TW202340548A - Charging pipe, charging method and crystal growth equipment - Google Patents

Abstract

The invention discloses a feeding pipe, a feeding method and crystal growth equipment, the feeding pipe is used for the crystal growth equipment and comprises a pipe body and a plurality of partition pieces, the pipe body defines a feeding cavity, the feeding cavity comprises a plurality of containing cavities which are sequentially arranged in the axial direction of the pipe body, a discharging port is formed in the peripheral wall of each containing cavity, and the partition pieces are arranged in the containing cavities. The multiple partition pieces are arranged at intervals in the axial direction of the pipe body, each partition piece is arranged in the corresponding containing cavity, the partition pieces can move between the shielding position and the avoiding position, in the shielding position, the partition pieces are located on the upper sides of the corresponding discharging ports so as to shield the corresponding discharging ports, and in the avoiding position, the partition pieces are located on the lower sides of the corresponding discharging ports. At least part of the partition piece is located on the lower side of the corresponding discharging port so as to avoid the corresponding discharging port. According to the feeding pipe, feeding is dispersed, and the follow-up material melting efficiency can be improved.

Description

Feeding tube, feeding method and crystal growth equipment

The present invention relates to the technical field of crystal growth, and in particular to a feeding tube, a feeding method and crystal growth equipment.

In the continuous Czochralski (CCZ)/repeated crystal pull (RCZ) method of drawing ingots, materials need to be added immediately, and the feeding process will directly affect the time and quality of subsequent material processing. In the related technology, due to the unreasonable feeding method, the subsequent feeding time is longer. [References to related applications]

This application requires priority for a patent application submitted to the National Intellectual Property Administration of China on March 31, 2022, with the application number 202210344847.6, and the invention name is "Feeding Pipe, Feeding Method and Crystal Growth Equipment".

The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a feeding pipe. The feeding pipe feeds are relatively dispersed, which is beneficial to improving the subsequent feeding efficiency.

The present invention also proposes a crystal growth equipment having the above-mentioned feeding tube.

According to the feeding tube according to the first embodiment of the present invention, the feeding tube is used in crystal growth equipment and includes: a tube body, the tube body defines a feeding chamber, and the feeding chamber includes a plurality of holding chambers arranged sequentially along the axial direction of the tube body, A discharge port is formed on the peripheral wall of each holding cavity; a plurality of dividers are arranged at intervals along the axial direction of the tube body, each divider is provided in the corresponding holding cavity, and the dividers can be in a blocking position and Movement between avoidance positions. In the blocking position, the divider is located on the upper side of the corresponding outlet to block the corresponding outlet. In the avoidance position, at least part of the divider is located on the lower side of the corresponding outlet to avoid the corresponding outlet.

According to the feeding pipe according to the embodiment of the present invention, multiple holding cavities are arranged sequentially along the axial direction of the tube body, so that the heights of the plurality of holding cavities are different, and each holding cavity has a discharge port, which facilitates It makes the materials falling from multiple holding cavities more dispersed, which is beneficial to improving the efficiency of subsequent material mixing. At the same time, when used to feed materials into a multi-layer crucible structure, it is convenient to meet the feeding needs of the multi-layer crucible structure in different charging spaces, and is effective The applicability and practicality of the feeding tube are improved.

In some embodiments, a side surface of the partition facing the corresponding holding cavity has a guide surface, and the guide surface extends outward along the radial direction of the tube body in a direction away from the corresponding holding cavity.

In some embodiments, the partition is configured to guide the material in the holding cavity to the discharge port and pass through the discharge port at a preset discharge speed, and the corresponding preset discharge speeds of at least two partitions are different.

In some embodiments, the side surface of the partition facing the corresponding holding cavity has a guide surface, and the guide surface extends outward along the radial direction of the tube body in a direction away from the corresponding holding cavity, and the guide surfaces of at least two partitions correspond to The guide angle is different, and the guide angle is the angle between the corresponding line segment on the longitudinal section of the guide surface pipe body and the central axis of the pipe body.

In some embodiments, the guide angle of the upper guide surface is greater than the guide angle of the lower guide surface.

In some embodiments, a stopper is provided below at least one discharge port. The stopper includes a first stopper and a second stopper. The first stopper is located on the outside of the tube body, so that the first stopper can The stopper part and the outer peripheral wall of the tube body define a storage tank, the second stopper part is located inside the tube body, and in the avoidance position, the second stopper part is supported on the bottom of the partition.

In some embodiments, the plurality of partitions have a first state and a second state. In the first state, the plurality of partitions move synchronously, and in the second state, the plurality of partitions move asynchronously.

In some embodiments, the feeding tube further includes: multiple limiters, each limiter is provided corresponding to a divider, the limiter has a blocking state and an avoidance state, and in the blocking state, the limiter blocks the divider. movement, in the avoidance state, the limiter releases the stop of the partition, in the second state, at least one limiter is in the blocking state, and at least one limiter is in the avoidance state.

In some embodiments, in the first state, the plurality of partitions move sequentially from top to bottom to the avoidance position.

In some embodiments, the separator can rotate relative to the tube body around the central axis of the tube body. In the blocking state, the stopper blocks the rotation of the separator. In the avoidance state, the stopper releases the force on the rotation of the separator. stop.

According to the feeding method according to the embodiment of the second aspect of the present invention, the feeding method adopts the feeding pipe according to the above-mentioned embodiment of the first aspect of the present invention for feeding. The feeding method includes the following steps: S1: Add materials into the feeding chamber; S2: Put multiple materials into the feeding chamber at the same time. materials in one holding cavity, or, materials in multiple holding cavities are placed in a preset sequence.

The feeding method according to the embodiment of the present invention facilitates flexible feeding according to actual feeding needs, and is conducive to better meeting actual differentiated needs.

According to the feeding method of the third embodiment of the present invention, the feeding method adopts the feeding tube according to the above-mentioned embodiment of the first aspect of the present invention. The feeding method includes the following steps: S10: Add materials into the feeding chamber; S20: Put in multiple Contains the contents of one of the cavities.

According to the feeding method of the embodiment of the present invention, when it is necessary to separately feed a certain feeding area according to the actual feeding process, and the feeding area corresponds to one of the plurality of holding cavities, then the feeding method can be separately added. The materials in one of the above-mentioned holding chambers can be put in without affecting the amount of materials in other parts to better meet actual needs.

The crystal growth equipment according to the fourth embodiment of the present invention includes: a crystal growth furnace; a crucible assembly, the crucible assembly is arranged in the crystal growth furnace; and a feeding pipe, the feeding pipe is the feeding pipe according to the first embodiment of the present invention, And the feeding tube is used to feed the crucible assembly.

According to the crystal growth equipment according to the embodiment of the present invention, by using the above-mentioned feeding pipe, the feeding efficiency is improved, thereby facilitating the improvement of production efficiency.

In some embodiments, the crystal growth furnace has a lifting mechanism, and the lifting mechanism is used to drive each partition to move from the shielding position to the avoidance position.

Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention and cannot be understood as limiting the present invention.

The following disclosure provides many different embodiments or examples for implementing different structures of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the invention. Furthermore, the present invention may repeat reference numerals and/or letters in different examples. This repetition is for purposes of simplicity and clarity and does not by itself indicate a relationship between the various embodiments and/or arrangements discussed. Furthermore, the present disclosure provides examples of various specific techniques and materials, but one of ordinary skill in the art will recognize the applicability of other techniques and/or the use of other materials.

Next, with reference to the drawings, the feeding pipe 10 according to the embodiment of the present invention is described. Among them, the feeding pipe 10 is used in crystal growth equipment, and the feeding pipe 10 can feed materials into the crystal growth furnace of the crystal growth equipment.

As shown in Figure 1, the feeding tube 10 includes a tube body 1. The tube body 1 defines a feeding chamber 1a. The feeding chamber 1a includes a plurality of containers arranged sequentially along the axial direction of the tube 1 (for example, the up and down direction in Figure 1). Each holding cavity 1b can be used to hold materials (such as silicon materials, etc.). The peripheral wall of each holding cavity 1b is formed with a discharge port 1c, and the materials in the holding cavity 1b can pass through the discharge port. The port 1c flows to the outside of the tube body 1 and falls into the charging area corresponding to the charging part (such as the crucible assembly 20, etc.) to realize the addition of materials.

As shown in Figure 1, the feeding tube 10 also includes a plurality of partitions 2. The plurality of partitions 2 are arranged at intervals along the axial direction of the tube body 1. Each partition 2 is provided in the corresponding holding cavity 1b, and the partitions 2 can Moves between the blocking position and the avoidance position; in the blocking position, the divider 2 is located on the upper side of the corresponding discharge port 1c to block the corresponding discharge port 1c. At this time, all materials in the holding cavity 1b are located at the corresponding discharge port 1c above, the material in the holding cavity 1b cannot flow out through the discharge port 1c. In the avoidance position, at least part of the partition 2 is located on the lower side of the corresponding discharge port 1c to avoid the corresponding discharge port 1c, then the partition 2 A part of the partition 2 is located on the lower side of the discharge port 1c or the entire partition 2 is located on the lower side of the discharge port 1c, so that the partition 2 does not block the discharge port 1c. At this time, the material in the holding cavity 1b can flow to the discharge port 1c. At the material port 1c and flows out through the material outlet 1c.

It can be seen that by controlling the movement of the divider 2 so that the divider 2 can switch between the blocking position and the avoidance position, the feeding or stopping of the feeding pipe 10 can be realized. It can be understood that the movement of the plurality of partitions 2 is synchronized, or that the movement of at least one partition 2 is not synchronized with the movement of the remaining partitions 2 .

For example, in the example of FIG. 1 , the discharge port 1 c is provided at the bottom of the holding chamber 1 b to ensure that most or all of the materials in the holding chamber 1 b flow to the corresponding feeding area through the discharge port 1 c. In a specific example, the discharge port 1 c may include a plurality of openings spaced apart along the circumferential direction of the pipe body 1 .

For example, there are two holding chambers 1b. The two holding chambers 1b include a first holding chamber R1 and a second holding chamber R2 arranged sequentially from top to bottom. The peripheral wall of the first holding chamber R1 is formed with a first holding chamber. The discharge port O1 and the second discharge port O2 are formed on the peripheral wall of the second holding cavity R2. At this time, there can be two partitions 2. The two partitions 2 include a first partition 21 and a second partition 22. The first partition 21 is provided in the first holding chamber R1, and the first partition 21 can separate the materials in the first holding chamber R1 from the materials in the second holding chamber R2. The second partition 22 is provided In the second holding chamber R2. For another example, there are three holding chambers 1b, and the three holding chambers 1b include a first holding chamber R1, a second holding chamber R2, and a third holding chamber R3 arranged in sequence from top to bottom. Each cavity 1b is provided with a partition 2 corresponding to it. Of course, there can be more than three holding chambers 1b. In this case, the plurality of holding chambers 1b include a first holding chamber R1, a second holding chamber R2 and a third holding chamber R3 arranged in sequence from top to bottom. There is one first holding chamber R1 and one third holding chamber R3 respectively, and there may be multiple second holding chambers R2.

Therefore, according to the feeding pipe 10 of the embodiment of the present invention, by providing a plurality of holding cavities 1b arranged sequentially along the axial direction of the tube body 1, it is convenient to make the heights of the plurality of holding cavities 1b different, and each holding cavity The peripheral wall of 1b is respectively provided with a discharge port 1c, which facilitates the distribution of materials falling from the multiple holding chambers 1b, which is beneficial to improving the efficiency of subsequent material mixing and ensuring the feeding efficiency of the feeding pipe 10 towards the charging part. At the same time When used to feed materials into a multi-layer crucible structure, it is convenient to meet the feeding requirements of the multi-layer crucible structure in different charging spaces, effectively improving the applicability and practicality of the feeding pipe 10.

It can be understood that for the lowermost holding chamber 1b, the outlet 1c is formed on the peripheral wall of the holding chamber 1b, which can include the following multiple solutions: 1. The peripheral wall of the holding chamber 1b forms a complete Discharge port 1c; 2. The peripheral wall of the holding chamber 1b defines a part of the edge of the discharge port 1c. At this time, the outer edge of the partition 2 corresponding to the holding chamber 1b is separated from the tube body 1 to jointly define the outlet. Material port 1c.

In some embodiments, as shown in Figure 1, the side surface of the partition 2 facing the corresponding holding cavity 1b has a guide surface 2a, and the guide surface 2a faces in the direction away from the corresponding holding cavity 1b along the radial direction of the tube body 1. Extending outward, on the longitudinal section of the tube body 1, the corresponding line segment of the guide surface 2a on the longitudinal section of the tube body 1 can be inclined relative to the central axis of the tube body 1, so that the guide surface 2a can be aligned with the corresponding holding cavity 1b The material inside plays a guiding role. The material flows out through the discharge port 1c along the inclined direction of the guide surface 2a, which is conducive to slowing down the vertical movement of the material in the holding chamber 1b, thereby reducing the impact of the falling material on the charging parts (such as crucibles). Component 20, etc.), or the impact of molten soup, etc., can reduce the splashing of molten soup caused by the falling material, and at the same time facilitate the material to have a certain horizontal speed when passing through the discharge port 1c, so as to ensure that the material accurately falls to the preset feeding area. It is beneficial to further disperse the materials dropped from the multiple holding cavities 1b.

Optionally, in the example of FIG. 1 , the guide surface 2 a is formed as a cone surface (such as a cone surface, an elliptical cone surface, etc.). Of course, the application is not limited to this; in other embodiments, the guide surface 2a may also be formed as a pyramid surface.

Optionally, the corresponding guide angles of the guide surfaces 2a of at least two partitions 2 are different, and the guide angle is the angle between the corresponding line segment of the guide surface 2a on the longitudinal section of the pipe body 1 and the central axis of the pipe body 1, so as to facilitate If the materials in at least two holding cavities 1b pass through the discharge port 1c at different discharge speeds, then at least one of the discharge speed and the speed direction of the material when passing through the two discharge ports is different, so as to further ensure that different holding chambers 1b have different discharging speeds. The materials in the chamber 1b fall to different feeding areas. For example, the feeding areas of multiple chambers 1b are roughly on the same level or have similar heights. The feeding area corresponding to the upper chamber 1b can be located in the lower chamber 1b. The cavity 1b corresponds to the outside of the feeding area, thereby facilitating the zonal feeding of the feeding pipe 10.

Of course, in other embodiments of the present application, the corresponding guide angles of the guide surfaces 2a of all partitions 2 are the same, so that the discharge speed of the materials in the multiple holding cavities 1b through the discharge port 1c is basically equal. In this case Since the height positions of the multiple holding cavities 1b are different, when the feeding areas of the multiple holding cavities 1b are roughly on the same level or have little difference in height, the falling height of the materials in the different holding cavities 1b is different, even if the discharging speed Basically the same, the feeding pipe 10 can also be used to realize zoned feeding.

In some examples, the particle sizes of the materials contained in at least two containing chambers 1b are different. The particles contained in the upper containing chamber 1b have a first particle size, and the particles contained in the lower containing chamber 1b have a first particle size. The particle size is the second particle size, and the second particle size is smaller than the first particle size, then after the above-mentioned at least two holding chambers 1b complete the feeding, the particle size of the material in the outer feeding area in the at least two feeding areas is larger than that in the inner feeding area. The particle size of the material is determined to form multiple feeding areas with different particle size distributions on the entire charging part, which is beneficial to subsequent chemical mixing, improves chemical efficiency, and ensures chemical quality.

It can be seen that when the feeding pipe 10 feeds the material into the crucible assembly 20, the particle sizes of the materials contained in at least two holding chambers 1b are different, which is especially suitable for a multi-layer crucible structure. The multi-layer crucible structure includes a first crucible and a second crucible. , the second crucible is arranged in the first crucible, the first charging space is defined between the first crucible and the second crucible, and the second charging space is defined by the second crucible. Therefore, according to the particle size distribution of materials in each charging space of the designed multi-layer crucible structure, materials with corresponding particle sizes can be loaded into the corresponding holding chamber 1b to better meet the feeding needs of the multi-layer crucible structure. Of course, for the single-layer crucible structure, the single-layer crucible structure only has one charging space. The particle size of materials in different areas in the charging space can also be achieved by loading materials with different particle sizes into the holding chamber 1b. diameter distribution, reducing the mixing time, avoiding the generation of bubbles during the mixing process, and improving the quality of the molten soup.

The following description takes three holding cavities 1b as an example. After reading the following technical solution, those skilled in the art can easily understand the technical solution of two, four, or more holding cavities 1b. The three holding chambers 1b are respectively the first holding chamber R1, the second holding chamber R2 and the third holding chamber R3. The first holding chamber R1, the second holding chamber R2 and the third holding chamber R3 are self-contained. They are arranged in order from top to bottom; the multi-layer crucible structure includes a first crucible, a second crucible and a third crucible. The second crucible and the third crucible are both arranged in the first crucible. The third crucible is arranged in the second crucible. The first crucible A first charging space is defined between the second crucible and the second crucible, a second charging space is defined between the second crucible and the third crucible, and a third charging space is defined in the third crucible, then the first charging space, The second charging space and the third charging space are arranged sequentially from outside to inside; wherein, the materials in the first holding cavity R1 are suitable for falling into the first charging space, and the materials in the second holding cavity R2 are suitable for falling into the first charging space. into the second charging space, the material in the third holding chamber R3 is suitable to fall into the third charging space, and the particle size of the material in the first holding chamber R1 is larger than the particle size of the material in the second holding chamber R2 diameter, and the particle size of the material in the second holding chamber R2 is larger than the particle size of the material in the third holding chamber R3, then the first charging space is filled with the material with the largest particle size, and the second charging space is filled with the particle size For slightly smaller materials, the third charging space contains materials with the smallest particle size. As a result, the gaps between the materials in the third charging space are smaller, which avoids the generation of bubbles in the third charging space during the material mixing process, and during crystal growth, the third charging space can be used for the crystal growth area, thereby It can effectively ensure the normal growth of crystals.

Therefore, the feeding pipe 10 can conveniently adjust the material loading method at any time according to production needs. According to the different charging requirements of the multi-layer crucible structure, materials of different particle sizes can be placed in the feeding pipe 10 to improve production efficiency and can be widely used in RCZ. and CCZ method to draw crystal ingots. It can be understood that when the crucible assembly 20 is a double crucible, the number of holding cavities 1b is two; when the crucible assembly 20 is a triple crucible, the number of holding cavities 1b is three; but it is not limited thereto.

In some embodiments, as shown in FIG. 1 , the partition 2 is configured to guide the material in the holding chamber 1 b to the discharge port 1 c and pass through the discharge port 1 c at a preset discharge speed, so as to facilitate the material to pass through the discharge port 1 c. Port 1c has a certain horizontal speed to ensure that the material accurately falls to the preset feeding area. Among them, the corresponding preset discharging speeds of at least two partitions 2 are different to further ensure that the materials in at least two different holding chambers 1b fall to different feeding areas. For example, the feeding areas of multiple holding chambers 1b are roughly at On the same level or with little difference in height, the feeding area corresponding to the upper holding chamber 1b can be located outside the feeding area corresponding to the lower holding chamber 1b, thereby facilitating the zonal feeding of the feeding tube 10.

It can be understood that in the description of this application, the preset discharging speed is a discharging speed that can accurately make the material fall into the preset feeding area, and the preset discharging speed is a numerical value or a range of values.

In addition, in other embodiments of the present application, the preset discharging speeds corresponding to all the partitions 2 can also be the same. At this time, due to the different height positions of the multiple holding chambers 1b, when the feeding areas of the multiple holding chambers 1b When they are roughly on the same horizontal plane or have little difference in height, the falling heights of materials in different holding chambers 1b are different, which can also enable the feeding pipe 10 to achieve zoned feeding.

In some embodiments, as shown in Figure 1, the side surface of the partition 2 facing the corresponding holding cavity 1b has a guide surface 2a, and the guide surface 2a faces in the direction away from the corresponding holding cavity 1b along the radial direction of the tube body 1. Extending outward, on the longitudinal section of the tube body 1, the corresponding line segment of the guide surface 2a on the longitudinal section of the tube body 1 can be inclined relative to the central axis of the tube body 1, so that the guide surface 2a can be aligned with the corresponding holding cavity 1b The material inside plays a guiding role. The material flows out through the discharge port 1c along the inclined direction of the guide surface 2a, so that the material has a certain horizontal speed when passing through the discharge port 1c, so as to ensure that the material accurately falls to the preset feeding point. area. Among them, the corresponding guide angles of the guide surfaces 2a of at least two partitions 2 are different, and the guide angle is the angle between the corresponding line segment of the guide surface 2a on the longitudinal section of the pipe body 1 and the central axis of the pipe body 1, so as to ensure that at least If the preset discharging speeds corresponding to the two partitions 2 are different, then at least one of the speed magnitude and the speed direction of the two preset discharging speeds is different, so as to further ensure that the materials in different holding cavities 1b fall to different feeding locations. area.

In some embodiments, as shown in Figure 1, the guide angle of the upper guide surface 2a is greater than the guide angle of the lower guide surface 2a, so that the horizontal component velocity of the preset discharge speed corresponding to the upper guide surface 2a is greater than According to the horizontal component of the preset discharging speed corresponding to the lower guide surface 2a, when the feeding areas of the multiple holding chambers 1b are roughly on the same level or have similar heights, the falling height of the material guided by the upper guide surface 2a A drop height greater than that of the material guided by the lower guide surface 2a is conducive to further ensuring the effective separation of the feeding areas corresponding to different guide surfaces 2a. For example, the horizontal radial distance between adjacent feeding areas can be increased to avoid different feeding areas. Materials are mixed.

For example, in the example of FIG. 1 , the plurality of holding chambers 1 b include a first holding chamber R1 , a second holding chamber R2 and a third holding chamber R3 arranged in sequence from top to bottom. The second holding chamber R2 is one. At this time, the plurality of partitions 2 include a first partition 21, a second partition 22 and a third partition 23 arranged sequentially from top to bottom. The first partition 21 is provided in the first holding cavity R1. The second partition 22 is provided in the second holding cavity R2, and the third partition 23 is provided in the third holding cavity R3; wherein, the guide angle θ1 of the guide surface 2a of the first partition 21 ranges from 70° ≤ θ1≤80°, the value range of the guide angle θ2 of the guide surface 2a of the second partition 22 is 60°≤θ2<70°, and the value range of the guide angle θ3 of the guide surface 2a of the third partition 23 is 45°≤ θ3≤55°, which can further improve the accuracy of material falling to the preset feeding area and further reduce the splash caused by material falling. Of course, in other examples of this application, there may also be multiple second containing cavities R2, and the plurality of second containing cavities R2 are arranged in sequence from top to bottom.

In some embodiments, as shown in Figure 1, a stopper 3 is provided below at least one outlet 1c. The stopper 3 includes a first stopper 31, and the first stopper 31 is located on the pipe body 1. outside, so that the first stopper 31 and the outer peripheral wall of the tube body 1 define a storage tank 3a. The storage tank 3a can store a certain amount of materials, and during the unloading process, some materials only pass through the guide surface 2a. A part of the guide will fall from the discharge port 1c, so when the material is started to be discharged, a part of the material flowing out from the discharge port 1c will be stored in the storage tank 3a. As the material accumulates in the storage tank 3a, its accumulation shape will change. Consistent with the material flow at the discharge port 1c, the materials in the storage tank 3a are also accumulated in a shape with a guide slope. The slope of the guide slope is consistent with the slope of the guide surface 2a, so that the subsequent material passes through the discharge port. The material flowing out of 1c always falls along the entire "guide surface" (i.e., the guide surface 2a of the divider 2 and the guide slope formed by the accumulation of materials in the storage tank 3a), thereby ensuring that the material has a stable preset discharge speed. , thereby further ensuring that the materials fall to the corresponding feeding area, and at the same time, to a certain extent, it is beneficial to reduce the falling speed of the materials during the feeding process and avoid excessive unloading.

As shown in Figure 1, the stopper 3 also includes a second stopper 32. The second stopper 32 is located inside the pipe body 1. In the avoidance position, the second stopper 32 is supported on the bottom of the partition 2. In order to ensure the stability of the partition 2 when it is in the avoidance position, it is easy to ensure the stability of the material accumulation shape in the storage tank 3a, thereby ensuring smooth material discharging.

Of course, in other embodiments of the present application, when the corresponding guide angles of the guide surfaces 2a of all partitions 2 are the same, a stopper 3 is provided below at least one discharge port 1c, and the stopper 3 includes a first stopper. The stopper 31 and the first stopper 31 are located on the outside of the tube body 1, so that the first stopper 31 and the outer peripheral wall of the tube body 1 define the storage tank 3a.

For example, in the example of FIG. 1 , the bottom holding cavity 1 b is not provided with a corresponding stopper 3 , and each of the remaining holding chambers 1 b is provided with a corresponding stopper 3 .

It can be understood that when the pipe body 1 is arranged vertically, the first stopper 31 can be arranged horizontally. Of course, the first stopper 31 can also be arranged inclined with respect to the horizontal direction. For example, the first stopper 31 can be arranged with the horizontal direction. The included angle ranges from 0° to 30°. For example, the included angle between the first stop 31 and the horizontal direction is 0°, or 10°, or 15°, or 20°, or 30°, etc. Similarly, the second stopper 32 can be arranged horizontally or inclined relative to the horizontal direction, as long as the second stopper 32 can be used to stably support the partition 2 in the avoidance position.

In some embodiments, as shown in FIG. 1 , the plurality of partitions 2 have a first state and a second state. In the first state, the plurality of partitions 2 move synchronously. In the second state, the plurality of partitions 2 2. Non-synchronous movement. At this time, at least one divider 2 is in a different motion state from other dividers 2, thereby facilitating flexible control of feeding and better meeting the differentiated needs of actual feeding.

For example, in the first state, the plurality of partitions 2 move synchronously from the blocking position to the avoidance position, so that the materials in the multiple holding cavities 1b can be discharged simultaneously; in the second state, one of the partitions 2 self-blocking The position moves to the avoidance position, and the other partitions 2 remain stationary, thereby realizing separate blanking of materials in one of the holding chambers 1b.

Optionally, when the feeding tube 10 is used in crystal growth equipment, multiple partitions 2 are connected to the lifting mechanism 30 to be driven by the lifting mechanism 30. In the second state, one of the partitions 2 is in the lifting mechanism. It can be seen that the lifting mechanism 30 can drive each partition 2 to move downward, and can also drive the remaining partitions when a part of the partitions 2 is restrained. 2 downward movement. For example, there are three partitions 2 , and the three partitions 2 are the first partition 21 , the second partition 22 and the third partition 23 from top to bottom. In the second state, the first partition 21 and The third partitions 23 are all restrained, and the lifting mechanism 30 can independently drive the second partition 22 to move to the avoidance position; of course, in the second state, the lifting mechanism 30 can also independently drive the first partition 21 or the third partition 23 . The three partitions 23 move to the avoidance position.

For example, the plurality of partitions 2 are matched with flexible parts such as ropes. The flexible parts can be threaded through the plurality of partitions 2. The flexible parts are fixedly connected to the lifting mechanism 30. The flexible parts can have multiple knots, and each knot can be Each corresponds to a divider 2, and the knot is located on the lower side of the corresponding divider 2. The divider 2 is supported on the corresponding knot due to gravity, and the flexible member moves up and down to realize the up and down movement of the divider 2; when one of the dividers 2 is When restricted from moving downward, if the flexible member continues to move downward, the divider 2 will be separated from the corresponding knot, and the flexible member will drive the remaining dividers 2 to continue to move downward.

It can be understood that the first state and the second state are not limited thereto. For example, in the first state, the plurality of partitions 2 move sequentially from top to bottom to the avoidance position. That is to say, during the synchronous movement of the plurality of partitions 2, the upper partition 2 among the two adjacent partitions 2 It reaches the avoidance position before the lower partition 2, so as to realize the sequential discharge of materials from top to bottom in the multiple holding cavities 1b, which facilitates the feeding pipe 100 to realize multiple feedings of materials, thereby reducing the amount of single feeding and reducing the impact of the materials on the molten soup. impact to avoid splashing of the molten soup; in the example of Figure 1, the plurality of partitions 2 include a first partition 21, a second partition 22 and a third partition 23 arranged sequentially from top to bottom. In the first state , the plurality of partitions 2 move downward synchronously. At the first moment, the first partition 21 reaches the avoidance position, and the second partition 22 and the third partition 23 are still in the blocking position, and the plurality of partitions 2 continue to move toward Move downward. At the second moment, the second partition 22 reaches the avoidance position, and the third partition 23 is still in the blocking position. The plurality of partitions 2 move downward again. At the third moment, the third partition 23 reaches the avoidance position. Location.

Optionally, there are three or more holding chambers 1b, and the plurality of holding chambers 1b include a first holding chamber R1, a second holding chamber R2 and a third holding chamber arranged sequentially from top to bottom. R3, the first holding chamber R1 is located at the top of the feeding chamber 1a, and the third holding chamber R3 is located at the bottom of the feeding chamber 1a. A first outlet O1 is formed on the peripheral wall of the first holding chamber R1, and the second holding chamber R3 is located at the bottom of the feeding chamber 1a. The peripheral wall of R2 is formed with a plurality of second discharge openings O2 spaced up and down, and the peripheral wall of the third holding chamber R3 is formed with a third discharge opening O3; the following is explained by taking two second discharge openings O2 as an example. , the lower second outlet O2 can be blocked when feeding, then the first partition 21 and the second partition 22 can move to the avoidance position synchronously; when the upper second outlet O2 is blocked when feeding, then The second divider 22 then moves to the avoidance position after the first divider 21, so that after the material addition to the first holding chamber R1 is completed, the second holding chamber R2 starts to discharge materials, so that the materials in the multiple holding chambers 1b Materials are added to the loading parts in sequence.

It can be understood that the sealing of the discharge port 1c can be achieved by providing a sealing device, etc. The specific sealing means are well known to those skilled in the art and will not be described again here.

In some embodiments, as shown in FIG. 1 , the feeding tube 10 also includes a plurality of limiting members 4 , each limiting member 4 is provided corresponding to a partition 2 , and the limiting members 4 have a blocking state and an avoidance state. When blocking, In the avoidance state, the limiter 4 blocks the movement of the divider 2. At this time, the divider 2 is restricted from moving. In the avoidance state, the limiter 4 releases the stopper on the divider 2. At this time, the divider 2 can move relative to the pipe. When the body 1 moves, the movement of the partition 2 can be restricted or released by switching the state of the limiting member 4, which facilitates the flexible switching of the feeding tube 10 between the first state and the second state.

Wherein, in the second state, at least one limiter 4 is in the blocking state, and at least one limiter 4 is in the avoidance state, then in the second state, at least one partition 2 is restricted from movement, and at least one partition The piece 2 can move relative to the tube body 1.

For example, the number of limiters 4 is less than or equal to the number of dividers 2; the limiters 4 are rotary valves, the limiters 4 are provided at the bottom of the corresponding dividers 2, the bottom of the dividers 2 is provided with protrusions, and the rotary valve There is a groove, and the rotary valve can rotate relative to the corresponding protrusion. When the rotary valve rotates until the groove matches the protrusion of the corresponding divider 2, the rotary valve is in an avoidance state, and the divider 2 can move relative to the pipe body 1. When When the rotary valve rotates to a position where the groove is perpendicular to the protrusion of the corresponding partition 2, the rotary valve is in a blocking state and the partition 2 is restricted from moving.

Of course, the limiter 4 is not limited to this; for example, the limiter 4 can be fixed on the corresponding partition 2, and the limiter 4 can be detachably matched with the pipe body 1. When the limiter 4 cooperates with the pipe body 1 , the limiter 4 is in the blocking state. When the limiter 4 is separated from the pipe body 1, the limiter 4 is in the avoidance state.

In some embodiments, as shown in Figure 1, the divider 2 can rotate relative to the pipe body 1 around the central axis of the pipe body 1. In the blocking state, the limiting member 4 blocks the rotation of the divider 2. At this time, the separation The member 2 cannot rotate relative to the pipe body 1. In the avoidance state, the limiting member 4 releases the stopper for the rotation of the divider 2. At this time, the divider 2 can rotate relative to the pipe body 1, which further facilitates the monitoring of the movement status of the divider 2. Flexible control, at the same time, the materials are evenly arranged along the circumference of the holding cavity 1b under the rotation of the partition 2, and the materials have a certain centrifugal force to ensure the uniformity of the materials falling into the corresponding feeding area.

For example, when the feeding tube 10 is used in crystal growth equipment, the partition 2 is connected to the lifting mechanism 30 to be driven by the lifting mechanism 30. At this time, when the partition 2 moves from the blocking position to the avoidance position, the partition 2 2 is driven by the lifting mechanism 30 to rotate relative to the tube body 1 at the same time.

Optionally, the plurality of holding chambers 1b include a first holding chamber R1 and a second holding chamber R2. Large pieces of material are placed in the first holding chamber R1, and small pieces are placed in the second holding chamber R2. With the downward movement of the lifting mechanism 30, the materials in the first holding chamber R1 are arranged axially symmetrically and evenly. Under the action of centrifugal force, large pieces of silicon material fall from the first outlet O1 and travel for a certain distance. After the first partition 21 is restricted by the stopper 3 and the limiter 4, the first partition 21 stops rotating; the lifting mechanism 30 continues to move downward, and as the second partition 22 also continues to move downward, it rotates at the same time. Until the bottom of the second partition 22 is separated from the pipe body 1, small materials are added into the charging member.

According to the feeding method of the second embodiment of the present invention, the feeding method uses the feeding pipe 10 according to the above-mentioned embodiment of the first aspect of the present invention for feeding.

The feeding method includes the following steps: S1: Add materials into the feeding chamber 1a; S2: Put materials into multiple holding chambers 1b at the same time, which is helpful to ensure the feeding efficiency. For example, multiple partitions 2 move to the avoidance position at the same time, so that the materials in multiple holding chambers 1b start to be put in at the same time. Since the material putting time is related to the amount of material in the holding chamber 1b and the putting speed, multiple holding chambers 1b The cavity 1b can complete material delivery at the same time or non-simultaneously.

It can be understood that in step S2, the number of holding cavities 1b participating in material delivery is less than or equal to the total number of holding cavities 1b; when the number of holding cavities 1b participating in material delivery is less than the total number of holding cavities 1b When adding materials in step S1, the materials can be added only to the holding chamber 1b that is about to be put into the material, or the materials can be added to all the holding chambers 1b.

Alternatively, the feeding method includes the following steps: S1: Add materials into the feeding chamber 1a; S2: Put the materials in multiple holding chambers 1b in a preset order.

Similarly, in step S2, the number of holding chambers 1b participating in material placement is less than or equal to the total number of holding chambers 1b; when the number of holding chambers 1b participating in material placement is less than the total number of holding chambers 1b, step When adding materials in S1, you can add materials only to the holding chamber 1b that will be involved in the material delivery, or you can add materials to all the holding chambers 1b. In addition, in step S2, materials can be put into multiple holding chambers 1b in sequence according to a preset order. That is to say, during a single feeding process, only the materials in one holding chamber 1b are put in. After the materials in 1b are put in, the materials in the next holding cavity 1b start to be put in. At this time, the number of materials put in is equal to the number of holding cavities 1b participating in material placement; or, the number of materials put in is less than the number of containers participating in material placement. The number of filling chambers 1b means that during at least one material putting process, the materials in at least two holding chambers 1b are put in.

The feeding method according to the embodiment of the present invention facilitates flexible feeding according to actual feeding needs, and is conducive to better meeting actual differentiated needs.

In step S1, the specific method of adding materials into the feeding chamber will be illustrated below with examples.

According to the feeding method of the third embodiment of the present invention, the feeding method uses the feeding pipe 10 according to the above-mentioned embodiment of the first aspect of the present invention for feeding.

The feeding method includes the following steps: S10: Add materials into the feeding chamber 1a; S20: Put the materials in one of the multiple holding chambers 1b.

It can be understood that in step S20, the number of the holding chambers 1b participating in the material placement is one; in step S10, those who add materials can only add materials to the holding chambers 1b that are about to participate in the material placement, or they can add materials to all the holding chambers 1b. Add materials into the holding cavity 1b.

According to the feeding method of the embodiment of the present invention, when it is necessary to separately feed a certain feeding area according to the actual feeding process, and the feeding area corresponds to one of the multiple holding chambers 1b, then It is enough to put the materials in one of the above-mentioned holding chambers 1b alone without affecting the amount of materials in other parts, so as to better meet actual needs.

For example, there are three holding chambers 1b. The three holding chambers 1b are the first holding chamber R1, the second holding chamber R2 and the third holding chamber R3 from top to bottom. The crucible assembly 20 has a structure from outside to inside. The first charging space, the second charging space and the third charging space are arranged in sequence. When charging, the charging pipe 10 is located above the crucible assembly 20, and the materials in the first holding chamber R1 can be put into the first charging space. In the charging space, the materials in the second holding chamber R2 can be put into the second charging space, and the materials in the third holding chamber R3 can be put into the third charging space; when only the first charging space needs to be filled with materials When , only the materials in the first holding chamber R1 can be put in, and no matter whether there are materials in the second holding chamber R2 and the third holding chamber R3, they will not be put in. Of course, the materials in the second holding chamber R2 can also be put in separately, or the materials in the third holding chamber R3 can be put in separately.

In step S10, the specific manner of adding materials into the feeding chamber 1a will be illustrated below with examples.

The crystal growth equipment according to the fourth embodiment of the present invention includes a crystal growth furnace, a crucible assembly 20 and a feeding pipe 10. The crucible assembly 20 is provided in the crystal growth furnace, and the feeding pipe 10 is used to feed materials into the crucible assembly 20. Among them, the feeding pipe 10 is the feeding pipe 10 according to the above-mentioned embodiment of the first aspect of the present invention.

According to the crystal growth equipment according to the embodiment of the present invention, by using the above-mentioned feeding pipe 10, the feeding efficiency is improved, thereby facilitating the improvement of production efficiency.

In some embodiments, as shown in Figure 1, the crystal growth furnace has a lifting mechanism 30. The lifting mechanism 30 is used to drive each partition 2 to move from the blocking position to the avoidance position. Then the partition 2 and the lifting mechanism 30 Directly connected or indirectly connected, the crystal growth equipment does not need to be provided with a separate mechanism to drive the movement of the partition 2, which simplifies the structure of the crystal growth equipment.

Wherein, when the partition 2 is indirectly connected to the lifting mechanism 30, the partition 2 can be connected to the lifting mechanism 30 through a soft component such as a rope.

During the feeding process, the material can be loaded into the feeding tube 10 first, and then the feeding tube 10 is matched with the lifting mechanism. For example, the tube body 1 is fixed in the crystal growth furnace, and the partition 2 is driven by the lifting mechanism.

In some embodiments, except for the discharge port 1c of the lowermost holding cavity 1b, a stopper 3 is provided below each discharge port 1c. The stopper 3 can block the corresponding outlet relative to the tube body 1. When the stopper 3 is in the blocking position, the material in the holding chamber 1b cannot flow out through the outlet 1c, and the stopper 3 is in the In the avoidance position, the material in the holding cavity 1b can flow out through the discharge port 1c, so that when the material is loaded into the feeding tube 10, the stopper 3 is in the blocking position and moves from bottom to top toward the multiple holding cavities 1b. Load materials in sequence, that is, first load materials into the lower containing cavity 1b, place the partition 2 on the upper side of the containing cavity 1b, and then load materials into the upper containing cavity 1b until the topmost containing cavity is completed. 1b of charging to ensure smooth charging into the feeding tube 10.

In some embodiments, the side surface of the partition 2 facing the corresponding holding cavity 1b has a guide surface 2a. The guide surface 2a extends outward in the radial direction of the tube body 1 in a direction away from the corresponding holding cavity 1b. The guide surface 2a The corresponding guide angle has a first preset angle; when the guide angle is equal to the first preset angle, the outer peripheral edge of the divider 2 stops against the inner peripheral wall of the pipe body 1 to prevent materials from passing through the divider 2 The gap between the outer peripheral edge and the inner peripheral wall of the pipe body 1 falls.

Wherein, the size of the guide angle is adjustable, and the guide angle can be adjusted within the range of the second preset angle to the first preset angle, and the second preset angle is smaller than the first preset angle; when the guide angle is smaller than the first preset angle , there is a gap between the outer peripheral edge of the partition 2 and the inner peripheral wall of the tube body 1, and materials can be loaded into the feeding chamber 1a through this gap. When the filling of the corresponding holding chamber 1b is completed, the first partition on the upper side of the holding chamber 1b The guide angle 2 can be adjusted to a first preset angle to facilitate loading of materials into the holding cavity 1b on the upper side of the partition 2 .

Other structures and operations of crystal growth equipment according to embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail here.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inside", "Outside", "Clockwise", "Counterclockwise", "Axis" The orientations or positional relationships indicated by "radial direction", "circumferential direction", etc. are based on the orientations or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply the device or device referred to. Elements must have a specific orientation, be constructed and operate in a specific orientation and therefore are not to be construed as limitations of the invention. In addition, features defined as “first” and “second” may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

In the description of this specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" or the like is intended to be incorporated into the description of the implementation. An example or example describes a specific feature, structure, material, or characteristic that is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art will understand that various changes, modifications, substitutions and modifications can be made to these embodiments without departing from the principles and purposes of the invention. The scope of the invention is defined by the claims and their equivalents.

10: Feeding tube 20: Crucible assembly 30: Lifting mechanism 1: Pipe body 1a: Feeding chamber 1b: holding cavity 1c: Discharge port R1: The first holding chamber R2: The second holding chamber R3: The third holding chamber O1: The first discharge port O2: The second discharge port O3: The third discharge port 2:Dividers 2a: Guide surface 21: First divider 22:Second divider 23:Third divider θ1, θ2, θ3: guide angle 3: Stopper 3a:Storage tank 31: First stopper 32: Second stopper 4: Limiting parts

The above and/or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 is a schematic diagram of the feeding pipe according to an embodiment of the present invention. The dotted line represents the trajectory of the material falling during the feeding process.

10: Feeding tube

20: Crucible assembly

30: Lifting mechanism

1: Pipe body

1a: Feeding chamber

1b: holding cavity

1c: Discharge port

R1: The first holding chamber

R2: The second holding chamber

R3: The third holding chamber

O1: The first discharge port

O2: The second discharge port

O3: The third discharge port

2:Dividers

2a: Guide surface

21: First divider

22:Second divider

23:Third divider

θ1, θ2, θ3: guide angle

3: Stopper

3a:Storage tank

31: First stopper

32: Second stopper

4: Limiting parts

Claims (14)

A feeding tube, wherein the feeding tube is used in a crystal growth equipment, and the feeding tube includes: A tube body. The tube body defines a feeding chamber. The feeding chamber includes a plurality of holding chambers arranged sequentially along the axial direction of the tube body. The peripheral wall of each holding chamber forms a discharge port. ; A plurality of partitions are arranged at intervals along the axial direction of the tube body. Each of the partitions is provided corresponding to the holding cavity, and the partitions can be in a blocking position and an avoidance position. Move between positions. In the blocking position, the partition is located on the upper side corresponding to the discharge opening to block the corresponding discharge opening. In the avoidance position, at least part of the partition is located on the upper side corresponding to the discharge opening. The lower side of the discharge port is to avoid corresponding to the discharge port. The feeding tube according to claim 1, wherein the partition has a guide surface on a side surface facing the corresponding holding chamber, and the guide surface faces along the tube in a direction away from the corresponding holding chamber. The body extends radially outward. The feeding pipe according to claim 1, wherein the partition is configured to guide the material in the holding chamber to the discharge port and pass through the discharge port at a preset discharge speed, and at least two The preset discharging speeds corresponding to each of the partitions are different. The feeding tube according to claim 3, wherein the partition has a guide surface on a side surface facing the corresponding holding chamber, and the guide surface faces along the tube in a direction away from the corresponding holding chamber. The radial direction of the body extends outward, and the guide angles corresponding to the guide surfaces of at least two partitions are different. The guide angle is the line segment corresponding to the guide surface on the longitudinal section of the tube body and the The angle between the central axes of the pipe body. The feeding pipe according to claim 4, wherein the guide angle of the guide surface located above is greater than the guide angle of the guide surface located below. The feeding pipe according to claim 4, wherein a stopper is provided below at least one of the discharge ports, and the stopper includes a first stopper and a second stopper, and the third stopper A stop portion is located on the outside of the tube body, so that the first stop portion and the outer peripheral wall of the tube body define a storage tank, and the second stop portion is located on the inside of the tube body. , in the avoidance position, the second stopper is supported on the bottom of the partition. The feeding tube according to any one of claims 1 to 6, wherein a plurality of the partitions have a first state and a second state, and in the first state, the plurality of partitions are synchronized Movement, in the second state, a plurality of the partitions move asynchronously. The feeding pipe according to claim 7, wherein the feeding pipe further includes: A plurality of limiters, each limiter is provided corresponding to one of the partitions, the limiter has a blocking state and an avoidance state, and in the blocking state, the limiter stops the the movement of the partition, in the avoidance state, the limiting member releases the stop of the partition, in the second state, at least one of the limiting members is in the blocking state, and At least one of the limiting parts is in the avoidance state. The feeding pipe according to claim 7, wherein in the first state, a plurality of the partitions move sequentially from top to bottom to the avoidance position. The feeding tube according to claim 8, wherein the partition is rotatable relative to the tube body around the central axis of the tube body, and in the blocking state, the stopper blocks the partition In the avoidance state, the limiting member releases the stop for the rotation of the partition member. A feeding method, wherein the feeding method uses the feeding pipe according to any one of claims 1 to 10 for feeding, and the feeding method includes the following steps: S1: Add materials into the feeding chamber; S2: Put multiple materials in the holding cavity at the same time, or put multiple materials in the holding cavity in a preset order. A feeding method, wherein the feeding method uses the feeding pipe according to any one of claims 1 to 10 for feeding, and the feeding method includes the following steps: S10: Add materials into the feeding chamber; S20: Put the materials in one of the plurality of holding cavities. A crystal growth equipment, including: a crystal growth furnace; A crucible assembly, the crucible assembly is located in the crystal growth furnace; A feeding pipe, the feeding pipe is the feeding pipe according to any one of claims 1 to 10, and the feeding pipe is used to feed the crucible assembly. The crystal growth equipment according to claim 13, wherein the crystal growth furnace has a lifting mechanism, and the lifting mechanism is used to drive each of the partitions to move from the blocking position to the avoidance position.