TW202346711A - Vacuum pump assembly with water leak detection - Google Patents

Abstract

The present disclosure provides a vacuum pump assembly 2 comprising a vacuum pump 4, a water cooling system 10 for cooling the vacuum pump 4, a sensor arrangement 50 for detecting a water leak from the water cooling system 10, and a controller 20 in communication with the sensor arrangement 50. The controller 20 is configured to output a control signal in response to the sensor arrangement 50 detecting the water leak. The sensor arrangement allows for water from a leak to be detected sooner, and the control signal enables preventative action to be taken to prevent or minimise any damage from the water leak.

Description

Vacuum pump assembly with water leakage detection

The field of the present invention relates to a vacuum pump assembly, and in particular, a water-cooled vacuum pump assembly with water leakage detection.

The vacuum pump assembly requires a cooling system to maintain the proper temperature. Many vacuum pump assemblies use water cooling systems (or thermal management systems (TMS)). Such water cooling systems use water as a coolant and are prone to water leakage when one or more components of the cooling system fails. For example, over time, water cooling system valves and valve housings may leak.

Water leakage can damage the vacuum pump assembly and/or other devices near the vacuum pump assembly. In systems without means for detecting water leaks, water leaks may only be detected when an operator observes the leak, for example, from water pooling on the floor around the vacuum pump assembly. Water leakage from the vacuum pump assembly may damage the broader manufacturing system that utilizes the vacuum pump assembly.

Therefore, it is desirable to detect any water leaks and, once detected, take preventive measures to prevent water from leaking from the assembly and to minimize or prevent further damage that would otherwise result.

Viewed from a first aspect, the present invention provides a vacuum pump assembly, which includes a vacuum pump, a water cooling system for cooling the vacuum pump, and a sensor for detecting water leakage from the water cooling system. A controller is configured and in communication with the sensor, wherein the controller is configured to output a control signal in response to the sensor configuration detecting the water leakage. In one embodiment, the sensor arrangement is configured to send a water detection signal to the controller in response to detecting the water leakage from the water cooling system.

In this manner, the sensor configuration allows faster detection of water leakage in the assembly, and the control signal enables preventive measures to prevent or minimize any damage caused by the water leakage.

In a further embodiment of any of the above, the vacuum pump assembly includes a housing surrounding the assembly.

The housing can be used to provide a complete vacuum pump assembly in a single, more modular and compact package.

In a further embodiment, the housing additionally includes wheels that allow the vacuum pump assembly to be moved around and replaced or repositioned more easily within a manufacturing facility. Additionally or alternatively, the housing may also include legs and/or feet for supporting the vacuum pump assembly when positioned in place.

In a further embodiment of any of the above, the assembly includes a tray configured to collect water from the leak.

Collecting the water in a dedicated tray helps prevent the leaking water from accumulating in other areas of the assembly and leaking from there (e.g., pooling on the floor beneath the vacuum pump assembly) or leaking into the vacuum pump assembly on other components. The tray can also detect water by using the water collected in the tray. The water may be directed to the tray by any suitable means, such as using gravity and/or collection troughs, grooves or channels leading thereto. In one example, the tray is attached to the housing, and in a further example, to a bottom of the housing. In other examples, the tray may be positioned in any other suitable location to collect water from one of the leaks in the assembly. It is within the scope of the invention to utilize a plurality of pallets in a plurality of positions.

In a further embodiment of any of the above, the sensor arrangement includes a sensor in the tray configured to detect the presence of water in the tray.

By using a sensor located in the tray, water from the leak can be quickly and accurately detected. This can help prevent or minimize any leakage from the housing before the leakage is detected by the sensor.

In a further embodiment of the above, the sensor is an electrical sensor. The electrical sensor includes a plurality of probes and is configured to detect a change in at least one of resistance, voltage, or current between the probes. The change in at least one of resistance, voltage, or current indicates the presence of water in the tray.

Using an electrical sensor provides a relatively simple and cost-effective method of detecting the presence of water in the tray.

In a further embodiment of any of the above, the sensor arrangement includes a humidity sensor configured to detect an increase in humidity resulting from the water leakage.

A humidity sensor is used to quickly detect the water leakage. This leak can occur in or around the vacuum pump, which is often very hot. This causes the water from the leak to evaporate, producing water vapor, thereby increasing the humidity within the vacuum pump assembly. Additionally, a water leak from one of the cooling systems may produce a spray of water, the water cooling system may be under pressure and capable of leaking from one or more small holes in the system, or the environmental conditions in the assembly may Causes water to evaporate. Therefore, the purpose of the humidity sensor is to detect a leak immediately when the humidity changes. This can reduce the delay between the onset of a leak and the detection of the leak, which can further reduce or prevent damage from the leak.

In a further embodiment of the above, the humidity sensor is located on a top plate of the housing. It should be understood that the humidity sensor in this embodiment is exposed to or operatively communicated with the interior of the housing from this position to detect humidity changes therein.

Since water vapor from the leak is most likely to rise, placing the humidity sensor on the ceiling can effectively detect the presence of the water vapor. However, the humidity sensor may be placed in any other suitable location, such as on one of the bottom or side panels of the housing.

In a further embodiment of the above, the sensor arrangement includes a plurality of humidity sensors positioned at different locations in the housing.

This may allow monitoring of leaks in different areas of the enclosure, assembly and/or cooling system. This can lead to more accurate and sensitive detection of leaks at specific locations. This can also be used to provide more information about which part of the assembly is causing the leak.

In any of the above further embodiments, the tray and electrical sensor are provided in combination with the humidity sensor as described above. This provides additional redundancy to the system in case one of the sensors fails or a water leak is not detected as quickly as expected. In addition, the humidity sensor can be configured to serve as an early warning of a potential leak, and the tray and electrical sensor are used to confirm that the leak has occurred and to collect a signal from the leak before it occurs outside the enclosure. Quantity of water. This gives the operator more time to take preventive measures in response to a damaging leak from the enclosure before it occurs.

In a further embodiment of any of the above, the control signal is configured to alert an operator of the water leak. In yet a further embodiment, the controller communicates with an alarm device configured to provide one or more an audible or visual signal in response to the alarm device receiving the control signal from the controller to alert the operator of the leak. In some examples, the warning device is one or more of a siren, a light, or a display. In another example, the alarm device is a communication device that can send an action or system message to the operator.

These "alert" features allow an operator to respond to the detection of a water leak. The operator can respond in a variety of ways, such as ensuring that the vacuum pump is turned off or the cooling water control valve is closed. They can then ensure that there is no more water leakage, for example, by repairing the leak and/or by replacing the vacuum pump assembly to continue wider operations (e.g., manufacturing tasks) without water leakage damaging the vacuum pump assembly. Providing services for broader operational risks.

In a further embodiment of any of the above, the water cooling system includes one or more cooling tubes and one or more valves configured to selectively allow cooling water to flow through the cooling tubes. The control signal is configured to stop operation of the vacuum pump and close the one or more valves in response to detecting the water leak. In one embodiment, there are a plurality of cooling tubes and a corresponding valve to selectively admit cooling fluid in each cooling tube.

In this way, the controller ensures that further water leakage and/or damage to the vacuum pump is automatically prevented without the need for an operator's attention or action. This may be desirable when the operator cannot always observe or be near the vacuum pump assembly, as this will provide faster preventive measures when the leak is first detected.

In any of the above further embodiments, the vacuum pump assembly includes a regulating valve for controlling a water inlet of the water cooling system. The control signal is configured to close the regulating valve in response to detecting the water leakage to prevent water from entering the water cooling system through the water inlet.

The purpose of a regulating valve is to ensure that water leakage is stopped even if it occurs in one of the other valves in the system. A regulator valve switches between open and closed configurations less frequently than other valves in the water cooling system, and therefore may be less prone to a water leak. Therefore, the water leakage is less likely to occur at the regulator valve, and therefore the benefit of being able to control the regulator valve in response to the water leakage is greater. It should be understood that closing the regulating valve will stop water supply from the water source to the cooling system.

Although specific advantages have been discussed above with respect to specific features, other advantages of the specific features may become apparent to those skilled in the art following this disclosure.

Shown in Figure 1 is a conventional vacuum pump assembly 2, which does not include the water leakage detection feature of the present invention, but shares many common features with it.

The vacuum pump assembly 2 shown includes a vacuum pump 4, such as a Roots pump 4. The assembly 2 also contains a booster pump 6 which is connected to the pump 4 by a conduit 8 . Pump 4 and booster pump 6 operate together in a well-known manner to provide a pumping action for evacuating a manufacturing chamber and/or flowing process gases through the manufacturing chamber. Although a Luschou pump is shown in combination with a booster pump, it should be understood that the assembly of the present invention extends to any suitable type of vacuum pump, such as a claw pump or a screw pump, which may or may not be combined with one or more A booster pump combination is provided.

Each of the pumps 4, 6 requires cooling during operation (eg, to cool the motor and drive the pumps 4, 6). To provide this cooling, a water cooling system 10 is provided. The water cooling system 10 includes cooling tubes 12 and valves 14 operable to selectively open or close to allow or prevent water flow through the respective tubes 12, and may also include a radiator (not shown). In one example, cooling tube 12 may be made of stainless steel and valve 14 may be made of a polymeric material (eg, having a plastic shell and containing metal valve components such as solenoids, electrodes, and steel rods therein). However, any other suitable material may be implemented, for example, the cooling tube 12 may instead be made of copper or plastic, and the valve 14 may be metallic (ie, have a metal housing). The vacuum pump assembly 2 includes an inlet 16 to the water cooling system 10 which is fluidly connectable to a water source (not shown). The inlet 16 is provided with a regulating valve 18 operable to open or close the water supply to the water cooling system 10 . There is also a return circuit of cooling pipes (not shown) which delivers used cooling water from the pumps 4, 6 to an outlet of the water cooling system 10 (not shown). In one example, the spent cooling water may be cooled via an external heat exchanger and then recirculated to the inlet 16 of the system 10 to provide a closed loop water cooling system. Alternatively, the used cooling water can be disposed of and fresh cooling water supplied to the inlet 16 .

The vacuum pump assembly 2 includes a controller 20 . The controller 20 includes a processor 22 for executing instructions 26 and a memory 24 for storing the instructions 26 . The controller 20 responds to inputs from the vacuum pump assembly 2 and is in communication with the valve 14 of the water cooling system 10 to control the flow of water through the cooling tube 12, thereby affecting the cooling of the respective pumps 4, 6. The controller 20 may additionally be used to control the operation of the pumps 4,6. Controller 20 may feature any number of suitable control units to control the operation of assembly 2 .

The vacuum pump assembly 2 further includes a housing 30 that encloses the water cooling system 10, the vacuum pumps 4, 6, 8 and the controller 20. Housing 30 includes a bottom 34 and a top panel 32 , and a plurality of side panels 36 (front and rear side panels 36 are shown) that connect top panel 32 to bottom 34 . Housing 30 additionally includes features such as wheels 40 or legs/feet 42 as shown for transporting and supporting vacuum pump assembly 2 respectively.

2 to 4 illustrate a vacuum pump assembly 2 according to an embodiment of the present invention. Figures 2 to 4 each contain features as described above with respect to Figure 1, which are therefore not repeated in detail here. The same reference symbols are used for the same features in the various drawings.

The embodiment of FIGS. 2-4 further includes a sensor arrangement 50 for detecting water leakage from the water cooling system 10 . The sensor arrangement 50 of various embodiments communicates with the controller 20 and is configured to send a signal to the controller 20 when a water leak is detected.

As shown in FIG. 2 , the housing 30 further includes a tray 52 attached to the bottom 34 of the housing 30 such that water from a leak in the cooling system 10 will flow into and be collected by the tray 52 (e.g., via gravity and/or via A collection chute leading there (not shown)). In one example, the base 34 defines parallel running bottom rails from which the pallet 52 is suspended. The bottom 34 may alternatively define a plate to which the tray 52 is attached. Sensor arrangement 50 includes a sensor 54 located in tray 52 . Sensor 54 is configured to detect when water is present in tray 52 (from a water leak).

The illustrated sensor 54 is an electrical sensor that includes a plurality (as shown, two) of probes 56 . Sensor 54 is configured to measure a resistance between probes 56 by using probes 56 . When water is present in tray 52, the resistance between probes 56 changes, allowing sensor 54 to provide a water detection signal indicative of a water leak that has occurred.

The water detection signal is communicated from the sensor 54 to the controller 20 (eg, via wires - shown in dashed lines), enabling the controller 20 to detect and react to water leaks (as described further below). More generally, controller 20 detects the presence of water in tray 52 by monitoring signals communicated from sensor 54 .

It will be appreciated that the sensor 54 may be located at a distance from the tray 52 , provided that the sensor 54 includes means for detecting the presence of water in the tray 52 . For example, as mentioned above, the component may correspond to the probe 56 in communication with the sensor 54 .

Depending on its configuration, sensor 54 in the configuration shown may be referred to as a water sensor, a water level sensor, or a water leak detector, respectively.

Although one specific configuration of water sensor 54 is depicted and discussed, any other suitable type and configuration of sensor 54 for detecting water in tray 52 may be used within the scope of the invention.

Figure 3 shows an optional sensor arrangement 50 that includes a humidity sensor 58. Humidity sensor 58 is secured to the interior of housing 30 on its top panel 32 . Since water vapor usually rises, the top panel 32 is considered to be the most appropriate location for placing the humidity sensor 58 to provide water leakage detection. However, it should be understood that the humidity sensor 58 may also be placed on the side panel 36 (or even the bottom panel 34) of the housing 30. In other examples, there may be a plurality of humidity sensors 58 at a plurality of such locations or around a particular component of the assembly 2 (eg, valve 14). This may allow for improved water leakage detection around these components of assembly 2.

Humidity sensor 58 is configured to detect changes in humidity in the air. Humidity sensor 58 may be a capacitive, resistive, or thermal humidity sensor 58 configured to detect changes in humidity that change the flow of electrical current through the air inside housing 30 . Humidity sensor 58 communicates with controller 20 (eg, electrical communication via wires - shown in dashed lines) so that controller 20 can determine from the output of humidity sensor 58 whether the humidity in vacuum pump assembly 2 has increased. For example, if the humidity reaches a certain threshold level indicating a potential water leak, the humidity sensor 58 sends a water detection signal to the controller 20 .

One of this increase in humidity may occur after the water cooling system 10 leaks water in one of different ways. For example, water leaking from or onto thermal components (eg, pumps 4, 6) in assembly 2 may increase humidity, which may cause the water to evaporate and increase humidity in housing 30. This may additionally or alternatively be caused by water leaking through a small hole in the cooling system 10, which sprays water as a mist into the housing 30, thereby increasing the humidity therein. Further alternatively or additionally, leaking water may increase humidity simply by being exposed to environmental conditions within housing 30 that cause the water to evaporate.

The sensor arrangement 50 shown in Figure 4 includes each of the sensor arrangements 50 shown in Figures 2 and 3. That is, the sensor arrangement 50 of Figure 4 includes a tray 52 with a water sensor 54 and a housing One of 30 humidity sensors 58. In this example, humidity sensor 58 can be used to warn of a potential water leak, and water sensor 54 can provide confirmation that a water leak has occurred and water has accumulated in housing 30 .

It should be understood that within the scope of the present invention, the number, positioning, configuration and sensitivity of sensors 54, 58 can be easily adjusted to provide effective water leak detection for different applications and vacuum pump assemblies.

Locating sensors 54, 58 in different portions of assembly 2 and housing 30 may also be used to allow sensor configuration 50 to inform controller 20 where exactly within assembly 2/cooling system 10/housing 30 Water leak detected. This may help inform further preventive and maintenance measures that need to be taken to prevent further damage from the leak (as discussed further below) and to repair the leak (e.g., which component of assembly 2 or cooling system 10 may need to be replaced - such as which Valve 14 or pipe 12).

When the controller 20 receives a water detection signal from the sensor arrangement 50, as described above in any one of FIGS. 2 to 4, the controller 20 outputs a control signal.

The control signal may be output to an alarm device 60, such as a siren, light, or display, which communicates with the controller 20 (eg, electrical communication via wires - shown in phantom). For example, the control signal may cause an audible signal to be played through an alarm, a visual signal provided by a light, or information to be displayed on a display. Of course, any combination of such alarm devices 60 with audible and visual signals may be used.

Accordingly, the control signal will alert an operator that a water leak is detected and allow him or her to take appropriate action. For example, an operator may turn off the valve 14 and pumps 4, 6 of the water cooling system 10. The operator may close only the regulating valve 18 and leave the other valves 14 open, or they may close both regulating valves 18 and the other valves 14 . The operator can simply disconnect the water source from the inlet 16. In any event, operator action will stop the flow of water in the water cooling system 10 and prevent further water leakage that could cause further damage. Shutting down the pumps 4, 6 will also prevent overheating due to lack of cooling. The operator will then be able to investigate and repair the leak, or replace the vacuum pump assembly2. If a monitor is used, the information displayed on it can provide the operator with guidance on the necessary steps (for example, and can change depending on the location of the leak detected and the severity of the leak).

In a further embodiment, the controller 20 automatically causes some response from the vacuum pump assembly 2 in response to the output control signal. For example, a control signal sent by controller 20 may close valve 14 and, if necessary, close regulator valve 18. The control signal can also switch off the pumps 4, 6. This will ensure that the leak stops as quickly as possible without operator involvement. Nonetheless, when the control signal closes the valve 14 and/or the regulating valve 18 and/or switches off the pumps 4, 6, the control signal may also alert the operator via an audible and/or visual signal (as described above), so that action can be taken. Further action (e.g. investigation and repair/replacement).

In one example using a combination of sensors 54, 58, controller 20 receiving a signal from humidity sensor 54 may issue a control signal that provides early warning of a potential water leak, for example, via audible or visual signals. This may result in an operator checking assembly 2 for investigation without first shutting down assembly 2 and interrupting its use. However, if a leak is subsequently confirmed by receiving a signal from water sensor 58, controller 20 may take automatic preventive measures, such as closing one or a combination of valve 14, regulating valve 18, and shutting down pump 4, 6. Of course, any desired combination of the aforementioned sensors 54, 58 and controller 20 responding to the signals provided thereby may be used within the scope of the present invention.

Although illustrative embodiments of the invention have been disclosed in detail herein with reference to the accompanying drawings, it should be understood that the invention is not limited to the precise embodiments and that various changes and modifications may be made therein by those skilled in the art without departing from the scope of the appended claims. and their equivalents.

2: Vacuum pump assembly 4: Vacuum pump 6: Booster pump 8:Catheter 10:Water cooling system 12: Cooling pipe 14: valve 16:Entrance 18: Regulating valve 20:Controller 22: Processor 24:Memory 26:Instructions 30: Shell 32:top plate 34: Bottom 36:Side panel 40:wheels 42:Legs/Feet 50: Sensor configuration 52:Pallet 54: Sensor 56:Probe 58:Humidity sensor 60:Alarm device

Embodiments of the invention will now be further described with reference to the accompanying illustrative schematic drawings, in which:

Figure 1 illustrates a conventional vacuum pump assembly;

Figure 2 illustrates an exemplary vacuum pump assembly with a water sensor in a tray for collecting water from a leak;

Figure 3 illustrates an exemplary vacuum pump assembly with a humidity sensor for detecting water from a leak;

Figure 4 illustrates an exemplary vacuum pump assembly having the water sensor and humidity sensor in the tray of Figures 2 and 3 combined in the same assembly.

2: Vacuum pump assembly

4: Vacuum pump

6: Booster pump

8:Catheter

10:Water cooling system

12: Cooling pipe

14: valve

16:Entrance

18: Regulating valve

20:Controller

22: Processor

24:Memory

26:Instructions

30: Shell

32:top plate

34: Bottom

36:Side panel

40:wheels

42:Legs/Feet

50: Sensor configuration

52:Pallet

54: Sensor

56:Probe

60:Alarm device

Claims (14)

A vacuum pump assembly, which includes: a vacuum pump; A water cooling system used to cool the vacuum pump; a sensor arrangement for detecting water leakage from one of the water cooling systems; and A controller is in communication with the sensor arrangement, wherein the controller is configured to output a control signal in response to the sensor arrangement detecting the water leakage. The vacuum pump assembly of claim 1, wherein the sensor arrangement is configured to send a water detection signal to the controller in response to detecting the water leakage from the water cooling system. The vacuum pump assembly of claim 1 or 2, further comprising a tray configured to collect water from the leakage. The vacuum pump assembly of claim 3, wherein the sensor configuration includes a sensor located in the tray, and the sensor is configured to detect the presence of water in the tray. The vacuum pump assembly of claim 4, wherein the sensor is an electrical sensor, wherein the electrical sensor includes a plurality of probes and is configured to detect resistance, voltage or current between the probes. A change in at least one of resistance, voltage or current indicates the presence of water in the tray. The vacuum pump assembly of claim 3, 4 or 5, wherein the tray is attached to a bottom of a housing surrounding the assembly. The vacuum pump assembly of any one of the preceding claims, wherein the sensor configuration includes a humidity sensor configured to detect an increase in humidity caused by the water leakage. The vacuum pump assembly of claim 7, wherein the humidity sensor is located on a top plate surrounding the assembly/the housing. The vacuum pump assembly of claim 7 or 8 further includes a plurality of humidity sensors located at different positions around the assembly. A vacuum pump assembly as claimed in any one of the preceding claims, wherein the control signal is configured to alert an operator of the water leakage. The vacuum pump assembly of claim 10, wherein the controller communicates with an alarm device, the alarm device configured to provide one or more audible or audible signals in response to the alarm device receiving the control signal from the controller. Visual signal to alert the operator of a water leak. The vacuum pump assembly of claim 11, wherein the alarm device is one or more of a siren, a light, a display, or a communication device configured to send an action or system message to the operator. The vacuum pump assembly of any one of the preceding claims, wherein the water cooling system includes one or more cooling tubes and one or more valves configured to selectively allow cooling water to flow through the one or more valves. A cooling tube, wherein the control signal is configured to stop operation of the vacuum pump and close the one or more valves in response to detecting the water leak. The vacuum pump assembly of any one of the preceding claims, further comprising a regulating valve for controlling a water inlet of the water cooling system, wherein the control signal is configured to close the water in response to detecting the water leakage. A valve is adjusted to prevent water from entering the water cooling system via the water inlet.