TW202327806A - Processing machine and production method for object subject to processing - Google Patents

Abstract

In a processing machine 1, a Z-axis electric motor 39 moves a main shaft 37 in the Z direction. A Z-axis position sensor 69 detects the position of the main shaft 37 in the Z direction. A rotation sensor 71 detects rotation of the main shaft 37. When a workpiece 103 is processed by a tool 101 in a state where the main shaft 37 is rotating, a control unit 5 controls the Z-axis electric motor 39 on the basis of a detection value of the Z-axis position sensor 69 so as to move the main shaft 37 to a relative position set with respect to a predetermined reference position in the Z direction. The control unit 5 acquires, as the reference position, a position detected by the Z-axis position sensor 69 when a prescribed signal is input in a state where rotation of the main shaft 37 is detected by the rotation sensor 71, the main shaft 37 is moved in the Z direction, and the tool 101 and a reference material come into contact with each other in the Z direction.

Description

Processing machine and method of manufacturing workpiece

The present invention relates to a processing machine and a method for manufacturing a processed object.

Processing machines that process (for example, cut) a workpiece with a tool are known (for example, Patent Documents 1 and 2 below). Patent Documents 1 and 2 disclose a cutting device (processing machine) that divides a wafer (work) using a blade (tool) having a cutting edge on its outer periphery. In such a processing machine, for example, a desired depth of cut is achieved by moving the blade toward a relative position set with respect to a predetermined reference position.

The information on the position serving as the reference position is obtained by, for example, bringing the blade close to the workpiece or the table holding the workpiece, and detecting the position of the blade when contact between the two is detected. In the prior art column of Patent Documents 1 and 2, it is disclosed that a conductive member is used as the blade and the workbench, and the technology of detecting the contact between the two is detected by using the energization when the two are in contact.

If the blade comes into contact with the table, there is a possibility that problems such as deterioration of either of them may arise. Therefore, Patent Document 1 proposes to apply a high-frequency voltage to the blade and the table, and to detect the proximity of both based on the change in the electrostatic capacity between the two. Patent Document 2 proposes a technique for obtaining information on a position to be a reference position by using a dummy blade that simulates the blade instead of the blade. [Prior Art Literature] [Patent Document]

[Patent Document 1] Japanese Patent Application Laid-Open No. 61-071967 [Patent Document 2] Japanese Patent Laid-Open No. 2015-103693

[Problem to be solved by the invention]

In the technology of Patent Document 1, it is necessary to use a conductive member as the blade. That is, the degree of freedom in the selection of the blade decreases. In the technology of Patent Document 2, in addition to the blade, a dummy blade is also required. Also, errors due to differences between blades and dummy blades may occur. Therefore, there is a demand for a processing machine and a method of manufacturing a workpiece that can ideally acquire information on a position serving as a reference position. [Technical means to solve the problem]

A processing machine according to an aspect of the present invention includes: a main shaft that holds either one of a tool and a workpiece; a holding unit that holds the other of the tool and the workpiece; and a drive unit that makes the main shaft and the holding any one of the parts, that is, the movable part moves toward a predetermined first direction; a position sensor that detects the position of the movable part in the first direction; a rotation sensor that detects the rotation of the main shaft; and A control unit that moves the movable unit toward a relative position set to a predetermined reference position in the first direction when the workpiece is machined by the tool while the main shaft is rotating, The drive unit is controlled based on the detection value of the position sensor, and when the workpiece or a member that does not move with respect to the workpiece is used as a reference member, the control unit detects the rotation of the main shaft by the rotation sensor, and The position detected by the position sensor is used as the reference position when a predetermined signal is input while the movable part is moved in the first direction and the tool and the reference member are in contact with each other in the first direction. be obtained.

A method of manufacturing a workpiece according to an aspect of the present invention is to obtain a workpiece by processing the workpiece with the tool using the aforementioned processing machine.

A method of manufacturing a workpiece according to an aspect of the present invention includes: a main shaft that holds either one of a tool and a workpiece; a holding unit that holds the other of the tool and the workpiece; and a drive unit that enables Either one of the main shaft and the holding part, that is, the movable part moves in a predetermined first direction; a position sensor detects the position of the movable part in the first direction; and detects the rotation of the main shaft. A sensor processing machine, a method of manufacturing a processed object obtained by processing the aforementioned workpiece with the aforementioned tool, the manufacturing method having the following steps: when the aforementioned workpiece or a member that does not move with respect to the aforementioned workpiece is used as a reference member , a step of moving the movable part toward the first direction while the spindle is rotating to bring the tool into contact with the reference member; a step of decelerating the rotation of the main shaft due to contact of members; and a step of obtaining, by the position sensor, the position of the movable part in the first direction when the deceleration is detected. [Invention effect]

According to the aforementioned structure or procedure, it is ideal to acquire the information of the reference position when the workpiece and the tool are moved relative to each other.

First, an outline of a processing machine according to an embodiment of the present invention will be described, and then a detailed configuration of the processing machine will be described.

(summary of processing machine) Fig. 1 is a schematic perspective view showing main parts of a processing machine 1 according to an embodiment of the present invention. FIG. 2 is an enlarged schematic perspective view showing part of the processing machine 1 of FIG. 1 .

The relationship between the directions of various members shown in the drawings and the vertical direction is arbitrary. However, in the following description, for convenience of description, the relationship between the directions of various members and the vertical direction may be expressed on the premise that the relationship shown in the illustrations is the example. In the drawings, an orthogonal coordinate system XYZ is given for convenience of description. The Z direction is, for example, a direction parallel to the vertical direction, and the +Z side is, for example, upward.

The processing machine 1 processes (for example, cuts) a workpiece 103 by means of a tool 101 . The tool 101 and the workpiece 103 are supported and driven by the machine body 3 shown in FIG. 1 . The machine body 3 is controlled by a control unit 5 (see FIG. 4 ). In the illustrated example, the tool 101 is a grinding stone for performing grinding (also referred to as cutting) for grooving or cutting on the outer peripheral portion. The tool 101 is held by a main axis 37 (symbol shown in FIG. 2 ) parallel to the Y direction. Also, the workpiece 103 is cut by the spindle 37 rotating around an axis parallel to the Y direction and moving toward the −Z side. A machining fluid (not shown, eg, cutting fluid) is supplied from the nozzle 7 to the area where machining is performed.

The control unit 5 acquires, for example, the position in the Z direction of the spindle 37 when the tool 101 is moved toward the -Z side and the tool 101 abuts on the workpiece 103 (which may be another member as described later) as a reference position. Also, the main shaft 37 is moved to a relative position in the Z direction set with respect to the reference position. Thereby, for example, the depth of the groove formed on the upper surface of the workpiece 103 can be set to a desired dimension (the relative distance between the reference position and the aforementioned relative position).

5( a ) and FIG. 5( b ) are schematic diagrams for explaining a method of obtaining information on a position serving as the aforementioned reference position. FIG. 6 is a flowchart showing an example of a procedure of a method of obtaining information on a position serving as a reference position. In addition, FIG. 6 can also be considered as a flowchart showing an example of the procedure of processing executed by the control unit 5 .

In addition, in the following description, for the convenience of explanation, the information of the reference position may be referred to only as the reference position. In addition, acquisition of information on a position serving as a reference position may be referred to simply as acquisition of a reference position.

First, as indicated by arrow a1 in FIG. 5(a) and step ST1 in FIG. around the axis of rotation CL. Also, as shown by arrow a2 in FIG. 5( a ) and step ST2 in FIG. 6 , the tool 101 is gradually approached to the workpiece 103 while the tool 101 is being rotated.

The number of rotations of the tool 101 at this time is lower than the number of rotations of the tool 101 when the workpiece 103 is cut by the tool 101 , for example. From another point of view, the moment of driving the tool 101 at this time (moment from the outside and/or moment of inertia, hereinafter the same) is smaller than the moment of driving the tool 101 during processing.

Various methods can be used for rotating the tool 101 . In the illustrated example, the tool 101 is rotated by supplying fluid from the nozzle 7 toward the outer periphery of the tool 101 in a tangential direction to the outer periphery.

Then, as shown in FIG. 5( b ), when the tool 101 abuts against the workpiece 103 , the rotation of the tool 101 is decelerated by the frictional force or the like received by the tool 101 from the workpiece 103 . As shown in step ST3 of FIG. 6 , the control unit 5 detects this deceleration of the rotation. Also, when the control unit 5 detects the deceleration of the rotation (when it is judged positively in step ST3), as shown in step ST4, it detects the position in the Z direction of the main shaft 37 at this time, and uses the detected position in the Z direction as base position.

In addition, in the description of the present invention, deceleration may be used in a broad sense including stop, and in a narrow sense not including stop. Unless otherwise specified or contradictory, deceleration is considered to include stopping.

As described above, in the present embodiment, the contact of the tool 101 with the workpiece 103 is detected based on the phenomenon that the rotating tool 101 comes into contact with the workpiece 103 and decelerates. Therefore, the tool 101 or a reference member (here, the workpiece 103 ) in contact with the tool 101 may not have electrical conductivity. Again, there is no need to use dummy blades. Furthermore, if the number of revolutions of the tool 101 is reduced (the moment is reduced), the probability of deterioration of the tool 101 and/or the reference member can also be reduced.

(the details of the processing machine) As described above, the processing machine 1 has, for example, the machine body 3 including the spindle 37 and the control unit 5 that controls the machine body 3 . Moreover, the processing machine 1 has the fluid supply part 9 (refer FIG. 4) which includes the nozzle 7. The control unit 5 is also used for the control of the fluid supply unit 9 . In addition, the fluid supply unit 9 may be different from the above description, and may be a device different from the processing machine 1 .

In the following description, the constituent elements and the like of the processing machine 1 will be roughly described in accordance with the enumerated order shown below. ・Tool 101 (Figure 1 and Figure 2) ・Workpiece 103 (Fig. 1 and Fig. 2) ・Mechanical body 3 (Fig. 1, Fig. 2 and Fig. 3) ・Fluid supply part 9 (Fig. 2 and Fig. 4) ・Control section 5 (Fig. 4) ・Sequence of obtaining information on the position to be the reference position (Figure 5(a), Figure 5(b) and Figure 6) ・Summary of implementation ・Modification (Fig.7(a)~Fig.8(c))

(tool) The tool 101 can be used as various tools for various processing. For example, the tool 101 may be a cutting tool for cutting, a grinding tool for grinding, or an abrasive tool for grinding. The cutting tool may be, for example, a turning tool (rotary tool) that cuts the workpiece 103 by itself (the example in the figure), or may be a turning tool that cuts the rotating workpiece 103 . Examples of turning tools include milling cutters, drills, and reamers. Grinding tools or abrasive tools may use either fixed abrasive grains fixed to the tool or free abrasive grains contained in a slurry.

In the case where the tool 101 is a turning tool different from the illustrated example, the turning tool is brought close to the workpiece 103 while the spindle holding the workpiece 103 is rotated, for example, when acquiring the reference position. In addition, it is detected that the rotation of the workpiece 103 has stopped due to the contact between the two, and the position of the tool 101 or the workpiece 103 detected at this time is acquired as a reference position. In addition, in the description of this embodiment, when there is no special description, it demonstrates or expresses on the premise that the tool 101 is a turning tool as an example in the figure.

For processing by moving the tool 101 or workpiece 103 (in the illustrated example, the tool 101 ) in the first direction (in the illustrated example, the Z direction) and/or obtaining a reference position in the first direction situation is investigated. In this case, any part of the tool 101 that contacts the workpiece 103 in the first direction is arbitrary. In other words, the relationship between the direction of the tool 101 and the first direction is arbitrary. For example, when the tool 101 is a turning tool, the above-mentioned contact portion may be the outer peripheral portion (the portion outside the rotation axis) (in the example shown in the figure) or may be the front end portion.

As shown in the figure, when the outer peripheral portion of the turning tool contacts the workpiece 103 in the first direction, for example, when the reference position is obtained, the rotation of the tool 101 is easily stopped by the contact of the tool 101 with the workpiece 103 . This effect, for example, becomes higher as the diameter becomes larger. From such a point of view, the diameter of the tool 101 may be, for example, 1 time or more, 2 times or more, or 5 times or more the maximum length in the direction of the rotation axis of the tool 101 (in another point of view, the maximum thickness).

In FIGS. 1 and 2 , a turning tool is taken as an example of the tool 101 . More specifically, the tool 101 of the illustrated example is a grinding stone for grinding the outer peripheral portion as described above. From another point of view, the tool 101 is a blade having a cutting edge 101a (symbols are shown in FIG. 5( a ) and FIG. 5( b )) on the outer periphery. The blade is a plate-shaped (disc-shaped or ring-shaped) whose outer edge is roughly round. The blade is used to form a groove on the workpiece 103 and/or cut (segment) the workpiece 103 by rotating around the axis (in the illustrated example, a rotation axis parallel to the Y direction). The processing machine 1 may be equipped with one blade (example in the drawing), or a plurality of blades spaced apart from each other in a direction parallel to the rotation axis. In addition, in the following description, there may be expressed on the premise that one blade is mounted as an example in the figure.

(workpiece) It can be understood from the foregoing description that the types of processing performed by the tool 101 are various, and the workpiece 103 is also various. For example, the material of the workpiece 103 can be various materials, such as metal, ceramics, resin, wood, chemical wood pulp or composite materials (such as carbon fiber reinforced plastic). The shape and size of the workpiece 103 before and/or after processing are arbitrary. The dimensional accuracy required for the processed workpiece 103 is also arbitrary. For example, in the case where high precision is required, the precision (tolerance) is 10 μm or less, 1 μm or less, or 100 nm or less.

For processing by moving the tool 101 or workpiece 103 (in the illustrated example, the tool 101 ) in the first direction (in the illustrated example, the Z direction) and/or obtaining a reference position in the first direction situation is investigated. At this time, in the workpiece 103 , any portion that contacts the tool 101 in the first direction is optional. From another point of view, the relationship between the direction of the member holding the workpiece 103 (in the illustrated example, a table 25 described later) and the first direction is arbitrary.

For example, in the case where the tool 101 is a turning tool (the example in the figure), the above-mentioned contact position can be the upper surface of the workpiece 103 (the surface on the opposite side of the worktable 25) (the example in the figure), or it can be the same as that in the figure. The example is different, and it is the side surface of the workpiece 103 (the side surface facing the side of the table 25 ). Also, although not shown in the figure, in the case where the tool 101 is a turning tool, the above-mentioned contact position may be the outer peripheral surface of the workpiece 103 (the surface on the outside around the axis of rotation), or the end surface (facing parallel to the axis of rotation). face of the direction).

In FIGS. 1 and 2 , as the workpiece 103 , a plate-shaped one (substrate) is exemplified. The planar shape of the plate-shaped workpiece 103 before processing is arbitrary, for example, a rectangle (illustrated example) or a circle. As mentioned above, when the tool 101 is a disc-shaped blade with a cutting edge 101a on the outer periphery, the blade contributes to forming a blade facing the tool 101 on the upper surface (+Z side surface) of the plate-shaped workpiece 103, for example. The groove extending in the direction (X direction) perpendicular to the axis of rotation of the workpiece 103 is divided into the Y direction.

(machine body) The description of the mechanical main body 3 will be roughly described in the following enumeration order. ・The machine body 3 of this embodiment can be used ・Mechanical body 3 shown in Fig. 1 ・Example of the structure of the bearing of the main shaft 37

(machine body) The machine body 3 supports and drives the tool 101 and the workpiece 103 . That is, the machine body 3 is the main part responsible for processing. The structure of the mechanical body 3 can be in various forms, for example, it can also be a known structure.

For example, regarding machines that perform processing, there are cases where they are divided into work machines and industrial robots (the boundaries are not clear). In the case of making such a distinction, the machine main body 3 (or the processing machine 1) can be classified into either one. In addition, in the description of this embodiment, the aspect generally classified as a machine tool is taken as an example.

Also, for example, as can be seen from the foregoing description of the tool 101, the machining of the machine body 3 (or the processing machine 1) may be cutting, grinding, and/or grinding. In addition, the machine body 3 that performs cutting or the like may rotate the tool 101 or may rotate the workpiece 103 .

The machine body 3 may or may not be a compound working machine. The mechanical body 3 can be one that drives one tool 101 (example in the figure), or it can be a multi-axis or multi-head drive that simultaneously drives a plurality of tools 101 . The machine body 3 (processing machine 1 ) that rotates the tool 101 (turning tool) can be, for example, a milling machine, a drilling machine, a boring machine, or a machining center.

The machine body 3 moves the tool 101 and the workpiece 103 relative to each other, for example, along the X-axis, Y-axis, and Z-axis that are perpendicular to each other. The machine body 3 may also be one that relatively moves the tool 101 and the workpiece 103 on other axes than the aforementioned three axes. For example, the machine main body 3 (processing machine 1) is capable of rotating around at least one axis parallel to any one of the aforementioned three axes (for example, a 5-axis machining center). The relative movement of the tool 101 and the workpiece 103 on each axis can be realized by the movement of the tool 101 or by the movement of the workpiece 103 as known from conventional machine tools.

In addition, in the description of this embodiment, the direction of various components, such as the spindle 37 and the table 25, is basically assumed to be unchanged, and the direction of various components is demonstrated. This explanation can be applied to the aspect in which the direction of the member can be changed, for example, to the standard direction of the member, and can also be applied to a specific direction different from the standard direction. The direction of the standard can be reasonably judged by referring to technical common sense.

When the tool 101 is a turning tool, the relative relationship between the direction of the spindle 37, the direction of the table 25, the vertical direction, and the first direction (in the illustrated example, the Z direction) for obtaining the reference position is arbitrary. Similarly, when the tool 101 is a turning tool, the relative relationship between the direction of the spindle 37, the direction of the tool table, the vertical direction, and the first direction is arbitrary.

For example, the main shaft 37 (the rotation axis thereof) may be parallel to the upper surface of the table 25 (example in the drawing), or may intersect (for example, be perpendicular). In addition, the first direction may intersect (for example, be perpendicular to) the main axis 37 (example in the figure), or may be parallel. The first direction may intersect (for example, be perpendicular to) the upper surface of the table 25 (example in the drawing), or may be parallel.

(The mechanical body shown in the illustration) In FIG. 1 , a slicer capable of cutting by rotating a disc-shaped tool 101 having a cutting edge 101 a on its outer periphery is exemplified as the machine body 3 .

Specifically, for example, the machine main body 3 shown in FIG. 1 has the following constituent elements as constituent elements for supporting the workpiece 103 . The base 21 installed on the ground of the workshop; the X-axis bed 23 fixed on the base 21; the workbench 25 supported on the X-axis bed 23 and movable in the X direction (horizontal direction); fixed on the workbench 25 , The workpiece 103 is detachably held by the fixture 27 . Although not shown in the figure, the machine body 3 can also be configured so that the table 25 can rotate around an axis parallel to the Z axis.

Also, for example, the machine body 3 shown in FIG. 1 has the following constituent elements as constituent elements for supporting and driving the tool 101 . The aforementioned base 21; the Y-axis bed 29 fixed on the base 21; the Y-axis moving part 31 that is supported on the Y-axis bed 29 and can move in the Y direction (horizontal direction); the Y-axis moving part 31 that is supported on the Y-axis The Z-axis moving part 33 that moves in the Z direction (vertical direction); the main shaft head 35 (excluding the main shaft 37) fixed on the Z-axis moving part 33; The spindle head 35 is the spindle 37 that detachably holds the tool 101 (symbols are indicated in FIG. 2 ).

The table 25 is moved in the X direction by transmitting the driving force from a driving source not shown (such as a motor) to the table 25, and the workpiece 103 supported on the table 25 is relatively moved in the X direction with respect to the tool 101 . By transmitting the driving force from a driving source not shown (for example, a motor) to the Y-axis moving part 31, the Y-axis moving part 31 is moved in the Y direction, and the tool 101 supported by the Y-axis moving part 31 is aligned with the workpiece. 103 relatively moves in the Y direction. By transmitting the driving force from a predetermined driving source (such as the Z-axis motor 39 shown in FIG. 4 described later) to the Z-axis moving part 33, the Z-axis moving part 33 is moved in the Z direction, and the support on the Z-axis The tool 101 of the moving part 33 moves relative to the workpiece 103 in the Z direction. The tool 101 held by the spindle 37 is rotated around the axis by transmitting the driving force from a predetermined driving source (for example, the spindle motor 41 shown in FIG. 4 ) to the spindle 37 to rotate the spindle 37 around its axis.

Fig. 1 and Fig. 2 are schematic diagrams, and the shapes of each member (21, 23, 25, 27, 29, 31, 33, 35 and 37) shown in each figure are only schematic. The actual shape of each member may be greatly different from the illustrated shape. Moreover, the material of each member is also arbitrary. Also, the guide (symbol omitted) that guides the moving portion (25, 31, or 33) that moves parallel to the supporting portion (23, 29, or 31) is only schematically shown, and may be similar to the shape shown in the figure. different.

A guide that guides the moving part (25, 31 or 33) that moves parallel to the supporting part (23, 29 or 31) may be a suitable member. For example, the guide can be a sliding guide for sliding between the supporting part and the moving part, or a rolling guide for rolling the rolling elements between the supporting part and the moving part, or a rolling guide that allows air or oil to intervene between the supporting part and the moving part. The static pressure guides of the supporting part and the moving part may also be a combination of two or more of these guides. Likewise, the bearing of the main shaft 37 may be a sliding bearing, a rolling bearing, a hydrostatic bearing, or a combination of two or more of these bearings.

The drive source for parallel movement is, for example, a motor. The motor can be a rotary motor or a linear motor. The rotary motion of the rotary motor can be converted into linear motion by an appropriate mechanism such as a screw mechanism (such as a ball screw mechanism). Also, the drive source for parallel movement may be hydraulic (hydraulic) or pneumatic. Likewise, the drive source for the rotation of the spindle 37 may be, for example, a rotary motor (spindle motor 41 ). However, the driving source for the rotation of the main shaft 37 may be a hydraulic type (hydraulic type) or a pneumatic type. The specific structure of various motors can be various structures. The motor can be a DC motor or an AC motor. The AC motor can be a synchronous motor or an induction motor.

The rotor (not shown) of the spindle motor 41 and the spindle 37 are, for example, fixed to each other so as to rotate together (including a part shared with each other). However, a clutch and/or a transmission may be interposed between the rotor (part or all of it) and the main shaft 37 . In the case of a clutch in the intermediary, the action of obtaining the reference position can also be that the connection between the rotor and the main shaft 37 is released, so that the moment of inertia is reduced. In addition, in the description of this embodiment, unless otherwise specified, the description and representation will be made on the premise that the rotor and the main shaft 37 rotate integrally.

In the case where the spindle motor 41 is a synchronous motor including permanent magnets, for example, when no torque is supplied without power, an attractive force is generated to stop the rotation of the spindle 37 . Therefore, for example, when obtaining the reference position, the possibility of inadvertent rotation can be reduced. Also, from another point of view, the rotation generated by supplying fluid to the tool 101 is effective. On the other hand, in the case where the spindle motor 41 is an induction motor, for example, when no torque is supplied without power, no attractive force is generated to stop the rotation of the spindle 37 . Therefore, for example, even if the force applied by the fluid to the tool 101 is reduced, the spindle 37 can be rotated.

The jig 27 is constituted by, for example, a vacuum jig or an electrostatic jig, and is attached to the table 25 by an appropriate tool such as a machine vise (not shown). Furthermore, unlike the above-mentioned description, the jig 27 may be integrally and inseparably configured with the table 25 . In addition, the jig 27 may not be provided, and the workpiece 103 may be fixed to the table 25 by other appropriate jigs different from the jig 27 (for example, a machine vise).

Unlike the description of this embodiment, the combination of the table 25 and the jig 27 may be regarded as a table. When referring to the holding surface of the workbench holding the workpiece 103, the holding surface can be the holding surface 25a of the workbench 25 that indirectly holds the workpiece 103 through the holding fixture 27 (symbols are shown in FIG. 2), and can also directly hold the workpiece. 103 is the retaining surface 27a of the clamp 27 (symbols are indicated in FIG. 2 ).

The main shaft 37 can hold the tool 101 by its own mechanism (for example, a clamping mechanism), and can also install the tool 101 by a device including a screw or the like. The blade (tool 101), although not shown, can be formed by, for example, a member having a shaft portion inserted through a hole formed in the center of the blade, a member overlapping the blade in the axial direction of the main shaft 37, and passing through the blade. The screw that is screwed to the main shaft 37 is fixed to the main shaft 37. In such an aspect, the blade can be regarded as the tool 101 , and the entirety of the blade and the tool for attaching the blade to the main shaft 37 can also be regarded as the tool 101 .

The main shaft 37 is located on the side facing the holding surface 27a of the table 25, and its rotation axis is along (for example, parallel to) the holding surface 27a. Further, by moving the main shaft 37 in the Z direction which is the first direction, the outer peripheral portion of the blade of the tool 101 is brought into contact with the upper surface of the workpiece 103 to perform machining or obtain a reference position.

(An example of the structure of the bearing of the main shaft) As mentioned above, the bearing of the main shaft 37 has an arbitrary structure. Here, the structure of the hydrostatic bearing which is an example of the bearing of the main shaft 37 is demonstrated.

FIG. 3 is a schematic cross-sectional view showing an example of the structure of the bearing 43 of the main shaft 37, corresponding to line III-III in FIG. 2 .

A gap is formed between the outer peripheral surface of the spindle 37 and the inner peripheral surface of the spindle head 35 . To this gap, gas (for example, air) or liquid (for example, oil or water) is supplied at a predetermined pressure by a pump 45 or the like. Furthermore, in the former aspect, the bearing 43 is an air bearing. Furthermore, when the fluid is a gas, the compressor acts as a form of the pump.

(fluid supply part) FIG. 4 is a block diagram showing the structure of the processing machine 1 centering on the structure of the signal processing system.

The fluid supply part 9 has the nozzle 7 and the supply part main body 47 which supplies fluid to the nozzle 7. As shown in FIG. As described above, when the workpiece 103 is machined by the tool 101 , the fluid supply unit 9 supplies the machining fluid from the nozzle 7 to the area to be machined (hereinafter, sometimes referred to as "machining area"). Moreover, the fluid supply part 9 rotates the tool 101 by supplying the fluid from the nozzle 7 to the tool 101 when acquiring a reference position.

The outline of the following description will be described in the following order. ・Processing fluid ・Fluid supplied when acquiring the reference position ・Components in contact with fluid when obtaining the reference position ・Nozzle 7 ・Supply part body 47

(processing fluid) As can be seen from the description of the aforementioned tool 101, the machining fluid (not shown) may be used for various machining. For example, when the machining is cutting, the machining fluid can be cutting fluid (otherwise represented as cutting oil). The main component of cutting fluid can be oil or water. In addition, the machining fluid may be, for example, a grinding fluid for grinding or a polishing fluid for grinding. The grinding fluid or polishing fluid (slurry) may or may not contain free abrasive particles. Regardless of the processing, the processing fluid may be only water. In addition, the machining fluid may be a coolant whose purpose is only cooling or cooling is the main purpose.

(The fluid supplied when obtaining the reference position) In the operation of acquiring the reference position, the type (component) of the fluid supplied to the tool 101 to rotate the tool 101 is arbitrary. For example, the fluid may be a machining fluid, a liquid different from the machining fluid, or a gas. As gas, air (air) and an inert gas (for example, nitrogen) are mentioned, for example. In the description of this embodiment, basically, the mode of supplying the machining fluid is taken as an example.

(components in contact with fluid when obtaining the reference position) In the description so far, the tool 101 is the member that is brought into contact with the fluid to rotate the main shaft 37 in the operation of acquiring the reference position. However, in a state where the workpiece 103 is held on the spindle 37 , the member that the fluid strikes may also be the workpiece 103 . Furthermore, no matter in which form, the member hit by the fluid can be referred to as a rotating object held on the main shaft 37 .

Also, regardless of whether the rotating object is any one of the tool 101 and the workpiece 103 , the fluid may contact the spindle 37 instead of the rotating object or together. Components (such as vanes) for increasing the moment generated by fluid contact can be mounted on the main shaft 37, the rotating object (101 or 103) or the instrument for mounting the rotating object. Such a member may be considered as part of the main shaft 37 or part of the rotating object. Depending on the shape of the blade, the direction in which the fluid hits may not include the tangential component described later, for example, it may be in the axial direction. In addition, in the description of this embodiment, it may be assumed that such members (blades, etc.) are not provided for convenience of description.

The fluid contacts the outer surface of the rotating object (tool 101 or workpiece 103 ), or is exposed to the outer outer surface of the main shaft 37 . The fact that the external surface of the main shaft 37 is exposed in advance is to distinguish it from the technology of applying torque to the main shaft 37 through the fluid in the main shaft head 35 for processing (the technology of using the fluid instead of the main shaft motor 41).

In addition, in the description of the present embodiment, there is an expression based on the premise that the tool 101 is the member that rotates the main shaft 37 and makes the fluid impinge in the operation of acquiring the reference position. The tool 101 as a member for fluid collision can be appropriately replaced with the workpiece 103 or the spindle 37 as long as there is no conflict or the like.

(nozzle) The nozzle 7 shown in FIG. 2 supplies the machining fluid to the machining area when the workpiece 103 is machined by the tool 101 . In other words, the processing area is the area of the workpiece 103 that is processed by the tool 101 . For example, when the tool 101 is cutting, the processing area is the position where the cutting edge contacts the workpiece 103 and its adjacent area. When the tool 101 is grinding or grinding, for example, the processing area is the contact position between the tool 101 and the workpiece 103 and its adjacent area, or the contact area, and the contact can be indirect contact with free abrasive grains intervening.

The supply of the machining fluid to the machining area can be performed in various ways. For example, the nozzle 7 may flow the machining fluid toward the machining area, or may flow the machining fluid toward a position in the tool 101 or the workpiece 103 that is separated from the machining area, so that the machining fluid reaches the machining area along the tool 101 or the workpiece 103 . The nozzle 7 can eject the machining fluid, and can also cause the machining fluid to flow out at a flow rate that cannot be called ejection. The nozzle 7 can be used as a flow with a suitable cross-section to make the processing fluid flow out (for example, spray), or it can be in the form of a shower to make the processing fluid flow out (for example, spray), or it can be in the form of a mist to make the processing fluid spray.

In addition, when the nozzle 7 takes the reference position, it contacts the fluid in a direction in which the moment of the main shaft 37 about the rotation axis is applied to the outer surface of the tool 101 . When the main shaft 37 is rotated in this way, the position (area) of the tool 101 hit by the fluid can be various positions, and the direction in which the fluid contacts the aforementioned position (in another point of view, the direction in which the fluid is ejected) can also be various. direction. Conceptually, for example, the tool 101 can be rotated as long as an imaginary line extending from the point of action of the resultant force of the forces applied to the tool 101 by the fluid in the direction of the aforementioned resultant force is separated from the rotation axis. In other words, if, with respect to the axis of rotation of the tool 101 , the fluid displacement contacts the outer surface of the tool 101 , the tool 101 may rotate.

Specifically, for example, when the tool 101 is viewed parallel to its axis of rotation, the direction of fluid impact can be extended from the fluid impact position (or region, or the center position of the region) toward the aforementioned fluid impact direction. The direction in which the imaginary line separates from the axis of rotation of the main shaft 37 . Furthermore, this direction can also be considered as a tangential direction of a circle having an arbitrary radius centered on the rotation axis. Also, for example, when the tool 101 is viewed parallel to its rotation axis, the direction in which the fluid hits may be a direction tangential to a circle passing through the position where the fluid hits. Furthermore, for the tangential direction of the direction of impact with the fluid (and/or the direction of fluid ejection), a larger tolerance may be included, for example, within the range of 60° or 30° with the strict tangent direction as the center .

Also, for example, the direction in which the fluid hits may be perpendicular to the rotational axis of the tool 101 in a twisted positional relationship, or may be inclined in a direction parallel to the rotational axis (in the illustrated example, the Y direction). Also, for example, the position where the fluid hits may be the outer peripheral portion of the tool 101 (the outer portion around the rotation axis), or may be a surface facing in the direction along the rotation axis of the tool 101 (in the illustrated example, +Y side and/or the surface on the -Y side), or both the front and the latter.

When the fluid that hits the tool 101 to rotate the main shaft 37 is a liquid, various aspects can be used when the fluid is ejected from the nozzle 7 . For example, the description of the supply mode in the description of the supply of the machining fluid (the mode of spraying as a single flow, the mode of spraying in the form of a shower, etc.) can be used for the description of the fluid used for rotation. The state of supply. Also, when the fluid is a liquid, the liquid can be supplied to the tool 101 in a state that cannot be called ejection, and the tool 101 can be rotated by the force of the liquid falling.

The structure of the nozzle 7 may be various, for example, it may be the same thing as a conventional structure. The structure of the nozzle for realizing the state of letting the liquid flow out (the state of spraying as a flow of one channel, the state of spraying in the form of a shower, etc.) is known. In addition, the nozzle 7 may be switched to allow the liquid to flow out, or may not be switched. In the former case, the switching state of the nozzle 7 may be the same state or a different state when the machining fluid is supplied and when the fluid is supplied to rotate the main shaft 37 .

The structure of installation and positioning of the nozzle 7 can be various structures, for example, it can also be the same thing as a conventional structure. Specifically, for example, the nozzle 7 is detachable from the machine body 3 . In addition, in this case, the nozzle 7 can be regarded as a requirement different from the processing machine 1 similarly to the tool 101 and the workpiece 103 . The nozzle 7 can be moved during processing, and can also be arranged at a certain position. The positioning of the nozzle 7 with respect to a predetermined element (such as the main shaft 37) can be performed manually or by a robot. In the latter case, the positioning may be performed automatically by the control unit 5 or by operating an unillustrated operation unit included in the processing machine 1 . In the aspect where the position of the nozzle 7 can be changed, the position of the nozzle 7 may be in the same state or different when supplying the machining fluid and when supplying the fluid to rotate the main shaft 37 in the operation of obtaining the reference position. state.

In the example shown in FIG. 2 , the nozzle 7 is located at the tip of a bellows-shaped (symbol omitted) that can maintain its shape. The end portion on the opposite side to the bellows-shaped nozzle 7 is connected to a block (symbol omitted) having a flow path. The block can be fixed to the spindle head 35 by suitable means. Therefore, the nozzle 7 can move relative to the workpiece 103 together with the tool 101 (excluding rotation around the axis of the tool 101 ), and its specific position and direction can be determined by manually changing the shape of the bellows. In FIG. 2 , the nozzle 7 is positioned so as to be used to impinge on the cutting edge 101 a which is the blade of the tool 101 , the fluid which rotates the machining fluid and the spindle 37 in the tangential direction of the cutting edge 101 a.

(supply part body) The structure of the supply part main body 47 can be suitably configured according to the type of machining fluid and the like. For example, when the machining fluid is cutting fluid, grinding fluid or polishing fluid, the supply part body 47 may have the same structure as a device for supplying such machining fluid in a general machine tool or an application of the structure. Also, when the machining fluid is water, the supply part main body 47 may be configured to supply water from factory equipment and have a valve for allowing and prohibiting the supply of the water to the nozzle 7 .

In the illustrated example, the supply unit main body 47 has, for example, a machining fluid supply source 49 for supplying machining fluid, and a control valve 53 for controlling the flow of the machining fluid.

When the machining fluid is a cutting fluid, a grinding fluid, a grinding fluid, or the like, the machining fluid supply source 49 has, for example, a tank for storing the machining fluid and a pump for sending the machining fluid from the tank, although not shown in the figure. Pu. The control valve 53 may only allow and prohibit the flow of the machining fluid, or may be capable of controlling the flow rate and/or pressure. Also, the control valve 53 may be configured by combining a plurality of valves. According to the command from the control unit 5, the pump (machining fluid supply source 49) and/or the control valve 53 are activated, thereby controlling the supply of the machining fluid, the flow rate of the machining fluid and/or the pressure of the machining fluid.

Although not shown in the figure, the supply part body 47 may also have a supply source of compressed air, which can mix the machining fluid and the compressed air to spray the mist of the machining fluid. The fluid flowing out from the nozzle 7 for obtaining the reference position may be compressed air supplied from such a supply source as described above.

In the description of this embodiment, the fluid supply unit 9 is regarded as a part of the processing machine 1 . In such a case, the fluid supply unit 9 may be provided in a form that can be regarded as a part of the processing machine 1 in appearance, or may be provided in a form that cannot be regarded as the part. For example, a part or all of the fluid supply unit 9 may be housed in an unillustrated frame together with the machine body 3 shown in FIG. 1 , or may be housed in another frame differently from the machine body 3 . Part or all of the fluid supply part 9 can be disposed in or on the base 21 of the mechanical body 3 .

(control department) The configuration of the control unit 5 shown in FIG. 4 may include, for example, a computer. For example, although the computer is not shown, its structure may include a CPU (central processing unit), a ROM (read only memory), a RAM (random access memory) and an external memory device. In FIG. 4 , a RAM and/or an external memory device is shown as the storage unit 67 . Various functional units ( 59 , 61 , 63 , and 65 ) for controlling and the like are constructed by executing the programs stored in the ROM and/or the external memory device by the CPU. Furthermore, the control unit 5 may include a logic circuit that performs only certain processing.

The control unit 5 is conceptualized as a control unit for the processing machine 1 as a whole. The control unit 5 may be integrated in one place by means of hardware, or may be installed in a plurality of places respectively. In the latter example, a control unit for controlling the machine main body 3 and a control unit for controlling the fluid supply unit 9 are separately provided in hardware. Both may be controlled synchronously or not. Synchronization can be achieved by either one of them acting according to a signal from the other, or by setting up a higher-level control unit for both.

The control unit 5 has functional units ( 59 , 61 , and 63 ) that control the machine body 3 and a fluid control unit 65 that controls the fluid supply unit 9 as functional units that perform control and the like. More specifically, the former is the movement control unit 59 that controls the relative movement of the main shaft 37 and the table 25 when machining, the rotation control unit 61 that controls the rotation of the main shaft 37 when machining, and controls when the reference position is obtained. The reference position acquisition part 63 of the operation at this time. Note that some of these various functional units may be shared.

The movement control unit 59 is, for example, a drive source that controls the movement unit based on the detection value of the position sensor that detects the position of the movement unit ( 25 , 31 or 33 ) on each axis (eg, X axis, Y axis or Z axis). In addition, it is not necessary to provide a position sensor for axes other than the axis in the first direction (in the illustrated example, the Z axis) for obtaining the reference position. From another point of view, open-loop control may be performed on other axes without performing feedback control by the position sensor.

In FIG. 4 , in the three-axis configuration, the Z-axis motor 39 is controlled by the Z-axis position sensor 69 that detects the Z-direction position of the Z-axis moving part 33 . The position in the Z direction of the Z-axis moving part 33 referred to here is, for example, the position in the Z direction of an absolute coordinate system (in other viewpoints, a mechanical coordinate system). (For example, the position in the Z direction of the Y-axis moving part 31).

The aforementioned position sensor may be a sensor that directly detects the position of the moving part (example in the figure), or a sensor that detects the amount of motion of the driving source that drives the moving part (such as the amount of rotation of a rotary motor) . In another point of view, the feedback control based on the detection value of the position sensor can be a fully closed loop (example in the figure) or a semi-closed loop. The specific structure of the position sensor can be various structures, for example, it can be a linear encoder (example in the figure) or a laser length measuring device. Linear encoders can be optical or magnetic, and can also be absolute or incremental.

The rotation control unit 61 controls the spindle motor 41 that drives the spindle 37 based on the detection value of the rotation sensor 71 that detects the rotation (more specifically, the number of rotations) of the spindle 37 . The rotation sensor 71 may directly detect the rotation of the spindle 37 or may detect the rotation of the spindle motor 41 (example in the figure). From another point of view, the rotation sensor 71 may or may not be provided at the spindle motor 41 (example in the figure). In addition, since the main shaft 37 and a part of the main shaft motor 41 are shared with each other, the above-mentioned difference may not be required. The specific structure of the rotation sensor 71 can be various structures, such as an encoder or a resolver. The encoder can be optical or magnetic, and can also be absolute or incremental.

The control by the movement control part 59 and the rotation control part 61 can be performed according to the NC program D1 memorize|stored in the memory part 67 (RAM and/or external memory device), for example. For example, the NC program D1 defines one or more values for at least one of the absolute coordinates (machine coordinates) of the target position, the relative coordinates of the target position, the target movement amount, and the target rotation speed. Furthermore, the movement control unit 59 and the rotation control unit 61 control the drive sources (39, 41, etc.) so as to achieve the aforementioned various target values based on the detection values of the position sensor (69, etc.) and the rotation sensor 71.

The obtained reference position information D3 is stored in the memory unit 67 (RAM and/or external memory device). In the control performed according to the aforementioned NC program D1, the information D3 is suitably utilized. Various aspects can be used for this utilization.

For example, the NC program D1 is a program (one or more blocks) for moving the spindle 37 (tool 101 ) toward the relative position (target position) set with respect to the reference position in the Z-axis direction. Thereby, a reference position can be utilized.

The relative position of the reference position may be specified based on the relative coordinates to the reference position, or may be specified based on the movement amount from the reference position in one or more squares. Also, the movement of the relative position in the aforementioned Z-axis direction may or may not be accompanied by movement of other axes.

In the aforementioned utilization aspect, the relationship between the movement based on the reference position and the processing content can be arbitrary. To give an example, if the blade (tool 101) moves toward the -Z side at a relative position set closer to the -Z side than the reference position by setting the relative position on the +Z side from the reference position or the reference position , forming a groove at a predetermined depth. That is, the reference position can be used as a position for specifying the cutting amount from the upper surface of the workpiece 103 .

Different from the aforementioned aspect, the reference position can also be used in the aspect where the reference position is not specified in the NC program. For example, the reference position can be used to detect any one of the actual position of the tool 101 and/or the workpiece 103 and the assumed position of the tool 101 and/or the workpiece 103 in the mechanical coordinates, and correct the mechanical coordinates specified by the NC program or The position detected by the position sensor. Furthermore, such a utilization aspect can also be regarded as moving the main shaft 37 toward the relative position set with respect to the reference position.

The reference position acquiring unit 63 controls the machine main body 3 (more specifically, the Z-axis motor 39 ) and the fluid supply unit 9 so as to achieve the operation for acquiring the reference position. In FIG. 4 , illustration of arrows indicating this control is omitted. The reference position obtaining unit 63 can control the Z-axis motor 39 , use the movement control unit 59 , and control the fluid supply unit 9 to control the fluid control unit 65 . From another point of view, a part of the reference position acquisition unit 63 may be shared with the movement control unit 59 and the fluid control unit 65 .

The reference position obtaining unit 63 obtains the position in the Z-axis direction of the main shaft 37 when the deceleration of the rotation of the main shaft 37 is detected as a reference position. In this case, the sensor for detecting the position of the spindle 37 is, for example, the Z-axis position sensor 69 used by the movement control unit 59 for feedback control. Thereby, since the reference position and the relative position set with respect to this reference position are specified based on the detection value by the same sensor, the precision of a process can be improved.

Although not shown in the figure, the operation sequence for obtaining the reference position is different from the operation sequence during machining, for example, and is prescribed by a program different from the NC program. These other programs are included in, for example, programs executed by the CPU for constructing the reference position obtaining unit 63 . The program for constructing the reference position obtaining unit 63 may be previously stored in the memory unit 67 by the manufacturer of the processing machine 1, or may be downloaded to the existing processing machine 1 by the operator. Unlike the above description, a part of the operation sequence for obtaining the reference position may be defined by a program created in the same way as the NC program.

The sensor that detects the deceleration of the rotation to obtain the reference position may be the rotation sensor 71 (example in the figure) used by the rotation control unit 61 for feedback control during machining, or may be other sensors. In the former aspect, for example, the structure can be simplified. In the latter aspect, for example, a sensor capable of detecting a slight change in the rotation angle than the rotation sensor 71 detects the deceleration of the rotation with high precision. In addition, in the description of this embodiment, for the convenience of explanation, the former aspect is assumed.

The fluid control unit 65 controls the fluid supply unit 9 so that, for example, the machining fluid is supplied when performing machining and acquiring a reference position. The specific control targets are, for example, the control valve 53 and the machining fluid supply source 49 (for example, a pump not shown).

(Acquisition order of reference position) The outlines of Fig. 5(a), Fig. 5(b) and Fig. 6 are as described above.

The operation for obtaining the reference position shown in these figures may be started when the operator performs a predetermined operation on an unillustrated operating portion of the processing machine 1, or may be performed independently of the operator's operation by The control unit 5 starts automatically. In the latter aspect, as the timing when the control unit 5 automatically acquires the reference position, for example, when a series of machining specified by the NC program is started, when a specific machining is started in the aforementioned series of machining, And when the sensor not shown in the figure that detects the wear of the tool 101 detects that the amount of wear exceeds a predetermined threshold.

When the reference position is obtained, the control unit 5 controls the fluid supply unit 9 to supply the machining fluid from the nozzle 7 to the tool 101 . In addition, at this time, the control unit 5 makes the spindle motor 41 into a torque-free state, for example. That is, no electric power is supplied to the spindle motor 41 . Thereby, the main shaft 37 rotates as shown by arrow a1. Moreover, the control part 5 controls the Z-axis motor 39, and moves the main shaft 37 toward the table 25 as shown by arrow a2.

In the operation of acquiring the reference position, the rotation of the main shaft 37 and the movement of the main shaft 37 may start simultaneously, or one of them may start before the other. In addition, the flow of the machining fluid from the nozzle 7 may continue until the detection of the spindle 37 rotation stop, or may be stopped before the spindle 37 rotation deceleration (caused by contact) is detected. In the former aspect, for example, the main shaft 37 can be reliably rotated until the rotation of the main shaft 37 is decelerated due to the contact between the main shaft 37 and the workpiece 103 . In the latter aspect, for example, by reducing the number of rotations of the spindle 37 when the spindle 37 contacts the workpiece 103 , the possibility of deterioration of the tool 101 and/or the workpiece 103 can be reduced.

The number of revolutions of the main shaft 37 (in another point of view, the pressure of the fluid, etc.) at the time of acquiring the reference position may be appropriate. For example, the number of rotations at this time may be sufficiently lower than the number of rotations when processing is performed with the tool 101 . From another point of view, the moment of inertia of the spindle 37 and the tool 101 and/or the moment applied to the tool 101 from the outside may be smaller than the moment during machining.

The specific number of rotations or torque for processing or obtaining a reference position can be appropriately set according to the specific structure of the machine body 3 , the type of tool 101 , and the type of workpiece 103 to which this embodiment is applied. To cite an example, for example, the rotation speed of machining (more specifically, when the tool 101 is about to contact the workpiece 103 or is in contact) is 2000 rpm (rotations per minute) or more; Specifically, for example, when the tool 101 is about to come into contact with the workpiece 103, the rotational speed is 200 rpm or less, 100 rpm or less, 50 rpm or less, or 10 rpm or less. From another point of view, the number of revolutions for the operation of acquiring the reference position may be 1/10 or less or 1/100 or less of the number of revolutions for processing.

Furthermore, the number of revolutions for processing can be set by, for example, the operator of the processing machine 1 . In another point of view, the number of rotations used for machining can be specified by the NC program. Therefore, when focusing on the processing machine 1 in the distribution stage, the relative relationship between the number of revolutions for processing and the number of revolutions for acquiring the reference position may not be regarded as a constituent element of the processing machine 1 . However, regarding the number of revolutions used for processing, if the lower limit value that can be set by the operator is set in the processing machine 1 or the lower limit value recommended by the manufacturer in the specifications, etc., the aforementioned lower limit value may be the same as The number of rotations used to obtain the reference position is compared to determine whether the aforementioned relationship holds. In the case of referring to the number of revolutions for processing specified by the NC program, if the number of revolutions specified by the NC program is not constant, the lowest number of revolutions can be compared with the number of revolutions for obtaining the reference position. Compare.

Furthermore, the number of revolutions for obtaining the reference position can be set by, for example, the manufacturer of the processing machine 1 or can be set by the operator of the processing machine 1 . From another point of view, information on the number of revolutions for obtaining the reference position may be stored in the memory unit 67 in advance, or may be input to the control unit 5 by operating an unillustrated operation unit of the processing machine 1 or the like. Furthermore, when the number of rotations for obtaining the reference position is set by the operator, similarly to the number of rotations for processing, when focusing on the processing machine 1 in the distribution stage, it is used to obtain the reference position. The number of revolutions may not be regarded as a constituent element of the processing machine 1 .

The moving speed of the main shaft 37 in the operation of acquiring the reference position is appropriate. Also, this moving speed may or may not be constant (changeable speed is possible). As the latter aspect, for example, an aspect in which the vehicle is decelerated when approaching the predicted position of the reference position is mentioned. The predicted position can be input to the control unit 5 by an NC program or by an operator operating a not-shown operation unit. Also, the moving speed when the tool 101 is in contact with the workpiece 103 for obtaining the reference position may be slower, equal, or higher than the moving speed when the tool 101 is in contact with the workpiece 103 for processing. quick. The moving speed can be set by the manufacturer of the processing machine 1 or can be set by the operator of the processing machine 1 . From another point of view, the information on the moving speed may be stored in the memory unit 67 in advance, or may be input to the control unit 5 by operating an unillustrated operation unit of the processing machine 1 or the like. As an example of the moving speed when the tool 101 comes into contact with the workpiece 103 to obtain the reference position, the moving speed is 10 mm/min or less. Of course, the movement speed can be faster than that.

The control unit 5 may control the Z-axis motor 39 so as to move the main shaft 37 with a position on the −Z side from the predicted position of the reference position as the target position. In addition, the spindle 37 can also decelerate (and stop) in the Z direction by receiving a force from the workpiece 103 . The control unit 5 controls the Z-axis motor 39 so as to generate an appropriate torque so that the force that the tool 101 presses the workpiece 103 toward the −Z side does not become excessively large. In addition, the control unit 5 may detect the deceleration or stop of the spindle 37 in the Z direction based on the detection value of an appropriate sensor, and stop the drive of the Z-axis motor 39 in response to the detection. Examples of the aforementioned sensor include the Z-axis position sensor 69 and a sensor that detects electric power supplied to the Z-axis motor 39 .

In addition, the control unit 5 may stop the movement of the main shaft 37 to the -Z side when detecting the deceleration of the rotation of the main shaft 37 due to the contact between the tool 101 and the workpiece 103 . The detection of the deceleration at this time can be shared with the detection of the deceleration of the rotation when the position of the main shaft 37 in the Z direction is taken as a reference position. In this case, the control unit 5 may obtain the position of the main shaft 37 at the time of detection of the deceleration of the rotation as a reference position, or may obtain the position of the main shaft 37 during the period from the detection of the rotation to the stop of the movement toward the -Z side. The position is obtained as a reference position, and the position of the main shaft 37 after the movement to the -Z side is stopped may be obtained as a reference position. However, in this specification, unless otherwise specified, the above-mentioned strictness is not affected, and any of the above-mentioned aspects is the position of the main shaft 37 when the deceleration of the rotation is detected. Furthermore, unlike the above description, the detection of the deceleration of the rotation for stopping the movement toward the -Z side and the detection of the deceleration of the rotation for obtaining the reference position may be separately detected (determined).

As described above, the control unit 5 is in a state where the tool 101 is brought close to the workpiece 103 while rotating the tool 101 with the fluid from the nozzle 7, and the rotation sensor 71 (or other sensing devices) If the sensor) detects the deceleration of the rotation, the detection value of the Z-axis position sensor 69 at this time is stored in the memory unit 67 as a reference position.

The detection of the deceleration caused by the contact between the tool 101 and the workpiece 103 can be suitably performed. For example, the control unit 5 receives a signal corresponding to the number of rotations (rotational speed in another point of view) detected by the rotation sensor 71 in real time. In addition, the control unit 5 determines that deceleration has occurred when the number of rotations specified from the received signal is equal to or less than a predetermined threshold value. Also, for example, in an aspect where a moment is applied to the tool 101 only at the initial stage of moving the tool 101 toward the -Z side, and the rotation is decelerated from the initial stage of movement, when the absolute value of the rate of change of the number of revolutions exceeds a predetermined threshold value (sudden deceleration When in progress), it can be judged that the rotation stops. The determination may be made not by the control unit 5 but by the rotation sensor 71 . In other words, the control unit 5 may also receive a signal related to the determination result of deceleration from the rotation sensor 71 .

The aforementioned threshold value can be set by the manufacturer of the processing machine 1 or can be set by the operator of the processing machine 1 . From another point of view, the threshold value information may be stored in the memory unit 67 in advance, or may be input to the control unit 5 by operating an unillustrated operation unit of the processing machine 1 or the like. The specific value of the threshold can be set appropriately. In an aspect when deceleration is detected when the number of rotations falls below a predetermined threshold, the threshold may be substantially a magnitude (0 rpm) corresponding to detection of a stop of rotation. As an example of the threshold value of the number of revolutions, for example, the threshold value may be an arbitrary value of 20 rpm or less, an arbitrary value of 10 rpm or less, an arbitrary value of 5 rpm or less, or an arbitrary value of 1 rpm or less. This threshold can also be suitably combined in such a way that it does not contradict the previous example for the number of rotations before contact.

5( a ) and FIG. 5( b ) may be performed manually, or may be performed by an operator operating an unillustrated operating portion of the processing machine 1 . As the aforementioned part, for example, the rotation of the main shaft 37 and/or the movement in the -Z direction of the main shaft 37 can be mentioned. When the main shaft 37 is moved in the −Z direction by an operator's operation, a manual pulse generator (not shown) may be used.

In the description so far, the workpiece 103 has been taken as an example as the reference member that the tool 101 comes into contact with when acquiring the reference position. However, the reference member may be another member that does not move with respect to the workpiece 103 . For example, the reference member can be the table 25 or the jig 27 , or it can be a dedicated member for detachably fixing the table 25 or the jig 27 and obtaining a reference position. However, the aforementioned dedicated components can be regarded as a part of the workbench 25 or the fixture 27 . In the description of the acquisition of the reference position in the present invention, the term of the workpiece 103 can be replaced with the term of the other reference member mentioned above, unless there is a contradiction.

(Summary of implementation form) As described above, the processing machine 1 has the main shaft 37, the holding unit (table 25), the drive unit (Z-axis motor 39), the position sensor (Z-axis position sensor 69), the rotation sensor 71, and the controller. Part 5. The main shaft 37 holds one of the tool 101 and the workpiece 103 (in the illustrated example, the tool 101 ). The holding unit (table 25 ) holds the other of the tool 101 and the workpiece 103 (in the illustrated example, the workpiece 103 ). The Z-axis motor 39 moves one of the main shaft 37 and the table 25 , that is, the movable part (the main shaft 37 ) in a predetermined first direction (Z direction). The Z-axis position sensor 69 detects the position of the spindle 37 in the Z direction. The rotation sensor 71 detects the rotation of the spindle 37 . When the workpiece 103 is processed by the tool 101 while the main shaft 37 is rotating, the control unit 5 moves the main shaft 37 in the Z direction toward a relative position set to a predetermined reference position, according to the Z-axis The detection value of the position sensor 69 controls the Z-axis motor 39 . Also, when the workpiece 103 or a member that does not move to the workpiece 103 (such as the table 25) is used as a reference member, the control unit 5 detects the rotation of the main shaft 37 by the rotation sensor 71, and moves the main shaft 37 in the Z direction. When a predetermined signal is input while the tool 101 is in contact with the reference member in the Z direction, the position detected by the Z-axis position sensor 69 is acquired as the reference position.

From another point of view, the method of manufacturing a workpiece in this embodiment uses the processing machine 1 to process a workpiece 103 with a tool 101 to obtain a workpiece. The processing machine 1 has a spindle 37 , a holding unit (table 25 ), a driving unit (Z-axis motor 39 ), a position sensor (Z-axis position sensor 69 ), and a rotation sensor 71 . The main shaft 37 holds one of the tool 101 and the workpiece 103 (in the illustrated example, the tool 101 ). The holding unit (table 25 ) holds the other of the tool 101 and the workpiece 103 (in the illustrated example, the workpiece 103 ). The Z-axis motor 39 moves one of the main shaft 37 and the table 25 , that is, the movable part (the main shaft 37 ) in a predetermined first direction (Z direction). The Z-axis position sensor 69 detects the position of the spindle 37 in the Z direction. The rotation sensor 71 detects the rotation of the spindle 37 . This manufacturing method has the following steps. When the workpiece 103 or a member that is immovable with respect to the workpiece 103 (such as the table 25) is used as the reference member, the step of moving the spindle 37 in the Z direction while the spindle 37 is rotating to bring the tool 101 into contact with the reference member (step ST1 and ST2). A step of detecting the deceleration of the rotation of the main shaft 37 due to the contact of the tool 101 with the reference member based on the detection result by the rotation sensor 71 (step ST3). A step of acquiring the position in the Z direction of the main shaft 37 when deceleration is detected by the Z-axis position sensor 69 (step ST4).

Therefore, for example, as described above, the tool 101 and the reference member (here, the workpiece 103 ) in contact with the tool 101 may not be electrically conductive. Also, there is no need to replace the tool 101 with a conductive virtual tool.

The aforementioned predetermined signal that becomes a trigger for acquiring the reference position is a signal from the rotation sensor 71 corresponding to the deceleration (may include stoppage) of the rotation of the main shaft 37 . The signal referred to here may be, for example, a signal indicating the number of revolutions, or a signal indicating whether or not there is a deceleration determination, as described above.

In this case, since, for example, the operations from the detection of deceleration to the acquisition of the reference position are performed automatically, the operator-mediated aspect (this aspect is also included in the technology of the present invention. Refer to FIG. 7(b) ) and Figure 7 (c) will be described later), which can reduce the distribution of the relative relationship between the deceleration and the reference position. Furthermore, the accuracy of the reference position can be improved. In addition, the burden on the operator can also be reduced.

The first direction (Z direction) for obtaining the aforementioned reference position may be a direction intersecting (for example, perpendicular) to the rotation axis of the main shaft 37 . In another point of view, as shown in the figure, when the tool 101 is a turning tool, when the reference position is obtained, the outer peripheral portion of the turning tool may be in contact with the reference member (for example, the workpiece 103 ). Alternatively, unlike the illustrated example, when the tool 101 is a turning tool, when the reference position is obtained, the outer peripheral portion of the reference member (for example, the workpiece 103 ) may abut against the tool 101 .

In this case, although there will be effects such as the structure of the turning tool (tool 101), compared with the aspect in which the front end of the turning tool contacts the workpiece 103 (this aspect is also included in the technology of the present invention), by Due to the contact of the turning tool with the workpiece 103, it is easier to decelerate the rotation of the turning tool. Reasons for this include that the distance between the rotating shaft of the turning tool and the contact position between the turning tool and the workpiece 103 tends to be longer, and/or the contact area between the outer peripheral portion of the turning tool and the workpiece 103 tends to increase.

The spindle 37 holding one of the tool 101 and the workpiece 103 can hold the tool 101 . The holding portion for holding the other of the tool 101 and the workpiece 103 may be a workbench (the workbench 25 and/or or clamp 27). The tool 101 may be a grinding stone for grinding with an outer peripheral portion (a portion outside the periphery of the rotating shaft; cutting edge 101a). The reference position may be a position where the outer peripheral portion of the tool 101 abuts against the workpiece 103 or the table (more specifically, the surface on the other side (+Z side) in the Z direction).

In this case, for example, a large distance (radius of the insert) from the rotational axis CL of the tool 101 to a portion where the tool 101 contacts the workpiece 103 can be ensured, so that the rotation of the tool 101 can be easily decelerated. As a result, it is easy to apply the method of acquiring the reference position of this embodiment. Also, since the position where the cutting edge 101a abuts is used as the reference position, the amount of cutting from the workpiece 103 (the depth of the groove) can be controlled with high precision. When the cutting edge 101a wears and progresses, the reference position can be acquired again, and the accuracy of the cutting amount can be maintained.

The processing machine 1 may further have a fluid supply unit 9 . Here, the tool 101 held by the main shaft 37 or the workpiece 103 (in the illustrated example, the tool 101 ) is set as the object of rotation. At this time, the fluid supply unit 9 can realize the rotation of the main shaft 37 in which the reference position is obtained by hitting the fluid against the outer surface of the rotating object.

In this case, for example, the reference position can be obtained by rotating the main shaft 37 by a driving source (spindle motor 41 ) different from the driving source (spindle motor 41 ) that drives the main shaft 37 for processing. Therefore, compared to the aspect in which the spindle 37 is rotated by the spindle motor 41 to obtain the reference position (this aspect can also be included in the technology of the present invention), it can be set without being affected by the performance of the spindle motor 41. The number of revolutions at the reference position. Furthermore, it is easy to reduce the number of rotations required for obtaining the reference position, for example. And, compared with, for example, making the fluid only impinge on the outer surface of the main shaft 37 (this aspect is also included in the technology of the present invention. It will be described later with reference to FIG. Or the device for supplying the machining fluid to the workpiece 103 can also be used as a device for obtaining the reference position. From another point of view, the configuration of the device can be simplified in that the device that supplies the machining fluid during processing can also be used to obtain the reference position. In addition, as the device used for obtaining the reference position, the device for supplying machining fluid has been described as an example, but other devices such as a device for supplying purge gas may also be used.

The tool 101 may be a grinding stone (for example, a blade) that grinds with a peripheral portion. The fluid supply unit 9 can realize the rotation of the main shaft 37 for the operation of obtaining the reference position by hitting the fluid against the tangential direction of the outer peripheral portion of the tool 101 .

In this case, for example, the above-described effect that the device for supplying the machining fluid can be easily used for obtaining the reference position can be exhibited. Moreover, since the fluid hits the position of the tool 101 at a long distance from the rotation axis, it is easy to rotate the tool 101 . As a result, for example, it is easy to reduce the load on the fluid supply unit 9 when acquiring the reference position.

The fluid supply unit 9 may have a nozzle 7 for supplying a machining fluid that is supplied to realize the rotation of the main shaft 37 when the reference position is obtained.

In this case, compared with, for example, the aspect in which fluid is supplied from a nozzle different from the nozzle 7 when the reference position is obtained (this aspect is also included in the technology of the present invention. It will be described later with reference to FIG. 8(a)), the structure can be simplified change. Also, for example, when the tool 101 is changed to a different type, by adjusting the position of the nozzle 7 for processing, the position of the nozzle for obtaining the reference position can also be adjusted, so the operator's workload can also be reduced. .

In the operation of obtaining the reference position, the rotation speed of the spindle 37 before the tool 101 comes into contact with the reference member (for example, the workpiece 103 ) can be lower than the rotation speed of the spindle 37 when the workpiece 103 is processed by the tool 101 .

In this case, for example, the possibility of tool 101 and/or the reference member deteriorating when the reference position is obtained can be reduced. Furthermore, as mentioned above, since the number of rotations used for processing is set by the operator, the above-mentioned characteristics may not be specified in the processing machine 1 in the distribution stage.

The number of rotations of the spindle 37 when machining the workpiece 103 can be set to 2000 rpm or more. In the operation of obtaining the reference position, the number of rotations of the spindle 37 immediately before the tool 101 comes into contact with the reference member (for example, the workpiece 103 ) can be set to 200 rpm or less. Also, from another point of view, in the operation of obtaining the reference position, the number of rotations of the main shaft 37 before the tool 101 comes into contact with the reference member can be set to be less than 1/10 of the number of rotations of the main shaft 37 when the workpiece 103 is processed. .

In these cases, for example, the number of revolutions for the operation to obtain the reference position is sufficiently lower than the number of revolutions for machining. Therefore, during the operation of obtaining the reference position, the probability of at least one of them deteriorating due to the contact between the tool 101 and the reference member can be reduced.

The main shaft 37 may be supported by an air bearing (such as the bearing 43 shown in FIG. 3 ).

In this case, for example, the frictional force to stop the main shaft 37 is smaller than that of other types of bearings, and the main shaft 37 can be rotated with a smaller torque. As a result, it is possible to reduce the moment externally applied to the main shaft 37 and/or the moment of inertia of the main shaft 37 in the operation of obtaining the reference position, for example. In turn, the torque applied by the tool 101 to the workpiece 103 when the tool 101 is in contact with the workpiece 103 can be reduced. As a result, the probability of tool 101 and/or the reference member deteriorating due to acquisition of the reference position can be reduced.

In addition, in the above embodiment, the table 25 is an example of the other holding part which holds a tool and a workpiece|work. The Z direction is an example of the first direction. The main shaft 37 is an example of a movable part. The Z-axis motor 39 is an example of a drive unit. The Z-axis position sensor 69 is an example of a position sensor. The workpiece 103, the jig 27, and the table 25 are each an example of a reference member. A machining fluid is an example of a fluid.

(Modification) Hereinafter, various modification examples will be described. The description of the modifications will be roughly performed in the following order. ・Three modified examples of detecting the deceleration of the rotation of the main shaft 37 (Fig. 7(a) ~ Fig. 7(c)) ・Three modified examples of the method of rotation of the main shaft 37 (Fig. 8(a) ~ Fig. 8(c))

(Modification of deceleration detection) 7( a ) to 7 ( c ) are diagrams showing modified examples of detection of deceleration of the rotation of the main shaft 37 in the operation of acquiring the reference position, respectively. These figures schematically show the state in which the tool 101 and the main shaft 37 are viewed from the side.

In the modified example shown in FIG. 7( a ), the deceleration of the main shaft 37 (rotation of the main shaft 37 ) to obtain the movement of the reference position is detected by a rotation sensor different from the rotation sensor 71 provided on the main shaft motor 41 . 71A for detection. The rotation sensor 71A detects, for example, the rotation of the tool 101 (or the spindle 37 ; the same applies hereinafter) in a non-contact manner. Such a rotation sensor 71A may be, for example, an optical or magnetic sensor.

Specifically, for example, the tool 101 (which may also include a device for attaching the tool body to the main shaft 37 as described above) has the detected portion 72 that moves in the circumferential direction by the rotation of the main shaft 37 . The detected portion 72 may be a part located around the rotation axis of the main shaft 37 , or may form a repeated pattern and extend over substantially the entire circumference around the rotation axis of the main shaft 37 . In an optical type, the detected portion 72 may be, for example, a member that reflects or transmits light. In the magnetic type, the detected portion 72 may be, for example, a magnet. Further, the rotation sensor 71A detects the passing of the detected portion 72 in the circumferential direction of the rotation sensor 71A according to a change in light or magnetism to be detected, thereby detecting the rotation of the tool 101 .

The rotation sensor 71A may be used as a feedback sensor during processing, or may be a dedicated sensor for obtaining a reference position instead of the rotation sensor 71 . As described in the embodiment, in the former case, the structure can be simplified. In addition, the precision improvement of machining can also be expected by closed-loop feedback control. In the latter aspect, by using the rotation sensor 71A as a sensor capable of detecting a slight change in the rotation angle more than the rotation sensor 71 , it is possible to detect the deceleration of the rotation with high accuracy. In addition, the fact that the detection of the deceleration based on the detected value of the number of revolutions can be performed by any one of the control unit 5 and the rotation sensor 71A is the same as in the embodiment.

As described above, the detected portion 72 may be located on the spindle 37 , or the tool 101 or workpiece 103 held on the spindle 37 . The rotation sensor 71A may be a non-contact sensor that detects the rotation of the main shaft 37 based on the detection of the passage of the detected portion 72 in the circumferential direction of the main shaft 37 .

In this case, for example, the rotation of the tool 101 directly affected by the contact is detected, so the detection accuracy of the reference position can be improved. In addition, for example, it is easy to add the rotation sensor 71A with detection accuracy suitable for detecting the low-speed rotation of the tool 101 . As a result, for example, the technique of the present invention can be easily applied to the existing processing machine 1 .

In the modified example of FIG. 7( b ), the control unit 5 does not obtain the reference position when a predetermined signal (signal corresponding to deceleration) is input from the rotation sensor 71, but is input from the input unit 75 operated by the operator. Obtain the reference position at the predetermined signal time. More specifically, for example, the number of rotations detected by the rotation sensor 71 is displayed on the display 73 in real time. The operator determines whether the rotation of the spindle 37 has been decelerated due to the contact between the tool 101 and the workpiece 103 based on the number of rotations displayed on the display 73 while the tool 101 is rotating and moving in the −Z direction. Also, when it is determined that the rotation is decelerating, the operator performs a predetermined operation on the input unit 75 to input a signal for instructing acquisition of the reference position from the input unit 75 to the control unit 5 .

In such an aspect, the movement of the tool 101 toward the -Z side can be predetermined by, for example, the operator on the input unit 75 (more specifically, for example, a manual pulse generator not shown included in the input unit 75). operation to proceed. Also, when the operator judges that the spindle 37 is decelerating from the rotation speed displayed on the display 73, the operator stops the operation of moving the tool 101 toward the -Z side or does not restart the operation of the movement. Then, as described above, the operation of obtaining the indicated reference position is performed. When the operation of instructing acquisition of the reference position is performed, the control unit 5 obtains the position detected by the Z-axis position sensor 69 as the reference position at this time.

Furthermore, as can be seen from the foregoing description, the signal instructing to obtain the reference position may be input not while the tool 101 is moving toward the -Z side, but after the tool 101 stops moving toward the -Z side. In other viewpoints, for example, when the position in the Z direction of the main shaft 37 when the deceleration of the rotation of the main shaft 37 is detected is obtained by the Z-axis position sensor 69 as a reference position, the timing of the deceleration of the rotation is detected, and by The timing at which the position to be the reference position is detected by the Z-axis position sensor 69 varies.

The structure of the display 73 is arbitrary. For example, the display 73 may be a display capable of displaying other information, or may only display the number of rotations. As the former, for example, a liquid crystal display or an organic EL (electro-luminescence) display capable of displaying an arbitrary image can be mentioned. Such a display may also be a touch panel included in the input unit 75 . Also, as the latter, there are LED (light emitting diode) or liquid crystal displays that display numbers in multiple segments, displays that rotate a member on which characters are drawn, or displays that display values on a scale with rotating needles. monitor.

The configuration of the input unit 75 is arbitrary. The input unit 75 shown in the figure can be considered to collectively and conceptually display one or more input devices included in the processing machine 1 . Although not shown, the input unit 75 may include, for example, a touch panel, a mechanical switch, and a manual pulse generator. The aforementioned operation of obtaining the indicated reference position can be performed on, for example, a touch panel or a mechanical switch.

As described above, the processing machine 1 may include: the display 73 that displays the number of rotations of the main shaft 37 detected by the rotation sensor 71; and the input unit 75 that accepts an operator's operation. A signal from the input unit 75 may be used as a predetermined signal that becomes an opportunity to acquire the reference position.

In this case, for example, when the technology of the present invention is applied to the existing processing machine 1, the program of the control unit 5 does not need to be changed or is seldom changed. As a result, the technique of the present invention can be easily applied to the existing processing machine 1 . In addition, it is possible to flexibly and easily change the criterion for determining whether or not the rotation of the tool 101 is decelerated according to the type of the tool 101 and/or the material of the workpiece 103 .

The modified example of FIG. 7( c ) is simply a combination of the modified example of FIG. 7( a ) and the modified example of FIG. 7( b ). That is, the rotation of the tool 101 is directly detected by the non-contact rotation sensor 71A. Also, the detected number of rotations is displayed on the display 73, and the operator determines whether to decelerate or not.

(Modified example of spindle rotation method) 8(a) to 8(c) are diagrams showing modified examples of the method of rotating the main shaft 37 in the operation of obtaining the reference position, respectively.

FIG. 8( a ) is a schematic view of the tool 101 and the workpiece 103 viewed from the axial direction of the spindle 37 (not shown here).

In this modified example, fluid is supplied from a nozzle 7A different from the nozzle 7 that supplies the machining fluid, and the tool 101 is rotated by the fluid. In addition, various descriptions about the nozzle 7 in the description of the embodiment (the nozzle 7 itself, the type of fluid supplied from the nozzle 7, the supply part for supplying the fluid to the nozzle 7, and the position and direction where the fluid collides, etc.) Note) can be used for the nozzle 7A as long as there is no conflict or the like.

The structure of the nozzle 7A may be different from that of the nozzle 7 or may be the same. The fluid supplied from the nozzle 7A may or may not be a machining fluid. When the fluid supplied from the nozzle 7A is gas, the supply source for supplying the fluid to the nozzle 7A may be an air supply source such as a pump. The fluid supply unit for supplying the fluid to the nozzle 7A may have a completely different structure from the fluid supply unit for supplying the fluid to the nozzle 7, or a part thereof may be shared. The fluid from the nozzle 7A, such as the fluid from the nozzle 7, may be supplied to the processing area, or may be supplied to an area different from the processing area.

As described above, the fluid supply unit 9 may have the nozzle 7A, which is different from the nozzle 7 for supplying the machining fluid, and supplies the fluid for rotating the main shaft 37 .

In this case, for example, since the nozzle 7A is not a nozzle for supplying fluid for processing, the position, direction, and structure of the nozzle 7A, and the type of fluid supplied from the nozzle 7A, etc., are not subject to such restrictions as the nozzle 7. , with a high degree of freedom. As a result, for example, the fluid supply unit 9 can be configured with a structure suitable for obtaining the reference position.

FIG. 8( b ) is a schematic view of the tool 101 and the workpiece 103 viewed from the side of the spindle 37 .

In this modified example, similarly to the modified example of FIG. 8( a ), another nozzle 7B different from the nozzle 7 is provided. The fluid from the nozzle 7B collides not with the tool 101 but with the spindle 37 (more specifically, the external surface exposed from the spindle head 35). In addition, unlike the illustrated example, the fluid from the nozzle 7 may collide with the main shaft 37 . The above descriptions of the direction of the fluid and the like in the aspect of causing the fluid to collide with the tool 101 can be applied to the aspect of causing the fluid to collide with the main shaft 37 as long as there is no conflict or the like.

As in this modified example, when the fluid collides with the spindle 37, compared to the situation where the fluid collides with the tool 101, when the tool 101 is replaced with a different type of tool, it can be expected to reduce the time required to obtain the reference position. changes in the number of spins.

Fig. 8(c) is a cross-sectional view corresponding to a part of Fig. 3 .

In this modified example, the rotation of the main shaft 37 for obtaining the reference position can be realized by a hydrostatic bearing (such as an air bearing) instead of or in addition to the conventional method. Specifically, in the hydrostatic bearing, when the fluid applies pressure to the main shaft 37, the distribution of the pressure is made unbalanced. Thereby, the main shaft 37 is rotated. The structure used to achieve this imbalance may be a suitable structure.

In the illustrated example, the groove 77 is formed on the outer surface of the main shaft 37 obliquely with respect to the shaft center. The position where the fluid discharged from the hydrostatic bearing toward the front end side of the main shaft 37 passes through the groove 77 . As a result, the balance of the pressure applied to the main shaft 37 collapses, and a moment is applied to the main shaft 37 . However, this force rectangle becomes small, and has little influence on the rotation of the main shaft 37 during machining.

Also, for example, although not shown, unbalance is realized by the shape and/or arrangement of a plurality of openings for supplying fluid in the hydrostatic bearing. Moreover, it is also possible to realize unbalanced by individually installing valves in flow paths communicating with the aforementioned plurality of openings. It can be known from the foregoing examples that the unbalance may be a persistent one that occurs when the reference position is obtained, or a temporary one that occurs only when the reference position is obtained.

As described above, the processing machine 1 may include: an air bearing (bearing 43 ) supporting the spindle 37 ; and a pump 45 for feeding air into the bearing 43 . The rotation of the main shaft 37 for obtaining the reference position can be realized by utilizing the pressure of the air supplied into the bearing 43 by the pump 45 .

In this case, when the tool 101 is replaced with a different type, the variation in the number of rotations when the reference position is obtained can be expected to be reduced compared to the case where the tool 101 is rotated by colliding with fluid, for example.

The technology of the present invention is not limited to the above embodiments, and can be implemented in various ways.

In the description of the embodiment, the reference position is defined as the position in the first direction (Z direction) of the absolute coordinate system of the movable part (one of the main shaft and the holding part). However, the reference position may be the relative position of the movable part in the first direction with respect to the other member (the other of the main shaft and the holding part). In this case, the position sensor that detects the position of the movable part in the first direction may be a single sensor that detects the relative position of the movable part and other members, or may be a sensor that detects the absolute position of the movable part In combination with sensors that detect the absolute position of other components.

1: Processing machine 3: Mechanical body 5: Control Department 7: Nozzle 9: Fluid supply part 25: Workbench (holding part) 37:Spindle 39: Z-axis motor (driver part) 69: Z-axis position sensor (position sensor) 71: Rotation sensor 101: Tools 103: Workpiece (reference component)

[ Fig. 1 ] is a schematic perspective view showing main parts of a processing machine according to an embodiment of the present invention. [ Fig. 2 ] is an enlarged schematic perspective view showing a part of the processing machine in Fig. 1 . [ Fig. 3 ] is a cross-sectional view schematically showing a bearing of a main shaft of the processing machine shown in Fig. 1 . [ Fig. 4 ] is a block diagram schematically showing the structure of the signal processing system of the processing machine in Fig. 1 . [FIG. 5(a)] and [FIG. 5(b)] are schematic diagrams for explaining the operation of acquiring the information of the reference position of the processing machine in FIG. 1 . [ Fig. 6] Fig. 6 is a flow chart showing an example of a procedure for obtaining information of a reference position in the processing machine of Fig. 1 . [ FIG. 7( a )], [ FIG. 7( b )], and [ FIG. 7( c )] are schematic diagrams showing various modified examples of deceleration of the rotation of the detection tool. [FIG. 8(a)], [FIG. 8(b)], and [FIG. 8(c)] are schematic diagrams showing various modifications of the tool rotation method.

7: Nozzle

25: Workbench (holding part)

101: Tools

101a: cutting edge

103: Workpiece (reference component)

CL: axis of rotation

a1, a2: arrows

Claims (18)

A processing machine comprising: a spindle holding either one of a tool and a workpiece; a holding unit that holds the other of the aforementioned tool and the aforementioned workpiece; a drive unit for moving either one of the main shaft and the holding unit, that is, the movable unit, in a predetermined first direction; a position sensor for detecting the position of the movable part in the first direction; and a rotation sensor that detects rotation of the aforementioned spindle; and A control unit that moves the movable unit toward a relative position set to a predetermined reference position in the first direction when the workpiece is machined by the tool while the main shaft is rotating, controlling the driving unit according to the detection value of the position sensor, When the workpiece or a member that does not move with respect to the workpiece is used as a reference member, the control unit detects the rotation of the main shaft by the rotation sensor, and moves the tool and the movable unit in the first direction when the movable unit moves in the first direction. When a predetermined signal is input while the reference member is in contact with the first direction, the position detected by the position sensor is acquired as the reference position. The processing machine according to claim 1, wherein the predetermined signal is a signal from the rotation sensor corresponding to the deceleration of the rotation of the main shaft. The processing machine according to claim 1, further comprising: a display for displaying the number of rotations of the spindle detected by the rotation sensor; and an input section that receives an operator's operation, The aforementioned predetermined signal is a signal from the aforementioned input unit. The processing machine according to any one of claims 1 to 3, wherein the first direction is a direction intersecting the rotation axis of the main shaft. The processing machine according to claim 4, wherein the aforementioned spindle holds the aforementioned tool, The holding part is a workbench for holding the workpiece located on one side closer to the first direction than the main shaft, The aforementioned tool is a grinding stone for grinding by the outer periphery, The aforementioned reference position is a position where the aforementioned outer peripheral portion is in contact with the aforementioned workpiece or the aforementioned workbench. The processing machine according to any one of claims 1 to 3, further comprising a fluid supply unit configured to rotate the tool or workpiece held on the spindle, The rotation of the main shaft realizes the operation of obtaining the reference position by causing the fluid to collide with the outer surface of the rotating object. The processing machine according to claim 6, wherein the tool is a grinding stone for grinding by the outer peripheral portion, The fluid supply unit realizes the rotation of the main shaft by causing the fluid to collide with the outer peripheral portion in a tangential direction of the outer peripheral portion to obtain the reference position. The processing machine according to any one of claims 1 to 3, further comprising a fluid supply part for realizing the operation of obtaining the reference position of the main shaft by impacting the fluid on the outer surface exposed outside the main shaft rotate. The processing machine according to claim 6, wherein the fluid supply part has a nozzle for supplying the processing fluid as the fluid. The processing machine according to claim 6, wherein the fluid supply unit has a nozzle for supplying the fluid, and the nozzle is different from a nozzle for supplying the machining fluid. The processing machine according to any one of claims 1 to 3, further comprising: an air bearing supporting the aforementioned main shaft; and For the pump that conveys air in the aforementioned air bearing, The rotation of the main shaft for obtaining the reference position is realized by the pressure of the air supplied into the air bearing by the pump. The processing machine according to any one of claims 1 to 3, wherein the rotation sensor is provided in a spindle motor that rotates the spindle. The processing machine according to any one of claims 1 to 3, wherein the portion to be detected is located on the main shaft, or the tool or workpiece held on the main shaft, The rotation sensor is a non-contact sensor that detects the rotation of the main shaft by detecting the passage of the detected portion in the circumferential direction of the main shaft. The processing machine according to any one of claims 1 to 3, wherein, in the operation of acquiring the reference position, the number of rotations of the spindle before the tool comes into contact with the reference member is equal to the number of rotations of the workpiece by the tool The number of rotations of the aforementioned spindle is low when processing. The processing machine according to claim 14, wherein the number of rotations of the spindle when processing the workpiece is 2000 rpm or more, In the operation of obtaining the reference position, the number of rotations of the spindle just before the tool comes into contact with the reference member is 200 rpm or less. The processing machine according to claim 14, wherein, in the operation of obtaining the reference position, the number of rotations of the main shaft just before the tool comes into contact with the reference member is 1/ of the number of rotations of the main shaft when the workpiece is processed. 10 or less. A method of manufacturing a processed object, using the processing machine according to any one of Claims 1 to 16, to process the aforementioned workpiece with the aforementioned tool to obtain the processed object. A method of manufacturing a workpiece comprising: a spindle holding either one of a tool and a workpiece; a holding unit that holds the other of the aforementioned tool and the aforementioned workpiece; a drive unit for moving either one of the main shaft and the holding unit, that is, the movable unit, in a predetermined first direction; a position sensor for detecting the position of the movable part in the first direction; and A processing machine with a rotation sensor that detects the rotation of the spindle, and a method of manufacturing a processed object obtained by processing the workpiece with the aforementioned tool, the manufacturing method comprising: When the workpiece or a member immobile with respect to the workpiece is used as a reference member, a step of moving the movable part in the first direction while the spindle is rotating to bring the tool into contact with the reference member; a step of detecting deceleration of the rotation of the spindle due to the contact of the tool with the reference member based on the detection result by the rotation sensor; and A step of obtaining the position of the movable part in the first direction when the deceleration is detected by the position sensor.

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