TW202249144A - Systems and methods for workpiece processing - Google Patents

Abstract

A processing system for processing a plurality of workpieces includes a transfer chamber in process flow communication with a first processing chamber and a second processing chamber, the transfer chamber having a first straight side, wherein the first process chamber includes at least one first processing station, and wherein the first processing chamber is disposed along the first straight side, wherein the second process chamber includes at least two second processing stations, wherein the second processing chamber is disposed along the first straight side, and wherein the second process chamber disposed in linear arrangement with the first process chamber along the first straight side, and wherein the transfer chamber includes at least one workpiece handling robot configured to transfer at least one workpiece to the at least one first processing station and the at least two second processing stations.

Description

Systems and methods for workpiece machining

The present disclosure relates generally to machining workpieces, and more particularly to systems for machining workpieces, such as semiconductor workpieces.

A processing system that exposes a workpiece, such as a semiconductor wafer or other suitable substrate, to an overall processing scheme for forming semiconductor or other devices may perform multiple processing steps, such as plasma processing (e.g., lift-off, etch, etc.), Thermal treatment (eg, annealing), deposition (eg, chemical vapor deposition), etc. To perform these processing steps, the system may include one or more robots to move the workpiece a number of different times, for example, into the system, between various process chambers, and out of the system. An important consideration in any semiconductor processing system is the system's footprint size. The increased footprint size can take up more space in the processing facility, resulting in reduced throughput and increased costs.

Example configurations of processing systems for semiconductor workpieces may include cluster tools, carousel tools, and the like. In a cluster tool, multiple semiconductor processing modules may be arranged around a central robot to move workpieces between multiple process chambers. Cluster tools may have a large footprint (eg, take up a lot of space) and can only support a limited number of process chambers. In a rotary tool, the workpiece can be rotated between multiple processing stations. Carousel tools may suffer from reduced process integration flexibility and may be difficult to implement with cluster configurations.

Multiple implementation aspects and advantages of the embodiments of the present invention will be partially set forth in the following description, or can be known from the description, or can be known through the practice of the embodiments.

An example implementation aspect of the present disclosure relates to a machining system for machining a plurality of workpieces. The processing system includes a transfer chamber in process communication with a first processing chamber and a second processing chamber, and the transfer chamber has a first linear side, wherein the first processing chamber includes at least one first processing station, and wherein the first processing chamber Arranged along the first linear side, wherein the second processing chamber includes at least two second processing stations, wherein the second processing chamber is arranged along the first linear side, and wherein the second processing chamber is arranged to be connected to the first processing station along the first linear side The chambers are arranged linearly, and wherein the transfer chamber includes at least one workpiece handling robot configured to transfer at least one workpiece to the at least one first processing station and the at least two second processing stations.

Another example implementation aspect of the present disclosure relates to a machining system for machining a plurality of workpieces. The processing system includes: a first processing chamber with two processing stations; a second processing chamber with two processing stations; a third processing chamber with one processing station; and a transfer chamber with the first processing chamber, the second processing chamber and a third process chamber are in process communication, wherein the first process chamber is disposed on a first side of the transfer chamber, wherein the second process chamber is disposed on a second side of the transfer chamber, and the second side of the transfer chamber is connected to the The first sides of the transfer chambers are opposite, and wherein the third processing chamber is disposed on a third side of the transfer chamber, the third side of the transfer chamber being perpendicular to the first and second sides of the transfer chamber.

Another example implementation aspect of the present disclosure relates to a machining system for machining a plurality of workpieces. The processing system includes: a first processing chamber having at least one processing station; a second processing chamber having at least two processing stations; and a front end in process communication with the first processing chamber and the second processing chamber, wherein the first A processing chamber and a second processing chamber are provided on the first linear side of the front end portion.

Other example implementation aspects of the present disclosure relate to systems, methods, and apparatus for processing semiconductor workpieces.

These and other features, implementation aspects, and advantages of various embodiments will be better understood with reference to the following description and appended claims. The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the description serve to explain related principles.

Reference will now be made in detail to the embodiments, one or more examples of which are illustrated in the accompanying drawings. Each example is provided by way of explanation of the embodiment, not limitation of the invention. In fact, it will be apparent to those skilled in the art that various modifications and changes can be made in the embodiments without departing from the scope or spirit of the present disclosure. For example, features illustrated or described as part of one embodiment can be used with another embodiment to yield a still further embodiment. Accordingly, aspects of the present disclosure are intended to cover such modifications and variations.

Example implementation aspects of the present disclosure relate to systems for processing workpieces, such as semiconductor workpieces, optoelectronic workpieces, flat panel displays, or other suitable workpieces. The workpiece material may include, for example, silicon, silicon germanium, glass, plastic, or other suitable materials. In some embodiments, the workpiece may be a semiconductor wafer. The system can be used to implement various workpiece manufacturing processes, including but not limited to vacuum annealing process, surface treatment process, dry stripping process, dry etching process, deposition process, and other processes.

More specifically, the system may include a plurality of processing chambers for processing workpieces. Each processing chamber may include one or more processing stations configured to receive and/or support workpieces, such as multiple processing stations (e.g., two processing stations in a dual architecture) using a common process pressure (e.g., vacuum) environment ). In some embodiments, one or more processing chambers may be plasma processing chambers having plasma-based processing sources, such as inductively coupled plasma sources, microwave sources, surface wave plasma sources, ECR plasma sources, capacitively coupled plasma sources, (e.g. parallel plate) plasma source, etc.

In example embodiments, a processing system may include a load lock chamber. The load lock chamber may be configured to subject the workpiece to process pressure (eg, vacuum pressure) prior to transferring the workpiece to the processing chamber. The load lock chamber may include a workpiece column with a plurality of shelves to hold the workpieces in a stacked arrangement. The system may further include a transfer chamber for transferring the workpiece from the load lock chamber to the processing chamber and/or for transferring the workpiece between different processing chambers. In some embodiments, the transfer chamber may be maintained at vacuum pressure or other suitable process pressure. A transfer chamber may be disposed in process communication between the load lock chamber and the at least one process chamber.

The transfer chamber may include workpiece handling robots. Workpiece handling robots may include robots that are primarily configured to transfer workpieces by rotating about an axis at a fixed point or area. A workpiece handling robot may be configured to transfer multiple workpieces (eg, two workpieces) from a workpiece column in the load lock chamber to two or more processing stations in the processing chamber. Each machining station may include a workpiece support for supporting the workpiece during machining. In some embodiments, a workpiece handling robot may transfer multiple workpieces, for example, using a scissor motion that simultaneously delivers workpieces to two or more processing stations in a processing chamber. Scissor motion as used herein refers to the movement of two or more robotic arms that open or close similar to scissors. For example, in one example scissors motion, a first end of the robotic arm moves away from each other faster than an opposing second end of the robotic arm. In another example scissors motion, the first ends of the robotic arms are separated from each other while the second end or other portion of the robotic arm remains in a fixed position.

In one example embodiment, a workpiece handling robot may include a plurality of robotic arms configured to rotate about a fixed pivot point. Each robotic arm can be associated with one or more workpiece inserts. Each workpiece blade may have an end effector configured to support a workpiece. The workpiece handling robot may be configured to control a plurality of robotic arms to transfer the workpiece from the workpiece column to at least two processing stations in the processing chamber using a scissor motion, wherein the plurality of robotic arms are separated from each other to transfer the workpiece blades to the processing stations .

In another example embodiment, a workpiece handling robot may include a single main arm that rotates about a pivot point or region. A single main arm can be coupled to multiple auxiliary arms. The auxiliary arms may each be coupled to at least one workpiece blade. Each workpiece blade may include an end effector for supporting the workpiece. In some embodiments, the workpiece handling robot may be configured to transfer at least two workpieces from a workpiece column in the load lock chamber to two processing stations in the processing chamber using a scissor motion. During the scissors movement, the auxiliary arms may be separated in a scissor-like manner such that the workpiece blade associated with one of the auxiliary arms transfers the workpiece to the first machining station and such that the workpiece blade associated with the other of the auxiliary arms transfers the workpiece Transfer to the second processing station.

In some embodiments, a single motor may be used to operate the scissor motion of a single primary and secondary arm. In some embodiments, a workpiece handling robot may have a second main arm coupled to a plurality of auxiliary arms. The second main arm can be operated in a similar manner to the other main arm for purposes such as workpiece exchange. In some embodiments, the primary arms may not be operated simultaneously so that a single motor may be used to control the operation of both primary arms.

In some embodiments, a processing system may include multiple processing chambers. Each processing chamber may comprise at least one processing station, such as two or more processing stations. Workpiece handling robots in transfer chambers can transfer workpieces between multiple processing chambers and load locks.

In example embodiments, at least two of the plurality of process chambers may be aligned on a straight side. For example, the transfer chamber may include straight sides. The straight side can be shared by at least two processing chambers. For example, in some embodiments, the straight side may be or may include the front wall of each of the at least two process chambers. For example, the front wall of the processing chamber may include an opening or other mechanism, such as a slot door, for receiving a workpiece.

At least two processing chambers aligned on the straight side may be provided in a linear arrangement. As an example, if a load lock chamber defines a first direction along its longest side, at least two process chambers may be arranged such that the process chambers are aligned along a second direction perpendicular to the first direction. For example, in some embodiments, a load lock chamber may be positioned on a side of the transfer chamber that is perpendicular to the straight side. As another example, a first of the at least two processing chambers is spaced farther from one side of the transfer chamber having the inlet than a second of the at least two processing chambers and is spaced further from the second of the at least two processing chambers. The direction of the processing chamber is the same. For example, the first process chamber and the second process chamber may be aligned along consecutive sides of the transfer chamber and process chamber.

Additionally and/or alternatively, in some embodiments, the processing system may include two processing chambers, including a first processing chamber and a second processing chamber, disposed on opposite sides of the transfer chamber. For example, a first processing chamber may be aligned with an additional processing chamber on a straight side, and a second processing chamber may be disposed on an opposite side from the straight side. In some embodiments, the opposite side may alternatively be a straight side.

The workpiece handling robot may be configured to transfer a plurality of workpieces from the workpiece column in the load lock chamber to one or more processing stations of the first processing chamber and/or to one or more processing stations of the second processing chamber (e.g., using scissors movement). Additionally, the workpiece handling robot may be configured to transfer a plurality of workpieces from one or more processing stations of the first processing chamber to one or more processing stations of the second processing chamber.

In another embodiment, the processing system may include four processing chambers, including a first processing chamber, a second processing chamber, a third processing chamber, and a fourth processing chamber. The first processing chamber and the second processing chamber may be disposed on opposite sides of the transfer chamber. The third processing chamber may be arranged linearly with the first processing chamber. The fourth processing chamber may be arranged in-line with the second processing chamber such that the third processing chamber and the fourth processing chamber are disposed on opposite sides of the transfer chamber.

Additionally, in some embodiments, the system may include two workpiece handling robots in the transfer chamber, including a first workpiece handling robot and a second workpiece handling robot. The system may further include a transfer location between the first workpiece handling robot and the second workpiece handling robot. The transfer location may allow a first workpiece handling robot (eg, a workpiece handling robot with access to a load lock chamber) to transfer a workpiece to a second workpiece handling robot. The transfer location may include a workpiece column configured to support a plurality of workpieces arranged in a stack (eg, on a plurality of shelves).

The first workpiece handling robot may be configured to transfer a plurality of workpieces from the workpiece column in the load lock chamber to two or more processing stations of the first processing chamber and/or to two or more processing stations of the second processing chamber and/or the workpiece column in the transfer position. Additionally, the first workpiece handling robot may be configured to transfer a plurality of workpieces between the two or more processing stations of the first processing chamber, the two or more processing stations of the second processing chamber, and the workpiece column at the transfer location.

The second workpiece handling robot may be configured to transfer the plurality of workpieces from the workpiece column in the transfer chamber to the two or more processing stations of the third processing chamber and/or the two or more processing stations of the fourth processing chamber. Additionally, the second workpiece handling robot may be configured to transfer the plurality of workpieces between the two or more processing stations of the third processing chamber, the two or more processing stations of the fourth processing chamber, and the workpiece column at the transfer location.

As another example, in some embodiments, a system may include a workpiece handling robot that moves in at least one direction relative to the load lock chamber and/or the plurality of process chambers. For example, in some embodiments, a workpiece handling robot may move in a direction defined by a straight side, such as from the front of the transfer chamber to the rear of the transfer chamber. For example, in embodiments having at least two processing chambers aligned on linear sides, the workpiece handling robot can move to at least a first position and a second position, the first position being used to transfer workpieces to and/or out of at least A first of the two processing chambers, a second location for transferring workpieces to and/or out of a second of the at least two processing chambers.

The machining system can be further expanded to include more machining chambers by adding transfer locations, the workpiece handling robots and/or machining chambers in a linear fashion to provide any number of machining chambers for performing workpiece processing. In this way, multiple processing modules can be integrated on the proposed system without interruption of vacuum or process pressure, enabling multiple process integration scenarios, including dry etching and dry stripping processes, surface pre-cleaning/ A combination of post-treatment thin film deposition processes and continuous film deposition processes. Furthermore, in the proposed system architecture, workpieces can be exchanged back and forth between the two types of processing chambers configured on opposite sides of each rotary vacuum robot, enabling unique loop processing capabilities (e.g., such as atomic layer etching process).

According to example embodiments of the present disclosure, each of the one or more process chambers may include a slot door. The slot gate may be configured to provide transfer of workpieces between the workpiece handling robot and a processing chamber, such as a processing station. For example, in some embodiments, a processing chamber may include one or more slot doors corresponding to (eg, aligned with) one or more processing stations. For example, a process chamber with two process stations may have two slit doors, with one slit door aligned with each process station. In some embodiments, the center of the slot door may be aligned directionally with the center of the processing station. The orientation may correspond to the geometry of the processing chamber. For example, the direction may be along the depth of the processing chamber. Additionally and/or alternatively, the orientation may correspond to the geometry of the workpiece handling robot. As an example, the center of the slot gate can be slightly offset from the center of the processing station (e.g., slightly closer together) so as to extend linearly from the center of the workpiece handling robot to each processing station at the same time (e.g., through each arm). In some embodiments, the slot door may be sealable to isolate the processing conditions of the processing chamber from conditions outside the processing chamber (eg, conditions in the transfer chamber). For example, in some embodiments, a slot door can be or include an aperture (eg, a slot aperture) that can be sealed by a door or other seal. In some embodiments, such as embodiments where the conditions of the process chamber and conditions outside the process chamber (eg, immediately adjacent the slit door) are the same or suitably the same, the slit door may be or may include a non-sealable aperture.

According to example embodiments of the present disclosure, slot doors on a plurality of processing chambers aligned along straight edges may be aligned along straight edges. For example, each slot door may be provided on the front side of the process chamber. The front sides and/or slot doors may be aligned such that the front sides and/or slot doors are flush with each other. For example, a single plane may contain the lateral center of each slot door on a single side of the processing system.

Additionally and/or alternatively, the slot doors may be aligned at a common point along the height of the process chamber. For example, in some embodiments, the longitudinal offset between the slot doors and the top and/or bottom surfaces of the processing system may be approximately equal for each slot door. As another example, the longitudinal offset between the longitudinal centers of each slot door may be approximately zero (eg, less than approximately 5 centimeters).

A machining system according to example embodiments of the present disclosure may provide a high productivity system with a small footprint. The footprint may be smaller relative to that associated with cluster tools. In addition, the processing system can process multiple workpieces (for example, 4 workpieces, 8 workpieces or more), and the implementation of the processing system efficiency indicators (such as floor area/throughput, cost/throughput, and other indicators) has different aspects. Significantly improved.

An example embodiment of the present disclosure relates to a machining system for machining a plurality of workpieces. The processing system includes a load lock chamber. The load lock chamber may include a workpiece column configured to support a plurality of workpieces arranged in a stack. The processing system includes at least two processing chambers. The process chambers can be aligned along straight sides. The process chamber may include one or more slit doors. At least two processing chambers have at least one processing station. Each processing station may be associated with a workpiece support for supporting the workpiece during processing in the processing chamber. The processing system includes a transfer chamber in process communication with a load lock chamber and at least two processing chambers. The transfer chamber includes at least one workpiece handling robot. A workpiece handling robot has at least one arm configured to rotate about an axis. The workpiece handling robot is configured to transfer the plurality of workpieces from the workpiece column in the load lock chamber to at least two processing stations in the at least two processing chambers (eg, using a scissor motion).

In some embodiments, the at least two processing chambers include a first processing chamber and a second processing chamber, each of the first processing chamber and the second processing chamber including at least two processing stations. The first processing chamber and the second processing chamber are disposed on opposite sides of the transfer chamber such that the workpiece handling robot can transfer a plurality of workpieces between the first processing chamber and the second processing chamber.

In some embodiments, the first processing chamber and the second processing chamber are arranged in a linear arrangement. The system includes a transfer location configured to support a plurality of workpieces in a stacked arrangement. The workpiece handling robot may be configured to transfer a plurality of workpieces from at least two processing stations in the first processing chamber to a stacked arrangement in the transfer location. The second workpiece handling robot may be configured to transfer the plurality of workpieces from the stack arrangement at the transfer position to at least two processing stations in the second processing chamber. The transfer location may be located within the transfer chamber.

In some embodiments, the at least two processing chambers include a first processing chamber and a second processing chamber disposed on opposite sides of the transfer chamber. The at least two processing chambers further include a third processing chamber arranged linearly with the first processing chamber and a fourth processing chamber arranged linearly with the second processing chamber such that the third processing chamber and the fourth processing chamber are disposed within the transfer chamber on the opposite side of the . Each of the first processing chamber, the second processing chamber, the third processing chamber and the fourth processing chamber may include at least two processing stations.

In some embodiments, the system further includes a transfer location configured to support a plurality of workpieces, the plurality of workpieces being arranged in a stack. The at least one workpiece handling robot includes a first workpiece handling robot and a second workpiece handling robot, the first workpiece handling robot being configured to transfer a plurality of workpieces from a stacked arrangement in the load lock chamber to at least two processing robots in the first processing chamber. station, the second workpiece handling robot is configured to transfer a plurality of workpieces from the stacked arrangement in the transfer location to at least two processing stations in the third processing chamber.

In some embodiments, the workpiece handling robot has at least one main arm configured to rotate about a pivot point. The main arm can be connected to multiple auxiliary arms. Each auxiliary arm may be associated with at least one workpiece blade configured to support one of the plurality of workpieces.

In some embodiments, the workpiece handling robot may be configured to extend the arm and shear the plurality of workpiece blades to transfer the plurality of workpieces to at least two processing stations in the processing chamber. In some embodiments, a workpiece handling robot may be configured to extend an arm and shear multiple workpiece blades using a single motor.

In some embodiments, a workpiece handling robot includes a first arm including one or more workpiece blades and a second arm including one or more workpiece blades. The first arm may be configured to transfer one of the plurality of workpieces from the column in the load lock chamber to the first processing station in the process chamber, and the second arm may be configured to transfer one of the plurality of workpieces from the load lock The columns in the chamber are transferred to a second processing station in the processing chamber.

Another example implementation aspect of the present disclosure relates to a method for processing a workpiece in a semiconductor processing system. The method includes transferring a plurality of workpieces to a workpiece column in a load lock chamber. The workpiece column is configured to support a plurality of workpieces arranged in a stack. The method includes transferring a plurality of workpieces from a workpiece column to at least two processing stations in a first processing chamber (eg, using a scissor motion) using a workpiece handling robot located in the transfer chamber. The method includes performing a first processing procedure on a plurality of workpieces in a first processing chamber. The method includes using a workpiece handling robot to transfer a plurality of workpieces to at least two processing stations in a second processing chamber. The method includes performing a second treatment process on a plurality of workpieces in a second processing chamber. In some embodiments, the second treatment recipe is different than the first treatment recipe.

In some embodiments, a method may include transferring a plurality of workpieces to a transfer location using a workpiece handling robot. The method may include transferring the plurality of workpieces from the transfer location to at least two processing stations in the third processing chamber with a second workpiece handling robot disposed in the transfer chamber. The third processing chamber may be arranged in a linear arrangement with the first processing chamber. The method may include performing a third processing procedure on the plurality of workpieces in a third processing chamber. The method may include transferring the plurality of workpieces to at least two processing stations in the fourth processing chamber with the second workpiece handling robot. The fourth processing chamber may be arranged in a linear arrangement with the second processing chamber. The method may include performing a fourth treatment process on the plurality of workpieces in a fourth processing chamber.

Yet another example implementation aspect of the present disclosure relates to a machining system for machining a workpiece. The system includes a workpiece column. The system includes a first workpiece handling robot. The system includes a second workpiece handling robot. The system includes a first processing chamber. The system includes a second processing chamber. The second processing chamber is arranged in a linear arrangement with the first processing chamber. The system includes a transfer station. The system includes a first workpiece handling robot configured to transfer the workpiece from the workpiece column to at least two processing stations in the first processing chamber. The first workpiece handling robot may be configured to transfer the workpiece from the first process chamber to the transfer location. The system includes a second workpiece handling robot configured to transfer the workpiece from the transfer location to the second processing chamber.

Yet another example implementation aspect of the present disclosure relates to a machining system for machining a plurality of workpieces. The system includes a front end. The system includes a loadlock in process communication with the front end. The system includes a transfer chamber in process communication with the load lock. The transfer chamber includes a first straight side, a second straight side, and a third straight side, wherein the second straight side is connected to the loadlock and the third straight side is the opposite side of the first straight side. The transfer chamber further includes at least two workpiece handling robots and a wafer transfer location between the two workpiece handling robots, wherein the transfer location includes at least one workpiece column. The system includes a first processing chamber and a second processing chamber in process communication with the transfer chamber, wherein the first processing chamber and the second processing chamber are connected to a first linear side of the transfer chamber, the first processing chamber includes at least one processing station, The second processing chamber includes at least two processing stations. The system includes a third processing chamber and a fourth processing chamber in process communication with the transfer chamber, wherein the third processing chamber and the fourth processing chamber are connected to a third linear side of the transfer chamber, the third processing chamber including at least one processing station , the fourth processing chamber includes at least two processing stations.

Yet another example implementation aspect of the present disclosure relates to a method for processing a workpiece in a semiconductor processing system. The method includes using a first workpiece handling robot at the front end to transfer a plurality of workpieces to a workpiece column in the load lock chamber, the workpiece column configured to support the plurality of workpieces, the plurality of workpieces being arranged in a stack. The method includes transferring two workpieces from the workpiece column through the one or more first slot doors to at least two processing stations in the first processing chamber with a second workpiece handling robot located in the transfer chamber. The method includes performing a first processing procedure on two workpieces in a first processing chamber. The method includes using a workpiece handling robot in the transfer chamber to transfer one of the two workpieces through one or more second slot doors to a second station in a second process chamber, and passing the other of the two workpieces through The one or more third slot gates are transferred to a third station in the third processing chamber. The method includes performing a second processing recipe on the two workpieces in the second processing chamber and the third processing chamber, wherein the second processing recipe is different from the first processing recipe.

Variations and modifications may be made to these example embodiments of the present disclosure. As used in the specification, the singular forms "a", "and" and "the" include plural referents unless the context clearly dictates otherwise. The use of "first", "second", "third" and "fourth" are used as identifiers and for processing order. For purposes of illustration and discussion, example implementations may be discussed with reference to a "substrate," "wafer," or "workpiece." However, those of ordinary skill in the art, using the disclosure provided herein, should appreciate that the example implementation aspects of the present disclosure may be used with any suitable artifact. The term "about" used with numerical values means within 20% of the stated numerical value.

Referring now to the accompanying drawings, example embodiments of the present disclosure will now be discussed in detail. FIG. 1 illustrates a machining system 100 according to an example embodiment of the present disclosure. The processing system 100 may include a front end 112 , a load lock chamber 114 , a transfer chamber 115 , and a plurality of processing chambers including a first processing chamber 120 and a second processing chamber 130 . As shown, machining system 100 may define a width 102 and a length 104 . For example, the width 102 of the processing system 100 may correspond to the depth of the processing chambers 120 and 130 .

Front end 112 may be configured to be maintained at atmospheric pressure and may be configured to engage workpiece input device 118 . The workpiece input device 118 may include, for example, a cassette, a front opening union bay, or other device for supporting multiple workpieces. The workpiece input device 118 may be used to provide pre-machined workpieces to the machining system 100 or to receive post-machined workpieces from the machining system 100 .

Front end 112 may include one or more robots (not shown) to transfer workpieces from workpiece input device 118 to, for example, load lock chamber 114 , such as to and from workpiece column 110 located in load lock chamber 114 . In one example, a robot in front end 112 may transfer pre-machined workpieces to load lock chamber 114 and may transfer post-machined workpieces from load lock chamber 114 to one or more workpiece input devices 118 . Any suitable robot for transferring workpieces may be used in front end 112 without departing from the scope of the present disclosure. Workpieces may be transferred to and/or from the load lock chamber 114 through suitable slots, openings or orifices.

The load lock chamber 114 may include a workpiece column 110 configured to support a plurality of workpieces arranged in a stack. The workpiece column 110 may include, for example, a plurality of shelves. Each shelf can be configured to support one or more workpieces. In one example embodiment, the workpiece column 110 may include one or more shelves for supporting pre-machined workpieces and one or more shelves for supporting post-machined workpieces.

The process chamber 120 may include slit doors 123 and 125 . For example, slot door 123 may be aligned with processing station 122 . Similarly, slot door 125 may be aligned with processing station 124 . As shown in FIG. 1 , slot door 123 may be laterally aligned with slot door 125 . For example, slot door 123 and slot door 125 may each be aligned along a plane defined by the front walls of process chamber 120 and/or transfer chamber 115 .

In addition, the process chamber 130 may include slit doors 133 and 135 . For example, slot door 133 may be aligned with processing station 132 . Similarly, slot door 135 may be aligned with processing station 134 . As shown in FIG. 1 , slot door 133 may be laterally aligned with slot door 135 . For example, slot door 133 and slot door 135 may each be aligned along a plane defined by the front walls of process chamber 130 and/or transfer chamber 115 .

FIG. 2 illustrates a side view of an example workpiece column 110 according to an example embodiment of the present disclosure. As shown, the workpiece column may include a plurality of shelves 111 . Each shelf 111 may be configured to support a workpiece 113 such that a plurality of workpieces 113 may be arranged on the workpiece column 110 in a vertical/stacked arrangement.

Referring to FIG. 1, the load lock chamber 114 may be used to regulate the pressure around the workpiece from the pressure associated with the front end 112 to a process pressure, such as a vacuum or other process pressure, prior to transferring the workpiece to a process chamber, such as the first process chamber 120 and/or the second processing chamber 130. In some embodiments, appropriate valves may be provided in conjunction with the load lock chamber 114 and other chambers to properly regulate the process pressure used to process the workpiece. In some embodiments, load lock chamber 114 and transfer chamber 115 may be maintained at the same pressure. In this embodiment, there is no need to seal the load lock chamber 114 from the transfer chamber 115 . Indeed, in some embodiments, load lock chamber 114 and transfer chamber 115 may be part of the same chamber.

The first processing chamber 120 and the second processing chamber 130 may be used to perform any of a variety of workpiece processing on the workpiece, such as a vacuum annealing process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, and other processes . In some embodiments, one or more of first processing chamber 120 and second processing chamber 130 may include a plasma-based processing source such as, for example, an inductively coupled plasma (ICP) source, a microwave source, a surface wave electrode Plasma sources, ECR plasma sources, and capacitively coupled (parallel plate) plasma sources.

As shown, each of the first processing chamber 120 and the second processing chamber 130 includes a pair of processing stations arranged side-by-side so that a pair of workpieces can be simultaneously exposed to the same processing. More specifically, the first processing chamber 120 may include a first processing station 122 and a second processing station 124 arranged side by side. The second processing chamber 130 may include a first processing station 132 and a second processing station 134 arranged side by side. Each machining station may include a workpiece support (eg, a base) for supporting the workpiece during machining. In some embodiments, each machining station may share a common base with the two sections for supporting the workpiece. The first processing chamber 120 and/or the second processing chamber 130 may be selectively sealed from the transfer chamber 115 for processing.

According to certain implementation aspects of the present disclosure, the transfer chamber 115 may include a workpiece handling robot 150 . The workpiece handling robot 150 may be configured to transfer the workpiece from the workpiece column 110 in the load lock chamber 114 to a processing station in the first processing chamber 120 and/or the second processing chamber 130 . The workpiece handling robot 150 may also transfer workpieces between the first processing chamber 120 and the second processing chamber 130 . For example, the workpiece handling robot 150 may simultaneously transfer the workpiece from the workpiece column in the load lock chamber 114 to the two side-by-side processing stations 122 and 124 in the first processing chamber 120 using, for example, a scissors motion. Similarly, the workpiece handling robot 150 may simultaneously transfer workpieces from the workpiece column 110 in the load lock chamber 114 to the two side-by-side processing stations 132 and 134 in the second processing chamber 130 using, for example, a scissors motion. Details regarding the operation of the example workpiece handling robot 150 will be discussed with reference to FIGS. 7A through 7D and FIGS. 8A and 8B .

According to example embodiments of the present disclosure, the workpiece handling robot 150 may have various configurations to support the transfer of workpieces. In one embodiment, workpiece handling robot 150 may include a pair of arms configured to rotate about a pivot point. Each robot arm can be associated with a pair of workpiece blades. Each workpiece blade may have an end effector configured to support a workpiece. A pair of workpiece blades associated with each arm can be used to accomplish workpiece exchange at the machining stations of the machining chamber. The pair of arms can be configured to transfer workpieces to the two processing stations in each processing chamber using a scissor motion. In some embodiments, slot doors 123 , 125 and/or 133 , 135 may be vertically aligned to facilitate transfer of workpieces using workpiece handling robot 150 .

In another example embodiment, the workpiece handling robot 150 may include at least one main arm that rotates about a pivot point or region. The main arm can be coupled to multiple auxiliary arms. The auxiliary arms may each be coupled to at least one workpiece blade. Each workpiece blade may include an end effector for supporting the workpiece. In some embodiments, workpiece handling robot 150 may be configured to transfer at least two workpieces from workpiece column 110 in load lock chamber 114 to, for example, two side-by-side processing stations 122 and 12 in first processing chamber 120 using a scissor motion. 124. In some embodiments, scissor motion can be achieved using a single motor.

FIG. 3 shows a flowchart of an example method ( 300 ) for machining a workpiece in a machining system. Method ( 300 ) may be implemented using machining system 100 of FIG. 1 . For purposes of illustration and discussion, FIG. 3 depicts steps performed in a particular order. Those of ordinary skill in the art using the disclosure provided herein will understand that the individual steps of any method provided herein may be adjusted, rearranged, performed concurrently, omitted and/or modified in various ways without departing from the scope of the present disclosure .

At (302), the method includes transferring a plurality of workpieces to a workpiece column in a load lock chamber. For example, a plurality of workpieces may be transferred from the front end of the process chamber 100 to the workpiece column 110 in the load lock chamber 114 . For example, one or more robots associated with the front end of process chamber 100 may be used to transfer workpieces to workpiece column 110 .

At (304), the method includes transferring a plurality of workpieces from the workpiece column to at least two processing stations in the first processing chamber with a workpiece handling robot located in the transfer chamber. For example, workpiece handling robot 150 may transfer two workpieces to processing station 122 and processing station 124 in processing chamber 120 , respectively. In some embodiments, workpiece handling robot 150 may transfer workpieces to processing stations 122 and 124 in processing chamber 120 using a scissor motion. The workpiece handling robot 150 may transfer a plurality of workpieces to at least two processing stations by passing the workpieces through at least one slit door. At least one slot door can be aligned with at least two processing stations. Additionally and/or alternatively, at least one slot door may be vertically and/or laterally aligned with other slot doors in the processing system.

At (306), the method includes performing a first processing procedure on a plurality of workpieces in a first processing chamber. The first treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes.

At (308), the method includes transferring the plurality of workpieces to at least two processing stations in the second processing chamber with the workpiece handling robot. The second processing chamber may be aligned side-by-side with the first processing chamber. For example, workpiece handling robot 150 may transfer two workpieces to processing station 132 and processing station 134 in processing chamber 130 , respectively. In some embodiments, workpiece handling robot 150 may transfer workpieces to processing stations 132 and 134 in processing chamber 130 using a scissor motion. The workpiece handling robot may transfer the workpiece through one or more second slot doors that are vertically aligned with the one or more first slot doors.

In some embodiments, the workpiece handling robot may transfer a plurality of workpieces from the first processing chamber to at least two processing stations in the second processing chamber. In some embodiments, the workpiece handling robot may transfer the plurality of workpieces from a transfer location such as discussed in detail below (eg, from a workpiece column at the transfer location) to at least two processing stations in the second processing chamber.

At (310), the method includes performing a second processing procedure on the plurality of workpieces in a second processing chamber. The second treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes. In some embodiments, the second treatment recipe may be the same as or different from the first treatment recipe.

At ( 312 ), the method may include transferring the machined workpiece back to the workpiece column in the load lock chamber. For example, the workpiece handling robot 150 may transfer two workpieces from the first processing chamber 120 and/or the second processing chamber 130 . One or more robots at the front end of the machining system can then transfer the machined workpieces to, for example, a cassette.

According to certain implementation aspects of the present disclosure, additional processing chambers may be added to the processing system in a linear fashion to provide the ability to process additional workpieces. For example, FIG. 4 illustrates an example processing system 200 having four processing chambers, according to an example embodiment of the present disclosure.

Similar to the processing system of FIG. 1 , the processing system 200 of FIG. 4 may include a front end 112 , a load lock chamber 114 , a transfer chamber 115 , and a plurality of processing chambers, including a first processing chamber 120 and a second processing chamber 130 . The system may include a first workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 130, and/or between the first process chamber 120 and the second process chamber. transfer between chambers 130.

Additionally, the processing system 200 may include additional processing chambers, including a third processing chamber 170 and a fourth processing chamber 180 . The third processing chamber 170 is arranged linearly with the first processing chamber 120, and the fourth processing chamber 180 is arranged linearly with the second processing chamber 130, so that the third processing chamber 170 and the fourth processing chamber 180 are arranged linearly. Located on the opposite side of the transfer chamber 115 . For example, as shown in FIG. 4 , third processing chamber 170 may be aligned with first processing chamber 120 along linear side 171 . Straight side 171 may or may not be continuous. For example, in some embodiments, transfer location 162 may be positioned between process chamber 120 and process chamber 170 , interrupting straight side 171 . However, the portion of straight side 171 immediately adjacent to and/or including process chamber 170 may be flush with the portion of straight side 171 immediately adjacent to and/or including process chamber 120 . Additionally and/or alternatively, fourth processing chamber 180 may be aligned with second processing chamber 130 along linear side 181 . Straight side 181 may or may not be continuous. For example, in some embodiments, transfer location 162 may be positioned between process chamber 130 and process chamber 180 , interrupting straight side 181 . However, the portion of straight side 181 immediately adjacent to and/or including process chamber 180 may be flush with the portion of straight side 181 immediately adjacent to and/or including process chamber 130 .

The third processing chamber 170 and the fourth processing chamber 180 may be used to perform any one of various workpiece processing on the workpiece, such as vacuum annealing process, heat treatment process, surface treatment process, dry stripping process, dry etching process, deposition process and other processes. In some embodiments, one or more of the third processing chamber 170 and the fourth processing chamber 180 may include a plasma-based processing source such as, for example, an inductively coupled plasma (ICP) source, a microwave source, a surface wave electrode, etc. Plasma sources, ECR plasma sources, and capacitively coupled (parallel plate) plasma sources.

As shown, each of the third processing chamber 170 and the fourth processing chamber 180 includes a pair of processing stations arranged side-by-side so that a pair of workpieces can be simultaneously exposed to the same processing. More specifically, the third processing chamber 170 may include a first processing station 172 and a second processing station 174 arranged side by side. The fourth processing chamber 180 may include a first processing station 182 and a second processing station 184 arranged side by side. Each machining station may include a workpiece support (eg, a base) for supporting the workpiece during machining. In some embodiments, the third processing chamber 170 and/or the fourth processing chamber 180 may be selectively sealed off from the transfer chamber 115 for processing.

To transfer workpieces to the third processing chamber 170 and the fourth processing chamber 180 , the system 200 may further include a transfer location 162 and a second workpiece handling robot 190 . The transfer location 162 may be part of the transfer chamber 115 or may be a separate chamber. The transfer location 162 may include a workpiece column 160 for supporting a plurality of workpieces arranged in a stack. For example, workpiece column 160 may include a plurality of shelves configured to support workpieces in a stacked vertical arrangement. First workpiece handling robot 150 may be configured to transfer workpieces from workpiece column 110 , first process chamber 120 , or second process chamber 130 to workpiece column 160 in transfer location 162 .

Processing system 200 of FIG. 4 may include slot doors 123 , 125 , 133 , and 135 similar to processing system 100 of FIG. 1 . In addition, the process chamber 170 may include slit doors 173 and 175 . For example, slot door 173 may be aligned with processing station 172 . Similarly, slot door 175 may be aligned with processing station 174 . As shown in FIG. 1 , slot door 173 may be laterally aligned with slot door 175 . For example, slot door 173 and slot door 175 may each be aligned along a plane defined by the front wall of process chamber 170 and/or transfer chamber 115 . As shown in FIG. 4 , the slit doors 173 and 175 of the process chamber 170 may be aligned with the slit doors 123 and 125 of the process chamber 120 along the straight side 171 . For example, slot doors 123 , 125 , 173 and/or 175 may be spaced apart in direction 104 and have an offset of about zero in direction 102 .

In addition, the processing chamber 180 may include slit doors 183 and 185 . For example, slot door 183 may be aligned with processing station 182 . Similarly, slot door 185 may be aligned with processing station 184 . As shown in FIG. 1 , slot door 183 may be laterally aligned with slot door 185 . For example, slot door 183 and slot door 185 may each be aligned along a plane defined by the front wall of process chamber 180 and/or transfer chamber 115 . As shown in FIG. 4 , the slit doors 183 and 185 of the process chamber 180 may be aligned with the slit doors 133 and 135 of the process chamber 130 along the straight side 181 . For example, slot doors 133 , 135 , 183 and/or 185 may be spaced apart in direction 104 and have an offset of about zero in direction 102 .

FIG. 5 illustrates a side view of an example workpiece column 160 in a transfer position 162 according to an example embodiment of the present disclosure. As shown, workpiece column 160 may include a plurality of shelves 161 . Each shelf 161 may be configured to support a workpiece 163 such that a plurality of workpieces 163 may be arranged in a vertical/stacked arrangement on the workpiece column 160 .

Second workpiece handling robot 190 may be configured to transfer workpieces from workpiece column 160 in transfer location 162 to processing stations in third processing chamber 170 and/or fourth processing chamber 180 . The workpiece handling robot 190 may also transfer workpieces from the third processing chamber 170 to the fourth processing chamber 180 . For example, workpiece handling robot 190 may simultaneously transfer workpieces from workpiece column 160 in transfer location 162 to two side-by-side processing stations 172 and 174 in third processing chamber 170 using, for example, a scissors motion. Similarly, workpiece handling robot 190 may simultaneously transfer workpieces from workpiece column 160 in transfer location 162 to two side-by-side processing stations 182 and 184 in fourth processing chamber 130 using, for example, a scissors motion.

According to example embodiments of the present disclosure, the workpiece handling robot 190 may have various configurations to support the transfer of workpieces. In one embodiment, workpiece handling robot 150 may include a pair of arms configured to rotate about a pivot point. Each robot arm can be associated with a pair of workpiece blades. Each workpiece blade may have an end effector configured to support a workpiece. A pair of workpiece blades associated with each arm can be used to accomplish workpiece exchange at the machining stations of the machining chamber. The pair of arms can be configured to transfer workpieces to the two processing stations in each processing chamber using a scissor motion.

In another example embodiment, the workpiece handling robot 190 may include at least one main arm that rotates about a pivot point or region. The main arm can be coupled to multiple auxiliary arms. The auxiliary arms may each be coupled to at least one workpiece blade. Each workpiece blade may include an end effector for supporting the workpiece. In some embodiments, workpiece handling robot 190 may be configured to transfer at least two workpieces from workpiece column 160 in transfer location 162 to two side-by-side processing stations 172 and 174 in third processing chamber 170, for example, using a scissor motion. . In some embodiments, scissor motion can be achieved using a single motor.

Machining system 200 includes four machining chambers 120, 130, 170, and 180, and can be configured to simultaneously machine up to eight workpieces at a time. Additional machining stations can be added in a linear fashion to provide additional machining capacity. For example, a fifth processing chamber may be added in a linear arrangement with the third processing chamber 170 . A sixth processing chamber may be added in a linear arrangement with the fourth processing chamber 180 . Additional transfer locations and workpiece handling robots may be used to transfer workpieces into and out of the fifth and sixth processing chambers. By extending the processing system in a linear fashion in this way, additional processing chambers can be included.

6A and 6B show a flowchart of an example method ( 400 ) for machining a workpiece in a machining system. Method ( 400 ) may be implemented using machining system 200 of FIG. 4 . For purposes of illustration and discussion, Figures 6A and 6B show steps performed in a particular order. Those of ordinary skill in the art using the disclosure provided herein will understand that the individual steps of any method provided herein may be adjusted, rearranged, performed concurrently, omitted and/or modified in various ways without departing from the scope of the present disclosure .

At (402), the method includes transferring a plurality of workpieces to a workpiece column in a load lock chamber. For example, a plurality of workpieces may be transferred from the front end of the process chamber 100 to the workpiece column 110 in the load lock chamber 114 . For example, one or more robots associated with the front end of process chamber 100 may be used to transfer workpieces to workpiece column 110 .

At (404), the method includes transferring a plurality of workpieces from the workpiece column to at least two processing stations in the first processing chamber with a workpiece handling robot located in the transfer chamber. For example, workpiece handling robot 150 may transfer two workpieces to processing station 122 and processing station 124 in processing chamber 120 , respectively. In some embodiments, workpiece handling robot 150 may transfer workpieces to processing stations 122 and 124 in processing chamber 120 using a scissor motion.

At (406), the method includes performing a first processing procedure on a plurality of workpieces in a first processing chamber. The first treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes.

At (408), the method includes transferring the plurality of workpieces to the transfer station with the workpiece handling robot. The workpiece handling robot 150 may transfer the two workpieces to the processing station 122 and the processing station 124 in the processing chamber 120, respectively. In some embodiments, workpiece handling robot 150 may transfer the workpiece to workpiece column 160 at transfer location 162 .

At (410), the method may include transferring the plurality of workpieces from the transfer location to at least two processing stations in the third processing chamber with a second workpiece handling robot disposed in the transfer chamber. The third processing chamber may be arranged in a linear arrangement with the first processing chamber. For example, workpiece handling robot 190 may transfer two workpieces from workpiece column 160 in transfer location 162 to processing station 172 and processing station 174 in processing chamber 170 , respectively. In some embodiments, workpiece handling robot 190 may transfer the workpiece to processing station 172 and processing station 174 in processing chamber 170 using a scissors motion.

At (412), the method includes performing a third processing procedure on the plurality of workpieces in a third processing chamber. The third treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes.

At ( 414 ), the method may include transferring the plurality of workpieces to at least two processing stations in a fourth processing chamber with the second workpiece handling robot. The fourth processing chamber may be arranged in a linear arrangement with the second processing chamber. For example, workpiece handling robot 190 may transfer two workpieces from workpiece column 160 in transfer location 162 to processing station 182 and processing station 184 in processing chamber 180 , respectively. For example, workpiece handling robot 190 may transfer the workpiece to processing station 182 and processing station 184 in processing chamber 180 using a scissors motion. In some embodiments, workpiece handling robot 190 may transfer two workpieces from processing chamber 170 to processing station 182 and processing station 184 in processing chamber 180 . For example, workpiece handling robot 190 may transfer the workpiece to processing station 182 and processing station 184 in processing chamber 180 using a scissors motion.

At ( 416 ), the method may include performing a fourth processing procedure on the plurality of workpieces in a fourth processing chamber. The fourth treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes.

At ( 418 ), the method may include transferring, by the second workpiece handling robot, the plurality of workpieces back to the transfer location. For example, workpiece handling robot 190 may transfer workpieces from process chamber 170 and/or process chamber 180 to workpiece column 160 at transfer location 162 .

At (422), the method includes transferring the plurality of workpieces to at least two processing stations in the second processing chamber using the workpiece handling robot. For example, workpiece handling robot 150 may transfer two workpieces to processing station 132 and processing station 134 in processing chamber 130 , respectively. In some embodiments, workpiece handling robot 150 may transfer workpieces to processing stations 132 and 134 in processing chamber 130 using a scissor motion.

In some embodiments, the workpiece handling robot may transfer a plurality of workpieces from the first processing chamber 120 to at least two processing stations in the second processing chamber. In some embodiments, a workpiece handling robot may transfer a plurality of workpieces from, for example, workpiece column 160 at transfer location 162 to at least two processing stations in second processing chamber 120 .

At (424), the method includes performing a second processing procedure on the plurality of workpieces in the second processing chamber. The second treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes. In some embodiments, the second treatment recipe may be the same as or different from the first treatment recipe, third treatment recipe, and/or fourth treatment recipe.

At (426), the method may include transferring the machined workpiece back to the workpiece column in the load lock chamber. For example, the workpiece handling robot 150 may transfer two workpieces from the first processing chamber 120 and/or the second processing chamber 130 . One or more robots at the front end of the machining system can then transfer the machined workpieces to, for example, a cassette.

Referring to FIGS. 7A-7D , the operation of an example workpiece handling robot 150 according to an example embodiment will be explained. The workpiece handling robot 150 of FIGS. 7A-7D includes two main robot arms 152 and 154 configured to rotate about a fixed point. Each of robotic arms 152 and 154 may include at least one workpiece blade. For example, robotic arm 152 may include workpiece blade 156 . The robotic arm 154 may include a workpiece blade 158 . Each workpiece blade 156 and 158 may be configured to grasp, hold and release a workpiece using, for example, a suitable end effector. In some embodiments, each of robotic arms 152 and 154 may include a pair of workpiece blades. Additional workpiece inserts can be used, for example, for workpiece exchange. Each of robotic arms 152 and 154 may be independently operated using, for example, motors.

As shown in FIG. 7A , both robot arms 152 and 154 of the workpiece handling robot 150 can be extended to grab a workpiece from the workpiece column 110 in the load lock chamber 114 using a workpiece blade. For example, robotic arm 152 may be extended to grasp a workpiece from workpiece column 110 using workpiece blade 156 . Robotic arm 154 may be extended to grab a workpiece from workpiece column 110 using workpiece blade 158 . As shown in FIG. 7B , the workpiece handling robot 150 may then be operated to retract the robot arms 152 and 154 to the retracted position.

FIG. 7C illustrates side-by-side processing stations 132 and 134 transferring workpieces into processing chamber 130 according to an example embodiment of the present disclosure. The first robotic arm 152 can rotate and extend so that the workpiece blade can transfer the workpiece to the first machining station 132 . A second workpiece blade associated with the first robotic arm 152 may grip a workpiece already located on the first processing station 132 prior to actually transferring the workpiece to the first processing station. The second robot arm 154 can be rotated and extended so that the workpiece blade can be transferred to the second machining station 134 . A second workpiece blade associated with the second robot arm 154 may grip a workpiece already located on the second processing station 134 before the workpiece is actually transferred to the first processing station. In certain embodiments, the first robotic arm 152 and the second robotic arm 154 may operate in a scissor motion such that the second robotic arm 154 is separated from the first robotic arm 152 . In some embodiments, robotic arms 152 and 154 may simultaneously transfer workpieces to first processing station 132 and second processing station 134, respectively.

Once workpieces previously located at processing stations 132 and 134 have been gripped and new workpieces have been transferred to processing stations 132 and 134 , workpiece handling robot 150 may be operated to retract robot arms 152 and 154 to a retracted position. The workpiece handling robot 150 can then be rotated and manipulated to deliver the workpiece to other parts of the system, such as the workpiece column 110 in the load lock chamber 114, the workpiece column 160 in the transfer location 162, or the processing station 122 and 124.

8A and 8B illustrate the operation of an example workpiece handling robot 150 according to another example embodiment of the present disclosure. The workpiece handling robot 150 of FIGS. 8A and 8B includes a single main robot arm 252 and two auxiliary robot arms 253 and 254 attached to the main robot arm 252 at pivot points on the main robot arm 252 . Each of the auxiliary robotic arms 253 and 254 may include at least one workpiece blade. For example, auxiliary robot arm 253 may include workpiece blade 255 . The auxiliary robotic arm 254 may include a workpiece blade 256 . Each workpiece blade 255 and 256 may be configured to grasp, hold and release a workpiece using, for example, a suitable end effector. In some embodiments, each of auxiliary robotic arms 253 and 254 may each include a pair of workpiece blades. Additional workpiece inserts can be used, for example, for workpiece exchange.

Referring to FIG. 8A , the workpiece handling robot 150 may be operated to extend the primary and secondary robot arms to grab a workpiece from the workpiece column 110 using the workpiece blade. Each auxiliary arm can grip the workpiece with a suitable workpiece blade. The robot 150 can then retract the primary and secondary robotic arms to the retracted position. The robot 150 may then rotate the primary and secondary robotic arms to a position to deliver the workpiece to, for example, the first process chamber 120 .

As shown in FIG. 8B , workpiece handling robot 150 may extend master robot arm 252 . Auxiliary robotic arms 253 and 254 may be moved in a scissor motion 260 (eg, away from each other) to simultaneously deliver workpieces to first processing station 122 and second processing station 124 in processing chamber 120 .

Various mechanisms may be used to operate auxiliary arms 253 and 254 in a scissors motion. For example, in one example, when the workpiece handling robot extends the main arm 252, a mechanism (eg, separation member) may be positioned to separate the auxiliary robot arms 253 and 254 in a scissors motion. In this way, the extension of the main robot arm 252 and the auxiliary robot arms 253 and 254 according to example embodiments may be operated using a single motor. In another example, the workpiece handling robot 150 may include one or more additional motors to operate the auxiliary robotic arms 253 and 254 in a scissors motion independently from the motors operating the main robotic arm 252 to deliver workpieces to processing stations. 122 and 124. In some other embodiments, the mechanism may be positioned so that the auxiliary robot arms 253 and 254 undergo scissor motion through the rotational angle of the workpiece handling robot 150 . As shown in FIGS. 4A and 4B , the auxiliary arms 253 and 254 can be moved in a scissor motion 260 when the workpiece handling robot 150 is rotated toward the machining chamber 120 , but not when the workpiece handling robot 150 is rotated toward the workpiece column 110 .

In another example embodiment, workpiece handling robot 150 may include a second main arm (not shown). The second main arm can have two auxiliary robot arms. Each auxiliary robotic arm may include at least one workpiece blade. The auxiliary robot arm attached to the second main robot arm can be moved in a scissor motion (eg, separated from each other), and the workpiece blade can simultaneously grasp the workpiece already located on the processing stations 122 and 124 in the processing chamber 120, by attaching Auxiliary robot arms 253 and 254 connected to the first master robot arm 252 physically transfer the new workpiece to the processing chamber 120 . In another example, the two main arms never extend simultaneously and can be operated using a single motor.

FIG. 9 shows a plan view of an example machining system 900 according to an example embodiment of the present disclosure. Similar to processing system 100 of FIG. 1 , processing system 900 of FIG. 9 may include front end 112 , load lock chamber 114 , transfer chamber 115 , and a plurality of processing chambers, including first processing chamber 120 and second processing chamber 130 . The system may include a first workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 130, and/or between the first process chamber 120 and the second process chamber. transfer between chambers 130.

In addition to processing chambers 120 and 130 , processing system 900 may further include a post-processing chamber 950 . A post-processing chamber 950 may be provided at a rear side of the processing system 900 . For example, the post-processing chamber 950 may be disposed at a side of the transfer chamber 115 opposite to the load lock chamber 114 . As one example, the first processing chamber 120 may be disposed on a first side of the transfer chamber 115 and the second processing chamber 130 may be disposed on a second side of the transfer chamber 115 opposite the first side. The post-processing chamber 950 may be disposed on a third side (eg, a rear side) perpendicular to the first side and the second side. Thus, the load lock chamber 114 may be disposed on a fourth side (eg, a front side) opposite to the third side. In some embodiments, only a single processing station 952 may be included in the post processing chamber 950 . Additionally, a single slot door 953 may be included in the post processing chamber 950 to allow the workpiece handling robot 150 to transfer workpieces to and/or out of the processing station 952 .

The motion of the workpiece handling robot 150 to transfer the workpiece at the processing station 952 may be similar and/or identical to the motion used to transfer the workpiece to and/or out of the workpiece column 110 (eg, as shown in FIG. 8A ). For example, a workpiece handling robot may be configured to access a post-processing chamber with only one processing station in addition to other processing chambers having two processing stations.

In this manner, the footprint of processing system 900 may be reduced while enabling additional processing stations 952 . For example, post processing chamber 950 may provide additional processing stations 952 (eg, compared to processing system 100 such as FIG.

FIG. 10 shows a plan view of an example machining system 1000 according to an example embodiment of the present disclosure. Similar to processing system 100 of FIG. 1 , processing system 1000 of FIG. 10 may include a front end 112 , a load lock chamber 114 , a transfer chamber 115 , and a plurality of processing chambers, including a first processing chamber 120 and a second processing chamber 130 . The system may include a workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 130, and/or between the first process chamber 120 and the second process chamber 130 transfer between. In addition, similar to the processing system 400 of FIG. 4 , the processing system 1000 of FIG. 10 may include a third processing chamber 170 and a fourth processing chamber 180 .

As shown in FIG. 10 , third processing chamber 170 and fourth processing chamber 180 are arranged in a linear arrangement adjacent to first processing chamber 120 and second processing chamber 130 , respectively, such as without interruption in transfer chamber 115 . For example, in the embodiment of FIG. 10 , workpiece column 160 and transfer location 162 of machining system 400 of FIG. 4 are removed. This can reduce the footprint of processing system 1000 . Additionally, process chambers 120, 130, 170, and/or 180 may be aligned along linear sides. For example, processing chamber 120 may be aligned with processing chamber 170 along a linear side. Additionally and/or alternatively, processing chamber 130 may be aligned with processing chamber 180 along a linear side.

Thus, the workpiece handling robot 150 may move linearly within the transfer chamber 115 in order to engage the third processing chamber 170 and/or the fourth processing chamber 180 . For example, workpiece handling robot 150 may be repositioned along track 1052 . In some embodiments, workpiece handling robot 150 is movable along track 1052 to at least a first location. The workpiece handling robot 150 may be configured to access the first processing chamber 120 and the second processing chamber 130 when the workpiece handling robot 150 is in the first position. For example, in some embodiments, the first location may be at the lateral center of process chambers 120 and/or 130 . Additionally and/or alternatively, workpiece handling robot 150 may move along track 1052 to at least a second location. The workpiece handling robot 150 may be configured to access the third processing chamber 170 and the fourth processing chamber 180 when the workpiece handling robot 150 is in the second position. For example, in some embodiments, the second location may be at the lateral center of process chambers 170 and/or 180 .

FIG. 11 shows a plan view of an example machining system 1100 according to an example embodiment of the present disclosure. Similar to processing system 100 of FIG. 1 , processing system 1100 of FIG. 11 may include a front end 112 , a load lock chamber 114 , a transfer chamber 115 , and a plurality of processing chambers, including a first processing chamber 120 and a second processing chamber 130 . The system may include a workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 130, and/or between the first process chamber 120 and the second process chamber 130 transfer between. In addition, similar to the processing system 400 of FIG. 4 , the processing system 1100 of FIG. 11 may include a third processing chamber 170 and a fourth processing chamber 180 . The process chambers 170 and 180 may be arranged similar to FIGS. 4 and/or 10 . For example, a single workpiece handling robot 150 may move to access process chambers 120 , 130 and 170 , 180 as described with respect to FIG. 10 . Additionally and/or alternatively, a second workpiece handling robot and/or transfer location may be used to access the processing chambers 170 , 180 , as described with respect to FIG. 4 .

As shown in FIG. 11 , the depth 1110 of the processing chamber 130 may be different than the depth 1120 of the processing chamber 1080 . For example, in some cases, different types, capacities, etc. of process chambers may result in process chambers having different depths. It may be desirable for the process chambers to provide a consistent interface to the workpiece handling robot 150 so that the workpiece handling robot 150 may operate similarly and/or identically at each process chamber. Thus, according to example embodiments of the present disclosure, the processing chamber 130 and the processing chamber 1080 may be aligned along the straight edge 181 . As shown, this allows the processing chamber 180 to extend further in depth than the processing chamber 130 . However, this provides that the slot doors 133 , 135 and 183 , 185 are aligned along the straight side 181 . Thus, the workpiece handling robot 150 can access the slot doors 133 , 135 and 183 , 185 aligned along the straight side 181 .

12A and 12B illustrate example aligned slit doors according to example embodiments of the present disclosure. For example, FIG. 12A shows a front profile view of a first processing chamber 1210 and a second processing chamber 1220 . FIG. 12A shows that the slot door 1212 of the first processing chamber 1210 and the slot door 1222 of the second processing chamber 1220 may be vertically aligned. For illustration, process chambers 1210 and 1220 are shown with one slit door. It should be understood that the process chambers described herein may have any suitable number of slit doors, such as two slit doors, according to example embodiments of the present disclosure.

As shown in FIG. 12A , the longitudinal offset 1215 between a point on the slot door 1212 and the bottom of the processing chambers 1210, 1220 may be the same as or the longitudinal offset 1225 between a similar point on the slot door 1222 and the bottom. About the same (eg, within about 10%). FIG. 12A shows this point as the bottom of the slot doors 1212,1222. It should be understood that any suitable point can be used for comparison, such as center, top, etc.

In addition, FIG. 12B shows a top profile view of the first processing chamber 1210 and the second processing chamber 1220 . FIG. 12B shows that slot doors 1212 and 1222 may be aligned laterally, such as along straight side 1235 . For example, the lateral offset between slot doors 1212 and 1222 may be approximately zero such that the plane defined by straight side 1235 contains slot doors 1212 and 1222 . As shown in FIG. 12B , the first processing chamber 1210 has a greater depth than the second processing chamber 1220 . In this manner, the front sides of the first process chamber 1210 and the second process chamber 1220 may be aligned as the straight side 1235, while the back sides of each process chamber 1210, 1220 may not be aligned.

FIG. 13 shows a plan view of an example machining system 1300 according to an example embodiment of the present disclosure. Similar to machining system 100 of FIG. 1 , machining system 1300 of FIG. 13 may include a front end 112 configured to engage and/or receive a workpiece from one or more workpiece input devices 118 . As shown in machining system 1300 of FIG. 13 , front end 112 may be placed in direct workpiece communication with workpiece input device 118 and one or more machining chambers and/or machining stations 1306, such as first machining chamber 1302 and/or or second process chamber 1304 (eg, no load lock and/or transfer chamber required). For example, workpiece handling robot 150 may be navigated along track 1305 to transfer workpieces between processing stations 1306 and/or workpiece input device 118 .

As shown in FIG. 13 , processing chambers (eg, 1302 and/or 1304 ) may have any suitable number of processing stations 1306 . For example, the first processing chamber 1302 may have two processing stations 1306 and the second processing chamber 1304 may have only one processing station 1306 . Each processing station 1306 may have an associated slot door 1308 . When a workpiece is being machined in machining station 1306 , slot door 1308 of the machining chamber may be sealed to allow for differences in conditions between the machining chamber and front end 112 . For example, the front end 112 can be maintained at atmospheric conditions (eg, pressure, temperature), while the pressure inside the process chambers (eg, 1302, 1304) where processing is performed can be adjusted from atmospheric conditions (eg, to process pressure and/or Temperature adjustment.

FIG. 14 shows a plan view of an example machining system 1400 according to an example embodiment of the present disclosure. Similar to the processing system 1000 of FIG. 10 , the processing system 1400 of FIG. 14 may include a front end 112, a transfer chamber 115, and a plurality of processing chambers, including a first processing chamber 120, a second processing chamber 130, a third processing chamber 170, and a first processing chamber. Four processing rooms 180. As shown in FIG. 14, the transfer chamber 115 and the front end 112 may be the same chamber (eg, share one or more walls, share environmental conditions, etc.). The (eg, single) workpiece transfer robot 150 may be configured to transfer workpieces between the workpiece input device 118 and the processing chambers (eg, 120 , 130 , 170 , 180 ). For example, workpiece transfer robot 150 may be navigated along track 1452 to transfer workpieces into and out of process chambers (eg, 120 , 130 , 170 , 180 ) and/or from workpiece input device 118 . When machining a workpiece in a machining station (eg, 122, 124), the slit doors (eg, 123, 125) of the machining chamber (eg, 120) may be sealed to allow the machining chamber (eg, 120) to communicate with the front end 112 and/or conditional differences between transfer chambers 115 . For example, the front end 112 and/or the transfer chamber 115 can be maintained at atmospheric conditions (e.g., pressure, temperature), while the pressure inside the process chamber (e.g., 120) where processing is performed can be changed from atmospheric conditions (e.g., process pressure and/or or temperature) regulation.

FIG. 15 shows a plan view of an example machining system 1500 according to an example embodiment of the present disclosure. Similar to processing system 100 of FIG. 1 , processing system 1500 of FIG. 15 may include a front end 112 , a load lock chamber 114 , a transfer chamber 115 , and a plurality of processing chambers, including a first processing chamber 120 and a second processing chamber 130 . The system may include a workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 130, and/or between the first process chamber 120 and the second process chamber 130 transfer between. Workpiece handling robot 150 may be any suitable workpiece handling robot described herein, such as a workpiece handling robot system including one robot, two robots, load lock chamber, no load lock chamber, or the like. As shown in FIG. 15, the processing chambers described herein may include any suitable number of processing stations and/or slot doors. For example, while processing chambers 120 and 130 each include two processing stations and corresponding slot doors, processing system 1500 may additionally include processing chamber 1570 and processing chamber 1580, each having a single processing station 1572, 1582 and associated The slit doors of 1573, 1583. As shown in FIG. 15 , process chambers 1570 and 1580 may be arranged to straddle each other across transfer chamber 115 . However, any suitable process chamber arrangement may be employed in accordance with example implementation aspects of the present disclosure.

FIG. 16 shows a plan view of an example machining system 1600 according to an example embodiment of the present disclosure. Similar to processing system 100 of FIG. 1 , processing system 1600 of FIG. 16 may include front end 112 , load lock chamber 114 , transfer chamber 115 , and a plurality of processing chambers, including first processing chamber 120 and second processing chamber 170 . The system may include a workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 170, and/or between the first process chamber 120 and the second process chamber 170 transfer between. Workpiece handling robot 150 may be any suitable workpiece handling robot described herein, such as a workpiece handling robot system including one robot, two robots, load lock chamber, no load lock chamber, or the like. As shown in FIG. 16, the processing chambers described herein may include any suitable number of processing stations and/or slot doors. For example, while processing chambers 120 and 130 each include two processing stations and corresponding slot doors, processing system 1600 may additionally include processing chamber 1670, processing chamber 1680, and processing chamber 1690, each having a single processing station 1672, 1682, 1692 and associated slot doors 1673, 1683, 1693. As shown in FIG. 16 , process chambers with a single process station (eg, 1670 , 1680 , and 1690 ) can be positioned on opposite sides of transfer chamber 115 from process chambers with two process stations (eg, 120 , 170 ). superior. However, any suitable process chamber arrangement may be employed in accordance with example implementation aspects of the present disclosure.

The above-described operational example of a workpiece handling robot for transferring workpieces in a machining system is provided for purposes of illustration and discussion. Those of ordinary skill in the art using the disclosure provided herein will appreciate that many different modes of operating a workpiece handling robot may be used without departing from the scope of the present disclosure.

While the subject matter has been described in detail with respect to specific example embodiments thereof, it should be appreciated that alterations, variations, and equivalents of these embodiments can readily be produced by those of ordinary skill in the art having gained an understanding of the foregoing. Accordingly, the scope of the present disclosure is illustrative rather than restrictive, and the present disclosure does not exclude the inclusion of such modifications, changes and/or additions to the subject matter as would be apparent to those of ordinary skill in the art It is obvious. [Incorporation by reference of related applications]

This application is a continuation-in-part of U.S. Patent Application Serial No. 16/782,110, filed February 5, 2020, entitled "System and Method for Workpiece Machining," which was filed October 6, 2017, and entitled " Continuation of U.S. Patent Application No. 15/726,437, "System and Method for Workpiece Machining," which claims U.S. Provisional Serial No. 62/409,538, filed October 18, 2016, entitled "System for Workpiece Machining" Apply for benefits. Applicant claims priority and benefit of each of these applications and incorporates all of these applications herein by reference.

100, 200, 900, 1000: processing system 1100, 1300, 1400, 1500, 1600: processing system 102: width, direction 104: length, direction 110: workpiece column 111: shelf 112: front end 113: Workpiece 114: Load lock chamber 115: Teleportation Room 118: Workpiece input device 120: processing room 122: Processing station 123: Slit door 124: Processing station 125: Slit door 130: processing room 132: Processing station 133: Slit door 134: processing station 135: Slit door 150:Workpiece handling robot 152, 154: main robot arm 156, 158: workpiece blade 160: workpiece column 161: shelf 162: Teleport location 163: Workpiece 170: processing room 171: straight side 172: Processing station 174: Processing station 180: processing room 181: straight side 182: Processing station 183: Slit door 184: processing station 185: Slit door 190:Workpiece handling robot 252: Main robot arm 253, 254: auxiliary robot arm, auxiliary arm 255, 256: workpiece blade 260: scissors movement 302: Transferring the workpiece to the workpiece column in the load lock chamber 304: Transferring the workpiece from the workpiece column to the first processing chamber 306: Execute the first treatment process in the first processing chamber 308: Transfer the workpiece to the second processing chamber 310: Execute the second treatment process in the second processing chamber 312: Transfer the workpiece to the workpiece column in the load lock chamber 402: Transfer the workpiece to the workpiece column in the load lock chamber 404: Transferring the workpiece from the workpiece column to the first processing chamber 406: Execute the first treatment process in the first processing chamber 408: Send the workpiece to the transfer position 410: Transfer the workpiece to the third processing chamber 412: Execute the third processing process in the third processing chamber 412: Transfer the workpiece to the fourth processing chamber 414: Execute the fourth treatment process in the fourth processing chamber 416: Send the workpiece to the transfer position 418: Transfer the workpiece to the second processing chamber 420: Execute the second treatment process in the second processing chamber 422: Transfer the workpiece to the workpiece column in the load lock chamber 950: post-processing room 952: processing station 953: Slit door 1080: processing room 1210: processing room 1212: Slit door 1215: Longitudinal offset 1220: processing room 1222: Slit door 1225: vertical offset 1235: straight side 1302: processing room 1304: processing room 1305: track 1306: processing station 1308: Slit door 1570: processing room 1580: processing room 1572, 1582: processing station 1573, 1583: Slit doors 1670: processing room 1680: processing room 1690: processing room 1672, 1682, 1692: processing stations 1673, 1683, 1693: Slit doors

A detailed discussion of embodiments for those of ordinary skill in the art is set forth in the specification with reference to the accompanying drawings, in which:

FIG. 1 illustrates a plan view of an example machining system according to an example embodiment of the present disclosure;

FIG. 2 illustrates an example workpiece column according to an example embodiment of the present disclosure;

FIG. 3 shows a flowchart of an example processing method according to an example embodiment of the present disclosure;

Figure 4 illustrates a plan view of an example machining system according to an example embodiment of the present disclosure;

FIG. 5 illustrates example transfer locations according to an example embodiment of the present disclosure;

6A and 6B show a flowchart of an example processing method according to an example embodiment of the present disclosure;

7A, 7B, 7C, and 7D illustrate example workpiece transfers in a machining system according to example embodiments of the present disclosure;

8A and 8B illustrate an example workpiece handling robot that uses a scissor motion to transfer a plurality of workpieces from a workpiece column to at least two processing stations in a processing chamber, according to an example embodiment of the present disclosure;

Figure 9 illustrates a plan view of an example machining system according to an example embodiment of the present disclosure;

Figure 10 shows a plan view of an example machining system according to an example embodiment of the present disclosure;

Figure 11 shows a plan view of an example machining system according to an example embodiment of the present disclosure;

12A and 12B illustrate example aligned slit doors according to example embodiments of the present disclosure;

Figure 13 illustrates a plan view of an example machining system according to an example embodiment of the present disclosure;

Figure 14 shows a plan view of an example machining system according to an example embodiment of the present disclosure;

Figure 15 shows a plan view of an example machining system according to an example embodiment of the present disclosure; and

FIG. 16 shows a plan view of an example machining system according to an example embodiment of the present disclosure.

100: Processing system

102: width, direction

104: length, direction

110: workpiece column

112: front end

114: Load lock chamber

115: Teleportation Room

118: Workpiece input device

120: processing room

122: Processing station

123: Slit door

124: Processing station

125: Slit door

130: processing room

132: Processing station

133: Slit door

134: processing station

135: Slit door

150:Workpiece handling robot

Claims (20)

A machining system for machining a plurality of workpieces, the machining system comprising: a transfer chamber in process communication with a first process chamber and a second process chamber, and the transfer chamber has a first linear side; wherein said first processing chamber comprises at least one first processing station, and wherein said first processing chamber is arranged along said first straight line side; Wherein, the second processing chamber includes at least two second processing stations, wherein the second processing chamber is arranged along the first straight line side, and wherein the second processing chamber is arranged along the first straight line side arranged linearly with said first processing chamber; and Wherein the transfer chamber comprises at least one workpiece handling robot configured to transfer at least one workpiece to the at least one first processing station and the at least two second processing stations. The processing system according to claim 1, wherein the first processing chamber includes at least one first slit door arranged along the first straight line side, and the second processing chamber includes at least one first slit door arranged along the first straight line side and wherein the at least one first slit door is laterally aligned with the at least one second slit door along the first linear side. The processing system of claim 2, wherein the longitudinal offset between the longitudinal center of the at least one first slit door and the longitudinal center of the at least one second slit door is about zero. The processing system of claim 1, further comprising a load lock chamber in process communication with the transfer chamber, the load lock chamber including a workpiece column. The processing system according to claim 4, wherein the load lock chamber is disposed on a side of the transfer chamber perpendicular to the first straight line side. The processing system of claim 1, wherein the first processing chamber includes at least two processing stations. The processing system of claim 1, wherein the first process chamber, the second process chamber, and the transfer chamber are in process communication without vacuum interruption. The machining system of claim 1, further comprising a transfer location between said first processing chamber and said second processing chamber, wherein said transfer location includes at least one workpiece column, and wherein said A transfer location is located within the transfer chamber. The processing system according to claim 1, further comprising a third processing chamber having at least one processing station and a fourth processing chamber having at least one processing station, the third processing chamber and the fourth processing chamber are arranged On a third linear side of the transfer chamber, the third linear side is disposed opposite to the first linear side of the transfer chamber. The processing system of claim 9, wherein at least one of the third processing chamber or the fourth processing chamber includes at least two processing stations. The processing system of claim 1, further comprising a front end, wherein the front end is in process communication with the transfer chamber. A machining system for machining a plurality of workpieces, the machining system comprising: a first processing room with two processing stations; a second processing room with two processing stations; a third processing chamber having a processing station; and a transfer chamber in process communication with the first process chamber, the second process chamber, and the third process chamber; wherein the first processing chamber is disposed on a first side of the transfer chamber; wherein the second processing chamber is disposed on a second side of the transfer chamber, the second side of the transfer chamber being opposite to the first side of the transfer chamber; Wherein, the third processing chamber is disposed on a third side of the transfer chamber, and the third side of the transfer chamber is perpendicular to the first side and the second side of the transfer chamber. The processing system of claim 12, further comprising a load lock chamber disposed on a fourth side of the transfer chamber, wherein the fourth side of the transfer chamber is connected to the The third side is opposite. The processing system of claim 12, wherein said transfer chamber includes at least one workpiece handling robot configured to transfer at least one workpiece to said first processing chamber, said second processing chamber and said processing station of said third processing chamber. The processing system of claim 12, further comprising a front end, wherein the front end is in process communication with the transfer chamber. A machining system for machining a plurality of workpieces, the machining system comprising: a first processing chamber having at least one processing station; a second processing chamber having at least two processing stations; and a front end in process communication with the first process chamber and the second process chamber; Wherein, the first processing chamber and the second processing chamber are arranged on a first linear side of the front end. The machining system of claim 16, wherein said front end includes at least one workpiece handling robot configured to transfer at least one workpiece to said first machining chamber and said second machining chamber. The processing station of the processing chamber. The machining system according to claim 17, wherein said at least one workpiece handling robot moves linearly within said front end in a horizontal direction parallel to said first straight side of said front end. The processing system according to claim 17, wherein said at least one workpiece handling robot linearly moves within said transfer chamber along a vertical direction perpendicular to said first linear side of said front end portion. The machining system of claim 17, wherein the front end is configured to engage one or more workpiece input devices, wherein the one or more workpiece input devices are along a second linear side of the front end provided that the second linear side is parallel to the first linear side, and wherein the at least one workpiece handling robot is configured to operate between the one or more workpiece input devices and the first processing chamber and the first processing chamber. The at least one workpiece is transferred between the processing stations of the two processing chambers.

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