TW202332751A - Adhesive composition, laminate, method for manufacturing laminate, and method for manufacturing electronic component having high heat resistance and facilitating the removal of an adhesive layer - Google Patents
Adhesive composition, laminate, method for manufacturing laminate, and method for manufacturing electronic component having high heat resistance and facilitating the removal of an adhesive layer Download PDFInfo
- Publication number
- TW202332751A TW202332751A TW111144426A TW111144426A TW202332751A TW 202332751 A TW202332751 A TW 202332751A TW 111144426 A TW111144426 A TW 111144426A TW 111144426 A TW111144426 A TW 111144426A TW 202332751 A TW202332751 A TW 202332751A
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- Prior art keywords
- group
- adhesive layer
- adhesive composition
- component
- laminated body
- Prior art date
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- 239000012790 adhesive layer Substances 0.000 title claims abstract description 124
- 239000000203 mixture Substances 0.000 title claims abstract description 121
- 239000000853 adhesive Substances 0.000 title claims abstract description 118
- 230000001070 adhesive effect Effects 0.000 title claims abstract description 118
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 70
- 238000000034 method Methods 0.000 title claims abstract description 51
- 239000010410 layer Substances 0.000 claims abstract description 118
- 239000004065 semiconductor Substances 0.000 claims abstract description 118
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- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims abstract description 28
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000003505 polymerization initiator Substances 0.000 claims abstract description 19
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- 125000005647 linker group Chemical group 0.000 claims description 36
- 150000001875 compounds Chemical class 0.000 claims description 27
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- 239000002253 acid Substances 0.000 claims description 20
- 239000000126 substance Substances 0.000 claims description 19
- 239000003513 alkali Substances 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 14
- 239000002585 base Substances 0.000 claims description 12
- 239000002131 composite material Substances 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims description 6
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- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical class CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- 150000004043 trisaccharides Chemical class 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 150000003739 xylenols Chemical class 0.000 description 1
- USMNOWBWPHYOEA-MRTMQBJTSA-N α-thujone Chemical compound O=C([C@@H]1C)C[C@@]2(C(C)C)[C@@H]1C2 USMNOWBWPHYOEA-MRTMQBJTSA-N 0.000 description 1
- SCWPFSIZUZUCCE-UHFFFAOYSA-N β-terpinene Chemical compound CC(C)C1=CCC(=C)CC1 SCWPFSIZUZUCCE-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J175/00—Adhesives based on polyureas or polyurethanes; Adhesives based on derivatives of such polymers
- C09J175/04—Polyurethanes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/04—Non-macromolecular additives inorganic
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/06—Non-macromolecular additives organic
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J175/00—Adhesives based on polyureas or polyurethanes; Adhesives based on derivatives of such polymers
- C09J175/04—Polyurethanes
- C09J175/14—Polyurethanes having carbon-to-carbon unsaturated bonds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Inorganic Chemistry (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Laminated Bodies (AREA)
Abstract
Description
本發明係關於一種接著劑組合物、積層體、積層體之製造方法以及電子零件之製造方法。The present invention relates to an adhesive composition, a laminated body, a manufacturing method of the laminated body, and a manufacturing method of electronic components.
於包含半導體元件之半導體封裝(電子零件)中,根據相對應之尺寸而存在各種形態,例如有WLP(晶圓級封裝,Wafer Level Package)、PLP(面板級封裝,Panel Level Package)等。 作為半導體封裝之技術,可例舉扇入型技術、扇出型技術。作為基於扇入型技術之半導體封裝,已知有將位於裸晶片端部之端子再配置於晶片區域內之扇入型WLP(扇入型晶圓級封裝,Fan-in Wafer Level Package)等。作為基於扇出型技術之半導體封裝,已知有將該端子再配置於晶片區域外之扇出型WLP(扇出型晶圓級封裝,Fan-out Wafer Level Package)等。 Semiconductor packages (electronic components) including semiconductor elements exist in various forms according to corresponding sizes, such as WLP (Wafer Level Package), PLP (Panel Level Package), etc. Examples of semiconductor packaging technologies include fan-in technology and fan-out technology. As a semiconductor package based on fan-in technology, known are fan-in WLP (Fan-in Wafer Level Package), which rearranges terminals at the end of a bare chip in the chip area. As a semiconductor package based on fan-out technology, a fan-out WLP (Fan-out Wafer Level Package) in which the terminals are rearranged outside the chip area is known.
近年來,尤其是扇出型技術作為能夠實現半導體封裝之更進一步之高積體化、薄型化及小型化等之方法而受到關注,如應用於將半導體元件配置於面板上並進行封裝化之扇出型PLP(扇出型面板級封裝,Fan-out Panel Level Package),等等。In recent years, fan-out technology in particular has attracted attention as a method that can achieve further high integration, thinning, and miniaturization of semiconductor packaging. For example, it is applied to arranging semiconductor elements on a panel and packaging them. Fan-out PLP (Fan-out Panel Level Package, Fan-out Panel Level Package), etc.
為了實現半導體封裝之小型化,重要的是將所組裝之元件中之基板之厚度減薄。然而,若將基板之厚度減薄,則其強度會降低,於製造半導體封裝時容易發生基板之破損。對此,已知有下述技術:使用接著劑將基板暫時接著於支持體,進行基板之加工之後,將基板與支持體分離。In order to achieve miniaturization of semiconductor packages, it is important to reduce the thickness of the substrate in the assembled components. However, if the thickness of the substrate is reduced, its strength will be reduced, and damage to the substrate may easily occur when manufacturing semiconductor packages. In this regard, a technique is known that temporarily adheres a substrate to a support using an adhesive, processes the substrate, and then separates the substrate from the support.
作為基板與支持體之暫時接著所使用之接著劑,自容易利用溶劑等將接著層去除之方面考慮,大多情況下使用熱塑性接著劑。例如,專利文獻1中公開了含有熱塑性彈性體、高沸點溶劑及低沸點溶劑之接著劑組合物。 [先前技術文獻] [專利文獻] As an adhesive used for temporarily bonding a substrate and a support, a thermoplastic adhesive is often used because the adhesive layer can be easily removed using a solvent or the like. For example, Patent Document 1 discloses an adhesive composition containing a thermoplastic elastomer, a high-boiling point solvent, and a low-boiling point solvent. [Prior technical literature] [Patent Document]
[專利文獻1]國際公開第2016/052315號[Patent Document 1] International Publication No. 2016/052315
[發明所欲解決之問題][Problem to be solved by the invention]
若為先前之接著劑,則通常需要分離層,以於基板之加工後將支持體與基板分離。因此,需要分別進行分離層之形成、及接著層之形成,操作繁瑣。If it is a previous adhesive, a separation layer is usually required to separate the support from the substrate after the substrate is processed. Therefore, it is necessary to form the separation layer and the adhesive layer separately, which is a complicated operation.
本發明係鑒於上述情況而成者,其課題在於提供不需要分離層之接著劑組合物、使用該接著劑組合物而製造之積層體、該積層體之製造方法、以及使用有該接著劑組合物之電子零件之製造方法。 [解決問題之技術手段] The present invention was made in view of the above situation, and its object is to provide an adhesive composition that does not require a separation layer, a laminated body manufactured using the adhesive composition, a method for manufacturing the laminated body, and an adhesive composition using the adhesive composition. Methods of manufacturing electronic components of objects. [Technical means to solve problems]
為了解決上述之課題,本發明採用了以下之構成。 即,本發明之第1形態係一種接著劑組合物,其用於形成將半導體基板或電子裝置、與能使光透過之支持體暫時接著之接著層,該接著劑組合物含有包含聚合性碳-碳不飽和鍵之聚胺酯樹脂(P1)、及聚合起始劑(A),上述聚胺酯樹脂(P1)具有包含能吸收波長300~800 nm之範圍內之至少一部分光之結構的結構單元(u1)。 In order to solve the above-mentioned problems, the present invention adopts the following structure. That is, the first aspect of the present invention is an adhesive composition for forming an adhesive layer that temporarily connects a semiconductor substrate or an electronic device and a support capable of transmitting light, and the adhesive composition contains polymerizable carbon. - Polyurethane resin (P1) with carbon unsaturated bonds, and polymerization initiator (A). The polyurethane resin (P1) has a structural unit (u1) containing a structure capable of absorbing at least part of the light in the wavelength range of 300 to 800 nm. ).
本發明之第2形態係一種積層體,其依序積層有能使光透過之支持體、接著層、以及半導體基板或電子裝置,上述接著層為上述第1形態之接著劑組合物之硬化物。A second aspect of the present invention is a laminated body in which a support capable of transmitting light, an adhesive layer, and a semiconductor substrate or an electronic device are laminated in this order, and the adhesive layer is a cured product of the adhesive composition of the first aspect. .
本發明之第3形態係一種積層體之製造方法,其係依序積層有能使光透過之支持體、接著層及半導體基板之積層體之製造方法,該製造方法包括下述步驟:於上述支持體或半導體基板塗佈上述第1形態之接著劑組合物而形成接著劑組合物層之步驟;將上述半導體基板經由上述接著劑組合物層而載置於上述支持體上之步驟;以及,使上述接著劑組合物層硬化而形成上述接著層之步驟。A third aspect of the present invention is a method for manufacturing a laminated body, which is a method for manufacturing a laminated body in which a light-transmitting support, an adhesive layer, and a semiconductor substrate are sequentially laminated. The manufacturing method includes the following steps: The step of applying the adhesive composition of the first aspect to a support or a semiconductor substrate to form an adhesive composition layer; the step of placing the semiconductor substrate on the support via the adhesive composition layer; and, The step of hardening the adhesive composition layer to form the adhesive layer.
本發明之第4形態係一種積層體之製造方法,其係依序積層有能使光透過之支持體、接著層及電子裝置之積層體之製造方法,於藉由上述第3形態之積層體之製造方法得到積層體之後,進而包括形成電子裝置之電子裝置形成步驟,該電子裝置係包含金屬或半導體之構件與將上述構件密封或絕緣之樹脂的複合體。A fourth aspect of the present invention is a method for manufacturing a laminated body in which a support capable of transmitting light, an adhesive layer, and an electronic device are sequentially laminated. After obtaining the laminated body, the manufacturing method further includes an electronic device forming step of forming an electronic device, which is a composite body including a metal or semiconductor component and a resin that seals or insulates the component.
本發明之第5形態係一種電子零件之製造方法,其於藉由上述第4形態之積層體之製造方法得到積層體之後,包括下述步驟:介隔上述支持體對上述接著層照射光而使上述接著層改質,由此將上述電子裝置與上述支持體分離之步驟;以及,利用酸或鹼將上述接著層中之胺基甲酸酯鍵分解,由此將附著於上述電子裝置之上述接著層去除之步驟。 [發明之效果] A fifth aspect of the present invention is a manufacturing method of an electronic component, which, after obtaining the laminated body by the manufacturing method of the laminated body of the fourth aspect, includes the following steps: irradiating the above-mentioned adhesive layer with light through the above-mentioned support body; The step of modifying the above-mentioned adhesive layer to separate the above-mentioned electronic device from the above-mentioned support; and using an acid or alkali to decompose the urethane bond in the above-mentioned adhesive layer, thereby decomposing the urethane bond attached to the above-mentioned electronic device. The above steps for removing the adhesive layer. [Effects of the invention]
根據本發明,可提供不需要分離層而容易進行接著層之去除之接著劑組合物、使用該接著劑組合物而製造之積層體、該積層體之製造方法、以及使用有該接著劑組合物之電子零件之製造方法。According to the present invention, it is possible to provide an adhesive composition that can easily remove an adhesive layer without requiring a separation layer, a laminated body manufactured using the adhesive composition, a method for manufacturing the laminated body, and an adhesive composition using the adhesive composition. Manufacturing method of electronic components.
本說明書及本發明申請專利範圍中,「脂肪族」係指相對於芳香族之相對概念,其定義係指不具有芳香性之基、化合物等。 作為「烷基」,只要沒有特別說明,則包括直鏈狀、支鏈狀及環狀之1價飽和烴基。烷氧基中之烷基也同樣如此。 作為「伸烷基」,只要沒有特別說明,則包括直鏈狀、支鏈狀及環狀之2價飽和烴基。 「鹵化烷基」係烷基之氫原子之一部分或全部經鹵素原子取代而得到之基,作為該鹵素原子,可例舉氟原子、氯原子、溴原子、碘原子。 「氟化烷基」或「氟化伸烷基」係指烷基或伸烷基之氫原子之一部分或全部經氟原子取代而得到之基。 「結構單元」係指構成高分子化合物(樹脂、聚合物、共聚物)之單體單元(monomer unit)。 記載為「可以具有取代基」或「可具有取代基」之情形時,包括氫原子(-H)經1價基取代之情形、及亞甲基(-CH 2-)經2價基取代之情形此兩者。 「曝光」為包括放射線之照射全體之概念。 In this specification and the patent scope of the present invention, "aliphatic" refers to the relative concept to aromatic, and its definition refers to radicals, compounds, etc. that do not have aromatic properties. The "alkyl group" includes linear, branched, and cyclic monovalent saturated hydrocarbon groups unless otherwise specified. The same is true for the alkyl group in the alkoxy group. The "alkylene group" includes linear, branched, and cyclic divalent saturated hydrocarbon groups unless otherwise specified. A "halogenated alkyl group" is a group obtained by substituting part or all of the hydrogen atoms of an alkyl group with a halogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. "Fluorinated alkyl group" or "fluorinated alkylene group" refers to a group in which some or all of the hydrogen atoms of an alkyl group or alkylene group are substituted with fluorine atoms. "Structural unit" refers to the monomer unit that constitutes a polymer compound (resin, polymer, copolymer). When it is described as "may have a substituent" or "may have a substituent", it includes the case where a hydrogen atom (-H) is substituted with a monovalent group, and the case where a methylene group (-CH 2 -) is substituted by a divalent group The situation is both. "Exposure" is a concept that includes the entire irradiation of radiation.
「由羥基苯乙烯衍生之結構單元」係指羥基苯乙烯之乙烯性雙鍵斷鍵而構成之結構單元。「由羥基苯乙烯衍生物衍生之結構單元」係指羥基苯乙烯衍生物之乙烯性雙鍵斷鍵而構成之結構單元。 「羥基苯乙烯衍生物」係指包括羥基苯乙烯之α位氫原子經烷基、鹵化烷基等其他取代基取代而成之化合物、以及其等之衍生物之概念。作為其等之衍生物,可例舉:α位氫原子可經取代基取代之羥基苯乙烯的羥基之氫原子被有機基取代之化合物;於α位氫原子可經取代基取代之羥基苯乙烯的苯環鍵結有除羥基以外之取代基之化合物;等等。再者,只要沒有特別說明,則α位(α位碳原子)係指苯環所鍵結之碳原子。 作為取代羥基苯乙烯之α位氫原子之取代基,可例舉與上述α取代丙烯酸酯中作為α位取代基而例舉者同樣之取代基。 "Structural unit derived from hydroxystyrene" refers to the structural unit formed by breaking the ethylenic double bond of hydroxystyrene. "Structural unit derived from hydroxystyrene derivative" refers to the structural unit formed by breaking the ethylenic double bond of hydroxystyrene derivative. "Hydroxystyrene derivatives" refers to the concept of compounds in which the hydrogen atom at the α-position of hydroxystyrene is substituted with other substituents such as alkyl groups, halogenated alkyl groups, etc., and derivatives thereof. Examples of derivatives thereof include: hydroxystyrene in which the hydrogen atom at the α-position may be substituted with a substituent, and a compound in which the hydrogen atom of the hydroxyl group is substituted by an organic group; hydroxystyrene in which the hydrogen atom at the α-position may be substituted with a substituent. Compounds whose benzene ring is bonded with substituents other than hydroxyl groups; etc. Furthermore, unless otherwise specified, the α-position (α-position carbon atom) refers to the carbon atom to which the benzene ring is bonded. Examples of the substituent for the α-position hydrogen atom of substituted hydroxystyrene include the same substituents as those exemplified as the α-position substituent in the above-mentioned α-substituted acrylate.
作為上述α位取代基之烷基較佳為直鏈狀或支鏈狀之烷基,具體而言,可例舉碳原子數1~5之烷基(甲基、乙基、丙基、異丙基、正丁基、異丁基、第三丁基、戊基、異戊基、新戊基)等。 又,作為α位取代基之鹵化烷基具體而言可例舉藉由鹵素原子取代上述「作為α位取代基之烷基」之氫原子之一部分或全部而得到之基。作為該鹵素原子,可例舉氟原子、氯原子、溴原子、碘原子等,特別是氟原子較佳。 又,作為α位取代基之羥基烷基具體而言可例舉藉由羥基取代上述「作為α位取代基之烷基」之氫原子之一部分或全部而得到之基。該羥基烷基中之羥基數較佳為1~5,最佳為1。 The alkyl group as the α-position substituent is preferably a linear or branched alkyl group, and specifically, an alkyl group having 1 to 5 carbon atoms (methyl, ethyl, propyl, iso Propyl, n-butyl, isobutyl, tert-butyl, pentyl, isopentyl, neopentyl), etc. Specific examples of the halogenated alkyl group as the α-position substituent include a group obtained by substituting a halogen atom for part or all of the hydrogen atoms of the above-mentioned “alkyl group as the α-position substituent”. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like, and a fluorine atom is particularly preferred. Specific examples of the hydroxyalkyl group as the α-position substituent include a group obtained by substituting a hydroxyl group for part or all of the hydrogen atoms of the above-mentioned “alkyl group as the α-position substituent”. The number of hydroxyl groups in the hydroxyalkyl group is preferably 1 to 5, and is most preferably 1.
本說明書及本發明申請專利範圍中,根據化學式所示之結構而存在不對稱碳,有時可存在對映異構物(enantiomer)、非對映異構物(diastereomer),於此情形時,藉由一個式子代表性地表示該等異構物。該等異構物可單獨使用,亦可以混合物之形式使用。In this specification and the patent scope of the present invention, asymmetric carbon exists according to the structure shown in the chemical formula, and sometimes enantiomers and diastereomers may exist. In this case, These isomers are represented representatively by a formula. These isomers can be used individually or in the form of mixtures.
(接著劑組合物) 本發明之第1形態之接著劑組合物可用於形成將半導體基板或電子裝置、與能使光透過之支持體暫時接著之接著層。本形態之接著劑組合物含有包含聚合性碳-碳不飽和鍵之聚胺酯樹脂(P1)、及聚合起始劑(A)。上述聚胺酯樹脂(P1)具有包含能吸收波長300~800 nm之範圍內之至少一部分光之結構的結構單元(u1)。 (Adhesive composition) The adhesive composition of the first aspect of the present invention can be used to form an adhesive layer that temporarily connects a semiconductor substrate or electronic device and a support that can transmit light. The adhesive composition of this form contains a polyurethane resin (P1) containing a polymerizable carbon-carbon unsaturated bond, and a polymerization initiator (A). The above-mentioned polyurethane resin (P1) has a structural unit (u1) including a structure capable of absorbing at least part of light in the range of 300 to 800 nm wavelength.
<暫時接著之對象> 本實施方式之接著劑組合物可用於形成將半導體基板或電子裝置、與支持體暫時接著之接著層。本說明書中,「暫時接著」係指接著對象被暫時(例如,於任意之作業步驟期間)接著。更具體而言,為了進行裝置之薄化、半導體基板之搬運、向半導體基板之安裝等,半導體基板或電子裝置暫時與支持體接著而固定(暫時接著)於支持體上,於該製程結束後,自支持體分離。 <Object to be temporarily connected> The adhesive composition of this embodiment can be used to form an adhesive layer that temporarily connects a semiconductor substrate or electronic device to a support. In this specification, "temporarily connected" means that the connected object is temporarily connected (for example, during any operation step). More specifically, in order to thin the device, transport the semiconductor substrate, mount the semiconductor substrate, etc., the semiconductor substrate or electronic device is temporarily adhered to the support and fixed (temporarily adhered) to the support. After the process is completed, , self-supporting body separation.
≪半導體基板≫ 應用本實施方式之接著劑組合物之半導體基板沒有特別限定,可為通常作為半導體基板而使用者。半導體基板(裸晶片)以被支持體支持之狀態供至薄化、安裝等製程。半導體基板亦可安裝有例如積體電路、金屬凸塊等構造物。 作為半導體基板,典型而言,可例舉矽晶片基板,但並不限定於此,亦可為陶瓷基板、薄膜基板、柔性基板等。 ≪Semiconductor substrate≫ The semiconductor substrate to which the adhesive composition of the present embodiment is applied is not particularly limited, and it may be one generally used as a semiconductor substrate. The semiconductor substrate (bare chip) is supplied to processes such as thinning and mounting while being supported by the support body. The semiconductor substrate may also be mounted with structures such as integrated circuits and metal bumps. As a semiconductor substrate, a silicon wafer substrate is typically exemplified, but it is not limited thereto. A ceramic substrate, a film substrate, a flexible substrate, etc. may also be used.
≪電子裝置≫ 本說明書中,「電子裝置」係指構成電子零件之至少一部分之構件。電子裝置沒有特別限制,可為於半導體基板之表面形成有各種機械結構或電路者。電子裝置可較佳為包含金屬或半導體之構件與將上述構件密封或絕緣之樹脂的複合體。電子裝置可為後述之再佈線層、以及/或者半導體元件或其他元件被密封材料或絕緣材料密封或絕緣而成者,可具有單層或複數層之結構。 ≪Electronic Devices≫ In this specification, "electronic device" refers to a component that constitutes at least a part of an electronic component. The electronic device is not particularly limited and may be one with various mechanical structures or circuits formed on the surface of the semiconductor substrate. The electronic device may preferably be a composite including a metal or semiconductor component and a resin that seals or insulates the component. The electronic device may be a rewiring layer described later and/or a semiconductor element or other element sealed or insulated by a sealing material or an insulating material, and may have a single-layer or multiple-layer structure.
≪支持體≫ 支持體為對半導體基板或電子裝置進行支持之構件。如後文所述,支持體包含具有能使光透過之特性、對半導體基板進行支持之構件。 ≪Support≫ The support is a member that supports a semiconductor substrate or an electronic device. As will be described later, the support includes a member that has the property of transmitting light and supports the semiconductor substrate.
<包含聚合性碳-碳不飽和鍵之聚胺酯樹脂:(P1)成分> 本實施方式之接著劑組合物含有包含聚合性碳-碳不飽和鍵之聚胺酯樹脂(以下,亦稱為「(P1)成分」)。(P1)成分可藉由聚合性碳-碳不飽和鍵聚合、硬化,形成接著層。由此,能夠將半導體基板或電子裝置、與支持體暫時接著。進而,(P1)成分中之胺基甲酸酯鍵具有可被酸或鹼分解之性質。因此,上述接著層可藉由包含酸或鹼之處理液而容易地去除。 (P1)成分進而具有包含能吸收波長300~800 nm之範圍內之至少一部分光之結構的結構單元(u1)。由此,藉由將波長300~800 nm之範圍之光照射至接著層,結構單元(u1)吸收光而發熱。由此,能夠使接著層改質。 <Polyurethane resin containing polymerizable carbon-carbon unsaturated bonds: (P1) component> The adhesive composition of this embodiment contains a polyurethane resin containing a polymerizable carbon-carbon unsaturated bond (hereinafter, also referred to as "(P1) component"). The component (P1) can be polymerized and hardened through polymerizable carbon-carbon unsaturated bonds to form an adhesive layer. Thereby, the semiconductor substrate or electronic device and the support can be temporarily connected. Furthermore, the urethane bond in component (P1) has a property of being decomposable by acid or alkali. Therefore, the above-mentioned adhesive layer can be easily removed by a treatment liquid containing acid or alkali. The component (P1) further has a structural unit (u1) including a structure capable of absorbing at least part of the light in the wavelength range of 300 to 800 nm. Thereby, by irradiating the adhesive layer with light having a wavelength in the range of 300 to 800 nm, the structural unit (u1) absorbs the light and generates heat. Thereby, the adhesive layer can be modified.
(P1)成分所包含之聚合性碳-碳不飽和鍵沒有特別限定,但較佳為自由基聚合性者。聚合性碳-碳不飽和鍵可為聚合性碳-碳雙鍵,亦可為聚合性碳-碳三鍵,但較佳為聚合性碳-碳雙鍵。作為聚合性碳-碳不飽和鍵,例如可例舉甲基丙烯醯基、及丙烯醯基。(P1)成分所包含之聚合性碳-碳不飽和鍵可為1種,亦可為2種以上。 (P1)成分所包含之聚合性碳-碳不飽和鍵之當量較佳為200~2000 g/eq.,更佳為300~1500 g/eq.,進而較佳為400~1200 g/eq.,特佳為500~1000 g/eq.。若聚合性碳-碳不飽和鍵當量為上述較佳範圍之下限值以上,則接著層之彈性模數、耐熱性等進一步提高。若聚合性碳-碳不飽和鍵當量為上述較佳範圍之上限值以下,則接著層不會過度變硬,洗淨性變良好。上述當量數係以每1當量聚合性碳-碳不飽和鍵計之聚胺酯樹脂之分子量。 The polymerizable carbon-carbon unsaturated bond contained in the component (P1) is not particularly limited, but it is preferably a radically polymerizable bond. The polymerizable carbon-carbon unsaturated bond may be a polymerizable carbon-carbon double bond or a polymerizable carbon-carbon triple bond, but is preferably a polymerizable carbon-carbon double bond. Examples of the polymerizable carbon-carbon unsaturated bond include a methacryloyl group and an acryloyl group. The number of polymerizable carbon-carbon unsaturated bonds contained in the component (P1) may be one type or two or more types. The equivalent of the polymerizable carbon-carbon unsaturated bond contained in the component (P1) is preferably 200 to 2000 g/eq., more preferably 300 to 1500 g/eq., and still more preferably 400 to 1200 g/eq. , the best value is 500~1000 g/eq. If the polymerizable carbon-carbon unsaturated bond equivalent is more than the lower limit of the above-mentioned preferred range, the elastic modulus, heat resistance, etc. of the adhesive layer will be further improved. When the polymerizable carbon-carbon unsaturated bond equivalent is equal to or less than the upper limit of the above-mentioned preferred range, the adhesive layer will not become excessively hard and the cleanability will be good. The above-mentioned equivalent number is the molecular weight of the polyurethane resin calculated per 1 equivalent of polymerizable carbon-carbon unsaturated bonds.
(P1)成分之重量平均分子量(Mw)較佳為5,000~100,000,更佳為1,000~50,000,進而較佳為12,000~30,000,特佳為13,000~25,000。The weight average molecular weight (Mw) of the component (P1) is preferably 5,000 to 100,000, more preferably 1,000 to 50,000, further preferably 12,000 to 30,000, particularly preferably 13,000 to 25,000.
(P1)成分可藉由多異氰酸酯化合物(以下,亦稱為「(I)成分」)、多元醇(以下,亦稱為「(O)成分」)、與能衍生結構單元(u1)之化合物(以下,亦稱為「(U1)成分」)之聚合加成反應而合成。較佳為(I)成分及(O)成分中之至少一種包含聚合性碳-碳不飽和鍵。The component (P1) can be composed of a polyisocyanate compound (hereinafter, also referred to as "(I) component"), a polyol (hereinafter, also referred to as "(O) component"), and a compound from which the structural unit (u1) can be derived (Hereinafter, also referred to as "(U1) component") is synthesized by a polymerization addition reaction. It is preferable that at least one of the component (I) and the component (O) contains a polymerizable carbon-carbon unsaturated bond.
≪多異氰酸酯化合物:(I)成分≫ 本說明書中,「多異氰酸酯化合物」係指具有2個以上之異氰酸基(-N=C=O)之化合物(多異氰酸酯)或具有2個以上之被封端之異氰酸基之化合物(封端多異氰酸酯)。作為多異氰酸酯,沒有特別限定,可無特別限制地使用於聚胺酯樹脂之製造中通常使用之多異氰酸酯。 封端多異氰酸酯係多異氰酸酯之異氰酸基藉由與封端劑之反應而被封端、從而失活之化合物。用作(I)成分之封端多異氰酸酯較佳為利用熱解離性封端劑將異氰酸基封端而所得者。作為熱解離性封端劑,例如,可例舉肟類、二酮類、酚類、己內醯胺類等封端劑。至於利用熱解離性封端劑得到之封端多異氰酸酯,於常溫下,異氰酸基為非活性,藉由加熱,熱解離性封端劑發生解離而再生異氰酸基。 ≪Polyisocyanate compound: (I) Component≫ In this specification, "polyisocyanate compound" refers to a compound (polyisocyanate) with two or more isocyanate groups (-N=C=O) or a compound with two or more blocked isocyanate groups. (Capped polyisocyanate). The polyisocyanate is not particularly limited, and polyisocyanates commonly used in the production of polyurethane resins can be used without particular limitations. Blocked polyisocyanate is a compound in which the isocyanate group of the polyisocyanate is blocked by reaction with a blocking agent and thereby deactivated. The blocked polyisocyanate used as component (I) is preferably one obtained by blocking isocyanate groups with a thermally dissociable blocking agent. Examples of thermally dissociable blocking agents include blocking agents such as oximes, diketones, phenols, and caprolactams. As for the blocked polyisocyanate obtained by using a thermally dissociable blocking agent, the isocyanate group is inactive at normal temperature. By heating, the thermally dissociable blocking agent is dissociated and the isocyanate group is regenerated.
作為多異氰酸酯之具體例,例如,可例舉:六亞甲基二異氰酸酯、三甲基六亞甲基二異氰酸酯、離胺酸二異氰酸酯等脂肪族二異氰酸酯;二環己基甲烷二異氰酸酯、異佛爾酮二異氰酸酯、1,4-環己烷二異氰酸酯、氫化苯二甲基二異氰酸酯、氫化甲苯二異氰酸酯、二環己基甲烷-4,4'-二異氰酸酯等脂環式二異氰酸酯;及甲苯二異氰酸酯、4,4'-二苯基甲烷二異氰酸酯、2,4'-二苯基甲烷二異氰酸酯、萘二異氰酸酯、苯二甲基二異氰酸酯、聯甲苯胺二異氰酸酯、對苯二異氰酸酯、萘二異氰酸酯等芳香族二異氰酸酯;以及,其等之縮二脲體、異氰尿酸酯體、三羥甲基丙烷之加成物等。多異氰酸酯可單獨使用1種,亦可併用2種以上。Specific examples of the polyisocyanate include, for example, aliphatic diisocyanates such as hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, and lysine diisocyanate; dicyclohexylmethane diisocyanate, isophorone Alicyclic diisocyanates such as ketone diisocyanate, 1,4-cyclohexane diisocyanate, hydrogenated xylylene diisocyanate, hydrogenated toluene diisocyanate, dicyclohexylmethane-4,4'-diisocyanate; and toluene diisocyanate Isocyanate, 4,4'-diphenylmethane diisocyanate, 2,4'-diphenylmethane diisocyanate, naphthalene diisocyanate, xylylene diisocyanate, benzidine diisocyanate, terephthalene diisocyanate, naphthalene diisocyanate Isocyanates and other aromatic diisocyanates; and their biuret forms, isocyanurate forms, trimethylolpropane adducts, etc. One type of polyisocyanate may be used alone, or two or more types may be used in combination.
多異氰酸酯可使用市售品。作為市售之多異氰酸酯,例如,可例舉Duranate(註冊商標)24A-100、Duranate 22A-75P、Duranate TPA-100、Duranate TKA-100、Duranate P301-75E、Duranate 21S-75E、Duranate MFA-75B、Duranate MHG-80B、Duranate TUL-100、Duranate TLA-100、Duranate TSA-100、Duranate TSS-100、Duranate TSE100、Duranate E402-80B、Duranate E405-70B、Duranate AS700-100、Duranate D101、Duranate D201、及Duranate A201H(以上為商品名,旭化成化學公司製)等。該等製品可單獨使用1種,亦可併用2種以上。Commercially available polyisocyanates can be used. Examples of commercially available polyisocyanates include Duranate (registered trademark) 24A-100, Duranate 22A-75P, Duranate TPA-100, Duranate TKA-100, Duranate P301-75E, Duranate 21S-75E, and Duranate MFA-75B. , Duranate MHG-80B, Duranate TUL-100, Duranate TLA-100, Duranate TSA-100, Duranate TSS-100, Duranate TSE100, Duranate E402-80B, Duranate E405-70B, Duranate AS700-100, Duranate D101, Duranate D201, and Duranate A201H (the above are trade names, manufactured by Asahi Kasei Chemical Co., Ltd.), etc. One type of these products may be used alone, or two or more types may be used in combination.
作為封端異氰酸酯,可例舉如上所述之多異氰酸酯之異氰酸基藉由與封端劑之反應而被保護之化合物。作為封端劑,只要是熱解離性之封端劑、即加成於異氰酸基且於常溫下穩定但加熱至解離溫度以上時游離而生成異氰酸基之化合物即可,沒有特別限定,可無特別限制地使用公知者。 作為封端劑之具體例,例如,可例舉:γ-丁內醯胺、ε-己內醯胺、γ-戊內醯胺、丙內醯胺等內醯胺化合物;甲基乙基酮肟、甲基異戊基酮肟、甲基異丁基酮肟、甲醯胺肟、乙醯胺肟、丙酮肟、二乙醯單肟、二苯甲酮肟、環己酮肟等肟化合物;苯酚、甲酚、鄰苯二酚、硝基苯酚等單環酚化合物;1-萘酚等多環酚化合物;甲醇、乙醇、異丙醇、第三丁醇、三羥甲基丙烷、2-乙基己基醇等醇化合物;乙二醇單甲醚、乙二醇單乙醚、乙二醇單丁醚等醚化合物;丙二酸烷基酯、丙二酸二烷基酯、乙醯乙酸烷基酯、乙醯丙酮等活性亞甲基化合物;等等。封端劑可單獨使用1種,亦可併用2種以上。 Examples of the blocked isocyanate include compounds in which the isocyanate group of the above-mentioned polyisocyanate is protected by reaction with a blocking agent. The blocking agent is not particularly limited as long as it is a thermally dissociable blocking agent, that is, a compound that is added to an isocyanate group and is stable at room temperature but is released when heated above the dissociation temperature to generate an isocyanate group. , known ones can be used without particular restrictions. Specific examples of the end-capping agent include, for example, lactam compounds such as γ-butyrolactamine, ε-caprolactam, γ-valerolactam, and propiolactam; methyl ethyl ketone Oxime compounds such as methyl isopentyl ketone oxime, methyl isobutyl ketone oxime, formamide oxime, acetamide oxime, acetone oxime, diethyl monooxime, benzophenone oxime, cyclohexanone oxime, etc. ; Monocyclic phenolic compounds such as phenol, cresol, catechol, and nitrophenol; Polycyclic phenolic compounds such as 1-naphthol; Methanol, ethanol, isopropyl alcohol, tert-butanol, trimethylolpropane, 2 -Alcohol compounds such as ethylhexyl alcohol; ether compounds such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, and ethylene glycol monobutyl ether; alkyl malonate, dialkyl malonate, and acetic acid Active methylene compounds such as alkyl esters and acetyl acetone; etc. One type of end-capping agent may be used alone, or two or more types may be used in combination.
封端多異氰酸酯可藉由使多異氰酸酯與封端劑反應而製造。多異氰酸酯與封端劑之反應例如於不具有活性氫之溶劑(1,4-二㗁烷、乙酸溶纖劑等)中,於50~100℃左右之加熱下,以及於視需要於封端化觸媒之存在下進行。多異氰酸酯與封端劑之使用比率沒有特別限制,以多異氰酸酯中之異氰酸基與封端劑之當量比計,較佳為0.95:1.0~1.1:1.0,進而較佳為1:1.05~1.15。作為封端化觸媒,可使用公知者,例如,可例舉:甲醇鈉、乙醇鈉、苯酚鈉、甲醇鉀等金屬醇鹽;四甲基銨、四乙基銨、四丁基銨等四烷基銨之氫氧化物;其等之乙酸鹽、辛酸鹽、肉豆蔻酸鹽、苯甲酸鹽等有機弱酸鹽;以及乙酸、己酸、辛酸、肉豆蔻酸等烷基羧酸之鹼金屬鹽;等等。封端化觸媒可單獨使用1種,亦可併用2種以上。Blocked polyisocyanates can be produced by reacting polyisocyanates with blocking agents. The reaction between the polyisocyanate and the blocking agent is, for example, in a solvent without active hydrogen (1,4-dioxane, cellosolve acetate, etc.), under heating at about 50 to 100°C, and in the blocking process if necessary. Carry out in the presence of chemical catalyst. The usage ratio of polyisocyanate and blocking agent is not particularly limited. Based on the equivalent ratio of isocyanate groups in polyisocyanate to blocking agent, it is preferably 0.95:1.0~1.1:1.0, and more preferably 1:1.05~ 1.15. As the blocking catalyst, well-known ones can be used, for example, metal alkoxides such as sodium methoxide, sodium ethoxide, sodium phenolate, and potassium methoxide; tetramethylammonium, tetraethylammonium, tetrabutylammonium, etc. Alkyl ammonium hydroxides; their organic weak acid salts such as acetate, octanoate, myristate, benzoate, etc.; and alkyl carboxylic acid bases such as acetic acid, caproic acid, caprylic acid, myristic acid, etc. Metal salts; etc. One type of blocking catalyst may be used alone, or two or more types may be used in combination.
封端多異氰酸酯可使用市售品。作為市售之封端多異氰酸酯,例如,可例舉Duranate MF-K60B、Duranate SBB-70P、Duranate SBN-70D、Duranate MF-B60B、Duranate 17B-60P、Duranate TPA-B80E、及Duranate E402-B80B(以上為商品名,旭化成股份有限公司製)等。Commercially available blocked polyisocyanates can be used. Examples of commercially available blocked polyisocyanates include Duranate MF-K60B, Duranate SBB-70P, Duranate SBN-70D, Duranate MF-B60B, Duranate 17B-60P, Duranate TPA-B80E, and Duranate E402-B80B ( The above are trade names, manufactured by Asahi Kasei Co., Ltd.), etc.
作為(I)成分,較佳為藉由熱解離性封端劑將異氰酸基封端而得到之封端多異氰酸酯。 (I)成分可單獨使用1種,亦可併用2種以上。例如,(I)成分可使用脂肪族二異氰酸酯與芳香族二異氰酸酯之混合物。作為上述脂肪族二異氰酸酯,較佳為氫化二甲苯二異氰酸酯。作為上述芳香族二異氰酸酯,較佳為4,4-二苯基甲烷二異氰酸酯。 As the component (I), a blocked polyisocyanate obtained by blocking an isocyanate group with a thermally dissociable blocking agent is preferred. (I) Component may be used individually by 1 type, and may be used in combination of 2 or more types. For example, a mixture of aliphatic diisocyanate and aromatic diisocyanate can be used as component (I). As the aliphatic diisocyanate, hydrogenated xylene diisocyanate is preferred. As the aromatic diisocyanate, 4,4-diphenylmethane diisocyanate is preferred.
≪多元醇:(O)成分≫ 多元醇((O)成分)為具有2個以上之羥基(-OH)之化合物。作為多元醇,沒有特別限定,可無特別限制地使用於聚胺酯樹脂之製造中通常使用之多元醇。作為(O)成分,例如,可例舉包含聚合性碳-碳不飽和鍵之多元醇(以下,亦稱為「(O1)成分」)、及其他多元醇(以下,亦稱為「(O2)成分」)。 ≪Polyol: (O) component≫ Polyol ((O) component) is a compound having two or more hydroxyl groups (-OH). The polyol is not particularly limited, and polyols commonly used in the production of polyurethane resins can be used without particular limitations. Examples of the (O) component include polyols containing polymerizable carbon-carbon unsaturated bonds (hereinafter also referred to as "(O1) component") and other polyols (hereinafter also referred to as "(O2) )Element").
・包含聚合性碳-碳不飽和鍵之多元醇((O1)成分) 作為(O1)成分,可例舉包含選自由甲基丙烯醯基及丙烯醯基所組成之群中之至少1種之多元醇。(O1)成分所具有之聚合性碳-碳不飽和鍵可為1個,亦可為2個以上。 ・Polyol containing polymerizable carbon-carbon unsaturated bonds ((O1) component) Examples of the component (O1) include a polyol containing at least one selected from the group consisting of a methacryloyl group and an acrylyl group. The component (O1) may have one polymerizable carbon-carbon unsaturated bond or two or more.
作為(O1)成分,例如,可例舉3元以上之多元醇與甲基丙烯酸、丙烯酸或其等之衍生物形成之酯等。作為上述3元以上之多元醇,較佳為3元以上之低分子多元醇。作為上述3元以上之低分子多元醇,可例舉:甘油、三羥甲基丙烷等3元醇;四羥甲基甲烷(季戊四醇)、雙甘油等4元醇;木糖醇等5元醇;山梨糖醇、甘露糖醇、阿洛醇、艾杜糖醇、半乳糖醇、阿卓糖醇、肌醇、二季戊四醇等6元醇;洋梨醇等7元醇;以及蔗糖等8元醇;等等。Examples of the component (O1) include esters of trivalent or higher polyhydric alcohols and methacrylic acid, acrylic acid, or derivatives thereof. As the above-mentioned trivalent or higher polyol, a trivalent or higher low molecular weight polyol is preferred. Examples of the above-mentioned trivalent or higher low molecular weight polyols include trivalent alcohols such as glycerin and trimethylolpropane; tetrahydric alcohols such as tetramethylolmethane (pentaerythritol) and diglycerol; and pentavalent alcohols such as xylitol. ; 6-valent alcohols such as sorbitol, mannitol, allol, idbitol, galactitol, aldrose, inositol, and dipentaerythritol; 7-valent alcohols such as cyanodol; and 8-valent alcohols such as sucrose ;etc.
作為(O1)成分之具體例,可例舉甘油單(甲基)丙烯酸酯、雙甘油三(甲基)丙烯酸酯、季戊四醇單(甲基)丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、雙甘油二(甲基)丙烯酸酯、二季戊四醇二(甲基)丙烯酸酯、二季戊四醇三(甲基)丙烯酸酯、二季戊四醇四(甲基)丙烯酸酯、山梨糖醇單(甲基)丙烯酸酯、山梨糖醇二(甲基)丙烯酸酯、山梨糖醇三(甲基)丙烯酸酯、山梨糖醇四(甲基)丙烯酸酯等。 「(甲基)丙烯酸酯」為包括甲基丙烯酸酯及丙烯酸酯之概念,係指甲基丙烯酸酯或丙烯酸酯。 Specific examples of the component (O1) include glycerol mono(meth)acrylate, diglycerol tri(meth)acrylate, pentaerythritol mono(meth)acrylate, pentaerythritol di(meth)acrylate, and bis(meth)acrylate. Glyceryl di(meth)acrylate, dipentaerythritol di(meth)acrylate, dipentaerythritol tri(meth)acrylate, dipentaerythritol tetra(meth)acrylate, sorbitol mono(meth)acrylate, Sorbitol di(meth)acrylate, sorbitol tri(meth)acrylate, sorbitol tetra(meth)acrylate, etc. "(Meth)acrylate" is a concept that includes methacrylate and acrylate, and refers to methacrylate or acrylate.
(O1)成分可單獨使用1種,亦可併用2種以上。 其中,作為(O1)成分,較佳為包含甲基丙烯醯基或丙烯醯基之二醇,更佳為甘油單(甲基)丙烯酸酯、或季戊四醇二(甲基)丙烯酸酯。 (O1) Component may be used individually by 1 type, or may be used in combination of 2 or more types. Among them, the (O1) component is preferably a glycol containing a methacryloyl group or an acrylyl group, and more preferably is glycerol mono(meth)acrylate or pentaerythritol di(meth)acrylate.
・其他多元醇((O2)成分) (O2)成分為除上述(O1)成分以外之多元醇。(O2)成分沒有特別限定,可為脂肪族多元醇,亦可為芳香族多元醇。(O2)成分可為低分子多元醇(例如,分子量未達500),亦可為高分子多元醇(例如,分子量為500以上)。 ・Other polyols ((O2) component) The (O2) component is a polyol other than the above-mentioned (O1) component. The (O2) component is not particularly limited and may be an aliphatic polyol or an aromatic polyol. The (O2) component may be a low-molecular polyol (for example, a molecular weight of less than 500) or a high-molecular polyol (for example, a molecular weight of 500 or more).
作為低分子多元醇,例如,可例舉:乙二醇、丙二醇、1,3-丙二醇、1,4-丁二醇、1,3-丁二醇、1,2-丁二醇、1,5-戊二醇、1,6-己二醇、新戊二醇、碳原子數7~22之烷二醇、二乙二醇、三乙二醇、二丙二醇、3-甲基-1,5-戊二醇、2-乙基-2-丁基-1,3-丙二醇、碳原子數17~20之烷烴-1,2-二醇、1,3-環己烷二甲醇、1,4-環己烷二甲醇、1,4-環己二醇、氫化雙酚A、1,4-二羥基-2-丁烯、2,6-二甲基-1-辛烯-3,8-二醇、雙酚A等2元醇;甘油、三羥甲基丙烷等3元醇;四羥甲基甲烷(季戊四醇)、雙甘油等4元醇;木糖醇等5元醇;山梨糖醇、甘露糖醇、阿洛醇、艾杜糖醇、半乳糖醇、阿卓糖醇、肌醇、二季戊四醇等6元醇;洋梨醇等7元醇;以及蔗糖等8元醇;等等。 其中,低分子多元醇較佳為2元醇(二醇)。 Examples of low molecular weight polyols include: ethylene glycol, propylene glycol, 1,3-propanediol, 1,4-butanediol, 1,3-butanediol, 1,2-butanediol, 1, 5-pentanediol, 1,6-hexanediol, neopentyl glycol, alkanediol with 7 to 22 carbon atoms, diethylene glycol, triethylene glycol, dipropylene glycol, 3-methyl-1, 5-pentanediol, 2-ethyl-2-butyl-1,3-propanediol, alkane-1,2-diol with 17 to 20 carbon atoms, 1,3-cyclohexanedimethanol, 1, 4-Cyclohexane dimethanol, 1,4-cyclohexanediol, hydrogenated bisphenol A, 1,4-dihydroxy-2-butene, 2,6-dimethyl-1-octene-3,8 - Dihydric alcohols such as glycols and bisphenol A; trihydric alcohols such as glycerin and trimethylolpropane; tetrahydric alcohols such as tetramethylolmethane (pentaerythritol) and diglycerol; pentahydric alcohols such as xylitol; sorbose alcohol, mannitol, allol, idbitol, galactitol, aldrose, inositol, dipentaerythritol and other 6-valent alcohols; 7-valent alcohols such as cyanositol; and 8-valent alcohols such as sucrose; etc. . Among them, the low molecular weight polyol is preferably a dihydric alcohol (diol).
作為高分子多元醇,例如,可例舉酚樹脂、包含羥基苯乙烯骨架之樹脂、聚酯多元醇、聚醚多元醇、聚醚酯多元醇、聚酯醯胺多元醇、丙烯酸多元醇、聚碳酸酯多元醇、多羥基烷烴、聚胺酯多元醇、及植物油系多元醇等。高分子多元醇之數量平均分子量較佳為500~100,000。Examples of polymer polyols include phenol resins, resins containing a hydroxystyrene skeleton, polyester polyols, polyether polyols, polyetherester polyols, polyesteramide polyols, acrylic polyols, and polyols. Carbonate polyols, polyhydroxyalkanes, polyurethane polyols, and vegetable oil polyols, etc. The number average molecular weight of the polymer polyol is preferably 500 to 100,000.
使用低分子多元醇作為(O2)成分之情形時,低分子多元醇相對於(O1)成分之比率(低分子多元醇/(O1)成分(質量比))較佳為0.01~0.1,更佳為0.03~0.08。When a low molecular polyol is used as the (O2) component, the ratio of the low molecular polyol to the (O1) component (low molecular polyol/(O1) component (mass ratio)) is preferably 0.01 to 0.1, more preferably It is 0.03~0.08.
[酚樹脂] 酚樹脂可為酚醛清漆型酚樹脂,亦可為可溶酚醛型酚樹脂。酚醛清漆型酚樹脂可藉由使具有酚性羥基之芳香族化合物(以下,稱為「酚類」)與醛類於酸觸媒下進行加成縮合而得到。可溶酚醛型酚樹脂可藉由使酚類與醛類於鹼觸媒下進行加成縮合而得到。 [Phenolic resin] The phenol resin may be a novolac type phenol resin or a soluble phenolic type phenol resin. Novolac-type phenol resin can be obtained by addition-condensation of an aromatic compound having a phenolic hydroxyl group (hereinafter referred to as "phenols") and aldehydes in the presence of an acid catalyst. Soluble phenol-formaldehyde phenol resin can be obtained by the addition and condensation of phenols and aldehydes under an alkali catalyst.
作為上述酚類,例如,可例舉:苯酚;間甲酚、對甲酚、鄰甲酚等甲酚類;2,3-二甲苯酚、2,5-二甲苯酚、3,5-二甲苯酚、3,4-二甲苯酚等二甲苯酚類;間乙基苯酚、對乙基苯酚、鄰乙基苯酚、2,3,5-三甲基苯酚、2,3,5-三乙基苯酚、4-第三丁基苯酚、3-第三丁基苯酚、2-第三丁基苯酚、2-第三丁基-4-甲基苯酚、2-第三丁基-5-甲基苯酚等烷基酚類;對甲氧基苯酚、間甲氧基苯酚、對乙氧基苯酚、間乙氧基苯酚、對丙氧基苯酚、間丙氧基苯酚等烷氧基酚類;鄰異丙烯基苯酚、對異丙烯基苯酚、2-甲基-4-異丙烯基苯酚、2-乙基-4-異丙烯基苯酚等異丙烯基酚類;苯基苯酚等芳基酚類;4,4'-二羥基聯苯、雙酚A、間苯二酚、對苯二酚、鄰苯三酚、9,9-雙(4-羥基-3,5-二甲基苯基)茀、9,9-雙(4-羥基-3-甲基苯基)茀、1,1-雙(4-羥基-3-甲基苯基)環己烷等多羥基酚類等。Examples of the phenols include phenol; cresols such as m-cresol, p-cresol, and o-cresol; 2,3-xylenol, 2,5-xylenol, and 3,5-dimethylphenol. Xylenols such as cresol and 3,4-xylenol; m-ethylphenol, p-ethylphenol, o-ethylphenol, 2,3,5-trimethylphenol, 2,3,5-triethylphenol phenol, 4-tert-butylphenol, 3-tert-butylphenol, 2-tert-butylphenol, 2-tert-butyl-4-methylphenol, 2-tert-butyl-5-methyl alkylphenols such as phenol; alkoxyphenols such as p-methoxyphenol, m-methoxyphenol, p-ethoxyphenol, m-ethoxyphenol, p-propoxyphenol, m-propoxyphenol; Isopropenylphenols such as o-isopropenylphenol, p-isopropenylphenol, 2-methyl-4-isopropenylphenol, 2-ethyl-4-isopropenylphenol; arylphenols such as phenylphenol ; 4,4'-dihydroxybiphenyl, bisphenol A, resorcinol, hydroquinone, pyrogallol, 9,9-bis(4-hydroxy-3,5-dimethylphenyl) Polyhydroxyphenols such as fentanyl, 9,9-bis(4-hydroxy-3-methylphenyl) fentanyl, 1,1-bis(4-hydroxy-3-methylphenyl)cyclohexane, etc.
作為上述醛類,例如,可例舉甲醛、多聚甲醛、三聚甲醛、糠醛、苯甲醛、對苯二甲醛、苯乙醛、α-苯丙醛、β-苯丙醛、鄰羥基苯甲醛、間羥基苯甲醛、對羥基苯甲醛、鄰甲基苯甲醛、間甲基苯甲醛、對甲基苯甲醛、鄰氯苯甲醛、間氯苯甲醛、對氯苯甲醛、肉桂醛、4-異丙基苯甲醛、4-異丁基苯甲醛、4-苯基苯甲醛等。Examples of the aldehydes include formaldehyde, paraformaldehyde, trimaldehyde, furfural, benzaldehyde, terephthalaldehyde, phenylacetaldehyde, α-phenylpropionaldehyde, β-phenylpropionaldehyde, and o-hydroxybenzaldehyde. , m-hydroxybenzaldehyde, p-hydroxybenzaldehyde, o-methylbenzaldehyde, m-methylbenzaldehyde, p-methylbenzaldehyde, o-chlorobenzaldehyde, m-chlorobenzaldehyde, p-chlorobenzaldehyde, cinnamic aldehyde, 4-iso Propylbenzaldehyde, 4-isobutylbenzaldehyde, 4-phenylbenzaldehyde, etc.
加成縮合反應時之酸觸媒沒有特別限定,例如可使用鹽酸、硝酸、硫酸、甲酸、草酸、乙酸等。加成縮合反應時之鹼觸媒沒有特別限定,可使用氫氧化鈉、氫氧化鋰、氫氧化鉀、氨水、三乙胺、碳酸鈉、六亞甲基四胺等。The acid catalyst used in the addition condensation reaction is not particularly limited. For example, hydrochloric acid, nitric acid, sulfuric acid, formic acid, oxalic acid, acetic acid, etc. can be used. The alkali catalyst used in the addition condensation reaction is not particularly limited, and sodium hydroxide, lithium hydroxide, potassium hydroxide, ammonia, triethylamine, sodium carbonate, hexamethylenetetramine, etc. can be used.
[包含羥基苯乙烯骨架之樹脂] 作為包含羥基苯乙烯骨架之樹脂,只要具有由羥基苯乙烯或羥基苯乙烯衍生物衍生之結構單元即可,沒有特別限定。作為由羥基苯乙烯或羥基苯乙烯衍生物衍生之結構單元之具體例,可例舉下述通式(a10-1)所表示之結構單元。 [Resin containing hydroxystyrene skeleton] The resin containing a hydroxystyrene skeleton is not particularly limited as long as it has a structural unit derived from hydroxystyrene or a hydroxystyrene derivative. Specific examples of the structural unit derived from hydroxystyrene or a hydroxystyrene derivative include a structural unit represented by the following general formula (a10-1).
[化1] [式中,R為氫原子、碳原子數1~5之烷基或碳原子數1~5之鹵化烷基。Ya x1為單鍵或2價連結基。Wa x1為(n ax1+1)價之芳香族烴基。n ax1為1~3之整數] [Chemical 1] [In the formula, R is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Ya x1 is a single bond or a divalent linking base. Wa x1 is an aromatic hydrocarbon group with a valence of (n ax1 +1). n ax1 is an integer from 1 to 3]
上述式(a10-1)中,R為氫原子、碳原子數1~5之烷基或碳原子數1~5之鹵化烷基。 R之碳原子數1~5之烷基較佳為碳原子數1~5之直鏈狀或支鏈狀之烷基,具體而言,可例舉甲基、乙基、丙基、異丙基、正丁基、異丁基、第三丁基、戊基、異戊基、新戊基等。R之碳原子數1~5之鹵化烷基為上述碳原子數1~5之烷基之氫原子之一部分或全部經鹵素原子取代而得到之基。作為該鹵素原子,可例舉氟原子、氯原子、溴原子、碘原子等,特佳為氟原子。 作為R,較佳為氫原子、碳原子數1~5之烷基或碳原子數1~5之氟化烷基,自工業上之獲得容易性考慮,最佳為氫原子或甲基。 In the above formula (a10-1), R is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. The alkyl group having 1 to 5 carbon atoms in R is preferably a linear or branched alkyl group having 1 to 5 carbon atoms. Specific examples include methyl, ethyl, propyl, and isopropyl. base, n-butyl, isobutyl, tert-butyl, pentyl, isopentyl, neopentyl, etc. The haloalkyl group having 1 to 5 carbon atoms in R is a group obtained by substituting part or all of the hydrogen atoms of the alkyl group having 1 to 5 carbon atoms with halogen atoms. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like, and a fluorine atom is particularly preferred. R is preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms. From the viewpoint of industrial availability, a hydrogen atom or a methyl group is most preferred.
上述式(a10-1)中,Ya x1為單鍵或2價連結基。 作為Ya x1中之2價連結基,例如,可例舉可以具有取代基之2價烴基、包含雜原子之2價連結基作為合適之基。 In the above formula (a10-1), Ya x1 is a single bond or a divalent linking group. Suitable examples of the divalent linking group in Ya x1 include a divalent hydrocarbon group which may have a substituent and a divalent linking group containing a heteroatom.
・可以具有取代基之2價烴基: Ya x1為可以具有取代基之2價烴基之情形時,該烴基可為脂肪族烴基,亦可為芳香族烴基。 ・Divalent hydrocarbon group which may have a substituent: When Ya x1 is a divalent hydrocarbon group which may have a substituent, the hydrocarbon group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group.
・・Ya x1中之脂肪族烴基 該脂肪族烴基係指不具有芳香性之烴基。該脂肪族烴基可飽和亦可不飽和,通常較佳為飽和。 作為上述脂肪族烴基,可例舉直鏈狀或支鏈狀之脂肪族烴基、或者結構中包含環之脂肪族烴基等。 ・・The aliphatic hydrocarbon group in Ya x1 refers to a non-aromatic hydrocarbon group. The aliphatic hydrocarbon group may be saturated or unsaturated, and is generally preferably saturated. Examples of the aliphatic hydrocarbon group include a linear or branched aliphatic hydrocarbon group, an aliphatic hydrocarbon group containing a ring in the structure, and the like.
・・・直鏈狀或支鏈狀之脂肪族烴基 該直鏈狀之脂肪族烴基之碳原子數較佳為1~10,更佳為碳原子數1~6,進而較佳為碳原子數1~4,最佳為碳原子數1~3。 作為直鏈狀之脂肪族烴基,較佳為直鏈狀之伸烷基,具體而言,可例舉亞甲基[-CH 2-]、伸乙基[-(CH 2) 2-]、1,3-伸丙基[-(CH 2) 3-]、1,4-伸丁基[-(CH 2) 4-]、1,5-伸戊基[-(CH 2) 5-]等。 該支鏈狀之脂肪族烴基之碳原子數較佳為2~10,更佳為碳原子數3~6,進而較佳為碳原子數3或4,最佳為碳原子數3。 作為支鏈狀之脂肪族烴基,較佳為支鏈狀之伸烷基,具體而言,可例舉:-CH(CH 3)-、-CH(CH 2CH 3)-、-C(CH 3) 2-、-C(CH 3)(CH 2CH 3)-、-C(CH 3)(CH 2CH 2CH 3)-、-C(CH 2CH 3) 2-等烷基亞甲基;-CH(CH 3)CH 2-、-CH(CH 3)CH(CH 3)-、-C(CH 3) 2CH 2-、-CH(CH 2CH 3)CH 2-、-C(CH 2CH 3) 2-CH 2-等烷基伸乙基;-CH(CH 3)CH 2CH 2-、-CH 2CH(CH 3)CH 2-等烷基三亞甲基;-CH(CH 3)CH 2CH 2CH 2-、-CH 2CH(CH 3)CH 2CH 2-等烷基四亞甲基等烷基伸烷基等。作為烷基伸烷基中之烷基,較佳為碳原子數1~5之直鏈狀烷基。 ・・・Linear or branched aliphatic hydrocarbon group The linear aliphatic hydrocarbon group preferably has a carbon number of 1 to 10, more preferably a carbon number of 1 to 6, and still more preferably a carbon number of 1 to 4, preferably 1 to 3 carbon atoms. As the linear aliphatic hydrocarbon group, a linear alkylene group is preferred, and specific examples thereof include methylene [-CH 2 -], ethylene [-(CH 2 ) 2 -], 1,3-propylene [-(CH 2 ) 3 -], 1,4-butylene [-(CH 2 ) 4 -], 1,5-pentylene [-(CH 2 ) 5 -] wait. The number of carbon atoms of the branched aliphatic hydrocarbon group is preferably 2 to 10, more preferably 3 to 6 carbon atoms, further preferably 3 or 4 carbon atoms, and most preferably 3 carbon atoms. The branched aliphatic hydrocarbon group is preferably a branched alkylene group. Specifically, -CH(CH 3 )-, -CH(CH 2 CH 3 )-, -C(CH 3 ) 2 -, -C(CH 3 )(CH 2 CH 3 )-, -C(CH 3 )(CH 2 CH 2 CH 3 )-, -C(CH 2 CH 3 ) 2 - and other alkyl methylenes Base; -CH(CH 3 )CH 2 -, -CH(CH 3 )CH(CH 3 )-, -C(CH 3 ) 2 CH 2 -, -CH(CH 2 CH 3 )CH 2 -, -C (CH 2 CH 3 ) 2 -CH 2 -alkyl ethylidene; -CH(CH 3 )CH 2 CH 2 -, -CH 2 CH(CH 3 )CH 2 -alkyl trimethylene; -CH( CH 3 )CH 2 CH 2 CH 2 -, -CH 2 CH(CH 3 )CH 2 CH 2 - and other alkyl groups such as tetramethylene and other alkyl alkylene groups. The alkyl group in the alkyl alkylene group is preferably a linear alkyl group having 1 to 5 carbon atoms.
上述之直鏈狀或支鏈狀之脂肪族烴基可以具有取代基,亦可不具有取代基。作為該取代基,可例舉氟原子、經氟原子取代之碳原子數1~5之氟化烷基、羰基等。The above-mentioned linear or branched aliphatic hydrocarbon group may or may not have a substituent. Examples of the substituent include a fluorine atom, a fluorinated alkyl group having 1 to 5 carbon atoms substituted with a fluorine atom, and a carbonyl group.
・・・結構中包含環之脂肪族烴基 作為該結構中包含環之脂肪族烴基,可例舉環結構中包含雜原子之可以含有取代基之環狀之脂肪族烴基(自脂肪族烴環中去除2個氫原子而得到之基)、上述環狀之脂肪族烴基鍵結於直鏈狀或支鏈狀之脂肪族烴基之末端而成之基、上述環狀之脂肪族烴基介在於直鏈狀或支鏈狀之脂肪族烴基中間之基等。作為上述之直鏈狀或支鏈狀之脂肪族烴基,可例舉與上述同樣之基。 環狀之脂肪族烴基之碳原子數較佳為3~20,更佳為碳原子數3~12。 環狀之脂肪族烴基可為多環式基,亦可為單環式基。作為單環式之脂環式烴基,較佳為自單環烷烴中去除2個氫原子而得到之基。作為該單環烷烴,較佳為碳原子數3~6之單環烷烴,具體而言可例舉環戊烷、環己烷等。作為多環式之脂環式烴基,較佳為自多環烷烴(polycycloalkane)中去除2個氫原子而得到之基,作為該多環烷烴,較佳為碳原子數7~12之多環烷烴,具體而言可例舉金剛烷、降𦯉烷、異𦯉烷、三環癸烷、四環十二烷等。 ・・・Aliphatic hydrocarbon group containing ring in the structure Examples of the aliphatic hydrocarbon group containing a ring in the structure include a cyclic aliphatic hydrocarbon group containing a heteroatom in the ring structure that may contain a substituent (a group obtained by removing two hydrogen atoms from an aliphatic hydrocarbon ring), The above-mentioned cyclic aliphatic hydrocarbon group is bonded to the end of a linear or branched aliphatic hydrocarbon group, and the above-mentioned cyclic aliphatic hydrocarbon group is intermediate between the linear or branched aliphatic hydrocarbon group. Key et al. Examples of the linear or branched aliphatic hydrocarbon group include the same groups as described above. The number of carbon atoms of the cyclic aliphatic hydrocarbon group is preferably 3 to 20, more preferably 3 to 12 carbon atoms. The cyclic aliphatic hydrocarbon group may be a polycyclic group or a monocyclic group. As the monocyclic alicyclic hydrocarbon group, a group obtained by removing two hydrogen atoms from a monocyclic alkane is preferred. The monocyclic alkane is preferably a monocyclic alkane having 3 to 6 carbon atoms, and specific examples thereof include cyclopentane, cyclohexane, and the like. The polycyclic alicyclic hydrocarbon group is preferably a group obtained by removing two hydrogen atoms from a polycycloalkane (polycycloalkane), and the polycycloalkane is preferably a polycycloalkane having 7 to 12 carbon atoms. , specific examples include adamantane, nordecane, isoxane, tricyclodecane, tetracyclododecane, and the like.
環狀之脂肪族烴基可以具有取代基,亦可不具有取代基。作為該取代基,可例舉烷基、烷氧基、鹵素原子、鹵化烷基、羥基、羰基等。 關於作為上述取代基之烷基,較佳為碳原子數1~5之烷基,最佳為甲基、乙基、丙基、正丁基、第三丁基。 關於作為上述取代基之烷氧基,較佳為碳原子數1~5之烷氧基,更佳為甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、第三丁氧基,最佳為甲氧基、乙氧基。 關於作為上述取代基之鹵素原子,可例舉氟原子、氯原子、溴原子、碘原子等,較佳為氟原子。 關於作為上述取代基之鹵化烷基,可例舉上述烷基之氫原子之一部分或全部經上述鹵素原子取代而得到之基。 至於環狀之脂肪族烴基,構成其環結構之碳原子之一部分可經包含雜原子之取代基取代。作為該包含雜原子之取代基,較佳為-O-、-C(=O)-O-、-S-、-S(=O) 2-、-S(=O) 2-O-。 The cyclic aliphatic hydrocarbon group may or may not have a substituent. Examples of the substituent include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, and the like. Regarding the alkyl group as the above-mentioned substituent, an alkyl group having 1 to 5 carbon atoms is preferred, and a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group is most preferred. The alkoxy group as the above substituent is preferably an alkoxy group having 1 to 5 carbon atoms, more preferably a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, The third butoxy group is preferably methoxy or ethoxy. Examples of the halogen atom as the substituent include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like, and a fluorine atom is preferred. Examples of the halogenated alkyl group as the above-mentioned substituent include a group in which part or all of the hydrogen atoms of the above-mentioned alkyl group are substituted with the above-mentioned halogen atoms. As for the cyclic aliphatic hydrocarbon group, part of the carbon atoms constituting the ring structure may be substituted with a substituent containing a heteroatom. As the heteroatom-containing substituent, -O-, -C(=O)-O-, -S-, -S(=O) 2 -, -S(=O) 2 -O- are preferred.
・・Ya x1中之芳香族烴基 該芳香族烴基為具有至少1個芳香環之烴基。 該芳香環只要為具有4n+2個π電子之環狀共軛系即可,沒有特別限定,可為單環式,亦可為多環式。芳香環之碳原子數較佳為5~30,更佳為碳原子數5~20,進而較佳為碳原子數6~15,特佳為碳原子數6~12。其中,該碳原子數不包括取代基中之碳原子數。作為芳香環,具體而言,可例舉:苯、萘、蒽、菲等芳香族烴環;構成上述芳香族烴環之碳原子之一部分經雜原子取代而得到之芳香族雜環等。作為芳香族雜環中之雜原子,可例舉氧原子、硫原子、氮原子等。作為芳香族雜環,具體而言,可例舉吡啶環、噻吩環等。 作為芳香族烴基,具體而言,可例舉:自上述芳香族烴環或芳香族雜環中去除2個氫原子而得到之基(伸芳基或伸雜芳基);自包含2個以上芳香環之芳香族化合物(例如聯苯、茀等)中去除2個氫原子而得到之基;自上述芳香族烴環或芳香族雜環中去除1個氫原子而得到之基(芳基或雜芳基)之1個氫原子經伸烷基取代而得到之基(例如,自苄基、苯乙基、1-萘甲基、2-萘甲基、1-萘乙基、2-萘乙基等芳基烷基中之芳基中進一步去除1個氫原子而得到之基)等。與上述之芳基或雜芳基鍵結之伸烷基之碳原子數較佳為1~4,更佳為碳原子數1~2,特佳為碳原子數1。 ・・The aromatic hydrocarbon group in Ya x1 is a hydrocarbon group having at least one aromatic ring. The aromatic ring is not particularly limited as long as it is a cyclic conjugated system having 4n+2 π electrons, and it may be a single ring or a polycyclic ring. The aromatic ring preferably has 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, further preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms. Wherein, the number of carbon atoms does not include the number of carbon atoms in the substituent. Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; aromatic heterocycles obtained by substituting part of the carbon atoms constituting the aromatic hydrocarbon rings with heteroatoms; and the like. Examples of heteroatoms in the aromatic heterocyclic ring include oxygen atoms, sulfur atoms, nitrogen atoms, and the like. Specific examples of the aromatic heterocyclic ring include a pyridine ring, a thiophene ring, and the like. Specific examples of the aromatic hydrocarbon group include: a group obtained by removing two hydrogen atoms from the above-mentioned aromatic hydrocarbon ring or aromatic heterocyclic ring (arylene group or heteroarylene group); including two or more A group obtained by removing 2 hydrogen atoms from aromatic compounds with an aromatic ring (such as biphenyl, fluorine, etc.); a group obtained by removing 1 hydrogen atom from the above-mentioned aromatic hydrocarbon ring or aromatic heterocyclic ring (aryl or Heteroaryl) A group in which one hydrogen atom is substituted by an alkylene group (for example, from benzyl, phenethyl, 1-naphthylmethyl, 2-naphthylmethyl, 1-naphthylethyl, 2-naphthyl) A group obtained by further removing one hydrogen atom from the aryl group in an arylalkyl group such as ethyl), etc. The number of carbon atoms of the alkylene group bonded to the above-mentioned aryl group or heteroaryl group is preferably 1 to 4, more preferably 1 to 2 carbon atoms, and particularly preferably 1 carbon atom.
就上述芳香族烴基而言,該芳香族烴基所具有之氫原子可經取代基取代。例如,該芳香族烴基中之與芳香環鍵結之氫原子可經取代基取代。作為該取代基,例如,可例舉烷基、烷氧基、鹵素原子、鹵化烷基、羥基等。 關於作為上述取代基之烷基,較佳為碳原子數1~5之烷基,最佳為甲基、乙基、丙基、正丁基、第三丁基。 關於作為上述取代基之烷氧基、鹵素原子及鹵化烷基,可例舉作為對上述環狀之脂肪族烴基所具有之氫原子進行取代之取代基而例示之基。 Regarding the above-mentioned aromatic hydrocarbon group, the hydrogen atom of the aromatic hydrocarbon group may be substituted by a substituent. For example, the hydrogen atom bonded to the aromatic ring in the aromatic hydrocarbon group may be substituted by a substituent. Examples of the substituent include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, and the like. Regarding the alkyl group as the above-mentioned substituent, an alkyl group having 1 to 5 carbon atoms is preferred, and a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group is most preferred. Examples of the alkoxy group, halogen atom and halogenated alkyl group as the substituent include groups exemplified as substituents for substituting the hydrogen atom of the cyclic aliphatic hydrocarbon group.
・包含雜原子之2價連結基: 於Ya x1為包含雜原子之2價連結基之情形時,關於作為該連結基而較佳者,可例舉:-O-、-C(=O)-O-、-C(=O)-、-O-C(=O)-O-、-C(=O)-NH-、-NH-、-NH-C(=NH)-(H可經烷基、醯基等取代基取代)、-S-、-S(=O) 2-、-S(=O) 2-O-、通式-Y 21-O-Y 22-、-Y 21-O-、-Y 21-C(=O)-O-、-C(=O)-O-Y 21-、-[Y 21-C(=O)-O] m''-Y 22-、-Y 21-O-C(=O)-Y 22-或-Y 21-S(=O) 2-O-Y 22-所表示之基[式中,Y 21及Y 22各自獨立地為可以具有取代基之2價烴基,O為氧原子,m''為0~3之整數]等。 上述包含雜原子之2價連結基為-C(=O)-NH-、-C(=O)-NH-C(=O)-、-NH-、-NH-C(=NH)-之情形時,其H可經烷基、醯基等取代基取代。該取代基(烷基、醯基等)之碳原子數較佳為1~10,進而較佳為1~8,特佳為1~5。 通式-Y 21-O-Y 22-、-Y 21-O-、-Y 21-C(=O)-O-、-C(=O)-O-Y 21-、-[Y 21-C(=O)-O] m ''-Y 22-、-Y 21-O-C(=O)-Y 22-或-Y 21-S(=O) 2-O-Y 22-中,Y 21及Y 22各自獨立地為可以具有取代基之2價烴基。作為該2價烴基,可例舉與作為上述2價連結基之說明中所例舉之(可以具有取代基之2價烴基)同樣之2價烴基。 作為Y 21,較佳為直鏈狀之脂肪族烴基,更佳為直鏈狀之伸烷基,進而較佳為碳原子數1~5之直鏈狀之伸烷基,特佳為亞甲基或伸乙基。 作為Y 22,較佳為直鏈狀或支鏈狀之脂肪族烴基,更佳為亞甲基、伸乙基或烷基亞甲基。該烷基亞甲基中之烷基較佳為碳原子數1~5之直鏈狀烷基,更佳為碳原子數1~3之直鏈狀烷基,最佳為甲基。 式-[Y 21-C(=O)-O] m''-Y 22-所表示之基中,m''為0~3之整數,較佳為0~2之整數,更佳為0或1,特佳為1。即,作為式-[Y 21-C(=O)-O] m''-Y 22-所表示之基,特佳為式-Y 21-C(=O)-O-Y 22-所表示之基。其中,較佳為式-(CH 2) a'-C(=O)-O-(CH 2) b'-所表示之基。該式中,a'為1~10之整數,較佳為1~8之整數,更佳為1~5之整數,進而較佳為1或2,最佳為1。b'為1~10之整數,較佳為1~8之整數,更佳為1~5之整數,進而較佳為1或2,最佳為1。 ・Bivalent linking group containing a hetero atom: When Ya x1 is a divalent linking group containing a hetero atom, preferred examples of the linking group include: -O-, -C(=O) -O-, -C(=O)-, -OC(=O)-O-, -C(=O)-NH-, -NH-, -NH-C(=NH)-(H can pass through alkane (substituted with substituents such as hydroxyl group and hydroxyl group), -S-, -S(=O) 2 -, -S(=O) 2 -O-, general formula -Y 21 -OY 22 -, -Y 21 -O- , -Y 21 -C(=O)-O-, -C(=O)-OY 21 -, -[Y 21 -C(=O)-O] m'' -Y 22 -, -Y 21 - The group represented by OC(=O)-Y 22 -or-Y 21 -S(=O) 2 -OY 22 - [wherein Y 21 and Y 22 are each independently a divalent hydrocarbon group which may have a substituent, O is an oxygen atom, m'' is an integer from 0 to 3], etc. The above divalent linking groups containing heteroatoms are -C(=O)-NH-, -C(=O)-NH-C(=O)-, -NH-, -NH-C(=NH)-. In this case, its H may be substituted by substituents such as alkyl group and acyl group. The number of carbon atoms of the substituent (alkyl group, acyl group, etc.) is preferably 1 to 10, more preferably 1 to 8, and particularly preferably 1 to 5. General formula -Y 21 -OY 22 -, -Y 21 -O-, -Y 21 -C(=O)-O-, -C(=O)-OY 21 -, -[Y 21 -C(=O )-O] m '' -Y 22 -, -Y 21 -OC(=O)-Y 22 -or -Y 21 -S(=O) 2 -OY 22 -, Y 21 and Y 22 are independently It is a divalent hydrocarbon group which may have a substituent. Examples of the divalent hydrocarbon group include the same divalent hydrocarbon groups as those exemplified in the description of the divalent linking group (a divalent hydrocarbon group which may have a substituent). Y 21 is preferably a linear aliphatic hydrocarbon group, more preferably a linear alkylene group, further preferably a linear alkylene group having 1 to 5 carbon atoms, and particularly preferably methylene base or ethyl group. Y 22 is preferably a linear or branched aliphatic hydrocarbon group, more preferably a methylene group, an ethylidene group or an alkyl methylene group. The alkyl group in the alkyl methylene group is preferably a linear alkyl group having 1 to 5 carbon atoms, more preferably a linear alkyl group having 1 to 3 carbon atoms, and most preferably is a methyl group. In the basis represented by the formula -[Y 21 -C(=O)-O] m'' -Y 22 -, m'' is an integer from 0 to 3, preferably an integer from 0 to 2, and more preferably 0 Or 1, the best is 1. That is, as the group represented by the formula -[Y 21 -C(=O)-O] m'' -Y 22 -, a group represented by the formula -Y 21 -C(=O)-OY 22 - is particularly preferred. . Among them, a group represented by the formula -(CH 2 ) a' -C(=O)-O-(CH 2 ) b' - is preferred. In this formula, a' is an integer from 1 to 10, preferably an integer from 1 to 8, more preferably an integer from 1 to 5, further preferably 1 or 2, most preferably 1. b' is an integer of 1 to 10, preferably an integer of 1 to 8, more preferably an integer of 1 to 5, further preferably 1 or 2, and most preferably 1.
作為Ya x1,較佳為單鍵、酯鍵[-C(=O)-O-]、醚鍵(-O-)、-C(=O)-NH-、直鏈狀或支鏈狀之伸烷基、或者其等之組合,其中,尤其是單鍵更佳。 As Ya x1 , a single bond, an ester bond [-C(=O)-O-], an ether bond (-O-), -C(=O)-NH-, a linear or branched chain is preferred. Alkylene group, or a combination thereof, of which a single bond is particularly preferred.
上述式(a10-1)中,Wa x1為(n ax1+1)價之芳香族烴基。 作為Wa x1中之芳香族烴基,可例舉自芳香環中去除(n ax1+1)個氫原子而得到之基。此處之芳香環只要為具有4n+2個π電子之環狀共軛系即可,沒有特別限定,可為單環式,亦可為多環式。芳香環之碳原子數較佳為5~30,更佳為碳原子數5~20,進而較佳為碳原子數6~15,特佳為碳原子數6~12。作為芳香環,具體而言,可例舉:苯、萘、蒽、菲等芳香族烴環;構成上述芳香族烴環之碳原子之一部分經雜原子取代而得到之芳香族雜環等。作為芳香族雜環中之雜原子,可例舉氧原子、硫原子、氮原子等。作為芳香族雜環,具體而言,可例舉吡啶環、噻吩環等。 In the above formula (a10-1), Wa x1 is an aromatic hydrocarbon group with a valence of (n ax1 +1). Examples of the aromatic hydrocarbon group in Wa x1 include a group obtained by removing (n ax1 +1) hydrogen atoms from an aromatic ring. The aromatic ring here is not particularly limited as long as it is a cyclic conjugated system having 4n+2 π electrons, and it may be a single ring or a polycyclic ring. The aromatic ring preferably has 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, further preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms. Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; aromatic heterocycles obtained by substituting part of the carbon atoms constituting the aromatic hydrocarbon rings with heteroatoms; and the like. Examples of heteroatoms in the aromatic heterocyclic ring include oxygen atoms, sulfur atoms, nitrogen atoms, and the like. Specific examples of the aromatic heterocyclic ring include a pyridine ring, a thiophene ring, and the like.
上述式(a10-1)中,n ax1為1~3之整數,較佳為1或2,更佳為1。 In the above formula (a10-1), n ax1 is an integer from 1 to 3, preferably 1 or 2, more preferably 1.
以下,示出上述通式(a10-1)所表示之結構單元之具體例。 下述式中,R α表示氫原子、甲基或三氟甲基。 Specific examples of the structural unit represented by the general formula (a10-1) are shown below. In the following formula, R α represents a hydrogen atom, a methyl group or a trifluoromethyl group.
[化2] [Chemicalization 2]
包含羥基苯乙烯骨架之樹脂較佳為羥基苯乙烯或羥基苯乙烯衍生物之聚合物,更佳為羥基苯乙烯之聚合物(聚羥基苯乙烯)。The resin containing a hydroxystyrene skeleton is preferably a polymer of hydroxystyrene or a hydroxystyrene derivative, and more preferably a polymer of hydroxystyrene (polyhydroxystyrene).
[聚碳酸酯多元醇] 作為聚碳酸酯多元醇,例如,可例舉藉由使乙二醇、丙二醇、1,4-丁二醇、1,5-戊二醇、1,6-己二醇、3-甲基-1,5-戊二醇、1,9-壬二醇、1,8-壬二醇、新戊二醇、二乙二醇、二丙二醇、1,4-環己二醇、1,4-環己烷二甲醇、雙酚A、或氫化雙酚A等中之1種或2種以上之二醇與碳酸二甲酯、碳酸二苯酯、碳酸乙二酯、光氣等反應而得到之聚碳酸酯多元醇。 [Polycarbonate polyol] Examples of the polycarbonate polyol include ethylene glycol, propylene glycol, 1,4-butanediol, 1,5-pentanediol, 1,6-hexanediol, and 3-methyl- 1,5-pentanediol, 1,9-nonanediol, 1,8-nonanediol, neopentyl glycol, diethylene glycol, dipropylene glycol, 1,4-cyclohexanediol, 1,4- Obtained by reacting one or more diols such as cyclohexanedimethanol, bisphenol A, or hydrogenated bisphenol A with dimethyl carbonate, diphenyl carbonate, ethylene carbonate, phosgene, etc. Polycarbonate polyol.
其中,聚碳酸酯多元醇較佳為下述通式(PC-1)所表示之聚碳酸酯二醇。Among them, the polycarbonate polyol is preferably a polycarbonate diol represented by the following general formula (PC-1).
[化3] [式中,Rp 1及Rp 2各自獨立地為2價烴基。np為2以上之整數] [Chemical 3] [In the formula, Rp 1 and Rp 2 are each independently a divalent hydrocarbon group. np is an integer above 2]
上述通式(PC-1)中,Rp 1及Rp 2各自獨立地為2價烴基。上述2價烴基可為芳香族烴基,亦可為脂肪族烴基。作為上述2價烴基,可例舉與上述通式(a10-1)中之Ya x1中所例舉者同樣之2價烴基。作為Rp 1及Rp 2中之2價烴基,較佳為脂肪族烴基,更佳為直鏈狀或支鏈狀之伸烷基。對於上述2價烴基而言,較佳為碳原子數1~10,更佳為碳原子數3~8,進而較佳為碳原子數4~6。作為Rp 1及Rp 2之具體例,可例舉-(CH 2) 6-、或-(CH 2) 5-。 In the above general formula (PC-1), Rp 1 and Rp 2 are each independently a divalent hydrocarbon group. The above divalent hydrocarbon group may be an aromatic hydrocarbon group or an aliphatic hydrocarbon group. Examples of the divalent hydrocarbon group include the same divalent hydrocarbon groups as those exemplified for Ya x1 in the general formula (a10-1). The divalent hydrocarbon group in Rp 1 and Rp 2 is preferably an aliphatic hydrocarbon group, and more preferably a linear or branched alkylene group. The divalent hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 3 to 8 carbon atoms, and even more preferably 4 to 6 carbon atoms. Specific examples of Rp 1 and Rp 2 include -(CH 2 ) 6 - or -(CH 2 ) 5 -.
聚碳酸酯多元醇之重量平均分子量(Mw)較佳為500~5000,更佳為500~3000,進而較佳為500~2000,特佳為500~1000。The weight average molecular weight (Mw) of the polycarbonate polyol is preferably 500 to 5000, more preferably 500 to 3000, further preferably 500 to 2000, particularly preferably 500 to 1000.
使用聚碳酸酯多元醇作為(O2)成分之情形時,聚碳酸酯多元醇相對於(O1)成分之比率(聚碳酸酯多元醇/(O1)成分(質量比))較佳為0.1~5,更佳為0.3~3,進而較佳為0.4~3。When polycarbonate polyol is used as the (O2) component, the ratio of the polycarbonate polyol to the (O1) component (polycarbonate polyol/(O1) component (mass ratio)) is preferably 0.1 to 5 , more preferably 0.3 to 3, still more preferably 0.4 to 3.
[其他多元醇] 作為聚酯多元醇,例如,可例舉:使對苯二甲酸、間苯二甲酸、己二酸、壬二酸、癸二酸等二元酸或其等之二烷基酯或者其等之混合物與例如乙二醇、丙二醇、二乙二醇、丁二醇、新戊二醇、1,6-己二醇、3-甲基-1,5-戊二醇、3,3'-二羥甲基庚烷、聚氧乙二醇、聚氧丙二醇、聚四亞甲基醚二醇等二醇類或其等之混合物反應而得到之聚酯多元醇;或者,將聚己內酯、聚戊內酯、聚(β-甲基-γ-戊內酯)等內酯類開環聚合而得到之聚酯多元醇。 [Other polyols] Examples of the polyester polyol include dibasic acids such as terephthalic acid, isophthalic acid, adipic acid, azelaic acid, and sebacic acid, dialkyl esters thereof, or the like. Mixtures with, for example, ethylene glycol, propylene glycol, diethylene glycol, butylene glycol, neopentyl glycol, 1,6-hexanediol, 3-methyl-1,5-pentanediol, 3,3'-diol Polyester polyol obtained by reacting glycols such as hydroxymethylheptane, polyoxyethylene glycol, polyoxypropylene glycol, polytetramethylene ether glycol, or mixtures thereof; or polycaprolactone, Polyester polyol obtained by ring-opening polymerization of lactones such as polyvalerolactone and poly(β-methyl-γ-valerolactone).
作為聚醚多元醇,例如,可例舉將環氧乙烷、環氧丙烷、環氧丁烷、四氫呋喃等環氧烷化合物以例如水、乙二醇、丙二醇、三羥甲基丙烷、甘油等低分量多元醇作為起始劑進行聚合而得到之聚醚多元醇。Examples of the polyether polyol include a mixture of alkylene oxide compounds such as ethylene oxide, propylene oxide, butylene oxide, and tetrahydrofuran with water, ethylene glycol, propylene glycol, trimethylolpropane, glycerin, etc. Polyether polyols obtained by polymerizing low-weight polyols as initiators.
作為聚醚酯多元醇,例如,可例舉使對苯二甲酸、間苯二甲酸、己二酸、壬二酸、癸二酸等二元酸或其等之二烷基酯或者其等之混合物與上述聚醚多元醇反應而得到之聚醚酯多元醇。Examples of the polyetherester polyol include dibasic acids such as terephthalic acid, isophthalic acid, adipic acid, azelaic acid, and sebacic acid, dialkyl esters thereof, or the like. Polyetherester polyol obtained by reacting the mixture with the above-mentioned polyether polyol.
作為聚酯醯胺多元醇,可例舉藉由於上述酯化反應時將例如乙二胺、丙二胺、六亞甲基二胺等具有胺基之脂肪族二胺作為原料組合使用而得到之聚酯醯胺多元醇。Examples of the polyesteramide polyol include those obtained by combining aliphatic diamines having an amino group such as ethylenediamine, propylenediamine, hexamethylenediamine, etc. as raw materials during the above-mentioned esterification reaction. Polyesteramide polyol.
作為丙烯酸多元醇,可例舉藉由使於1分子中包含1個以上羥基之丙烯酸羥基乙酯、丙烯酸羥基丙酯、丙烯酸羥基丁酯等、或其等對應之甲基丙烯酸衍生物等,與例如丙烯酸、甲基丙烯酸或其酯共聚而得到之聚酯醯胺多元醇。Examples of the acrylic polyol include hydroxyethyl acrylate, hydroxypropyl acrylate, hydroxybutyl acrylate, etc., or their corresponding methacrylic acid derivatives containing one or more hydroxyl groups in one molecule, and the like. For example, polyesteramide polyol obtained by copolymerization of acrylic acid, methacrylic acid or their esters.
作為多羥基烷烴,可例舉將丁二烯或丁二烯與丙烯醯胺等共聚而得到之液態橡膠。Examples of polyhydroxyalkanes include liquid rubber obtained by copolymerizing butadiene or butadiene and acrylamide.
作為聚胺酯多元醇,為於1分子中具有1個以上胺基甲酸酯鍵之多元醇,例如,可例舉使數量平均分子量為200~20,000之聚醚多元醇、聚酯多元醇、聚醚酯多元醇等與多異氰酸酯以NCO/OH較佳為未達1、更佳為0.9以下之條件進行反應而得到之聚胺酯多元醇。The polyurethane polyol is a polyol having one or more urethane bonds per molecule. Examples thereof include polyether polyols, polyester polyols, and polyether polyols having a number average molecular weight of 200 to 20,000. Polyurethane polyol obtained by reacting ester polyol, etc. with polyisocyanate under conditions such that NCO/OH is preferably less than 1, more preferably 0.9 or less.
作為植物油系多元醇,可例舉蓖麻油、蓖麻油改性多元醇、二聚酸改性多元醇、及大豆油改性多元醇等。其中,作為植物油系多元醇,較佳為蓖麻油改性多元醇,更佳為蓖麻油改性二醇。 使用植物油系多元醇作為(O2)成分之情形時,植物油系多元醇相對於(O1)成分之比率(植物油系多元醇/(O1)成分(質量比))較佳為0.1~5,更佳為0.3~3,進而較佳為0.4~2.5。 Examples of the vegetable oil-based polyol include castor oil, castor oil-modified polyol, dimer acid-modified polyol, and soybean oil-modified polyol. Among these, as the vegetable oil-based polyol, a castor oil-modified polyol is preferred, and a castor oil-modified diol is more preferred. When a vegetable oil-based polyol is used as the (O2) component, the ratio of the vegetable oil-based polyol to the (O1) component (vegetable oil-based polyol/(O1) component (mass ratio)) is preferably 0.1 to 5, more preferably It is 0.3-3, and it is more preferable that it is 0.4-2.5.
(O2)成分可單獨使用1種,亦可併用2種以上。 上述中,作為(O2)成分,自調整接著劑組合物之黏度、及接著層之硬度之觀點考慮,較佳為聚碳酸酯多元醇、及低分子多元醇。又,自提高接著層之耐熱性之觀點考慮,作為(O2)成分,可使用蓖麻油改性多元醇。 (O2) component may be used individually by 1 type, and may be used in combination of 2 or more types. Among the above, as the (O2) component, from the viewpoint of adjusting the viscosity of the adhesive composition and the hardness of the adhesive layer, polycarbonate polyols and low molecular polyols are preferred. In addition, from the viewpoint of improving the heat resistance of the adhesive layer, castor oil-modified polyol can be used as the (O2) component.
作為(O)成分,自調整接著劑組合物之黏度、及接著層之耐熱性等之觀點考慮,較佳為(O1)成分與(O2)成分之組合。作為上述(O2)成分,較佳為低分子多元醇、聚碳酸酯多元醇、或蓖麻油改性多元醇、或者其等之組合。作為與(O1)成分組合之(O2)成分之具體例,可例舉:聚碳酸酯多元醇、蓖麻油改性多元醇、及低分子多元醇之組合;聚碳酸酯多元醇、及蓖麻油改性多元醇之組合;以及聚碳酸酯多元醇等。 (O1)成分與(O2)成分之質量比較佳為(O1):(O2)=1:5~5:1,更佳為1:4~2:1,進而較佳為1:4~1:1,特佳為1:4~1:2。藉由使(O1)成分與(O2)成分之質量比處於上述範圍內,能夠提高接著層之彈性模數及耐熱性等。 As the (O) component, from the viewpoint of adjusting the viscosity of the adhesive composition, the heat resistance of the adhesive layer, etc., a combination of the (O1) component and the (O2) component is preferred. As the above-mentioned (O2) component, a low molecular weight polyol, a polycarbonate polyol, a castor oil modified polyol, or a combination thereof is preferred. Specific examples of the (O2) component combined with the (O1) component include: a combination of polycarbonate polyol, castor oil-modified polyol, and low molecular polyol; polycarbonate polyol, and castor oil. Combinations of modified polyols; and polycarbonate polyols, etc. The mass ratio between (O1) component and (O2) component is preferably (O1): (O2)=1:5~5:1, more preferably 1:4~2:1, further preferably 1:4~1 :1, the best value is 1:4~1:2. By setting the mass ratio of the (O1) component to the (O2) component within the above range, the elastic modulus, heat resistance, etc. of the adhesive layer can be improved.
用於合成(P1)成分之(I)成分與(O)成分之比率(質量比)例如較佳為(I):(O)=10:90~60:40,更佳為20:80~50:50,進而較佳為25:75~45:55。(O)成分中之羥基(-OH)相對於(I)成分中之異氰酸基(-NCO)之莫耳比(NCO/OH)較佳為60:40~40:60,更佳為55:45~45:55。The ratio (mass ratio) of the component (I) to the component (O) used to synthesize the component (P1) is, for example, preferably (I): (O)=10:90~60:40, more preferably 20:80~ 50:50, and more preferably 25:75~45:55. The molar ratio (NCO/OH) of the hydroxyl group (-OH) in the component (O) to the isocyanate group (-NCO) in the component (I) is preferably 60:40 to 40:60, more preferably 55:45~45:55.
≪能衍生結構單元(u1)之化合物:(U1)成分≫ (U1)成分為包含能吸收波長300~800 nm之範圍內之至少一部分光之結構的化合物。(U1)成分較佳為多異氰酸酯化合物或多元醇。即,(U1)成分可包含於上述(I)成分或(O)成分中。(U1)成分較佳為多元醇。於(U1)成分為多元醇之情形時,(U1)成分可為(O1)成分,亦可為(O2)成分。 ≪Compounds from which structural unit (u1) can be derived: (U1) component≫ The component (U1) is a compound containing a structure capable of absorbing at least part of the light in the wavelength range of 300 to 800 nm. The component (U1) is preferably a polyisocyanate compound or polyol. That is, the (U1) component may be contained in the said (I) component or (O) component. The component (U1) is preferably a polyol. When the component (U1) is a polyol, the component (U1) may be the component (O1) or the component (O2).
(U1)成分包含能吸收波長300~800 nm之範圍內之光之結構(以下,亦稱為「結構X」)。因此,由(U1)成分衍生之結構單元(u1)亦包含結構X。(P1)成分中,結構X作為能吸收波長為300~800 nm之光之光吸收基而發揮作用。結構X能夠吸收波長300~800 nm之範圍內之光而轉換成可使接著層改質之程度之熱能。結構X較佳為能吸收300~700 nm之波長區域之光,更佳為能吸收300~600 nm之波長區域之光,進而較佳為能吸收300~550 nm之波長區域之光,特佳為能吸收300~400 nm之波長區域之光。結構X較佳為於上述波長區域內具有吸收峰。對於結構X而言,可以根據於支持體與半導體基板等之分離時使用之光之波長,而採用能吸收該波長之光者。The component (U1) contains a structure capable of absorbing light in the wavelength range of 300 to 800 nm (hereinafter, also referred to as "structure X"). Therefore, structural unit (u1) derived from component (U1) also includes structure X. In the component (P1), the structure X functions as a light-absorbing group capable of absorbing light with a wavelength of 300 to 800 nm. Structure The structure It can absorb light in the wavelength range of 300 to 400 nm. Structure X preferably has an absorption peak in the above wavelength range. For the structure
作為結構X,沒有特別限定,例如,可例舉具有芳香性之縮合環骨架、二苯甲酮骨架、二苯甲醯基甲烷骨架、二苯甲醯基苯骨架、及苯并三唑骨架。 具有芳香性之縮合環骨架包含具有至少1個芳香環之縮合環。上述芳香環只要為具有4n+2個π電子之環狀共軛系即可,沒有特別限定,可為芳香族烴環,亦可為芳香族雜環。縮合環中之芳香環數較佳為2~10,更佳為2~6,進而較佳為2~4,特佳為2或3。縮合環可以僅由芳香環構成,亦可為芳香環與脂肪族烴環之縮合環,但較佳為僅由芳香環構成之縮合環。作為縮合環之具體例,例如,可例舉萘、蒽、菲、芘等。其等中,較佳為蒽或菲。 The structure The aromatic condensed ring skeleton contains a condensed ring having at least one aromatic ring. The above-mentioned aromatic ring is not particularly limited as long as it is a cyclic conjugated system having 4n+2 π electrons, and may be an aromatic hydrocarbon ring or an aromatic heterocyclic ring. The number of aromatic rings in the condensed ring is preferably 2 to 10, more preferably 2 to 6, further preferably 2 to 4, and particularly preferably 2 or 3. The condensed ring may be composed only of an aromatic ring, or may be a condensed ring of an aromatic ring and an aliphatic hydrocarbon ring, but is preferably a condensed ring composed only of an aromatic ring. Specific examples of the condensed ring include naphthalene, anthracene, phenanthrene, pyrene, and the like. Among them, anthracene or phenanthrene is preferred.
作為(U1)成分,例如,可例舉下述通式(u1-1)或(u1-2)所表示之化合物。Examples of the component (U1) include compounds represented by the following general formula (u1-1) or (u1-2).
[化4] [式(u1-1)中,X 1為包含能吸收波長300~800 nm之範圍內之至少一部分光之結構的n1價基;Y 1為2價連結基,n1為2~4之整數。複數個Y 1彼此可相同亦可不同。 式(u1-2)中,X 2為包含能吸收波長300~800 nm之範圍內之至少一部分光之結構的1價基;Y 2為3價連結基;Y 3為n2價連結基;n2為2~4之整數。複數個X 2彼此可相同亦可不同。複數個Y 2彼此可相同亦可不同] [Chemical 4] [In the formula (u1-1), X 1 is an n1 valent group containing a structure capable of absorbing at least part of the light in the wavelength range of 300 to 800 nm; Y 1 is a divalent linking group, and n1 is an integer from 2 to 4. The plural Y 1's may be the same as or different from each other. In the formula (u1-2), X 2 is a 1-valent group containing a structure that can absorb at least part of the light in the wavelength range of 300 to 800 nm; Y 2 is a 3-valent linking group; Y 3 is an n2-valent linking group; n2 It is an integer between 2 and 4. A plurality of X 2 may be the same as or different from each other. A plurality of Y 2 may be the same or different from each other]
通式(u1-1)中,Y 1為2價連結基。通式(u1-2)中,Y 2為3價連結基。作為上述2價或3價連結基,可例舉可具有取代基之烴基。上述烴基可為脂肪族烴基,亦可為芳香族烴基。 上述脂肪族烴基可飽和亦可不飽和,但較佳為飽和。上述脂肪族烴基可為直鏈狀,亦可為支鏈狀,亦可於結構中包含環。作為直鏈狀脂肪族烴基,較佳為碳原子數1~10,更佳為碳原子數1~6,進而較佳碳原子數1~3。作為支鏈狀脂肪族烴基,較佳為碳原子數2~10,更佳為碳原子數2~6,進而較佳碳原子數2或3。作為包含環結構之脂肪族烴基,較佳為碳原子數3~10,更佳為碳原子數3~6。 上述脂肪族烴基可具有取代基。上述取代基可為對氫原子進行取代之取代基,亦可為對碳鏈中之亞甲基(-CH 2-)進行取代之取代基。作為對氫原子進行取代之取代基,例如,可例舉羥基、胺基、烷氧基、鹵素原子、羧基、氰基等,較佳為羥基或胺基。作為對碳鏈中之亞甲基(-CH 2-)進行取代之取代基,例如,可例舉-O-、-CO-、-NH-、-COO-、-CONH-等。 In the general formula (u1-1), Y 1 is a divalent linking group. In the general formula (u1-2), Y 2 is a trivalent linking group. Examples of the divalent or trivalent linking group include a hydrocarbon group which may have a substituent. The above-mentioned hydrocarbon group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. The aliphatic hydrocarbon group mentioned above may be saturated or unsaturated, but is preferably saturated. The above-mentioned aliphatic hydrocarbon group may be linear or branched, or may include a ring in the structure. The linear aliphatic hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, and even more preferably has 1 to 3 carbon atoms. The branched aliphatic hydrocarbon group preferably has 2 to 10 carbon atoms, more preferably 2 to 6 carbon atoms, and further preferably 2 or 3 carbon atoms. The aliphatic hydrocarbon group containing a ring structure preferably has 3 to 10 carbon atoms, more preferably 3 to 6 carbon atoms. The aliphatic hydrocarbon group mentioned above may have a substituent. The above-mentioned substituent may be a substituent that substitutes a hydrogen atom or a substituent that substitutes a methylene group (-CH 2 -) in the carbon chain. Examples of the substituent for substituting a hydrogen atom include a hydroxyl group, an amino group, an alkoxy group, a halogen atom, a carboxyl group, a cyano group, and the like, and a hydroxyl group or an amino group is preferred. Examples of the substituent for substituting the methylene group (-CH 2 -) in the carbon chain include -O-, -CO-, -NH-, -COO-, -CONH-, and the like.
上述芳香族烴基為包含至少1個芳香環之烴基。上述芳香族烴基所包含之芳香環可為單環,亦可為多環。上述芳香環可為芳香族烴環,亦可為芳香族雜環。芳香族烴基所包含之芳香環數沒有特別限定,但較佳為1~3個,更佳為1個或2個。芳香族烴基可為芳香環與脂肪族烴基連結而成之基。 上述芳香族烴基可具有取代基。上述取代基可為對芳香環之氫原子進行取代之取代基,亦可為用雜原子對芳香環之構成環之碳原子進行取代之取代基。作為對氫原子進行取代之取代基,例如,可例舉羥基、胺基、烷氧基、鹵素原子、羧基、氰基等,較佳為羥基或胺基。作為對芳香環之環進行取代之雜原子,可例舉氮原子、氧原子、硫原子等,較佳為氮原子。 The above-mentioned aromatic hydrocarbon group is a hydrocarbon group containing at least one aromatic ring. The aromatic ring contained in the above-mentioned aromatic hydrocarbon group may be a single ring or a polycyclic ring. The above-mentioned aromatic ring may be an aromatic hydrocarbon ring or an aromatic heterocyclic ring. The number of aromatic rings contained in the aromatic hydrocarbon group is not particularly limited, but is preferably 1 to 3, more preferably 1 or 2. The aromatic hydrocarbon group may be a group in which an aromatic ring and an aliphatic hydrocarbon group are connected. The above aromatic hydrocarbon group may have a substituent. The above substituent may be a substituent that substitutes a hydrogen atom of the aromatic ring, or a substituent that substitutes a hetero atom with a carbon atom constituting the aromatic ring. Examples of the substituent for substituting a hydrogen atom include a hydroxyl group, an amino group, an alkoxy group, a halogen atom, a carboxyl group, a cyano group, and the like, and a hydroxyl group or an amino group is preferred. Examples of the hetero atom that substitutes the aromatic ring include a nitrogen atom, an oxygen atom, a sulfur atom, and the like, and a nitrogen atom is preferred.
通式(u1-2)中,Y 3為n2價連結基。作為Y 3,可例舉可具有取代基之烴基。上述烴基可為脂肪族烴基,亦可為芳香族烴基。 上述脂肪族烴基可飽和亦可不飽和,但較佳為飽和。上述脂肪族烴基可為直鏈狀,亦可為支鏈狀,亦可於結構中包含環。作為直鏈狀脂肪族烴基,較佳為碳原子數1~10,更佳為碳原子數1~6,進而較佳為碳原子數1~3。作為支鏈狀脂肪族烴基,較佳為碳原子數2~10,更佳為碳原子數2~6,進而較佳為碳原子數2或3。作為包含環結構之脂肪族烴基,較佳為碳原子數3~10,更佳為碳原子數3~6。 上述脂肪族烴基可以具有取代基,亦可不具有取代基。上述取代基可為對氫原子進行取代之取代基,亦可為對碳鏈中之亞甲基(-CH 2-)進行取代之取代基。作為對氫原子進行取代之取代基,例如,可例舉羥基、胺基、烷氧基、鹵素原子、羧基、氰基等,較佳為羥基或胺基。作為對碳鏈中之亞甲基(-CH 2-)進行取代之取代基,例如,可例舉-O-、-CO-、-NH-、-COO-、-CONH-等。 In the general formula (u1-2), Y 3 is an n2-valent linking group. Examples of Y 3 include a hydrocarbon group which may have a substituent. The above-mentioned hydrocarbon group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. The aliphatic hydrocarbon group mentioned above may be saturated or unsaturated, but is preferably saturated. The above-mentioned aliphatic hydrocarbon group may be linear or branched, or may include a ring in the structure. The linear aliphatic hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, and even more preferably has 1 to 3 carbon atoms. The branched aliphatic hydrocarbon group preferably has 2 to 10 carbon atoms, more preferably 2 to 6 carbon atoms, and even more preferably 2 or 3 carbon atoms. The aliphatic hydrocarbon group containing a ring structure preferably has 3 to 10 carbon atoms, more preferably 3 to 6 carbon atoms. The aliphatic hydrocarbon group may or may not have a substituent. The above-mentioned substituent may be a substituent that substitutes a hydrogen atom or a substituent that substitutes a methylene group (-CH 2 -) in the carbon chain. Examples of the substituent for substituting a hydrogen atom include a hydroxyl group, an amino group, an alkoxy group, a halogen atom, a carboxyl group, a cyano group, and the like, and a hydroxyl group or an amino group is preferred. Examples of the substituent for substituting the methylene group (-CH 2 -) in the carbon chain include -O-, -CO-, -NH-, -COO-, -CONH-, and the like.
上述芳香族烴基為包含至少1個芳香環之烴基。上述芳香族烴基所包含之芳香環可為單環,亦可為多環。上述芳香環可為芳香族烴環,亦可為芳香族雜環。芳香族烴基所包含之芳香環數沒有特別限定,但較佳為1~3個,更佳為1個或2個。芳香族烴基可為芳香環與脂肪族烴基連結而成之基。 上述芳香族烴基可具有取代基。上述取代基可為對芳香環之氫原子進行取代之取代基,亦可為用雜原子對芳香環之構成環之碳原子進行取代之取代基。作為對氫原子進行取代之取代基,例如,可例舉羥基、胺基、烷氧基、鹵素原子、羧基、氰基等,較佳為羥基或胺基。作為對芳香環之環進行取代之雜原子,可例舉氮原子、氧原子、硫原子等,較佳為氮原子。 The above-mentioned aromatic hydrocarbon group is a hydrocarbon group containing at least one aromatic ring. The aromatic ring contained in the above-mentioned aromatic hydrocarbon group may be a single ring or a polycyclic ring. The above-mentioned aromatic ring may be an aromatic hydrocarbon ring or an aromatic heterocyclic ring. The number of aromatic rings contained in the aromatic hydrocarbon group is not particularly limited, but is preferably 1 to 3, more preferably 1 or 2. The aromatic hydrocarbon group may be a group in which an aromatic ring and an aliphatic hydrocarbon group are connected. The above aromatic hydrocarbon group may have a substituent. The above substituent may be a substituent that substitutes a hydrogen atom of the aromatic ring, or a substituent that substitutes a hetero atom with a carbon atom constituting the aromatic ring. Examples of the substituent for substituting a hydrogen atom include a hydroxyl group, an amino group, an alkoxy group, a halogen atom, a carboxyl group, a cyano group, and the like, and a hydroxyl group or an amino group is preferred. Examples of the hetero atom that substitutes the aromatic ring include a nitrogen atom, an oxygen atom, a sulfur atom, and the like, and a nitrogen atom is preferred.
Y 3較佳為可具有取代基之脂肪族烴基,更佳為可具有取代基之飽和脂肪族烴基,進而較佳為不具有取代基之飽和脂肪族烴基,特佳為直鏈狀或支鏈狀之烷基。上述烷基之碳原子數較佳為1~10,更佳為1~6,進而較佳為1~4,特佳為1~3、或者1或2。 Y 3 is preferably an aliphatic hydrocarbon group which may have a substituent, more preferably a saturated aliphatic hydrocarbon group which may have a substituent, further preferably a saturated aliphatic hydrocarbon group which does not have a substituent, and is particularly preferably linear or branched. The alkyl group. The number of carbon atoms of the above-mentioned alkyl group is preferably 1 to 10, more preferably 1 to 6, further preferably 1 to 4, particularly preferably 1 to 3, or 1 or 2.
通式(u1-1)中,X 1為包含能吸收波長300~800 nm之範圍內之至少一部分光之結構(結構X)之n1價基。作為X 1,例如,可例舉含有包含具有芳香性之縮合環骨架、二苯甲酮骨架、二苯甲醯基甲烷骨架、二苯甲醯基苯骨架、或苯并三唑骨架之基之n價基。 通式(u1-2)中,X 2為包含能吸收波長300~800 nm之範圍內之至少一部分光之結構(結構X)之1價基。作為X 2,例如,可例舉含有包含具有芳香性之縮合環骨架、二苯甲酮骨架、二苯甲醯基甲烷骨架、二苯甲醯基苯骨架、或苯并三唑骨架之基之1價基。 In the general formula (u1-1), X 1 is the n 1 valence group containing a structure (structure X) that can absorb at least part of the light in the range of 300 to 800 nm wavelength. Examples of X 1 include groups containing an aromatic condensed ring skeleton, a benzophenone skeleton, a benzoylmethane skeleton, a benzoylbenzene skeleton, or a benzotriazole skeleton. n valence base. In the general formula (u1-2), X 2 is a valence group containing a structure (structure X) capable of absorbing at least part of the light in the wavelength range of 300 to 800 nm. Examples of X 2 include groups containing an aromatic condensed ring skeleton, a benzophenone skeleton, a benzoylmethane skeleton, a benzoylbenzene skeleton, or a benzotriazole skeleton. 1 price base.
通式(u1-1)及式(u1-2)中,n1及n2各自獨立地為2~4之整數。n1及n2較佳為2~3,更佳為2。In the general formula (u1-1) and the formula (u1-2), n1 and n2 are each independently an integer of 2 to 4. n1 and n2 are preferably 2 to 3, more preferably 2.
作為(U1)成分,例如,較佳為下述通式(u1-1-1)或(u1-2-1)所表示之化合物。As the component (U1), for example, a compound represented by the following general formula (u1-1-1) or (u1-2-1) is preferred.
[化5] [式(u1-1-1)中,X 1為包含能吸收波長300~800 nm之範圍內之至少一部分光之結構的n1價基;Y 11為2價連結基;L 11為直鏈狀或支鏈狀之烷基;n1為2~4之整數。複數個Y 11彼此可相同亦可不同。複數個L 11彼此可相同亦可不同。 式(u1-2-1)中,X 2為包含能吸收波長300~800 nm之範圍內之至少一部分光之結構的1價基;Y 21為3價連結基;L 21為直鏈狀或支鏈狀之烷基;Y 3為n2價連結基;n2為2~4之整數。複數個X 2彼此可相同亦可不同。複數個Y 21彼此可相同亦可不同。複數個L 21彼此可相同亦可不同] [Chemistry 5] [In Formula ( u1-1-1 ) , Or branched alkyl group; n1 is an integer from 2 to 4. A plurality of Y 11 may be the same as or different from each other. The plural L 11 may be the same as or different from each other. In the formula (u1-2-1), X 2 is a univalent group containing a structure that can absorb at least part of the light in the wavelength range of 300 to 800 nm; Y 21 is a trivalent linking group; L 21 is a linear or Branched alkyl group; Y 3 is an n2-valent linking group; n2 is an integer from 2 to 4. A plurality of X 2 may be the same as or different from each other. The plural Y 21 may be the same as or different from each other. Plural L 21 may be the same or different from each other]
上述式(u1-1-1)中,Y 11為2價連結基。上述式(u1-2-1)中,Y 21為3價連結基。作為上述2價或3價連結基,可例舉與作為上述Y 1及Y 2中之2價或3價連結基而例舉者同樣之連結基。 In the above formula (u1-1-1), Y 11 is a divalent linking group. In the above formula (u1-2-1), Y 21 is a trivalent linking group. Examples of the divalent or trivalent linking group include the same linking groups as those exemplified as the divalent or trivalent linking group in Y 1 and Y 2 .
上述式(u1-1-1)及(u1-2-1)中,L 11及L 21各自獨立地為直鏈狀或支鏈狀之烷基。上述烷基之碳原子數較佳為1~10,更佳為碳原子數1~6,進而較佳為碳原子數1~5。 In the above formulas (u1-1-1) and (u1-2-1), L 11 and L 21 are each independently a linear or branched alkyl group. The alkyl group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, and even more preferably 1 to 5 carbon atoms.
通式(u1-1-1)及(u1-2-1)中之X 1、X 2、n1、n2、及Y 3與上述式(u1-1)及(u1-2)中之X 1、X 2、n1、n2、及Y 3分別相同。 X 1 , X 2 , n1, n2, and Y 3 in the general formulas (u1-1-1) and (u1-2-1) are the same as X 1 in the above formulas (u1-1) and (u1-2) , X 2 , n1, n2, and Y 3 are respectively the same.
作為含有具有芳香性之縮合環骨架之X 1或X 2,可例舉下述通式(Xa-1)或(Xa-2)所表示者。於X 1之情形時,通式(Xa-1)或(Xa-2)中之n為2~4之整數,較佳為2。於X 2之情形時,通式(Xa-1)或(Xa-2)中之n為1。 Examples of X 1 or X 2 containing an aromatic condensed ring skeleton include those represented by the following general formula (Xa-1) or (Xa-2). In the case of X 1 , n in the general formula (Xa-1) or (Xa-2) is an integer from 2 to 4, preferably 2. In the case of X 2 , n in the general formula (Xa-1) or (Xa-2) is 1.
[化6] [式中,L a1及L a2各自獨立地表示單鍵或2價連結基,R a1及R a2各自獨立地表示取代基。n表示1~4之整數。m表示0~9之整數,m+n≤10。n為2以上之情形時,存在有複數個之L a1及L a2彼此可相同亦可不同。m為2以上之情形時,存在有複數個之R a1及R a2彼此可相同亦可不同。*為鍵結鍵] [Chemical 6] [In the formula, L a1 and L a2 each independently represent a single bond or a divalent linking group, and R a1 and R a2 each independently represent a substituent. n represents an integer from 1 to 4. m represents an integer from 0 to 9, m+n≤10. When n is 2 or more, there are plural L a1 and L a2 which may be the same or different from each other. When m is 2 or more, there are plural R a1 and R a2 which may be the same or different from each other. * is the bonding key]
通式(Xa-1)及(Xa-2)中,L a1及L a2各自獨立地表示單鍵或2價連結基。作為上述2價連結基,可例舉可具有取代基之烴基。上述烴基可為脂肪族烴基,亦可為芳香族烴基。 上述脂肪族烴基可飽和亦可不飽和,但較佳為飽和。上述脂肪族烴基可為直鏈狀,亦可為支鏈狀,亦可於結構中包含環。作為直鏈狀脂肪族烴基,較佳為碳原子數1~10,更佳為碳原子數1~6,進而較佳為碳原子數1~3。作為支鏈狀脂肪族烴基,較佳為碳原子數2~10,更佳為碳原子數2~6,進而較佳為碳原子數2或3。作為包含環結構之脂肪族烴基,較佳為碳原子數3~10,更佳為碳原子數3~6。 上述脂肪族烴基可具有取代基。上述取代基可為對氫原子進行取代之取代基,亦可為對碳鏈中之亞甲基(-CH 2-)進行取代之取代基。作為對氫原子進行取代之取代基,例如,可例舉羥基、胺基、烷氧基、鹵素原子、羧基、氰基等,較佳為羥基或胺基。作為對碳鏈中之亞甲基(-CH 2-)進行取代之取代基,例如,可例舉-O-、-CO-、-NH-、-COO-、-CONH-等。 In the general formulas (Xa-1) and (Xa-2), L a1 and L a2 each independently represent a single bond or a divalent linking group. Examples of the divalent linking group include a hydrocarbon group which may have a substituent. The above-mentioned hydrocarbon group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. The aliphatic hydrocarbon group mentioned above may be saturated or unsaturated, but is preferably saturated. The above-mentioned aliphatic hydrocarbon group may be linear or branched, or may include a ring in the structure. The linear aliphatic hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, and even more preferably has 1 to 3 carbon atoms. The branched aliphatic hydrocarbon group preferably has 2 to 10 carbon atoms, more preferably 2 to 6 carbon atoms, and even more preferably 2 or 3 carbon atoms. The aliphatic hydrocarbon group containing a ring structure preferably has 3 to 10 carbon atoms, more preferably 3 to 6 carbon atoms. The aliphatic hydrocarbon group mentioned above may have a substituent. The above-mentioned substituent may be a substituent that substitutes a hydrogen atom or a substituent that substitutes a methylene group (-CH 2 -) in the carbon chain. Examples of the substituent for substituting a hydrogen atom include a hydroxyl group, an amino group, an alkoxy group, a halogen atom, a carboxyl group, a cyano group, and the like, and a hydroxyl group or an amino group is preferred. Examples of the substituent for substituting the methylene group (-CH 2 -) in the carbon chain include -O-, -CO-, -NH-, -COO-, -CONH-, and the like.
上述芳香族烴基為包含至少1個芳香環之烴基。上述芳香族烴基所包含之芳香環可為單環,亦可為多環。上述芳香環可為芳香族烴環,亦可為芳香族雜環。芳香族烴基所包含之芳香環數沒有特別限定,但較佳為1~3個,更佳為1個或2個。芳香族烴基可為芳香環與脂肪族烴基連結而成之基。 上述芳香族烴基可具有取代基。上述取代基可為對芳香環之氫原子進行取代之取代基,亦可為用雜原子對芳香環之構成環之碳原子進行取代之取代基。作為對氫原子進行取代之取代基,例如,可例舉羥基、胺基、烷氧基、鹵素原子、羧基、氰基等,較佳為羥基或胺基。作為對芳香環之環進行取代之雜原子,可例舉氮原子、氧原子、硫原子等,較佳為氮原子。 The above-mentioned aromatic hydrocarbon group is a hydrocarbon group containing at least one aromatic ring. The aromatic ring contained in the above-mentioned aromatic hydrocarbon group may be a single ring or a polycyclic ring. The above-mentioned aromatic ring may be an aromatic hydrocarbon ring or an aromatic heterocyclic ring. The number of aromatic rings contained in the aromatic hydrocarbon group is not particularly limited, but is preferably 1 to 3, more preferably 1 or 2. The aromatic hydrocarbon group may be a group in which an aromatic ring and an aliphatic hydrocarbon group are connected. The above aromatic hydrocarbon group may have a substituent. The above substituent may be a substituent that substitutes a hydrogen atom of the aromatic ring, or a substituent that substitutes a hetero atom with a carbon atom constituting the aromatic ring. Examples of the substituent for substituting a hydrogen atom include a hydroxyl group, an amino group, an alkoxy group, a halogen atom, a carboxyl group, a cyano group, and the like, and a hydroxyl group or an amino group is preferred. Examples of the hetero atom that substitutes the aromatic ring include a nitrogen atom, an oxygen atom, a sulfur atom, and the like, and a nitrogen atom is preferred.
通式(Xa-1)及(Xa-2)中,R a1及R a2各自獨立地表示取代基。作為R a1及R a2,例如,可例舉烷基、羥基、胺基、烷氧基、鹵素原子、羧基、氰基、腈基、腈烷基、脂環式基等。作為上述烷基、烷氧基、腈烷基,較佳為碳原子數1~5,更佳為碳原子數1~3。作為上述脂環式基,較佳為碳原子數1~6。作為腈烷基,例如,可例舉丙二醯腈基。脂環式基可為脂環式烴環,亦可為脂環式雜環。作為脂環式雜環,可例舉包含硫原子、氮原子、或氧原子之脂環式雜環。作為脂環式雜環之具體例,可例舉二硫戊環。 In the general formulas (Xa-1) and (Xa-2), R a1 and R a2 each independently represent a substituent. Examples of R a1 and R a2 include an alkyl group, a hydroxyl group, an amino group, an alkoxy group, a halogen atom, a carboxyl group, a cyano group, a nitrile group, a nitrile alkyl group, an alicyclic group, and the like. The alkyl group, alkoxy group and nitrilealkyl group preferably have 1 to 5 carbon atoms, more preferably 1 to 3 carbon atoms. The alicyclic group preferably has 1 to 6 carbon atoms. Examples of the nitrile alkyl group include a malononitrile group. The alicyclic group may be an alicyclic hydrocarbon ring or an alicyclic heterocyclic ring. Examples of the alicyclic heterocyclic ring include an alicyclic heterocyclic ring containing a sulfur atom, a nitrogen atom, or an oxygen atom. Specific examples of alicyclic heterocyclic rings include dithiolane.
通式(Xa-1)及(Xa-2)中,m表示0~9之整數。m較佳為0~6,更佳為0~5,進而較佳為0~3,特佳為0~2。 m及n具有m+n≤10之關係。 In general formulas (Xa-1) and (Xa-2), m represents an integer from 0 to 9. m is preferably 0 to 6, more preferably 0 to 5, further preferably 0 to 3, particularly preferably 0 to 2. m and n have the relationship of m+n≤10.
作為具有二苯甲酮骨架之X 1或X 2,可例舉下述通式(Xb)所表示者。於X 1之情形時,通式(Xb)中之p+q為2~4之整數,較佳為2。於X 2之情形時,通式(Xb)中之p+q為1。 Examples of X 1 or X 2 having a benzophenone skeleton include those represented by the following general formula (Xb). In the case of X 1 , p+q in the general formula (Xb) is an integer from 2 to 4, preferably 2. In the case of X 2 , p+q in the general formula (Xb) is 1.
[化7] [式中,L b1及L b2各自獨立地表示單鍵或2價連結基,R b1及R b2各自獨立地表示取代基。p及q各自獨立地表示0~4之整數。m1及m2各自獨立地表示0~5之整數,m1+p≤5,m2+q≤5。p為2以上之情形時,存在有複數個之L b1彼此可相同亦可不同。q為2以上之情形時,存在有複數個之L b2彼此可相同亦可不同。m1為2以上之情形時,存在有複數個之R b1彼此可相同亦可不同。m2為2以上之情形時,存在有複數個之R b2彼此可相同亦可不同。*為鍵結鍵] [Chemical 7] [In the formula, L b1 and L b2 each independently represent a single bond or a divalent linking group, and R b1 and R b2 each independently represent a substituent. p and q each independently represent an integer from 0 to 4. m1 and m2 each independently represent an integer from 0 to 5, m1+p≤5, m2+q≤5. When p is 2 or more, there are a plurality of L b1 which may be the same or different from each other. When q is 2 or more, there are plural L b2 which may be the same or different from each other. When m1 is 2 or more, there are a plurality of R b1 which may be the same or different from each other. When m2 is 2 or more, there are a plurality of R b2 which may be the same or different from each other. * is the bonding key]
通式(Xb)中,L b1及L b2各自獨立地表示單鍵或2價連結基。作為上述2價連結基,可例舉與上述式(Xa-1)及(Xa-2)中之L a1及L a2中所例舉者同樣之連結基。L b1及L b2較佳為單鍵或可具有取代基之脂肪族烴基,較佳為單鍵或可具有取代基之烷基。作為可具有取代基之烷基,較佳為碳原子數1~5,更佳為碳原子數1~3。作為可具有取代基之烷基,較佳為烷基、或構成碳鏈之亞甲基(-CH 2-)之一部分被-O-、-CO-、-NH-、-COO-、-CONH-取代之烷基。 In the general formula (Xb), L b1 and L b2 each independently represent a single bond or a divalent linking group. Examples of the divalent connecting group include the same connecting groups as those exemplified for L a1 and L a2 in the above formulas (Xa-1) and (Xa-2). L b1 and L b2 are preferably a single bond or an aliphatic hydrocarbon group which may have a substituent, and preferably a single bond or an alkyl group which may have a substituent. The alkyl group which may have a substituent preferably has 1 to 5 carbon atoms, and more preferably has 1 to 3 carbon atoms. The alkyl group which may have a substituent is preferably an alkyl group, or a part of the methylene group (-CH 2 -) constituting the carbon chain is substituted by -O-, -CO-, -NH-, -COO-, -CONH -Substituted alkyl.
通式(Xb)中,R b1及R b2各自獨立地表示取代基。作為R b1及R b2,可例舉與上述式(Xa-1)及(Xa-2)中之R a1及R a2中所例舉者同樣之取代基。 In the general formula (Xb), R b1 and R b2 each independently represent a substituent. Examples of R b1 and R b2 include the same substituents as those exemplified for R a1 and R a2 in the above formulas (Xa-1) and (Xa-2).
通式(Xb)中,m1及m2各自獨立地表示0~5之整數,m1+p≤5,m2+q≤5。m1及m2較佳為0~3,更佳為0~2,進而較佳為0或1。In the general formula (Xb), m1 and m2 each independently represent an integer from 0 to 5, m1+p≤5, m2+q≤5. m1 and m2 are preferably 0 to 3, more preferably 0 to 2, and still more preferably 0 or 1.
作為具有二苯甲醯基甲烷骨架之X 1或X 2,可例舉下述通式(Xc)所表示者。於X 1之情形時,通式(Xc)中之p+q為2~4之整數,較佳為2。於X 2之情形時,通式(Xc)中之p+q為1。 Examples of X 1 or X 2 having a benzylmethane skeleton include those represented by the following general formula (Xc). In the case of X 1 , p+q in the general formula (Xc) is an integer from 2 to 4, preferably 2. In the case of X 2 , p+q in the general formula (Xc) is 1.
[化8] [式中,L c1及L c2各自獨立地表示單鍵或2價連結基,R c1及R c2各自獨立地表示取代基。p及q各自獨立地表示0~4之整數。m1及m2各自獨立地表示0~5之整數,m1+p≤5,m2+q≤5。p為2以上之情形時,存在有複數個之L c1彼此可相同亦可不同。q為2以上之情形時,存在有複數個之L c2彼此可相同亦可不同。m1為2以上之情形時,存在有複數個之R c1彼此可相同亦可不同。m2為2以上之情形時,存在有複數個之R c2彼此可相同亦可不同。*為鍵結鍵] [Chemical 8] [In the formula, L c1 and L c2 each independently represent a single bond or a divalent linking group, and R c1 and R c2 each independently represent a substituent. p and q each independently represent an integer from 0 to 4. m1 and m2 each independently represent an integer from 0 to 5, m1+p≤5, m2+q≤5. When p is 2 or more, there are a plurality of L c1 which may be the same or different from each other. When q is 2 or more, there are a plurality of L c2 which may be the same or different from each other. When m1 is 2 or more, there are a plurality of R c1 which may be the same or different from each other. When m2 is 2 or more, there are a plurality of R c2 which may be the same or different from each other. * is the bonding key]
通式(Xc)中,L c1及L c2各自獨立地表示單鍵或2價連結基。作為上述2價連結基,可例舉與上述式(Xa-1)及(Xa-2)中之L a1及L a2中所例舉者同樣之連結基。L c1及L c2較佳為單鍵或可具有取代基之脂肪族烴基,較佳為單鍵或可具有取代基之烷基。作為可具有取代基之烷基,較佳為碳原子數1~5,更佳為碳原子數1~3。作為可具有取代基之烷基,較佳為烷基、或構成碳鏈之亞甲基(-CH 2-)之一部分被-O-、-CO-、-NH-、-COO-、-CONH-取代之烷基。 In the general formula (Xc), L c1 and L c2 each independently represent a single bond or a divalent linking group. Examples of the divalent connecting group include the same connecting groups as those exemplified for L a1 and L a2 in the above formulas (Xa-1) and (Xa-2). L c1 and L c2 are preferably a single bond or an aliphatic hydrocarbon group which may have a substituent, and preferably a single bond or an alkyl group which may have a substituent. The alkyl group which may have a substituent preferably has 1 to 5 carbon atoms, and more preferably has 1 to 3 carbon atoms. The alkyl group which may have a substituent is preferably an alkyl group, or a part of the methylene group (-CH 2 -) constituting the carbon chain is substituted by -O-, -CO-, -NH-, -COO-, -CONH -Substituted alkyl.
通式(Xc)中,R c1及R c2各自獨立地表示取代基。作為R c1及R c2,可例舉與上述式(Xa-1)及(Xa-2)中之R a1及R a2中所例舉者同樣之取代基。 In the general formula (Xc), R c1 and R c2 each independently represent a substituent. Examples of R c1 and R c2 include the same substituents as those exemplified for R a1 and R a2 in the above formulas (Xa-1) and (Xa-2).
通式(Xc)中,m1及m2各自獨立地表示0~5之整數,m1+p≤5,m2+q≤5。m1及m2較佳為0~3,更佳為0~2,進而較佳為0或1。In the general formula (Xc), m1 and m2 each independently represent an integer from 0 to 5, m1+p≤5, m2+q≤5. m1 and m2 are preferably 0 to 3, more preferably 0 to 2, and still more preferably 0 or 1.
作為具有二苯甲醯基苯骨架之X 1或X 2,可例舉下述通式(Xd)所表示之結構。於X 1之情形時,通式(Xd)中之p+q+r為2~4之整數,較佳為2。於X 2之情形時,通式(Xd)中之p+q+r為1。 Examples of X 1 or X 2 having a dibenzoylbenzene skeleton include a structure represented by the following general formula (Xd). In the case of X 1 , p+q+r in the general formula (Xd) is an integer from 2 to 4, preferably 2. In the case of X 2 , p+q+r in the general formula (Xd) is 1.
[化9] [式中,L d1、L d2及L d3各自獨立地表示單鍵或2價連結基,R d1、R d2及R d3各自獨立地表示取代基。p、q及r各自獨立地表示0~4之整數。m1及m2各自獨立地表示0~5之整數,m3表示1~4之整數,m1+p≤5,m2+q≤5,m3+r=4。p為2以上之情形時,存在有複數個之L d1彼此可相同亦可不同。q為2以上之情形時,存在有複數個之L d2彼此可相同亦可不同。r為2以上之情形時,存在有複數個之L d3彼此可相同亦可不同。m1為2以上之情形時,存在有複數個之R d1彼此可相同亦可不同。m2為2以上之情形時,存在有複數個之R d2彼此可相同亦可不同。m3為2以上之情形時,存在有複數個之R d3彼此可相同亦可不同。*為鍵結鍵] [Chemical 9] [In the formula, L d1 , L d2 and L d3 each independently represent a single bond or a divalent linking group, and R d1 , R d2 and R d3 each independently represent a substituent. p, q and r each independently represent an integer from 0 to 4. m1 and m2 each independently represent an integer from 0 to 5, m3 represents an integer from 1 to 4, m1+p≤5, m2+q≤5, m3+r=4. When p is 2 or more, there are a plurality of L d1 which may be the same or different from each other. When q is 2 or more, there are a plurality of L d2 which may be the same or different from each other. When r is 2 or more, there are a plurality of L d3 which may be the same or different from each other. When m1 is 2 or more, there are a plurality of R d1 which may be the same or different from each other. When m2 is 2 or more, there are a plurality of R d2 which may be the same or different from each other. When m3 is 2 or more, there are a plurality of R d3 which may be the same or different from each other. * is the bonding key]
通式(Xd)中,L d1、L d2及L d3各自獨立地表示單鍵或2價連結基。作為上述2價連結基,可例舉與上述式(Xa-1)及(Xa-2)中之L a1及L a2中所例舉者同樣之2價連結基。L d1、L d2及L d3較佳為單鍵或可具有取代基之脂肪族烴基,更佳為單鍵或可具有取代基之烷基。作為可具有取代基之烷基,較佳為碳原子數1~5,更佳為碳原子數1~3。作為可具有取代基之烷基,較佳為烷基、或構成碳鏈之亞甲基(-CH 2-)之一部分被-O-、-CO-、-NH-、-COO-、-CONH-取代之烷基。 In the general formula (Xd), L d1 , L d2 and L d3 each independently represent a single bond or a divalent linking group. Examples of the divalent linking group include the same divalent linking groups as those exemplified for L a1 and L a2 in the above formulas (Xa-1) and (Xa-2). L d1 , L d2 and L d3 are preferably a single bond or an aliphatic hydrocarbon group which may have a substituent, and more preferably a single bond or an alkyl group which may have a substituent. The alkyl group which may have a substituent preferably has 1 to 5 carbon atoms, and more preferably has 1 to 3 carbon atoms. The alkyl group which may have a substituent is preferably an alkyl group, or a part of the methylene group (-CH 2 -) constituting the carbon chain is substituted by -O-, -CO-, -NH-, -COO-, -CONH -Substituted alkyl.
通式(Xd)中,R d1、R d2及R d3各自獨立地表示取代基。作為R d1、R d2及R d3,可例舉與上述式(Xa-1)及(Xa-2)中之R a1及R a2中所例舉者同樣之取代基。 In the general formula (Xd), R d1 , R d2 and R d3 each independently represent a substituent. Examples of R d1 , R d2 and R d3 include the same substituents as those exemplified for R a1 and R a2 in the above formulas (Xa-1) and (Xa-2).
通式(Xd)中,m1及m2各自獨立地表示0~5之整數,m3表示1~4之整數,m1+p≤5,m2+q≤5,m3+r=4。m1、m2及m3較佳為0~3,更佳為0~2,進而較佳為0或1。In the general formula (Xd), m1 and m2 each independently represent an integer from 0 to 5, m3 represents an integer from 1 to 4, m1+p≤5, m2+q≤5, and m3+r=4. m1, m2 and m3 are preferably 0 to 3, more preferably 0 to 2, and still more preferably 0 or 1.
作為具有苯并三唑骨架之X 1或X 2,可例舉下述通式(Xe)所表示者。於X 1之情形時,通式(Xe)中之n為2~4之整數,較佳為2。於X 2之情形時,通式(Xe)中之n為1。 Examples of X 1 or X 2 having a benzotriazole skeleton include those represented by the following general formula (Xe). In the case of X 1 , n in the general formula (Xe) is an integer from 2 to 4, preferably 2. In the case of X 2 , n in the general formula (Xe) is 1.
[化10] [式中,L e表示單鍵或2價連結基,R e表示取代基。n表示0~4之整數。m表示0~4之整數,m+n≤5。n為2以上之情形時,存在有複數個之L e彼此可相同亦可不同。m為2以上之情形時,存在有複數個之R e彼此可相同亦可不同。*為鍵結鍵] [Chemical 10] [In the formula, L e represents a single bond or a divalent linking group, and R e represents a substituent. n represents an integer from 0 to 4. m represents an integer from 0 to 4, m+n≤5. When n is 2 or more, there are plural L e which may be the same or different from each other. When m is 2 or more, there are plural R e which may be the same or different from each other. * is the bonding key]
通式(Xe)中,L e表示單鍵或2價連結基。作為上述2價連結基,可例舉與上述式(Xa-1)及(Xa-2)中之L a1及L a2中所例舉者同樣之連結基。L e較佳為單鍵或可具有取代基之烴基,較佳為單鍵、可具有取代基之烷基、或苯環之1個氫原子經烷基取代而得到之基。作為可具有取代基之烷基及與苯環鍵結之烷基,較佳為碳原子數1~5,更佳為碳原子數1~3。 In the general formula (Xe), L e represents a single bond or a divalent linking group. Examples of the divalent connecting group include the same connecting groups as those exemplified for L a1 and L a2 in the above formulas (Xa-1) and (Xa-2). L e is preferably a single bond or a hydrocarbon group that may have a substituent, preferably a single bond, an alkyl group that may have a substituent, or a group in which one hydrogen atom of the benzene ring is substituted with an alkyl group. As the alkyl group which may have a substituent and the alkyl group bonded to a benzene ring, it is preferable that it has 1-5 carbon atoms, and it is more preferable that it has 1-3 carbon atoms.
通式(Xe)中,R e表示取代基。作為R e,可例舉與上述式(Xa-1)及(Xa-2)中之R a1及R a2中所例舉者同樣之取代基。 In the general formula (Xe), R e represents a substituent. As R e , the same substituents as those exemplified for R a1 and R a2 in the above formulas (Xa-1) and (Xa-2) can be exemplified.
通式(Xe)中,m表示0~4之整數。m較佳為0~3,更佳為0~2,進而較佳為0或1。 m及n具有m+n≤5之關係。 In the general formula (Xe), m represents an integer from 0 to 4. m is preferably 0 to 3, more preferably 0 to 2, and still more preferably 0 or 1. m and n have the relationship m+n≤5.
以下示出(U1)成分之具體例,但並不限於該等。Specific examples of the component (U1) are shown below, but they are not limited to these.
[化11] [Chemical 11]
(U1)成分可單獨使用1種,亦可併用2種以上。 作為(U1)成分相對於用於合成(P1)成分之全部單體之比率,例如,相對於全部單體之質量(100質量%),可例舉10質量%以上、15質量%以上、或20質量%以上。若(U1)成分之比率為上述較佳之下限值以上,則分離性能良好。作為(U1)成分相對於用於合成(P1)成分之全部單體之比率,例如,相對於全部單體之質量(100質量%),為70質量%以下、65質量%以下、60質量%以下、55質量%以下、或50質量%以下。若(U1)成分之比率為上述較佳之上限值以下,則容易取得與其他單體之均衡性。 (U1) The component may be used individually by 1 type, or may be used in combination of 2 or more types. The ratio of the component (U1) to all the monomers used to synthesize the component (P1) can be, for example, 10 mass% or more, 15 mass% or more, or 100 mass% or more based on the mass of all the monomers (100 mass%). More than 20% by mass. If the ratio of the component (U1) is equal to or higher than the above-mentioned preferable lower limit, the separation performance will be good. The ratio of component (U1) to all monomers used to synthesize component (P1) is, for example, 70 mass% or less, 65 mass% or less, or 60 mass% relative to the mass of all monomers (100 mass%). or less, 55 mass% or less, or 50 mass% or less. If the ratio of the component (U1) is less than the above-mentioned preferable upper limit, balance with other monomers can be easily achieved.
(P1)成分可藉由下述方式合成:將(I)成分、(O)成分、及(U1)成分混合,按照公知之聚胺酯樹脂之合成方法進行共聚。(I)成分及(O)成分之共聚較佳為於鉍觸媒等公知之胺基甲酸酯化觸媒之存在下進行。又,為了避免(O1)成分中之聚合性碳-碳不飽和鍵之聚合,可以於反應系統中添加聚合抑制劑。(O)成分較佳為包含(O1)成分及(O2)成分。(U1)成分較佳為作為(O)成分而添加,更佳為作為(O2)成分而添加。The component (P1) can be synthesized by mixing the component (I), the component (O), and the component (U1), and copolymerizing them according to a known synthesis method of polyurethane resin. The copolymerization of component (I) and component (O) is preferably carried out in the presence of a known urethanation catalyst such as a bismuth catalyst. In addition, in order to avoid the polymerization of the polymerizable carbon-carbon unsaturated bond in the component (O1), a polymerization inhibitor may be added to the reaction system. (O) component preferably contains (O1) component and (O2) component. The component (U1) is preferably added as the component (O), more preferably added as the component (O2).
(P1)成分可單獨使用1種,亦可併用2種以上。 至於本實施方式之接著劑組合物中之(P1)成分之含量,只要為能塗佈於支持體等之濃度即可,沒有特別限定。作為接著劑組合物中之(P1)成分之含量,相對於接著劑組合物之總量(100質量%),較佳為10~60質量%,更佳為20~60質量%,進而較佳為30~60質量%。 (P1) A component may be used individually by 1 type, or 2 or more types may be used together. The content of the component (P1) in the adhesive composition of this embodiment is not particularly limited as long as it is a concentration that can be applied to a support or the like. The content of the component (P1) in the adhesive composition is preferably 10 to 60 mass%, more preferably 20 to 60 mass%, and still more preferably 10 to 60 mass% relative to the total amount of the adhesive composition (100 mass%). It is 30~60% by mass.
≪聚合起始劑:(A)成分≫ 本實施方式之接著劑組合物含有聚合起始劑(以下,亦稱為(A)成分)。聚合起始劑係指具有促進聚合反應之功能之成分。作為(A)成分,可例舉熱聚合起始劑、光聚合起始劑等。 ≪Polymerization initiator: (A) component≫ The adhesive composition of this embodiment contains a polymerization initiator (hereinafter, also referred to as (A) component). Polymerization initiator refers to a component that has the function of promoting polymerization reaction. Examples of the component (A) include thermal polymerization initiators, photopolymerization initiators, and the like.
作為熱聚合起始劑,例如可例舉過氧化物、偶氮系聚合起始劑等。Examples of the thermal polymerization initiator include peroxides, azo polymerization initiators, and the like.
作為熱聚合起始劑中之過氧化物,例如,可例舉過氧化酮、過氧縮酮、過氧化氫、過氧化二烷基、過氧酯等。作為此種過氧化物,具體而言,可例舉過氧化乙醯、過氧化二異丙苯、過氧化第三丁基、過氧化第三丁基異丙苯基、過氧化丙醯、過氧化苯甲醯(BPO)、過氧化2-氯苯甲醯、過氧化3-氯苯甲醯、過氧化4-氯苯甲醯、過氧化2,4-二氯苯甲醯、過氧化4-溴甲基苯甲醯、過氧化月桂醯、過硫酸鉀、過氧化碳酸二異丙酯、氫過氧化四氫萘、1-苯基-2-甲基丙基-1-過氧化氫、過氧化三苯基乙酸第三丁酯、第三丁基過氧化氫、過氧化甲酸第三丁酯、過氧化乙酸第三丁酯、過氧化苯甲酸第三丁酯、過氧化苯基乙酸第三丁酯、過氧化4-甲氧基乙酸第三丁酯、過氧化N-(3-甲苯甲醯基)胺基甲酸第三丁酯等。Examples of the peroxide in the thermal polymerization initiator include ketone peroxide, peroxyketal, hydrogen peroxide, dialkyl peroxide, and peroxyester. Specific examples of such peroxides include acetyl peroxide, dicumyl peroxide, tert-butyl peroxide, tert-butylcumyl peroxide, propyl peroxide, and peroxide. Benzyl oxide (BPO), 2-chlorobenzoyl peroxide, 3-chlorobenzoyl peroxide, 4-chlorobenzoyl peroxide, 2,4-dichlorobenzoyl peroxide, 4-chlorobenzoyl peroxide -Bromomethylbenzoyl peroxide, lauryl peroxide, potassium persulfate, diisopropyl percarbonate, tetralin hydroperoxide, 1-phenyl-2-methylpropyl-1-hydroperoxide, tert-butyl peroxytriphenylacetate, tert-butyl hydroperoxide, tert-butyl peroxyformate, tert-butyl peracetate, tert-butyl peroxybenzoate, tert-butyl peroxyphenylacetate Tributyl ester, tert-butyl peroxy 4-methoxyacetate, tert-butyl peroxy N-(3-toluyl)carbamate, etc.
上述過氧化物中,例如,可使用日本油脂股份有限公司製之商品名「Percumyl(註冊商標)」、商品名「Perbutyl(註冊商標)」、商品名「Peroyl(註冊商標)」及商品名「Perocta(註冊商標)」等市售品。Among the above-mentioned peroxides, for example, the trade names "Percumyl (registered trademark)", the trade name "Perbutyl (registered trademark)", the trade name "Peroyl (registered trademark)" and the trade name "" manufactured by Nippon Oils and Fats Co., Ltd. can be used Perocta (registered trademark)" and other commercial products.
作為熱聚合起始劑中之偶氮系聚合起始劑,例如,可例舉:2,2'-偶氮雙丙烷、2,2'-二氯-2,2'-偶氮雙丙烷、1,1'-偶氮(甲基乙基)二乙酸酯、2,2'-偶氮雙(2-脒基丙烷)鹽酸鹽、2,2'-偶氮雙(2-胺基丙烷)硝酸鹽、2,2'-偶氮雙異丁烷、2,2'-偶氮雙異丁基醯胺、2,2'-偶氮二異丁腈、2,2'-偶氮雙-2-甲基丙酸甲酯、2,2'-二氯-2,2'-偶氮雙丁烷、2,2'-偶氮雙-2-甲基丁腈、2,2'-偶氮雙異丁酸二甲酯、1,1'-偶氮雙(1-甲基丁腈-3-磺酸鈉)、2-(4-甲基苯基偶氮)-2-甲基丙二腈4,4'-偶氮雙-4-氰基戊酸、3,5-二羥基甲基苯基偶氮-2-烯丙基丙二腈、2,2'-偶氮雙-2-甲基戊腈、4,4'-偶氮雙-4-氰基戊酸二甲酯、2,2'-偶氮雙-2,4-二甲基戊腈、1,1'-偶氮雙環己腈、2,2'-偶氮雙-2-丙基丁腈、1,1'-偶氮雙環己腈、2,2'-偶氮雙-2-丙基丁腈、1,1'-偶氮雙-1-氯苯基乙烷、1,1'-偶氮雙-1-環己烷甲腈、1,1'-偶氮雙-1-環庚腈、1,1'-偶氮雙-1-苯基乙烷、1,1'-偶氮雙異丙苯、4-硝基苯基偶氮苄基氰基乙酸乙酯、苯基偶氮二苯基甲烷、苯基偶氮三苯基甲烷、4-硝基苯基偶氮三苯基甲烷、1,1'-偶氮雙-1,2-二苯基乙烷、聚(雙酚A-4,4'-偶氮雙-4-氰基戊酸酯)、聚(四乙二醇-2,2'-偶氮雙異丁酸酯)等。Examples of the azo polymerization initiator among the thermal polymerization initiators include: 2,2'-azobispropane, 2,2'-dichloro-2,2'-azobispropane, 1,1'-Azo(methylethyl)diacetate, 2,2'-Azobis(2-amidinopropane) hydrochloride, 2,2'-Azobis(2-amino) Propane) nitrate, 2,2'-azobisisobutane, 2,2'-azobisisobutylamide, 2,2'-azobisisobutyronitrile, 2,2'-azo Methyl bis-2-methylpropionate, 2,2'-dichloro-2,2'-azobisbutane, 2,2'-azobis-2-methylbutyronitrile, 2,2' -Dimethylazobisisobutyrate, 1,1'-azobis(1-methylbutyronitrile-3-sodium sulfonate), 2-(4-methylphenylazo)-2-methyl 4,4'-Azobis-4-cyanovaleric acid, 3,5-dihydroxymethylphenylazo-2-allylmalononitrile, 2,2'-azobis -2-Methylvaleronitrile, 4,4'-azobis-4-cyanovaleric acid dimethyl ester, 2,2'-azobis-2,4-dimethylvaleronitrile, 1,1' -Azobiscyclohexanenitrile, 2,2'-Azobis-2-propylbutanenitrile, 1,1'-Azobiscyclohexanenitrile, 2,2'-Azobis-2-propylbutanenitrile, 1,1'-Azobis-1-chlorophenylethane, 1,1'-Azobis-1-cyclohexanecarbonitrile, 1,1'-Azobis-1-cycloheptanenitrile, 1 ,1'-azobis-1-phenylethane, 1,1'-azobiscumyl, 4-nitrophenylazobenzylcyanoacetate ethyl ester, phenylazodiphenyl Methane, phenylazobistriphenylmethane, 4-nitrophenylazotriphenylmethane, 1,1'-azobis-1,2-diphenylethane, poly(bisphenol A-4 , 4'-azobis-4-cyanovalerate), poly(tetraethylene glycol-2,2'-azobisisobutyrate), etc.
作為光聚合起始劑,例如,可例舉:1-羥基環己基苯基酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙烷-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、1-(4-十二烷基苯基)-2-羥基-2-甲基丙烷-1-酮、2,2-二甲氧基-1,2-二苯基乙烷-1-酮、雙(4-二甲基胺基苯基)酮、2-甲基-1-[4-(甲基硫基)苯基]-2-嗎啉基丙烷-1-酮、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁烷-1-酮、乙酮1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(o-乙醯肟)、2,4,6-三甲基苯甲醯基二苯基氧化膦、4-苯甲醯基-4'-甲基二甲基硫醚、4-二甲基胺基苯甲酸、4-二甲基胺基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯、4-二甲基胺基苯甲酸丁酯、4-二甲基胺基-2-乙基己基苯甲酸、4-二甲基胺基-2-異戊基苯甲酸、苄基-β-甲氧基乙基縮酮、苯偶醯二甲基縮酮、1-苯基-1,2-丙二酮-2-(o-乙氧基羰基)肟、鄰苯甲醯基苯甲酸甲酯、2,4-二乙基9-氧硫𠮿、2-氯9-氧硫𠮿、2,4-二甲基9-氧硫𠮿、1-氯-4-丙氧基9-氧硫𠮿、硫𠮿、2-氯硫𠮿、2,4-二乙基硫𠮿、2-甲基硫𠮿、2-異丙基硫𠮿、2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌、偶氮二異丁腈、過氧化苯甲醯、過氧化異丙苯、2-巰基苯并咪唑、2-巰基苯并㗁唑、2-巰基苯并噻唑、2-(鄰氯苯基)-4,5-二苯基咪唑二聚物、2-(鄰氯苯基)-4,5-二(甲氧基苯基)咪唑二聚物、2-(鄰氟苯基)-4,5-二苯基咪唑二聚物、2-(鄰甲氧基苯基)-4,5-二苯基咪唑二聚物、2-(對甲氧基苯基)-4,5-二苯基咪唑二聚物、2,4,5-三芳基咪唑二聚物、二苯甲酮、2-氯二苯甲酮、4,4'-雙二甲基胺基二苯甲酮(即,米其勒酮)、4,4'-雙二乙基胺基二苯甲酮(即,乙基米其勒酮)、4,4'-二氯二苯甲酮、3,3-二甲基-4-甲氧基二苯甲酮、苯偶醯、安息香、安息香甲醚、安息香乙醚、安息香異丙醚、安息香正丁醚、安息香異丁醚、安息香第三丁醚、苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲基胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對第三丁基苯乙酮、對二甲基胺基苯乙酮、對第三丁基三氯苯乙酮、對第三丁基二氯苯乙酮、α,α-二氯-4-苯氧基苯乙酮、9-氧硫𠮿、2-甲基9-氧硫𠮿、2-異丙基9-氧硫𠮿、二苯并環庚酮、4-二甲基胺基苯甲酸戊酯、9-苯基吖啶、1,7-雙-(9-吖啶基)庚烷、1,5-雙-(9-吖啶基)戊烷、1,3-雙-(9-吖啶基)丙烷、對甲氧基三𠯤、2,4,6-三(三氯甲基)對稱三𠯤、2-甲基-4,6-雙(三氯甲基)對稱三𠯤、2-[2-(5-甲基呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)對稱三𠯤、2-[2-(呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)對稱三𠯤、2-[2-(4-二乙基胺基-2-甲基苯基)乙烯基]-4,6-雙(三氯甲基)對稱三𠯤、2-[2-(3,4-二甲氧基苯基)乙烯基]-4,6-雙(三氯甲基)對稱三𠯤、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)對稱三𠯤、2-(4-乙氧基苯乙烯基)-4,6-雙(三氯甲基)對稱三𠯤、2-(4-正丁氧基苯基)-4,6-雙(三氯甲基)對稱三𠯤、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯基對稱三𠯤、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯基對稱三𠯤、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯乙烯基苯基對稱三𠯤、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯乙烯基苯基對稱三𠯤等。Examples of the photopolymerization initiator include: 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-[4-(2-hydroxy Ethoxy)phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropan-1-one , 1-(4-dodecylphenyl)-2-hydroxy-2-methylpropan-1-one, 2,2-dimethoxy-1,2-diphenylethan-1-one , bis(4-dimethylaminophenyl)one, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinylpropan-1-one, 2-benzyl -2-Dimethylamino-1-(4-morpholinylphenyl)-butan-1-one, ethanone 1-[9-ethyl-6-(2-methylbenzoyl) -9H-carbazol-3-yl]-1-(o-acetyl oxime), 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 4-benzoyl-4'- Methyl dimethyl sulfide, 4-dimethylaminobenzoic acid, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-dimethylaminobenzoate Butyl formate, 4-dimethylamino-2-ethylhexylbenzoic acid, 4-dimethylamino-2-isopentylbenzoic acid, benzyl-β-methoxyethyl ketal, benzene Dimethyl ketal, 1-phenyl-1,2-propanedione-2-(o-ethoxycarbonyl) oxime, methyl o-phenyl benzoate, 2,4-diethyl 9-oxysulfur𠮿 , 2-chloro-9-oxosulfide𠮿 , 2,4-dimethyl 9-oxosulfide𠮿 , 1-Chloro-4-propoxy 9-oxysulfide𠮿 , sulfur , 2-chlorosulfur𠮿 ,2,4-diethylsulfide𠮿 , 2-methylsulfide𠮿 , 2-isopropylsulfide𠮿 , 2-ethylanthraquinone, octamethylanthraquinone, 1,2-benzoanthraquinone, 2,3-diphenylanthraquinone, azobisisobutyronitrile, benzoyl peroxide, isopropyl peroxide Benzene, 2-mercaptobenzimidazole, 2-mercaptobenzoethazole, 2-mercaptobenzothiazole, 2-(o-chlorophenyl)-4,5-diphenylimidazole dimer, 2-(o-chlorophenyl)-4,5-diphenylimidazole dimer Phenyl)-4,5-bis(methoxyphenyl)imidazole dimer, 2-(o-fluorophenyl)-4,5-diphenylimidazole dimer, 2-(o-methoxyphenyl) base)-4,5-diphenylimidazole dimer, 2-(p-methoxyphenyl)-4,5-diphenylimidazole dimer, 2,4,5-triarylimidazole dimer , benzophenone, 2-chlorobenzophenone, 4,4'-bisdimethylaminobenzophenone (i.e., Michelone), 4,4'-bisdiethylaminobis Benzophenone (i.e., ethyl Michelinone), 4,4'-dichlorobenzophenone, 3,3-dimethyl-4-methoxybenzophenone, benzoyl, benzoin, Benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin n-butyl ether, benzoin isobutyl ether, benzoin third butyl ether, acetophenone, 2,2-diethoxyacetophenone, p-dimethylphenyl ether Ketone, p-dimethylaminoacetophenone, dichloroacetophenone, trichloroacetophenone, p-tert-butylacetophenone, p-dimethylaminoacetophenone, p-tert-butyltrichlorobenzene Ethyl ketone, p-tert-butyldichloroacetophenone, α,α-dichloro-4-phenoxyacetophenone, 9-oxosulfide𠮿 , 2-Methyl 9-oxosulfide𠮿 , 2-isopropyl 9-oxosulfide𠮿 , dibenzocycloheptanone, 4-dimethylaminobenzoate amyl ester, 9-phenylacridine, 1,7-bis-(9-acridinyl)heptane, 1,5-bis-( 9-acridinyl)pentane, 1,3-bis-(9-acridinyl)propane, p-methoxytristrimethoxy, 2,4,6-tris(trichloromethyl)symmetric trisaccharide, 2- Methyl-4,6-bis(trichloromethyl) symmetry, 2-[2-(5-methylfuran-2-yl)vinyl]-4,6-bis(trichloromethyl) symmetry Tris𠯤, 2-[2-(furan-2-yl)vinyl]-4,6-bis(trichloromethyl)symmetric tris𠯤, 2-[2-(4-diethylamino-2- Methylphenyl)vinyl]-4,6-bis(trichloromethyl)symmetric triethyl, 2-[2-(3,4-dimethoxyphenyl)vinyl]-4,6-bis (Trichloromethyl) symmetric tris- 4,6-bis (trichloromethyl) symmetric tris, 2-(4-n-butoxyphenyl)-4,6-bis (trichloromethyl) symmetric tris, 2,4-bis-tri Chloromethyl-6-(3-bromo-4-methoxy)phenyl symmetry, 2,4-bis-trichloromethyl-6-(2-bromo-4-methoxy)phenyl symmetry Tris, 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy)styrylphenyl symmetric tris, 2,4-bis-trichloromethyl-6-( 2-Bromo-4-methoxy) styrylphenyl symmetric three 𠯤 etc.
上述之光聚合起始劑中,例如可使用「IRGACURE OXE02」、「IRGACURE OXE01」、「IRGACURE 369」、「IRGACURE 651」、「IRGACURE 907」(均為商品名,巴斯夫公司製)以及「NCI-831」(商品名,ADEKA股份有限公司製)等市售品。Among the above-mentioned photopolymerization initiators, for example, "IRGACURE OXE02", "IRGACURE OXE01", "IRGACURE 369", "IRGACURE 651", "IRGACURE 907" (all trade names, manufactured by BASF Corporation) and "NCI- 831" (trade name, manufactured by ADEKA Co., Ltd.) and other commercial products.
(A)成分可單獨使用1種,亦可組合使用2種以上。作為(A)成分,較佳為熱聚合起始劑,更佳為過氧化物。該(A)成分之使用量可根據(P1)成分之使用量而進行調整。作為接著劑組合物中之聚合起始劑之含量,相對於(P1)成分100質量份,較佳為0.1~10質量份,更佳為0.5~5質量份。(A) Component may be used individually by 1 type, and may be used in combination of 2 or more types. As component (A), a thermal polymerization initiator is preferred, and a peroxide is more preferred. The usage amount of component (A) can be adjusted according to the usage amount of component (P1). The content of the polymerization initiator in the adhesive composition is preferably 0.1 to 10 parts by mass, more preferably 0.5 to 5 parts by mass relative to 100 parts by mass of the component (P1).
<任意成分> 本實施方式之接著劑組合物中,除上述成分以外,亦可於不損及本發明之效果之範圍內包含任意成分。任意成分沒有特別限定,例如可例舉聚合抑制劑、溶劑成分、塑化劑、接著助劑、穩定劑、著色劑、界面活性劑等。 <Optional ingredients> In addition to the above-mentioned components, the adhesive composition of this embodiment may contain any component within the range which does not impair the effect of this invention. The arbitrary components are not particularly limited, and examples thereof include polymerization inhibitors, solvent components, plasticizers, adhesive auxiliaries, stabilizers, colorants, surfactants, and the like.
≪聚合抑制劑≫ 聚合抑制劑係指具有防止由熱或光引起之自由基聚合反應之功能之成分。聚合抑制劑對自由基顯示出較高之反應性。 ≪Polymerization inhibitor≫ Polymerization inhibitors refer to components that have the function of preventing radical polymerization caused by heat or light. Polymerization inhibitors show high reactivity towards free radicals.
作為聚合抑制劑,較佳為具有酚骨架者。例如,這樣之聚合抑制劑可使用受阻酚系抗氧化劑,可例舉鄰苯三酚、苯醌、對苯二酚、亞甲基藍、第三丁基鄰苯二酚、單苄基醚、甲基對苯二酚、戊醌、戊氧基對苯二酚、正丁基苯酚、苯酚、對苯二酚單丙醚、4,4'-(1-甲基亞乙基)雙(2-甲基苯酚)、4,4'-(1-甲基亞乙基)雙(2,6-二甲基苯酚)、4,4'-[1-[4-(1-(4-羥基苯基)-1-甲基乙基)苯基]亞乙基]雙酚、4,4',4''-亞乙基三(2-甲基苯酚)、4,4',4''-亞乙基三苯酚、1,1,3-三(2,5-二甲基-4-羥基苯基)-3-苯基丙烷、2,6-二第三丁基-4-甲基苯酚、2,2'-亞甲基雙(4-甲基-6-第三丁基苯酚)、4,4'-亞丁基雙(3-甲基-6-第三丁基苯酚)、4,4'-硫代雙(3-甲基-6-第三丁基苯酚)、3,9-雙[2-(3-(3-第三丁基-4-羥基-5-甲基苯基)-丙醯基氧基)-1,1-二甲基乙基]-2,4,8,10-四氧雜螺(5,5)十一烷、三乙二醇-雙-3-(3-第三丁基-4-羥基-5-甲基苯基)丙酸酯、3-(3,5-二第三丁基-4-羥基苯基)丙酸正辛酯、季戊四醇四[3-(3,5-二第三丁基-4-羥基苯基)丙酸酯](商品名IRGANOX1010,巴斯夫公司製)、三(3,5-二第三丁基羥基苄基)異氰尿酸酯、硫代二伸乙基雙[3-(3,5-二第三丁基-4-羥基苯基)丙酸酯]等。As a polymerization inhibitor, one having a phenolic skeleton is preferred. For example, hindered phenol-based antioxidants can be used as such polymerization inhibitors, and examples thereof include pyrogallol, benzoquinone, hydroquinone, methylene blue, tert-butylcatechol, monobenzyl ether, and methyl p- Hydroquinone, pentoquinone, pentoxyhydroquinone, n-butylphenol, phenol, hydroquinone monopropyl ether, 4,4'-(1-methylethylene)bis(2-methyl) Phenol), 4,4'-(1-methylethylene)bis(2,6-dimethylphenol), 4,4'-[1-[4-(1-(4-hydroxyphenyl) -1-Methylethyl)phenyl]ethylene]bisphenol, 4,4',4''-ethylene tris(2-methylphenol), 4,4',4''-ethylene Triphenol, 1,1,3-tris(2,5-dimethyl-4-hydroxyphenyl)-3-phenylpropane, 2,6-di-tert-butyl-4-methylphenol, 2 ,2'-methylenebis(4-methyl-6-tert-butylphenol), 4,4'-butylenebis(3-methyl-6-tert-butylphenol), 4,4' -Thiobis(3-methyl-6-tert-butylphenol), 3,9-bis[2-(3-(3-tert-butyl-4-hydroxy-5-methylphenyl)- Propionyloxy)-1,1-dimethylethyl]-2,4,8,10-tetraoxaspiro(5,5)undecane, triethylene glycol-bis-3-(3 -tert-butyl-4-hydroxy-5-methylphenyl)propionate, n-octyl 3-(3,5-di-tert-butyl-4-hydroxyphenyl)propionate, pentaerythritol tetrakis[3 -(3,5-di-tert-butyl-4-hydroxyphenyl)propionate] (trade name IRGANOX1010, manufactured by BASF), tris(3,5-di-tert-butylhydroxybenzyl)isocyanurate acid ester, thiodiethylenebis[3-(3,5-di-tert-butyl-4-hydroxyphenyl)propionate], etc.
聚合抑制劑可單獨使用1種,亦可組合使用2種以上。 聚合抑制劑之含量可根據樹脂成分之種類、接著劑組合物之用途及使用環境而適宜地確定。 One type of polymerization inhibitor may be used alone, or two or more types may be used in combination. The content of the polymerization inhibitor can be appropriately determined depending on the type of the resin component, the purpose of the adhesive composition, and the use environment.
≪界面活性劑≫ 本實施方式之接著劑組合物可藉由將(P1)成分及(A)成分、及視需要之任意成分溶解於溶劑成分中並進行混合而製備。作為溶劑成分,可使用能溶解上述各成分者。 ≪Surfactant≫ The adhesive composition of this embodiment can be prepared by dissolving (P1) component, (A) component, and optional optional components in a solvent component and mixing them. As the solvent component, one capable of dissolving each of the above components can be used.
作為溶劑成分,例如,可例舉烴溶劑、石油系溶劑、及上述溶劑以外之其他溶劑。以下,亦將烴溶劑及石油系溶劑統稱為「(S1)成分」。亦將(S1)成分以外之溶劑成分稱為「(S2)成分」。Examples of the solvent component include hydrocarbon solvents, petroleum solvents, and other solvents other than the above solvents. Hereinafter, hydrocarbon solvents and petroleum solvents are also collectively referred to as "(S1) component". Solvent components other than the (S1) component are also called "(S2) components".
作為烴溶劑,可例舉直鏈狀、支鏈狀或環狀之烴。作為烴溶劑,例如,可例舉:己烷、庚烷、辛烷、壬烷、甲基辛烷、癸烷、十一烷、十二烷、十三烷等直鏈狀烴;異辛烷、異壬烷、異十二烷等支鏈狀烴;對薄荷烷、鄰薄荷烷、間薄荷烷、二苯基薄荷烷、1,4-萜二醇、1,8-萜二醇、𦯉烷、降𦯉烷、蒎烷、側柏烷、蒈烷(carane)、長葉烯、α-萜品烯、β-萜品烯、γ-萜品烯、α-蒎烯、β-蒎烯、α-側柏酮、β-側柏酮、環己烷、環庚烷、環辛烷等脂環式烴;甲苯、二甲苯、茚、并環戊二烯、茚滿、四氫茚、萘、四氫萘(四氫化萘)、十氫萘(十氫化萘)等芳香族烴。Examples of the hydrocarbon solvent include linear, branched or cyclic hydrocarbons. Examples of the hydrocarbon solvent include linear hydrocarbons such as hexane, heptane, octane, nonane, methyloctane, decane, undecane, dodecane, and tridecane; isooctane , isononane, isododecane and other branched-chain hydrocarbons; p-menthane, o-menthane, m-menthane, diphenylmenthane, 1,4-terpene diol, 1,8-terpene diol, 𦯉 Alkane, norpine, pinane, thujaane, carane, longifolene, α-terpinene, β-terpinene, γ-terpinene, α-pinene, β-pinene , α-thujone, β-thujone, cyclohexane, cycloheptane, cyclooctane and other alicyclic hydrocarbons; toluene, xylene, indene, pentacyclopentadiene, indane, tetrahydroindene, Aromatic hydrocarbons such as naphthalene, tetralin (tetralin), and decalin (decalin).
石油系溶劑係指自重油精製得到之溶劑,例如可例舉白煤油、鏈烷烴系溶劑、異鏈烷烴系溶劑。Petroleum-based solvents refer to solvents obtained by refining heavy oil, and examples thereof include white kerosene, paraffin-based solvents, and isoparaffin-based solvents.
作為(S2)成分,可例舉具有氧原子、羰基或乙醯氧基等作為極性基之萜烯溶劑,例如,可例舉香葉醇、橙花醇、沉香醇、檸檬醛、香茅醇、薄荷醇、異薄荷醇、新薄荷醇、α-萜品醇、β-萜品醇、γ-萜品醇、萜品烯-1-醇、萜品烯-4-醇、二氫松香醇乙酸酯、1,4-桉樹腦、1,8-桉樹腦、冰片、香旱芹酮、紫羅酮、側柏酮、樟腦等。Examples of the component (S2) include terpene solvents having polar groups such as oxygen atoms, carbonyl groups or acetyloxy groups. Examples include geraniol, nerol, linalol, citral, and citronellol. , menthol, isomenthol, neomenthol, α-terpineol, β-terpineol, γ-terpineol, terpinen-1-ol, terpinen-4-ol, dihydrorosinol Acetate, 1,4-cineole, 1,8-cineole, borneol, cyperone, ionone, thujone, camphor, etc.
又,作為(S2)成分,亦可例舉:γ-丁內酯等內酯類;丙酮、甲基乙基酮、環己酮(CH)、甲基正戊基酮、甲基異戊基酮、2-庚酮等酮類;乙二醇、二乙二醇、丙二醇、二丙二醇等多元醇類;乙二醇單乙酸酯、二乙二醇單乙酸酯、丙二醇單乙酸酯、或二丙二醇單乙酸酯等具有酯鍵之化合物、上述多元醇類或上述具有酯鍵之化合物之單甲醚、單乙醚、單丙醚、單丁醚等單烷基醚或單苯醚等具有醚鍵之化合物等多元醇類之衍生物(其等中,較佳為丙二醇單甲醚乙酸酯(PGMEA)、丙二醇單甲醚(PGME));如二㗁烷這樣的環式醚類;乳酸甲酯、乳酸乙酯、乙酸甲酯、乙酸乙酯、乙酸丁酯、丙酮酸甲酯、丙酮酸乙酯、甲氧基丙酸甲酯、乙氧基丙酸乙酯等酯類;苯甲醚、乙基苄基醚、甲苯基甲基醚、二苯醚、二苄基醚、苯乙醚、丁基苯基醚等芳香族系有機溶劑。Moreover, as the (S2) component, lactones such as γ-butyrolactone, acetone, methyl ethyl ketone, cyclohexanone (CH), methyl n-amyl ketone, and methyl isopentyl can also be exemplified. Ketones such as ketone and 2-heptanone; polyols such as ethylene glycol, diethylene glycol, propylene glycol, and dipropylene glycol; ethylene glycol monoacetate, diethylene glycol monoacetate, and propylene glycol monoacetate. , or compounds with ester bonds such as dipropylene glycol monoacetate, monoalkyl ethers such as monomethyl ether, monoethyl ether, monopropyl ether, monobutyl ether, or monophenyl ether of the above-mentioned polyols or compounds with ester bonds. Derivatives of polyols such as compounds with ether bonds (among them, propylene glycol monomethyl ether acetate (PGMEA) and propylene glycol monomethyl ether (PGME) are preferred); cyclic ethers such as diethane Class; methyl lactate, ethyl lactate, methyl acetate, ethyl acetate, butyl acetate, methyl pyruvate, ethyl pyruvate, methyl methoxypropionate, ethoxyethyl propionate and other esters ; Aromatic organic solvents such as anisole, ethyl benzyl ether, tolyl methyl ether, diphenyl ether, dibenzyl ether, phenylethyl ether, butyl phenyl ether.
溶劑成分可單獨使用1種,亦可組合使用2種以上。作為溶劑成分,較佳為對於(P1)成分而言為惰性之溶劑成分。作為較佳之溶劑成分,例如,可例舉酯系溶劑、酮系溶劑、芳香族烴系溶劑、PGMEA、PGME、及其等之混合溶劑等。A solvent component may be used individually by 1 type, and may be used in combination of 2 or more types. As the solvent component, a solvent component that is inert to the component (P1) is preferred. Preferable solvent components include, for example, ester solvents, ketone solvents, aromatic hydrocarbon solvents, PGMEA, PGME, and mixed solvents thereof.
本實施方式之接著劑組合物中之溶劑成分之含量根據接著劑組合物層之厚度而適宜地調整即可。作為溶劑成分之含量,例如,相對於接著劑組合物之總量(100質量%),較佳為40~90質量%之範圍內。即,對於本實施方式之接著劑組合物而言,固形物成分(去除溶劑成分後之調配成分之合計量)濃度較佳為10~80質量%之範圍內。若溶劑成分之含量處於上述之較佳範圍內,則容易調整黏度。The content of the solvent component in the adhesive composition of this embodiment may be appropriately adjusted according to the thickness of the adhesive composition layer. The content of the solvent component is preferably in the range of 40 to 90 mass % with respect to the total amount of the adhesive composition (100 mass %), for example. That is, in the adhesive composition of this embodiment, the solid content (the total amount of the preparation components after removing the solvent component) concentration is preferably in the range of 10 to 80 mass %. If the content of the solvent component is within the above-mentioned preferred range, the viscosity can be easily adjusted.
使用聚合起始劑之情形時,聚合起始劑可於即將使用接著劑組合物之前利用公知之方法調配。聚合起始劑或聚合抑制劑可以預先溶解於上述(S2)成分而成之溶液之形態調配。(S2)成分之使用量根據聚合起始劑或聚合抑制劑之種類等而適宜地調整即可,例如,相對於(S1)成分100質量份,較佳為1~50質量份,更佳為5~30質量份。若(S2)成分之使用量處於上述之較佳範圍內,則能夠將聚合起始劑或聚合抑制劑充分溶解。When a polymerization initiator is used, the polymerization initiator can be prepared by a known method just before using the adhesive composition. The polymerization initiator or polymerization inhibitor can be prepared in the form of a solution in which the component (S2) is dissolved in advance. The usage amount of the component (S2) may be appropriately adjusted depending on the type of polymerization initiator or polymerization inhibitor. For example, it is preferably 1 to 50 parts by mass based on 100 parts by mass of the component (S1), and more preferably 5~30 parts by mass. If the usage amount of component (S2) is within the above-mentioned preferred range, the polymerization initiator or polymerization inhibitor can be fully dissolved.
根據本實施方式之接著劑組合物,於將半導體基板等與支持體暫時接著時,於上述半導體基板等與支持體之間形成接著劑組合物層,使其硬化。由此,可形成將半導體基板等與支持體暫時接著之接著層。該接著層藉由交聯結構而硬化,因此耐熱性高,即使於高溫(例如,200℃以上)時,彈性模數也不會降低。因此,即使於半導體基板或電子裝置之加工時進行高溫處理之情形時,也不易產生位置偏移、下沉等不良情況。 另一方面,若向上述接著層照射雷射光等光,則接著層中之結構X吸收光,接著層改質。因此,接著層之接著力降低,能夠將半導體基板等與支持體分離。因此,不需要設置分離層。進而,由於於(P1)成分中引入了結構X,因此能夠不對溶解性造成問題地增多結構X之含有比率。由此,能夠獲得良好之分離性。 進而,由於上述接著層包含聚胺酯樹脂,因此可藉由酸或鹼將胺基甲酸酯鍵分解,由此將接著層分解。因此,即使於自支持體分離後之半導體基板等附著有接著層之殘渣之情形時,亦可藉由酸或鹼進行洗淨,由此將接著層之殘渣容易地去除。 According to the adhesive composition of this embodiment, when temporarily bonding a semiconductor substrate, etc., and a support, an adhesive composition layer is formed between the said semiconductor substrate, etc., and a support, and is hardened. This can form an adhesive layer that temporarily adheres the semiconductor substrate and the like to the support. This adhesive layer is hardened by a cross-linked structure, so it has high heat resistance, and its elastic modulus does not decrease even at high temperatures (for example, 200° C. or higher). Therefore, even when high-temperature processing is performed during the processing of semiconductor substrates or electronic devices, defects such as positional deviation and sinking are less likely to occur. On the other hand, when the above-mentioned adhesive layer is irradiated with light such as laser light, the structure X in the adhesive layer absorbs the light, and the adhesive layer is modified. Therefore, the adhesive force of the adhesive layer is reduced, and the semiconductor substrate and the like can be separated from the support. Therefore, no separation layer is required. Furthermore, since the structure X is introduced into the component (P1), the content ratio of the structure X can be increased without causing problems with solubility. Thus, good separability can be obtained. Furthermore, since the above-mentioned adhesive layer contains polyurethane resin, the urethane bond can be decomposed by acid or alkali, thereby decomposing the adhesive layer. Therefore, even if the residue of the adhesive layer adheres to the semiconductor substrate or the like after being separated from the support, the residue of the adhesive layer can be easily removed by washing with acid or alkali.
(積層體) 本發明之第2形態之積層體之特徵在於,其為依序積層有能使光透過之支持體、接著層、以及半導體基板或電子裝置之積層體,上述接著層為第1形態之接著劑組合物之硬化物。 (Laminated body) The laminated body of the second aspect of the present invention is characterized in that it is a laminated body in which a light-transmitting support, an adhesive layer, and a semiconductor substrate or an electronic device are laminated in this order, and the adhesive layer is the adhesive of the first aspect. The hardened product of the composition.
圖1示出第2形態之積層體之一實施方式。 圖1所示之積層體100具備能使光透過之支持體1、接著層3、及半導體基板4。積層體100中,依序積層有支持體1、接著層3及半導體基板4。 FIG. 1 shows an embodiment of the second form of the laminated body. The laminated body 100 shown in FIG. 1 includes a support 1 that can transmit light, an adhesive layer 3, and a semiconductor substrate 4. In the laminated body 100, the support 1, the adhesive layer 3, and the semiconductor substrate 4 are laminated|stacked in this order.
圖2示出第2形態之積層體之另一實施方式。 圖2所示之積層體200除了包含半導體基板4、密封材料層5及佈線層6之電子裝置456積層於接著層3上以外,為與積層體100同樣之構成。 FIG. 2 shows another embodiment of the laminated body of the second form. The laminated body 200 shown in FIG. 2 has the same structure as the laminated body 100 except that the electronic device 456 including the semiconductor substrate 4, the sealing material layer 5 and the wiring layer 6 is laminated on the adhesive layer 3.
圖3示出第2形態之積層體之又一實施方式。 圖3所示之積層體300除了電子裝置包含佈線層6以外,為與積層體100同樣之構成。 FIG. 3 shows another embodiment of the second form of the laminated body. The laminated body 300 shown in FIG. 3 has the same structure as the laminated body 100 except that the electronic device includes the wiring layer 6 .
圖4示出第2形態之積層體之又一實施方式。 圖4所示之積層體400除了包含佈線層6、半導體基板4及密封材料層5之電子裝置645積層於接著層3上以外,為與積層體100同樣之構成。 FIG. 4 shows another embodiment of the second form of the laminated body. The laminated body 400 shown in FIG. 4 has the same structure as the laminated body 100 except that the electronic device 645 including the wiring layer 6, the semiconductor substrate 4 and the sealing material layer 5 is laminated on the adhesive layer 3.
<支持體> 支持體為對半導體基板或電子裝置進行支持之構件。支持體具有能使光透過之特性。支持體經由接著層而貼合於半導體基板或電子裝置。因此,作為支持體,較佳具有於裝置之薄化、半導體基板之搬運、向半導體基板之安裝等時,防止半導體基板之破損或變形所需之強度。 作為支持體之材料,例如,可使用玻璃、矽、丙烯酸系樹脂等。作為支持體之形狀,例如,可例舉矩形、圓形等,但並不限於該等。作為支持體,為了進一步高密度積體化、提高生產效率,亦可使用尺寸加大之圓形支持體、俯視下之形狀為四邊形之大型面板。 <Support> The support is a member that supports a semiconductor substrate or an electronic device. The support has the property of allowing light to pass through. The support is bonded to the semiconductor substrate or the electronic device via the adhesive layer. Therefore, the support preferably has the strength required to prevent damage or deformation of the semiconductor substrate during thinning of the device, transportation of the semiconductor substrate, mounting on the semiconductor substrate, etc. As a material of the support, for example, glass, silicon, acrylic resin, etc. can be used. Examples of the shape of the support include rectangle, circle, etc., but are not limited thereto. As a support, in order to further achieve high-density integration and improve production efficiency, it is also possible to use an enlarged circular support or a large panel with a quadrilateral shape when viewed from above.
<接著層> 接著層係為了將半導體基板或電子裝置暫時接著於支持體而設置的。接著層係上述第1實施方式之接著劑組合物之硬化物。第1實施方式之接著劑組合物之硬化可藉由對接著劑組合物進行加熱而進行。接著層之厚度例如較佳為1 μm以上、200 μm以下之範圍內,更佳為5 μm以上、150 μm以下之範圍內。 <Adhering layer> The subsequent layer is provided to temporarily bond the semiconductor substrate or electronic device to the support. The subsequent layer is a cured product of the adhesive composition of the above-mentioned first embodiment. The adhesive composition of the first embodiment can be hardened by heating the adhesive composition. The thickness of the subsequent layer is, for example, preferably in the range of 1 μm or more and 200 μm or less, more preferably in the range of 5 μm or more and 150 μm or less.
如上所述,接著層為接著劑組合物之硬化物,較佳構成該接著層之材料(硬化物)滿足以下特性。 即,於以下之條件下測定硬化物之複彈性模數時,200℃下之複彈性模數較佳為1.0×10 4Pa以上,更佳為5.0×10 4Pa以上,進而較佳為1.0×10 5Pa以上。進而,200℃下之複彈性模數更佳為1.0×10 6Pa以上,進而較佳為5.0×10 6Pa以上,特佳為1.0×10 7Pa以上。作為200℃下之複彈性模數之上限值,例如為1.0×10 10Pa以下。 又,於以下之條件下測定硬化物之複彈性模數時,250℃下之複彈性模數較佳為5.0×10 6Pa以上,更佳為1.0×10 7Pa以上。作為250℃下之複彈性模數之上限值,例如為1.0×10 10Pa以下。 As described above, the adhesive layer is a cured product of the adhesive composition, and the material (cured product) constituting the adhesive layer preferably satisfies the following characteristics. That is, when the complex elastic modulus of the hardened material is measured under the following conditions, the complex elastic modulus at 200°C is preferably 1.0×10 4 Pa or more, more preferably 5.0×10 4 Pa or more, and still more preferably 1.0. ×10 5 Pa or more. Furthermore, the complex elastic modulus at 200°C is more preferably 1.0×10 6 Pa or more, still more preferably 5.0×10 6 Pa or more, and particularly preferably 1.0×10 7 Pa or more. The upper limit of the complex elastic modulus at 200°C is, for example, 1.0×10 10 Pa or less. Moreover, when the complex elastic modulus of the hardened material is measured under the following conditions, the complex elastic modulus at 250°C is preferably 5.0×10 6 Pa or more, more preferably 1.0×10 7 Pa or more. The upper limit of the complex elastic modulus at 250°C is, for example, 1.0×10 10 Pa or less.
硬化物之複彈性模數可使用動態黏彈性測定裝置Rheogel-E4000(UBM股份有限公司製)來測定。具體而言,可以將接著劑組合物塗佈於帶有離型劑之PET膜上,利用氮氣氛圍下之烘箱,於180℃加熱1小時而形成厚度為50 μm之試驗片,其後,對於自PET膜剝離之試驗片(尺寸為5 mm×40 mm,厚度為50 μm),使用上述之測定裝置進行測定。測定條件可採用下述條件:於頻率為1 Hz之拉伸條件下,以5℃/分鐘之升溫速度自起始溫度50℃升溫至300℃。The complex elastic modulus of the hardened material can be measured using a dynamic viscoelasticity measuring device Rheogel-E4000 (manufactured by UBM Co., Ltd.). Specifically, the adhesive composition can be coated on a PET film with a release agent, heated at 180°C for 1 hour in an oven under a nitrogen atmosphere to form a test piece with a thickness of 50 μm, and then, The test piece peeled from the PET film (size 5 mm × 40 mm, thickness 50 μm) was measured using the above measuring device. The following conditions can be used for measurement: under tensile conditions with a frequency of 1 Hz, the temperature is raised from the starting temperature of 50°C to 300°C at a heating rate of 5°C/min.
<半導體基板或電子裝置> 半導體基板或電子裝置經由接著層而暫時接著於支持體。 <Semiconductor substrate or electronic device> The semiconductor substrate or the electronic device is temporarily adhered to the support via the adhesive layer.
≪半導體基板≫ 作為半導體基板,沒有特別限制,可例示與上述「(接著劑組合物)」中所例示者同樣之半導體基板。半導體基板可為半導體元件或其他元件,可具有單層或複數層之結構。 ≪Semiconductor substrate≫ The semiconductor substrate is not particularly limited, and the same semiconductor substrate as exemplified in the above "(adhesive composition)" can be exemplified. The semiconductor substrate can be a semiconductor element or other element, and can have a single-layer or multiple-layer structure.
≪電子裝置≫ 作為電子裝置,沒有特別限制,可例示與上述「(接著劑組合物)」中所例示者同樣之電子裝置。電子裝置較佳為包含金屬或半導體之構件與將上述構件密封或絕緣之樹脂的複合體。具體而言,電子裝置包含密封材料層及佈線層中之至少一者,可進而包含半導體基板。 圖2所示之積層體200中,電子裝置456包含半導體基板4、密封材料層5、及佈線層6。圖3所示之積層體300中,電子裝置6包含佈線層6。圖4所示之積層體400中,電子裝置645包含佈線層6、半導體基板4及密封材料層5。 ≪Electronic Devices≫ The electronic device is not particularly limited, and the same electronic devices as those exemplified in the above-mentioned “(adhesive composition)” can be exemplified. The electronic device is preferably a composite including a metal or semiconductor component and a resin that seals or insulates the component. Specifically, the electronic device includes at least one of a sealing material layer and a wiring layer, and may further include a semiconductor substrate. In the laminated body 200 shown in FIG. 2 , the electronic device 456 includes the semiconductor substrate 4 , the sealing material layer 5 , and the wiring layer 6 . In the laminate 300 shown in FIG. 3 , the electronic device 6 includes the wiring layer 6 . In the laminated body 400 shown in FIG. 4 , the electronic device 645 includes the wiring layer 6 , the semiconductor substrate 4 and the sealing material layer 5 .
[密封材料層] 密封材料層係為了密封半導體基板而設置的,使用密封材料而形成。作為密封材料,可使用能將包含金屬或半導體之構件絕緣或密封之構件。 作為密封材料,例如,可使用樹脂組合物。密封材料層5較佳以將接著層3上之半導體基板4全部覆蓋之方式設置,而不是設置於各半導體基板4中之每個上。密封材料中使用之樹脂只要是能將金屬或半導體密封及/或絕緣之樹脂即可,沒有特別限定,例如,可例舉環氧系樹脂或聚矽氧系樹脂等。 密封材料除了樹脂以外亦可包含填料等其他成分。作為填料,例如,可例舉球狀二氧化矽粒子等。 [Sealing material layer] The sealing material layer is provided to seal the semiconductor substrate and is formed using a sealing material. As the sealing material, a member capable of insulating or sealing a member containing metal or semiconductor may be used. As the sealing material, for example, a resin composition can be used. The sealing material layer 5 is preferably provided so as to cover all the semiconductor substrates 4 on the adhesive layer 3 rather than being provided on each of the semiconductor substrates 4 . The resin used in the sealing material is not particularly limited as long as it can seal and/or insulate metal or semiconductors. Examples thereof include epoxy resin and polysilicone resin. In addition to resin, the sealing material may also contain other components such as fillers. Examples of the filler include spherical silica particles and the like.
≪佈線層≫ 佈線層亦可稱為RDL(Redistribution Layer:再佈線層),其係構成與基板連接之佈線之薄膜佈線體,可具有單層或複數層之結構。佈線層可為於介電體(氧化矽(SiO x)、感光性環氧化物等感光性樹脂等)之間由導電體(例如,鋁、銅、鈦、鎳、金及銀等金屬以及銀-錫合金等合金)形成佈線而得到之層,但並不限定於此。 ≪Wiring Layer≫ The wiring layer can also be called RDL (Redistribution Layer). It is a thin film wiring body that forms the wiring connected to the substrate. It can have a single-layer or multiple-layer structure. The wiring layer may be made of conductors (for example, metals such as aluminum, copper, titanium, nickel, gold, and silver, and silver) between dielectrics (silicon oxide (SiO x ), photosensitive resins such as photosensitive epoxides, etc.) - alloy such as tin alloy), but is not limited to this.
再者,圖1~圖4之積層體中,支持體1與接著層3鄰接,但並不限定於此,亦可於支持體1與接著層3之間形成有其他層。於此情形時,其他層由能使光透過之材料構成即可。由此,能夠於不妨礙光向接著層3之入射之情況下適宜地追加對積層體100~400賦予較佳性質等之層。根據構成接著層3之材料之種類,可使用之光之波長不同。因此,構成其他層之材料無需使所有波長之光透過,可自下述材料中適宜地選擇,該材料能透過可使構成接著層3之材料改質之波長之光。Furthermore, in the laminated body shown in FIGS. 1 to 4 , the support 1 and the adhesive layer 3 are adjacent to each other. However, the present invention is not limited to this, and other layers may be formed between the support 1 and the adhesive layer 3 . In this case, the other layers may be made of materials that can transmit light. This makes it possible to appropriately add a layer that imparts better properties to the laminated bodies 100 to 400 without hindering the incidence of light to the adhesive layer 3 . The wavelength of light that can be used varies depending on the type of material constituting the adhesive layer 3 . Therefore, the materials constituting the other layers do not need to transmit light of all wavelengths, and can be appropriately selected from the following materials that can transmit light of wavelengths that can modify the material constituting the adhesive layer 3 .
(積層體之製造方法(1)) 本發明之第3形態之積層體之製造方法之特徵在於:其係依序積層有能使光透過之支持體、接著層及半導體基板之積層體之製造方法,上述製造方法包括下述步驟:於上述支持體或半導體基板塗佈第1形態之接著劑組合物而形成接著劑組合物層之步驟(以下,亦稱為「接著劑組合物層形成步驟」);將上述半導體基板經由上述接著劑組合物層而載置於上述支持體上之步驟(以下,亦稱為「半導體基板載置步驟」);以及,藉由上述聚胺酯樹脂之聚合反應使上述接著劑組合物層硬化而形成上述接著層之步驟(以下,亦稱為「接著層形成步驟」)。 (Manufacturing method of laminated body (1)) A method for manufacturing a laminated body according to a third aspect of the present invention is characterized in that it is a method for manufacturing a laminated body in which a light-transmitting support, an adhesive layer, and a semiconductor substrate are sequentially laminated. The manufacturing method includes the following steps: The step of applying the adhesive composition of the first form to the above-mentioned support or the semiconductor substrate to form an adhesive composition layer (hereinafter also referred to as the "adhesive composition layer forming step"); passing the above-mentioned semiconductor substrate through the above-mentioned adhesive The step of placing the adhesive composition layer on the above-mentioned support (hereinafter also referred to as the "semiconductor substrate mounting step"); and the step of hardening the above-mentioned adhesive composition layer through the polymerization reaction of the above-mentioned polyurethane resin to form the above-mentioned adhesive composition layer. The step of forming the adhesive layer (hereinafter also referred to as the "adhesive layer forming step").
圖5~6係對本實施方式之積層體之製造方法之一實施方式進行說明之概略步驟圖。 圖5(a)~(b)係對依序積層有支持體1、接著劑組合物層3'、及半導體基板4之積層體100'之製造步驟進行說明之圖。圖5(a)係對接著劑組合物層形成步驟進行說明之圖。圖5(b)係對半導體基板載置步驟進行說明之圖。 圖6係對接著層形成步驟進行說明之圖。使積層體100'中之接著劑組合物層3'熱硬化而形成接著層3,得到積層體100。 5 to 6 are schematic step diagrams illustrating one embodiment of the method for manufacturing a laminated body according to this embodiment. 5 (a) to (b) are diagrams illustrating the manufacturing steps of the laminated body 100' in which the support 1, the adhesive composition layer 3', and the semiconductor substrate 4 are sequentially laminated. FIG. 5(a) is a diagram illustrating the steps of forming an adhesive composition layer. FIG. 5(b) is a diagram illustrating a semiconductor substrate mounting step. FIG. 6 is a diagram explaining the steps of forming an adhesive layer. The adhesive composition layer 3' in the laminated body 100' is thermally hardened to form the adhesive layer 3, and the laminated body 100 is obtained.
[接著劑組合物層形成步驟] 本實施方式之積層體之製造方法包括接著劑組合物層形成步驟。接著劑組合物層形成步驟係於支持體或半導體基板塗佈接著劑組合物而形成接著劑組合物層之步驟。 圖5(a)中,使用接著劑組合物於支持體1上形成了接著劑組合物層3'。 [Adhesive composition layer formation step] The manufacturing method of the laminated body of this embodiment includes the step of forming an adhesive composition layer. The adhesive composition layer forming step is a step in which the adhesive composition is coated on a support or a semiconductor substrate to form an adhesive composition layer. In FIG. 5(a) , the adhesive composition layer 3' is formed on the support 1 using the adhesive composition.
接著劑組合物層3'於支持體1上之形成方法沒有特別限定,例如,可例舉旋塗、浸漬、輥刀塗佈、噴塗、狹縫塗佈等方法。 接著劑組合物層亦可藉由同樣之方法形成於半導體基板4。 The method of forming the adhesive composition layer 3' on the support 1 is not particularly limited. For example, methods such as spin coating, dipping, roller knife coating, spray coating, and slit coating can be used. The adhesive composition layer can also be formed on the semiconductor substrate 4 by the same method.
形成接著劑組合物層後,可進行烘烤處理。烘烤溫度條件設定為比後述之接著層形成步驟中之加熱溫度低之溫度。作為烘烤條件,可根據接著劑組合物所含有之硬化性成分之種類而變化,例如,可例舉於70~100℃之溫度條件下進行1~10分鐘等。After the adhesive composition layer is formed, baking treatment can be performed. The baking temperature condition is set to a temperature lower than the heating temperature in the adhesive layer forming step described later. The baking conditions may vary depending on the type of curable component contained in the adhesive composition. For example, baking conditions may be performed at a temperature of 70 to 100° C. for 1 to 10 minutes.
[半導體基板載置步驟] 本實施方式之積層體之製造方法包括半導體基板載置步驟。半導體基板載置步驟係將半導體基板經由接著劑組合物層而載置於支持體上之步驟。由此,能夠得到積層體100'。 圖5(b)中,經由形成於支持體1上之接著劑組合物層3'而將半導體基板4載置於支持體1。 [Semiconductor substrate mounting step] The manufacturing method of the laminated body of this embodiment includes the step of placing a semiconductor substrate. The semiconductor substrate mounting step is a step of mounting the semiconductor substrate on the support via the adhesive composition layer. Thereby, the laminated body 100' can be obtained. In FIG. 5( b ), the semiconductor substrate 4 is placed on the support 1 via the adhesive composition layer 3 ′ formed on the support 1 .
經由接著劑組合物層3'而將半導體基板4載置於支持體1上之方法沒有特別限定,可採用作為將半導體基板配置於規定位置之方法而通常使用之方法。The method of placing the semiconductor substrate 4 on the support 1 via the adhesive composition layer 3' is not particularly limited, and a method commonly used as a method of arranging the semiconductor substrate at a predetermined position can be used.
[接著層形成步驟] 本實施方式之積層體之製造方法包括接著層形成步驟。接著層形成步驟係藉由接著劑組合物層中之聚胺酯樹脂((P1)成分)之聚合反應使接著劑組合物層硬化而形成接著層之步驟。由此,能夠得到積層體100。 圖6中,藉由接著劑組合物層3'之硬化而形成接著層3。 [Subsequent layer formation step] The manufacturing method of the laminated body of this embodiment includes the step of forming an adhesive layer. The subsequent layer forming step is a step in which the adhesive composition layer is cured by polymerization reaction of the polyurethane resin ((P1) component) in the adhesive composition layer to form the adhesive layer. Thereby, the laminated body 100 can be obtained. In FIG. 6 , the adhesive layer 3 is formed by hardening the adhesive composition layer 3 ′.
接著劑組合物層中之(P1)成分之聚合反應可根據(P1)成分所包含之聚合性碳-碳雙鍵之種類而選擇適當之方法而進行。例如,於(P1)成分包含甲基丙烯醯基或丙烯醯基之情形時,(P1)成分之聚合反應可以藉由加熱而進行。The polymerization reaction of the component (P1) in the adhesive composition layer can be performed by selecting an appropriate method according to the type of polymerizable carbon-carbon double bonds contained in the component (P1). For example, when the component (P1) contains a methacryloyl group or an acrylyl group, the polymerization reaction of the component (P1) can be performed by heating.
作為加熱溫度,例如,可例舉80~350℃、100~300℃、130~300℃、或150~300℃等。 加熱時間只要是足以使(P1)成分進行聚合而硬化之時間即可,沒有特別限定。作為加熱時間,例如,較佳為5~180分鐘,更佳為10~120分鐘,或者進而較佳為15~60分鐘。上述硬化反應例如可以於氮氣氛圍下進行。 Examples of the heating temperature include 80 to 350°C, 100 to 300°C, 130 to 300°C, or 150 to 300°C. The heating time is not particularly limited as long as it is a time sufficient to polymerize and harden the component (P1). The heating time is, for example, preferably 5 to 180 minutes, more preferably 10 to 120 minutes, or even more preferably 15 to 60 minutes. The above-mentioned hardening reaction can be carried out in a nitrogen atmosphere, for example.
藉由本步驟,接著劑組合物層3'中之(P1)成分進行交聯而硬化,形成作為接著劑組合物層3'之硬化物之接著層3。由此,支持體12與半導體基板4暫時接著。其結果,能夠得到積層體100。Through this step, the component (P1) in the adhesive composition layer 3' is cross-linked and hardened, and the adhesive layer 3 is formed as a hardened product of the adhesive composition layer 3'. Thereby, the support 12 and the semiconductor substrate 4 are temporarily connected. As a result, the laminated body 100 can be obtained.
[任意步驟] 本實施方式之積層體之製造方法除了上述步驟以外亦可包括其他步驟。作為其他步驟,例如,可例舉各種機械處理或化學處理(研磨、化學機械研磨(CMP)等薄膜化處理,化學氣相沈積(CVD)、物理氣相沈積(PVD)等高溫、真空下之處理,使用了有機溶劑、酸性處理液、鹼性處理液等化學藥品之處理,電鍍處理,活性光線之照射,加熱、冷卻處理等)等。 [any step] The manufacturing method of the laminated body of this embodiment may also include other steps in addition to the above-mentioned steps. Examples of other steps include various mechanical or chemical treatments (polishing, chemical mechanical polishing (CMP) and other thin film treatments), chemical vapor deposition (CVD), physical vapor deposition (PVD) and other high-temperature and vacuum treatments. Treatment, treatment using chemicals such as organic solvents, acidic treatment solutions, alkaline treatment solutions, electroplating treatment, irradiation of active light, heating, cooling treatment, etc.).
(積層體之製造方法(2)) 本發明之第4形態之積層體之製造方法之特徵在於:於利用上述第3形態之積層體之製造方法得到積層體之後,進而包括形成電子裝置之電子裝置形成步驟,上述電子裝置為包含金屬或半導體之構件與將上述構件密封或絕緣之樹脂的複合體。 (Manufacturing method of laminated body (2)) A method for manufacturing a laminated body according to a fourth aspect of the present invention is characterized in that, after obtaining the laminated body using the method for manufacturing a laminated body according to the third aspect, the invention further includes an electronic device forming step of forming an electronic device, and the electronic device is made of metal. Or a composite of a semiconductor component and a resin that seals or insulates the component.
利用本實施方式之積層體之製造方法得到之積層體係依序積層有支持體、接著層及電子裝置之積層體。該積層體可藉由對利用上述第3形態之積層體之製造方法得到之積層體進行電子裝置形成步驟而得到。The laminate system obtained by the method for manufacturing a laminate of this embodiment is a laminate in which a support, an adhesive layer, and an electronic device are sequentially laminated. This laminated body can be obtained by subjecting the laminated body obtained by the manufacturing method of the laminated body of the said 3rd aspect to the electronic device formation process.
[電子裝置形成步驟] 本實施方式之積層體之製造方法包括電子裝置形成步驟。電子裝置形成步驟係形成電子裝置之步驟,上述電子裝置為包含金屬或半導體之構件與將上述構件密封或絕緣之樹脂的複合體。 電子裝置形成步驟可包括密封步驟、研削步驟、佈線層形成步驟中之任一者。一實施方式中,電子裝置形成步驟包括基板固定步驟及密封步驟。於此情形時,電子裝置形成步驟可進而包括研削步驟及佈線層形成步驟。 [Electronic device forming step] The method of manufacturing a laminated body according to this embodiment includes an electronic device forming step. The electronic device forming step is a step of forming an electronic device that is a composite of a member including a metal or a semiconductor and a resin that seals or insulates the member. The electronic device forming step may include any one of a sealing step, a grinding step, and a wiring layer forming step. In one embodiment, the electronic device forming step includes a substrate fixing step and a sealing step. In this case, the electronic device forming step may further include a grinding step and a wiring layer forming step.
・關於密封步驟 密封步驟是使用密封材料將固定於支持體上之基板密封之步驟。 圖7(a)中,得到了積層體110,其中,經由接著層3而暫時接著於支持體1之半導體基板4整體被密封材料層5密封。 ・About sealing procedures The sealing step is a step of sealing the substrate fixed on the support using a sealing material. In FIG. 7( a ), a laminated body 110 is obtained in which the entire semiconductor substrate 4 temporarily adhered to the support 1 via the adhesive layer 3 is sealed by the sealing material layer 5 .
密封步驟中,將加熱至例如130~170℃之密封材料維持高黏度之狀態,以覆蓋半導體基板4之方式供給至接著層3上,進行壓縮成形,藉此製作於接著層3上設有密封材料層5之積層體110。 此時,溫度條件例如為130~170℃。 施加於半導體基板4之壓力例如為50~500 N/cm 2。 In the sealing step, the sealing material heated to, for example, 130 to 170° C. is maintained in a high-viscosity state, is supplied to the adhesive layer 3 to cover the semiconductor substrate 4, and is compressed and molded, thereby creating a sealing material on the adhesive layer 3. Laminated body 110 of material layer 5 . At this time, the temperature condition is, for example, 130 to 170°C. The pressure applied to the semiconductor substrate 4 is, for example, 50 to 500 N/cm 2 .
密封材料層5較佳以將接著層3上之半導體基板4全部覆蓋之方式設置,而不是設置於各半導體基板4之每個上。The sealing material layer 5 is preferably provided so as to cover all the semiconductor substrates 4 on the adhesive layer 3 rather than being provided on each of the semiconductor substrates 4 .
・關於研削步驟 研削步驟係於上述密封步驟之後、以使半導體基板之一部分露出之方式對密封體中之密封材料部分(密封材料層5)進行研削之步驟。 密封材料部分之研削例如藉由下述方式進行:如圖7(b)所示,將密封材料層5削至與半導體基板4大致同等之厚度。 ・About grinding procedures The grinding step is a step of grinding the sealing material portion (sealing material layer 5) in the sealing body in such a manner that a portion of the semiconductor substrate is exposed after the above-mentioned sealing step. The sealing material portion is ground by, for example, the following method: as shown in FIG. 7(b) , the sealing material layer 5 is ground to a thickness substantially equal to that of the semiconductor substrate 4 .
・關於佈線層形成步驟 佈線層形成步驟係於上述研削步驟之後、於上述露出之半導體基板上形成佈線層之步驟。 圖7(c)中,於半導體基板4及密封材料層5上形成了佈線層6。由此,能夠得到積層體120。積層體120中,半導體基板4、密封材料層5及佈線層6構成電子裝置456。 ・About wiring layer formation steps The wiring layer forming step is a step of forming a wiring layer on the exposed semiconductor substrate after the grinding step. In FIG. 7(c), the wiring layer 6 is formed on the semiconductor substrate 4 and the sealing material layer 5. Thereby, the laminated body 120 can be obtained. In the laminated body 120 , the semiconductor substrate 4 , the sealing material layer 5 and the wiring layer 6 constitute an electronic device 456 .
作為形成佈線層6之方法,例如,可例舉以下之方法。 首先,於密封材料層5上形成氧化矽(SiO x)、感光性樹脂等之介電層。包含氧化矽之介電層例如可藉由濺鍍法、真空蒸鍍法等而形成。包含感光性樹脂之介電層例如可藉由利用旋塗、浸漬、輥刀塗佈、噴塗、狹縫塗佈等方法於密封材料層5上塗佈感光性樹脂而形成。 As a method of forming the wiring layer 6, for example, the following method can be cited. First, a dielectric layer of silicon oxide (SiO x ), photosensitive resin, etc. is formed on the sealing material layer 5 . The dielectric layer containing silicon oxide can be formed by, for example, sputtering, vacuum evaporation, or the like. The dielectric layer containing the photosensitive resin can be formed by coating the photosensitive resin on the sealing material layer 5 using methods such as spin coating, dipping, roller knife coating, spray coating, and slit coating.
繼而,利用金屬等導電體於介電層形成佈線。作為形成佈線之方法,例如,可使用光微影(抗蝕劑微影)等微影處理、蝕刻處理等公知之半導體製程方法。作為此種微影處理,例如,可例舉使用了正型抗蝕劑材料之微影處理、使用了負型抗蝕劑材料之微影處理。Then, conductors such as metal are used to form wiring on the dielectric layer. As a method of forming the wiring, for example, known semiconductor manufacturing methods such as photolithography (resist lithography) and etching can be used. Examples of such photolithography include photolithography using a positive resist material and photolithography using a negative resist material.
本實施方式之積層體之製造方法中,可進而於佈線層6上進行凸塊之形成、或元件之安裝。元件向佈線層6上之安裝例如可使用貼片機等進行。In the method of manufacturing a laminated body of this embodiment, bumps can be formed or components can be mounted on the wiring layer 6 . The components can be mounted on the wiring layer 6 using, for example, a placement machine.
(積層體之製造方法(3)) 本發明之第5形態之積層體之製造方法之特徵在於,其係依序積層有支持體、接著層及電子裝置之積層體之製造方法,上述製造方法包括下述步驟:於上述支持體上塗佈上述第1形態之接著劑組合物而形成上述接著劑組合物之層之步驟(接著劑組合物層形成步驟);於上述接著劑組合物層上形成電子裝置之電子裝置形成步驟,上述電子裝置係包含金屬或半導體之構件與將上述構件密封或絕緣之樹脂的複合體(電子裝置形成步驟);以及,使上述接著劑組合物層硬化而形成接著層之步驟(接著層形成步驟)。 (Manufacturing method of laminated body (3)) A method for manufacturing a laminated body according to a fifth aspect of the present invention is characterized in that it is a method for manufacturing a laminated body in which a support, an adhesive layer, and an electronic device are sequentially laminated, and the manufacturing method includes the following steps: The step of applying the adhesive composition of the above-mentioned first form to form a layer of the above-mentioned adhesive composition (the adhesive composition layer forming step); the electronic device forming step of forming an electronic device on the above-mentioned adhesive composition layer, the above-mentioned The electronic device is a composite including a metal or semiconductor member and a resin that seals or insulates the member (electronic device forming step); and a step of hardening the adhesive composition layer to form an adhesive layer (adhesive layer forming step) .
作為藉由本實施方式之積層體之製造方法得到之積層體,與上述第4形態涉及之製造方法同樣地為依序積層有支持體、接著層及電子裝置之積層體。The laminated body obtained by the manufacturing method of the laminated body of this embodiment is a laminated body in which a support body, an adhesive layer, and an electronic device are laminated|stacked in this order similarly to the manufacturing method concerning the said 4th aspect.
本實施方式之製造方法中,接著劑組合物層形成步驟可與上述第3形態之積層體之製造方法中之接著劑組合物層形成步驟同樣地進行。In the manufacturing method of this embodiment, the adhesive composition layer forming step can be performed in the same manner as the adhesive composition layer forming step in the manufacturing method of the laminated body of the third aspect.
本實施方式之製造方法中,於接著劑組合物層形成步驟之後,進行電子裝置形成步驟。作為該電子裝置形成步驟,可包括佈線層形成步驟。電子裝置形成步驟可進而包括半導體基板載置步驟、密封步驟、及研削步驟等。又,電子裝置形成步驟可為經由接著劑組合物層而將密封體(其係藉由密封材料將半導體基板密封而成者)載置於支持體上之步驟。In the manufacturing method of this embodiment, after the adhesive composition layer forming step, the electronic device forming step is performed. As the electronic device forming step, a wiring layer forming step may be included. The electronic device forming step may further include a semiconductor substrate mounting step, a sealing step, a grinding step, and the like. Moreover, the electronic device forming step may be a step of placing a sealing body (which seals the semiconductor substrate with a sealing material) on the support through the adhesive composition layer.
接著層形成步驟可與上述第3形態之積層體之製造方法中之接著層形成步驟同樣地進行。The step of forming the subsequent layer can be performed in the same manner as the step of forming the subsequent layer in the method of manufacturing the laminated body of the third aspect.
於接著層形成步驟之後,可進而視需要進行電子裝置形成步驟。該電子裝置形成步驟例如可包括半導體基板載置步驟、密封步驟、及研削步驟等。After the subsequent layer forming step, an electronic device forming step may be further performed if necessary. The electronic device forming step may include, for example, a semiconductor substrate mounting step, a sealing step, and a grinding step.
根據上述第3~第5形態之積層體之製造方法,經由耐熱性高之接著層而將支持體、與半導體基板或電子裝置暫時接著,因此能夠穩定地製造依序積層有支持體、接著層、及半導體基板或電子裝置之積層體。該積層體係於基於扇出型技術(其中,設置於半導體基板之端子安裝於延伸至晶片區域外之佈線層)之過程中製作之積層體。According to the manufacturing method of the laminated body of the above-mentioned third to fifth aspects, the support and the semiconductor substrate or the electronic device are temporarily connected via the highly heat-resistant adhesive layer. Therefore, it is possible to stably manufacture the support and the adhesive layer laminated in this order. , and laminates of semiconductor substrates or electronic devices. The laminate system is a laminate produced in a process based on fan-out technology in which terminals provided on a semiconductor substrate are mounted on wiring layers extending outside the chip area.
(電子零件之製造方法) 本發明之第6形態之電子零件之製造方法之特徵在於,於利用上述第3~第5中任一方式之積層體之製造方法得到積層體之後,包括下述步驟:介隔上述支持體向上述接著層照射光而使上述接著層改質,由此將上述電子裝置與上述支持體分離之步驟(以下,亦稱為「分離步驟」);以及,利用酸或鹼將上述接著層中之胺基甲酸酯鍵分解,由此將上述接著層去除之步驟(以下,亦稱為「接著層去除步驟」)。 (Manufacturing method of electronic components) A method for manufacturing an electronic component according to a sixth aspect of the present invention is characterized in that, after obtaining the laminated body using the method for manufacturing a laminated body in any one of the above-described third to fifth aspects, the method includes the following steps: The step of irradiating the above-mentioned adhesive layer with light to modify the above-mentioned adhesive layer, thereby separating the above-mentioned electronic device from the above-mentioned support (hereinafter also referred to as the "separation step"); and using acid or alkali to separate the above-mentioned adhesive layer. The step of removing the above-mentioned adhesive layer by decomposing the urethane bond (hereinafter also referred to as the "adhesive layer removal step").
圖8係對半導體封裝(電子零件)之製造方法之一實施方式進行說明之概略步驟圖。圖8(a)係示出積層體120之圖,圖8(b)係對分離步驟進行說明之圖,圖8(c)係對接著層去除步驟進行說明之圖。8 is a schematic step diagram illustrating one embodiment of a manufacturing method of a semiconductor package (electronic component). FIG. 8(a) is a diagram showing the laminated body 120, FIG. 8(b) is a diagram explaining the separation step, and FIG. 8(c) is a diagram explaining the adhesive layer removal step.
[分離步驟] 分離步驟係介隔支持體1向接著層3照射光(箭頭)而使接著層3改質,由此將電子裝置456與支持體1分離之步驟。 如圖8(a)所示,分離步驟中,介隔能使光透過之支持體1,向接著層3照射光(箭頭),由此使接著層3改質。 [Separation step] The separation step is a step in which the electronic device 456 is separated from the support 1 by irradiating light (arrow) to the adhesive layer 3 through the support 1 to modify the adhesive layer 3 . As shown in FIG. 8(a) , in the separation step, the adhesive layer 3 is irradiated with light (arrow) through the support 1 that can transmit light, thereby modifying the adhesive layer 3 .
分離步驟中使用之光之波長根據300~800 nm之波長區域中的接著層3所含有之結構X能吸收之光之波長而選擇。 照射之光之種類可根據支持體1之透過性而適宜選擇,例如,可使用YAG雷射、紅寶石雷射、玻璃雷射、YVO 4雷射、LD雷射、光纖雷射等固體雷射、色素雷射等液體雷射、CO 2雷射、準分子雷射、Ar雷射、He-Ne雷射等氣體雷射、半導體雷射、自由電子雷射等雷射光、非雷射光。由此,使接著層3改質,能夠成為可容易地將支持體1與電子裝置456分離之狀態。 The wavelength of the light used in the separation step is selected based on the wavelength of light that can be absorbed by the structure X contained in the adhesive layer 3 in the wavelength range of 300 to 800 nm. The type of light to be irradiated can be appropriately selected according to the transmittance of the support 1. For example, solid lasers such as YAG laser, ruby laser, glass laser, YVO 4 laser, LD laser, and fiber laser can be used. Liquid lasers such as pigment lasers, CO 2 lasers, excimer lasers, Ar lasers, He-Ne lasers and other gas lasers, semiconductor lasers, free electron lasers and other laser light, non-laser light. Thereby, the adhesive layer 3 is modified, and the support 1 and the electronic device 456 can be easily separated.
照射雷射光之情形時,作為雷射光照射條件之一例,可例舉以下之條件。 雷射光之平均輸出值較佳為1.0 W以上、5.0 W以下,更佳為3.0 W以上、4.0 W以下。雷射光之重複頻率較佳為20 kHz以上、60 kHz以下,更佳為30 kHz以上、50 kHz以下。雷射光之掃描速度較佳為100 mm/s以上、10000 mm/s以下。 When irradiating laser light, the following conditions can be cited as an example of laser light irradiation conditions. The average output value of laser light is preferably 1.0 W or more and 5.0 W or less, and more preferably 3.0 W or more and 4.0 W or less. The repetition frequency of laser light is preferably between 20 kHz and below 60 kHz, and more preferably between 30 kHz and below 50 kHz. The scanning speed of laser light is preferably above 100 mm/s and below 10000 mm/s.
向接著層3照射光(箭頭)而使接著層3改質後,如圖8(b)所示,將支持體1自電子裝置456分離。 例如,藉由沿著支持體1與電子裝置456彼此分離之方向施加力,從而將支持體1與電子裝置456分離。具體而言,於將支持體1或電子裝置456側(佈線層6)中之一者固定於平台之狀態下,將另一者利用具備波紋管墊等吸附墊之分離板進行吸附保持並提起,由此能夠將支持體1與電子裝置456分離。 對積層體200施加之力根據積層體200之大小等而適宜地調整即可,沒有限定,例如,若是直徑為300 mm左右之積層體,則可藉由施加0.1~5 kgf(0.98~49 N)左右之力而使支持體1與電子裝置456適宜地分離。 After the adhesive layer 3 is irradiated with light (arrow) and modified, the support 1 is separated from the electronic device 456 as shown in FIG. 8(b) . For example, the support 1 and the electronic device 456 are separated by applying force along the direction in which the support 1 and the electronic device 456 are separated from each other. Specifically, while one of the support 1 or the electronic device 456 side (wiring layer 6) is fixed to the platform, the other is suction-held and lifted using a separation plate equipped with an adsorption pad such as a bellows pad. , thereby enabling the support 1 to be separated from the electronic device 456 . The force applied to the laminated body 200 can be appropriately adjusted according to the size of the laminated body 200, etc., and is not limited. For example, if the diameter of the laminated body is about 300 mm, the force exerted on the laminated body 200 can be adjusted by applying 0.1 to 5 kgf (0.98 to 49 N). ) to properly separate the support 1 and the electronic device 456.
[接著層去除步驟] 本實施方式之電子零件之製造方法包括接著層去除步驟。接著層去除步驟係利用酸或鹼將接著層中之胺基甲酸酯鍵分解從而去除上述接著層之步驟。 圖8(b)中,於分離步驟之後,於電子裝置456附著有接著層3。於本步驟中,藉由使用酸或鹼將接著層3分解,從而去除接著層3,得到電子零件50。 [Next layer removal step] The manufacturing method of electronic components of this embodiment includes an adhesive layer removal step. The subsequent layer removal step is a step of using acid or alkali to decompose the urethane bonds in the adhesive layer to remove the above-mentioned adhesive layer. In FIG. 8(b) , after the separation step, the adhesive layer 3 is attached to the electronic device 456 . In this step, the adhesive layer 3 is decomposed using acid or alkali, thereby removing the adhesive layer 3 to obtain the electronic component 50 .
本步驟中,利用酸或鹼將接著層3中之胺基甲酸酯鍵分解。接著層3含有藉由上述(I)成分及(O)成分之共聚而形成之聚胺酯樹脂、或藉由上述(P1)成分之聚合而形成之交聯型聚胺酯樹脂。該等聚胺酯樹脂可藉由利用酸或鹼進行處理,從而將胺基甲酸酯鍵切斷而分解。由此,能夠將接著層3分解,從而將附著於電子裝置456之接著層3之殘渣去除。In this step, acid or alkali is used to decompose the urethane bond in the adhesive layer 3. The subsequent layer 3 contains a polyurethane resin formed by copolymerization of the above-mentioned component (I) and (O), or a cross-linked polyurethane resin formed by polymerization of the above-mentioned component (P1). These polyurethane resins can be decomposed by cutting the urethane bonds by treating them with acid or alkali. Thereby, the adhesive layer 3 can be decomposed, and the residue attached to the adhesive layer 3 of the electronic device 456 can be removed.
本步驟中使用之酸或鹼只要能將胺基甲酸酯鍵分解即可,沒有特別限定。作為能將胺基甲酸酯鍵分解之酸,例如,可例舉鹽酸、硫酸、硝酸等,但並不限於該等。又,作為能將胺基甲酸酯鍵分解之鹼,可例舉氫氧化鉀、氫氧化鈉等無機鹼;及四甲基氫氧化銨、單乙醇胺等有機胺類,但並不限於該等。The acid or alkali used in this step is not particularly limited as long as it can decompose the urethane bond. Examples of the acid capable of decomposing a urethane bond include, but are not limited to, hydrochloric acid, sulfuric acid, nitric acid, and the like. Examples of the base capable of decomposing the urethane bond include, but are not limited to, inorganic bases such as potassium hydroxide and sodium hydroxide; and organic amines such as tetramethylammonium hydroxide and monoethanolamine. .
上述酸或鹼可溶解於溶劑中而作為用於去除接著層之處理液使用。作為上述溶劑,較佳為極性溶劑,例如,可例舉二甲基亞碸(DMSO)、N-甲基吡咯啶酮(NMP)、二乙二醇單丁醚、二乙二醇、乙二醇、丙二醇等。 上述用於去除接著層之處理液除了上述成分以外亦可含有界面活性劑等公知之添加劑。 作為上述處理液中之酸或鹼之含量,沒有特別限定,例如,可例舉1~50質量%。又,作為上述處理液中之極性溶劑之含量,可例舉50~99質量%。 用於去除接著層之處理液可使用市售之鹼性處理液或酸性處理液。作為市售之處理液,例如,可例舉ST-120、ST-121(均為東京應化工業公司製)等。 藉由使包含酸或鹼之如上所述之處理液與接著層3接觸,接著層3中之胺基甲酸酯鍵分解,從而能夠將接著層3去除。 The above acid or alkali can be dissolved in a solvent and used as a treatment liquid for removing the adhesive layer. As the above-mentioned solvent, a polar solvent is preferred, and examples thereof include dimethylstyrene (DMSO), N-methylpyrrolidone (NMP), diethylene glycol monobutyl ether, diethylene glycol, and ethylene glycol. alcohol, propylene glycol, etc. The above-mentioned treatment liquid for removing the adhesive layer may also contain known additives such as surfactants in addition to the above-mentioned components. The acid or alkali content in the treatment liquid is not particularly limited, but may be, for example, 1 to 50% by mass. Moreover, as content of the polar solvent in the said processing liquid, 50-99 mass % can be mentioned. As a treatment solution for removing the adhesive layer, a commercially available alkaline treatment solution or acidic treatment solution can be used. Examples of commercially available treatment liquids include ST-120 and ST-121 (both manufactured by Tokyo Oika Kogyo Co., Ltd.). By bringing the above-described treatment liquid containing acid or alkali into contact with the adhesive layer 3, the urethane bonds in the adhesive layer 3 are decomposed, and the adhesive layer 3 can be removed.
本實施方式之電子零件之製造方法中,於上述之接著層去除步驟之後,亦可進而對電子零件50進行焊球形成、切割、或氧化膜形成等處理。In the method of manufacturing an electronic component in this embodiment, after the above-mentioned step of removing the adhesive layer, the electronic component 50 may further be subjected to processes such as solder ball formation, cutting, or oxide film formation.
根據本實施方式之電子零件之製造方法,使用含有包含聚合性碳-碳不飽和鍵之聚胺酯樹脂(P1)、及聚合起始劑(A)之接著劑組合物,使上述接著劑組合物硬化,由此將半導體基板等與支持體暫時接著。因此,能夠形成亦可耐受電子裝置形成製程等中之高溫處理的耐熱性高之接著層。 聚胺酯樹脂(P1)具有包含能吸收波長300~800 nm之範圍內之至少一部分光之結構(結構X)之結構單元(u1),因此,藉由照射該波長之光,從而接著層發生改質,接著力降低。因此,即使沒有分離層,也能夠容易地將暫時接著之半導體基板等與支持體分離。結構X以聚胺酯樹脂(P1)之結構單元之形式被引入,因此,能夠於維持良好之接著性之情形時增加結構X之含量。由此,能同時實現良好之接著性與分離性。 進而,附著於自支持體分離後之半導體基板等上之接著層之殘渣可藉由利用酸或鹼將上述接著層中之胺基甲酸酯鍵分解而容易地去除。 [實施例] According to the manufacturing method of electronic components of this embodiment, an adhesive composition containing a polyurethane resin (P1) containing a polymerizable carbon-carbon unsaturated bond and a polymerization initiator (A) is used, and the adhesive composition is hardened. , thereby temporarily bonding the semiconductor substrate and the like to the support. Therefore, it is possible to form a highly heat-resistant adhesive layer that can withstand high-temperature processing in electronic device formation processes and the like. The polyurethane resin (P1) has a structural unit (u1) including a structure (structure , the bonding force decreases. Therefore, even if there is no separation layer, the semiconductor substrate etc. which are temporarily connected can be easily separated from the support. Structure X is introduced in the form of a structural unit of the polyurethane resin (P1). Therefore, the content of structure X can be increased while maintaining good adhesion. As a result, good adhesion and detachability can be achieved at the same time. Furthermore, residues attached to the adhesive layer on the semiconductor substrate or the like separated from the support can be easily removed by decomposing the urethane bonds in the adhesive layer using acid or alkali. [Example]
以下,藉由實施例而更詳細地說明本發明,但本發明並不限於該等例子。Hereinafter, the present invention will be described in more detail through examples, but the present invention is not limited to these examples.
<聚胺酯樹脂之合成例1:聚胺酯樹脂(P1-1)> 向具備攪拌機、滴液漏斗、冷凝管及溫度計之燒瓶中添加丙二醇單甲醚乙酸酯(PGMEA)、聚碳酸酯二醇(長鏈)16份、聚碳酸酯二醇(短鏈)16份、甘油單丙烯酸酯13份、單體(T-33)20份、及抑制劑,於氮氣流下均勻地混合。繼而,將異佛爾酮二異氰酸酯35份裝入至滴液漏斗,以30分鐘勻速地滴加。於滴加結束後,進行30分鐘老化(aging)。其後,添加鉍觸媒,升溫至65℃,進行4~5小時老化。繼而,添加2HEA(丙烯酸2-羥基乙酯),進行1小時老化,於異氰酸基(NCO)消失之時間點結束反應。所得到之聚胺酯樹脂(P1-1)之重量平均分子量(Mw)為15800。聚胺酯樹脂(P1-1)之C=C當量(按每1當量聚合性碳-碳雙鍵計之聚胺酯樹脂之分子量)為1230 g/eq.。 <Synthesis Example 1 of Polyurethane Resin: Polyurethane Resin (P1-1)> Add 16 parts of propylene glycol monomethyl ether acetate (PGMEA), polycarbonate diol (long chain), and 16 parts of polycarbonate diol (short chain) to a flask equipped with a stirrer, dropping funnel, condenser tube and thermometer. , 13 parts of glycerol monoacrylate, 20 parts of monomer (T-33), and inhibitors were uniformly mixed under nitrogen flow. Next, 35 parts of isophorone diisocyanate was put into a dropping funnel and added dropwise at a constant rate for 30 minutes. After the dropwise addition, aging was performed for 30 minutes. Thereafter, a bismuth catalyst is added, the temperature is raised to 65°C, and aging is performed for 4 to 5 hours. Next, 2HEA (2-hydroxyethyl acrylate) was added, aging was performed for 1 hour, and the reaction was completed when the isocyanate group (NCO) disappeared. The weight average molecular weight (Mw) of the obtained polyurethane resin (P1-1) was 15,800. The C=C equivalent (the molecular weight of the polyurethane resin calculated per 1 equivalent of polymerizable carbon-carbon double bonds) of the polyurethane resin (P1-1) is 1230 g/eq.
<聚胺酯樹脂之合成例2:聚胺酯樹脂(P1-2)> 使單體組成為表1所示之組成,除此以外,利用與合成例1同樣之方法合成聚胺酯樹脂(P1-2)。所得到之聚胺酯樹脂(P1-2)之重量平均分子量(Mw)為32000。聚胺酯樹脂(P1-2)之C=C當量(按每1當量聚合性碳-碳雙鍵計之聚胺酯樹脂之分子量)為1230 g/eq.。 <Synthesis Example 2 of Polyurethane Resin: Polyurethane Resin (P1-2)> Polyurethane resin (P1-2) was synthesized in the same manner as in Synthesis Example 1 except that the monomer composition was set to the composition shown in Table 1. The weight average molecular weight (Mw) of the obtained polyurethane resin (P1-2) was 32,000. The C=C equivalent (the molecular weight of the polyurethane resin calculated per 1 equivalent of polymerizable carbon-carbon double bonds) of the polyurethane resin (P1-2) is 1230 g/eq.
<聚胺酯樹脂之合成例3:聚胺酯樹脂(P1-3)> 使單體組成為表1所示之組成,除此以外,利用與合成例1同樣之方法合成聚胺酯樹脂(P1-3)。所得到之聚胺酯樹脂(P1-3)之重量平均分子量(Mw)為33200。聚胺酯樹脂(P1-3)之C=C當量(按每1當量聚合性碳-碳雙鍵計之聚胺酯樹脂之分子量)為1230 g/eq.。 <Synthesis Example 3 of Polyurethane Resin: Polyurethane Resin (P1-3)> Polyurethane resin (P1-3) was synthesized in the same manner as in Synthesis Example 1 except that the monomer composition was as shown in Table 1. The weight average molecular weight (Mw) of the obtained polyurethane resin (P1-3) was 33,200. The C=C equivalent of the polyurethane resin (P1-3) (the molecular weight of the polyurethane resin calculated per 1 equivalent of polymerizable carbon-carbon double bonds) is 1230 g/eq.
<聚胺酯樹脂之合成例4:聚胺酯樹脂(P2-1)> 使單體組成為表1所示之組成,除此以外,利用與合成例1同樣之方法合成聚胺酯樹脂(P2-1)。所得到之聚胺酯樹脂(P2-1)之重量平均分子量(Mw)為16000。聚胺酯樹脂(P2-1)之C=C當量(按每1當量聚合性碳-碳雙鍵計之聚胺酯樹脂之分子量)為1230 g/eq.。 <Synthesis Example 4 of Polyurethane Resin: Polyurethane Resin (P2-1)> Polyurethane resin (P2-1) was synthesized in the same manner as in Synthesis Example 1 except that the monomer composition was as shown in Table 1. The weight average molecular weight (Mw) of the obtained polyurethane resin (P2-1) was 16,000. The C=C equivalent (the molecular weight of the polyurethane resin calculated per 1 equivalent of polymerizable carbon-carbon double bonds) of the polyurethane resin (P2-1) is 1230 g/eq.
[表1]
表1中之各成分之詳情如下所述。 異佛爾酮二異氰酸酯(IPDI)。 Details of each ingredient in Table 1 are as follows. Isophorone diisocyanate (IPDI).
[化12] [Chemical 12]
聚碳酸酯二醇(長鏈):下述式(PC-1-1)所表示之聚碳酸酯二醇(R=-(CH 2) 6-、-(CH 2) 5-),Mw=1,000。 聚碳酸酯二醇(短鏈):下述式(PC-1-1)所表示之聚碳酸酯二醇(R=-(CH 2) 6-、-(CH 2) 5-),Mw=500。 Polycarbonate diol (long chain): Polycarbonate diol (R=-(CH 2 ) 6 -, -(CH 2 ) 5 -) represented by the following formula (PC-1-1), Mw= 1,000. Polycarbonate diol (short chain): polycarbonate diol (R=-(CH 2 ) 6 -, -(CH 2 ) 5 -) represented by the following formula (PC-1-1), Mw= 500.
[化13] [Chemical 13]
甘油單丙烯酸酯(GLMA)。Glyceryl monoacrylate (GLMA).
[化14] [Chemical 14]
單體(U1-1):下述式(U1-1)所表示之化合物。 單體(U1-2):下述式(U1-2)所表示之化合物。 Monomer (U1-1): a compound represented by the following formula (U1-1). Monomer (U1-2): a compound represented by the following formula (U1-2).
[化15] [Chemical 15]
<接著劑組合物之製備> (實施例1~3、比較例1) 將表2所示之成分加以混合,分別製備各例之接著劑組合物。 <Preparation of adhesive composition> (Examples 1 to 3, Comparative Example 1) The ingredients shown in Table 2 were mixed to prepare adhesive compositions for each example.
[表2]
表2中,各縮寫分別具有以下之含義。[ ]內之數值為調配量(質量份)。 (P1)-1~(P1)-3:上述合成例1~3中合成之聚胺酯樹脂(P1-1)~(P1-3)。 (P2)-1:上述合成例4中合成之聚胺酯樹脂(P2-1)。 (A)-1:過氧化物(Percumyl(註冊商標)D,日本油脂股份有限公司)。 (S)-1:PGMEA。 In Table 2, each abbreviation has the following meaning. The value in [ ] is the blending amount (parts by mass). (P1)-1 to (P1)-3: the polyurethane resins (P1-1) to (P1-3) synthesized in the above synthesis examples 1 to 3. (P2)-1: The polyurethane resin (P2-1) synthesized in the above-mentioned Synthesis Example 4. (A)-1: Peroxide (Percumyl (registered trademark) D, Nippon Oils and Fats Co., Ltd.). (S)-1: PGMEA.
<積層體之製造> 將各例之接著劑組合物旋塗於矽製之裸晶片(5 mm×5 mm),於100℃進行10分鐘烘烤,形成膜厚為25 μm之接著層。 其次,使用黏晶機(die bonder)(TRESKY公司製),將黏晶機之平板加熱至50℃,於350g之壓力、90秒鐘之條件下,經由上述接著層而將上述裸晶片壓接至裸玻璃支持體(厚度為0.7 mm,E-XG,CORNING公司)。其次,於180℃進行15分鐘加熱,使接著層硬化,得到積層體。 <Manufacture of laminated body> The adhesive compositions of each example were spin-coated on a bare silicon wafer (5 mm × 5 mm), and baked at 100°C for 10 minutes to form an adhesive layer with a film thickness of 25 μm. Next, use a die bonder (manufactured by TRESKY) to heat the flat plate of the die bonder to 50°C, and press the above-mentioned bare chip through the above-mentioned adhesive layer under the conditions of 350g pressure and 90 seconds. to bare glass support (thickness 0.7 mm, E-XG, CORNING Company). Next, heating was performed at 180° C. for 15 minutes to harden the adhesive layer, thereby obtaining a laminated body.
[分離性之評價] 使用IPEX848(308 nm XeCl,Light Machinery),於掃描速度為15.6 mm/秒(重疊(Overlap)80%)、頻率為60 kHz、光束尺寸為2×14 mm之條件下,自上述積層體之裸玻璃支持體側向上述接著層照射波長為308 nm之雷射光。其後,嘗試進行裸玻璃之剝離。基於以下之評價基準對分離性進行評價。將評價結果示於表3。 評價基準 〇:於雷射光照射量為300mJ/cm 2以下時發生了剝離。 ×:於雷射光照射量為300mJ/cm 2以下時未剝離。 [Evaluation of separation] Using IPEX848 (308 nm XeCl, Light Machinery), under the conditions of scanning speed of 15.6 mm/sec (overlap 80%), frequency of 60 kHz, and beam size of 2×14 mm, Laser light with a wavelength of 308 nm is irradiated from the side of the bare glass support of the above-mentioned laminate to the above-mentioned adhesive layer. Afterwards, an attempt was made to peel off the bare glass. Separability was evaluated based on the following evaluation criteria. The evaluation results are shown in Table 3. Evaluation criteria 〇: Peeling occurred when the laser light irradiation dose was 300 mJ/cm 2 or less. ×: No peeling occurred when the laser irradiation dose was 300 mJ/cm 2 or less.
[表3]
根據表3所示之結果,可確認使用實施例1~3之接著劑組合物而形成之接著層亦作為分離層而發揮功能。From the results shown in Table 3, it was confirmed that the adhesive layer formed using the adhesive compositions of Examples 1 to 3 also functions as a separation layer.
1:支持體 3:接著層 3':接著劑組合物層 4:半導體基板 5:密封材料層 6:佈線層 20:積層體 50:電子零件 100:積層體 100':積層體 110:積層體 120:積層體 200:積層體 300:積層體 400:積層體 456:電子裝置 645:電子裝置 1:Support 3:Add layer 3': Adhesive composition layer 4: Semiconductor substrate 5:Sealing material layer 6: Wiring layer 20: Laminated body 50:Electronic parts 100:Laminated body 100':Laminated body 110:Laminated body 120:Laminated body 200:Laminated body 300:Laminated body 400:Laminated body 456:Electronic devices 645:Electronic devices
圖1係示出應用了本發明之積層體之一實施方式之模式圖。 圖2係示出應用了本發明之積層體之一實施方式之模式圖。 圖3係示出應用了本發明之積層體之一實施方式之模式圖。 圖4係示出應用了本發明之積層體之一實施方式之模式圖。 圖5係對依序積層有支持體、接著劑組合物層、及半導體基板之積層體100'之製造方法之一實施方式進行說明之概略步驟圖。圖5(a)係對接著劑組合物層形成步驟進行說明之圖,圖5(b)係對半導體基板載置步驟進行說明之圖。 圖6係對接著層形成步驟進行說明之圖。 圖7係對製造積層體120之方法之一實施方式進行說明之概略步驟圖。圖7(a)係對密封步驟進行說明之圖,圖7(b)係對研削步驟進行說明之圖,圖7(c)係對佈線層形成步驟進行說明之圖。 圖8係對由積層體120製造半導體封裝(電子零件)之方法之一實施方式進行說明之概略步驟圖。圖8(a)係示出積層體200之圖,圖8(b)係對分離步驟進行說明之圖,圖8(c)係對接著層去除步驟進行說明之圖。 FIG. 1 is a schematic diagram showing an embodiment of a laminated body to which the present invention is applied. FIG. 2 is a schematic diagram showing an embodiment of a laminated body to which the present invention is applied. FIG. 3 is a schematic diagram showing an embodiment of a laminated body to which the present invention is applied. FIG. 4 is a schematic diagram showing an embodiment of a laminated body to which the present invention is applied. FIG. 5 is a schematic step diagram illustrating one embodiment of a manufacturing method of a laminated body 100' in which a support, an adhesive composition layer, and a semiconductor substrate are sequentially laminated. FIG. 5(a) is a diagram illustrating the adhesive composition layer forming step, and FIG. 5(b) is a diagram illustrating the semiconductor substrate mounting step. FIG. 6 is a diagram explaining the steps of forming an adhesive layer. FIG. 7 is a schematic step diagram illustrating one embodiment of the method of manufacturing the laminated body 120. FIG. 7(a) is a diagram explaining the sealing step, FIG. 7(b) is a diagram explaining the grinding step, and FIG. 7(c) is a diagram explaining the wiring layer forming step. FIG. 8 is a schematic step diagram illustrating one embodiment of a method of manufacturing a semiconductor package (electronic component) from the laminated body 120. FIG. 8(a) is a diagram showing the laminated body 200, FIG. 8(b) is a diagram explaining the separation step, and FIG. 8(c) is a diagram explaining the adhesive layer removal step.
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