏料。 [Composition] The composition of the present invention comprises: a resin (hereinafter, also referred to as a "specific resin"), a repeating unit A having a group represented by the formula (A1) described below (hereinafter, also referred to as "repeating unit A"), a repeating unit B having an acid group (hereinafter, also referred to as "repeating unit B"), and a repeating unit C having a polymerizable group (hereinafter, also referred to as "repeating unit C"); a polymerizable compound; and a pigment.

本發明的組成物藉由上述結構能夠形成密接性優異且對紅外光的低反射性亦優異之硬化膜,並且顯影殘渣的產生亦少。以下,對組成物的被推測的作用機制進行說明。 推測特定樹脂藉由重複單元A所包含之式(A1)所表示之基團的存在而表面自由能小,在使用上述組成物形成組成物層時,特定樹脂容易偏在於層表面部。又,推測組成物層的特定樹脂所偏在的層表面部藉由重複單元A所包含之式(A1)所表示之基團的存在而對紅外光顯示出低折射率。亦即,認為將藉由本發明的組成物形成之組成物層硬化而形成之硬化膜在硬化膜的表層部形成源自特定樹脂之低折射率層,藉由該低折射率層引起之Ar(Anti-reflection:防反射)效果而顯示出對紅外光的低反射性。 又,藉由本發明的組成物形成之硬化膜由於特定樹脂包含重複單元C而即使以較少曝光量實施曝光處理時密接性亦優異。此外,本發明的組成物由於特定樹脂包含重複單元B,因此在提供於圖案(圖案狀的硬化膜)形成時,能夠抑制顯影殘渣的產生。 The composition of the present invention can form a cured film with excellent adhesion and low reflectivity to infrared light by the above structure, and less development residue is generated. The following is an explanation of the presumed mechanism of action of the composition. It is presumed that the specific resin has a small surface free energy due to the presence of the group represented by formula (A1) contained in the repeating unit A, and when the above composition is used to form a composition layer, the specific resin tends to be concentrated on the surface of the layer. In addition, it is presumed that the surface of the layer where the specific resin of the composition layer is concentrated shows a low refractive index to infrared light due to the presence of the group represented by formula (A1) contained in the repeating unit A. That is, it is believed that the cured film formed by curing the composition layer formed by the composition of the present invention forms a low refractive index layer derived from the specific resin on the surface of the cured film, and exhibits low reflectivity to infrared light due to the Ar (Anti-reflection) effect caused by the low refractive index layer. In addition, the cured film formed by the composition of the present invention has excellent adhesion even when the exposure treatment is performed with a small exposure amount because the specific resin contains the repeating unit C. In addition, the composition of the present invention can suppress the generation of development residues when providing a pattern (pattern-shaped cured film) formation because the specific resin contains the repeating unit B.

又,藉由本發明人等的近期研究,確認到本發明的組成物的保存穩定性亦優異。Furthermore, through recent studies by the inventors, it has been confirmed that the composition of the present invention also has excellent storage stability.

以下,將藉由組成物形成之硬化膜對紅外光的反射性更低、藉由組成物形成之硬化膜的密接性更加優異、將組成物提供於圖案(圖案狀的硬化膜)形成時更抑制顯影殘渣的產生及/或組成物的保存穩定性更加優異亦稱為“本發明的效果更加優異”。Hereinafter, the fact that a cured film formed by the composition has lower reflectivity to infrared light, the cured film formed by the composition has better adhesion, the generation of development residues is suppressed when the composition is provided for pattern formation (pattern-shaped cured film), and/or the storage stability of the composition is better is also referred to as “the effect of the present invention is better”.

以下,對本發明的組成物的各種成分進行說明。Hereinafter, various components of the composition of the present invention will be described.

〔特定樹脂〕 組成物包含特定樹脂。 特定樹脂為包含具有式(A1)所表示之基團之重複單元A(重複單元A)、具有酸基之重複單元B(重複單元B)及具有聚合性基之重複單元C(重複單元C)之樹脂。 以下,對特定樹脂所包含之各種重複單元進行說明。 [Specific resin] The composition contains a specific resin. The specific resin is a resin containing a repeating unit A (repeating unit A) having a group represented by formula (A1), a repeating unit B (repeating unit B) having an acid group, and a repeating unit C (repeating unit C) having a polymerizable group. The following describes various repeating units contained in the specific resin.

<重複單元A> 特定樹脂包含具有式(A1)所表示之基團之重複單元A(重複單元A)。 <Repeating unit A> The specific resin contains a repeating unit A (repeating unit A) having a group represented by formula (A1).

(式(A1)所表示之基團) 以下,首先對式(A1)所表示之基團進行說明。 (Group represented by formula (A1)) First, the group represented by formula (A1) will be described below.

式(A1) *-Si(R A13式中,R A1表示可以具有取代基之烷基、可以具有取代基之芳基或式(A2)所表示之基團。*表示鍵結位置。另外,式中存在複數個之R A1彼此可以各自相同,亦可以不同。 Formula (A1) *-Si( RA1 ) 3 In the formula, RA1 represents an alkyl group which may have a substituent, an aryl group which may have a substituent, or a group represented by formula (A2). * represents a bonding position. In addition, plural RA1 groups in the formula may be the same or different from each other.

式(A2)  *-OSi(R A23式中,R A2表示非水解性基。*表示鍵結位置。另外,式中存在複數個之R A2彼此可以各自相同,亦可以不同。 Formula (A2) *-OSi( RA2 ) 3 In the formula, RA2 represents a non-hydrolyzable group. * represents a bonding position. In addition, plural RA2s in the formula may be the same or different.

作為R A1所表示之烷基,可以為直鏈狀、支鏈狀及環狀中的任一種,直鏈狀或支鏈狀為較佳。 作為上述烷基的碳數,並沒有特別限制,1~30為較佳,1~20為更佳,1~12為進一步較佳,1~6為特佳,1~3為最佳。 作為R A1所表示之烷基可以具有之取代基,並沒有特別限制,例如,可以舉出芳基、烯基、炔基、烷氧基、芳氧基(例如,苯氧基等)、醯氧基、烯氧基及鹵素原子等。 The alkyl group represented by RA1 may be any of a linear, branched, and cyclic group, and a linear or branched group is preferred. The number of carbon atoms in the alkyl group is not particularly limited, and is preferably 1 to 30, more preferably 1 to 20, further preferably 1 to 12, particularly preferably 1 to 6, and most preferably 1 to 3. The substituent that the alkyl group represented by RA1 may have is not particularly limited, and examples thereof include aryl, alkenyl, alkynyl, alkoxy, aryloxy (e.g., phenoxy), acyloxy, alkenyloxy, and halogen atoms.

作為R A1所表示之芳基,可以為單環及多環中的任一種。 作為上述芳基的碳數,並沒有特別限制,6~30為較佳,6~20為更佳,6~10為進一步較佳,苯基為特佳。 作為R A1所表示之芳基可以具有之取代基,並沒有特別限制,例如,可以舉出烷基、芳基、烯基、炔基、烷氧基、芳氧基(例如,苯氧基等)、醯氧基、烯氧基及鹵素原子等。 The aryl group represented by R A1 may be either monocyclic or polycyclic. The number of carbon atoms in the aryl group is not particularly limited, but is preferably 6 to 30, more preferably 6 to 20, and even more preferably 6 to 10, with phenyl being particularly preferred. The substituent that the aryl group represented by R A1 may have is not particularly limited, and examples thereof include alkyl, aryl, alkenyl, alkynyl, alkoxy, aryloxy (e.g., phenoxy), acyloxy, alkenyloxy, and halogen atoms.

另外,作為上述R A1所表示之烷基或R A1所表示之芳基可以具有之取代基,作為在上段部例示之芳基及芳氧基中的芳基部分的碳數,6~18為較佳,6~12為更佳。又,作為烷基及烷氧基中的烷基部分的碳數,1~20為較佳,1~12為更佳,1~6為進一步較佳。又,作為烯基及烯氧基中的烯基部分的碳數,2~20為較佳,2~12為更佳,2~6為進一步較佳。又,作為炔基的碳數,2~20為較佳,2~12為更佳,2~6為進一步較佳。又,作為醯氧基的碳數,2~20為較佳,2~12為更佳,2~6為進一步較佳。 In addition, as a substituent which the alkyl group represented by RA1 or the aryl group represented by RA1 may have, the carbon number of the aryl part in the aryl group and the aryloxy group exemplified in the above paragraph is preferably 6 to 18, and more preferably 6 to 12. Moreover, the carbon number of the alkyl part in the alkyl group and the alkoxy group is preferably 1 to 20, more preferably 1 to 12, and more preferably 1 to 6. Moreover, the carbon number of the alkenyl part in the alkenyl group and the alkenyloxy group is preferably 2 to 20, more preferably 2 to 12, and more preferably 2 to 6. Moreover, the carbon number of the alkynyl group is preferably 2 to 20, more preferably 2 to 12, and more preferably 2 to 6. Moreover, the carbon number of the acyloxy group is preferably 2 to 20, more preferably 2 to 12, and more preferably 2 to 6.

接著,對式(A2)所表示之基團進行說明。 R A2所表示之非水解性基表示直接鍵結於矽原子,藉由水解反應及/或縮合反應不生成矽氧烷鍵之取代基。另外,作為能夠藉由鍵結於矽原子而水解之水解性基,一般而言,可以舉出氫原子、鹵素原子、烷氧基、芳氧基(例如,苯氧基等)、醯氧基及烯氧基等。 作為R A2所表示之非水解性基,具體而言,可以舉出可以具有取代基之烷基及可以具有取代基之芳基等。 作為R A2所表示之可以具有取代基之烷基,與R A1所表示之可以具有取代基之烷基相同,較佳態樣亦相同。 作為R A2所表示之可以具有取代基之芳基,與R A1所表示之可以具有取代基之芳基相同,較佳態樣亦相同。 作為R A2所表示之非水解性基,從本發明之效果更優異之觀點考慮,可以具有取代基之碳數1~6的烷基為較佳,可以具有取代基之碳數1~3的烷基為更佳。 Next, the group represented by formula (A2) is described. The non-hydrolyzable group represented by RA2 refers to a substituent that directly bonds to a silicon atom and does not form a siloxane bond by a hydrolysis reaction and/or a condensation reaction. In addition, as a hydrolyzable group that can be hydrolyzed by bonding to a silicon atom, generally speaking, a hydrogen atom, a halogen atom, an alkoxy group, an aryloxy group (for example, a phenoxy group, etc.), an acyloxy group, and an alkenyloxy group, etc. can be cited. As the non-hydrolyzable group represented by RA2 , specifically, an alkyl group that may have a substituent and an aryl group that may have a substituent can be cited. As the alkyl group that may have a substituent represented by RA2, it is the same as the alkyl group that may have a substituent represented by RA1 , and the preferred embodiment is also the same. The aryl group which may have a substituent represented by RA2 is the same as the aryl group which may have a substituent represented by RA1 , and the preferred embodiment is also the same. As the non-hydrolyzable group represented by RA2 , from the viewpoint of better effect of the present invention, an alkyl group having 1 to 6 carbon atoms which may have a substituent is preferred, and an alkyl group having 1 to 3 carbon atoms which may have a substituent is more preferred.

在式(A1)中,3個R A1中的至少2個表示式(A2)所表示之基團。其中,從本發明之效果更優異之觀點考慮,3個R A1中全部表示式(A2)所表示之基團為較佳。 In formula (A1), at least two of the three RA1s represent groups represented by formula (A2). From the viewpoint of achieving a more excellent effect of the present invention, it is preferred that all of the three RA1s represent groups represented by formula (A2).

在重複單元A中,作為上述式(A1)所表示之基團的個數,只要為1個以上即可,1~3個為較佳,1或2個為更佳,1個為進一步較佳。In the repeating unit A, the number of the group represented by the above formula (A1) may be 1 or more, preferably 1 to 3, more preferably 1 or 2, and even more preferably 1.

作為重複單元A的具體結構,並沒有特別限制,從本發明的效果更容易優異之觀點考慮,下述式(AX1)所表示之重複單元為較佳。The specific structure of the repeating unit A is not particularly limited, but from the perspective of more easily achieving excellent effects of the present invention, a repeating unit represented by the following formula (AX1) is preferred.

[化學式2] [Chemical formula 2]

式中,R A3表示氫原子或烷基。 作為R A3所表示之烷基的碳數,其中,1~5為較佳,1~3為更佳,1為進一步較佳。 In the formula, RA3 represents a hydrogen atom or an alkyl group. The carbon number of the alkyl group represented by RA3 is preferably 1 to 5, more preferably 1 to 3, and even more preferably 1.

L A1表示單鍵、-COO-或-CONR A4-。R A4表示氫原子或烷基。R A4與上述R A3的含義相同,較佳態樣亦相同。 L A1 represents a single bond, -COO- or -CONR A4 -. RA4 represents a hydrogen atom or an alkyl group. RA4 has the same meaning as RA3 above, and the preferred embodiment is also the same.

L A2表示單鍵或2價的連接基。 作為2價的連接基的種類,並沒有特別限制,例如,可以舉出2價的脂肪族烴基、2價的芳香族烴基、-O-、-S-、-SO 2-、-NR A5-、-CO-及將該等組合2種以上之基團。 作為2價的脂肪族烴基,可以為直鏈狀、支鏈狀及環狀中的任一種。又,作為碳數,1~20為較佳,1~10為更佳,1~6為進一步較佳。 作為2價的脂肪族烴基,可以舉出伸烷基、伸烯基及伸炔基,其中,伸烷基為較佳。 作為2價的芳香族烴基,碳數6~10為較佳,例如可以舉出伸苯基。 2價的脂肪族烴基及2價的芳香族烴基可以進一步具有取代基。另外,作為取代基,並沒有特別限制,例如,可以舉出羥基等。 上述R A5表示氫原子或烷基。R A5與上述R A3的含義相同,較佳態樣亦相同。 L A2 represents a single bond or a divalent linking group. The type of the divalent linking group is not particularly limited, and examples thereof include a divalent aliphatic alkyl group, a divalent aromatic alkyl group, -O-, -S-, -SO 2 -, -NR A5 -, -CO-, and a group combining two or more of these. The divalent aliphatic alkyl group may be any of a linear chain, a branched chain, and a ring. In addition, as the number of carbon atoms, 1 to 20 are preferred, 1 to 10 are more preferred, and 1 to 6 are further preferred. As the divalent aliphatic alkyl group, an alkylene group, an alkenylene group, and an alkynylene group may be cited, among which an alkylene group is preferred. As the divalent aromatic alkyl group, a carbon number of 6 to 10 is preferred, and an example thereof may be a phenylene group. The divalent aliphatic alkyl group and the divalent aromatic alkyl group may further have a substituent. In addition, there is no particular limitation on the substituent, and examples thereof include a hydroxyl group and the like. The above-mentioned RA5 represents a hydrogen atom or an alkyl group. RA5 has the same meaning as the above-mentioned RA3 , and the preferred embodiment is also the same.

作為2價的連接基,其中,可以舉出將選自包括可以具有取代基之伸烷基或可以具有取代基之伸烷基、-O-及-CO-之群組中的2種以上組合之基團(例如,可以具有取代基之伸烷基的-CH 2-被-O-及-CO-中的1種或2種的組合取代之基團等)。在上述伸烷基中,除了取代基之部分的總碳數為1~10為較佳,1~6為更佳。 Examples of the divalent linking group include a group consisting of an alkylene group which may have a substituent or a combination of two or more selected from the group consisting of an alkylene group which may have a substituent, -O-, and -CO- (e.g., a group in which -CH2- of an alkylene group which may have a substituent is substituted by a combination of one or two of -O- and -CO-). In the above alkylene group, the total number of carbon atoms excluding the substituent is preferably 1 to 10, more preferably 1 to 6.

W A1表示上述式(A1)所表示之基團。 W A1 represents a group represented by the above formula (A1).

特定樹脂可以單獨包含1種重複單元A,亦可以包含2種以上。 特定樹脂中,作為重複單元A的含量的下限值,相對於特定樹脂的所有重複單元,40質量%以上為較佳,50質量%以上為更佳,60質量%以上為進一步較佳。又,作為重複單元A的含量的上限值,相對於特定樹脂的所有重複單元,90質量%以下為較佳,80質量%以下為更佳,75質量%以下為進一步較佳。併用2種以上的重複單元A時,合計含量在上述範圍內為較佳。 The specific resin may contain one type of repeating unit A alone or two or more types. In the specific resin, as the lower limit of the content of the repeating unit A, 40% by mass or more is preferred, 50% by mass or more is more preferred, and 60% by mass or more is further preferred relative to all repeating units of the specific resin. In addition, as the upper limit of the content of the repeating unit A, 90% by mass or less is preferred, 80% by mass or less is more preferred, and 75% by mass or less is further preferred relative to all repeating units of the specific resin. When two or more types of repeating units A are used in combination, the total content is preferably within the above range.

<重複單元B> 特定樹脂包含具有酸基之重複單元B(重複單元B)。特定樹脂中,重複單元B不僅有助於藉由提高特定樹脂對鹼顯影液的顯影適應性來減少顯影殘渣,而且作為顏料吸附基發揮作用而能夠有助於顏料的分散性。 另外,重複單元B為與重複單元A及重複單元C不同的重複單元。 作為酸基,例如,可以舉出羧酸基、磺酸基、磷酸基及酚性羥基,其中,羧酸基為較佳。 在重複單元B中,作為酸基的個數,只要為1個以上即可,例如可以舉出1~6個。 <Repeating unit B> The specific resin contains a repeating unit B having an acid group (repeating unit B). In the specific resin, the repeating unit B not only contributes to reducing the development residue by improving the development adaptability of the specific resin to the alkaline developer, but also functions as a pigment adsorption group to contribute to the dispersibility of the pigment. In addition, the repeating unit B is a repeating unit different from the repeating unit A and the repeating unit C. As the acid group, for example, a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, and a phenolic hydroxyl group can be cited, among which a carboxylic acid group is preferred. In the repeating unit B, the number of acid groups can be 1 or more, and for example, 1 to 6 can be cited.

作為重複單元B的具體結構,並沒有特別限制,從本發明的效果容易更優異之觀點考慮,下述式(BX)所表示之重複單元為較佳。The specific structure of the repeating unit B is not particularly limited, but from the viewpoint of achieving more excellent effects of the present invention, a repeating unit represented by the following formula (BX) is preferred.

[化學式3] [Chemical formula 3]

式中,R B1表示氫原子或烷基。 作為R B1所表示之烷基的碳數,其中,1~5為較佳,1~3為更佳,1為進一步較佳。 In the formula, RB1 represents a hydrogen atom or an alkyl group. The carbon number of the alkyl group represented by RB1 is preferably 1 to 5, more preferably 1 to 3, and even more preferably 1.

L B1表示單鍵、-COO-或-CONR B2-。R B2表示氫原子或烷基。R B2與上述R B1的含義相同,較佳態樣亦相同。 L B1 represents a single bond, -COO- or -CONR B2 -. R B2 represents a hydrogen atom or an alkyl group. R B2 has the same meaning as R B1 above, and the preferred embodiment is also the same.

L B2表示單鍵或2價的連接基。 作為2價的連接基的種類,並沒有特別限制,例如,可以舉出2價的脂肪族烴基、2價的芳香族烴基、-O-、-S-、-SO 2-、-NR B3-、-CO-及將該等2種以上組合之基團。 作為2價的脂肪族烴基,可以為直鏈狀、支鏈狀及環狀中的任一種。又,作為碳數,1~20為較佳,1~10為更佳。 作為2價的脂肪族烴基,可以舉出伸烷基、伸烯基及伸炔基,其中,伸烷基為較佳。 作為2價的芳香族烴基,碳數6~10為較佳,例如可以舉出伸苯基。 2價的脂肪族烴基及2價的芳香族烴基可以進一步具有取代基。作為取代基,並沒有特別限制,例如,可以為羧酸基、磺酸基、磷酸基及酚性羥基等酸基。 上述R B3表示氫原子或烷基。R B3與上述R B1的含義相同,較佳態樣亦相同。 L B2 represents a single bond or a divalent linking group. The type of the divalent linking group is not particularly limited, and examples thereof include a divalent aliphatic alkyl group, a divalent aromatic alkyl group, -O-, -S-, -SO 2 -, -NR B3 -, -CO-, and a group combining two or more of these. The divalent aliphatic alkyl group may be any of a linear chain, a branched chain, and a ring. In addition, as for the number of carbon atoms, 1 to 20 are preferred, and 1 to 10 are more preferred. As for the divalent aliphatic alkyl group, an alkylene group, an alkenylene group, and an alkynylene group may be cited, among which an alkylene group is preferred. As for the divalent aromatic alkyl group, a carbon number of 6 to 10 is preferred, and for example, a phenylene group may be cited. The divalent aliphatic hydrocarbon group and the divalent aromatic hydrocarbon group may further have a substituent. The substituent is not particularly limited, and may be, for example, a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, a phenolic hydroxyl group or the like. The above-mentioned RB3 represents a hydrogen atom or an alkyl group. RB3 has the same meaning as the above-mentioned RB1 , and the preferred embodiment is also the same.

作為2價的連接基,其中,組合2種以上的選自包括可以具有取代基之伸烷基、可以具有取代基之伸苯基、-O-及-CO-之群組中的基團而得之基團為較佳。As the divalent linking group, a group obtained by combining two or more groups selected from the group consisting of an alkylene group which may have a substituent, a phenylene group which may have a substituent, -O- and -CO- is preferred.

另外,上述式(BX)中,作為-L B1-L B2-所表示之部位中的除氫原子之原子數,例如,未達40為較佳。 In the above formula (BX), the number of the hydrogen atoms in the moiety represented by -LB1 - LB2- is preferably less than 40, for example.

W B1表示酸基。 作為酸基,如已敘述。 W B1 represents an acid group. The acid group is as described above.

作為重複單元B,從本發明之效果更優異之觀點考慮,其中,包含1種以上的下述式(B1)~式(B4)中的任一個所表示之重複單元為較佳。 另外,式(B3)中,n表示平均加成數,為1~3。 From the viewpoint of achieving a better effect of the present invention, the repeating unit B preferably includes one or more repeating units represented by any one of the following formulas (B1) to (B4). In addition, in formula (B3), n represents the average addition number, which is 1 to 3.

[化學式4] [Chemical formula 4]

特定樹脂可以單獨包含1種重複單元B,亦可以包含2種以上。 特定樹脂中,作為重複單元B的含量,相對於特定樹脂的所有重複單元,5~50質量%為較佳,5~40質量%為更佳,10~40質量%為進一步較佳。併用2種以上的重複單元B時,合計含量在上述範圍內為較佳。 The specific resin may contain one type of repeating unit B alone or two or more types. In the specific resin, the content of the repeating unit B is preferably 5 to 50 mass %, more preferably 5 to 40 mass %, and even more preferably 10 to 40 mass % relative to all repeating units of the specific resin. When two or more types of repeating units B are used in combination, the total content is preferably within the above range.

<重複單元C> 特定樹脂包含具有聚合性基之重複單元C(重複單元C)。 作為聚合性基,例如,可以舉出乙烯性不飽和基(例如,*-CO-C(R C2)=CH 2所表示之基團(*表示鍵結位置,R C2表示氫原子或烷基。例如,相當於(甲基)丙烯醯基。)、乙烯基及苯乙烯基等)及環狀醚基(例如,環氧基及氧環丁烷基等)等。其中,作為聚合性基,從能夠在自由基反應中進行聚合控制的觀點考慮,乙烯性不飽和基為較佳。作為乙烯性不飽和基,*-CO-C(R C2)=CH 2所表示之基團為較佳。另外,作為R C2所表示之烷基的碳數,1~5為較佳,1~3為更佳,1為進一步較佳。 又,在重複單元C中,聚合性基經由共價鍵性的連接基而與主鏈連接為較佳。亦即,在重複單元C中,在聚合性基與主鏈之間的連接位置不包含離子鍵等其他鍵為較佳。 另外,重複單元C為與重複單元A及重複單元B不同之重複單元。 在重複單元C中,作為聚合性基的個數,只要為1個以上即可,1~3個為較佳,1或2個為更佳,1個為進一步較佳。 <Repeating unit C> The specific resin contains a repeating unit C (repeating unit C) having a polymerizable group. Examples of the polymerizable group include an ethylenic unsaturated group (e.g., a group represented by *-CO-C( RC2 )= CH2 (* represents a bonding position, and RC2 represents a hydrogen atom or an alkyl group. For example, it is equivalent to a (meth)acryl group), a vinyl group, a styryl group, etc.), and a cyclic ether group (e.g., an epoxy group, an oxobutylene group, etc.). Among them, as a polymerizable group, an ethylenic unsaturated group is preferred from the viewpoint of being able to control polymerization in a free radical reaction. As an ethylenic unsaturated group, a group represented by *-CO-C( RC2 )= CH2 is preferred. In addition, the carbon number of the alkyl group represented by RC2 is preferably 1 to 5, more preferably 1 to 3, and further preferably 1. Furthermore, in the repeating unit C, the polymerizable group is preferably connected to the main chain via a covalent bonding group. That is, in the repeating unit C, it is preferred that the bonding position between the polymerizable group and the main chain does not include other bonds such as ionic bonds. In addition, the repeating unit C is a repeating unit different from the repeating unit A and the repeating unit B. In the repeating unit C, the number of polymerizable groups can be 1 or more, preferably 1 to 3, more preferably 1 or 2, and further preferably 1.

作為重複單元C的具體結構,並沒有特別限制,下述式(CX1)所表示之重複單元為較佳。The specific structure of the repeating unit C is not particularly limited, but a repeating unit represented by the following formula (CX1) is preferred.

[化學式5] [Chemical formula 5]

式中,R C1表示氫原子或烷基。 作為R C1所表示之烷基的碳數,其中,1~5為較佳,1~3為更佳,1為進一步較佳。 In the formula, R C1 represents a hydrogen atom or an alkyl group. The carbon number of the alkyl group represented by R C1 is preferably 1 to 5, more preferably 1 to 3, and even more preferably 1.

L C1表示單鍵、-COO-或-CONR C2-。R C2表示氫原子或烷基。R C2與上述R C1的含義相同,較佳態樣亦相同。 L C1 represents a single bond, -COO- or -CONR C2 -. R C2 represents a hydrogen atom or an alkyl group. R C2 has the same meaning as R C1 above, and the preferred embodiment is also the same.

L C2表示單鍵或2價的連接基。 作為2價的連接基的種類,並沒有特別限制,例如,可以舉出2價的脂肪族烴基、2價的芳香族烴基、-O-、-S-、-SO 2-、-NR C3-、-CO-及將該等2種以上組合之基團。 作為2價的脂肪族烴基,可以為直鏈狀、支鏈狀及環狀中的任一種。又,作為碳數,1~20為較佳,1~10為更佳。 作為2價的脂肪族烴基,可以舉出伸烷基、伸烯基及伸炔基,其中,伸烷基為較佳。 作為2價的芳香族烴基,碳數6~10為較佳,例如可以舉出伸苯基。 2價的脂肪族烴基及2價的芳香族烴基可以進一步具有取代基。作為取代基,並沒有特別限制,例如,可以舉出羧酸基、磺酸基、磷酸基及酚性羥基等酸基以及羥基等。 上述R C3表示氫原子或烷基。R C3與上述R C1的含義相同,較佳態樣亦相同。 L C2 represents a single bond or a divalent linking group. The type of the divalent linking group is not particularly limited, and examples thereof include divalent aliphatic alkyl groups, divalent aromatic alkyl groups, -O-, -S-, -SO 2 -, -NR C3 -, -CO-, and groups combining two or more of these. The divalent aliphatic alkyl group may be any of a linear chain, a branched chain, and a ring. In addition, as for the number of carbon atoms, 1 to 20 are preferred, and 1 to 10 are more preferred. As for the divalent aliphatic alkyl group, alkylene groups, alkenylene groups, and alkynylene groups may be cited, among which alkylene groups are preferred. As for the divalent aromatic alkyl group, those having 6 to 10 carbon atoms are preferred, and for example, phenylene groups may be cited. The divalent aliphatic hydrocarbon group and the divalent aromatic hydrocarbon group may further have a substituent. The substituent is not particularly limited, and examples thereof include acid groups such as carboxylic acid groups, sulfonic acid groups, phosphoric acid groups, and phenolic hydroxyl groups, as well as hydroxyl groups. The above-mentioned R C3 represents a hydrogen atom or an alkyl group. R C3 has the same meaning as the above-mentioned R C1 , and the preferred embodiment is also the same.

作為2價的連接基,其中,組合2種以上的選自包括可以具有取代基之伸烷基、可以具有取代基之伸苯基、-O-及-CO-之群組中的基團而得之基團為較佳。As the divalent linking group, a group obtained by combining two or more groups selected from the group consisting of an alkylene group which may have a substituent, a phenylene group which may have a substituent, -O- and -CO- is preferred.

另外,上述式(CX1)中,作為-L C1-L C2-所表示之部位中的除氫原子之原子數,例如,未達40為較佳。 In the above formula (CX1), the number of the hydrogen atoms in the site represented by -LC1 - LC2- is preferably less than 40, for example.

W C1表示聚合性基。 作為W C1所表示之聚合性基,可以舉出已敘述的聚合性基。 W C1 represents a polymerizable group. Examples of the polymerizable group represented by W C1 include the polymerizable groups already described.

作為重複單元C,其中,式(CX2)所表示之重複單元為更佳。 [化學式6] As the repeating unit C, the repeating unit represented by formula (CX2) is more preferred. [Chemical Formula 6]

式中,R C1及R C2表示氫原子或烷基。 R C1及R C2所表示之烷基與式(CX1)中的R C1所表示之烷基的含義相同,較佳態樣亦相同。 L C3表示2價的連接基。 L C3所表示之2價的連接基與式(CX1)中的L C2所表示之2價的連接基相同。 作為L C3所表示之2價的連接基,組合2種以上的選自包括可以具有取代基之伸烷基、可以具有取代基之伸苯基、-O-及-CO-之群組中的基團而得之基團為較佳。 In the formula, R C1 and R C2 represent a hydrogen atom or an alkyl group. The alkyl groups represented by R C1 and R C2 have the same meanings as the alkyl group represented by R C1 in formula (CX1), and the preferred embodiments are also the same. L C3 represents a divalent linking group. The divalent linking group represented by L C3 is the same as the divalent linking group represented by L C2 in formula (CX1). As the divalent linking group represented by L C3 , a group obtained by combining two or more groups selected from the group consisting of an alkylene group which may have a substituent, a phenylene group which may have a substituent, -O- and -CO- is preferred.

特定樹脂可以單獨包含1種重複單元C,亦可以包含2種以上。 特定樹脂中,作為重複單元C的含量,相對於特定樹脂的所有重複單元,5~30質量%為較佳,5~20質量%為更佳,5~15質量%為進一步較佳。併用2種以上的重複單元C時,合計含量在上述範圍內為較佳。 The specific resin may contain one type of repeating unit C alone or two or more types. In the specific resin, the content of the repeating unit C is preferably 5 to 30 mass %, more preferably 5 to 20 mass %, and even more preferably 5 to 15 mass % relative to all repeating units of the specific resin. When two or more types of repeating units C are used in combination, the total content is preferably within the above range.

<重複單元D> 特定樹脂可以包含上述重複單元A~C以外的其他重複單元D(以下,亦稱為“重複單元D”。)。 <Repeating unit D> The specific resin may contain other repeating units D (hereinafter, also referred to as "repeating unit D") other than the above-mentioned repeating units A to C.

作為重複單元D,可以舉出具有除了上述重複單元以外的各種功能之其他重複單元。 作為重複單元D,可以舉出疏水性重複單元(以下,亦稱為“重複單元D1”。)、具有能夠與顏料等被分散物相互作用之官能基之重複單元(以下,亦稱為“重複單元D2”。)、具有鹽結構之重複單元(以下,亦稱為“重複單元D3”。)及具有選自包括平均加成數為3以上的聚氧伸烷基及平均加成數為3以上的聚氧伸烷基羰基之群組中的基團之重複單元(以下,亦稱為“重複單元D4”。)等。 As repeating unit D, other repeating units having various functions other than the above-mentioned repeating units can be cited. As repeating unit D, hydrophobic repeating units (hereinafter, also referred to as "repeating unit D1"), repeating units having functional groups capable of interacting with dispersed materials such as pigments (hereinafter, also referred to as "repeating unit D2"), repeating units having salt structures (hereinafter, also referred to as "repeating units D3"), and repeating units having groups selected from the group including polyoxyalkylene groups having an average addition number of 3 or more and polyoxyalkylene carbonyl groups having an average addition number of 3 or more (hereinafter, also referred to as "repeating unit D4"), etc. can be cited.

(重複單元D1) 特定樹脂可以包含疏水性重複單元(重複單元D1)。 作為重複單元D1的一態樣,可以舉出源自ClogP值為1.2以上的化合物(單體)之重複單元,其中,源自ClogP值為1.2~8的化合物之重複單元為較佳。 (Repeating unit D1) The specific resin may contain a hydrophobic repeating unit (repeating unit D1). As one aspect of the repeating unit D1, a repeating unit derived from a compound (monomer) having a ClogP value of 1.2 or more can be cited, among which a repeating unit derived from a compound having a ClogP value of 1.2 to 8 is preferred.

在本說明書中,ClogP值為藉由可從Daylight Chemical Information System, Inc.獲得之程式“CLOGP”計算之值。該程式提供藉由Hansch, Leo的片段法(fragmentapproach)(參閱下述文獻)計算之“計算logP”的值。片段法依據化合物的化學結構,將化學結構分割為部分結構(片段),合計分配於該片段之logP貢獻量,藉此推算化合物的logP值。其詳細內容記載於以下文獻中。在本說明書中,使用藉由程式CLOGP v4.82計算而得之ClogP值。 A. J. Leo,Comprehensive Medicinal Chemistry,Vol.4,C.Hansch,P. G. Sammnens,J. B. Taylor and C. A. Ramsden,Eds., p.295,Pergamon Press,1990 C. Hansch & A. J. Leo. Substituent Constants For Correlation Analysis in Chemistry and Biology. John Wiley & Sons. A. J. Leo. Calculating logPoct from structure. Chem. Rev., 93, 1281-1306, 1993. In this specification, the ClogP value is a value calculated by the program "CLOGP" available from Daylight Chemical Information System, Inc. The program provides the value of "calculated logP" calculated by the fragment approach of Hansch, Leo (see the following reference). The fragment approach divides the chemical structure into partial structures (fragments) based on the chemical structure of the compound, and calculates the logP value of the compound by summing up the logP contribution allocated to the fragment. The details are described in the following reference. In this specification, the ClogP value calculated by the program CLOGP v4.82 is used. A. J. Leo, Comprehensive Medicinal Chemistry, Vol.4, C.Hansch, P. G. Sammnens, J. B. Taylor and C. A. Ramsden, Eds., p.295, Pergamon Press, 1990 C. Hansch & A. J. Leo. Substituent Constants For Correlation Analysis in Chemistry and Biology. John Wiley & Sons. A. J. Leo. Calculating logPoct from structure. Chem. Rev., 93, 1281-1306, 1993.

logP係指分配係數P(Partition Coefficient)的常用對數,為以定量數值表示某一有機化合物在油(一般為1-辛醇)與水的2相系平衡中如何分配之物性值,由以下式表示。 logP=log(Coil/Cwater) 式中,Coil表示油相中的化合物的莫耳濃度,Cwater表示水相中的化合物的莫耳濃度。 若logP的值包括0而正值增大,則油溶性增加,若以負值的絕對值增大,則水溶性增加,與有機化合物的水溶性呈負有關,作為估計有機化合物的親水性和疏水性的參數而被廣泛利用。 logP refers to the common logarithm of the partition coefficient P (Partition Coefficient), which is a physical property value that quantitatively represents how a certain organic compound is distributed in the two-phase system equilibrium of oil (generally 1-octanol) and water, and is expressed by the following formula. logP=log(Coil/Cwater) In the formula, Coil represents the molar concentration of the compound in the oil phase, and Cwater represents the molar concentration of the compound in the water phase. If the logP value includes 0 and increases with positive values, the oil solubility increases, and if it increases with negative absolute values, the water solubility increases. It is negatively correlated with the water solubility of organic compounds and is widely used as a parameter for estimating the hydrophilicity and hydrophobicity of organic compounds.

又,作為重複單元D1的其他態樣,可以舉出下述式(DX1)所表示之重複單元。Furthermore, as another aspect of the repeating unit D1, a repeating unit represented by the following formula (DX1) can be cited.

[化學式7] [Chemical formula 7]

式中,R D1表示氫原子或烷基。 作為R D1所表示之烷基的碳數,1~5為較佳,1~3為更佳,1為進一步較佳。 R D2表示碳數1~12的直鏈狀或支鏈狀的烷基或碳數7~18的芳烷基,從本發明之效果更優異之觀點考慮,碳數7~18的芳烷基為較佳。 作為R D2所表示之烷基的碳數,1~8為較佳,1~6為更佳,1~4為進一步較佳。又,直鏈狀烷基為較佳。 作為R D2所表示之芳烷基的碳數,7~18為較佳,7~12為更佳,7~10為進一步較佳。 又,R D2所表示之烷基及芳烷基可以具有取代基。作為取代基並沒有特別限制,例如可以舉出羥基。 In the formula, R D1 represents a hydrogen atom or an alkyl group. The carbon number of the alkyl group represented by R D1 is preferably 1 to 5, more preferably 1 to 3, and more preferably 1. R D2 represents a linear or branched alkyl group having 1 to 12 carbon atoms or an aralkyl group having 7 to 18 carbon atoms. From the viewpoint of more excellent effects of the present invention, an aralkyl group having 7 to 18 carbon atoms is preferred. The carbon number of the alkyl group represented by R D2 is preferably 1 to 8, more preferably 1 to 6, and more preferably 1 to 4. Furthermore, a linear alkyl group is preferred. The carbon number of the aralkyl group represented by R D2 is preferably 7 to 18, more preferably 7 to 12, and more preferably 7 to 10. Furthermore, the alkyl group and aralkyl group represented by R D2 may have a substituent. The substituent is not particularly limited, and examples thereof include a hydroxyl group.

作為重複單元D1,從本發明之效果更優異之觀點考慮,具有苄基之重複單元為較佳,源自(甲基)丙烯酸苄酯之重複單元為更佳。From the viewpoint of achieving a more excellent effect of the present invention, the repeating unit D1 is preferably a repeating unit having a benzyl group, and more preferably a repeating unit derived from benzyl (meth)acrylate.

特定樹脂可以單獨包含1種重複單元D1,亦可以包含2種以上。 特定樹脂中,作為重複單元D1的含量,相對於特定樹脂的所有重複單元,5~20質量%為較佳,5~15質量%為更佳,5~10質量%為進一步較佳。併用2種以上的重複單元D1時,合計含量在上述範圍內為較佳。 The specific resin may contain one type of repeating unit D1 alone or two or more types. In the specific resin, the content of the repeating unit D1 is preferably 5 to 20 mass %, more preferably 5 to 15 mass %, and even more preferably 5 to 10 mass % relative to all repeating units of the specific resin. When two or more types of repeating units D1 are used in combination, the total content is preferably within the above range.

(重複單元D2) 特定樹脂可以含有包含能夠與顏料等被分散物形成相互作用之官能基之重複單元(重複單元D2)。 作為能夠與該顏料等被分散物相互作用之官能基,例如,可以舉出鹼基及配位性基等。 (Repeating unit D2) The specific resin may contain a repeating unit (repeating unit D2) including a functional group capable of interacting with a dispersed substance such as a pigment. As the functional group capable of interacting with the dispersed substance such as a pigment, for example, a base group and a coordination group can be cited.

作為鹼基,例如,可以舉出一級胺基、二級胺基、三級胺基、包含N原子之雜環、醯胺基及脲基等。 特定樹脂可以單獨包含1種包含鹼基之重複單元,亦可以包含2種以上。 作為配位性基及具有反應性之官能基,例如可以舉出乙醯基乙醯氧基、三烷氧基甲矽烷基、異氰酸酯基、酸酐及醯氯等。 特定樹脂可以單獨包含1種包含配位性基之重複單元,亦可以包含2種以上。 特定樹脂中,作為重複單元D2的含量,相對於特定樹脂的所有重複單元,5~20質量%為較佳,5~15質量%為更佳,5~10質量%為進一步較佳。併用2種以上的重複單元D2時,合計含量在上述範圍內為較佳。 As the base group, for example, a primary amine group, a diamine group, a tertiary amine group, a heterocycle containing a N atom, an amide group, and a urea group can be cited. The specific resin can contain one type of repeating unit containing a base group alone, or two or more types. As the ligand and the reactive functional group, for example, an acetylacetoxy group, a trialkoxysilyl group, an isocyanate group, an acid anhydride, and an acyl chloride can be cited. The specific resin can contain one type of repeating unit containing a ligand alone, or two or more types. In the specific resin, the content of the repeating unit D2 is preferably 5 to 20 mass %, more preferably 5 to 15 mass %, and even more preferably 5 to 10 mass % relative to all the repeating units of the specific resin. When two or more repeating units D2 are used in combination, the total content is preferably within the above range.

(重複單元D3) 特定樹脂可以包含具有鹽結構之重複單元(以下,亦稱為“重複單元D3”。)。 作為重複單元D3,例如為源自(甲基)丙烯酸之重複單元,並且上述重複單元中的羧酸部分被陰離子化而與4級銨形成鹽結構而成之重複單元為較佳。作為4級銨,後述式(TY)所表示之結構為較佳。 特定樹脂可以單獨包含1種重複單元D3,亦可以包含2種以上。 特定樹脂中,作為重複單元D3的含量,相對於特定樹脂的所有重複單元,5~20質量%為較佳,5~15質量%為更佳,5~10質量%為進一步較佳。併用2種以上的重複單元D3時,合計含量在上述範圍內為較佳。 (Repeating unit D3) The specific resin may contain a repeating unit having a salt structure (hereinafter, also referred to as "repeating unit D3"). As the repeating unit D3, for example, a repeating unit derived from (meth) acrylic acid, and a repeating unit in which the carboxylic acid part in the above repeating unit is anionized to form a salt structure with quaternary ammonium is preferred. As quaternary ammonium, the structure represented by the formula (TY) described below is preferred. The specific resin may contain one type of repeating unit D3 alone, or may contain two or more types. In the specific resin, the content of the repeating unit D3 is preferably 5 to 20 mass %, more preferably 5 to 15 mass %, and even more preferably 5 to 10 mass % relative to all repeating units of the specific resin. When two or more repeating units D3 are used together, the total content is preferably within the above range.

(重複單元D4) 特定樹脂可以包含具有選自包括平均加成數為3以上的聚氧伸烷基及平均加成數為3以上的聚氧伸烷基羰基之群組中的基團之重複單元(以下,亦稱為“重複單元D4”)。 (Repeating unit D4) The specific resin may contain a repeating unit having a group selected from the group including a polyoxyalkylene group having an average addition number of 3 or more and a polyoxyalkylene carbonyl group having an average addition number of 3 or more (hereinafter, also referred to as "repeating unit D4").

另外,聚氧伸烷基表示-(O-AL) n1-所表示之基團,聚氧伸烷基羰基表示-(O-AL-CO) n2-所表示之基團。 在聚氧伸烷基及聚氧伸烷基羰基中,存在複數個氧伸烷基(-O-AL-)可以各自相同,亦可以不同。 In addition, a polyoxyalkylene group represents a group represented by -(O-AL) n1 -, and a polyoxyalkylene carbonyl group represents a group represented by -(O-AL-CO) n2 -. In the polyoxyalkylene group and the polyoxyalkylene carbonyl group, a plurality of oxyalkylene groups (-O-AL-) may be the same or different.

作為氧伸烷基及氧伸烷基羰基中的伸烷基的碳數(AL的碳數),並沒有特別限制,2~10為較佳,2~9為更佳,2~7為進一步較佳。 作為聚氧伸烷基及氧伸烷基羰基中的平均加成數(n1、n2)為3以上,4以上為較佳,5以上為更佳,6以上為進一步較佳,8以上為特佳。又,作為上限值,100以下為較佳,70以下為更佳,30以下為進一步較佳。 The carbon number of the alkylene group in the oxyalkylene group and the oxyalkylene carbonyl group (the carbon number of AL) is not particularly limited, but is preferably 2 to 10, more preferably 2 to 9, and even more preferably 2 to 7. The average addition number (n1, n2) in the polyoxyalkylene group and the oxyalkylene carbonyl group is 3 or more, preferably 4 or more, more preferably 5 or more, even more preferably 6 or more, and particularly preferably 8 or more. In addition, as the upper limit, 100 or less is preferably, 70 or less is more preferably, and 30 or less is even more preferably.

作為重複單元D4,例如為後述之分散劑(分散樹脂)中說明之式(1)~式(3)中任一個所表示之重複單元,可以舉出聚氧伸烷基及氧伸烷基羰基的平均加成數為3以上者。另外,後述之分散劑(分散樹脂)中說明之式(1)及式(2)所表示之重複單元相當於具有聚氧乙烯羰基之重複單元,後述之分散劑(分散樹脂)中說明之式(3)所表示之重複單元相當於具有聚氧伸烷基之重複單元。The repeating unit D4 may be, for example, a repeating unit represented by any one of the formulas (1) to (3) described in the dispersant (dispersing resin) described below, and may be a unit in which the average number of additions of polyoxyalkylene groups and oxyalkylene carbonyl groups is 3 or more. The repeating units represented by the formulas (1) and (2) described in the dispersant (dispersing resin) described below are equivalent to repeating units having a polyoxyethylene carbonyl group, and the repeating unit represented by the formula (3) described in the dispersant (dispersing resin) described below is equivalent to a repeating unit having a polyoxyalkylene group.

特定樹脂可以單獨包含1種重複單元D4,亦可以包含2種以上。 特定樹脂中,作為重複單元D4的含量,相對於特定樹脂的所有重複單元,5~20質量%為較佳,5~15質量%為更佳,5~10質量%為進一步較佳。併用2種以上的重複單元D4時,合計含量在上述範圍內為較佳。 The specific resin may contain one type of repeating unit D4 alone or two or more types. In the specific resin, the content of the repeating unit D4 is preferably 5 to 20 mass %, more preferably 5 to 15 mass %, and even more preferably 5 to 10 mass % relative to all repeating units of the specific resin. When two or more types of repeating units D4 are used in combination, the total content is preferably within the above range.

組成物中的特定樹脂的含量並沒有特別限制,相對於組成物的總固體成分,2~40質量%為較佳,5~30質量%為更佳,5~25質量%為進一步較佳。 特定樹脂可以單獨使用1種,亦可以併用2種以上。併用2種以上的特定樹脂時,合計含量在上述範圍內者為較佳。 The content of the specific resin in the composition is not particularly limited. It is preferably 2 to 40 mass %, more preferably 5 to 30 mass %, and even more preferably 5 to 25 mass % relative to the total solid content of the composition. The specific resin may be used alone or in combination of two or more. When two or more specific resins are used in combination, the total content is preferably within the above range.

作為特定樹脂中的矽原子的含量的下限值,從本發明之效果更優異之觀點考慮,相對於特定樹脂的總質量,例如為10.0質量%以上為較佳,11.5質量%以上為更佳,17.0質量%以上為進一步較佳。作為其上限值,例如,50.0質量%以下為較佳,40.0質量%以下為更佳,35.0質量%以下為進一步較佳。另外,例如,只要變更特定樹脂的構成成分亦即重複單元A的含量,則可獲得具有期望的矽原子含量之樹脂。As the lower limit of the content of silicon atoms in the specific resin, from the viewpoint of a better effect of the present invention, relative to the total mass of the specific resin, for example, 10.0 mass% or more is preferred, 11.5 mass% or more is more preferred, and 17.0 mass% or more is further preferred. As the upper limit, for example, 50.0 mass% or less is preferred, 40.0 mass% or less is more preferred, and 35.0 mass% or less is further preferred. In addition, for example, by changing the content of the repeating unit A, which is a constituent component of the specific resin, a resin having a desired silicon atom content can be obtained.

作為特定樹脂的酸值,從確保對鹼顯影液的顯影性之觀點及本發明之效果更優異之觀點考慮,50mgKOH/g以上為較佳,55mgKOH/g以上為更佳,60mgKOH/g以上為進一步較佳,70mgKOH/g以上為特佳。作為上限值,170mgKOH/g以下為較佳,150mgKOH/g以下為更佳,100mgKOH/g以下為進一步較佳。另外,例如,只要變更特定樹脂的構成成分亦即重複單元B的含量,則可獲得具有期望的酸值之樹脂。As for the acid value of the specific resin, from the viewpoint of ensuring the developability with alkaline developer and the viewpoint of achieving the effect of the present invention, 50 mgKOH/g or more is preferred, 55 mgKOH/g or more is more preferred, 60 mgKOH/g or more is further preferred, and 70 mgKOH/g or more is particularly preferred. As the upper limit, 170 mgKOH/g or less is preferred, 150 mgKOH/g or less is more preferred, and 100 mgKOH/g or less is further preferred. In addition, for example, by changing the content of the repeating unit B, which is a constituent component of the specific resin, a resin having a desired acid value can be obtained.

作為特定樹脂的雙鍵價(C=C價),從本發明之效果更優異之觀點考慮,0.10mmol/g以上為較佳,0.15mmol/g以上為更佳,0.35mmol/g以上為進一步較佳。作為上限值,3.0mmol/g以下為較佳,2.0mmol/g以下為更佳,1.5mmol/g以下為進一步較佳。另外,例如,在特定樹脂的構成成分亦即重複單元C中,只要將聚合性基設為乙烯性不飽和基等,並且變更其含量,則可獲得具有期望的雙鍵價之樹脂。As for the bivalent bond (C=C valent bond) of the specific resin, from the viewpoint of more excellent effects of the present invention, it is preferably 0.10 mmol/g or more, more preferably 0.15 mmol/g or more, and even more preferably 0.35 mmol/g or more. As the upper limit, it is preferably 3.0 mmol/g or less, more preferably 2.0 mmol/g or less, and even more preferably 1.5 mmol/g or less. In addition, for example, in the repeating unit C, which is a constituent of the specific resin, as long as the polymerizable group is set to an ethylenically unsaturated group, etc., and its content is changed, a resin having a desired bivalent bond can be obtained.

作為特定樹脂的重量平均分子量,5,000~100,000為較佳,6,000~80,000為更佳,15,000~60,000為進一步較佳,15,000~50,000為最佳。The weight average molecular weight of the specific resin is preferably 5,000 to 100,000, more preferably 6,000 to 80,000, further preferably 15,000 to 60,000, and most preferably 15,000 to 50,000.

另外,從本發明之效果更優異之觀點考慮,樹脂不包含聚二烷基矽氧烷結構等將鍵結2個有機基團之矽原子作為構成原子之聚矽氧烷結構(亦即,D單元結構)亦較佳。In addition, from the viewpoint of achieving a more excellent effect of the present invention, it is also preferred that the resin does not contain a polysiloxane structure such as a polydialkylsiloxane structure having silicon atoms bonding two organic groups as constituent atoms (i.e., a D unit structure).

〔聚合性化合物〕 組成物包含聚合性化合物。 聚合性化合物為能夠藉由受後述之光聚合起始劑等的作用而聚合之有機化合物(例如,包含乙烯性不飽和基之有機化合物)為較佳。 又,組成物包含溶劑時,聚合性化合物溶解於溶劑中而存在為較佳。 [Polymerizable compound] The composition contains a polymerizable compound. The polymerizable compound is preferably an organic compound that can be polymerized by the action of a photopolymerization initiator described later (for example, an organic compound containing an ethylenically unsaturated group). In addition, when the composition contains a solvent, the polymerizable compound is preferably present in the solvent while being dissolved.

聚合性化合物的分子量(具有分子量分布時為重量平均分子量)並沒有特別限制,2500以下為較佳。下限為100以上為較佳。The molecular weight (weight average molecular weight when there is a molecular weight distribution) of the polymerizable compound is not particularly limited, but is preferably 2500 or less. The lower limit is preferably 100 or more.

聚合性化合物為包含乙烯性不飽和基(包含乙烯性不飽和鍵之基團)的化合物為較佳。 亦即,組成物包含含有乙烯性不飽和基之低分子化合物作為聚合性化合物為較佳。 作為聚合性化合物,包含1個以上的乙烯性不飽和鍵的化合物為較佳,包含2個以上的化合物為更佳,包含3個以上的化合物為進一步較佳,包含4個以上的化合物為特佳。上限例如為15個以下。作為乙烯性不飽和基,例如可以舉出乙烯基、(甲基)烯丙基及(甲基)丙烯醯基。 The polymerizable compound is preferably a compound containing an ethylenically unsaturated group (a group containing an ethylenically unsaturated bond). That is, the composition preferably contains a low molecular compound containing an ethylenically unsaturated group as a polymerizable compound. As a polymerizable compound, a compound containing one or more ethylenically unsaturated bonds is preferred, a compound containing two or more is more preferred, a compound containing three or more is further preferred, and a compound containing four or more is particularly preferred. The upper limit is, for example, 15 or less. As ethylenically unsaturated groups, for example, vinyl, (meth)allyl, and (meth)acryloyl can be cited.

作為聚合性化合物,例如,能夠援用日本特開2008-260927號公報的[0050]段及日本特開2015-068893號公報的[0040]段中記載之化合物,該等內容被編入到本說明書中。As the polymerizable compound, for example, the compounds described in paragraph [0050] of JP-A-2008-260927 and paragraph [0040] of JP-A-2015-068893 can be cited, and the contents thereof are incorporated into the present specification.

聚合性化合物例如可以為單體、預聚物、寡聚物及該等的混合物以及該等的多聚體等化學形態中的任一種。 聚合性化合物為3~15官能的(甲基)丙烯酸酯化合物為較佳,3~6官能的(甲基)丙烯酸酯化合物為更佳。 The polymerizable compound may be any chemical form such as a monomer, a prepolymer, an oligomer, a mixture thereof, or a polymer thereof. The polymerizable compound is preferably a 3-15-functional (meth)acrylate compound, and more preferably a 3-6-functional (meth)acrylate compound.

聚合性化合物為包含1個以上的乙烯性不飽和基之常壓下具有100℃以上的沸點的化合物亦較佳。例如,能夠援用日本特開2013-029760號公報的[0227]段及日本特開2008-292970號公報的[0254]~[0257]段中記載之化合物,該等內容被編入到本說明書中。The polymerizable compound is preferably a compound containing one or more ethylenically unsaturated groups and having a boiling point of 100° C. or higher at normal pressure. For example, the compounds described in paragraph [0227] of JP-A-2013-029760 and paragraphs [0254] to [0257] of JP-A-2008-292970 can be cited, and the contents are incorporated into this specification.

聚合性化合物為二新戊四醇三丙烯酸酯(市售品例如為KAYARAD D-330;Nippon Kayaku Co., Ltd.製造)、二新戊四醇四丙烯酸酯(市售品例如為KAYARAD D-320;Nippon Kayaku Co., Ltd.製造)、二新戊四醇五(甲基)丙烯酸酯(市售品例如為KAYARAD D-310;Nippon Kayaku Co., Ltd.製造)、二新戊四醇六(甲基)丙烯酸酯(市售品例如為KAYARAD DPHA;Nippon Kayaku Co., Ltd.製造、A-DPH-12E;SHIN-NAKAMURA CHEMICAL Co., Ltd.製造)及該等的(甲基)丙烯醯基介導乙二醇殘基或丙二醇殘基之結構(例如,Sartomer company Inc.的市售品SR454、SR499)為較佳。亦能夠使用該等的寡聚物類型。又,可以使用NK Ester A-TMMT(新戊四醇四丙烯酸酯,SHIN-NAKAMURA CHEMICAL Co., Ltd製造)、KAYARAD RP-1040、KAYARAD DPEA-12LT、KAYARAD DPHA LT、KAYARAD RP-3060及KAYARAD DPEA-12(均為產品名稱,Nippon Kayaku Co., Ltd.製造)。又,聚合性化合物可以使用在化合物中具有(甲基)丙烯醯基及胺基甲酸酯鍵兩者之(甲基)丙烯酸胺基甲酸酯系化合物,例如,可以使用KAYARAD DPHA-40H(產品名稱,Nippon Kayaku Co., Ltd.製造)。 以下,示出較佳的聚合性化合物的態樣。 Preferred polymerizable compounds are dipentatriol triacrylate (commercially available products such as KAYARAD D-330; manufactured by Nippon Kayaku Co., Ltd.), dipentatriol tetraacrylate (commercially available products such as KAYARAD D-320; manufactured by Nippon Kayaku Co., Ltd.), dipentatriol penta(meth)acrylate (commercially available products such as KAYARAD D-310; manufactured by Nippon Kayaku Co., Ltd.), dipentatriol hexa(meth)acrylate (commercially available products such as KAYARAD DPHA; manufactured by Nippon Kayaku Co., Ltd., A-DPH-12E; manufactured by SHIN-NAKAMURA CHEMICAL Co., Ltd.), and structures in which (meth)acryloyl groups thereof mediate ethylene glycol residues or propylene glycol residues (for example, commercially available products SR454 and SR499 from Sartomer company Inc.). Such oligomer types can also be used. In addition, NK Ester A-TMMT (neopentaerythritol tetraacrylate, manufactured by SHIN-NAKAMURA CHEMICAL Co., Ltd.), KAYARAD RP-1040, KAYARAD DPEA-12LT, KAYARAD DPHA LT, KAYARAD RP-3060 and KAYARAD DPEA-12 (all product names, manufactured by Nippon Kayaku Co., Ltd.) can be used. In addition, the polymerizable compound can use a (meth)acrylic urethane compound having both a (meth)acrylic group and a urethane bond in the compound, for example, KAYARAD DPHA-40H (product name, manufactured by Nippon Kayaku Co., Ltd.) can be used. The following shows the state of the preferred polymerizable compound.

聚合性化合物可以具有羧酸基、磺酸基及磷酸基等酸基。包含酸基之聚合性化合物為脂肪族聚羥基化合物與不飽和羧酸的酯為較佳,藉由使非芳香族羧酸酐與脂肪族聚羥基化合物的未反應的羥基進行反應而具有酸基之聚合性化合物為更佳,該酯中,脂肪族聚羥基化合物為作為新戊四醇及/或二新戊四醇的化合物為進一步較佳。作為市售品,例如可以舉出TOAGOSEI CO., LTD.製造之ARONIX TO-2349、M-305、M-510及M-520。The polymerizable compound may have an acid group such as a carboxylic acid group, a sulfonic acid group, and a phosphoric acid group. The polymerizable compound containing an acid group is preferably an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid, and is more preferably a polymerizable compound having an acid group by reacting a non-aromatic carboxylic acid anhydride with an unreacted hydroxyl group of an aliphatic polyhydroxy compound. Among the esters, the aliphatic polyhydroxy compound is more preferably a compound that is neopentyl triol and/or dipentyl triol. Examples of commercially available products include ARONIX TO-2349, M-305, M-510, and M-520 manufactured by TOAGOSEI CO., LTD.

包含酸基之聚合性化合物的酸值為0.1~40mgKOH/g為較佳,5~30mgKOH/g為更佳。若聚合性化合物的酸值為0.1mgKOH/g以上,則顯影溶解特性良好,若為40mgKOH/g以下,則在製造及/或處理上有利。此外,光聚合性能良好,且硬化性優異。The acid value of the polymerizable compound containing an acid group is preferably 0.1 to 40 mgKOH/g, and more preferably 5 to 30 mgKOH/g. If the acid value of the polymerizable compound is 0.1 mgKOH/g or more, the developing and dissolving properties are good, and if it is 40 mgKOH/g or less, it is advantageous in manufacturing and/or handling. In addition, the photopolymerization performance is good and the curing property is excellent.

關於聚合性化合物,包含己內酯結構的化合物亦為較佳態樣。 作為包含己內酯結構的化合物,例如,只要在分子內包含己內酯結構,則並沒有特別限制,例如,可以舉出將三羥甲基乙烷、二三羥甲基乙烷、三羥甲基丙烷、二三羥甲基丙烷、新戊四醇、二新戊四醇、三新戊四醇、甘油、二甘油及三羥甲基三聚氰胺等多元醇與(甲基)丙烯酸及ε-己內酯進行酯化來獲得之ε-己內酯改質多官能(甲基)丙烯酸酯。其中,包含下述式(Z-1)所表示之己內酯結構的化合物為較佳。 Regarding polymerizable compounds, compounds containing a caprolactone structure are also preferred. As compounds containing a caprolactone structure, for example, there are no particular restrictions as long as the caprolactone structure is contained in the molecule. For example, ε-caprolactone modified multifunctional (meth)acrylates obtained by esterifying polyols such as trihydroxymethylethane, ditrihydroxymethylethane, trihydroxymethylpropane, ditrihydroxymethylpropane, pentaerythritol, dipentaerythritol, tripentaerythritol, glycerol, diglycerol and trihydroxymethylmelamine with (meth)acrylic acid and ε-caprolactone can be cited. Among them, compounds containing a caprolactone structure represented by the following formula (Z-1) are preferred.

[化學式8] [Chemical formula 8]

式(Z-1)中,6個R全部為下述式(Z-2)所表示之基團,或6個R中的1~5個為下述式(Z-2)所表示之基團,其餘為下述式(Z-3)所表示之基團。In formula (Z-1), all six Rs are groups represented by the following formula (Z-2), or 1 to 5 of the six Rs are groups represented by the following formula (Z-2), and the rest are groups represented by the following formula (Z-3).

[化學式9] [Chemical formula 9]

式(Z-2)中,R 1表示氫原子或甲基,m表示1或2的數,*表示鍵結位置。 In formula (Z-2), R1 represents a hydrogen atom or a methyl group, m represents a number of 1 or 2, and * represents a bonding position.

[化學式10] [Chemical formula 10]

式(Z-3)中,R 1表示氫原子或甲基,“*”表示鍵結位置。 In formula (Z-3), R1 represents a hydrogen atom or a methyl group, and "*" represents a bonding position.

關於包含己內酯結構之聚合性化合物,例如,作為KAYARAD DPCA系列由Nippon Kayaku Co., Ltd.市售,並且可以舉出DPCA-20(上述式(Z-1)~(Z-3)中,m=1,式(Z-2)所表示之基團的數=2,R 1全部為氫原子的化合物)、DPCA-30(同式,m=1,式(Z-2)所表示之基團的數=3,R 1全部為氫原子的化合物)、DPCA-60(同式,m=1,式(Z-2)所表示之基團的數=6,R 1全部為氫原子的化合物)、DPCA-120(同式中,m=2,式(Z-2)所表示之基團的數=6,R 1全部為氫原子的化合物)。又,作為包含己內酯結構之聚合性化合物的市售品,亦可以舉出TOAGOSEI CO., LTD.製造之M-350(產品名稱)(三羥甲基丙烷三丙烯酸酯)。 Regarding the polymerizable compound containing a caprolactone structure, for example, it is commercially available as the KAYARAD DPCA series from Nippon Kayaku Co., Ltd., and includes DPCA-20 (in the above formulas (Z-1) to (Z-3), m=1, the number of groups represented by formula (Z-2)=2, and all R1s are hydrogen atoms), DPCA-30 (in the same formula, m=1, the number of groups represented by formula (Z-2)=3, and all R1s are hydrogen atoms), DPCA-60 (in the same formula, m=1, the number of groups represented by formula (Z-2)=6, and all R1s are hydrogen atoms), and DPCA-120 (in the same formula, m=2, the number of groups represented by formula (Z-2)=6, and all R1s are hydrogen atoms). In addition, as a commercially available product of a polymerizable compound including a caprolactone structure, M-350 (product name) (trihydroxymethylpropane triacrylate) manufactured by TOAGOSEI CO., LTD. can also be cited.

聚合性化合物亦能夠使用下述式(Z-4)或式(Z-5)所表示的化合物。As the polymerizable compound, a compound represented by the following formula (Z-4) or formula (Z-5) can be used.

[化學式11] [Chemical formula 11]

式(Z-4)及式(Z-5)中,E表示-((CH 2yCH 2O)-或-((CH 2yCH(CH 3)O)-,y表示0~10的整數,X表示(甲基)丙烯醯基、氫原子或羧酸基。 式(Z-4)中,(甲基)丙烯醯基的合計為3個或4個,m表示0~10的整數,各m的合計為0~40的整數。 式(Z-5)中,(甲基)丙烯醯基的合計為5個或6個,n表示0~10的整數,各n的合計為0~60的整數。 In formula (Z-4) and formula (Z-5), E represents -((CH 2 ) y CH 2 O)- or -((CH 2 ) y CH(CH 3 ) O)-, y represents an integer of 0 to 10, and X represents a (meth)acryloyl group, a hydrogen atom or a carboxylic acid group. In formula (Z-4), the total number of (meth)acryloyl groups is 3 or 4, m represents an integer of 0 to 10, and the total number of each m is an integer of 0 to 40. In formula (Z-5), the total number of (meth)acryloyl groups is 5 or 6, n represents an integer of 0 to 10, and the total number of each n is an integer of 0 to 60.

式(Z-4)中,m為0~6的整數為較佳,0~4的整數為更佳。 又,各m的合計為2~40的整數為較佳,2~16的整數為更佳,4~8的整數為進一步較佳。 式(Z-5)中,n為0~6的整數為較佳,0~4的整數為更佳。 又,各n的合計為3~60的整數為較佳,3~24的整數為更佳,6~12的整數為進一步較佳。 又,式(Z-4)或式(Z-5)中的-((CH 2yCH 2O)-或-((CH 2yCH(CH 3)O)-為氧原子側的末端鍵結於X之形態為較佳。 In formula (Z-4), m is preferably an integer of 0 to 6, more preferably an integer of 0 to 4. The total of each m is preferably an integer of 2 to 40, more preferably an integer of 2 to 16, and more preferably an integer of 4 to 8. In formula (Z-5), n is preferably an integer of 0 to 6, more preferably an integer of 0 to 4. The total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and more preferably an integer of 6 to 12. In formula (Z-4) or formula (Z-5), -((CH 2 ) y CH 2 O)- or -((CH 2 ) y CH(CH 3 ) O)- is preferably in a form in which the terminal on the oxygen atom side is bonded to X.

式(Z-4)或式(Z-5)所表示的化合物可以單獨使用1種,亦可以併用2種以上。尤其,式(Z-5)中6個X全部為丙烯醯基之形態、式(Z-5)中6個X全部為丙烯醯基的化合物與6個X中至少1個為氫原子的化合物的混合物的態樣為較佳。藉由設為該種構成,能夠進一步提高顯影性。The compound represented by formula (Z-4) or formula (Z-5) may be used alone or in combination of two or more. In particular, a compound in which all six Xs in formula (Z-5) are acryl groups, or a compound in which all six Xs in formula (Z-5) are acryl groups and a compound in which at least one of the six Xs is a hydrogen atom are preferably used as a mixture. By adopting such a configuration, the developing property can be further improved.

又,式(Z-4)或式(Z-5)所表示的化合物在聚合性化合物中的總含量為20質量%以上為較佳,50質量%以上為更佳。 在式(Z-4)或式(Z-5)所表示的化合物中,新戊四醇衍生物及/或二新戊四醇衍生物為更佳。 Furthermore, the total content of the compounds represented by formula (Z-4) or (Z-5) in the polymerizable compound is preferably 20% by mass or more, and more preferably 50% by mass or more. Among the compounds represented by formula (Z-4) or (Z-5), neopentyletrol derivatives and/or dipentyletrol derivatives are more preferred.

又,聚合性化合物可以包含卡多(Cardo)骨架。 包含卡多骨架之聚合性化合物包含9,9-二芳基茀骨架之聚合性化合物為較佳。 作為包含卡多骨架之聚合性化合物,例如,可以舉出Oncoat EX系列(NAGASE & CO., LTD製造)及Ogsol(Osaka Gas Chemicals Co., Ltd.製造)。 聚合性化合物為包含異三聚氰酸骨架作為中心核的化合物亦較佳。作為此類聚合性化合物的例子,例如可以舉出NK Ester A-9300(SHIN-NAKAMURA CHEMICAL Co., Ltd製造)。 聚合性化合物的乙烯性不飽和基的含量(表示將聚合性化合物中的乙烯性不飽和基數除以聚合性化合物的分子量(g/mol)而得之值)為5.0mmol/g以上為較佳。上限為20.0mmol/g以下為較佳。 In addition, the polymerizable compound may contain a cardo skeleton. The polymerizable compound containing a cardo skeleton is preferably a polymerizable compound containing a 9,9-diarylfluorene skeleton. As polymerizable compounds containing a cardo skeleton, for example, Oncoat EX series (manufactured by NAGASE & CO., LTD) and Ogsol (manufactured by Osaka Gas Chemicals Co., Ltd.) can be cited. It is also preferred that the polymerizable compound is a compound containing an isocyanuric acid skeleton as a central core. As an example of such a polymerizable compound, for example, NK Ester A-9300 (manufactured by SHIN-NAKAMURA CHEMICAL Co., Ltd.) can be cited. The content of ethylenically unsaturated groups in the polymerizable compound (a value obtained by dividing the number of ethylenically unsaturated groups in the polymerizable compound by the molecular weight (g/mol) of the polymerizable compound) is preferably 5.0 mmol/g or more. The upper limit is preferably below 20.0mmol/g.

組成物中的聚合性化合物的含量相對於組成物的總固體成分為5質量%以上為較佳,10質量%以上為更佳,14質量%以上為進一步較佳,20質量%以上為特佳。又,作為上限值,60質量%以下為較佳,40質量%以下為更佳,35質量%以下為進一步較佳。 聚合性化合物可以單獨使用1種,亦可以併用2種以上。在併用2種以上的聚合性化合物時,該等的合計量在上述範圍為較佳。 The content of the polymerizable compound in the composition is preferably 5% by mass or more relative to the total solid content of the composition, more preferably 10% by mass or more, further preferably 14% by mass or more, and particularly preferably 20% by mass or more. In addition, as the upper limit, 60% by mass or less is preferably, 40% by mass or less is more preferably, and 35% by mass or less is further preferably. The polymerizable compound can be used alone or in combination of two or more. When two or more polymerizable compounds are used in combination, the total amount thereof is preferably within the above range.

〔顏料〕 組成物包含顏料。 作為顏料,並沒有特別限制,例如,可以舉出黑色顏料、白色顏料及彩色顏料。又,作為彩色顏料,例如可以舉出紅色顏料、綠色顏料、藍色顏料、黃色顏料、紫色顏料及橙色顏料等。作為顏料,其中,黑色顏料及白色顏料為較佳,黑色顏料為更佳。 又,顏料可以為無機顏料及有機顏料中的任一種。又,作為顏料,還能夠使用由有機顯色團取代無機顏料或有機-無機顏料的一部分而得之材料。藉由由有機顯色團取代無機顏料或有機-無機顏料而具有容易進行色相設計之優點。 [Pigment] The composition includes a pigment. There is no particular limitation on the pigment, and examples thereof include black pigment, white pigment, and color pigment. Also, examples of color pigment include red pigment, green pigment, blue pigment, yellow pigment, purple pigment, and orange pigment. As pigments, black pigment and white pigment are preferred, and black pigment is more preferred. Also, the pigment may be any of an inorganic pigment and an organic pigment. Also, as a pigment, a material obtained by replacing a part of an inorganic pigment or an organic-inorganic pigment with an organic chromophore may be used. By replacing an inorganic pigment or an organic-inorganic pigment with an organic chromophore, it has the advantage of being easy to design the hue.

組成物可以單獨使用1種顏料,亦可以併用2種以上。 例如,將組成物的硬化膜設為遮光膜時,藉由併用黑色顏料和除了黑色顏料以外的其他顏料而能夠調整遮光膜的遮光特性。又,將上述遮光膜用作光衰減膜時,針對包含寬波長成分之光,變得容易均等地衰減各波長。 The composition may use a single pigment or two or more pigments in combination. For example, when the cured film of the composition is used as a light-shielding film, the light-shielding properties of the light-shielding film can be adjusted by using a black pigment and other pigments in addition to the black pigment. Furthermore, when the light-shielding film is used as a light-attenuating film, it becomes easy to evenly attenuate each wavelength of light containing a wide-wavelength component.

(黑色顏料) 組成物包含黑色顏料為較佳。 本說明書中,黑色顏料係指遍及波長400~700nm的整個範圍具有吸收之顏料,例如,適合於以下說明之評價基準Z之黑色顏料為較佳。 首先,製備一種組成物,其包含黑色顏料、透明的樹脂基質(丙烯酸樹脂等)及溶劑,相對於總固體成分之黑色顏料的含量為60質量%。在玻璃基板上塗布所獲得之組成物直至乾燥後的硬化膜的膜厚成為1μm來形成硬化膜。利用分光光度計(Hitachi, Ltd.製造UV-3600等)評價乾燥後的硬化膜的遮光性。只要乾燥後的硬化膜在波長400~700nm下的透射率的最大值未達10%,則能夠判斷上述黑色顏料為適合於評價標準Z之黑色顏料。在評價基準Z中,黑色顏料在乾燥後的硬化膜的波長400~700nm處的透射率的最大值未達8%為更佳,未達5%為進一步較佳。 (Black pigment) The composition preferably includes a black pigment. In this specification, a black pigment refers to a pigment having absorption over the entire wavelength range of 400 to 700 nm. For example, a black pigment that meets the evaluation standard Z described below is preferred. First, a composition is prepared, which includes a black pigment, a transparent resin matrix (acrylic resin, etc.) and a solvent, and the content of the black pigment relative to the total solid content is 60% by mass. The obtained composition is applied to a glass substrate until the film thickness of the cured film after drying becomes 1 μm to form a cured film. The light-shielding property of the cured film after drying is evaluated using a spectrophotometer (UV-3600, etc. manufactured by Hitachi, Ltd.). As long as the maximum transmittance of the cured film after drying at a wavelength of 400 to 700 nm is less than 10%, the above black pigment can be judged as a black pigment suitable for evaluation standard Z. In evaluation standard Z, it is better if the maximum transmittance of the cured film of the black pigment after drying at a wavelength of 400 to 700 nm is less than 8%, and it is even better if it is less than 5%.

作為黑色顏料,可以組合複數種無法單獨用作黑色顏料之顏料,調整為整體變成黑色而作為黑色顏料。 例如,可以單獨組合複數個具有除了黑色以外的顏色之顏料來用作黑色顏料。 As a black pigment, you can combine multiple pigments that cannot be used as a black pigment individually and adjust them so that the whole becomes black to use as a black pigment. For example, you can combine multiple pigments with colors other than black individually to use as a black pigment.

黑色顏料的平均粒徑為250nm以下為較佳,200nm以下為更佳,150nm以下為進一步較佳。從操作性更優異的觀點考慮,上述平均粒徑為1nm以上為較佳,5nm以上為更佳,20nm以上為進一步較佳。The average particle size of the black pigment is preferably 250 nm or less, more preferably 200 nm or less, and even more preferably 150 nm or less. From the perspective of better operability, the average particle size is preferably 1 nm or more, more preferably 5 nm or more, and even more preferably 20 nm or more.

上述平均粒徑藉由以下方法來計算。 用丙二醇單甲基醚乙酸酯(PGMEA)稀釋組成物,準備固體成分濃度為0.2質量%的測量溶液。接著,使用依照JIS8826:2005之動態光散射式粒徑分布測量裝置(HORIBA, Ltd.製造LB-500(產品名稱)),在25℃的溫度下使用2ml的測量用石英槽,進行50次上述測量溶液的資料擷取,將所獲得之個數基準的粒徑進行算術平均而作為平均粒徑。 另外,在上述中使用組成物準備了測量溶液,其中可以使用分散有黑色顏料之色材分散液實施上述測量。例如,在組成物中包含除了黑色顏料以外的其他粒子時,可以使用分散有用於製備組成物之黑色顏料之色材分散液測量黑色顏料的平均粒徑。又,在組成物中包含除了黑色顏料以外的其他粒子時,可以藉由任何方法將黑色顏料與其他粒子進行分離之後,測量黑色顏料的平均粒徑。 The above average particle size is calculated by the following method. The composition is diluted with propylene glycol monomethyl ether acetate (PGMEA) to prepare a measurement solution with a solid content concentration of 0.2 mass %. Then, using a dynamic light scattering particle size distribution measuring device (LB-500 (product name) manufactured by HORIBA, Ltd.) in accordance with JIS8826:2005, 50 data acquisitions of the above measurement solution are performed at a temperature of 25°C using a 2 ml measurement quartz cell, and the obtained number-based particle sizes are arithmetic averaged as the average particle size. In addition, in the above-mentioned measurement solution prepared using the composition, the above-mentioned measurement can be performed using a color material dispersion in which a black pigment is dispersed. For example, when the composition contains particles other than black pigment, the average particle size of the black pigment can be measured using a color material dispersion in which the black pigment used to prepare the composition is dispersed. Also, when the composition contains particles other than black pigment, the average particle size of the black pigment can be measured after separating the black pigment from the other particles by any method.

作為黑色顏料,單獨顯現黑色的顏料為較佳。又,亦可以使用單獨顯現黑色且吸收紅外線的黑色顏料。 在此,吸收紅外線之黑色顏料在紅外區域(較佳為波長650~1300nm)的波長區域具有吸收。在波長675~900nm的波長區域具有極大吸收波長之黑色顏料亦較佳。 As a black pigment, a pigment that appears black alone is preferred. In addition, a black pigment that appears black alone and absorbs infrared rays can also be used. Here, the black pigment that absorbs infrared rays has absorption in the wavelength range of the infrared region (preferably a wavelength of 650 to 1300 nm). A black pigment having a wavelength with a maximum absorption wavelength in the wavelength range of 675 to 900 nm is also preferred.

作為黑色顏料,能夠使用各種公知的黑色顏料。黑色顏料可以為無機顏料,亦可以為有機顏料。 從本發明的效果更優異的觀點考慮,黑色顏料為無機顏料為較佳,碳黑、金屬氮化物粒子或金屬氧氮化物粒子為更佳。 As the black pigment, various known black pigments can be used. The black pigment can be an inorganic pigment or an organic pigment. From the perspective of achieving a better effect of the present invention, the black pigment is preferably an inorganic pigment, and carbon black, metal nitride particles, or metal oxynitride particles are more preferably.

-無機顏料- 作為可用作黑色顏料的無機顏料,只要為具有遮光性且包含無機化合物之粒子,則並沒有特別限制,能夠使用公知的無機顏料。 -Inorganic pigments- As inorganic pigments that can be used as black pigments, there are no particular restrictions as long as they have light-shielding properties and contain particles of inorganic compounds, and known inorganic pigments can be used.

作為無機顏料,可以舉出包含鈦(Ti)及鋯(Zr)等第4族金屬元素、釩(V)及鈮(Nb)等第5族金屬元素、選自包括釔(Y)、鋁(Al)、鈷(Co)、鉻(Cr)、銅(Cu)、錳(Mn)、釕(Ru)、鐵(Fe)、鎳(Ni)、錫(Sn)及銀(Ag)之群組中的1種或2種以上的金屬元素之金屬氧化物、金屬氮化物及金屬氧氮化物等。 其中,包含選自包括鈦(Ti)、鋯(Zr)、釩(V)、釔(Y)、鋁(Al)及鐵(Fe)之群組中的1種或2種以上的金屬元素之金屬氧化物、金屬氮化物或金屬氧氮化物為較佳。亦即,無機顏料可以包含2種以上的金屬原子。 作為上述金屬氧化物、金屬氮化物及金屬氧氮化物,可以進一步使用混合有其他金屬原子之粒子,例如,能夠進一步使用包含從週期表13~17族元素中選擇之原子(較佳為氧原子及/或硫原子)之含有金屬氮化物之粒子。 又,上述金屬氧化物、金屬氮化物及金屬氧氮化物可以被無機物及/或有機物包覆。 作為上述無機物,可以舉出上述無機顏料中包含之金屬原子。 作為上述有機物,可以舉出具有疏水性基之有機物,矽烷化合物為較佳。 As inorganic pigments, metal oxides, metal nitrides, and metal oxynitrides containing Group 4 metal elements such as titanium (Ti) and zirconium (Zr), Group 5 metal elements such as vanadium (V) and niobium (Nb), and one or more metal elements selected from the group including yttrium (Y), aluminum (Al), cobalt (Co), chromium (Cr), copper (Cu), manganese (Mn), ruthenium (Ru), iron (Fe), nickel (Ni), tin (Sn), and silver (Ag) can be cited. Among them, metal oxides, metal nitrides, or metal oxynitrides containing one or more metal elements selected from the group including titanium (Ti), zirconium (Zr), vanadium (V), yttrium (Y), aluminum (Al), and iron (Fe) are preferred. That is, the inorganic pigment may contain two or more metal atoms. As the above-mentioned metal oxide, metal nitride and metal oxynitride, particles mixed with other metal atoms may be further used, for example, particles containing metal nitrides containing atoms selected from elements of groups 13 to 17 of the periodic table (preferably oxygen atoms and/or sulfur atoms) may be further used. In addition, the above-mentioned metal oxide, metal nitride and metal oxynitride may be coated with inorganic and/or organic substances. As the above-mentioned inorganic substance, the metal atom contained in the above-mentioned inorganic pigment may be cited. As the above-mentioned organic substance, an organic substance having a hydrophobic group may be cited, and silane compounds are preferred.

作為上述金屬氮化物、金屬氧化物及金屬氧氮化物的製造方法,只要可獲得具有所需物性之黑色顏料,則並沒有特別限制,能夠使用氣相反應法等公知的製造方法。作為氣相反應法,可以舉出電爐法及熱電漿法等,但從雜質的混入少,粒徑容易均勻且生產率高的觀點考慮,熱電漿法為較佳。 可以對上述金屬氮化物、金屬氧化物及金屬氧氮化物實施表面修飾處理。可以用同時具有聚矽氧基及烷基之表面處理劑實施表面修飾處理。作為此類無機粒子,可以舉出“KTP-09”系列(Shin-Etsu Chemical Co., Ltd.製造)等。 As a method for producing the above-mentioned metal nitrides, metal oxides and metal oxynitrides, there is no particular limitation as long as a black pigment having the desired physical properties can be obtained, and a known production method such as a gas phase reaction method can be used. As a gas phase reaction method, an electric furnace method and a hot plasma method can be cited, but from the perspective of less impurities mixed, easy uniform particle size and high productivity, the hot plasma method is preferred. The above-mentioned metal nitrides, metal oxides and metal oxynitrides can be subjected to surface modification treatment. Surface modification treatment can be performed using a surface treatment agent having both a polysiloxy group and an alkyl group. As such inorganic particles, the "KTP-09" series (manufactured by Shin-Etsu Chemical Co., Ltd.) can be cited.

其中,從能夠抑制形成硬化膜時的下部切割的產生之觀點考慮,選自包括鈦、釩、鋯、鈮及鐵之群組中的1種以上的金屬的氮化物或氧氮化物為更佳,鋯的氮化物或氧氮化物或鈦的氮化物或氧氮化物(鈦黑)為進一步較佳。Among them, from the viewpoint of being able to suppress the occurrence of undercutting when forming a cured film, nitrides or oxynitrides of one or more metals selected from the group consisting of titanium, vanadium, zirconium, niobium and iron are more preferred, and nitrides or oxynitrides of zirconium or nitrides or oxynitrides of titanium (titanium black) are even more preferred.

鈦黑為包含氮氧化鈦之黑色粒子。 鈦黑能夠以提高分散性、抑制凝聚性等為目的,依據需要進行表面修飾。鈦黑能夠由氧化矽、氧化鈦、氧化鍺、氧化鋁、氧化鎂或氧化鋯來包覆,又,還能夠用日本特開2007-302836號公報中所表示之撥水性物質進行處理。 Titanium black is black particles containing titanium oxynitride. Titanium black can be surface-modified as needed for the purpose of improving dispersibility, inhibiting agglomeration, etc. Titanium black can be coated with silicon oxide, titanium oxide, germanium oxide, aluminum oxide, magnesium oxide, or zirconium oxide, and can also be treated with a water-repellent substance as described in Japanese Patent Publication No. 2007-302836.

作為鈦黑的製造方法,可以舉出在還元氣氛下將二氧化鈦與金屬鈦的混合體加熱還元的方法(日本特開昭49-05432號公報)、在含氫還元氣氛中對在四氯化鈦的高溫水解中獲得之超微細二氧化鈦進行還元的方法(日本特開昭57-205322號公報)、在銨存在下對二氧化鈦或氫氧化鈦進行高溫還元的方法(日本特開昭60-065069號公報、日本特開昭61-201610號公報)及使釩化合物附著於二氧化鈦或氫氧化鈦並在銨存在下進行高溫還元的方法(日本特開昭61-201610號公報)。As a method for producing titanium black, there can be cited a method of heating and reducing a mixture of titanium dioxide and metallic titanium in a reducing atmosphere (Japanese Patent Publication No. 49-05432), a method of reducing ultrafine titanium dioxide obtained by high-temperature hydrolysis of titanium tetrachloride in a hydrogen-containing reducing atmosphere (Japanese Patent Publication No. 57-205322), a method of high-temperature reducing titanium dioxide or titanium hydroxide in the presence of ammonium (Japanese Patent Publication No. 60-065069, Japanese Patent Publication No. 61-201610), and a method of attaching a vanadium compound to titanium dioxide or titanium hydroxide and high-temperature reducing it in the presence of ammonium (Japanese Patent Publication No. 61-201610).

鈦黑的粒徑,並沒有特別限制,10~45nm為較佳,12~20nm為更佳。鈦黑的比表面積並沒有特別限制,為了使藉由撥水劑進行表面處理之後的撥水性成為規定性能,利用BET(Brunauer,Emmett,Teller(布魯諾爾、埃米特及特勒))法測量而得之值為5~150m 2/g為較佳,20~100m 2/g為更佳。 There is no particular restriction on the particle size of titanium black, but 10 to 45 nm is preferred, and 12 to 20 nm is more preferred. There is no particular restriction on the specific surface area of titanium black, but in order to achieve the specified performance of water repellency after surface treatment with a water repellent, the value measured by the BET (Brunauer, Emmett, Teller) method is preferably 5 to 150 m 2 /g, and more preferably 20 to 100 m 2 /g.

作為鈦黑,例如,可以舉出鈦黑10S、12S、13R、13M、13M-C、13R、13R-N、13M-T(產品名稱,Mitsubishi Materials Corporation製造)、Tilack D(產品名稱,Ako Kasei Co., Ltd.製造)及MT-150A(產品名稱,TAYCA CORPORATION製造)。As titanium black, for example, titanium black 10S, 12S, 13R, 13M, 13M-C, 13R, 13R-N, 13M-T (product names, manufactured by Mitsubishi Materials Corporation), Tilack D (product name, manufactured by Ako Kasei Co., Ltd.), and MT-150A (product name, manufactured by TAYCA CORPORATION) can be cited.

組成物包含鈦黑作為包含鈦黑及Si原子之被分散體亦較佳。在該形態中,在組成物中作為被分散體而含有鈦黑。被分散體中的Si原子與Ti原子的含量比(Si/Ti)以質量換算計為0.05~0.5為較佳,0.07~0.4為更佳。在此,上述被分散體包括鈦黑為一次粒子的狀態者及為凝聚體(二次粒子)的狀態者這兩者。 又,只要被分散體的Si/Ti為規定值以上,則藉由光微影等對使用被分散體之組成物層進行圖案形成時,難以在去除部殘留殘渣,只要被分散體的Si/Ti為規定值以下,則遮光能力容易變得良好。 It is also preferred that the composition contains titanium black as a dispersed body containing titanium black and Si atoms. In this form, titanium black is contained in the composition as a dispersed body. The content ratio of Si atoms to Ti atoms in the dispersed body (Si/Ti) is preferably 0.05 to 0.5 in terms of mass conversion, and more preferably 0.07 to 0.4. Here, the above-mentioned dispersed body includes both titanium black in the state of primary particles and titanium black in the state of aggregates (secondary particles). In addition, as long as the Si/Ti of the dispersed body is above the specified value, it is difficult to leave residues in the removed part when the composition layer using the dispersed body is patterned by photolithography, etc., and as long as the Si/Ti of the dispersed body is below the specified value, the light shielding ability is easy to become good.

為了變更被分散體的Si/Ti(例如,設為0.05以上),能夠使用如下機構。首先,藉由利用分散機對氧化鈦和二氧化矽粒子進行分散來獲得分散物,在高溫(例如,850~1000℃)下對該混合物進行還元處理,藉此能夠將鈦黑粒子作為主成分來獲得含有Si和Ti之被分散體。Si/Ti被調整的鈦黑例如能夠藉由日本特開2008-266045公報的[0005]及[0016]~[0021]段中記載之方法製作。 另外,被分散體中的Si原子與Ti原子的含量比(Si/Ti)例如能夠使用國際公開第2011/049090號公報的[0054]~[0056]段中記載之方法(2-1)或方法(2-3)測量。 In order to change the Si/Ti of the dispersed body (for example, to 0.05 or more), the following mechanism can be used. First, titanium oxide and silicon dioxide particles are dispersed by a disperser to obtain a dispersion, and the mixture is reduced at a high temperature (for example, 850 to 1000°C) to obtain a dispersed body containing Si and Ti with titanium black particles as the main component. Titanium black with adjusted Si/Ti can be produced, for example, by the method described in paragraphs [0005] and [0016] to [0021] of Japanese Patent Publication No. 2008-266045. In addition, the content ratio of Si atoms to Ti atoms in the dispersed body (Si/Ti) can be measured using, for example, method (2-1) or method (2-3) described in paragraphs [0054] to [0056] of International Publication No. 2011/049090.

在含有鈦黑及Si原子之被分散體中,鈦黑能夠使用上述者。又,在該被分散體中,以調整分散性、著色性等為目的,可以將鈦黑與包括選自Cu、Fe、Mn、V及Ni等之複數種金屬的複合氧化物、氧化鈷、氧化鐵、碳黑以及苯胺黑等之黑色顏料的1種或2種以上組合而同時用作被分散體。在該情況下,由鈦黑構成之被分散體佔據所有被分散體中的50質量%以上為較佳。In the dispersed body containing titanium black and Si atoms, the titanium black can be used as the above-mentioned one. In addition, in the dispersed body, for the purpose of adjusting dispersibility, coloring, etc., titanium black can be used as the dispersed body in combination with one or more black pigments including composite oxides of multiple metals selected from Cu, Fe, Mn, V and Ni, cobalt oxide, iron oxide, carbon black and aniline black. In this case, it is preferred that the dispersed body composed of titanium black accounts for more than 50% by mass of all the dispersed bodies.

作為黑色的無機顏料,還能夠舉出碳黑。 作為碳黑,例如,可以舉出爐黑、槽黑、熱碳黑、乙炔黑及燈黑。 作為碳黑,可以使用利用油爐法(oil furnace method)等公知的方法製造之碳黑,亦可以使用市售品。 作為碳黑的市售品,例如,可以舉出C.I.顏料黑7等無機顏料。 Carbon black can also be cited as a black inorganic pigment. As carbon black, for example, furnace black, channel black, thermal black, acetylene black, and lamp black can be cited. As carbon black, carbon black produced by a known method such as an oil furnace method can be used, and commercial products can also be used. As commercial products of carbon black, for example, inorganic pigments such as C.I. Pigment Black 7 can be cited.

作為碳黑,經表面處理之碳黑為較佳。藉由表面處理而能夠改質碳黑的粒子表面狀態,並且能夠提高組成物中的分散穩定性。作為表面處理,可以舉出用樹脂進行之包覆處理、導入酸性基之表面處理及藉由矽烷偶合劑進行之表面處理。As carbon black, surface-treated carbon black is preferred. Surface treatment can modify the surface state of carbon black particles and improve the dispersion stability in the composition. Examples of surface treatment include coating treatment with resin, surface treatment by introducing acidic groups, and surface treatment by silane coupling agent.

作為碳黑,藉由樹脂進行了包覆處理之碳黑為較佳。藉由利用絕緣性的樹脂包覆碳黑的粒子表面,能夠提高硬化膜的遮光性及絕緣性。又,藉由漏電流的減少等,能夠提高圖像顯示裝置的可靠性等。因此,能夠將硬化膜用於要求遮光性及絕緣性之用途之情況等為較佳。 作為包覆樹脂,可以舉出環氧樹脂、聚醯胺、聚醯胺醯亞胺、酚醛清漆樹脂、酚醛樹脂、脲樹脂、三聚氰胺樹脂、聚氨酯、鄰苯二甲酸二丁酯樹脂、烷基苯樹脂、聚苯乙烯、聚碳酸酯、聚對苯二甲酸丁二醇酯及改質聚苯醚。 從硬化膜的遮光性及絕緣性更優異之觀點考慮,包覆樹脂的含量相對於碳黑及包覆樹脂的合計,0.1~40質量%為較佳,0.5~30質量%為更佳。 As carbon black, carbon black coated with resin is preferred. By coating the surface of carbon black particles with insulating resin, the light shielding and insulation properties of the cured film can be improved. In addition, the reliability of the image display device can be improved by reducing leakage current, etc. Therefore, it is preferred to use the cured film for applications requiring light shielding and insulation properties. As the coating resin, epoxy resin, polyamide, polyamide imide, novolac resin, phenolic resin, urea resin, melamine resin, polyurethane, dibutyl phthalate resin, alkylbenzene resin, polystyrene, polycarbonate, polybutylene terephthalate and modified polyphenylene ether can be cited. From the viewpoint of better light shielding and insulation of the cured film, the content of the coating resin is preferably 0.1 to 40% by mass, and more preferably 0.5 to 30% by mass relative to the total of carbon black and the coating resin.

作為用作黑色顏料之無機顏料,例如可以舉出日本特開2017-222559號公報、國際公開第2019/130772號、國際公開第2019/059359號及日本特開2009-091205號公報的鋯,該等內容被編入到本說明書中。As an inorganic pigment used as a black pigment, for example, zirconium disclosed in Japanese Patent Application Publication No. 2017-222559, International Publication No. 2019/130772, International Publication No. 2019/059359, and Japanese Patent Application Publication No. 2009-091205 can be cited, and the contents thereof are incorporated into this specification.

-有機顏料- 作為可用作黑色顏料的有機顏料,只要為具有遮光性且包含有機化合物之粒子,則並沒有特別限制,能夠使用公知的有機顏料。 在本發明中,作為有機顏料,例如,可以舉出雙苯并呋喃酮化合物、偶氮次甲基化合物、苝化合物及偶氮化合物,雙苯并呋喃酮化合物或苝化合物為較佳。 -Organic pigment- As an organic pigment that can be used as a black pigment, there is no particular limitation as long as it is a particle having light-shielding properties and containing an organic compound, and a known organic pigment can be used. In the present invention, as an organic pigment, for example, bisbenzofuranone compounds, azomethine compounds, perylene compounds and azo compounds can be cited, and bisbenzofuranone compounds or perylene compounds are preferred.

作為雙苯并呋喃酮化合物,可以舉出日本特表2010-534726號公報、日本特表2012-515233號公報及日本特表2012-515234號公報中所記載之化合物。雙苯并呋喃酮化合物能夠作為BASF公司製造之“Irgaphor Black”(產品名稱)來獲得。 作為苝化合物,可以舉出日本特開昭62-001753號公報及日本特公昭63-026784號公報中記載之化合物。苝化合物能夠作為C.I.Pigment Black 21、30、31、32、33及34來獲得。 As the bisbenzofuranone compound, compounds described in Japanese Patent Publication No. 2010-534726, Japanese Patent Publication No. 2012-515233, and Japanese Patent Publication No. 2012-515234 can be cited. The bisbenzofuranone compound can be obtained as "Irgaphor Black" (product name) manufactured by BASF. As the perylene compound, compounds described in Japanese Patent Publication No. 62-001753 and Japanese Patent Publication No. 63-026784 can be cited. The perylene compound can be obtained as C.I. Pigment Black 21, 30, 31, 32, 33, and 34.

顏料的含量相對於組成物的總固體成分,10~60質量%為較佳,20~60質量%為更佳,20~50質量%為進一步較佳,20~40質量%為特佳。組成物可以僅包含1種顏料,亦可以包含2種以上。在包含2種以上時,該等總量在上述範圍為較佳。The content of the pigment relative to the total solid content of the composition is preferably 10-60 mass %, more preferably 20-60 mass %, further preferably 20-50 mass %, and particularly preferably 20-40 mass %. The composition may contain only one pigment or two or more. When containing two or more pigments, the total amount is preferably within the above range.

〔染料〕 組成物可以包含染料。 作為染料,能夠使用公知的染料,例如,可以舉出黑色染料及彩色染料。作為彩色染料,例如,可以舉出紅色染料、綠色染料、藍色染料、黃色染料、紫色染料及橙色染料。 作為染料,其中,黑色染料為較佳。 作為黑色染料,例如,能夠單獨使用顯現黑色之染料,例如能夠使用吡唑偶氮化合物、吡咯亞甲基化合物、苯胺偶氮化合物、三苯甲烷化合物、蒽醌化合物、亞苄基化合物、氧雜菁(oxonol)化合物、吡唑并三唑偶氮化合物、吡啶酮偶氮化合物、花青化合物、啡噻𠯤化合物及吡咯并吡唑偶氮次甲基化合物等。 又,作為黑色染料,例如,能夠參閱日本特開昭64-090403號公報、日本特開昭64-091102號公報、日本特開平01-094301號公報、日本特開平06-011614號公報、日本專利2592207號公報、美國專利4808501號說明書、美國專利5667920號說明書、美國專利505950號說明書、日本特開平05-333207號公報、日本特開平06-035183號公報、日本特開平06-051115號公報及日本特開平06-194828號公報等中記載之化合物,該等內容被編入到本說明書中。 [Dye] The composition may contain a dye. As the dye, a known dye can be used, for example, a black dye and a color dye can be cited. As the color dye, for example, a red dye, a green dye, a blue dye, a yellow dye, a violet dye and an orange dye can be cited. As the dye, a black dye is preferred. As the black dye, for example, a dye that exhibits black can be used alone, for example, a pyrazole azo compound, a pyrromethene compound, an aniline azo compound, a triphenylmethane compound, an anthraquinone compound, a benzylidene compound, an oxonol compound, a pyrazolotriazole azo compound, a pyridone azo compound, a cyanine compound, a phenanthridine compound and a pyrrolopyrazole azo methine compound can be used. In addition, as black dyes, for example, compounds described in Japanese Patent Publication No. 64-090403, Japanese Patent Publication No. 64-091102, Japanese Patent Publication No. 01-094301, Japanese Patent Publication No. 06-011614, Japanese Patent Publication No. 2592207, U.S. Patent No. 4808501, U.S. Patent No. 5667920, U.S. Patent No. 505950, Japanese Patent Publication No. 05-333207, Japanese Patent Publication No. 06-035183, Japanese Patent Publication No. 06-051115, and Japanese Patent Publication No. 06-194828 can be referred to, and the contents are incorporated into this specification.

作為該等黑色染料,例如,可以舉出溶劑黑27~47的顏料索引(C.I.)中規定之染料,在溶劑黑27、29或34的C.I.中規定之染料為較佳。 又,作為該等黑色染料的市售品,例如,可以舉出Spilon Black MH、Black BH(以上為Hodogaya Chemical Co., Ltd.製造)、VALIFAST Black 3804、3810、3820、3830(以上為ORIENT CHEMICAL INDUSTRIES CO., LTD.製造)、Savinyl Black RLSN(以上為Clariant Chemicals製造)、KAYASET Black K-R、K-BL(以上為Nippon Kayaku Co., Ltd.製造)等染料。又,可以使用分子內具有聚合性之聚合性染料,作為市售品,例如,可以舉出Wako Pure Chemical Industries, Ltd.製造之RDW系列。 As such black dyes, for example, dyes specified in the Pigment Index (C.I.) of Solvent Black 27 to 47 can be cited, and dyes specified in the C.I. of Solvent Black 27, 29 or 34 are preferred. In addition, as commercially available products of such black dyes, for example, dyes such as Spilon Black MH, Black BH (manufactured by Hodogaya Chemical Co., Ltd.), VALIFAST Black 3804, 3810, 3820, 3830 (manufactured by ORIENT CHEMICAL INDUSTRIES CO., LTD.), Savinyl Black RLSN (manufactured by Clariant Chemicals), KAYASET Black K-R, K-BL (manufactured by Nippon Kayaku Co., Ltd.) can be cited. In addition, polymerizable dyes having polymerizability in the molecule can be used. As commercially available products, for example, the RDW series manufactured by Wako Pure Chemical Industries, Ltd. can be cited.

又,黑色染料可以使用色素多聚體。作為色素多聚體,例如,可以舉出日本特開2011-213925號公報及日本特開2013-041097號公報中記載之化合物。 此外,如上所述,亦可以單獨組合複數種具有黑色以外的顏色之染料來用作黑色染料。作為該種著色染料,例如,除了R(紅)、G(綠)及B(藍)等彩色系染料(彩色染料)以外,還能夠使用日本特開2014-042375的0027~0200段中記載之染料。 In addition, a pigment polymer can be used as a black dye. As a pigment polymer, for example, compounds described in Japanese Patent Publication No. 2011-213925 and Japanese Patent Publication No. 2013-041097 can be cited. In addition, as described above, a plurality of dyes having colors other than black can also be combined alone to be used as a black dye. As such a coloring dye, for example, in addition to color dyes (color dyes) such as R (red), G (green) and B (blue), dyes described in paragraphs 0027 to 0200 of Japanese Patent Publication No. 2014-042375 can also be used.

〔分散劑〕 組成物包含分散劑(分散樹脂)為較佳。 分散劑(分散樹脂)表示以分散顏料等被分散物為目的而添加之樹脂且為與已經說明之特定樹脂不同的樹脂。 作為分散劑在組成物中的含量,並沒有特別限制,相對於組成物的總固體成分,2~40質量%為較佳,5~30質量%為更佳,5~20質量%為進一步較佳。 分散劑可單獨使用1種,亦可併用2種以上。併用2種以上的分散劑時,合計含量在上述範圍內者為較佳。 [Dispersant] The composition preferably contains a dispersant (dispersing resin). The dispersant (dispersing resin) refers to a resin added for the purpose of dispersing a dispersed substance such as a pigment and is a resin different from the specific resin described above. The content of the dispersant in the composition is not particularly limited, but is preferably 2 to 40% by mass, more preferably 5 to 30% by mass, and even more preferably 5 to 20% by mass relative to the total solid content of the composition. The dispersant may be used alone or in combination of two or more. When two or more dispersants are used in combination, the total content is preferably within the above range.

作為分散劑,例如能夠適當選擇公知的分散劑來使用。其中,高分子化合物為較佳。 作為分散劑,可以舉出高分子分散劑〔例如,聚醯胺基胺及其鹽、聚羧酸及其鹽、高分子量不飽和酸酯、改質聚胺酯、改質聚酯、改質聚(甲基)丙烯酸酯、(甲基)丙烯酸系共聚物、萘磺酸福馬林縮合物〕、聚氧乙烯烷基磷酸酯、聚氧乙烯烷基胺及顏料衍生物等。 高分子化合物能夠根據其結構進一步分類為直鏈狀高分子、末端改質型高分子、接枝型高分子、嵌段型高分子。 As a dispersant, for example, a known dispersant can be appropriately selected for use. Among them, a polymer compound is preferred. As a dispersant, there can be cited polymer dispersants [for example, polyamidoamine and its salts, polycarboxylic acid and its salts, high molecular weight unsaturated acid esters, modified polyurethane, modified polyester, modified poly(meth)acrylate, (meth)acrylic acid copolymer, naphthalenesulfonic acid formalin condensate], polyoxyethylene alkyl phosphate, polyoxyethylene alkylamine and pigment derivatives. Polymer compounds can be further classified into linear polymers, terminal modified polymers, grafted polymers, and block polymers according to their structures.

·高分子化合物 高分子化合物發揮吸附於顏料等被分散體的表面並防止被分散體的再凝聚之作用。因此,包含向顏料表面的錨定(anchor)部位之末端改質型高分子、接枝型(包含高分子鏈)高分子或嵌段型高分子為較佳。 ·Polymer compounds Polymer compounds play a role in adsorbing on the surface of dispersed bodies such as pigments and preventing the dispersed bodies from re-aggregating. Therefore, terminal modified polymers, grafted polymers (including polymer chains) or block polymers containing anchor sites on the pigment surface are preferred.

上述高分子化合物可以包含硬化性基。 作為硬化性基,例如可以舉出乙烯性不飽和基(例如(甲基)丙烯醯基、乙烯基及苯乙烯基等)及環狀醚基(例如環氧基及氧環丁烷基等)等,但並不限於該等。 其中,作為硬化性基團,從能夠在自由基反應中進行聚合控制的觀點考慮,乙烯性不飽和基為較佳。乙烯性不飽和基為(甲基)丙烯醯基為更佳。 The polymer compound may contain a curable group. As the curable group, for example, ethylenic unsaturated groups (such as (meth)acrylic groups, vinyl groups, and styrene groups, etc.) and cyclic ether groups (such as epoxy groups and cyclobutylene groups, etc.) can be cited, but are not limited to them. Among them, as the curable group, ethylenic unsaturated groups are preferred from the viewpoint of being able to control polymerization in a free radical reaction. It is more preferred that the ethylenic unsaturated group is a (meth)acrylic group.

樹脂包含選自包括聚酯結構及聚醚結構之群組中的1種以上為較佳。此時,可以在主鏈包含聚酯結構及/或聚醚結構,如後所述在上述樹脂含有包含接枝鏈之結構單元時,上述高分子鏈可以包含聚酯結構及/或聚醚結構。 作為上述樹脂,上述高分子鏈包含聚酯結構為更佳。 The resin preferably contains at least one selected from the group including polyester structure and polyether structure. In this case, the main chain may contain a polyester structure and/or a polyether structure. When the resin contains a structural unit including a graft chain as described later, the polymer chain may contain a polyester structure and/or a polyether structure. As the resin, it is more preferable that the polymer chain contains a polyester structure.

高分子化合物含有包含接枝鏈之結構單元為較佳。另外,在本說明書中,“結構單元”與“重複單元”的含義相同。 含有包含此類接枝鏈之結構單元之高分子化合物藉由接枝鏈具有與溶劑的親和性,因此顏料等的被分散物的分散性及經時後的分散穩定性優異。又,藉由接枝鏈的存在,含有包含接枝鏈之結構單元之高分子化合物具有與樹脂A、聚合性化合物或其他能夠併用之樹脂等的親和性。其結果,在鹼顯影中更不易生成殘渣。 若接枝鏈變長,則立體排斥效果提高而顏料等的被分散物的分散性得到提高。另一方面,若接枝鏈過長,則對顏料等的被分散物的吸附力下降,顏料等的被分散物的分散性具有下降的傾向。因此,接枝鏈為氫原子以外的原子數為40~10000為較佳,氫原子以外的原子數為50~2000為更佳,氫原子以外的原子數為60~500為進一步較佳。 在此,接枝鏈表示共聚物的主鏈的根部(從主鏈支化之基團中與主鏈鍵結之原子)至從主鏈支化之基團的末端。 It is preferred that the polymer compound contains a structural unit including a grafted chain. In addition, in this specification, "structural unit" and "repeating unit" have the same meaning. The polymer compound containing a structural unit including such a grafted chain has an affinity with the solvent due to the grafted chain, so the dispersibility of the dispersed matter such as the pigment and the dispersion stability after time are excellent. In addition, due to the presence of the grafted chain, the polymer compound containing a structural unit including the grafted chain has an affinity with the resin A, the polymerizable compound or other resins that can be used in combination. As a result, it is less likely to generate residues during alkaline development. If the grafted chain becomes longer, the stereo repulsion effect is enhanced and the dispersibility of the dispersed matter such as the pigment is improved. On the other hand, if the graft chain is too long, the adsorption force to the dispersed matter such as the pigment decreases, and the dispersibility of the dispersed matter such as the pigment tends to decrease. Therefore, the number of atoms other than hydrogen atoms in the graft chain is preferably 40 to 10,000, the number of atoms other than hydrogen atoms is more preferably 50 to 2,000, and the number of atoms other than hydrogen atoms is further preferably 60 to 500. Here, the graft chain refers to the root of the main chain of the copolymer (the atom bonded to the main chain in the group branched from the main chain) to the end of the group branched from the main chain.

接枝鏈包含聚合物結構為較佳,作為此類聚合物結構,例如可以舉出聚(甲基)丙烯酸酯結構(例如,聚(甲基)丙烯酸結構)、聚酯結構、聚胺酯結構、聚脲結構、聚醯胺結構及聚醚結構等。 為了提高接枝鏈與溶劑的相互作用性,並藉此提高顏料等的被分散物的分散性,接枝鏈為包含選自包括聚酯結構、聚醚結構及聚(甲基)丙烯酸酯結構之群組中的1種以上之接枝鏈為較佳,包含聚酯結構及聚醚結構中的至少任一種之接枝鏈為更佳。 The graft chain preferably comprises a polymer structure, and examples of such polymer structures include poly(meth)acrylate structures (e.g., poly(meth)acrylic acid structures), polyester structures, polyurethane structures, polyurea structures, polyamide structures, and polyether structures. In order to improve the interaction between the graft chain and the solvent and thereby improve the dispersibility of dispersed materials such as pigments, the graft chain preferably comprises one or more graft chains selected from the group including polyester structures, polyether structures, and poly(meth)acrylate structures, and more preferably comprises at least one of polyester structures and polyether structures.

作為包含此類接枝鏈之巨單體(具有聚合物結構且鍵結於共聚物的主鏈來構成接枝鏈之單體),並沒有特別限定,能夠較佳地使用包含反應性雙鍵性基團之巨單體。The macromonomer containing such a graft chain (a monomer having a polymer structure and bonding to the main chain of the copolymer to constitute the graft chain) is not particularly limited, and a macromonomer containing a reactive bibond group can be preferably used.

作為與高分子化合物所含的包含接枝鏈之結構單元對應且較佳地用於合成高分子化合物之市售的巨單體,可以使用AA-6(產品名稱,TOAGOSEI CO., LTD.製造)、AA-10(產品名稱,TOAGOSEI CO., LTD.製造)、AB-6(產品名稱,TOAGOSEI CO., LTD.製造)、AS-6(產品名稱,TOAGOSEI CO., LTD.製造)、AN-6(產品名稱,TOAGOSEI CO., LTD.製造)、AW-6(產品名稱,TOAGOSEI CO., LTD.製造)、AA-714(產品名稱,TOAGOSEI CO., LTD.製造)、AY-707(產品名稱,TOAGOSEI CO., LTD.製造)、AY-714(產品名稱,TOAGOSEI CO., LTD.製造)、AK-5(產品名稱,TOAGOSEI CO., LTD.製造)、AK-30(產品名稱,TOAGOSEI CO., LTD.製造)、AK-32(產品名稱,TOAGOSEI CO., LTD.製造)、BLEMMER PP-100(產品名稱,NOF CORPORATION.製造)、BLEMMER PP-500(產品名稱,NOF CORPORATION.製造)、BLEMMER PP-800(產品名稱,NOF CORPORATION.製造)、BLEMMER PP-1000(產品名稱,NOF CORPORATION.製造)、BLEMMER 55-PET-800(產品名稱,NOF CORPORATION.製造)、BLEMMER PME-4000(產品名稱,NOF CORPORATION.製造)、BLEMMER PSE-400(產品名稱,NOF CORPORATION.製造)、BLEMMER PSE-1300(產品名稱,NOF CORPORATION.製造)或BLEMMER 43PAPE-600B(產品名稱,NOF CORPORATION.製造)等。其中,AA-6(產品名稱,TOAGOSEI CO., LTD.製造)、AA-10(產品名稱,TOAGOSEI CO., LTD.製造)、AB-6(產品名稱,TOAGOSEI CO., LTD.製造)、AS-6(產品名稱,TOAGOSEI CO., LTD.製造)、AN-6(產品名稱,TOAGOSEI CO., LTD.製造)或BLEMMER PME-4000(產品名稱,NOF CORPORATION.製造)為較佳。As commercially available macromonomers that correspond to the structural units including the graft chain contained in the polymer compound and are preferably used for synthesizing the polymer compound, AA-6 (product name, manufactured by TOAGOSEI CO., LTD.), AA-10 (product name, manufactured by TOAGOSEI CO., LTD.), AB-6 (product name, manufactured by TOAGOSEI CO., LTD.), AS-6 (product name, manufactured by TOAGOSEI CO., LTD.), AN-6 (product name, manufactured by TOAGOSEI CO., LTD.), AW-6 (product name, manufactured by TOAGOSEI CO., LTD.), AA-714 (product name, manufactured by TOAGOSEI CO., LTD.), AY-707 (product name, manufactured by TOAGOSEI CO., LTD.), AY-714 (product name, manufactured by TOAGOSEI CO., LTD.), and AY-707 (product name, manufactured by TOAGOSEI CO., LTD.) can be used. CO., LTD.), AK-5 (Product name, manufactured by TOAGOSEI CO., LTD.), AK-30 (Product name, manufactured by TOAGOSEI CO., LTD.), AK-32 (Product name, manufactured by TOAGOSEI CO., LTD.), BLEMMER PP-100 (Product name, manufactured by NOF CORPORATION.), BLEMMER PP-500 (Product name, manufactured by NOF CORPORATION.), BLEMMER PP-800 (Product name, manufactured by NOF CORPORATION.), BLEMMER PP-1000 (Product name, manufactured by NOF CORPORATION.), BLEMMER 55-PET-800 (Product name, manufactured by NOF CORPORATION.), BLEMMER PME-4000 (Product name, manufactured by NOF CORPORATION.), BLEMMER PSE-400 (product name, manufactured by NOF CORPORATION), BLEMMER PSE-1300 (product name, manufactured by NOF CORPORATION) or BLEMMER 43PAPE-600B (product name, manufactured by NOF CORPORATION), etc. Among them, AA-6 (product name, manufactured by TOAGOSEI CO., LTD.), AA-10 (product name, manufactured by TOAGOSEI CO., LTD.), AB-6 (product name, manufactured by TOAGOSEI CO., LTD.), AS-6 (product name, manufactured by TOAGOSEI CO., LTD.), AN-6 (product name, manufactured by TOAGOSEI CO., LTD.) or BLEMMER PME-4000 (product name, manufactured by NOF CORPORATION) are preferred.

上述分散劑包含選自包括聚丙烯酸甲酯、聚甲基丙烯酸甲酯及環狀或鏈狀聚酯之群組中的1種以上結構為較佳,包含選自包括聚丙烯酸甲酯、聚甲基丙烯酸甲酯及鏈狀聚酯之群組中的1種以上結構為更佳,包含選自包括聚丙烯酸甲酯結構、聚甲基丙烯酸甲酯結構、聚己內酯結構及聚戊內酯結構之群組中的1種以上結構為進一步較佳。分散劑可以為在1種分散劑中單獨包含上述結構之分散劑,亦可以為在1種分散劑中包含複數種該等結構之分散劑。 其中,聚己內酯結構係指,包含將ε-己內酯開環之結構作為重複單元之結構。聚戊內酯結構係指,包含將δ-戊內酯開環之結構作為重複單元之結構。 作為包含聚己內酯結構之分散劑的具體例,可以舉出下述式(1)及下述式(2)中的j及k為5的分散劑。又,作為包含聚戊內酯結構之分散劑的具體例,可以舉出下述式(1)及下述式(2)中的j及k為4的分散劑。 作為包含聚丙烯酸甲酯結構之分散劑的具體例,可以舉出下述式(4)中的X 5為氫原子且R 4為甲基的分散劑。又,作為包含聚甲基丙烯酸甲酯結構之分散劑的具體例,可以舉出下述式(4)中的X 5為甲基且R 4為甲基的分散劑。 The above-mentioned dispersant preferably contains one or more structures selected from the group including polymethyl acrylate, polymethyl methacrylate and cyclic or chain polyesters, more preferably contains one or more structures selected from the group including polymethyl acrylate, polymethyl methacrylate and chain polyesters, and further preferably contains one or more structures selected from the group including polymethyl acrylate structure, polymethyl methacrylate structure, polycaprolactone structure and polyvalerolactone structure. The dispersant may be a dispersant containing the above-mentioned structure alone in one dispersant, or may be a dispersant containing a plurality of such structures in one dispersant. Among them, the polycaprolactone structure refers to a structure containing a structure in which ε-caprolactone is ring-opened as a repeating unit. The polyvalerolactone structure refers to a structure containing a structure in which δ-valerolactone is ring-opened as a repeating unit. As a specific example of a dispersant containing a polycaprolactone structure, there are dispersants in which j and k are 5 in the following formula (1) and the following formula (2). As a specific example of a dispersant containing a polyvalerolactone structure, there are dispersants in which j and k are 4 in the following formula (1) and the following formula (2). As a specific example of a dispersant containing a polymethyl acrylate structure, there is a dispersant in which X 5 is a hydrogen atom and R 4 is a methyl group in the following formula (4). As a specific example of a dispersant containing a polymethyl methacrylate structure, there is a dispersant in which X 5 is a methyl group and R 4 is a methyl group in the following formula (4).

·包含接枝鏈之結構單元 高分子化合物作為包含接枝鏈之結構單元而包含下述式(1)~式(4)中的任一個所表示之結構單元為較佳。 · Structural unit containing a graft chain The polymer compound preferably contains a structural unit represented by any one of the following formulas (1) to (4) as a structural unit containing a graft chain.

[化學式12] [Chemical formula 12]

在式(1)~(4)中,W 1、W 2、W 3及W 4分別獨立地表示氧原子或NH。W 1、W 2、W 3及W 4為氧原子為較佳。 式(1)~(4)中,X 1、X 2、X 3、X 4及X 5分別獨立地表示氫原子或1價有機基團。作為X 1、X 2、X 3、X 4及X 5,從合成上的約束的觀點考慮,分別獨立地為氫原子或碳數(碳原子數)1~12的烷基為較佳,分別獨立地為氫原子或甲基為更佳,甲基為進一步較佳。 In formulae (1) to (4), W 1 , W 2 , W 3 and W 4 each independently represent an oxygen atom or NH. W 1 , W 2 , W 3 and W 4 are preferably oxygen atoms. In formulae (1) to (4), X 1 , X 2 , X 3 , X 4 and X 5 each independently represent a hydrogen atom or a monovalent organic group. From the viewpoint of synthetic constraints, X 1 , X 2 , X 3 , X 4 and X 5 each independently represent a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, more preferably a hydrogen atom or a methyl group, and even more preferably a methyl group.

式(1)~(4)中,Y 1、Y 2、Y 3及Y 4分別獨立地表示2價連接基,連接基並沒有在結構上受限。作為Y 1、Y 2、Y 3及Y 4所表示之2價連接基,具體而言,可以舉出下述(Y-1)~(Y-21)的連接基等為例。在以下所示之結構中,A、B分別表示與式(1)~(4)中的左末端基、右末端基的鍵結部位。在以下所示之結構中,從合成的簡便性考慮,(Y-2)或(Y-13)為更佳。 In formulae (1) to (4), Y 1 , Y 2 , Y 3 and Y 4 each independently represent a divalent linking group, and the linking group is not limited in structure. Specific examples of the divalent linking group represented by Y 1 , Y 2 , Y 3 and Y 4 include the following linking groups (Y-1) to (Y-21). In the structures shown below, A and B represent the bonding sites to the left terminal group and the right terminal group in formulae (1) to (4), respectively. Among the structures shown below, (Y-2) or (Y-13) is more preferred from the perspective of simplicity of synthesis.

[化學式13] [Chemical formula 13]

式(1)~(4)中,Z 1、Z 2、Z 3及Z 4分別獨立地表示羥基、胺基或1價有機基團。作為有機基團的結構,並沒有特別限制,具體而言,可以舉出烷基、烷氧基、芳氧基、雜芳氧基、烷基硫醚基、芳基硫醚基及雜芳基硫醚基等。作為Z 1、Z 2、Z 3及Z 4所表示之有機基團,其中,尤其從提高分散性的觀點考慮,具有立體排斥效果之基團為較佳,碳數5~24的烷基或烷氧基為更佳,碳數5~24的支鏈烷基、碳數5~24的環狀烷基或碳數5~24的烷氧基為進一步較佳。 另外,烷氧基中包含之烷基可以為直鏈狀、支鏈狀及環狀中的任一個。又,烷氧基中的亞甲基可以被-O-取代。 又,上述各基團可以具有取代基(例如,羥基及(甲基)丙烯醯氧基等乙烯性不飽和基等)。 In formulae (1) to (4), Z 1 , Z 2 , Z 3 and Z 4 independently represent a hydroxyl group, an amino group or a monovalent organic group. The structure of the organic group is not particularly limited, and specific examples thereof include alkyl, alkoxy, aryloxy, heteroaryloxy, alkyl thioether, aryl thioether and heteroaryl thioether groups. As the organic group represented by Z 1 , Z 2 , Z 3 and Z 4 , a group having a stereo-repelling effect is preferred from the viewpoint of improving dispersibility, an alkyl group or an alkoxy group having 5 to 24 carbon atoms is more preferred, and a branched alkyl group having 5 to 24 carbon atoms, a cyclic alkyl group having 5 to 24 carbon atoms or an alkoxy group having 5 to 24 carbon atoms is further preferred. In addition, the alkyl group contained in the alkoxy group may be any of a linear, branched, or cyclic group. In addition, the methylene group in the alkoxy group may be substituted with -O-. In addition, each of the above groups may have a substituent (for example, a hydroxyl group and an ethylenically unsaturated group such as a (meth)acryloyloxy group).

另外,式(1)中,Z 1為羥基時,式中的-COZ 1所表示之部位可以被陰離子化(-COO -)。此時,作為相對陽離子,可以舉出四級銨,其中,式(TY)所表示之結構為較佳。 In formula (1), when Z 1 is a hydroxyl group, the site represented by -COZ 1 in the formula may be anionized (-COO - ). In this case, as the relative cation, quaternary ammonium can be cited, among which the structure represented by formula (TY) is preferred.

[化學式14] [Chemical formula 14]

式(TY)中,R 1f及R 1g各自獨立地表示氫原子或烷基。作為R 1f及R 1g所表示之烷基,直鏈狀或支鏈狀為較佳。又,作為碳數,1~10為較佳,1~4為更佳,1或2為進一步較佳。 式(TY)中,R 1e表示烷基。作為R 1e所表示之烷基,直鏈狀為較佳。又,作為碳數,10~24為較佳,10~20為更佳。 式(TY)中,L 2表示伸烷基。作為L 2所表示之伸烷基,直鏈狀或支鏈狀為較佳,直鏈狀為更佳。作為碳數,1~20為較佳,1~12為更佳。又,伸烷基可以具有取代基(例如,羥基)。又,伸烷基中的亞甲基可以被-O-取代。 式(TY)中,R 1h表示氫原子或(甲基)丙烯醯氧基等乙烯性不飽和基。 In the formula (TY), R 1f and R 1g each independently represent a hydrogen atom or an alkyl group. As the alkyl group represented by R 1f and R 1g , a linear or branched chain is preferred. Moreover, as the carbon number, 1 to 10 is preferred, 1 to 4 is more preferred, and 1 or 2 is further preferred. In the formula (TY), R 1e represents an alkyl group. As the alkyl group represented by R 1e , a linear chain is preferred. Moreover, as the carbon number, 10 to 24 is preferred, and 10 to 20 is more preferred. In the formula (TY), L 2 represents an alkylene group. As the alkylene group represented by L 2 , a linear or branched chain is preferred, and a linear chain is more preferred. As the carbon number, 1 to 20 is preferred, and 1 to 12 is more preferred. The alkylene group may have a substituent (for example, a hydroxyl group). The methylene group in the alkylene group may be substituted with -O-. In formula (TY), R 1h represents a hydrogen atom or an ethylenically unsaturated group such as a (meth)acryloyloxy group.

式(1)~(4)中,n、m、p及q分別獨立地為1~500的數。 又,式(1)及式(2)中,j及k分別獨立地表示2~8的整數。從組成物的經時黏度穩定性及顯影性的觀點考慮,式(1)及(2)中的j及k為4~6的整數為較佳,5為更佳。 又,式(1)及(2)中,n及m為10以上為較佳,20以上為更佳。又,分散劑包含聚己內酯結構及聚戊內酯結構時,作為聚己內酯結構的重複數與聚戊內酯結構的重複數之和,10以上為較佳,20以上為更佳。 In formulas (1) to (4), n, m, p and q are independently a number of 1 to 500. In formulas (1) and (2), j and k are independently an integer of 2 to 8. From the viewpoint of the viscosity stability over time and the developing property of the composition, j and k in formulas (1) and (2) are preferably integers of 4 to 6, and 5 is more preferably. In formulas (1) and (2), n and m are preferably 10 or more, and 20 or more is more preferably. In addition, when the dispersant contains a polycaprolactone structure and a polyvalerolactone structure, the sum of the number of repetitions of the polycaprolactone structure and the number of repetitions of the polyvalerolactone structure is preferably 10 or more, and 20 or more is more preferably.

式(3)中,R 3表示支鏈狀或直鏈狀的伸烷基,碳數1~10的伸烷基為較佳,碳數2或3的伸烷基為更佳。p為2~500時,存在複數個之R 3可以彼此相同,亦可以不同。 在式(4)中,R 4表示氫原子或一價的有機基團,作為該一價的有機基團,結構上並沒有特別限定。作為R 4,氫原子、烷基、芳基或雜芳基為較佳,氫原子或烷基為更佳。R 4為烷基時,作為烷基,碳數1~20的直鏈狀烷基、碳數3~20的支鏈狀烷基或碳數5~20的環狀烷基為較佳,碳數1~20的直鏈狀烷基為更佳,碳數1~6的直鏈狀烷基為進一步較佳。在式(4)中,q為2~500時,接枝共聚物中存在複數個之X 5及R 4可相互相同亦可互不相同。 In formula (3), R 3 represents a branched or linear alkylene group, preferably an alkylene group having 1 to 10 carbon atoms, and more preferably an alkylene group having 2 or 3 carbon atoms. When p is 2 to 500, a plurality of R 3 may be the same or different. In formula (4), R 4 represents a hydrogen atom or a monovalent organic group, and the monovalent organic group is not particularly limited in structure. As R 4 , a hydrogen atom, an alkyl group, an aryl group or a heteroaryl group is preferred, and a hydrogen atom or an alkyl group is more preferred. When R4 is an alkyl group, the alkyl group is preferably a linear alkyl group having 1 to 20 carbon atoms, a branched alkyl group having 3 to 20 carbon atoms, or a cyclic alkyl group having 5 to 20 carbon atoms, more preferably a linear alkyl group having 1 to 20 carbon atoms, and still more preferably a linear alkyl group having 1 to 6 carbon atoms. In formula (4), when q is 2 to 500, a plurality of X5 and R4 present in the graft copolymer may be the same or different from each other.

又,高分子化合物能夠包含2種以上的結構不同的包含接枝鏈之結構單元。亦即,高分子化合物的分子中可以包含結構互不相同的式(1)~(4)所表示之結構單元,又,式(1)~(4)中,n、m、p及q分別表示2以上時,式(1)及式(2)中,可在側鏈中包含j及k互不相同的結構,式(3)及式(4)中,分子內存在複數個之R 3、R 4及X 5可以相同或互不相同。 Furthermore, the polymer compound may contain two or more structural units containing graft chains having different structures. That is, the polymer compound molecule may contain structural units represented by formulas (1) to (4) having different structures. Furthermore, in formulas (1) to (4), when n, m, p and q each represent 2 or more, in formulas (1) and (2), j and k may have different structures in the side chain. In formulas (3) and (4), a plurality of R 3 , R 4 and X 5 present in the molecule may be the same or different.

在高分子化合物中,包含接枝鏈之結構單元(例如,上述式(1)~(4)所表示之結構單元)以質量換算計,相對於高分子化合物的總質量,包含在2~90質量%的範圍內為較佳,包含在5~30質量%的範圍內為更佳。若包含接枝鏈之結構單元在該範圍內,則顏料的分散性高且曝光後的硬化膜中的顯影性良好。In the polymer compound, the structural unit containing the graft chain (for example, the structural unit represented by the above formula (1) to (4)) is preferably contained in the range of 2 to 90 mass % and more preferably in the range of 5 to 30 mass % relative to the total mass of the polymer compound in terms of mass conversion. If the structural unit containing the graft chain is within this range, the dispersibility of the pigment is high and the developability in the cured film after exposure is good.

·疏水性結構單元 又,高分子化合物包含與包含接枝鏈之結構單元不同(亦即,並不相當於包含接枝鏈之結構單元)之疏水性結構單元為較佳。其中,在本發明中,疏水性結構單元係不含有酸基(例如,羧酸基、磺酸基、磷酸基、酚性羥基等)之結構單元。 ·Hydrophobic structural unit In addition, it is preferred that the polymer compound contains a hydrophobic structural unit that is different from the structural unit containing the grafted chain (that is, not equivalent to the structural unit containing the grafted chain). Among them, in the present invention, the hydrophobic structural unit is a structural unit that does not contain an acid group (for example, a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, a phenolic hydroxyl group, etc.).

疏水性結構單元係源自(對應)ClogP值為1.2以上的化合物(單體)之結構單元為較佳,源自ClogP值為1.2~8的化合物之結構單元為更佳。藉此,能夠更確實地顯現本發明的效果。The hydrophobic structural unit is preferably a structural unit derived from (corresponding to) a compound (monomer) having a ClogP value of 1.2 or more, and more preferably a structural unit derived from a compound having a ClogP value of 1.2 to 8. Thereby, the effect of the present invention can be more reliably manifested.

高分子化合物包含從源自下述式(i)~(iii)所表示之單體的結構單元中選擇的1種以上結構單元作為疏水性結構單元為較佳。The polymer compound preferably contains, as the hydrophobic structural unit, one or more structural units selected from structural units derived from monomers represented by the following formulae (i) to (iii).

[化學式15] [Chemical formula 15]

在上述式(i)~(iii)中,R 1、R 2及R 3分別獨立地表示氫原子、鹵素原子(例如,氟原子、氯原子、溴原子等)或碳數為1~6的烷基(例如,甲基、乙基、丙基等)。 R 1、R 2及R 3為氫原子或碳數1~3的烷基為較佳,氫原子或甲基為更佳。R 2及R 3係氫原子為進一步較佳。 X表示氧原子(-O-)或亞胺基(-NH-),氧原子為較佳。 In the above formulae (i) to (iii), R 1 , R 2 and R 3 each independently represent a hydrogen atom, a halogen atom (e.g., a fluorine atom, a chlorine atom, a bromine atom, etc.) or an alkyl group having 1 to 6 carbon atoms (e.g., a methyl group, an ethyl group, a propyl group, etc.). R 1 , R 2 and R 3 are preferably hydrogen atoms or alkyl groups having 1 to 3 carbon atoms, and more preferably hydrogen atoms or methyl groups. R 2 and R 3 are further preferably hydrogen atoms. X represents an oxygen atom (—O—) or an imino group (—NH—), and preferably an oxygen atom.

L為單鍵或2價的連接基。作為2價的連接基,可以舉出2價的脂肪族基(例如,伸烷基、取代伸烷基、伸烯基、取代伸烯基、伸炔基、取代伸炔基)、2價的芳香族基(例如,伸芳基、取代伸芳基)、2價的雜環基、氧原子(-O-)、硫原子(-S-)、亞胺基(-NH-)、取代亞胺基(-NR 31-,其中,R 31為脂肪族基、芳香族基或雜環基)、羰基(-CO-)及該等組合等。 L is a single bond or a divalent linking group. Examples of the divalent linking group include a divalent aliphatic group (e.g., an alkylene group, a substituted alkylene group, an alkenylene group, a substituted alkenylene group, an alkynylene group, a substituted alkynylene group), a divalent aromatic group (e.g., an arylene group, a substituted arylene group), a divalent heterocyclic group, an oxygen atom (-O-), a sulfur atom (-S-), an imino group (-NH-), a substituted imino group (-NR 31 -, wherein R 31 is an aliphatic group, an aromatic group or a heterocyclic group), a carbonyl group (-CO-), and combinations thereof.

2價的脂肪族基可以具有環狀結構或支鏈結構。脂肪族基的碳數為1~20為較佳,1~15為更佳,1~10為進一步較佳。脂肪族基可以為不飽和脂肪族基,亦可以為飽和脂肪族基,但飽和脂肪族基為較佳。又,脂肪族基可以具有取代基。取代基的例可以舉出鹵素原子、芳香族基及雜環基等。The divalent aliphatic group may have a cyclic structure or a branched structure. The carbon number of the aliphatic group is preferably 1 to 20, more preferably 1 to 15, and even more preferably 1 to 10. The aliphatic group may be an unsaturated aliphatic group or a saturated aliphatic group, but a saturated aliphatic group is preferred. In addition, the aliphatic group may have a substituent. Examples of the substituent include a halogen atom, an aromatic group, and a heterocyclic group.

二價的芳香族基的碳數為6~20為較佳,6~15為更佳,6~10為進一步較佳。又,芳香族基可以具有取代基。取代基的例可以舉出鹵素原子、脂肪族基、芳香族基及雜環基等。The carbon number of the divalent aromatic group is preferably 6 to 20, more preferably 6 to 15, and even more preferably 6 to 10. The aromatic group may have a substituent. Examples of the substituent include a halogen atom, an aliphatic group, an aromatic group, and a heterocyclic group.

2價雜環基包含5員環或6員環作為雜環為較佳。在雜環上亦可以稠合其他雜環、脂肪族環或芳香族環。又,雜環基可以具有取代基。作為取代基的例子,可以舉出鹵素原子、羥基、氧代基(=O)、硫代基(=S)、亞胺基(=NH)、取代亞胺基(=N-R 32,其中,R 32為脂肪族基、芳香族基或雜環基)、脂肪族基、芳香族基及雜環基。 The divalent heterocyclic group preferably contains a 5-membered ring or a 6-membered ring as a heterocyclic ring. Other heterocyclic rings, aliphatic rings or aromatic rings may be condensed on the heterocyclic ring. In addition, the heterocyclic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an oxo group (=O), a thio group (=S), an imino group (=NH), a substituted imino group (=NR 32 , wherein R 32 is an aliphatic group, an aromatic group or a heterocyclic group), an aliphatic group, an aromatic group and a heterocyclic group.

L為單鍵、伸烷基或包含氧伸烷基結構之2價連接基為較佳。氧伸烷基結構係氧伸乙基結構或氧伸丙基結構為更佳。又,L可以包含藉由重複2個以上的氧伸烷基結構而包含之聚氧伸烷基結構。作為聚氧伸烷基結構,聚氧伸乙基結構或聚氧伸丙基結構為較佳。聚氧乙烯結構由-(OCH 2CH 2)n-表示,n為2以上的整數為較佳,2~10的整數為更佳。 L is preferably a single bond, an alkylene group, or a divalent linking group containing an oxyalkylene structure. The oxyalkylene structure is more preferably an oxyethylene structure or an oxypropylene structure. In addition, L may contain a polyoxyalkylene structure formed by repeating two or more oxyalkylene structures. As the polyoxyalkylene structure, a polyoxyethylene structure or a polyoxypropylene structure is preferred. The polyoxyethylene structure is represented by -(OCH 2 CH 2 ) n-, wherein n is preferably an integer greater than 2, and more preferably an integer from 2 to 10.

作為Z,可以舉出脂肪族基(例如,烷基、取代烷基、不飽和烷基及取代不飽和烷基)、芳香族基(例如,芳基、取代芳基、伸芳基、取代伸芳基)、雜環基或該等的組合。該等基團中亦可以包含氧原子(-O-)、硫原子(-S-)、亞胺基(-NH-)、取代亞胺基(-NR 31-,其中,R 31為脂肪族基、芳香族基或雜環基)或羰基(-CO-)。 As Z, there can be mentioned an aliphatic group (e.g., an alkyl group, a substituted alkyl group, an unsaturated alkyl group, and a substituted unsaturated alkyl group), an aromatic group (e.g., an aryl group, a substituted aryl group, an arylene group, a substituted arylene group), a heterocyclic group, or a combination thereof. These groups may also contain an oxygen atom (—O—), a sulfur atom (—S—), an imino group (—NH—), a substituted imino group (—NR 31 -, wherein R 31 is an aliphatic group, an aromatic group, or a heterocyclic group) or a carbonyl group (—CO—).

脂肪族基可以具有環狀結構或分支結構。脂肪族基的碳數為1~20為較佳,1~15為更佳,1~10為進一步較佳。脂肪族基中還包含環集合烴基、交聯環式烴基,作為環集合烴基的例子,包含雙環己基、全氫萘基、聯苯基及4-環己基苯基等。作為交聯環式烴環,例如可以舉出蒎烷、莰烷、降蒎烷、降莰烷、雙環辛烷環(雙環[2.2.2]辛烷環及雙環[3.2.1]辛烷環等)等2環式烴環、均布雷烷、金剛烷、三環[5.2.1.0 2,6]癸烷及三環[4.3.1.1 2,5]十一烷環等3環式烴環以及四環[4.4.0.1 2,5.1 7,10]十二烷及全氫-1,4-亞甲基-5,8-亞甲基萘環等4環式烴環等。又,交聯環式烴環中亦包含稠合環式烴環、例如全氫萘(十氫萘)、全氫蒽、全氫菲、全氫苊、全氫茀、全氫茚及全氫芭環等稠合多個5~8員環烷烴環之稠合環。 相較於不飽和脂肪族基,脂肪族基係飽和脂肪族基為較佳。又,脂肪族基可以具有取代基。取代基的例子可以舉出鹵素原子、芳香族基及雜環基。其中,作為取代基,脂肪族基不具有酸基。 The aliphatic group may have a cyclic structure or a branched structure. The carbon number of the aliphatic group is preferably 1 to 20, more preferably 1 to 15, and even more preferably 1 to 10. The aliphatic group also includes a ring-aggregated alkyl group and a cross-linked cyclic alkyl group. Examples of the ring-aggregated alkyl group include a bicyclohexyl group, a perhydronaphthyl group, a biphenyl group, and a 4-cyclohexylphenyl group. Examples of the cross-linked cyclic hydrocarbon ring include bicyclic hydrocarbon rings such as pinane, camphane, norpinane, norbornane, bicyclic octane ring (bicyclic [2.2.2] octane ring and bicyclic [3.2.1] octane ring), tricyclic hydrocarbon rings such as isobranes, adamantane, tricyclic [5.2.1.0 2,6 ] decane ring and tricyclic [4.3.1.1 2,5 ] undecane ring, and tetracyclic hydrocarbon rings such as tetracyclic [4.4.0.1 2,5 .1 7,10 ] dodecane and perhydro-1,4-methylene-5,8-methylenenaphthalene ring. In addition, cross-linked cyclic hydrocarbons also include fused cyclic hydrocarbons, such as perhydronaphthalene (decahydronaphthalene), perhydroanthracene, perhydrophenanthrene, perhydroacenaphthene, perhydrofluorene, perhydroindene and perhydronaphthalene ring, which are fused rings of multiple 5-8 membered cycloalkane rings. Compared with unsaturated aliphatic groups, aliphatic groups are preferably saturated aliphatic groups. In addition, aliphatic groups may have substituents. Examples of substituents include halogen atoms, aromatic groups and heterocyclic groups. Among them, as a substituent, aliphatic groups do not have acid groups.

芳香族基的碳數為6~20為較佳,6~15為更佳,6~10為進一步較佳。又,芳香族基可以具有取代基。取代基的例子可以舉出鹵素原子、脂肪族基、芳香族基及雜環基。其中,作為取代基,芳香族基不具有酸基。The number of carbon atoms in the aromatic group is preferably 6 to 20, more preferably 6 to 15, and even more preferably 6 to 10. The aromatic group may have a substituent. Examples of the substituent include a halogen atom, an aliphatic group, an aromatic group, and a heterocyclic group. However, the aromatic group does not have an acid group as a substituent.

雜環基包含5員環或6員環作為雜環為較佳。可以在雜環上稠合有其他雜環、脂肪族環或芳香族環。又,雜環基可以具有取代基。作為取代基的例,可以舉出鹵素原子、羥基、氧代基(=O)、硫代基(=S)、亞胺基(=NH)、取代亞胺基(=N-R 32,其中,R 32為脂肪族基、芳香族基或雜環基)、脂肪族基、芳香族基及雜環基。其中,作為取代基,雜環基不具有酸基。 The heterocyclic group preferably contains a 5-membered ring or a 6-membered ring as the heterocyclic group. Another heterocyclic group, an aliphatic ring or an aromatic ring may be condensed on the heterocyclic group. In addition, the heterocyclic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an oxo group (=O), a thio group (=S), an imino group (=NH), a substituted imino group (=NR 32 , wherein R 32 is an aliphatic group, an aromatic group or a heterocyclic group), an aliphatic group, an aromatic group and a heterocyclic group. The heterocyclic group does not have an acid group as a substituent.

在上述式(iii)中,R 4、R 5及R 6分別獨立地表示氫原子、鹵素原子(例如,氟原子、氯原子、溴原子等)、碳數為1~6的烷基(例如,甲基、乙基、丙基等)、Z或L-Z。其中,L及Z與上述中的基團的含義相同。作為R 4、R 5及R 6,氫原子或碳數為1~3的烷基為較佳,氫原子為更佳。 In the above formula (iii), R 4 , R 5 and R 6 each independently represent a hydrogen atom, a halogen atom (e.g., a fluorine atom, a chlorine atom, a bromine atom, etc.), an alkyl group having 1 to 6 carbon atoms (e.g., a methyl group, an ethyl group, a propyl group, etc.), Z or LZ. L and Z have the same meanings as in the above-mentioned groups. As R 4 , R 5 and R 6 , a hydrogen atom or an alkyl group having 1 to 3 carbon atoms is preferred, and a hydrogen atom is more preferred.

作為上述式(i)所表示之單體,如下化合物為較佳:R 1、R 2及R 3為氫原子或甲基,L為單鍵或伸烷基或者包含氧伸烷基結構之2價連接基,X為氧原子或亞胺基,Z為脂肪族基、雜環基或芳香族基。 又,作為上述式(ii)所表示之單體,R 1為氫原子或甲基、L為伸烷基、Z為脂肪族基、雜環基或芳香族基的化合物為較佳。又,作為上述式(iii)所表示之單體,R 4、R 5及R 6係氫原子或甲基、Z為脂肪族基、雜環基或芳香族基的化合物為較佳。 As the monomer represented by the above formula (i), the following compounds are preferred: R 1 , R 2 and R 3 are hydrogen atoms or methyl groups, L is a single bond or an alkylene group or a divalent linking group containing an oxyalkylene structure, X is an oxygen atom or an imino group, and Z is an aliphatic group, a heterocyclic group or an aromatic group. Moreover, as the monomer represented by the above formula (ii), the compound wherein R 1 is a hydrogen atom or a methyl group, L is an alkylene group, and Z is an aliphatic group, a heterocyclic group or an aromatic group is preferred. Moreover, as the monomer represented by the above formula (iii), the compound wherein R 4 , R 5 and R 6 are hydrogen atoms or methyl groups, and Z is an aliphatic group, a heterocyclic group or an aromatic group is preferred.

作為式(i)~(iii)所表示之代表性化合物的例,可以舉出選自丙烯酸酯類、甲基丙烯酸酯類及苯乙烯類等之自由基聚合性化合物。 另外,作為式(i)~(iii)所表示之代表性化合物的例子,能夠參考日本特開2013-249417號公報的0089~0093段中記載之化合物,該等內容被編入到本說明書中。 As examples of representative compounds represented by formulas (i) to (iii), free radical polymerizable compounds selected from acrylates, methacrylates, and styrenes can be cited. In addition, as examples of representative compounds represented by formulas (i) to (iii), the compounds described in paragraphs 0089 to 0093 of Japanese Patent Application Publication No. 2013-249417 can be referred to, and the contents are incorporated into this specification.

在高分子化合物中,疏水性結構單元以質量換算計,相對於高分子化合物的總質量,以10~90%的範圍包含為較佳,以20~80%的範圍包含為更佳。含量在上述範圍內的情況下可充分形成圖案。In the polymer compound, the hydrophobic structural unit is preferably contained in the range of 10 to 90% by mass, and more preferably in the range of 20 to 80% by mass relative to the total mass of the polymer compound. When the content is within the above range, a pattern can be sufficiently formed.

·能夠與顏料等的被分散物形成相互作用之官能基 高分子化合物能夠導入能夠與顏料等的被分散物(例如遮光顏料)形成相互作用之官能基。其中,高分子化合物進一步含有包含能夠與顏料等的被分散物形成相互作用之官能基之結構單元為較佳。 作為能夠與該顏料等的被分散物形成相互作用之官能基,例如可以舉出酸基、鹼基、配位性基及具有反應性之官能基等。 高分子化合物包含酸基、鹼基、配位性基或具有反應性之官能基時,分別含有包含酸基之結構單元、包含鹼基之結構單元、包含配位性基之結構單元或包含具有反應性之官能基之結構單元為較佳。 尤其,若高分子化合物進一步含有羧酸基等鹼可溶性基作為酸基,則能夠對高分子化合物賦予用於基於鹼顯影之圖案形成的顯影性。 亦即,若對高分子化合物導入鹼可溶性基,則上述組成物中,作為有助於顏料等的被分散物的分散之分散劑的高分子化合物具有鹼可溶性。關於包含此類高分子化合物之組成物,經曝光形成之硬化膜的遮光性優異且未曝光部的鹼顯影性提高。 又,若高分子化合物含有包含酸基之結構單元,則高分子化合物具有容易與溶劑相容且塗布性亦提高之傾向。 推測這是因為,包含酸基之結構單元中的酸基容易與顏料等的被分散物相互作用,高分子化合物穩定地分散顏料等的被分散物,並且分散顏料等的被分散物之高分子化合物的黏度變低,高分子化合物本身亦容易穩定地分散。 · Functional groups capable of interacting with dispersed materials such as pigments The polymer compound can introduce functional groups capable of interacting with dispersed materials such as pigments (e.g., light-shielding pigments). It is preferred that the polymer compound further contains a structural unit containing a functional group capable of interacting with dispersed materials such as pigments. As functional groups capable of interacting with dispersed materials such as pigments, for example, acid groups, base groups, coordination groups, and reactive functional groups can be cited. When the polymer compound contains an acid group, a base group, a coordination group, or a reactive functional group, it is preferred that the polymer compound contains a structural unit containing an acid group, a structural unit containing a base group, a structural unit containing a coordination group, or a structural unit containing a reactive functional group, respectively. In particular, if the polymer compound further contains an alkali-soluble group such as a carboxylic acid group as an acid group, the polymer compound can be given developability for pattern formation based on alkali development. That is, if an alkali-soluble group is introduced into the polymer compound, the polymer compound as a dispersant that helps disperse the dispersed material such as the pigment in the above composition has alkali solubility. Regarding the composition containing such a polymer compound, the light-shielding property of the cured film formed by exposure is excellent and the alkali developability of the unexposed part is improved. In addition, if the polymer compound contains a structural unit containing an acid group, the polymer compound tends to be easily compatible with the solvent and the coating property is also improved. This is presumably because the acid groups in the structural units containing acid groups easily interact with dispersed substances such as pigments, so that the polymer compound stably disperses dispersed substances such as pigments, and the viscosity of the polymer compound that disperses dispersed substances such as pigments becomes lower, so the polymer compound itself also easily disperses stably.

其中,含有作為酸基的鹼可溶性基之結構單元可以為與上述包含接枝鏈之結構單元相同的結構單元,亦可以為不同的結構單元,但包含作為酸基的鹼可溶性基之結構單元為與上述疏水性結構單元不同的結構單元(亦即,並不屬於上述疏水性結構單元)。Among them, the structural unit containing an alkali-soluble group as an acid group can be the same structural unit as the structural unit containing the above-mentioned grafted chain, or it can be a different structural unit, but the structural unit containing an alkali-soluble group as an acid group is a structural unit different from the above-mentioned hydrophobic structural unit (that is, it does not belong to the above-mentioned hydrophobic structural unit).

作為能夠與顏料等的被分散物形成相互作用之官能基亦即酸基,例如有羧酸基、磺酸基、磷酸基或酚性羥基等,選自包括羧酸基、磺酸基及磷酸基之群組中的至少1種以上為較佳,羧酸基為進一步較佳。羧酸基對顏料等的被分散物吸附力良好,且分散性高。 亦即,高分子化合物進一步含有包含選自包括羧酸基、磺酸基及磷酸基之群組中的1種以上之結構單元為較佳。 As a functional group that can interact with a dispersed substance such as a pigment, i.e., an acid group, there are carboxylic acid groups, sulfonic acid groups, phosphoric acid groups, or phenolic hydroxyl groups, etc., preferably at least one selected from the group including carboxylic acid groups, sulfonic acid groups, and phosphoric acid groups, and carboxylic acid groups are further preferred. Carboxylic acid groups have good adsorption power to dispersed substances such as pigments and high dispersibility. That is, it is preferred that the polymer compound further contains a structural unit including one or more selected from the group including carboxylic acid groups, sulfonic acid groups, and phosphoric acid groups.

高分子化合物可以具有1種或2種以上的包含酸基之結構單元。 高分子化合物可以含有或不含有包含酸基之結構單元,但含有時,包含酸基之結構單元的含量以質量換算計,相對於高分子化合物的總質量為5~80質量%為較佳,從抑制基於鹼顯影之圖像強度的損傷的觀點考慮,10~60質量%為更佳。 The polymer compound may have one or more acid group-containing structural units. The polymer compound may or may not contain acid group-containing structural units, but when it contains acid group-containing structural units, the content of acid group-containing structural units is preferably 5 to 80 mass % relative to the total mass of the polymer compound in terms of mass conversion, and 10 to 60 mass % is more preferably considered from the viewpoint of suppressing the damage of image intensity based on alkali development.

作為能夠與顏料等的被分散物形成相互作用之官能基亦即鹼基,例如有一級胺基、二級胺基、三級胺基、包含N原子之雜環及醯胺基等,從對顏料等的被分散物的吸附力良好且分散性高的觀點考慮,較佳之鹼基為三級胺基。高分子化合物能夠含有1種或2種以上的該等鹼基。 高分子化合物可以含有或不含有包含鹼基之結構單元,但含有時,包含鹼基之結構單元的含量以質量換算計,相對於高分子化合物的總質量為0.01~50質量%為較佳,從抑制阻礙顯影性的觀點考慮,0.01~30質量%為更佳。 As a functional group that can interact with a dispersed substance such as a pigment, i.e., an alkaline group, there are primary amine groups, secondary amine groups, tertiary amine groups, heterocyclic groups containing N atoms, and amide groups, etc. From the perspective of good adsorption and high dispersibility to dispersed substances such as pigments, the preferred alkaline group is a tertiary amine group. The polymer compound can contain one or more of these alkaline groups. The polymer compound may or may not contain a structural unit containing an alkaline group, but when it contains an alkaline group, the content of the structural unit containing an alkaline group is preferably 0.01 to 50% by mass relative to the total mass of the polymer compound in terms of mass conversion, and 0.01 to 30% by mass is more preferred from the perspective of suppressing the development resistance.

作為能夠與顏料等的被分散物形成相互作用之官能基亦即配位性基及具有反應性之官能基,例如可以舉出乙醯乙醯氧基、三烷氧基甲矽烷基、異氰酸酯基、酸酐及醯氯等。從對顏料等的被分散物的吸附力良好,且顏料等的被分散物的分散性高的觀點考慮,較佳之官能基為乙醯基乙醯氧基。高分子化合物可以具有1種或2種以上的該等基團。 高分子化合物可以含有或不含有包含配位性基之結構單元或包含具有反應性之官能基之結構單元,但含有時,該等結構單元的含量以質量換算計,相對於高分子化合物的總質量為10~80質量%為較佳,從抑制阻礙顯影性的觀點考慮,20~60質量%為更佳。 As functional groups that can interact with dispersed materials such as pigments, i.e., coordinating groups and reactive functional groups, for example, acetoacetyloxy, trialkoxysilyl, isocyanate, acid anhydride and acyl chloride can be cited. From the perspective of good adsorption to dispersed materials such as pigments and high dispersibility of dispersed materials such as pigments, the preferred functional group is acetoacetyloxy. The polymer compound may have one or more of these groups. The polymer compound may or may not contain a structural unit containing a coordination group or a structural unit containing a reactive functional group, but when it contains such structural units, the content of such structural units is preferably 10 to 80% by mass relative to the total mass of the polymer compound, and 20 to 60% by mass is more preferably considered from the perspective of suppressing the development resistance.

上述高分子化合物除了包含接枝鏈以外亦包含能夠與顏料等的被分散物形成相互作用之官能基時,含有上述各種能夠與顏料等的被分散物形成相互作用之官能基即可,並不特別限定該等官能基如何被導入,但高分子化合物包含選自源自下述式(iv)~(vi)所表示之單體的結構單元中的1種以上結構單元為較佳。When the polymer compound contains functional groups capable of interacting with dispersed substances such as pigments in addition to the grafted chains, it is sufficient to contain the above-mentioned various functional groups capable of interacting with dispersed substances such as pigments, and there is no particular limitation on how the functional groups are introduced. However, it is preferred that the polymer compound contains one or more structural units selected from the structural units derived from monomers represented by the following formulae (iv) to (vi).

[化學式16] [Chemical formula 16]

在式(iv)~(vi)中,R 11、R 12及R 13分別獨立地表示氫原子、鹵素原子(例如,氟原子、氯原子、溴原子等)或碳數為1~6的烷基(例如,甲基、乙基、丙基等)。 在式(iv)~(vi)中,R 11、R 12、及R 13分別獨立地為氫原子或碳數1~3的烷基為較佳,分別獨立地為氫原子或甲基為更佳。在通式(iv)中,R 12及R 13分別為氫原子為進一步較佳。 In formulae (iv) to (vi), R 11 , R 12 and R 13 each independently represent a hydrogen atom, a halogen atom (e.g., a fluorine atom, a chlorine atom, a bromine atom, etc.) or an alkyl group having 1 to 6 carbon atoms (e.g., a methyl group, an ethyl group, a propyl group, etc.). In formulae (iv) to (vi), R 11 , R 12 and R 13 each independently represent a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and each independently represent a hydrogen atom or a methyl group, more preferably. In general formula (iv), R 12 and R 13 each independently represent a hydrogen atom, further preferably.

式(iv)中的X 1表示氧原子(-O-)或亞胺基(-NH-),為氧原子為較佳。 又,式(v)中的Y表示次甲基或氮原子。 X1 in formula (iv) represents an oxygen atom (-O-) or an imino group (-NH-), preferably an oxygen atom. Also, Y in formula (v) represents a methine group or a nitrogen atom.

又,式(iv)~(v)中的L 1表示單鍵或2價的連接基。2價的連接基的定義與上述式(i)中的L所表示之2價的連接基的定義相同。 In formulae (iv) to (v), L1 represents a single bond or a divalent linking group. The definition of the divalent linking group is the same as the definition of the divalent linking group represented by L in formula (i) above.

L 1為單鍵、伸烷基或包含氧伸烷基結構之2價連接基為較佳。氧伸烷基結構係氧伸乙基結構或氧伸丙基結構為更佳。又,L 1可以包含藉由重複2個以上的氧伸烷基結構而包含之聚氧伸烷基結構。作為聚氧伸烷基結構,聚氧伸乙基結構或聚氧伸丙基結構為較佳。聚氧乙烯結構由-(OCH 2CH 2n-表示,n為2以上的整數為較佳,2~10的整數為更佳。 L1 is preferably a single bond, an alkylene group, or a divalent linking group containing an oxyalkylene structure. The oxyalkylene structure is more preferably an oxyethylene structure or an oxypropylene structure. In addition, L1 may contain a polyoxyalkylene structure contained by repeating 2 or more oxyalkylene structures. As the polyoxyalkylene structure, a polyoxyethylene structure or a polyoxypropylene structure is preferred. The polyoxyethylene structure is represented by -( OCH2CH2 ) n- , wherein n is preferably an integer greater than 2, and more preferably an integer of 2 to 10.

在式(iv)~(vi)中,Z 1除了表示接枝鏈以外,亦表示能夠與顏料等的被分散物形成相互作用之官能基,羧酸基及三級胺基為較佳,羧酸基為更佳。 In formulae (iv) to (vi), Z1 represents not only a graft chain but also a functional group capable of interacting with a dispersed substance such as a pigment, with carboxylic acid group and tertiary amine group being preferred, and carboxylic acid group being more preferred.

在式(vi)中,R 14、R 15及R 16分別獨立地表示氫原子、鹵素原子(例如,氟原子、氯原子、溴原子等)、碳數為1~6的烷基(例如,甲基、乙基、丙基等)、-Z 1或L 1-Z 1。其中,L 1及Z 1與上述中的L 1及Z 1的含義相同,較佳例亦相同。作為R 14、R 15及R 16,分別獨立地為氫原子或碳數為1~3的烷基為較佳,氫原子為更佳。 In formula (vi), R 14 , R 15 and R 16 each independently represent a hydrogen atom, a halogen atom (e.g., a fluorine atom, a chlorine atom, a bromine atom, etc.), an alkyl group having 1 to 6 carbon atoms (e.g., a methyl group, an ethyl group, a propyl group, etc.), -Z 1 or L 1 -Z 1 . L 1 and Z 1 have the same meanings as L 1 and Z 1 in the above description, and preferred examples are also the same. R 14 , R 15 and R 16 each independently represent a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and a hydrogen atom is more preferred.

作為式(iv)所表示之單體,R 11、R 12及R 13分別獨立地為氫原子或甲基、L 1為包含伸烷基或氧伸烷基結構之2價的連接基、X 1為氧原子或亞胺基、Z 1為羧酸基之化合物為較佳。 又,作為式(v)所表示之單體,R 11為氫原子或甲基、L 1為伸烷基、Z 1為羧酸基、Y為次甲基之化合物為較佳。 此外,作為式(vi)所表示之單體,R 14、R 15及R 16分別獨立地為氫原子或甲基、Z 1為羧酸基之化合物為較佳。 As the monomer represented by formula (iv), the compound wherein R 11 , R 12 and R 13 are independently a hydrogen atom or a methyl group, L 1 is a divalent linking group containing an alkylene or oxyalkylene structure, X 1 is an oxygen atom or an imino group, and Z 1 is a carboxylic acid group is preferred. Moreover, as the monomer represented by formula (v), the compound wherein R 11 is a hydrogen atom or a methyl group, L 1 is an alkylene group, Z 1 is a carboxylic acid group, and Y is a methine group is preferred. Furthermore, as the monomer represented by formula (vi), the compound wherein R 14 , R 15 and R 16 are independently a hydrogen atom or a methyl group, and Z 1 is a carboxylic acid group is preferred.

以下示出式(iv)~(vi)所表示之單體(化合物)的代表性例。 作為單體的例,可以舉出甲基丙烯酸、巴豆酸、異巴豆酸、在分子內包含加成聚合性雙鍵及羥基之化合物(例如,甲基丙烯酸2-羥基乙酯)與丁二酸酐的反應物、在分子內包含加成聚合性雙鍵及羥基之化合物與鄰苯二甲酸酐的反應物、在分子內包含加成聚合性雙鍵及羥基之化合物與四羥基鄰苯二甲酸酐的反應物、在分子內包含加成聚合性雙鍵及羥基之化合物與偏苯三甲酸酐的反應物、在分子內包含加成聚合性雙鍵及羥基之化合物與均苯四甲酸的反應物、丙烯酸、丙烯酸二聚物、丙烯酸寡聚物、順丁烯二酸、衣康酸、反丁烯二酸、4-乙烯基苯甲酸、乙烯苯酚及4-羥基苯基甲基丙烯酸醯胺等。 Representative examples of monomers (compounds) represented by formulas (iv) to (vi) are shown below. Examples of monomers include methacrylic acid, crotonic acid, isocrotonic acid, a compound containing an addition polymerizable double bond and a hydroxyl group in the molecule (e.g., 2-hydroxyethyl methacrylate) and a reaction product of succinic anhydride, a compound containing an addition polymerizable double bond and a hydroxyl group in the molecule and phthalic anhydride, a compound containing an addition polymerizable double bond and a hydroxyl group in the molecule and tetrahydroxyphthalic acid. The reaction products of the compound containing an addition polymerizable double bond and a hydroxyl group in the molecule and trimellitic anhydride, the reaction products of the compound containing an addition polymerizable double bond and a hydroxyl group in the molecule and pyromellitic acid, acrylic acid, acrylic acid dimer, acrylic acid oligomer, maleic acid, itaconic acid, fumaric acid, 4-vinylbenzoic acid, vinylphenol and 4-hydroxyphenyl methacrylic acid amide, etc.

從與顏料等的被分散物相互作用、經時黏度穩定性及對顯影液的滲透性的觀點考慮,包含能夠與顏料等的被分散物形成相互作用之官能基之結構單元的含量相對於高分子化合物的總質量,0.05~90質量%為較佳,1.0~80質量%為更佳,10~70質量%為進一步較佳。From the viewpoint of interaction with dispersed matter such as pigments, viscosity stability over time, and permeability to developer, the content of the structural unit containing a functional group capable of forming an interaction with dispersed matter such as pigments is preferably 0.05 to 90 mass %, more preferably 1.0 to 80 mass %, and even more preferably 10 to 70 mass % relative to the total mass of the polymer compound.

·其他結構單元 此外,以提高圖像強度等各種性能為目的,高分子化合物在不損害本發明的效果之範圍內,可以進一步具有如下其他結構單元(例如,包含對後述溶劑具有親和性之官能基等之結構單元):具有與包含接枝鏈之結構單元、疏水性結構單元及包含能夠與顏料等的被分散物形成相互作用之官能基之結構單元不同的各種功能。 作為此類其他結構單元,例如可以舉出源自選自丙烯腈類及甲基丙烯腈類等中的自由基聚合性化合物之結構單元。 高分子化合物能夠使用1種或2種以上的該等其他結構單元,其含量以質量換算計,相對於高分子化合物的總質量為0~80質量%為較佳,10~60質量%以下為更佳。含量在上述範圍內可維持充分的圖案形成性。 ·Other structural units In addition, for the purpose of improving various properties such as image strength, the polymer compound may further have the following other structural units (for example, structural units containing functional groups having affinity for the solvent described below) within the scope that does not impair the effect of the present invention: having various functions different from the structural units containing graft chains, hydrophobic structural units, and structural units containing functional groups capable of forming interactions with dispersed substances such as pigments. As such other structural units, for example, structural units derived from free radical polymerizable compounds selected from acrylonitriles and methacrylonitris can be cited. The polymer compound can use one or more of these other structural units, and the content thereof is preferably 0 to 80 mass % relative to the total mass of the polymer compound in terms of mass conversion, and more preferably 10 to 60 mass % or less. The content within the above range can maintain sufficient pattern formation.

·高分子化合物的物性 高分子化合物的酸值為0~250mgKOH/g為較佳,10~200mgKOH/g為更佳,30~180mgKOH/g為進一步較佳。 若高分子化合物的酸值為160mgKOH/g以下,則可以更有效地抑制對曝光後的硬化膜進行顯影時的圖案剝離。又,若高分子化合物的酸值為10mgKOH/g以上,則鹼顯影性更加良好。又,若高分子化合物的酸值為20mgKOH/g以上,則能夠進一步抑制顏料等的被分散物的沉降,能夠進一步減少粗大粒子數,並能夠進一步提高組成物的經時黏度穩定性。 · Physical properties of polymer compounds The acid value of the polymer compound is preferably 0 to 250 mgKOH/g, more preferably 10 to 200 mgKOH/g, and even more preferably 30 to 180 mgKOH/g. If the acid value of the polymer compound is 160 mgKOH/g or less, the pattern peeling when the cured film after exposure is developed can be more effectively suppressed. Moreover, if the acid value of the polymer compound is 10 mgKOH/g or more, the alkali developability is better. Moreover, if the acid value of the polymer compound is 20 mgKOH/g or more, the sedimentation of the dispersed matter such as the pigment can be further suppressed, the number of coarse particles can be further reduced, and the viscosity stability of the composition over time can be further improved.

上述酸值例如能夠依據化合物中的酸基的平均含量來計算。又,若變更樹脂的構成成分亦即包含酸基之結構單元的含量,則可獲得具有所需酸值之樹脂。The acid value can be calculated, for example, based on the average content of the acid groups in the compound. In addition, by changing the content of the constituent components of the resin, that is, the structural unit containing the acid groups, a resin having a desired acid value can be obtained.

高分子化合物的重量平均分子量為4,000~300,000為較佳,5,000~200,000為更佳,6,000~100,000為進一步較佳,10,000~50,000為特佳。 高分子化合物能夠依據公知的方法合成。 The weight average molecular weight of the polymer compound is preferably 4,000 to 300,000, more preferably 5,000 to 200,000, further preferably 6,000 to 100,000, and particularly preferably 10,000 to 50,000. The polymer compound can be synthesized according to a known method.

作為高分子化合物的具體例,可以舉出Kusumoto Chemicals, Ltd.製造“DA-7301”、BYK Chemie GmbH製造“Disperbyk-101(聚醯胺基胺磷酸鹽)、107(羧酸酯)、110(包含酸基之共聚物)、111(磷酸系分散劑)、130(聚醯胺)、161、162、163、164、165、166、167、170、190(高分子共聚物)”、“BYK-P104、P105(高分子量不飽和聚羧酸)”、EFKA公司製造“EFKA4047、4050~4010~4165(聚胺酯系)、EFKA4330~4340(嵌段共聚物)、4400~4402(改質聚丙烯酸酯)、5010(聚酯醯胺)、5765(高分子量聚羧酸鹽)、6220(脂肪酸聚酯)、6750(偶氮顏料衍生物)”、Ajinomoto Fine-Techno Co., Inc.製造“AJISPER PB821、PB822、PB880、PB881”、kyoeisha Chemical Co., Ltd.製造“FLOREN TG-710(胺基甲酸酯寡聚物)”、“Polyflow No.50E、No.300(丙烯酸系共聚物)”、Kusumoto Chemicals, Ltd.製造“DISPARLON KS-860、873SN、874、#2150(脂肪族多元羧酸)、#7004(聚醚酯)、DA-703-50、DA-705、DA-725”、Kao Corporation製造“DEMOL RN、N(萘磺酸福馬林縮聚物)、MS、C、SN-B(芳香族磺酸福馬林縮聚物)”、“HOMOGENOL L-18(高分子聚羧酸)”、“EMULGEN 920、930、935、985(聚氧乙烯壬基苯基醚)”、“ACETAMIN 86(硬脂醯胺乙酸酯)”、The Lubrinzol corporation製造22000(偶氮顏料衍生物)、13240(聚酯胺)、3000、12000、17000、20000、27000(在末端部包含功能部之高分子)、24000、28000、32000、38500(接枝共聚物)”、Nikko Chemicals Co., Ltd.製造“NIKKOL T106(聚氧乙烯山梨醇單油酸酯)、MYS-IEX(聚氧乙烯單硬脂酸酯)”、Kawaken Fine Chemicals Co., Ltd.製造HINOAKUTO T-8000E等、Shin-Etsu Chemical Co., Ltd.製造有機矽氧烷聚合物KP341、Yusho Co Ltd製造“W001:陽離子系界面活性劑”、聚氧乙烯月桂基醚、聚氧乙烯硬脂基醚、聚氧乙烯油基醚、聚氧乙烯辛基苯基醚、聚氧乙烯壬基苯基醚、聚乙二醇二月桂酸酯、聚乙二醇二硬脂酸酯、山梨醇脂肪酸酯等非離子系界面活性劑、“W004、W005、W017”等陰離子系界面活性劑、MORISHITA & CO., LTD.製造“EFKA-46、EFKA-47、EFKA-47EA、EFKA聚合物100、EFKA聚合物400、EFKA聚合物401、EFKA聚合物450”、SAN NOPCO LIMITED製造“Disperse Aid 6、Disperse Aid 8、Disperse Aid 15、Disperse Aid 9100”等高分子分散劑、ADEKA CORPORATION製造“Adeka Pluronic(註冊商標)L31、F38、L42、L44、L61、L64、F68、L72、P95、F77、P84、F87、P94、L101、P103、F108、L121、P-123”及Sanyo Chemical Industries, Ltd.製造“Ionet(產品名稱)S-20”等。又,亦能夠使用Acrybase FFS-6752、Acrybase FFS-187。Specific examples of polymer compounds include "DA-7301" manufactured by Kusumoto Chemicals, Ltd., BYK Chemie GmbH manufactures "Disperbyk-101 (polyamide amine phosphate), 107 (carboxylate), 110 (copolymer containing acid groups), 111 (phosphoric acid dispersant), 130 (polyamide), 161, 162, 163, 164, 165, 166, 167, 170, 190 (polymer copolymer)", "BYK-P104, P105 (high molecular weight unsaturated polycarboxylic acid)", EFKA manufactures "EFKA4047, 4050~4010~4165 (polyurethane series), EFKA4330~4340 (block copolymer), 4400~4402 (modified polyacrylate), 5010 (polyester amide), 5765 (high molecular weight polycarboxylate), 6220 (fatty acid polyester), 6750 (azo pigment derivative)", Ajinomoto Fine-Techno Co., Ltd., Inc., "AJISPER PB821, PB822, PB880, PB881", Kyoeisha Chemical Co., Ltd., "FLOREN TG-710 (urethane oligomer)", "Polyflow No.50E, No.300 (acrylic copolymer)", Kusumoto Chemicals, Ltd., "DISPARLON KS-860, 873SN, 874, #2150 (aliphatic polycarboxylic acid), #7004 (polyether ester), DA-703-50, DA-705, DA-725", Kao Corporation, "DEMOL RN, N (naphthalenesulfonic acid formalin condensation), MS, C, SN-B (aromatic sulfonic acid formalin condensation)", "HOMOGENOL L-18 (polymer polycarboxylic acid)", "EMULGEN 920, 930, 935, 985 (polyoxyethylene nonylphenyl ether)", "ACETAMIN 86 (stearylamide acetate)", 22000 (azo pigment derivative), 13240 (polyester amine), 3000, 12000, 17000, 20000, 27000 (polymer containing a functional part at the end), 24000, 28000, 32000, 38500 (graft copolymer)" manufactured by The Lubrinzol Corporation, "NIKKOL T106 (polyoxyethylene sorbitan monooleate), MYS-IEX (polyoxyethylene monostearate)" manufactured by Nikko Chemicals Co., Ltd., HINOAKUTO T-8000E manufactured by Kawaken Fine Chemicals Co., Ltd., organic silicone polymer KP341 manufactured by Shin-Etsu Chemical Co., Ltd., Yusho Co. Ltd., non-ionic surfactants such as "W001: Cationic Surfactant", polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester, anionic surfactants such as "W004, W005, W017", "EFKA-46, EFKA-47, EFKA-47EA, EFKA Polymer 100, EFKA Polymer 400, EFKA Polymer 401, EFKA Polymer 450" manufactured by MORISHITA & CO., LTD., polymer dispersants such as "Disperse Aid 6, Disperse Aid 8, Disperse Aid 15, Disperse Aid 9100" manufactured by SAN NOPCO LIMITED, and ADEKA Adeka Pluronic (registered trademark) L31, F38, L42, L44, L61, L64, F68, L72, P95, F77, P84, F87, P94, L101, P103, F108, L121, P-123 manufactured by Adeka Pluronic Corporation and Ionet (product name) S-20 manufactured by Sanyo Chemical Industries, Ltd. can also be used. Acrybase FFS-6752 and Acrybase FFS-187 can also be used.

又,使用包含酸基及鹼基之兩性樹脂亦較佳。兩性樹脂為酸值為5mgKOH/g以上,且胺價為5mgKOH/g以上的樹脂為較佳。 作為兩性樹脂的市售品,例如可以舉出BYK-Chemie GmbH製造DISPERBYK-130、DISPERBYK-140、DISPERBYK-142、DISPERBYK-145、DISPERBYK-180、DISPERBYK-187、DISPERBYK-191、DISPERBYK-2001、DISPERBYK-2010、DISPERBYK-2012、DISPERBYK-2025、BYK-9076、Ajinomoto Fine-Techno Co., Inc.製造AJISPER PB821、AJISPER PB822及AJISPER PB881等。 該等高分子化合物可單獨使用1種,亦可併用2種以上。 In addition, it is also preferred to use an amphoteric resin containing an acid group and an alkaline group. The amphoteric resin is preferably a resin having an acid value of 5 mgKOH/g or more and an amine value of 5 mgKOH/g or more. Examples of commercially available amphoteric resins include DISPERBYK-130, DISPERBYK-140, DISPERBYK-142, DISPERBYK-145, DISPERBYK-180, DISPERBYK-187, DISPERBYK-191, DISPERBYK-2001, DISPERBYK-2010, DISPERBYK-2012, DISPERBYK-2025, BYK-9076 manufactured by BYK-Chemie GmbH, and AJISPER PB821, AJISPER PB822, and AJISPER PB881 manufactured by Ajinomoto Fine-Techno Co., Inc. These polymer compounds may be used alone or in combination of two or more.

另外,作為高分子化合物的具體例的例子,能夠參閱日本特開2013-249417號公報的0127~0129段中記載之高分子化合物,該等內容引入本說明書中。In addition, as specific examples of the polymer compound, reference can be made to the polymer compounds described in paragraphs 0127 to 0129 of Japanese Patent Application Laid-Open No. 2013-249417, the contents of which are incorporated herein by reference.

又,作為分散劑,除了上述高分子化合物以外,還能夠使用日本特開2010-106268號公報的0037~0115段(對應之US2011/0124824的0075~0133段)的接枝共聚物,能夠援用該等內容,並引入本說明書中。 又,除了上述以外,亦能夠使用日本特開2011-153283號公報的0028~0084段(對應之US2011/0279759的0075~0133段)的含有包含酸基經由連接基鍵結而成之側鏈結構之構成成分之高分子化合物,能夠援用該等內容,並編入本說明書中。 Furthermore, as a dispersant, in addition to the above-mentioned polymer compounds, the graft copolymers of paragraphs 0037 to 0115 of Japanese Patent Publication No. 2010-106268 (corresponding to paragraphs 0075 to 0133 of US2011/0124824) can also be used, and such contents can be cited and introduced into this specification. In addition, in addition to the above, the polymer compound containing the constituent components of the side chain structure formed by the acid group bonded via the linking group of paragraphs 0028 to 0084 of Japanese Patent Publication No. 2011-153283 (corresponding to paragraphs 0075 to 0133 of US2011/0279759) can also be used, and such contents can be cited and incorporated into this specification.

又,作為分散劑,亦能夠使用日本特開2016-109763號公報的0033~0049中記載之樹脂,該內容引入本說明書中。Furthermore, as the dispersant, the resins described in 0033 to 0049 of JP-A-2016-109763 can also be used, and the contents are incorporated into the present specification.

〔鹼可溶性樹脂〕 組成物為包含鹼可溶性樹脂為較佳。在本說明書中,鹼可溶性樹脂表示含有促進鹼可溶性之基團(鹼可溶性基。例如羧酸基等酸基)之樹脂,並表示與已說明的特定樹脂及分散劑不同的樹脂。另外,鹼可溶性樹脂不包含上述特定樹脂所包含之重複單元A為較佳。 作為鹼可溶性樹脂在組成物中的含量,並沒有特別限制,相對於組成物的總固體成分為1~40質量%為較佳,5~35質量%為更佳,10~35質量%為進一步較佳。 鹼可溶性樹脂可單獨使用1種,亦可併用2種以上。併用2種以上的鹼可溶性樹脂時,合計含量在上述範圍內為較佳。 [Alkali-soluble resin] The composition preferably contains an alkali-soluble resin. In this specification, the alkali-soluble resin refers to a resin containing a group that promotes alkali solubility (alkali-soluble group. For example, acid groups such as carboxylic acid groups), and refers to a resin different from the specific resin and dispersant described above. In addition, the alkali-soluble resin preferably does not contain the repeating unit A contained in the above-mentioned specific resin. The content of the alkali-soluble resin in the composition is not particularly limited, and is preferably 1 to 40 mass %, more preferably 5 to 35 mass %, and even more preferably 10 to 35 mass % relative to the total solid content of the composition. Alkali-soluble resins may be used alone or in combination of two or more. When two or more alkali-soluble resins are used in combination, the total content is preferably within the above range.

作為鹼可溶性樹脂,可以舉出在分子中包含至少1個鹼可溶性基之樹脂,例如聚羥基苯乙烯樹脂、聚矽氧烷樹脂、(甲基)丙烯酸樹脂、(甲基)丙烯醯胺樹脂、(甲基)丙烯酸/(甲基)丙烯醯胺共聚物樹脂、環氧系樹脂及聚醯亞胺樹脂等。Examples of the alkali-soluble resin include resins containing at least one alkali-soluble group in the molecule, such as polyhydroxystyrene resins, polysiloxane resins, (meth)acrylic resins, (meth)acrylamide resins, (meth)acrylic acid/(meth)acrylamide copolymer resins, epoxy resins, and polyimide resins.

作為鹼可溶性樹脂的具體例,可以舉出不飽和羧酸和乙烯性不飽和化合物的共聚物。 作為不飽和羧酸,並沒有特別限制,可以舉出(甲基)丙烯酸、巴豆酸及乙烯基乙酸等單羧酸類;衣康酸、順丁烯二酸及反丁烯二酸等二羧酸或其酸酐;以及單(2-(甲基)丙烯醯氧基乙基)鄰苯二甲酸酯等多元羧酸單酯類;等。 As specific examples of alkali-soluble resins, copolymers of unsaturated carboxylic acids and ethylenically unsaturated compounds can be cited. As unsaturated carboxylic acids, there are no particular limitations, and examples include monocarboxylic acids such as (meth)acrylic acid, crotonic acid, and vinylacetic acid; dicarboxylic acids such as itaconic acid, succinic acid, and fumaric acid, or their anhydrides; and polycarboxylic acid monoesters such as mono(2-(meth)acryloyloxyethyl)phthalate; etc.

作為能夠共聚合之乙烯性不飽和化合物,可以舉出(甲基)丙烯酸甲酯等。又,亦能夠使用日本特開2010-097210號公報的0027段及日本特開2015-068893號公報的0036~0037段中記載之化合物,上述內容被編入到本說明書中。Examples of copolymerizable ethylenically unsaturated compounds include methyl (meth)acrylate, etc. In addition, compounds described in paragraph 0027 of JP-A-2010-097210 and paragraphs 0036 to 0037 of JP-A-2015-068893 can also be used, and the above contents are incorporated into this specification.

作為鹼可溶性樹脂,從本發明的效果更優異的方面考慮,包含硬化性基之鹼可溶性樹脂亦較佳。 作為上述硬化性基,同樣可以舉出上述分散劑(高分子化合物)可含有的硬化性基,較佳範圍亦相同。 作為包含硬化性基之鹼可溶性樹脂的一態樣,可以舉出在側鏈包含乙烯性不飽和基之丙烯酸樹脂。在側鏈包含乙烯性不飽和基之丙烯酸樹脂例如可以藉由使包含環氧丙基或脂環式環氧基之乙烯性不飽和化合物與包含羧酸基之丙烯酸樹脂的羧酸基加成反應來獲得。 作為包含硬化性基之鹼可溶性樹脂,在側鏈具有硬化性基之鹼可溶性樹脂等為較佳。作為包含硬化性基之鹼可溶性樹脂,可以舉出DIANAL NR系列(Mitsubishi Rayon Co., Ltd.製造)、Photomer 6173(含有COOH之聚胺酯丙烯酸寡聚物,Diamond Shamrock Co., Ltd.製造)、VISCOAT R-264、KS RESIST 106(均為OSAKA ORGANIC CHEMICAL INDUSTRY LTD.製造)、CYCLOMER P系列(例如ACA230AA)、PLACCEL CF200系列(均為Daicel Corporation製造)、Ebecryl 3800(DAICEL-ALLNEX LTD.製造)及ACRYCURE RD-F8(NIPPON SHOKUBAI CO., LTD.製造)等。 As the alkali-soluble resin, an alkali-soluble resin containing a curable group is also preferred from the viewpoint that the effect of the present invention is more excellent. As the above-mentioned curable group, the curable group that can be contained in the above-mentioned dispersant (polymer compound) can be cited in the same manner, and the preferred range is also the same. As one aspect of the alkali-soluble resin containing a curable group, an acrylic resin containing an ethylenically unsaturated group in the side chain can be cited. The acrylic resin containing an ethylenically unsaturated group in the side chain can be obtained, for example, by allowing an ethylenically unsaturated compound containing a glyoxypropyl group or an alicyclic epoxy group to react with the carboxylic acid group of an acrylic resin containing a carboxylic acid group. As the alkali-soluble resin containing a curable group, an alkali-soluble resin having a curable group in a side chain is preferred. Examples of alkali-soluble resins containing a curable group include DIANAL NR series (manufactured by Mitsubishi Rayon Co., Ltd.), Photomer 6173 (COOH-containing polyurethane acrylic oligomer, manufactured by Diamond Shamrock Co., Ltd.), VISCOAT R-264, KS RESIST 106 (both manufactured by OSAKA ORGANIC CHEMICAL INDUSTRY LTD.), CYCLOMER P series (such as ACA230AA), PLACCEL CF200 series (both manufactured by Daicel Corporation), Ebecryl 3800 (manufactured by DAICEL-ALLNEX LTD.), and ACRYCURE RD-F8 (manufactured by NIPPON SHOKUBAI CO., LTD.).

作為鹼可溶性樹脂,例如能夠使用日本特開昭59-044615號、日本特公昭54-34327號、日本特公昭58-012577號、日本特公昭54-025957號、日本特開昭54-092723號、日本特開昭59-053836號及日本特開昭59-071048號中記載之在側鏈包含羧酸基之自由基聚合物;歐洲專利第993966號、歐洲專利第1204000號及日本特開2001-318463號等各公報中記載之包含鹼可溶性基之縮醛改質聚乙烯醇系黏合劑樹脂;聚吡咯啶酮;聚環氧乙烷;醇可溶性尼龍及2,2-雙-(4-羥基苯基)-丙烷與表氯醇的反應物亦即聚醚等;以及國際公開第2008/123097號中記載之聚醯亞胺樹脂;等。As the alkali-soluble resin, for example, free radical polymers containing carboxylic acid groups in the side chains described in Japanese Patent Application Laid-Open No. 59-044615, Japanese Patent Publication No. 54-34327, Japanese Patent Publication No. 58-012577, Japanese Patent Publication No. 54-025957, Japanese Patent Application Laid-Open No. 54-092723, Japanese Patent Application Laid-Open No. 59-053836, and Japanese Patent Application Laid-Open No. 59-071048 can be used; European Patent Application No. Acetal-modified polyvinyl alcohol-based adhesive resin containing an alkali-soluble group as described in the publications of European Patent No. 993966, European Patent No. 1204000 and Japanese Patent Publication No. 2001-318463; polypyrrolidone; polyethylene oxide; alcohol-soluble nylon and a polyether which is a reaction product of 2,2-bis-(4-hydroxyphenyl)-propane and epichlorohydrin; and a polyimide resin as described in International Publication No. 2008/123097; etc.

作為鹼可溶性樹脂,例如亦能夠使用日本特開2016-075845號公報的0225~0245段中記載之化合物,上述內容被編入到本說明書中。As the alkali-soluble resin, for example, the compounds described in paragraphs 0225 to 0245 of JP-A-2016-075845 can also be used, and the above contents are incorporated into the present specification.

作為鹼可溶性樹脂,還能夠使用聚醯亞胺前驅物。聚醯亞胺前驅物表示使包含酸酐基之化合物與二胺化合物在40~100℃下進行加成聚合反應來獲得之樹脂。 作為聚醯亞胺前驅物,例如可以舉出包含式(1)所表示之重複單元之樹脂。作為聚醯亞胺前驅物的結構,例如可以舉出包含下述式(2)所表示之醯胺酸結構和由醯胺酸結構的一部分醯亞胺閉環而成之下述式(3)及所有醯亞胺閉環而成之下述式(4)所表示之醯亞胺結構之聚醯亞胺前驅物。 另外,在本說明書中,有時將具有醯胺酸結構之聚醯亞胺前驅物稱為聚醯胺酸。 As the alkali-soluble resin, a polyimide precursor can also be used. The polyimide precursor refers to a resin obtained by allowing a compound containing an acid anhydride group to undergo addition polymerization reaction with a diamine compound at 40 to 100°C. As the polyimide precursor, for example, a resin containing a repeating unit represented by formula (1) can be cited. As the structure of the polyimide precursor, for example, a polyimide precursor containing an amide structure represented by the following formula (2), an amide structure formed by the closure of a part of the amide structure with the following formula (3), and an amide structure formed by the closure of all the amides with the following formula (4) can be cited. In addition, in this specification, polyimide precursors having an amide structure are sometimes referred to as polyamide.

[化學式17] [Chemical formula 17]

[化學式18] [Chemical formula 18]

[化學式19] [Chemical formula 19]

[化學式20] [Chemical formula 20]

在上述式(1)~(4)中,R 1表示碳數2~22的4價的有機基團,R 2表示碳數1~22的二價的有機基團,n表示1或2。 In the above formulae (1) to (4), R1 represents a tetravalent organic group having 2 to 22 carbon atoms, R2 represents a divalent organic group having 1 to 22 carbon atoms, and n represents 1 or 2.

作為上述聚醯亞胺前驅物的具體例,例如可以舉出日本特開2008-106250號公報的0011~0031段中記載之化合物、日本特開2016-122101號公報的0022~0039段中記載之化合物及日本特開2016-068401號公報的0061~0092段中記載之化合物等,上述內容被編入到本說明書中。As specific examples of the polyimide precursor, for example, the compounds described in paragraphs 0011 to 0031 of Japanese Patent Application Publication No. 2008-106250, the compounds described in paragraphs 0022 to 0039 of Japanese Patent Application Publication No. 2016-122101, and the compounds described in paragraphs 0061 to 0092 of Japanese Patent Application Publication No. 2016-068401 can be cited, and the above contents are incorporated into this specification.

從經曝光形成之硬化膜的圖案形狀更優異的方面考慮,鹼可溶性樹脂包含選自包括聚醯亞胺樹脂及聚醯亞胺前驅物之群組中的1種以上亦較佳。 作為包含鹼可溶性基之聚醯亞胺樹脂,並沒有特別限制,能夠使用包含公知的鹼可溶性基之聚醯亞胺樹脂。作為上述聚醯亞胺樹脂,例如可以舉出日本特開2014-137523號公報的0050段中記載之樹脂、日本特開2015-187676號公報的0058段中記載之樹脂及日本特開2014-106326號公報的0012~0013段中記載之樹脂等,上述內容被編入到本說明書中。 From the perspective of achieving a better pattern shape of the cured film formed by exposure, it is also preferred that the alkali-soluble resin contains at least one selected from the group consisting of polyimide resins and polyimide precursors. The polyimide resin containing an alkali-soluble group is not particularly limited, and a polyimide resin containing a known alkali-soluble group can be used. As the above-mentioned polyimide resin, for example, the resin described in paragraph 0050 of Japanese Patent Publication No. 2014-137523, the resin described in paragraph 0058 of Japanese Patent Publication No. 2015-187676, and the resin described in paragraphs 0012 to 0013 of Japanese Patent Publication No. 2014-106326 can be cited, and the above contents are incorporated into this specification.

〔光聚合起始劑〕 組成物包含光聚合起始劑為較佳。 作為光聚合起始劑,只要能夠引發聚合性化合物的聚合,則並沒有特別限制,能夠使用公知的光聚合起始劑。 作為光聚合起始劑,例如對從紫外線區域至可見光區域具有感光性之光聚合起始劑為較佳。又,可以為與被光激發之增感劑產生某種作用,並生成活性自由基之活性劑,亦可以為依據聚合性化合物的種類而引發陽離子聚合之起始劑。 作為光聚合起始劑,所謂的自由基聚合起始劑為較佳。 [Photopolymerization initiator] The composition preferably contains a photopolymerization initiator. As the photopolymerization initiator, there is no particular limitation as long as it can initiate polymerization of the polymerizable compound, and a known photopolymerization initiator can be used. As the photopolymerization initiator, for example, a photopolymerization initiator having photosensitivity from the ultraviolet region to the visible light region is preferred. In addition, it can be an activator that generates active free radicals by reacting with a photoexcited sensitizer, or it can be an initiator that initiates cationic polymerization depending on the type of polymerizable compound. As the photopolymerization initiator, a so-called free radical polymerization initiator is preferred.

作為光聚合起始劑,例如,可以舉出鹵化烴衍生物(例如,包含三𠯤骨架的化合物、包含㗁二唑骨架的化合物等)、醯基膦氧化物等醯基膦化合物、六芳基雙咪唑、肟衍生物等肟化合物、有機過氧化物、硫化合物、酮化合物、芳香族鎓鹽、胺基苯乙酮化合物及羥基苯乙酮等。 作為光聚合起始劑的具體例,例如,能夠參閱日本特開2013-029760號公報的0265~0268段,該內容被編入到本說明書中。 As photopolymerization initiators, for example, halogenated alkyl derivatives (for example, compounds containing a trioxane skeleton, compounds containing a diazole skeleton, etc.), acylphosphine compounds such as acylphosphine oxides, hexaarylbiimidazoles, oxime compounds such as oxime derivatives, organic peroxides, sulfur compounds, ketone compounds, aromatic onium salts, aminoacetophenone compounds, and hydroxyacetophenones can be cited. As specific examples of photopolymerization initiators, for example, paragraphs 0265 to 0268 of Japanese Patent Publication No. 2013-029760 can be referred to, and the contents are incorporated into this specification.

作為光聚合起始劑,例如,可以舉出日本特開平10-291969號公報中記載之胺基苯乙酮系起始劑及日本專利第4225898號公報中記載之醯基膦系起始劑。 作為羥基苯乙酮化合物,例如,可以舉出Omnirad-184、Omnirad-1173、Omnirad-500、Omnirad-2959及Omnirad-127(產品名稱:均為IGM RESINS B.V.製造)。 作為胺基苯乙酮化合物,例如,可以舉出市售品Omnirad-907、Omnirad-369或Omnirad-379EG(產品名稱:均為IGM RESINS B.V.製造)。作為胺基苯乙酮化合物,亦可以舉出吸收波長與波長365nm或波長405nm等長波光源匹配之日本特開2009-191179公報中記載之化合物。 作為醯基膦化合物,可以舉出市售品Omnirad-819或Omnirad-TPO(產品名稱:均為IGM RESINS B.V.製造)。 As the photopolymerization initiator, for example, the aminoacetophenone-based initiator described in Japanese Patent Publication No. 10-291969 and the acylphosphine-based initiator described in Japanese Patent Publication No. 4225898 can be cited. As the hydroxyacetophenone compound, for example, Omnirad-184, Omnirad-1173, Omnirad-500, Omnirad-2959 and Omnirad-127 (product names: all manufactured by IGM RESINS B.V.) can be cited. As the aminoacetophenone compound, for example, the commercially available products Omnirad-907, Omnirad-369 or Omnirad-379EG (product names: all manufactured by IGM RESINS B.V.) can be cited. As aminoacetophenone compounds, compounds described in Japanese Patent Publication No. 2009-191179 whose absorption wavelength matches a long-wavelength light source such as a wavelength of 365 nm or a wavelength of 405 nm can also be cited. As acylphosphine compounds, commercially available products Omnirad-819 or Omnirad-TPO (product names: both manufactured by IGM RESINS B.V.) can be cited.

(肟化合物) 作為光聚合起始劑,肟酯系聚合起始劑(肟化合物)為較佳。尤其肟化合物的靈敏度高且聚合效率高,並容易將顏料在組成物中的含量設高,因此較佳。 作為肟化合物,例如,可以舉出日本特開2001-233842號公報中記載之化合物、日本特開2000-080068號公報中記載之化合物或日本特開2006-342166號公報中記載之化合物。 作為肟化合物,例如,可以舉出3-苯甲醯氧基亞胺基丁烷-2-酮、3-乙醯氧基亞胺基丁烷-2-酮、3-丙醯氧基亞胺基丁烷-2-酮、2-乙醯氧基亞胺基戊烷-3-酮、2-乙醯氧基亞胺基-1-苯基丙烷-1-酮、2-苯甲醯氧基亞胺基-1-苯基丙烷-1-酮、3-(4-甲苯磺醯氧基)亞胺基丁烷-2-酮及2-乙氧基羰氧基亞胺基-1-苯基丙烷-1-酮等。 又,亦可以舉出J.C.S.Perkin II(1979年)1653-1660頁、J.C.S.Perkin II(1979年)156-162頁、光聚合物科學與技術雜誌(Journal of Photopolymer Science and Technology)(1995年)202-232頁、日本特開2000-066385號公報中記載之化合物、日本特開2000-080068號公報、日本特表2004-534797號公報及日本特開2006-342166號公報等各公報中記載之化合物等。 市售品亦可以舉出IRGACURE-OXE01(BASF公司製造)、IRGACURE-OXE02(BASF公司製造)、IRGACURE-OXE03(BASF公司製造)及IRGACURE-OXE04(BASF公司製造)。又,亦可以舉出TR-PBG-304(Changzhou Tronly New Electronic Materials CO., LTD.製造)、Adeka Arkls NCI-730、Adeka Arkls NCI-831、Adeka Arkls NCI-930(ADEKA CORPORATION製造)及N-1919(含有咔唑/肟酯骨架之光聚合起始劑(ADEKA CORPORATION製造))。又,亦可以舉出Omnirad1316(IGM RESINS B.V.)。 (Oxime compound) As a photopolymerization initiator, an oxime ester polymerization initiator (oxime compound) is preferred. In particular, oxime compounds are preferred because they have high sensitivity and high polymerization efficiency, and it is easy to increase the content of the pigment in the composition. As oxime compounds, for example, compounds described in Japanese Patent Publication No. 2001-233842, compounds described in Japanese Patent Publication No. 2000-080068, or compounds described in Japanese Patent Publication No. 2006-342166 can be cited. As oxime compounds, for example, 3-benzoyloxyiminobutane-2-one, 3-acetyloxyiminobutane-2-one, 3-propionyloxyiminobutane-2-one, 2-acetyloxyiminopentane-3-one, 2-acetyloxyimino-1-phenylpropane-1-one, 2-benzoyloxyimino-1-phenylpropane-1-one, 3-(4-toluenesulfonyloxy)iminobutane-2-one and 2-ethoxycarbonyloxyimino-1-phenylpropane-1-one can be cited. In addition, compounds described in J.C.S.Perkin II (1979) pp. 1653-1660, J.C.S.Perkin II (1979) pp. 156-162, Journal of Photopolymer Science and Technology (1995) pp. 202-232, Japanese Patent Publication No. 2000-066385, Japanese Patent Publication No. 2000-080068, Japanese Patent Publication No. 2004-534797, and Japanese Patent Publication No. 2006-342166 can also be cited. Commercial products include IRGACURE-OXE01 (manufactured by BASF), IRGACURE-OXE02 (manufactured by BASF), IRGACURE-OXE03 (manufactured by BASF), and IRGACURE-OXE04 (manufactured by BASF). In addition, TR-PBG-304 (manufactured by Changzhou Tronly New Electronic Materials CO., LTD.), Adeka Arkls NCI-730, Adeka Arkls NCI-831, Adeka Arkls NCI-930 (manufactured by ADEKA CORPORATION), and N-1919 (photopolymerization initiator containing carbazole/oxime ester skeleton (manufactured by ADEKA CORPORATION)). In addition, Omnirad1316 (IGM RESINS B.V.) can also be cited.

又,作為上述以外的肟化合物,可以舉出在咔唑N位上連接有肟之日本特表2009-519904號公報中記載之化合物;在二苯甲酮部位導入有雜(hetero)取代基之美國專利第7626957號公報中記載之化合物;在色素部位導入有硝基之日本特開2010-015025號公報及美國專利公開2009-292039號中記載之化合物;國際公開第2009-131189號公報中記載之酮肟化合物;及在同一分子內包含三𠯤骨架和肟骨架之美國專利7556910號公報中記載之化合物;在405nm處具有吸收最大且對g射線光源具有良好的靈敏度之日本特開2009-221114號公報中記載之化合物;等。 例如,能夠參閱日本特開2013-029760號公報的0274~0275段,該內容被編入到本說明書中。 具體而言,作為肟化合物,下述式(OX-1)所表示之化合物為較佳。另外,肟化合物的N-O鍵可以為(E)型肟化合物,亦可以為(Z)型肟化合物,亦可以為(E)型與(Z)型的混合物。 In addition, as oxime compounds other than the above, there can be cited compounds described in Japanese Patent Publication No. 2009-519904 in which an oxime is linked to the N-position of carbazole; compounds described in U.S. Patent Publication No. 7626957 in which a hetero substituent is introduced into the benzophenone site; compounds described in Japanese Patent Publication No. 2010-015025 and U.S. Patent Publication No. 2009- 292039; ketoxime compounds described in International Publication No. 2009-131189; and compounds described in U.S. Patent No. 7556910 containing a trioxime skeleton and an oxime skeleton in the same molecule; compounds described in Japanese Patent Publication No. 2009-221114 having an absorption maximum at 405 nm and good sensitivity to a g-ray light source; etc. For example, paragraphs 0274 to 0275 of Japanese Patent Publication No. 2013-029760 can be referred to, and the contents are incorporated into this specification. Specifically, as an oxime compound, a compound represented by the following formula (OX-1) is preferred. In addition, the N-O bond of the oxime compound may be an (E) type oxime compound, an (Z) type oxime compound, or a mixture of the (E) type and the (Z) type.

[化學式21] [Chemical formula 21]

式(OX-1)中,R及B各自獨立地表示1價取代基,A表示2價有機基團,Ar表示芳基。 式(OX-1)中,作為R所表示之1價取代基,1價非金屬原子團為較佳。 作為1價非金屬原子團,可以舉出烷基、芳基、醯基、烷氧基羰基、芳氧基羰基、雜環基、烷硫基羰基及芳硫基羰基等。又,該等基團可以具有1個以上的取代基。又,前述取代基可以進一步被其他取代基取代。 作為取代基,可以舉出鹵素原子、芳氧基、烷氧基羰基、芳氧基羰基、醯氧基、醯基、烷基及芳基等。 式(OX-1)中,作為B所表示之1價取代基,芳基、雜環基、芳基羰基或雜環羰基為較佳,芳基或雜環基為更佳。該等基團可以具有1個以上的取代基。作為取代基,能夠例示前述取代基。 式(OX-1)中,作為A所表示之2價有機基團,碳數1~12的伸烷基、伸環烷基或伸炔基為較佳。該等基團可以具有1個以上的取代基。作為取代基,能夠例示前述取代基。 In formula (OX-1), R and B each independently represent a monovalent substituent, A represents a divalent organic group, and Ar represents an aryl group. In formula (OX-1), as the monovalent substituent represented by R, a monovalent non-metallic atomic group is preferred. As the monovalent non-metallic atomic group, alkyl, aryl, acyl, alkoxycarbonyl, aryloxycarbonyl, heterocyclic, alkylthiocarbonyl and arylthiocarbonyl groups can be cited. In addition, these groups can have more than one substituent. In addition, the above-mentioned substituents can be further substituted by other substituents. As substituents, halogen atoms, aryloxy, alkoxycarbonyl, aryloxycarbonyl, acyloxy, acyl, alkyl and aryl groups can be cited. In formula (OX-1), as the monovalent substituent represented by B, an aryl group, a heterocyclic group, an arylcarbonyl group or a heterocyclic carbonyl group is preferred, and an aryl group or a heterocyclic group is more preferred. Such groups may have one or more substituents. As substituents, the above-mentioned substituents can be exemplified. In formula (OX-1), as the divalent organic group represented by A, an alkylene group, a cycloalkylene group or an alkynylene group having 1 to 12 carbon atoms is preferred. Such groups may have one or more substituents. As substituents, the above-mentioned substituents can be exemplified.

作為光聚合起始劑,亦可以舉出包含氟原子之肟化合物。作為包含氟原子之肟化合物,例如,可以舉出日本特開2010-262028號公報中記載之化合物;日本特表2014-500852號公報中記載之化合物24、36~40;及日本特開2013-164471號公報中記載之化合物(C-3);等。該內容被編入到本說明書中。As the photopolymerization initiator, an oxime compound containing a fluorine atom can also be cited. As the oxime compound containing a fluorine atom, for example, the compound described in Japanese Unexamined Patent Publication No. 2010-262028; Compounds 24, 36 to 40 described in Japanese Unexamined Patent Publication No. 2014-500852; and Compound (C-3) described in Japanese Unexamined Patent Publication No. 2013-164471; etc. This content is incorporated into this specification.

作為聚合起始劑,亦可以舉出下述式(1)~(4)所表示之化合物。Examples of the polymerization initiator include compounds represented by the following formulae (1) to (4).

[化學式22] [Chemical formula 22]

[化學式23] [Chemical formula 23]

式(1)中,R 1及R 2各自獨立地表示碳數1~20的烷基、碳數4~20的脂環式烴基、碳數6~30的芳基或碳數7~30的芳烷基,R 1及R 2為苯基時,苯基彼此可以鍵結而形成茀基,R 3及R 4各自獨立地表示氫原子、碳數1~20的烷基、碳數6~30的芳基、碳數7~30的芳烷基或碳數4~20的雜環基,X表示直接鍵結或羰基。 In formula (1), R1 and R2 each independently represent an alkyl group having 1 to 20 carbon atoms, an alicyclic alkyl group having 4 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, or an aralkyl group having 7 to 30 carbon atoms; when R1 and R2 are phenyl groups, the phenyl groups may be bonded to each other to form a fluorenyl group; R3 and R4 each independently represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an aralkyl group having 7 to 30 carbon atoms, or a heterocyclic group having 4 to 20 carbon atoms; and X represents a direct bond or a carbonyl group.

式(2)中,R 1、R 2、R 3及R 4與式(1)中的R 1、R 2、R 3及R 4的含義相同,R 5表示-R 6、-OR 6、-SR 6、-COR 6、-CONR 6R 6、-NR 6COR 6、-OCOR 6、-COOR 6、-SCOR 6、-OCSR 6、-COSR 6、-CSOR 6、-CN、鹵素原子或羥基,R 6表示碳數1~20的烷基、碳數6~30的芳基、碳數7~30的芳烷基或碳數4~20的雜環基,X表示直接鍵結或羰基,a表示0~4的整數。 In the formula (2), R 1 , R 2 , R 3 and R 4 have the same meanings as R 1 , R 2 , R 3 and R 4 in the formula (1); R 5 represents -R 6 , -OR 6 , -SR 6 , -COR 6 , -CONR 6 R 6 , -NR 6 COR 6 , -OCOR 6 , -COOR 6 , -SCOR 6 , -OCSR 6 , -COSR 6 , -CSOR 6 , -CN , a halogen atom or a hydroxyl group; R 6 represents an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an aralkyl group having 7 to 30 carbon atoms or a heterocyclic group having 4 to 20 carbon atoms; X represents a direct bond or a carbonyl group; and a represents an integer of 0 to 4.

式(3)中,R 1表示碳數1~20的烷基、碳數4~20的脂環式烴基、碳數6~30的芳基或碳數7~30的芳烷基,R 3及R 4各自獨立地表示氫原子、碳數1~20的烷基、碳數6~30的芳基、碳數7~30的芳烷基或碳數4~20的雜環基,X表示直接鍵結或羰基。 In formula (3), R1 represents an alkyl group having 1 to 20 carbon atoms, an alicyclic alkyl group having 4 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, or an aralkyl group having 7 to 30 carbon atoms; R3 and R4 each independently represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an aralkyl group having 7 to 30 carbon atoms, or a heterocyclic group having 4 to 20 carbon atoms; and X represents a direct bond or a carbonyl group.

式(4)中,R 1、R 3及R 4與式(3)中的R 1、R 3及R 4的含義相同,R 5表示-R 6、-OR 6、-SR 6、-COR 6、-CONR 6R 6、-NR 6COR 6、-OCOR 6、-COOR 6、-SCOR 6、-OCSR 6、-COSR 6、-CSOR 6、-CN、鹵素原子或羥基,R 6表示碳數1~20的烷基、碳數6~30的芳基、碳數7~30的芳烷基或碳數4~20的雜環基,X表示直接鍵結或羰基,a表示0~4的整數。 In formula (4), R 1 , R 3 and R 4 have the same meanings as R 1 , R 3 and R 4 in formula (3); R 5 represents -R 6 , -OR 6 , -SR 6 , -COR 6 , -CONR 6 R 6 , -NR 6 COR 6 , -OCOR 6 , -COOR 6 , -SCOR 6 , -OCSR 6 , -COSR 6 , -CSOR 6 , -CN, a halogen atom or a hydroxyl group; R 6 represents an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an aralkyl group having 7 to 30 carbon atoms or a heterocyclic group having 4 to 20 carbon atoms; X represents a direct bond or a carbonyl group; and a represents an integer of 0 to 4.

作為式(1)及式(2)所表示之化合物,例如,可以舉出日本特開2014-137466號公報的0076~0079段中記載之化合物。該內容被編入到本說明書中。Examples of the compounds represented by formula (1) and formula (2) include compounds described in paragraphs 0076 to 0079 of JP-A-2014-137466, the contents of which are incorporated herein.

又,作為光聚合起始劑,下述式(1)所表示之化合物亦較佳。Furthermore, as the photopolymerization initiator, a compound represented by the following formula (1) is also preferred.

[化學式24] [Chemical formula 24]

式(1)中,R表示以下式(1a)所表示之基團。In formula (1), R represents a group represented by the following formula (1a).

[化學式25] [Chemical formula 25]

式(1a)中,n表示1~5的整數。m表示1~6的整數。*表示鍵結位置。In formula (1a), n represents an integer from 1 to 5. m represents an integer from 1 to 6. * represents a bonding position.

作為m,3或4為較佳。 式(1)所表示之化合物例如能夠依照日本特開2012-519191號公報中記載之合成方法合成。 As m, 3 or 4 is preferred. The compound represented by formula (1) can be synthesized, for example, according to the synthesis method described in Japanese Patent Publication No. 2012-519191.

以下示出可在組成物中較佳地使用之肟化合物的具體例。 又,作為肟化合物,亦可以舉出國際公開第2015-036910號的表1中記載之化合物,上述內容被編入到本說明書中。 Specific examples of oxime compounds that can be preferably used in the composition are shown below. In addition, as oxime compounds, compounds listed in Table 1 of International Publication No. 2015-036910 can also be cited, and the above contents are incorporated into this specification.

[化學式26] [化學式27] [Chemical formula 26] [Chemical formula 27]

[化學式28] [Chemical formula 28]

肟化合物在350~500nm的波長區域具有極大吸收波長為較佳,在360~480nm的波長區域具有極大吸收波長為更佳,365nm及405nm的波長的吸光度高為進一步較佳。 從靈敏度的觀點考慮,肟化合物的365nm或405nm處的莫耳吸光係數為1,000~300,000為較佳,2,000~300,000為更佳,5,000~200,000為進一步較佳。 化合物的莫耳吸光係數能夠利用公知的方法測量,例如藉由紫外-可見分光光度計(Varian公司製造之Cary-5 spectrophotometer:分光光度計),使用乙酸乙酯在0.01g/L的濃度下進行測量為較佳。 光聚合起始劑可依據需要組合使用2種以上。 The oxime compound preferably has a maximum absorption wavelength in the wavelength region of 350 to 500 nm, more preferably has a maximum absorption wavelength in the wavelength region of 360 to 480 nm, and more preferably has a high absorbance at wavelengths of 365 nm and 405 nm. From the perspective of sensitivity, the molar absorption coefficient of the oxime compound at 365 nm or 405 nm is preferably 1,000 to 300,000, more preferably 2,000 to 300,000, and even more preferably 5,000 to 200,000. The molar absorbance of the compound can be measured by a known method, for example, by a UV-visible spectrophotometer (Cary-5 spectrophotometer manufactured by Varian), preferably using ethyl acetate at a concentration of 0.01 g/L. Two or more photopolymerization initiators can be used in combination as needed.

又,作為光聚合起始劑,亦能夠使用日本特開2008-260927號公報的0052段、日本特開2010-097210號公報的0033~0037段、日本特開2015-068893號公報的0044段中記載之化合物,上述內容被編入到本說明書中。Furthermore, as the photopolymerization initiator, the compounds described in paragraph 0052 of JP-A-2008-260927, paragraphs 0033 to 0037 of JP-A-2010-097210, and paragraph 0044 of JP-A-2015-068893 can also be used, and the above contents are incorporated into the present specification.

作為光聚合起始劑,從本發明的效果更優異的觀點考慮,肟酯系聚合起始劑為較佳。As the photopolymerization initiator, an oxime ester-based polymerization initiator is preferred from the viewpoint of achieving a more excellent effect of the present invention.

組成物中之光聚合起始劑的含量相對於組成物的總固體成分為0.5~20質量%為較佳,1.0~10質量%為更佳,1.5~10質量%為進一步較佳。 光聚合起始劑可單獨使用1種,亦可併用2種以上。併用2種以上的光聚合起始劑時,該等的合計量在上述範圍內為較佳。 The content of the photopolymerization initiator in the composition is preferably 0.5 to 20 mass % relative to the total solid content of the composition, more preferably 1.0 to 10 mass %, and even more preferably 1.5 to 10 mass %. One photopolymerization initiator may be used alone, or two or more may be used in combination. When two or more photopolymerization initiators are used in combination, the total amount thereof is preferably within the above range.

〔界面活性劑〕 組成物可以包含界面活性劑。界面活性劑有助於提高組成物的塗布性。 作為界面活性劑,例如,可以舉出聚矽氧系界面活性劑、氟系界面活性劑、非離子系界面活性劑、陽離子系界面活性劑及陰離子系界面活性劑等。 其中,從本發明的效果更優異的觀點考慮,聚矽氧系界面活性劑為較佳。 [Surfactant] The composition may contain a surfactant. The surfactant helps to improve the coating properties of the composition. As the surfactant, for example, silicone-based surfactants, fluorine-based surfactants, non-ionic surfactants, cationic surfactants, and anionic surfactants can be cited. Among them, silicone-based surfactants are preferred from the viewpoint of the better effect of the present invention.

作為聚矽氧系界面活性劑,例如,可以舉出由矽氧烷鍵構成之直鏈狀聚合物、以及在側鏈及/或末端導入了有機基團之改質矽氧烷聚合物等。Examples of polysilicone-based surfactants include linear polymers composed of siloxane bonds and modified siloxane polymers having organic groups introduced into the side chains and/or the terminals.

作為聚矽氧系界面活性劑,例如,可以舉出DOWSIL(註冊商標)系列的DC3PA、SH7PA、DC11PA、SH21PA、SH28PA、SH29PA、SH30PA及SH8400(以上為Dow Corning Toray Co., Ltd.製造);X-22-4952、X-22-4272、X-22-6266、KF-351A、K354L、KF-355A、KF-945、KF-640、KF-642、KF-643、X-22-6191、X-22-4515、KF-6000、KF-6004、KP-323、KP-341、KF-6001及KF-6002(以上為Shin-Etsu Silicone公司製造);F-4440、TSF-4300、TSF-4445、TSF-4460及TSF-4452(以上為omentive Performance Materials Inc.製造);BYK307、BYK323及BYK330(以上為BYK-Chemie GmbH製造)。 作為矽酮系界面活性劑的較佳的一態樣,亦可以舉出芳香族基改質型矽酮系界面活性劑(具有芳香族基之矽酮系界面活性劑)。作為芳香族基改質型矽酮系界面活性劑,苯基改質型矽酮系界面活性劑(具有苯基之矽酮系界面活性劑)為較佳。 As polysilicone-based surfactants, for example, DC3PA, SH7PA, DC11PA, SH21PA, SH28PA, SH29PA, SH30PA, and SH8400 of the DOWSIL (registered trademark) series (all manufactured by Dow Corning Toray Co., Ltd.); X-22-4952, X-22-4272, X-22-6266, KF-351A, K354L, KF-355A, KF-945, KF-640, KF-642, KF-643, X-22-6191, X-22-4515, KF-6000, KF-6004, KP-323, KP-341, KF-6001, and KF-6002 (all manufactured by Shin-Etsu Silicone Company); F-4440, TSF-4300, TSF-4445, TSF-4460 and TSF-4452 (all manufactured by Momentive Performance Materials Inc.); BYK307, BYK323 and BYK330 (all manufactured by BYK-Chemie GmbH). As a preferred embodiment of silicone-based surfactants, aromatic-modified silicone-based surfactants (silicone-based surfactants with aromatic groups) can also be cited. As aromatic-modified silicone-based surfactants, phenyl-modified silicone-based surfactants (silicone-based surfactants with phenyl groups) are preferred.

又,作為矽酮系界面活性劑的較佳的一態樣,亦可以舉出下述結構的矽氧烷化合物。另外,n為1以上,10~40為較佳。As a preferred embodiment of the silicone-based surfactant, a siloxane compound having the following structure can also be cited: In addition, n is 1 or more, preferably 10 to 40.

[化學式29] [Chemical formula 29]

作為氟系界面活性劑,例如,可以舉出MEGAFACE F171、MEGAFACE F172、MEGAFACE F173、MEGAFACE F176、MEGAFACE F177、MEGAFACE F141、MEGAFACE F142、MEGAFACE F143、MEGAFACE F144、MEGAFACE R30、MEGAFACE F437、MEGAFACEF475、MEGAFACE F479、MEGAFACE F482、MEGAFACE F554及MEGAFACE F780(以上為DIC CORPORATION製造);Fluorad FC430、Fluorad FC431及Fluorad FC171(以上為Sumitomo 3M Limited製造);Surflon S-382、Surflon SC-101、Surflon SC-103、Surflon SC-104、Surflon SC-105、Surflon SC1068、Surflon SC-381、Surflon SC-383、Surflon S393及Surflon KH-40(以上為Asahi Glass Co., Ltd.製造);以及PF636、PF656、PF6320、PF6520及PF7002(OMNOVA Solutions Inc.製造)等。 作為氟系界面活性劑,亦能夠使用嵌段聚合物,例如,可以舉出日本特開第2011-089090號公報中記載之化合物。 As fluorine-based surfactants, for example, MEGAFACE F171, MEGAFACE F172, MEGAFACE F173, MEGAFACE F176, MEGAFACE F177, MEGAFACE F141, MEGAFACE F142, MEGAFACE F143, MEGAFACE F144, MEGAFACE R30, MEGAFACE F437, MEGAFACE F475, MEGAFACE F479, MEGAFACE F482, MEGAFACE F554, and MEGAFACE F780 (all manufactured by DIC CORPORATION); Fluorad FC430, Fluorad FC431, and Fluorad FC171 (all manufactured by Sumitomo 3M Limited); Surflon S-382, Surflon SC-101, Surflon SC-103, Surflon SC-104, Surflon SC-105, Surflon SC1068, Surflon SC-381, Surflon SC-383, Surflon S393 and Surflon KH-40 (all manufactured by Asahi Glass Co., Ltd.); and PF636, PF656, PF6320, PF6520 and PF7002 (manufactured by OMNOVA Solutions Inc.), etc. As a fluorine-based surfactant, a block polymer can also be used, for example, the compound described in Japanese Patent Publication No. 2011-089090 can be cited.

組成物包含界面活性劑時,組成物中的界面活性劑的含量並沒有特別限制,從本發明的效果更優異的方面考慮,相對於組成物的總固體成分,0.001~2.0質量%為較佳,0.005~1.0質量%為更佳,0.01~1.0質量%為進一步較佳。 界面活性劑可以單獨使用1種,亦可以併用2種以上。界面活性劑併用2種以上時,合計量在上述範圍內為較佳。 When the composition contains a surfactant, the content of the surfactant in the composition is not particularly limited. From the perspective of achieving a better effect of the present invention, 0.001 to 2.0 mass % is preferred, 0.005 to 1.0 mass % is more preferred, and 0.01 to 1.0 mass % is further preferred relative to the total solid content of the composition. One surfactant may be used alone or two or more surfactants may be used in combination. When two or more surfactants are used in combination, the total amount is preferably within the above range.

〔溶劑〕 組成物可以包含溶劑。 溶劑並沒有特別限制,能夠使用公知的溶劑,例如,可以舉出有機溶劑及水。 組成物中,固體成分的含量相對於組成物的總質量為10~90質量%為較佳,20~70質量%為更佳,30~70質量%為進一步較佳,40~60質量%為特佳。亦即,作為組成物中的溶劑的含量,並沒有特別限制,調整至組成物的固體成分成為上述含量為較佳。 溶劑可以單獨使用1種,亦可以併用2種以上。併用2種以上溶劑時,將組成物的總固體成分調整在上述範圍內為較佳。 [Solvent] The composition may contain a solvent. The solvent is not particularly limited, and known solvents can be used, for example, organic solvents and water. In the composition, the content of the solid component is preferably 10 to 90 mass % relative to the total mass of the composition, 20 to 70 mass % is more preferably, 30 to 70 mass % is further preferably, and 40 to 60 mass % is particularly preferably. That is, the content of the solvent in the composition is not particularly limited, and it is preferably adjusted so that the solid component of the composition becomes the above content. The solvent may be used alone or in combination of two or more. When two or more solvents are used in combination, it is preferably adjusted so that the total solid content of the composition is within the above range.

作為有機溶劑,例如,可以舉出丙酮、甲基乙基酮、環己烷、乙酸乙酯、二氯乙烷、四氫呋喃、甲苯、乙二醇單甲醚、乙二醇單乙醚、乙二醇二甲醚、丙二醇單甲醚、丙二醇單乙醚、乙醯丙酮、環己酮、環戊酮、二丙酮醇、乙二醇單甲醚乙酸酯、乙二醇乙醚乙酸酯、乙二醇單異丙醚、乙二醇單丁醚乙酸酯、3-甲氧基丙醇、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇二甲醚、二乙二醇二乙醚、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、3-甲氧基丙基乙酸酯、N,N-二甲基甲醯胺、二甲基亞碸、γ-丁內酯、乙酸丁酯、乳酸甲酯、N-甲基-2-吡咯啶酮及乳酸乙酯等,但並不限於該等。Examples of the organic solvent include acetone, methyl ethyl ketone, cyclohexane, ethyl acetate, ethylene dichloride, tetrahydrofuran, toluene, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol dimethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, acetylacetone, cyclohexanone, cyclopentanone, diacetone alcohol, ethylene glycol monomethyl ether acetate, ethylene glycol ethyl ether acetate, ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monoisopropyl ether, ethylene glycol monoethyl ether acetate, ethylene glycol monomethyl ether acetate ... Acid esters, 3-methoxypropanol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, 3-methoxypropyl acetate, N,N-dimethylformamide, dimethyl sulfoxide, γ-butyrolactone, butyl acetate, methyl lactate, N-methyl-2-pyrrolidone and ethyl lactate, but are not limited to them.

〔包含環氧基的化合物(密接劑)〕 組成物可以含有包含環氧基之化合物。 包含環氧基的化合物可以舉出具有1個以上環氧基的化合物,具有2個以上的環氧基的化合物為較佳。環氧基具有1~100個為較佳。上限例如可以為10個以下,亦可以為5個以下。下限為2個以上為較佳。 另外,包含環氧基的化合物表示與上述分散劑、鹼可溶性樹脂及聚合性化合物不同的成分。 [Compounds containing epoxy groups (adhesives)] The composition may contain compounds containing epoxy groups. Examples of compounds containing epoxy groups include compounds having one or more epoxy groups, and compounds having two or more epoxy groups are preferred. It is preferred that the number of epoxy groups is 1 to 100. The upper limit may be, for example, 10 or less, or 5 or less. The lower limit is preferably 2 or more. In addition, the compound containing epoxy groups refers to a component different from the above-mentioned dispersant, alkali-soluble resin, and polymerizable compound.

包含環氧基的化合物的環氧當量(=包含環氧基的化合物的分子量/環氧基數)為500g/當量以下為較佳,100~400g/當量為更佳,100~300g/當量為進一步較佳。The epoxy equivalent (=molecular weight of the epoxy group-containing compound/number of epoxy groups) of the epoxy group-containing compound is preferably 500 g/equivalent or less, more preferably 100 to 400 g/equivalent, and even more preferably 100 to 300 g/equivalent.

包含環氧基的化合物可以為低分子化合物(例如,分子量未達2000),亦可以為高分子化合物(macromolecule)(例如分子量2000以上,為聚合物時,重量平均分子量為2000以上)。包含環氧基的化合物的重量平均分子量為200~100000為較佳,500~50000為更佳。重量平均分子量的上限為10000以下為更佳,5000以下為進一步較佳,3000以下為特佳。The compound containing an epoxy group may be a low molecular weight compound (e.g., a molecular weight of less than 2000) or a high molecular weight compound (e.g., a molecular weight of 2000 or more, and in the case of a polymer, a weight average molecular weight of 2000 or more). The weight average molecular weight of the compound containing an epoxy group is preferably 200 to 100000, more preferably 500 to 50000. The upper limit of the weight average molecular weight is more preferably 10000 or less, more preferably 5000 or less, and particularly preferably 3000 or less.

包含環氧基的化合物可以使用市售品。例如,可以舉出EHPE3150(Daicel Corporation製造)、EOCN-1020(Nippon Kayaku Co., Ltd.製造)、EPICLON N-695(DIC製造)及CELLOXIDE 2021P(Daicel Corporation製造)等。 又,包含環氧基的化合物可以舉出日本特開2013-011869號公報的0034~0036段、日本特開2014-043556號公報的0147~0156段及日本特開2014-089408號公報的0085~0092段中記載之化合物。該等內容被編入到本說明書中。 Commercially available compounds containing epoxy groups can be used. For example, EHPE3150 (manufactured by Daicel Corporation), EOCN-1020 (manufactured by Nippon Kayaku Co., Ltd.), EPICLON N-695 (manufactured by DIC), and CELLOXIDE 2021P (manufactured by Daicel Corporation) can be cited. In addition, compounds containing epoxy groups include compounds described in paragraphs 0034 to 0036 of Japanese Patent Publication No. 2013-011869, paragraphs 0147 to 0156 of Japanese Patent Publication No. 2014-043556, and paragraphs 0085 to 0092 of Japanese Patent Publication No. 2014-089408. These contents are incorporated into this specification.

組成物含有包含環氧基之化合物時,組成物中的包含環氧基之化合物的含量相對於組成物中的總固體成分,0.001~10質量%為較佳,0.01~8質量%為更佳,0.01~6質量%為進一步較佳。 包含環氧基的化合物可以單獨使用1種,亦可以使用2種以上。組成物包含2種以上的包含環氧基之化合物時,其合計含量在上述範圍內為較佳。 When the composition contains a compound containing an epoxy group, the content of the compound containing an epoxy group in the composition is preferably 0.001 to 10 mass %, more preferably 0.01 to 8 mass %, and even more preferably 0.01 to 6 mass % relative to the total solid content in the composition. The compound containing an epoxy group may be used alone or in combination of two or more. When the composition contains two or more compounds containing an epoxy group, the total content thereof is preferably within the above range.

〔矽烷偶合劑(密接劑)〕 組成物可以包含矽烷偶合劑。 在基板上形成硬化膜時,矽烷偶合劑作為提高基板與硬化膜之間的密接性之密接劑發揮功能。 矽烷偶合劑係指在分子中包含水解性基及其以外的官能基的化合物。另外,烷氧基等水解性基與矽原子鍵結。 水解性基係指與矽原子直接鍵結,並且可藉由水解反應及/或縮合反應生成矽氧烷鍵之取代基。作為水解性基,例如,可以舉出鹵素原子、烷氧基、醯氧基及烯氧基。水解性基團含有碳原子時,其碳數為6以下為較佳,4以下為更佳。尤其,碳數4以下的烷氧基或碳數4以下的烯氧基為較佳。 又,在基板上形成硬化膜時,為了提高基板與硬化膜之間的密接性,矽烷偶合劑不包含氟原子及矽原子(其中,水解性基所鍵結之矽原子除外)為較佳,不包含氟原子、矽原子(其中,水解性基所鍵結之矽原子除外)、被矽原子取代之伸烷基、碳數8以上的直鏈狀烷基及碳數3以上的支鏈狀烷基為較佳。 矽烷偶合劑可以包含(甲基)丙烯醯基等乙烯性不飽和基。包含乙烯性不飽和基時,其數量為1~10個為較佳,4~8個為更佳。另外,包含乙烯性不飽和基之矽烷偶合劑(例如包含水解性基和乙烯性不飽和基之分子量2000以下的化合物)不屬於上述聚合性化合物。 [Silane coupling agent (adhesive agent)] The composition may contain a silane coupling agent. When a cured film is formed on a substrate, the silane coupling agent functions as an adhesive agent that improves the adhesion between the substrate and the cured film. Silane coupling agent refers to a compound containing a hydrolyzable group and other functional groups in the molecule. In addition, a hydrolyzable group such as an alkoxy group is bonded to a silicon atom. A hydrolyzable group refers to a substituent that directly bonds to a silicon atom and can form a siloxane bond by a hydrolysis reaction and/or a condensation reaction. Examples of the hydrolyzable group include a halogen atom, an alkoxy group, an acyloxy group, and an alkenyloxy group. When the hydrolyzable group contains a carbon atom, the carbon number is preferably 6 or less, and more preferably 4 or less. In particular, an alkoxy group with a carbon number of 4 or less or an alkenyloxy group with a carbon number of 4 or less is preferred. In addition, when a cured film is formed on a substrate, in order to improve the adhesion between the substrate and the cured film, the silane coupling agent preferably does not contain fluorine atoms and silicon atoms (except for silicon atoms bonded to hydrolyzable groups), and preferably does not contain fluorine atoms, silicon atoms (except for silicon atoms bonded to hydrolyzable groups), alkylene groups substituted by silicon atoms, linear alkyl groups with a carbon number of 8 or more, and branched alkyl groups with a carbon number of 3 or more. The silane coupling agent may contain an ethylenically unsaturated group such as a (meth)acryloyl group. When an ethylenically unsaturated group is contained, the number thereof is preferably 1 to 10, and more preferably 4 to 8. In addition, silane coupling agents containing ethylenically unsaturated groups (e.g. compounds containing hydrolyzable groups and ethylenically unsaturated groups with a molecular weight of less than 2000) do not belong to the above-mentioned polymerizable compounds.

作為矽烷偶合劑,例如,可以舉出3-環氧丙氧基丙基三甲氧基矽烷、3-環氧丙氧基丙基三乙氧基矽烷、3-環氧丙氧基丙基甲基二甲氧基矽烷、3-環氧丙氧基丙基甲基二乙氧基矽烷、乙烯基三甲氧基矽烷及乙烯基三乙氧基矽烷等。Examples of the silane coupling agent include 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropyltriethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, vinyltrimethoxysilane, and vinyltriethoxysilane.

組成物包含矽烷偶合劑時,組成物中的矽烷偶合劑的含量相對於組成物中的總固體成分,0.1~10質量%為較佳,0.5~8質量%為更佳,1.0~6質量%為進一步較佳。 矽烷偶合劑可以單獨包含1種,亦可以包含2種以上。組成物包含2種以上的矽烷偶合劑時,其合計在上述範圍內即可。 When the composition contains a silane coupling agent, the content of the silane coupling agent in the composition is preferably 0.1 to 10 mass %, more preferably 0.5 to 8 mass %, and even more preferably 1.0 to 6 mass % relative to the total solid content in the composition. The silane coupling agent may contain one type alone or two or more types. When the composition contains two or more silane coupling agents, the total amount thereof may be within the above range.

〔紫外線吸收劑〕 組成物可以包含紫外線吸收劑。由此,能夠使經曝光形成之硬化膜的圖案形狀成為更加優異(精細)之形狀。 作為紫外線吸收劑,可以舉出水楊酸酯系、二苯甲酮系、苯并三唑系、取代丙烯腈系及三𠯤系紫外線吸收劑。又,亦可以舉出日本特開2012-068418號公報的0137~0142段(對應之US2012/0068292的0251~0254段)的化合物,能夠援用該等內容,並編入到本說明書中。 此外,亦可以舉出二乙基胺基-苯基磺醯基系紫外線吸收劑(DAITO CHEMICAL CO., LTD.製造,產品名稱:UV-503)等。 作為紫外線吸收劑,亦可以舉出日本特開2012-032556號公報的0134~0148段中例示之化合物。 組成物包含紫外線吸收劑時,紫外線吸收劑的含量相對於組成物的總固體成分,0.001~15質量%為較佳,0.01~10質量%為更佳,0.1~5質量%為進一步較佳。 [Ultraviolet absorber] The composition may contain an ultraviolet absorber. This can make the pattern shape of the cured film formed by exposure to become a more excellent (fine) shape. As ultraviolet absorbers, salicylic acid ester-based, benzophenone-based, benzotriazole-based, substituted acrylonitrile-based and tris-based ultraviolet absorbers can be cited. In addition, the compounds in paragraphs 0137 to 0142 of Japanese Patent Publication No. 2012-068418 (corresponding to paragraphs 0251 to 0254 of US2012/0068292) can also be cited, and the contents can be cited and incorporated into this specification. In addition, diethylamino-phenylsulfonyl ultraviolet absorber (manufactured by DAITO CHEMICAL CO., LTD., product name: UV-503) and the like can also be cited. As ultraviolet absorbers, compounds exemplified in paragraphs 0134 to 0148 of Japanese Patent Publication No. 2012-032556 can also be cited. When the composition contains the ultraviolet absorber, the content of the ultraviolet absorber is preferably 0.001 to 15 mass %, more preferably 0.01 to 10 mass %, and even more preferably 0.1 to 5 mass % relative to the total solid content of the composition.

〔紅外線吸收劑〕 組成物可以進一步包含紅外線吸收劑。 紅外線吸收劑表示在紅外區域(較佳為波長650~1300nm)的波長區域具有吸收的化合物。紅外線吸收劑較佳為在波長675~900nm的波長區域具有極大吸收波長的化合物。 作為具有此類光譜特性之著色劑,例如,可以舉出吡咯并吡咯化合物、銅化合物、花青化合物、酞菁化合物、亞銨(iminium)化合物、硫醇錯合物系化合物、過渡金屬氧化物系化合物、方酸菁(squarylium)化合物、萘酞菁化合物、夸特銳烯(quaterrylene)化合物、二硫醇金屬錯合物系化合物及克酮鎓(croconium)化合物等。 酞菁化合物、萘酞菁化合物、亞銨化合物、花青化合物、方酸菁化合物及克酮鎓化合物可以使用日本特開2010-111750號公報的0010~0081段中揭示之化合物,該內容被編入到本說明書中。花青化合物例如能夠參閱“功能性色素,大河原信/鬆岡賢/北尾悌次郎/平嶋恆亮·著,Kodansha Scientific Ltd.”,該內容被編入到本說明書中。 [Infrared absorber] The composition may further contain an infrared absorber. The infrared absorber refers to a compound having absorption in the wavelength region of the infrared region (preferably a wavelength of 650 to 1300 nm). The infrared absorber is preferably a compound having a maximum absorption wavelength in the wavelength region of 675 to 900 nm. As coloring agents having such spectral characteristics, for example, pyrrolopyrrole compounds, copper compounds, cyanine compounds, phthalocyanine compounds, iminium compounds, thiol complex compounds, transition metal oxide compounds, squarylium compounds, naphthalocyanine compounds, quaterrylene compounds, dithiol metal complex compounds, and croconium compounds can be cited. Phthalocyanine compounds, naphthalocyanine compounds, ammonium compounds, cyanine compounds, squarylium compounds and crotonium compounds can use compounds disclosed in paragraphs 0010 to 0081 of Japanese Patent Publication No. 2010-111750, and the contents are incorporated into this specification. For example, cyanine compounds can refer to "Functional Pigments, Okawara Nobuyuki/Matsuoka Ken/Kitao Teijiro/Hirajima Tsuneaki·Written, Kodansha Scientific Ltd.", and the contents are incorporated into this specification.

作為具有上述光譜特性之著色劑,亦能夠使用日本特開平07-164729號公報的0004~0016段中揭示之化合物及/或日本特開2002-146254號公報的0027~0062段中揭示之化合物、日本特開2011-164583號公報的0034~0067段中揭示之由含有Cu及/或P之氧化物的微晶構成且數量平均凝聚粒徑為5~200nm的近紅外線吸收粒子。As a coloring agent having the above-mentioned spectral characteristics, the compounds disclosed in paragraphs 0004 to 0016 of Japanese Patent Publication No. 07-164729 and/or the compounds disclosed in paragraphs 0027 to 0062 of Japanese Patent Publication No. 2002-146254, and the near-infrared absorbing particles disclosed in paragraphs 0034 to 0067 of Japanese Patent Publication No. 2011-164583, which are composed of microcrystals containing Cu and/or P oxides and have a number average agglomerated particle size of 5 to 200 nm, can also be used.

在波長675~900nm的波長區域具有極大吸收波長的化合物較佳為選自包括花青化合物、吡咯并吡咯化合物、方酸菁化合物、酞菁化合物及萘酞菁化合物之群組中的至少1種。 又,紅外線吸收劑為在25℃的水中溶解1質量%以上的化合物為較佳,在25℃的水中溶解10質量%以上的化合物為更佳。藉由使用該種化合物,耐溶劑性變得良好。 吡咯并吡咯化合物能夠參閱日本特開2010-222557號公報的0049~0062段,該內容被編入到本說明書中。花青化合物及方酸菁化合物能夠參閱國際公開2014/088063號公報的0022~0063段、國際公開2014/030628號公報的0053~0118段、日本特開2014-059550號公報的0028~0074段、國際公開2012/169447號公報的0013~0091段、日本特開2015-176046號公報的0019~0033段、日本特開2014-063144號公報的0053~0099段、日本特開2014-052431號公報的0085~0150段、日本特開2014-044301號公報的0076~0124段、日本特開2012-008532號公報的0045~0078段、日本特開2015-172102號公報的0027~0067段、日本特開2015-172004號公報的0029~0067段、日本特開2015-040895號公報的0029~0085段、日本特開2014-126642號公報的0022~0036段、日本特開2014-148567號公報的0011~0017段、日本特開2015-157893號公報的0010~0025段、日本特開2014-095007號公報的0013~0026段、日本特開2014-080487號公報的0013~0047段及日本特開2013-227403號公報的0007~0028段等,該內容被編入到本說明書中。 The compound having a maximum absorption wavelength in the wavelength region of 675 to 900 nm is preferably at least one selected from the group consisting of cyanine compounds, pyrrolopyrrole compounds, squarylium compounds, phthalocyanine compounds, and naphthalocyanine compounds. In addition, the infrared absorber is preferably a compound that dissolves at least 1% by mass in water at 25°C, and more preferably a compound that dissolves at least 10% by mass in water at 25°C. By using such a compound, solvent resistance becomes good. The pyrrolopyrrole compound can be found in paragraphs 0049 to 0062 of Japanese Patent Publication No. 2010-222557, and the content is incorporated into this specification. For the cyanine compounds and the squarylium compounds, see paragraphs 0022 to 0063 of International Publication No. 2014/088063, paragraphs 0053 to 0118 of International Publication No. 2014/030628, paragraphs 0028 to 0074 of Japanese Patent Application No. 2014-059550, paragraphs 0013 to 0091 of International Publication No. 2012/169447, and paragraphs 0017 to 0018 of Japanese Patent Application No. 2014-059550. 0019 to 0033 of Japanese Patent Application No. 15-176046, 0053 to 0099 of Japanese Patent Application No. 2014-063144, 0085 to 0150 of Japanese Patent Application No. 2014-052431, 0076 to 0124 of Japanese Patent Application No. 2014-044301, 0045 to 0078 of Japanese Patent Application No. 2012-008532 , paragraphs 0027 to 0067 of Japanese Patent Application Publication No. 2015-172102, paragraphs 0029 to 0067 of Japanese Patent Application Publication No. 2015-172004, paragraphs 0029 to 0085 of Japanese Patent Application Publication No. 2015-040895, paragraphs 0022 to 0036 of Japanese Patent Application Publication No. 2014-126642, paragraphs 001 1 to 0017, paragraphs 0010 to 0025 of Japanese Patent Publication No. 2015-157893, paragraphs 0013 to 0026 of Japanese Patent Publication No. 2014-095007, paragraphs 0013 to 0047 of Japanese Patent Publication No. 2014-080487, and paragraphs 0007 to 0028 of Japanese Patent Publication No. 2013-227403, etc., the contents are incorporated into this manual.

〔其他任意成分〕 組成物可以進一步包含除了上述成分以外的其他任意成分。例如,可以舉出聚合抑制劑、增感劑、共增感劑、交聯劑、硬化促進劑、填料、熱硬化促進劑、可塑劑、稀釋劑及感脂化劑等,此外,亦可以依據需要添加對基板表面的密接促進劑及其他助劑類(例如,導電性粒子、填充劑、消泡劑、阻燃劑、流平劑、剝離促進劑、抗氧化劑、香料、表面張力調節劑及鏈轉移劑等)等公知的添加劑。 該等成分例如能夠參閱日本特開2012-003225號公報的0183~0228段(對應之美國專利申請公開第2013/034812號說明書的0237~0309段)、日本特開2008-250074號公報的0101~0102段、0103~0104段、0107~0109段及日本特開2013-195480號公報的0159~0184段等的記載,該等內容被編入到本說明書中。 [Other optional components] The composition may further contain other optional components other than the above components. For example, polymerization inhibitors, sensitizers, co-sensitizers, crosslinking agents, hardening accelerators, fillers, thermosetting accelerators, plasticizers, diluents and grease-sensitizing agents can be cited. In addition, adhesion promoters and other auxiliary agents (for example, conductive particles, fillers, defoaming agents, flame retardants, leveling agents, stripping accelerators, antioxidants, fragrances, surface tension regulators and chain transfer agents) and other well-known additives may be added as needed. For example, the components can be found in paragraphs 0183 to 0228 of Japanese Patent Application No. 2012-003225 (paragraphs 0237 to 0309 of the corresponding U.S. Patent Application Publication No. 2013/034812), paragraphs 0101 to 0102, 0103 to 0104, 0107 to 0109 of Japanese Patent Application No. 2008-250074, and paragraphs 0159 to 0184 of Japanese Patent Application No. 2013-195480, and the contents are incorporated into this specification.

〔組成物的製造方法〕 關於組成物,首先製造分散了顏料之分散組成物,將所獲得之分散組成物進一步與其他成分混合而作為組成物為較佳。 分散組成物藉由混合顏料、分散樹脂及溶劑來製備為較佳。又,在分散組成物中導入聚合抑制劑亦較佳。 上述分散組成物能夠藉由公知的混合方法(例如,利用攪拌機、均質器、高壓乳化裝置、濕式粉碎機或濕式分散機等之混合方法)混合上述各成分來製備。 製備分散組成物之後,能夠混合上述分散組成物、特定樹脂、聚合性化合物、光聚合起始劑及溶劑來製備。 製備組成物時,可以一次性配合各成分,亦可以將各成分分別在溶劑中溶解或分散之後逐次配合。又,配合時的投入順序及作業條件並沒有特別限制。 [Method for preparing the composition] Regarding the composition, first, a dispersion composition in which a pigment is dispersed is prepared, and the obtained dispersion composition is preferably further mixed with other components to prepare a composition. The dispersion composition is preferably prepared by mixing a pigment, a dispersion resin and a solvent. In addition, it is also preferable to introduce a polymerization inhibitor into the dispersion composition. The above-mentioned dispersion composition can be prepared by mixing the above-mentioned components by a known mixing method (for example, a mixing method using a stirrer, a homogenizer, a high-pressure emulsifier, a wet pulverizer or a wet disperser). After the dispersion composition is prepared, the above-mentioned dispersion composition, a specific resin, a polymerizable compound, a photopolymerization initiator and a solvent can be mixed to prepare it. When preparing the composition, each component can be mixed at once, or each component can be dissolved or dispersed in a solvent and mixed one by one. In addition, there are no special restrictions on the order of addition and operating conditions during mixing.

組成物以去除異物及減少缺陷等為目的,利用過濾器過濾為較佳。作為過濾器,例如,只要為一直以來用於過濾用途等之過濾器,則能夠不受特別限制地使用。例如,可以舉出基於PTFE(聚四氟乙烯)等氟樹脂、尼龍等聚醯胺系樹脂、以及聚乙烯及聚丙烯(PP)等聚烯烴樹脂(包含高密度、超高分子量)等之過濾器。其中,聚丙烯(包含高密度聚丙烯)或尼龍為較佳。 過濾器的孔徑為0.1~7.0μm為較佳,0.2~2.5μm為更佳,0.2~1.5μm為進一步較佳,0.3~0.7μm為特佳。若設定為該範圍,則能夠抑制顏料(包括黑色顏料)的過濾堵塞,並且能夠可靠地去除顏料中包含之雜質及凝聚物等微細異物。 組成物不包含金屬、含鹵金屬鹽、酸、鹼等雜質為較佳。金屬的種類並沒有特別限定,可以舉出鹼金屬、鹼土類金屬、過渡金屬、Al、Sn、Pb、Bi等。該等材料中包含之雜質的含量為1質量ppm以下為較佳,1質量ppb以下為更佳,100質量ppt以下為進一步較佳,10質量ppt以下為特佳,實質上不包含(測量裝置的檢測極限以下)為最佳。 另外,上述雜質能夠藉由感應偶合電漿質量分析裝置(Yokogawa Analytical Systems, Inc.製造,Agilent 7500cs型)進行測量。 The composition is preferably filtered by a filter for the purpose of removing foreign matter and reducing defects. As a filter, for example, as long as it is a filter that has been used for filtering purposes, it can be used without special restrictions. For example, filters based on fluororesins such as PTFE (polytetrafluoroethylene), polyamide resins such as nylon, and polyolefin resins such as polyethylene and polypropylene (PP) (including high-density and ultra-high molecular weight) can be cited. Among them, polypropylene (including high-density polypropylene) or nylon is preferred. The pore size of the filter is preferably 0.1 to 7.0 μm, more preferably 0.2 to 2.5 μm, further preferably 0.2 to 1.5 μm, and particularly preferably 0.3 to 0.7 μm. If set to this range, the filter clogging of the pigment (including black pigment) can be suppressed, and fine foreign matter such as impurities and agglomerates contained in the pigment can be reliably removed. It is preferred that the composition does not contain impurities such as metals, halogenated metal salts, acids, and bases. The type of metal is not particularly limited, and alkali metals, alkaline earth metals, transition metals, Al, Sn, Pb, Bi, etc. can be cited. The content of impurities contained in these materials is preferably 1 mass ppm or less, 1 mass ppb or less is more preferred, 100 mass ppt or less is further preferred, 10 mass ppt or less is particularly preferred, and substantially no impurities (below the detection limit of the measuring device) are the best. In addition, the above impurities can be measured by an inductively coupled plasma mass spectrometer (manufactured by Yokogawa Analytical Systems, Inc., Agilent 7500cs model).

[硬化膜的製造方法] 在本說明書中,“硬化膜”係指對使用組成物形成之組成物層實施曝光處理等硬化處理而形成之膜。 以下,對硬化膜的製造方法進行說明。 硬化膜的製造方法包括以下步驟為較佳。經過上述步驟,例如,能夠形成圖案狀硬化膜。另外,未將硬化膜設定為圖案狀時,可以不實施顯影步驟。 以下,對各步驟進行說明。 [Method for producing a cured film] In this specification, "cured film" refers to a film formed by subjecting a composition layer formed using a composition to a curing treatment such as exposure treatment. The method for producing a cured film is described below. The method for producing a cured film preferably includes the following steps. Through the above steps, for example, a patterned cured film can be formed. In addition, when the cured film is not set to a patterned shape, the development step may not be performed. Each step is described below.

〔組成物層形成步驟〕 在組成物層形成製程中,在曝光之前在支撐體等上藉由賦予組成物而形成組成物的層(組成物層)。作為支撐體,例如,能夠使用在基板(例如,矽基板)上設置有CCD(Charge Coupled Device:電荷偶合裝置)或CMOS(Complementary Metal-Oxide Semiconductor:互補金屬氧化物半導體)等攝像元件(受光元件)之固體攝像元件用基板。又,依據需要,在支撐體上可以設置用於改善與上部層之密接、防止物質的擴散及基板表面的平坦化等的下塗層。 [Composition layer formation step] In the composition layer formation process, a composition layer (composition layer) is formed by applying a composition on a support or the like before exposure. As a support, for example, a solid-state imaging element substrate can be used in which an imaging element (light-receiving element) such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal-Oxide Semiconductor) is provided on a substrate (for example, a silicon substrate). In addition, as needed, an undercoat layer for improving the close contact with the upper layer, preventing the diffusion of substances, and flattening the substrate surface can be provided on the support.

作為對支撐體上的組成物的適用方法,可以舉出狹縫塗布法、噴墨法、旋轉塗布法、流延塗布法、輥塗法及網版印刷法等各種塗布方法。組成物層的膜厚為0.1~10μm為較佳,0.2~5μm為更佳,0.2~3μm為進一步較佳。塗布於支撐體上的組成物層的乾燥(預烘烤)可以利用加熱板及烘箱等在50~140℃的溫度下進行10~300秒。As a method for applying the composition on the support, various coating methods such as slit coating, inkjet coating, rotary coating, cast coating, roll coating, and screen printing can be cited. The film thickness of the composition layer is preferably 0.1 to 10 μm, more preferably 0.2 to 5 μm, and even more preferably 0.2 to 3 μm. The drying (pre-baking) of the composition layer coated on the support can be performed at a temperature of 50 to 140° C. for 10 to 300 seconds using a heating plate or an oven.

〔曝光步驟〕 曝光步驟為照射活化光線或放射線而將在組成物層形成步驟中形成之組成物層進行曝光之步驟。具體而言,曝光步驟為如下步驟:對在組成物層形成步驟中形成之組成物層照射活化光線或放射線來進行曝光,並硬化組成物層的光照射區域。 作為光照射的方法,並沒有特別限制,隔著具有圖案狀開口部之光罩進行光照射為較佳。 曝光藉由放射線的照射來進行為較佳,作為曝光時能夠使用的放射線,尤其g射線、h射線及i射線等紫外線為較佳,作為光源,高壓汞燈為較佳。照射強度為5~1500mJ/cm 2為較佳,10~1000mJ/cm 2為更佳。 另外,在曝光步驟中,在加熱組成物層時,可以併用後述之後加熱步驟。換言之,在曝光步驟中,加熱組成物層時,硬化膜的製造方法可以不包括後加熱步驟。 [Exposure step] The exposure step is a step of exposing the component layer formed in the component layer forming step by irradiating activating light or radiation. Specifically, the exposure step is a step of exposing the component layer formed in the component layer forming step by irradiating activating light or radiation, and hardening the light-irradiated area of the component layer. There is no particular limitation on the method of light irradiation, and it is preferable to perform light irradiation through a photomask having a patterned opening. It is preferable to perform exposure by irradiation with radiation, and as radiation that can be used for exposure, ultraviolet rays such as g-rays, h-rays and i-rays are particularly preferable, and as a light source, a high-pressure mercury lamp is preferable. The irradiation intensity is preferably 5 to 1500 mJ/cm 2 , and more preferably 10 to 1000 mJ/cm 2. In addition, in the exposure step, when the component layer is heated, the post-heating step described below can be used in combination. In other words, in the exposure step, when the component layer is heated, the method for producing a cured film does not need to include a post-heating step.

〔顯影步驟〕 顯影步驟為對曝光後的組成物層實施顯影處理之步驟。藉由本步驟,曝光步驟中的光曝光區域的組成物層溶出,僅殘留光硬化的部分。例如,在曝光步驟中,隔著具有圖案狀開口部之光罩而實施光照射時,可獲得圖案狀硬化膜。 在顯影步驟中使用的顯影液的種類並沒有特別限制,不會引起基底的攝像元件及電路等的損傷之鹼顯影液為較佳。 作為顯影溫度,例如為20~30℃。 顯影時間例如為20~90秒。為了進一步去除殘渣,近年來有時亦會實施120~180秒。此外,為了進一步提高殘渣去除性,有時亦會反覆進行數次如下步驟:每隔60秒甩去顯影液,進一步重新供給顯影液。 [Developing step] The developing step is a step of developing the exposed component layer. In this step, the component layer in the light-exposed area in the exposure step is dissolved, and only the light-hardened part remains. For example, in the exposure step, when light irradiation is performed through a photomask having a patterned opening, a patterned hardened film can be obtained. The type of developer used in the developing step is not particularly limited, and an alkaline developer that does not cause damage to the imaging element and circuit of the base is preferred. The developing temperature is, for example, 20 to 30°C. The developing time is, for example, 20 to 90 seconds. In recent years, 120 to 180 seconds is sometimes used to further remove residues. In addition, in order to further improve the removability of residues, the following steps are sometimes repeated several times: the developer is shaken off every 60 seconds and the developer is re-supplied.

鹼顯影液為藉由將鹼性化合物溶解於水以使濃度成為0.001~10質量%(較佳為0.01~5質量%)而製備之鹼性水溶液為較佳。 鹼性化合物例如可以舉出氫氧化鈉、氫氧化鉀、碳酸鈉、矽酸鈉、偏矽酸鈉、氨水、乙胺、二乙胺、二甲基乙醇胺、氫氧化四甲基銨、氫氧化四乙基銨、氫氧化四丙基銨、氫氧化四丁基銨、氫氧化芐基三甲基銨、膽鹼、吡咯、哌啶及1,8-二吖雙環[5.4.0]-7-十一碳烯(其中,有機鹼為較佳。)。 另外,用作鹼顯影液時,一般在顯影後用水實施清洗處理。 The alkaline developer is preferably an alkaline aqueous solution prepared by dissolving an alkaline compound in water to a concentration of 0.001 to 10 mass % (preferably 0.01 to 5 mass %). Examples of the alkaline compound include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, ammonia water, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxide, choline, pyrrole, piperidine, and 1,8-diazabicyclo[5.4.0]-7-undecene (among which organic bases are preferred). In addition, when used as an alkaline developer, it is generally washed with water after development.

〔後烘烤〕 在曝光步驟後進行加熱處理(後烘烤)為較佳。後烘烤係用於完全硬化之顯影後的加熱處理。其加熱溫度為240℃以下為較佳,220℃以下為更佳。下限並沒有特別限制,若考慮高效且有效的處理,則50℃以上為較佳,100℃以上為更佳。 後烘烤可以利用加熱板、對流烘箱(熱風循環式乾燥機)及高頻加熱機等加熱機構,以連續式或間歇式進行。 [Post-baking] It is preferable to perform heat treatment (post-baking) after the exposure step. Post-baking is a heat treatment after development for complete hardening. The heating temperature is preferably below 240°C, and more preferably below 220°C. There is no particular lower limit, but if efficient and effective processing is considered, 50°C or above is preferred, and 100°C or above is more preferred. Post-baking can be performed continuously or intermittently using heating mechanisms such as heating plates, convection ovens (hot air circulation dryers) and high-frequency heaters.

上述後烘烤在低氧濃度氣氛下進行為較佳。其氧濃度在19體積%以下為較佳,15體積%以下為更佳,10體積%以下為進一步較佳,7體積%以下為特佳,3體積%以下為最佳。下限並沒有特別限定,實際上為10體積ppm以上。The above post-baking is preferably carried out in a low oxygen concentration atmosphere. The oxygen concentration is preferably 19 volume % or less, more preferably 15 volume % or less, further preferably 10 volume % or less, particularly preferably 7 volume % or less, and most preferably 3 volume % or less. There is no particular lower limit, but it is actually 10 volume ppm or more.

又,可以變更為基於上述加熱之後烘烤,並藉由UV(紫外線)照射而使其完全硬化。 此時,上述組成物進一步包含UV硬化劑為較佳。UV硬化劑係能夠以比為了基於通常的i射線曝光的微影步驟而添加之聚合起始劑的曝光波長亦即365nm的波長短之波長進行硬化之UV硬化劑為較佳。作為UV硬化劑,例如,可以舉出CIBS IRGACURE 2959(產品名稱)。在進行UV照射時,組成物層在波長340nm以下硬化之材料為較佳。波長的下限值並沒有特別限制,一般為220nm以上。又,UV照射的曝光量為100~5000mJ為較佳,300~4000mJ為更佳,800~3500mJ為進一步較佳。為了更有效地進行低溫硬化,該UV硬化步驟在微影步驟之後進行為較佳。曝光光源使用無臭氧汞燈為較佳。 Furthermore, it can be changed to baking after the above heating, and completely hardening it by UV (ultraviolet) irradiation. In this case, it is preferable that the above composition further includes a UV hardener. The UV hardener is preferably a UV hardener that can harden at a wavelength shorter than the exposure wavelength of 365nm, which is the wavelength of the polymerization initiator added for the lithography step based on the usual i-ray exposure. As a UV hardener, for example, CIBS IRGACURE 2959 (product name) can be cited. When UV irradiation is performed, it is preferable that the composition layer is hardened at a wavelength below 340nm. There is no special restriction on the lower limit of the wavelength, and it is generally above 220nm. In addition, the exposure amount of UV irradiation is preferably 100-5000mJ, more preferably 300-4000mJ, and even more preferably 800-3500mJ. In order to perform low-temperature curing more effectively, the UV curing step is preferably performed after the lithography step. It is preferred to use an ozone-free mercury lamp as the exposure light source.

[硬化膜的物性及硬化膜的用途] 藉由對本發明的組成物進行硬化而獲得之硬化膜用作遮光膜為較佳。以下,對藉由對本發明的組成物進行硬化而獲得之硬化膜用作遮光膜時的較佳的物性及用途進行說明。 [Physical properties of cured film and uses of cured film] The cured film obtained by curing the composition of the present invention is preferably used as a light-shielding film. The following describes the preferred physical properties and uses of the cured film obtained by curing the composition of the present invention when used as a light-shielding film.

〔遮光膜的物性及遮光膜的用途〕 從具有優異的遮光性的觀點考慮,遮光膜在400~1100nm的波長區域內的每5.0μm膜厚的光學密度(OD:Optical Density)為3.0以上為較佳,3.5以上為更佳。另外,上限值並沒有特別限制,一般10以下為較佳。 另外,在本說明書中,在400~1100nm的波長區域內的每5.0μm膜厚的光學密度為3.0以上係指在波長400~1100nm的整個區域內,每5.0μm膜厚的光學密度為3.0以上。作為遮光膜的光學密度的測量方法,首先,在玻璃基板上形成遮光膜,利用分光光度計(例如,Hitachi High-Tech Corporation製造之U-4100等)測量。 遮光膜的膜厚例如為0.1~6.0μm為較佳,1.0~5.0μm為更佳,1.0~2.5μm為進一步較佳。又,遮光膜可依據用途設定為比該範圍小的薄膜,亦可以設定為比該範圍大的厚膜。 又,從具有優異的低反射性的觀點考慮,遮光膜在350~1200nm的波長區域內的每5.0μm膜厚的最大反射率(入射角5°)未達5%為較佳,未達4%為更佳,未達1%為進一步較佳。另外,下限值並沒有特別限制,一般為0%以上。作為遮光膜的最大反射率的測量方法,首先,在玻璃基板上形成遮光膜,利用分光器(例如,JASCO Corporation製造之分光器V7200的VAR單元等),獲得相對於入射角5°之反射率光譜,求出在350~1200nm的波長區域內顯示出最大反射率之波長的光的反射率。 [Physical properties of light-shielding film and uses of light-shielding film] From the perspective of having excellent light-shielding properties, the light-shielding film preferably has an optical density (OD: Optical Density) of 3.0 or more per 5.0 μm film thickness in the wavelength range of 400 to 1100 nm, and more preferably 3.5 or more. In addition, the upper limit is not particularly limited, and generally 10 or less is preferred. In addition, in this specification, the optical density of 3.0 or more per 5.0 μm film thickness in the wavelength range of 400 to 1100 nm means that the optical density of 3.0 or more per 5.0 μm film thickness in the entire wavelength range of 400 to 1100 nm. As a method for measuring the optical density of the light-shielding film, first, a light-shielding film is formed on a glass substrate and measured using a spectrophotometer (e.g., U-4100 manufactured by Hitachi High-Tech Corporation). The thickness of the light-shielding film is preferably 0.1 to 6.0 μm, more preferably 1.0 to 5.0 μm, and further preferably 1.0 to 2.5 μm. In addition, the light-shielding film can be set to a thin film smaller than this range or a thick film larger than this range according to the application. In addition, from the perspective of having excellent low reflectivity, the maximum reflectivity (incident angle 5°) of the light-shielding film per 5.0 μm film thickness in the wavelength range of 350 to 1200 nm is preferably less than 5%, more preferably less than 4%, and further preferably less than 1%. In addition, there is no special restriction on the lower limit value, which is generally above 0%. As a method for measuring the maximum reflectivity of a light-shielding film, first, a light-shielding film is formed on a glass substrate, and a reflectivity spectrum with respect to an incident angle of 5° is obtained using a spectrometer (e.g., the VAR unit of the spectrometer V7200 manufactured by JASCO Corporation), and the reflectivity of light with a wavelength showing the maximum reflectivity in the wavelength range of 350 to 1200 nm is obtained.

又,遮光膜適合於個人計算機、平板電腦、行動電話、智慧型手機及數相位機等可攜式設備;列印複合機及掃描器等OA(Office Automation:辦公室自動化)設備;監控相機、條碼讀取器(barcode reader)、自動櫃員機(ATM:Automated Teller Machine)、高速相機及具有使用了面部圖像認證之個人認證功能之設備等產業用設備;車載用相機設備;內視鏡、膠囊式內視鏡(capsule endoscope)及導管(catheter)等醫療用相機設備;以及機體感測器、生物感測器(biosensor)、軍事偵察用相機、三維地圖用相機、氣象及海洋觀測相機、陸地資源探查相機、及宇宙的天文及深太空目標用的探查相機等宇宙用設備;等中所使用之濾光片及模組的遮光構件及遮光膜、以及防反射構件及防反射膜。In addition, the light-shielding film is suitable for portable devices such as personal computers, tablet computers, mobile phones, smart phones and digital cameras; OA (Office Automation) equipment such as printers and scanners; industrial equipment such as surveillance cameras, barcode readers, ATMs (Automated Teller Machines), high-speed cameras and equipment with personal authentication functions using facial image authentication; in-vehicle camera equipment; endoscopes, capsule endoscopes (capsule endoscopes); endoscope and catheter; as well as body sensors, biosensors, military reconnaissance cameras, 3D map cameras, weather and ocean observation cameras, land resource exploration cameras, and space equipment such as exploration cameras for astronomy and deep space targets; light-shielding components and films of filters and modules, as well as anti-reflection components and films used in them.

上述遮光膜亦能夠用於微型LED(Light Emitting Diode:發光二極體)及微型OLED(Organic Light Emitting Diode:有機發光二極體)等用途。上述遮光膜除了適於微型LED及微型OLED中使用之濾光器及光學膜以外,亦適於賦予遮光功能或防反射功能之構件。 作為微型LED及微型OLED的例子,可以舉出日本特表2015-500562號公報及日本特表2014-533890號公報中記載之例子。 The above-mentioned light-shielding film can also be used for micro LED (Light Emitting Diode) and micro OLED (Organic Light Emitting Diode). In addition to being suitable for filters and optical films used in micro LED and micro OLED, the above-mentioned light-shielding film is also suitable for components that have a light-shielding function or an anti-reflection function. As examples of micro LED and micro OLED, examples described in Japanese Patent Publication No. 2015-500562 and Japanese Patent Publication No. 2014-533890 can be cited.

遮光膜作為在量子點感測器及量子點固體攝像元件中使用之濾光器及光學膜亦較佳。又,適合作為賦予遮光功能及防反射功能之構件。作為量子點感測器及量子點固體攝像元件的例子,可以舉出美國專利申請公開第2012/37789號及國際公開第2008/131313號小冊子中記載之例子等。The light shielding film is also preferably used as a filter and an optical film used in quantum dot sensors and quantum dot solid-state imaging devices. In addition, it is suitable as a component that imparts light shielding function and anti-reflection function. As examples of quantum dot sensors and quantum dot solid-state imaging devices, examples described in U.S. Patent Application Publication No. 2012/37789 and International Publication No. 2008/131313 can be cited.

<固體攝像元件及固體攝像裝置> 遮光膜用於固體攝像元件亦較佳。 換言之,本發明的固體攝像元件為具有本發明的遮光膜之固體攝像元件。 作為固體攝像元件包含遮光膜之形態,並沒有特別限制,例如可以舉出如下形態:在基板上具有由構成固體攝像元件(CCD影像感測器、CMOS影像感測器等)的受光區域之複數個光二極體及多晶矽等組成之受光元件且在支撐體的受光元件形成面側(例如受光部以外的部分及/或顏色調整用像素等)或與形成面相反的一側具有遮光膜。 又,將遮光膜用作光衰減膜時,例如,若將光衰減膜配置成一部分光在通過光衰減膜之後入射於受光元件,則能夠改善固體攝像元件的動態範圍。 固體攝像裝置包含上述固體攝像元件。 <Solid-state imaging element and solid-state imaging device> The light-shielding film is preferably used for the solid-state imaging element. In other words, the solid-state imaging element of the present invention is a solid-state imaging element having the light-shielding film of the present invention. The form of the solid-state imaging element including the light-shielding film is not particularly limited, and for example, the following form can be cited: a light-receiving element composed of a plurality of photodiodes and polysilicon constituting the light-receiving area of the solid-state imaging element (CCD image sensor, CMOS image sensor, etc.) is provided on a substrate, and a light-shielding film is provided on the light-receiving element forming surface side of the support (for example, the portion other than the light-receiving portion and/or the color adjustment pixel, etc.) or on the side opposite to the forming surface. Furthermore, when the light shielding film is used as a light attenuation film, for example, if the light attenuation film is arranged so that a part of the light enters the light receiving element after passing through the light attenuation film, the dynamic range of the solid-state imaging element can be improved. The solid-state imaging device includes the above-mentioned solid-state imaging element.

<圖像顯示裝置> 遮光膜適用於圖像顯示裝置亦較佳。 換言之,本發明的圖像顯示裝置為具有本發明的遮光膜之圖像顯示裝置。 作為圖像顯示裝置具有遮光膜之形態,例如,可以舉出將具備包含遮光膜的黑矩陣之濾色器適用於圖像顯示裝置之形態。 接著,對黑矩陣及包含黑矩陣之濾色器進行說明,此外,作為圖像顯示裝置的具體例,對包含此類濾色器之液晶顯示裝置進行說明。 <Image display device> It is also preferable that the light-shielding film is applied to the image display device. In other words, the image display device of the present invention is an image display device having the light-shielding film of the present invention. As a form in which the image display device has a light-shielding film, for example, a form in which a color filter having a black matrix including a light-shielding film is applied to the image display device can be cited. Next, the black matrix and the color filter including the black matrix are explained, and further, as a specific example of the image display device, a liquid crystal display device including such a color filter is explained.

(黑矩陣) 遮光膜包含在黑矩陣亦較佳。黑矩陣有時會包含在濾色器、固體攝像元件及液晶顯示裝置等圖像顯示裝置中。 作為黑矩陣,可以舉出以上說明者;設置於液晶顯示裝置等圖像顯示裝置的周緣部之黑色邊緣;紅、藍及綠的像素之間的格子狀及/或直線狀黑色部分;用於TFT(Thin Film Transistor:薄膜電晶體)遮光的點狀及/或線狀黑色圖案;等。關於該黑矩陣的定義,例如在菅野泰平著“液晶顯示器製造裝置術語辭典”,第2版,NIKKAN KOGYO SHIMBUN, LTD.,1996年,64頁中有記載。 為了提高顯示對比度,又,在使用薄膜電晶體(TFT)之主動矩陣驅動方式的液晶顯示裝置時為了防止由光的漏電流引起的畫質降低,黑矩陣具有高遮光性(以光學密度OD計為3以上)為較佳。 (Black Matrix) It is also preferable that the light shielding film is included in the black matrix. The black matrix is sometimes included in image display devices such as color filters, solid-state imaging devices, and liquid crystal display devices. As black matrices, those described above can be cited; black edges provided at the periphery of image display devices such as liquid crystal display devices; grid-shaped and/or straight-line black portions between red, blue, and green pixels; dot-shaped and/or linear black patterns used for TFT (Thin Film Transistor) light shielding; etc. The definition of the black matrix is described, for example, in "Glossary of Liquid Crystal Display Manufacturing Devices" by Taihei Kanno, 2nd edition, NIKKAN KOGYO SHIMBUN, LTD., 1996, p. 64. In order to improve the display contrast and prevent the degradation of image quality caused by light leakage current when using a thin film transistor (TFT) active matrix driven liquid crystal display device, it is preferred that the black matrix has high light shielding properties (measured in optical density OD of 3 or more).

作為黑矩陣的製造方法,並沒有特別限制,能夠藉由與上述遮光膜的製造方法相同的方法製造。具體而言,能夠在基板上塗布組成物來形成組成物層,進行曝光及顯影來製造圖案狀遮光膜(黑矩陣)。另外,作為遮光膜(黑矩陣)的膜厚,0.1~4.0μm為較佳。The method for manufacturing the black matrix is not particularly limited, and can be manufactured by the same method as the method for manufacturing the above-mentioned light-shielding film. Specifically, a composition layer can be formed by coating a composition on a substrate, and then exposure and development are performed to manufacture a patterned light-shielding film (black matrix). In addition, the film thickness of the light-shielding film (black matrix) is preferably 0.1 to 4.0 μm.

上述基板並沒有特別限制,對可見光(波長400~800nm)具有80%以上的透射率為較佳。作為此類基材的材料,例如,可以舉出鈉鈣玻璃、無鹼玻璃、石英玻璃及硼矽酸玻璃等玻璃;聚酯系樹脂及聚烯烴系樹脂等塑膠等,從耐藥品性及耐熱性的觀點考慮,無鹼玻璃或石英玻璃等為較佳。The substrate is not particularly limited, but preferably has a transmittance of 80% or more for visible light (wavelength 400 to 800 nm). Examples of the material of this substrate include glasses such as sodium calcium glass, alkali-free glass, quartz glass, and borosilicate glass; and plastics such as polyester resins and polyolefin resins. From the perspective of chemical resistance and heat resistance, alkali-free glass or quartz glass is preferred.

(濾色器) 遮光膜被包含在濾色器亦較佳。 作為濾色器包含遮光膜之形態,並沒有特別限制,可以舉出具備基板和上述黑矩陣之濾色器。亦即,能夠例示出具備在形成於基板上之上述黑矩陣的開口部形成之紅色、綠色及藍色的著色像素之濾色器。 (Color filter) It is also preferable that the light-shielding film is included in the color filter. The form of the color filter including the light-shielding film is not particularly limited, and a color filter having a substrate and the above-mentioned black matrix can be cited. That is, a color filter having red, green, and blue colored pixels formed in the opening of the above-mentioned black matrix formed on the substrate can be exemplified.

包含黑矩陣之濾色器例如能夠藉由以下方法製造。 首先,在形成於基板上之圖案狀黑矩陣的開口部形成包含與濾色器的各著色像素對應之顏料之組成物的塗膜(組成物層)。另外,各顏色用組成物並沒有特別限制,能夠使用公知的組成物,在本說明書中說明的組成物中,使用將黑色顏料代替為與各像素對應之著色劑之組成物為較佳。 接著,隔著具有與黑矩陣的開口部對應之圖案之光罩而對組成物層進行曝光。接著,能夠藉由顯影處理去除未曝光部之後,進行烘烤而在黑矩陣的開口部形成著色像素。例如,若利用包含紅色、綠色及藍色顏料之各顏色用組成物進行一系列操作,則能夠製造具有紅色、綠色及藍色像素之濾色器。 A color filter including a black matrix can be manufactured, for example, by the following method. First, a coating (composition layer) containing a composition of pigments corresponding to each colored pixel of the color filter is formed at the opening of a patterned black matrix formed on a substrate. In addition, there is no particular limitation on the composition for each color, and a known composition can be used. Among the compositions described in this specification, a composition in which black pigment is replaced with a colorant corresponding to each pixel is preferably used. Then, the composition layer is exposed through a mask having a pattern corresponding to the opening of the black matrix. Then, after removing the unexposed portion by development processing, baking is performed to form colored pixels at the opening of the black matrix. For example, if a series of operations are performed using color compositions containing red, green, and blue pigments, a color filter having red, green, and blue pixels can be produced.

(液晶顯示裝置) 遮光膜被包含在液晶顯示裝置亦較佳。作為液晶顯示裝置包含遮光膜之形態,並沒有特別限制,可以舉出含有包含已說明的黑矩陣(遮光膜)之濾色器之形態。 (Liquid crystal display device) It is also preferable that a light shielding film is included in a liquid crystal display device. There is no particular limitation on the form of a liquid crystal display device including a light shielding film, and a form including a color filter including the black matrix (light shielding film) described above can be cited.

作為液晶顯示裝置,例如可以舉出具備對置配置之一對基板及封入該等基板之間的液晶化合物之形態。作為上述基板,如作為黑矩陣用基板已說明。As a liquid crystal display device, for example, there can be cited a form having a pair of substrates arranged opposite to each other and a liquid crystal compound sealed between the substrates. As the above-mentioned substrate, it has been described as a black matrix substrate.

作為上述液晶顯示裝置的具體形態,例如,可以舉出從使用者側依序包含偏振片/基板/濾色器/透明電極層/取向膜/液晶層/取向膜/透明電極層/TFT(Thin Film Transistor:薄膜電晶體)元件/基板/偏振片/背光單元之積層體。As a specific form of the above-mentioned liquid crystal display device, for example, there can be cited a laminate including, in order from the user side, polarizer/substrate/color filter/transparent electrode layer/orientation film/liquid crystal layer/orientation film/transparent electrode layer/TFT (Thin Film Transistor) element/substrate/polarizer/backlight unit.

另外,作為液晶顯示裝置,並不限於上述,例如可以舉出“電子顯示器件(佐佐木 昭夫著,Kogyo Chosakai Publishing Co., Ltd.1990年發行)”、“顯示器件(伊吹順章著,Sangyo Tosho Publishing Co., Ltd.1989年發行)”等中記載之液晶顯示裝置。又,例如可以舉出“下一代液晶顯示器技術(內田龍男編輯,Kogyo Chosakai Publishing Co., Ltd,1994年發行)”中所記載之液晶顯示裝置。In addition, as liquid crystal display devices, they are not limited to the above, and for example, liquid crystal display devices described in "Electronic Display Devices (written by Akio Sasaki, published by Kogyo Chosakai Publishing Co., Ltd. in 1990)" and "Display Devices (written by Junaki Ibuki, published by Sangyo Tosho Publishing Co., Ltd. in 1989)" can be cited. Another example is the liquid crystal display device described in "Next Generation Liquid Crystal Display Technology (edited by Ryuo Uchida, published by Kogyo Chosakai Publishing Co., Ltd. in 1994)".

<紅外線感測器> 遮光膜被包含於紅外線感測器亦較佳。 接著,對適用上述紅外線感測器之固體攝像裝置進行說明。 上述固體攝像裝置包含透鏡光學系統、固體攝像元件及紅外發光二極體等。另外,關於固體攝像裝置的各結構,能夠參閱日本特開2011-233983號公報的0032~0036段,該內容被編入到本說明書中。 [實施例] <Infrared sensor> It is also preferable that the light shielding film is included in the infrared sensor. Next, a solid-state imaging device to which the above-mentioned infrared sensor is applied is described. The above-mentioned solid-state imaging device includes a lens optical system, a solid-state imaging element, and an infrared light-emitting diode. In addition, for each structure of the solid-state imaging device, it is possible to refer to paragraphs 0032 to 0036 of Japanese Patent Publication No. 2011-233983, and the content is incorporated into this specification. [Example]

以下,基於實施例對本發明進行進一步詳細說明。以下實施例所示之材料、使用量、比例、處理內容及處理步驟等,只要不脫離本發明的宗旨,則能夠適當變更。因此,本發明的範圍不應被以下所示之實施例限定地解釋。The present invention is further described below in detail based on the embodiments. The materials, usage amounts, ratios, processing contents and processing steps shown in the following embodiments can be appropriately changed as long as they do not deviate from the purpose of the present invention. Therefore, the scope of the present invention should not be limited to the embodiments shown below.

[組成物的製備中使用之各種成分] 以下,對用於製備組成物之各種成分進行詳細說明。 [Various ingredients used in the preparation of the composition] Below, the various ingredients used in the preparation of the composition are described in detail.

〔樹脂A〕 表1中示出表4所示之樹脂A(樹脂A-1~A-15及樹脂RA-1~RA-4)的結構,表2中示出表1所示之樹脂A的各種物性(樹脂中的矽原子含量(質量%)、酸值(mgKOH/g)及雙鍵價(mmol/g))。 [Resin A] Table 1 shows the structure of Resin A (Resin A-1 to A-15 and Resin RA-1 to RA-4) shown in Table 4, and Table 2 shows various physical properties of Resin A shown in Table 1 (Silicon atom content in resin (mass %), acid value (mgKOH/g) and double bond value (mmol/g)).

作為樹脂A-1~A-15及樹脂RA-1~RA-4,使用了合成者。以下,將樹脂A-1的合成例作為一例示出。As resins A-1 to A-15 and resins RA-1 to RA-4, synthesized products were used. Hereinafter, a synthesis example of resin A-1 is shown as an example.

<樹脂A-1的合成> 將甲基丙烯酸3-[三(三甲基矽烷氧基)甲矽烷基]丙基(Tokyo Chemical Industry Co., Ltd.製造)30.0g、甲基丙烯酸(Wako Pure Chemical Industries, Ltd.製造)6.5g進行混合,製備了原料單體溶液。又,製備了混合液A,其混合了相對於上述原料單體的合計質量之2mol%的熱聚合起始劑(FUJIFILM Wako Pure Chemical Corporation製造V-601)、及相對於上述原料單體的合計質量之111質量%的1-甲氧基-2-丙醇。接著,製備上述原料單體混合液與相對於上述原料單體的合計質量為74質量%的1-甲氧基-2-丙醇的混合液B並加熱至80℃之後,經2小時對該混合液B滴加混合液A(滴加聚合)、滴加後以80℃加熱2小時,進一步以90℃加熱3小時。藉由上述操作結束了聚合反應。 反應結束後,在空氣下將四丁基銨乙酸酯(Tokyo Chemical Industry Co., Ltd.製造)0.24g及2,2,6,6,-四甲基哌啶1-氧基(TEMPO)(Tokyo Chemical Industry Co., Ltd.製造)0.23g加入到上述聚合溶液之後,滴加了4-羥基丙烯酸丁酯縮水甘油醚(Mitsubishi Chemical Corporation製造)3.5g。 結束滴加後,在空氣下,且在90℃下繼續反應48小時之後,藉由測量酸值來確認反應結束,合成了樹脂A-1。所獲得之樹脂A-1的重量平均分子量(Mw)為37,000。 <Synthesis of Resin A-1> 30.0 g of 3-[tri(trimethylsiloxy)silyl]propyl methacrylate (manufactured by Tokyo Chemical Industry Co., Ltd.) and 6.5 g of methacrylic acid (manufactured by Wako Pure Chemical Industries, Ltd.) were mixed to prepare a raw material monomer solution. In addition, a mixed solution A was prepared by mixing 2 mol% of a thermal polymerization initiator (V-601 manufactured by FUJIFILM Wako Pure Chemical Corporation) with 111% by mass of 1-methoxy-2-propanol with respect to the total mass of the raw material monomers. Next, a mixed solution B of the raw material monomer mixed solution and 74 mass % of 1-methoxy-2-propanol relative to the total mass of the raw material monomers was prepared and heated to 80°C, and then the mixed solution A was added dropwise to the mixed solution B over 2 hours (dropwise polymerization), and then heated at 80°C for 2 hours, and further heated at 90°C for 3 hours. The polymerization reaction was terminated by the above operation. After the reaction was completed, 0.24 g of tetrabutylammonium acetate (manufactured by Tokyo Chemical Industry Co., Ltd.) and 0.23 g of 2,2,6,6-tetramethylpiperidinyl 1-oxyl (TEMPO) (manufactured by Tokyo Chemical Industry Co., Ltd.) were added to the above polymerization solution under air, and 3.5 g of 4-hydroxybutyl acrylate glycidyl ether (manufactured by Mitsubishi Chemical Corporation) was added dropwise. After the addition was completed, the reaction was continued at 90°C in air for 48 hours, and the acid value was measured to confirm the completion of the reaction, thereby synthesizing Resin A-1. The weight average molecular weight (Mw) of the obtained Resin A-1 was 37,000.

<樹脂A-2~A-15及樹脂RA-1~RA-4> 關於樹脂A-2~A-15及樹脂RA-1~RA-4,除了變更原料單體的種類及配比這一點以外,以與樹脂A-1的合成例相同的順序進行了合成。 樹脂A-2~A-15及樹脂RA-1~RA-4的重量平均分子量(Mw)在18,000~45,000的範圍。 <Resins A-2 to A-15 and Resins RA-1 to RA-4> Resins A-2 to A-15 and Resins RA-1 to RA-4 were synthesized in the same procedure as the synthesis example of Resin A-1 except that the types and proportions of the raw material monomers were changed. The weight average molecular weight (Mw) of Resins A-2 to A-15 and Resins RA-1 to RA-4 was in the range of 18,000 to 45,000.

以下,示出表1及表2。 表2中的“樹脂中的矽原子含量(質量%)”表示相對於樹脂A的總質量的矽原子的含量(質量%)。 Tables 1 and 2 are shown below. The "Silicon atom content (mass %) in resin" in Table 2 indicates the content (mass %) of silicon atoms relative to the total mass of resin A.

[表1] [Table 1]

[表2] [Table 2]

[表3] 表2 樹脂中的矽原子含量 (質量%) 酸值 (mgKOH/g) C=C價 (mmol/g) A-1 19.9 81.4 0.44 A-2 13.3 74.7 0.23 A-3 13.8 63.7 0.32 A-4 17.1 67.0 0.35 A-5 17.1 60.9 0.24 A-6 11.5 60.7 0.23 A-7 18.6 97.7 0.47 A-8 19.9 81.4 0.44 A-9 19.9 81.4 0.44 A-10 19.9 81.4 0.44 A-11 18.6 97.7 0.47 A-12 18.6 97.7 0.47 A-13 18.6 102.9 0.35 A-14 18.6 97.7 0.35 A-15 18.6 97.7 0.35 RA-1 8.5 130.3 0.17 RA-2 20.2 26.7 0.33 RA-3 0.0 16.3 0.0 RA-4 0.0 228.0 0.0 [table 3] Table 2 Silicon atom content in resin (mass %) Acid value (mgKOH/g) C=C value (mmol/g) A-1 19.9 81.4 0.44 A-2 13.3 74.7 0.23 A-3 13.8 63.7 0.32 A-4 17.1 67.0 0.35 A-5 17.1 60.9 0.24 A-6 11.5 60.7 0.23 A-7 18.6 97.7 0.47 A-8 19.9 81.4 0.44 A-9 19.9 81.4 0.44 A-10 19.9 81.4 0.44 A-11 18.6 97.7 0.47 A-12 18.6 97.7 0.47 A-13 18.6 102.9 0.35 A-14 18.6 97.7 0.35 A-15 18.6 97.7 0.35 RA-1 8.5 130.3 0.17 RA-2 20.2 26.7 0.33 RA-3 0.0 16.3 0.0 RA-4 0.0 228.0 0.0

〔樹脂B〕 以下,示出表3所示之樹脂B(樹脂B-1~B-2)。 ·樹脂B-1:下述結構。酸值為57.2mgKOH/g,玻璃轉移溫度為33℃,重量平均分子量為30,000。 另外,下述結構式中,標註於主鏈的括號內之數值的單位為質量%,標註於側鏈的括號內之值相當於平均加成數。 [Resin B] The following are resins B (resins B-1 to B-2) shown in Table 3. · Resin B-1: The following structure. Acid value is 57.2 mgKOH/g, glass transition temperature is 33°C, and weight average molecular weight is 30,000. In the following structural formula, the unit of the numerical value in the brackets attached to the main chain is mass %, and the value in the brackets attached to the side chain is equivalent to the average addition number.

[化學式30] [Chemical formula 30]

·樹脂B-2:下述結構。酸值為55.7mgKOH/g,玻璃轉移溫度為55℃,重量平均分子量為18,000。 另外,下述結構式中,標註於主鏈的括號內之數值的單位為質量%,標註於側鏈的括號內之值相當於平均加成數。 · Resin B-2: The following structure. Acid value is 55.7 mgKOH/g, glass transition temperature is 55°C, and weight average molecular weight is 18,000. In addition, in the following structural formula, the unit of the value in the brackets of the main chain is mass %, and the value in the brackets of the side chain is equivalent to the average addition number.

[化學式31] [Chemical formula 31]

〔單體〕 以下,示出表4所示之單體(單體C-1~C-3)。 ·C-1:NK Ester A-TMMT(SHIN-NAKAMURA CHEMICAL Co., Ltd製造,新戊四醇四丙烯酸酯) ·C-2:KAYARAD DPHA(Nippon Kayaku Co., Ltd.製造,二新戊四醇五丙烯酸酯與二新戊四醇六丙烯酸酯的混合物) ·C-3:NK Ester A-DPH-12E(SHIN-NAKAMURA CHEMICAL Co., Ltd製造之乙氧基化二新戊四醇聚丙烯酸酯) [Monomer] The following are monomers shown in Table 4 (monomers C-1 to C-3). ·C-1: NK Ester A-TMMT (manufactured by SHIN-NAKAMURA CHEMICAL Co., Ltd., neopentatriol tetraacrylate) ·C-2: KAYARAD DPHA (manufactured by Nippon Kayaku Co., Ltd., a mixture of dipentatriol pentaacrylate and dipentatriol hexaacrylate) ·C-3: NK Ester A-DPH-12E (ethoxylated dipentatriol polyacrylate manufactured by SHIN-NAKAMURA CHEMICAL Co., Ltd.)

〔顏料〕 以下,示出表3所示之顏料(顏料D-1~D-4)。 ·D-1:TiON(氮氧化鈦:黑色顏料) D-1為藉由以下方法合成之合成品。 <D-1的合成> 稱量平均粒徑為15nm的酸化鈦MT-150A(產品名稱:TAYCA CORPORATION製造)(100g)、BET表面積為300m 2/g的二氧化矽粒子AEROGIL(註冊商標)300/30(EVONIK公司製造)(25g)及分散劑Disperbyk190(產品名稱:BYK Chemie公司製造)(100g),加入離子電交換水(71g)並使用Kurabo Industries Ltd.製造MAZERSTAR KK-400W以1360rpm的公轉轉速、1047rpm的自轉轉速進行20分鐘處理,藉此獲得了均勻的混合物水溶液。 將該水溶液填充於石英容器,使用小型旋轉窯(Motoyama公司製造)在氧氣環境中加熱至920℃之後,用氮氣置換環境,在相同溫度下以100mL/min流過氨氣5小時,藉此實施了氮化還原處理。 結束後,用乳缽粉碎所回收的粉末,獲得了包含Si原子且比表面積73m 2/g的粉末狀TiON〔包含鈦黑粒子及Si原子之被分散體〕。 [Pigments] The following are pigments (pigments D-1 to D-4) shown in Table 3. D-1: TiON (titanium oxynitride: black pigment) D-1 is a synthetic product synthesized by the following method. <Synthesis of D-1> Titanium oxide MT-150A (product name: manufactured by TAYCA CORPORATION) with an average particle size of 15 nm (100 g), silica particles AEROGIL (registered trademark) 300/30 (manufactured by EVONIK) with a BET surface area of 300 m 2 /g (25 g), and dispersant Disperbyk 190 (product name: manufactured by BYK Chemie) (100 g) were weighed, ion-exchanged water (71 g) was added, and the mixture was treated for 20 minutes using MAZERSTAR KK-400W manufactured by Kurabo Industries Ltd. at an orbital speed of 1360 rpm and an autorotational speed of 1047 rpm to obtain a uniform aqueous mixture solution. The aqueous solution was filled into a quartz container and heated to 920°C in an oxygen atmosphere using a small rotary kiln (produced by Motoyama Co., Ltd.). The atmosphere was replaced with nitrogen and ammonia gas was passed through at 100 mL/min for 5 hours at the same temperature to perform a nitriding reduction treatment. After completion, the recovered powder was crushed with a mortar to obtain a powdered TiON (a dispersed body containing titanium black particles and Si atoms) containing Si atoms and having a specific surface area of 73 m2 /g.

·D-2:TiN(氮化鈦:黑色顏料) D-2除了增加氨氣量來將氧元素全部取代為氮元素以外,以與上述D-1(TiON)相同的方法合成之合成品。 ·D-2: TiN (titanium nitride: black pigment) D-2 is a synthetic product synthesized in the same way as D-1 (TiON) above, except that the amount of ammonia is increased to replace all oxygen elements with nitrogen elements.

·D-3:TiO 2(氧化鈦:白色顏料) ISHIHARA SANGYO KAISHA, LTD.製造、TTO-51 ·D-4:CB(碳黑:黑色顏料)Mitsubishi Chemical Corporation製造、#2300 ·D-3: TiO 2 (titanium oxide: white pigment) manufactured by ISHIHARA SANGYO KAISHA, LTD., TTO-51 ·D-4: CB (carbon black: black pigment) manufactured by Mitsubishi Chemical Corporation, #2300

〔光聚合起始劑〕 以下,示出表4所示之光聚合起始劑(光聚合起始劑E-1~E-3)。 ·E-1:IRGACURE OXE02(BASF公司製造,肟酯系聚合起始劑) ·E-2:ADEKA ARKLS NCI-831E(ADEKA CORPORATION製造、肟酯系聚合起始劑) ·E-3:下述結構的化合物(肟酯系聚合起始劑) [Photopolymerization initiator] Below, the photopolymerization initiators shown in Table 4 (photopolymerization initiators E-1 to E-3) are shown. ·E-1: IRGACURE OXE02 (manufactured by BASF, oxime ester polymerization initiator) ·E-2: ADEKA ARKLS NCI-831E (manufactured by ADEKA CORPORATION, oxime ester polymerization initiator) ·E-3: Compounds of the following structures (oxime ester polymerization initiators)

[化學式32] [Chemical formula 32]

〔黏合劑〕 以下,示出表4所示之合劑(黏合劑F-1~F-3)。 ·F-1:下述結構的樹脂。附註於主鏈之數值為莫耳比,重量平均分子量為11,000。 ·F-2:下述結構的樹脂。附註於主鏈之數值為莫耳比,重量平均分子量為30,000。 [Binder] The following are the combinations shown in Table 4 (binders F-1 to F-3). ·F-1: Resin with the following structure. The values attached to the main chain are molar ratios, and the weight average molecular weight is 11,000. ·F-2: Resin with the following structure. The values attached to the main chain are molar ratios, and the weight average molecular weight is 30,000.

[化學式33] [Chemical formula 33]

·F-3:卡多樹脂V-259ME(NIPPON STEEL CORPORATION.製造)·F-3: Cardoline V-259ME (manufactured by NIPPON STEEL CORPORATION)

〔界面活性劑〕 以下,示出表4所示之界面活性劑(界面活性劑W-1)。 ·W-1:KF6001(Shin-Etsu Chemical Co., Ltd.製造) ·W-2:FZ-2122(DOW TORAY CO., LTD.製造) ·W-3:下述界面活性劑(重量平均分子量3000、式中,n表示1以上的整數。) [Surfactant] The following is a surfactant shown in Table 4 (surfactant W-1). ·W-1: KF6001 (manufactured by Shin-Etsu Chemical Co., Ltd.) ·W-2: FZ-2122 (manufactured by DOW TORAY CO., LTD.) ·W-3: The following surfactant (weight average molecular weight 3000, where n represents an integer greater than 1.)

[化學式34] [Chemical formula 34]

〔溶劑〕 以下,示出表3及表4所示之溶劑。 ·PGMEA:丙二醇單甲醚乙酸酯 ·乙酸丁酯 ·PGME:丙二醇1-單甲基醚 ·環戊酮 [Solvent] The following are the solvents shown in Tables 3 and 4. ·PGMEA: Propylene glycol monomethyl ether acetate ·Butyl acetate ·PGME: Propylene glycol 1-monomethyl ether ·Cyclopentanone

〔顏料分散液的製備〕 以表3中示出之質量比混合了表3所示之成分之後,加入直徑0.3mm的二氧化鋯珠230質量份,使用塗料攪拌器進行5小時的分散處理,藉由過濾分離微珠而製造了各顏料分散液(顏料分散液1~8)。 以下,示出表3。 [Preparation of pigment dispersion] After mixing the components shown in Table 3 at the mass ratio shown in Table 3, 230 parts by mass of 0.3 mm diameter zirconium dioxide beads were added, and dispersion treatment was performed for 5 hours using a paint agitator. The beads were separated by filtration to prepare each pigment dispersion (pigment dispersion 1 to 8). Table 3 is shown below.

[表4] 表3 顏料 樹脂B 溶劑 種類 質量份 種類 質量份 種類 質量份 顏料分散液1 D-1 25.0 B-1 7.5 PGMEA/乙酸丁酯 40.5/27.0 顏料分散液2 D-1 25.0 B-2 7.5 PGMEA/乙酸丁酯 40.5/27.0 顏料分散液3 D-2 25.0 B-1 7.5 PGMEA/乙酸丁酯 40.5/27.0 顏料分散液4 D-2 25.0 B-2 7.5 PGMEA/乙酸丁酯 40.5/27.0 顏料分散液5 D-1/D-3 23.0/2.0 B-1 7.5 PGMEA/乙酸丁酯 40.5/27.0 顏料分散液6 D-1/D-4 23.0/2.0 B-1 7.5 PGMEA/乙酸丁酯 40.5/27.0 顏料分散液7 D-2/D-3 23.0/2.0 B-2 7.5 PGMEA/乙酸丁酯 40.5/27.0 顏料分散液8 D-2/D-4 23.0/2.0 B-2 7.5 PGMEA/乙酸丁酯 40.5/27.0 [Table 4] table 3 Pigments Resin B Solvent Type Quality Type Quality Type Quality Pigment dispersion 1 D-1 25.0 B-1 7.5 PGMEA/Butyl Acetate 40.5/27.0 Pigment dispersion 2 D-1 25.0 B-2 7.5 PGMEA/Butyl Acetate 40.5/27.0 Pigment dispersion 3 D-2 25.0 B-1 7.5 PGMEA/Butyl Acetate 40.5/27.0 Pigment dispersion 4 D-2 25.0 B-2 7.5 PGMEA/Butyl Acetate 40.5/27.0 Pigment dispersion 5 D-1/D-3 23.0/2.0 B-1 7.5 PGMEA/Butyl Acetate 40.5/27.0 Pigment dispersion 6 D-1/D-4 23.0/2.0 B-1 7.5 PGMEA/Butyl Acetate 40.5/27.0 Pigment dispersion 7 D-2/D-3 23.0/2.0 B-2 7.5 PGMEA/Butyl Acetate 40.5/27.0 Pigment dispersion 8 D-2/D-4 23.0/2.0 B-2 7.5 PGMEA/Butyl Acetate 40.5/27.0

[組成物的製備] 以表4中示出之配合量(質量份)混合下述表4所示之成分而製備了實施例及比較例的各組成物。 [Preparation of compositions] The components shown in Table 4 below were mixed in the amounts (parts by mass) shown in Table 4 to prepare the compositions of the Examples and Comparative Examples.

以下,示出表4。Table 4 is shown below.

[表5] 表4 (其1) 顏料分散液 樹脂A 單體 光聚合起始劑 黏合劑 界面活性劑 溶劑 種類 質量份 種類 質量份 種類 質量份 種類 質量份 種類 質量份 種類 質量份 種類 質量份 實施例1 顏料分散液1 53.48 A-1 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 實施例2 顏料分散液2 53.48 A-2 6.05 C-2 16.00 E-1 E-2 1.55 1.00 F-3 12.36 W-1 0.2 PGMEA 9.36 實施例3 顏料分散液2 53.48 A-3 6.05 C-1 C-3 8.00 8.00 E-3 2.55 F-1 F-2 10.00 2.36 W-1 0.2 PGMEA 9.36 實施例4 顏料分散液3 48.48 A-4 11.05 C-1 17.05 E-1 1.50 F-1 12.36 W-1 0.2 PGMEA 9.36 實施例5 顏料分散液4 60.48 A-1 6.05 C-1 14.00 E-1 5.00 F-3 4.91 W-1 0.2 PGMEA 9.36 實施例6 顏料分散液7 53.48 A-5 6.05 C-1 C-2 12.00 4.00 E-1 2.55 F-2 F-3 4.00 8.36 W-1 0.2 PGMEA 9.36 實施例7 顏料分散液6 53.48 A-6 6.05 C-3 17.05 E-2 1.50 F-1 F-2 4.00 8.36 W-1 0.2 PGMEA 9.36 實施例8 顏料分散液2 53.48 A-7 6.05 C-1 16.00 E-3 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 實施例9 顏料分散液5 53.48 A-8 6.05 C-1 C-3 8.00 8.00 E-1 E-2 1.55 1.00 F-1 12.36 W-1 0.2 PGMEA 9.36 實施例10 顏料分散液6 53.48 A-9 6.05 C-2 16.00 E-2 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 實施例11 顏料分散液1 53.48 A-10 6.05 C-2 16.00 E-2 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 實施例12 顏料分散液2 53.48 A-11 6.05 C-3 16.00 E-2 2.55 F-3 12.36 W-1 0.2 PGMEA 9.36 實施例13 顏料分散液6 53.48 A-12 6.05 C-1 16.00 E-3 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 實施例14 顏料分散液4 53.48 A-13 6.05 C-2 16.00 E-1 2.55 F-3 12.36 W-1 0.2 PGMEA 9.36 實施例15 顏料分散液5 53.48 A-14 6.05 C-3 16.00 E-2 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 實施例16 顏料分散液8 53.48 A-15 6.05 C-2 16.00 E-2 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 [table 5] Table 4 (Part 1) Pigment dispersion Resin A Single Photopolymerization initiator Adhesive Surfactant Solvent Type Quality Type Quality Type Quality Type Quality Type Quality Type Quality Type Quality Embodiment 1 Pigment dispersion 1 53.48 A-1 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 Embodiment 2 Pigment dispersion 2 53.48 A-2 6.05 C-2 16.00 E-1 E-2 1.55 1.00 F-3 12.36 W-1 0.2 PGMEA 9.36 Embodiment 3 Pigment dispersion 2 53.48 A-3 6.05 C-1 C-3 8.00 8.00 E-3 2.55 F-1 F-2 10.00 2.36 W-1 0.2 PGMEA 9.36 Embodiment 4 Pigment dispersion 3 48.48 A-4 11.05 C-1 17.05 E-1 1.50 F-1 12.36 W-1 0.2 PGMEA 9.36 Embodiment 5 Pigment dispersion 4 60.48 A-1 6.05 C-1 14.00 E-1 5.00 F-3 4.91 W-1 0.2 PGMEA 9.36 Embodiment 6 Pigment dispersion 7 53.48 A-5 6.05 C-1 C-2 12.00 4.00 E-1 2.55 F-2 F-3 4.00 8.36 W-1 0.2 PGMEA 9.36 Embodiment 7 Pigment dispersion 6 53.48 A-6 6.05 C-3 17.05 E-2 1.50 F-1 F-2 4.00 8.36 W-1 0.2 PGMEA 9.36 Embodiment 8 Pigment dispersion 2 53.48 A-7 6.05 C-1 16.00 E-3 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 Embodiment 9 Pigment dispersion 5 53.48 A-8 6.05 C-1 C-3 8.00 8.00 E-1 E-2 1.55 1.00 F-1 12.36 W-1 0.2 PGMEA 9.36 Embodiment 10 Pigment dispersion 6 53.48 A-9 6.05 C-2 16.00 E-2 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 Embodiment 11 Pigment dispersion 1 53.48 A-10 6.05 C-2 16.00 E-2 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 Embodiment 12 Pigment dispersion 2 53.48 A-11 6.05 C-3 16.00 E-2 2.55 F-3 12.36 W-1 0.2 PGMEA 9.36 Embodiment 13 Pigment dispersion 6 53.48 A-12 6.05 C-1 16.00 E-3 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 Embodiment 14 Pigment dispersion 4 53.48 A-13 6.05 C-2 16.00 E-1 2.55 F-3 12.36 W-1 0.2 PGMEA 9.36 Embodiment 15 Pigment dispersion 5 53.48 A-14 6.05 C-3 16.00 E-2 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 Embodiment 16 Pigment dispersion 8 53.48 A-15 6.05 C-2 16.00 E-2 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36

[表6] 表4 (其2) 顏料分散液 樹脂A 單體 光聚合起始劑 黏合劑 界面活性劑 溶劑 種類 質量份 種類 質量份 種類 質量份 種類 質量份 種類 質量份 種類 質量份 種類 質量份 實施例17 顏料分散液2 53.48 A-3 4.00 C-1 C-3 8.00 8.00 E-3 2.55 F-3 14.41 W-1 0.2 PGMEA 9.36 實施例18 顏料分散液5 53.48 A-5 8.05 C-1 C-2 4.00 4.00 E-1 2.55 F-1 18.36 W-1 0.2 PGMEA 9.36 實施例19 顏料分散液1 53.48 A-1 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-2 0.2 PGMEA 9.36 實施例20 顏料分散液2 53.48 A-1 6.25 C-1 16.00 E-1 2.55 F-1 12.36 - - PGMEA 9.36 實施例21 顏料分散液1 53.48 A-10 6.05 C-2 16.00 E-2 2.55 F-1 12.36 W-2 0.2 PGMEA PGME 7.36 2.0 實施例22 顏料分散液7 53.48 A-5 6.05 C-1 C-2 12.00 4.00 E-1 2.55 F-2 F-3 4.00 8.36 W-1 0.2 PGMEA 環戊酮 3.36 6.0 實施例23 顏料分散液6 53.48 A-12 6.25 C-1 16.00 E-3 2.55 F-1 12.36 - - PGMEA 乙酸丁酯 4.68 4.68 實施例24 顏料分散液6 53.48 A-12 6.05 C-1 16.00 E-3 2.55 F-1 12.36 W-1 0.2 環戊酮 9.36 實施例25 顏料分散液5 53.48 A-14 6.05 C-3 16.00 E-2 2.55 F-1 12.36 W-3 0.2 乙酸丁酯 PGME 7.36 2.0 比較例1 顏料分散液3 53.48 RA-1 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 比較例2 顏料分散液3 53.48 RA-2 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 比較例3 顏料分散液3 53.48 RA-3 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 比較例4 顏料分散液3 53.48 RA-4 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 [Table 6] Table 4 (Part 2) Pigment dispersion Resin A Single Photopolymerization initiator Adhesive Surfactant Solvent Type Quality Type Quality Type Quality Type Quality Type Quality Type Quality Type Quality Embodiment 17 Pigment dispersion 2 53.48 A-3 4.00 C-1 C-3 8.00 8.00 E-3 2.55 F-3 14.41 W-1 0.2 PGMEA 9.36 Embodiment 18 Pigment dispersion 5 53.48 A-5 8.05 C-1 C-2 4.00 4.00 E-1 2.55 F-1 18.36 W-1 0.2 PGMEA 9.36 Embodiment 19 Pigment dispersion 1 53.48 A-1 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-2 0.2 PGMEA 9.36 Embodiment 20 Pigment dispersion 2 53.48 A-1 6.25 C-1 16.00 E-1 2.55 F-1 12.36 - - PGMEA 9.36 Embodiment 21 Pigment dispersion 1 53.48 A-10 6.05 C-2 16.00 E-2 2.55 F-1 12.36 W-2 0.2 PGMEA PGME 7.36 2.0 Embodiment 22 Pigment dispersion 7 53.48 A-5 6.05 C-1 C-2 12.00 4.00 E-1 2.55 F-2 F-3 4.00 8.36 W-1 0.2 PGMEA Cyclopentanone 3.36 6.0 Embodiment 23 Pigment dispersion 6 53.48 A-12 6.25 C-1 16.00 E-3 2.55 F-1 12.36 - - PGMEA Butyl Acetate 4.68 4.68 Embodiment 24 Pigment dispersion 6 53.48 A-12 6.05 C-1 16.00 E-3 2.55 F-1 12.36 W-1 0.2 Cyclopentanone 9.36 Embodiment 25 Pigment dispersion 5 53.48 A-14 6.05 C-3 16.00 E-2 2.55 F-1 12.36 W-3 0.2 PGME Butyl Acetate 7.36 2.0 Comparison Example 1 Pigment dispersion 3 53.48 RA-1 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 Comparison Example 2 Pigment dispersion 3 53.48 RA-2 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 Comparison Example 3 Pigment dispersion 3 53.48 RA-3 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36 Comparison Example 4 Pigment dispersion 3 53.48 RA-4 6.05 C-1 16.00 E-1 2.55 F-1 12.36 W-1 0.2 PGMEA 9.36

[評價結果] 實施例及比較例的各組成物的評價藉由以下方法進行。將結果示於下述表4中。 〔反射率的評價〕 藉由旋塗法將實施例及比較例的各組成物塗布於玻璃基板上,並製作了曝光後的膜厚成為5.0μm的塗膜。在90℃下進行120秒的預烘烤之後,使用UX-1000SM-EH04(Ushio Inc.製造),藉由高壓汞燈(燈功率為50mW/cm 2),以1000mJ/cm 2的曝光量,對基板整面進行了曝光。對曝光後的基板以220℃進行300秒的後烘烤,藉此獲得了帶硬化膜的基板。 針對所製作之帶硬化膜的基板,利用JASCO Corporation製造之分光器V7200(商品名)的VAR單元,以5°的入射角入射波長350~1200nm的光,依據所獲得之角度5°的反射角的反射率光譜進行了評價。具體而言,將波長940nm的光的反射率作為評價基準,按照下述分類進行了評價。另外,實用上,“3”以上的評價為較佳。將結果示於表5中的“低反射化”欄。 [Evaluation results] The evaluation of each composition of the embodiment and the comparative example was performed by the following method. The results are shown in Table 4 below. [Evaluation of reflectivity] Each composition of the embodiment and the comparative example was applied to a glass substrate by spin coating, and a coating having a film thickness of 5.0 μm after exposure was prepared. After pre-baking at 90°C for 120 seconds, the entire surface of the substrate was exposed using a UX-1000SM-EH04 (manufactured by Ushio Inc.) with a high-pressure mercury lamp (lamp power of 50 mW/ cm2 ) at an exposure amount of 1000 mJ/ cm2 . The exposed substrate was post-baked at 220°C for 300 seconds to obtain a substrate with a cured film. The prepared substrate with a cured film was evaluated based on the reflectance spectrum at a reflection angle of 5° obtained by injecting light with a wavelength of 350 to 1200 nm at an incident angle of 5° using the VAR unit of the spectrometer V7200 (trade name) manufactured by JASCO Corporation. Specifically, the reflectance of light with a wavelength of 940 nm was used as the evaluation standard, and the evaluation was performed according to the following classification. In addition, in practical terms, an evaluation of "3" or above is preferred. The results are shown in the "Low Reflection" column in Table 5.

<評價標準> “4”:反射率未達4% “3”:反射率為4%以上且未達5% “2”:反射率為5%以上且未達6% “1”:反射率為6%以上 <Evaluation criteria> "4": Reflectivity less than 4% "3": Reflectivity 4% or more and less than 5% "2": Reflectivity 5% or more and less than 6% "1": Reflectivity 6% or more

〔圖案密接性的評價〕 使用旋塗機,將實施例及比較例的各組成物塗布於預先噴射了六甲基二矽氮烷之8英吋的矽晶圓上,並製作了曝光後的塗膜成為5.0μm的塗膜。接著,在100℃下,對所獲得之塗膜實施120秒鐘的預烘烤,製作了帶膜的基板。 而且,使用i射線步進機曝光裝置FPA-i5+(Canon Inc.製造),以365nm的波長,經由具有50μm見方的島形圖案之遮罩(具有25個50μm見方的開口部之遮罩)以50~1,700mJ/cm 2的曝光量,對所製作之帶膜的基板中的膜進行了照射。曝光後,使用鹼顯影液CD-2000(FUJIFILM Electronic Materials Co., Ltd製造),以25℃且40秒鐘的條件進行了顯影。然後,在流水下沖洗30秒鐘之後,進行噴霧乾燥,從而獲得了帶硬化膜的基板。 關於所獲得之50μm見方的島形圖案,使用掃描式電子顯微鏡(Hitachi, Ltd.製造之S-9220),從圖案上方進行觀察,測量了所獲得之圖案的數量。求出50μm見方的島形圖案全部密接時所需要的最小曝光量,按照下述分類評價了密接性。另外,實用上,“3”以上的評價為較佳。將結果示於表5中的“密接性”欄。 [Evaluation of pattern adhesion] Using a spin coater, each composition of the embodiment and the comparative example was applied to an 8-inch silicon wafer pre-sprayed with hexamethyldisilazane, and a coating film of 5.0 μm was prepared after exposure. Then, the obtained coating film was pre-baked at 100°C for 120 seconds to prepare a substrate with a film. Furthermore, using an i-ray stepper exposure device FPA-i5+ (manufactured by Canon Inc.), the film in the prepared substrate with a film was irradiated at a wavelength of 365 nm through a mask with a 50 μm square island pattern (a mask with 25 50 μm square openings) at an exposure dose of 50 to 1,700 mJ/ cm2 . After exposure, the substrate was developed at 25°C for 40 seconds using an alkaline developer CD-2000 (manufactured by FUJIFILM Electronic Materials Co., Ltd.). After rinsing under running water for 30 seconds, the substrate was spray dried to obtain a substrate with a cured film. The obtained 50μm square island pattern was observed from above using a scanning electron microscope (S-9220 manufactured by Hitachi, Ltd.) to measure the number of patterns obtained. The minimum exposure required for all 50μm square island patterns to be closely attached was determined, and the adhesion was evaluated according to the following classification. In addition, in practice, an evaluation of "3" or above is better. The results are shown in the "Adhesion" column in Table 5.

<評價標準> “4”:最小曝光量為900mJ/cm 2以下。 “3”:最小曝光量超過900mJ/cm 2且1700mJ/cm 2以下。 “2”:以50~1700mJ/cm 2的曝光量,能夠形成至少1個50μm見方的島形圖案,但無法形成所有的圖案。 “1”:以50~1700mJ/cm 2的曝光量未能夠形成50μm見方的島形圖案。 <Evaluation criteria>"4": Minimum exposure is 900mJ/ cm2 or less. "3": Minimum exposure is more than 900mJ/ cm2 and less than 1700mJ/ cm2 . "2": At least one 50μm square island pattern can be formed with an exposure of 50 to 1700mJ/ cm2 , but all patterns cannot be formed. "1": At an exposure of 50 to 1700mJ/ cm2 , an island pattern of 50μm square cannot be formed.

〔顯影殘渣(未曝光部殘渣)的評價〕 使用旋塗機,將實施例及比較例的各組成物塗布於預先噴射了六甲基二矽氮烷之8英吋的矽晶圓上,並製作了曝光後的塗膜成為5.0μm的塗膜。接著,在100℃下,對所獲得之塗膜實施120秒鐘的預烘烤,製作了帶膜的基板。 而且,使用i射線步進機曝光裝置FPA-3000i5+(Canon Inc.製造),經由具有50μm的線與空間之圖案遮罩,以50~1,700mJ/cm 2的曝光量對所製作之帶膜的基板中的膜照射了波長365nm的光。接著,使用60%CD-2000(FUJIFILM Electronic MaterialsCo., Ltd.製造)顯影液,以25℃下60秒鐘的條件下對曝光後的膜(硬化膜)進行顯影,獲得了圖案狀的硬化膜。然後,用流水將圖案狀的硬化膜沖洗了20秒鐘之後,進行了風乾。 上述曝光步驟中,將照射光之區域的顯影後的圖案線寬成為50μm以上之最小曝光量設為曝光靈敏度,並將該曝光靈敏度設為初始的曝光靈敏度。 將以顯影後的圖案線寬成為50μm以上的最小曝光量獲得之硬化膜,按每一基板在220℃的烘箱中加熱了1小時。在加熱硬化膜之後,在基板上的曝光步驟中,用SEM(Scanning Electron Microscope:掃描電子顯微鏡、倍率:20000倍)觀察未照射有光之區域(未曝光部)中存在之殘渣數,按照下述分類評價了顯影殘渣(未曝光部殘渣)。另外,實用上,“3”以上的評價為較佳。將結果示於表5中的“殘渣性能”欄。 [Evaluation of development residue (residue in unexposed area)] Using a spin coater, each composition of the embodiment and the comparative example was applied to an 8-inch silicon wafer pre-sprayed with hexamethyldisilazane, and a coating film after exposure was prepared to be 5.0μm. Then, the obtained coating film was pre-baked at 100°C for 120 seconds to prepare a substrate with a film. Furthermore, using an i-ray stepper exposure device FPA-3000i5+ (manufactured by Canon Inc.), the film in the prepared substrate with a film was irradiated with light of a wavelength of 365nm at an exposure amount of 50 to 1,700mJ/ cm2 through a pattern mask with 50μm lines and spaces. Next, the exposed film (cured film) was developed using 60% CD-2000 (manufactured by FUJIFILM Electronic Materials Co., Ltd.) developer at 25°C for 60 seconds to obtain a patterned cured film. The patterned cured film was then rinsed with running water for 20 seconds and air-dried. In the above exposure step, the minimum exposure amount at which the line width of the pattern after development in the area irradiated with light becomes 50μm or more was set as the exposure sensitivity, and the exposure sensitivity was set as the initial exposure sensitivity. The cured film obtained with the minimum exposure amount at which the line width of the pattern after development becomes 50μm or more was heated in an oven at 220°C for 1 hour per substrate. After the film was cured by heat, the amount of residue in the area not irradiated with light (unexposed area) was observed in the exposure step on the substrate using SEM (Scanning Electron Microscope, magnification: 20,000 times), and the development residue (unexposed area residue) was evaluated according to the following classification. In addition, for practical purposes, an evaluation of "3" or above is preferred. The results are shown in the "Residue Performance" column in Table 5.

<評價標準> “4”:未形成圖案,在未曝光部完全沒有觀察到殘渣。 “3”:未形成圖案,在未曝光部1.0μm見方處觀察到1~10個殘渣。 “2”:未形成圖案,在未曝光部1.0μm見方處觀察到11個以上的殘渣。 “1”:顯影不良且未形成圖案。 <Evaluation criteria> "4": No pattern was formed, and no residue was observed in the unexposed part. "3": No pattern was formed, and 1 to 10 residues were observed in the unexposed part with a size of 1.0 μm square. "2": No pattern was formed, and more than 11 residues were observed in the unexposed part with a size of 1.0 μm square. "1": Poor development and no pattern was formed.

〔保存穩定性的評價〕 關於實施例及比較例的各組成物,使用TOKI SANGYO CO., LTD.製造之“RE-85L”,測量了在剛製備後的組成物的黏度及在45℃的環境下靜置3天之後的組成物的黏度。另外,黏度測量在溫度調整為25℃之狀態下實施。計算靜置前後的黏度差(ΔVis)的數值,按照下述區分評價了保存穩定性。可以認為黏度差(ΔVis)的數值越小,保存穩定性越良好。將結果示於表5中的“保存穩定性”欄。 [Evaluation of storage stability] For each composition of the embodiment and comparative example, the viscosity of the composition immediately after preparation and the viscosity of the composition after standing for 3 days in an environment of 45°C were measured using "RE-85L" manufactured by TOKI SANGYO CO., LTD. In addition, the viscosity measurement was carried out at a temperature adjusted to 25°C. The value of the viscosity difference (ΔVis) before and after standing was calculated, and the storage stability was evaluated according to the following classification. It can be considered that the smaller the value of the viscosity difference (ΔVis), the better the storage stability. The results are shown in the "Storage Stability" column in Table 5.

<評價標準> “A”:Δvis為0.5mPa·s以下。 “B”:Δvis大於0.5mPa·s且2.0mPa·s以下。 “C”:Δvis大於2.0mPa·s。 <Evaluation criteria> "A": Δvis is less than 0.5 mPa·s. "B": Δvis is greater than 0.5 mPa·s and less than 2.0 mPa·s. "C": Δvis is greater than 2.0 mPa·s.

[表7] 表5 低反射化 密接性 殘渣性能 保存穩定性 實施例1 4 4 4 A 實施例2 3 3 4 A 實施例3 3 3 3 A 實施例4 4 4 3 A 實施例5 4 4 4 A 實施例6 4 3 3 A 實施例7 3 3 3 A 實施例8 4 4 4 A 實施例9 4 4 4 A 實施例10 4 4 4 A 實施例11 4 4 4 A 實施例12 4 4 4 A 實施例13 4 4 4 A 實施例14 4 4 4 A 實施例15 4 4 4 A 實施例16 4 4 4 A 實施例17 3 3 3 A 實施例18 4 3 3 A 實施例19 4 4 4 A 實施例20 4 4 4 A 實施例21 4 4 4 A 實施例22 4 3 3 A 實施例23 4 4 4 A 實施例24 4 4 4 A 實施例25 4 4 4 A 比較例1 2 2 4 C 比較例2 3 3 2 A 比較例3 1 2 1 A 比較例4 1 1 4 B [Table 7] table 5 Low reflectivity Adhesion Residue performance Preserve stability Embodiment 1 4 4 4 A Embodiment 2 3 3 4 A Embodiment 3 3 3 3 A Embodiment 4 4 4 3 A Embodiment 5 4 4 4 A Embodiment 6 4 3 3 A Embodiment 7 3 3 3 A Embodiment 8 4 4 4 A Embodiment 9 4 4 4 A Embodiment 10 4 4 4 A Embodiment 11 4 4 4 A Embodiment 12 4 4 4 A Embodiment 13 4 4 4 A Embodiment 14 4 4 4 A Embodiment 15 4 4 4 A Embodiment 16 4 4 4 A Embodiment 17 3 3 3 A Embodiment 18 4 3 3 A Embodiment 19 4 4 4 A Embodiment 20 4 4 4 A Embodiment 21 4 4 4 A Embodiment 22 4 3 3 A Embodiment 23 4 4 4 A Embodiment 24 4 4 4 A Embodiment 25 4 4 4 A Comparison Example 1 2 2 4 C Comparison Example 2 3 3 2 A Comparison Example 3 1 2 1 A Comparison Example 4 1 1 4 B

從表5中示出之結果中發現,藉由對實施例的組成物進行硬化而獲得之圖案的密接性優異且對紅外光的低反射性優異。又,確認到實施例的組成物的顯影殘渣的產生亦少。From the results shown in Table 5, it was found that the pattern obtained by curing the composition of the example was excellent in adhesion and excellent in low reflectivity to infrared light. In addition, it was confirmed that the composition of the example also produced little development residue.

又,從實施例的對比中確認到,樹脂A的酸值為70.0mgKOH/g以上時,進一步減少組成物的顯影殘渣的產生量(參閱實施例3、4、6、7、17、18、22的結果)。In addition, from the comparison of the examples, it was confirmed that when the acid value of resin A was 70.0 mgKOH/g or more, the amount of development residue generated by the composition was further reduced (see the results of Examples 3, 4, 6, 7, 17, 18, and 22).

又,從實施例的對比中確認到,相對於樹脂A的總質量的矽原子含量為17.0質量%以上時,藉由硬化組成物而獲得之圖案對紅外光的低反射性更加優異(參閱實施例2、3、7、17的結果)。Furthermore, from the comparison of the embodiments, it was confirmed that when the silicon atom content relative to the total mass of the resin A was 17.0 mass % or more, the pattern obtained by curing the composition had a more excellent low reflectivity to infrared light (see the results of Examples 2, 3, 7, and 17).

又,從實施例的對比中確認到,樹脂A的雙鍵價(C=C價)為0.35mmol/g以上時,藉由硬化組成物而獲得之圖案的密接性更加優異(參閱實施例2、3、6、7、17、18、22的結果)。Furthermore, from the comparison of the examples, it was confirmed that when the double bond valence (C=C valence) of the resin A was 0.35 mmol/g or more, the adhesion of the pattern obtained by curing the composition was more excellent (see the results of Examples 2, 3, 6, 7, 17, 18, and 22).

另一方面,在比較例的組成物中,確認到未顯現本發明期望的效果。On the other hand, in the composition of the comparative example, it was confirmed that the expected effect of the present invention was not exhibited.

〔實施例26〕 除了將上段部所示之樹脂A-1中重複單元A中的鍵結於矽原子之甲基(相當於式(A2)中的R A2所表示之非水解性基之基團)變更為乙基這一點以外,藉由與在上段部示出之樹脂A-1相同的原料及合成方法合成了樹脂A-16。 接著,除了變更樹脂A-1而使用上述樹脂A-16這一點以外,藉由與實施例1的組成物相同的原料及製備方法製備實施例26的組成物,並且實施與實施例1相同的評價之結果,獲得了與實施例1相同的評價結果。 [Example 26] Resin A-16 was synthesized by using the same raw materials and the same synthesis method as the resin A-1 shown in the upper section, except that the methyl group (equivalent to the non-hydrolyzable group represented by RA2 in formula (A2)) bonded to the silicon atom in the repeating unit A of the resin A-1 shown in the upper section was changed to an ethyl group. Next, the composition of Example 26 was prepared by using the same raw materials and the same preparation method as the composition of Example 1, except that the resin A-1 was changed to the above-mentioned resin A-16, and the same evaluation results as those of Example 1 were performed, and the same evaluation results as those of Example 1 were obtained.

無。without.

Claims (15)

一種組成物,其包含: 樹脂,包含具有式(A1)所表示之基團之重複單元A、具有酸基之重複單元B及具有聚合性基之重複單元C; 聚合性化合物;及 顏料, 式(A1)  *-Si(R A13式中,R A1表示可以具有取代基之烷基、可以具有取代基之芳基或式(A2)所表示之基團, *表示鍵結位置, 其中,3個R A1中的至少2個表示式(A2)所表示之基團, 式(A2)  *-OSi(R A23式中,R A2表示非水解性基, *表示鍵結位置, 另外,式(A1)中存在複數個之R A1彼此及式(A2)中存在複數個之R A2彼此可以各自相同,亦可以不同。 A composition comprising: a resin comprising a repeating unit A having a group represented by formula (A1), a repeating unit B having an acid group, and a repeating unit C having a polymerizable group; a polymerizable compound; and a pigment, Formula (A1) *-Si( RA1 ) 3 wherein RA1 represents an alkyl group which may have a substituent, an aryl group which may have a substituent, or a group represented by formula (A2), * represents a bonding position, wherein at least two of the three RA1s represent a group represented by formula (A2), Formula (A2) *-OSi( RA2 ) 3 wherein RA2 represents a non-hydrolyzable group, * represents a bonding position, and in addition, a plurality of RA1s in formula (A1) and a plurality of RA2s in formula (A2) may be the same as or different from each other. 如請求項1所述之組成物,其中 前述重複單元C包含式(CX2)所表示之重複單元, [化學式1] 式中,R C1表示氫原子或烷基, L C3表示2價的連接基, R C2表示氫原子或烷基。 The composition as claimed in claim 1, wherein the repeating unit C comprises a repeating unit represented by formula (CX2), [Chemical Formula 1] In the formula, R C1 represents a hydrogen atom or an alkyl group, L C3 represents a divalent linking group, and R C2 represents a hydrogen atom or an alkyl group. 如請求項1或請求項2所述之組成物,其中 前述重複單元A包含式(AX1)所表示之重複單元, [化學式2] 式中,R A3表示氫原子或烷基, L A1表示單鍵、-COO-或-CONR A4-, R A4表示氫原子或烷基, L A2表示單鍵或2價的連接基, W A1表示前述式(A1)所表示之基團。 The composition as claimed in claim 1 or claim 2, wherein the repeating unit A comprises a repeating unit represented by formula (AX1), [Chemical Formula 2] In the formula, RA3 represents a hydrogen atom or an alkyl group, LA1 represents a single bond, -COO- or -CONRA4-, RA4 represents a hydrogen atom or an alkyl group, LA2 represents a single bond or a divalent linking group, and WA1 represents a group represented by the aforementioned formula (A1). 如請求項1或請求項2所述之組成物,其中 前述樹脂的酸值為60~170mgKOH/g。 The composition as described in claim 1 or claim 2, wherein the acid value of the aforementioned resin is 60 to 170 mgKOH/g. 如請求項1或請求項2所述之組成物,其中 前述樹脂的酸值為70~170mgKOH/g。 The composition as described in claim 1 or claim 2, wherein the acid value of the aforementioned resin is 70 to 170 mgKOH/g. 如請求項1或請求項2所述之組成物,其中 前述樹脂中的矽原子的含量相對於前述樹脂的總質量為17.0質量%以上。 A composition as described in claim 1 or claim 2, wherein the content of silicon atoms in the resin is 17.0 mass % or more relative to the total mass of the resin. 如請求項1或請求項2所述之組成物,其中 前述樹脂的雙鍵價為0.35mmol/g以上。 The composition as described in claim 1 or claim 2, wherein the double bond value of the resin is 0.35 mmol/g or more. 如請求項1或請求項2所述之組成物,其中 前述顏料包含黑色顏料。 A composition as described in claim 1 or claim 2, wherein the aforementioned pigment includes a black pigment. 如請求項8所述之組成物,其中 前述黑色顏料包含氮氧化鈦。 The composition as described in claim 8, wherein the black pigment contains titanium oxynitride. 如請求項1或請求項2所述之組成物,其為遮光膜形成用組成物。The composition as described in claim 1 or claim 2, which is a composition for forming a light-shielding film. 一種遮光膜,其包含由請求項1至請求項10中任一項所述之組成物形成之硬化膜。A light-shielding film comprising a cured film formed from the composition described in any one of claims 1 to 10. 一種固體攝像元件,其包含由請求項1至請求項10中任一項所述之組成物形成之硬化膜。A solid-state imaging device comprising a cured film formed from the composition described in any one of claims 1 to 10. 一種圖像顯示裝置,其包含由請求項1至請求項10中任一項所述之組成物形成之硬化膜。An image display device comprises a cured film formed from the composition described in any one of claims 1 to 10. 一種紅外線感測器,其包含由請求項1至請求項10中任一項所述之組成物形成之硬化膜。An infrared sensor comprising a cured film formed from the composition described in any one of claims 1 to 10. 一種硬化膜之製造方法,其包括: 組成物層形成步驟,使用請求項1至請求項10中任一項所述之組成物在支撐體上形成組成物層; 曝光步驟,藉由照射活化光線或放射線而將前述組成物層曝光成圖案狀;及 顯影步驟,對曝光後的前述組成物層實施顯影處理。 A method for manufacturing a hardened film, comprising: a component layer forming step, using the component described in any one of claim 1 to claim 10 to form a component layer on a support; an exposure step, exposing the component layer into a pattern by irradiating activating light or radiation; and a developing step, performing a developing process on the exposed component layer.
TW112137192A 2022-09-30 2023-09-27 Composition, light-shielding film, solid-state imaging element, image display device, infrared sensor, method for manufacturing cured film TW202417896A (en)

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