TW202408685A - Method for producing microparticles, and colloidal solution - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 35
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 98
- 239000002184 metal Substances 0.000 claims abstract description 98
- 238000000034 method Methods 0.000 claims abstract description 43
- 239000002904 solvent Substances 0.000 claims abstract description 35
- 239000000956 alloy Substances 0.000 claims abstract description 18
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 18
- 239000000843 powder Substances 0.000 claims description 121
- 239000010419 fine particle Substances 0.000 claims description 94
- 230000008569 process Effects 0.000 claims description 32
- 239000000243 solution Substances 0.000 claims description 27
- 238000002844 melting Methods 0.000 claims description 17
- 230000008018 melting Effects 0.000 claims description 17
- 239000006104 solid solution Substances 0.000 claims description 14
- 230000001678 irradiating effect Effects 0.000 abstract description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 22
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- 238000003756 stirring Methods 0.000 description 11
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- 239000013078 crystal Substances 0.000 description 8
- 239000012535 impurity Substances 0.000 description 6
- 239000002082 metal nanoparticle Substances 0.000 description 5
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- 230000005496 eutectics Effects 0.000 description 4
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- 238000002835 absorbance Methods 0.000 description 2
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- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
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- 229910003803 Gold(III) chloride Inorganic materials 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
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- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- WEUCVIBPSSMHJG-UHFFFAOYSA-N calcium titanate Chemical compound [O-2].[O-2].[O-2].[Ca+2].[Ti+4] WEUCVIBPSSMHJG-UHFFFAOYSA-N 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 239000002537 cosmetic Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000002296 dynamic light scattering Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- RJHLTVSLYWWTEF-UHFFFAOYSA-K gold trichloride Chemical compound Cl[Au](Cl)Cl RJHLTVSLYWWTEF-UHFFFAOYSA-K 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000007254 oxidation reaction Methods 0.000 description 1
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- 239000010453 quartz Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- B01J13/00—Colloid chemistry, e.g. the production of colloidal materials or their solutions, not otherwise provided for; Making microcapsules or microballoons
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
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- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
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- B22—CASTING; POWDER METALLURGY
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- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
- B22F1/052—Metallic powder characterised by the size or surface area of the particles characterised by a mixture of particles of different sizes or by the particle size distribution
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- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
- B22F1/054—Nanosized particles
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- B22F9/00—Making metallic powder or suspensions thereof
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- B22F9/30—Making metallic powder or suspensions thereof using chemical processes with decomposition of metal compounds, e.g. by pyrolysis
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- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Abstract
Description
此發明係關於微粒子之製造方法、及膠體溶液。This invention relates to a method for producing microparticles and a colloidal solution.
以往,作為使用雷射生成微粒子的方法,提案有例如專利文獻1所揭示的微粒子的製造方法。Conventionally, as a method of generating microparticles using lasers, a method for producing microparticles disclosed in
在專利文獻1中,揭示了對溶解了1種以上的金屬離子的基本溶媒,照射飛秒脈衝雷射來生成金屬奈米粒子的方法。
[先前技術文獻]
[專利文獻]
[專利文獻1] 日本特開2021-017622號公報[Patent Document 1] Japanese Patent Application Publication No. 2021-017622
[發明欲解決之課題][Problems to be solved by the invention]
在此,在專利文獻1中,揭示經由對溶解金屬離子的基本溶媒,照射飛秒脈衝雷射,分解基本溶媒中的水分子而生成的自由基(例如氫自由基)還原金屬離子,以生成金屬奈米粒子的方法。根據該生成方法,在金屬離子的還原反應時,除了作為目的物質的金屬奈米粒子以外,例如與金屬離子結合的氯化物離子等被氧化,而有可能生成目的物質以外的不純物。為此,產生的不純物係有可能對金屬奈米粒子產生附著等的影響,有降低金屬奈米粒子的品質的疑慮。Here,
在此,本發明係鑒於上述問題而提出的,其目的在於提供能夠達成微粒子的品質下降的抑制的微粒子的製造方法及膠體溶液。 [為解決課題之手段] Here, the present invention has been proposed in view of the above-mentioned problems, and an object thereof is to provide a method for producing fine particles and a colloidal solution that can suppress degradation in quality of the fine particles. [To solve the problem]
根據第1發明之微粒子的製造方法,係具備使用飛秒脈衝雷射生成微粒子的方法,具備對溶媒中的粉體材料,照射飛秒脈衝雷射,生成含有金屬原子的微粒子的照射工程,前述粉體材料係具有較前述微粒子大的中央徑,含有金屬原子為特徵。The method for producing microparticles according to the first invention is a method for generating microparticles using a femtosecond pulse laser, and includes an irradiation process of irradiating a powder material in a solvent with a femtosecond pulse laser to generate microparticles containing metal atoms. The powder material has a central diameter larger than that of the microparticles and is characterized by containing metal atoms.
根據第2發明中的微粒子的製造方法,在第1發明中,前述粉體材料係包含含有第1金屬原子的第1粉體材料、和含有與前述第1金屬原子不同的第2金屬原子的第2粉體材料,前述微粒子係含有前述第1金屬原子及前述第2金屬原子的合金為特徵。According to the method for producing fine particles in the second invention, in the first invention, the powder material includes a first powder material containing a first metal atom, and a second powder material containing a second metal atom different from the first metal atom. The second powder material is characterized in that the fine particles are an alloy containing the first metal atoms and the second metal atoms.
根據第3發明中的微粒子的製造方法,在第2發明中,所述第2粉體材料的熔點係較前述第1粉體材料的熔點為高為特徵。According to the method for producing fine particles in the third invention, in the second invention, the melting point of the second powder material is higher than the melting point of the first powder material.
根據第4發明中的微粒子的製造方法,在第2發明或第3發明中,前述微粒子係組合前述第1金屬原子、和前述第2金屬原子的固溶體為特徵。According to the method for producing microparticles of the fourth invention, in the second invention or the third invention, the microparticles are characterized by being a solid solution of a combination of the first metal atoms and the second metal atoms.
根據第5發明中的膠體溶液,具備經由記載於第1發明~第3發明中任一的微粒子的製造方法所生成的前述微粒子、和分散前述微粒子的溶媒為特徵。 [發明效果] According to the colloidal solution of the fifth invention, it is characterized by comprising the aforementioned microparticles produced by the microparticle production method described in any one of the first invention to the third invention, and a solvent for dispersing the aforementioned microparticles. [Effect of the invention]
根據第1發明~第4發明,具備對溶媒中的粉體材料,照射飛秒脈衝雷射,生成含有金屬原子的微粒的照射工程,粉體材料係具有較微粒子大的中央徑。為此,與利用金屬離子的還原的微粒子的製造方法相比,能夠抑制對微粒子產生影響的不純物的產生。由此,能夠抑制生成之微粒子的品質降低。According to the first to fourth inventions, there is an irradiation process for irradiating a powder material in a solvent with a femtosecond pulse laser to generate fine particles containing metal atoms, and the powder material has a larger central diameter than the fine particles. Therefore, compared with the method of producing fine particles using reduction of metal ions, the generation of impurities that affect the fine particles can be suppressed. This can prevent the quality of the generated fine particles from deteriorating.
尤其,根據第2發明,粉體材料係包含含有第1金屬原子的第1粉體材料、和含有與第1金屬原子不同的第2金屬原子的第2粉體材料,微粒子係含有第1金屬原子及第2金屬原子的合金。為此,能夠調節第1粉體材料與第2粉體材料的比率,容易控制微粒子中含有的各金屬原子的組成比。由此,能夠抑制微粒子中含有的各金屬原子的組成比的偏差。In particular, according to the second invention, the powder material includes a first powder material containing a first metal atom and a second powder material containing a second metal atom different from the first metal atom, and the fine particles contain the first metal. An alloy of atoms and atoms of a second metal. Therefore, the ratio of the first powder material to the second powder material can be adjusted, and the composition ratio of each metal atom contained in the fine particles can be easily controlled. This can suppress variation in the composition ratio of each metal atom contained in the fine particles.
尤其,根據第3發明,第2粉體材料的熔點係高於第1粉體材料的熔點。即,生成具有第1粉體材料的特性、和較第1粉體材料高的熔點的微粒子。為此,與不使用第2粉體材料而製造微粒子的情況相比,可擴大作為微粒子安定的溫度領域。由此,能夠達成生成之微粒子的安定性提升。In particular, according to the third invention, the melting point of the second powder material is higher than the melting point of the first powder material. That is, fine particles having the characteristics of the first powder material and a higher melting point than the first powder material are generated. Therefore, compared with the case of producing fine particles without using the second powder material, the temperature range in which the fine particles are stable can be expanded. This can improve the stability of the generated microparticles.
尤其,根據第4發明,微粒子係將第1金屬原子和第2金屬原子組合的固溶體。為此,與不是固溶體的微粒子相比,粒子的部分狀態變化或化學變化則難以發生。由此,更能夠達成生成之微粒子的安定性提升。In particular, according to the fourth invention, the fine particles are a solid solution in which the first metal atoms and the second metal atoms are combined. For this reason, partial state changes or chemical changes of the particles are less likely to occur compared to fine particles that are not solid solutions. As a result, the stability of the generated microparticles can be further improved.
尤其,根據第5發明時,膠體溶液係具備分散有微粒子的溶媒。為此,與不使用溶媒而保管微粒子的情況相比,容易抑制微粒子的凝聚。由此,能夠提供品質維持的微粒子。In particular, according to the fifth invention, the colloid solution includes a solvent in which fine particles are dispersed. Therefore, compared with the case where fine particles are stored without using a solvent, aggregation of fine particles can be easily suppressed. Thus, fine particles with maintained quality can be provided.
以下,參照圖面對作為本發明的實施形態的微粒子的製造方法、微粒子及膠體溶液的一例進行說明。Hereinafter, an example of a method for producing fine particles, fine particles, and a colloid solution as an embodiment of the present invention will be described with reference to the drawings.
(實施形態:微粒子、膠體溶液) 本實施形態中的微粒子係除了用於發電元件等之電子裝置之外,例如用於醫療、食品等之領域。微粒子係除了含有金屬微粒子以外,可含有金屬原子和非金屬原子的微粒子。微粒子係可以用於例如發電元件等之能量領域、或導電性零件等之電子裝置領域。除上述以外,微粒子係例如可在作為醫藥品或化妝品的醫療領域、作為複合材料的一部分的素材領域、食品等領域中使用。尤其,經由對微粒子的表面進行任意的表面處理(例如被膜之形成),可生成具有附加機能的微粒子,期待在各種用途中展開。 (Embodiment: microparticles, colloidal solution) The fine particles in this embodiment are used in fields such as medical treatment and food, in addition to electronic devices such as power generation elements. The fine particles may contain, in addition to metal fine particles, metal atoms and non-metal atoms. The fine particles can be used in the energy field such as power generation components, or in the electronic device field such as conductive parts. In addition to the above, the microparticle system can be used in the medical field as pharmaceuticals or cosmetics, the material field as a part of composite materials, food, and other fields. In particular, by subjecting the surface of the microparticles to arbitrary surface treatment (for example, formation of a film), microparticles with additional functions can be produced, and are expected to be used in various applications.
微粒子係包含具有例如1nm以上100nm以下之粒子徑的複數之粒子。微粒子係例如包含具有中值徑(中央徑:D50)為1nm以上10nm以下之粒子徑之粒子之外,例如包含平均粒徑為具有1nm以上10nm以下之粒子徑之粒子亦可。中值徑或平均粒徑係例如可經由使用粒度分布計測器來測定。作為粒度分布計測器,係例如使用採用動態光散射法的粒度分布計測器(例如Malvern Panalytical製Zetasizer Ultra等)即可。The fine particles include plural particles having a particle diameter of, for example, 1 nm or more and 100 nm or less. The fine particles may include, for example, particles having a median diameter (central diameter: D50) of not less than 1 nm and not more than 10 nm, but also particles having an average particle diameter of not less than 1 nm and not more than 10 nm. The median diameter or the average particle diameter can be measured, for example, by using a particle size distribution meter. As a particle size distribution measuring device, for example, a particle size distribution measuring device using a dynamic light scattering method (for example, Zetasizer Ultra manufactured by Malvern Panalytical, etc.) may be used.
微粒子係除了表示由單一原子生成的粒子群以外,例如也可表示經由複數種類的金屬粒子生成的的粒子群。微粒子係可表示例如經由合金生成的粒子群。In addition to a particle group generated from a single atom, a particle group generated from, for example, a plurality of metal particles can be referred to as a microparticle. A microparticle can be referred to as a particle group generated from, for example, an alloy.
本實施形態中的膠體溶液係在與微粒子相同的領域中使用。膠體溶液係表示例如含有微粒子的2種以上的物質混合的狀態。膠體溶液係包含例如分散有微粒子的溶媒6。The colloidal solution in this embodiment is used in the same field as microparticles. A colloidal solution represents a state in which two or more substances containing fine particles are mixed, for example. The colloidal solution system contains, for example, a solvent 6 in which fine particles are dispersed.
膠體溶液係具備分散有微粒子的溶媒6。此時,與不使用溶媒6而保管微粒子的情況相比,容易抑制微粒子的凝聚。由此,能夠提供品質維持的微粒子。The colloidal solution system includes a solvent 6 in which fine particles are dispersed. At this time, compared with the case of storing the fine particles without using the solvent 6, it is easier to suppress the aggregation of the fine particles. This makes it possible to provide fine particles with maintained quality.
作為微粒子之例,含有例如鎳、鉑、金、鈦等公知的金屬原子。微粒子係只要含有金屬原子。例如可含有純金屬、不含非金屬的合金或金屬氧化物之任一者。然而,在製造分散有不含純金屬或非金屬的合金的微粒子的膠體溶液時,經由使用醇作為溶媒6,可以減少促進微粒子氧化的因素。由此,更能夠提供品質維持的微粒子。Examples of fine particles include known metal atoms such as nickel, platinum, gold, and titanium. The microparticle system only needs to contain metal atoms. For example, any of pure metals, non-metal-free alloys, or metal oxides may be contained. However, when producing a colloidal solution in which fine particles containing no pure metal or non-metal alloy are dispersed, factors that promote oxidation of the fine particles can be reduced by using alcohol as the solvent 6 . This makes it possible to provide fine particles with maintained quality.
微粒子係例如表示鈣鈦礦構造。微粒子係可包含例如鈦酸鋇(BaTiO 3)、鈦酸鍶(SrTiO 3)、鈦酸鈣(CaTiO 3)、鈦酸鉛(PbTiO 3)、鈦酸錫(SnTiO 3)、鈦酸鎘(CdTiO 3)、及鋯酸鍶(SrZrO 3)之至少一者。 The microparticle system represents, for example, a perovskite structure. The microparticle system may include, for example, barium titanate (BaTiO 3 ), strontium titanate (SrTiO 3 ), calcium titanate (CaTiO 3 ), lead titanate (PbTiO 3 ), tin titanate (SnTiO 3 ), cadmium titanate (CdTiO 3 ), and at least one of strontium zirconate (SrZrO 3 ).
微粒子係例如使用第1粉體材料、和第2粉體材料生成。第1粉體材料係含有第1金屬原子(第1金屬原子),第2粉體材料係含有第2金屬原子(第2金屬原子)。微粒子係例如含有第1金屬原子及第2金屬原子的合金。微粒子係例如含有熔點高於第1粉體材料(第1粉體材料)熔點的第2粉體材料(第2粉體材料)。即,生成具有第1粉體材料的特性、熔點比第1粉體材料高的微粒子。此時,與不使用第2粉體材料而製造微粒子的情況相比,可擴大作為微粒子安定的溫度領域。由此,能夠達成微粒子的安定性提升。微粒子係可以含有不同的2種金屬原子的合金,也可以含有不同的3種以上的金屬原子的合金。The fine particles are generated using, for example, a first powder material and a second powder material. The first powder material contains first metal atoms (first metal atoms), and the second powder material contains second metal atoms (second metal atoms). The fine particles are, for example, an alloy containing first metal atoms and second metal atoms. The fine particles contain, for example, a second powder material (second powder material) whose melting point is higher than the melting point of the first powder material (first powder material). That is, fine particles having the characteristics of the first powder material and having a higher melting point than the first powder material are generated. In this case, compared with the case of producing fine particles without using the second powder material, the temperature range in which the fine particles are stable can be expanded. As a result, the stability of the fine particles can be improved. The fine particle system may contain an alloy of two different metal atoms, or may contain an alloy of three or more different metal atoms.
微粒子係例如將第1金屬原子、和第2金屬原子組合的固溶體。此時,與不是固溶體的微粒子相比,微粒子的部分狀態變化或化學變化則難以發生,微粒子整體容易安定地存在。由此,更能夠達成生成之微粒子的安定性提升。作為表示固溶體的微粒子中含有的金屬原子的組合的例子,可列舉鎳與鉑的組合、鎳與釕的組合、鎳與銠的組合、鎳與鈀的組合、鎳與銥的組合等。固溶體之微粒子係亦可含有3種以上的金屬原子。作為固溶體的微粒子中含有的金屬原子的組合的例子,例如亦可選擇混合焓為0以下的組合的金屬原子。The microparticles are, for example, a solid solution of a first metal atom and a second metal atom. At this time, compared with microparticles that are not solid solutions, partial state changes or chemical changes of the microparticles are difficult to occur, and the microparticles as a whole tend to exist stably. As a result, the stability of the generated microparticles can be improved. As examples of combinations of metal atoms contained in microparticles representing solid solutions, there can be listed combinations of nickel and platinum, nickel and ruthenium, nickel and rhodium, nickel and palladium, nickel and iridium, etc. The microparticles of the solid solution may also contain more than three metal atoms. As examples of combinations of metal atoms contained in microparticles of the solid solution, for example, metal atoms with a mixing enthalpy of less than 0 may be selected.
微粒子係例如將第1金屬原子、和第2金屬原子組合的共晶體。此時,與不是共晶體的微粒子相比,可提升微粒子的安定性。The microparticles are, for example, eutectic particles formed by combining the first metal atom and the second metal atom. In this case, the stability of the microparticles can be improved compared to microparticles that are not eutectic particles.
微粒子係例如含有顯示相同結晶構造的2種以上的材料。此時,於合金的微粒子整體,顯示結晶構造相同的傾向。由此,能夠達成生成之微粒子的安定性提升。The microparticles contain, for example, two or more materials showing the same crystal structure. In this case, the alloy microparticles as a whole show the same tendency of crystal structure. This can improve the stability of the generated microparticles.
(製造裝置100)
接著,對本實施形態的微粒子的製造方法中使用的製造裝置100的一例進行說明。圖1係顯示在本實施形態的製造裝置100的一例的模式斜視圖。
(Manufacturing device 100)
Next, an example of the
製造裝置100係例如圖1所示,具備雷射裝置1、和透鏡2、和容器3、和溶液4。製造裝置100係例如可以相對於1個雷射裝置1,具備複數之容器3及溶液4。1 , the
<雷射裝置1>
雷射裝置1係例如射出具有10
-15秒程度之時間寬度的脈衝雷射。作為雷射裝置1,例如顯示下述特性,例如可以使用COHERENT公司製的Astrella等飛秒脈衝雷射。
振盪波長:800nm±20nm
脈衝寬度:100fs
能量:5-9mJ
重複頻率:100Hz(輸出0.5-0.9W)
<
除上述之外,作為雷射裝置1,例如使用Spectra Physics公司製的Spitfire Pro等,可以根據用途任意選擇。然而,從雷射裝置1射出雷射係幾mJ程度的能量,例如用於雷射加工等的數μJ程度的能量中,難以有效地生成微粒子。In addition to the above, the
<透鏡2>
透鏡2係聚光從雷射裝置1射出之雷射。經由使用透鏡2,能夠相對於特定的領域提高光強度。尤其,經由使用透鏡2,可以將雷射聚光到較溶液4的界面之溶液4的內部。作為透鏡2,可以使用聚光透鏡等公知的透鏡。將經由透鏡2聚光的雷射照射到溶液4上,能夠提高微粒子的生成效率。
<
透鏡2係例如可經由調整透鏡2的形狀或與溶液4的距離等,來調整將雷射聚光到溶液4的內部的位置。透鏡2係例如亦可使用焦點可變透鏡,在固定透鏡2的位置的狀態下,調整將雷射聚光到溶液4的內部的位置。The position at which the
<容器3>
容器3係收納溶液4。作為容器3,使用透明的材料,例如使用石英吸收池。作為容器3,使用例如與400nm附近的波長的吸收率相比,800nm附近的波長的吸收率低的材料。此時,在經由容器3照射雷射時,能夠抑制微粒子的生成效率的降低。
<
<溶液4>
溶液4係包含粉體材料5、和溶媒6。溶媒6係使粉體材料5懸浮。本實施形態中的微粒子係將從雷射裝置1射出的雷射,照射到懸浮在溶媒6中的粉體材料5而生成。
<
<粉體材料5>
粉體材料5係例如具有較微粒子大的中央徑。粉體材料5係例如包含具有500μm以下的有限值的粒子徑的複數粒子。粉體材料5係例如包含具有50nm以上且100μm以下的中央徑的粒子。
<
由於粉體材料5係直接反映在生成的微粒子的組成上,因此可以根據生成的微粒子的種類任意設定。例如,當使用金作為粉體材料5時,生成的微粒子係含有金。此時,與例如使氯化金(III)酸水合物還原的微粒子的製造方法相比,能夠抑制可能附著在微粒子上的不純物的產生。由此,能夠抑制生成之微粒子的品質降低。Since the
粉體材料5係例如包含1種以上的材料。例如粉體材料5含有2種以上的材料時,可以生成含有各材料的合金的微粒子。粉體材料5係例如含有例如鎳、鉑、金、鈦等公知的金屬原子。粉體材料5係只要含有金屬原子。例如可含有純金屬、不含非金屬的合金或金屬氧化物之任一者。The
粉體材料5係例如包含第1粉體材料、和第2粉體材料。第1粉體材料係含有第1金屬原子。第2粉體材料係含有與第1金屬原子不同的第2金屬原子。第1粉體材料係例如具有與第2粉體材料不同的組成。此時,能夠調節第1粉體材料與第2粉體材料的比率,容易控制微粒子中含有的各金屬原子的組成比。由此,能夠抑制微粒子中含有的各金屬原子的組成比的偏差。例如,在使用鎳與鉑的莫爾比為8:2的粉體材料5的情況下,容易生成組成接近鎳:鉑=8:2的微粒子。The
第2粉體材料係具有例如比第1粉體材料的熔點高的熔點。即,生成具有第1粉體材料的特性、和較第1粉體材料高的熔點的微粒子。此時,與不使用第2粉體材料而製造微粒子的情況相比,可擴大作為微粒子安定的溫度領域。由此,能夠達成生成之微粒子的安定性提升。The second powder material has a higher melting point than the first powder material, for example. That is, microparticles having the characteristics of the first powder material and a higher melting point than the first powder material are generated. In this case, the temperature range in which the microparticles are stable can be expanded compared to the case where the microparticles are produced without using the second powder material. Thus, the stability of the generated microparticles can be improved.
粉體材料5係例如含有顯示相同結晶構造的2種以上的材料。此時,於生成之合金的微粒子整體,顯示結晶構造相同的傾向。由此,能夠達成抑制微粒子的安定性提升。The
例如,鐵、鈉及鉀的結晶構造係顯示體心立方晶格。為此,經由作為粉體材料5,含有包含鐵、鈉及鉀中至少2種以上的材料,在生成的合金的微粒子整體上,結晶構造顯示出相同的傾向。又,例如鎳、鋁和鈣的結晶構造係顯示面心立方晶格。為此,經由作為粉體材料5,含有包含鎳、鋁及鈣中至少2種以上的材料,在生成的合金的微粒子整體上,結晶構造顯示出相同的傾向。For example, the crystal structure of iron, sodium and potassium shows a body-centered cubic lattice. Therefore, by containing at least two or more materials among iron, sodium and potassium as the
(實施形態:微粒子之製造方法) 接著,對本實施形態的微粒子的製造方法的一例進行說明。 (Embodiment: Method for producing fine particles) Next, an example of the method for producing fine particles according to this embodiment will be described.
微粒子的製造方法係具備照射工程。微粒的製造方法係可具備調整工程或攪拌工程中的至少一者。The method for producing microparticles includes an irradiation process. The method for producing microparticles includes at least one of a conditioning process and a stirring process.
<照射工程>
照射工程係將飛秒脈衝雷射聚光,對懸浮在溶媒6中的粉體材料5進行照射。照射工程係例如從雷射裝置1射出飛秒脈衝雷射,照射懸浮在溶媒6中的粉體材料5。此時,由於飛秒脈衝雷射的脈衝寬度較雷射的熱向粉體材料5的內部傳遞的時間短之故,不會向照射對象以外的對象熱擴散。此時,雷射的能量不易被微粒子生成以外的反應消耗。由此,能夠提高微粒子的生成效率。
<Irradiation process>
The irradiation process is to focus the femtosecond pulse laser and irradiate the
照射工程係在聚光飛秒脈衝雷射並對粉體材料5照射的過程中,例如亦可對溶媒6照射。此時,雖在溶媒6中生成自由基,但本實施形態中的微粒子的製造方法不需要使自由基與粉體材料5進行化學反應的過程。此時,微粒子的生成量不易受到自由基與粉體材料5的反應速度或自由基的生成量的影響。The irradiation process is a process of focusing a femtosecond pulse laser and irradiating the
照射工程中,例如對具有較微粒子大的中央徑的粉體材料5,照射飛秒脈衝雷射。為此,與利用金屬離子的還原的微粒子的製造方法相比,能夠抑制因金屬離子的還原反應而生成、影響微粒子的不純物的產生。由此,能夠生成品質難以降低的微粒子。In the irradiation process, for example, the
照射工程,係例如可對包含含有第1金屬原子的第1粉體材料、和含有第1金屬原子的第2粉體材料的粉體材料5,照射飛秒脈衝雷射。此時,生成含有第1金屬原子和第2金屬原子的合金的微粒子。此時,能夠調節第1粉體材料與第2粉體材料的比率,容易控制微粒子中含有的各金屬原子的組成比。由此,能夠生成抑制了所含有的各金屬原子的組成比的偏差的微粒子。The irradiation process is, for example, irradiating a
照射工程係例如亦可對含有第1粉體材料、和熔點較第1粉體材料高的第2粉體材料的粉體材料5,照射飛秒脈衝雷射。即,生成具有第1粉體材料的特性、和較第1粉體材料高的熔點的微粒子。此時,與不使用第2粉體材料而製造微粒子的情況相比,可擴大作為微粒子安定的溫度領域。由此,能夠製造安定性高的微粒子。In the irradiation process, for example, the
照射工程係例如亦可對含有第1金屬原子和第2金屬原子的粉體材料5,照射飛秒脈衝雷射,生成組合第1金屬原子、和第2金屬原子的固溶體的微粒子。此時,與不是固溶體的微粒子相比,粒子的部分狀態變化或化學變化則難以發生。由此,能夠製造安定性高的微粒子。In the irradiation process, for example, the
照射工程係例如亦可對含有第1金屬原子和第2金屬原子的粉體材料5,照射飛秒脈衝雷射,生成組合第1金屬原子、和第2金屬原子的共晶體的微粒子。此時,與不是共晶體的微粒子相比,可製造安定性高的微粒子。The irradiation process may be, for example, irradiating the
<調整工程>
在本實施形態中,粉體材料5係含有金屬原子。此時,根據照射到粉體材料5上的雷射的波長,設想在雷射到達焦點之前,被粉體材料5所含的金屬原子的表面吸收,照射到粉體材料5上的雷射在微粒子的生成中不能有效地消耗的情形。即,經由調整照射的雷射的波長,能夠達成微粒子的生成效率的提高。
<Adjustment process>
In this embodiment, the
調整工程係例如將從雷射裝置1射出的雷射的振盪波長,調整為避開粉體材料5中含有的金屬原子吸收的波長域的波長。此時,雷射的能量難以被粉體材料5所含的金屬原子吸收,在微粒子的生成中容易有效地消耗。由此,能夠提高微粒子的生成效率。The adjustment process is, for example, adjusting the oscillation wavelength of the laser emitted from the
調整工程係例如亦可使用雷射裝置1所具有的波長變換機能,進行從雷射裝置1射出的雷射的振盪波長的調整。調整工程係可在照射工程中實施,也可在照射工程的前後中的至少任一個實施,也可分複數次實施。In the adjustment process, for example, the wavelength conversion function of the
<攪拌工程>
在本實施形態中,粉體材料5係被照射雷射。此時,雖需要使雷射的焦點對準粉體材料5,但可以設想粉體材料5隨著時間推移沉降到溶媒6中,雷射難以照射的情形。即,經由攪拌溶媒6使粉體材料5通過雷射的焦點,可達成微粒子的生成效率的提高。
<Mixing process>
In this embodiment, the
攪拌工程係攪拌懸浮有粉體材料5的溶媒6。攪拌工程係亦可一邊實施照射工程一邊攪拌溶媒6。此時,容易對粉體材料5均勻地照射雷射。由此,能夠提高微粒子的生成效率。攪拌工程係可使用例如攪拌器等公知的攪拌機,攪拌溶媒6。攪拌工程係可在照射工程的前後中的至少任意之一加以實施。The stirring process is to stir the solvent 6 in which the
攪拌工程係容易保持例如溶媒6中的粉體材料5分散的狀態。即,防止伴隨時間推移溶媒6中的粉體材料5的沉降。為此,能夠容易地將雷射照射到粉體材料5上。由此,能夠達成微粒子的生成效率的提高。The stirring process makes it easy to maintain the dispersed state of the
攪拌工程係容易保持例如溶媒6中含有第1金屬原子的第1粉體材料及含有第2金屬原子的第2粉體材料均勻分散的狀態。為此,對於含有第1金屬原子及第2金屬原子的固溶體的微粒子,微粒子中含有的各金屬的組成比容易變得均勻。由此,能夠製造均勻性更高的微粒子。The stirring process makes it easy to maintain a state in which the first powder material containing the first metal atoms and the second powder material containing the second metal atoms are uniformly dispersed in the solvent 6 . For this reason, in the case of fine particles containing a solid solution of first metal atoms and second metal atoms, the composition ratio of each metal contained in the fine particles can be easily made uniform. As a result, fine particles with higher uniformity can be produced.
由此,生成本實施形態中的微粒子及膠體溶液。Thus, microparticles and a colloidal solution in the present embodiment are produced.
根據本實施形態,具備對溶媒6中的粉體材料5,照射飛秒脈衝雷射,生成含有金屬原子的微粒的照射工程,粉體材料5係具有較微粒子大的中央徑。為此,與包含金屬離子的還原的微粒子的製造方法相比,能夠抑制對微粒子產生影響的不純物的產生。由此,能夠抑制生成之微粒子的品質降低。According to the present embodiment, a femtosecond pulse laser is irradiated to a
又,根據本實施形態時,粉體材料5係例如包含含有第1金屬原子的第1粉體材料、和含有與第1金屬原子不同的第2金屬原子的第2粉體材料,微粒子係含有第1金屬原子及第2金屬原子的合金。為此,能夠調節第1粉體材料與第2粉體材料的比率,容易控制微粒子中含有的各金屬原子的組成比。由此,能夠抑制微粒子中含有的各金屬原子的組成比的偏差。Furthermore, according to this embodiment, the
又,根據本實施形態時,第2粉體材料的熔點係高於第1粉體材料的熔點。即,生成具有第1粉體材料的特性、和較第1粉體材料高的熔點的微粒子。為此,與不使用第2粉體材料而製造微粒子的情況相比,可擴大作為微粒子安定的溫度領域。由此,能夠達成生成之微粒子的安定性提升。Furthermore, according to this embodiment, the melting point of the second powder material is higher than the melting point of the first powder material. That is, microparticles having the characteristics of the first powder material and a higher melting point than the first powder material are generated. Therefore, the temperature range in which the microparticles are stable can be expanded compared to the case where the microparticles are produced without using the second powder material. Thus, the stability of the generated microparticles can be improved.
又,根據本實施形態時,微粒子係將第1金屬原子和第2金屬原子組合的固溶體。為此,與不是固溶體的微粒子相比,粒子的部分狀態變化或化學變化則難以發生。由此,更能夠達成生成之微粒子的安定性提升。Furthermore, according to this embodiment, the fine particles are a solid solution in which the first metal atoms and the second metal atoms are combined. For this reason, partial state changes or chemical changes of the particles are less likely to occur compared to fine particles that are not solid solutions. As a result, the stability of the generated microparticles can be further improved.
又,根據本實施形態時,膠體溶液係具備分散有微粒子的溶媒6。為此,與不使用溶媒6而保管微粒子的情況相比,容易抑制微粒子的凝聚。由此,能夠提供品質維持的微粒子。Furthermore, according to this embodiment, the colloidal solution system includes the solvent 6 in which fine particles are dispersed. For this reason, compared with the case of storing the fine particles without using the solvent 6, it is easier to suppress the aggregation of the fine particles. This makes it possible to provide fine particles with maintained quality.
雖說明了本發明之數個實施形態,但此等實施形態係做為例子加以提示者,並非意圖限定發明之範圍。此等新穎化實施形態係可以其他之各種形態加以實施,在不脫離發明之要旨之範圍下,可進行種種之省略、置換或變更。此等之實施形態或該變形係包含於發明之範圍或要旨的同時,亦含於記載於專利請求之範圍之發明與其均等之範圍。Although several embodiments of the present invention are described, these embodiments are provided as examples and are not intended to limit the scope of the invention. These innovative embodiments can be implemented in various other forms, and various omissions, substitutions, or changes can be made without departing from the scope of the gist of the invention. These embodiments or modifications are included in the scope or gist of the invention, and are also included in the invention described in the scope of the patent claim and its equivalent.
1:雷射裝置 2:透鏡 3:容器 3a:開口部 4:溶液 5:粉體材料 6:溶媒 100:製造裝置 1: Laser device 2: Lens 3: Container 3a: Opening 4: Solution 5: Powder material 6: Solvent 100: Manufacturing device
[圖1]圖1係顯示在本實施形態的微粒子的製造方法中使用的製造裝置的一例的模式斜視圖。[Fig. 1] Fig. 1 is a schematic perspective view showing an example of a production apparatus used in the method of producing fine particles according to this embodiment.
1:雷射裝置 1:Laser device
2:透鏡 2: Lens
3:容器 3:Container
4:溶液 4: solution
5:粉體材料 5: Powder material
6:溶媒 6: Solvent
100:製造裝置 100: Manufacturing device
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