TW202331317A - Wire grid polarizer, polarized light irradiation device including same, exposure device, angle adjustment method of wire grid polarizer, analyzer, angle adjustment method of analyzer - Google Patents

Abstract

The subject of the invention is to provide a wire grid polarizer capable of adjusting polarization axis direction with high accuracy. Polarization patterns (122) and non-polarization portions (124) are formed parallel to each other on the wire grid polarizer (110). Thus, angle adjustment is achieved by using a camera (116) to receive light (L) from a light source (112) transmitted through a polarization filter (114) polarized in a direction orthogonal to a polarization direction of light with a polarization pattern (122) and a non-polarization portion (124), the camera (116) moves relative to the wire grid polarizer (110) at an angle that should make the polarization pattern (122) consistent.

Description

Wire grid polarizer, polarized light irradiation device equipped with same, exposure device, angle adjustment method of wire grid polarizer, analyzer, angle adjustment method of analyzer

The present invention relates to, for example, a wire grid polarizer for exposure used in the manufacture of a liquid crystal panel, a polarized light irradiation device equipped with the same, an exposure device, and an angle adjustment method of the wire grid polarizer.

Liquid crystal alignment processing is required in the manufacture of liquid crystal panels, and as a polarizer for obtaining linearly polarized light for this liquid crystal alignment processing from unpolarized light emitted from a light source, a wire grid polarizer is generally used (for example, Patent Document 1 ).

A polarized light irradiation device equipped with a polarizer unit configured by arranging a plurality of such wire grid polarizers is used for liquid crystal alignment treatment, but it is necessary to align the polarization axis directions of the plurality of wire grid polarizers with a given direction ( reference direction) consistent adjustment.

As this adjustment method, an adjustment illuminance sensor is used to change the polarization of the adjustment object while receiving light transmitted through an adjustment polarizer (analyzer) whose polarization axis direction is known, an adjustment target polarizer, and an adjustment polarizer. The angle of the polarizer relative to the adjusting polarizer is adjusted so that the intensity of light received by the adjusting illuminance sensor reaches a peak value.

prior art literature

patent documents

Patent Document 1: Japanese Patent Application Laid-Open No. 10-153706

In view of this, our inventors are concentrating on further research, and embark on research and development and improvement, hoping to solve the above problems with a better invention, and the present invention comes out after continuous testing and modification.

The problem to be solved by the invention

However, if it is desired to perform adjustment based on the intensity of received light as in the conventional adjustment method, even if the angle of the polarizer to be adjusted is slightly changed in the vicinity of the peak of the intensity of received light, the intensity of light There is also a problem that it is difficult to perform high-accuracy adjustments such as adjustments in units of 0.1 deg because there are no significant changes.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a wire grid polarizer capable of adjusting the direction of the polarization axis with high precision, a polarized light irradiation device equipped with the same, an exposure device, and an angle adjustment of the wire grid polarizer method.

Technical solutions for solving problems

According to one aspect of the present invention, there is provided a wire grid polarizer,

The wire grid polarizer has a non-polarizing portion and a plurality of polarization patterns formed parallel to each other,

Angle adjustment is performed by receiving light from a light source that passes through a polarization filter polarized in a direction perpendicular to the polarization direction of light based on the polarization pattern and the non-polarization portion by a camera that is positioned along the This means that the uniform angle of the polarization pattern should be relatively shifted with respect to the wire grid polarizer.

Preferably,

The non-polarization portion is a non-polarization slit formed parallel to the polarization pattern.

Preferably,

The non-polarization portion includes a boundary line extending parallel to the polarization pattern.

Preferably,

A pair of the non-polarization portions are arranged such that the mutual boundary lines are located on an imaginary line extending parallel to the polarization pattern.

Preferably,

The non-polarization portion includes an orthogonal boundary line extending in a direction orthogonal to the polarization pattern.

Preferably,

A pair of the non-polarization portions are arranged such that the orthogonal boundary lines are located on an imaginary line extending in a direction perpendicular to the polarization pattern.

According to other aspects of the present invention, a polarized light irradiation device is provided, which has:

a wire grid polarizer as described above;

a polarizing filter polarizing in a direction orthogonal to the polarizing direction of the pattern for polarizing;

a light source emitting light toward the wire grid polarizer and the polarizing filter;

a camera that receives light emitted from the light source and transmitted through the non-polarizing portion and the polarizing filter; and

and an actuator for moving the camera along an angle at which the polarization patterns should be aligned.

Preferably,

also having a monitor for displaying said light received by said camera,

A mark is displayed on the monitor for confirming a moving range of the light in a direction perpendicular to a moving direction of the camera when the camera is moved by the actuator.

Preferably,

The marking is composed of a pair of marking lines arranged at a given interval,

The angle of the wire grid polarizer is adjusted so that the end edge of the light received by the camera is between a pair of the marking lines.

According to another aspect of this invention, the exposure apparatus provided with the above-mentioned polarized light irradiation apparatus is provided.

According to other aspects of the present invention, a method for adjusting the angle of a wire grid polarizer is provided,

The light from the light source is radiated toward the above-mentioned wire grid polarizer and a polarization filter polarized in a direction perpendicular to the polarization direction of the light based on the polarization pattern,

Light transmitted through the non-polarizing portion and the polarizing filter is received by a camera, and the camera is relatively moved relative to the wire grid polarizer along an angle at which the polarization patterns should be aligned.

According to another aspect of the present invention, there is provided an analyzer having a polarization plane and a pair of axial marks formed on a peripheral portion of a surface on which the polarization plane is formed, wherein,

an imaginary line connecting the pair of axial marks to each other is parallel to the polarization axis on the polarization plane,

The axial mark is captured by a camera, and the angle adjustment is performed by moving the analyzer relative to the camera at an angle at which the polarization axes should be aligned.

According to other aspects of the present invention, an analyzer is provided, which has a polarization plane and a non-polarization section,

By using a camera to receive the light passing through the non-polarized portion and the polarizing filter polarized in a direction perpendicular to the angle at which the polarization axis on the polarization plane should be coincident, and moving the analyzer along the The angle to be consistent is relatively moved relative to the camera, thereby adjusting the angle.

According to another aspect of the present invention, a method for adjusting the angle of a polarizer is provided. The analyzer has a polarization plane and a pair of axial marks formed on the peripheral portion of the surface on which the polarization plane is formed. The imaginary line connecting the axial marks to each other is parallel to the polarization axis on said polarization plane, wherein,

The axial mark is photographed by a camera, and the analyzer is moved relative to the camera at an angle at which the polarization axes should be aligned.

According to other aspects of the present invention, a method for adjusting the angle of a polarizer is provided,

radiating light toward an analyzer having a polarization plane and a non-polarization portion and a polarizing filter polarized in a direction perpendicular to an angle at which the polarization axes on the polarization plane should coincide,

The light transmitted through the non-polarized part is received by a camera, and the analyzer is relatively moved relative to the camera along the angle to be consistent.

Invention effect

According to the wire grid polarizer, the polarized light irradiation device having the same, the exposure device, and the polarized light irradiation method according to the present invention, since the wire grid polarizer is formed with a polarization pattern and a non-polarization portion, the polarized light is polarized from the light source toward the wire grid. Among the light emitted by the polarization filter polarized in the direction perpendicular to the polarization direction of the light of the polarization pattern of the wire grid polarizer, the light passing through the non-polarization part (that is, the polarization pattern) cannot be transmitted. The polarizing filter, while the light (that is polarized) that passes through the non-polarizing portion passes through the polarizing filter. Alternatively, the light (polarized) transmitted through the polarizing filter cannot pass through other than the non-polarization part (that is, the pattern for polarization), but passes through the non-polarization part.

Thus, when the light transmitted through the non-polarization part and the polarization filter is received by the camera, the region of light corresponding to the non-polarization part is obtained, so by using a camera that moves at an angle that should make the polarization patterns consistent Adjusting the angle of the light region enables angle adjustment of the wire grid polarizer.

Regarding the technical means of our inventors, several preferred embodiments will be described in detail below in conjunction with the drawings, so as to provide an in-depth understanding and recognition of the present invention.

(Structure of Exposure Device 10 )

Hereinafter, the exposure apparatus 10 provided with the polarized light irradiation apparatus 100 which concerns on embodiment of this invention to which it is applied is demonstrated. The exposure apparatus 10 is mainly used for manufacturing the photo-alignment film (work X) used for a liquid crystal panel. As shown in FIG. 1 , the exposure device 10 roughly includes a workpiece conveyance device 20 and a polarized light irradiation device 100 .

The workpiece conveying device 20 is a device for substantially horizontally conveying the photo-alignment film (work X) exposed by the exposure device 10 in a predetermined direction (the conveying direction of the workpiece X), and a known conveying device is used.

For example, the workpiece conveyance device 20 includes a stage unit 22 for placing the workpiece X, and a moving mechanism 24 for moving the stage unit 22 in the conveyance direction of the workpiece X and in a direction perpendicular to the conveyance direction of the workpiece X. .

The stage unit 22 includes a stage 26 for placing the workpiece X, a height adjustment mechanism 28 for adjusting the height of the stage 26, and a horizontal rotation mechanism 30 for horizontally rotating the stage 26. A holding mechanism 32 for holding the position of the workpiece X is provided on the surface of the stage 26 .

The horizontal rotation mechanism 30 uses an electric rotary actuator, and for the movement mechanism 24, a plurality of electric single-axis actuators are used in combination.

(Structure of polarized light irradiation device 100 )

As shown in FIG. 2 , the polarized light irradiation device 100 according to this embodiment roughly includes a wire grid polarizer 110 , a light source 112 , a polarization filter 114 , a camera 116 , an actuator 118 , a monitor 120 , and a rotation device 111 .

The wire grid polarizer 110 is a component for polarizing the light radiated from the light source 112 in a given direction. As shown in FIGS. 3 and 4 , it has: a glass substrate 121; A plurality of polarizing patterns 122 formed in a uniform manner; and a non-polarizing portion, that is, a “non-polarizing slit 124 ” formed parallel to the polarizing patterns 122 . In addition, in order to perform good processing, it is preferable that the extinction ratio (P polarization transmittance÷S polarization transmittance) of the polarization pattern 122 is approximately 50 or more. In addition, quartz glass is generally used as the glass substrate 121 .

As a specific example of the wire grid polarizer 110 (in particular, the polarizing pattern 122), a line-and-space structure in which linear metal or metal compound structures are arranged in parallel for a plurality of periods can be considered. The pitch is formed with a width shorter than the wavelength of light. As the "metal" mentioned here, aluminum, titanium, molybdenum, etc. are conceivable, and their oxides and compounds may also be used.

Since the non-polarization slit 124 is a portion that transmits the light from the light source 112 without being polarized, the portion where the polarization pattern 122 is not formed becomes the non-polarization slit 124 as shown in the figure.

In addition, in the present embodiment, the width of the non-polarizing slit 124 is set to be 0.5 mm or more and 1.0 mm or less. Of course, it is not limited to this range, but by making the width of the non-polarization slit 124 extremely small relative to the effective width of the wire grid polarizer 110 (approximately 1/50 or less and the effective width is 50mm, the non-polarization slit The width of the slit 124 is 1 mm or less), which is preferable in that it can suppress the adverse effect of the irradiation from the non-polarizing slit 124 on the alignment process (the same adverse effect as the low extinction ratio).

In addition, regarding the position of the non-polarization slit 124, in the present embodiment, in FIG. Especially limited, it can be located at any position in the left and right directions in the figure.

Furthermore, the non-polarization slit 124 may be continuous in a straight line as in the present embodiment, or may be intermittent. In addition, the length to which the non-polarization slit 124 extends is not particularly limited. Of course, from the viewpoint of angle adjustment accuracy, it is preferable to form the non-polarizing slits 124 continuously in a straight line.

In addition, when the exposure apparatus 10 provided with the polarized light irradiation apparatus 100 is scanning exposure, and the non-polarization slit 124 is arrange|positioned in the direction orthogonal to the scanning direction of the workpiece|work X, even if there exists the non-polarization slit 124 The non-polarized portion also has slight influence on the cumulative polarization energy and uniformity applied to the workpiece X.

In addition, the wire grid polarizer 110 is rotated horizontally or parallel to the polarizing filter 114 by the rotating device 111, whereby the angle of the direction in which the polarizing pattern 122 and the non-polarizing slit 124 extend relative to the scanning direction of the workpiece X can be adjusted. .

An example of the rotating device 111 is shown in FIG. 5 . The rotating device 111 is composed of a holding frame 200 and a holding frame bracket 202 .

The holding frame 200 is a substantially rectangular frame body in which a fitting opening 204 into which the wire grid polarizer 110 is fitted is formed, and a rotation shaft pin hole 208 into which a rotation shaft pin 206 is fitted is formed on either side.

The holding frame holder 202 is a member for rotatably holding the holding frame 200 embedded in the wire grid polarizer 110 , and has a holder main body 205 , a rotation shaft pin 206 , and a push screw 210 .

The holder body 205 is a substantially rectangular member in which two openings 207 are formed in a row, and rotation shaft pins 206 corresponding to the openings 207 are arranged respectively.

In addition, on the opposite side of the rotation shaft pin 206 across the opening 207, a stepped portion 212 of the holder main body 205 is formed, and a pair (two pieces) are arranged at a predetermined interval with respect to one opening 207 so as to pass through the stepped portion 212. Push the screw 210. Each push screw 210 can change the protruding length from the stepped portion 212 toward the opening 207 .

Thus, by inserting the rotation shaft pin 206 into the rotation shaft pin hole 208 of the holding frame 200 in the state where the wire grid polarizer 110 is fitted, the holding frame 200 (and the wire grid polarizer 110 ) are rotated with the rotation shaft pin 206 as a The center is rotatably attached to the holding frame bracket 202 . Furthermore, the angle of the holding frame 200 relative to the holding frame bracket 202 can be adjusted by adjusting the protruding length of the pair of push screws 210 from the stepped portion 212 toward the opening 207 .

Since the angle of the holding frame holder 202 with respect to the scanning direction of the workpiece X is accurately set in advance, the angle of the direction in which the polarization pattern 122 and the non-polarization slit 124 extend can be adjusted.

Returning to FIG. 2 , the light source 112 radiates light including a predetermined wavelength toward the wire grid polarizer 110 . The type of light source 112 is not particularly limited, and for example, LEDs, discharge lamps, and the like can be used.

Furthermore, even if the light source 112 is not the light source for exposure, the light source provided separately for adjustment may be used. In addition, if it is a single-wavelength light source such as an LED or LD (laser diode), it is easy to know which polarization filter to select to increase the extinction ratio. If the extinction ratio of the wire grid polarizer 110 and the polarization filter A light source with a wavelength equal to or higher than the light source used for exposure can enhance the brightness (contrast) between the band of light L and other areas when displayed on the monitor 120 in the observation of the band of light described later, because it is easy to Since the boundary line (side line 134 ) is recognized, it is considered that workability is improved.

In addition, as long as the brightness (contrast) can be obtained to the extent that the boundary line (side line 134) between the band of light L when displayed on the monitor 120 and other areas can be grasped, the polarized light irradiation device 100 is provided. The light source 112 may also include indoor lamps and the like in certain places.

The polarizing filter 114 is a member that polarizes in a direction perpendicular to the polarization direction of light based on the polarizing pattern 122 formed on the wire grid polarizer 110, and is arranged on the line facing the light source 112 in this embodiment. A position where the surface opposite to the surface of the grid polarizer 110 faces (that is, between the wire grid polarizer 110 and the workpiece X). Furthermore, this polarizing filter 114 is arranged at a position capable of mainly receiving light emitted from the non-polarizing slit 124 formed in the wire grid polarizer 110 . In addition, the polarizing filter 114 is adjusted and positioned so as to polarize in a direction perpendicular to a correct angle for aligning the polarizing pattern 122 formed on the wire grid polarizer 110 .

In addition, the polarizing filter 114 may be arranged between the light source 112 and the wire grid polarizer 110 . In this case, the light radiated from the light source 112 and polarized by the polarizing filter 114 irradiates the ray grid polarizer 110 .

In this way, by arranging the transmission axis (polarization direction) of the polarizing filter 114 in a direction perpendicular to the transmission axis (polarization direction) of the polarization pattern 122 of the wire grid polarizer 110, the polarization of the wire grid polarizer 110 Light polarized by the pattern 122 does not substantially pass through the polarizing filter 114 , or light polarized and transmitted through the polarizing filter 114 does not substantially pass through the pattern 122 for polarization.

In addition, the orthogonality accuracy of the transmission axis (polarization direction) of the polarization filter 114 with respect to the transmission axis (polarization direction) of the polarization pattern 122 on the wire grid polarizer 110 does not necessarily need to be high. It is only necessary to obtain brightness (contrast) to such an extent that the boundary line (side line 134 ) between the band of light L and other regions when displayed on the monitor 120 can be grasped.

The camera 116 receives light emitted from the light source 112 and transmitted through the non-polarizing slit 124 and the polarizing filter 114 .

The actuator 118 has a function of moving the camera 116 in parallel with respect to the non-polarization slit 124 , and in this embodiment, an orthogonal actuator 126 and a parallel actuator 128 are provided. In this embodiment, as the orthogonal actuator 126 and the parallel actuator 128, an electric single-axis actuator driven by a ball screw or a linear motor is used, and each actuation is performed by a PLC (programmable logic controller). The action control of device 126,128.

Orthogonal actuator 126 moves camera 116 in a direction orthogonal to the direction in which non-polarizing slit 124 extends. In addition, another actuator prepared for conveyance of the workpiece X (scanning direction of the workpiece X) may be used as the orthogonal actuator 126 .

In addition, the parallel actuator 128 moves the camera 116 at a correct angle at which the polarization pattern 122 formed on the wire grid polarizer 110 should be aligned. That is, the parallel actuator 128 is adjusted and positioned in advance so that its moving direction becomes a "correct angle" with respect to the travel axis of the orthogonal actuator 126 (transport axis of the workpiece X). The correct angle in this embodiment means a right angle.

The monitor 120 displays the light L received by the camera 116 (strip (line) light transmitted through the non-polarizing slit 124 and the polarizing filter 114 ). Displayed on the monitor 120 is a mark 130 for checking the movement width of light in a direction perpendicular to the moving direction of the camera 116 when the camera 116 is moved by the actuator 118 .

This mark 130 will be specifically described. As an example of the mark 130, a pair of mark lines 132 shown in FIG. 6 that are spaced apart and arranged in parallel can be mentioned. As will be described later, when adjusting the arrangement angle of the wire grid polarizer 110, at least one of the side lines 134 (used in this embodiment) of the strip-shaped light L received by the camera 116 and displayed on the monitor 120 is adjusted. The side line 134 on the lower side in the figure, but the side line 134 on the upper side in the figure can also be used.) between the pair of marking lines 132 .

(Angle adjustment step using the wire grid polarizer 110 of the polarized light irradiation device 100 )

Next, an angle adjustment procedure using the wire grid polarizer 110 of the polarized light irradiation device 100 described so far will be described.

First, light L is emitted from the light source 112 toward the wire grid polarizer 110 . Therefore, the light L passing through the non-polarizing slit 124 (that is, the pattern 122 for polarization) among the light L cannot pass through the polarizing filter 114 , and the light L passing through the non-polarizing slit 124 is transmitted by the polarizing filter 114 polarized and transmitted to the camera 116 side.

Then, the orthogonal actuator 126 among the actuators 118 is operated to move the camera 116 to a position where the transmitted light L is received. When the light L is received by the camera 116, since the enlarged band of light L is reflected on the monitor 120, the side line 134 on the lower side of the figure of the band of light L is positioned between the pair of marking lines 132. In this manner, the position of the camera 116 in a direction approximately perpendicular to the correct angle to match the polarization pattern 122 formed on the wire grid polarizer 110 is adjusted by the orthogonal actuator 126 .

When the position of the camera 116 in the direction approximately perpendicular to the non-polarizing slit 124 is determined, then the parallel actuator 128 is operated to make the camera 116 follow the polarization pattern 122 formed on the wire grid polarizer 110. Consistent correct angle movement.

In the case where the angle of the wire grid polarizer 110 does not coincide with the correct angle, that is, the angles of the polarizing pattern 122 and the non-polarizing slit 124 on the wire grid polarizer 110 are not at the correct angle, when using parallel actuation When the device 128 moves the camera 116, the position of the side line 134 on the lower side in the figure of the band of light L comes out from any one of the upper and lower marking lines 132 to the outside. In such a case, the angle of the wire grid polarizer 110 is fine-tuned, and the movement of the camera 116 using the quadrature actuator 126 or the parallel actuator 128 is performed again.

If the angle of the wire grid polarizer 110 coincides with the correct angle, the position of the side line 134 on the lower side of the figure in the band of light L received by the camera 116 will always be within the entire range of movement by the parallel actuator 128. is closed between a pair of marking lines 132. So far, the adjustment of the angle of the wire grid polarizer 110 is completed.

For example, the band of light received by the camera 116 is magnified 100 times and displayed on the monitor 120 , the distance between a pair of marking lines 132 is set to 5 mm, and the camera 116 is moved by 50 mm using the parallel actuator 128 . At this time, if the position of the side line 134 on the lower side of the figure of the band of light L received by the camera 116 is always contained between the pair of marking lines 132, the accuracy is within atan(0.05/50)=0.057° Set the angle of the wire grid polarizer 110 to the correct angle.

(Features of polarized light irradiation device 100 etc.)

According to the wire grid polarizer 110 according to this embodiment, the polarized light irradiation device 100 , and the exposure device 10 including the same, since the wire grid polarizer 110 is formed with the polarization pattern 122 and the polarizing pattern 122 is formed in parallel, There is no polarization slit 124, so the polarizing filter 114 radiated from the light source 112 to the wire grid polarizer 110 and the polarizing filter 114 polarized in the direction orthogonal to the polarization direction of the light of the polarization pattern 122 of the wire grid polarizer 110 Among the light, the light passing through the non-polarizing slit 124 (ie, the polarizing pattern 122 ) cannot pass through the polarizing filter 114 , and the light passing through the non-polarizing slit 124 passes through the polarizing filter 114 (is polarized). Alternatively, the light that first passes through the polarization filter 114 (polarized) cannot pass through the non-polarization slit 124 (ie, the polarization pattern 122 ), but passes through the non-polarization slit 124 .

Thus, when the camera 116 receives the light passing through the non-polarizing slit 124 and the polarizing filter 114, a band of linear light L corresponding to the non-polarizing slit 124 is obtained. The angle of the wire grid polarizer 110 can be adjusted by adjusting the angle at which the band of the light L extends by the camera 116 that moves the polarization pattern 122 at the same angle.

In addition, since at least the light polarized by the polarizing filter 114 is received by the camera 116, the brightness (contrast) of the polarized light is improved compared to the case of observing the non-polarized light by the camera 116 (for example, as in the case of shooting a landscape). , so the visibility improves.

(Modification 1)

In the above-mentioned embodiment, the light source 112 is arranged so as to irradiate light substantially vertically with respect to the surface of the wire grid polarizer 110, but it may be substituted so that the light can be irradiated at a predetermined angle with respect to the surface of the wire grid polarizer 110. The light source 112 is tilted relative to the wire grid polarizer 110 .

(Modification 2)

In addition, the polarizing filter 114 may be attached to the front end of the light receiving lens of the camera 116 (between the light receiving lens and the wire grid polarizer 110 ), and the camera 116 and the polarizing filter 114 may be moved integrally.

(Modification 3)

In the above-mentioned embodiment, the polarizing pattern 122 and the non-polarizing slit 124 formed parallel to the polarizing pattern 122 are formed in the wire grid polarizer 110, but it may be replaced, as shown in FIG. The corners of the polarizer 110 and the like form the non-polarizing portion 250 .

This non-polarization portion 250 is formed in a rectangular shape in Modification 3, but it only needs to include at least a boundary line 252 extending parallel to the polarization pattern 122 .

Among the light emitted from the light source 112 to the wire grid polarizer 110 and the polarizing filter 114 , the light passing through the non-polarizing portion 250 passes through the polarizing filter 114 (is polarized). Alternatively, light that has previously passed through the polarizing filter 114 (polarized) cannot pass through the non-polarizing portion 250 (that is, the polarization pattern 122 ), but passes through the non-polarizing portion 250 .

As a result, the region corresponding to the non-polarized portion 250 including the boundary line 252 is displayed on the monitor 120 , so that the arrangement angle of the wire grid polarizer 110 can be adjusted using the boundary line 252 as in the above-described embodiment.

In addition, as shown in FIG. 8 , a non-polarization portion 250 including an orthogonal boundary line 254 extending in a direction orthogonal to the polarization pattern 122 may be arranged.

In this case, the arrangement angle of the wire grid polarizer 110 is adjusted by displaying the mark 130 extending in a direction perpendicular to the polarization pattern 122 on the monitor 120 and moving the camera 116 in this direction. .

Furthermore, at least one pair of non-polarization portions 250 including orthogonal boundary lines 254 extending in a direction orthogonal to the polarization pattern 122 may be arranged so that the mutual orthogonal boundary lines 254 are located in a direction perpendicular to the polarization pattern 122 . The imaginary line 256 extends in the direction orthogonal to the pattern 122 .

In this case, the mark 130 displayed on the monitor 120 may be one mark line 132 . Specifically, after using the parallel actuator 128 to align the marking line 132 to the position corresponding to the orthogonal boundary line 254 on one non-polarized part 250, use the orthogonal actuator 126 (which can also be used to other actuator for conveyance of the workpiece X) makes the marking line 132 approach the orthogonal boundary line 254 on the other non-polarization section 250 .

As a result, the angle adjustment of the wire grid polarizer 110 is performed by the method described above so that the marking line 132 coincides with the orthogonal boundary line 254 on the other non-polarizing portion 250 .

In this way, regarding the method of forming at least one pair of non-polarizing portions 250 on the wire grid polarizer 110, as shown in FIG. A case where a pair of non-polarizing sections 250 are arranged so as to lie on a virtual line 258 extending in parallel.

(Modification 4)

So far, the case of adjusting the polarization axis direction of the wire grid polarizer 110 has been described, but the same method can also be applied to the adjusting polarizer (analyzer) described in "Background Art".

The direction of the polarization axis of the polarizer for adjustment (referred to as “analyzer 300 ”) is known, and is used to align the direction of the polarization axis of the wire grid polarizer 110 with the reference direction. If the direction of the polarization axis of the analyzer 300 deviates, the direction of the polarization axis of the wire grid polarizer 110 will also deviate from the reference direction, so adjustment of the polarization axis of the analyzer 300 is also very important.

As shown in FIG. 9 , the analyzer 300 is arranged between the wire grid polarizer 110 and the illuminance sensor 302 for adjustment. More specifically, as an example, the analyzer 300 is integrated with the illuminance sensor 302 for adjustment. In addition, the analyzer 300 (and the illuminance sensor for adjustment 302 ) can be moved by the actuator 118 (orthogonal actuator 126 and parallel actuator 128 ). Furthermore, a camera 304 is arranged at a position where the analyzer 300 can be photographed from the wire grid polarizer 110 side.

Then, as shown in FIG. 10 , a pair of axial marks 310 and 312 are provided on the peripheral portion of the surface of the analyzer 300 on which the polarization plane 301 is formed. The axial marks 310 and 312 are arranged at one end of the surface peripheral portion of the analyzer 300 and the other end on the opposite side of the one end. In addition, an imaginary line 314 connecting the pair of axial marks 310 and 312 is parallel to the polarization axis on the polarization plane 301 of the analyzer 300 .

First, the actuator 118 is used to move the analyzer 300 to a position where one axial marker 310 can be photographed by the camera 304 (since the analyzer 300 is integrated with the illuminance sensor 302 for adjustment, the illuminance sensor 302 for adjustment is also move as well.). Specifically, since one axial marker 310 photographed by the camera 304 is displayed on the monitor 120 in an enlarged state, the analyzer 300 is moved so that the one axial marker 310 is positioned on the pair of marker lines 132 between.

Then, the parallel actuator 128 is operated to move the analyzer 300 at a correct angle at which the polarization pattern 122 formed on the wire grid polarizer 110 should be aligned.

If the angle of the analyzer 300 does not match the correct angle, if the analyzer 300 is moved by the parallel actuator 128, the position of the other axial mark 312 will come out from either the upper or lower marking line 132 to the outside. . In this case, the angle of the analyzer 300 is finely adjusted, and the movement of the analyzer 300 by the actuator 118 is performed again.

When the angle of the polarizer 300 matches the correct angle, the position of the other axial mark 312 falls between the pair of mark lines 132 . So far, the adjustment of the angle of the polarizer 300 is completed.

(Modification 5)

As shown in FIG. 11 , instead of the pair of axial marks 310 and 312 , an analyzer 300 having a non-polarization slit 320 as a non-polarization portion formed on a polarization plane 301 may be used. In addition, instead of the non-polarization slit 320 , for example, a rectangular non-polarization portion may be formed at a corner portion of the polarization plane 301 or the like. Regarding the angle adjustment method of the analyzer 300 in the case where the rectangular non-polarized portion is formed at the corner portion of the polarization plane 301 , the description in the above-mentioned Modification 3 is referred to.

In this case, as shown in FIG. 12 , a polarizing filter 322 is provided between the analyzer 300 and the camera 304 . This polarizing filter 322 is the same as the polarizing filter 114 in the above-mentioned embodiment, and is positively aligned at an accurate angle with the polarizing pattern 122 formed on the wire grid polarizer 110 adjusted by the analyzer 300. components polarized in the cross direction. In addition, the polarizing filter 322 can be integrated with the camera 304 or can be separated.

In the light from a light source (not shown in the figure) arranged on the side of the camera 304 or on the opposite side to the side of the camera 304 viewed from the analyzer 300 Light passing through the polarizing plane of the analyzer 300 other than the non-polarizing slit 320 cannot pass through the polarizing filter 322 , and only the light passing through the non-polarizing slit 320 is polarized by the polarizing filter 322 and transmitted to the camera 304 side.

When this light is received by the camera 304, since a band of amplified light is displayed on the monitor 120, the orthogonal actuator 126 is used to adjust the camera 304 in relation to the polarizing pattern formed on the wire grid polarizer 110. 122 coincident with the position of the correct angle in approximately orthogonal direction so that the side line 134 on the underside of the light strip is located between the pair of marking lines 132 .

Next, the parallel actuator 128 is operated to move the analyzer 300 at a correct angle at which the polarization patterns 122 formed on the wire grid polarizer 110 should be aligned.

In the case where the angle of the analyzer 300 does not correspond to the correct angle, that is, when the angle of the non-polarizing slit 320 on the analyzer 300 is not the correct angle, if the parallel actuator 128 is used to make the camera 304 If it moves, the position of the side line 134 on the lower side of the light band will come out from any one of the marking lines 132 up and down. In this case, the angle of the analyzer 300 is finely adjusted, and the movement of the analyzer 300 by the actuator 118 is performed again.

If the angle of the analyzer 300 coincides with the correct angle, the position of the lateral line 134 on the lower side of the band of light received by the camera 304 is always within a certain range throughout the range of movement by the parallel actuator 128. Between the marked lines 132. So far, the adjustment of the angle of the polarizer 300 is completed.

In addition, the case where the polarization pattern 122 formed on the wire grid polarizer 110 is used as the "angle at which the polarization axes are aligned" on the polarization plane 301 of the analyzer 300 has been described, but for example, the The direction parallel to the operating direction of the orthogonal actuator 126 (or the direction orthogonal to the operating direction of the parallel actuator 128 ) is set as "the angle at which the polarization axes should be aligned".

In this case, the camera 304 is arranged on the scanning axis of the orthogonal actuator 126 , and the polarization direction of the polarization filter 322 is set to be perpendicular to the operating direction of the orthogonal actuator 126 .

(Modification 6)

For all the embodiments and modifications described in this specification, the cameras 116 and 304 may be moved while the wire grid polarizer 110 and the analyzer 300 are fixed, or the wire grid polarizer 110 and the analyzer 300 may be moved to The cameras 116, 304 are fixed. Furthermore, both of the wire grid polarizer 110, the analyzer 300, and the cameras 116 and 304 may be moved. In short, it is only necessary that the cameras 116 and 304 move relative to the wire grid polarizer 110 and the analyzer 300 .

In addition, in the above-mentioned embodiments and modified examples, the examples in which the cameras 116 and 304 move relatively and continuously with respect to the wire grid polarizer 110 and the analyzer 300 are shown, but "relatively move" throughout this specification It is a concept that includes not only such continuous movement but also "intermittent movement". The so-called "moving intermittently" refers to performing the following actions a plurality of times: the camera 116, 304 receives light in a state where the polarizer 110 and the analyzer 300 are stopped relative to the wire grid, and then the camera 116, 304 moves relative to the wire grid. The polarizer 110 and the analyzer 300 move relative to each other, and the cameras 116 and 304 receive light in a stopped state again.

To sum up, the technical means disclosed in the present invention can effectively solve the problems of conventional knowledge and achieve the expected purpose and effect, and it has not been published in publications before application, has not been publicly used, and has long-term progress. The invention mentioned in the patent law is correct. I file an application according to the law. I sincerely pray that Junshang Hui will give you a detailed review and grant the invention patent. I am very grateful to Dexin.

However, the above are only several preferred embodiments of the present invention, and should not limit the scope of the present invention, that is, all equivalent changes and modifications made according to the patent scope of the present invention and the content of the description of the invention are all Should still belong to the scope covered by the patent of the present invention.

〔this invention〕 10: Exposure device 20: Workpiece conveying device 22: Stage unit 24: Mobile Mechanism 26: Stage 28:Height adjustment mechanism 30: Horizontal rotation mechanism 32: Hold mechanism 100: polarized light irradiation device 110: wire grid polarizer 111: rotating device 112: light source 114: polarizing filter 116: camera 118: Actuator 120: Monitor 121: glass substrate 122: Pattern for polarization 124: No polarization slit 126: Orthogonal Actuator 128: Parallel actuator 130: mark 132: marking line 134: side line 200: keep frame 202: Holding frame bracket 204: fitting opening 205: bracket body 206: Rotary shaft pin 207: opening 208: Rotary shaft pin hole 210: push screw 212: Step Department 250: No polarization part 252: Borderline 254: Orthogonal boundary line 256: imaginary line 258: imaginary line 300: Analyzer 301: polarization plane 302: Illuminance sensor for adjustment 304: camera 310: Axial mark (of one end) 312: Axial mark (of the other end) 314: imaginary line 320: (on the polarization plane of the analyzer 300) no polarization slit 322: polarizing filter L: Light X: Workpiece

[FIG. 1] is a schematic diagram of an exposure apparatus 10 according to this embodiment; [FIG. 2] is a diagram showing the configuration of a polarized light irradiation device 100 according to this embodiment; [ FIG. 3 ] is an enlarged schematic cross-sectional view showing the structure of the wire grid polarizer 110 according to the present embodiment; [ FIG. 4 ] is a plan view showing the structure of the wire grid polarizer 110 according to the present embodiment; [FIG. 5] is a diagram showing an example of a rotating device 111; [FIG. 6] is a diagram showing the relationship between the band of light L displayed on the monitor 120 and the mark 130; [FIG. 7] is a diagram showing the structure of a wire grid polarizer 110 according to Modification 3; [FIG. 8] is a diagram showing the structure of another wire grid polarizer 110 according to Modification 3; [FIG. 9] is a diagram showing the configuration of a polarized light irradiation device 100 according to Modification 4; [ FIG. 10 ] is a diagram showing a polarizer 300 according to Modification 4; [ FIG. 11 ] is a diagram showing an analyzer 300 according to Modification 5; [ FIG. 12 ] is a diagram showing a configuration of a polarized light irradiation device 100 according to Modification 5. [ FIG.

100: polarized light irradiation device

110: wire grid polarizer

111: rotating device

112: light source

114: polarizing filter

116: camera

118: Actuator

120: monitor

122: Pattern for polarization

124: No polarization slit

126: Orthogonal Actuator

128: Parallel actuator

L: light

Claims (15)

A wire grid polarizer having a non-polarizing portion and a plurality of polarization patterns formed parallel to each other, wherein, Angle adjustment is performed by receiving light from a light source that passes through a polarization filter polarized in a direction perpendicular to the polarization direction of light based on the polarization pattern and the non-polarization portion by a camera that is positioned along the This means that the uniform angle of the polarization pattern should be relatively shifted with respect to the wire grid polarizer. The wire grid polarizer as claimed in item 1, wherein, The non-polarization portion is a non-polarization slit formed parallel to the polarization pattern. The wire grid polarizer as claimed in item 1, wherein, The non-polarization portion includes a boundary line extending parallel to the polarization pattern. The wire grid polarizer as claimed in item 3, wherein, A pair of the non-polarization portions are arranged such that the mutual boundary lines are located on an imaginary line extending parallel to the polarization pattern. The wire grid polarizer as claimed in item 1, wherein, The non-polarization portion includes an orthogonal boundary line extending in a direction orthogonal to the polarization pattern. The wire grid polarizer as claimed in item 5, wherein, A pair of the non-polarization portions are arranged such that the orthogonal boundary lines are located on an imaginary line extending in a direction perpendicular to the polarization pattern. A polarized light irradiation device, which has: The wire grid polarizer as described in Claim 1; a polarizing filter polarizing in a direction orthogonal to the polarizing direction of the pattern for polarizing; a light source emitting light toward the wire grid polarizer and the polarizing filter; a camera that receives light emitted from the light source and transmitted through the non-polarizing portion and the polarizing filter; and and an actuator for moving the camera along an angle at which the polarization patterns should be aligned. The polarized light irradiation device according to claim 7, wherein, The polarized light irradiation device further includes a monitor for displaying the light received by the camera, A mark is displayed on the monitor for confirming a moving range of the light in a direction perpendicular to a moving direction of the camera when the camera is moved by the actuator. The polarized light irradiation device according to claim 8, wherein, The marking is composed of a pair of marking lines arranged at a given interval, The angle of the wire grid polarizer is adjusted so that the end edge of the light received by the camera is between a pair of the marking lines. An exposure device comprising the polarized light irradiation device according to Claim 7. A method for adjusting the angle of a wire grid polarizer, wherein, radiating the light from the light source toward the wire grid polarizer as described in claim 1 and the polarization filter polarized in a direction orthogonal to the polarization direction of the light based on the polarization pattern, Light transmitted through the non-polarizing portion and the polarizing filter is received by a camera, and the camera is relatively moved relative to the wire grid polarizer along an angle at which the polarization patterns should be aligned. An analyzer having a polarization plane and a pair of axial marks formed on a peripheral portion of a surface formed with the polarization plane, wherein, an imaginary line connecting the pair of axial marks to each other is parallel to the polarization axis on the polarization plane, The axial mark is captured by a camera, and the angle adjustment is performed by moving the analyzer relative to the camera at an angle at which the polarization axes should be aligned. An analyzer having a polarization plane and a non-polarization section, wherein, By using a camera to receive the light passing through the non-polarized part and the polarizing filter polarized in the direction perpendicular to the angle at which the polarization axis on the polarizing plane should be coincident, and making the analyzer along the above The angle that should be consistent is relatively moved with respect to the camera, thereby performing angle adjustment. A method for adjusting an angle of a polarizer having a polarization plane and a pair of axial marks formed on a peripheral portion of a surface on which the polarization plane is formed, and an imaginary line connecting the pair of axial marks to each other parallel to the polarization axis on the polarization plane, where The axial mark is photographed by a camera, and the analyzer is moved relative to the camera at an angle at which the polarization axes should be aligned. A method for adjusting the angle of a polarizer, wherein, radiating light toward an analyzer having a polarization plane and a non-polarization portion and a polarizing filter polarized in a direction perpendicular to an angle at which the polarization axes on the polarization plane should coincide, The light transmitted through the non-polarized part is received by a camera, and the analyzer is relatively moved relative to the camera along the above-mentioned angle to be consistent.

Images