TW202416777A - Coating device and coating method - Google Patents

Abstract

[Topic] Suppressing uneven film thickness of coating. [Solution] A coating device (10) applies coating to the main surface (50A) of a work object (50) being transported in a predetermined transport direction; the coating device (10) comprises: a plurality of nozzles (30) arranged along a width direction intersecting the transport direction, spraying a coating liquid onto the main surface (50A); a plurality of nozzles (30) each configured In order to spray the coating liquid in a manner including a swirling flow swirling around an axis crossing the main surface (50A), the plurality of nozzles (30) include: a plurality of first nozzles (30A) spraying a swirling flow swirling in a first rotation direction; and a plurality of second nozzles (30B) spraying a swirling flow swirling in a second rotation direction opposite to the first rotation direction.

Description

Coating device and coating method

The present technology relates to a coating device and a coating method.

Conventionally, there is a known coating technology that sprays a coating liquid onto a thin film-like object (workpiece) that is continuously transported, thereby forming a thin film such as a water-repellent film, an insulating film, an optical film, etc. Such coating by spraying can form a dense film that follows the unevenness even when the surface of the workpiece is subjected to fine unevenness processing, and has the advantage of good productivity.

Patent document 1 discloses, as an example, a spray-type horizontal transport processing device that transports a flexible printed wiring board substrate in a roll-to-roll manner in a horizontal direction while spraying various liquids (developer, etching liquid, stripping liquid) on the substrate. The processing device described in patent document 1 is provided with a movable shielding plate for shielding the liquid in order to adjust the contact time of each liquid sprayed to the substrate. The shielding plate can easily adjust the processing time of each step. [Prior art document] [Patent document]

[Patent Document 1] Japanese Patent Application Publication No. 2003-283101

[The problem the invention is trying to solve]

However, in the coating by spraying method, there are multiple nozzles instead of one to spray the coating liquid on the workpiece. Since the coating liquid is sprayed from each nozzle, when the atomized coating liquid flows from multiple nozzles interfere with each other, uneven coating will occur. Therefore, the film thickness of the thin film (coating film) formed on the workpiece will be uneven, which will become the cause of poor performance or defects.

The technology described in the specification of this case was completed in view of the above-mentioned situation, and its purpose is to suppress the unevenness of the film thickness of the coating. [Technical means to solve the problem]

The coating device of the technology described in the specification of this case is to apply coating to the main surface of the work object being transported in a predetermined transport direction; the coating device is equipped with: a plurality of nozzles, which are arranged along the width direction intersecting the aforementioned transport direction, and spray the coating liquid on the aforementioned main surface; the aforementioned plurality of nozzles are respectively configured to make the aforementioned The coating liquid is sprayed in a manner including a swirling flow that swirls around an axis that intersects the aforementioned main surface. The aforementioned plurality of nozzles include: a plurality of first nozzles that spray the aforementioned swirling flow that swirls in a first rotation direction; and a plurality of second nozzles that spray the aforementioned swirling flow that swirls in a second rotation direction that is opposite to the aforementioned first rotation direction.

Furthermore, the coating method of the technology described in the specification of this case is to transport the work object in a predetermined transport direction, and spray the coating liquid on the main surface of the work object being transported along a swirling flow that rotates around the axis intersecting the main surface, and the swirling flow is formed in a plurality of directions along the width direction intersecting the transport direction, and the plurality of swirling flows are formed to include a first swirling flow that rotates in a first rotation direction, and a second swirling flow that rotates in a second rotation direction opposite to the first rotation direction. [Effect of the invention]

According to this technology, it is possible to suppress unevenness in film thickness of the coating.

＜Implementation Method 1＞

The roll-to-roll film coating device 10 (hereinafter referred to as "coating device 10") of embodiment 1 is described with reference to Fig. 1 to Fig. 20B. In some of the drawings, the X-axis, Y-axis and Z-axis are shown, and the directions of the axes are drawn so that the directions of the axes are common in the drawings. In addition, the X-axis direction is set as the transport direction, the Y-axis direction is set as the width direction, and the Z-axis direction is set as the up-down direction.

The coating device 10 is used to coat a long workpiece 50 (the workpiece is a flexible substrate in the form of a thin film) being transported by spraying a coating liquid (such as a color resist liquid) from a plurality of spray nozzles 30, thereby applying the coating liquid to the workpiece 50 to form a coating film (such as a photoresist film) as a thin film. As shown in FIG. 1 , the coating device 10 comprises: an unwinding roller 11 (the first roller) for delivering the workpiece 50 to the nozzle 30; and a winding roller 12 (the second roller) for winding the workpiece 50 coated by the nozzle 30. The two rollers 11 and 12 continuously transport the workpiece 50 in a predetermined transport direction (X-axis direction) with the main surface 50A of the workpiece 50 facing upward.

Furthermore, as shown in FIG. 1 , the coating device 10 includes a spray unit 15 disposed between two rollers 11 and 12, a first supply pipe 13, a second supply pipe 14, a liquid container 16 storing a coating liquid, a liquid pump 17, a liquid valve 18, and a control unit 19. The spray unit 15 is a unit that has a plurality of nozzles 30 and sprays the coating liquid. The first supply pipe 13 is a pipe for supplying the coating liquid to the spray unit 15, and the second supply pipe 14 is a pipe for supplying a high-pressure compressed gas (specifically, compressed air) to the spray unit 15. The second supply pipe 14 is supplied with compressed gas from an external supply source (gas tank, etc.). The liquid pump 17 is provided on the path of the first supply pipe 13, and is a power source for transporting the coating liquid, which draws the coating liquid from the liquid container 16 and delivers the coating liquid. The liquid valve 18 is a switching means for supplying and stopping the coating liquid, which is provided on the path of the first supply pipe 13 at the downstream side (the spray unit 15 side) of the liquid pump 17. The control unit 19 is a control substrate for controlling the supply of compressed gas to the second supply pipe 14 and the opening and closing of the liquid valve 18.

In this embodiment, the liquid pump 17, the unwinding roller 11, and the winding roller 12 are controlled by a control device different from the control unit 19, but they may be controlled by the same control unit. Furthermore, the type of compressed gas may be other than air having the same composition as the atmosphere (nitrogen ( _N2 ), argon (Ar), etc.), and the type of coating liquid may be other than a chemical solution such as a developer, an etching solution, or a stripping solution.

As shown in FIG. 1 and FIG. 2 , the spray unit 15 extends transversely in the width direction (Y-axis direction) intersecting the conveying direction of the workpiece 50, and is arranged above the main surface 50A of the workpiece 50. The spray unit 15 is generally composed of a plurality of (10 in the present embodiment) nozzles 30 for spraying the coating liquid, a supply portion 40, and a support portion 20. The nozzle 30, the support portion 20, and the supply portion 40 are connected in this order from bottom to top in the up-down direction (Z-axis direction). The nozzle 30 is generally cylindrical, and a plurality of nozzles are provided along the width direction. The supply portion 40 is connected to a first supply pipe 13 and a second supply pipe 14. The supply unit 40 supplies the coating liquid from the first supply pipe 13 and the compressed gas from the second supply pipe 14 to the nozzle 30. The support unit 20 is connected to the nozzle 30 and the supply unit 40 and supports these components. Each part is described in detail below.

As shown in FIGS. 4 to 6 , the supply portion 40 includes a first supply block 41, a plurality of (eight in the present embodiment) second supply blocks 42, a plurality of (ten in the present embodiment) third supply blocks 43, and two end plates 44, and these components are connected in the width direction by a fastening component.

The first supply block 41 is a plate-shaped block with a plate surface (main surface) along the X-Z plane as shown in FIGS. 4 to 6 , and is disposed approximately in the center of the width direction of the supply portion 40. The first supply block 41 is provided with a first liquid flow port 41A and a first gas flow port 41B that penetrate along the plate thickness direction (Y-axis direction). Furthermore, the first supply pipe 13 is connected to the side surface of the first supply block 41, and the coating liquid from the first supply pipe 13 flows into the first liquid flow port 41A. Furthermore, the second supply pipe 14 is connected to the top surface of the first supply block 41, and the compressed gas from the second supply pipe 14 flows into the first gas flow port 41B.

As shown in Figs. 4 to 6, the second supply block 42 is a plate-shaped block whose plate surface (main surface) is along the X-Z plane, and eight of them are arranged between the third supply blocks 43 described later. The second supply block 42 is formed with a second liquid flow port 42A and a second gas flow port 42B that penetrate in a straight line along the plate thickness direction.

The third supply block 43 is a plate-shaped block with a plate surface along the X-Z plane as shown in FIGS. 4 to 6. Ten third supply blocks 43 are arranged at positions overlapping with the liquid ejection port 31B (FIG. 3) of the nozzle 30 in the vertical direction. The third supply block 43 is provided with a third liquid flow port 43A penetrating in a straight line along the plate thickness direction (Y-axis direction, which is consistent with the width direction) and a third gas flow port 43B penetrating in a V-shape. The third liquid flow port 43A is connected to the first liquid flow port 41A of the first supply block 41 and the second liquid flow port 42A of the second supply block 42. Furthermore, the third gas flow port 43B is communicated with the first gas flow port 41B of the first supply block 41 and the second gas flow port 42B of the second supply block 42 .

As shown in Fig. 4 to Fig. 6, the end plate 44 is a plate-shaped block with a plate surface along the X-Z plane, and one is disposed at each end of the width direction of the supply portion 40. The end plate 44 is a fastening member connected to the third supply block 43 located farthest from the first supply block 41. The end plate 44 seals the third liquid flow port 43A and the third gas flow port 43B of the third supply block 43.

As shown in FIG. 3 and FIG. 4 , the support portion 20 is composed of a plate-shaped support block 21 with a plate surface along the X-Y plane direction. A plurality of support blocks 21 (10 in the present embodiment) are arranged along the Y-axis direction intersecting the conveying direction (X-axis direction). On the support block 21, supply blocks 41, 42, 43 of the supply portion 40 and an end plate 44 are placed, and these support blocks 21 are connected by a fastening member. A fourth liquid flow port 21A is formed on the upper side of the support block 21. Furthermore, under the support block 21, a nozzle connection portion 32 of the nozzle 30 described later is inserted from below. The fourth liquid flow port 21A overlaps and communicates with the fifth liquid flow port 32B of the nozzle connection portion 32 in the upper and lower directions. The fourth liquid flow port 21A has a structure in which an orifice (a fine through hole) is installed in order to locally reduce the inner diameter and generate pressure loss.

Furthermore, a gas retention area 21F which is a cylindrical hollow is formed on the upper side of the support block 21 as shown in FIG4. The gas retention area 21F temporarily retains the compressed gas from the supply portion 40. Furthermore, a fourth gas flow port 21D in a circular shape is formed on the support block 21 so as to surround the inserted nozzle connection portion 32. After passing through the gas retention area 21F, the compressed gas flows to the fourth gas flow port 21D.

Through the aforementioned supply portion 40 and support portion 20, the coating liquid in the first supply pipe 13 flows from the liquid inlet 41C of the first supply block 41 to the first liquid flow port 41A, and then flows into the second liquid flow port 42A of the second supply block 42 connected to the first liquid flow port 41A in the width direction, and the third liquid flow port 43A of the third supply block 43. A portion of the coating liquid flowing into the third liquid flow port 43A is branched and flows into the fourth liquid flow port 21A of the support block 21. Then, the coating liquid flows out to the nozzle connection portion 32 of the nozzle 30 through the fourth liquid flow port 21A including the orifice. The path from the liquid inlet 41C to the fourth liquid flow port 21A is a liquid supply path 15A for supplying the coating liquid to the nozzle 30 in the spray unit 15 .

Furthermore, through the aforementioned supply portion 40 and the support portion 20, the compressed gas in the second supply pipe 14 flows into the first gas flow port 41B of the first supply block 41 as shown by the arrow in FIG. 6, and flows into the second gas flow port 42B of the second supply block 42 which is connected to the first gas flow port 41B in the width direction, and the third gas flow port 43B of the third supply block 43. A portion of the compressed gas flowing into the third gas flow port 43B is branched and flows toward the support block 21 below. Then, the compressed gas flows toward the fourth gas flow port 21D through the gas retention area 21F of the support block 21, and flows out from the fourth gas flow port 21D to the nozzle connection portion 32 of the nozzle 30. The path from the first gas flow port 41B to the fourth gas flow port 21D is a gas supply path 15B for supplying compressed gas to the nozzle 30 in the spray unit 15 .

If the liquid supply path 15A and the gas supply path 15B are formed in this way, the lengths of the liquid supply path 15A and the gas supply path 15B can be easily adjusted to match the number of nozzles 30 by adjusting the combination and number of components of the supply portion 40 and the support portion 20. Furthermore, as shown in FIG. 3 , when the nozzles 30 are arranged in a staggered arrangement, the third supply block 43 and the support block 21 can be made of the same specification by rotating 180° around the Z axis, and the specifications of the components can be standardized. Therefore, the expandability of the spray unit 15 can be improved.

Furthermore, in the liquid supply path 15A, a pressure loss is formed by the orifice in the fourth liquid flow port 21A, thereby enabling the coating liquid to be more uniformly distributed to the plurality of nozzles 30. Furthermore, a gas stagnation area 21F is formed in the gas supply path 15B, thereby enabling the compressed gas to be more uniformly distributed to the plurality of nozzles 30.

Next, the nozzle 30 is described in detail. Each nozzle 30, as shown in FIG. 2, comprises: a nozzle body 31 having a liquid spraying port 31B for spraying a coating liquid, and a nozzle connecting portion 32. As shown in FIG. 2, the nozzle connecting portion 32 is a relay member provided between the support portion 20 and the nozzle body 31, which connects these components in the up-down direction. The nozzle connecting portion 32 is inserted into the support block 21 from below. The nozzle connecting portion 32 is inserted into the nozzle body 31 from below. Furthermore, the nozzle connecting portion 32 has eight fifth gas flow ports 32C (an example of a gas relay port) arranged at equal intervals on the same circumference, as shown in FIG. 7. The fifth gas flow port 32C penetrates the nozzle connection portion 32 in a straight line in the vertical direction, and overlaps and communicates with the annular fourth gas flow port 21D of the support block 21 in the vertical direction.

The nozzle body 31 is a component having a liquid outlet 31B for discharging a coating liquid and a plurality of (four in this embodiment) gas outlets 31D for discharging compressed gas as shown in FIGS. 8 and 9. The coating liquid is discharged from the lower end 31A of the liquid outlet 31B. The gas outlet 31D is connected to the upper surface 31E and the roughly conical outer peripheral surface 31C of the nozzle body 31 as shown in FIGS. 8 and 9. The four gas outlets 31D are connected to the eight fifth gas flow ports 32C of the nozzle connection part 32. By making the number of the fifth gas flow ports 32C greater than the number of the gas ejection ports 31D, the compressed gas can flow into the gas ejection ports 31D more evenly.

The compressed gas from the fifth gas flow port 32C flows along the shape of the gas ejection port 31D as shown in FIG10, and ejects from the outer peripheral surface 31C with a velocity component in the horizontal direction. The ejected compressed gas descends in a spiral shape while colliding with the inner surface of the outer cover of the nozzle 30, and ejects obliquely downward. The compressed gas ejected to the outside collides with the coating liquid ejected from the liquid ejection port 31B, and atomizes the coating liquid (atomizes it). In this way, the coating liquid is atomized. Furthermore, the coating liquid is sprayed by compressed gas ejected from four gas ejection ports 31D as a swirling flow that spirally diffuses and descends while swirling around the Z axis ( FIG. 2 ).

The rotation direction of the swirling flow sprayed can be adjusted by the shape of the gas nozzle 31D. In the multiple nozzles 30 of this embodiment, the extension direction of the gas nozzle 31D along the horizontal plane (X-Y plane) is half different from the two types shown in Figure 11 or Figure 12. In the following, there is a situation in which the gas nozzle 31D shown in Figure 11 among the multiple nozzles 30 is distinguished as the first nozzle 30A, and the gas nozzle 31D shown in Figure 12 is distinguished as the second nozzle 30B for explanation. The first nozzle 30A sprays the coating liquid as a swirling flow that rotates clockwise (right-handed, an example of the first rotation direction) when viewed from below (the workpiece 50 side). On the other hand, the second nozzle 30B sprays the coating liquid as a swirling flow that swirls counterclockwise (left-handed, an example of the second rotation direction) when viewed from below (the workpiece 50 side).

As shown in FIG. 3 , the plurality of (10) nozzles 30 are arranged in such a manner that the plurality of (5) first nozzles 30A and the plurality of (5) second nozzles 30B are alternately arranged in the width direction. In this way, two types of swirling flows with different counterclockwise or clockwise rotation directions can be alternately formed in the width direction. By forming the swirling flow in this way, even in the case where the plurality of nozzles 30 are arranged in the width direction, the interference of the flow of the atomized coating liquid from each nozzle 30 can be suppressed, and the uneven coating on the main surface 50A of the workpiece 50 can be suppressed. Therefore, as shown in the results of the comparative experiment 1 described later, the uneven film thickness of the applied coating can be suppressed.

The first nozzle 30A and the second nozzle 30B are arranged separately at a certain first interval L1 (distance between centers (liquid ejection outlets 31B)) in the width direction as shown in FIG. 3. In addition, the second nozzle 30B is arranged at a position (first interval L1)/2 away from the first nozzle 30A in the width direction, and the first nozzle 30A and the second nozzle 30B are arranged alternately. The first nozzle 30A is arranged at a certain second interval L2 (distance between centers (liquid ejection outlets 31B)) away from the second nozzle 30B in the conveying direction (X-axis direction). The first nozzle 30A and the second nozzle 30B are preferably arranged so that the second interval L2 is equal to or greater than the value of the first interval L1 multiplied by 0.25.

By disposing the first nozzle 30A and the second nozzle 30B in this way, as shown in FIG. 13 , two swirling flows with different rotation directions, counterclockwise or clockwise, can be alternately formed in a staggered arrangement in the width direction, and these swirling flows easily meet the formation conditions of the Karman vortex train. In this way, the flow of the atomized coating liquid from each nozzle 30 can be stabilized in terms of fluid mechanics, and the coating unevenness on the main surface 50A of the workpiece 50 can be further suppressed. Therefore, the unevenness of the film thickness of the coated film can be further suppressed.

<Comparative Experiment 1> To verify the aforementioned functions and effects, Comparative Experiment 1 was conducted. In Comparative Experiment 1, the nozzle 30 including the first nozzle 30A and the second nozzle 30B was used as Examples 1 to 3, and the nozzle 30 including only the first nozzle 30A was used as Comparative Examples 1 to 3. In addition, the coating liquid sprayed by the embodiments and comparative examples was irradiated with laser and photographed to confirm the interference of the flow of the micronized coating liquid. In addition, the film thickness of the applied coating was measured to evaluate the unevenness of the film thickness.

<Example 1 to Example 3> Example 1 is an embodiment in which the four first nozzles 30A and the four second nozzles 30B are alternately arranged in the same straight line in the width direction, thereby forming a swirling flow as shown in Figure 12 when viewed from below (the side of the workpiece 50). Example 2 is an embodiment in which the four first nozzles 30A and the four second nozzles 30B are alternately arranged in a staggered arrangement in the width direction, thereby forming a swirling flow as shown in Figure 13. Example 3 is an embodiment in which the arrangement of the four first nozzles 30A and the four second nozzles 30B is the same as that of Example 2, and the coating liquid is overlapped and applied twice. In Example 3, the workpiece 50 with the coating film formed thereon is transported again and the coating liquid is sprayed, thereby overlapping and coating the coating liquid twice. Moreover, during the second spraying of the coating liquid, the position of the workpiece 50 in the width direction is displaced by only (the first interval L1)/4 to form a swirling flow as shown in FIG. 14.

<Comparison Example 1 to Comparison Example 3> Comparison Example 1 is a comparison example in which only eight first nozzles 30A are arranged in the same straight line in the width direction to form a swirling flow as shown in FIG. 15. Comparison Example 2 is a comparison example in which only eight first nozzles 30A are arranged in a staggered arrangement in the width direction to form a swirling flow as shown in FIG. 16. Comparison Example 3 is a comparison example in which the arrangement of the eight first nozzles 30A is the same as that of Comparison Example 2, and the coating liquid is overlapped and applied twice. In Comparison Example 3, as in Example 3, the workpiece 50 formed with the coating film is transported again and the coating liquid is sprayed, thereby overlapping and applying the coating liquid twice. Furthermore, during the second spraying of the coating liquid, the position of the workpiece 50 in the width direction is displaced by only (the first interval L1)/4 to form a swirling flow as shown in FIG17.

<Experimental conditions> ・1st interval L1=60mm ・2nd interval L2=16.8mm ・Flow rate of compressed gas of each nozzle 30: 20NL/min. ・Spraying amount of coating liquid of each nozzle 30: 4.0mL/min. ・Type of compressed gas: compressed air ・Type of coating liquid: color resist liquid

<Method for confirming interference of the flow of micronized coating liquid> The sprayed coating liquid is horizontally irradiated with laser to make the sprayed coating liquid visually identifiable, and a photograph of the X-Y plane is taken at a position 50 mm above and below the liquid spraying port 31B (Z-axis direction). The coating liquid is a high-brightness point (white point in black and white) in the photo.

<Film thickness measurement of coating, evaluation method of film thickness unevenness> On the main surface 50A of the workpiece 50, the position that overlaps with the central position of the width direction (Y-axis direction) of the eight nozzles 30 in the vertical direction (in Example 3 and Comparative Example 3, it is the position that overlaps with the central position of the width direction of the eight nozzles 30 in the vertical direction in the first coating) is used as the measurement position 0mm. In addition, the film thickness is measured every 5mm in the width direction, and the unevenness of the film thickness in the range of 45mm in the -Y-axis direction and 45mm in the +Y-axis direction (that is, the range from -45mm to +45mm) from the measurement position 0mm is evaluated. Specifically, the unevenness is calculated by the following formula for the measured value in this range. The lower the value of unevenness, the higher the uniformity of the film thickness is evaluated. In addition, in Figures 19A to 19D and 20A to 20B showing the film thickness measurement results, the range surrounded by the dotted line represents the range of -45mm to +45mm used for calculating the unevenness, and the one-point chain represents the value of the maximum value of the film thickness/2. Uneven Uni. = {(maximum value of film thickness - minimum value of film thickness)/(2×average value of film thickness)}×100%

The experimental results of comparative experiment 1 are described. Regarding the interference of the flow of the micronized coating liquid, by comparing the results of Example 1 shown in FIG. 18A with the results of Comparative Example 1 shown in FIG. 18C , it can be confirmed that Example 1 can better suppress the unevenness of the high brightness points representing the coating liquid and can spray more uniformly. Furthermore, by comparing the results of Example 2 shown in FIG. 18B with the results of Comparative Example 2 shown in FIG. 18D , it can be confirmed that Example 2 can better suppress the unevenness of the high brightness points representing the coating liquid and can spray more uniformly.

Regarding the unevenness of the film thickness, the Example 1 is calculated to be 20% based on the film thickness measurement result shown in FIG19A, and the Comparative Example 1 is calculated to be 21% based on the film thickness measurement result shown in FIG19C. It is confirmed that the Example 1 is more capable of suppressing the unevenness of the film thickness than the Comparative Example 1. In addition, the unevenness of the film thickness of the Example 2 is calculated to be 22% based on the film thickness measurement result shown in FIG19B, and the unevenness of the film thickness of the Comparative Example 2 is calculated to be 25% based on the film thickness measurement result shown in FIG19D. It is confirmed that the Example 2 is more capable of suppressing the unevenness of the film thickness than the Comparative Example 2. Furthermore, the unevenness of the film thickness of Example 3 was calculated to be 10% based on the film thickness measurement results shown in FIG20A, and the unevenness of the film thickness of Comparative Example 3 was calculated to be 29% based on the film thickness measurement results shown in FIG20B. It was confirmed that Example 2 was more capable of suppressing the unevenness of the film thickness than Comparative Example 2.

<Other implementations> This technology is not limited to the implementations described above and illustrated by the drawings. For example, the following implementations are also included in the technical scope of this technology.

(1) The direction of transporting the workpiece 50 is not limited to the horizontal direction. Also, the transporting means may be other than the roll-to-roll method.

(2) The liquid supply path 15A and the gas supply path 15B may be formed by combining thin and long pipes.

10: Roll-to-roll film coating device (coating device) 11: Unwinding roller (1st roller) 12: Take-up roller (2nd roller) 15A: Liquid supply path 15B: Gas supply path 30: Nozzle 30A: 1st nozzle 30B: 2nd nozzle 31B: Liquid nozzle outlet 31D: Gas nozzle outlet 32C: 5th gas flow port (gas relay port) 50: Workpiece (object to be worked on) 50A: Main surface L1: 1st interval L2: 2nd interval

[Figure 1] Schematic diagram of the coating device of embodiment 1 [Figure 2] Three-dimensional diagram of the spray unit [Figure 3] Bottom view of the spray unit [Figure 4] Exploded three-dimensional diagram of the supply section of the spray unit [Figure 5] A-A line section view of Figure 2 (a section view showing the liquid supply path) [Figure 6] B-B line section view of Figure 2 (a section view showing the gas supply path) [Figure 7] Top view of the nozzle connection [Figure 8] Top view of the nozzle body [Figure 9] Bottom view of the nozzle body [Figure 10] Sectional view of the nozzle body of the first nozzle cut at the C-C line position of Figure 2 [Figure 11] Sectional view of the nozzle body of the second nozzle cut at the C-C line position of Figure 2 [Figure 12] Illustration of the vortex flow formed by Example 1 [Figure 13] Illustration of the vortex flow formed by Example 2 [Figure 14] Illustration of the vortex flow formed by Example 3 [Figure 15] Illustration of the vortex flow formed by Comparative Example 1 [Figure 16] Illustration of the vortex flow formed by Comparative Example 2 [Figure 17] Illustration of the vortex flow formed by Comparative Example 3 [Figure 18A] Photograph of the coating liquid sprayed by Example 1 [Figure 18B] Photograph of the coating liquid sprayed by Example 2 [Figure 18C] Photograph of the coating liquid sprayed by Comparative Example 1 [Figure 18D] Photograph of the coating liquid sprayed by Comparative Example 2 [Figure 19A] Graph showing the unevenness of the film thickness of the coating film applied by Example 1 [Figure 19B] Graph showing the unevenness of the film thickness of the coating film applied by Example 2 [Figure 19C] Graph showing the unevenness of the film thickness of the coating film applied by Comparative Example 1 [Figure 19D] Graph showing the unevenness of the film thickness of the coating film applied by Comparative Example 2 [Figure 20A] Graph showing the unevenness of the film thickness of the coating film applied by Example 3 [Figure 20B] Graph showing the unevenness of the film thickness of the coating film applied by Comparative Example 3

13: 1st supply pipe

15: Spray unit

21: Support block

30A: No. 1 nozzle

30B: No. 2 nozzle

31B: Liquid spray outlet

L1: 1st interval

L2: The second interval

Claims (9)

A coating device is used to apply coating to the main surface of a work object being transported in a predetermined transport direction; the coating device comprises: A plurality of nozzles are arranged along a width direction intersecting the aforementioned transport direction, and spray coating liquid on the aforementioned main surface; The aforementioned plurality of nozzles are each configured to spray the aforementioned coating liquid in a manner including a swirling flow swirling around an axis intersecting the aforementioned main surface, The aforementioned plurality of nozzles include: a plurality of first nozzles that spray the aforementioned swirling flow swirling in a first rotation direction; and a plurality of second nozzles that spray the aforementioned swirling flow swirling in a second rotation direction opposite to the aforementioned first rotation direction. The coating device as described in claim 1, wherein, the aforementioned plurality of first nozzles and the aforementioned plurality of second nozzles are alternately arranged in the aforementioned width direction. The coating device as described in claim 1, wherein, the plurality of first nozzles and the plurality of second nozzles are arranged alternately in a staggered arrangement in the width direction. The coating device as described in claim 3, wherein, the plurality of first nozzles and the plurality of second nozzles are respectively arranged with a first interval, the plurality of first nozzles are arranged with a second interval away from the plurality of second nozzles in the conveying direction, and the second interval is greater than the value of the first interval multiplied by 0.25. A coating device as described in any one of claim 1 to claim 4, wherein the coating device comprises: a liquid supply path connected to each of the plurality of nozzles and supplying the coating liquid to the plurality of nozzles; a gas supply path connected to each of the plurality of nozzles and supplying compressed gas to the plurality of nozzles; the plurality of nozzles each having: a liquid nozzle for spraying the coating liquid from the liquid supply path; a plurality of gas nozzles for spraying the compressed gas from the gas supply path; and The plurality of gas relay ports are arranged on the upstream side of the aforementioned gas ejection port in the flow direction of the aforementioned compressed gas and are connected to the aforementioned gas ejection port. The number of the plurality of gas relay ports is greater than the number of the aforementioned gas ejection ports. A coating device as described in any one of claim 1 to claim 4, wherein the device comprises: A first roller for delivering the aforementioned long strip of work object to the aforementioned plurality of nozzles; and A second roller for rolling up the aforementioned work object coated by the aforementioned plurality of nozzles. A coating method, characterized by: transporting a work object in a predetermined transport direction, spraying a coating liquid on the main surface of the transported work object along a swirling flow that rotates around an axis that intersects the main surface, the swirling flow is formed in a plurality of directions along a width direction that intersects the transport direction, the plurality of swirling flows are formed to include a first swirling flow that rotates in a first rotation direction, and a second swirling flow that rotates in a second rotation direction that is opposite to the first rotation direction. The coating method as described in claim 7, wherein the first swirling flow and the second swirling flow are formed by alternately arranging in the width direction. The coating method as described in claim 7, wherein the first swirling flow and the second swirling flow are arranged alternately in a staggered arrangement in the width direction.

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