TW202238155A - Method of calibrating signal transmission time of testing channel in chip automatic testing equipment - Google Patents

Method of calibrating signal transmission time of testing channel in chip automatic testing equipment Download PDF

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TW202238155A
TW202238155A TW110128052A TW110128052A TW202238155A TW 202238155 A TW202238155 A TW 202238155A TW 110128052 A TW110128052 A TW 110128052A TW 110128052 A TW110128052 A TW 110128052A TW 202238155 A TW202238155 A TW 202238155A
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channel
signal
channels
moment
numbered
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TWI758217B (en
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津 魏
經祥 張
吳艷平
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大陸商勝達克半導體科技（上海）有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
    • G01R31/318328—Generation of test inputs, e.g. test vectors, patterns or sequences for delay tests
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets

Abstract

The present invention relates to a semiconductor technology field. More particularly, the present disclosure may utilize self-testing equipment, an AC-cal carrier board, and an Odd-Even carrier board to provide a method of calibrating signal transmission time of testing channel in chip automatic testing equipment, in order to utilize current operating conditions of the chip automatic testing equipment to run self-calibration on its channel to improve operation accuracy of the automatic testing equipment.

Description

晶片自動測試機內測試通道訊號傳輸時間的校準方法Calibration method of test channel signal transmission time in chip automatic tester

本發明涉及半導體技術領域，具體的說是一種晶片自動測試機內測試通道訊號傳輸時間的校準方法。The invention relates to the technical field of semiconductors, in particular to a method for calibrating the transmission time of a test channel signal in an automatic chip tester.

當自動測試機運行時，需要準確的時間資訊來設置發送訊號和接收輸入訊號。 然而因為電路設計或者器件的原因， 導致每個通道上的訊號延遲不一樣，這就需要自動測試機對通道上的訊號傳輸時間進行校準，校準後的各通道訊號到達測試機末端時刻是相同的。When an automated tester is running, accurate time information is required to set up transmit signals and receive input signals. However, due to circuit design or device reasons, the signal delay on each channel is different. This requires the automatic tester to calibrate the signal transmission time on the channel. After calibration, the signal of each channel reaches the end of the tester at the same time. .

本發明為克服現有技術的不足，提供一種晶片自動測試機內測試通道訊號傳輸時間的校準方法，利用自動測試機上的現有條件對其通道進行自校準，以提高自動測試機工作的精準度。In order to overcome the deficiencies of the prior art, the present invention provides a method for calibrating the signal transmission time of the testing channel in the automatic testing machine for wafers. The existing conditions on the automatic testing machine are used to self-calibrate the channel to improve the working accuracy of the automatic testing machine.

為實現上述目的，設計一種晶片自動測試機內測試通道訊號傳輸時間的校準方法，包括：In order to achieve the above purpose, a method for calibrating the signal transmission time of the test channel in the chip automatic testing machine is designed, including:

（1）在自動測試機上安裝第一載具板；(1) Install the first carrier board on the automatic testing machine;

（2）藉由軟體對第一載具板上的埠通道進行配置，分別是1個接收訊號通道及127個發送訊號通道；(2) Use the software to configure the port channels on the first carrier board, which are 1 receiving signal channel and 127 sending signal channels;

（3）藉由發送訊號通道發射週期為100奈秒（ns）的發送訊號；(3) Sending signals with a period of 100 nanoseconds (ns) are transmitted through the sending signal channel;

（4）藉由接收訊號通道以50皮秒（ps）的步長，在上升沿或者下降沿左右32步長的範圍去搜索發送訊號的上升沿或者下降沿的變化時刻，並記錄該變化時刻為Tx1；(4) Use the receiving signal channel to search for the changing time of the rising or falling edge of the sending signal in the range of 32 steps around the rising or falling edge with a step size of 50 picoseconds (ps), and record the changing time for Tx1;

（5）選取接收訊號通道的最大時刻為第二時刻Tb，其餘接收訊號通道與最大接收訊號通道的差∆Tx= Txn-Tb用於補償，n為通道數；(5) Select the maximum time of the receiving signal channel as the second time Tb, and the difference between the other receiving signal channels and the maximum receiving signal channel ∆Tx=Txn-Tb is used for compensation, and n is the number of channels;

（6）將差∆Tx的補償資料補償在自動測試機的系統內；(6) Compensate the compensation data of the difference ∆Tx in the system of the automatic testing machine;

（7）如果步驟（6）中的差∆Tx的補償資料為最後一次補償，執行步驟（6）後，再次進行步驟（4），若Tx2在（-150ps，+150ps）的範圍內，即為通過，否則為不通過；(7) If the compensation data of the difference ∆Tx in step (6) is the last compensation, after performing step (6), proceed to step (4) again, if Tx2 is within the range of (-150ps, +150ps), that is pass, otherwise fail;

（8）在自動測試機上安裝第二載具板；(8) Install the second carrier board on the automatic testing machine;

（9）藉由軟體對第二載具板上的埠通道進行配置，配置奇數通道為發送訊號通道，與奇數通道連接的偶數通道為接收訊號通道；(9) Use the software to configure the port channels on the second carrier board, configure the odd-numbered channels as sending signal channels, and the even-numbered channels connected to the odd-numbered channels as receiving signal channels;

（10）設定偶數的接收訊號通道的固定的時刻去捕捉訊號的上升沿、下降沿的第二變化時刻；(10) Set the fixed time of the even-numbered receiving signal channel to capture the second change time of the rising edge and falling edge of the signal;

（11）藉由奇數的發送訊號通道發射週期為100ns的時脈訊號，每個週期的上升沿或者下降沿以50ps後移，直到接收訊號通道捕捉到發送訊號通道的上升沿或者下降沿的第二變化時刻，並記錄該第二變化時刻為對應於奇數通道的第三時刻；(11) The clock signal with a cycle of 100ns is transmitted by the odd-numbered sending signal channel, and the rising or falling edge of each cycle is moved back by 50ps until the receiving signal channel captures the first rising or falling edge of the sending signal channel. Two change moments, and record the second change moment as the third moment corresponding to the odd channel;

（12）配置偶數通道為發送訊號通道，與偶數通道連接的奇數通道為接收訊號通道，重複步驟（11），並記錄該第二變化時刻為對應於偶數通道的該第三時刻；(12) Configure the even-numbered channel as the sending signal channel, and the odd-numbered channel connected to the even-numbered channel as the receiving signal channel, repeat step (11), and record the second change moment as the third moment corresponding to the even-numbered channel;

（13）選取輸出訊號部分通道的最大時刻為Tb’，其餘輸出訊號部分通道與最大輸出訊號部分通道的差∆Tx’= Txn’-Tb’用於補償，n為通道數；(13) Select the maximum moment of the output signal part channel as Tb', and the difference between the other output signal part channels and the maximum output signal part channel ∆Tx'= Txn'-Tb' is used for compensation, n is the number of channels;

（14）將∆Tx’的補償資料補償在自動測試機系統內；(14) Compensate the compensation data of ∆Tx’ in the automatic testing machine system;

（15）如果步驟（14）中的∆Tx’的補償資料為最後一次補償，在執行步驟（14）後，再次進行步驟（11）及步驟（12），以紀錄第二變化時刻為第四時刻，若該第四時刻在（-150ps，+150ps）的範圍內，即為通過，否則為不通過；(15) If the compensation data of ∆Tx' in step (14) is the last compensation, after performing step (14), perform steps (11) and (12) again to record the second change moment as the fourth time, if the fourth moment is within the range of (-150ps, +150ps), it is passed, otherwise it is not passed;

（16）繼續重複步驟（1），至少3次後結束。(16) Continue to repeat step (1), at least 3 times before the end.

所述的AC-cal載具板上的每個埠的一端分別通過線路與自動測試機相應的埠連接，並且AC-cal載具板上的每個埠的另一端通過線路匯集在一起。One end of each port on the AC-cal carrier board is respectively connected to the corresponding port of the automatic test machine through a line, and the other end of each port on the AC-cal carrier board is collected together through a line.

所述的AC-cal載具板上有128個通道。The AC-cal carrier board has 128 channels.

所述的Odd-Even載具板上的埠通過線路依次兩兩連接。The ports on the Odd-Even carrier board are connected two by two in sequence through lines.

所述的Odd-Even載具板上有128個通道。The described Odd-Even carrier board has 128 channels.

本發明同現有技術相比，提供一種晶片自動測試機內測試通道訊號傳輸時間的校準方法，利用自動測試機上的現有條件對其通道進行自校準，以提高自動測試機工作的精準度。Compared with the prior art, the present invention provides a method for calibrating the signal transmission time of the testing channel in the automatic testing machine for wafers, and uses the existing conditions on the automatic testing machine to self-calibrate the channel to improve the working accuracy of the automatic testing machine.

下面根據附圖對本發明做進一步的說明。The present invention will be further described below according to the accompanying drawings.

如圖1所示，一種晶片自動測試機內測試通道訊號傳輸時間的校準方法100，具體校準方法如下：As shown in FIG. 1 , a method 100 for calibrating the transmission time of a test channel signal in an automatic wafer tester, the specific calibration method is as follows:

（1）在自動測試機上安裝第一載具板（例如為AC-cal載具板）；(1) Install the first carrier board (such as AC-cal carrier board) on the automatic testing machine;

（2）藉由軟體對AC-cal載具板上的埠通道進行配置，分別是1個接收訊號通道（標示為compare）及127個發送訊號通道（標示為force）；(2) Use the software to configure the port channels on the AC-cal carrier board, which are 1 receiving signal channel (marked as compare) and 127 sending signal channels (marked as force);

（3）藉由發送訊號通道（force）發射週期為100奈秒（ns）的發送訊號；(3) Transmit a signal with a period of 100 nanoseconds (ns) through the transmission signal channel (force);

（4）藉由接收訊號通道（compare）以50皮秒（ps）的步長，在上升沿或者下降沿左右32步長的範圍去搜索發送訊號的上升沿或者下降沿的變化時刻，記錄該變化時刻為Tx1；(4) Use the receiving signal channel (compare) to search for the changing moment of the rising or falling edge of the sending signal in the range of 32 steps around the rising or falling edge with a step of 50 picoseconds (ps), and record the The change time is Tx1;

（5）選取接收訊號通道（compare）的最大時刻為Tb，其餘接收訊號通道（compare）與最大接收訊號通道（compare）的差∆Tx= Txn-Tb用於補償，n為通道數；(5) Select the maximum time of the receiving signal channel (compare) as Tb, and the difference between the remaining receiving signal channels (compare) and the maximum receiving signal channel (compare) ∆Tx=Txn-Tb is used for compensation, n is the number of channels;

（6）將∆Tx的補償資料補償在自動測試機系統內；(6) Compensate the compensation data of ∆Tx in the automatic testing machine system;

（7）如果步驟（6）中的∆Tx的補償資料為最後一次補償，補償資料後（即執行步驟（6）之後），再次進行步驟（4），並記錄變化時刻為Tx2，若Tx2在（-150ps，+150ps）的範圍內，即為通過，否則為不通過；(7) If the compensation data of ∆Tx in step (6) is the last compensation, after compensating the data (i.e. after executing step (6)), proceed to step (4) again, and record the change time as Tx2, if Tx2 is in In the range of (-150ps, +150ps), it is passed, otherwise it is not passed;

（8）在自動測試機上安裝第二載具板（例如為Odd-Even載具板）；(8) Install the second carrier board (for example, Odd-Even carrier board) on the automatic testing machine;

（9）藉由軟體對Odd-Even載具板上的埠通道進行配置，配置奇數通道為發送訊號通道（force），與奇數通道連接的偶數通道為接收訊號通道（compare）；(9) Use the software to configure the port channels on the Odd-Even carrier board, configure the odd-numbered channels as the sending signal channel (force), and the even-numbered channels connected to the odd-numbered channels as the receiving signal channel (compare);

（10）設定偶數的接收訊號通道（compare）在固定的時刻去捕捉訊號的上升沿、下降沿的變化時刻；(10) Set the even-numbered receiving signal channel (compare) to capture the rising and falling edges of the signal at a fixed time;

（11）藉由奇數的發送訊號通道（force）發射週期為100ns的時脈訊號，每個週期的上升沿或者下降沿以50ps後移，直到接收訊號通道（compare）捕捉到發送訊號通道（force）的上升沿或者下降沿的變化時刻，並記錄該變化時刻為對應於奇數通道的Tx1’；(11) The clock signal with a period of 100ns is transmitted by an odd-numbered transmission signal channel (force), and the rising or falling edge of each cycle is moved back by 50ps until the receiving signal channel (compare) captures the transmission signal channel (force) ), and record the change moment as Tx1' corresponding to the odd channel;

（12）配置偶數通道為發送訊號通道（force），與偶數通道連接的奇數通道為接收訊號通道（compare），重複步驟（11），並記錄該變化時刻為對應於偶數通道的Tx1’；(12) Configure the even-numbered channel as the sending signal channel (force), and the odd-numbered channel connected to the even-numbered channel as the receiving signal channel (compare), repeat step (11), and record the change time as Tx1’ corresponding to the even-numbered channel;

（13）選取輸出訊號部分（Drive）通道的最大時刻為Tb’，其餘輸出訊號部分（Drive）通道與最大輸出訊號部分（Drive）通道的差∆Tx’= Txn’-Tb’用於補償，n為通道數；(13) Select the maximum moment of the output signal part (Drive) channel as Tb', and the difference between the other output signal part (Drive) channels and the maximum output signal part (Drive) channel ∆Tx'= Txn'-Tb' is used for compensation, n is the number of channels;

（14）將∆Tx’的補償資料補償在自動測試機系統內；(14) Compensate the compensation data of ∆Tx’ in the automatic testing machine system;

（15）如果步驟（14）中的∆Tx’的補償資料為最後一次補償，補償資料後，再次進行步驟（11）及步驟（12），以記錄變化時刻為Tx2’，若Tx2’在（-150ps，+150ps）的範圍內，即為通過，否則為不通過；(15) If the compensation data of ∆Tx' in step (14) is the last compensation, after compensating the data, perform steps (11) and (12) again to record the change time as Tx2', if Tx2' is in ( -150ps, +150ps), it is passed, otherwise it is not passed;

（16）繼續重複步驟（1），至少3次後結束。(16) Continue to repeat step (1), at least 3 times before the end.

如圖2所示，AC-cal載具板上的每個埠（例如為S0_P1、S0_P2、S0_P3與S0_P4）的一端分別通過線路與自動測試機相應的埠連接，並且AC-cal載具板上的每個埠的另一端通過線路匯集在一起。所述的AC-cal載具板上有128個通道（例如為Pin0～Pin127 ）。As shown in Figure 2, one end of each port (such as S0_P1, S0_P2, S0_P3, and S0_P4) on the AC-cal carrier board is connected to the corresponding port of the automatic tester through a line, and the AC-cal carrier board The other ends of each port are brought together by wires. The AC-cal carrier board has 128 channels (for example, Pin0-Pin127).

如圖3所示，Odd-Even載具板上的埠例如為S0_P1、S0_P2、S0_P3與S0_P4）通過線路依次兩兩連接。所述的Odd-Even載具板上有128個通道（例如為Pin0～Pin127 ）。As shown in FIG. 3 , the ports on the Odd-Even carrier board are, for example, S0_P1, S0_P2, S0_P3, and S0_P4) connected two by two sequentially through wires. The said Odd-Even carrier board has 128 channels (for example, Pin0-Pin127).

如圖4所示，AC-cal載具板上使用127個通道（例如為CH0～CH126）的總和訊號做為參考，127個通道同時發送訊號， 餘下的1個通道（例如為CH127）用來抓取這個總和訊號；反覆重複以上步驟（4），獲得所有通道的接收通道抓取發送訊號的時間；最後，取最長時間作為基準，其他的訊號與最長時間的偏差作為延遲時間補償。換句話說，將每個通道與剩餘的127個通道進行量測，以取得128筆資料，並取該些資料中的最大值作為參考基準，以獲得每個通道與該最大值之間的差值來做為補償。As shown in Figure 4, the AC-cal carrier board uses the sum signal of 127 channels (such as CH0~CH126) as a reference, 127 channels send signals at the same time, and the remaining 1 channel (such as CH127) is used for Capture this sum signal; repeat the above step (4) repeatedly to obtain the time when the receiving channel captures the sending signal of all channels; finally, take the longest time as a benchmark, and the deviation of other signals from the longest time is used as delay time compensation. In other words, measure each channel with the remaining 127 channels to obtain 128 pieces of data, and take the maximum value of these data as a reference to obtain the difference between each channel and the maximum value value as compensation.

其中，取127個總和訊號的原因：總和相對穩定，1個通道的偏差對總和訊號影響僅有百分之1左右。Among them, the reason for taking 127 sum signals: the sum is relatively stable, and the deviation of one channel only affects the sum signal by about 1%.

如圖5、圖6所示，Odd-Even載具板，是奇數通道（例如為CH1、CH3、CH5、….、CH127）和偶數通道（例如為CH0、CH2、CH4、….、CH126）互聯；在測試的末端，奇數通道和偶數通道是相鄰距離很近的通道，互聯的長度非常短，可以忽略不計；經過AC-cal載具板接收端校準之後，每對Odd-Even載具板的通道中的接收通道作為參考，校準對面的發送通道部分；所有的發送通道同時發訊號，接收通道端抓取發送通道的訊號，記錄抓取時間Tx；將最長通道的時間Tb作為基準，其他的通道與參考通道的時間差t= Tb-Tx, 用作發送延遲時間補償。As shown in Figure 5 and Figure 6, Odd-Even carrier boards are odd-numbered channels (such as CH1, CH3, CH5, ..., CH127) and even-numbered channels (such as CH0, CH2, CH4, ..., CH126) Interconnection; at the end of the test, odd-numbered channels and even-numbered channels are very close to each other, and the length of the interconnection is very short and can be ignored; after calibration at the receiving end of the AC-cal carrier board, each pair of Odd-Even vehicles The receiving channel in the channel of the board is used as a reference to calibrate the sending channel part on the opposite side; all sending channels send signals at the same time, the receiving channel end captures the signal of the sending channel, and records the capture time Tx; the time Tb of the longest channel is used as a benchmark, The time difference t= Tb-Tx between other channels and the reference channel is used for sending delay time compensation.

至少重複3次以上步驟的原因是提高校準的精度。The reason for repeating the above steps at least 3 times is to increase the accuracy of the calibration.

在未校準的狀態下各個通道處於雜散分佈， 其合訊號上升比較慢，以其作為參考訊號的中心（即 ½高電平的位置）的時間分佈寬度就會比較寬。In the uncalibrated state, each channel is in a spurious distribution, and the combined signal rises relatively slowly, and the time distribution width of the center of the reference signal (that is, the position of ½ high level) will be relatively wide.

通過一次校準之後，各通道訊號收斂，獲得總和訊號坡度變陡，接收通道抓取參考訊號中心點的位置也會收斂。After one calibration, the signals of each channel converge, the slope of the obtained sum signal becomes steeper, and the position of the center point of the reference signal captured by the receiving channel also converges.

經過兩次之後各通道上的訊號一致性很好，第三次作為對比和校驗。After two times, the signal consistency on each channel is very good, and the third time is used as a comparison and verification.

各通道校準的資料被存在快閃式記憶體（Flash）中，當自動測試機啟動時，讀取Flash，將資料寫入硬體的補償單元。The calibration data of each channel is stored in the flash memory (Flash). When the automatic testing machine is started, the Flash is read and the data is written into the compensation unit of the hardware.

100:晶片自動測試機內測試通道訊號傳輸時間的校準方法 Pin0~Pin127, CH0~CH127:通道 S0_P1, S0_P2, S0_P3, S0_P4:埠 force:發送訊號通道 compare:接收訊號通道 100: Calibration method of test channel signal transmission time in automatic chip tester Pin0~Pin127, CH0~CH127: channel S0_P1, S0_P2, S0_P3, S0_P4: ports force: send signal channel compare: receive signal channel

［圖1］為本發明方法流程圖； ［圖2］為AC-cal載具板的線路連接圖； ［圖3］為Odd-Even載具板的線路連接圖； ［圖4］為AC-cal載具板的訊號走向示意圖； ［圖5］為Odd-Even載具板上奇數通道為發射通道的訊號走向示意圖；以及 ［圖6］為Odd-Even載具板上偶數通道為發射通道的訊號走向示意圖。 [Fig. 1] is the flow chart of the method of the present invention; [Figure 2] is the circuit connection diagram of the AC-cal carrier board; [Figure 3] is the circuit connection diagram of the Odd-Even carrier board; [Figure 4] is a schematic diagram of the signal direction of the AC-cal carrier board; [Figure 5] is a schematic diagram of the signal direction of the odd-numbered channels on the Odd-Even carrier board as the transmitting channel; and [Figure 6] is a schematic diagram of the signal direction of the even-numbered channel on the Odd-Even carrier board as the transmitting channel.

100:晶片自動測試機內測試通道訊號傳輸時間的校準方法 100: Calibration method of test channel signal transmission time in automatic chip tester

Claims (5)

一種晶片自動測試機內測試通道訊號傳輸時間的校準方法，包括以下步驟： （1）在一自動測試機上安裝一第一載具板； （2）藉由軟體對該第一載具板上的埠通道進行配置，分別是1個接收訊號通道及127個發送訊號通道； （3）藉由該127個發送訊號通道發射週期為100奈秒（ns）的一發送訊號； （4）藉由該接收訊號通道以50皮秒（ps）的步長，在上升沿或者下降沿左右32步長的範圍去搜索該發送訊號的上升沿或者下降沿的第一變化時刻，並記錄該第一變化時刻為一第一時刻； （5）選取該接收訊號通道的最大時刻為一第二時刻，並計算其餘接收訊號通道與最大的該接收訊號通道的差∆Tx= Txn-Tb用於補償，n為通道數； （6）將該差∆Tx的補償資料補償在該自動測試機的系統內； （7）如果步驟（6）中的該差∆Tx的補償資料為最後一次補償，執行步驟（6）後，再次進行步驟（4），並記錄該第一變化時刻為一第二時刻，若該第二時刻在（-150ps，+150ps）的範圍內，即為通過，否則為不通過； （8）在該自動測試機上安裝一第二載具板； （9）通過軟體對該第二載具板上的埠通道進行配置，配置奇數通道為發送訊號通道，與該奇數通道連接的偶數通道為接收訊號通道； （10）設定偶數的接收訊號通道在固定的時刻去捕捉訊號的上升沿、下降沿的一第二變化時刻； （11）藉由奇數的發送訊號通道發射週期為100ns的時脈訊號，每個週期的上升沿或者下降沿以50ps後移，直到偶數的接收訊號通道捕捉到奇數的發送訊號通道的上升沿或者下降沿的該第二變化時刻，並記錄該第二變化時刻為對應於該奇數通道的一第三時刻； （12）配置偶數通道為發送訊號通道，與偶數通道連接的奇數通道為接收訊號通道，重複步驟（11），並記錄該第二變化時刻為對應於該偶數通道的該第三時刻； （13）選取輸出訊號部分通道的最大時刻為Tb’，其餘輸出訊號部分通道與最大輸出訊號部分通道的差∆Tx’= Txn’-Tb’用於補償，n為通道數； （14）將∆Tx’的補償資料補償在自動測試機系統內； （15）如果步驟（14）中的∆Tx’的補償資料為最後一次補償，在執行步驟（14）後，再次進行步驟（11）及步驟（12），以記錄該第二變化時刻為一第四時刻，若該第四時刻在（-150ps，+150ps）的範圍內，即為通過，否則為不通過； （16）繼續重複步驟（1），至少3次後結束。 A method for calibrating the transmission time of a test channel signal in an automatic chip tester, comprising the following steps: (1) installing a first carrier board on an automatic testing machine; (2) Configure the port channels on the first carrier board by software, which are 1 receiving signal channel and 127 sending signal channels; (3) Transmitting a sending signal with a period of 100 nanoseconds (ns) through the 127 sending signal channels; (4) Use the receiving signal channel to search for the first change moment of the rising or falling edge of the sending signal in the range of 32 steps around the rising or falling edge with a step of 50 picoseconds (ps), and Recording the first change moment as a first moment; (5) Select the maximum moment of the received signal channel as a second moment, and calculate the difference between the remaining received signal channels and the largest received signal channel ∆Tx=Txn-Tb for compensation, n is the number of channels; (6) Compensate the compensation data of the difference ∆Tx in the system of the automatic testing machine; (7) If the compensation data of the difference ∆Tx in step (6) is the last compensation, after performing step (6), proceed to step (4) again, and record the first change moment as a second moment, if If the second moment is within the range of (-150ps, +150ps), it is passed, otherwise it is not passed; (8) installing a second carrier board on the automatic testing machine; (9) Configure the port channels on the second carrier board through software, configure odd-numbered channels as sending signal channels, and even-numbered channels connected to the odd-numbered channels as receiving signal channels; (10) Set the even-numbered receiving signal channels to capture the rising edge and falling edge of the signal at a fixed moment, a second change moment; (11) The clock signal with a period of 100ns is transmitted by the odd-numbered sending signal channel, and the rising or falling edge of each cycle is shifted back by 50ps until the even-numbered receiving signal channel captures the rising edge or the odd-numbered sending signal channel. The second change moment of the falling edge, and record the second change moment as a third moment corresponding to the odd channel; (12) Configure the even-numbered channel as the sending signal channel, and the odd-numbered channel connected to the even-numbered channel as the receiving signal channel, repeat step (11), and record the second change moment as the third moment corresponding to the even-numbered channel; (13) Select the maximum moment of the output signal part channel as Tb', and the difference between the other output signal part channels and the maximum output signal part channel ∆Tx'= Txn'-Tb' is used for compensation, n is the number of channels; (14) Compensate the compensation data of ∆Tx’ in the automatic testing machine system; (15) If the compensation data of ∆Tx' in step (14) is the last compensation, after performing step (14), perform step (11) and step (12) again to record the second change moment as a For the fourth moment, if the fourth moment is within the range of (-150ps, +150ps), it is passed, otherwise it is not passed; (16) Continue to repeat step (1), at least 3 times before the end. 如請求項1之晶片自動測試機內測試通道訊號傳輸時間的校準方法，其中該第一載具板上的每個埠的一端分別通過線路與該自動測試機相應的埠連接，並且該第二載具板上的每個埠的另一端通過線路匯集在一起。Such as the calibration method of the test channel signal transmission time in the chip automatic testing machine of claim 1, wherein one end of each port on the first carrier board is respectively connected to the corresponding port of the automatic testing machine through a line, and the second The other end of each port on the carrier board is brought together by wires. 如請求項1或2之晶片自動測試機內測試通道訊號傳輸時間的校準方法，其中該第二載具板上有128個通道。The method for calibrating the transmission time of the test channel signal in the chip automatic testing machine as claimed in item 1 or 2, wherein there are 128 channels on the second carrier board. 如請求項1之晶片自動測試機內測試通道訊號傳輸時間的校準方法，其中該第二載具板上的埠通過線路依次兩兩連接。The method for calibrating the transmission time of the test channel signal in the chip automatic testing machine as claimed in item 1, wherein the ports on the second carrier board are connected in pairs by lines. 如請求項1或4之晶片自動測試機內測試通道訊號傳輸時間的校準方法，其中該第二載具板上有128個通道。The method for calibrating the transmission time of the test channel signal in the chip automatic testing machine as claimed in claim 1 or 4, wherein there are 128 channels on the second carrier board.
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