TW202147497A - Substrate processing apparatus - Google Patents

Abstract

A substrate transport apparatus comprising a support frame an articulated arm connected to the support frame, having at least one movable arm link and an end effector connected to the movable arm link, with a substrate holding station located thereon. Wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing, formed of link case modules rigidly coupled to each other, and a pulley system cased in and extending through the rigidly coupled link case modules substantially end to end of the modular composite arm link casing, wherein the rigidly coupled link case modules include link case end modules connected by at least one interchangeable link case extension module having a predetermined characteristic determining a length of the movable arm link, wherein at least one interchangeable link case extension module is selectable for connection to link case end modules forming the reconfigurable arm link.

Description

Substrate Handling Equipment

Exemplary embodiments relate to substrate handling tools, and more particularly to substrate transport equipment. [Related applications] This application is a non-provisional application of US Provisional Application No. 62/970,565 filed on February 5, 2020 and asserts the rights of the provisional application, the contents of which are hereby incorporated by reference middle.

Semiconductor manufacturing facilities use substrate processing systems that include twin processing modules coupled to the same vacuum transport system. In some conventional systems, semiconductor substrates (which are also referred to as substrates or wafers) are typically transported to the twin processing molds by transport equipment that includes side-by-side telescoping arms The side-by-side telescopic arms can reach into the side-by-side substrate holding stations of the twin processing modules. In other conventional systems, long-arm "yoke"-style transfer arms (eg, arms with arm links that allow non-radially aligned substrate holder extension) are used to transfer one sheet at a time The substrate transfers the substrate to each of the substrate holding stations of the twinned processing modules.

Typically, the above-mentioned yoke transfer equipment and other articulated link substrate handling equipment (eg, Select Compliant Articulated Robotic Arms (SCARA)) that transport substrates to and from these substrate holding stations use metal belts and A pulley drive is used to transmit motion to at least some of the arm links of the yoke transfer device. The size constraints of the metal belt and pulley drive determine at least in part, for example, the height and/or overall size of the arm links. Long arm links The length of the rod affects the alignment of the band and pulley.

The transfer devices mentioned above typically use duplex bearing pairs that are held to the shaft with bearing clamps at the pivot joint between the arm links. A dual bearing is a set of two bearings constructed to be mounted to a shaft with the inner and outer rings clamped together with a preload for greater axial and radial rigidity. As with metal straps, the size constraints of the dual bearing pair determine at least in part, for example, the height and/or overall size of the arm links. It will be appreciated that the size of the substrate transport arm determines, at least in part, the size of the transport chamber within which the transport arm operates, which can affect semiconductor yield. The double bearing is typically installed by heating the double bearing, then allowing the double bearing to cool and shrink on the shaft to create a shrink fit between the double bearing and the shaft. Operation of the dual bearing in a high temperature environment can affect the stiffness of the shrink fit between the dual bearing and the shaft.

A substrate conveying equipment comprising: support frame; an articulated arm connected to the support frame and having at least one movable arm link and an end effector connected to the movable arm link, a substrate holding a station is provided on the end effector; Wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing formed by a plurality of link housing modules firmly coupled to each other ), and a pulley system that is received within and extends through the rod housing modules rigidly coupled to each other substantially from one end of the modular composite arm link housing to the other, and wherein the rigidly coupled rod housing modules include rod housing end modules connected by at least one interchangeable rod housing extension module having functions for determining the movable rod housing the predetermined characteristic configuration of the length of the arm link; and Wherein the at least one interchangeable link housing extension module can be selected from a plurality of different interchangeable link housing extension modules for connecting to the link housing end modules and forming the reconstituted arm connection rod, each different interchangeable link housing extension module has a different corresponding predetermined feature configuration to determine a corresponding different length of the movable arm link for the modular composite arm The link housing and the reconfigurable arm link are selectively set to a predetermined arm link length of a number of predetermined arm link lengths.

FIG. 1A shows an exemplary substrate processing apparatus 100 in accordance with aspects of the present disclosure. Although aspects of the present disclosure will be described with reference to the accompanying drawings, it should be understood that aspects of the present disclosure may be embodied in many forms. Furthermore, any suitable size, shape or variety of elements or materials may be used.

Aspects of the present disclosure provide a substrate processing apparatus 100 that includes a substrate transport apparatus 130 . The substrate transport apparatus 130 includes an arm 131 having at least two arm links and an end applicator (also referred to herein as a substrate holder) rotatably coupled to each other, and in one aspect Has a shoulder joint/axis SX in a fixed position. The substrate transport apparatus 130 is constructed to substantially synchronize side-by-side substrate handling (or other holding) stations 190-191, 192-193, 194-195, 196-197 Picking (and/or placing) substrates. The substrate handling apparatus 130 is configured to align each of the substrates on each side of a transfer chamber 125, 125A (described herein) with independent automatic wafer centering for each substrate A side-by-side substrate processing station performs a substantially simultaneous picking of substrates concurrently with the substrate transport of the substrate transport apparatus 130 . It should be noted that, by briefly referring to Figures 7E-7J, the rapid exchange of substrate S is performed using the substrate transport apparatus 130 from a set or pair of side-by-side substrate processing stations (eg, for example, substrate processing Stations 190-191) remove substrates S (S1, S2) substantially synchronously and use the substrate transport apparatus 130 to place other different substrates (S3, S4) substantially synchronously into the same side-by-side substrate processing station (i.e. , substrate processing stations 188-189), where the removal and placement occurs with placement without any of the removed substrates S (S1, S2) between them (ie, the removed substrate S (S1, S2) are held by the substrate transport device) in rapid succession. In other aspects, the rapid exchange of substrates occurs without Z-axis motion occurring between the picking and placement of the substrates. In other words, there is substantially no other Z-axis motion of the substrate transport apparatus 130 other than raising (picking) or lowering (placing) the substrate to a substrate holding station. For example, each plane 499, 499A of the substrate holder planes (as described herein, the substrate holding stations 203H1, 203H2, 204H1, 204H2 of the dual-sided substrate holder form one or more planes) (see FIG. 2D, 10 and 11) corresponds to and is aligned with at least one plane of the transport opening (see FIGS. 1B and 1C ) on a common transport chamber for transfer at a given Z position of the plane of the transport opening, This will be described further herein.

Aspects of the present disclosure also provide a transport arm drive system using cables or cables and pulleys that can at least reduce the height of the transport arm links compared to conventional band and pulley drives. The described cable or cable and pulley drive (referred to herein as a cable and pulley drive for ease of illustration) can also be substantially eliminated or reduced compared to conventional belt and pulley drives Alignment issues between the cables and individual pulleys, and their operation is not affected by the deflection of the arm links due to gravity. The substantial elimination or reduction of alignment issues between the cables and individual pulleys may provide for longer arm links to implement longer extensions of the substrate transport arm.

Aspects of the present disclosure may provide a stiffer and more compact transport arm (eg, compared to conventional dual bearings) by including crossed roller bearings at the pivot joints of the transport arm. In some aspects, crossed roller bearings may form the pulleys of the transport arm link drive system, which further reduces the height of the transport arm links and reduces the number of transport arms. According to aspects of the present disclosure, crossed roller bearings may be coupled to individual shafts in a manner that is substantially unaffected by the high operating temperatures and/or variations in operating temperatures of the operating environment of the substrate transport handle.

Referring also to FIG. 2 , in accordance with aspects of the present disclosure, the arm 131 includes at least two substrate holders (also referred to as end applicators or end applicator links) 203 , 204 . Although arm 131 is described as having at least two substrate holders, in other aspects the arm may have less than two (eg, one or at least one) substrate holders or more than two substrate holders device. In one aspect, the substrate holders 203, 204 are double-ended or dual-disc substrate holders, wherein each substrate holder has two longitudinally spaced ends with at least one base at each end. material holding stations or trays; however, in other aspects, the substrate holders may have any suitable configuration, such as those described herein. The at least two substrate holders 203, 204 rotate independently and relative to each other about the wrist axis WX of the substrate transport apparatus 130 for implementing the side-by-side substrate processing stations 190-191, 192- One or more of automatic centering and adjustment of different pitches between 193, 194-195, 196-197.

Referring again to FIG. 1A, the substrate processing apparatus 100, such as, for example, a semiconductor tool station, is shown in accordance with aspects of the present disclosure. Although a semiconductor tool station is shown in the figures, the aspects of the present disclosure described herein may be applied to any tool station or application that uses a robotic manipulator. In one aspect, the substrate processing apparatus 100 is shown having a clustered arrangement (eg, having substrate processing stations 190-197 connected to a central or common chamber), while in other aspects In this case, the processing apparatus may be a tool in a linear configuration, however, aspects of the present disclosure may be applied to any suitable tool station. The substrate processing apparatus 100 generally includes an atmospheric front end 101 (also referred to herein as an atmospheric section), two or more vacuum load locks 102A, 102B, and a vacuum back end 103 . The two or more vacuum load lock chambers 102A, 102B may be coupled to any suitable ports or openings of the front end 101 and/or rear end 103 in any suitable configuration. For example, in one aspect, the two or more vacuum load lock chambers 102A, 102B (and individual openings in the transport chamber walls 125W) may be arranged on a common horizontal plane in a side-by-side configuration, as shown in FIG. 1B. In other aspects, the two or more vacuum load lock chambers 102A, 102B may be arranged in a grid such that the two or more vacuum load lock chambers 102A, 102B, 102C, 102D (and The individual openings in the transport chamber wall 125W) are arranged in columns (eg, with spaced apart horizontal planes) and rows (eg, with spaced apart vertical planes), as shown in Figure 1C.

It should be understood that while two or more vacuum load lock chambers 102A, 102B are shown on one end 100E1 of the transport chamber 125, in other aspects the two or more vacuum load lock chambers 102A, 102B, 102B may be arranged on any number of sides 100S1 , 100S2 and/or ends 100E1 , 100E2 of the transport chamber 125 . Each of the two or more vacuum load lock chambers 102A, 102B, 102C, 102D may also include one or more wafer/substrate parking planes WRP (FIGS. 1B and 1C) within which substrates are held on suitable supports within the individual vacuum load lock chambers 102A, 102B, 102C, 102D. In other aspects, the substrate processing apparatus 100 may have any suitable configuration.

Components of each of the front end 101, the two or more vacuum load lock chambers 102A, 102B, and the back end 103 may be connected to a controller 110, which may be any suitable control architecture (eg, for example, , part of Clustered Architecture Control). The control system may be a closed loop controller having a master controller, a cluster controller and an autonomous remote controller, such as described under the title "Scalable Motion Control System" issued March 8, 2011 of US Patent No. 7,904,182, the disclosure of which is incorporated herein by reference. In other aspects, any suitable controller and/or control system may be used.

In one aspect, the front end 101 generally includes a loadport module 105 and a mini-environment 106, such as, for example, an equipment front end module (EFEM). The loadport module 105 may be a case opener/loader-to-tool standard (BOLTS) interface that complies with SEMI standard E15 for 300mm loadport, front or lower opening cases/pods and cassettes .1, E47.1, E62, E19.5 or E1.9. In other aspects, the load port modules may be constructed as 200mm wafer/substrate interfaces, 450mm wafer/substrate interfaces, or any other suitable substrate interface, such as, for example, larger or smaller semiconductors Wafers/substrates, flat panels for flat panel displays, solar panels, reticle or any other suitable item. Although two loadport modules 105 are shown in FIG. 1A , in other aspects, any suitable number of loadport modules may be incorporated into the front end 101 . The load port module 105 may be constructed to accept substrate carriers or cassettes C from overhead transport systems, automated guided vehicles, manually guided vehicles, rail guided vehicles, or from any suitable delivery method. Loadport module 105 can interface with the mini-environment 106 through loadport 107 . Load port 107 may allow substrate S to pass between substrate cassette C and mini-environment 106 . The mini-environment 106 generally includes any suitable transfer robot 108, which may include one or more aspects of the present disclosure described herein. In one aspect, the robot 108 may be a track-mounted robot such as described in, eg, US Patent No. 6,002,840, issued December 14, 1999; US Patent No. 6,002,840, issued April 16, 2013 8,419,341; and, the robot of US Pat. No. 7,648,327, issued Jan. 19, 2010, the disclosures of which are hereby incorporated by reference. In other aspects, the robot 108 may be substantially similar to that described herein with reference to the back end 103 . The mini-environment 106 may provide a controlled dust-free area for substrate transfer between multiple load port modules.

The two or more vacuum load lock chambers 102A, 102B (and 102C, 102D) may be disposed between and connected to the mini-environment 106 and the back end 103 . In other aspects, the load port module 105 may be substantially directly coupled to the at least one load lock chamber 102A, 102B or the transport chamber 125 where the substrate cassette C is depressurized to the transport chamber 125 The vacuum and substrate S are transferred directly between the substrate cassette C and the respective load lock chamber 102A, 102B or the transport chamber 125. In this aspect, the substrate cassette C can function as a load lock chamber such that the process vacuum of the transport chamber extends into the substrate cassette C. It will be appreciated that while the substrate cassette C is coupled substantially directly to the vacuum load lock chambers 102A, 102B via a suitable load port, any suitable transfer equipment may be provided within the load lock chamber or The substrate cassette C may be entered and exited in other ways for transferring substrates S to and from the substrate cassette C back and forth. It should be noted that, as used herein, the term vacuum refers to the high vacuum in which the substrate S is processed, such as ^10-5 Torr or less. The two or more vacuum load lock chambers 102A, 102B generally include an atmosphere slot/slit valve ASV and a vacuum slot/slot valve VSV (collectively referred to herein as slot valves) SV). The load lock chambers 102A, 102B (and the slit valve SV for the substrate station module 150) can provide environmental isolation, which is used to empty the load lock chamber 102A after loading substrate S from the atmospheric front end 101 , 102B and maintain a vacuum within the transport chamber 125 while venting the load lock chambers 102A, 102B with a blunt gas (eg, nitrogen). The slit valve SV of the substrate processing apparatus 100 may be positioned in the same plane but vertically stacked in different planes (as described above with reference to the vacuum load lock chambers 102A, 102B, 102C, 102D) to allow substrates Material is transferred back and forth between substrate station modules 150 (also referred to herein as processing stations) coupled to the transfer chamber 125 and the load lock chambers 102A, 102B. The two or more load lock chambers 102A, 102B (and/or the front end 101 ) may also include an aligner 109 for aligning a reference point of the substrate S to a desired position for processing or any other suitable substrate processing equipment. In other aspects, the two or more vacuum load lock chambers 102A, 102B may be located in any suitable location in the processing apparatus and have any suitable configuration.

The vacuum back end 103 generally includes a transport chamber 125, one or more substrate station modules 150, and any suitable number of substrate transport equipment including one or more aspects of the present disclosure described herein 130. The substrate delivery chamber 125 is constructed to maintain an isolated atmosphere therein, and has a side wall 125W having more than one substrate delivery opening (eg, slit valve SV, or an opening corresponding thereto). , such as the openings on wall 125W shown in FIGS. 1B and 1C to which slit valves are coupled to sealingly close the openings), the substrate transport openings at a common level along the The sidewalls 125W are spaced relative to each other and arranged side by side (FIG. IB), or in other aspects in columns and rows (FIG. 1C). The transport chamber 125 may have any suitable shape and size, such as conforming to the SEMI standard E72 specification. The substrate transport apparatus 130 will be described below and may be located at least partially within the transport chamber 125 for transporting substrates in the two or more vacuum load lock chambers 102A, 102B (or in a Between the substrate cassette C) of the load port and the various substrate station modules 150. In one aspect, the substrate transport apparatus 130 can be removed from the transport chamber 125 as a modular unit such that the substrate transport apparatus 130 is compliant with SEMI Standard E72 specifications.

The substrate station modules 150 can be arranged side by side on a common side or surface of the transport chamber 125 and/or a single substrate station module 150 can be arranged on a single side or surface of the transport chamber 125 However, in other aspects, the substrate station modules may be a single substrate station module 150S (FIG. 8), three substrate station modules 150T (FIG. 12), and/or have any suitable A number of substrate handling/holding stations are provided in a single housing or in other sub-substrate station modules arranged side-by-side on a common side/surface of the transport chamber 125 . In one aspect, the side-by-side substrate processing stations are arranged within a common (ie, the same) processing module housing 150H (FIG. 1A) to form what is commonly known as a twin or tandem substrate. In other aspects, the side-by-side substrate processing stations are a single substrate station 150S (FIG. 7A) that are separated from each other and do not share a common housing. It should be understood that the twin substrate station module 150D, the single substrate station module 150S, the three substrate station module 150T, and any other substrate station module having any suitable number of substrate processing stations may be any Suitable combinations are coupled to the same (ie, common) transport chamber 125 (eg, see Figure 8, single and twin substrate station modules are coupled to the same transport chamber).

Referring to FIG. 1A and the substrate station module 150, eg on the side 100S1 of the transport chamber 125, the substrate processing stations 190, 191 are arranged side-by-side within a common housing 150H and accessible from inside the transport chamber 125 via a single Slit valve entry and exit (see for example substrate processing stations 192, 193), the slit valve may be common to both substrate processing stations or each substrate processing station may have an independently operable slit valve (eg See substrate processing stations 190, 191). The side-by-side substrate processing stations (eg, eg, 190, 191) are spaced apart from each other or by any suitable distance or spacing D (as will be described herein), which can be achieved by varying the substrate The distance between the substrate processing stations of the at least two double-ended substrate holders 203, 204 of the transport apparatus 130 is adjusted.

The substrate station modules 150 may operate on the substrate S through various deposition, etching, or other types of processing to form circuits or other desired structures on the substrate. Typical processes include, but are not limited to, thin film processes using vacuum, such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation (eg, ion implantation), metrology, rapid thermal processing (RTP), dry strip atomic layer deposition (ALD), oxidation/diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonders ( wire bonder) and evaporation or other thin film treatments using vacuum pressure. Substrate station module 150 is communicatively connected to transport chamber 125 in any suitable manner (eg, via slit valve SV) to allow substrates to be fed from transport chamber 125 to the substrate station modules 150 and vice versa. The slit valve SV of the transport chamber 125 may be arranged to allow connection of the twin processing modules.

It should be noted that substrate transfer to and from the substrate station modules 150 coupled to the transport chamber 125 and the load lock chambers 102A, 102B (or cassette C) may be performed at the substrate transport apparatus 130 At least a portion of the at least two double-ended substrate holders 203, 204 and individual substrates of a set or pair of predetermined side-by-side substrate processing stations 190-191, 192-193, 194-195, 196-197 Occurs when processing stations are aligned. According to aspects of the present disclosure, the two substrates S are transferred substantially simultaneously to a separate predetermined substrate station module 150 (eg, such as when the substrates are removed from the twin processing module in the manner described herein. group is picked/placed).

The substrate transport apparatus 130 is generally described herein as having at least one articulated multi-link arm 131 having drive sections 220, 220A, 220B, 220C connected to the transport chamber 125 at fixed locations; however , in other aspects, the substrate transport apparatus 130 may be mounted on a boom arm or on a linear carriage, such as described in the title "Processing Apparatus" filed on October 16, 2014 ” of U.S. Patent Application No. 15/103,268 and International Patent Application No. PCT/US13/25513 filed on February 11, 2013 and entitled “Substrate Processing Apparatus”, the disclosures of these patents Incorporated herein by this reference. The at least one articulated multi-link arm 131 has an upper arm 201 and a forearm 202 located within the transport chamber 125 . The proximal end 201E1 of the upper arm 201 is rotatably engaged to the drive sections 220, 220A, 220B, 220C in the fixed position. The forearm 202 is rotatably joined to the upper arm 201 at the distal end 201E2 of the upper arm 201 and the upper arm 201 is a substantially rigid jointless link between the proximal end 201E1 and the distal end 201E2.

In aspects of the disclosure described herein, at least one end applicator link (which will be described herein) is rotatably coupled to a joint (eg, wrist) at one end of the forearm 202 joint or axis WX) such that the at least one applicator link rotates relative to the forearm 202 about a common axis of rotation at the joint, the at least one applicator link having more than one substrate holding station ( which will be described herein) which depend therefrom from the applicator link and are juxtaposed with each other along a common plane 499 (see Figures 2D, 10 and 11) and are constructed such that the at least Rotation of an applicator linkage about the common axis of rotation causes rotation of the more than one substrate holding stations about the common axis of rotation. As will be described herein, the substrate transport apparatus 130 The drive sections 220, 220A, 220B, 220C are configured to extend and retract the multi-link arm 131 (and the at least one coupled thereto) relative to the fixed position at least along a non-radial linear path. end effector) such that each of the juxtaposed more than one substrate holding stations traverses linearly along the non-radial path under extension and retraction of the multi-link arm 131, and Substantially synchronously passing through respective respective openings of the more than one juxtaposed substrate holding stations on the common plane (eg, slit valve SV or openings corresponding thereto, such as shown in FIGS. 1B and 1C ) Corresponding openings in wall 125W to which the slit valves are coupled to sealingly close the openings). In other aspects, the drive sections 220, 220A, 220B, 220C of the substrate transport apparatus 130 Constructed to extend and retract the multi-link arm 131 relative to the fixed position along one or both of a radial linear path and a non-radial linear path for transporting substrates as described herein material.

Still referring to Figure 1A and to Figures 2A-2D, the substrate transport apparatus 130 includes a frame 220F (also referred to herein as a support frame), a drive section 220 connected to the frame 220F, and at least one articulated arm 131 ( For example purposes only a single arm is shown) having at least one movable arm link 201, 202 and end effector links 203, 204 connected to the movable arm link, the end effector The actuator links 203, 204 have a substrate holding station 203H1, 203H2, 204H1, 204H2 located thereon. In this aspect, the articulated arm is a multi-link arm 131 . In one aspect, the arm 131 is a selectively compliant articulated robotic arm (which is referred to herein as a "SCARA arm"), but in other aspects, may have any suitable configuration. For example, the arm 131 includes an upper arm link 201, a forearm link 202, and at least one end effector link 203, 204 (ie, a dual link SCARA with at least one end effector link); although in other aspects the The arm 131 may have any suitable number of arm links and substrate holders. The upper arm link 201 is a substantially rigid link (ie, the upper arm link 201 is free between the longitudinal ends 201E1, 201E2) The upper arm link 201 is rotatably coupled to the drive section 220 at an elongated end 201E1 (which forms what is referred to as the shoulder joint or axis SX) for wrapping around the arm 131 The shoulder axis SX rotates. In one aspect, the shoulder joint or axis SX is in a fixed position (shown in the figures along the axis of symmetry of the transport chamber, but can be offset in other aspects the axis of symmetry of the transport chamber). The forearm link 202 is a substantially rigid link (ie, an articulation of the forearm link 202 between the longitudinal ends 202E1, 202E2). The lengthwise end 202E1 of the lever 202 is rotatably coupled to the lengthwise end 201E2 of the upper arm link 201 such that the forearm link 202 rotates about the elbow axis EX of the arm 131. Here , the forearm link 202 and the upper arm link 201 have similar lengths (eg, from joint center to joint center), but in other aspects the forearm link 202 and the upper arm link 201 may have different lengths Length (eg, from joint center to joint center).

Referring also to Figures 5A-5E, in one aspect, the movable arm links 201, 202 are reconfigurable arm links 201R, 202R having link shell molds that are rigidly coupled to each other Modular composite arm link casings 201C, 202C formed by the assembly, and pulley system 655 (eg, formed by a transmission member and a pair of pulleys), which are substantially derived from the modular composite arm link. The housings 201C, 202C are housed in the link housings, which are rigidly coupled to each other, from one end to the other (eg, between, for example, the axes of rotation SX, EX, WX at each end of the arm link) inside the modules and extending through them. Here, as will be described in greater detail herein, the rigidly coupled linkage housing modules include at least one central arm section 510A, 510B (also referred to herein as interchangeable) connecting end couplings 511, 512, 513, 514 (also referred to herein as linkage housing end modules), the at least one central arm region The segments have a predetermined characteristic configuration that determines the length OAL of the movable arm links 201 , 202 . According to aspects of the present disclosure, the at least one central arm section 510A, 510B can be selected from several different central arm sections (interchangeable linkage housing extension modules) 510A1-510An, 510B1-510Bn ( Each central arm segment has a corresponding predetermined feature configuration for determining a corresponding different length of the movable arm links 201, 202) for connection to the end couplings 511, 512 , 513, 514 and form the reconfigurable arm link 201R, 202R for selectively setting the modular composite arm link housing 201C, 202C and the reconfigurable arm link 201R, 202R to a plurality of A predetermined arm link length OAL of the predetermined arm link lengths OALn (each different length OALn corresponds to the different lengths CAL1-CALn of the equally different central arm segments 510A1-510An, 510B1-510Bn).

For example, the upper arm link 201 and the forearm link 202 are each modular links having respective central arm sections 510A, 510B and respective end couplings 511-514. For example, the upper arm link 201 includes a proximal coupling member 511 that forms the proximal end 201E1 of the upper arm link 201 . The central arm section 510A is coupled to the proximal coupling 511 in any suitable manner (eg, with any suitable removable fasteners). A distal coupling 512 is coupled to the central arm section 510A and opposite the proximal coupling 511 to form the distal end 201E2 of the upper arm 201 . Similarly, the forearm link 202 includes a proximal end coupling 513 that forms the proximal end 202E1 of the forearm link 202 . The central arm section 510B is coupled to the proximal coupling 511 in any suitable manner (eg, with any suitable removable fasteners). A distal coupling 514 is coupled to the central arm section 510B and opposite the proximal coupling 513 to form the distal end 202E2 of the forearm 202 .

The end couplings 511, 512 for the upper arm link 201 can be substantially similar to each other, such that the end couplings 511, 512 are interchangeable with each other (ie, the end coupling 511 can be coupled to either end of the central arm section 510A with to form the distal end 201E2 or proximal end 201E1 of the upper arm link 201 and end coupling 512 can be coupled to either end of the central arm section 510A to form the distal end 201E2 or proximal end 201E1 of the upper arm link 201) . Similarly, the end couplings 513, 514 for the forearm link 202 can be substantially similar to each other such that the end couplings 513, 514 are interchangeable with each other (ie, the end coupling 513 can be coupled to any of the central arm segment 510B one end to form the distal end 202E2 or proximal end 202E1 of the forearm link 202 and end coupling 514 may be coupled to either end of the central arm section 510B to form the distal end 202E2 or proximal end of the forearm link 202 terminal 202E1). In some aspects, the end coupling for the upper arm link 201 and the end coupling for the forearm link 202 are interchangeable. Interchangeable arm links reduce the number of parts used to transport the arm and reduce costs associated with manufacturing different parts.

The central arm sections 510A, 510B described herein have a closed cross-section (eg, a closed box shape). For example, the central arm sections 510A, 510B comprise a unitary tubular frame 510F, which may have any suitable cross-section. In the example shown in Figures 5A-5E, the tubular frame 510F is shown as having a rectangular cross-section, however, in other aspects the cross-section may be a square, circular, oval, "I" beam-shaped interior (See Fig. 44, the cables extend inside the "I" beam (AA section) or outside the "I" beam (Fig. 44A), etc.). In yet other aspects, the central arm sections 510A, 510B can have an open box shape (see FIG. 44B , and one or more sides of the frame 510F' are open (eg, with or without a plate 4400 to close the open sides) side)). In other aspects, the central arm sections 510A, 510B may have a frame 510F", which is a composite closed-open box shape as shown in Figure 44C, a portion of the frame 510F" is a closed box, and the frame 510F" The other adjacent portion of is an open box (eg, the cable of the pulley drive system extends through one or more of the open box and the closed box). It will be appreciated that the central arm sections 510A, 510B have The open box shape, closed box shape, "I" beam shape, or any other suitable cross-sectional shape may be formed in the manner described herein (eg, by extrusion). A closed box shape (eg, a "U" shaped) profile (eg, depending on the rigidity of the material chosen for the "U" shaped profile), the closed box shape may provide the substrate handling apparatus 130 better rigidity and efficiency.

The central arm section 510A, 510B is mechanically fastened to each of the (individual) end couplings 511, 512, 513, 514 to form the modular composite arm link housing 201C, 202C and is configured such that the formed modular composite arm link housings 201C, 202C are connected to (individual) pulley systems ( Pulley drives (eg, the drive of FIG. 4) of pulleys (eg, pulleys 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 of FIG. 4), such as the pulley systems 655A-655E of FIG. components 490, 492, 493, 494, 495) to match the misalignment tolerances. In one aspect, the central arm sections 510A, 510B are mechanically fastened by mechanical fastener joints (which include removable mechanical fasteners also described herein) to each of the end couplings 511, 512, 513, 514 to form the modular composite arm link housing 201C, 202C and the mechanical fastener joints are constructed such that the formed modular The composite arm link housings 201C, 202C are matched to the misalignment tolerances of the pulley drives that connect the pulleys of the pulley system for the selected predetermined arm link length. For example, the mating and/or mating portion of the mechanical fastener at the joint (eg, into the corresponding hole in each individual interface and joint and the fit across the arm link as a whole) The fit between pf bolts or pins, and vice versa tolerances are constructed to match such that the fit of the mechanical fasteners for a given arm link length, the pulley system The acceptable design tolerances for misalignment do not play an outsized role. As a further example, briefly referring to FIG. 6B, as the length of the arm links 201, 202 increases, the free ends of the arms also bend or sag due to gravity and/or the load on the arm links 201, 202 A predetermined amount, as described in U.S. Patent Application Serial No. 15/880,387, entitled "Method and Apparatus for Substrate Transport Apparatus Position Compensation," filed on January 25, 2018 (which was filed on October 4, 2018) The announcement is in Pre-approved Publication No. 2018/0286728), the disclosure of which is hereby incorporated herein by reference. This sag of the arm link creates further misalignment, which must also be included within the misalignment tolerances of the individual pulley systems 655A-655E (ie, the drive sections may be angled relative to their respective pulleys) ) or the allowable amount of axial movement without substantially causing arm position error). This sag of the arm links 201 , 202 can cause the pulley drive (which in FIG. 6B includes cable (or cable) segments 660A, 660B) to be angled relative to the plane of rotation of the pulley 476 by an angle β (which within a predetermined boost tolerance) or along the peripheral/side surface of the pulley an axial distance. In some aspects, the angle β of the cable segments 660A, 660B would cause the cable segments 660A, 660B to be misaligned with the pulley 476 . Here, the coupling between the central arm sections 510A, 510B and the end couplings 511, 512, 513, 514 is such that any tolerance of the coupling will match the misalignment tolerance between the pulley drive and pulley 476 (or in some form, remove or correct).

The tubular frame 510F includes end flanges 540, 541 configured to couple any of the end couplings 511, 512, 513, 514 to the tubular frame 510F. The flanges 540, 541 may be integrally formed with the tubular frame 510F or coupled to the tubular frame 510F in any suitable manner. For example, flanges 540, 541 may be forged, cast, or molded with tubular frame 510F; while in other aspects, flanges 540, 541 may be welded, mechanical fasteners, adhesive, friction fit (eg, shrink fit, press fit, etc.), clamp, or be coupled to the tubular frame in any other suitable manner. The end flanges 540, 541 may include locating feature formations (eg, holes 545 and grooves 546) and the end couplings 511, 512, 513, 514 may include matching locating feature formations (eg, such as pins 547 or others as shown in Fig. The locating features of the end flanges 540, 541 of 5C configure engaging protrusions) that connect each of the end flanges 511, 512 of the upper arm link 201 (or relative to the forearm in at least two degrees of freedom). The rod 202 end couplings 513, 514) are oriented/positioned relative to the central arm section 510A (or relative to the forearm link 202, the central arm section 510B) and relative to each other. The locating feature configuration and matching feature configuration are in one aspect asymmetric so that the coupling is poka-yoke (eg, when the end couplings are coupled to individual central arm segments) , these asymmetric locating feature configurations substantially avoid assembly errors). Referring also to FIG. 41 , the locating feature configurations may include protrusions 4100 and recesses 4110 formed within the central arm segments 510A, 510B and end couplings 511, 512, 513, 514, the protrusions 4100 and recesses 4110 Constructed to position the end couplings 511, 512, 513, 514 in predetermined positions relative to the central arm segments 510A, 510B. For example, the central arm sections 510A, 510B may include recesses 4110 and the end couplings 511, 512, 513, 514 may include protrusions 4100, wherein the recess 4110 accommodates a separate protrusion 4100 for the end couplings 511, 512, 513, 514 are positioned at predetermined positions relative to the central arm segments 510A, 510B. In other aspects, the end couplings can include depressions and the central arm section can include protrusions. In one aspect, the depressions and protrusions may be continuous and extend around the entire perimeter of the individual end coupling and central arm section; while in other aspects, the depressions and protrusions may be different continuous to extend around the individual end couplings and predetermined portions of the central arm section. In one aspect, the protrusions and recesses may be used with one or more pins/holes/grooves such that the pins/holes/grooves define the end coupling relative to the central arm region at the predetermined position A directional assembly orientation of the segment (eg, which side of the end coupling is the upper surface, the lower surface, etc.). In one aspect, the end couplings 511, 512, 513, 514 may be coupled to individual central arm segments 510A, 510B without coupling feature configurations, the end couplings and the components of the central arm segment from An end coupling to an opposing end coupling is secondarily machined to predetermined dimensional tolerances.

In one aspect, the end flanges 540, 541 also include fastener couplings 560-563 and the end couplings 511, 512, 513, 514 include matching fastener couplings 560A-563A, which together implement the end coupling The coupling of the pieces 511, 512, 513, 514 to the central arm segments 510A, 510B. For example, fastener couplings 560-563 and mating fastener couplings 560A-563A may be in the form of threaded holes and holes into which bolts/screws may be inserted, or other removable fastener systems. Referring also to FIG. 42 , and as mentioned herein, end couplings 511 , 512 , 513 , 514 are shown coupled to central arm segments 510A, 510B with clamps 4200 , with each clamp engaging end coupling 511 , 512, 513, 514 and the central arm sections 510A, 510B are both used to form a squeeze coupling between the end couplings 511, 512, 513, 514 and the central arm sections 510A, 510B. Referring also to FIG. 43, and as mentioned herein, end couplings 511, 512, 513, 514 are shown coupled to central arm section 510A by a friction fit (eg, shrink fit, press fit, etc.), 510B, wherein a protrusion 4300 on the end couplings 511, 512, 513, 514 frictionally engages a depression 4310 on (the inner or outer surface of the central arm section 510A, 510B) (or vice versa), Used to couple end couplings 511, 512, 513, 514 to central arm segments 510A, 510B. The recess 4310 and the protrusion 4300 are substantially similar to the recess 4110 and protrusion 4100 described above, but the recess 4310 and the protrusion 4300 have a friction fit (also known as a press fit or interference fit, which is the Fastening between the two parts by friction after it is forcibly pressed together - i.e. no gap between the parts being grouped) (see Figure 43), rather than a slip fit (e.g. end The coupling and central arm section can easily slip relative to each other during assembly - ie there is a gap between the parts being assembled (see Figure 41).

In one aspect, end flanges 540, 541 may be substantially similar to each other such that central arm sections 510A, 510B may be mounted with end flange 541 to the distal end of the upper arm link 201 or forearm link 202 toward the arm 201E2, 202E2 or proximal 201E1, 202E1 (or vice versa).

In one aspect, the tubular frame 510F includes one or more holes 588 configured to provide access to the interior of the upper arm link 201 and the forearm link 202 . Access to the interior may facilitate any suitable servicing of the upper arm link 201 and the forearm link 202 without substantially dismantling the substrate transport apparatus and/or its arm links. In one aspect, a cover 510C (FIG. 5C) may be provided to cover the one or more holes 588 for containing any particles generated by the arm links. Referring also to FIG. 5F , it can be appreciated that removing the cover 510C provides access to the interior of the individual arm links through the access holes 588 . For example, the cables and pulley drives described herein may be adjusted via the access holes 588 (eg, by operating an inline cable tensioner 691 to adjust the cables/cables). tension on one or more of the wire segments, which will be described below).

In one aspect, the central arm segments 510A, 510B may have a length CAL that defines the respective overall length OAL ( From joint center to joint center, see Figure 5C). The arm 131 (and other arms described herein) can be constructed/reconstructed by changing the length CAL of the central arm segments 510A, 510B. As mentioned herein, the central arm segments 510A, 510B may be constructed as mentioned herein to have different predetermined lengths CAL, CAL1-CALn. Thus, each of the central arm segments 510A, 510B may be selected from a number of central arm segments 510A1-510An, 510B1-510Bn, where "n" is an upper limit value representing the number of the central arm segments non-negative integer (whole number). Each of the selectable central arm segments 510A1-510An, 510B1-510Bn may have a length CAL1-CALn that is different from that of the other of the selectable central arm segments 510A1-510An, 510B1-510Bn length. Here, an optional central arm section 510A1-510An, 510B1-510Bn is selected for installation in a separate upper arm link 201 or forearm link 202 for selection and individual end couplings 511, 512, 513 , 514 together define a variable length of the upper arm link 201 or the forearm link 202 (ie, by selecting a central arm segment 510A1-510An, 510B1-510Bn). It will be appreciated that the overall length OAL of one or more of the upper arm link 201 and the forearm link 202 may be increased or decrease.

In other aspects, referring also to FIG. 40, one or more of the central arm sections 510A, 510B may be a telescopic central arm section 510T (eg, in a manner similar to a telescopic optical telescope, the telescoping arm section 510T) The arm sections of the sections slide one arm section into the other arm section to change length). In this aspect, the telescoping central arm section 510T includes a first frame portion 510T1 and a second frame portion 510T2. The first frame portion 510T1 is shaped and sized to receive the second frame portion 510T2 in a sliding fit such that the first frame portion 510T1 or the second frame portion 510T2 can be relative to the first frame portion 510T1 or the second frame portion 510T2 The other of the frame portion 510T2 linearly slides in the lengthwise direction for increasing or decreasing the length CAL of the telescopic central arm section 510T. The telescopic central arm section 510T includes any suitable removable or non-removable fasteners 4000 (eg, screws, bolts, pins, clips, welds, etc.) for locking the first frame The transport of the portion 510T1 relative to the second frame portion 510T2 is used to set/fix the length CAL of the telescopic central arm section 510T. When the fastener is removed, the length of the arm links can be adjusted as needed to accommodate the addition or removal of substrate processing modules (eg, the arm extension can be adjusted as needed) increase or decrease).

In other aspects, referring to FIG. 40A, one or more of the central arm segments 510A, 510B may be segmented arm segments 510S, wherein each segment 4020 has a fixed length CAS and is contiguous with Abutting (eg, end-to-end) to each other such that when coupled together end-to-end, the segments have the length CAL of the central arm segments 510A, 510B. In one aspect, the fixed lengths CAS of the different segments 4020 may be the same, but in other aspects, the fixed lengths of the segments 4020 may be different. In yet other aspects, referring to FIG. 45, one or more of the central arm sections 510A, 510B may be multi-shell modules 4500, each multi-shell module 4500 having first and second frame members 4501, 4502 (each of which may be substantially similar to the frames 510F, 510F', 510F" described herein) arranged side-by-side and extending between and with end couplings 511, 512, 513, 514 Coupling. Here, the cable and drive system may extend within respective first and second frame members 4501, 4502. In this aspect, the first and second frame members 4501, 4502 may be coupled to individual end couplings 511, 512, 513, 514 (eg, the coupling of frame member 4501 to end coupling 511 is independent of the coupling of frame member 4502 to end coupling 512); while in other aspects, the frame member 4501, 4502 may be coupled to end plate 4030, which implements the coupling of frame members 4501, 4502 to individual end coupling members 513, 514.

The central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn of different lengths may be fabricated in any suitable manner from any suitable materials mentioned herein. For example, each of the at least one interchangeable central arm segment 510A, 510B and the plurality of different interchangeable central arm segments 510A1-510An, 510B1-510Bn has a corresponding box-shaped cross-section 598, and the predetermined feature configuration is that the interchangeable central arm segments 510A, 510B and each of the several different interchangeable central arm segments 510A1-510An, 510B1-510Bn have different respective lengths CAL, CAL1-CALn.

The box-shaped section 598 provides the tubular frame 510F tubular shape and facilitates low cost and/or high volume manufacturing of the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn. For example, the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn may be extruded or cast (eg, to form an extrusion having a box-shaped profile 598), which may reduce machining requirements (eg, , compared to conventional arm links formed from bad material machining). Other manufacturing methods that may be used include, but are not limited to, additive manufacturing, conventional machining, folding and welding sheet metal, forging, and injection molding. The tubular form of the tubular frame 510F, which can be achieved with the manufacturing process mentioned above, comprises an extrusion with a one-piece box-shaped section 598, which is in contrast to the conventional machined arm joints mentioned above. The rod is much stiffer. The stiffer box-shaped profile 598 provides longer arm length and fabrication of the tubular frame 510F with thinner sidewalls 510W than can be achieved with conventional machined arm links, This can reduce the weight of the arm links and provide higher operating speeds for the substrate transport apparatus 130 .

In one aspect, the respective box-shaped sections 598 are sized and shaped to conform to the different respective lengths CAL, CAL1-CALn, to maintain the interchangeable central arm section 510A for each different , 510A1-510An, 510B, 510B1-510Bn predetermined rigidity (end to end). In other aspects, the respective box-shaped sections 598 are sized and shaped to conform to the different respective lengths CAL, CAL1-CALn, to maintain a selectable predetermined arm link length for each of the different OAL, the predetermined stiffness (end to end) of OALn. For example, with respect to the predetermined stiffness, as the lengths CAL, CAL1-CALn of the central arm segments 510A, 510A1-510An, 510B, 510B1-510Bn increase, one or more of the walls 510W of the box-shaped section 598 The thickness of THK (Fig. 5E) also increases. In other aspects, the thickness THK of one or more of the walls 510W may be tapered along the length individually CAL, CAL1-CALn and to be at the proximal end of the arm link (relative to the shoulder) The wall at axis SX) is the thickest and the wall at the distal end of the arm link is the thinnest (relative to the shoulder axis SX; eg, considering arm link 202, the wall adjacent to the elbow axis AX The thickness is the greatest and the wall thickness adjacent to the wrist axis WX is the smallest). In other aspects, reinforcing ribs may be formed within the box-shaped section 598 , such as during extrusion of the box-shaped section 598 . In other aspects, referring to FIG. 46, the central arm segments 510A, 510B may have a tapered length, wherein respective proximal ends (eg, supported ends) of the central arm segments 510A, 510B have a height AHPE1, AHPE2, which is greater than the heights AHDE1, AHDE2 of the individual distal ends (eg, free or unsupported ends) of the individual central arm segments 510A, 510B. This tapered length as shown in FIG. 46 can reduce the weight of the arm link while maintaining the predetermined stiffness of the arm link, which can provide a higher operating speed of the substrate transport apparatus 130. In other aspects, the box-shaped section 598 can be sized and shaped in any suitable manner to conform to the different corresponding lengths CAL, CAL1-CALn, to maintain the interchangeable central arm segment for each of the different Predetermined rigidity (end to end) of 510A, 510A1-510An, 510B, 510B1-510Bn.

In one aspect, the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn may use the same material (or have the same coefficient of thermal expansion) as used for the arm link drive cables (described herein) materials) (for example, aluminum, stainless steel, Inconel, or other metal alloys, or any other suitable material mentioned herein) (it should be noted that in the traditional , the use of stainless steel would be prohibitive due to cost and weight). Fabrication of the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn from the same material as the drive hardware (eg, cables, belts, pulleys, etc.) provides the same coefficient of thermal expansion between components, improving substrate handling The accuracy of the pick/place movement of the device 130 . In one aspect, the central arm segments 510A, 510A1-510An, 510B, 510B1-510Bn are of the same material (or have the same material as one or both of the end couplings 511, 512, 513, 514) while in other aspects the central arm segments 510A, 510A1-510An, 510B, 510B1-510Bn are made with one or both of the end couplings 511, 512, 513, 514 Materials Manufactured from different materials. In one aspect, the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn, the end couplings 511, 512, 513, 514, and the actuator hardware are made of the same material (or have the same thermal expansion). coefficient of material) manufacture. Referring to FIG. 48 , the coefficients of thermal expansion of the arm linkage members are shown, wherein the central arm segments 510A, 510A1-510An, 510B, 510B1-510Bn are generally designated by the reference numeral 510 . Here, the materials of the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn, the end couplings 511, 512, 513, 514 and the actuator hardware can be selected to maintain the following equation, which The total change in length due to the thermal expansion (and contraction) of the housing member of the arm link and the pulley drive within it is normalized by the length of the arm link, respectively:

where i is an integer representing the movable link segment housing member (ie, in Figure 48, i=1 for end coupling 511, (or 513), i=2 for central arm segment 510, i =3 represents the end coupling 512, (or 514), j is a non-negative integer representing the hard part of the actuator (eg, in Figure 48, j=1 represents the first pulley, j=2 represents the cable, j=3 represents the second pulley), L is the length of the individual arm link, l is the length (in the case of a cable) or radius (in the case of a pulley) or radius (in the case of a pulley) of the individual actuator hardware member, and LL is the arm link from the joint The length from center to center of joint, and the symbols Δ and d represent the "change" in the corresponding lengths L, l due to thermal expansion (and contraction). In one aspect, Δ _i L _i = d _j l _j is used for Each corresponding member of the housing and pulley drive (ie, i=j, and L _i =l _j ) and by combining the individual housing member (i) with the corresponding pulley member (j) within it ) is substantially satisfied by matching the thermal expansion (and contraction) of the _{(i.e., △ i L i> d j} l j), with the difference between the compensated △ _i L _i and d _j l _j (e.g., in a large thermal change in the size of the substance to change or otherwise be considered Any suitable thermal expansion compensating insert 4800 (fabricated from any suitable material such as ceramic, composite, metal, polymer, etc.) having a negligible coefficient of thermal expansion can be positioned on the movable arms between one or more of the linkage section housing members (of sufficient length) such that Equation [1] above is maintained. The thermal expansion compensation inserts 4800 may also be modules (which are as previously described be fastened to the housing member) or may be integrally formed with the central arm sections 510A, 510B having the desired length, for example.

In one aspect, the material of each of the at least one interchangeable central arm segment 510A, 510B and the different interchangeable central arm segments 510A1-510An, 510B1-510Bn is more , 512, 513, 514 materials have higher stiffness (spring modulus). In one aspect, the material of each of the at least one interchangeable central arm segment 510A, 510B and the different interchangeable central arm segments 510A1-510An, 510B1-510Bn has an The material rigidity of the pulley drives 490, 492, 493, 494, 495 of the 655A-655E (Fig. 4) corresponds to the rigidity.

It will be appreciated that the modular arm link configuration also simplifies the manufacture of the arms and ends. For example, in a conventional arm link, the end of the arm link to which the arm pulley and pulley shaft are coupled is machined from a bad stock of material to form a unit with a central portion of the arm. In accordance with aspects of the present disclosure, the modular form of the arm links allows separate fabrication techniques to be used for the end couplings 511, 512, 513, 514 and the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn. For example, while the central arm segments 510A, 510B, 510A1-510An, 510B1-510Bn may be extruded (or fabricated by other methods described herein), the end couplings 511, 512, 513, 514 may be cast, forged, Laminate manufacturing, conventional machining, and injection molding to manufacture such that the end couplings 511, 512, 513, 514 are cast or forged into a near net shape (ie, the end couplings were initially manufactured very close to The final (net) shape of the end couplings, reducing the need for surface finishing) to reduce the machining and cost of the end couplings 511 , 512 , 513 , 514 , which can reduce the overall cost of the substrate handling apparatus 130 . In some aspects, end couplings 511, 512, 513, 514 may be provided as pre-assembled/manufactured arm joints 4700 with at least a portion of a transmission (eg, one or more transmissions 490, 492, 493 , 494, 495 of at least one pulley) is pre-installed in the pre-assembled arm joint 4700. Pre-assembling the arm joints 4700 can reduce manufacturing costs and lead time for shipping the arm components.

In one aspect, one or more of the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn and the end couplings 511, 512, 513, 514 may be constructed of metal members, such as, for example, aluminum , stainless steel, one or more of Inconel, or other metal alloys, or any other suitable material. In other aspects, one or more of the central arm segments 510A, 510B, 510A1-510An, 510B1-510Bn and the end couplings 511, 512, 513, 514 may be of any material, including non-metallic materials Suitable materials include, but are not limited to, ceramics, polymers, composites, and carbon fibers. As described herein, one or more of the central arm segments 510A, 510B, 510A1-510An, 510B1-510Bn and the end couplings 511, 512, 513, 514 may be available in high-volume manufacturing manufacturing methods) to manufacture (eg, molding, casting, forging, extruding, etc.) into near-net shape or coarse shape (which requires more secondary machining operations such as casting, forging, molding, etc. than the near-net shape) system, etc.), it should be noted that the central arm segments 510A, 510B, 510A1-510An, 510B1-510Bn and one or more of the end couplings 511, 512, 513, 514 The interior can be forged, cast, etc. to near net shape, while the exterior is forged, cast, etc. to coarse shape. Such secondary machining operations may include, but are not limited to, conventional machining, cutting, grinding, electromagnetic discharge machining, and the like. Examples of arm members having both natively formed (eg, cast, forged, extruded, etc.) surfaces and machined surface/feature configurations are illustrated in Figures 37-39. It should be noted that in Figures 37-39, these secondary machined surfaces/features are shown as "shaded" portions (eg, areas that are blacked out), while those originally formed (not machined) surfaces/features are not blacked out. Figure 37 shows the end couplings 511, 513 being formed natively (eg, in a near net shape or rough shape) and a corresponding surface/feature having been machined (eg, using the methods mentioned herein) Constructed machined end couplings 511, 513. Figure 38 shows end couplings 512, 514 being formed natively (eg, in a near net shape or rough shape) and a corresponding surface/feature having been machined (eg, using the methods mentioned herein) Constructed machined end couplings 512, 514. Figure 39 shows the central arm sections 510A, 510B as originally formed and a corresponding machined central arm section 510A having a surface/feature configuration that was machined (eg, using the methods mentioned herein), 510B.

It can be seen from Figures 5A, 5B and 5C that each of the upper arm link 201 and the forearm link 202 has an individual height AH. In one aspect, the height AH1 of the forearm link 202 is less than the height AH2 of the upper arm link 201 (or vice versa), while in other aspects, the height AH1 of the forearm link 202 may be the same as the height AH1 of the upper arm link 201 The height of AH2 is substantially the same. In one aspect, the individual heights AH1, AH2 depend on a number of transmission members (eg, see FIG. 4 , the upper arm link 201 includes three sets of transmission members 490, 492, 494 and the forearm link 202 Including two sets of transmission parts 493, 495). It can be understood that when the heights of the upper arm link 201 and the forearm link 202 are different, the end couplings 513, 514 and the central arm section 510B of the forearm link 202 cannot be combined with the end couplings 511, 512 and the central arm The upper arm links 201 of section 510A are interchanged.

Referring again to Figures 1A and 2A-2D, in one aspect, the at least one end applicator link 203, 204 (which is also referred to herein as a substrate holder) includes two dual (end) substrates Retainers 203, 204; however, in other aspects, as described herein, the at least one substrate holder may have any suitable configuration. The dual substrate holders 203, 204 are separate and distinct from each other. Each of the dual substrate holders 203, 204 is rotatably and separately joined to a joint at a common end of the forearm link 202 such that each end substrate holder 203, 204 is opposed about the joint The forearm link 202 rotates, or a common axis of rotation is formed thereby (eg, the wrist axis or joint WX). Each of the dual substrate holders 203, 204 has a respective at least one substrate holding station 203H1, 203H2, 204H1, 204H2 depending from them and extending from the joint, such that more than one substrate holder 203, 204 are juxtaposed with respect to each other along a common plane 499 (see Figures 2D, 4, 10 and 11). The common plane 499 is determined by at least three of the substrate holding stations 203H1, 203H2, 204H1, 204H2 of the more than one substrate holder 203, 204, wherein the at least three substrate holding stations 203H1, 203H2, The two substrate holding stations of 204H1, 204H2 (eg, substrate holding stations 203H1, 203H2 or 204H1, 204H2) correspond to a common substrate holder 203, 204 of the more than one substrate holder 203, 204. As described herein, the two substrate holding stations (eg, substrate holding stations 203H1 , 203H2 or 204H1 , 204H2 ) are positioned with one substrate at each end of the common substrate holder 203 , 204 opposite ends Material holding station.

The respective at least one substrate holding station 203H1 , 203H2 , 204H1 , 204H2 depending from the at least one substrate holder 203 , 204 includes a substrate holding station at opposite ends of the at least one substrate holder 203 , 204 203H1, 203H2, 204H1, 204H2. The at least one substrate holder 203, 204 is substantially solid and has no hinge between opposite ends, and the substrate holding stations 203H1, 203H2, 204H1, 204H2 on one end of the opposite ends and separate and distinct substrate holding stations The respective at least one substrate holding station 203H1, 203H2, 204H1, 204H2 of the devices 203, 204 are substantially coplanar. In one aspect, substrate holding stations at opposite ends of the at least one substrate holder 203 , 204 (see substrate holding stations 203H1 , 203H2 of substrate holder 203 and substrate holding stations of substrate holder 204 ) 204H1, 204H2) are substantially coplanar with each other. In other aspects, a substrate holding station (see substrate holding station 203H1, 203H2 or 204H1, 240H2) at opposite ends of the at least one substrate holder (see one of substrate holders 203 or 204) and at At least one substrate holding station (see the other of the substrate holding stations 203H1, 203H2 or 204H1, 240H2) of the end applicators (see the other of the substrate holders 203 or 204) that are separate from each other are tied to each other substantially coplanar. In still other aspects, the corresponding at least one substrate holding station (see substrate holding station 203H1, 203H2) of each separate and distinct substrate holder (see each of substrate holders 203, 204) , 204H1, 204H2) include substrate holding stations at opposite ends of the at least one substrate holder 203, 204, and each of the separate and distinct substrate holders 203, 204 is substantially solid and opposite There is no hinge between the ends.

Still referring to Figures 2A-2D, the dual substrate holders 203, 204 will be described in more detail. For example, in one aspect, each of the dual substrate holders 203, 204 includes a lengthwise extending frame 203F, 204F (FIG. 2A) having longitudinally opposite lengths disposed on the frames 203F, 204F End of the respective substrate holding stations 203H1, 203H2, 204H1, 204H2. In one aspect, two substrate holding stations (eg, substrate holding stations 203H1, 203H2 or 204H1, 204H2) at opposite ends of a common substrate holder are substantially coplanar with each other; and in other aspects , the two substrate holding stations can be at different stacking planes (see, eg, Figure 10). As noted above, the substrate holder planes (as described herein, regardless of whether the substrate holding stations 203H1, 203H2, 204H1, 204H2 of the dual-sided substrate holder form one or more planes) each plane 499, 499A (see Figures 2D, 10 and 11) corresponds to and is aligned with at least one plane of the transport opening on the common transport chamber (see Figures 1B and 1C) for a given plane of the transport opening The transfer of the Z position such that substrate transfer through each individual opening in each plane is performed with at least one substrate holding station 203H1, 203H2, 204H1, 204H2 of each double-ended substrate holder 203, 204 Implemented without substantial Z-axis motion, ie, reaching into the substrate (for each plane) with substrate holding stations 203H1, 203H2, 204H1, 204H2 located at one end of the substrate holders 203, 204 processing station to pick and/or place substrates within the substrate processing station, retract from the substrate processing station, and use the same or different dual substrates on the same or different ends of the dual ended substrate holders 203, 204 Reach into each of the other different substrate processing stations to implement (no intervening or decoupling of Z-axis motion between substrate transfers) Substrate rapid exchange with virtually no Z-axis motion . Each of the frames 203F, 204F forms a substantially solid link from the respective substrate holding station 203H1, 204H1 to the respective substrate holding station 203H2, 204H2 (ie, the double-ended substrate holders 203, 204). There is no hinge between their individual longitudinally spaced apart substrate holding stations 203H1, 203H2, 204H1, 204H2). Each of the double-ended substrate holders 203, 204 includes an offset mounting protrusion 210, 211 extending laterally from the frame 203F, 204F. The offset mounting protrusions 210, 211 of the dual-ended substrate holders 203, 204 are rotatably coupled to the forearm 202 about a wrist axis WX such that each of the dual-ended substrate holders 203, 204 is independent of each other about the wrist axis WX.

The offset mounting protrusions 210, 211 may have any suitable length that sets or otherwise defines any suitable base spacing BP (between and (eg, from the juxtaposed substrate holding stations 203H1-204H1) spacing BP) and between substrate holding stations 203H2-204H2) and/or any suitable substrate holder offset of each substrate holding station 203H1, 203H2, 204H1, 204H2 relative to the wrist axis WX Distance SD. In one aspect, the base pitch BP may be substantially equal to the pitch D between side-by-side substrate processing stations (eg, eg, substrate processing stations 190, 191, see FIG. 1A). In other aspects, the automatic wafer centering described herein is performed by changing the base pitch BP (eg, the distance between the side-by-side substrate holding stations 203H1-204H1, 203H2-204H2 can be increased or reduction) to accommodate changes in spacing D and/or to implement automated wafer centering for wafer placement at substrate processing stations 190-197. For example, one or more of the substrate holders 203, 204 may be independently rotated about the wrist axis WX to increase or decrease (or otherwise vary) the respective offset distance SD and as described herein A corresponding change of the base pitch BP is carried out as described above. In one aspect, the drive section 220 is configured as described herein to independently position the at least one substrate holding station 203H1, 203H2, 204H1, 204H2 of each of the substrate holders 203, 204 relative to the substrate The corresponding substrate holding stations 203H1, 203H2, 204H1, 204H2 of the other of the holders 203, 204 are aligned.

The double-ended substrate holders 203, 204 are constructed in any suitable manner such that the substrate holding stations 203H1, 203H2, 204H1, 204H2 are disposed in a common plane 499 (see Figures 2D and 4). For example, each of the offset mounting protrusions 210, 211 may include a first portion 230, 231 that is substantially coplanar with the respective frame 203F, 204F. Each of the offset mounting protrusions 210, 211 may include a second portion 232, 233 that is offset to extend out of the plane defined by the frames 203F, 204F. The offset of the second portions 232, 233 allows for substrate retention when the second portions are stacked one on top of the other (see Figure 2D) and rotatably coupled to the forearm 202 about the wrist axis WX Stations 203H1 , 203H2 , 204H1 , 204H2 are arranged in this common plane 499 .

The double-ended substrate holders 203, 204 are configured such that radial extension or retraction of the arm 131 can implement the corresponding at least one substrate holding station 203H1, 203H2, 204H1 of each substrate holder 203, 204 , 204H2 through individual separate openings (see slit valve SV) in a delivery chamber wall 125W (FIG. 1A) that are juxtaposed with respect to each other at a substantially common height (see one or the other in FIGS. 1B and 1C ). Substantially simultaneous extension and retraction of multiple wafer/substrate rest planes (WRP)). In other aspects, the substrate holders 203, 204 may extend through openings in the transport chamber walls that are superimposed at different planes.

2A-3A, an exemplary drive section 220 in accordance with aspects of the present disclosure is shown. In one aspect, the drive section 220 is configured to extend (and retract) the arm 131 to a radial extension in which movement of the wrist axis WX is The axis or path 700 of radial extension/retraction is maintained along a radial extension/retraction extending through the shoulder axis SX (FIG. 7B) so that the substrate holding stations 203H1, 203H2, 204H1, 204H2 (which are offset from the radial axis) are removed from the Pick and place substrates in parallel substrate processing stations. In other aspects, the drive section 220 is configured to extend (and retract) the arm 131 in a non-radial extension in which motion of the wrist is along a deviation from the The radially extending/retracting axis 700 and/or the path 701 at an angle to it (FIG. 7F) moves (ie, the path 701 does not pass through or radiate from the shoulder axis SX, it should be noted that, Figure 7C shows a radially extending path 702 in which the wrist axis WX moves along a motion path extending through or radiating from the shoulder axis SX). In yet other aspects, the drive section 220 is configured to extend the arm along radial and non-radial paths (see FIGS. 7A-7L).

In one aspect, the drive section may have a coaxial drive configuration, while in other aspects the drive section may have any suitable configuration including, but not limited to, side-by-side motors, harmonic drives. ), switched or variable reluctance motors, etc. Suitable examples of drive segment configurations are described in US Patent Nos. 6,485,250; 5,720,590; 5,899,658; 5,813,823; 8,283,813; 8,918,203; References are incorporated herein. In this aspect, the drive section 220 includes a housing 310 for at least partially housing a quad-coaxial drive shaft assembly 300 (see also FIG. 4 ) having four drive shafts 301-304 and four motors 342, 344, 346, 348 (eg, four degree of freedom motors). In other aspects of the present disclosure, the drive section 220 may have any suitable number of drive shafts and motors, such as, for example, two or three coaxial motors or more than four coaxial motors and associated drive shafts . The drive section 220 may also include a Z-axis drive 312 configured to, for example, raise and lower the arm 131 to pick and place the substrate S; however, in other aspects, the coupling is disposed therein. The substrate processing chamber of the transfer chamber of the arm 131 may include a Z-axis drive for lifting substrates from the arm 131 or lowering the substrate to the arm 131, thereby replacing the Z-axis drive 312 of the drive section 220 or as a Additional equipment.

In one aspect, the drive section 220 is a multi-axis drive section that defines an independent degree of freedom for at least one substrate holder 203, 204 relative to another substrate holder 203, 204; and In other aspects, there is an independent degree of freedom for at least one substrate holder of a multi-substrate holder; and in still other embodiments, there is an independent degree of freedom for each substrate holder. An independent degree of freedom for each substrate holder 203, 204 may allow for a corresponding at least one substrate holding station 203H1, 203H2, 204H1, The 204H2 has independent automatic wafer centering. In one aspect, the drive section 220 is a biaxial drive section configured to operate at a corresponding at least one substrate holding station 203H1 of each of the dual-ended substrate holders 203, 204 , 203H2, 204H1, 204H2 implement independent automatic wafer centering, which is substantially associated with the corresponding at least one substrate holding station 203H1, 203H2, 204H1, 204H2 of each of the double-ended substrate holders 203, 204 Synchronization occurs substantially simultaneously through the expansion of individual openings (see slit valve SV) in the transport chamber wall 125W.

Referring to FIG. 3A , the drive section includes at least motors 342 , 344 , 346 , 348 . The first motor 342 of the drive section 220 includes a stator 342S and a rotor 342R connected to the outer shaft 304 . The second motor 344 includes a stator 344S and a rotor 344R connected to the shaft 303 . The third motor 346 includes a stator 346S and a rotor 346R connected to the shaft 302 . The fourth motor 348 includes a stator 348S and a rotor 348R connected to the fourth or inner shaft 301 . The four stators 342S, 344S, 346S, 348S are fixedly attached to the housing 310 at different vertical heights or positions within the housing 310. Each of the stators 342S, 344S, 346S, 348S generally contains an electromagnetic coil. Each rotor 342R, 344R, 346R, 348R generally includes permanent magnets, but may also include magnetic induction rotors without permanent magnets. In still other aspects, the motors 342, 344, 346, 348 may be variable or switched reluctance motors, such as described in US Pat. Nos. 10,348,172 and 9,948,155 and filed on Nov. 13, 2014 US Patent Application Serial No. 14/540,058 entitled "Position Feedback for Sealed Environments," the disclosures of which are hereby incorporated by reference. In still other aspects, the motors 342, 344, 346, 348 may be harmonic drives, such as those described in US Pat. No. 9,656,386, the disclosure of which is hereby incorporated by reference. Sleeves 362 may be provided on rotors 342R, 344R, 346R, 348R and stator 342S when the substrate transport apparatus 130 is used in a sealed environment, such as a vacuum environment for non-limiting example only , 344S, 346S, 348S, so that the coaxial drive shaft assembly 300 is disposed in a sealed environment and the rotor is located outside the sealed environment. It should be understood that if the substrate transport apparatus 130 is intended to be used in an atmospheric environment (eg, within the atmospheric section 101 of the substrate processing apparatus 100 (FIG. 1)), the bushing 362 may not be provided.

The fourth or inner shaft 301 extends from the bottom or fourth stator 348S and includes a rotor 348R that is substantially aligned with the stator 348S. The shaft 302 extends from the third stator 346S and includes a rotor 346R that is substantially aligned with the stator 346S. The shaft 303 extends from the second stator 344S and includes a rotor 344R that is substantially aligned with the stator 344S. The shaft 304 extends from the top or first stator 342S and includes a rotor 342R, which is substantially aligned with the stator 342S. Various bearings 350 - 353 are provided around the shafts 301 - 304 and the housing 310 to allow each shaft 301 - 304 to rotate independently relative to each other and the housing 310 . It should be noted that each axis may be provided with position sensors 371-374. The position sensors 371 - 374 may be used to provide signals to any suitable controller, such as the controller 170 , regarding the rotational position of the respective shafts 301 - 304 relative to each other and/or relative to the housing 310 . The sensors 371-374 may be any suitable sensors, such as, for the purpose of non-limiting example, optical or inductive sensors.

3A, in other aspects, the exemplary drive section 220A, which is substantially similar to the drive section 220, includes a housing 310 for at least partially housing a tri-coaxial drive assembly drive shaft assembly) 300A having three drive shafts 302-304 and three motors 342, 344, 346, (eg, three degree of freedom motors). The drive section 220A may also include a Z-axis drive 312 configured to, for example, raise and lower an arm of the substrate transport apparatus 130 (as described herein) to pick and place substrates S; however, , in other aspects, the substrate processing chamber coupled to the transfer chamber in which the arm is disposed may include a Z-axis drive to lift the substrate from the arm or lower the substrate to the arm, thereby replacing the The Z-axis drive 312 of the drive section 220 may be provided as an additional option.

The first motor 342 of the drive section 220A includes a stator 342S and a rotor 342R connected to the outer shaft 304 . The second motor 344 includes a stator 344S and a rotor 344R connected to the shaft 303 . The third motor 346 includes a stator 346S and a rotor 346R connected to the shaft 302 . The three stators 342S, 344S, 346S are fixedly attached to the housing 310 at different vertical heights or positions within the housing 310 . Each stator 342S, 344S, 346S generally contains an electromagnetic coil. Each rotor 342R, 344R, 346R generally includes permanent magnets, but may also include magnetic induction rotors without permanent magnets. In still other aspects, the motors 342, 344, 346 may be variable or switched reluctance motors, such as described in US Pat. Nos. 10,348,172 and 9,948,155 and filed on November 13, 2014, under the name US Patent Application Serial No. 14/540,058 for "Position Feedback for Sealed Environments," the disclosures of which are hereby incorporated by reference. In still other aspects, the motors 342, 344, 346 may be harmonic drives, such as those described in US Pat. No. 9,656,386, the disclosure of which is hereby incorporated by reference. When the substrate transport apparatus 130 is used in a sealed environment, such as a vacuum environment by way of non-limiting example only, the sleeve 362 may be disposed between the rotors 342R, 344R, 346R and the stators 342S, 344S, 346S time, so that the coaxial drive shaft assembly 300A is disposed in a sealed environment and the rotor is located outside the sealed environment. It should be understood that if the substrate transport apparatus 130 is intended to be used in an atmospheric environment (eg, within the atmospheric section 101 of the substrate processing apparatus 100 (FIG. 1)), the bushing 362 may not be provided.

The shaft 302 extends from the third stator 346S and includes a rotor 346R that is substantially aligned with the stator 346S. The shaft 303 extends from the second stator 344S and includes a rotor 344R that is substantially aligned with the stator 344S. The shaft 304 extends from the top or first stator 342S and includes a rotor 342R, which is substantially aligned with the stator 342S. Various bearings 350 - 353 are provided around the shafts 302 - 304 and the housing 310 to allow each shaft 302 - 304 to rotate independently relative to each other and the housing 310 . It should be noted that each axis may be provided with position sensors 371-373. The position sensors 371 - 373 may be used to provide signals to any suitable controller, such as the controller 170 , regarding the rotational position of the respective shafts 302 - 304 relative to each other and/or relative to the housing 310 . The sensors 371-373 may be any suitable sensors, such as, for the purpose of non-limiting example, optical or inductive sensors.

3B, in other aspects, the exemplary drive section 220B (which is substantially similar to the drive section 220) includes a housing 310 for at least partially housing a sextuple-coaxial set of six drive shaft assembly) 300B having six drive shafts 301-306 and six motors 342, 344, 346, 348, 343, 345 (eg, six degree of freedom motors). The drive section 220B may also include a Z-axis drive 312 configured to, for example, raise and lower an arm of the substrate transport apparatus 130 (as described herein) to pick and place substrates S; however, , in other aspects, the substrate processing chamber coupled to the transfer chamber in which the arm is disposed may include a Z-axis drive to lift the substrate from the arm or lower the substrate to the arm, thereby replacing the The Z-axis drive 312 of the drive section 220 may be provided as an additional option.

The first motor 342 of the drive section 220A includes a stator 342S and a rotor 342R connected to the outer shaft 304 . The second motor 344 includes a stator 344S and a rotor 344R connected to the shaft 303 . The third motor 346 includes a stator 346S and a rotor 346R connected to the shaft 302 . The fourth motor 348 includes a stator 348S and a rotor 348R connected to the shaft 301 . The fifth motor 343 includes a stator 343S and a rotor 343R connected to the shaft 305 . The sixth motor 345 includes a stator 345S and a rotor 345R connected to the shaft 306 . The six stators 342S, 344S, 346S, 348S, 343S, 345S are fixedly attached to the housing 310 at different vertical heights or positions within the housing 310 . Each of the stators 342S, 344S, 346S, 348S, 343S, 345S generally contains an electromagnetic coil. Each rotor 342R, 344R, 346R, 348R, 343R, 345R generally includes permanent magnets, but may also include magnetic induction rotors without permanent magnets. In still other aspects, the motors 342, 344, 346, 348, 343, 345 may be variable or switched reluctance motors, such as described in US Pat. Nos. 10,348,172 and 9,948,155 and Nov. 13, 2014 Japanese Patent Application Serial No. 14/540,058 entitled "Position Feedback for Sealed Environments", the disclosures of which are hereby incorporated by reference. In still other aspects, the motors 342, 344, 346, 348, 343, 345 may be harmonic drives, such as those described in US Pat. No. 9,656,386, the disclosure of which is hereby incorporated by reference. in this article. When the substrate transport apparatus 130 is used in a sealed environment, such as a vacuum environment by way of non-limiting example only, the bushings 362 may be provided on the rotors 342R, 344R, 346R, 348R, 343R, 345R and stators 342S, 344S, 346S, 348S, 343S, 345S, such that the coaxial drive shaft assembly 300B is positioned in a sealed environment and the rotor is located outside the sealed environment. It should be understood that if the substrate transport apparatus 130 is intended to be used in an atmospheric environment (eg, within the atmospheric section 101 of the substrate processing apparatus 100 (FIG. 1)), the bushing 362 may not be provided.

The shaft 306 extends from the third stator 345S and includes a rotor 345R, which is substantially aligned with the stator 345S. The shaft 305 extends from the fifth stator 343S and includes a rotor 343R, which is substantially aligned with the stator 343S. The shaft 302 extends from the third stator 346S and includes a rotor 346R that is substantially aligned with the stator 346S. The shaft 301 extends from the fourth stator 348S and includes a rotor 348R, which is substantially aligned with the stator 348S. The shaft 303 extends from the second stator 344S and includes a rotor 344R that is substantially aligned with the stator 344S. The shaft 304 extends from the top or first stator 342S and includes a rotor 342R, which is substantially aligned with the stator 342S. Various bearings, such as those described herein, are provided around the shafts 301 - 306 and the housing 310 to allow each shaft 301 - 306 to rotate independently relative to each other and the housing 310 . It should be noted that each axis may be provided with position sensors 371-376. The position sensors 371 - 376 may be used to provide signals to any suitable controller, such as the controller 170 , regarding the rotational position of the respective shafts 301 - 306 relative to each other and/or relative to the housing 310 . The sensors 371-376 may be any suitable sensors, such as, for the purpose of non-limiting example, optical or inductive sensors.

3C, in other aspects, the exemplary drive section 220C (which is substantially similar to the drive section 220) includes a housing 310 for at least partially housing a quintuple-coaxial set of five drive shaft assembly) 300C having five drive shafts 301-305 and five motors 342, 344, 346, 348, 343 (eg, five degree of freedom motors). The drive section 220C may also include a Z-axis drive 312 configured to, for example, raise and lower an arm (such as the arm described herein) of the substrate transport apparatus 130 to pick and place substrates S; however, , in other aspects, the substrate processing chamber coupled to the transfer chamber in which the arm is disposed may include a Z-axis drive for lifting the substrate from the arm 131 or lowering the substrate to the arm 131 , thereby Z-axis drive 312 in place of the drive section 220 or as an addition.

The first motor 342 of the drive section 220A includes a stator 342S and a rotor 342R connected to the outer shaft 304 . The second motor 344 includes a stator 344S and a rotor 344R connected to the shaft 303 . The third motor 346 includes a stator 346S and a rotor 346R connected to the shaft 302 . The fourth motor 348 includes a stator 348S and a rotor 348R connected to the shaft 301 . The fifth motor 343 includes a stator 343S and a rotor 343R connected to the shaft 305 . Five stators 342S, 344S, 346S, 348S, 343S are fixedly attached to the housing 310 at different vertical heights or positions within the housing 310. Each of the stators 342S, 344S, 346S, 348S, 343S generally contains an electromagnetic coil. Each rotor 342R, 344R, 346R, 348R, 343R generally includes permanent magnets, but may also include magnetic induction rotors without permanent magnets. In still other aspects, the motors 342, 344, 346, 348, 343 may be variable or switched reluctance motors, such as described in U.S. Patent Nos. 10,348,172 and 9,948,155 and filed on Nov. 13, 2014 US Patent Application Serial No. 14/540,058 entitled "Position Feedback for Sealed Environments", the disclosures of which are hereby incorporated by reference. In still other aspects, the motors 342, 344, 346, 348, 343 may be harmonic drives, such as those described in US Pat. No. 9,656,386, the disclosure of which is incorporated herein by reference . When the substrate transport apparatus 130 is used in a sealed environment, such as a vacuum environment for non-limiting example only, the sleeves 362 may be provided on the rotors 342R, 344R, 346R, 348R, 343R and the stator 342S, 344S, 346S, 348S, 343S, such that the coaxial drive shaft assembly 300C is disposed in a sealed environment and the rotor is located outside the sealed environment. It should be understood that if the substrate transport apparatus 130 is intended to be used in an atmospheric environment (eg, within the atmospheric section 101 of the substrate processing apparatus 100 (FIG. 1)), the bushing 362 may not be provided.

The shaft 305 extends from the fifth stator 343S and includes a rotor 343R, which is substantially aligned with the stator 343S. The shaft 302 extends from the third stator 346S and includes a rotor 346R that is substantially aligned with the stator 346S. The shaft 301 extends from the fourth stator 348S and includes a rotor 348R, which is substantially aligned with the stator 348S. The shaft 303 extends from the second stator 344S and includes a rotor 344R that is substantially aligned with the stator 344S. The shaft 304 extends from the top or first stator 342S and includes a rotor 342R, which is substantially aligned with the stator 342S. Various bearings (such as those described herein) are provided around the shafts 301 - 305 and the housing 310 to allow each shaft 301 - 305 to rotate independently relative to each other and the housing 310 . It should be noted that each axis may be provided with position sensors 371-375. The position sensors 371 - 375 may be used to provide signals to any suitable controller, such as the controller 170 , regarding the rotational position of the respective shafts 301 - 305 relative to each other and/or relative to the housing 310 . The sensors 371-375 may be any suitable sensors, such as, for the purpose of non-limiting example, optical or inductive sensors.

As described herein, drive sections 220, 220A, 220B, 220C are configured to extend and retract at least one multi-link arm 131 along the non-radial linear path and to extend and retract each applicator link (ie, At least one corresponding substrate holding station of a substrate holder) passes substantially simultaneously through separate substrate transport openings (eg, as shown in FIGS. 1B and 1C ) that are juxtaposed along, for example, the side walls of the transport chamber 125 , respectively, and passes The at least one respective substrate holding station is independently aligned relative to the other of the more than one end effector links (eg, substrate holders).

2A, 3A and 4, the substrate transport apparatus 130 includes at least one arm 131 having two dual-ended substrate holders 203, 204, as described above. It should be noted that the two end-type substrate holders 203, 204 of the substrate transport apparatus 130 described herein may allow for substantially simultaneous substrate picking and/or placement as described herein (eg, this The two end-type substrate holders 203, 204 extend to and from the respective substrate processing stations of the side-by-side substrate processing stations 190-191, 192-193, 194-195, 196-197 at substantially the same time. The material handling station is retracted.

In one aspect of the present disclosure, the upper arm link 201 is rotationally driven about the shoulder axis SX by an outer shaft 304, the forearm link 202 is rotationally driven about the elbow axis EX by an inner shaft 301, Double ended substrate holder 203 is rotationally driven about the wrist axis WX by shaft 303, and double ended substrate holder 204 is rotationally driven about the wrist axis WX by shaft 302. For example, the upper arm link 201 is fixedly attached to the outer shaft 304 such that the upper arm link 201 and the outer shaft 304 rotate as a unit about a central axis of rotation (eg, the shoulder axis SX).

The forearm link 202 is coupled to the inner shaft 301 by any suitable transmission. For example, pulley 480 is fixedly attached to inner shaft 301 . The upper arm link 201 includes a rod 481 . A pulley 482 is rotatably mounted to or otherwise supported by the post 481 . The post 481 is fixedly mounted to the inner surface of the upper arm link 201 . A first set of transmission members 490 extends between the pulley 480 and pulley 482 . It should be understood that any suitable type of transmission may be used to couple the pulleys 480, 482, such as, for example, belts, straps, chains. It should also be understood that although two transmission members are shown (see FIGS. 6A and 6B ) for coupling the pulleys 480 , 482 , in other aspects any suitable number of transmission members may be used for coupling Pulleys 480, 482 (eg, more or less than two transmissions). A shaft 482S is fixedly coupled to pulley 482 such that shaft 482S and pulley 482 rotate together about elbow axis EX. Shaft 482S may be rotatably supported on post 481 in any suitable manner. The forearm link 202 is fixedly mounted to the shaft 482S so that the forearm link 202 and the shaft 482S rotate together about the elbow axis EX as a unit.

The double-ended substrate holder 203 is coupled to the shaft 303 by any suitable actuator. For example, pulley 488 is fixedly coupled to shaft 303 such that pulley 488 and shaft 303 rotate together about shoulder axis SX as a unit. Pulley 491 is rotatably coupled to or otherwise supported on post 481 . A second set of transmission members 492 (which are substantially similar to transmission member 490 ) extend between pulleys 488 and 491 . A shaft 491S is fixedly coupled to pulley 491 such that shaft 491S and pulley 491 rotate together about the elbow axis EX as a unit. Shaft 491S may be rotatably supported on post 481 in any suitable manner. The forearm link 202 includes a pulley 470 fixedly mounted to the top end of a shaft 491S that rotates together with the shaft 491S (and pulley 491 ) as a unit about the elbow axis EX. The forearm link 202 also includes a post 471 and pulleys 472 that are rotatably mounted to or otherwise supported by the post 471 . A third set of transmission members 493 (which are substantially similar to transmission member 490 ) extends between pulleys 470 and 472 . The double-ended substrate holder 203 is fixedly mounted to the pulley 472 through the shaft 472S, so that the pulley 472 and the double-ended substrate holder 203 rotate together about the wrist axis WX as a unit.

The double-ended substrate holder 204 is coupled to the shaft 302 by any suitable actuator. For example, pulley 484 is fixedly coupled to shaft 302 such that pulley 484 and shaft 302 rotate together about shoulder axis SX as a unit. Pulley 486 is rotatably coupled to or otherwise supported on post 481 . A fourth set of transmission members 494 (which are substantially similar to transmission member 490 ) extends between pulleys 484 and 486 . A shaft 486S is fixedly coupled to pulley 486 such that shaft 486S and pulley 486 rotate together about the elbow axis EX as a unit. Shaft 486S may be rotatably supported on post 481 in any suitable manner. The forearm link 202 includes a pulley 474 fixedly mounted to the top end of a shaft 486S that rotates together with the shaft 486S (and pulley 486) as a unit about the elbow axis EX. The forearm link 202 also includes a pulley 476 that is rotatably mounted to or otherwise supported by the post 471 . A fifth set of transmission members 495 (which are substantially similar to transmission member 490 ) extends between pulleys 474 and 476 . The double-ended substrate holder 204 is fixedly mounted to the pulley 476 through the shaft 476S such that the pulley 476 and the double-ended substrate holder 204 rotate together about the wrist axis WX as a unit.

2A-2C, 3A and 4, it can be appreciated that each of the upper arm link 201, the forearm link 202, the double ended substrate holder 203, and the double ended substrate holder 204 are independent The ground is rotationally driven about respective axes (eg, shoulder axis SX, elbow axis EX, and wrist axis WX) by respective drive motors 342, 344, 346, 348. Independent rotation of each of the double-ended substrate holders 203, 204 about the wrist axis WX provides that each substrate S on each of the substrate holding stations 203H1, 204H1, 203H2, 204H2 has and is Double-ended substrate holders 203, 204 implement independent automatic wafer centering that takes place substantially simultaneously with substrate transport through the openings of individual juxtaposed substrate processing stations (FIGS. 1B, 1C). The automatic wafer centering described herein is in conjunction with any suitable sensors disposed in/on the transport chambers 125, 125A, on the slit valve SV, on the transport arm 131, etc. in a manner similar to that described. U.S. Patent Application Serial No. 16/257,595, filed Jan. 25, 2019, entitled "Automatic Wafer Centering Method and Apparatus," and issued Nov. 25, 2018, entitled "On The Fly Automatic Wafer Centering Method and Apparatus." and Apparatus" U.S. Patent No. 10,134,623, issued December 6, 2016 entitled "Process Apparatus with On-The-Fly Substrate Centering" U.S. Patent No. 9,514,974, issued September 7, 2010 US Patent No. 7,792,350 for "Wafer Center Finding", US Patent No. 8,934,706, issued January 13, 2015, entitled "Wafer Center Finding with Kalman Filter," and issued April 12, 2011 It is implemented in the manner in US Patent No. 7,925,378 for "Process Apparatus with On-The-Fly Workpiece Centering", the disclosures of which are incorporated herein by reference. Accordingly, automatic wafer centering is performed by changing the base spacing BP between the juxtaposed substrate holding stations 203H1, 204H1 and between the juxtaposed substrate holding stations 203H2, 204H2. For example, by rotating the shafts 302, 303 in opposite directions, the dual-ended substrate holders 203, 204 can be caused to rotate in opposite directions about the wrist axis WX. For example, the shafts 302, 303 can be driven in opposite directions to increase the distance between the juxtaposed substrate holding stations 203H1, 204H1 (FIG. 2B), to implement any suitable addition between the juxtaposed substrate holding stations 203H1, 204H1 Large pitch WP (and any suitable reduced pitch NP between substrate holding stations 203H2, 204H2). The shafts 302, 303 can also be driven in opposite directions to reduce the distance between the side-by-side substrate holding stations 203H1, 204H1 (FIG. 2C) for implementing any suitable reduction between the side-by-side substrate holding stations 203H1, 204H1 Spacing NP (and any suitable increased spacing WP between substrate holding stations 203H2, 204H2). Rotation of the shafts 302, 303 in the same direction at substantially the same rate of rotation can rotate the dual-ended substrate holders 203, 204 as a unit about the wrist axis WX for rapid exchange of substrates S. Accordingly, the transmission members 490, 492, 493, 494, 495 are constructed such that the double-ended substrate holders 203, 204 rotate as a unit about the wrist axis WX by an amount of rotation of at least 180[deg.] (degrees). Again, each plane 499, 499A of the substrate holding planes (as described herein and regardless of whether the substrate holding stations 203H1, 203H2, 204H1, 204H2 of the double-sided substrate holder form one or more planes) (see Figures 2D, 10 and 11) corresponds to at least one plane of the transport opening (see Figures 1B and 1C) on the common transport chamber for transfer at a given Z position of the plane of the transport opening and is associated with the at least one plane of the transport opening (see Figures 1B and 1C) A plane is aligned such that substrate transport through each individual opening in each plane is with at least one substrate holding station 203H1 of each dual-ended substrate holder 203, 204 with substantially no Z-axis motion , 203H2, 204H1, 204H2, that is, with a substrate holding station 203H1, 203H2, 204H1, 204H2 located at one end of the substrate holder 203, 204 to extend into the substrate processing station (for each plane) to pick and/or place substrates at the substrate processing station, retract from the substrate processing station, use the same or different dual substrates at the same or different ends of the dual ended substrate holders 203, 204 Reach into mutually different substrate processing stations for performing substrates with substantially no Z-axis motion (ie, no intervening Z-axis motion or decoupling from intervening Z-axis motion between substrate transfers). Fast exchange of materials.

Drives 490, 492, 493, 494, 495 and pulleys 480, 484, 488, 470, 474, 482, 486, 491, 472, 476 form the individual pulley systems 655A-655E described herein. As described herein, one or more of the pulley systems 655A-655E are engaged to the modular composite arm link housings 201C, 202C and are arranged such that the pulley systems driven by the drive section 220 One or more of 655A-655E implement the articulation of the at least one arm link 201, 202 or end effector 203, 204. It should be noted that pulleys 480, 484, 488, 470, 474 may be referred to as "driving" pulleys, while pulleys 482, 486, 491, 472, 476 may be referred to as "driven" or "idler" pulleys. 5D, 6A and 6J, at least one of the end couplings 511, 512, 513, 514 accommodates at least one pulley 480, 484, 488, 470, 474 of at least one of the pulley systems 655A-655E, 482, 486, 491, 472, 476. For example, one or more of the pulleys (eg, pulleys 488, 484, 480, 486, 482, 470, 474, 472) are supported, for example, by a crossed roller bearing 600 ( Also known as a table bearing, as the end coupling accommodates a pulley of a pulley system with crossed roller bearings mounted such that the position and alignment of the pulley is consistent with the crossed rollers described herein Bearing engagement is related and controlled) or is coupled to a separate end coupling 511, 512, 513, 514 by other suitable means. In one aspect, the end couplings 511 , 512 , 513 , 514 include a bearing block 566 (see FIGS. 5D and 6A ), the outer race 601 (or inner bearing ring) of the crossed roller bearing 600 , depending on the configuration of the bearing housing) is coupled to the bearing housing. For example, the outer bearing ring 601 may be coupled to the bearing adapter 566 using any suitable fastener or retainer feature configuration 663 and by using any suitable positioning extending through the outer bearing ring 601 and the bearing adapter 566 A pin 664 is positioned relative to the arm. In other aspects, outer bearing ring 601 may be coupled to bearing seat 566 in any suitable manner. The pulley (eg, pulley 474 shown in Figure 6A, other pulleys omitted for clarity) may be coupled to the inner bearing ring 602 (or outer bearing ring 602) using any suitable fasteners 668 and any suitable locating pins 669 bearing ring, depending on the construction of the housing). In other aspects, inner bearing ring 602 may be coupled to pulley 474 in any suitable manner. The shaft (eg, shaft 486S) may be coupled to the pulley in any suitable manner (eg, by a friction fit, clamps, or other suitable means) such that shaft 186S and pulley 474 surround the respective one as a unit The axis of rotation (eg, axis EX) rotates.

The crossed roller bearing 600 provides several advantages over duplex (ie, paired) bearings and other types of bearings typically used in semiconductor handling arms. For example, the crossed roller bearing 600 has a thinner form factor, resulting in a reduced height/thickness 665 (compared to a duplex bearing or other bearings typically used for the same large shaft and load conditions) height/thickness) allows a smaller arm link height AH for a given bearing diameter. The crossed roller bearing 600 also reduces the parts count, cost, and complexity of the substrate transport apparatus 130 because the use of bearing clamps (eg, with duplex bearings or other commonly used bearings) is not required ) to couple the crossed roller bearing to the connecting rod and pulley. In addition, because fasteners are used to couple the crossed roller bearing to the connecting rod and pulley, the installation of a duplex bearing or other commonly used bearings (which is typically by shrink/interference fit) is to install), the installation of the bearing will be easier. The crossed roller bearing 600 increases the rigidity of the transport arm and is less dependent on the machining tolerances and operating temperature of the arm linkage (eg, compared to friction fit duplex bearings or other commonly used bearings) , where the friction fit can be affected by one or more of machining tolerances and operating temperature).

It should be noted that the modular composite arm link casings 201C, 202C are low profile casings with a compact height AH (FIGS. 5C and 5E) for selected predetermined arms Lengths OAL, OALn, it and at least one of the pulley systems 655A-655E housed within at least one of the end couplings 511, 512, 513, 514 are pulley mounted crossed roller bearings (as described herein) ) are consistent. This compact height AH is less than the housing height for a band pully transmission with a comparable number of pulley systems of comparable length. For example, referring briefly to Figure 4A, the arm link 201 has the compact height AH and length OAL. In this example, arm link 201 includes three pulley systems 655A-655C, each pulley system including opposing cable segments (as described herein) and a pair of pulleys. When compared to an arm link having the same length OAL and the same number of pulley systems (each including conventional duplex bearings), the three cable/pulley drives and cross rollers described herein are included The height AH of this arm link 201 of the column bearing is less than the height of the arm link comprising the three strap/pulley drives and the conventional double bearing.

Referring also to Figures 4 and 4A, the crossed roller bearing 600 provides for the installation of the pulley 486 and individual shaft 486S to a separate crossed roller bearing 600A. As seen in Figure 4A, both the pulley 486 and the individual shaft 486S are mounted to the same projection of the crossed ball bearing 600A by any suitable fasteners 461 (eg, screws, nuts) in any suitable manner flange (eg, inner bearing ring 602 flange). For example, fasteners 461 may extend through both pulley 486 and respective shaft 486S mounting flanges for coupling both pulley 486 and shaft 486S to crossed roller bearing 600A; while in other aspects, Pulley 486 and shaft 486S may be coupled by respective fasteners 461 to crossed roller bearing 600A, wherein alternating screw holes of inner bearing ring 602 of the crossed roller bearing 600A are used to attach Pulley 486 and shaft 486S are coupled to the crossed roller bearing 600A in a manner similar to that described herein with reference to Figure 4B.

As can also be seen in Figure 4A and also with reference to Figure 4B, when the pulleys and flanges of the individual drive shafts are interlocked/interlaced together to facilitate coupling of the pulleys and respective shafts to the respective crossed roller bearings, The stack height of the arm joints can be reduced. For example, the outer bearing ring 601 of the crossed roller bearing 600B may be coupled to the post such that the crossed roller bearing 600B is suspended under the post 481 (although in other aspects the post 481 may be suspended) of any suitable configuration and the crossed roller bearing may be placed on or suspended from the pole). In this example, both pulley 491 and shaft 491S are coupled to inner bearing ring 602 of crossed roller bearing 600B. The pulley 491 includes a hub 491H and the shaft 491S includes a flange 491SF, wherein the hub 491H and the flange 491SF have complementary shapes such that when the hub 491H and flange 491SF are coupled to the crossed roller bearing 600B, the hub 491H and the Flanges 491SF are coplanar (in the same plane and not one on top of the other, see Figures 4A and 4B). For example, hub 491H includes a central hole 491HA that is shaped and sized to allow fasteners 461 to pass through hub 491H and engage every other fastener hole of inner bearing ring 602 of crossed roller bearing 600B. The flange 491SF is shaped and sized to be complementary to the center hole 491HA and is embedded within the confines of the center hole (eg, the flange 491SF interlocks with or interweaves with the hub 491H) and allows the fasteners 461 to extend through through the flange 491SF and engage each other fastener hole (eg, pulley 491 and shaft 491S) of the inner bearing ring 602 (not used to couple the pulley 491 to the inner bearing ring 602) of the crossed roller bearing 600B are coupled in an alternating fashion to crossed roller bearings 600B).

In one aspect, the crossed roller bearing 600 may be constructed as an integrated or combined crossed roller bearing 600PB. For example, with reference to Figures 6I and 6J, one or more of the pulleys described herein may be replaced by the crossed roller bearing 600PB to further eliminate stacking of pulleys and respective bearings to at least further reduce the speed of the transport arm link. high. In this aspect, the crossed roller bearing 600PB is mounted to a stationary shaft (eg, any of shafts 491S, 476S in FIG. 4) in place of pulleys 470, 474, 482, 486, 491, 472, 476 (and their bearings) wherein the perimeter of the outer bearing ring 601 of the crossed roller bearing 600PB includes grooves 635, 636 and cable retainers ( anchor) 643, 644. In this aspect, the separate pulley and bearing pairs can be eliminated and replaced by the crossed roller bearing 600PB to reduce the parts count and cost of the transport arm.

4 and 6A-6J, the third and fourth sets of transmission members 493, 495 located at least partially within the forearm 202 will be described. It should be noted that the third and fourth transmission members 493, 495 may be substantially similar to the other transmission members 490, 492, 494 described herein.

The idler pulley 472 has an end applicator interface with a surface of the idler pulley 472 positioned against the respective dual-ended substrate holder 203 or, in other aspects, the end effector interface described by Shaft 472S is formed herein. The idler pulley 472 is coupled to an individual elbow drive pulley 470 (ie, the third set of drives 493 ) by an individual segmented drive ring 661 . The segmented drive ring 661 includes separate cable segments 661A, 661B or any other suitable drive chain (eg, strap segments) coupled to the idler pulley 472 and the elbow drive pulley 470 to implement the idler pulley 472 rotation.

The idler pulley 472 includes a perimeter 650 that forms cable wrapping grooves 635, 636 (it should be noted that the pulley grooves described herein implement the tracking/guiding of individual cables as they are wrapped around the pulleys), It interfaces with the individual cables 661A, 661B of the segmented drive ring 661 . For example, the perimeter 650 forms an upper cable wrap channel 635 around which the cable 661B is wrapped. The perimeter 650 also forms a lower cable wrap channel 636 around which the cable 661A is wrapped. The upper and lower cable grooves 635, 636 are positioned at different heights of the idler pulley 472 so that the cables 661A, 661B are positioned in different planes relative to each other (ie, one cable does not get tangled with the other). Referring to Figure 6D, the elbow drive pulley 470 is substantially similar to the idler pulley 472 described above.

Any suitable cable anchors 643 , 644 ( FIGS. 6B-6J ) engage each of the divided cable segments 661A, 661B to the idler pulley 472 . For example, each terminal end of the cable segments 661A, 661B includes a retainer feature 666 (eg, ball, cylinder, etc.) that is coupled to (or integrally formed with) the cable segment ends in any suitable manner. The pulleys 470, 472 include individual mating retention feature formations 667 (eg, grooves, etc.). Each mating retention feature configuration 667 intersects one of the upper and lower cable wrap grooves 635 , 636 of the respective pulley 470 , 472 . The retainer features 666 of the cable segments 661A, 661B can be inserted into the respective mating retainer features 667 and wrapped around the respective pulleys 470, 472 at least partially in one of the upper and lower cable wrap grooves 635, 636. within. In other aspects, the terminal ends of the cable segments 661A, 661B may be coupled to the respective pulleys 470, 472 in any suitable manner. It should be noted that the cable sections described herein have thinner (eg, smaller in height) arms than belts and pulley drives provide less height than those provided by belts and pulley drives. Link height AH1, AH2.

In this aspect, referring also to FIGS. 6G and 6H , one or more opposing cable segments 661A, 661B include any suitable inline cable tensioner 691 . While each cable segment 661A, 661B is shown to include an inline cable tensioner 691 , in other aspects only one of the cable segments 661A, 661B would include an inline cable tensioner 691 . In one aspect, as shown in Figure 6G, the inline cable tensioner 691 is a turn-buckle cable tensioner 691TBK1 that includes a body 691B and a threaded portion 691T. It should be noted that the inline cable tensioner 691 may reduce parts count and cost compared to conventional strap tensioning devices that use multiple opposing wedges and screws to tension the strap. The body 691B may be coupled to the respective portions CP1 of the cable segments 661A, 661B such that the body 691B rotates in direction 692 about its longitudinal axis independently of the rotation of the cables, such that when the body 691B is rotated, the cable segments 661A, 661B do not wrap in direction 692. The threaded portion 691T may be coupled to the respective portion CP2 of the cable segments 661A, 661B in any suitable manner, and in one aspect in a manner substantially similar to that described above with respect to the body 691B. Here, the body 691B is rotated in the direction 692 so that the threaded portion 691T is screwed in or out of the body, thereby adjusting the tension of the individual cable segments 661A, 661B. It should be noted that the cable sections 661A, 661B (and other cable sections described herein) are pre-tensioned (eg, pre-tensioned) to substantially eliminate the transport of the cable sections 661A, 661B The elongation of the arm during normal (eg, designed) loading (the cable segments do not extend under the normal operating load of transporting the arm).

6H shows another example of a slack knob-type cable tensioner 691TBK2 in accordance with aspects of the present disclosure. In this example, each cable portion CP1, CP2 includes a threaded portion 691T1, 691T2 substantially similar to that described above. The threaded portions 691T1, 691T2 engage with the turnbuckle body 691B1 such that when the turnbuckle body 691B1 is rotated in the direction 692, the threaded portions 691T1, 691T2 move toward or away from each other for raising or lowering the cable section 661A tension in .

Although the inline cable tensioner 691 is described above as a slack knob type cable tensioner, in other aspects (as mentioned above) the inline cable tensioner 691 may be Any suitable cable tensioner that shortens the length of the cable to apply tension to the cable. For example, in one aspect, the inline cable tensioner 691 may be a resilient type cable tensioner 691RM (FIGS. 6C and 6F), which uses a similar function as described above with respect to FIGS. 6G and 6H. Each of the cable portions CP1 , CP2 is coupled to each cable segment in the manner described. Here, the elastic cable tensioner 691RM includes an elastic member 691BR that couples each of the cable portions CP1, CP2 to each other. The resilient member 691BR may be a spring, or other suitable resilient member, having a spring force greater than any operational load that would be imposed on the cables 661A, 661B, 660A, 660B during operation of the substrate transport arm described herein , so that the tension on the individual cables 661A, 661B, 660A, 660B remains in a stable (or constant) state regardless of the resiliency of the elastic member 691BR. In this aspect, the elastic member 691BR can be stretched to mount the cable segments 661A, 661B, 660A, 660B on the individual pulleys, once the cable segments 661A, 661B, 660A, 660B are mounted on the On the individual pulleys, the elastic members 691BR are at least partially relaxed to automatically set a predetermined tension on the opposite individual cable segments 661A, 661B, 660A, 660B.

Similarly, the idler pulley 476 has an end applicator interface with a surface of the idler pulley 476 positioned against the respective double-ended substrate holder 204, or in other aspects, the end applicator The interface is formed by the shaft 476S described herein. The idler pulleys 476 are coupled to individual elbow drive pulleys 474 (ie, fifth set of drives 495 ) by individual segmented drive rings 660 . The segmented drive ring 660 includes separate cable segments 660A, 660B or any other suitable drive chain (eg, strap segments) coupled to the idler pulley 476 and the elbow drive pulley 474 to implement the idler pulley 476 rotation.

The idler pulley 476 includes a rim 650 that forms cable wrapping grooves 635 , 636 that interface with the individual cables 660A, 660B of the segmented drive ring 660 . Cable anchor points 643 , 644 ( FIG. 6C ) join the separate cable segments 660A, 660B to the idler pulley 476 . For example, the perimeter 650 forms an upper cable wrap channel 635 around which the cable 660B is wrapped. The perimeter 650 also forms a lower cable wrap channel 636 around which the cable 660A is wrapped. The upper and lower cable wrapping grooves 635, 636 are located at different heights of the idler pulley 476 so that the cables 660A, 660B are placed at different planes relative to each other (ie, one cable does not wrap around the other) . Referring to Figure 6D, the elbow drive pulley 474 is substantially similar to the idler pulley 476 described above.

In one aspect, the idler pulleys 472, 476 and the respective elbow drive pulleys 470, 474 (to which the idler pulleys 472, 476 are coupled by the segmented drive rings 660, 661) have any suitable drive ratio (drive ratio), which provides sufficient rotation of the individual dual-ended substrate holders 203, 204 to transport the substrate, as shown in Figures 7A-7L. For example, the ratio between idler pulleys 472, 476 and elbow drive pulleys 470, 474 may be 1:2 or any suitable ratio. It should be noted that conventional strap and pulley drives provide approximately +/- 160 degrees of rotation of the end effector at the wrist joint WX. Aspects of the present disclosure using cable and pulley actuators may provide end effectors or pulleys (such as those described herein) at wrist joint WX about individual axes SX, EX, WX greater than +/ -160 degree rotation.

For example, in one aspect, the individual pulleys 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 of the pulley systems 655A-655E have pulley drives 490, 492, 493, 494, 495 pairs of pulleys The engagement of 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 is arranged to determine the individual pulleys 480, 484, 488, 482, 486, 491, 470 of the pulley system 655A-655E, 474, 472, 476 between the wound and unwound positions of the pulley drives 490, 492, 493, 494, 495 on the individual pulleys 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 Pulleys 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 rotate at least 360 degrees of rotation. For example, referring to FIG. 4 , the pulley drive 493 of the pulley system 655E may be wrapped around the pulleys 470 , 472 such that the wrapping of the pulley drive 493 on the pulley 472 and the unwinding of the pulley 472 (which is driven by the rotation of the pulley 470 ) Turn at least 360 degrees between winding positions. The pulley drive 495 of the pulley system 655D may be wrapped around the pulleys 474, 476 such that the pulley 476 (which is driven by the rotation of the pulley 474) rotates at least between the wrapped and unwound positions of the pulley drive 495 on the pulley 476 360 degrees. In some aspects, other pulley systems 655A-655C may be similarly constructed to allow at least 360 degrees of rotation of the driven pulley.

In one aspect, the individual pulleys 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 of the pulley systems 655A-655E have the pulley drives 490, 492, 493, 494, 495 pairs of pulleys 480, The engagement of 484, 488, 482, 486, 491, 470, 474, 472, 476 is arranged to determine individual end effectors 203, 204 on individual pulleys 480, 484, 488, 482, 486, 491, 470 , 474, 472, 476 on the pulley drives 490, 492, 493, 494, 495 between the wound and unwound positions of the individual end effectors 203, 204 are rotated at least 360 degrees relative to the arm links 201, 202 turn. For example, referring to FIG. 4 , the pulley drive 493 of the pulley system 655E may be wrapped around the pulleys 470 , 472 such that the end effector 203 (which is driven by the rotation of the pulley 472 ) is on the pulley 472 of the pulley drive 493 . The rotation relative to the arm links 201, 202 is at least 360 degrees between the wound and unwound positions. The pulley drive 495 of the pulley system 655D may be wrapped around the pulleys 474, 476 such that the end effector 204 (which is driven by the rotation of the pulley 476) is opposed to the pulley drive of the arm links 201, 202 on the pulley 476 Rotate at least 360 degrees between the wound and unwound positions of the 495.

In one aspect, referring also to Figures 6E and 6F, an exemplary cable and pulley drive is shown. The cable and pulley drive may be substantially similar to the cable and pulley drive described herein. In this aspect, each of the grooves 635, 636 may be formed in the outer peripheral surface of the respective pulley 470, 472 to form a helix configured to guide the respective cable 661A, 661B along the The helical paths are wrapped around the individual pulleys 470, 472 so that the cables are self-sufficient and do not overlap each other. The helical wrapping of the cables 661A, 661B around the individual pulleys 470, 472 allows the cables 661A, 661B to be wrapped more than one turn (eg, any suitable number of turns, see FIG. 6F ) on each of the individual pulleys 470, 472, An end applicator or a pulley to provide greater than +/- 160 degrees or at least 360 degrees of rotation about the respective axes SX, EX, WX at the wrist joint WX.

The pulleys 470, 472 are shown in Figures 6E and 6F as having a substantially 1:1 drive ratio, but in other aspects the pulleys may have any suitable drive ratio, such as a 2:1 or 3:1 drive ratio , used (individually or in combination with helically wound cables) to increase the amount of rotation of the end applicator about the wrist axis. It should be noted that this pulley and pulley drive ratio described herein with respect to the cable and pulley drives can be implemented using pulleys that are smaller in diameter than the pulleys used in the belt and pulley drives. For example, the cables described herein are generally more flexible than straps and provide a smaller bend radius than straps. The smaller bend radius of the cables allows the pulleys used in the cable drives described herein to have smaller radii than pulleys used for belt drives.

The first set of transmission members 490, the second set of transmission members 492, the fourth set of transmission members 494, the shoulder drive pulleys 480, 484, 488 and the elbow idler pulleys 482, 486, 491 are substantially similar to those described above with respect to the idler pulley 472 , 476, the description of the drive pulleys 470, 474 and the segmented drive rings 660, 661 (see Figures 6C and 6D). As mentioned above, the cable attachment points for the first set of transmission members 490 , the second set of transmission members 492 , and the fourth set of transmission members 494 are substantially similar to those described above with respect to the cable attachment points 643 .

As mentioned herein, the modular composite arm link housings 201C, 202C are low profile housings with a compact height AH (FIGS. 5C and 5E) for a selected predetermined arm length OAL, OALn, which is consistent with bi-symmetrically flexible pulley drives (eg, drives 490, 492, 493, 494, 495) connecting the individual pulleys of the individual pulley systems 655A-655E, and It has a compact by-symmetrical profile. For example, the cable segments (eg, cable segments 660A, 660B shown in Figures 6A and 6B) have a substantially circular cross-section, although the cable segments may have any suitable symmetrical cross-section. This compact height AH is less than the housing height for a comparable number of pulleys with comparable lengths of belt pulley drives. For example, referring briefly to Figure 4A, the arm link 201 has the compact height AH and length OAL. In this example, arm link 201 includes three pulley systems 655A-655C, each pulley system including opposing cable segments (as described herein) and a pair of pulleys. Three cable/pulley drives as described herein are included when compared to arm links having the same length OAL and the same number of pulley systems, each including opposing strap sections and a pair of pulleys The height AH of this arm link 201 with crossed roller bearings is less than the height of the arm link comprising three strap/pulley drives.

Although the substrate transport apparatus 130 is described above as having dual-disc substrate holders 203, 204, in other aspects, the substrate holders may have any suitable configuration. For example, referring to Figures 8, 9, and 10, each of more than one end effector linkage (eg, substrate holder) has more than one corresponding substrate holding station (eg, substrate holder) depending therefrom. such as more than one juxtaposed (e.g., side-by-side) substrate holding station) and each is a respective one at the more than one corresponding substrate holding station (e.g., A substantially solid unhinged link between substrate holders). For example, the substrate transport apparatus 130 includes dual-disc substrate holders 203A, 204A, which are substantially similar to those described above; however, in this aspect, the substrate holding stations 203H1, 204H1 are disposed side-by-side at In a common plane (separated by the base spacing BP), the substrate holding stations 203H2, 204H2 are arranged in different planes and stacked one on top of the other (separated by a suitable height H10, which may correspond to the Distance between stacked substrate processing stations 150, stacked vacuum load lock chambers 102A, 102B, 102C, 102D between stacked holding stations or any suitable stacked substrate holding locations, see Figure 1C) . Here, the transfer chamber openings to the substrate processing station can be located at different planes/heights (see Figure 1C), each plane corresponding to the juxtaposed substrate holding of the two double-ended substrate holders 203, 204 Plane/height of stations 203H1-204H1, 203H2-204H2. In yet other aspects, as shown in Figure 11, the substrate holding stations 203H1, 204H1 are arranged side-by-side in a common plane (separated by the base spacing BP), and only the substrate holders 203A, 204A One is constructed as a dual-disc substrate holder (in this example, substrate holder 203A includes dual substrate holding stations 203H1, 203H2, while substrate holder 204A includes a single substrate holding station 204H1). Again, each plane 499, 499A of the substrate holder planes (as described herein and regardless of whether the substrate holding stations 203H1, 203H2, 204H1, 204H2 of the double-sided substrate holder form one or more planes) (see Figures 2D, 10 and 11) corresponding to and aligned with at least one plane of the transport opening for transfer (see Figures 1B and 1C) of the plane of the transport opening at a given Z position of a common transport chamber, Substrate transport through each individual opening in each plane is accomplished with at least one substrate holding station 203H1, 203H2, 204H1 of each dual-ended substrate holder 203, 204 with substantially no Z-axis motion , 204H2, that is, with a substrate holding station 203H1, 203H2, 204H1, 204H2 located at one end of the substrate holders 203, 204 extending into the substrate processing station (for each plane) to Picking and/or placing of substrates in substrate processing stations, retraction from such substrate processing stations, and insertion of the same or different dual substrates for the same or different ends of the dual ended substrate holders 203, 204 Substrate rapid exchange with substantially no Z-axis motion is performed to each of the other different substrate processing stations (without intervening or decoupling Z-axis motion between substrate transfers). The automatic wafer centering (eg, in accordance with aspects of the present disclosure illustrated in Figures 8, 9, 10) is accomplished by changing between substrate holding stations 203H1, 204H1 in a manner substantially similar to that described above The base pitch BP (for example, can be increased or decreased) is implemented. It will be appreciated that the substrate holders 203H2, 204H2 also rotate independently about the wrist axis WX to implement automatic wafer centering and/or for the substrate holding station 203H2 independently of the substrate holding station 204H2. To implement automatic wafer centering for substrate holding station 204H2 independently of substrate holding station 203H2.

12 and 13, the substrate transport apparatus 130 is shown in this configuration as including three dual-disc substrate holders. For example, the substrate transport apparatus 130 includes substrate holders 203 , 204 (as described above) and substrate holder 205 . The substrate holders 203 , 204 are driven by the drive section 220 in the manner described above for pivoting in directions 1300 , 1301 relative to each other and relative to the substrate holder 205 about the wrist axis WX. In this example, the drive section includes an additional drive axis (eg, five degrees of freedom drive) for moving the substrate holder 205 relative to the substrate holders 203, 204 about the wrist axis WX Each independently rotates in direction 1302; while in other aspects, substrate holder 205 may be actuated by any suitable portion of the substrate transport apparatus 130 (eg, for example, the upper arm 201 ) for and A radially extending axis through the shoulder axis SX remains aligned. Again, each plane 499, 499A of the substrate holder planes (as described herein and regardless of whether the substrate holding stations 203H1, 203H2, 204H1, 204H2 of the double-sided substrate holder form one or more planes) (see Figures 2D, 10 and 11) corresponding to and aligned with at least one plane of the transport opening for transfer (see Figures 1B and 1C) of the plane of the transport opening at a given Z position of a common transport chamber, Substrate transport through each individual opening in each plane is accomplished with at least one substrate holding station 203H1, 203H2, 204H1 of each dual-ended substrate holder 203, 204 with substantially no Z-axis motion , 204H2, that is, with a substrate holding station 203H1, 203H2, 204H1, 204H2 located at one end of the substrate holders 203, 204 extending into the substrate processing station (for each plane) to Picking and/or placing of substrates in substrate processing stations, retraction from such substrate processing stations, and insertion of the same or different dual substrates at the same or different ends of the dual ended substrate holders 203, 204 Substrate rapid exchange with substantially no Z-axis motion is performed to each of the other different substrate processing stations (without intervening or decoupling Z-axis motion between substrate transfers). In this example, the automatic wafer centering is implemented so that the base spacing BP between the substrate holder 203 and the substrate holder 204 can be increased or decreased, between the substrate holder 203 and the substrate holder 204. The base pitch BP between the substrate holders 205 can be increased or decreased, the base pitch BP between the substrate holder 204 and the substrate holder 205 can be increased or decreased, etc., with To implement automatic wafer centering of any one or more of substrate holding stations 203H1, 204H1, 205H1, 203H2, 204H2, 205H2 relative to side-by-side substrate processing stations 190-198 and 199A-199C (see Figure 12) . In other aspects, the substrate holding stations 203H2-205H2 (or 203H1-205H1) may be stacked one on top of the other in a manner similar to that shown in FIG. In yet other aspects, one or more of the substrate holders 203-205 may be a single disc substrate holder similar to that shown in FIG.

In still other aspects, the substrate transport apparatus 130 may have any suitable number of substrate stations for transporting substrates to and from a single substrate station, any suitable number of side-by-side substrate stations, any suitable number of one A construction of substrate stations, etc., arranged one on top of the other. The combination of side-by-side substrate holders and a plurality of substrate holders stacked (or single) on opposite sides of the wrist axis WX can be, for example, in a twin, single, triple, etc. substrate station module. The combination (see FIGS. 1A , 8 and 12 ) is used when coupled to the transfer chamber 125 . For example, referring to Figures 19 and 32, substrate transport apparatus 130 includes a (side-by-side) dual substrate holder 1900 that is rotatably coupled to arm 131 in a manner similar to that described above. In this aspect, the arm 131 and substrate holder 1900 can be rotationally and/or extendedly driven (eg, along a radial and/or non-radial linear path) by the triaxial drive section 220A (FIG. 3A) ), wherein one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, and one drive shaft rotates the substrate holder 1900 about the wrist axis WX. Each of upper arm 201, forearm 202, and substrate holder 1900 may be coupled to the triaxial drive section with any suitable drive (eg, with a cable and pulley drive substantially similar to that described with reference to FIG. 4) 220A (Figure 3A). Here, the substrate holder 1900 includes two side-by-side substrate holders 1900H1 , 1900H2 (ie, shared by both), which are substantially similar to those described above. A distance between side-by-side substrate holding stations 1900H1, 1900H2 may be substantially the same as the distance D between side-by-side substrate processing stations 190-197 (FIG. 1A). The substrate holder 1900 has a first end 1900E1, a second end 1900E2 and is a substantially solid unhinged link between the first end 1900E1 and the second end 1900E2. The substrate holder 1900 is rotatably coupled to the forearm 202 about the wrist axis WX at a location between the first end 1900E1 and the second end 1900E2. As described above, the substrate holding stations 1900H1, 1900H2 are disposed on a common plane (substantially similar to plane 499 described above with reference to Figures 2D, 10 and 11). The substrate holder 1900 can be stretched by the transport arm 131 and the drive section 220A along a non-radial linear path and/or a radial linear path in a manner substantially similar to that described herein for substantially simultaneous A pair of side-by-side substrate station modules picks and/or places substrates along the common plane 499 .

20, the substrate transport apparatus 130 is substantially similar to the substrate transport apparatus described above with reference to FIG. 19; however, in this aspect, the substrate transport apparatus 130 includes two substrate holders 1900A and 1900B, It is rotatably coupled to the arm 131 about the wrist axis WX. Each of substrate holders 1900A and 1900B are substantially similar to substrate holder 1900 . Here, the arm 131 and substrate holders 1900A and 1900B are rotationally and/or extendedly driven (eg, along a non-radial linear path and/or radially), for example, by the quad-axis drive section 220 (FIG. 3). linear path), where one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, one drive shaft rotates the substrate holder 1900A about the wrist axis WX Rotation, and a drive shaft, rotate the substrate holder 1900B about the wrist axis WX. Each of the upper arm 201, forearm 202 and substrate holders 1900A, 1900B can be coupled to the four-axis drive with any suitable drive (eg, with a cable and pulley drive substantially similar to that described with reference to FIG. 4) Section 220 (FIG. 3). In this aspect, substrate holder 1900A includes substrate holding stations 1900H1, 1900H2 and substrate holder 1900B includes substrate holding stations 1900H3, 1900H4. The substrate holding stations 1900H1, 1900H2, 1900H3, 1900H4 are disposed on a common plane (substantially similar to plane 499 described above with reference to Figures 2D, 10 and 11) in a manner substantially similar to that described above. The substrate holders 1900A, 1900B can be stretched by the transport arm 131 and the drive section 220 along a non-radial linear path and/or a radial linear path in a manner substantially similar to that described herein for substantial synchronization A pair of side-by-side substrate station modules picks and/or places substrates along the common plane 499 . The arm 131 and/or the substrate holders 1900A, 1900B may also be rotationally driven for rapid exchange of the substrate holders 1900A, 1900B (and substrates picked or placed by them in a manner similar to that described above). material).

Referring to Figure 21, substrate transport apparatus 130 is substantially similar to the substrate transport apparatus described above with reference to Figure 19; however, in this aspect, substrate transport apparatus 130 includes two single-sided substrate holders 2100A and 2100B, which is rotatably coupled to arm 131 about wrist axis WX. Each of the substrate holders 2100A and 2100B has a respective first end 2100AE1, 2100BE1 coupled to the forearm 202 near the wrist axis and a respective second end 2100AE2, 2100BE2, a respective substrate holding station 2100H1 , 2100H2 is set there. Here, the arm 131 and the substrate holders 2100A and 2100B are rotationally and/or for example driven by the fourth shaft drive section 220 (FIG. 3) (along a non-radial rectilinear path and/or a radial rectilinear path). Extensional drive where one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, one drive shaft rotates the substrate holder 2100A about the wrist axis WX , and a drive shaft to rotate the substrate holder 2100B about the wrist axis WX. Each of upper arm 201, forearm 202, and substrate holders 2100A, 2100B may be coupled to the four-axis drive with any suitable drive (eg, with a cable and pulley drive substantially similar to that described with reference to FIG. 4) Section 220 (FIG. 3). In this aspect, substrate holder 2100A includes substrate holder 2100H1 and substrate holder 2100B includes substrate holding station 2100H2. The substrate holding stations 2100H1, 2100H2 are disposed on a common plane (substantially similar to plane 499 described above with reference to Figures 2D, 10 and 11) in a manner substantially similar to that described above.

The substrate holders 2100A, 2100B can be stretched by the transport arm 131 and the drive section 220 along a non-radial linear path and/or a radial linear path in a manner substantially similar to that described herein for substantial synchronization A pair of side-by-side substrate station modules picks and/or places substrates along the common plane 499 . It should be noted that the independent rotation of the substrate holders 2100A, 2100B about the wrist axis WX can be achieved by changing the base spacing BP (eg, the distance between the side-by-side substrate holding stations 2100H1, 2100H2 can be used similar to Fig. 2B and 2C are enlarged or reduced) to accommodate changes in spacing D and/or to implement automated wafer centering for wafer placement in substrate processing stations 190-197 (see FIG. 1A ) , which provides automatic wafer centering.

Referring to Figure 22, substrate transport apparatus 130 includes a substrate holder 2200 that is rotatably coupled to arm 131 in a manner similar to that described above. In this aspect, arm 131 and substrate holder 2200 may be rotationally and/or extendedly driven (eg, along radial and/or non-radial linear paths) by triaxial drive section 220A (FIG. 3A) ), wherein one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, and one drive shaft rotates the substrate holder 2200 about the wrist axis WX. Each of upper arm 201, forearm 202, and substrate holder 2200 may be coupled to the triaxial drive section with any suitable drive (eg, with a cable and pulley drive substantially similar to that described with reference to FIG. 4) 220A (Figure 3A). Here, substrate holder 2200 includes two side-by-side substrate holding stations 2200H1, 2200H2 (ie, common to both) and an opposing substrate holding station 2200H3, which is substantially similar to that described above, and The substrate holder 2200 is a solid unhinged link between the substrate holding stations 2200H1, 2200H2, 2200H3. A distance between two side-by-side substrate holding stations 2200H1, 2200H2 may be substantially the same as the distance D between side-by-side substrate processing stations 190-197 (FIG. 1A).

The side-by-side substrate holding stations 2200H1, 2200H2 provide for substantially simultaneous picking of substrate S from side-by-side substrate processing stations 190-197 (1A) and substantially simultaneous placement of substrate S to side-by-side substrate processing stations 190-197 ( 1 ), while the opposing substrate holding station 2200H3 provides for placing a single substrate into a single substrate processing station (which may be a side-by-side substrate processing station) in a manner substantially similar to that described above with reference to FIGS. 8 and 9 190-197 (FIG. 1A) or one of substrate processing station 150S (FIG. 8)). The substrate holder 2200 is operably coupled to the forearm 202 about the wrist axis WX at a location between the substrate holding stations 2200H1, 2200H2, 2200H3. In one aspect, the substrate holding stations 2200H1, 2200H2, 2200H3 are disposed within the common plane 499 in a manner substantially similar to that described above with reference to FIGS. 2D, 10 and 11; but in other aspects, the substrates are One or more of the holding stations 2200H1, 2200H2, 2200H3 may be arranged in different stacking planes. The substrate holder 2200 can be stretched by the transport arm 131 and the drive section 220A along a non-radial linear path and/or a radial linear path in a manner substantially similar to that described herein for substantially simultaneous use of The substrate holding stations 2200H1, 2200H2 pick and/or place substrates along the common plane 499 to the side-by-side substrate station modules 150, or from the substrate station modules 150, 150S with the substrate holding station 2200H3 Substrates and/or placement of substrates into substrate station modules 150, 150S. In one aspect, arm 131 and/or end applicator 2200 may also be rotationally driven (in a manner substantially similar to that described herein) for use of the opposing substrate holding station 2200H3 and side-by-side substrates one of the holding stations 2200H1, 2200H2) to rapidly exchange substrates, eg, a substrate is picked up by the side-by-side substrate holding stations 2200H1, 2200H2 and a substrate is placed into positions by the opposite substrate holding station 2200H3 A position where a substrate has just been picked up by the side-by-side substrate holding stations 2200H1, 2200H2.

Referring to Figure 23, the substrate transport apparatus 130 includes substrate holders 1900, 2300 that are rotatably coupled to the arm 131 in a manner similar to that described above. In this aspect, the arm 131 and substrate holders 1900, 2300 may be rotationally and/or extendedly driven (eg, radially and/or non-radially) by the four-axis drive section 220 (FIG. 3). straight path), wherein one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, and one drive shaft rotates the substrate holder 1900 about the wrist axis WX , and a drive shaft to rotate the substrate holder 2300 about the wrist axis WX. Each of the upper arm 201, forearm 202 and substrate holders 1900, 2300 can be coupled to the four-axis drive with any suitable drive (eg, with a cable and pulley drive substantially similar to that described with reference to FIG. 4) Section 220 (FIG. 3). Here, the substrate holder 1900 includes two side-by-side substrate holding stations 1900H1, 1900H2 as described above. Substrate holder 2300 is an opposing substrate holder (ie, opposite to substrate holder 1900 in a manner similar to that described above with reference to Figures 8, 9 and 22) having a single substrate holding station 2300H1. Substrate holding station 2300H1 is substantially similar to the substrate holding station described above. The substrate holder 2300 has a first end (or proximal end) coupled to the forearm 202 at the axis of the wrist and an opposite end (or distal end) where the substrate holding station 2300H1 is positioned. The substrate holder 2300 is a substantially solid unhinged link between the proximal and distal ends. As described above, the distance between the two side-by-side substrate holding stations 2100H1 , 2100H2 and the distance D between the side-by-side substrate processing stations 190-197 (FIG. 1A) are substantially the same.

As described above, the side-by-side substrate holding stations 1900H1, 1900H2 provide for substantially simultaneous picking of substrates S from side-by-side substrate processing stations 190-197(1A) and substantially simultaneous placement of substrates S to side-by-side substrate processing Stations 190-197 (FIG. 1), while the opposing substrate holding station 2300H1 provides for placing a single substrate into a single substrate processing station (which may be side-by-side in a manner substantially similar to that described above with reference to FIGS. 8 and 9) One of the substrate processing stations 190-197 (FIG. 1A) or the substrate processing station 150S (FIG. 8)).

Independent rotation of substrate holder 2300 provides automatic wafer centering of substrates held by substrate holding station 2300H1 during pick/place operations (as described above). The independent rotation of the substrate holders 1900, 2300 can also provide that the substrate holder of the substrate transport apparatus 130 conforms to the shape of the transfer chamber 125A (eg, of the inner side wall 125W). For example, referring also to FIG. 23A, the substrate holders 1900, 2300 can be rotated by the drive section 220 such that the single substrate holder 2300 is rotated with an arm extension motion for reaching into the substrate processing station 150 , while the substrate holder 1900 is rotated to maintain a gap between the substrate holder 1900 and the wall 125W of the substrate processing chamber 125A. Although a six-sided rotation chamber 125A is shown in Figure 23A, in other aspects, the transfer chamber may have any suitable number of sides and the substrate holders 1900, 2300 may be rotated by the drive section in any suitable manner to conform to the shape of the wall of the transfer chamber.

In one aspect, the three substrate holding stations 1900H1, 1900H2, 2300H1 are disposed within the common plane 499 in a manner substantially similar to that described above with reference to Figures 2D, 10, and 11; but in other aspects, the substrate One or more of the material holding stations 1900H1, 1900H2, 2300H1 may be arranged in different stacking planes. The substrate holders 1900, 2300 can be stretched by the transport arm 131 and the drive section 220 along a non-radial linear path and/or a radial linear path in a manner substantially similar to that described herein for use with substrates. Substrate holding stations 1900H1, 1900H2 pick and/or place substrates substantially simultaneously along the common plane 499 for side-by-side substrate station modules 150, or use substrate holding station 2300H1 from substrate station modules 150, 150S Pick up the substrate and/or place the substrate into the substrate station modules 150, 150S. In one aspect, arm 131 and/or end applicator 2200 may also be rotationally driven (in a manner substantially similar to that described herein) for use of the opposing substrate holding station 2300H1 and side-by-side substrates one of the holding stations 1900H1, 1900H2) to rapidly exchange substrates, eg, a substrate is picked up by the side-by-side substrate holding stations 1900H1, 1900H2 and a substrate is placed into positions by the opposite substrate holding station 2300H1 A position where a substrate has just been picked up by the side-by-side substrate holding stations 1900H1, 1900H2.

Referring to Figure 24, the substrate transport apparatus 130 is substantially similar to the substrate transport apparatus described above with reference to Figures 2A-2D; however, in this aspect, the substrate holders 2403, 2404 have an "S" shaped configuration and cross each other. For example, the substrate holder 2403 has a first portion 2403A, a second portion 2403B having an elongated axis disposed substantially orthogonal to the elongated axis of the first portion 2403A, and a third portion having an elongated axis that is is disposed substantially parallel to the longitudinal axis of the first portion 2403A to form a substantially "S" shaped substrate holder. The distal end of the first portion forms the first end 2403E1 of the substrate holder 2403 and the distal end of the third portion 2403C forms the second end 2403E2 of the substrate holder 2403 . The second portion 2403B is coupled to the forearm 202 near the wrist axis WX, and the substrate holder 2403 is a substantially solid unhinged link between the first end 2403E1 and the second end 2403E2. Substrate holder 2404 and substrate holder 2403 are similar but with opposite hands.

Here, the arm 131 and substrate holders 2403, 2404 are rotationally and/or extendedly driven (eg, along a non-radial rectilinear path and/or radially), for example, by the four-axis drive section 220 (FIG. 3). linear path), wherein one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, one drive shaft rotates the substrate holder 2403 about the wrist axis WX Rotation, and a drive shaft, rotate the substrate holder 2404 about the wrist axis WX. Each of upper arm 201, forearm 202, and substrate holders 2100A, 2100B may be coupled to the four-axis drive with any suitable drive (eg, with a cable and pulley drive substantially similar to that described with reference to FIG. 4) Section 220 (FIG. 3). In this aspect, substrate holder 2403 includes substrate holding stations 2403H1, 2403H2 and substrate holder 2404 includes substrate holding stations 2404H1, 2404H2. The substrate holding stations 2403H1, 2403H2, 2404H1, 2404H2 are disposed on a common plane (substantially similar to plane 499 described above with reference to Figures 2D, 10 and 11) in a manner substantially similar to that described above. The substrate holding stations 2403H1, 2403H2, 2404H1, 2404H2 can be stretched by the transport arm 131 and drive section 220 along a non-radial linear path and/or a radial linear path in a manner substantially similar to that described herein, To pick and/or place substrates along the common plane 499 in substantially synchronously to the side-by-side substrate station modules. It should be noted that independent rotation of the substrate holders 2403, 2404 about the wrist axis WX can be achieved by changing the base spacing BP (eg, the distance between the side-by-side substrate holding stations 2100H1, 2100H2 can be used similar to Fig. 2B and 2C are enlarged or reduced) to accommodate changes in spacing D and/or to implement automated wafer centering for wafer placement in substrate processing stations 190-197 (see FIG. 1A ) , which provides automatic wafer centering. In one aspect, the arm 131 and/or the end effectors 2403, 2404 may also be rotationally driven (in a manner similar to that described above) to rapidly Exchange substrates.

25, the substrate transport apparatus 130 is substantially similar to the substrate transport apparatus described above with reference to FIG. 21; however, in this aspect, the substrate transport apparatus also includes the opposite of that described above with reference to FIG. 23. Substrate holder 2300. Here, the arms 131 and substrate holders 2100A, 2100B, 2300 are rotationally and/or extendedly driven (eg, along a non-radial linear path and/or by a five-axis drive section 220C (FIG. 3C), for example) radial straight path), wherein a drive shaft rotates the upper arm 201 about the shoulder axis SX, a drive shaft rotates the forearm 202 about the elbow axis EX, and a drive shaft rotates the substrate holder 2100A about the wrist Axis WX rotates, a drive shaft rotates substrate holder 2100B about wrist axis WX, and a drive shaft rotates substrate holder 2300 about wrist axis WX. Each of the upper arm 201, the forearm 202, and the substrate holders 2100A, 2100B, 2300 may be coupled to the five with any suitable actuator (eg, with a cable and pulley actuator substantially similar to that described with reference to FIG. 4). Shaft drive section 220C (FIG. 3C). In this aspect, substrate holder 2100A includes substrate holding station 2100H1, substrate holder 2100B includes substrate holding station 2100H2, and substrate holder 2300 includes substrate holding station 2300H1. The substrate holding stations 2100H1, 2100H2, 2300H1 are disposed on a common plane (substantially similar to plane 499 described above with reference to Figures 2D, 10 and 11) in a manner substantially similar to that described above. The substrate holding stations 2100H1, 2100H2, 2300H1 can be extended by the transport arm 131 and the drive section 220C along a non-radial linear path and/or a radial linear path in a manner substantially similar to that described herein for Substrates are picked and/or placed along the common plane 499 in a substantially simultaneous manner to the side-by-side substrate station modules.

It should be noted that independent rotation of the substrate holders 2100H1, 2100H2 about the wrist axis WX can be achieved by changing the base spacing BP (eg, the distance between the side-by-side substrate holding stations 2100H1, 2100H2 can be used similar to Fig. 2B and 2C are enlarged or reduced) to accommodate changes in spacing D and/or to implement automated wafer centering for wafer placement in substrate processing stations 190-197 (see FIG. 1A ) , which provides automatic wafer centering. It should be further noted that the opposing substrate holding station 2300H1 provides for placing a single substrate into a single substrate processing station (which may be side-by-side substrate processing) in a manner substantially similar to that described above with reference to FIGS. 8 and 9. One of stations 190-197 (FIG. 1A) or substrate processing station 150S (FIG. 8)). Independent rotation of substrate holder 2300 provides automatic wafer centering of substrates held by substrate holding station 2300H1 during pick/place operations (as described above). In one aspect, the arm 131 and/or the end applicators 2100A, 2100B, 2300 may also be rotationally driven (in a manner substantially similar to that described herein) to use the opposing substrate holding stations 2300H1 and 2300H1 and One of the side-by-side substrate holding stations 2100H1, 2100H2) rapidly exchanges substrates, eg, a substrate is picked up by the side-by-side substrate holding stations 2100H1, 2100H2 and a substrate is placed by the opposite substrate holding station 2300H1 One of the positions has just been picked up by the side-by-side substrate holding stations 2100H1, 2100H2 to pick up a substrate.

In one aspect, the independent rotation of the substrate holders 2100A, 2100B, 2300 also provides that the substrate holders of the substrate transport apparatus 130 communicate with those of the transfer chamber 125A (eg, the inner side walls 125W) in a manner similar to that described above with reference to FIG. 23A. ) have the same shape. However, in this aspect, one or more of the substrate holders 2100A, 2100B may be rotated by the drive section 220C for holding between the respective substrate holders 2100A, 2100B and the chamber wall 125W of the transfer chamber 125A Clearance.

26A, 26B, 26C, and 26D, the substrate transport apparatus 130 is substantially similar to the substrate transport apparatus described above with reference to FIG. 24; however, in this aspect, at least one of the substrate holders 2403, 2404 The substrate holders 2403, 2404 (and the respective substrate holding stations 2403H1, 2404H1, 2403H2, 2404H2) can be moved in the Z direction so that they pass over each other. For example, a wrist Z driver 2660 (in addition to, or in place of, Z driver 312 of FIGS. 3-3C ) is disposed within or coupled to forearm 202 . The wrist Z driver 2660 is configured to move one or more of the substrate holders 2403, 2404 in the Z direction relative to the other of the substrate holders 2403, 2404. In the example shown in Figure 26C, the wrist Z actuator 2660 is configured to move the substrate holder 2403 in the Z direction relative to the substrate holder 2404 and the forearm 202; however, in other aspects, these two Each of the substrate holders is movable in the Z direction relative to the forearm 202 and/or each other. The wrist Z actuator 2660 may have any suitable configuration for implementing Z motion, including but not limited to linear actuators, jack screws, magnetic levitation lifts. In this aspect, pulley 476 is coupled to shaft 476S, where shaft 476S includes outer shaft portion 476B and inner shaft portion 476A. The inner shaft portion 476A and the outer shaft portion 476B are constructed such that the inner shaft portion 476A is movable in the Z direction relative to the outer shaft portion 476B while the inner shaft portion 476A and the outer shaft portion 476B rotate together as a unit superior. For example, the inner shaft portion 476A includes an inner spline and the outer shaft portion 476B includes an outer spline configured to mate with the inner spline. While configurations of wrist Z driver 2660 and shaft 276S are provided, in other aspects, wrist Z driver 2660 and shaft 276S may have any suitable configuration to implement Z-axis motion of substrate holder 2403.

The wrist Z driver 2660 is configured to raise and lower the substrate holder 2403 so that the substrate holding stations 2403H1, 2403H2, 2404H1, 2404H2 are disposed in a common plane in a manner similar to that described above (which is substantially Similar to the plane 499 described above with reference to Figures 2D, 10 and 11), as shown in Figure 26C, for picking/placement of substrates to the side-by-side substrate station modules 150. As mentioned above, the substrate holding stations 2403H1, 2403H2, 2404H1, 2404H2 can be transported by the arms 131 and the drive section 220 along a non-radial linear path and/or a radial linear path substantially similar to that described in The manner herein extends to substantially synchronously picking and/or placing substrates along the common plane 499 for side-by-side substrate station modules. It should be noted that independent rotation of the substrate holders 2403, 2404 about the wrist axis WX can be achieved by changing the base spacing BP (eg, the distance between the side-by-side substrate holding stations 2100H1, 2100H2 can be used similar to Fig. 2B and 2C are enlarged or reduced) to accommodate changes in spacing D and/or to implement automated wafer centering for wafer placement in substrate processing stations 190-197 (see FIG. 1A ) , which provides automatic wafer centering. In one aspect, the arm 131 and/or the end effectors 2403, 2404 may also be rotationally driven (in a manner similar to that described above) to rapidly Exchange substrates.

The wrist Z drive 2660 is also constructed to raise and lower the substrate holder 2403 so that the substrate holder stations 2403H1 , 2403H3 of the substrate holder 2403 are positioned at different substrate holder stations than the substrate holder 2404 The planes of 2404H1, 2404H2, as seen in Figure 26D. Here, the substrate holding stations 2403H1, 2403H2 are positioned on the plane 499A, and the substrate holding stations 2404H1, 2404H2 are positioned on the plane 499. The planes 499, 499A may be separated by a distance or height H10 as described above. With the substrate holders 2403, 2404 being placed in different planes 499, 499A, the substrate holders 2403, 2404 can be rotated relative to each other about the wrist axis WX so that the substrate holders 2403H1, 2404H1 (or 2403H2 , 2404H2), the centers C of the substrates S held by each of them are substantially coincident with each other along the Z direction, as shown in FIG. 26B.

1C, the substrate holders 2403, 2404 can be independently rotated about the wrist axis and one or more of the substrate holders 2403, 2404 can be moved in the Z direction by the wrist Z driver 2660, using To implement picking up of substrates from different stacked and/or side-by-side substrate holding positions. For example, in one aspect, the substrate holding stations 2403H1, 2404H1 (or 2403H2, 2404H2) are disposed along a common plane, such as from side-by-side load lock chambers 102A, 102B or side-by-side load lock chambers 102C, 102D (or other substrate holding locations) pick/place substrates substantially simultaneously. In one aspect, the substrate holding stations 2403H1, 2404H1 (or 2403H2, 2404H2) are disposed one above the other in the plane of the stack (see FIG. 26B described above) for Substrates are picked/placed substantially simultaneously, eg, from stacked load lock chambers 102A, 102C or stacked load lock chambers 102B, 102D (or other substrate holding locations). In one aspect, the substrate holding stations 2403H1, 2404H1 (or 2403H2, 2404H2) are disposed in different planes and are offset horizontally, such as from the stacked and offset load lock chambers 102A, 102D ( or other substrate holding locations) to pick/place substrates substantially simultaneously.

27A, 27B, and 27C, the substrate transport apparatus 130 is substantially similar to the substrate transport apparatus described above with reference to FIG. 25; however, in this aspect, at least one of the substrate holders 2100A, 2100B, 2300 These can be moved in the Z direction so that the substrate holders 2100A, 2100B, 2300 (and the respective substrate holding stations 2100H1, 2100H2, 2300H1) pass over each other. For example, the wrist Z driver 2660 (in addition to, or in place of, the Z driver 312 of FIGS. 3-3C ) is disposed within or coupled to the forearm 202 . The wrist Z driver 2660 is configured to move one or more of the substrate holders 2100A, 2100B, 2300 in the Z direction relative to the other substrate holders 2100A, 2100B, 2300. In the example shown in Figure 27C, the wrist Z actuator 2660 is configured to move the substrate holder 2100B in the Z direction relative to the substrate holders 2100A, 2300 and the forearm 202; however, in other aspects, The two substrate holders 2100A, 2100B or all three substrate holders 2100A, 2100B, 2300 are movable in the Z direction relative to the forearm 202 and/or each other. It should be noted that the pulley 2770, shaft 2770S and transmission 2791 are shown to drive the substrate holder 2100A to rotate about the wrist axis WX, wherein the pulley 2770 is connected through a transmission similar to that shown in FIG. 4 and described above. A transmission is coupled to drive section 220C.

The wrist Z driver 2660 is constructed to raise and lower the substrate holder 2100B in a manner similar to that described above, so that the substrate holding stations 2100H1, 2100H2, 2300H1 are disposed in a common plane (substantially similar to 2D, 10 and 11 described above with reference to plane 499) for picking/placement of substrates as described above with reference to Figures 8, 9 and 25. The wrist Z driver 2660 is also configured to raise and lower the substrate holder 2100B such that the substrate holder station 2100H2 of the substrate holder 2100B is positioned at a different substrate holder station than the substrate holders 2100A, 2300 2100H1, 2300H1 plane, as seen in Figure 26C. Here, the substrate holding station 2100H2 is positioned on the plane 499A, and the substrate holding stations 2100H1, 2300H1 are positioned on the plane 499. The planes 499, 499A may be separated by a distance or height H10 as described above. With the substrate holders 2100A, 2100B being placed on different planes 499, 499A, the substrate holders 2100A, 2100B can be rotated relative to each other about the wrist axis WX so that each of the substrate holding stations 2100H1, 2100H2 The centers C of the substrates S held by them are substantially coincident with each other along the Z direction, as shown in FIG. 27B .

As mentioned above, the substrate holders 2100A, 2100B, 2300 may be transported by the arms 131 and the drive section 220 along a non-radial linear path and/or a radial linear path substantially similar to that described herein extending in a substantially synchronous manner to pick and/or place substrates along the common plane 499 for side-by-side substrate station modules. It should be noted that the independent rotation of the substrate holders 2100A, 2100B about the wrist axis WX can be achieved by changing the base spacing BP (eg, the distance between the side-by-side substrate holding stations 2100H1, 2100H2 can be used similar to Fig. 2B and 2C are enlarged or reduced) to accommodate changes in spacing D and/or to implement automated wafer centering for wafer placement in substrate processing stations 190-197 (see FIG. 1A ) , which provides automatic wafer centering. As described above, the independent rotation of substrate holder 2300 also provides automatic wafer centering of substrates held by substrate holding station 2300H1 during pick/place operations. As also mentioned above, in one aspect, the arm 131 and/or the end applicator 2200 may also be rotationally driven (in a manner substantially similar to that described herein) for holding with the opposing substrate station 2300H1 and one of the side-by-side substrate holding stations 2100H1, 2100H2) rapidly exchange substrates, eg, a substrate is picked up by the side-by-side substrate holding stations 2100H1, 2100H2 and a substrate is picked up by the opposite substrate holding station The 2300H1 is placed into one of the positions where a substrate has just been picked up by the side-by-side substrate holding stations 2100H1, 2100H2.

1C, the substrate holders 2100A, 2100B can be independently rotated about the wrist axis and one or more of the substrate holders 2100A, 2100B can be moved in the Z direction by the wrist Z driver 2660, using To implement picking up of substrates from different stacked and/or side-by-side substrate holding positions. For example, in one aspect, the substrate holding stations 2100H1, 2100H2 are disposed along a common plane, such as from side-by-side load lock chambers 102A, 102B or side-by-side load lock chambers 102C, 102D (or other substrate holding position) pick/place substrates substantially simultaneously. In one aspect, the substrate holding stations 2100H1, 2100H2 are disposed one above the other at the plane of the stack (see Figures 27B, 27C described above), for example, from the stack's The load lock chambers 102A, 102C or stacked load lock chambers 102B, 102D (or other substrate holding locations) pick/place substrates substantially simultaneously.

It should be understood that while wrist Z driver 2660 is shown and described with reference to Figures 26A-26D and 27A-27C, in other aspects the wrist Z driver may be used substantially similar to that shown in Figures 26C, 26D and 27C. The manner shown is incorporated into any of the arm configurations described herein that utilize more than one substrate holder so that substrates can be transferred to a common plane side-by-side substrate station module as described herein 150 or forwarded to a stacked substrate module 150 in the plane of the stack (see Figure 1C).

In one aspect, similar to that described with reference to Figures 23 and 25, independent rotation of the substrate holders 2100A, 2100B, 2300 may also provide that the substrate holders of the substrate transport apparatus 130 use those described above with reference to Figure 23A. In this way, it conforms to the shape of the transfer chamber 125A (eg, of the inner side wall 125W). However, in this aspect, the substrate holders 2100A, 2100B can be rotated by the drive section 220C to maintain the gap between the individual substrate holders 2100A, 2100B and the chamber wall 125W of the substrate processing chamber 125A. For example, referring to Figure 29 and Figures 23, 23A and 25, the substrate transport apparatus 130 may be positioned as shown in Figure 23A such that the substrate holders 1900 (or substrate holders 2100A, 2100B) are aligned for Pick/place substrates from each of the substrate processing stations 2333A, 2333B. The transport arm 131 is extended (block 2900 of Figure 29). In one aspect (eg, with independently rotatable substrate holders 2100A, 2100B), independent automatic wafer centering is provided in a manner similar to that described herein (block 2910 of FIG. 29 ) such that The substrate holding stations of the substrate holders 2100A, 2100B are centered under the substrate to be picked, or the substrate to be placed is centered at the substrate processing stations 2333A, 2333B. Substrates are synchronously picked from or simultaneously placed into the substrate processing stations 2333A, 2333B by the substrate holders 1900 (or 2100A, 2100B) (block 2920 of Figure 29). The substrate transport arm 131 is retracted and the substrate transport arm 131 and/or the substrate holder 1900 (or 2100A, 2100B) and substrate holder 2300 are rotated (block 2930 of FIG. 29 ) for the (single ) substrate holder 2300, for example, is aligned with substrate processing station 2333B. The transport arm 131 is extended (block 2940 of FIG. 29 ) and automatic wafer centering can be provided (block 2950 of FIG. 29 ) for picking or placing substrates with the substrate holder 2300 . As seen in FIG. 23A, to extend a single substrate holder 2300 into a substrate processing station 2333B, the substrate holder 1900 (or one or more of the substrate holders 2100A, 2100B) (eg, side by side) The substrate holding station of the The gap between 125W is used to implement the extension of the substrate holder 2300 into the substrate processing station 2333B. The gap is provided by the substrate holder 1900 (or one or more of substrate holders 2100A, 2100B) being rotated, and the substrates are picked from the substrate processing station 2333B by the single substrate holder 2300 Taken or placed into the substrate processing station 2333B (block 2970 of Figure 29).

28, the substrate transport apparatus 130 is substantially similar to the substrate transport apparatus described above with reference to FIG. 21; however, in this aspect, the substrate transport apparatus 130 includes two opposing single-sided substrate holders 2100C, 2100D, which are rotatably coupled to the arm 131 about the wrist axis WX in an opposite relationship to the substrate holders 2100A, 2100B. The substrate holders 2100C, 2100D are substantially similar to the substrate holders 2100A, 2100B and include respective substrate holding stations 2100H3, 2100H4. Here, the arm 131 and substrate holders 2100A, 2100B, 2100C, 2100D are rotationally and/or extendedly driven (eg, along a non-radial linear path and and/or radial straight path), wherein one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, and one drive shaft rotates the substrate holder 2100A about the elbow axis EX The wrist axis WX rotates, a drive shaft rotates the substrate holder 2100B about the wrist axis WX, a drive shaft rotates the substrate holder 2100C about the wrist axis WX, and a drive shaft rotates the substrate holder 2100D Rotate about wrist axis WX. Each of the upper arm 201, the forearm 202, and the substrate holders 2100A, 2100B, 2100C, 2100D may be coupled to the upper arm 201 with any suitable actuator (eg, with a cable and pulley actuator substantially similar to that described with reference to FIG. 4). The six-axis drive section 220B (FIG. 3B). In this aspect, substrate holder 2100A includes substrate holding station 2100H1, substrate holder 2100B includes substrate holding station 2100H2, substrate holder 2100C includes substrate holding station 2100H3, and substrate holder 2100D includes substrate holding station 2100H2 Material holding station 2100H4. The substrate holding stations 2100H1, 2100H2, 2100H3, 2100H4 are disposed on a common plane (substantially similar to plane 499 described above with reference to Figures 2D, 10 and 11) in a manner similar to that described above; and in other aspects In this case, one or more substrate holding stations can be moved in the Z direction by a wrist Z drive in a manner similar to that described above.

The substrate holders 2100A, 2100B, 2100C, 2100D can be stretched by the transport arm 131 and the drive section 220B along a non-radial linear path and/or a radial linear path in a manner substantially similar to that described herein, To pick and/or place substrates along the common plane 499 in substantially synchronously to the side-by-side substrate station modules. It should be noted that independent rotation of the substrate holders 2100A, 2100B and/or the substrate holders 2100C, 2100D about the wrist axis WX can be achieved by changing the base spacing BP (eg, between the side-by-side substrate holding stations 2100H1 , 2100H2 or 2100H3, 2100H4 can be increased or decreased in a manner similar to that shown in Figures 2B and 2C) to accommodate changes in spacing D and/or implemented for wafer placement in substrate processing stations 190-197 (see FIG. 1A ) for automatic wafer centering to provide automatic wafer centering. In one aspect, the arm 131 and/or the end effectors 2403, 2404 may also be rotationally driven (in a manner similar to that described above) to rapidly Exchange substrates.

19, 20, 22, and 23, in one aspect, more than one juxtaposed (eg, side-by-side) substrate holding station operates from a common end applicator linkage (eg, substrate holder) Cantilevering, the end applicator link is a solid unhinged link between the more than one juxtaposed substrate holding stations.

2A-2D, 8-9, 20, 21, 23, 24, 25, 26A-26D, 27A-27C and 28, at least one end applicator link (eg, substrate holder) includes more than one An end effector link coupled to the distal end 202E2 of the forearm 202 for rotation relative to the forearm 202 about a common axis of rotation (eg, wrist axis WX), and each of the more than one end effector The holder linkage (eg, substrate holder) has at least one corresponding substrate holding station depending therefrom, eg, more than one juxtaposed (eg, side-by-side) substrate holding station.

2A-2D, 8, 9, 21, 24, 25, 26A-26D, 27A-27C and 28, at least one end applicator link (eg, substrate holder) includes more than one coupled to the forearm The end effector linkage of the distal end 202E2 of 202 for rotation relative to the forearm 202 about a common axis of rotation (eg, wrist axis WX), wherein the drive sections 220, 220A, 220B, 220C are constructed such that Each of the more than one end effector links respectively rotates about a common axis of rotation independently of the other of the more than one end effector links, and the more than one end effector Each of the tool links has at least one corresponding substrate holding station depending therefrom, eg, more than one juxtaposed (eg, side-by-side) substrate holding station.

23, 23A, 25 and 27A-27C, in one aspect, the multi-link arm 131 has at least one substrate holder (eg, end applicator link) 1900, 2100A, 2100B, 2300, which is is rotatably coupled to a joint (eg, wrist joint/axis WX) at one end of forearm 202 such that the at least one substrate holder 1900, 2100A, 2100B, 2300 surrounds a common joint at wrist joint/axis WX The axis of rotation of is rotated relative to the forearm 202 . The at least one substrate holder 1900, 2100A, 2100B, 2300 has more than one substrate holding station 1900H1, 1900H2, 2100H1, 2100H2, 2300H1, which are cantilevered from the substrate holder and are arranged relative to each other in a on a common plane (eg, plane 499—see, eg, FIGS. 2D and 4) and constructed such that rotation of the at least one substrate holder 1900, 2100A, 2100B, 2300 about the wrist axis WX of the rotational axis is possible. The more than one substrate holding station 1900H1, 1900H2, 2100H1, 2100H2, 2300H1 is rotated about the wrist axis WX. Here, drive sections 220, 220C are configured to extend and retract the multi-link arm 131 at least along a radial or non-radial linear path relative to the shoulder axis SX (fixed position), causing each of at least two juxtaposed substrate holding stations 1900H1 , 1900H2 or 2100H1 , 2100H2 of the more than one substrate holding stations to follow the radial direction or the The non-radial paths traverse linearly and pass substantially simultaneously through separate corresponding openings in the more than one juxtaposed substrate transport openings at a common height (see FIGS. 1B and 1C ), and such that At least one other of the more than one substrate holding station 2300H1 that is different from each of the at least two juxtaposed substrate holding stations 1900H1, 1900H2 or 2100H1, 2100H2 can be independent of the at least two juxtaposed substrates The material holding station 1900H1, 1900H2 or 2100H1, 2100H2 is rotated about the wrist axis WX outside.

Still referring to Figures 23, 23A, 25 and 27A-27C, the at least two juxtaposed substrate holding stations 1900H1, 1900H2 or 2100H1, 2100H2 and the at least one other substrate holding station 2300H1 are disposed in the at least one substrate holder 1900, 2100A, 2100B, 2300 so that the at least two juxtaposed substrate holding stations 1900H1, 1900H2 or 2100H1, 2100H2 and the at least one further substrate holding station 2300H1 are arranged on opposite sides of the wrist axis WX. In one aspect, as shown in FIG. 23A , the at least two juxtaposed substrate holding stations 1900H1 , 1900H2 or 2100H1 , 2100H2 and the at least one other substrate holding station 2300H1 are disposed in the at least one substrate holder 1900 , 2100A, 2100B, 2300, to rotate about the wrist axis WX as the arm 131 extends and retracts along the radial or non-radial path, to selectively allow the at least one base The position of the material holder is consistent with the other side wall 125W of the transport chamber 125 (the other side wall is different from the side wall 125W where the opening of the transport chamber is located and the at least one substrate holder 1900, 2100A, 2100B, 2300). A sidewall 125W) through which the more than one substrate holding station 1900H1, 1900H2, 2100H1, 2100H2, 2300H1 passes as the arm extends and retracts.

Referring to Figure 23, the at least two juxtaposed substrate holding stations 1900H1, 1900H2 are disposed on the at least one substrate holder 1900 operably connected to the drive section 220 and arranged such that the at least one substrate The material holder 1900 rotates the at least two juxtaposed substrate holding stations 1900H1, 1900H2 about the wrist axis WX with a common independent degree of freedom.

25 and 27A-27C, the at least two juxtaposed substrate holding stations 2100H1, 2100H2 are disposed on the at least one substrate holder 2100A, 2100B operatively connected to the drive section 220C and arranged such that the at least one substrate holder 2100A, 2100B rotates each of the at least two juxtaposed substrate holding stations 2100H1, 2100H2 about the wrist axis WX with a different individual independent degree of freedom such that the Each of the at least two juxtaposed substrate holding stations 2100H1 , 2100H2 is independently rotated relative to each other about the wrist axis WX.

26A-26D and 27A-27C, in one aspect, the multi-link arm 131 has at least one substrate holder 2403, 2404 or 2100A, 2100B that is rotatably engaged to a Articulation (eg, wrist axis WX) such that the at least one substrate holder 2403, 2404 or 2100A, 2100B rotates relative to the forearm 202 about a common axis of rotation at wrist axis WX, the at least one substrate holder 2403, 2404 or 2100A, 2100B have more than one substrate holding station 3403H1, 3403H2, 3404H1, 2404H2, 2100H1, 2100H2, which are cantilevered from the substrate holders and along different planes 499, 499A (FIG. 26D , 27C), are offset in height relative to each other, and are constructed such that the at least one substrate holder 2403, 2404 or 2100A, 2100B rotates about the wrist axis WX, the more than one substrate holder Each of the stations 3403H1, 3403H2, 3404H1, 2404H2, 2100H1, 2100H2 rotates about the wrist axis WX. The drive sections 220, 220C are configured to extend and retract the multi-link arm 131 at least along a radial or non-radial path relative to the shoulder axis SX (eg, in a stationary position) such that multiple At least two juxtaposed substrate holding stations 2403H1, 2404H1, 2403H2, 2404H2 or 2100H1, 2100H2 in one of each of the substrate holding stations 3403H1, 3403H2, 3404H1, 2404H2, 2100H1, 2100H2 as the arm extends and retracted to traverse linearly along the radial or non-radial path, and each rotatable about the wrist axis WX independently of the other for separate passage in the common plane (or height) an individual (or in other aspects a common) opening in the more than one juxtaposed substrate transport openings (see Figures IB and 1C), and the more than one substrate At least one other of the two juxtaposed substrate holding stations 2403H1, 2404H1 or 2403H2, 2404H2 or 2100H1, 2100H2 is disposed in the at least one A substrate holder 2403, 2404, 2300 is substantially opposite each of the at least two substrate holding stations 2403H1, 2404H1 or 2403H2, 2404H2 or 2100H1, 2100H2. Here, drive sections 220, 220C include wrist Z drives 2660 configured to move the more than one substrate holding stations of the at least one end applicator link in height relative to each other, with To place more than one substrate holding station at the common height and juxtaposed to each other.

As described above, the substrate transport apparatus 130 (which has any suitable end effector, such as those described herein) may be mounted on a boom arm. For purposes of example, FIG. 15 illustrates arm 131 mounted on two-link boom 1500 . The two-link boom 1500 includes an upper link 1501 and a forearm link 1502 . The first end of the upper link 1501 is rotatably coupled to a drive section (eg, drive section 220 described herein) about the boom shoulder axis BSX. The first end of the forearm link 1502 is rotatably coupled to the second end of the upper link 1501 about the boom elbow axis BEX. The arm 131 is rotatably coupled to the second end of the forearm link 1502 about the arm shoulder axis SX. Each of the upper link 1501 and forearm link 1502 is a solid and unhinged joint between its two ends. In another aspect, FIG. 16 illustrates arm 131 mounted on single link boom 1600 . The single link boom 1600 includes a boom link 1601 . The first end of the boom link 1601 is rotatably coupled to a drive section (eg, drive section 220 described herein) about the boom shoulder axis BSX. The arm 131 is rotatably coupled to the second end of the boom link 1601 about the arm shoulder axis SX. The boom link 1601 is substantially solid and has no articulation between the two ends of the boom link 1601 . While single-link boom 1600 and two-link boom 1500 are shown, it should be understood that the boom may have any suitable number of links.

Referring also to FIG. 3 , in order to rotate the booms 1500 , 1600 , the drive sections 220 , 220A, 220B, 220C may include at least one boom drive shaft (or motor) 390 , 391 . For example, a single boom drive shaft 390 may be provided where, for example, the single link boom 1600 is used. A single boom drive shaft 390 may also be provided where the rotation of the forearm link 1502 of the two-link boom 1500 about the boom elbow axis BEX is slaved, such as the housing 310 . In other aspects, two boom drive shafts 390, 391 may be provided on the upper link 1501 and forearm link 1502 of the two-link boom 1500 about respective boom shoulder axes BSX and boom elbow Where the axis BEX is turned independently. The boom drive shafts 390, 391 may be arranged coaxially with the motors 342, 344, 346, 348; and in yet other aspects, the boom drive shafts 390, 391 may be arranged to be driven at the boom shoulder axis BEX The motors 342, 344, 346, 348 are arranged on the shoulder axis SX of the arm 131. Any suitable drive (eg, in one aspect a cable and pulley drive substantially similar to that shown in FIGS. 4-6B ) is provided to couple the links of the booms 1500 , 1600 to the drive shafts 390 , 391 .

18A and 18B, the automated wafer centering provided by aspects of the present disclosure may provide for substantially simultaneous placement (or picking) of dual substrates S, regardless of each and individual substrates S of the dual substrates S. What is the relative eccentricity between the material holding stations 203H1, 203H2, 204H1, 204H2. For example, with the substrate holding stations 203H1, 204H1 at the base spacing BP, automatic wafer centering can determine that the eccentricity EC2 of the substrate S1 is closer to the shoulder axis SX than the center 203H1C of the substrate holding station 203H1, and the substrate The eccentricity EC1 of S2 is, for example, to the right of the center 204H1C of the substrate holding station 204H1 (it should be noted that the term "right" is used herein for convenience of illustration only). Therefore, in order to place the substrates S1, S2 in the substrate processing stations 190, 191, for example, the position of each substrate S1, S2 can be independently adjusted between the substrate processing stations 190, 191 not only by automatic wafer centering The distance D between can also be adjusted independently in the extension/retraction direction 17700 to accommodate both eccentricities EC1, EC2. For example, each of the substrate holders 203, 204 is independently rotated about the wrist axis WX (which is along the radial extension axis 700 (see FIG. 7B ) or a non-radial path 701 (See FIG. 7F ) setup) to implement independent automatic wafer centering of substrates S1 , S2 at the respective substrate processing stations 190 , 191 . Similarly, with reference to FIG. 18C, automatic wafer centering can also be implemented at substrate processing stations 190, 191 (which have, for example, different radial distances 17020, 17021 from the shoulder axis SX of the substrate handling apparatus 130). material placement, wherein independent rotation of each substrate holding station 203H1, 203H2, 204H1, 204H2 about the wrist axis WX and/or placement of the wrist axis WX implements the side-by-side substrate holding stations 203H1-204H1, The increased reach (relative to the shoulder axis) of one of 203H2, 204H2 relative to the other of the side-by-side substrate holding stations 203H1-204H1, 203H2, 204H2.

2A-2D, 7A-7L and 15, an exemplary method of transporting substrates with the substrate transport apparatus 130 will be described. In the depicted example, the substrate processing apparatus 100 includes a transfer chamber 125A, which has six sides, or it may be substantially similar to the transfer chamber described above with reference to FIG. 1; however, in other aspects, the The transfer chamber may have any suitable number of sides with side-by-side substrate station modules coupled to individual sides of the transfer chamber in a manner similar to that shown in Figures 1A, 7A, 8, 12, 15 and 16. Additionally, in the depicted example, the arm 131 includes dual substrate holders 203, 204, each of which is located at a substrate holding station 203H1, 203H2, 204H1 at opposite ends of a respective substrate holder 203, 204 , 204H2; however, it should be understood that the methods described herein are equally applicable to the arm 131 and aspects of the present disclosure shown and described with reference to FIGS. 8-16.

As will be described below, the controller 110 is operably coupled to the drive section 220 and is configured to extend the arm 131 for use with a corresponding at least one base of the dual substrate holders 203, 204 Substrate holding stations (eg, substrate holding stations 203H1, 204H1 or 203H2, 204H2) pass through individual separate openings in the transport chamber wall 125W (see slit valve SV) to pick or place dual first substrates substantially simultaneously materials (see for example substrates S1, S2). Also described below, the controller 110 is configured to rapidly exchange the dual first substrates and the dual substrate holders 203, 204 substantially simultaneously via separate separate openings in the transfer chamber wall 125W At least one second substrate (eg, see substrate S3, S4) held by the corresponding at least one substrate holding station (eg, substrate holding station 203H1, 204H1 or 203H2, 204H2), wherein the double first substrate The substrates S1, S2 are simultaneously held by the corresponding at least one substrate holding station (eg, the substrate holding stations 203H1, 204H1 or 203H2, 204H2) of the dual substrate holders 203, 204. In some aspects, the drive section under the control of controller 110 is configured to independently of the corresponding substrate holding station 203H1, 203H2, 204H1, 204H2 relative to the other of the substrate holders Align.

According to aspects of the present disclosure, a dual-link SCARA (and/or other arm configurations described herein) having at least one end applicator uses the arm 131 and end applicators 203, 204 thereon (which Extension and retraction at/from any angular θ position/orientation of the dual SCARA arms achieves greater than or approximately 360 degrees of the SCARA arms around the shoulder axis SX within the entire interior space of the transfer chamber (see, eg, Fig. 1A and 7A) (block 1700 of FIG. 17 ) by the rotation angle θ (block 1710 of FIG. 17 ). The dual link SCARA with at least one end effector as described herein (and/or other arm configurations described herein) provides an in- Independent automatic wafer centering for each end effector (block 1720 of Figure 17). As also described herein, this dual-link SCARA with at least one end effector provides dual "quick swaps" (as described herein, in one aspect used on a common plane 499) without Z-axis motion. The substrate holding stations 203H1, 203H2, 204H1, 204H2 of the end applicators 203, 204 of the end applicators 203, 204 (see Figs. 2D and 11), in other aspects are used in different planes 499, 499A (see Fig. 10) Substrate holding stations 203H1 , 203H2 , 204H1 , 204H2 ) of end applicators 203 , 204 (block 1730 of FIG. 17 ), wherein end applicators 203 , 204 have side-by-side substrate processing stations and the end applicator 203 At least one of , 204 is a double-sided end applicator (eg, having at least one substrate holding station disposed at longitudinally spaced-apart opposite ends of the end applicator).

In the exemplary method, the substrate transport apparatus 130 described herein is provided (block 1401 of Figure 14). The controller 110 may also be provided (block 1420 of FIG. 14 ) and connected to the substrate transport apparatus 130 . The controller is configured to extend the at least one arm 131 of the substrate transport apparatus 130 such that substrate holders 203 , 204 (and in the example of FIG. 13 , substrate holder 205 ) extend through the transport chamber 125 , 125A sidewall 125W. For example, FIG. 7A illustrates the arm 131 of the substrate transport apparatus 130 in a home or retracted configuration relative to the shoulder axis SX. In this example, the retracted pattern is that the handle links 201, 202 are positioned one above the other and are substantially aligned with each other; and in other aspects, the retracted pattern is The wrist axis WX is positioned substantially above the shoulder axis SX, eg the upper link 201 and the forearm link 202 have the same length from the joint center to the joint center. The controller 110 is configured to implement the movement of the drive section 220 to implement independent automatic wafer centering for each substrate, wherein the base spacing BP of the substrate holding stations 203H2, 204H2 is increased (FIG. 2B) or reduced (FIG. 2C) to implement automatic wafer centering (in this case centering of substrates S3, S4 on individual substrate holding stations 203H2, 204H2) such that between substrate holding The distance between the stations 203H2, 204H2 is the same as the distance between the substrate processing stations 196, 197. As mentioned above, the automated wafer centering may be performed along more than one axis (eg, along an axis corresponding to the spacing between substrate processing stations and along an axis corresponding to the substrate holder axis of the extension direction). The controller 110 is further configured to effect the movement of the drive section 220 such that the wrist axis WX in one aspect moves in the radial direction 700 and the substrate holding stations 203H2, 204H2 pass through the chamber wall 125W in the transport chamber 125A The upper openings extend into the load lock chambers 102A, 102B (see Figures 7B and 7C).

In one aspect, the controller 110 may implement the action of the Z-axis drive 312 for raising the substrate holding stations 203H2, 204H2 (while in other aspects, the Z-movement may be at least partially driven by the substrate processing stations 196, 197). provided) for picking dual substrates S3, S4 substantially simultaneously from the substrate processing stations 196, 197 of the load lock chambers 102A, 102B. By the substrates S3, S4 being held at the substrate holding stations 203H2, 204H2, the controller 110 executes the movement of the driving section 220 to retract the arm 131 to the retracted configuration, for example, so that the substrate S3, S4 is removed from the load lock chambers 102A, 102B (see Figure 7D). The arm 131 is rotated in direction 777 to position the substrate holding stations 203H1, 204H1 adjacent to any suitable substrate processing station (eg, processing stations 188, 189), another set of substrates S1, S2 will be Picked up from the substrate handling station.

In a manner similar to that described above, the controller 110 is configured to implement movement of the drive section 220 to extend the arm 131 (block 1410 of FIG. 14 ) such that the base spacing BP of the substrate holding stations 203H1, 204H1 is increased (FIG. 2B) or reduced (FIG. 2C) to perform automated wafer centering (block 1430 of FIG. 14, in this example substrates S1, S2 at individual substrate holding stations 203H1, 204H1 centering) such that the distance between the substrate holding stations 203H1, 204H1 and the spacing between the substrate processing stations 188, 189 are substantially the same (see FIG. 7E). It should be noted that the automatic wafer centering (eg, increase or decrease of the base pitch BP) can be extended/retracted with the arm or with the arm 131 in the retracted configuration prior to the extension of the arm 131. Implemented substantially synchronously. In order to pick/place substrates from substrate processing stations 188, 189, the controller 110 is configured to implement movement of the drive section 220 such that the wrist axis WX moves in a non-radial extension, wherein the wrist axis In one aspect WX moves along a path 701 (FIG. 7F) which is offset from and/or at an angle to the radial extension/retraction axis (ie, path 701 does not pass through the shoulder axis SX or from there). Movement of this wrist axis WX along path 701 extends substrate holding stations 203H1 , 204H1 through openings in chamber wall 125W of transport chamber 125A into substrate processing stations 188 , 189 .

In one aspect, the controller 110 may implement the action of the Z-axis driver 312 for raising the substrate holding stations 203H1, 204H1 (while in other aspects, the Z-movement may be at least partially driven by the substrate processing station 188, 189) for substantially simultaneous picking of dual substrates S1, S2 from the substrate processing stations 188, 189 of the side-by-side substrate station modules 150 (block 1440 of FIG. 14). By the substrates S1, S2 being held at the substrate holding stations 203H1, 204H1, the controller 110 executes the motion of the driving section 220 to retract the arm 131 to the retracted state, for example, so that the substrate S1, S2 is removed from the side-by-side substrate station modules 150 (see Figure 7G). The base pitch BP of the substrate holding stations 203H1, 204H1 may be restored during (substantially synchronously with) the retraction of the arm 131 from the substrate processing stations 188, 189 or the arm is substantially in the retracted configuration (see Fig. 7G).

In one aspect, the rapid exchange of substrates S1 , S2 and substrates S3, S4 is performed in a manner described above (block 1450 of FIG. 14 ), wherein the substrates hold the plane (as described herein). description, regardless of whether the substrate holding stations 203H1, 203H2, 204H1, 204H2 of the double-sided substrate holder form one or more planes) of each plane 499, 499A (see Figures 2D, 10 and 11) and in common At least one plane (see FIGS. 1B and 1C ) of the transport opening for transport at a given Z-position of the transport chamber above the plane of the transport opening corresponds to and is aligned with it so as to pass through each plane on each plane. Substrate transport for a separate opening is performed with at least one substrate holding station 203H1, 203H2, 204H1, 204H2 of each dual-ended substrate holder 203, 204 with substantially no Z-axis motion (ie, with a position at Substrate holding stations 203H1, 203H2, 204H1, 204H2 at one end of substrate holders 203, 204 extend into, pick and/or place (for each plane) substrate processing stations The substrate, retracted from the substrate processing station, and extended into each of the other different substrates with the same or different substrate holding stations located at the same or different ends of the dual-ended substrate holders 203, 204 Processing station to implement (without intervening or decoupling Z-axis motion between substrate transfers) substantially no Z-axis motion for rapid exchange of substrates. For example, arm 131 is rotated in the direction 777 (see Figures 7G-7I) for placing substrate holding stations 203H2, 204H2 adjacent to processing stations 188, 189 (with substrates S1-S4 held by arms 131) The station is the substrate processing station where the substrates S1, S2 will be removed and the dual substrates S3, S4 will be placed. The controller 110 implements the motion of the drive section 220 to extend the arm 131 (block 1410 of FIG. 14), Causes the base spacing BP between the substrate holding stations 203H2, 204H2 to be increased (FIG. 2B) or decreased (FIG. 2C) to implement automatic wafer centering (block 1430 of FIG. 14, in this example substrate S3 , S4 centering at the respective substrate processing stations 188, 189) so that the distance between the substrate holding stations 203H2, 204H2 and the distance between the substrate processing stations 188, 189 are substantially the same (see Figure 7I It should be noted that automatic wafer centering (ie, increase or decrease of base pitch BP) can be associated with extension/retraction of the arm or with the arm 131 in a substantially retracted configuration prior to extension of the arm 131 Substantially simultaneous implementation. To place substrates S3, S4 to the respective substrate processing stations 188, 189, the controller 110 is configured to implement the motion of the drive section 220 such that the wrist axis WX follows the path 701 (FIG. 7J ) non-radially extended movement. Movement of wrist axis WX along path 701 holds the substrate holding station 203H2, 204H2 extend through openings in the chamber wall 125W of the transport chamber 125A into the substrate processing stations 188, 189.

In one aspect, the controller 110 may implement the actuation of the Z-axis drive 312 to lower the substrate holding stations 203H2, 204H2 (while in other aspects, the Z-movement may be at least partially driven by the substrate processing station 188, 189) for placing the dual substrates S3, S4 substantially simultaneously in the substrate processing stations 188, 189 of the substrate station module 150 (block 1440 of FIG. 14). Controller 110 implements movement of drive section 220 to retract arm 131 to, for example, the retracted configuration such that substrate holding stations 203H2, 204H2 are removed from side-by-side substrate station modules 150. The base pitch BP of the substrate holding stations 203H1, 204H1 may be restored during (substantially synchronously with) the retraction of the arm 131 from the substrate processing stations 188, 189 or the arm is substantially in the retracted configuration. Although rapid exchange of substrates S1, S2 and substrates S3, S4 is described, it should be understood that in other aspects, substrates S3, S4 may be placed at a different location than substrates S1, S2 are picked other locations.

The controller 110 may implement the operation of the drive section 220 such that the arms 131 are extended into the load lock locks 102A, 102B in the manner described above for placing the substrates S3, S4 into the The dual substrates S1, S2 are placed into the substrate processing stations 196, 197 in the manner of the substrate processing stations 188, 189 (see Figure 7K). The arm 131 is retracted from the load lock chambers 102A, 102B to, for example, the retracted configuration (see Figure 7L) for other substrate pick/placement.

4, 5A-5F and 30, in accordance with aspects of the present disclosure, a method includes providing a substrate transport apparatus (block 3000 of FIG. 30), such as the substrate transport apparatus described above. The arm links 201, 202 of the substrate transport apparatus are reconfigured (block 3010 of Figure 30), as described above, the movable arm links 201, 202 are reconfigurable arm links 201R, 202R , which has modular composite arm link housings 201C, 202C, and pulley systems 255A-255E formed from link housing modules that are rigidly coupled to each other, using substantially all of the modular composite arm link housings Shells 201C, 202C are housed end-to-end within and extend through the rod housing modules that are rigidly coupled to each other. As described above, the rod housing modules that are rigidly coupled to each other include rod housing end modules (eg, link housing extension modules (eg, central arm sections 510A, 510B) that are interchanged by at least one ) connected end couplings 511, 512, 513, 514), the link housing extension module has a predetermined characteristic configuration for determining the lengths OAL, OALn of the movable arm links 201, 202. In reconfiguring the movable arm links 201, 202, the at least one interchangeable link housing extension module 510A, 510B can be from several different interchangeable link housing extension modules (eg, central arm section) 510A, 510A1-510An, 510B, 510B1-510Bn for connecting to the link housing end modules 511, 512, 513, 514 and forming the reconfigurable arm links 201R, 202R, Each of the different interchangeable rod housing extension modules has a corresponding predetermined characteristic configuration for determining the corresponding different lengths OAL, OALn of the movable arm links 201, 202 , to selectively set the modular composite arm link housing 201C, 202C and the reconfigurable arm link 201R, 202R to a predetermined arm link length OAL, OALn Rod length OAL, OALn.

4, 5A-5F and 31, in accordance with aspects of the present disclosure, a method includes providing a substrate transport apparatus (block 3100 of FIG. 31), such as the substrate transport apparatus described above. Articulation of at least one of the movable arm links or end effectors relative to the at least one movable arm link (eg, described above for transporting substrates to different substrate holders) The articulation of the position is implemented with pulley systems 655A-655E (block 3110 of Figure 31) which are mounted and engaged to the modular composite arm link housing 201C of the movable arm links 201, 202, 202C, wherein the modular composite arm link housing 201C, 202C is formed from link housing modules (described herein) that are rigidly coupled to each other and the pulley systems 655A-655E are constructed using substantially The modular composite arm linkage housings 201C, 202C are housed within and extend through the rigidly coupled linkage housing modules end-to-end. The rigidly coupled linkage housing modules include Link housing end modules (eg, end couplings) 511, 512, 513, 514 connected by at least one link housing extension module (eg, central arm section) 510A, 510B, the at least one link The shell extension modules are mechanically fastened to each link shell end module 511, 512, 513, 514 to form the modular composite arm link shells 201C, 202C and are arranged such that the mould being formed The modular composite arm link housings 201C, 202C are matched to the misalignment tolerances of a pulley drive (eg, drives 490, 492, 493, 494, 495) that are in the modular composite arm link housing. The ends of the shells 201C, 202C are connected to the pulleys 480, 484, 488, 482, 486, 491, 470, 474, 472 of the pulley systems 655A-655E housed in the rod shell end modules 511, 512, 513, 514 , 476.

33A-36B, other exemplary substrate transport apparatuses 130 are illustrated and to which the above-described aspects of the present disclosure may be applied. 33A-36B, the arm link and the end effector can be rotated independently or in some aspects, the rotation of one or more of the arm link and the end effector can be rotated by the other arm link Controlled (slaved). It should be noted that the arm link and end effector can be rotationally driven with a motor/driver and pulley system substantially similar to that described above. 33A and 33B show a substrate transport arm 131 having an upper arm 201, a forearm 202, and a single-end substrate holder. Figures 34A and 34B show a substrate transport arm 131 having an upper arm 201, a forearm 202, and a single bilateral end applicator. Figures 35A and 35B show a substrate transport arm 131 having a single arm link (eg, upper arm 201) and two independently rotatable single end applicators. Figures 36A and 36B show a substrate transport arm 131 having an upper arm 201, a forearm 202 and two independently rotatable single end applicators. Although examples of transport arms have been provided herein, in other aspects, transport arms using aspects of the present disclosure described herein may have any suitable configuration (eg, any suitable arm link number, any suitable number of end applicators, each end applicator may hold a single substrate or more than one substrate, etc.).

According to one or more aspects of the present disclosure, a substrate transport apparatus includes:

support frame;

an articulated arm connected to the support frame and having at least one movable arm link and an end effector connected to the movable arm link, a substrate holding a station is provided on the end effector;

Wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing formed by a plurality of link housing modules firmly coupled to each other ), and a pulley system that is received within and extends through the rod housing modules rigidly coupled to each other substantially from one end of the modular composite arm link housing to the other, and wherein the rigidly coupled rod housing modules include rod housing end modules connected by at least one interchangeable rod housing extension module having functions for determining the movable rod housing the predetermined characteristic configuration of the length of the arm link; and

Wherein the at least one interchangeable rod housing extension module can be selected from several different interchangeable rod housing extension modules for connecting to the rod housing end modules and forming the reconfigurable The arm link, each different interchangeable link housing extension module has a different corresponding predetermined characteristic structure to determine a corresponding different length of the movable arm link for the module The composite arm link housing and the reconfigurable arm link are selectively set to a predetermined arm link length of a number of predetermined arm link lengths.

According to one or more aspects of the present disclosure, the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a corresponding box-shaped section, and the predetermined feature configuration is that the interchangeable rod housing extension module and each of the several different interchangeable rod housing extension modules have different respective lengths and the The corresponding box section is sized and shaped to commensurate with the different corresponding lengths to maintain a predetermined (end-to-end) for each of the different interchangeable rod housing extension modules. rigidity.

According to one or more aspects of the present disclosure, the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a corresponding box-shaped section, and the predetermined feature configuration is that the interchangeable rod housing extension module and each of the several different interchangeable rod housing extension modules have different respective lengths and the Corresponding box sections are sized and shaped commensurate with the different respective lengths to maintain a predetermined stiffness (end-to-end) for each of the different selectable predetermined arm link lengths.

According to one or more aspects of the present disclosure, each of the at least one interchangeable rod housing extension module and the plurality of different interchangeable rod housing extension modules is a box-shaped cross-section of extrusion members.

According to one or more aspects of the present disclosure, the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section, which is made of a different material than (one or both of) the rod housing end modules.

According to one or more aspects of the present disclosure, the material of the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules has a Higher stiffness (spring modulus) of material for rod housing end modules.

According to one or more aspects of the present disclosure, the material of each of the at least one interchangeable rod housing extension module and the plurality of different interchangeable rod housing extension modules has and the pulley The material rigidity of the pulley drive of the system commensurate rigidity.

According to one or more aspects of the present disclosure, the pulley system is engaged to the modular composite arm link housing and is arranged such that the pulley system driven by the drive section implements the at least one arm link or Articulation of the end effector.

According to one or more aspects of the present disclosure, the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a stainless steel Box section.

According to one or more aspects of the present disclosure, the at least one interchangeable rod housing extension module is mechanically fastened to each of the rod housing end modules to form the modular composite arm link housing and arranged such that the formed modular composite arm link housing matches the misalignment tolerance of a pulley drive connected for the selected predetermined arm link lengths of the pulleys of the pulley system.

According to one or more aspects of the present disclosure, the at least one interchangeable linkage housing extension module is mechanically secured by mechanical fastener joints including removable mechanical fasteners. are securely fastened to each of the link housing end modules to form the modular composite arm link housing, and the mechanical fastener joints are constructed such that the formed modular The composite arm link housing is matched to the misalignment tolerance of a pulley drive that connects the pulleys of the pulley system for a selected predetermined arm link length.

According to one or more aspects of the present disclosure, at least one of the link housing end modules accommodates a pulley of the pulley system.

According to one or more aspects of the present disclosure, the modular composite arm link housing is a low profile housing having predetermined values for selected commensurate with a bisymmetric flexible pulley drive. Arm-length compact height, the dual symmetric flexible pulley drive connects the pulleys of the pulley system and has a compact, substantially symmetrical cross-section.

According to one or more aspects of the present disclosure, the compact height is less than a belt pulley drive housing height for a comparable number of pulley systems having comparable lengths.

According to one or more aspects of the present disclosure, the flexible pulley drive connecting the pulleys is a cable or cable pulley drive.

According to one or more aspects of the present disclosure, at least one of the link housing end modules accommodates a crossed roller bearing mounted pulley of the pulley system such that the position and alignment of the pulley depend on Meshes with and is controlled by this crossed roller bearing.

In accordance with one or more aspects of the present disclosure, the modular composite arm link housing is a low profile housing having a compact height for interfacing with molds received at the end of the link housings. The crossed roller bearing mounted pulley of the pulley system in at least one of the sets corresponds to a selected predetermined arm length.

According to one or more aspects of the present disclosure, the engagement of the pulley drives of the individual pulleys of the pulley system to the pulleys is arranged to determine the wrapping of the pulley drives of the individual pulleys of the pulley system on the individual pulleys Rotation of the individual pulley up to at least 360 degrees from the unwound position.

According to one or more aspects of the present disclosure, the engagement of the pulley drives of the individual pulleys of the pulley system to the pulleys is arranged to determine the wrapping and the pulley drive of the end effector on the individual pulleys. Rotation of the end effector relative to the at least one movable arm link by at least 360 degrees of rotation between unwound positions.

According to one or more aspects of the present disclosure, a substrate transport apparatus includes:

support frame;

an articulated arm connected to the support frame and having at least one movable arm link and an end applicator connected to the at least one movable arm link, at which end a substrate holding station is positioned on the applicator;

wherein the at least one movable arm link has a modular composite arm link housing formed from a plurality of link housing modules that are rigidly coupled to each other, and a pulley system that is substantially free from the module The composite arm link housing is housed in and extends through the rigidly coupled link housing modules end-to-end and the pulley system is mounted and engaged to the modular composite arm link housing a housing and arranged such that the pulley system driven by the drive section implements the articulation of the at least one movable arm link or the articulation of the end effector relative to the at least one movable arm link; and

wherein the firmly coupled rod housing modules include rod housing end modules connected by at least one rod housing extension module mechanically fastened to the Each of the link housing end modules to form the modular composite arm link housing and arranged such that the formed modular composite arm link housing and a pulley drive have misalignment tolerances matched , wherein the pulley drive connects the pulleys of the pulley system housed within the link housing end modules at the ends of the modular composite arm link housing.

According to one or more aspects of the present disclosure, the at least one movable arm link is a reconfigurable arm link, wherein the link housing extension module is a plurality of different interchangeable links. Each of the different interchangeable link housing extension modules has a different corresponding predetermined feature configuration for determining the length of the at least one movable arm link.

According to one or more aspects of the present disclosure, each of the rod housing extension module and the plurality of different interchangeable rod housing extension modules has a box-shaped cross-section corresponding thereto, and The predetermined feature configuration is that each of the rod housing extension module and the plurality of different interchangeable rod housing extension modules have a different corresponding length and the corresponding box-shaped section is made The different corresponding lengths are sized and shaped to maintain a predetermined (end-to-end) rigidity for each of the different interchangeable linkage housing extension modules.

According to one or more aspects of the present disclosure, each of the rod housing extension module and the plurality of different interchangeable rod housing extension modules has a box-shaped cross-section corresponding thereto, and The predetermined feature configuration is that each of the rod housing extension module and the plurality of different interchangeable rod housing extension modules have a different corresponding length and the corresponding box-shaped section is made The different corresponding lengths are sized and shaped to maintain a predetermined (end-to-end) rigidity for each of the different selectable predetermined arm link lengths.

According to one or more aspects of the present disclosure, the rod housing extension module and each of the several different interchangeable rod housing extension modules are extrusions having a box-shaped cross-section.

According to one or more aspects of the present disclosure, the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section that is A section made of the material of (one or both) of the rod housing end modules.

According to one or more aspects of the present disclosure, the rod housing extension module and each of the several different interchangeable rod housing extension modules are made of a material having a higher ratio than the rod housing end module. The material has higher stiffness (spring modulus).

According to one or more aspects of the present disclosure, the material of the rod housing extension module and each of the several different interchangeable rod housing extension modules has a pulley drive with the pulley system The rigidity of the material is quite rigid.

According to one or more aspects of the present disclosure, the rod housing extension module and each of the several different interchangeable rod housing extension modules have a box-shaped cross-section made of stainless steel .

According to one or more aspects of the present disclosure, the pulley drive is a bisymmetric flexible pulley drive and the modular composite arm link housing is a low profile housing with A dual symmetric flexible pulley drive that connects the pulleys of the pulley system and has a compact height corresponding to a chosen predetermined arm length Substantially symmetrical section.

According to one or more aspects of the present disclosure, the compact height is less than a belt pulley drive housing height for a comparable number of pulley systems having comparable lengths.

According to one or more aspects of the present disclosure, the flexible pulley drive connecting the pulleys is a cable or cable pulley drive.

In accordance with one or more aspects of the present disclosure, the modular composite arm link housing is a low profile housing having a compact height for interfacing with molds received at the end of the link housings. The crossed roller bearing mounted pulley of the pulley system in at least one of the sets corresponds to a selected predetermined arm length.

According to one or more aspects of the present disclosure, at least one of the pulleys of the pulley system is mounted with a crossed roller bearing such that the position and alignment of the at least one of the pulleys depends on the relationship with the crossed roller The engagement of the column bearing is controlled by it.

According to one or more aspects of the present disclosure, the engagement of the pulley drives of the pulleys of the pulley system to the pulleys is arranged to determine which of the pulleys of the pulley system is at least one of the pulleys of the pulley system. Rotation of the at least one of the pulleys at least 360 degrees between the wound and unwound positions of the pulley drive on at least one.

According to one or more aspects of the present disclosure, the engagement of the pulley drives of the pulleys of the pulley system to the pulley is arranged to determine the pulley of the end effector on at least one of the pulleys Rotation of the end effector relative to the at least one movable arm link by at least 360 degrees of rotation between the actuator's wound and unwound positions.

According to one or more aspects of the present disclosure, a method includes:

Provides substrate handling equipment that includes

support frame, and

an articulated arm connected to the support frame and having at least one movable arm link and an end applicator connected to the movable arm link, at which end a substrate holding station is positioned to apply on the device; and

Reconfiguring the moveable arm link, wherein the moveable arm link is a reconfigurable arm link having a mould formed from a plurality of link housing modules rigidly coupled to each other Modular composite arm linkage casings, and pulley systems, are housed within the rigidly coupled linkage casings substantially from one end to the other of the modular composite arm linkage casings within and extending through the modules, and wherein the firmly coupled linkage housing modules include linkage housing end modules connected by at least one interchangeable linkage housing extension module, the linkage housing extending the module has a predetermined characteristic configuration for determining the length of the movable arm link; and

Wherein the at least one interchangeable link housing extension module can be selected from several different interchangeable link housing extension modules for connecting to the link housing end modules and forming the reconstituted arm connection rod, each different interchangeable link housing extension module has a different corresponding predetermined feature configuration to determine a corresponding different length of the movable arm link for the modular composite arm The link housing and the reconfigurable arm link are selectively set to a predetermined arm link length of a number of predetermined arm link lengths.

According to one or more aspects of the present disclosure, the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic configuration is that each of the at least one interchangeable rod housing extension module and the plurality of different interchangeable rod housing extension modules have different respective lengths And the corresponding box-shaped section is sized and shaped commensurate with the different corresponding lengths to maintain a predetermined rigidity (end-to-end) for each of the different interchangeable linkage housing extension modules .

According to one or more aspects of the present disclosure, the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic configuration is that each of the at least one interchangeable rod housing extension module and the plurality of different interchangeable rod housing extension modules have different respective lengths And the corresponding box section is sized and shaped commensurate with the different corresponding lengths to maintain a predetermined rigidity (end-to-end) for each of the different selectable predetermined arm link lengths .

According to one or more aspects of the present disclosure, each of the at least one interchangeable rod housing extension module and the plurality of different interchangeable rod housing extension modules is an extrusion ( extrusion), which has a box-shaped profile.

According to one or more aspects of the present disclosure, the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section, which is made of a different material than (one or both of) the rod housing end modules.

According to one or more aspects of the present disclosure, the material of the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules has a Higher stiffness (spring modulus) of material for rod housing end modules.

According to one or more aspects of the present disclosure, the material of each of the at least one interchangeable rod housing extension module and the plurality of different interchangeable rod housing extension modules has and the pulley The material rigidity of the pulley drive of the system is fairly rigid.

According to one or more aspects of the present disclosure, the pulley system is engaged to the modular composite arm link housing and is arranged such that the pulley system driven by the drive section implements the at least one arm link or Articulation of the end effector.

According to one or more aspects of the present disclosure, the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a stainless steel Box section.

According to one or more aspects of the present disclosure, the method further includes mechanically securing the at least one interchangeable rod housing extension module to each of the rod housing end modules to form the Modular composite arm link housing, wherein the formed modular composite arm link housing is matched to the misalignment tolerance of a pulley drive connected for a selected predetermined arm link. The pulleys of the pulley system for the length of the rod.

According to one or more aspects of the present disclosure, the method further includes extending the at least one interchangeable linkage housing module with mechanical fastener joints including removable mechanical fasteners Mechanically fastened to each of the rod housing end modules to form the modular composite arm link housing, and the mechanical fastener joints constructed such that the formed mold The modular composite arm link housing is matched to the misalignment tolerance of a pulley drive that connects the pulleys of the pulley system for a selected predetermined arm link length.

According to one or more aspects of the present disclosure, at least one of the link housing end modules accommodates a pulley of the pulley system.

According to one or more aspects of the present disclosure, the modular composite arm link housing is a low profile housing having predetermined values for selected commensurate with a bisymmetric flexible pulley drive. Arm-length compact height, the dual symmetric flexible pulley drive connects the pulleys of the pulley system and has a compact, substantially symmetrical cross-section.

According to one or more aspects of the present disclosure, the compact height is less than a belt pulley drive housing height for a comparable number of pulley systems having comparable lengths.

According to one or more aspects of the present disclosure, the flexible pulley drive connecting the pulleys is a cable or cable pulley drive.

According to one or more aspects of the present disclosure, at least one of the link housing end modules accommodates a crossed roller bearing mounted pulley of the pulley system such that the position and alignment of the pulley depend on Meshes with and is controlled by this crossed roller bearing.

In accordance with one or more aspects of the present disclosure, the modular composite arm link housing is a low profile housing having a compact height for interfacing with molds received at the end of the link housings. The crossed roller bearing mounted pulley of the pulley system in at least one of the sets corresponds to a selected predetermined arm length.

According to one or more aspects of the present disclosure, the engagement of the pulley drives of the individual pulleys of the pulley system to the pulleys is arranged to determine the wrapping of the pulley drives of the individual pulleys of the pulley system on the individual pulleys Rotation of the individual pulley up to at least 360 degrees from the unwound position.

According to one or more aspects of the present disclosure, the engagement of the pulley drives of the individual pulleys of the pulley system to the pulleys is arranged to determine the wrapping and the pulley drive of the end effector on the individual pulleys. Rotation of the end effector relative to the at least one movable arm link by at least 360 degrees of rotation between unwound positions.

According to one or more aspects of the present disclosure, a method includes:

Substrate support equipment is provided, which includes

support frame,

an articulated arm connected to the support frame and having at least one movable arm link and an end applicator connected to the movable arm link, at which end a substrate holding station is positioned to apply on the device; and

Articulation of the at least one movable arm or the end effector relative to the at least one movable arm is effected with a pulley system mounted and engaged to the at least one movable arm's modular composite arm linkage housing Articulation of a movable arm, wherein the modular composite arm link housing is formed from a plurality of link housing modules rigidly coupled to each other, and the pulley system is substantially composite from the modules arm link housings are received within and extend through the rigidly coupled link housing modules end-to-end;

wherein the firmly coupled connecting rod shell molds include connecting rod shell end modules connected by at least one connecting rod shell extension module mechanically fastened to the connecting rod shells each of the rod housing end modules to form the modular composite arm link housing and arranged such that the formed modular composite arm link housing and a pulley drive have misalignment tolerances matched, Wherein the pulley drive connects the pulleys of the pulley system housed within the link housing end modules at the ends of the modular composite arm link housing.

According to one or more aspects of the present disclosure, the method further includes reconfiguring the at least one movable arm link, wherein the link housing extension module is extendable across a plurality of different interchangeable link housings Each of the different interchangeable link housing extension modules has a different corresponding predetermined feature configuration for determining the length of the at least one movable arm link.

According to one or more aspects of the present disclosure, each of the rod housing extension module and the plurality of different interchangeable rod housing extension modules has a box-shaped cross-section corresponding thereto, and The predetermined feature configuration is that each of the rod housing extension module and the plurality of different interchangeable rod housing extension modules have a different corresponding length and the corresponding box-shaped section is made The different corresponding lengths are sized and shaped to maintain a predetermined (end-to-end) rigidity for each of the different interchangeable linkage housing extension modules.

According to one or more aspects of the present disclosure, each of the rod housing extension module and the plurality of different interchangeable rod housing extension modules has a box-shaped cross-section corresponding thereto, and The predetermined feature configuration is that each of the rod housing extension module and the plurality of different interchangeable rod housing extension modules have a different corresponding length and the corresponding box-shaped section is made The different corresponding lengths are sized and shaped to maintain a predetermined (end-to-end) rigidity for each of the different selectable predetermined arm link lengths.

According to one or more aspects of the present disclosure, the rod housing extension module and each of the several different interchangeable rod housing extension modules are extrusions having a box-shaped cross-section.

According to one or more aspects of the present disclosure, the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section that is A box-shaped section made from the material of (one or both) of the end modules of the rod housing.

According to one or more aspects of the present disclosure, the rod housing extension module and each of the several different interchangeable rod housing extension modules are made of a material having a higher ratio than the rod housing end module. The material has higher stiffness (spring modulus).

According to one or more aspects of the present disclosure, the material of the rod housing extension module and each of the several different interchangeable rod housing extension modules has a pulley drive with the pulley system The rigidity of the material is quite rigid.

According to one or more aspects of the present disclosure, the rod housing extension module and each of the several different interchangeable rod housing extension modules have a box-shaped cross-section made of stainless steel .

According to one or more aspects of the present disclosure, the pulley drive is a bisymmetric flexible pulley drive and the modular composite arm link housing is a low profile housing with A double symmetrical flexible pulley actuator that connects the pulleys of the pulley system and has a compact height corresponding to a chosen predetermined arm length Substantially symmetrical section.

According to one or more aspects of the present disclosure, the compact height is less than a belt pulley drive housing height for a comparable number of pulley systems having comparable lengths.

According to one or more aspects of the present disclosure, the flexible pulley drive connecting the pulleys is a cable or cable pulley drive.

In accordance with one or more aspects of the present disclosure, the modular composite arm link housing is a low profile housing having a compact height for interfacing with molds received at the end of the link housings. The crossed roller bearing mounted pulley of the pulley system in at least one of the sets corresponds to a selected predetermined arm length.

According to one or more aspects of the present disclosure, at least one of the pulleys of the pulley system is mounted with a crossed roller bearing such that the position and alignment of the at least one of the pulleys depends on the relationship with the crossed roller The engagement of the column bearing is controlled by it.

According to one or more aspects of the present disclosure, the engagement of the pulley drives of the pulleys of the pulley system to the pulleys is arranged to determine which of the pulleys of the pulley system is at least one of the pulleys of the pulley system. Rotation of the at least one of the pulleys at least 360 degrees between the wound and unwound positions of the pulley drive on at least one.

According to one or more aspects of the present disclosure, the engagement of the pulley drives of the pulleys of the pulley system to the pulley is arranged to determine the pulley of the end effector on at least one of the pulleys Rotation of the end effector relative to the at least one movable arm link by at least 360 degrees of rotation between the actuator's wound and unwound positions.

According to one or more aspects of the present disclosure, a substrate transport apparatus includes:

frame;

a drive section connected to the frame;

At least one articulated multi-link arm having an upper arm rotatably joined to the drive section at one end and a forearm rotatably joined to the upper arm and the upper arm at an opposite end of the upper arm Between the one end and the opposite end is a substantially solid unhinged link, one or more of the upper arm and the forearm including end couplings and a central arm section, which may be numbered selected from different central arm segments, each different central arm segment having a different length to define an individual arm link length from the joint center to the joint center; and

At least one end effector link is rotatably coupled to the forearm.

According to one or more aspects of the present disclosure, the at least one end effector link includes separate and distinct dual end effector links, each of which is rotatably and separately engaged to the Common ends of the forearms such that each end effector link rotates relative to the front about a common axis of rotation, each end effector link having a corresponding at least one substrate retention therefrom stand.

According to one or more aspects of the present disclosure, the respective at least one substrate holding station cantilevered from at least one end effector link of the double end effector links includes a a substrate holding station at opposite ends of an end applicator link, the at least one end applicator link being substantially solid and unhinged between its opposite ends, and wherein the substrate holding station at one end of the opposite ends The corresponding at least one substrate holding station of the separate and distinct end applicator links is substantially coplanar.

According to one or more aspects of the present disclosure, the dual end effector links are configured such that radial extension and retraction of the multi-link arm implements the corresponding at least one of each end effector link. Substantially simultaneous extension and retraction of a substrate holding station passes through individually spaced openings in the transport chamber wall that are juxtaposed at substantially the same height relative to each other.

According to one or more aspects of the present disclosure, a substrate holding station at opposite ends of the at least one end applicator link is substantially coplanar with each other.

According to one or more aspects of the present disclosure, substrate holding stations at opposite ends of the at least one end applicator link and the corresponding at least one substrate holding station of the end applicator links that are separate and distinct from each other The stations are substantially coplanar.

In accordance with one or more aspects of the present disclosure, the respective at least one substrate holding station of mutually separate and distinct end effector links includes a substrate at opposite ends of the at least one end effector link A holding station and each of the separate and distinct end effector links are substantially solid and unhinged between opposite ends.

According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section that defines independent degrees of freedom for at least one end effector link relative to another.

According to one or more aspects of the present disclosure, the independent degrees of freedom for each end applicator link allow for the respective at least one substrate at each of the dual end applicator links Independent automatic wafer centering of the holding station.

According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section configured to implement the respective at least one substrate holding with each of the dual-end applicator linkages Substantially simultaneous extension of stations through individual separate openings in a transport chamber wall occurs simultaneously with separate automated wafers at the corresponding at least one substrate holding station of each of the double end effector linkages centering.

According to one or more aspects of the present disclosure, the substrate transport apparatus further includes a controller operably coupled to the drive section and configured to extend the linkage arm across the transport chamber wall the respective separate openings for substantially simultaneous picking or placement of dual first substrates with the corresponding at least one substrate holding station of the dual end applicator linkage.

According to one or more aspects of the present disclosure, the controller is configured to, when the dual first substrates are simultaneously held on the corresponding at least one substrate holding station of the dual-end applicator linkage, The dual first substrates are rapidly exchanged substantially simultaneously with at least one second substrate held on the corresponding at least one substrate holding station of the dual-end applicator linkage through the respective separate openings.

According to one or more aspects of the present disclosure, a substrate processing apparatus includes:

a transport chamber constructed to maintain an isolated atmosphere therein and having a chamber wall having more than one substrate transport opening separated from and juxtaposed to each other at a common height along the side wall;

At least one articulated multi-link arm having a drive section connected to a stationary position in the transport chamber and having an upper arm and a forearm located within the transport chamber, one end of the upper arm rotatably coupled to the drive section, the forearm is joined to the upper arm at an opposite end of the upper arm and the upper arm is a substantially solid unhinged link between the one end and the opposite end, one or more of the upper arm and the forearm Includes end couplings and a central arm section selectable from several different central arm sections, each different central arm section having a different length to define from joint center to joint the individual arm link length at the center; and

wherein the multi-link arm has more than one separate and distinct end effector links, each of which is rotatably and separately articulated to a common end of the forearm such that each end applies The applicator links rotate relative to the front about a common axis of rotation at the joint, each end effector link having a corresponding at least one substrate holding station cantilevered therefrom and extending from the joint The more than one end effector links are juxtaposed with respect to each other along a common plane.

According to one or more aspects of the present disclosure, the drive section is configured to extend and retract the multi-link arm at least along a radial axis, the extension and retraction implementing each end effector link Substantially simultaneous extension and retraction of the corresponding at least one substrate holding station through the separate openings juxtaposed along the side and aligning at least one of the corresponding at least one substrate holding station relative to the The other of the more than one end effector links are independently aligned.

According to one or more aspects of the present disclosure, the drive section is configured to hold the respective at least one substrate holding station of each of the end effector links relative to the end effectors The corresponding at least one substrate holding station of the other of the links is independently aligned.

According to one or more aspects of the present disclosure, the respective at least one substrate holding station cantilevering from at least one of the end effector links includes at the end effector links of the end effector links. A substrate holding station at the opposite ends of at least one that is substantially solid and not hinged between the opposite ends.

In accordance with one or more aspects of the present disclosure, the respective at least one substrate holding station at at least one of the opposite ends and the respective at least one substrate of the end applicator links that are separate and distinct from each other The holding stations are substantially coplanar.

According to one or more aspects of the present disclosure, the corresponding at least one substrate holding station at opposite ends of the at least one of the end effector links are substantially coplanar with each other.

According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section that defines independent degrees of freedom for at least one end effector link relative to another.

According to one or more aspects of the present disclosure, the independent degrees of freedom for each end effector link allow for the Independent automatic wafer centering of the corresponding at least one substrate holding station.

According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section constructed to implement the Substantially simultaneous extension of the respective at least one substrate holding station through respective substrate delivery openings on the side wall of the delivery chamber occurs simultaneously at each of the more than one separate and distinct end applicator links independent automatic wafer centering of the respective at least one substrate holding station.

According to one or more aspects of the present disclosure, the substrate transport apparatus further includes a controller operably coupled to the drive section and configured to extend the linkage arm through the transport chamber the individual substrate delivery openings in the side walls for substantially simultaneous picking or placement of dual firsts with the corresponding at least one substrate holding station of the more than one separate and distinct end effector links substrate.

According to one or more aspects of the present disclosure, the controller is configured to simultaneously hold the dual first substrates on the respective at least one of the more than one separate and distinct end effector links. While on a substrate holding station, at least one second substrate held on the corresponding at least one substrate holding station of the more than one separate and distinct end applicator links is passed through the individual substrates. The material delivery openings rapidly exchange the dual first substrates substantially simultaneously.

According to one or more aspects of the present disclosure, one or more of the upper arm and the forearm includes at least one cable and pulley drive that implements at least one of the dual-ended end effectors around the common The axis of rotation is greater than +/- 160 degrees of rotation.

According to one or more aspects of the present disclosure, each of the at least one cable and pulley drive includes a pulley and opposing cable segments wrapped around the pulleys.

According to one or more aspects of the present disclosure, each pulley includes guide grooves into which a respective one of the opposing cable sections is received and guided during the winding motion of the respective pulley. into the guide groove.

According to one or more aspects of the present disclosure, one or more of the opposing cable segments include inline cable tensioners.

According to one or more aspects of the present disclosure, the inline cable tensioner includes a turn-buckle cable tensioner.

According to one or more aspects of the present disclosure, the inline cable tensioner includes a resilient cable tensioner.

According to one or more aspects of the present disclosure, one or more of the pulleys comprise crossed roller pulleys.

According to one or more aspects of the present disclosure, wherein the at least one articulated multi-link arm includes at least one crossed roller bearing in an articulated joint of the at least one articulated multi-link.

According to one or more aspects of the present disclosure, a substrate transport apparatus includes:

frame;

a drive section connected to the frame;

At least one two-link SCARA arm having a first arm link and a second arm link that engage each other at the elbow joint of the SCARA arm, the first arm link being engaged to the drive at the shoulder joint section; and

more than one end effector links, which are separate and distinct from each other, each of which is rotatably and separately joined to the second arm link at a common bowl joint such that each end effector The applicator link rotates relative to the second arm link about a common axis of rotation at the common wrist joint, each end effector link having a corresponding at least one substrate holding station extending therefrom (dependent therefrom);

wherein one or more of the elbow joint, the shoulder joint, and the common wrist joint include a crossed column bearing and the crossed column bearing forms the drive transmission of the at least one two-link SCARA arm pulley.

According to one or more aspects of the present disclosure, the transmission includes a cable and a pulley transmission, wherein the cable is wound around an outer peripheral surface of the crossed roller bearing.

According to one or more aspects of the present disclosure, the cable includes two opposing cable segments that are wound around the crossed roller bearing in opposite winding directions.

According to one or more aspects of the present disclosure, one or more of the opposing cable segments includes an inline cable tensioner.

According to one or more aspects of the present disclosure, the inline cable tensioner includes a slack knob type cable tensioner.

According to one or more aspects of the present disclosure, the inline cable tensioner includes an elastic cable tensioner.

According to one or more aspects of the present disclosure, the cable and pulley drive implements a rotation of at least one of the more than one end effector links about the common axis of rotation greater than +/- 160 degrees turn.

According to one or more aspects of the present disclosure, one or more of the first link and the second arm link includes an end coupling and a central arm section, the central arm section may vary from several The different central arm segments are selected, each of which has a different length to define an individual arm link length from joint center to joint center.

According to one or more aspects of the present disclosure, the respective less than one substrate holding station cantilevered from each of the more than one end effector links is disposed to be At least three of the more than one end applicator links are on a common plane determined by the corresponding less than one substrate holding station and from each other of the more than one end applicator links The corresponding at least one substrate holding station from which the rods cantilever is substantially coplanar.

According to one or more aspects of the present disclosure, two of the at least three of the more than one end applicator linkages of the corresponding one less substrate holding station correspond to the plurality of substrate holding stations. One common end effector link to one end effector link.

According to one or more aspects of the present disclosure, the two substrate holding stations are disposed one each at opposite ends of the common end effector linkage.

According to one or more aspects of the present disclosure, the two substrate holding stations at opposite ends of the common end effector linkage are substantially coplanar with each other.

According to one or more aspects of the present disclosure, the two substrate holding stations at opposite ends of the common end effector link and the corresponding one of the separate and distinct end effector links The substrate holding stations are substantially coplanar.

According to one or more aspects of the present disclosure, the common end effector link is substantially solid and unhinged between its opposite ends.

According to one or more aspects of the present disclosure, the more than one end effector links are configured such that radial extension and retraction of the SCARA arm implements the The respective few substrate holding stations pass through the substantially synchronized extension and retraction of individual spaced openings in a transport chamber wall that are juxtaposed at a substantially common height relative to each other.

According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section defining at least one end effector link for the more than one end effector links opposed to each other Independent degrees of freedom from other end effector links.

According to one or more aspects of the present disclosure, the independent degrees of freedom for each end effector link allow for the Independent automatic wafer centering corresponding to one less substrate holding station.

According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section configured to implement the respective one of the more than one end effector linkages Substantially simultaneous extension of at least one substrate holding station through individually spaced openings in a transport chamber wall occurs simultaneously with the corresponding at least one substrate of each of the more than one end effector links Independent automatic wafer centering of the material holding station.

According to one or more aspects of the present disclosure, the substrate transport apparatus further includes a controller operably coupled to the drive section and configured to extend the SCARA arm across the transport chamber wall the respective separate openings for substantially simultaneous picking or placement of dual first substrates with the corresponding at least one substrate holding station of the more than one end effector linkages.

According to one or more aspects of the present disclosure, the controller is configured to simultaneously hold the dual first substrates on the respective at least one substrate of the more than one end applicator linkages While on the holding station, substantially synchronously with at least one second substrate held on the corresponding at least one substrate holding station of the more than one end effector links via the respective separate openings Quick exchange of the dual first substrate.

According to one or more aspects of the present disclosure, a substrate transport apparatus includes:

support frame;

an articulated arm connected to the support frame and having at least one movable arm link and an end applicator connected to the at least one movable arm link, at which end a substrate holding station is positioned on the applicator;

wherein the at least one movable arm link has a modular composite arm link housing comprising at least one extruded arm housing member and pulley system housed within the extruded arm housing member and Extending through the extruded arm housing member substantially from one end to the other end of the modular composite arm link housing, the pulley system is mounted and engaged to the modular composite arm link housing housing and arranged so that the pulley system driven by the drive section implements the articulation of the at least one movable arm link or the articulation of the end effector relative to the at least one movable arm link, and

wherein the modular composite arm link housing includes link housing end modules connected by at least one extruded arm housing member mechanically fastened to the Each of the link housing end modules to form the modular composite arm link housing and are arranged such that misalignment tolerances of the formed modular composite arm link housing and a pulley drive Matching, wherein the pulley drive connects the pulleys of the pulley system housed within the link housing end modules at the ends of the modular composite arm link housing.

It should be understood that the above description is provided as an illustration of aspects of the present disclosure. Various alternatives and modifications may be devised by those skilled in the art without departing from this disclosure. Accordingly, aspects of this disclosure are intended to cover all such alternatives, modifications, and variations that fall within the scope of any of the claims below. Furthermore, the mere fact that different features are described in mutually different dependent or independent claims does not imply that a combination of these features cannot be used to advantage, such combinations are still within the scope of aspects of the present disclosure .

100: Substrate Processing Equipment 130: Substrate transport equipment 131: Arm 190: Substrate Processing Station 191: Substrate Processing Station 192: Substrate Processing Station 193: Substrate Processing Station 194: Substrate Processing Station 195: Substrate Processing Station 196: Substrate Processing Station 197: Substrate Processing Station SX: Shoulder axis 125: Transfer Room 125A: Transfer Room S: Substrate 188: Substrate Processing Station 189: Substrate Processing Station S1: Substrate S2: Substrate 499: Flat 499A: Flat 203H1: Substrate Holding Station 203H2: Substrate Holding Station 204H1: Substrate Holding Station 204H2: Substrate Holding Station 203: Substrate Holder (End Applicator Link) 204: Substrate Holder (End Applicator Link) 101: Front End 103: Backend 102A: Load Lock Chamber 102B: Load Lock Chamber 125W: Delivery chamber wall 102C: Load Lock Chamber 102D: Load Lock Chamber 100S1: Side 100S2: Side 100E1: Terminal 100E2: Terminal 110: Controller 105: Loadport Modules 106: Mini Environment C: Substrate carrier or cassette 107: Load port 108: Transfer Robot SV: Slit valve 150: Substrate Station Module 150S: Single Substrate Station Module 150D: Twin Substrate Station Module 150T: Three substrate station modules 150H: Processing module housing D: Spacing 220: Drive Section 220A: Drive section 220B: Drive Section 220C: Drive section 202: Forearm 201: Upper Arm 201E1: Proximal 201E2: Remote WX: wrist axis 220F: Frame 202E1: Longitudinal end 202E2: Longitudinal end 201R: Reconfigurable Arm 202R: Reconfigurable Arm 201C: Modular Composite Arm Link Housing 202C: Modular Composite Arm Link Housing 655: Pulley System 511: End Coupling 512: End Coupling 513: End Coupling 514: End Coupling 510A: Central Arm Section 510B: Central arm segment OAL: total length 510A1-An: Central arm section 510B1-Bn: Central arm segment CAL1-CALn: length 510F: Tubular Frame 510F': Frame 510F": Frame 490: Transmission parts 492: Transmission parts 493: Transmission parts 494: Transmission parts 495: Transmission parts 480: Pulley 484: Pulley 488: Pulley 482: Pulley 486: Pulley 491: Pulley 470: Pulley 474: Pulley 472: Pulley 476: Pulley 655A: Pulley System 655B: Pulley System 655C: Pulley System 655D: Pulley System 655E: Pulley System 660A: Cable Section 660B: Cable Section 540: Flange 541: Flange 545: Hole 547: Pin 4100: Protrusion 4110: Sag 560: Fastener Coupling 561: Fastener Coupling 562: Fastener Coupling 563: Fastener Couplings 560A: Mating Fastener Couplings 561A: Mating Fastener Couplings 562A: Mating Fastener Couplings 563A: Mating Fastener Couplings 4300: Protrusion 4310: Sag 510C: Cover 588: Hole 691: Inline Cable Tensioner 510T: Telescopic central arm section 510T1: First frame part 510T2: Second frame part 4000: Non-removable fasteners 510S: Segmented arm section 4020: Segment CAS: fixed length 4500: Multi-Shell Module 4501: First frame piece 4502: Second frame piece 4030: End Plate 598: Box Section 4700: Arm joints 203F: Frame 204F: Frame 700: Axis of radial extension/retraction 701: Stretch non-radial path 702: Stretch Radial Path 310: Shell 300: A set of four coaxial drive assemblies 301: Drive shaft 302: Drive shaft 303: Drive shaft 304: Drive shaft 342: First Motor 344: Second Motor 346: Third Motor 348: Fourth Motor 342S: Stator 342R: Rotor 344S: Stator 344R: Rotor 346S: Stator 346R: Rotor 348S: Stator 348R: Rotor 362: Bushing 350: Bearing 351: Bearing 352: Bearing 353: Bearing 371: Sensor 372: Sensor 373: Sensor 374: Sensor 170: Controller 300A: A set of three coaxial drive assemblies 220A: Drive section 312: Z-axis drive 101: Atmospheric front end 300B: A set of six coaxial drive assemblies 305: Drive shaft 306: Drive shaft 343: Fifth Motor 343S: Stator 343R: Rotor 345: Sixth Motor 345S: Stator 345R: Rotor 375: Sensor 376: Sensor 220B: Drive Section 300C: A set of five coaxial drive components 220C: Drive section 481: Pillar 482S: Shaft 303: Shaft 491S: Shaft 471: Post 472S: Shaft 486S: Shaft 302: Shaft 476S: Shaft 566: Bearing seat 601: Outer bearing ring 663: Fastener or Retainer Feature Construction 664: Locating pin 602: Inner bearing ring 669: Locating pin 668: Fasteners 186S: Shaft 600: Crossed Roller Bearings 665: Reduced height/thickness 600A: Crossed Roller Bearings 461: Fasteners 600B: Crossed Roller Bearings 491SF: Flange 491H: Wheels 491HA: Center hole 600PB: Crossed Roller Bearings 635: Groove 636: Groove 643: Cable Holder 644: Cable Holder 661A: Cable Section 661B: Cable Section 661: Segmented drive ring 650: Perimeter 666: Retainer Feature Construction 691: Inline Cable Tensioner 691TBK1: Slack Knob Buckle Cable Tensioner 691T: Threaded part 691B: Ontology CP1: Cable Section CP2: Cable Section 692: Direction 691TBK2: Slack Knob Buckle Cable Tensioner 691T1: Threaded part 691T2: Threaded part 691BR: Elastic 691RM: Elastic Cable Tensioner 660A: Cable Section 660B: Cable Section 661A: Cable Section 661B: Cable Section 660: Segmented drive ring 203A: Dual Disc Substrate Holder 204A: Dual Disc Substrate Holder BP: Base Spacing 1300: Directions 1301: Directions 1302: Direction 205H1: Substrate Holding Station 199A: Substrate Processing Station 199B: Substrate Processing Station 199C: Substrate Processing Station 205: Substrate holder 1900: Substrate Holder 1900H1: Substrate Holding Station 1900H2: Substrate Holding Station 1900E1: First end 1900E2: second end 1900A: Substrate Holder 1900B: Substrate Holder 1900H3: Substrate Holding Station 1900H4: Substrate Holding Station 2100A: Substrate Holder 2100B: Substrate Holder 2100AE1: First end 2100AE2: second end 2100BE1: First End 2100BE2: Second end 2100H1: Substrate Holding Station 2100H2: Substrate Holding Station 2200: Substrate Holder 2200H1: Substrate Holding Station 2200H2: Substrate Holding Station 2200H3: Substrate Holding Station 2300: Substrate Holder 2300H1: Substrate Holding Station 2403: Substrate Holder 2404: Substrate Holder 2403A: Part 1 2403B: Part II 2403E1: first end 2403E2: second end 2403H1: Substrate Holding Station 2403H2: Substrate Holding Station 2404H1: Substrate Holding Station 2404H2: Substrate Holding Station 2660: Wrist Z Drive 476A: Inner shaft 476B: Outer shaft C: Substrate Center 2770: Pulley 2770S: Shaft 2791: Transmission parts 2333A: Substrate Processing Station 2333B: Substrate Processing Station 2100C: Substrate Holder 2100D: Substrate Holder 3404H1: Substrate Holding Station 3404H2: Substrate Holding Station 3403H1: Substrate Holding Station 3403H2: Substrate Holding Station 1500: Two-link boom 1501: Upper link 1502: Forearm Link BSX: Boom Shoulder Axis BEX: Boom Elbow Axis 1600: Single Link Boom 390: Boom drive shaft 1601: Boom Link 391: Boom drive shaft 204H1C: Center 17700: Direction of extension/retraction 17020: Radial distance 17021: Radial distance 777: Direction S3: Substrate S4: Substrate EC1: Eccentricity EC2: Eccentricity

The above-described aspects and other features of the present disclosure are described in the following description with reference to the accompanying drawings, wherein

[FIG. 1A] is a schematic diagram of an exemplary substrate processing apparatus incorporating aspects of the present disclosure;

[ FIGS. 1B and 1C ] are schematic diagrams of a portion of the substrate processing apparatus of FIG. 1A in accordance with the present disclosure;

[Figs. 2A, 2B, 2C, and 2D] are schematic diagrams of a substrate conveying apparatus of the substrate processing apparatus of Fig. 1 according to the present disclosure;

3 is a schematic cross-sectional view of an exemplary drive section of a substrate transport apparatus in accordance with aspects of the present disclosure;

3A is a schematic cross-sectional view of an exemplary drive section of a substrate transport apparatus in accordance with aspects of the present disclosure;

3B is a schematic cross-sectional view of an exemplary drive section of a substrate transport apparatus in accordance with aspects of the present disclosure;

[FIG. 3C] is a schematic cross-sectional view of an exemplary drive section of a substrate transport apparatus in accordance with aspects of the present disclosure;

[FIG. 4] is a schematic cross-sectional view of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D in accordance with aspects of the present disclosure;

[FIG. 4A] is a schematic cross-sectional view of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D in accordance with aspects of the present disclosure;

[FIG. 4B] is a schematic cross-sectional view of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D in accordance with aspects of the present disclosure;

[FIG. 5A] is a schematic side view of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D in accordance with aspects of the present disclosure;

[FIG. 5B] is a schematic front view of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D in accordance with aspects of the present disclosure;

[ Fig. 5C ] is a schematic perspective view of a module arm link of the substrate transport apparatus of Figs. 2A, 2B, 2C, and 2D according to an aspect of the present disclosure;

[FIG. 5D] is another schematic perspective view of the module arm link of FIG. 5C according to an aspect of the present disclosure;

[FIG. 5E] is a schematic perspective view of a portion of the modular arm linkage of FIG. 5C in accordance with aspects of the present disclosure;

[FIG. 5F] is a schematic perspective view of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D in accordance with aspects of the present disclosure;

[FIGS. 6A-6D] are schematic diagrams of portions of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D in accordance with aspects of the present disclosure;

[FIGS. 6E and 6F] are schematic side and plan views of an exemplary cable or cable and pulley drive of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D in accordance with aspects of the present disclosure;

[Figs. 6G and 6H] are schematic diagrams of an inline cable or wire tensioner of the substrate transport apparatus of Figs. 2A, 2B, 2C, and 2D, according to aspects of the present disclosure;

[FIG. 6I] is a schematic diagram of a crossed roller pulley of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to aspects of the present disclosure;

[FIG. 6J] is a schematic diagram of a crossed roller pulley of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D in accordance with aspects of the present disclosure;

[FIGS. 7A-7L] are schematic diagrams of an exemplary substrate processing apparatus including the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D in accordance with aspects of the present disclosure;

[FIG. 8] is a schematic diagram of an exemplary substrate processing apparatus including a substrate transport apparatus in accordance with aspects of the present disclosure;

[FIG. 9] is a schematic diagram of a substrate transport apparatus incorporating features of the present disclosure;

[FIG. 10] is a schematic side view of an exemplary substrate holder for a substrate transport apparatus described herein and incorporating features of the present disclosure;

[FIG. 11] is a schematic side view of an exemplary substrate holder for a substrate transport apparatus described herein and incorporating features of the present disclosure;

[FIG. 12] is a schematic diagram of an exemplary substrate processing apparatus including a substrate transport apparatus in accordance with aspects of the present disclosure;

[FIG. 13] is a schematic diagram of a substrate transport apparatus incorporating features of the present disclosure;

[FIG. 14] is a flowchart of an exemplary method in accordance with aspects of the present disclosure;

[ FIG. 15 ] is a schematic diagram of a substrate processing apparatus including a substrate transport apparatus according to aspects of the present disclosure;

[FIG. 16] is a schematic diagram of a substrate processing apparatus including a substrate transport apparatus according to aspects of the present disclosure;

[FIG. 17] is a flowchart of an exemplary method in accordance with aspects of the present disclosure;

[FIGS. 18A-18C] are exemplary schematic diagrams of multi-axis automatic wafer centering according to the present disclosure;

[ FIG. 19 ] is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure;

[ FIG. 20 ] is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure;

[ FIG. 21 ] is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure;

[ FIG. 22 ] is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure;

[ FIG. 23 ] is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure;

[FIG. 23A] is a schematic diagram of an exemplary substrate processing apparatus including the substrate transport apparatus of FIG. 23 in accordance with aspects of the present disclosure;

[ FIG. 24 ] is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure;

[ FIG. 25 ] is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure;

[Figs. 26A, 26B, 26C, and 26D] are schematic diagrams of a substrate transport apparatus of the substrate processing apparatus of Fig. 1 in accordance with aspects of the present disclosure;

[ FIGS. 27A , 27B and 27C] are schematic diagrams of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to aspects of the present disclosure;

[ FIG. 28 ] is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure;

[FIG. 29] is a flowchart of an exemplary method in accordance with aspects of the present disclosure;

[FIG. 30] is a flowchart of an exemplary method in accordance with aspects of the present disclosure;

[FIG. 31] is a flowchart of an exemplary method in accordance with aspects of the present disclosure;

[FIG. 32] is a schematic diagram of the substrate transport apparatus of FIG. 19 according to an aspect of the present disclosure;

[Figs. 33A and 33B] are schematic diagrams of a substrate transport apparatus according to aspects of the present disclosure;

[Figs. 34A and 34B] are schematic diagrams of a substrate transport apparatus according to aspects of the present disclosure;

[Figs. 35A and 35B] are schematic diagrams of a substrate transport apparatus according to aspects of the present disclosure;

[Figs. 36A and 36B] are schematic diagrams of a substrate transport apparatus according to aspects of the present disclosure;

[FIG. 37] is a schematic comparison diagram of a freshly formed end coupling and a processed end coupling in accordance with aspects of the present disclosure;

[FIG. 38] is a schematic comparison diagram of another freshly formed end coupling and a processed end coupling in accordance with aspects of the present disclosure;

[FIG. 39] is a schematic comparison diagram of a center arm section as formed and a processed center arm section in accordance with aspects of the present disclosure;

[FIG. 40] is a schematic perspective view of a telescopic center arm section in accordance with aspects of the present disclosure;

[FIG. 40A] is a schematic diagram of a segmented arm section according to an aspect of the present disclosure;

[FIG. 41] is a schematic cross-sectional view of a coupling between an end coupling and a center arm section according to an aspect of the present disclosure;

[FIG. 42] is a schematic cross-sectional view of a coupling between an end coupling and a center arm section according to an aspect of the present disclosure;

[FIG. 43] is a schematic cross-sectional view of a coupling between an end coupling and a center arm section according to an aspect of the present disclosure;

[FIG. 44] is a schematic diagram of a portion of a substrate transport apparatus and an individual cross-section of a center arm section in accordance with aspects of the present disclosure;

[FIG. 44A] is a schematic cross-sectional view of a center arm section of a substrate transport apparatus in accordance with aspects of the present disclosure;

[FIG. 44B] is a schematic cross-sectional view of a center arm section of a substrate transport apparatus in accordance with aspects of the present disclosure;

[FIG. 44C] is a schematic cross-sectional view of a center arm section of a substrate transport apparatus in accordance with aspects of the present disclosure;

[FIG. 45] is a schematic perspective view of a portion of a substrate transport apparatus according to an aspect of the present disclosure;

[FIG. 46] is a schematic perspective view of a portion of a substrate transport apparatus according to an aspect of the present disclosure;

[FIG. 47] is a schematic perspective view of a portion of a substrate transport apparatus in accordance with aspects of the present disclosure; and

[FIG. 48] A schematic diagram of thermal expansion of a substrate transport arm link member according to an aspect of the present disclosure. [FIG.

510A: Central Arm Section

510B: Central arm segment

511: End Coupling

512: End Coupling

513: End Coupling

514: End Coupling

Claims (71)

A substrate conveying equipment comprising: support frame; an articulated arm connected to the support frame and having at least one movable arm link and an end effector connected to the movable arm link, the end effector There is a substrate holding station on the device; Wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing formed by a plurality of link housing modules firmly coupled to each other ), and a pulley system that is received within and extends through the rod housing modules rigidly coupled to each other substantially from one end of the modular composite arm link housing to the other, and wherein the rigidly coupled rod housing modules include rod housing end modules connected by at least one interchangeable rod housing extension module having functions for determining the movable rod housing the predetermined characteristic configuration of the length of the arm link; and Wherein the at least one interchangeable rod housing extension module can be selected from several different interchangeable rod housing extension modules for connecting to the rod housing end modules and forming the reconfigurable The arm link, each different interchangeable link housing extension module has a different corresponding predetermined characteristic structure to determine a corresponding different length of the movable arm link, for the module type The composite arm link housing and the reconfigurable arm link are selectively set to a predetermined arm link length of a number of predetermined arm link lengths. The substrate transport apparatus of claim 1, wherein the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box corresponding thereto shaped cross-section, and the predetermined feature configuration is that the interchangeable rod housing extension module and each of the several different interchangeable rod housing extension modules have a different corresponding length and the phase The corresponding box-shaped section is sized and shaped to commensurate with the different corresponding lengths to maintain a predetermined rigidity for each of the different interchangeable linkage housing extension modules. The substrate transport apparatus of claim 1, wherein the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box corresponding thereto shaped cross-section, and the predetermined feature configuration is that the interchangeable rod housing extension module and each of the several different interchangeable rod housing extension modules have a different corresponding length and the phase The corresponding box section is sized and shaped commensurate with the different corresponding lengths to maintain a predetermined stiffness for each of the different selectable predetermined arm link lengths. The substrate transport apparatus of claim 1, wherein each of the at least one interchangeable rod housing extension module and the plurality of different interchangeable rod housing extension modules is a box-shaped cross-section Extrusions. The substrate transport apparatus of claim 1, wherein the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section that is Made of a different material than these connecting rod housing end modules. The substrate transport apparatus of claim 1, wherein the material of the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules is more The material of the rod housing end module is more rigid. The substrate transport apparatus of claim 1, wherein the material of the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules has and the pulley system The material rigidity of the pulley drive is fairly rigid. The substrate transport apparatus of claim 1, wherein the pulley system is engaged to the modular composite arm link housing and is arranged such that the pulley system driven by the drive section implements the at least one arm link or the Articulation of the end applicator. The substrate transport apparatus of claim 1, wherein the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a case made of stainless steel shape section. The substrate transport apparatus of claim 1, wherein the at least one interchangeable rod housing extension module is mechanically fastened to each of the rod housing end modules to form the modular composite arm link housing and arranged such that the formed modular composite arm link housing matches the misalignment tolerance of a pulley drive connected for a selected predetermined arm link length the pulleys of the pulley system. The substrate transport apparatus of claim 1, wherein the at least one interchangeable rod housing extension module is mechanically fastened to the rod housing end modules by mechanical fastener joints each to form the modular composite arm link housing, and the mechanical fastener joints are constructed such that the formed modular composite arm link housing and a pulley drive are misaligned Tolerances are matched where the pulley drive connects the pulleys of the pulley system for a selected predetermined arm link length. The substrate transport apparatus of claim 1, wherein at least one of the rod housing end modules accommodates the pulleys of the pulley system. The substrate transport apparatus of claim 1, wherein the modular composite arm link housing is a low profile housing having predetermined arms for selected commensurate with bisymmetric flexible pulley drives A compact height of length, the dual symmetric flexible pulley drive connects the pulleys of the pulley system and has a compact, substantially symmetrical cross-section. The substrate handling apparatus of claim 13, wherein the compact height is less than a belt pulley drive housing height for a comparable number of pulley systems having comparable lengths. The substrate transport apparatus of claim 13, wherein the flexible pulley drive connecting the pulleys is a cable or cable pulley drive. The substrate handling apparatus of claim 1, wherein at least one of the rod housing end modules accommodates a crossed roller bearing mounted pulley of the pulley system such that the position and alignment of the pulley is dependent on the The meshing of the crossed roller bearing is controlled by it. The substrate transport apparatus of claim 1, wherein the modular composite arm link housing is a low profile housing having a compact height for interacting with modules housed at the ends of the link housings The cross roller bearing mounted pulley of the pulley system in at least one of the pulleys corresponds to a selected predetermined arm length. The substrate transport apparatus of claim 1, wherein the engagement of the pulley drives of the individual pulleys of the pulley system to the pulleys is arranged to determine between the wrapped and unwound positions of the pulley drives on the individual pulleys, The rotation of an individual pulley of the pulley system reaches at least 360 degrees of rotation of the individual pulley. The substrate transport apparatus of claim 1, wherein the engagement of the pulley drives of the individual pulleys of the pulley system to the pulleys is arranged to determine between the wrapped and unwound positions of the pulley drives on the individual pulleys, The end effector is rotated by at least 360 degrees of rotation of the end effector relative to the at least one movable arm link. A substrate conveying equipment comprising: support frame; An articulated arm connected to the support frame and having at least one movable arm link and an end applicator connected to the at least one movable arm link, the end applicator having a substrate disposed thereon holding station; wherein the at least one movable arm link has a modular composite arm link housing formed from a plurality of link housing modules that are rigidly coupled to each other, and a pulley system that is substantially free from the module The composite arm link housing is housed in and extends through the rigidly coupled link housing modules end-to-end and the pulley system is mounted and engaged to the modular composite arm link housing a housing and arranged such that the pulley system driven by the drive section implements the articulation of the at least one movable arm link or the articulation of the end effector relative to the at least one movable arm link; and wherein the firmly coupled rod shell molds include rod shell end modules connected by at least one rod shell extension module mechanically fastened to the rod shells Each of the link housing end modules to form the modular composite arm link housing and arranged such that the formed modular composite arm link housing and a pulley drive have misalignment tolerances matched , wherein the pulley drive connects the pulleys of the pulley system housed within the link housing end modules at the ends of the modular composite arm link housing. The substrate transport apparatus of claim 20, wherein the at least one movable arm link is a reconfigurable arm link, and wherein the link housing extension module is a plurality of interchangeable link housings The extension modules are interchangeable, and each of the different interchangeable link housing extension modules has a different corresponding predetermined characteristic configuration for determining the length of the at least one movable arm link. The substrate transport apparatus of claim 21, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section corresponding thereto, and the The predetermined feature configuration is that the rod housing extension module and each of the several different interchangeable rod housing extension modules have a different corresponding length and the corresponding box-shaped section is made and The different corresponding lengths are sized and shaped to maintain a predetermined rigidity for each of the different interchangeable linkage housing extension modules. The substrate transport apparatus of claim 21, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section corresponding thereto, and the The predetermined feature configuration is that the rod housing extension module and each of the several different interchangeable rod housing extension modules have a different corresponding length and the corresponding box-shaped section is made and The different corresponding lengths are sized and shaped to maintain a predetermined stiffness for each of the different selectable predetermined arm link lengths. The substrate handling apparatus of claim 21, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules are extrusions having a box-shaped cross-section. The substrate transport apparatus of claim 21, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section that is made with a different Box section made from the material of the connecting rod housing end module. The substrate delivery apparatus of claim 21, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules are of a material having a greater thickness than the rod housing end module The material is more rigid. The substrate transport apparatus of claim 21, wherein the material of the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules has the same The material is fairly rigid. The substrate handling apparatus of claim 21, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section made of stainless steel. The substrate transport apparatus of claim 21, wherein the pulley drive is a dual symmetric flexible pulley drive and the modular composite arm link housing is a low profile housing having Symmetrical flexible pulley drives are of a compact height commensurate with a chosen predetermined arm length, the dual symmetrical flexible pulley drives connect the pulleys of the pulley system and have a compact, substantially symmetrical cross-section. The substrate handling apparatus of claim 29, wherein the compact height is less than a belt pulley drive housing height for a comparable number of pulley systems having comparable lengths. The substrate transport apparatus of claim 29, wherein the flexible pulley drive connecting the pulleys is a cable or cable pulley drive. The substrate transport apparatus of claim 21, wherein the modular composite arm link housing is a low profile housing having a compact height for interfacing with modules housed at the ends of the link housings The crossed roller bearing mounted pulleys of the pulley system in at least one of the pulleys correspond to a selected predetermined arm length. The substrate transport apparatus of claim 20, wherein at least one of the pulleys of the pulley system is mounted with a crossed roller bearing such that the position and alignment of the at least one of the pulleys depends on the relationship with the crossed roller The engagement of the column bearing is controlled by it. The substrate handling apparatus of claim 20, wherein the engagement of the pulleys by the pulley drives of the pulleys of the pulley system is arranged to determine at least one of the pulleys of the pulley system at the at least one of the pulleys The rotation of the at least one of the pulleys on one is at least 360 degrees between the wound and unwound positions of the pulley drive. The substrate handling apparatus of claim 20, wherein the engagement of the pulley drives of the pulleys of the pulley system to the pulleys is arranged to determine the pulley drive of the end effector on at least one of the pulleys Rotation of the end effector relative to the at least one movable arm link by at least 360 degrees of rotation between the wound and unwound positions of the device. A method that contains: Provides substrate handling equipment that includes support frame, and an articulated arm connected to the support frame and having at least one movable arm link and an end applicator connected to the movable arm link on which a substrate holding station is located ;and Reconfiguring the moveable arm link, wherein the moveable arm link is a reconfigurable arm link having a mould formed from a plurality of link housing modules rigidly coupled to each other Modular composite arm link housing, and pulley system, contained within the rigidly coupled link housing modules substantially from one end of the modular composite arm link housing to the other and extending through them, and wherein the firmly coupled rod housing modules include rod housing end modules connected by at least one interchangeable rod housing extension module having a predetermined feature configuration for determining the length of the movable arm link; and Wherein the at least one interchangeable link housing extension module can be selected from several different interchangeable link housing extension modules for connecting to the link housing end modules and forming the reconstituted arm connection rod, each different interchangeable link housing extension module has a different corresponding predetermined feature configuration to determine a corresponding different length of the movable arm link for the modular composite arm The link housing and the reconfigurable arm link are selectively set to a predetermined arm link length of a number of predetermined arm link lengths. The method of claim 36, wherein the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section corresponding thereto , and the predetermined characteristic configuration is that each of the at least one interchangeable rod housing extension module and the several different interchangeable rod housing extension modules have different corresponding lengths and the corresponding The box-shaped sections of the are sized and shaped commensurate with the different corresponding lengths to maintain a predetermined rigidity for each of the different interchangeable linkage housing extension modules. The method of claim 36, wherein the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section corresponding thereto , and the predetermined characteristic configuration is that each of the at least one interchangeable rod housing extension module and the several different interchangeable rod housing extension modules have different corresponding lengths and the corresponding The box-shaped section is sized and shaped commensurate with the different corresponding lengths to maintain a predetermined rigidity for each of the different selectable predetermined arm link lengths. The method of claim 36, wherein each of the at least one interchangeable rod housing extension module and the plurality of different interchangeable rod housing extension modules is an extrusion having a box-shaped cross-section (extrusion). The method of claim 36, wherein the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section using a different The connecting rod housing end modules are made of materials. The method of claim 36, wherein the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules are of a material having a greater thickness than the rod housing ends The material of the module is more rigid. The method of claim 36, wherein the material of each of the at least one interchangeable rod housing extension module and the plurality of different interchangeable rod housing extension modules has a pulley drive with the pulley system The material of the device is relatively rigid. The method of claim 36, wherein the pulley system is engaged to the modular composite arm link housing and is arranged such that the pulley system driven by the drive section performs the at least one arm link or the end application joint movement of the device. The method of claim 36, wherein the at least one interchangeable rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section made of stainless steel. The method of claim 36, further comprising mechanically securing the at least one interchangeable link housing extension module to each of the link housing end modules to form the modular composite arm link Housing, wherein the formed modular composite arm link housing is matched to the misalignment tolerance of a pulley drive connected to the pulley system for the selected predetermined arm link length. pulleys. The method of claim 36, further comprising mechanically securing the at least one interchangeable linkage housing extension module to each of the linkage housing end modules with mechanical fastener joints to form the modular composite arm link housing and the mechanical fastener joints are constructed such that the formed modular composite arm link housing and a pulley drive have misalignment tolerances matched , wherein the pulley drive connects the pulleys of the pulley system for a selected predetermined arm link length. The method of claim 36, wherein at least one of the rod housing end modules houses a pulley of the pulley system. The method of claim 36, wherein the modular composite arm link housing is a low profile housing having a compact size for a selected predetermined arm length commensurate with a bisymmetric flexible pulley drive The double symmetric flexible pulley drive connects the pulleys of the pulley system and has a compact, substantially symmetrical cross-section. The method of claim 48, wherein the compact height is less than a belt pulley drive housing height for a comparable number of pulley systems having comparable lengths. The method of claim 48, wherein the flexible pulley drive connecting the pulleys is a cable or cable pulley drive. The method of claim 36, wherein at least one of the rod housing end modules houses a crossed roller bearing mounted pulley of the pulley system such that the position and alignment of the pulley is dependent on the relationship with the crossed roller bearing The engagement of the roller bearing is controlled by it. The method of claim 36, wherein the modular composite arm link housing is a low profile housing having a compact height for at least one module housed at the end of the link housings The crossed roller bearing mounted pulley of the pulley system in the person is selected corresponding to the predetermined arm length. The method of claim 36, wherein the engagement of the pulley drives of individual pulleys of the pulley system to the pulleys is arranged to determine the wrapped and unwound positions of the pulley drives of the individual pulleys of the pulley system on the individual pulleys The rotation of the individual pulley between rotations reaches at least 360 degrees. The method of claim 36, wherein the engagement of the pulley drives of the individual pulleys of the pulley system to the pulleys is arranged to determine between the wrapped and unwound positions of the pulley drives of the end effector on the individual pulleys Rotation of the end effector relative to the at least one movable arm link that rotates by at least 360 degrees. A method that contains: Provides substrate handling equipment that includes support frame, An articulated arm, which is connected to the support frame and has at least one movable arm link and an end applicator connected to the at least one movable arm link, on which a substrate is disposed holding station; and Articulation of the at least one movable arm or the end effector relative to the at least one movable arm is effected with a pulley system mounted and engaged to the at least one movable arm's modular composite arm linkage housing Articulation of a movable arm, wherein the modular composite arm link housing is formed from a plurality of link housing modules rigidly coupled to each other, and the pulley system is substantially removed from the modular composite arm connecting rod housings are received within and extend through the rigidly coupled rod housing modules end-to-end; wherein the firmly coupled rod housing molds include rod housing end modules connected by at least one rod housing extension module mechanically fastened to the connections each of the rod housing end modules to form the modular composite arm link housing and arranged such that the formed modular composite arm link housing and a pulley drive have misalignment tolerances matched, Wherein the pulley drive connects the pulleys of the pulley system housed within the link housing end modules at the ends of the modular composite arm link housing. The method of claim 55, further comprising reconfiguring the at least one movable arm link, wherein the link housing extension module is interchangeable among several different interchangeable link housing extension modules, the Each of the different interchangeable link housing extension modules has a different corresponding predetermined feature configuration for determining the length of the at least one movable arm link. The method of claim 56, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section corresponding thereto, and the predetermined characteristic The configuration is that the rod housing extension module and each of the several different interchangeable rod housing extension modules have a different corresponding length and the corresponding box-shaped section is made to be different from the different Corresponding lengths are sized and shaped to maintain a predetermined rigidity for each of the different interchangeable linkage housing extension modules. The method of claim 56, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section corresponding thereto, and the predetermined characteristic The configuration is that the rod housing extension module and each of the several different interchangeable rod housing extension modules have a different corresponding length and the corresponding box-shaped section is made to be different from the different The corresponding lengths are sized and shaped to maintain a predetermined stiffness for each of the different selectable predetermined arm link lengths. The method of claim 56, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules are extrusions having a box-shaped cross-section. The method of claim 56, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section that uses a different Box-shaped section made from the material of the end module. The method of claim 56, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a material that is higher than the material of the rod housing end module rigidity. The method of claim 56, wherein the material of the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules has a material rigidity comparable to that of the pulley drive of the pulley system rigidity. The method of claim 56, wherein the rod housing extension module and each of the plurality of different interchangeable rod housing extension modules have a box-shaped cross-section made of stainless steel. The method of claim 56, wherein the pulley drive is a dual symmetric flexible pulley drive and the modular composite arm link housing is a low profile housing having The flexure pulley drives have a compact height commensurate with a chosen predetermined arm length, the dual symmetrical flexible pulley drives connect the pulleys of the pulley system and have a compact, substantially symmetrical cross-section. The method of claim 64, wherein the compact height is less than a belt pulley drive housing height for a comparable number of pulley systems having comparable lengths. The method of claim 64, wherein the flexible pulley drive connecting the pulleys is a cable or cable pulley drive. The method of claim 56, wherein the modular composite arm link housing is a low profile housing having a compact height for use with at least one module housed at the end of the link housings The cross-roller bearing mounted pulleys of the pulley system in the person correspond to a selected predetermined arm length. The method of claim 55, wherein at least one of the pulleys of the pulley system is mounted with a crossed roller bearing such that the position and alignment of the at least one of the pulleys depends on engagement with the crossed roller bearing and controlled by it. The method of claim 55, wherein the engagement of the pulley drives of the pulleys of the pulley system to pulleys is arranged to determine at least one of the pulleys of the pulley system on the at least one of the pulleys Rotation of the at least one of the pulleys of at least 360 degrees of rotation between the wound and unwound positions of the pulley drive. The method of claim 55, wherein the engagement of the pulley drives of the pulleys of the pulley system to the pulley is arranged to determine the wrapping of the pulley drive of the end effector on at least one of the pulleys Rotation of the end effector relative to the at least one movable arm link by at least 360 degrees of rotation between the unwound position and the end effector. A substrate conveying equipment comprising: support frame; An articulated arm, which is connected to the support frame and has at least one movable arm link and an end applicator connected to the at least one movable arm link, on which a substrate is disposed holding station; wherein the at least one movable arm link has a modular composite arm link housing comprising at least one extruded arm housing member and pulley system housed within the extruded arm housing member and Extending through the extruded arm housing member substantially from one end to the other end of the modular composite arm link housing, the pulley system is mounted and engaged to the modular composite arm link housing housing and arranged so that the pulley system driven by the drive section implements the articulation of the at least one movable arm link or the articulation of the end effector relative to the at least one movable arm link, and wherein the modular composite arm link housing includes link housing end modules connected by at least one extruded arm housing member mechanically fastened to the Each of the link housing end modules to form the modular composite arm link housing and are arranged such that misalignment tolerances of the formed modular composite arm link housing and a pulley drive Matching, wherein the pulley drive connects the pulleys of the pulley system housed within the link housing end modules at the ends of the modular composite arm link housing.

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