TW202349101A - Light path adjustment mechanism - Google Patents

Light path adjustment mechanism Download PDF

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TW202349101A
TW202349101A TW112131250A TW112131250A TW202349101A TW 202349101 A TW202349101 A TW 202349101A TW 112131250 A TW112131250 A TW 112131250A TW 112131250 A TW112131250 A TW 112131250A TW 202349101 A TW202349101 A TW 202349101A
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Taiwan
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driving signal
adjustment mechanism
pulse
path adjustment
optical path
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TW112131250A
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Chinese (zh)
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TWI838307B (en
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林維賜
張語宸
程冠倫
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揚明光學股份有限公司
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Abstract

A light path adjustment mechanism includes a carrier, an optical element, and an actuator that receives a drive signal. During the rise time in one period of the driving signal, at the stage when the voltage value continually increases would not be then subject to a decrease in voltage value. During the falling time in one period of the driving signal, at the stage when the voltage value continually decreases would not be then subject to an increase in voltage value.

Description

光路調整機構Optical path adjustment mechanism

本發明關於一種光路調整機構。The invention relates to an optical path adjustment mechanism.

近年來,各種影像顯示技術已廣泛地應用於日常生活上。於一影像顯示裝置中,例如可設置一光路調整機構改變光線於裝置內的行進光路,以提供例如提高成像解析度、改善畫面品質等各種效果。然而,習知光路調整機構的構件數目、重量、體積均較大,難以進一步微型化。因此,亟需一種結構簡單、可靠度高且可大幅減少重量及體積的光路調整機構設計。In recent years, various image display technologies have been widely used in daily life. In an image display device, for example, an optical path adjustment mechanism can be provided to change the optical path of light in the device to provide various effects such as improving imaging resolution and improving picture quality. However, the conventional optical path adjustment mechanism has a large number of components, weight, and volume, making it difficult to further miniaturize it. Therefore, there is an urgent need for an optical path adjustment mechanism design that has a simple structure, high reliability, and can significantly reduce weight and volume.

本發明的其他目的和優點可以從本發明所揭露的技術特徵中得到進一步的了解。為讓本發明之上述和其他目的、特徵和優點能更明顯易懂,下文特舉實施例並配合所附圖式,作詳細說明如下。Other objects and advantages of the present invention can be further understood from the technical features disclosed in the present invention. In order to make the above and other objects, features and advantages of the present invention more obvious and understandable, the following embodiments are described in detail with reference to the accompanying drawings.

根據本發明的一個觀點,提供一種光路調整機構,包含承載座、光學元件以及第一致動器。光學元件設在承載座,第一致動器用以使光學元件以第一軸為軸心作動,且第一致動器接收第一驅動訊號。第一驅動訊號符合以下特性:第一驅動訊號在一周期中,僅包含一脈衝上升段及一脈衝下降段,第一驅動訊號在脈衝上升段的時間內,電壓值增加後不再減少,且在脈衝下降段的時間內,電壓值減少後不再增加。According to one aspect of the present invention, an optical path adjustment mechanism is provided, including a bearing base, an optical element and a first actuator. The optical element is arranged on the bearing base, the first actuator is used to make the optical element move around the first axis, and the first actuator receives the first driving signal. The first driving signal meets the following characteristics: the first driving signal only includes one pulse rising section and one pulse falling section in one cycle, the voltage value of the first driving signal does not decrease after increasing during the pulse rising section, and During the pulse falling period, the voltage value decreases and then does not increase.

根據本發明的上述觀點,可降低中高頻段的頻率響應,減少光學元件作動的噪音並使擺動角度的控制更為穩定及精確。According to the above viewpoints of the present invention, the frequency response in the mid-to-high frequency band can be reduced, the noise of the optical element operation can be reduced, and the control of the swing angle can be made more stable and precise.

根據本發明的一個觀點,提供一種光路調整機構,包含承載座、光學元件以及第一致動器。光學元件設在承載座,第一致動器用以使光學元件以第一軸為軸心作動。第一致動器接收第一驅動訊號,第一驅動訊號在一周期中,僅包含一脈衝上升段及一脈衝下降段。第一驅動訊號在脈衝上升段的時間內,第一驅動訊號的電壓值與時間的相對曲線變化,僅具有斜率實質大於等於零的區段,第一驅動訊號在脈衝下降段的時間內,第一驅動訊號的電壓值與時間的相對曲線變化,僅具有斜率實質小於等於零的區段。According to one aspect of the present invention, an optical path adjustment mechanism is provided, including a bearing base, an optical element and a first actuator. The optical element is arranged on the bearing seat, and the first actuator is used to move the optical element with the first axis as its axis. The first actuator receives the first driving signal, and the first driving signal only includes a pulse rising segment and a pulse falling segment in one cycle. During the pulse rising section of the first driving signal, the relative curve change of the voltage value of the first driving signal with time only has a section where the slope is substantially greater than or equal to zero. During the pulse falling section of the first driving signal, the first driving signal The relative curve change of the voltage value of the driving signal versus time only has a section where the slope is substantially less than or equal to zero.

根據本發明的上述觀點,可降低基頻外不同頻段的響應,且特別是偶數倍頻的頻段其降低響應的效果更佳,因此可減少光學元件作動的噪音並使擺動角度的控制更為穩定及精確。According to the above point of view of the present invention, the response of different frequency bands outside the fundamental frequency can be reduced, and the response reduction effect is better especially in the even-numbered frequency band. Therefore, the noise of the operation of the optical element can be reduced and the control of the swing angle can be more stable. and precise.

本發明的其他目的和優點可以從本發明所揭露的技術特徵中得到進一步的了解。為讓本發明之上述和其他目的、特徵和優點能更明顯易懂,下文特舉實施例並配合所附圖式,作詳細說明如下。Other objects and advantages of the present invention can be further understood from the technical features disclosed in the present invention. In order to make the above and other objects, features and advantages of the present invention more obvious and understandable, the following embodiments are described in detail with reference to the accompanying drawings.

有關下列實施例中所使用的用語「第一」、「第二」是為了辨識相同或相似本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之實施例的詳細說明中,將可清楚的呈現。的元件而使用。以下實施例中所提到的方向用語,例如:上、下、左、右、前或後等,僅是參考附加圖式的方向。因此,使用的方向用語是用來說明並非用來限制本發明。The terms "first" and "second" used in the following embodiments are for the purpose of identifying the same or similar technical contents, features and functions mentioned above in the present invention. In the following detailed description of the embodiments with reference to the drawings, , will be clearly displayed. components used. Directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only for reference to the directions in the attached drawings. Accordingly, the directional terms used are illustrative and not limiting of the invention.

下述實施例中之揭露內容揭示一種光路調整機構,其可運用於不同光學系統(例如顯示裝置、投影裝置等等)以調整或變化光路俾提供例如提升成像解析度、提高影像品質(消除暗區、柔和化影像邊緣)等效果而不限定,且光路調整機構於光學系統中的設置位置及配置方式完全不限定。The disclosure in the following embodiments discloses an optical path adjustment mechanism that can be used in different optical systems (such as display devices, projection devices, etc.) to adjust or change the optical path to provide, for example, improved imaging resolution and improved image quality (elimination of darkening). area, softening image edges) and other effects are not limited, and the setting position and configuration method of the optical path adjustment mechanism in the optical system are not limited at all.

圖1為本發明一實施例之光路調整機構的構件分解圖,圖2為圖1的光路調整機構於組裝後的平面示意圖。如圖1所示,光路調整機構100包含一承載座110、一基座120、一磁鐵座130、一支架140、一第一對可撓件152、一第二對可撓件154。承載座110包含一內框112及一外框114,外框114位於內框112的外側且藉由第一對可撓件152連接內框112,且內框112與外框114例如可具有同一水平高度。承載座110的外框114可藉由第二對可撓件154連接至基座120。承載座110及基座120可設置於支架140的一側,且磁鐵座130可設置於支架140的另一側。於本實施例中,支架140為具有一第一側142、一第二側144及一第三側146的U型外形,且可形成一缺口140a供其他光學構件置入或穿過。再者,光路調整機構100可包含一光學元件180及複數個致動器。光學元件180可設在承載座110,且例如可設在承載座110的內框112上,光學元件180例如可為一鏡片,且鏡片僅需能提供偏折光線的效果即可,其形式及種類並不限定,例如可為一透鏡(Lens)或一反射鏡(Mirror)。於本實施例中,複數個致動器例如可包含設在光學元件180的兩不同側的致動器160及致動器170,致動器160例如可包括線圈162及磁鐵164,且致動器170例如可包括線圈172與磁鐵174,磁鐵164、174可固定於磁鐵座130,因此當磁鐵座130固定於支架140的一側時,磁鐵164、174可隨之固定於支架140上。線圈162可固定於光學元件180的一側,且另一線圈172可固定於一線圈座176,線圈座176可固定於承載座110的外框114進而使線圈172固定於承載座110的外框114上。另外,上述承載座110、基座120及磁鐵座130例如可藉由螺絲或插銷的固定件190分別連接並固定至支架140。於另一實施例中,基座120亦可由支架140的一部分所構成,因基座120可直接固定於支架140或可為支架140的一部分,故承載座110的外框114可藉由第二對可撓件154連接至支架140。再者,於一實施例中,可設置一鏡片座192抵靠光學元件180的周緣以助於定位光學元件180。FIG. 1 is an exploded view of the optical path adjustment mechanism according to an embodiment of the present invention. FIG. 2 is a schematic plan view of the optical path adjustment mechanism in FIG. 1 after assembly. As shown in FIG. 1 , the optical path adjustment mechanism 100 includes a bearing seat 110 , a base 120 , a magnet seat 130 , a bracket 140 , a first pair of flexible members 152 , and a second pair of flexible members 154 . The carrying base 110 includes an inner frame 112 and an outer frame 114. The outer frame 114 is located outside the inner frame 112 and is connected to the inner frame 112 through a first pair of flexible members 152. The inner frame 112 and the outer frame 114 can, for example, have the same structure. Horizontal height. The outer frame 114 of the carrying base 110 can be connected to the base 120 through a second pair of flexible members 154 . The bearing seat 110 and the base 120 can be disposed on one side of the bracket 140 , and the magnet seat 130 can be disposed on the other side of the bracket 140 . In this embodiment, the bracket 140 has a U-shaped shape with a first side 142, a second side 144, and a third side 146, and can form a gap 140a for other optical components to be inserted or passed through. Furthermore, the optical path adjustment mechanism 100 may include an optical element 180 and a plurality of actuators. The optical element 180 can be disposed on the carrying base 110, and for example, can be disposed on the inner frame 112 of the carrying base 110. The optical element 180 can be, for example, a lens, and the lens only needs to be able to provide the effect of deflecting light, and its form and The type is not limited, for example, it can be a lens (Lens) or a mirror (Mirror). In this embodiment, the plurality of actuators may include, for example, the actuator 160 and the actuator 170 located on two different sides of the optical element 180. The actuator 160 may include, for example, a coil 162 and a magnet 164, and the actuator 160 may include a coil 162 and a magnet 164. The device 170 may include, for example, a coil 172 and a magnet 174. The magnets 164 and 174 may be fixed on the magnet base 130. Therefore, when the magnet base 130 is fixed on one side of the bracket 140, the magnets 164 and 174 may be fixed on the bracket 140 accordingly. The coil 162 can be fixed on one side of the optical element 180, and the other coil 172 can be fixed on a coil holder 176. The coil holder 176 can be fixed on the outer frame 114 of the carrying base 110, so that the coil 172 can be fixed on the outer frame of the carrying base 110. 114 on. In addition, the above-mentioned bearing seat 110, base 120 and magnet seat 130 can be respectively connected and fixed to the bracket 140 through fixing members 190 of screws or pins, for example. In another embodiment, the base 120 can also be composed of a part of the bracket 140. Since the base 120 can be directly fixed to the bracket 140 or can be a part of the bracket 140, the outer frame 114 of the bearing base 110 can be formed by the second Pair of flexures 154 is connected to bracket 140 . Furthermore, in one embodiment, a lens holder 192 can be disposed against the periphery of the optical element 180 to help position the optical element 180 .

如圖2所示,連接於內框112及外框114之間的第一對可撓件152可構成例如平行X軸方向的第一軸,且連接於外框114及基座120(支架140)之間的第二對可撓件154可構成例如平行Y軸方向的第二軸。於本實施例中,致動器160及致動器170分別設在光學元件180互成直角的相鄰兩側,但本發明不限於此。致動器160(包含圖1所示設在光學元件180的線圈162及設在支架140的磁鐵164)於通電時產生的磁吸力或磁斥力可作用於光學元件180的一端,使光學元件180連同內框112以圖2所示的第一對可撓件152的軸向(X軸)為軸心往復擺動。同理,致動器170(包含圖1所示設在承載座外框114的線圈172及設在支架140的磁鐵174)於通電時產生的磁吸力或磁斥力可作用於承載座外框114的一端,使光學元件180連同外框114以圖2所示的第二對可撓件154的軸向(Y軸)為軸心往復擺動。因此光學元件180可以產生兩個不同軸向上的擺動角度範圍,往復擺動或轉動至不同位置以將入射光偏折至不同方向,獲得調整或變化光線行進光路的效果。舉例而言,光學元件180可於兩個不同軸向上快速擺動而相對支架140產生四個不同的傾斜位置,因此原本入射至光學元件180的一畫素影像,被於四個不同傾斜位置快速變換的光學元件180偏折後可產生四個畫素影像,獲得將畫素解析度提高至4倍的效果。藉由本發明實施例的光路調整機構調整或變化光路,可視實際需求產生不同的效果,例如可用以提升投影解析度、提高影像品質(消除暗區、柔和化影像邊緣)等等而不限定。再者,藉由上述實施例的設計,因致動器的部分結構可直接設置於承載座上,可減少光路調整機構整體的體積、重量或元件數,且針對每一軸僅單側設有致動器可進一步減少體積及重量並降低製造成本。As shown in FIG. 2 , the first pair of flexible members 152 connected between the inner frame 112 and the outer frame 114 may form, for example, a first axis parallel to the X-axis direction, and be connected to the outer frame 114 and the base 120 (bracket 140 ) may form a second axis parallel to the Y-axis direction. In this embodiment, the actuator 160 and the actuator 170 are respectively disposed on adjacent two sides of the optical element 180 at right angles to each other, but the invention is not limited thereto. The magnetic attraction or magnetic repulsion generated by the actuator 160 (including the coil 162 provided on the optical element 180 and the magnet 164 provided on the bracket 140 as shown in FIG. 1 ) when energized can act on one end of the optical element 180 so that the optical element 180 Together with the inner frame 112 , the first pair of flexible members 152 shown in FIG. 2 is swung back and forth in the axial direction (X-axis). In the same way, the magnetic attraction or magnetic repulsion generated by the actuator 170 (including the coil 172 provided on the outer frame 114 of the carrier base and the magnet 174 provided on the bracket 140 as shown in FIG. 1 ) when energized can act on the outer frame 114 of the carrier base. At one end, the optical element 180 together with the outer frame 114 is reciprocally swung with the axial direction (Y-axis) of the second pair of flexible members 154 shown in FIG. 2 as the axis. Therefore, the optical element 180 can generate two swing angle ranges in different axes, swing back and forth or rotate to different positions to deflect the incident light to different directions, thereby achieving the effect of adjusting or changing the optical path of the light. For example, the optical element 180 can rapidly swing in two different axes to produce four different tilt positions relative to the bracket 140. Therefore, a pixel image originally incident on the optical element 180 is rapidly changed in four different tilt positions. The deflection of the optical element 180 can produce four pixel images, achieving the effect of increasing the pixel resolution to 4 times. By adjusting or changing the light path through the light path adjustment mechanism of the embodiment of the present invention, different effects can be produced depending on actual needs. For example, it can be used to improve projection resolution, improve image quality (eliminate dark areas, soften image edges), etc. without limitation. Furthermore, through the design of the above embodiment, because part of the structure of the actuator can be directly installed on the bearing seat, the overall volume, weight or number of components of the optical path adjustment mechanism can be reduced, and only one side of the actuator is provided for each axis. The device can further reduce the size and weight and reduce manufacturing costs.

圖3A為依本發明一實施例,顯示於一光學系統中光路調整機構搭配其他光學元件的構件示意圖。如圖3A所示,於光學系統200中,光路調整機構100例如可配置於鄰近光閥模組210和稜鏡220位置處。光閥模組210例如可為一數位微鏡元件(Digital Micro-mirror Device, DMD)、矽基液晶面板(liquid-crystal-on-silicon panel, LCOS Panel)或是穿透式液晶面板等,且稜鏡220例如可為全內反射稜鏡(TIR Prism)、反向全內反射稜鏡(RTIR Prism)或偏振分光稜鏡(PBS prism)等等而不限定。於一實施例中,因支架140的一端可形成一缺口140a,故光閥模組210的一部分可伸入支架140的缺口140a,因此光路調整機構100可避開光閥模組210使組裝後的位置更靠近稜鏡220,如此可進一步縮小整體的體積且可縮短鏡頭的背焦。圖3B為圖3A的光閥模組相對光路調整機構的配置關係例的示意簡圖。於此光閥模組210的一表面定義為輸出影像光束的一側的最外圍構件(例如玻璃保護蓋212)的表面,舉例而言,若圖3A的光閥模組210為一數位微鏡元件,則光閥模組210的表面210a可為玻璃保護蓋212的表面。於其他的實施例中,若光閥模組210為一矽基液晶面板,則光閥模組210的表面210a可為玻璃基板的表面;若光閥模組210為一穿透式液晶面板,則光閥模組210的表面210a可為偏光板的表面。如圖3B所示,光閥模組210的表面210a的法線N與支架140有最靠近表面210a的交點P,亦即交點P為表面210a的法線N與支架140交會所可能形成的多個交點中,最靠近表面210a的交點。再者,支架140具有當投影在法線N上會最遠離交點P的一端點Q,則於一實施例中,可配置使交點P至表面210a在法線N的距離D1,小於端點Q投影在法線N上的投影點C與交點P在法線N的距離D2,如此光閥模組210可更靠近例如圖3A所示的鏡片180a及稜鏡220,獲得縮小整體的體積且可縮短鏡頭背焦的效果。於一實施例中,如圖3A所示,光學元件180可為一鏡片180a,鏡片180a的表面與稜鏡220的最短間距可小於3mm,且光學元件180(鏡片180a)的表面與光閥模組210的表面210a的間距可小於1mm。需注意於上述實施例中,支架140的U型外形僅為例示而不限定,支架140僅需具有能讓光閥模組210(或於空間上可能干涉光路調整機構的其他構件)的一部分伸入的空間即可,其外型完全不限定。於另一實施例中,如圖3C所示,支架140於臨近光閥模組210的一端可延伸形成一凸耳結構140c,且光閥模組210可置入凸耳結構140c圈圍出的開口140d,亦即支架140僅需於臨近光閥模組210的一端對應光閥模組210形成缺口或延伸部,且缺口或延伸部可界定出容置至少部分光閥模組210的空間,即可獲得讓光路調整機構200組裝後的位置得以更靠近稜鏡220的效果。3A is a schematic diagram showing the optical path adjustment mechanism and other optical elements in an optical system according to an embodiment of the present invention. As shown in FIG. 3A , in the optical system 200 , the optical path adjustment mechanism 100 may be disposed adjacent to the light valve module 210 and the lens 220 . The light valve module 210 may be, for example, a digital micro-mirror device (DMD), a silicon-based liquid crystal panel (liquid-crystal-on-silicon panel, LCOS panel) or a transmissive liquid crystal panel, and The prism 220 may be, for example, a total internal reflection prism (TIR Prism), a reverse total internal reflection prism (RTIR Prism), or a polarization spectroscopy prism (PBS prism), etc., without limitation. In one embodiment, since a gap 140a can be formed at one end of the bracket 140, a part of the light valve module 210 can extend into the gap 140a of the bracket 140. Therefore, the optical path adjustment mechanism 100 can avoid the light valve module 210 so that after assembly The position is closer to the 220, which can further reduce the overall size and shorten the back focus of the lens. FIG. 3B is a schematic diagram illustrating an example of the arrangement relationship between the light valve module and the optical path adjustment mechanism in FIG. 3A . Here, a surface of the light valve module 210 is defined as the surface of the outermost component (such as the glass protective cover 212) on the side that outputs the image beam. For example, if the light valve module 210 in FIG. 3A is a digital micromirror component, the surface 210a of the light valve module 210 may be the surface of the glass protective cover 212. In other embodiments, if the light valve module 210 is a silicon-based liquid crystal panel, the surface 210a of the light valve module 210 can be the surface of the glass substrate; if the light valve module 210 is a transmissive liquid crystal panel, Then the surface 210a of the light valve module 210 can be the surface of the polarizing plate. As shown in FIG. 3B , the normal line N of the surface 210 a of the light valve module 210 and the bracket 140 have an intersection point P closest to the surface 210 a. That is, the intersection point P is the intersection point P that may be formed by the intersection of the normal line N of the surface 210 a and the bracket 140 . Among the intersection points, the intersection point closest to surface 210a. Furthermore, the bracket 140 has an end point Q that is farthest from the intersection point P when projected on the normal line N. In one embodiment, the distance D1 between the intersection point P and the surface 210 a on the normal line N can be configured to be smaller than the end point Q. The distance D2 between the projection point C projected on the normal line N and the intersection point P on the normal line N allows the light valve module 210 to be closer to, for example, the lens 180a and the lens 220 shown in FIG. 3A , thereby reducing the overall volume and enabling The effect of shortening lens back focus. In one embodiment, as shown in FIG. 3A , the optical element 180 can be a lens 180a. The shortest distance between the surface of the lens 180a and the lens 220 can be less than 3 mm, and the surface of the optical element 180 (lens 180a) is connected to the light valve mold. The surfaces 210a of the groups 210 may be spaced less than 1 mm apart. It should be noted that in the above embodiments, the U-shaped shape of the bracket 140 is only an example and not limiting. The bracket 140 only needs to have a part of the extension that allows the light valve module 210 (or other components that may interfere with the optical path adjustment mechanism in space). It can fit into the space, and its appearance is not limited at all. In another embodiment, as shown in FIG. 3C , the bracket 140 can be extended to form a lug structure 140c at one end adjacent to the light valve module 210, and the light valve module 210 can be placed into the area surrounded by the lug structure 140c. The opening 140d, that is, the bracket 140 only needs to form a gap or extension corresponding to the light valve module 210 at one end adjacent to the light valve module 210, and the gap or extension can define a space for accommodating at least part of the light valve module 210. This can achieve the effect of allowing the assembled position of the optical path adjustment mechanism 200 to be closer to the lens 220.

再者,上述實施例的致動器的構件(例如磁鐵與線圈)分佈方式僅為例示而不限定。舉例而言,請參考圖4,若要使光學元件180以第一對可撓件152為軸(X軸方向)擺動,致動器的一部分160a(磁鐵或線圈)需設在光學元件180或承載座內框112(例如位置X1),另一部分160b(線圈或磁鐵)則可設在承載座外框114、基座120或支架140(例如位置X2或位置X3均可)。再者,若要使光學元件180以第二對可撓件154為軸(Y軸方向)擺動,致動器的一部分170a(磁鐵或線圈)需設在或承載座外框114(例如位置Y1),另一部分170b(線圈或磁鐵)則可設在光學元件180、承載座內框112、基座120或支架140(例如位置Y2或位置Y3均可)。Furthermore, the distribution manner of the components (such as magnets and coils) of the actuator in the above embodiments is only an illustration and is not limiting. For example, please refer to Figure 4. To make the optical element 180 swing with the first pair of flexible members 152 as the axis (X-axis direction), a part 160a (magnet or coil) of the actuator needs to be located on the optical element 180 or The inner frame 112 of the bearing base (for example, position X1), and the other part 160b (coil or magnet) can be disposed on the outer frame 114 of the bearing base, the base 120 or the bracket 140 (eg, position X2 or X3). Furthermore, in order to make the optical element 180 swing with the second pair of flexible members 154 as the axis (Y-axis direction), a part of the actuator 170a (magnet or coil) needs to be located on or on the outer frame 114 of the carrier (for example, position Y1 ), and the other part 170b (coil or magnet) can be disposed on the optical element 180, the inner frame 112 of the carrier, the base 120 or the bracket 140 (for example, position Y2 or position Y3 can be used).

於一實施例中,承載座110、基座120、磁鐵座130、支架140、第一對可撓件152、第二對可撓件154可利用相同材質一體成型、或者其中兩個或超過兩個的組件可先一體成形再與其餘元件組合均可。舉例而言,承載座110、基座120、支架140、第一對可撓件152及第二對可撓件154可利用相同材質一體成型再連接磁鐵座130。再者,於一實施例中,亦可在支架140上直接形成容置磁鐵的結構而可省略磁鐵座130。In one embodiment, the bearing seat 110, the base 120, the magnet seat 130, the bracket 140, the first pair of flexible members 152, and the second pair of flexible members 154 may be integrally formed using the same material, or two or more of them may be made of the same material. Each component can be formed in one piece and then combined with other components. For example, the bearing seat 110 , the base 120 , the bracket 140 , the first pair of flexible members 152 and the second pair of flexible members 154 can be integrally formed using the same material and then connected to the magnet base 130 . Furthermore, in one embodiment, a structure for accommodating magnets can also be directly formed on the bracket 140 and the magnet seat 130 can be omitted.

依上述各個實施例的設計,可提供一種光路調整機構製造方法,例如首先提供一支架與一光閥模組,再於支架設置一承載座以承載一光學元件。光閥模組具有一表面,表面的一法線與支架有一最靠近表面的交點,支架具有投影在法線上最遠離交點的一端點,且交點至表面在法線的距離,小於端點投影在法線上的投影點與交點的距離。再者,可設置一第一對可撓件連接承載座的內框及外框,且設置一第二對可撓件連接承載座與支架,再於第一軸的兩側中的僅其中一側設置一致動器,且於第二軸的兩側中的僅其中一側設置另一致動器。According to the design of each of the above embodiments, a method for manufacturing an optical path adjustment mechanism can be provided. For example, a bracket and a light valve module are first provided, and then a bearing seat is provided on the bracket to carry an optical element. The light valve module has a surface. A normal line of the surface has an intersection point closest to the surface with the bracket. The bracket has an end point projected on the normal line farthest from the intersection point, and the distance between the intersection point and the surface on the normal line is less than the end point projected on The distance between the projection point on the normal and the intersection point. Furthermore, a first pair of flexible members may be provided to connect the inner frame and the outer frame of the bearing base, and a second pair of flexible members may be provided to connect the bearing base and the bracket, and then only one of the two sides of the first shaft An actuator is provided on one side of the second shaft, and another actuator is provided on only one side of both sides of the second shaft.

圖5為本發明一實施例的致動器所使用的驅動訊號的示意圖。如圖5所示,本實施例的驅動訊號S可為週期性的階梯式方波,且於每一周期時間例如可包含一最低電位區間P1、一脈衝上升時間P2、一最高電位區間P3及一脈衝下降時間P4,於最低電位區間P1中光學元件維持在一擺動位置,於最高電位區間P3中光學元件維持在另一擺動位置,且藉由脈衝上升時間P2及脈衝下降時間P4使光學元件180在二個不同擺動位置之間變換。於本實施例中,最低電位區間P1具有驅動訊號S的最低電位SV,最高電位區間P3具有驅動訊號S的最高電位SP,脈衝上升時間P2隨時間變化由最低電位SV上昇至最高電位SP,且脈衝下降時間P4隨時間變化由最高電位SP位置下降至最低電位SV。依本實施例的設計,每一周期時間內的脈衝上升時間P2的電壓值漸增且其中具有實質上不隨時間變化的平坦區段F,因此產生一上升的階梯狀波型且不具有增加後再減少的電壓值變化。每一周期時間內脈衝下降時間P4的電壓值漸減且其中具有不隨時間變化的平坦區段F,因此產生一下降的階梯狀波型且不具有減少後再增加的電壓值變化。於本實施例中,各個平坦區段F的電壓值均位於最高電位SP與最低電位SV之間,且各個平坦區段定義為電壓值變化量(即平坦區段中的最高電壓值與最低電壓值的差值)小於最高電位SP及最低電位SV的差值的0.1%。再者,於一實施例中,平坦區段F的斜率的絕對值小於1 V/ms。FIG. 5 is a schematic diagram of a driving signal used by an actuator according to an embodiment of the present invention. As shown in FIG. 5 , the driving signal S in this embodiment can be a periodic stepped square wave, and each cycle time can include, for example, a lowest potential interval P1, a pulse rise time P2, a highest potential interval P3, and During a pulse fall time P4, the optical element maintains one swing position in the lowest potential interval P1, and the optical element maintains another swing position in the highest potential interval P3, and the optical element is stabilized by the pulse rise time P2 and the pulse fall time P4. 180 changes between two different swing positions. In this embodiment, the lowest potential interval P1 has the lowest potential SV of the drive signal S, the highest potential interval P3 has the highest potential SP of the drive signal S, and the pulse rise time P2 changes with time from the lowest potential SV to the highest potential SP, and The pulse falling time P4 changes with time from the highest potential SP position to the lowest potential SV. According to the design of this embodiment, the voltage value of the pulse rise time P2 in each cycle gradually increases and there is a flat section F that does not substantially change with time, so a rising step-like waveform is generated without an increase. and then decrease the voltage value change. The voltage value of the pulse falling time P4 in each cycle gradually decreases and has a flat section F that does not change with time. Therefore, a descending step-like waveform is generated and does not have a voltage value change that decreases and then increases. In this embodiment, the voltage value of each flat section F is between the highest potential SP and the lowest potential SV, and each flat section is defined as the voltage value change (ie, the highest voltage value and the lowest voltage in the flat section The difference in values) is less than 0.1% of the difference between the highest potential SP and the lowest potential SV. Furthermore, in one embodiment, the absolute value of the slope of the flat section F is less than 1 V/ms.

圖6為利用圖5的驅動訊號驅動光學元件所產生的不同擺動位置的示意圖。舉例而言,當致動器160接收驅動訊號S的最低電位區間P1時,致動器160致動光學元件180使其變換至位置M,當致動器160接收驅動訊號S的最高電位區間P3時,致動器160致動光學元件180使其變換至位置L。藉由脈衝上升時間P2及脈衝下降時間P4可使光學元件180於位置M與位置L之間變換。光學元件180在位置M及位置L之間偏擺一角度θ,且最低電位區間P1及最高電位區間P3的振幅可決定角度θ的大小。FIG. 6 is a schematic diagram of different swing positions produced by driving the optical element using the driving signal of FIG. 5 . For example, when the actuator 160 receives the lowest potential interval P1 of the driving signal S, the actuator 160 actuates the optical element 180 to change to the position M, and when the actuator 160 receives the highest potential interval P3 of the driving signal S When , the actuator 160 actuates the optical element 180 to change to the position L. The optical element 180 can be changed between the position M and the position L by the pulse rise time P2 and the pulse fall time P4. The optical element 180 is deflected by an angle θ between the position M and the position L, and the amplitude of the lowest potential interval P1 and the highest potential interval P3 can determine the size of the angle θ.

圖7顯示利用圖5之驅動訊號(變化段為階梯狀波形)所產生的擺動的傅立葉級數頻率分量分佈圖,圖8顯示利用圖9之驅動訊號(變化段為正弦波波形)所產生的擺動的傅立葉級數頻率分量分佈圖。比較圖7及圖8的虛線方框部分可清楚看出,利用圖7變化段為階梯狀波形的驅動訊號可降低中高頻段(例如300-780Hz)的頻率響應,以減少光學元件作動的噪音並使擺動角度的控制更為穩定及精確。於一實施例中,當一周期時間的脈衝上升時間P2與脈衝下降時間P4的時間長度分別介於0.8-1.0ms之間時,頻率響應的降低效果較佳。Figure 7 shows the Fourier series frequency component distribution diagram of the swing generated by the driving signal of Figure 5 (the changing section is a staircase waveform), and Figure 8 shows the Fourier series frequency component distribution diagram of the swing generated by using the driving signal of Figure 9 (the changing section is a sine wave waveform). Fourier series frequency component distribution plot of the oscillation. Comparing the dotted box parts of Figure 7 and Figure 8, it can be clearly seen that using the driving signal with a stepped waveform in the changing section of Figure 7 can reduce the frequency response in the mid-to-high frequency range (such as 300-780Hz) to reduce the noise of the optical element operation. And make the control of the swing angle more stable and precise. In one embodiment, when the pulse rise time P2 and the pulse fall time P4 of one cycle are respectively between 0.8-1.0 ms, the frequency response reduction effect is better.

依上述各個實施例的設計,可提供一種光路調整機構製造方法,例如首先於一承載座設置一第一軸及一第二軸,再於承載座設置一光學元件。再者,可於第一軸的一側設置一致動器,並於第二軸的一側設置另一致動器。各個致動器可依據一驅動訊號使光學元件於至少一第一擺動位置及一第二擺動位置之間變換,驅動訊號的一周期時間的脈衝上升時間內具有電壓值實質上不隨時間變化的一第一平坦區段,於驅動訊號的周期時間的脈衝下降時間內具有電壓值實質上不隨時間變化的一第二平坦區段,第一平坦區段及第二平坦區段的電壓值均位於第一驅動訊號的周期時間的最高電位及最低電位之間,且各個平坦區段的電壓值變化量小於最高電位及最低電位的差值的0.1%。According to the design of each of the above embodiments, a manufacturing method of an optical path adjustment mechanism can be provided. For example, firstly, a first axis and a second axis are set on a bearing base, and then an optical element is set on the bearing base. Furthermore, an actuator may be provided on one side of the first shaft, and another actuator may be provided on one side of the second shaft. Each actuator can cause the optical element to change between at least a first swing position and a second swing position according to a driving signal, and the driving signal has a voltage value that does not substantially change with time during the pulse rise time of one period. A first flat section has a second flat section whose voltage value does not substantially change with time during the pulse falling time of the cycle time of the driving signal. The voltage values of the first flat section and the second flat section are both equal. It is located between the highest potential and the lowest potential in the cycle time of the first driving signal, and the voltage value change of each flat section is less than 0.1% of the difference between the highest potential and the lowest potential.

圖10為本發明另一實施例的致動器的所使用的驅動訊號的示意圖。於本實施例中,第一對可撓件152 (X軸方向)的兩側可設置兩個致動器160,兩個致動器160可輸入兩個不同訊號協同控制光學元件180以X軸為軸心的擺動,第二對可撓件154 (Y軸方向)的兩側可設置兩個致動器170,兩個致動器170可輸入兩個不同訊號協同控制光學元件180以Y軸方向為軸心的擺動。圖10顯示針對每一軸(例如X軸方向或Y軸方向)的兩個不同訊號S1、S2的波形,依本實施例的設計,振幅較小的訊號為S1且具有振幅A1,振幅較大的訊號為S2且具有振幅A2,則訊號S1、S2的振幅比值A2/A1符合 1<(A2/A1)≦(7/6) 時,可降低基頻外不同頻段的響應,且特別是偶數倍頻的頻段其降低響應的效果更佳。圖11顯示訊號S1、S2的振幅比值A2/A1= 7/6 時所產生的擺動的傅立葉級數頻率分量分佈圖,由圖11可清楚看出於該比值下基頻外的不同頻段的響應明顯下降,特別是偶數倍頻的頻段其降低響應的效果更佳,因此可減少光學元件作動的噪音並使擺動角度的控制更為穩定及精確。FIG. 10 is a schematic diagram of a driving signal used by an actuator according to another embodiment of the present invention. In this embodiment, two actuators 160 can be disposed on both sides of the first pair of flexible members 152 (in the X-axis direction). The two actuators 160 can input two different signals to cooperatively control the optical element 180 in the X-axis direction. For the swing of the axis, two actuators 170 can be provided on both sides of the second pair of flexible members 154 (in the Y-axis direction). The two actuators 170 can input two different signals to cooperatively control the optical element 180 in the Y-axis direction. The direction is the swing of the axis. Figure 10 shows the waveforms of two different signals S1 and S2 for each axis (such as the X-axis direction or the Y-axis direction). According to the design of this embodiment, the signal with the smaller amplitude is S1 and has the amplitude A1, and the signal with the larger amplitude is S1 and has the amplitude A1. The signal is S2 and has amplitude A2. When the amplitude ratio A2/A1 of signals S1 and S2 meets 1<(A2/A1)≦(7/6), the response of different frequency bands outside the fundamental frequency can be reduced, especially even multiples. The effect of reducing the response is better in the frequency band. Figure 11 shows the Fourier series frequency component distribution diagram of the swing generated when the amplitude ratio of signals S1 and S2 is A2/A1 = 7/6. Figure 11 can clearly see the response of different frequency bands outside the fundamental frequency at this ratio. Significantly reduced, especially in the even-numbered frequency band, the response reduction effect is better, thus reducing the noise of the optical element operation and making the control of the swing angle more stable and precise.

上述各個實施例的致動器的結構及作動方式完全不限定,僅需能提供使光學元件傾斜並擺動的作用力即可。於另一實施例中,承載座110例如可由磁性材料構成,且致動器可為一空心線圈或一電磁鐵,當線圈或電磁鐵通電時可產生吸力吸引承載座,使光學元件180一端下壓產生擺動運動。於另一實施例中,如圖12所示,亦可利用設置於承載座110的一壓電元件250,透過在壓電元件250上施加電場可使壓電元件250產生壓縮或拉伸變形,意即可將電能轉為機械能以使光學元件180往復擺動達到調整光路效果。The structure and operation mode of the actuator in each of the above embodiments are not limited at all, as long as it can provide the force to tilt and swing the optical element. In another embodiment, the carrier 110 may be made of magnetic material, for example, and the actuator may be an air-core coil or an electromagnet. When the coil or the electromagnet is energized, it can generate suction to attract the carrier, causing one end of the optical element 180 to move down. The pressure produces an oscillating motion. In another embodiment, as shown in FIG. 12 , a piezoelectric element 250 disposed on the bearing base 110 can also be used. By applying an electric field to the piezoelectric element 250, the piezoelectric element 250 can cause compression or tensile deformation. This means that the electrical energy can be converted into mechanical energy to make the optical element 180 swing back and forth to achieve the effect of adjusting the optical path.

圖13為本發明一實施例的光路調整機構應用於一光學系統的示意圖。請參照圖11,光學裝置400包括照明系統310、光閥模組320、投影鏡頭260以及光路調整機構100。其中,照明系統310具有光源312,其適於提供光束314,且光閥模組320配置光束314的傳遞路徑上。此光閥模組320適於將光束314轉換為多數個子影像314a。此外,投影鏡頭260配置於這些子影像314a的傳遞路徑上,且光閥模組320係位於照明系統310與投影鏡頭260之間。另外,光路調整機構100可配置於光閥模組320與投影鏡頭260之間或投影鏡頭260內,例如可以在光閥模組320和全內反射稜鏡319之間或是可以在全內反射稜鏡319和投影鏡頭260之間,且位於這些子影像314a的傳遞路徑上。上述之光學裝置400中,光源312例如可包括紅光發光二極體312R、綠光發光二極體312G、及藍光發光二極體312B,各個發光二極體發出的色光經由一合光裝置316合光後形成光束314,光束314會依序經過蠅眼透鏡陣列(fly-eye lens array) 317、光學元件組318及全內反射稜鏡(TIR Prism) 319。之後,全內反射稜鏡319會將光束314反射至光閥模組320。此時,光閥模組320會將光束314轉換成多數個子影像314a,而這些子影像314a會依序通過全內反射稜鏡319及光路調整機構100,並經由投影鏡頭260將這些子影像314a投影於螢幕350上。於本實施例中,當這些子影像314a經過光路調整機構100時,光路調整機構100會改變部分這些子影像314a的傳遞路徑。也就是說,通過此光路調整機構100的這些子影像314a會投影在螢幕350上的第一位置(未繪示),另一部份時間內通過此光路調整機構100的這些子影像314a則會投影在螢幕350上的第二位置(未繪示),其中第一位置與第二位置係在水平方向或/且垂直方向上相差一固定距離。於本實施例中,由於光路調整機構100能使這些子影像314a之成像位置在水平方向或/且垂直方向上移動一固定距離,因此能提高影像之水平解析度或/且垂直解析度。當然,上述實施例僅為例示,本發明實施例的光路調整機構可運用於不同光學系統以獲得不同效果,且光路調整機構於光學系統中的設置位置及配置方式完全不限定。例如圖14所示,亦可將光路調整機構100設在光學裝置410的投影鏡頭260內。FIG. 13 is a schematic diagram of an optical path adjustment mechanism applied to an optical system according to an embodiment of the present invention. Referring to FIG. 11 , the optical device 400 includes an illumination system 310 , a light valve module 320 , a projection lens 260 and an optical path adjustment mechanism 100 . Among them, the lighting system 310 has a light source 312, which is suitable for providing a light beam 314, and the light valve module 320 is arranged on the transmission path of the light beam 314. The light valve module 320 is adapted to convert the light beam 314 into a plurality of sub-images 314a. In addition, the projection lens 260 is disposed on the transmission path of these sub-images 314a, and the light valve module 320 is located between the lighting system 310 and the projection lens 260. In addition, the light path adjustment mechanism 100 may be disposed between the light valve module 320 and the projection lens 260 or within the projection lens 260, for example, between the light valve module 320 and the total internal reflection lens 319 or within the total internal reflection lens 319. Between the camera 319 and the projection lens 260, and located on the transmission path of these sub-images 314a. In the above-mentioned optical device 400, the light source 312 may include, for example, a red light-emitting diode 312R, a green light-emitting diode 312G, and a blue light-emitting diode 312B. The colored light emitted by each light-emitting diode passes through a light combining device 316. After the light is combined, a light beam 314 is formed, and the light beam 314 passes through a fly-eye lens array 317, an optical element group 318 and a total internal reflection prism (TIR Prism) 319 in sequence. Afterwards, the total internal reflection lens 319 will reflect the light beam 314 to the light valve module 320. At this time, the light valve module 320 will convert the light beam 314 into a plurality of sub-images 314a, and these sub-images 314a will pass through the total internal reflection lens 319 and the optical path adjustment mechanism 100 in sequence, and will be projected through the projection lens 260. Projected on screen 350. In this embodiment, when the sub-images 314a pass through the optical path adjustment mechanism 100, the optical path adjustment mechanism 100 changes the transmission paths of part of the sub-images 314a. That is to say, the sub-images 314a passing through the light path adjustment mechanism 100 will be projected at the first position (not shown) on the screen 350, and the sub-images 314a passing through the light path adjustment mechanism 100 will be projected during another part of the time. A second position (not shown) projected on the screen 350, wherein the first position and the second position are different from each other by a fixed distance in the horizontal direction or/and the vertical direction. In this embodiment, since the optical path adjustment mechanism 100 can move the imaging positions of the sub-images 314a by a fixed distance in the horizontal direction or/and the vertical direction, the horizontal resolution or/and the vertical resolution of the image can be improved. Of course, the above embodiments are only examples. The optical path adjustment mechanism of the embodiment of the present invention can be used in different optical systems to obtain different effects, and the location and configuration of the optical path adjustment mechanism in the optical system are not limited at all. For example, as shown in FIG. 14 , the optical path adjustment mechanism 100 can also be provided in the projection lens 260 of the optical device 410 .

光閥模組(Light valve) 一詞已為投影產界廣泛使用,在此產業中大多可用來指一種空間光調變器(Spatial Light Modulator, SLM)中的一些獨立光學單元。所謂空間光調變器,含有許多獨立單元(獨立光學單元),這些獨立單元在空間上排列成一維或二維陣列。每個單元都可獨立地接受光 學訊號或電學訊號的控制,利用各種物理效應(泡克爾斯效應、克爾效應、聲光效應、磁光效應、半導體的自電光效應或光折變效應等)改變自身的光學特性,從而對照明在該複數個獨立單元的照明光束進行調製,並輸出影像光束。獨立單元可為微型反射鏡或液晶單元等光學元件。亦即,光閥模組可以是數位微鏡元件(Digital Micro-mirror Device, DMD)、矽基液晶面板(liquid-crystal-on-silicon panel, LCOS Panel)或是穿透式液晶面板等。 [0039]       投影機是利用光學投影方式將影像投射至螢幕上的裝置,在 投影機產業中,一般依內部所使用的光閥模組的不同,將投影機分為陰極射線管(Cathode Ray Tube) 式投影機、液晶顯示器(Liquid Crystal Display, LCD)式投影機、數位光投影機(Digital Light Projector, DLP)以及液晶覆矽(Liquid Crystal on Silicon, LCOS)投影機 因投影機運作時光線會透過LCD面板作為光閥模組,所以屬於穿透式投影機,而使用 LCOS、DLP 等光閥模組的投影機,則是靠光線反射的原理顯像,所以稱為反射式投影機。 雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。另外,本發明的任一實施例或申請專利範圍不須達成本發明所揭露之全部目的或優點或特點。此外,摘要部分和標題僅用來輔助專利文件搜尋之用,並非用來限制本發明之權利範圍。 The term light valve module has been widely used in the projection industry. In this industry, it is mostly used to refer to some independent optical units in a spatial light modulator (SLM). The so-called spatial light modulator contains many independent units (independent optical units), which are spatially arranged into a one-dimensional or two-dimensional array. Each unit can be independently controlled by optical signals or electrical signals, and use various physical effects (Pockels effect, Kerr effect, acousto-optic effect, magneto-optical effect, semiconductor self-electro-optical effect or photorefractive effect, etc.) to change itself The optical characteristics of the unit are used to modulate the illumination beams illuminating the plurality of independent units and output image beams. The independent units can be optical components such as micro-mirrors or liquid crystal cells. That is, the light valve module can be a Digital Micro-mirror Device (DMD), a silicon-based liquid crystal panel (liquid-crystal-on-silicon panel, LCOS Panel) or a transmissive LCD panel. [0039] A projector is a device that uses optical projection to project images onto a screen. In the projector industry, projectors are generally divided into cathode ray tubes (Cathode Ray Tubes) depending on the light valve modules used inside. ) type projectors, Liquid Crystal Display (LCD) type projectors, Digital Light Projector (DLP) and Liquid Crystal on Silicon (LCOS) projectors due to the light emitted when the projector is operating. The LCD panel is used as a light valve module, so it is a transmissive projector. Projectors using light valve modules such as LCOS and DLP rely on the principle of light reflection to develop images, so they are called reflective projectors. Although the present invention has been disclosed above in terms of preferred embodiments, they are not intended to limit the present invention. Anyone skilled in the art may make some modifications and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection shall be subject to the scope of the patent application attached. In addition, any embodiment or patentable scope of the present invention does not necessarily achieve all the purposes, advantages or features disclosed in the present invention. In addition, the abstract section and title are only used to assist in searching patent documents and are not intended to limit the scope of the invention.

100:光路調整機構 110:承載座 112:內框 114:外框 120:基座 130:磁鐵座 140:支架 140a:缺口 140c:凸耳結構 140d:開口 142:第一側 144:第二側 146:第三側 152:第一對可撓件 154:第二對可撓件 160、170 致動器 160a、160b、170a、170b:致動器部分 162、172:線圈 164、174:磁鐵 176:線圈座 180:光學元件 180a:鏡片 190:固定件 192:鏡片座 200:光學系統 210:光閥模組 210a:表面 212:玻璃保護蓋 220:稜鏡 310:照明系統 312:光源 312R、312G、312B:發光二極體 314:光束 314a:子影像 316:合光裝置 317:蠅眼透鏡陣列 318:光學元件組 319:全內反射稜鏡 320:光閥模組 350:螢幕 400、410:光學裝置 A1、A2:振幅 C:投影點 D1、D2:距離 F:平坦區段 L、M:位置 N:法線 P:焦點 Q:端點 S、S1、S2:驅動訊號 P1:最低電位區間 P2:脈衝上升時間 P3:最高電位區間 P4:脈衝下降時間 SV:最低電位 SP:最高電位 X1、X2、X3:位置 Y1、Y2、Y3:位置 θ:角度 100: Optical path adjustment mechanism 110: Bearing seat 112:Inner frame 114:Outer frame 120: base 130:Magnet holder 140:Bracket 140a: Gap 140c:lug structure 140d:Open your mouth 142: First side 144:Second side 146:Third side 152: The first pair of flexible parts 154: The second pair of flexible parts 160, 170 actuator 160a, 160b, 170a, 170b: actuator part 162, 172: Coil 164, 174: Magnet 176: Coil seat 180:Optical components 180a:Lens 190: Fixtures 192: Lens holder 200:Optical system 210:Light valve module 210a: Surface 212: Glass protective cover 220:稜顡 310:Lighting system 312:Light source 312R, 312G, 312B: LED 314:Beam 314a: Sub-image 316: Light combining device 317:Fly Eye Lens Array 318:Optical component group 319: Total internal reflection 320:Light valve module 350:Screen 400, 410: Optical device A1, A2: Amplitude C: Projection point D1, D2: distance F: flat section L, M: position N: normal P:Focus Q:Endpoint S, S1, S2: drive signal P1: lowest potential interval P2: Pulse rise time P3: Highest potential range P4: Pulse falling time SV: lowest potential SP: highest potential X1, X2, X3: position Y1, Y2, Y3: position θ: angle

圖1為本發明一實施例之光路調整機構的構件分解圖,圖2為圖1的光路調整機構於組裝後的平面示意圖。 圖3A為依本發明一實施例,顯示於一光學系統中光路調整機構搭配其他光學元件的構件示意圖,且圖3B為圖3A的光閥模組相對光路調整機構的配置關係例的示意簡圖。圖3C為依本發明另一實施例,顯示於一光學系統中光路調整機構搭配其他光學元件的構件示意圖。 圖4為說明致動器的不同配置位置實例的示意圖。 圖5為本發明一實施例的致動器所使用的驅動訊號的示意圖。 圖6為利用圖5的驅動訊號驅動光學元件所產生的不同擺動位置的示意圖。 圖7顯示利用圖5之驅動訊號所產生的擺動的傅立葉級數頻率分量分佈圖。 圖8顯示利用具有正弦波變化段的驅動訊號所產生的擺動的傅立葉級數頻率分量分佈圖。 圖9顯示具有正弦波變化段的驅動訊號的示意圖。 圖10為本發明另一實施例的致動器的所使用的驅動訊號的示意圖。 圖11顯示利用圖10之驅動訊號所產生的擺動的傅立葉級數頻率分量分佈圖。 圖12為本發明另一實施例的致動器的示意圖。 圖13為本發明一實施例的光路調整機構應用於一光學系統的示意圖。 圖14為本發明另一實施例的光路調整機構應用於一光學系統的示意圖。 FIG. 1 is an exploded view of the optical path adjustment mechanism according to an embodiment of the present invention. FIG. 2 is a schematic plan view of the optical path adjustment mechanism in FIG. 1 after assembly. FIG. 3A is a schematic diagram showing the optical path adjustment mechanism in an optical system combined with other optical components according to an embodiment of the present invention, and FIG. 3B is a schematic diagram of an example of the configuration relationship between the light valve module and the optical path adjustment mechanism in FIG. 3A . 3C is a schematic diagram showing the optical path adjustment mechanism and other optical elements in an optical system according to another embodiment of the present invention. Figure 4 is a schematic diagram illustrating examples of different configuration positions of the actuator. FIG. 5 is a schematic diagram of a driving signal used by an actuator according to an embodiment of the present invention. FIG. 6 is a schematic diagram of different swing positions produced by driving the optical element using the driving signal of FIG. 5 . FIG. 7 shows a Fourier series frequency component distribution diagram of the swing generated by the driving signal of FIG. 5 . FIG. 8 shows the Fourier series frequency component distribution diagram of the swing generated by the driving signal having a sinusoidal changing section. Figure 9 shows a schematic diagram of a driving signal with a sinusoidal wave changing section. FIG. 10 is a schematic diagram of a driving signal used by an actuator according to another embodiment of the present invention. FIG. 11 shows the Fourier series frequency component distribution diagram of the swing generated by the driving signal of FIG. 10 . Figure 12 is a schematic diagram of an actuator according to another embodiment of the present invention. FIG. 13 is a schematic diagram of an optical path adjustment mechanism applied to an optical system according to an embodiment of the present invention. FIG. 14 is a schematic diagram of an optical path adjustment mechanism applied to an optical system according to another embodiment of the present invention.

F:平坦區段 F: flat section

S:驅動訊號 S: drive signal

P1:最低電位區間 P1: lowest potential interval

P2:脈衝上升時間 P2: Pulse rise time

P3:最高電位區間 P3: Highest potential range

P4:脈衝下降時間 P4: Pulse falling time

SV:最低電位 SV: lowest potential

SP:最高電位 SP: highest potential

Claims (10)

一種光路調整機構,包含: 一承載座; 一光學元件,設在該承載座;以及 一第一致動器,用以使該光學元件以一第一軸為軸心作動,該第一致動器可接收一第一驅動訊號; 且該第一驅動訊號符合以下特性:該第一驅動訊號在一周期中,僅包含一脈衝上升段及一脈衝下降段;該第一驅動訊號在該脈衝上升段的時間內,電壓值增加後不再減少,且在該脈衝下降段的時間內,電壓值減少後不再增加。 An optical path adjustment mechanism includes: a bearing base; An optical element is provided on the carrier; and a first actuator, used to actuate the optical element with a first axis as the axis, and the first actuator can receive a first drive signal; And the first driving signal complies with the following characteristics: the first driving signal only includes a pulse rising section and a pulse falling section in one cycle; the first driving signal has a voltage value that increases during the pulse rising section. It will no longer decrease, and during the falling period of the pulse, the voltage value will not increase after decreasing. 一種光路調整機構,包含: 一承載座; 一光學元件,設在該承載座;以及 一第一致動器,用以使該光學元件以一第一軸為軸心作動,該第一致動器可接收一第一驅動訊號,該第一驅動訊號在一周期中,僅包含一脈衝上升段及一脈衝下降段;且該第一驅動訊號在該脈衝上升段的時間內,該第一驅動訊號的電壓值與時間的相對曲線變化,僅具有斜率實質大於等於零的區段,該第一驅動訊號在該脈衝下降段的時間內,該第一驅動訊號的電壓值與時間的相對曲線變化,僅具有斜率實質小於等於零的區段。 An optical path adjustment mechanism includes: a bearing base; An optical element is provided on the carrier; and A first actuator is used to actuate the optical element with a first axis as the axis. The first actuator can receive a first drive signal. The first drive signal only includes a There is a pulse rising section and a pulse falling section; and during the pulse rising section, the relative curve change of the voltage value of the first driving signal with time only has a section in which the slope is substantially greater than or equal to zero. During the falling period of the pulse of the first driving signal, the relative curve change of the voltage value of the first driving signal with time only has a section where the slope is substantially less than or equal to zero. 如請求項1或2所述之光路調整機構,其中該周期時間的該脈衝上升時間的時間長度介於0.8-1.0ms之間。The optical path adjustment mechanism as described in claim 1 or 2, wherein the pulse rise time of the period is between 0.8-1.0ms. 如請求項1或2所述之光路調整機構,其中該周期時間的該脈衝下降時間的時間長度介於0.8-1.0ms之間。The optical path adjustment mechanism as described in claim 1 or 2, wherein the length of the pulse falling time of the period is between 0.8-1.0ms. 如請求項1或2所述之光路調整機構,其中該第一致動器使該光學元件可於一第一擺動位置與一第二擺動位置之間變換。The optical path adjustment mechanism as claimed in claim 1 or 2, wherein the first actuator enables the optical element to change between a first swing position and a second swing position. 如請求項1或2所述之光路調整機構,更包含: 一第二致動器,用以使該光學元件以一第二軸為軸心作動,且該第二致動器可接收一第二驅動訊號。 The optical path adjustment mechanism as described in claim 1 or 2 further includes: A second actuator is used to actuate the optical element with a second axis as its axis, and the second actuator can receive a second driving signal. 如請求項6所述之光路調整機構,其中該第二驅動訊號在一周期中,僅包含一脈衝上升段及一脈衝下降段,該第二驅動訊號在該脈衝上升段的時間內,電壓值增加後不再減少,且該第二驅動訊號在該脈衝下降段的時間內,電壓值減少後不再增加。The optical path adjustment mechanism as described in claim 6, wherein the second driving signal only includes a pulse rising section and a pulse falling section in a cycle, and the voltage value of the second driving signal during the pulse rising section is It does not decrease after increasing, and the voltage value of the second driving signal decreases and then does not increase during the falling period of the pulse. 如請求項6所述之光路調整機構,其中該第二驅動訊號在一周期中,僅包含一脈衝上升段及一脈衝下降段,該第二驅動訊號在該脈衝上升段的時間內,該第二驅動訊號的電壓值與時間的相對曲線變化,僅具有斜率實質大於等於零的區段,該第二驅動訊號在該脈衝下降段的時間內,該第二驅動訊號的電壓值與時間的相對曲線變化,僅具有斜率實質小於等於零的區段。The optical path adjustment mechanism as described in claim 6, wherein the second driving signal only includes a pulse rising section and a pulse falling section in a cycle, and the second driving signal during the pulse rising section, the third driving signal The relative curve change of the voltage value of the second drive signal and time only has a section where the slope is substantially greater than or equal to zero. The relative curve of the voltage value of the second drive signal and time during the pulse falling period of the second drive signal. changes, only segments with slopes substantially less than or equal to zero. 如申請專利範圍第6項所述之光路調整機構,更包含: 一第一對可撓件,設在該承載座上且構成該第一軸;以及 一第二對可撓件,設在該承載座與該支架之間且構成該第二軸。 The optical path adjustment mechanism described in item 6 of the patent application further includes: A first pair of flexible members is provided on the bearing base and constitutes the first axis; and A second pair of flexible members is provided between the bearing seat and the bracket and constitutes the second axis. 如申請專利範圍第6項所述之光路調整機構,其中該第一驅動訊號具有一第一振幅,該第二驅動訊號具有一第二振幅,該第二振幅大於該第一振幅,且該第二振幅相對該第一振幅的比值等於或小於7/6。The optical path adjustment mechanism as described in item 6 of the patent application, wherein the first driving signal has a first amplitude, the second driving signal has a second amplitude, the second amplitude is greater than the first amplitude, and the third The ratio of the second amplitude to the first amplitude is equal to or less than 7/6.
TW112131250A 2019-03-20 Light path adjustment mechanism TWI838307B (en)

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