TW202219486A - Observation carrier for microscope - Google Patents

Abstract

An observation carrier for a microscope is provided. The observation carrier includes a bottom base, an upper cover and a chip. The upper cover is detachably disposed on the bottom base and has a window. The chip is integrated on the upper cover and includes a main body and a plurality of electrodes. The main body has an observation region, and the observation region is corresponding to the window and adapted to carry a sample material. The electrodes are disposed on the main body and connected to the observation region.

Description

microscope observation stage

The present invention relates to an observation stage, and in particular, to a microscope observation stage.

Optical microscopes and electron microscopes can be used to observe nanoscale samples, which need to be supported on an observation stage for observation. For the sample material that needs to be energized for observation, it is generally deposited and coated on a wafer, and the wafer can be mounted on the observation stage and used as a medium for energizing the sample material. Before each observation is performed, the user needs to install the wafer on the observation stage, and remove the wafer from the observation stage after the observation, which is complicated and inconvenient to use.

The invention provides a microscope observation stage, which is relatively simple to use.

The microscope observation stage of the present invention includes a base, an upper cover and a wafer. The upper cover is detachably arranged on the base and has a window. The chip is integrated on the upper cover and includes a body and a plurality of electrodes. The body has an observation area, which corresponds to the window and is suitable for carrying a sample material. These electrodes are arranged on the body and connected to the observation area.

In an embodiment of the present invention, the above-mentioned chip is glued to the upper cover.

In an embodiment of the present invention, the above-mentioned microscope observation stage includes a liquid containing component, the liquid containing component is disposed on the base and adjacent to the wafer, and the liquid containing component is suitable for containing a conductive liquid.

In an embodiment of the present invention, a flow channel is formed after the above-mentioned wafer and the liquid containing component are joined, the flow channel is suitable for accommodating a conductive liquid, the sample material includes an anode material and a cathode material, and part of the flow channel is located between the anode material and the cathode material between materials.

In an embodiment of the present invention, the above-mentioned microscope observation stage includes a sealing ring, and the sealing ring is disposed between the base and the upper cover and surrounds the wafer.

In an embodiment of the present invention, the above-mentioned microscope observation stage includes an energizing component. The energizing component is disposed on the base and has a plurality of pins, and the pins respectively contact the electrodes of the wafer.

In an embodiment of the present invention, the above-mentioned microscope observation stage includes a sealing ring, the base includes a bottom plate and a cover body, the cover body and the bottom plate are assembled to jointly accommodate the energized components, and the sealing ring is disposed between the bottom plate and the cover body. between and around energized components.

In an embodiment of the present invention, the above-mentioned microscope observation stage includes a screw cover, wherein the screw cover is detachably arranged on the base and restricts the upper cover to the base.

In an embodiment of the present invention, the above-mentioned base has at least one positioning groove, and the screw cap has at least one positioning post, and the at least one positioning post is adapted to be positioned in the at least one positioning slot with the rotation of the screw cap relative to the base.

In an embodiment of the present invention, the above-mentioned screw cap is adapted to rotate relative to the base along a rotation axis, the upper cover has a positioning flange, the base has a positioning recess, and the positioning flange is positioned in the positioning recess to prevent the upper cover from sliding The axis of rotation rotates relative to the base.

Based on the above, in the microscope observation stage of the present invention, the wafer is directly integrated with the upper cover. Accordingly, the user can omit the step of assembling the wafer to the upper cover before each observation is performed, and can omit the step of removing the wafer from the upper cover after the observation, thereby making the microscope observation stage easier to use in use. Simple.

FIG. 1 is a perspective view of a microscope observation stage according to an embodiment of the present invention. FIG. 2 is an exploded view of the microscope observation stage of FIG. 1 . FIG. 3 is a perspective view of a partial structure of the microscope observation stage of FIG. 1 . FIG. 4 is a side view of the microscope observation stage of FIG. 3 . Please refer to FIGS. 1 to 4 , the microscope observation stage 100 of this embodiment includes a base 110 and an upper cover 120 . The upper cover 120 is detachably disposed on the base 110 and has a window 120a. The microscope can observe the sample in the microscope observation stage 100 through the window 120a.

FIG. 5 is a perspective view of the upper cover of FIG. 1 . FIG. 6 shows that the chip is integrated into the top cover of FIG. 5 . For clarity of the rest of the drawings, only the wafer 130 is shown in FIG. 6 . Please refer to FIG. 5 and FIG. 6 , the microscope observation stage 100 of this embodiment further includes a chip 130 . The chip 130 is integrated with the upper cover 120 by gluing or other suitable methods and includes a body 132 and a plurality of electrodes 134 (shown as three form of electrodes). The body 132 has an observation area R, the observation area R corresponds to the window 120a of the upper cover 120 and is suitable for carrying a sample material, for example, the sample material is placed in the observation area R by deposition coating. The electrodes 134 are disposed on the body 132 and are connected to the observation area R through the lines 134a. The sample material in the observation region R can be energized through these electrodes 134 to facilitate its observation.

As described above, in the microscope observation stage 100 of the present embodiment, the wafer 130 is directly integrated with the upper cover 120 . Accordingly, the user can omit the step of installing the wafer on the upper cover before each observation, and can omit the step of removing the wafer from the upper cover after the observation, so that the microscope observation stage 100 can be used in use. Simpler.

FIG. 7 is a schematic partial cross-sectional view of the wafer of FIG. 6 after bonding with the liquid containment assembly. Please refer to FIGS. 2 , 4 and 7 . In detail, the microscope observation stage 100 of the present embodiment further includes a liquid accommodating component 140 . The liquid accommodating component 140 is disposed on the base 110 and adjacent to the wafer 130 (shown in FIG. 6 ). ), the liquid containment assembly 140 is adapted to contain a conductive liquid (electrolyte). After the wafer 130 is joined with the liquid containing component 140, a flow channel 130a can be formed in the space between them, and the conductive liquid in the liquid containing component 140 can flow to the flow channel 130a, and the flow channel 130a is suitable for containing the conductive liquid 50, the sample material It includes an anode material 62 and a cathode material 64 , and part of the flow channel 130 a is located between the anode material 62 and the cathode material 64 . Anode material 62 and cathode material 64 receive current from electrode 134 (shown in FIG. 6 ) through conductive layer 136 so that the sample material flows between anode material 62 and cathode material 64 by the action of the current 130a produces a reaction (eg, a redox reaction). Thus, it can be observed with the beam provided by the electron beam E optical measuring instrument (eg: optical microscope) provided by the electron microscope to study its electrochemical plating/stripping, redox or half-reaction, electrolyte and metal displacement Mechanisms such as reactions, dendrite growth of the material change. In addition, it is also possible to study the changes in the conductive liquid (electrolyte) liquid before and after the current reaction or immediately.

Please refer to FIG. 2 to FIG. 4 , the base 110 of the present embodiment can be configured with an elastic member 150 and a top support member 160 . The top support member 160 is located between the elastic member 150 and the liquid accommodating component 140 , and the elastic member 150 can utilize the elasticity of the elastic member 150 . The liquid containing component 140 is supported by force, so that the liquid containing component 140 is pressed against the wafer 130 .

The present invention does not limit the observation mode of the sample, which can only use the conductive liquid contained in the liquid containing component 140 to assist the observation as described above, or can use external power to deliver supplementary conductive liquid to assist the observation.

FIG. 8 is a perspective view of a part of the microscope observation stage of FIG. 1 . As shown in FIG. 2 to FIG. 4 and FIG. 8 , the microscope observation stage 100 of the present embodiment further includes an electrification component 170 . The electrification component 170 is disposed on the base 110 and has a plurality of pins 172 (shown in FIG. 8 ). These The pins 172 are used to respectively contact the electrodes 134 (shown in FIG. 6 ) of the chip 130 , so that the current from the external power source can pass through the pins 172 and reach the chip 130 .

In this embodiment, the microscope observation stage 100 further includes a sealing ring 180 , and the sealing ring 180 is disposed between the base 110 and the upper cover 120 and surrounds the wafer 130 (shown in FIG. 6 ). The sealing ring 180 is, for example, a rubber ring or other elastic sealing material, so as to isolate the wafer 130 from the outside, so as to facilitate the observation. In addition, the base 110 of this embodiment includes a bottom plate 112 and a cover body 114 , and the cover body 114 and the bottom plate 112 are assembled together to accommodate the energizing component 170 . The microscope observation stage 100 further includes a sealing ring 190 . The sealing ring 190 is disposed between the bottom plate 112 and the cover body 114 and surrounds the energizing component 170 . The sealing ring 190 is, for example, a rubber ring or other elastic sealing material, so as to isolate the energizing component 170 from the outside, so as to facilitate the observation. The sealing ring 180 also has the function of buffering the pressing force.

The microscope observation stage 100 of the present embodiment further includes a screw cover C. The screw cover C is detachably disposed on the base 110 and restricts the upper cover 120 to the base 110 . When the screw cap C is pressed and locked on the base 110 along the rotation axis A, an average pressing force can be generated at the same time, so that the sealing ring 180 in contact with the base 110 and the upper cover 120 produces a sealing effect, which can isolate the outside world from the observation area R the sample to be tested. FIG. 9 is a perspective view of the screw cap of FIG. 1 . Specifically, the base 110 has at least one positioning groove 110a (as shown in FIG. 2 and FIG. 8 ), the screw cover C has at least one positioning column P (shown as multiple) as shown in FIG. 9 , these positioning columns P is adapted to be respectively positioned in these positioning grooves 110a as the screw cap C rotates relative to the base 110 along the rotation axis A (marked in FIG. 1 ). As shown in FIG. 2 and FIG. 5 , the upper cover 120 of this embodiment has a positioning flange 1201 , the base 110 has a positioning recess 110 b as shown in FIGS. 2 and 8 , and the positioning flange 1201 is positioned in the positioning recess 110b prevents the upper cover 120 from being unexpectedly driven by the screw cover C to rotate relative to the base 110 along the rotation axis A.

To sum up, in the microscope observation stage of the present invention, the wafer is directly integrated with the upper cover. Accordingly, the user can omit the step of assembling the wafer to the upper cover before each observation is performed, and can omit the step of removing the wafer from the upper cover after the observation, thereby making the microscope observation stage easier to use in use. Simple.

50: Conductive liquid 62: Anode material 64: Cathode Materials 100: Microscope observation stage 110: Base 110a: Positioning slot 110b: Positioning recesses 112: Bottom plate 114: cover body 120: upper cover 1201: Positioning flange 120a: Windows 130: Wafer 130a: runner 132: Ontology 134: Electrodes 134a: Line 136: Conductive layer 140: Liquid Containment Assembly 150: elastic parts 160: top support 170: Energized Components 172: pin 180, 190: sealing ring A: Rotation axis C: screw cap E: electron beam P: Positioning post R: observation area

FIG. 1 is a perspective view of a microscope observation stage according to an embodiment of the present invention. FIG. 2 is an exploded view of the microscope observation stage of FIG. 1 . FIG. 3 is a perspective view of a partial structure of the microscope observation stage of FIG. 1 . FIG. 4 is a side view of the microscope observation stage of FIG. 3 . FIG. 5 is a perspective view of the upper cover of FIG. 1 . FIG. 6 shows that the chip is integrated into the top cover of FIG. 5 . FIG. 7 is a schematic partial cross-sectional view of the wafer of FIG. 6 after bonding with the liquid containment assembly. FIG. 8 is a perspective view of a part of the microscope observation stage of FIG. 1 . FIG. 9 is a perspective view of the screw cap of FIG. 1 .

120: upper cover

1201: Positioning flange

130: Wafer

132: Ontology

134: Electrodes

134a: Line

R: observation area

Claims (10)

A microscope observation stage, comprising: a base; an upper cover detachably disposed on the base and having a window; and A wafer integrated with the upper cover and comprising a body and a plurality of electrodes, wherein the body has an observation area, the observation area corresponds to the window and is suitable for carrying a sample material, the electrodes are disposed on the body and connected to the observation area. The microscope observation stage of claim 1, wherein the wafer is glued to the upper cover. The microscope observation stage of claim 1, comprising a liquid containing component, wherein the liquid containing component is disposed on the base and adjacent to the wafer, and the liquid containing component is suitable for containing a conductive liquid. The microscope observation stage according to claim 3, wherein the wafer is joined with the liquid containing component to form a flow channel, the flow channel is suitable for containing a conductive liquid, the sample material includes an anode material and a cathode material, part of the A flow channel is located between the anode material and the cathode material. The microscope observation stage of claim 1, comprising a sealing ring, wherein the sealing ring is disposed between the base and the upper cover and surrounds the wafer. The microscope observation stage as claimed in claim 1, comprising an electrification component, wherein the electrification component is disposed on the base and has a plurality of pins, and the pins contact the electrodes of the wafer respectively. The microscope observation stage as claimed in claim 6, comprising a sealing ring, wherein the base comprises a bottom plate and a cover, the cover and the bottom plate are assembled to accommodate the energizing component together, and the sealing ring is disposed on the bottom plate between the cover body and surrounding the current-carrying component. The microscope observation stage according to claim 1, comprising a screw cap, wherein the screw cap is detachably arranged on the base and the upper cover is limited to the base. The microscope observation stage according to claim 8, wherein the base has at least one positioning groove, and the screw cap has at least one positioning post, and the at least one positioning post is adapted to be positioned with the rotation of the screw cap relative to the base in the at least one positioning groove. The microscope observation stage of claim 8, wherein the screw cover is adapted to rotate relative to the base along a rotation axis, the upper cover has a positioning flange, the base has a positioning recess, and the positioning flange is positioned at The positioning recess prevents the upper cover from rotating relative to the base along the rotation axis.

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