TW202342949A - 光學測定機構 - Google Patents

光學測定機構 Download PDF

Info

Publication number
TW202342949A
TW202342949A TW112112044A TW112112044A TW202342949A TW 202342949 A TW202342949 A TW 202342949A TW 112112044 A TW112112044 A TW 112112044A TW 112112044 A TW112112044 A TW 112112044A TW 202342949 A TW202342949 A TW 202342949A
Authority
TW
Taiwan
Prior art keywords
illuminance
analyzer
probe
light
relative
Prior art date
Application number
TW112112044A
Other languages
English (en)
Chinese (zh)
Inventor
井上智彥
山下健一
松本弘
Original Assignee
日商鳳凰電機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商鳳凰電機股份有限公司 filed Critical 日商鳳凰電機股份有限公司
Publication of TW202342949A publication Critical patent/TW202342949A/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0242—Control or determination of height or angle information of sensors or receivers; Goniophotometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0429—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using polarisation elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G01M11/0214—Details of devices holding the object to be tested

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
TW112112044A 2022-04-25 2023-03-29 光學測定機構 TW202342949A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022071253A JP2023161100A (ja) 2022-04-25 2022-04-25 光学測定機構
JP2022-071253 2022-04-25

Publications (1)

Publication Number Publication Date
TW202342949A true TW202342949A (zh) 2023-11-01

Family

ID=87183478

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112112044A TW202342949A (zh) 2022-04-25 2023-03-29 光學測定機構

Country Status (4)

Country Link
JP (1) JP2023161100A (ja)
KR (1) KR20230151459A (ja)
CN (1) CN116465603A (ja)
TW (1) TW202342949A (ja)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09218098A (ja) 1996-02-14 1997-08-19 N T T Advance Technol Kk 自動消光比測定器

Also Published As

Publication number Publication date
JP2023161100A (ja) 2023-11-07
KR20230151459A (ko) 2023-11-01
CN116465603A (zh) 2023-07-21

Similar Documents

Publication Publication Date Title
US6621578B1 (en) Elliposometer, sample positioning mechanism, and polarization angular adjusting mechanism, used in the elliposometer
US20080049222A1 (en) Measuring method and apparatus for measuring depth of trench pattern
KR102036235B1 (ko) 편광 측정 방법, 편광 측정 장치, 편광 측정 시스템 및 광 배향 조사 장치
JP2007086031A (ja) 光検出装置、及び試料ホルダ用治具
WO2002079760A3 (en) Polarimetric scatterometer for critical dimension measurements of periodic structures
JP2006053141A (ja) 少なくとも１つの単結晶の測定、配向および固定のための方法および装置
CN103003661A (zh) 用于测量膜厚度的方法和设备
JPWO2012036075A1 (ja) 屈折率測定装置、及び屈折率測定方法
KR20220100878A (ko) 도파관의 표면을 폴리싱하는 방법
CN109490253B (zh) 一种新型模拟自然光双向反射分布函数测试装置
JP5605399B2 (ja) 偏光測定方法、及び偏光測定システム
KR20110087069A (ko) 웨이퍼의 양면 동시 검사가 가능한 웨이퍼 표면 검사 장치
TW202342949A (zh) 光學測定機構
CN203643316U (zh) 一种五维对心平台
CN113811741A (zh) 尺寸测量夹具和包括该尺寸测量夹具的尺寸测量装置
JP5516802B1 (ja) 光配向照射装置
WO2022095025A1 (zh) 一种光阑调节结构、光阑装置及基因测序设备
KR200393404Y1 (ko) 다중 헤드식 타원해석기
KR101944861B1 (ko) 시편 검사 장치 및 이를 포함하는 드론
TWI666428B (zh) 偏光光測定裝置、及偏光光照射裝置
JP2004233089A (ja) 被検査物の大きさ判定装置および判定方法
JP5178853B2 (ja) 光検出装置
CN219284479U (zh) 一种波片支架装配设备
JP7193196B2 (ja) 配向膜露光装置用の測定機構、および配向膜露光装置の調整方法
CN215114437U (zh) 棱镜光束平移平行差测量装置