TW202210550A - Flexible polymer blend, electronic device and resistive memory device comprising the same, and manufacturing method of resistive memory device - Google Patents

Flexible polymer blend, electronic device and resistive memory device comprising the same, and manufacturing method of resistive memory device Download PDF

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TW202210550A
TW202210550A TW109129930A TW109129930A TW202210550A TW 202210550 A TW202210550 A TW 202210550A TW 109129930 A TW109129930 A TW 109129930A TW 109129930 A TW109129930 A TW 109129930A TW 202210550 A TW202210550 A TW 202210550A
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polymer blend
polymer
electrode layer
pfn
resistive memory
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TWI740628B (en
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陳文章
謝蕙璟
加恩 吳
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國立臺灣大學
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Abstract

The present invention provides a flexible polymer blend, electronic device and resistive memory device comprising the same, and manufacturing method of resistive memory device. The polymer blend comprises a first material, comprising a poly(butylene succinate) or a derivative thereof; and a second material, comprising a conductive organic polymer; wherein the polymer blend is formed by blending the first material and the second material, and the polymer blend is biodegradable. The present invention can be applied to environmentally-friendly electronic products and exhibit excellent performance.

Description

柔性之聚合物摻合體及包含其之電子裝置及電阻式記憶體裝置以及電阻式記憶體裝置之製造方法Flexible polymer blends and electronic devices and resistive memory devices including the same and methods of making resistive memory devices

本發明係關於一種柔性之聚合物摻合體及包含其之電子裝置,特別係該聚合物摻合體是可生物降解的聚合物彈性體,並且可作為基底和電荷捕獲記憶體層集成的柔性電阻式記憶體裝置。The present invention relates to a flexible polymer blend and an electronic device comprising the same, in particular the polymer blend is a biodegradable polymer elastomer and can be used as a flexible resistive memory integrated with a substrate and a charge trapping memory layer body device.

與基於無機材料的電子設備相比,基於聚合物的電子設備由於其靈活性、低成本潛力、易加工性、良好的可擴展性及數據儲存容量大等特性,引起了廣泛的研究興趣。然而,這些合成聚合物主要來自化石燃料,可能導致嚴重的環境污染和迅速增長的廢棄物。Compared with inorganic material-based electronic devices, polymer-based electronic devices have attracted extensive research interest due to their flexibility, low-cost potential, ease of processing, good scalability, and large data storage capacity. However, these synthetic polymers are mainly derived from fossil fuels, which can lead to serious environmental pollution and rapidly growing waste.

為了解決這個問題,已有在有機電子裝置中使用各種可再生或可生物降解的聚合物作為基材、介電層或活性層,例如脫氧核糖核酸、多醣和生物基脂肪族聚酯等,然而,即便這些永續材料具有足夠的物理特性,但將其實際應用於設備時,仍然面臨著嚴峻的挑戰。To solve this problem, various renewable or biodegradable polymers have been used in organic electronic devices as substrates, dielectric layers or active layers, such as deoxyribonucleic acid, polysaccharides, and bio-based aliphatic polyesters, etc. However, , even if these sustainable materials have sufficient physical properties, they still face serious challenges when they are practically used in devices.

在使用聚合物材料的電阻型存儲單元的基本電子組件方面,過去曾有研究在絕緣基質中包含電荷捕獲單元的聚合物複合材料被用於電阻型記憶體裝置,然而,該些研究中的絕緣基質既不可再生也不可生物降解,或是可生物降解但所用之基材顯示出的柔韌性較差。再者,目前僅有將永續材料應用於裝置中的單一層,而非集成的複數層。目前尚未有公開文獻與可生物降解的聚合物彈性體基底和電荷捕獲記憶體層集成的柔性電阻式記憶體裝置,這對於可穿戴電子設備領域將是相當重要的。In terms of basic electronic components of resistive memory cells using polymer materials, polymer composites containing charge trapping cells in an insulating matrix have been studied in the past for resistive memory devices, however, the insulation in these studies The substrate is neither renewable nor biodegradable, or is biodegradable but the substrate used exhibits poor flexibility. Furthermore, currently only sustainable materials have been applied to a single layer in a device, rather than integrated layers. There are currently no published flexible resistive memory devices integrated with biodegradable polymer elastomer substrates and charge trapping memory layers, which will be of considerable importance in the field of wearable electronics.

有鑑於此,本發明之主要目的係提供一種柔性之聚合物摻合體,該聚合物摻合體包括:一第一材料,該第一材料中包括聚丁二酸丁二醇酯聚合物或其衍生物;及一第二材料,該第二材料中包括可導電有機聚合物;其中,該聚合物摻合體係由該第一材料及該第二材料所摻合而成,且該聚合物摻合體具有生物可分解性。In view of this, the main object of the present invention is to provide a flexible polymer blend, the polymer blend includes: a first material, the first material includes polybutylene succinate polymer or derivatives thereof and a second material, the second material includes a conductive organic polymer; wherein, the polymer blend system is formed by blending the first material and the second material, and the polymer blend Biodegradable.

於一較佳實施例中,該可導電有機聚合物係選自由聚乙炔基聚合物、聚對苯乙烯基聚合物、聚苯胺、聚吡咯基聚合物、聚芴(polyfluorene)基聚合物、聚對伸苯基硫醚(poly-p-phenylenesulphide)、聚吲哚基聚合物、聚咔唑基聚合物、聚薁(polyazulene)基聚合物、聚萘基聚合物、聚噻吩基聚合物、聚噻吩亞乙烯基聚合物及其等之衍生物所組成之群組。In a preferred embodiment, the conductive organic polymer is selected from the group consisting of polyacetylene-based polymers, poly-p-styrene-based polymers, polyaniline, polypyrrole-based polymers, polyfluorene-based polymers, poly p-phenylene sulfide (poly-p-phenylenesulphide), polybenzazole-based polymers, polycarbazole-based polymers, polyazulene-based polymers, polynaphthalene-based polymers, polythiophene-based polymers, poly The group consisting of thiophene vinylidene polymers and their derivatives.

於一較佳實施例中,該可導電有機聚合物係聚芴基聚合物或其衍生物。In a preferred embodiment, the conductive organic polymer is a polyfluorene-based polymer or a derivative thereof.

於一較佳實施例中,該可導電有機聚合物相對於該第一材料,係以1 wt%至30 wt%之量存在。In a preferred embodiment, the conductive organic polymer is present in an amount of 1 wt % to 30 wt % relative to the first material.

於一較佳實施例中,該可導電有機聚合物係聚[(9,9-雙(3'-N,N -二甲基胺基)丙基)-2,7-芴)-alt-2,7-(9,9-二辛基芴)],且其相對於該第一材料,係以至少1 wt%至20 wt%之量存在。In a preferred embodiment, the conductive organic polymer is poly[(9,9-bis(3'- N,N -dimethylamino)propyl)-2,7-fluorene)-alt- 2,7-(9,9-dioctylfluorene)], and it is present in an amount of at least 1 wt% to 20 wt% relative to the first material.

本發明之另一目的係提供一種電子裝置,其具有如前所述之聚合物摻合體。Another object of the present invention is to provide an electronic device having the polymer blend as described above.

本發明之另一目的係提供一種電阻式記憶體裝置,依序包括:一底電極層、如前所述之聚合物摻合體作為一活性層及一頂電極層;其中該活性層係位於該底電極層及該頂電極層之間,且該底電極層及該頂電極層之位置特定對齊,以形成具有有效接合面的儲存單元的交叉點陣列。Another object of the present invention is to provide a resistive memory device, which sequentially includes: a bottom electrode layer, the polymer blend as described above as an active layer and a top electrode layer; wherein the active layer is located on the Between the bottom electrode layer and the top electrode layer, and the positions of the bottom electrode layer and the top electrode layer are specifically aligned, to form an array of intersections of memory cells with effective bonding surfaces.

於一較佳實施例中,該電阻式記憶體裝置進一步包括一基材,該基材係生物可分解之生物基聚合物(biobased polymer)。In a preferred embodiment, the resistive memory device further includes a substrate, which is a biodegradable biobased polymer.

於一較佳實施例中,該底電極層及/或該頂電極層係包括銀奈米線。In a preferred embodiment, the bottom electrode layer and/or the top electrode layer include silver nanowires.

本發明之另一目的係提供一種電阻式記憶體裝置之製造方法,包括以下步驟:(a) 準備一基材;(b) 於該基材覆上導電物質以作為一底電極層;(c) 準備如前所述之聚合物摻合體溶液,並將該聚合物摻合體藉由選自由旋轉塗佈法、噴塗法及溶液剪切塗佈法之至少一種技術塗覆至該電極上,以作為一活性層;及(d) 於該活性層覆上導電物質以作為一頂電極層;其中,該底電極層及該頂電極層位置特定對齊,以形成具有有效接合面的儲存單元的交叉點陣列。Another object of the present invention is to provide a method for manufacturing a resistive memory device, comprising the following steps: (a) preparing a substrate; (b) coating the substrate with a conductive substance to serve as a bottom electrode layer; (c) ) preparing a polymer blend solution as previously described, and applying the polymer blend onto the electrode by at least one technique selected from the group consisting of spin coating, spray coating, and solution shear coating, to as an active layer; and (d) coating the active layer with a conductive material to serve as a top electrode layer; wherein the bottom electrode layer and the top electrode layer are positioned specifically aligned to form a crossover of memory cells with effective junction surfaces point array.

如上所述,本發明之聚合物摻合體不僅具有柔性,且具有良好的可加工性、耐熱性和耐化學性、生物降解性和機械性能,該聚合物摻合體形成的共混薄膜無毒且可崩解。將本發明新穎之聚合物摻合體應用於電子裝置中,可製備出對環境友善且具有可撓性的電子產品,尤其適用於應用在柔性電儲存裝置中作為活性層,可廣泛應用於可穿戴和可植入生物電子應用領域,具有豐富的潛在的應用前景。可見,本發明比起習知技術具有相當多優勢。此外,本發明之電阻式記憶體裝置之製備方法,可利用如旋塗、噴塗和溶液剪切等不同加工技術,用以調節聚合物共混物中相分離區尺寸。As mentioned above, the polymer blend of the present invention is not only flexible, but also has good processability, heat and chemical resistance, biodegradability and mechanical properties, and the blended film formed by the polymer blend is non-toxic and can be disintegrate. By applying the novel polymer blend of the present invention to electronic devices, electronic products that are environmentally friendly and flexible can be prepared, especially suitable for use in flexible electrical storage devices as active layers, and can be widely used in wearables and implantable bioelectronic applications, with rich potential application prospects. It can be seen that the present invention has considerable advantages over the prior art. In addition, the fabrication method of the resistive memory device of the present invention can utilize different processing techniques such as spin coating, spray coating, and solution shearing to adjust the size of the phase separation region in the polymer blend.

有關本發明之詳細說明及技術內容,現就配合圖式說明如下。再者,本發明中之圖式,為說明方便,其比例未必照實際比例繪製,該等圖式及其比例並非用以限制本發明之範圍,在此先行敘明。The detailed description and technical content of the present invention are described below with reference to the drawings. Furthermore, the drawings in the present invention are not necessarily drawn according to the actual scale for the convenience of description. These drawings and their scales are not intended to limit the scope of the present invention, and are described here in advance.

除非另有定義,否則本文中使用的所有技術和科學術語之含義與本發明所屬領域之一般技術人員通常理解的含義相同。在整個本申請中使用的下列術語應具有以下含義。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The following terms used throughout this application shall have the following meanings.

除非另有說明,否則「或」表示「及/或」。「包括」意指不排除在所描述的組件、步驟、操作或元件上分別存在或增加一或多個其他組件、步驟、操作或元件。本文所述之「包含」、「包括」、「含有」、「囊括」、「具有」是可互換的,而非限制性的。本文和所附申請專利範圍中所使用的單數形式「一」和「該」包括複數個所指物件,除非上下文另有指示。例如,術語「一」、「該」、「一或多個」和「至少一」在本文中可互換使用。"Or" means "and/or" unless stated otherwise. "Comprising" means not excluding the presence or addition of one or more other components, steps, operations or elements to the described component, step, operation or element, respectively. The terms "comprising," "including," "containing," "including," and "having" as used herein are interchangeable and not limiting. As used herein and in the appended claims, the singular forms "a" and "the" include plural referents unless the context otherwise dictates. For example, the terms "a," "the," "one or more," and "at least one" are used interchangeably herein.

本發明係關於一種柔性之聚合物摻合體,該聚合物摻合體包括:一第一材料,該第一材料中包括聚丁二酸丁二醇酯聚合物或其衍生物;及一第二材料,該第二材料中包括可導電有機聚合物;其中,該聚合物摻合體係由該第一材料及該第二材料所摻合而成,且該聚合物摻合體具有生物可分解性。另一方面,本發明亦關於一種電子裝置,其具有如前所述之聚合物摻合體。又,本發明亦關於一種電阻式記憶體裝置,依序包括:一底電極層、如前所述之聚合物摻合體作為一活性層及一頂電極層;其中該活性層係位於該底電極層及該頂電極層之間,且該底電極層及該頂電極層之位置特定對齊,以形成具有有效接合面的儲存單元的交叉點陣列。The present invention relates to a flexible polymer blend comprising: a first material comprising polybutylene succinate polymer or derivatives thereof; and a second material , the second material includes a conductive organic polymer; wherein, the polymer blend system is formed by blending the first material and the second material, and the polymer blend has biodegradability. In another aspect, the present invention also relates to an electronic device having the polymer blend as described above. Furthermore, the present invention also relates to a resistive memory device, which sequentially includes: a bottom electrode layer, the polymer blend as described above as an active layer and a top electrode layer; wherein the active layer is located on the bottom electrode Layer and the top electrode layer, and the position of the bottom electrode layer and the top electrode layer are specifically aligned to form an array of intersections of memory cells with effective bonding surfaces.

本發明亦關於一種電阻式記憶體裝置之製造方法,包括以下步驟:(a) 準備一基材;(b) 於該基材覆上導電物質以作為一底電極層;(c) 準備如前所述之聚合物摻合體溶液,並將該聚合物摻合體藉由選自由旋轉塗佈法、噴塗法及溶液剪切塗佈法之至少一種技術塗覆至該電極上,以作為一活性層;及(d) 於該活性層覆上導電物質以作為一頂電極層;其中,該底電極層及該頂電極層位置特定對齊,以形成具有有效接合面的儲存單元的交叉點陣列。前述旋塗、噴塗和溶液剪切等不同加工技術可用來調節聚合物共混物中相分離區尺寸。The present invention also relates to a method for manufacturing a resistive memory device, comprising the following steps: (a) preparing a substrate; (b) coating the substrate with a conductive substance to serve as a bottom electrode layer; (c) preparing as before the polymer blend solution, and applying the polymer blend to the electrode by at least one technique selected from spin coating, spray coating, and solution shear coating to serve as an active layer and (d) coating the active layer with a conductive material to serve as a top electrode layer; wherein the bottom electrode layer and the top electrode layer are positioned specifically aligned to form an array of intersections of memory cells with effective bonding surfaces. Different processing techniques such as spin coating, spray coating, and solution shearing described above can be used to adjust the size of the phase separation zone in the polymer blend.

本文所述之「聚丁二酸丁二醇酯(poly(butylene succinate),PBS)」係一種半結晶脂肪族聚酯,由可再生資源衍生而來,具有較低的玻璃化轉變溫度,具有良好的可加工性、耐熱性和耐化學性、生物降解性和機械性能。The term "poly(butylene succinate) (PBS)" as described herein is a semi-crystalline aliphatic polyester derived from renewable resources with a low glass transition temperature and a Good processability, heat and chemical resistance, biodegradability and mechanical properties.

本文所述之「可導電有機聚合物」係指一種具導電性的高分子聚合物。於一較佳實施例中,該可導電有機聚合物係選自由聚乙炔基聚合物、聚對苯乙烯基聚合物、聚苯胺、聚吡咯基聚合物、聚芴(polyfluorene)基聚合物、聚對伸苯基硫醚(poly-p-phenylenesulphide)、聚吲哚基聚合物、聚咔唑基聚合物、聚薁(polyazulene)基聚合物、聚萘基聚合物、聚噻吩基聚合物、聚噻吩亞乙烯基聚合物及其等之衍生物所組成之群組。於一較佳實施例中,該可導電有機聚合物係聚芴基聚合物或其衍生物。於一更佳實施例中,該可導電有機聚合物係聚[(9,9-雙(3'-N,N -二甲基胺基)丙基)-2,7-芴)-alt-2,7-(9,9-二辛基芴)](本文簡稱PFN)。The term "conductive organic polymer" as used herein refers to a high molecular polymer with electrical conductivity. In a preferred embodiment, the conductive organic polymer is selected from the group consisting of polyacetylene-based polymers, poly-p-styrene-based polymers, polyaniline, polypyrrole-based polymers, polyfluorene-based polymers, poly p-phenylene sulfide (poly-p-phenylenesulphide), polybenzazole-based polymers, polycarbazole-based polymers, polyazulene-based polymers, polynaphthalene-based polymers, polythiophene-based polymers, poly The group consisting of thiophene vinylidene polymers and their derivatives. In a preferred embodiment, the conductive organic polymer is a polyfluorene-based polymer or a derivative thereof. In a more preferred embodiment, the conductive organic polymer is poly[(9,9-bis(3'- N,N -dimethylamino)propyl)-2,7-fluorene)-alt- 2,7-(9,9-dioctylfluorene)] (herein referred to as PFN).

本文所述之該可導電有機聚合物相對於該第一材料較佳具有一比例,例如:以1 wt%至30 wt%之量存在,包括但不限於:1 wt%至30 wt%、3 wt%至30 wt%、5 wt%至30 wt%、7 wt%至30 wt%、10 wt%至30 wt%、13 wt%至30 wt%、15 wt%至30 wt%、17 wt%至30 wt%、20 wt%至30 wt%、23 wt%至30 wt%、25 wt%至30 wt%、27 wt%至30 wt%、1 wt%至25 wt%、3 wt%至25 wt%、5 wt%至25 wt%、7 wt%至25 wt%、10 wt%至25 wt%、13 wt%至25 wt%、15 wt%至25 wt%、17 wt%至25 wt%、20 wt%至25 wt%、23 wt%至25 wt%、1 wt%至20 wt%、3 wt%至20 wt%、5 wt%至20 wt%、7 wt%至20 wt%、10 wt%至20 wt%、13 wt%至20 wt%、15 wt%至20 wt%、17 wt%至20 wt%、1 wt%至15 wt%、3 wt%至15 wt%、5 wt%至15 wt%、7 wt%至15 wt%、10 wt%至15 wt%、13 wt%至15 wt%、1 wt%至10 wt%、3 wt%至10 wt%、5 wt%至10 wt%、7 wt%至10 wt%、1 wt%至10 wt%、1 wt%至5 wt%、3 wt%至5 wt%。於一較佳實施例中,該可導電有機聚合物相對於該第一材料,係以1 wt%至20 wt%之量存在。於一更佳實施例中,該可導電有機聚合物係聚[(9,9-雙(3'-N,N -二甲基胺基)丙基)-2,7-芴)-alt-2,7-(9,9-二辛基芴)],且其相對於該第一材料,係以至少1 wt%至20 wt%之量存在。The conductive organic polymer described herein preferably has a proportion relative to the first material, for example, in an amount of 1 wt % to 30 wt %, including but not limited to: 1 wt % to 30 wt %, 3 wt% to 30 wt%, 5 wt% to 30 wt%, 7 wt% to 30 wt%, 10 wt% to 30 wt%, 13 wt% to 30 wt%, 15 wt% to 30 wt%, 17 wt% to 30 wt%, 20 wt% to 30 wt%, 23 wt% to 30 wt%, 25 wt% to 30 wt%, 27 wt% to 30 wt%, 1 wt% to 25 wt%, 3 wt% to 25 wt%, 5 wt% to 25 wt%, 7 wt% to 25 wt%, 10 wt% to 25 wt%, 13 wt% to 25 wt%, 15 wt% to 25 wt%, 17 wt% to 25 wt% , 20 wt% to 25 wt%, 23 wt% to 25 wt%, 1 wt% to 20 wt%, 3 wt% to 20 wt%, 5 wt% to 20 wt%, 7 wt% to 20 wt%, 10 wt% to 20 wt%, 13 wt% to 20 wt%, 15 wt% to 20 wt%, 17 wt% to 20 wt%, 1 wt% to 15 wt%, 3 wt% to 15 wt%, 5 wt% to 15 wt%, 7 wt% to 15 wt%, 10 wt% to 15 wt%, 13 wt% to 15 wt%, 1 wt% to 10 wt%, 3 wt% to 10 wt%, 5 wt% to 10 wt%, 7 wt% to 10 wt%, 1 wt% to 10 wt%, 1 wt% to 5 wt%, 3 wt% to 5 wt%. In a preferred embodiment, the conductive organic polymer is present in an amount of 1 wt % to 20 wt % relative to the first material. In a more preferred embodiment, the conductive organic polymer is poly[(9,9-bis(3'- N,N -dimethylamino)propyl)-2,7-fluorene)-alt- 2,7-(9,9-dioctylfluorene)], and it is present in an amount of at least 1 wt% to 20 wt% relative to the first material.

本發明之聚合物摻合體不僅具有柔性,且具有良好的可加工性、耐熱性和耐化學性、生物降解性和機械性能,該聚合物摻合體形成的共混薄膜無毒且可崩解,可應用於各式電子裝置中,特別是,可用作可撓性裝置的基材或記憶體裝置的活性層。尤其較佳可應用於電儲存(記憶體)裝置,具體應用示例如:穿戴式和可植入記憶體或可拋棄式記憶IC卡等。於一較佳實施例中,本發明提供一種電子元件、電子設備,其中包括如前所述之聚合物摻合體。於一較佳實施例中,本發明提供一種電子設備,其包括如前所述之聚合物摻合體作為活性層及/或基材。The polymer blend of the present invention not only has flexibility, but also has good processability, heat and chemical resistance, biodegradability and mechanical properties. It can be used in various electronic devices, especially, it can be used as the substrate of flexible devices or the active layer of memory devices. In particular, it can be applied to electrical storage (memory) devices, such as wearable and implantable memory or disposable memory IC cards. In a preferred embodiment, the present invention provides an electronic component, an electronic device, comprising the polymer blend as described above. In a preferred embodiment, the present invention provides an electronic device comprising the polymer blend as described above as an active layer and/or a substrate.

本文所述之電子裝置,例如但不限於電儲存裝置,且不限於形成剛性或柔性之電儲存裝置,特別係一種使用前述聚合物摻合體的電阻型存儲(記憶體)單元的基本電子組件,該前述聚合物摻合體具有夾在兩個金屬電極之間的電容器狀結構。在設備操作中,寫入過程是通過向設備施加電壓偏置或脈衝來進行的,從而導致在高阻狀態和低阻狀態之間切換。隨著過渡的發生,在關閉決定數據存儲波動性的電源(例如可重寫存儲器、閃存類型、一次寫入多次讀取(WORM)類型的存儲器、靜態隨機存取存儲器(SRAM)和動態隨機存取存儲器(DRAM))後,設備將保持在兩種狀態之一。操縱電荷捕獲單元的形態學可以進一步調整電儲存特性。亦即該電儲存裝置中,前述聚合物摻合體作為活性層位於一底電極層及一頂電極層之間,且該底電極層及該頂電極層之位置特定對齊,以形成具有有效接合面的儲存單元的交叉點陣列;前述特定對齊的形式為本領域技術人員可依需求調整。於一較佳實施例中,該電儲存裝置的該底電極層及該頂電極層之位置為垂直對齊,以形成具有有效接合面的儲存單元的交叉點陣列。Electronic devices described herein, such as, but not limited to, electrical storage devices, and are not limited to forming rigid or flexible electrical storage devices, in particular a basic electronic component of resistive memory (memory) cells using the aforementioned polymer blends, The aforementioned polymer blend has a capacitor-like structure sandwiched between two metal electrodes. In device operation, the writing process occurs by applying a voltage bias or pulse to the device, resulting in switching between a high-resistance state and a low-resistance state. As the transition occurs, power down the power sources that determine the volatility of data storage (such as rewritable memory, flash-type, write-once-read-many (WORM)-type memory, static random access memory (SRAM), and dynamic random access memory After accessing memory (DRAM), the device will remain in one of two states. Manipulating the morphology of the charge-trapping cells can further tune the electrical storage properties. That is, in the electrical storage device, the polymer blend as the active layer is located between a bottom electrode layer and a top electrode layer, and the positions of the bottom electrode layer and the top electrode layer are specifically aligned to form an effective bonding surface. The cross-point array of the storage cells; the above-mentioned specific alignment form can be adjusted by those skilled in the art according to requirements. In a preferred embodiment, the positions of the bottom electrode layer and the top electrode layer of the electrical storage device are vertically aligned to form an array of intersections of memory cells with active junctions.

前述剛性或柔性之電儲存裝置例如,於剛性電儲存裝置中可使用剛性基材及/或剛性電極來製備;柔性電儲存裝置可使用柔性基材及柔性電極來製備。前述剛性基材與剛性電極,例如於石英板、銅掩模或玻璃基材上使用如氧化銦、氧化錫、銦-錫複合氧化物(ITO)、摻氟氧化錫(FTO)、氧化鋅、氧化鋅-三氧化二鎵(ZnO-Ga2 O3 )及氧化鋅-氧化鋁(ZnO-Al2 O3 )等可導電材料所製成。前述柔性基材與柔性電極例如高分子聚合物上佈有金屬導線或導電材料。於一較佳實施例中,用於電儲存裝置之基材係一生物可分解之生物基聚合物(biobased polymer)。The aforementioned rigid or flexible electrical storage devices, for example, can be fabricated using rigid substrates and/or rigid electrodes in rigid electrical storage devices; flexible electrical storage devices can be fabricated using flexible substrates and flexible electrodes. The aforementioned rigid substrates and rigid electrodes, such as indium oxide, tin oxide, indium-tin composite oxide (ITO), fluorine-doped tin oxide (FTO), zinc oxide, It is made of conductive materials such as zinc oxide-gallium trioxide (ZnO-Ga 2 O 3 ) and zinc oxide-alumina (ZnO-Al 2 O 3 ). Metal wires or conductive materials are arranged on the aforementioned flexible substrates and flexible electrodes, such as high molecular polymers. In a preferred embodiment, the substrate for the electrical storage device is a biodegradable biobased polymer.

本文所述之「電極」可依需求應用於底電極層及/或頂電極層,電極材料可以是例如但不限於:金、銀、銣、鈀、鎳、鉬、鋁、其合金或其組合等。剛性電極可直接使用前述電極材料製備。柔性電極例如但不限於:可導電聚合物,或是將前述電極材料佈用柔性聚合物上。於一較佳實施例中,本發明之電儲存裝置包括在具有銀奈米線(AgNW)電極的生物基聚合物之層。The "electrodes" described herein can be applied to the bottom electrode layer and/or the top electrode layer as required, and the electrode materials can be, for example, but not limited to: gold, silver, rubidium, palladium, nickel, molybdenum, aluminum, alloys thereof, or combinations thereof Wait. Rigid electrodes can be prepared directly using the aforementioned electrode materials. The flexible electrode is, for example, but not limited to, a conductive polymer, or the aforementioned electrode material is coated on a flexible polymer. In a preferred embodiment, the electrical storage device of the present invention comprises a layer of a bio-based polymer with silver nanowire (AgNW) electrodes.

本文所述之「導電物質」包括導體及半導體,例如金屬、前述可導電材料或可導電聚合物等。"Conductive substances" as used herein include conductors and semiconductors, such as metals, the aforementioned conductive materials, or conductive polymers, and the like.

如圖2所示,本發明之電阻式記憶體裝置200使用可生物降解的PBS和可導電有機聚合物的電荷捕獲層(活性層22)在電極21上製備而成;其中,電阻式記憶體裝置的電記憶特性將由電荷捕獲之可導電有機聚合物的組成和大小來控制,可以通過透射電子顯微鏡、螢光分光光度計和雷射共聚焦圖像進行表徵。於一較佳實施例中,本發明之電阻式記憶體裝置使用PBS和半導體PFN的電荷捕獲層在電極上製備而成。於一較佳實施例中,本發明之電阻式記憶體裝置使用PBS和可導電有機聚合物的電荷捕獲層在具有銀奈米線電極上製備而成。於一較佳實施例中,本發明之電阻式記憶體裝置使用PBS和可導電有機聚合物的電荷捕獲層在電極及基材上製備而成。於一較佳實施例中,本發明之電阻式記憶體裝置使用PBS和可導電有機聚合物的電荷捕獲層在具有電極的可生物降解之生物基聚合物上製備而成。於一較佳實施例中,本發明之電阻式記憶體裝置使用PBS和半導體PFN的電荷捕獲層在具有銀奈米線電極的可生物降解之生物基聚合物上製備而成。於一較佳實施例中,本發明之電阻式記憶體裝置使用PBS和半導體PFN的電荷捕獲層在具有銀奈米線電極的可生物降解之Ecoflex彈性體基材上製備而成。As shown in FIG. 2 , the resistive memory device 200 of the present invention is fabricated on the electrode 21 by using biodegradable PBS and a charge trapping layer (active layer 22 ) of a conductive organic polymer; wherein the resistive memory The electrical memory properties of the device will be governed by the composition and size of the charge-trapping conductive organic polymer, which can be characterized by transmission electron microscopy, spectrofluorimetry, and confocal laser images. In a preferred embodiment, the resistive memory device of the present invention is fabricated on electrodes using PBS and a charge trapping layer of semiconductor PFN. In a preferred embodiment, the resistive memory device of the present invention is fabricated on electrodes with silver nanowires using PBS and a charge trapping layer of a conductive organic polymer. In a preferred embodiment, the resistive memory device of the present invention is fabricated on electrodes and substrates using PBS and a charge trapping layer of a conductive organic polymer. In a preferred embodiment, the resistive memory device of the present invention is fabricated using PBS and a charge trapping layer of a conductive organic polymer on a biodegradable bio-based polymer with electrodes. In a preferred embodiment, the resistive memory device of the present invention is fabricated using a charge trapping layer of PBS and semiconducting PFN on a biodegradable bio-based polymer with silver nanowire electrodes. In a preferred embodiment, the resistive memory device of the present invention is fabricated using a charge trapping layer of PBS and semiconductor PFN on a biodegradable Ecoflex elastomer substrate with silver nanowire electrodes.

於一較佳實施例中,本發明剛性電阻式記憶體裝置係具有:含導電材料之剛性基材/前述聚合物摻合體薄膜/前述電極材料之夾層結構。於一較佳實施例中,本發明剛性電阻式記憶體裝置係包含:具有ITO之玻璃基材/前述聚合物摻合體薄膜/前述電極材料之夾層結構。於一較佳實施例中,本發明剛性電阻式記憶體裝置係包含:具有ITO之玻璃基材/(PFN/PBS)聚合物摻合體薄膜/鋁(Al)之夾層結構。In a preferred embodiment, the rigid resistive memory device of the present invention has a sandwich structure of a rigid substrate containing conductive material/the aforementioned polymer blend film/the aforementioned electrode material. In a preferred embodiment, the rigid resistive memory device of the present invention comprises: a glass substrate with ITO/the aforementioned polymer blend film/the aforementioned electrode material sandwich structure. In a preferred embodiment, the rigid resistive memory device of the present invention comprises: a glass substrate with ITO/(PFN/PBS) polymer blend film/aluminum (Al) sandwich structure.

於一較佳實施例中,本發明柔性電阻式記憶體裝置係具有:柔性聚合物基材/電極材料或導電材料/前述聚合物摻合體薄膜/電極材料或導電材料之夾層結構。於一較佳實施例中,本發明柔性電阻式記憶體裝置係具有:可導電有機聚合物/前述聚合物摻合體薄膜/電極材料或導電材料之夾層結構。於一較佳實施例中,本發明柔性且可生物分解電阻式記憶體裝置係具有:生物基聚合物基材/電極材料或導電材料/前述聚合物摻合體薄膜/電極材料或導電材料之夾層結構。於一較佳實施例中,本發明柔性且可生物分解電阻式記憶體裝置係具有:生物基聚合物基材/電極材料或導電材料/(PFN/PBS)聚合物摻合體薄膜/電極材料或導電材料之夾層結構。於一較佳實施例中,本發明柔性且可生物分解電阻式記憶體裝置係具有:生物基聚合物基材/銀奈米線/(PFN/PBS)聚合物摻合體薄膜/銀奈米線之夾層結構。於一較佳實施例中,本發明柔性電阻式記憶體裝置係具有:Ecoflex基材/銀奈米線/前述聚合物摻合體薄膜/銀奈米線之夾層結構。於一較佳實施例中,本發明柔性電阻式記憶體裝置係具有:Ecoflex基材/銀奈米線/(PFN/PBS)聚合物摻合體薄膜/銀奈米線之夾層結構。In a preferred embodiment, the flexible resistive memory device of the present invention has a sandwich structure of a flexible polymer substrate/electrode material or conductive material/the aforementioned polymer blend film/electrode material or conductive material. In a preferred embodiment, the flexible resistive memory device of the present invention has a sandwich structure of conductive organic polymer/the aforementioned polymer blend film/electrode material or conductive material. In a preferred embodiment, the flexible and biodegradable resistive memory device of the present invention has: a bio-based polymer substrate/electrode material or conductive material/interlayer of the aforementioned polymer blend film/electrode material or conductive material structure. In a preferred embodiment, the flexible and biodegradable resistive memory device of the present invention has: a bio-based polymer substrate/electrode material or conductive material/(PFN/PBS) polymer blend film/electrode material or Sandwich structure of conductive materials. In a preferred embodiment, the flexible and biodegradable resistive memory device of the present invention comprises: bio-based polymer substrate/silver nanowires/(PFN/PBS) polymer blend film/silver nanowires The sandwich structure. In a preferred embodiment, the flexible resistive memory device of the present invention has a sandwich structure of Ecoflex substrate/silver nanowires/the aforementioned polymer blend film/silver nanowires. In a preferred embodiment, the flexible resistive memory device of the present invention has a sandwich structure of Ecoflex substrate/silver nanowires/(PFN/PBS) polymer blend film/silver nanowires.

提供以下本發明各方面的非限制性實施例主要是為了闡明本發明的各方面及其所達到的效益。 [實施例]The following non-limiting examples of aspects of the invention are provided primarily to illustrate the aspects of the invention and the benefits achieved. [Example]

以下實施例之聚合物摻合體,以PBS作為該第一材料,並選用可導電有機聚合物之聚芴基聚合物(PFN)作為該第二材料,該第一材料與該第二材料摻合而形成PFN/PBS聚合物摻合體。接著使用不同塗佈方法製備PFN/PBS摻合體膜,並將該膜用以製備剛性及柔性環保電阻式記憶體裝置。A. 實驗部分 材料: In the polymer blends of the following examples, PBS is used as the first material, and polyfluorene-based polymer (PFN), a conductive organic polymer, is selected as the second material, and the first material is blended with the second material Instead, a PFN/PBS polymer blend is formed. PFN/PBS blend films were then prepared using different coating methods, and the films were used to fabricate rigid and flexible environmentally friendly resistive memory devices. A. Materials for the experimental part :

以環己烷二異氰酸酯(1,6-diisocyanatohexane,PBS)延長的聚丁二酸丁二酯(poly(1,4-butylene succinate))購自Sigma-Aldrich公司(美國),用為聚合物基質。聚[(9,9-雙(3'-N ,N -二甲基胺基)丙基)-2,7-芴)-alt -2,7-(9,9-二辛基芴)](PFN)獲自機光科技股份有限公司(台灣),用為電荷捕捉材料。鹽酸多巴胺(Sigma-Aldrich)、2-胺-2-羥甲-1,3-丙二醇(Tris Base,Sigma-Aldrich)、無水氯仿(CF,Sigma-Aldrich)和甲醇(MeOH,Sigma-Aldrich)照原樣使用。銀奈米線(silver nanowire,AgNW,AW060,長度10-20 μm,直徑55-75 nm)和生物可分解Ecoflex彈性體分別購自科創有限公司(中國)和BASF有限公司(德國)。使用不同塗佈方法製備 PFN/PBS 摻合體膜 Poly(1,4-butylene succinate) extended with cyclohexane diisocyanate (1,6-diisocyanatohexane, PBS) was purchased from Sigma-Aldrich (USA), and used as polymer matrix . Poly[(9,9-bis(3'- N , N -dimethylamino)propyl)-2,7-fluorene) -alt -2,7-(9,9-dioctylfluorene)] (PFN) was obtained from Machine Light Technology Co., Ltd. (Taiwan) and was used as a charge trapping material. Dopamine hydrochloride (Sigma-Aldrich), 2-amine-2-hydroxymethyl-1,3-propanediol (Tris Base, Sigma-Aldrich), anhydrous chloroform (CF, Sigma-Aldrich) and methanol (MeOH, Sigma-Aldrich) Use as is. Silver nanowire (silver nanowire, AgNW, AW060, length 10-20 μm, diameter 55-75 nm) and biodegradable Ecoflex elastomer were purchased from Kechuang Co., Ltd. (China) and BASF Co., Ltd. (Germany). Preparation of PFN/PBS Blend Membranes Using Different Coating Methods

透過不同方法製備的薄膜樣品組成係控制在0.1-0.15的範圍內。濃度為10 mg mL-1 的PFN/PBS摻合體(即PFN/PBS-5、PFN/PBS-10和PFN/PBS-15)(9:1,v/v)在CF/MeOH共溶劑中,於50℃下攪拌3小時,然後以PTFE膜針筒過濾器(孔徑0.22 μm)過濾。注意,PFN/PBS後的數值表示為PBS基質中PFN的組成(重量百分比,wt%)。然後透過三種技術將所製備的溶液塗佈到基材(例如石英板、銅掩膜和氧化銦錫(ITO)玻璃)上,此處所述之基材已可導電或包含導電材料故可同時作為底電極層,前述技術包括於大氣環境中(1)旋轉塗佈、(2)噴塗和(3)溶液剪切。藉由前述各種方法製造對應的薄膜樣品的實驗參數和細節描述如下:(1) PFN/PBS-5旋轉塗佈膜(圖1a):利用旋轉塗佈實驗裝置100A,以1000 rpm的轉速將聚合物摻合體溶液混合物12旋轉塗佈到基材11上60秒;(2) PFN/PBS-5噴塗膜(圖1b):利用噴塗實驗裝置100B,將塗料(聚合物摻合體溶液12)轉移到手持噴槍上,然後以10 cm的噴嘴到基材11的距離噴塗於在50℃下加熱10秒的基材11上;(3) PFN/PBS-5溶液剪切膜(圖1c):利用溶液剪切實驗裝置100C,基材11和剪切板13皆藉由真空水平放置(即,剪切角保持在0度),並將基材11設置在沒有加熱的工作台上,用微控制器降低剪切板13,並將基材11和剪切板13之間的間距距離設為10 μm,用吸量管將約20 µL所製備聚合物摻合體溶液12置於基材11上後,用步進馬達以不同速率(0.08、0.10和0.50 mm s-1 )平移剪切板13,以產生溶液剪切薄膜。將透過不同處理方法製得的所有薄膜樣品放置在50℃的熱板上1分鐘,以除去殘留的溶劑,然後再進行進一步分析。基於 PFN/PBS 摻合 體膜之電阻式記憶體裝置 The composition of film samples prepared by different methods is controlled in the range of 0.1-0.15. PFN/PBS blends (i.e. PFN/PBS-5, PFN/PBS-10 and PFN/PBS-15) at a concentration of 10 mg mL -1 (9:1, v/v) in CF/MeOH co-solvent, It was stirred at 50°C for 3 hours, and then filtered through a PTFE membrane syringe filter (pore size 0.22 μm). Note that the values after PFN/PBS are expressed as the composition (weight percent, wt%) of PFN in the PBS matrix. The prepared solutions are then applied by three techniques to substrates such as quartz plates, copper masks, and indium tin oxide (ITO) glass, which are already conductive or contain conductive materials so that both As the bottom electrode layer, the aforementioned techniques include (1) spin coating, (2) spray coating, and (3) solution shearing in an atmospheric environment. The experimental parameters and details of the corresponding thin film samples produced by the aforementioned various methods are described as follows: (1) PFN/PBS-5 spin-coated film (Fig. 1a): Using the spin-coating experimental device 100A, the polymerization was carried out at a speed of 1000 rpm. (2) PFN/PBS-5 spray film (FIG. 1b): Using spray experimental setup 100B, the coating (polymer blend solution 12) was transferred to the substrate 11 by spin coating Hand-held spray gun, and then sprayed on the substrate 11 heated at 50°C for 10 seconds with a distance of 10 cm from the nozzle to the substrate 11; (3) PFN/PBS-5 solution shearing film (Fig. 1c): using the solution Shearing experimental device 100C, both the substrate 11 and the shearing plate 13 are placed horizontally by vacuum (ie, the shearing angle is kept at 0 degrees), and the substrate 11 is set on an unheated workbench with a microcontroller The shearing plate 13 was lowered, the distance between the substrate 11 and the shearing plate 13 was set to 10 μm, and after about 20 μL of the prepared polymer blend solution 12 was placed on the substrate 11 with a pipette, The shear plate 13 was translated with a stepper motor at different rates (0.08, 0.10 and 0.50 mm s −1 ) to produce solution shear films. All film samples prepared by different treatments were placed on a hot plate at 50°C for 1 min to remove residual solvent before further analysis. Resistive memory device based on PFN/PBS blend film

在玻璃基材上使用ITO/(PFN/PBS摻合薄膜)/鋁(Al)所形成的夾層結構製備電阻式記憶體裝置。使用超音波處理器依序以蒸餾水、異丙醇和丙酮預清洗圖案化ITO玻璃,各15分鐘。透過不同處理程序將CF/MeOH共溶劑中濃度為10 mg mL-1 的PFN/PBS溶液(9/1 (v/v))塗佈到ITO圖案化基材上以作為主動層,該些處理程序係以上述最佳化參數進行。最後,使用熱蒸鍍機以10-6 Torr的壓力及0.8 Å s-1 的速率鍍覆100 nm Al作為頂電極。藉由陰影遮罩將頂電極與底部ITO圖案垂直對齊,以形成具有活性/有效接合面積(active joint area)為0.2×0.2、0.4×0.4和0.6×0.6 mm2 的記憶單元的交叉點陣列。注意,用於電阻式記憶體裝置的薄膜也是在大氣環境下製造的。在聚合物基材上製造柔性電阻式記憶體裝置 A resistive memory device was fabricated on a glass substrate using a sandwich structure formed of ITO/(PFN/PBS blended film)/aluminum (Al). The patterned ITO glass was pre-cleaned sequentially with distilled water, isopropanol, and acetone for 15 minutes each using a sonicator. A PFN/PBS solution (9/1 (v/v)) at a concentration of 10 mg mL -1 in CF/MeOH co-solvent was coated on ITO patterned substrates as the active layer through different treatment procedures. The procedure is carried out with the above-mentioned optimization parameters. Finally, 100 nm Al as the top electrode was plated at a pressure of 10 -6 Torr and a rate of 0.8 Å s -1 using a thermal vapor deposition machine. The top electrodes were vertically aligned with the bottom ITO patterns by shadow masks to form intersection arrays with memory cells with active/active joint areas of 0.2×0.2, 0.4×0.4 and 0.6×0.6 mm 2 . Note that thin films for resistive memory devices are also fabricated in atmospheric environments. Fabrication of flexible resistive memory devices on polymer substrates

將A和B試劑以1:1的質量比混合,並在80o C下固化1小時,以生產商品化可生物分解Ecoflex彈性體基材,該Ecoflex係一種生物基聚合物。同時,將892 mg的Tris Base溶於360 g的蒸餾水中,pH值保持在9左右。之後,加入並溶解516 mg的鹽酸多巴胺。然後將熱固化的Ecoflex彈性體浸入所製備的溶液中,置於環境溫度下過夜。用甲醇清洗PDA (polydopamine,聚多巴胺)修飾之Ecoflex,並在50o C下乾燥1小時。Reagents A and B were mixed in a 1:1 mass ratio and cured at 80 ° C for 1 hour to produce a commercial biodegradable Ecoflex elastomeric substrate, which is a biobased polymer. Meanwhile, 892 mg of Tris Base was dissolved in 360 g of distilled water, and the pH was kept around 9. After that, 516 mg of dopamine hydrochloride was added and dissolved. The heat cured Ecoflex elastomer was then dipped into the prepared solution and left at ambient temperature overnight. The PDA (polydopamine, polydopamine) modified Ecoflex was washed with methanol and dried at 50 ° C for 1 hour.

首先將所製備的生物相容性PDA修飾Ecoflex基材在50o C下噴塗導電銀奈米線印墨(2 mg mL-1 )60秒,作為底電極。然後將20 µL PFN/PBS-5溶液(10 mg mL-1 )剪切到電極上,工作距離和速率分別設為10 µm和0.30 mm/s。最後,再次以相同的製程參數,將導電銀奈米線印墨噴塗於其上,以製備頂電極。注意,電極藉由陰影遮罩對齊,而交叉點陣列的活性接合面積固定為0.6×0.6 mm2 。之後,獲得基於PFN/PBS-5溶液剪切膜的環保且可崩解的電阻式記憶體裝置。特性 First, the as-prepared biocompatible PDA-modified Ecoflex substrate was sprayed with conductive silver nanowire printing ink (2 mg mL -1 ) at 50 o C for 60 s as the bottom electrode. Then 20 µL of PFN/PBS-5 solution (10 mg mL -1 ) was sheared onto the electrode, with the working distance and velocity set to 10 µm and 0.30 mm/s, respectively. Finally, with the same process parameters again, the conductive silver nanowires are sprayed with ink to prepare the top electrode. Note that the electrodes were aligned by a shadow mask, while the active bonding area of the intersection array was fixed at 0.6 x 0.6 mm2 . Afterwards, an eco-friendly and disintegrable resistive memory device based on PFN/PBS-5 solution shear film was obtained. characteristic

使用穿透式電子顯微鏡(transmission electron microscope,TEM,FEI Tecnai G2 T20)和雙光子雷射共軛焦顯微鏡(Leica TCS SP5)觀察PFN/PBS摻合體薄膜的形態。此外,分別在Hitachi U-4100紫外光-可見光光譜儀和Horiba Jobin Yvon Fluorolog-3分光螢光計上記錄聚合物摻合體薄膜的紫外光-可見光吸收光譜和光致發光(photoluminescence,PL)發射光譜。結合分光螢光計與積分球(integration sphere),在360 nm的激發波長下計算樣品的光致發光量子產率(photoluminescence quantum yield,PLQY)。使用Keithley 4200-SCS半導體參數分析儀(美國Keithley儀器公司)在填有N2 的手套式操作箱中以-5 V至5 V的掃描電壓測量所製備的基於PFN/PBS摻合體的電阻式記憶體裝置的電流電壓特性和裝置效能。藉由表面輪廓儀(alpha step profilometer)和原子力顯微鏡(atomic force microscope,AFM,Digital Instruments;彈簧常數:15 N m-1 ,共振頻率:330 kHz)測量用於記憶體裝置的薄膜厚度和粗糙度。B. 結果 由不同處理技術所產生薄膜的形態 The morphology of the PFN/PBS blend films was observed using a transmission electron microscope (TEM, FEI Tecnai G2 T20) and a two-photon laser conjugate focus microscope (Leica TCS SP5). In addition, the UV-Vis absorption and photoluminescence (PL) emission spectra of the polymer blend films were recorded on a Hitachi U-4100 UV-Vis spectrometer and a Horiba Jobin Yvon Fluorolog-3 spectrofluorometer, respectively. The photoluminescence quantum yield (PLQY) of the samples was calculated at an excitation wavelength of 360 nm by combining a spectrofluorometer with an integration sphere. The as-prepared resistive memory based on PFN/PBS blends was measured using a Keithley 4200-SCS Semiconductor Parameter Analyzer (Keithley Instruments, USA) in a glove box filled with N with a sweep voltage of -5 V to 5 V Current-voltage characteristics and device performance of bulk devices. Film thickness and roughness for memory devices were measured by alpha step profilometer and atomic force microscope (AFM, Digital Instruments; spring constant: 15 N m -1 , resonance frequency: 330 kHz) . B. Results Morphology of Films Produced by Different Processing Techniques

PFN側鏈上的三級胺與PBS聚合物中延長劑(extender)的異氰酸酯部分(isocyanate moiety)之間的物理性作用係用於避免共軛聚電解質PFN的聚集。使用穿透式電子顯微鏡(TEM)、雷射共軛焦顯微鏡和分光螢光計研究由上述處理方法產生之薄膜在相分離域(phase-separated domain)上的特性。如圖3所示,薄膜樣品的吸光度控制在0.1-0.15的範圍內,因此獲得60-90 nm的相似膜厚。The physical interaction between the tertiary amine on the PFN side chain and the isocyanate moiety of the extender in the PBS polymer is used to avoid aggregation of the conjugated polyelectrolyte PFN. Transmission electron microscopy (TEM), laser conjugate focus microscopy, and spectrofluorometry were used to investigate the properties of the films produced by the above-described processing methods in the phase-separated domain. As shown in Figure 3, the absorbance of the thin film samples was controlled in the range of 0.1-0.15, thus obtaining similar film thicknesses of 60-90 nm.

圖4(左)示出由不同處理技術製備的PFN/PBS-5薄膜的TEM影像,其顯示PBS基質中PFN的相分離域大小不同。儘管物理性作用可阻止大量PFN聚集體的形成,但在PFN/PBS-5旋轉塗佈膜中仍觀察到平均尺寸高達115.4±30 nm的PFN團簇(圖4a)。由於有氣溶膠液滴(aerosol droplet),噴塗膜的平均PFN域尺寸進一步減少至70.8±16 nm(圖4b)。最值得注意的是,彎月面引導的塗層(meniscus-guided coating)使PFN/PBS-5溶液剪切膜的相分離域顯著減少至10.1±3 nm,從而在處理期間賦予分子對齊(圖4c)。因此,平均PFN域尺寸以降序排列是旋轉塗佈膜、噴塗膜和溶液剪切膜。Figure 4 (left) shows TEM images of PFN/PBS-5 films prepared by different processing techniques, which show that the size of the phase separation domains of PFN in the PBS matrix is different. Although physical effects prevented the formation of massive PFN aggregates, PFN clusters with an average size up to 115.4 ± 30 nm were still observed in the PFN/PBS-5 spin-coated membrane (Fig. 4a). The average PFN domain size of the sprayed films was further reduced to 70.8 ± 16 nm due to the presence of aerosol droplets (Fig. 4b). Most notably, the meniscus-guided coating significantly reduced the phase-separated domains of the PFN/PBS-5 solution shear film to 10.1 ± 3 nm, conferring molecular alignment during processing (Fig. 4c). Therefore, the average PFN domain size in descending order is spin-coated film, sprayed film and solution sheared film.

此外,在相同的雷射增益值(laser gain value)下,PFN/PBS-5薄膜的雷射共軛焦影像如圖4所示(右),插圖示出其對應的透射光影像。在圖4a中,PFN/PBS-5旋轉塗佈膜具有均勻的藍色發光,但顯示出相對較低的亮度。其發光強度的顯著淬滅是由於較大PFN團簇的形成。相反,儘管PFN域尺寸減少,但具有較高亮度的PFN/PBS-5噴塗膜仍顯示出不均勻的發光(圖4b)。與旋轉塗佈法和噴塗法相比,溶液剪切法可透過剪切速率輕易調整PFN/PBS摻合體的結晶度、分散性和相分離程度。如圖5所示,PBS晶體的晶粒尺寸隨著剪切速率的增加而增大,並且PFN良好地限制在其結晶結構內。然而,當剪切速率太快時,發光的均勻性變得不均勻。透過優化剪切速率,可獲得只具有很小的PFN聚集體並且具有均勻分散性之PFN/PBS-5溶液剪切膜(圖4c)。上述觀察結果指出,PFN/PBS摻合體薄膜的相分離形態可由各種塗佈製程來控制。In addition, under the same laser gain value, the laser conjugate focus image of the PFN/PBS-5 film is shown in Fig. 4 (right), and the inset shows its corresponding transmitted light image. In Figure 4a, the PFN/PBS-5 spin-coated film has uniform blue luminescence but shows relatively low brightness. The significant quenching of its luminescence intensity is due to the formation of larger PFN clusters. In contrast, the PFN/PBS-5 sprayed films with higher brightness still showed non-uniform luminescence despite the reduced PFN domain size (Fig. 4b). Compared with spin coating and spray coating, the solution shearing method can easily adjust the crystallinity, dispersion and phase separation of PFN/PBS blends by shear rate. As shown in Fig. 5, the grain size of PBS crystals increases with increasing shear rate, and PFN is well confined within its crystalline structure. However, when the shear rate is too fast, the uniformity of the luminescence becomes non-uniform. By optimizing the shear rate, a PFN/PBS-5 solution sheared film with only small PFN aggregates and uniform dispersion was obtained (Fig. 4c). The above observations indicate that the phase-separated morphology of PFN/PBS blend films can be controlled by various coating processes.

儘管進行顯微鏡分析,但分光螢光計也證實了相分離的程度。PFN和PFN/PBS-5摻合體膜的光致發光(PL)光譜如圖6和圖7所示。此外,表1列出對應的光物理性質。由於PBS是一種非發光材料,因此PFN/PBS摻合體的光學性質完全歸因於共軛聚合物PFN。與PFN相比,所有在360 nm激發的PFN/PBS-5摻合體PL光譜皆顯示三個易辨別的發射帶,其中峰值發射波長(λPL max )分為0-0、0-1和0-2鏈內單態轉移(intrachain singlet transition)。綠色發射帶(在524 nm處的λPL max )的消失是由於剛性PFN共軛主鏈的強π-π相互作用和其側鏈官能基的弱偶極-偶極相互作用所引起,這表示PFN和PBS之間的物理性作用可減緩嚴重聚集的形成並導致均勻分散。隨著相分離域尺寸減少,觀察到PL光譜中細微的藍光偏移,從而提高光致發光量子產率(PLQY)。因此,所獲得的PLQY依遞增順序為旋轉塗佈膜(7.4%)、噴塗膜(12.4%)和溶液剪切膜(16.0%)。顯微鏡和光學分析顯示聚合物摻合體的相分離形態受到處理技術的影響,這可能會影響電荷捕捉效應,以下詳細討論。Spectrofluorimetry also confirmed the degree of phase separation despite microscopic analysis. Photoluminescence (PL) spectra of PFN and PFN/PBS-5 blend films are shown in Figures 6 and 7. In addition, Table 1 lists the corresponding photophysical properties. Since PBS is a non-emissive material, the optical properties of the PFN/PBS blends are entirely attributed to the conjugated polymer PFN. Compared with PFN, all PL spectra of PFN/PBS-5 blends excited at 360 nm show three distinct emission bands with peak emission wavelengths (λ PL max ) divided into 0-0, 0-1 and 0 -2 intrachain singlet transition. The disappearance of the green emission band (λ PL max at 524 nm) is caused by the strong π-π interactions of the rigid PFN-conjugated backbone and the weak dipole-dipole interactions of its side-chain functional groups, indicating that Physical interactions between PFN and PBS slowed the formation of severe aggregates and resulted in uniform dispersion. A subtle blue shift in the PL spectrum was observed as the phase-separated domain size was reduced, leading to increased photoluminescence quantum yield (PLQY). Therefore, the obtained PLQYs are spin-coated film (7.4%), sprayed film (12.4%) and solution sheared film (16.0%) in increasing order. Microscopic and optical analysis revealed that the phase-separated morphology of the polymer blends was affected by the processing technique, which may affect the charge trapping effect, discussed in detail below.

表1. PFN/PBS摻合體薄膜的光學性質。 樣品 λabs max (nm) λPL max a (nm) I0-1 / I0-0 PLQY (%) PFN 旋轉塗佈膜 397 430, 454, 481, 524 - 5.9 PFN/PBS-5 394 427, 450, 479 0.606 7.4 PFN/PBS-5 噴塗膜 390 426, 451, 479 0.619 12.4 PFN/PBS-5 溶液剪切膜 391 426, 450, 476 0.687 16.0 a 在360 nm的激發波長下表現的光致發光發射光譜。Table 1. Optical properties of PFN/PBS blend films. sample λ abs max (nm) λ PL max a (nm) I 0-1 / I 0-0 PLQY (%) PFN spin coating film 397 430, 454, 481, 524 - 5.9 PFN/PBS-5 394 427, 450, 479 0.606 7.4 PFN/PBS-5 spray film 390 426, 451, 479 0.619 12.4 PFN/PBS-5 Solution shear film 391 426, 450, 476 0.687 16.0 a Photoluminescence emission spectrum exhibited at an excitation wavelength of 360 nm.

圖8示出PFN/PBS-5旋轉塗佈膜和溶液剪切膜在剪力的平行和垂直方向上的極化PL發射光譜。與旋轉塗佈膜相比,初生溶液剪切膜的I0–1 /I0–0 比率更高(表1),其中聚芴的0-0與0-1轉變歸因於鏈內和鏈間分子斂集。I0–1 /I0–0 的值增加表示共軛PFN域具有沿所施加剪力形成較高鏈間排序性的趨勢。因此,由於彎月面引導塗覆法造成密集的分子斂集,在垂直方向上也觀察到綠色發射帶。溶液剪切膜的雙軸分子配向具有增強膜的柔韌性的強大潛力。電阻式記憶體裝置之特性 Figure 8 shows the polarized PL emission spectra of PFN/PBS-5 spin-coated films and solution sheared films in parallel and perpendicular directions of shear force. The ratio of I 0–1 /I 0–0 was higher for nascent solution-sheared films compared to spin-coated films (Table 1), where the 0-0 to 0-1 transitions of polyfluorene were attributed to intrachain and interchain Intermolecular convergence. Increasing values of I 0–1 /I 0–0 indicate that the conjugated PFN domains have a tendency to form higher interchain ordering along the applied shear force. Therefore, a green emission band is also observed in the vertical direction due to the dense molecular packing caused by the meniscus-guided coating method. The biaxial molecular orientation of solution sheared films has a strong potential to enhance the flexibility of the films. Characteristics of Resistive Memory Devices

圖9示出玻璃基材上的記憶體裝置ITO/(PFN/PBS摻合體)/Al的電流電壓特性,掃描節點(sweeping step)為0.1 V。所有記憶體裝置的特性概述如表2,包括開關性能、臨界電壓(Vth )、關閉電流和開/關電流比(Ion / off )。以下描述特性並分析PFN組成和相分離域規模對電阻式記憶體裝置的影響。Figure 9 shows the current-voltage characteristics of a memory device ITO/(PFN/PBS blend)/Al on a glass substrate with a sweeping step of 0.1 V. The characteristics of all memory devices are summarized in Table 2, including switching performance, threshold voltage (V th ), off current and on/off current ratio (I on / off ). The following characterizes and analyzes the effect of PFN composition and phase separation domain size on resistive memory devices.

表2. 基於PFN/PBS的電阻式記憶體裝置的電氣特性。 樣品 開關性能 Vth (V) Ioff (A) Ion/off PFN/PBS-5 旋轉塗佈膜 DRAM 2.8 1.0×10-5 102 PFN/PBS-10 WORM 1.6 2.0×10-7 102 PFN/PBS-5 噴塗膜 WORM 1.6 6.0×10-5 102 PFN/PBS-5 溶液剪切膜 WORM 1.8 1.8×10-9 104 PFN/PBS-5 溶液剪切膜 (在Ecoflex基材上) WORM 2.6 1.9×10-14 1010 Table 2. Electrical characteristics of PFN/PBS based resistive memory devices. sample Switching performance Vth (V) I off (A) I on/off PFN/PBS-5 spin coating film DRAM 2.8 1.0× 10-5 10 2 PFN/PBS-10 WORM 1.6 2.0× 10-7 10 2 PFN/PBS-5 spray film WORM 1.6 6.0× 10-5 10 2 PFN/PBS-5 Solution shear film WORM 1.8 1.8× 10-9 10 4 PFN/PBS-5 Solution shear film (on Ecoflex substrate) WORM 2.6 1.9× 10-14 10 10

原始PFN的電氣特性(圖9a)為具有導電性,沒有任何記憶特性,由於其半導體性質,在外部施加電壓的情況下,電流迅速增加至10-4 。併入絕緣性PBS樹脂後,PFN可包封在PBS基質中,從而在施加正偏壓時會產生明顯的雙穩態電阻狀態。藉由改變PBS基質中的電荷捕捉元素PFN的組成(約5 wt%和10 wt%),使用旋轉塗佈法,可觀察到各種電阻切換特性。如圖9b所示,PFN量較小(5 wt%)的裝置的電流最初表現出典型的揮發性動態隨機存取記憶體(dynamic random access memory,DRAM)類型之開關性能。最初,隨著電壓從0 V逐漸掃描到2.8 V,所製裝置處於高電阻狀態(high resistance state,HRS;關閉狀態;數據儲存中為「 0」信號)。當電壓進一步升高時,在2.8 V的臨界電壓處會發生突然的電流跳躍,這表示往低電阻狀態(low resistance state,LRS;導通狀態;數據儲存中的「1」信號)的劇烈電子躍遷。注意,第一次掃描中的電子躍遷係作為「寫入」程序。然而,當電源關閉時,電流會立即返回到HRS。此後,可使用較小的臨界電壓(2.4 V)將其從HRS重新編程為LRS。該裝置在0.5 V時仍保持102 的高Ion/off 。相比之下,具有高PFN含量(10 wt%)的裝置的電流(圖9c)在LRS中保持不變,以用於隨後從5 V至0 V (掃描2)和從0至-5 V (掃描3)的掃描。即使關閉電源,該裝置也無法進行寫入程序,表示在0.5 V時Ion/off 高達102 的非揮發性WORM型記憶體性能。在固定電壓值偏壓下,該裝置在切換時間方面的穩定性可持續104 秒之久(圖10a)。The electrical properties of the pristine PFN (Fig. 9a) are that it is conductive without any memory properties, and due to its semiconducting nature, the current rapidly increases to 10-4 in the presence of an externally applied voltage. Incorporating the insulating PBS resin, the PFN can be encapsulated in the PBS matrix, resulting in a distinct bistable resistance state when a positive bias is applied. By varying the composition of the charge-trapping element PFN in the PBS matrix (approximately 5 wt% and 10 wt%), using spin coating, various resistance-switching properties were observed. As shown in Figure 9b, the current of the device with a small amount of PFN (5 wt %) initially exhibited typical volatile dynamic random access memory (DRAM) type switching performance. Initially, as the voltage is gradually swept from 0 V to 2.8 V, the fabricated device is in a high resistance state (HRS; off state; "0" signal in data storage). When the voltage is further increased, a sudden current jump occurs at the critical voltage of 2.8 V, which indicates a violent electronic transition to the low resistance state (LRS; ON state; "1" signal in data storage) . Note that the electronic transitions in the first scan act as a "write" procedure. However, when the power is turned off, the current returns to the HRS immediately. After that, it can be reprogrammed from HRS to LRS using a smaller threshold voltage (2.4 V). The device maintains a high I on/off of 10 2 at 0.5 V. In contrast, the current of the device with high PFN content (10 wt%) (Fig. 9c) remained unchanged in the LRS for subsequent changes from 5 V to 0 V (scan 2) and from 0 to −5 V (Scan 3) of the scan. Even with the power turned off, the device was unable to perform the write procedure, representing non-volatile WORM-type memory performance with I on/off as high as 10 2 at 0.5 V. Under a fixed voltage value bias, the device was stable in switching time for as long as 10 4 seconds (Fig. 10a).

除了改變PFN組成外,圖9所示I-V測量結果亦說明基於具有相同電荷捕捉元素組成(即PFN/PBS-5)但具有不同相分離域尺寸的PFN/PBS摻合體的裝置的電氣特性和開關性能。為了有系統地分析相分離形態對裝置性能的影響,將所製備薄膜的厚度調整為60-90 nm,並且該薄膜具有光滑的表面,其均方根值約15.1-18.6 nm。在使用PFN/PBS-5噴塗薄膜的裝置的情況下(圖9d),其表現出非揮發性WORM記憶體性能,在0.5 V時Ion/off 高達102 ,並具有104 秒之長期穩定性(圖10b)。同樣,在基於PFN/PBS-5溶液剪切薄膜的裝置也觀察到類似的雙穩態躍遷(圖9e),展現非揮發性WORM記憶體性能。當施加正偏壓電壓時,裝置的電流在臨界電壓為1.8 V時突然增加到LRS。此後,其電流仍保持在LRS,在0.5 V時Ion/off 更高達104 ,後續的掃描(掃描2、3和4)持續104 秒(圖10c)。這可能是由於在施加剪力時因聚合物鏈的延伸而密集堆積的結構。這些結果闡明,調節相分離域的尺寸亦可控制電阻切換特性。In addition to changing the PFN composition, the IV measurements shown in Figure 9 also illustrate the electrical properties and switching of devices based on PFN/PBS blends with the same charge-trapping elemental composition (i.e., PFN/PBS-5) but with different phase-separated domain sizes performance. To systematically analyze the effect of phase-separation morphology on device performance, the thickness of the as-prepared film was adjusted to be 60–90 nm, and the film had a smooth surface with an rms value of about 15.1–18.6 nm. In the case of the device using the PFN/PBS-5 sprayed film (Fig. 9d), it exhibits non-volatile WORM memory performance with I on/off as high as 10 2 at 0.5 V and long-term stability of 10 4 s sex (Figure 10b). Similarly, similar bistable transitions were observed in the device based on the sheared films of the PFN/PBS-5 solution (Fig. 9e), exhibiting non-volatile WORM memory performance. When a positive bias voltage is applied, the current of the device suddenly increases to LRS at a threshold voltage of 1.8 V. After that, its current remained at LRS with I on/off up to 10 4 at 0.5 V and subsequent scans (scans 2, 3 and 4) lasted 10 4 s (Fig. 10c). This may be due to the densely packed structure due to the extension of polymer chains upon application of shear force. These results illustrate that tuning the size of the phase-separated domains can also control the resistive switching properties.

PFN/PBS-5旋轉塗佈薄膜、噴塗薄膜和溶液剪切薄膜的記憶體性能分別展現DRAM、WORM和WORM特性。圖11中以示意圖說明基於空間電荷限制電流(space charge limited current,SCLC)理論提出的ITO/(PFN/PBS-5薄膜)/Al的運作機制。在該裝置300中,絕緣性PBS聚合物31可作為載子阻檔部分(carrier blocking moieties),而PFN 32為一種具有低細胞毒性和電化學性能的共軛聚電解質,可作為嵌入聚合物基質31中的電荷捕捉點;當施加電壓時,若能獲得足夠的能量,電子33將被注入聚合物摻合體膜中,被功能性側基捕捉,然後透過躍遷過程由分離的PFN捕捉島(trapping islands) 32逸出。對於DRAM裝置,電荷可能會被PFN團簇捕捉;然而,較大之PFN域分隔可防止電荷載子躍遷。隨著PFN的負載比增加或相分離程度降低,各PFN顆粒之間的距離可顯著縮短。因此,各PFN顆粒可輕易克服捕捉點的展透閾值,然後降低電荷傳輸的能障,而導致WORM型記憶體性能。因此,使用具有最小的相分離域尺寸的PFN/PBS-5溶液剪切膜的裝置有望成為具優異性能的環保電阻式記憶體裝置。環保柔性電阻式記憶體 裝置 The memory performance of PFN/PBS-5 spin-coated film, sprayed film, and solution-sheared film exhibited DRAM, WORM, and WORM characteristics, respectively. FIG. 11 schematically illustrates the operation mechanism of ITO/(PFN/PBS-5 thin film)/Al based on the space charge limited current (SCLC) theory. In this device 300, insulative PBS polymer 31 acts as carrier blocking moieties, while PFN 32, a conjugated polyelectrolyte with low cytotoxicity and electrochemical properties, acts as an intercalating polymer matrix The charge trapping point in 31; when a voltage is applied, if sufficient energy is available, electrons 33 will be injected into the polymer blend film, trapped by functional side groups, and then trapped by the isolated PFN islands through a transition process (trapping islands) 32 escaped. For DRAM devices, charge may be trapped by PFN clusters; however, larger PFN domain separation prevents charge carrier transitions. As the loading ratio of PFN increases or the degree of phase separation decreases, the distance between individual PFN particles can be significantly shortened. Therefore, each PFN particle can easily overcome the transmittance threshold of the capture point, and then lower the energy barrier for charge transport, resulting in WORM-type memory performance. Therefore, the device using the PFN/PBS-5 solution sheared membrane with the smallest phase-separated domain size is expected to be an environmentally friendly resistive memory device with excellent performance. Environmentally friendly flexible resistive memory device

如圖2所示,在生物可分解且生物相容的PDA修飾Ecoflex彈性體基材24上,使用AgNW底電極層21/(PFN/PBS-5溶液剪切膜)活性層22/AgNW頂電極層23之夾層結構製造環保電阻式記憶體200。圖12和圖13所示的裝置仍表現出非揮發性WORM型記憶體性能,具有7000秒的卓越保存時間。此外,與使用ITO和Al電極的裝置相比,所製備裝置的Ion/off 大幅提高到1010 。關閉電流明顯減少係歸因於彈性體基材的光滑表面。此外,如圖14所示,使裝置彎曲凸起再鬆開100個循環以測試其柔韌性,儘管該裝置的切換電壓微幅增加至5.8 V,其Ion/off 仍可保持高達109 。該結果指出彎曲後保有良好的電子穩定性。因此,本發明成功地實現了使用生物可分解的絕緣體和基材而裝置性能穩定且優異的環保柔性電阻式記憶體裝置。 C. 結論As shown in Figure 2, on the biodegradable and biocompatible PDA modified Ecoflex elastomer substrate 24, AgNW bottom electrode layer 21/(PFN/PBS-5 solution shear film) active layer 22/AgNW top electrode was used The sandwich structure of layer 23 produces an environmentally friendly resistive memory 200 . The devices shown in Figures 12 and 13 still exhibit non-volatile WORM-type memory performance with an excellent retention time of 7000 seconds. In addition, the Ion/off of the prepared device is greatly improved to 10 10 compared to the device using ITO and Al electrodes. The apparent reduction in off current is attributed to the smooth surface of the elastomeric substrate. Furthermore, as shown in Figure 14, the device was subjected to an additional 100 cycles of loosening the flexure protrusions to test its flexibility, and the Ion /off of the device remained as high as 109 despite a slight increase in the switching voltage to 5.8 V. This result indicates good electronic stability after bending. Therefore, the present invention successfully realizes an environmentally friendly flexible resistive memory device with stable and excellent device performance using biodegradable insulators and substrates. C. Conclusion

本實施例已演示剛性電阻式記憶體以及在生物基聚合物基材上使用AgNW/(PFN/PBS-5溶液剪切膜)/AgNW夾層結構的環保柔性電阻式記憶體。值得注意的是,該環保柔性電阻式記憶體裝置具有特殊的非揮發性WORM型記憶體特性,包括高開/關電流比(1010 )、低操作電壓(2.6 V)和優異的穩定性(7000秒的保存時間)。此外,在進行100次循環的彎曲測試後,該裝置可維持109 的高開/關電流比。使用彎月面引導溶液剪切技術的PFN/PBS摻合體薄膜中相分離域尺寸明顯減少,可使裝置性能顯著提高。所製環保柔性電阻式記憶體裝置有望用於環保電子產品。This example has demonstrated rigid resistive memory and eco-friendly flexible resistive memory using AgNW/(PFN/PBS-5 solution shear film)/AgNW sandwich structure on bio-based polymer substrates. Notably, the eco-friendly flexible resistive memory device has special non-volatile WORM-type memory characteristics, including high on/off current ratio (10 10 ), low operating voltage (2.6 V), and excellent stability ( 7000 seconds save time). Furthermore, the device maintained a high on/off current ratio of 109 after 100 cycles of bending tests. The apparent reduction in the phase-separated domain size in the PFN/PBS blend films using the meniscus-guided solution shearing technique results in a significant improvement in device performance. The prepared environment-friendly flexible resistive memory device is expected to be used in environment-friendly electronic products.

綜上所述,本發明之聚合物摻合體不僅具有柔性,且具有良好的可加工性、耐熱性和耐化學性、生物降解性和機械性能,該聚合物摻合體形成的薄膜無毒且可崩解。將本發明新穎之聚合物摻合體應用於電子裝置中,可製備出對環境友善且具有可撓性的電子產品,尤其適用於應用在柔性電儲存裝置中作為活性層,可廣泛應用於可穿戴和可植入生物電子應用領域,具有豐富的潛在的應用前景。此外,本發明之電阻式記憶體裝置之製備方法,可利用如旋塗、噴塗和溶液剪切等不同加工技術,用以調節聚合物共混物中相分離區尺寸。In conclusion, the polymer blend of the present invention is not only flexible, but also has good processability, heat and chemical resistance, biodegradability and mechanical properties, and the film formed by the polymer blend is nontoxic and disintegrating untie. By applying the novel polymer blend of the present invention to electronic devices, electronic products that are environmentally friendly and flexible can be prepared, especially suitable for use in flexible electrical storage devices as active layers, and can be widely used in wearables and implantable bioelectronic applications, with rich potential application prospects. In addition, the fabrication method of the resistive memory device of the present invention can utilize different processing techniques such as spin coating, spray coating, and solution shearing to adjust the size of the phase separation region in the polymer blend.

以上透過較佳的示例性實施例更詳細地說明本發明。 儘管本文已公開示例性實施例,應當理解,其他變化也是可能的。這樣的變化不應視為背離本申請之示例性實施例的精神和範圍,並且對於本領域技術人員顯而易見的所有修飾仍包括在所附申請專利範圍內。The present invention is explained above in more detail by means of preferred exemplary embodiments. Although exemplary embodiments have been disclosed herein, it should be understood that other variations are possible. Such variations are not to be considered as a departure from the spirit and scope of the exemplary embodiments of the present application, and all modifications obvious to those skilled in the art are still included within the scope of the appended claims.

100A:旋轉塗佈實驗裝置 100B:噴塗實驗裝置 100C:溶液剪切實驗裝置 11:基材 12:聚合物摻合體溶液 13:刀具(剪切板) 200:電阻式記憶體裝置 21:底電極層 22:活性層 23:頂電極層 24:基材 300:WORM型電阻式記憶體裝置 31:PBS基質 32:PFN團簇 33:電子100A: Spin coating experimental device 100B: Spraying experimental device 100C: Solution shear experimental device 11: Substrate 12: Polymer Blend Solution 13: Knife (Shearing Board) 200: Resistive memory device 21: Bottom electrode layer 22: Active layer 23: Top electrode layer 24: Substrate 300: WORM type resistive memory device 31: PBS matrix 32: PFN clusters 33: Electronics

現就參考附圖僅以舉例的方式描述本發明技術的實施,其中:Implementations of the present techniques will now be described, by way of example only, with reference to the accompanying drawings, in which:

圖1示出根據本發明之較佳實施例實驗裝置的示意圖:(a)旋轉塗佈法、(b)噴塗法和(c)溶液剪切塗佈法。Figure 1 shows a schematic diagram of an experimental setup according to a preferred embodiment of the present invention: (a) spin coating method, (b) spray coating method and (c) solution shear coating method.

圖2示出根據本發明之較佳實施例:(a)使用PFN/PBS-5溶液剪切膜的完全環保且可崩解的電阻式記憶體裝置的示意結構、(b) PBS及PFN結構。Figure 2 shows a schematic structure of a completely eco-friendly and disintegrable resistive memory device using PFN/PBS-5 solution shear film, (b) PBS and PFN structures according to preferred embodiments of the present invention .

圖3示出根據本發明之較佳實施例透過不同加工方法製備的PFN/PBS-5膜的紫外光吸收光譜:(a)旋轉塗佈膜、(b)噴塗膜和(c)溶液剪切膜。Figure 3 shows the UV absorption spectra of PFN/PBS-5 films prepared by different processing methods according to preferred embodiments of the present invention: (a) spin-coated film, (b) sprayed film and (c) solution sheared membrane.

圖4示出根據本發明之較佳實施例PFN/PBS-5的TEM影像(左)及雷射共軛焦影像(右):(a)旋轉塗佈膜、(b)噴塗膜和(c)溶液剪切膜。插圖示出對應的透射光影像。Figure 4 shows TEM images (left) and laser conjugate focus images (right) of PFN/PBS-5 according to the preferred embodiment of the present invention: (a) spin-coated film, (b) sprayed film and (c) ) solution sheared the membrane. The inset shows the corresponding transmitted light image.

圖5示出根據本發明之較佳實施例由不同剪切速率製備的PFN/PBS-5溶液剪切膜的雷射共軛焦影像:(a) 0.08、(b) 0.10和(c) 0.50 mm s-1Figure 5 shows the laser conjugate focus images of PFN/PBS-5 solution sheared films prepared from different shear rates according to a preferred embodiment of the present invention: (a) 0.08, (b) 0.10 and (c) 0.50 mm s -1 .

圖6示出根據本發明之較佳實施例透過不同處理方法製備的PFN/PBS-5膜的PL發射光譜。6 shows the PL emission spectra of PFN/PBS-5 films prepared by different treatment methods according to the preferred embodiment of the present invention.

圖7示出根據本發明之較佳實施例PFN旋轉塗佈膜的PL發射光譜。FIG. 7 shows the PL emission spectrum of the PFN spin-coated film according to the preferred embodiment of the present invention.

圖8示出根據本發明之較佳實施例PFN/PBS-5的極化PL發射光譜:(a)旋轉塗佈膜和(b)溶液剪切膜。Figure 8 shows polarized PL emission spectra of PFN/PBS-5 according to a preferred embodiment of the present invention: (a) spin-coated film and (b) solution sheared film.

圖9示出根據本發明之較佳實施例基於(a) PFN旋轉塗佈膜、(b) PFN/PBS-5旋轉塗佈膜、(c) PFN/PBS-10旋轉塗佈膜、(d) PFN/PBS-5噴塗膜及(e) PFN/PBS-5溶液剪切膜的電阻式記憶體裝置的I-V特性;圖中圖例之數字為掃描編號。Figure 9 shows the preferred embodiments according to the present invention based on (a) PFN spin-coated film, (b) PFN/PBS-5 spin-coated film, (c) PFN/PBS-10 spin-coated film, (d) ) I-V characteristics of resistive memory devices of PFN/PBS-5 sprayed film and (e) PFN/PBS-5 solution sheared film; the numbers in the legend in the figure are scan numbers.

圖10示出根據本發明之較佳實施例使用於0.5 V下運作之(a) PFN/PBS-10旋轉塗佈膜、(b) PFN/PBS-5噴塗膜和(c) PFN/PBS-5溶液剪切膜的電阻式記憶體裝置的保留特性。Figure 10 shows (a) PFN/PBS-10 spin-coated film, (b) PFN/PBS-5 sprayed film, and (c) PFN/PBS- 5. Retention properties of resistive memory devices of solution shear films.

圖11示出根據本發明之較佳實施例WORM型電阻式記憶體裝置的機制示意圖。FIG. 11 shows a schematic diagram of the mechanism of a WORM type resistive memory device according to a preferred embodiment of the present invention.

圖12示出根據本發明之較佳實施例使用PFN/PBS-5溶液剪切膜的PDA修飾Ecoflex彈性體上的環保電阻式記憶體裝置的I-V特性。Figure 12 shows the I-V characteristics of environmentally friendly resistive memory devices on PDA-modified Ecoflex elastomers using PFN/PBS-5 solution shear films according to a preferred embodiment of the present invention.

圖13示出根據本發明之較佳實施例在生物可分解Ecoflex基材上使用PFN/PBS-5溶液剪切膜的電阻式記憶體裝置的保留特性。Figure 13 shows the retention characteristics of resistive memory devices using PFN/PBS-5 solution shear films on biodegradable Ecoflex substrates according to a preferred embodiment of the present invention.

圖14示出根據本發明之較佳實施例環保電阻式記憶體裝置經過100次循環式彎曲測試後的I-V特性。14 shows the I-V characteristics of the eco-friendly resistive memory device according to the preferred embodiment of the present invention after 100 cycles of bending tests.

無。without.

200:電阻式記憶體裝置200: Resistive memory device

21:底電極層21: Bottom electrode layer

22:活性層22: Active layer

23:頂電極層23: Top electrode layer

24:基材24: Substrate

Claims (10)

一種柔性之聚合物摻合體,該聚合物摻合體包括: 一第一材料,該第一材料中包括聚丁二酸丁二醇酯聚合物或其衍生物;及 一第二材料,該第二材料中包括可導電有機聚合物; 其中,該聚合物摻合體係由該第一材料及該第二材料所摻合而成,且該聚合物摻合體具有生物可分解性。A flexible polymer blend comprising: a first material comprising a polybutylene succinate polymer or a derivative thereof; and a second material, the second material includes a conductive organic polymer; Wherein, the polymer blend system is formed by blending the first material and the second material, and the polymer blend has biodegradability. 如請求項1所述之聚合物摻合體,其中,該可導電有機聚合物係選自由聚乙炔基聚合物、聚對苯乙烯基聚合物、聚苯胺、聚吡咯基聚合物、聚芴(polyfluorene)基聚合物、聚對伸苯基硫醚(poly-p-phenylenesulphide)、聚吲哚基聚合物、聚咔唑基聚合物、聚薁(polyazulene)基聚合物、聚萘基聚合物、聚噻吩基聚合物、聚噻吩亞乙烯基聚合物及其等之衍生物所組成之群組。The polymer blend of claim 1, wherein the conductive organic polymer is selected from the group consisting of polyacetylene-based polymers, poly-p-styrene-based polymers, polyaniline, polypyrrole-based polymers, polyfluorene )-based polymers, poly-p-phenylenesulphide, polybenzazole-based polymers, polycarbazole-based polymers, polyazulene-based polymers, polynaphthalene-based polymers, poly The group consisting of thiophene-based polymers, polythiophene vinylidene polymers and their derivatives. 如請求項1所述之聚合物摻合體,其中,該可導電有機聚合物係聚芴基聚合物或其衍生物。The polymer blend of claim 1, wherein the conductive organic polymer is a polyfluorene-based polymer or a derivative thereof. 如請求項1所述之聚合物摻合體,其中,該可導電有機聚合物相對於該第一材料,係以1 wt%至30 wt%之量存在。The polymer blend of claim 1, wherein the conductive organic polymer is present in an amount of 1 wt% to 30 wt% relative to the first material. 如請求項1所述之聚合物摻合體,其中,該可導電有機聚合物係聚[(9,9-雙(3'-N,N -二甲基胺基)丙基)-2,7-芴)-alt-2,7-(9,9-二辛基芴)],且其相對於該第一材料,係以至少1 wt%至20 wt%之量存在。The polymer blend of claim 1, wherein the conductive organic polymer is poly[(9,9-bis(3'- N,N -dimethylamino)propyl)-2,7 -fluorene)-alt-2,7-(9,9-dioctylfluorene)], and it is present in an amount of at least 1 wt% to 20 wt% relative to the first material. 一種電子裝置,其具有如請求項1至5任一項所述之聚合物摻合體。An electronic device having the polymer blend of any one of claims 1 to 5. 一種電阻式記憶體裝置,依序包括:一底電極層、如請求項1至5任一項所述之聚合物摻合體作為一活性層及一頂電極層;其中該活性層係位於該底電極層及該頂電極層之間,且該底電極層及該頂電極層之位置特定對齊,以形成具有有效接合面的儲存單元的交叉點陣列。A resistive memory device, comprising sequentially: a bottom electrode layer, the polymer blend as claimed in any one of claims 1 to 5 as an active layer and a top electrode layer; wherein the active layer is located on the bottom The positions of the electrode layer and the top electrode layer, and the position of the bottom electrode layer and the top electrode layer, are specifically aligned to form an array of intersections of memory cells with effective bonding surfaces. 如請求項7所述之電阻式記憶體裝置,其中,進一步包括一基材,該基材係生物可分解之生物基聚合物(biobased polymer)。The resistive memory device of claim 7, further comprising a substrate, the substrate being a biodegradable biobased polymer. 如請求項7所述之電阻式記憶體裝置,其中,該底電極層及/或該頂電極層係包括銀奈米線。The resistive memory device of claim 7, wherein the bottom electrode layer and/or the top electrode layer comprise silver nanowires. 一種電阻式記憶體裝置之製造方法,包括以下步驟: (a) 準備一基材; (b) 於該基材覆上導電物質以作為一底電極層; (c) 準備如請求項1至5任一項所述之聚合物摻合體溶液,並將該聚合物摻合體藉由選自由旋轉塗佈法、噴塗法及溶液剪切塗佈法之至少一種技術塗覆至該電極上,以作為一活性層;及 (d) 於該活性層覆上導電物質以作為一頂電極層; 其中,該底電極層及該頂電極層位置特定對齊,以形成具有有效接合面的儲存單元的交叉點陣列。A manufacturing method of a resistive memory device, comprising the following steps: (a) preparing a substrate; (b) coating the substrate with a conductive substance as a bottom electrode layer; (c) preparing a polymer blend solution as claimed in any one of claims 1 to 5, and applying the polymer blend by at least one selected from the group consisting of spin coating, spray coating and solution shear coating technology is applied to the electrode as an active layer; and (d) covering the active layer with a conductive material as a top electrode layer; Wherein, the bottom electrode layer and the top electrode layer are specifically aligned to form a cross point array of memory cells with effective bonding surfaces.
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