TW202317674A - Transparent conductive film and manufacturing method thereof including a flexible substrate, at least one conductive layer and a fluorine-containing polyimide film - Google Patents

Transparent conductive film and manufacturing method thereof including a flexible substrate, at least one conductive layer and a fluorine-containing polyimide film Download PDF

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TW202317674A
TW202317674A TW110139548A TW110139548A TW202317674A TW 202317674 A TW202317674 A TW 202317674A TW 110139548 A TW110139548 A TW 110139548A TW 110139548 A TW110139548 A TW 110139548A TW 202317674 A TW202317674 A TW 202317674A
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fluorine
flexible substrate
film
containing polyimide
transparent conductive
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TW110139548A
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曾吉永
邱楗洺
王秀慧
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大陸商矽時代柔性光電材料科技(深圳)有限公司
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Abstract

The present invention discloses a transparent conductive film and a manufacturing method thereof, which include a flexible substrate, at least one conductive layer and a fluorine-containing polyimide film, herein the thickness of the flexible substrate is between 10 micro meters and 100 micro meters, the conductive layer and the fluorine-containing polyimide film are respectively formed on the surface of the flexible substrate, and the conductive layer is covered between the fluorine-containing polyimide film and the flexible substrate. The thickness of the fluorine-containing polyimide film is between 0.2 micro meter and 1 micro meters, and the fluorine-containing polyimide film comprises at least one dianhydride monomer and a product formed by condensation polymerization of at least two kinds of diamine monomers, the ratio of the total moles of the at least one dianhydride monomer to the at least two kinds of diamine monomers can be between 1 : 0.95 to 1 : 1.1. The present invention also provides a method for manufacturing the aforementioned transparent conductive film.

Description

透明導電薄膜及其製造方法 Transparent conductive film and manufacturing method thereof

本發明係有關一種導電薄膜,特別係指一種透明導電薄膜及其製造方法。 The invention relates to a conductive film, in particular to a transparent conductive film and a manufacturing method thereof.

平板電腦觸控面板、有機發光與顯示、薄膜太陽能等大量需要透明電極的產品,其中的透明導電膜材料一直以氧化銦錫(IndiumTin Oxide;ITO)為主。然而,銦的產量少、價格高,由材料的來源和成本來看,都有尋找替代材料的需要,因此從1980年代至今,ITO替代材料的開發不斷持續中。此外,ITO這類的透明導電氧化物(Transparent Conducting Oxide;TCO),基本上是硬質材料,不耐變形或彎折。 A large number of products that require transparent electrodes, such as touch panels for tablet computers, organic light-emitting and displays, and thin-film solar energy, have always used Indium Tin Oxide (ITO) as the main transparent conductive film material. However, the output of indium is low and the price is high. Judging from the source and cost of materials, there is a need to find alternative materials. Therefore, from the 1980s to the present, the development of ITO alternative materials has continued. In addition, transparent conductive oxides (Transparent Conducting Oxide; TCO) such as ITO are basically hard materials and are not resistant to deformation or bending.

實驗結果顯示,在PET基材上的ITO膜受到拉伸時,如果延伸率達到3%左右,ITO膜層就會喪失原有的導電性。凡是TCO材料,都有這個本質上的弱點。近年來隨著可撓式顯示器的興起,有必要尋求耐彎折性更佳的透明導電膜材料,而且當面板尺寸繼續增大時,ITO膜即將面臨電阻無法再降低的瓶頸,這也促使相關業者和研發者更積極地開發非ITO的透明導電膜材料。非ITO(或非TCO)的透明導電膜材料要用於觸控面板,除了基本的片電阻和穿透率之外,還必須滿足其他要求,例如穩定性、耐環境(高溫、高濕等)、可圖案化等。另外,它們必須能配合現有的生產線,不需大幅修改或增加設備。 The experimental results show that when the ITO film on the PET substrate is stretched, if the elongation reaches about 3%, the ITO film layer will lose its original conductivity. All TCO materials have this essential weakness. With the rise of flexible displays in recent years, it is necessary to seek transparent conductive film materials with better bending resistance, and when the size of the panel continues to increase, the ITO film will soon face the bottleneck that the resistance can no longer be reduced, which also prompts related The industry and developers are more actively developing non-ITO transparent conductive film materials. Non-ITO (or non-TCO) transparent conductive film materials to be used in touch panels, in addition to basic sheet resistance and transmittance, must also meet other requirements, such as stability, environmental resistance (high temperature, high humidity, etc.) , Patternable, etc. In addition, they must fit into existing production lines without major modifications or additions.

其中,奈米金屬線,尤以銀線(AgNWs)為主,被認為是未來最有可能取代銦錫氧化物用於透明導體的一種具有潛力的材料。另外與銀相比,銅更便宜,含量更豐富,這可以大大降低奈米金屬線的成本。此外,銅導線的導電性幾乎與銀導線一樣好。因此,合成高品質的銅導線意義重大,受到越來越多注意。然而,由於大奈米導線的表面積,缺乏穩定性及銅熱氧化和化學腐蝕仍然是一個問題。 Among them, metal nanowires, especially silver wires (AgNWs), are considered to be a potential material that is most likely to replace indium tin oxide for transparent conductors in the future. In addition, copper is cheaper and more abundant than silver, which can greatly reduce the cost of nanowires. Also, copper wire conducts electricity almost as well as silver wire. Therefore, the synthesis of high-quality copper wires is of great significance and has received more and more attention. However, due to the large surface area of nanowires, lack of stability and copper thermal oxidation and chemical corrosion are still a problem.

本發明提供一種透明導電薄膜及其製造方法,其可製得具有具有較低的片電阻、較佳光穿透率以及耐彎折性的透明導電薄膜。 The invention provides a transparent conductive film and a manufacturing method thereof, which can produce a transparent conductive film with lower sheet resistance, better light transmittance and bending resistance.

根據本發明所揭露的透明導電薄膜,包括一軟性基板、至少一導電層及一含氟聚醯亞胺膜。其中,軟性基板的厚度介於10微米至100微米之間,導電層形成在軟性基板表面,含氟聚醯亞胺膜形成在軟性基板表面,並使導電層被包覆在含氟聚醯亞胺膜及軟性基板之間。含氟聚醯亞胺膜的厚度介於0.2微米至1微米之間,含氟聚醯亞胺膜包括至少一種二酐單體及至少二種二胺單體縮合聚合反應而成,至少一種二酐單體及至少二種二胺單體的總莫耳數的比例可介於1:0.95至1:1.1之間。 The transparent conductive film disclosed by the present invention includes a flexible substrate, at least one conductive layer and a fluorine-containing polyimide film. Wherein, the thickness of the flexible substrate is between 10 microns and 100 microns, the conductive layer is formed on the surface of the flexible substrate, the fluorine-containing polyimide film is formed on the surface of the flexible substrate, and the conductive layer is coated on the fluorine-containing polyimide film. Between the amine film and the flexible substrate. The thickness of the fluorine-containing polyimide film is between 0.2 microns and 1 micron. The fluorine-containing polyimide film is formed by condensation polymerization of at least one dianhydride monomer and at least two diamine monomers. The total molar ratio of the anhydride monomer and the at least two diamine monomers may be between 1:0.95 and 1:1.1.

根據本發明所揭露的透明導電薄膜之製造方法,包括以下步驟: According to the manufacturing method of the transparent conductive film disclosed in the present invention, it includes the following steps:

形成至少一導電層在一軟性基板表面,軟性基板的厚度介於10微米至100微米之間;以及 forming at least one conductive layer on the surface of a flexible substrate, the thickness of the flexible substrate is between 10 microns and 100 microns; and

形成一含氟聚醯亞胺膜在軟性基板表面,以使導電層被包覆在軟性基板及含氟聚醯亞胺膜之間,含氟聚醯亞胺膜的厚度介於0.2微米至1 微米之間,含氟聚醯亞胺膜包括至少一種二酐單體及至少二種二胺單體縮合聚合反應而成,至少一種二酐單體及至少二種二胺單體的總莫耳數的比例可介於1:0.95至1:1.1之間。 Forming a fluorine-containing polyimide film on the surface of the flexible substrate, so that the conductive layer is covered between the flexible substrate and the fluorine-containing polyimide film, the thickness of the fluorine-containing polyimide film is between 0.2 microns and 1 Between microns, the fluorine-containing polyimide film is formed by condensation polymerization of at least one dianhydride monomer and at least two diamine monomers, and the total moles of at least one dianhydride monomer and at least two diamine monomers The ratio of numbers can be between 1:0.95 and 1:1.1.

本發明之目的在於改善習知銅奈米導線在製造上所面臨之缺乏穩定性、銅熱氧化、化學腐蝕及黏著性等問題,根據本發明所揭露的透明導電薄膜及其製造方法,利用含氟聚醯亞胺膜包覆導電層,使其具有極佳黏著性、較低片電阻、較佳光穿透率及耐彎折性的功效,進而可改善目前已知銅奈米導線缺乏穩定性、銅熱氧化、化學腐蝕及黏著性等缺點。 The purpose of the present invention is to improve the problems of lack of stability, thermal oxidation of copper, chemical corrosion and adhesion faced by conventional copper nanowires in the manufacture. According to the transparent conductive film disclosed in the present invention and its manufacturing method, the use Fluoropolyimide film covers the conductive layer, making it have excellent adhesion, low sheet resistance, better light transmittance and bending resistance, which can improve the current lack of stability of copper nanowires Disadvantages such as resistance, copper thermal oxidation, chemical corrosion and adhesion.

10:軟性基板 10: Flexible substrate

20:導電層 20: Conductive layer

30:含氟聚醯亞胺膜 30: Fluorinated polyimide film

第1圖 為本發明透明導電薄膜之製造方法之步驟流程圖。 Fig. 1 is a flow chart of the steps of the manufacturing method of the transparent conductive film of the present invention.

第2圖 為本發明透明導電薄膜之外觀示意圖。 Figure 2 is a schematic view of the appearance of the transparent conductive film of the present invention.

第3圖 為本發明含氟聚醯亞胺膜之化學結構式示意圖。 Fig. 3 is a schematic diagram of the chemical structure of the fluorine-containing polyimide membrane of the present invention.

第4圖 為本發明玻璃轉移溫度測試數據圖。 Fig. 4 is a glass transition temperature test data diagram of the present invention.

第5圖 為本發明含氟聚醯亞胺膜之製造方法之步驟流程圖。 Fig. 5 is a flow chart of the steps of the manufacturing method of the fluorine-containing polyimide membrane of the present invention.

第6圖 為本發明透明導電薄膜之電阻變化率與彎折循環次數之間的關係圖。 Fig. 6 is a graph showing the relationship between the resistance change rate and the number of bending cycles of the transparent conductive film of the present invention.

以下係藉由特定的具體實施例說明本揭露之實施方式,熟習此技藝之人士可由本說明書所揭示之內容瞭解本揭露之其他優點與功效。本揭露也可藉由其他不同的具體實施例加以施行或應用,本說明書中的各項細節亦可基於不同觀點與應用,在不悖離本創作之精神下進行各種修飾 與變更。除非文中另有說明,否則說明書及所附申請專利範圍中所使用之單數形式「一」及「該」包括複數個體。除非文中另有說明,否則說明書及所附申請專利範圍中所使用之術語「或」包括「及/或」之含義。 The implementation of the present disclosure is described below through specific examples, and those skilled in the art can understand other advantages and effects of the present disclosure from the content disclosed in this specification. This disclosure can also be implemented or applied through other different specific embodiments, and various modifications can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of this creation. with change. As used in the specification and appended claims, the singular forms "a", "the" and "the" include plural plural individuals unless the content clearly dictates otherwise. Unless otherwise stated in the text, the term "or" used in the specification and the appended claims includes the meaning of "and/or".

請參閱「第1圖」所示,「第1圖」為本發明透明導電薄膜之製造方法之步驟流程圖,包含下列步驟: Please refer to "Fig. 1", "Fig. 1" is a flow chart of the steps of the manufacturing method of the transparent conductive film of the present invention, including the following steps:

步驟S100:形成至少一導電層20在軟性基板10表面,軟性基板10的厚度介於10微米至100微米(μm)之間; Step S100: forming at least one conductive layer 20 on the surface of the flexible substrate 10, the thickness of the flexible substrate 10 is between 10 microns and 100 microns (μm);

步驟S110:形成一含氟聚醯亞胺膜30在軟性基板10表面,以使導電層20被包覆在軟性基板10及含氟聚醯亞胺膜30之間,含氟聚醯亞胺膜30的厚度介於0.2微米至1微米(μm)之間,含氟聚醯亞胺膜30包括至少一種二酐單體及至少二種二胺單體縮合聚合反應而成。 Step S110: Form a fluorine-containing polyimide film 30 on the surface of the flexible substrate 10, so that the conductive layer 20 is coated between the flexible substrate 10 and the fluorine-containing polyimide film 30, and the fluorine-containing polyimide film The thickness of 30 is between 0.2 micron and 1 micron (μm), and the fluorine-containing polyimide film 30 is formed by condensation polymerization of at least one dianhydride monomer and at least two diamine monomers.

並請同時參閱「第2圖」所示,「第2圖」為本發明透明導電薄膜之外觀示意圖。在步驟S100中,先在一軟性基板10形成至少一導電層20,軟性基板10的種類並無特別限制,任何適用於製備電子元件之基板均適用。於本發明之具體實施例中,該軟性基板10可包括但不侷限於聚二甲基硅氧烷(polydimethylsiloxane,PDMS)、聚亞醯胺(polyimide,PI)、聚碳酸酯(polycarbonate,PC)、聚乙烯對苯二甲酸酯(polyethylene terephthalate,PET)、聚丙烯酸酯(polyacrylate,PA)、聚萘二甲酸乙二醇酯(polyethylene naphthalate,PEN)、聚醚亞醯胺(polyetherimide,PEI)及上述之衍生物等。 Please also refer to "Fig. 2", which is a schematic diagram of the appearance of the transparent conductive film of the present invention. In step S100, at least one conductive layer 20 is first formed on a flexible substrate 10. The type of the flexible substrate 10 is not particularly limited, and any substrate suitable for preparing electronic components is applicable. In a specific embodiment of the present invention, the flexible substrate 10 may include but not limited to polydimethylsiloxane (polydimethylsiloxane, PDMS), polyimide (polyimide, PI), polycarbonate (polycarbonate, PC) , polyethylene terephthalate (polyethylene terephthalate, PET), polyacrylate (polyacrylate, PA), polyethylene naphthalate (polyethylene naphthalate, PEN), polyetherimide (polyetherimide, PEI) And the above-mentioned derivatives, etc.

本發明的導電層20係利用於電子設備或電氣設備用途的情形時,例如可為包括銅或銅合金、鎳或鎳合金、鋁或鋁合金等金屬或其合金材料。形成導電層20在軟性基板10的方法係包括但不限於水熱法 (Hydrothermal method)、化學氣相沉積法(例如:有機金屬化學氣相沉積法)、脈衝雷射沉積法、分子束磊晶(Molecular beam epitaxy,MBE)或電化學沉積法。在本發明較佳實施例中,可透過水熱法合成銅或銅合金之奈米粒子,接著藉由噴霧法將銅或銅合金之奈米粒子沉積於軟性基板10上。 When the conductive layer 20 of the present invention is used in electronic equipment or electrical equipment, it may include metals such as copper or copper alloys, nickel or nickel alloys, aluminum or aluminum alloys, or alloy materials thereof. The method of forming the conductive layer 20 on the flexible substrate 10 includes but not limited to hydrothermal method (Hydrothermal method), chemical vapor deposition (for example: metalorganic chemical vapor deposition), pulsed laser deposition, molecular beam epitaxy (MBE) or electrochemical deposition. In a preferred embodiment of the present invention, the nanoparticles of copper or copper alloy can be synthesized by hydrothermal method, and then the nanoparticles of copper or copper alloy can be deposited on the flexible substrate 10 by spraying method.

在步驟S110中,形成含氟聚醯亞胺膜30在軟性基板10表面,最佳的是在聚醯亞胺結構中具有氟原子的含氟聚醯亞胺膜所形成為宜,令導電層20被包覆在軟性基板10及含氟聚醯亞胺膜30之間,含氟聚醯亞胺膜30包括至少一種二酐單體及至少二種二胺單體縮合聚合而成。 In step S110, a fluorine-containing polyimide film 30 is formed on the surface of the flexible substrate 10, preferably a fluorine-containing polyimide film with fluorine atoms in the polyimide structure, so that the conductive layer 20 is wrapped between the flexible substrate 10 and the fluorine-containing polyimide film 30 , and the fluorine-containing polyimide film 30 is formed by condensation polymerization of at least one dianhydride monomer and at least two diamine monomers.

根據本發明的較佳實施例,二酐單體為氟基所組成的一種單體。所述二酐單體可以是選自六氟二酐(6FDA)、4,4'-氧雙鄰苯二甲酸酐(ODPA)中的一種以上的二酐類單體,但並不僅限於此。 According to a preferred embodiment of the present invention, the dianhydride monomer is a monomer composed of fluorine groups. The dianhydride monomer may be at least one dianhydride monomer selected from hexafluorodianhydride (6FDA) and 4,4'-oxydiphthalic anhydride (ODPA), but is not limited thereto.

二胺單體包含至少一種含有選自氧基、磺基及氟基所組成群組中的一種以上的單體,所述二胺單體可以是選自2,2'-雙(三氟甲基)-4,4'-二氨基聯苯(TFMB)、4,4'-二氨基二苯醚(ODA)、4,4'-二氨基苯酰替苯胺(DABA)中的一種以上,但並不僅限於此。 The diamine monomer contains at least one monomer containing more than one monomer selected from the group consisting of oxygen, sulfo and fluorine, and the diamine monomer can be selected from 2,2'-bis(trifluoromethane base)-4,4'-diaminobiphenyl (TFMB), 4,4'-diaminodiphenyl ether (ODA), 4,4'-diaminobenzanilide (DABA), but And it doesn't stop there.

請參閱「第3圖」所示,「第3圖」為本發明含氟聚醯亞胺膜之化學結構式示意圖。將聚合完成之含氟聚醯亞胺漿料塗佈於導電層20表面,可藉由其含氟的官能基來降低漿料之表面張力,以降低製程環境中的水氣影響,進而增加導電層20的使用壽命。 Please refer to "Figure 3", which is a schematic diagram of the chemical structure of the fluorine-containing polyimide membrane of the present invention. Coating the polymerized fluorine-containing polyimide slurry on the surface of the conductive layer 20 can reduce the surface tension of the slurry through its fluorine-containing functional group, so as to reduce the influence of water vapor in the process environment, thereby increasing the conductivity The service life of layer 20.

在本發明中,含氟聚醯亞胺膜30在光學波長550nm下呈現至少85%的平均光透射率,以及玻璃轉移溫度(Tg)至少大於220℃以上。 In the present invention, the fluorine-containing polyimide film 30 exhibits an average light transmittance of at least 85% at an optical wavelength of 550 nm, and a glass transition temperature (Tg) of at least greater than 220° C.

在本發明中所使用之「透射率」係定義為透射通過材料(例 如製品、基板或其光學膜或部分)的給定光學波長範圍內的入射光學功率的百分比。另外,在本發明中所使用之「玻璃轉移溫度」係指含氟聚醯亞胺膜30的耐熱性,因此較佳為玻璃轉移溫度較高。請參閱「第4圖」所示,「第4圖」為本發明玻璃轉移溫度測試數據圖。具體而言,本發明的含氟聚醯亞胺膜30的玻璃轉移溫度至少大於220℃以上,較佳的玻璃轉移溫度可介於220℃至350℃之間。 As used herein, "transmittance" is defined as the transmission through a material (e.g. Percentage of incident optical power in a given optical wavelength range, such as an article, substrate, or optical film or part thereof. In addition, the "glass transition temperature" used in the present invention refers to the heat resistance of the fluorine-containing polyimide film 30, so a higher glass transition temperature is preferable. Please refer to "Figure 4", "Figure 4" is a graph showing the glass transition temperature test data of the present invention. Specifically, the glass transition temperature of the fluorine-containing polyimide film 30 of the present invention is at least higher than 220°C, and the preferred glass transition temperature may be between 220°C and 350°C.

請參「第5圖」所示,「第5圖」為本發明含氟聚醯亞胺膜之結構式其合成步驟如下: Please refer to "Figure 5", "Figure 5" is the structural formula of the fluorine-containing polyimide membrane of the present invention, and the synthesis steps are as follows:

步驟S200:將至少一種二酐單體及至少二種二胺單體在至少一種溶劑進行縮合聚合反應製備一聚醯胺酸溶液; Step S200: performing condensation polymerization reaction of at least one dianhydride monomer and at least two diamine monomers in at least one solvent to prepare a polyamic acid solution;

步驟S210:使用熱醯亞胺化方法和化學醯亞胺化方法中的至少一種完成聚醯胺酸溶液的醯亞胺化而得到一聚醯亞胺組成物,並去除聚醯亞胺組成物的溶劑; Step S210: using at least one of the thermal imidization method and the chemical imidization method to complete the imidization of the polyamic acid solution to obtain a polyimide composition, and remove the polyimide composition solvent;

步驟S220:將聚醯亞胺組成物塗佈在一載體上,以攝氏80℃至420℃的溫度對聚醯亞胺組成物進行熱處理而固化成一含氟聚醯亞胺膜。 Step S220: coating the polyimide composition on a carrier, and curing the polyimide composition at a temperature of 80° C. to 420° C. to form a fluorine-containing polyimide film.

在步驟S200之中,藉由以下方式製備聚醯胺酸溶液,將以實質上成為等莫耳量的方式調配至少二種二酐單體及至少二種二胺單體而成的單體混合物溶解至有機溶劑中,直至上述至少一種二酐單體及至少二種二胺單體縮合聚合反應而成,至少二種二酐單體及至少二種二胺單體的總莫耳數的比例可介於1:0.95至1:1.1之間。通常以固體成分含量為10%至30%、較佳為20%至25%的濃度獲得聚醯胺酸溶液。於濃度為上述範圍 的情形時,聚醯胺酸溶液獲得適當的分子量與溶液黏度。 In step S200, the polyamic acid solution is prepared by preparing a monomer mixture of at least two kinds of dianhydride monomers and at least two kinds of diamine monomers in a substantially equimolar amount. Dissolved in an organic solvent until the above-mentioned at least one dianhydride monomer and at least two diamine monomers are condensed and polymerized, the ratio of the total moles of at least two dianhydride monomers and at least two diamine monomers It can be between 1:0.95 and 1:1.1. Usually, the polyamic acid solution is obtained with a solid content of 10% to 30%, preferably 20% to 25%. At concentrations within the above range In the case of polyamide acid solution to obtain the appropriate molecular weight and solution viscosity.

上述用以合成聚醯胺酸溶液的溶劑並無特別限定,只要為使聚醯胺酸溶解的溶劑,較佳的可為醯胺類溶劑。具體而言,上述溶劑可為極性溶劑、低沸點溶劑或低吸水性溶劑。例如可為選N-甲基-2-吡咯啶酮(NMP)、二甲基乙醯胺(DMAc)、N,N-二甲基甲醯胺(DMF)、二甲基亞碸(DMSO)、間甲酚、四氫呋喃(THF)、氯仿、3-甲氧基-N、N-二甲基丙醯胺及γ-丁內酯(GBL)所組成的族群中的至少其中一種以上,但並不限制於此,可視需要單獨使用或組合兩種以上而使用。 The above-mentioned solvent for synthesizing the polyamic acid solution is not particularly limited, as long as it is a solvent for dissolving the polyamic acid, preferably an amide solvent. Specifically, the above solvent may be a polar solvent, a low boiling point solvent or a low water absorption solvent. For example, it can be selected from N-methyl-2-pyrrolidone (NMP), dimethylacetamide (DMAc), N,N-dimethylformamide (DMF), dimethylsulfoxide (DMSO) , m-cresol, tetrahydrofuran (THF), chloroform, 3-methoxy-N, N-dimethylpropionamide and γ-butyrolactone (GBL) at least one of the group consisting of, but not They are not limited thereto, and may be used alone or in combination of two or more kinds as necessary.

然而,根據單體的種類及所期望的聚醯亞胺膜的物性,可於上述步驟S200中一次添加所有單體,或者依序添加各單體,於此情形時,單體間必然會發生局部聚合。 However, according to the type of monomers and the desired physical properties of the polyimide film, all the monomers can be added at one time in the above step S200, or each monomer can be added sequentially. local aggregation.

經由上述步驟S200所製備的聚醯胺酸溶液呈具有不同的物性的支鏈連接的形態的分子結構,可調節上述支鏈的位置、長度及構成其的單體的種類及含量來更細微地調節將聚醯胺酸溶液醯亞胺化而獲得的聚醯亞胺膜的物性,例如光透射率、玻璃轉移溫度等。 The polyamic acid solution prepared through the above step S200 has a molecular structure in the form of branched chain connections with different physical properties. Physical properties of a polyimide film obtained by imidizing a polyamic acid solution, such as light transmittance, glass transition temperature, etc. are adjusted.

在步驟S210之中,可使用熱醯亞胺化法、化學醯亞胺化法或併用熱醯亞胺化法與化學醯亞胺化法的複合醯亞胺化法。熱醯亞胺化法作為不使用脫水劑等觸媒而僅藉由加熱來將聚醯胺酸溶液醯亞胺化的方法。化學醯亞胺化法是使用脫水劑及/或醯亞胺化劑等觸媒促進聚醯胺酸溶液的醯亞胺化的方法。複合醯亞胺化法可藉由於聚醯胺酸溶液投入脫水劑及醯亞胺化劑而製膜至載體上後,再加熱進行硬化及乾燥。 In step S210, a thermal imidization method, a chemical imidization method, or a combined imidization method using thermal imidization and chemical imidization methods can be used. The thermal imidization method is a method of imidizing a polyamic acid solution only by heating without using a catalyst such as a dehydrating agent. The chemical imidization method is a method of promoting imidization of a polyamic acid solution using a catalyst such as a dehydrating agent and/or an imidizing agent. The complex imidization method can be formed by adding a dehydrating agent and an imidization agent into a polyamic acid solution to form a film on a carrier, and then heat it to harden and dry.

醯亞胺化劑是指具有促進對聚醯胺酸的閉環反應的效果的 成分,例如利用脂肪族三級胺、芳香族三級胺及雜環式三級胺等。在本發明中,較佳地利用喹啉、異喹啉、β-甲基吡啶、吡啶、1-甲基咪唑、1、2-二甲基咪唑和2-甲基咪唑等催化劑加入到聚醯胺酸溶液中。 The imidization agent refers to the effect of promoting the ring-closing reaction of polyamide acid As components, for example, aliphatic tertiary amines, aromatic tertiary amines, and heterocyclic tertiary amines are used. In the present invention, catalysts such as quinoline, isoquinoline, β-picoline, pyridine, 1-methylimidazole, 1,2-dimethylimidazole and 2-methylimidazole are preferably added to polyamide in the amine solution.

脫水劑是藉由對聚醯胺酸溶液的脫水作用而促進閉環反應,例如可列舉脂肪族酸酐、芳香族酸酐、N,N'-二烷基碳化二亞胺、鹵化低級脂肪族、鹵化低級脂肪酸酐、芳基膦酸二鹵化物及亞硫醯鹵化物或其中兩種以上的混合物。在本發明中,較佳地利用乙酸酐、丙酸酐、丁酸酐、苯甲酸酐或其中兩種以上的混合物加入到聚醯胺酸溶液中。 The dehydrating agent promotes the ring closure reaction by dehydrating the polyamic acid solution, such as aliphatic acid anhydride, aromatic acid anhydride, N,N'-dialkyl carbodiimide, halogenated lower aliphatic, halogenated lower Fatty acid anhydride, aryl phosphonic acid dihalide and sulfite halide or a mixture of two or more thereof. In the present invention, it is preferred to add acetic anhydride, propionic anhydride, butyric anhydride, benzoic anhydride or a mixture of two or more thereof into the polyamide acid solution.

將上述的醯亞胺化劑及/或脫水劑加入聚醯胺酸溶液後,加熱至攝氏60℃至120℃的溫度進行反應,反應時間介於12小時至24小時之間,進而獲得一聚醯亞胺用組成物。再將反應完後的聚醯胺酸組成物滴入酒精及去離子水之混合液中析出,其酒精及去離子水的重量比例為1:1。最後,再將析出後的聚醯亞胺用組成物使用酒精清洗數次,並於攝氏100℃中乾燥24小時。 After adding the above-mentioned imidization agent and/or dehydrating agent into the polyamic acid solution, heat it to a temperature of 60° C. to 120° C. to react, and the reaction time is between 12 hours and 24 hours to obtain a polyamic acid solution. Composition for imide. Then drop the polyamic acid composition after the reaction into the mixture of alcohol and deionized water to precipitate, and the weight ratio of alcohol and deionized water is 1:1. Finally, the precipitated polyimide composition was washed several times with alcohol, and dried at 100° C. for 24 hours.

在步驟S220之中,將聚醯亞胺用組成物以旋轉塗佈方式在載體上,載體係包括但不侷限於玻璃板、鋁箔、無端(endless)不鏽鋼帶或不鏽鋼鼓等。在本發明中,係將聚醯亞胺用組成物旋轉塗佈在軟性基板10表面,之後,以攝氏80℃至420℃的溫度對聚醯亞胺用組成物進行加熱,加熱時間約1小時以內。在本發明中,最佳的加熱溫度介於攝氏80℃至250℃的溫度之間。之後,藉此讓聚醯亞胺用組成物固化及/或乾燥,以在軟性基板10表面形成含氟聚醯亞胺膜30,使得導電層20被包覆聚醯亞胺膜30及軟性基板10之間。 In step S220, the composition for polyimide is spin-coated on the carrier, and the carrier includes but not limited to glass plate, aluminum foil, endless stainless steel belt or stainless steel drum. In the present invention, the polyimide composition is spin-coated on the surface of the flexible substrate 10, and then the polyimide composition is heated at a temperature of 80°C to 420°C for about 1 hour. within. In the present invention, the optimum heating temperature is between 80°C and 250°C. After that, the polyimide composition is cured and/or dried to form a fluorine-containing polyimide film 30 on the surface of the flexible substrate 10, so that the conductive layer 20 is covered with the polyimide film 30 and the flexible substrate. Between 10.

請參閱表1所示,表1為本發明透明導電薄膜之密著度評價數據,由表1按照ASTM D3359百格測試標準來量測密著度可知,導電層表面未包覆有含氟聚醯亞胺膜之樣品(w/o CPI),係先將導電層塗佈在一基材表面,然後用膠帶進行拉扯剝離3次,每次在基材的百格劃線的切口邊緣及交叉點處有成片的脫落,且脫落面積大於65%,可知附著力等級為0B。相較於未包覆有含氟聚醯亞胺膜之樣品(w/o CPI),樣品(300nm CPI)的含氟聚醯亞胺膜,同樣先將導電層塗佈在一基材表面,並以厚度300nm的含氟聚醯亞胺膜包覆在導電層表面,然後用膠帶進行拉扯剝離3次,每次在基材的百格劃線的切口邊緣光滑,格子邊緣沒有任何剝離,可知附著力等級為5B。相同的,樣品(600nm CPI)的含氟聚醯亞胺膜也得到附著力等級為5B的量測結果,進而得到樣品(300nm CPI)及樣品(600nm CPI)的含氟聚醯亞胺膜具有耐刮性、耐水等功效。 Please refer to Table 1. Table 1 is the adhesion evaluation data of the transparent conductive film of the present invention. From Table 1, the adhesion is measured according to the ASTM D3359 hundred-grid test standard. It can be known that the surface of the conductive layer is not coated with fluorine-containing polymer For the sample of imide film (w/o CPI), the conductive layer is first coated on the surface of a substrate, and then pulled and peeled off 3 times with adhesive tape, each time on the edge of the incision and the intersection of the 100-grid line on the substrate There are pieces of peeling off at the point, and the peeling area is greater than 65%, so it can be seen that the adhesion level is 0B. Compared with the sample (w/o CPI) that is not coated with the fluorine-containing polyimide film, the fluorine-containing polyimide film of the sample (300nm CPI) is also firstly coated with a conductive layer on the surface of a substrate, And cover the surface of the conductive layer with a fluorine-containing polyimide film with a thickness of 300nm, and then pull and peel it off 3 times with an adhesive tape. Adhesion rating is 5B. Similarly, the fluorine-containing polyimide film of the sample (600nm CPI) also obtained the measurement result of the adhesion level being 5B, and then the fluorine-containing polyimide film of the sample (300nm CPI) and the sample (600nm CPI) had Scratch resistance, water resistance and other effects.

Figure 110139548-A0101-12-0009-2
Figure 110139548-A0101-12-0009-2

請參閱「第6圖」所示,「第6圖」為本發明透明導電薄膜之電阻變化率與彎折循環次數之間的關係圖。其中X軸為彎折循環次數(N),Y軸為電阻變化率(R-R0)/R0,其中R是電阻,R0是初始電阻。將本發明透明導電薄膜(CuNWs)及習知氧化銦錫膜(ITO)分別進行彎折循環測試,當習知氧化銦錫膜(ITO)彎折至100次數時,其導電性急遽變差,而本發明之透明導電薄膜(CuNWs)彎折至500次數時,其導電性保持平穩,顯現出本發明之透明 導電薄膜具有高穩定、極佳黏著性及耐彎折特性。 Please refer to "Figure 6", "Figure 6" is a graph showing the relationship between the resistance change rate and the number of bending cycles of the transparent conductive film of the present invention. The X-axis is the number of bending cycles (N), and the Y-axis is the resistance change rate (RR 0 )/R 0 , where R is the resistance and R 0 is the initial resistance. The transparent conductive film (CuNWs) of the present invention and the conventional indium tin oxide film (ITO) were respectively subjected to bending cycle tests. When the conventional indium tin oxide film (ITO) was bent 100 times, its conductivity deteriorated sharply. However, when the transparent conductive film (CuNWs) of the present invention is bent up to 500 times, its conductivity remains stable, showing that the transparent conductive film of the present invention has high stability, excellent adhesion and bending resistance.

10:軟性基板 10: Flexible substrate

20:導電層 20: Conductive layer

30:含氟聚醯亞胺膜 30: Fluorinated polyimide film

Claims (10)

一種透明導電薄膜,包含: A transparent conductive film comprising: 一軟性基板,該軟性基板的厚度介於10微米至100微米之間; A flexible substrate, the thickness of the flexible substrate is between 10 microns and 100 microns; 至少一導電層,形成在該軟性基板表面;以及 At least one conductive layer is formed on the surface of the flexible substrate; and 一含氟聚醯亞胺膜,形成在該軟性基板表面,該導電層被包覆在該含氟聚醯亞胺膜及該軟性基板之間,該含氟聚醯亞胺膜的厚度介於0.2微米至1微米之間,該含氟聚醯亞胺膜包括至少一種二酐單體及至少二種二胺單體縮合聚合反應而成,至少一種二酐單體及至少二種二胺單體的總莫耳數的比例可介於1:0.95至1:1.1之間。 A fluorine-containing polyimide film is formed on the surface of the flexible substrate, the conductive layer is covered between the fluorine-containing polyimide film and the flexible substrate, and the thickness of the fluorine-containing polyimide film is between Between 0.2 micron and 1 micron, the fluorine-containing polyimide film is formed by condensation polymerization of at least one dianhydride monomer and at least two diamine monomers, at least one dianhydride monomer and at least two diamine monomers The ratio of the total moles of the body can be between 1:0.95 and 1:1.1. 如請求項1所述之透明導電薄膜,其中該軟性基板可為聚二甲基硅氧烷(polydimethylsiloxane,PDMS)、聚亞醯胺(polyimide,PI)、聚碳酸酯(polycarbonate,PC)、聚乙烯對苯二甲酸酯(polyethylene terephthalate,PET)、聚丙烯酸酯(polyacrylate,PA)、聚萘二甲酸乙二醇酯(polyethylene naphthalate,PEN)、聚醚亞醯胺(polyetherimide,PEI)中的一種以上。 The transparent conductive film as described in Claim 1, wherein the flexible substrate can be polydimethylsiloxane (polydimethylsiloxane, PDMS), polyimide (polyimide, PI), polycarbonate (polycarbonate, PC), poly Ethylene terephthalate (polyethylene terephthalate, PET), polyacrylate (polyacrylate, PA), polyethylene naphthalate (polyethylene naphthalate, PEN), polyetherimide (polyetherimide, PEI) in more than one. 如請求項1所述之透明導電薄膜,其中該導電層以一水熱法合成一銅或銅合金之奈米粒子,再以噴霧法將該銅或銅合金之奈米粒子沉積於該軟性基板上成形。 The transparent conductive film as described in Claim 1, wherein the conductive layer synthesizes a copper or copper alloy nanoparticle by a hydrothermal method, and then deposits the copper or copper alloy nanoparticle on the flexible substrate by a spray method Formed on top. 一種透明導電薄膜之製造方法,包含下列步驟: A method of manufacturing a transparent conductive film, comprising the following steps: 形成至少一導電層在一軟性基板表面,該軟性基板的厚度介於10微米至100微米之間;以及 Forming at least one conductive layer on the surface of a flexible substrate, the thickness of the flexible substrate is between 10 microns and 100 microns; and 形成一含氟聚醯亞胺膜在該軟性基板表面,以使該導電層被包覆在該軟性基板及該含氟聚醯亞胺膜之間,該含氟聚醯亞胺膜的厚度介於0.2 微米至1微米之間,該含氟聚醯亞胺膜包括至少一種二酐單體及至少二種二胺單體縮合聚合反應而成,該至少一種二酐單體及該至少二種二胺單體的總莫耳數的比例可介於1:0.95至1:1.1之間。 Forming a fluorine-containing polyimide film on the surface of the flexible substrate, so that the conductive layer is coated between the flexible substrate and the fluorine-containing polyimide film, and the thickness of the fluorine-containing polyimide film is between at 0.2 Between microns and 1 micron, the fluorine-containing polyimide film is formed by condensation polymerization of at least one dianhydride monomer and at least two diamine monomers, the at least one dianhydride monomer and the at least two diamines The ratio of total moles of monomers can be between 1:0.95 and 1:1.1. 如請求項4所述之透明導電薄膜之製造方法,其中形成該導電層在該軟性基板表面的步驟中,更包括以下步驟:透過水熱法合成一銅或銅合金之奈米粒子,再以噴霧法將該銅或銅合金之奈米粒子沉積於該軟性基板表面而形成該導電層。 The method for manufacturing a transparent conductive film as described in claim 4, wherein the step of forming the conductive layer on the surface of the flexible substrate further includes the following steps: synthesizing a copper or copper alloy nano-particle through a hydrothermal method, and then The conductive layer is formed by depositing the copper or copper alloy nanoparticles on the surface of the flexible substrate by spraying method. 如請求項4所述之透明導電薄膜之製造方法,其中形成該含氟聚醯亞胺膜在該軟性基板表面的步驟中,更包括以下步驟: The method for manufacturing a transparent conductive film as described in Claim 4, wherein the step of forming the fluorine-containing polyimide film on the surface of the flexible substrate further includes the following steps: 將該至少一種二酐單體及該至少二種二胺單體在至少一溶劑進行縮合聚合反應製備一聚醯胺酸溶液; The at least one dianhydride monomer and the at least two diamine monomers are condensed and polymerized in at least one solvent to prepare a polyamic acid solution; 使用熱醯亞胺化方法和化學醯亞胺化方法中的至少一種完成聚醯胺酸溶液的醯亞胺化而得到一聚醯亞胺組成物,並去除該聚醯亞胺組成物的該溶劑;以及 Using at least one of a thermal imidization method and a chemical imidization method to complete the imidation of the polyamic acid solution to obtain a polyimide composition, and remove the polyimide composition solvents; and 將聚醯亞胺組成物塗佈在一載體上,以攝氏80℃至420℃的溫度對該聚醯亞胺組成物進行熱處理而固化成一含氟聚醯亞胺膜。 The polyimide composition is coated on a carrier, and the polyimide composition is heat-treated at a temperature of 80° C. to 420° C. to solidify into a fluorine-containing polyimide film. 如請求項6所述之透明導電薄膜之製造方法,其中該溶劑可為選N-甲基-2-吡咯啶酮(NMP)、二甲基乙醯胺(DMAc)、N,N-二甲基甲醯胺(DMF)、二甲基亞碸(DMSO)、間甲酚、四氫呋喃(THF)、氯仿、3-甲氧基-N、N-二甲基丙醯胺及γ-丁內酯(GBL)所組成的族群中的至少其中一種以上。 The method for manufacturing a transparent conductive film as described in Claim 6, wherein the solvent can be selected from N-methyl-2-pyrrolidone (NMP), dimethylacetamide (DMAc), N,N-dimethyl Dimethylformamide (DMF), dimethylsulfoxide (DMSO), m-cresol, tetrahydrofuran (THF), chloroform, 3-methoxy-N, N-dimethylpropionamide and γ-butyrolactone At least one of the group consisting of (GBL). 如請求項6所述之透明導電薄膜之製造方法,其中該含氟聚醯亞胺膜的成膜最佳溫度介於攝氏80℃至250℃之間。 The manufacturing method of the transparent conductive thin film according to claim 6, wherein the optimum film-forming temperature of the fluorine-containing polyimide film is between 80°C and 250°C. 如請求項4所述之透明導電薄膜之製造方法,其中該二酐單體是選自六氟二酐(6FDA)、4,4'-氧雙鄰苯二甲酸酐(ODPA)中的一種以上。 The method for manufacturing a transparent conductive film as described in Claim 4, wherein the dianhydride monomer is one or more selected from hexafluorodianhydride (6FDA) and 4,4'-oxydiphthalic anhydride (ODPA) . 如請求項4所述之透明導電薄膜之製造方法,其中該二胺單體是選自2,2'-雙(三氟甲基)-4,4'-二氨基聯苯(TFMB)、4,4'-二氨基二苯醚(ODA)、4,4'-二氨基苯酰替苯胺(DABA)中的一種以上 The manufacturing method of the transparent conductive film as described in Claim 4, wherein the diamine monomer is selected from 2,2'-bis(trifluoromethyl)-4,4'-diaminobiphenyl (TFMB), 4 , more than one of 4'-diaminodiphenyl ether (ODA), 4,4'-diaminobenzoanilide (DABA)
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