TW202403272A - Hermetic inspection system - Google Patents
Hermetic inspection system Download PDFInfo
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- TW202403272A TW202403272A TW111124620A TW111124620A TW202403272A TW 202403272 A TW202403272 A TW 202403272A TW 111124620 A TW111124620 A TW 111124620A TW 111124620 A TW111124620 A TW 111124620A TW 202403272 A TW202403272 A TW 202403272A
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- closing valve
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- 238000007689 inspection Methods 0.000 title abstract 4
- 239000007789 gas Substances 0.000 claims description 137
- 238000001514 detection method Methods 0.000 claims description 43
- 238000012360 testing method Methods 0.000 claims description 30
- 238000007789 sealing Methods 0.000 claims description 24
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 22
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 11
- 239000001569 carbon dioxide Substances 0.000 claims description 11
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/224—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for valves
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Abstract
Description
本發明有關於閥產品的檢測,特別是以特殊氣體為偵測對象的氣密性檢測系統。The present invention relates to the detection of valve products, especially an air tightness detection system that uses special gases as detection objects.
目前檢測閥產品的設備均採用壓縮空氣進行模擬仿真。測試壓力為達到與模擬環境相仿,有時需高達數百帕(Bars) ,且須經由價格高昂的氣敏測試儀進行洩漏壓力的判讀。由於採用壓力式判讀法,因而須等候一段時間待洩漏壓力達到穩定狀態後方可測試,並藉此結果對閥的密封性進行判定。Currently, the equipment used to detect valve products uses compressed air for simulation. In order to achieve a test pressure similar to the simulated environment, it sometimes needs to be as high as hundreds of Pascals (Bars), and the leakage pressure must be determined by an expensive gas-sensitive tester. Since the pressure-type interpretation method is used, it is necessary to wait for a period of time until the leakage pressure reaches a stable state before testing, and use the results to determine the tightness of the valve.
然而此習知的測試方式具有諸多缺點。其一由於採用模擬仿真分式進行測試,當受測物件以測定密封性為單一目標時,檢測系統須採用同樣危險的高壓容器與高壓氣源環境。高壓作業除有工安風險外,其設備成本與維護費用均較為高昂。其次,習知技術採用的方法為測定一段時間後的洩漏氣體壓力。然而洩漏達合理分辨率之壓力需一段時間等待其穩定,此時間耗費將徒增工時成本。最後此習知的測試方式須採用氣敏測試儀,而氣敏測試儀屬貴重儀器,故所述檢測設備將導致價格成本居高不下。However, this conventional testing method has many shortcomings. First, due to the use of simulated fractional testing, when the single goal of the tested object is to determine the sealing, the detection system must use the same dangerous high-pressure container and high-pressure gas source environment. In addition to the industrial safety risks associated with high-voltage operations, equipment costs and maintenance costs are relatively high. Secondly, the method used in the conventional technology is to measure the leakage gas pressure after a period of time. However, it takes a period of time for the leakage to reach a reasonable resolution of pressure and wait for it to stabilize, which will only increase the labor cost. Finally, this conventional testing method requires the use of a gas-sensitive tester, and the gas-sensitive tester is an expensive instrument, so the price of the testing equipment will remain high.
為了解決先前技術中存在的問題,本發明提出一種氣密性檢測系統,其設備建置成本、操作成本低,且檢測速度快。In order to solve the problems existing in the prior art, the present invention proposes an air tightness detection system, which has low equipment construction cost, low operating cost, and fast detection speed.
本發明提供一種氣密性檢測系統,用於對一待測閥件進行氣密檢測,其中該待測閥件包括一第一側與一第二側。氣密性檢測系統包括一壓縮空氣源、一特殊氣體源以及一特殊氣體感測器。壓縮空氣源用於提供一壓縮空氣。特殊氣體源用於提供一特殊空氣,且該特殊空氣的成分不同於該壓縮空氣的主要成分。該壓縮空氣源與該特殊氣體源連接於該第一側。特殊氣體感測器連接於該第二側,用於檢測該特殊氣體的濃度。。The invention provides an air-tightness detection system for air-tightness detection of a valve component to be tested, wherein the valve component to be tested includes a first side and a second side. The air tightness detection system includes a compressed air source, a special gas source and a special gas sensor. The compressed air source is used to provide compressed air. The special gas source is used to provide a special air, and the composition of the special air is different from the main component of the compressed air. The compressed air source and the special gas source are connected to the first side. A special gas sensor is connected to the second side and used to detect the concentration of the special gas. .
在至少一實施例中,氣密性檢測系統更包含一進氣側連接管路、一出氣側連接管路、一第一開閉閥、一第二開閉閥、一第三開閉閥以及一第四開閉閥。該待測閥件的該第一側連接於該進氣側連接管路的中段。該待測閥件的該第二側連接於該出氣側連接管路的中段。該第一開閉閥連接於該進氣側連接管路的入口端,且該第二開閉閥連接於該進氣側連接管路的出口端。第三開閉閥連接於該出氣側連接管路的入口端,且該第四開閉閥連接於該出氣側連接管路的出口端。該特殊氣體感測器包含一第一特殊氣體感測器與一第二特殊氣體感測器;該第一特殊氣體感測器設置於該出氣側連接管路上,且位於該第二側與該第四開閉閥之間;該第二特殊氣體感測器設置於該進氣側連接管路,且位於該第一側與該第二開閉閥之間。In at least one embodiment, the air tightness detection system further includes an air inlet side connecting pipe, an air outlet side connecting pipe, a first opening and closing valve, a second opening and closing valve, a third opening and closing valve and a fourth opening and closing valve. On/off valve. The first side of the valve member to be tested is connected to the middle section of the intake side connecting pipe. The second side of the valve member to be tested is connected to the middle section of the gas outlet side connecting pipeline. The first opening and closing valve is connected to the inlet end of the air intake side connecting pipe, and the second opening and closing valve is connected to the outlet end of the air intake side connecting pipe. The third opening and closing valve is connected to the inlet end of the air outlet side connecting pipe, and the fourth opening and closing valve is connected to the outlet end of the air outlet side connecting pipe. The special gas sensor includes a first special gas sensor and a second special gas sensor; the first special gas sensor is disposed on the gas outlet side connecting pipe and is located between the second side and the between the fourth opening and closing valve; the second special gas sensor is arranged in the intake side connecting pipe and is located between the first side and the second opening and closing valve.
在至少一實施例中,氣密性檢測系統更包含一氣體混配器,該壓縮空氣源及該特殊氣體源透過該氣體混配器連接於該第一開閉閥與該第三開閉閥,進而連接至該進氣側連接管路的該入口端與該出氣側連接管路的該入口端。In at least one embodiment, the air tightness detection system further includes a gas mixer. The compressed air source and the special gas source are connected to the first opening and closing valve and the third opening and closing valve through the gas mixer, and are further connected to The inlet end of the air inlet side connecting pipe and the inlet end of the air outlet side connecting pipe.
在至少一實施例中,該特殊氣體是不同於大氣主要組成的氣體。In at least one embodiment, the special gas is a gas that is different from the main composition of the atmosphere.
在至少一實施例中,該特殊氣體為二氧化碳、一氧化碳、氦氣,或一揮發性物質揮發形成的蒸氣。In at least one embodiment, the special gas is carbon dioxide, carbon monoxide, helium, or a vapor formed by volatilization of a volatile substance.
在至少一實施例中,氣密性檢測系統更包含一密封治具,該密封治具具有匹配於該待測閥件外型的一腔室,用於包覆於該待測閥件並加以密封。In at least one embodiment, the air tightness detection system further includes a sealing fixture, which has a chamber that matches the shape of the valve component to be tested and is used to cover the valve component to be tested and seal it. seal.
在至少一實施例中,該進氣側連接管路、該出氣側連接管路是部分埋設於該密封治具的管道,並且其等之連接口相應於該第一側與該第二側。In at least one embodiment, the air inlet side connecting pipe and the air outlet side connecting pipe are pipes partially buried in the sealing fixture, and their connection ports correspond to the first side and the second side.
在至少一實施例中,該密封治具包括一上治具與一下治具,該上治具與該下治具分別具有一半腔室,用於結合形成該腔室,且該進氣側連接管路與出氣側連接管路部分埋設於該下治具。In at least one embodiment, the sealing jig includes an upper jig and a lower jig. The upper jig and the lower jig each have half a cavity for combining to form the cavity, and the air inlet side is connected The pipeline connecting the pipeline and the air outlet side is partially buried in the lower fixture.
在至少一實施例中,於一正壓測試中,該第二開閉閥與該第三開閉閥關閉,而該第一開閉閥與該第四開閉閥為開啟。In at least one embodiment, during a positive pressure test, the second on-off valve and the third on-off valve are closed, while the first on-off valve and the fourth on-off valve are open.
在至少一實施例中,於一負壓測試中,該第一開閉閥與該第四開閉閥關閉,而該第二開閉閥與該第三開閉閥為開啟。In at least one embodiment, during a negative pressure test, the first opening and closing valve and the fourth opening and closing valve are closed, while the second opening and closing valve and the third opening and closing valve are open.
透過使用特殊氣體作為偵測對象/標記,本發明有效降低檢測閥產品的設備成本,並且提升檢測效率。By using special gases as detection objects/markers, the present invention effectively reduces the equipment cost of detection valve products and improves detection efficiency.
請參閱圖1與圖2所示,是本發明氣密性檢測系統1的實施例的結構示意圖。如圖1所示,待測閥件30安置在氣密性檢測系統1中。待測閥件30包括進氣側31與出氣側32。基於待測閥件30的用途不同,例如止逆閥,進氣側31至出氣側32的氣密性(不漏氣的壓差)不等於出氣側32至進氣側31。本發明可提供正壓測試與逆壓測試,測試兩個方向的氣密性。Please refer to FIG. 1 and FIG. 2 , which are schematic structural diagrams of an embodiment of the air
如圖1與圖2所示,氣密性檢測系統1包括一進氣側連接管路11、出氣側連接管路12、一第一開閉閥131、一第二開閉閥132、一第三開閉閥133、一第四開閉閥134、一壓縮空氣源14、一特殊氣體源15、第一特殊氣體感測器161以及第二特殊氣體感測器162。As shown in Figures 1 and 2, the air
如圖1與圖2所示,待測閥件30的進氣側31連接於進氣側連接管路11的中段,並且待測閥件30的出氣側32連接於出氣側連接管路12的中段。第一開閉閥131連接於進氣側連接管路11的入口端,且第二開閉閥132連接於進氣側連接管路11的出口端。第三開閉閥133連接於出氣側連接管路12的入口端,且第四開閉閥134連接於出氣側連接管路12的出口端。As shown in FIGS. 1 and 2 , the
如圖1與圖2所示,壓縮空氣源14及特殊氣體源15透過一氣體混配器17連接於第一開閉閥131與第三開閉閥133,進而連接至進氣側連接管路11的入口端與出氣側連接管路12的入口端。As shown in FIGS. 1 and 2 , the
本發明的氣密性檢測系統1主要由雙氣源組成,分別是壓縮空氣源14與特殊氣體源15。The air
壓縮空氣源14用於提供壓縮空氣,壓縮空氣容易取得而成本低廉,同時,大氣成分固定(主要由固定比例的氧氣與氮氣組成),也容易與特殊氣體做出區別。例如,在測試場所中可以直接架設空壓機,經過濾器直接擷取大氣空氣並壓縮製造,即可得到壓縮空氣。事實上,壓縮空氣源14可以就是空壓機的儲氣槽。The
特殊氣體源15用於提供特殊氣體。特殊氣體是不同於大氣主要組成的氣體,或是大氣中含量(濃度)低的氣體。特殊氣體用於作為洩漏偵測對象/偵測標記。也就是僅針對特殊氣體的含量(濃度)進行偵測,而不需偵測壓力變化或壓縮空氣中的成分。特殊氣體可以是大氣中含量低的氣體,且容易偵測的氣體。例如,二氧化碳在大氣中通常含量不會過高,且取得成本低;同時,二氧化碳偵測器的設備成本相對低,因此二氧化碳可作為特殊氣體。特殊氣體的選擇主要是排除大氣主要成分:氮氣與氧氣。因此,特殊氣體可為二氧化碳、一氧化碳或氦氣等。如前所述,二氧化碳成本低且感測器的成本也低,最適合作為特殊氣體,但不排除其他氣體。在可行的實施例中,特殊氣體可由一揮發性物質提供。舉例而言,特殊氣體為酒精揮發形成的酒精蒸氣,並且特殊氣體源15中設置例如蒸發器或加熱器,以揮發產生特殊氣體。The
氣體混配器17用於以適當的定量比例混合壓縮空氣與特殊氣體而產生混合氣體。例如以二氧化碳作為特殊氣體的場合,可以正常大氣中二氧化碳含量為基準,設定一個高於前述含量的二氧化碳濃度,將壓縮空氣與二氧化碳進行混合。The
如圖1與圖2所示,第一特殊氣體感測器161設置於出氣側連接管路12上,且位於出氣側32與第四開閉閥134之間。第二特殊氣體感測器162設置於進氣側連接管路11,且位於進氣側31與第二開閉閥132之間。As shown in FIGS. 1 and 2 , the first
如圖1與圖2所示,第一特殊氣體感測器161與第二特殊氣體感測器162用於感測混合氣體中的特殊氣體濃度。連接於第一特殊氣體感測器161與第二特殊氣體感測器162的資料傳輸單元18可將特殊氣體濃度透過有線或無線方式傳送至主機端,即時監控濃度變化,透過特殊氣體濃度變化,推定待測閥件30的密封能力。As shown in FIGS. 1 and 2 , the first
如圖1與圖2所示,待測閥件30可透過夾持方式密封並快速與測試管路連接。在一具體實施例中,氣密性檢測系統1更包括一密封治具19。密封治具19具有匹配於待測閥件30外型的腔室,用於包覆於待測閥件30並加以密封。進氣側連接管路11、出氣側連接管路12可以是部分埋設於密封治具19的管道,並且連接口相應於待測閥件30的進氣側31與出氣側32。因此,當待測閥件30密封於密封治具19中,進氣側31與出氣側32也可以同時連接相應的進氣側連接管路11、出氣側連接管路12。As shown in Figures 1 and 2, the
如圖1與圖2所示,密封治具19包括上治具191與下治具192,上治具191與下治具192分別具有半腔室193, 194,用於結合形成上述腔室。待測閥件30可先以下半部置入下治具192的半腔室194,再將上治具191結合於下治具192,而使密封治具19包覆於待測閥件30並加以密封。前述進氣側連接管路11、出氣側連接管路12可以依據待測閥件30的進氣側31與出氣側32於下治具192所在位置,而部分埋設於下治具192。如此一來,密封治具19可以達成待測閥件30的快速拆換,以利測試作業的進行。需說明的是,圖2中的上治具191與下治具192省略了剖面線的繪製,以利各部件與元件標號的呈現,實際上圖2中所呈現的上治具191與下治具192仍為其等之剖面。As shown in FIGS. 1 and 2 , the sealing
如圖3與圖4所示,本發明可提供正壓測試與逆壓測試,測試兩個方向的氣密性。雙氣源的壓縮空氣與特殊氣體分別經管路匯入氣體混配器17。氣體混配器17以定量方式混合兩種氣體。混合比例與以下三點互為相關:1、受測產品類型;2、測定壓力;3、測定時間。混合後壓縮氣體將由檢測管路被導入待測閥件30。依據正壓測試與逆壓測試的不同,氣體路徑A, B也有所不同。As shown in Figures 3 and 4, the present invention can provide positive pressure testing and reverse pressure testing to test the air tightness in both directions. The compressed air and special gas from the dual gas sources are respectively introduced into the
如圖3所示,為進行正壓測試過程。於正壓測試中,第二開閉閥132與第三開閉閥133關閉,而第一開閉閥131與第四開閉閥134為開啟。此時氣體路徑A為從氣體混配器17連接至待測閥件30的進氣側31,接著再由待測閥件30的出氣側32連接至開啟的第四開閉閥134,而連接於出氣側連接管路12的出口端。透過第一開閉閥131的開啟,氣體混配器17輸送混合氣體至待測閥件30的進氣側31。此時,若待測閥件30漏氣,則第一特殊氣體感測器161可以感測到特殊氣體。此時,只要資料傳輸單元18同時紀錄氣體混配器17輸送混合氣體的壓力,就可以得到待測閥件30的正壓密閉能力。As shown in Figure 3, the positive pressure test process is carried out. During the positive pressure test, the second on-off
如圖4所示,為進行負壓測試過程。待測閥件30的負壓密閉能力可能優於正壓密閉能力。例如止逆閥的負壓密閉能力會高於正壓密閉能力。為了避免混合氣體的壓力不足以達成使待測閥件30在負壓測試中洩漏,本發明氣密性檢測系統1更包含一真空泵20,經由第二開閉閥132連接於進氣側連接管路11的出口端,用於在進氣側連接管路11的出口端抽氣以提供負壓。As shown in Figure 4, the negative pressure test process is carried out. The negative pressure sealing capability of the
如圖4所示,於負壓測試中,第一開閉閥131與第四開閉閥134關閉,而第二開閉閥132與第三開閉閥133為開啟。此時氣體路徑B為從氣體混配器17連接至待測閥件30的出氣側32,接著再由待測閥件30的進氣側31連接至開啟第二開閉閥132,而連接於進氣側連接管路11的出口端,最後連接於真空泵20。透過第三開閉閥133的開啟,氣體混配器17輸送混合氣體至待測閥件30的出氣側32,並且真空泵20抽氣已增加出氣側32至進氣側31的壓力差。此時,若待測閥件30漏氣,則第二特殊氣體感測器162可以感測到特殊氣體。此時,只要資料傳輸單元18同時紀錄氣體混配器17輸送混合氣體的壓力再加上真空泵20額外提供的壓差,就可以得到待測閥件30的負壓密閉能力。As shown in FIG. 4 , during the negative pressure test, the first on-off
基於上述技術手段,本發明氣密性檢測系統1的實施例的技術手段可歸納如下。待測閥件30包括第一側與第二側。其中,第一側與第二側的配置可以是第一側為進氣側31,而第二側為出氣側32。或,第一側為出氣側32,而第二側為進氣側31。氣密性檢測系統1包括壓縮空氣源14與特殊氣體源15透過氣體混配器17與開閉閥連接於第一側,而特殊氣體感測器連接於第二側,透過氣體混配器17的與開閉閥,混合氣體輸送至第一側。透過特殊氣體感測器檢測特殊氣體的濃度,即可偵測第一側至第二側的氣密效果。在需要額外提升第一側至第二側的壓差之場合,第二側可進一步連接提供負壓的真空泵。Based on the above technical means, the technical means of the embodiment of the air
透過使用特殊氣體作為偵測對象/標記,本發明有效降低檢測閥產品的設備成本,並且提升檢測效率。By using special gases as detection objects/markers, the present invention effectively reduces the equipment cost of detection valve products and improves detection efficiency.
以上所述者,僅為本發明之一較佳實施例而已,並非用來限定本發明實施之範圍,即凡依本發明申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾,均應包括於本發明之申請專利範圍內。The above is only one of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. That is, all changes in shape, structure, characteristics and spirit described in the patent scope of the present invention may be equal to those described above. Modifications should be included in the patentable scope of the present invention.
1:氣密性檢測系統
11:進氣側連接管路
12:出氣側連接管路
131:第一開閉閥
132:第二開閉閥
133:第三開閉閥
134:第四開閉閥
14:壓縮空氣源
15:特殊氣體源
161:第一特殊氣體感測器
162:第二特殊氣體感測器
17:氣體混配器
18:資料傳輸單元
19:密封治具
191:上治具
192:下治具
193, 194:半腔室
20:真空泵
30:待測閥件
31:進氣側
32:出氣側
A:氣體路徑
B:氣體路徑
1: Air tightness detection system
11: Inlet side connecting pipe
12: Outlet side connecting pipe
131: First opening and closing valve
132: Second opening and closing valve
133: The third opening and closing valve
134: The fourth opening and closing valve
14:Compressed air source
15:Special gas source
161: The first special gas sensor
162: The second special gas sensor
17:Gas mixer
18: Data transmission unit
19:Sealing fixture
191: Upper fixture
192:
[圖1]為本發明實施例中,氣密性檢測系統的剖面分解圖。[Fig. 1] is a cross-sectional exploded view of the air tightness detection system in the embodiment of the present invention.
[圖2]為本發明實施例中,氣密性檢測系統的剖面圖。[Fig. 2] is a cross-sectional view of the air tightness detection system in the embodiment of the present invention.
[圖3]為本發明實施例中,氣密性檢測系統的剖面圖,揭示氣體路徑。[Fig. 3] is a cross-sectional view of the air tightness detection system in the embodiment of the present invention, revealing the gas path.
[圖4]為本發明實施例中,氣密性檢測系統的剖面圖,揭示另一氣體路徑。[Fig. 4] is a cross-sectional view of the air tightness detection system in the embodiment of the present invention, revealing another gas path.
1:氣密性檢測系統 1: Air tightness detection system
11:進氣側連接管路 11: Inlet side connecting pipe
12:出氣側連接管路 12: Outlet side connecting pipe
131:第一開閉閥 131: First opening and closing valve
132:第二開閉閥 132: Second opening and closing valve
133:第三開閉閥 133: The third opening and closing valve
134:第四開閉閥 134: The fourth opening and closing valve
14:壓縮空氣源 14:Compressed air source
15:特殊氣體源 15:Special gas source
161:第一特殊氣體感測器 161: The first special gas sensor
162:第二特殊氣體感測器 162: The second special gas sensor
17:氣體混配器 17:Gas mixer
18:資料傳輸單元 18: Data transmission unit
19:密封治具 19:Sealing fixture
20:真空泵 20: Vacuum pump
30:待測閥件 30: Valve parts to be tested
31:進氣側 31: Intake side
32:出氣側 32: Outlet side
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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TW111124620A TW202403272A (en) | 2022-06-30 | 2022-06-30 | Hermetic inspection system |
CN202211240776.1A CN117367692A (en) | 2022-06-30 | 2022-10-11 | Air tightness detection system |
JP2022163909A JP2024006864A (en) | 2022-06-30 | 2022-10-12 | Airtightness inspection system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW111124620A TW202403272A (en) | 2022-06-30 | 2022-06-30 | Hermetic inspection system |
Publications (1)
Publication Number | Publication Date |
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TW202403272A true TW202403272A (en) | 2024-01-16 |
Family
ID=89401032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW111124620A TW202403272A (en) | 2022-06-30 | 2022-06-30 | Hermetic inspection system |
Country Status (3)
Country | Link |
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JP (1) | JP2024006864A (en) |
CN (1) | CN117367692A (en) |
TW (1) | TW202403272A (en) |
-
2022
- 2022-06-30 TW TW111124620A patent/TW202403272A/en unknown
- 2022-10-11 CN CN202211240776.1A patent/CN117367692A/en active Pending
- 2022-10-12 JP JP2022163909A patent/JP2024006864A/en active Pending
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CN117367692A (en) | 2024-01-09 |
JP2024006864A (en) | 2024-01-17 |
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