TW202132032A - Metal bonding material - Google Patents

Metal bonding material Download PDF

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TW202132032A
TW202132032A TW109144412A TW109144412A TW202132032A TW 202132032 A TW202132032 A TW 202132032A TW 109144412 A TW109144412 A TW 109144412A TW 109144412 A TW109144412 A TW 109144412A TW 202132032 A TW202132032 A TW 202132032A
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Taiwan
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metal
crystal structure
metal member
diffusion layer
structure portion
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TW109144412A
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Chinese (zh)
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風間吉則
三原邦照
荻原吉章
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日商古河電氣工業股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/04Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a rolling mill
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/22Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded
    • B23K20/227Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded with ferrous layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/30Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/302Cu as the principal constituent

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)

Abstract

A metal bonding material according to an embodiment of the present invention is formed by bonding a first metal member and a second metal member. The first metal member and the second metal member are bonded with a diffusion layer interposed therebetween. In a cross section perpendicular to the diffusion layer, only the first metal member, of the first metal member and the second metal member, has a first columnar crystal structure part that is adjacent to the diffusion layer and includes a plurality of crystal grains extending in a direction away from the diffusion layer.

Description

金屬接合材料Metal bonding material

本揭示關於一種金屬接合材料。This disclosure relates to a metal bonding material.

自以往至今,金屬部件彼此接合之技術被利用於各種領域中。Since the past, the technology of joining metal parts to each other has been used in various fields.

另外,近年對於材料之要求逐年變嚴,除了追求將同系材料的金屬部件彼此接合之技術以外,還追求將異系材料的金屬部件彼此接合之技術,且特別是追求擁有相反特性的異系金屬部件彼此之接合的高精度化。In addition, in recent years, the requirements for materials have become stricter year by year. In addition to the pursuit of technology to join metal parts of the same material to each other, technology to join metal parts of dissimilar materials to each other is also pursued, and in particular, dissimilar metals with opposite characteristics are pursued. The high precision of the joining of parts.

例如,將熱傳導率高的材料也就是銅系部件或鋁系部件與耐熱性高的不銹鋼部件或耐熱鋼部件作組合之熱交換器、和比重大的銅系部件與比重小的鋁系部件之組合等,構成金屬接合材料之金屬部件的多樣性之要求高。特別是,作為各種類的接合材料實用化的示例,在雙金屬(bimetal)中,熱膨脹係數不同的金屬部件彼此接合,在分路電阻器(shunt resistor)中,電阻率低的金屬部件與電阻率高的金屬部件接合。For example, a heat exchanger that combines a material with high thermal conductivity, that is, a copper-based component or an aluminum-based component, and a stainless steel component or heat-resistant steel component with high heat resistance, and a copper-based component with a large specific gravity and an aluminum-based component with a small specific gravity. Combinations, etc., have high requirements for the diversity of the metal parts constituting the metal joining material. In particular, as an example of the practical application of various types of bonding materials, in bimetal, metal parts with different thermal expansion coefficients are bonded to each other, and in shunt resistors, metal parts with low resistivity are connected to each other. High rate of joining of metal parts.

作為金屬部件的接合方法,有熔銲(fusion welding)、固態接合、硬銲(brazing)、黏接、機械性接合等。其中,藉由熔銲實行之金屬部件的接合方法自古即被使用,實用且實際成果多。就熔銲而言,有鎢極惰性氣體銲(tungsten inert gas welding ,TIG welding)、金屬極鈍氣銲接(metal inert gas welding,MIG Welding)、金屬活性氣體電弧銲(metal-arc active gas welding,MAG welding)、電漿銲接這樣的電弧銲接;點銲接(spot welding)、縫銲接(seam welding)、凸出銲接(projection welding)、閃光對銲(flash-butt welding)這樣的電阻銲接;電子束銲接(electron beam welding)這樣的高能量束銲接等。As a joining method of metal parts, there are fusion welding, solid-state joining, brazing, bonding, mechanical joining, and the like. Among them, the joining method of metal parts by fusion welding has been used since ancient times, and it is practical and has many practical results. As far as fusion welding is concerned, there are tungsten inert gas welding (TIG welding), metal inert gas welding (MIG Welding), and metal-arc active gas welding (metal-arc active gas welding, Arc welding such as MAG welding and plasma welding; resistance welding such as spot welding, seam welding, projection welding, and flash-butt welding; electron beam Welding (electron beam welding) such as high-energy beam welding, etc.

例如,專利文獻1記載了一種異種金屬接合體,其將鋁系金屬材料、與利用鋅包覆至少一部分表面之鐵系金屬材料作接合,而在前述鐵系金屬材料與前述鋁系金屬材料之界面隔著有鋅固溶於鋁而成之合金層,進一步,在前述合金層中,鋅會析出,並且,在前述合金層中,分散並析出有由選自由鐵、鋁及鋅所組成之群組中的二種以上的金屬元素組成之金屬間化合物(intermetallic compound)。在專利文獻1中,異種金屬接合體的製造方法包含:第一步驟,對鋁系金屬材料與鐵系金屬材料之接縫照射雷射光,使前述鐵系金屬材料的表面所含有的鋅、與前述鋁系金屬材料的表面所含有的鋁溶出;及,第二步驟,朝向前述雷射光照射面彼此接觸的方向,利用滾筒作加壓,而在鐵系金屬材料與鋁系金屬材料之界面,形成鋅固溶於鋁之合金層。For example, Patent Document 1 describes a dissimilar metal joint that joins an aluminum-based metal material and an iron-based metal material coated with at least a part of the surface of zinc, and the iron-based metal material and the aluminum-based metal material are bonded together. An alloy layer in which zinc is solid-dissolved in aluminum is interposed at the interface. Further, in the aforementioned alloy layer, zinc is precipitated, and in the aforementioned alloy layer, a layer consisting of iron, aluminum, and zinc is dispersed and precipitated. An intermetallic compound composed of more than two metal elements in the group. In Patent Document 1, the method of manufacturing a dissimilar metal joint includes: a first step of irradiating a joint between an aluminum-based metal material and an iron-based metal material with laser light to make the zinc contained on the surface of the iron-based metal material, and The aluminum contained in the surface of the aluminum-based metal material is eluted; and, the second step is to press a roller toward the direction in which the laser light irradiation surfaces contact each other, and at the interface between the iron-based metal material and the aluminum-based metal material, Forms an alloy layer in which zinc is solid-soluble in aluminum.

另外,專利文獻2記載了一種異種金屬的對頭接合方法,其藉由使將銅與鋅作為主要成分之金屬、與將鐵作為主要成分之金屬的端面彼此對接來形成對接界面,並在該對接界面附近照射具有高能量密度之光束而形成接合部,隔著(經由)該接合部,使前述將銅與鋅作為主要成分之金屬、與前述將鐵作為主要成分之金屬接合,在此異種金屬的對頭接合方法中,將前述具有高能量密度之光束的照射中心的位置設為從前述對接界面遠離且在前述將銅與鋅作為主要成分之金屬的表面,而將鄰接於前述將銅與鋅作為主要成分之金屬的前述對接界面之部分熔融,以形成由前述將銅與鋅作為主要成分之金屬的熔融組織組成之前述接合部。在專利文獻2中,對於將銅與鋅作為主要成分之金屬照射光束,該將銅與鋅作為主要成分之金屬,其相較於將鐵作為主要成分之金屬,熱傳導率更高且雷射光吸收率更低。In addition, Patent Document 2 describes a butt-joining method of dissimilar metals by butting the end faces of a metal mainly composed of copper and zinc and a metal mainly composed of iron to form a butting interface, and the butt joint A beam with a high energy density is irradiated near the interface to form a junction, and the aforementioned metal containing copper and zinc as the main components and the aforementioned metal containing iron as the main component are joined through (via) the junction. Here, a dissimilar metal In the butt bonding method, the position of the irradiation center of the light beam with high energy density is set to be away from the butting interface and on the surface of the metal containing copper and zinc as main components, and will be adjacent to the copper and zinc The part of the abutting interface of the metal as the main component is melted to form the joint composed of the molten structure of the metal having copper and zinc as the main components. In Patent Document 2, a metal with copper and zinc as the main components is irradiated with a light beam. The metal with copper and zinc as the main components has a higher thermal conductivity and laser light absorption than a metal with iron as the main component. The rate is lower.

在上述先前技術中,如同鋁系金屬部件及鐵系金屬部件、或將銅與鋅作為主要成分之金屬部件及將鐵作為主要成分之金屬部件,金屬接合材料限於特定的金屬部件的組合。另外,因為容易發生高溫破裂,故成形加工不易,抗拉強度等接合特性不足。進一步,伴隨近年的技術水準提升,追求金屬接合材料的接合特性的進一步提升。 [先前技術文獻] (專利文獻)In the above-mentioned prior art, like aluminum-based metal parts and iron-based metal parts, or metal parts with copper and zinc as main components, and metal parts with iron as the main components, metal joining materials are limited to specific combinations of metal parts. In addition, because high-temperature cracking is prone to occur, the forming process is not easy, and the joining properties such as tensile strength are insufficient. Furthermore, with the improvement of the technical level in recent years, further improvement of the bonding characteristics of metal bonding materials is pursued. [Prior Technical Literature] (Patent Document)

專利文獻1:日本特許第5165339號 專利文獻2:日本特開第2013-154398號公報Patent Document 1: Japanese Patent No. 5165339 Patent Document 2: Japanese Patent Laid-Open No. 2013-154398

[發明所欲解決的問題] 本揭示之目的在於,提供一種金屬接合材料,其無論是同系材料的金屬部件及異系材料的金屬部件,金屬部件彼此的接合可靠度皆優良。[The problem to be solved by the invention] The purpose of the present disclosure is to provide a metal joining material that has excellent joining reliability between the metal parts regardless of whether it is a metal part of the same system material or a metal part of a different system material.

[用於解決問題的技術手段] [1]一種金屬接合材料,由第一金屬部件與第二金屬部件接合而成,該金屬接合材料的特徵在於:前述第一金屬部件與前述第二金屬部件隔著擴散層而接合;在垂直於前述擴散層之剖面中,前述第一金屬部件及前述第二金屬部件之中,僅前述第一金屬部件具有第一柱狀結晶組織部,該第一柱狀結晶組織部鄰接於前述擴散層且包含朝向從前述擴散層遠離的方向而延伸之複數個晶粒。 [2]如上述[1]所述之金屬接合材料,其中,在前述剖面中,前述第一柱狀結晶組織部中的全部晶粒之中,具有0.50以下的長寬比之複數個晶粒所佔據的面積比率為50%以上。 [3]如上述[1]或[2]所述之金屬接合材料,其中,在前述剖面中,前述第一柱狀結晶組織部的平均厚度為50微米(μm)以上且500μm以下。 [4]一種金屬接合材料,由第一金屬部件與第二金屬部件接合而成,其中:前述第一金屬部件與前述第二金屬部件隔著擴散層而接合,前述擴散層的平均厚度為50μm以下。 [5]如上述[1]~[4]中任一項所述之金屬接合材料,其中,在前述剖面中,前述第一金屬部件,在前述第一柱狀結晶組織部的前述擴散層側的相反側具有第二柱狀結晶組織部,該第二柱狀結晶組織部包含朝向從前述第一柱狀結晶組織部遠離的方向而延伸之複數個晶粒。 [6]如上述[5]所述之金屬接合材料,其中,在前述剖面中,前述第一金屬部件,在前述第一柱狀結晶組織部與前述第二柱狀結晶組織部之間具有邊界面。 [7]如上述[6]所述之金屬接合材料,其中,在前述剖面中,在由前述邊界面、平行於前述邊界面且從前述邊界面往與前述第二金屬部件側為相反側之方向遠離400μm之第一基準線、及前述第一金屬部件的二條外形線所劃分而成之第一區域內,具有0.35以下的長寬比之晶粒所佔據的面積比率為50%以上。 [8]如上述[1]~[7]中任一項所述之金屬接合材料,其中,在25℃時,前述第二金屬部件的熱傳導率λ2相對於前述第一金屬部件的熱傳導率λ1之比(λ2/λ1)為10以上,前述第一金屬部件的熔點T1與前述第二金屬部件的熔點T2之差ΔT為10℃以上。 [9]如上述[1]~[8]中任一項所述之金屬接合材料,其中,前述第一金屬部件為鋁系材料,前述第二金屬部件為銅系材料。 [10]如上述[1]~[8]中任一項所述之金屬接合材料,其中,前述第一金屬部件為鐵系材料,前述第二金屬部件為銅系材料。 [11]如上述[1]~[8]中任一項所述之金屬接合材料,其中,前述第一金屬部件及前述第二金屬部件為鋁系材料。 [12]如上述[1]~[8]中任一項所述之金屬接合材料,其中,前述第一金屬部件及前述第二金屬部件為鐵系材料。 [13]如上述[1]~[8]中任一項所述之金屬接合材料,其中,前述第一金屬部件及前述第二金屬部件為銅系材料。 [14]如上述[1]~[8]中任一項所述之金屬接合材料,其中,前述第一金屬部件為電阻材料用銅合金材料,前述第二金屬部件為導電率比前述第一金屬部件更高之銅系材料。 [15]如上述[14]所述之金屬接合材料,其中,前述第一金屬部件為電阻材料用銅合金材料,該電阻材料用銅合金材料具有一合金組成,該合金組成含有10.0質量%以上且14.0質量%以下的錳(Mn)、1.0質量%以上且3.0質量%以下的鎳(Ni),剩餘部分由銅(Cu)及無法避免的雜質組成。 [16]如上述[14]所述之金屬接合材料,其中,前述第一金屬部件為電阻材料用銅合金材料,該電阻材料用銅合金材料具有一合金組成,該合金組成含有6.0質量%以上且8.0質量%以下的Mn、2.0質量%以上且4.0質量%以下的錫(Sn),剩餘部分由Cu及無法避免的雜質組成。[Technical means used to solve the problem] [1] A metal joining material formed by joining a first metal part and a second metal part, the metal joining material is characterized in that: the first metal part and the second metal part are joined via a diffusion layer; In the cross section of the diffusion layer, among the first metal component and the second metal component, only the first metal component has a first columnar crystal structure portion, and the first columnar crystal structure portion is adjacent to the diffusion layer And it includes a plurality of crystal grains extending in a direction away from the aforementioned diffusion layer. [2] The metal joining material according to the above [1], wherein, in the cross section, among all the crystal grains in the first columnar crystal structure portion, there are a plurality of crystal grains having an aspect ratio of 0.50 or less The occupied area ratio is 50% or more. [3] The metal bonding material according to the above [1] or [2], wherein in the cross section, the average thickness of the first columnar crystal structure portion is 50 micrometers (μm) or more and 500 μm or less. [4] A metal joining material formed by joining a first metal member and a second metal member, wherein: the first metal member and the second metal member are joined via a diffusion layer, and the average thickness of the diffusion layer is 50 μm the following. [5] The metal joining material according to any one of the above [1] to [4], wherein, in the cross section, the first metal member is on the diffusion layer side of the first columnar crystal structure part There is a second columnar crystal structure portion on the opposite side of, and the second columnar crystal structure portion includes a plurality of crystal grains extending in a direction away from the first columnar crystal structure portion. [6] The metal joining material according to the above [5], wherein, in the cross section, the first metal member has a side between the first columnar crystal structure portion and the second columnar crystal structure portion interface. [7] The metal joining material according to the above [6], wherein, in the cross section, the direction from the boundary surface, parallel to the boundary surface, and from the boundary surface to the side opposite to the second metal member side In the first region divided by the first reference line with a direction away from 400 μm and the two outline lines of the first metal component, the area ratio of the crystal grains having an aspect ratio of 0.35 or less is 50% or more. [8] The metal joining material according to any one of [1] to [7] above, wherein at 25° C., the thermal conductivity λ2 of the second metal member is relative to the thermal conductivity λ1 of the first metal member The ratio (λ2/λ1) is 10 or more, and the difference ΔT between the melting point T1 of the first metal component and the melting point T2 of the second metal component is 10°C or more. [9] The metal joining material according to any one of the above [1] to [8], wherein the first metal member is an aluminum-based material, and the second metal member is a copper-based material. [10] The metal joining material according to any one of the above [1] to [8], wherein the first metal member is an iron-based material, and the second metal member is a copper-based material. [11] The metal joining material according to any one of [1] to [8] above, wherein the first metal member and the second metal member are aluminum-based materials. [12] The metal joining material according to any one of [1] to [8] above, wherein the first metal member and the second metal member are iron-based materials. [13] The metal joining material according to any one of the above [1] to [8], wherein the first metal member and the second metal member are copper-based materials. [14] The metal joining material according to any one of the above [1] to [8], wherein the first metal member is a copper alloy material for resistance material, and the second metal member has a conductivity higher than that of the first metal member. Copper-based materials with higher metal parts. [15] The metal joining material according to the above [14], wherein the first metal member is a copper alloy material for resistance material, and the copper alloy material for resistance material has an alloy composition, and the alloy composition contains 10.0% by mass or more And 14.0% by mass or less of manganese (Mn), 1.0% by mass or more and 3.0% by mass or less of nickel (Ni), the remainder is composed of copper (Cu) and unavoidable impurities. [16] The metal joining material according to the above [14], wherein the first metal member is a copper alloy material for resistance material, the copper alloy material for resistance material has an alloy composition, and the alloy composition contains 6.0% by mass or more And 8.0 mass% or less of Mn, 2.0 mass% or more and 4.0 mass% or less of tin (Sn), the remainder is composed of Cu and unavoidable impurities.

[發明的功效] 依據本揭示,能夠提供一種金屬接合材料,其無論是同系材料的金屬部件及異系材料的金屬部件,金屬部件彼此的接合可靠度皆優良。[Effect of Invention] According to the present disclosure, it is possible to provide a metal joining material that has excellent joining reliability between metal parts regardless of whether it is a metal part of the same system material or a metal part of a different system material.

以下,針對實施方式作詳細說明。Hereinafter, the embodiments will be described in detail.

本案發明人重複深入探討的結果,發現藉由謀求光纖雷射銲接的接合條件和金屬部件的物性的適當化,能夠獲得一種金屬接合材料,其無論是同系材料的金屬部件及異系材料的金屬部件,金屬部件彼此的接合可靠度皆優良,於是基於該見解而完成本揭示的發明。The inventors of this case have repeated their in-depth investigations and found that by seeking to optimize the bonding conditions of optical fiber laser welding and the physical properties of metal parts, a metal joining material can be obtained, whether it is a metal part of the same material or a metal of a dissimilar material. The joint reliability of the parts and the metal parts is excellent, and the invention of the present disclosure has been completed based on this knowledge.

第1圖是顯示實施方式的金屬接合材料1的概要之斜視圖。第2圖是利用EBSD法來觀察垂直於金屬接合材料1的擴散層30之剖面所獲得之影像。具體而言,第2圖是各自垂直於金屬接合材料1的擴散層30與雷射光的照射方向之剖面的影像。第3圖是顯示第2圖的影像中的各個結構之概略圖。金屬接合材料1由第一金屬部件10與第二金屬部件20接合而成。Fig. 1 is a perspective view showing the outline of the metal bonding material 1 of the embodiment. FIG. 2 is an image obtained by observing the cross section of the diffusion layer 30 perpendicular to the metal bonding material 1 by using the EBSD method. Specifically, FIG. 2 is an image of a cross section each perpendicular to the diffusion layer 30 of the metal bonding material 1 and the irradiation direction of the laser light. Fig. 3 is a schematic diagram showing each structure in the image of Fig. 2. The metal joining material 1 is formed by joining the first metal component 10 and the second metal component 20.

首先,關於構成金屬接合材料1之第一金屬部件10及第二金屬部件20,針對材料與其組合作說明。First, regarding the first metal member 10 and the second metal member 20 constituting the metal joining material 1, the materials and their combination will be described.

作為構成第一金屬部件10與第二金屬部件20之材料及其組合,金屬接合材料1可具有後述的第一柱狀結晶組織部12和擴散層30。As a material and a combination of the first metal member 10 and the second metal member 20, the metal joining material 1 may have a first columnar crystal structure portion 12 and a diffusion layer 30 described later.

關於構成第一金屬部件10與第二金屬部件20之材料的組合,其可以是異系材料,也可以是同系材料。此處,異系材料意指包含不同金屬也就是異種金屬、不同合金也就是異種合金、不同合金系也就是異系合金。另外,同系材料意指包含相同金屬也就是同種金屬、相同合金也就是同種合金、相同合金系也就是同系合金。Regarding the combination of materials constituting the first metal component 10 and the second metal component 20, they may be materials of different series or materials of the same series. Here, the dissimilar material means that it contains different metals, that is, dissimilar metals, different alloys, that is, dissimilar alloys, and different alloy systems, that is, dissimilar alloys. In addition, the homologous material means the same metal, that is, the same metal, the same alloy, that is the same alloy, and the same alloy system, that is the same alloy.

例如,在第一金屬部件10及第二金屬部件20之組合為異系材料時,作為構成第一金屬部件10與第二金屬部件20之材料及組合,較佳是:第一金屬部件10為鋁系材料且第二金屬部件20為銅系材料之組合、第一金屬部件10為鐵系材料且第二金屬部件20為銅系材料之組合。利用這種異系材料的組合而構成之金屬接合材料1,其能夠藉由後述的光纖雷射銲接而輕易製造,抗拉強度和伸長量等接合特性優良。For example, when the combination of the first metal component 10 and the second metal component 20 is a dissimilar material, as the material and combination constituting the first metal component 10 and the second metal component 20, it is preferable that the first metal component 10 is A combination of aluminum-based materials and the second metal component 20 is a combination of copper-based materials, the first metal component 10 is a combination of iron-based materials, and the second metal component 20 is a combination of copper-based materials. The metal joining material 1 formed by using such a combination of dissimilar materials can be easily manufactured by optical fiber laser welding described later, and has excellent joining properties such as tensile strength and elongation.

另外,在第一金屬部件10及第二金屬部件20之組合為同系材料時,作為構成第一金屬部件10與第二金屬部件20之材料,較佳是:鋁系材料、鐵系材料、銅系材料。利用這種同系材料的組合而構成之金屬接合材料1,其能夠藉由光纖雷射銲接而輕易製造,抗拉強度和伸長量等接合特性優良。In addition, when the combination of the first metal component 10 and the second metal component 20 is the same series of materials, the materials constituting the first metal component 10 and the second metal component 20 are preferably aluminum-based materials, iron-based materials, and copper. Department of materials. The metal joining material 1 composed of the combination of the same series of materials can be easily manufactured by optical fiber laser welding, and has excellent joining properties such as tensile strength and elongation.

另外,同系材料之中,利用以下所示之第一金屬部件10及第二金屬部件20之組合而構成之金屬接合材料1,其適合用作為分路電阻器等電阻器。作為當作電阻器而較佳之金屬接合材料1,第一金屬部件10為以下所示之電阻材料用銅合金材料,第二金屬部件為導電率比第一金屬部件10更高之銅系材料,更佳是第二金屬部件為純銅。In addition, among the materials of the same series, the metal bonding material 1 constituted by the combination of the first metal member 10 and the second metal member 20 shown below is suitable for use as a resistor such as a shunt resistor. As a metal bonding material 1 suitable for a resistor, the first metal member 10 is a copper alloy material for resistance material shown below, and the second metal member is a copper-based material with a higher conductivity than the first metal member 10. More preferably, the second metal part is pure copper.

電阻材料用銅合金材料,其由於追求比電阻(specific resistance)大且電阻變化的溫度係數小這樣的電特性,故能夠使用含有30.0質量%以下的錳(Mn)之銅合金。The copper alloy material for the resistance material pursues electrical characteristics such as a large specific resistance and a small temperature coefficient of resistance change. Therefore, a copper alloy containing 30.0% by mass or less of manganese (Mn) can be used.

特別是,作為電阻材料用銅合金材料,為一種銅-錳-鎳(Cu-Mn-Ni)系電阻材料用銅合金材料,其具有一合金組成,該合金組成含有10.0質量%以上且14.0質量%以下的Mn、1.0質量%以上且3.0質量%以下的鎳(Ni),剩餘部分由銅(Cu)及無法避免的雜質組成。In particular, as a copper alloy material for resistance materials, it is a copper-manganese-nickel (Cu-Mn-Ni) series copper alloy material for resistance materials, which has an alloy composition containing 10.0% by mass or more and 14.0% by mass. % Of Mn or less, 1.0% by mass or more and 3.0% by mass or less of nickel (Ni), the remainder is composed of copper (Cu) and unavoidable impurities.

作為其他種類的電阻材料用銅合金材料,為一種銅-錳-錫(Cu-Mn-Sn)系電阻材料用銅合金材料,其具有一合金組成,該合金組成含有6.0質量%以上且8.0質量%以下的Mn、2.0質量%以上且4.0質量%以下的錫(Sn),剩餘部分由Cu及無法避免的雜質組成。As another type of copper alloy material for resistance materials, it is a copper-manganese-tin (Cu-Mn-Sn) series copper alloy material for resistance materials, which has an alloy composition containing 6.0% by mass or more and 8.0% by mass % Or less of Mn, 2.0% by mass or more and 4.0% by mass or less of tin (Sn), the remainder is composed of Cu and unavoidable impurities.

上述Cu-Mn-Ni系及Cu-Mn-Sn系電阻材料用銅合金材料,其在20℃以上且50℃以下的溫度範圍內的電阻溫度係數的絕對值為50ppm/℃以下,電阻溫度係數小,即便環境溫度變化,電阻值也穩定,因此適合用於電阻器所使用的電阻材料。The above-mentioned Cu-Mn-Ni series and Cu-Mn-Sn series of copper alloy materials for resistance materials, the absolute value of the temperature coefficient of resistance in the temperature range of 20°C or more and 50°C or less is 50ppm/°C or less, and the temperature coefficient of resistance It is small, and the resistance value is stable even if the ambient temperature changes, so it is suitable for resistance materials used in resistors.

電阻溫度係數(TCR)意指針對每1℃溫度差之電阻值變化的比率而由下述式(1)所表示者。The temperature coefficient of resistance (TCR) means the ratio of the change in resistance value per 1°C temperature difference and is expressed by the following formula (1).

電阻溫度係數(TCR)(單位:ppm/℃)={(R-R0 )/R0 }×[1/{(T-T0 )×106 }] …式(1)Temperature Coefficient of Resistance (TCR) (unit: ppm/℃)={(RR 0 )/R 0 }×[1/{(TT 0 )×10 6 }] …Equation (1)

式(1)中,T表示試驗溫度(單位:℃),T0 表示基準溫度(單位:℃),R表示在試驗溫度T中的電阻值(單位:Ω),R0 表示在基準溫度T0 中的電阻值(單位:Ω)。In formula (1), T represents the test temperature (unit: ℃), T 0 represents the reference temperature (unit: ℃), R represents the resistance value at the test temperature T (unit: Ω), R 0 represents the reference temperature T Resistance value in 0 (unit: Ω).

針對上述Cu-Mn-Ni系電阻材料用銅合金材料,若Mn的含量未滿10.0質量%,則會發生電阻溫度係數上升和再結晶退火時的結晶粒度(grain size)增大等。若Mn的含量大於14.0質量%,則會發生電阻率上升、再結晶退火時的結晶粒度減少、耐蝕性及製造性下降等。另外,若Ni的含量未滿1.0質量%,則會發生電阻溫度係數上升、再結晶退火時的結晶粒度增大、耐蝕性下降等。若Ni的含量大於3.0質量%,則會發生電阻率上升、再結晶退火時的結晶粒度減少、製造性下降等。Regarding the above-mentioned copper alloy material for Cu-Mn-Ni resistance material, if the Mn content is less than 10.0% by mass, the temperature coefficient of resistance will increase and the grain size during recrystallization annealing will increase. If the content of Mn exceeds 14.0% by mass, the resistivity increases, the crystal grain size during recrystallization annealing decreases, and the corrosion resistance and manufacturability decrease. In addition, if the Ni content is less than 1.0% by mass, the temperature coefficient of resistance increases, the crystal grain size during recrystallization annealing increases, and the corrosion resistance decreases. If the Ni content exceeds 3.0% by mass, the resistivity increases, the crystal grain size during recrystallization annealing decreases, and the manufacturability decreases.

針對上述Cu-Mn-Sn系電阻材料用銅合金材料,若Mn的含量未滿6.0質量%,則會發生電阻溫度係數上升和再結晶退火時的結晶粒度增大等。若Mn的含量大於8.0質量%,則會發生電阻率上升和再結晶退火時的結晶粒度減少等。另外,若Sn的含量未滿2.0質量%,則會發生電阻溫度係數上升和再結晶退火時的結晶粒度增大、耐蝕性下降等。若Sn的含量大於4.0質量%,則會發生電阻率上升、再結晶退火時的結晶粒度減少、製造性下降等。Regarding the above-mentioned copper alloy material for the Cu-Mn-Sn resistor material, if the Mn content is less than 6.0% by mass, the temperature coefficient of resistance will increase and the crystal grain size during recrystallization annealing will increase. If the content of Mn exceeds 8.0% by mass, an increase in resistivity and a decrease in crystal grain size during recrystallization annealing will occur. In addition, if the content of Sn is less than 2.0% by mass, the temperature coefficient of resistance increases, the crystal grain size during recrystallization annealing increases, and the corrosion resistance decreases. If the Sn content exceeds 4.0% by mass, the resistivity increases, the crystal grain size during recrystallization annealing decreases, and the manufacturability decreases.

另外,針對上述Cu-Mn-Ni系及Cu-Mn-Sn系電阻材料用銅合金材料,較佳是進一步含有選自由下述元素組成之群組中的一種以上的元素: 0.001質量%以上且0.500質量%以下的鐵(Fe)、0.001質量%以上且0.100質量%以下的矽(Si)、 0.001質量%以上且0.500質量%以下的鉻(Cr)、 0.001質量%以上且0.200質量%以下的鋯(Zr)、 0.001質量%以上且0.200質量%以下的鈦(Ti)、 0.001質量%以上且0.500質量%以下的銀(Ag)、 0.001質量%以上且0.500質量%以下的鎂(Mg)、 0.001質量%以上且0.100質量%以下的鈷(Co)、 0.001質量%以上且0.100質量%以下的磷(P)、及0.001質量%以上且0.500質量%以下的鋅(Zn)。In addition, the copper alloy material for the aforementioned Cu-Mn-Ni series and Cu-Mn-Sn series resistance materials preferably further contains one or more elements selected from the group consisting of the following elements: 0.001% by mass or more and 0.500% by mass or less of iron (Fe), 0.001% by mass or more and 0.100% by mass or less of silicon (Si), 0.001% by mass or more and 0.500% by mass or less of chromium (Cr), 0.001% by mass or more and 0.200% by mass or less Zirconium (Zr), 0.001% by mass or more and 0.200% by mass or less of titanium (Ti), 0.001% by mass or more and 0.500% by mass or less of silver (Ag), 0.001% by mass or more and 0.500% by mass or less of magnesium (Mg), 0.001% by mass or more and 0.100% by mass or less of cobalt (Co), 0.001% by mass or more and 0.100% by mass or less of phosphorus (P), and 0.001% by mass or more and 0.500% by mass or less of zinc (Zn).

若上述Cu-Mn-Ni系及Cu-Mn-Sn系電阻材料用銅合金材料進一步含有上述一種以上的元素,則再結晶退火時的晶粒成長會變慢,因此結晶粒度的控制會變得容易,除此之外,耐熱性會提升。因此,金屬接合材料1的接合特性會進一步提升。If the above-mentioned Cu-Mn-Ni-based and Cu-Mn-Sn-based copper alloy materials for resistance materials further contain one or more of the above-mentioned elements, the crystal grain growth during recrystallization annealing will be slower, so the control of the crystal grain size will become Easy, besides, heat resistance will be improved. Therefore, the bonding characteristics of the metal bonding material 1 will be further improved.

如此般地,關於上述電阻材料用銅合金材料,電阻溫度係數極小, 因此適合用於要求電阻值變化對於環境溫度的穩定化之電阻器的電阻材料。另外,導電性比電阻材料用銅合金材料更高之銅系材料與電阻材料用銅合金材料接合而成之金屬接合材料1,其適合用於分路電阻器等電阻器。In this way, the above-mentioned copper alloy material for a resistance material has an extremely small temperature coefficient of resistance, and is therefore suitable for use as a resistance material for a resistor that requires a change in resistance value to stabilize the ambient temperature. In addition, the metal bonding material 1 formed by bonding a copper-based material with a higher conductivity than a copper alloy material for a resistance material and a copper alloy material for a resistance material is suitable for use in resistors such as shunt resistors.

隨後,針對垂直於擴散層30之剖面中的金屬接合材料1的組織作說明。Subsequently, the structure of the metal bonding material 1 in the cross section perpendicular to the diffusion layer 30 will be described.

如第1圖~第3圖所示,金屬接合材料1由第一金屬部件10與第二金屬部件20隔著擴散層30接合而成。在垂直於擴散層30之剖面中,第一金屬部件10及第二金屬部件20之中,僅第一金屬部件10具有第一柱狀結晶組織部12,該第一柱狀結晶組織部12包含朝向從擴散層30遠離之方向而延伸之複數個晶粒11。第一柱狀結晶組織部12鄰接於第一金屬部件10側的擴散層30。As shown in FIGS. 1 to 3, the metal joining material 1 is formed by joining the first metal member 10 and the second metal member 20 with the diffusion layer 30 interposed therebetween. In the cross section perpendicular to the diffusion layer 30, among the first metal component 10 and the second metal component 20, only the first metal component 10 has a first columnar crystal structure portion 12, and the first columnar crystal structure portion 12 includes Toward a plurality of crystal grains 11 extending away from the diffusion layer 30. The first columnar crystal structure portion 12 is adjacent to the diffusion layer 30 on the side of the first metal member 10.

擴散層30形成於第一金屬部件10與第二金屬部件20之間。構成擴散層30之金屬元素,其由構成第一金屬部件10之金屬元素與構成第二金屬部件20之金屬元素組成。The diffusion layer 30 is formed between the first metal component 10 and the second metal component 20. The metal element constituting the diffusion layer 30 is composed of the metal element constituting the first metal component 10 and the metal element constituting the second metal component 20.

第一柱狀結晶組織部12大量包含之晶粒11,其從擴散層30朝向第一金屬部件10的方向延伸,且整體上沿著接合方向X而延伸。相較於第一金屬部件10接合前的組織的晶粒為粒狀,晶粒11為長形。另外,針對在接合方向X上的第一柱狀結晶組織部12的狀態,可以是從擴散層30側延續至後述的第二柱狀結晶組織部14側而整面形成晶粒11的狀態,也可以是一部分形成晶粒11的狀態,也可以如第2圖~第3圖所示而混在有這些狀態。The first columnar crystal structure portion 12 includes a large number of crystal grains 11 that extend from the diffusion layer 30 toward the first metal component 10 and extend along the joining direction X as a whole. Compared with the crystal grains of the structure of the first metal component 10 before joining, the crystal grains 11 are elongated. In addition, the state of the first columnar crystal structure portion 12 in the joining direction X may be a state in which the crystal grains 11 are formed on the entire surface from the side of the diffusion layer 30 to the second columnar crystal structure portion 14 described later. It may be a state in which the crystal grains 11 are partially formed, or these states may be mixed as shown in FIGS. 2 to 3.

藉由金屬接合材料1在第一金屬部件10內具有第一柱狀結晶組織部12,第一金屬部件10的抗拉強度和伸長量會提升。進一步,藉由第一金屬部件10內的第一柱狀結晶組織部12鄰接於擴散層30,第一柱狀結晶組織部12與擴散層30接合。因此,即便擴散層30的平均厚度比以往更小,第一金屬部件10與第二金屬部件20的接合強度也良好,於是金屬接合材料1的抗拉強度和伸長量等接合特性優良。進一步,能夠使電阻值比第一金屬部件10及第二金屬部件20更加不穩定之擴散層30的平均厚度縮減且均勻化,因此在金屬接合材料1為電阻器時,如後述般地,能夠抑制每個金屬接合材料1的電阻值及電阻溫度係數的離差(dispersion)。Since the metal joining material 1 has the first columnar crystal structure portion 12 in the first metal component 10, the tensile strength and elongation of the first metal component 10 can be improved. Furthermore, since the first columnar crystal structure part 12 in the first metal component 10 is adjacent to the diffusion layer 30, the first columnar crystal structure part 12 is joined to the diffusion layer 30. Therefore, even if the average thickness of the diffusion layer 30 is smaller than in the past, the bonding strength between the first metal member 10 and the second metal member 20 is good, so the metal bonding material 1 has excellent bonding properties such as tensile strength and elongation. Furthermore, the average thickness of the diffusion layer 30 whose resistance value is more unstable than that of the first metal member 10 and the second metal member 20 can be reduced and made uniform. Therefore, when the metal bonding material 1 is a resistor, it can be as described later. The dispersion of the resistance value and the resistance temperature coefficient of each metal bonding material 1 is suppressed.

另外,第一柱狀結晶組織部12中的晶粒11,其較佳是如第2圖~第3圖所示,在金屬接合材料1中的接合面方向Y的整面延續而形成。若複數個晶粒11在接合面方向Y的整面延續而形成,則即便進一步縮減擴散層30的平均厚度,第一金屬部件10與第二金屬部件20的接合強度會提升,於是金屬接合材料1的接合特性會進一步良好。In addition, the crystal grains 11 in the first columnar crystal structure portion 12 are preferably formed as shown in FIGS. 2 to 3 and formed continuously over the entire surface of the bonding surface direction Y in the metal bonding material 1. If a plurality of crystal grains 11 continue to be formed over the entire surface of the bonding surface direction Y, even if the average thickness of the diffusion layer 30 is further reduced, the bonding strength of the first metal component 10 and the second metal component 20 will increase, so the metal bonding material The bonding characteristics of 1 will be further improved.

另外,較佳是:在第2圖~第3圖所示之剖面中,第一柱狀結晶組織部12所包含的複數個晶粒11的至少一部分,貫穿擴散層30而延伸至第二金屬部件20。若第一柱狀結晶組織部12所包含的至少一部分晶粒11貫穿擴散層30而延伸至第二金屬部件20,則第一柱狀結晶組織部12中的晶粒11會與第二金屬部件20接合,因此即便擴散層30的平均厚度進一步縮減,第一金屬部件10與第二金屬部件20的接合強度也會進一步增加,於是金屬接合材料1的接合特性會進一步提升。In addition, it is preferable that at least a part of the plurality of crystal grains 11 included in the first columnar crystal structure portion 12 penetrate the diffusion layer 30 and extend to the second metal in the cross-sections shown in FIGS. 2 to 3 Part 20. If at least a part of the crystal grains 11 included in the first columnar crystal structure portion 12 penetrates the diffusion layer 30 and extends to the second metal component 20, the crystal grains 11 in the first columnar crystal structure portion 12 will interact with the second metal component. Therefore, even if the average thickness of the diffusion layer 30 is further reduced, the bonding strength of the first metal component 10 and the second metal component 20 will be further increased, and the bonding characteristics of the metal bonding material 1 will be further improved.

晶粒11貫穿擴散層30而延伸至第二金屬部件20意指:在第2圖~第3圖所示之剖面中,晶粒11貫穿擴散層30而侵入至第二金屬部件20。The die 11 penetrates the diffusion layer 30 and extends to the second metal component 20 means that in the cross section shown in FIGS. 2 to 3, the die 11 penetrates the diffusion layer 30 and penetrates into the second metal component 20.

未侵入至擴散層30之晶粒11,其由與構成第一金屬部件10之金屬元素相同之金屬元素構成。另外,針對侵入至擴散層30之晶粒11,侵入至擴散層30之部分,其由與構成擴散層30之金屬元素相同之金屬元素也就是構成第一金屬部件10之金屬元素與構成第二金屬部件20之金屬元素構成,未侵入至擴散層30之部分也就是從擴散層30至第一金屬部件10側之部分,其由與構成第一金屬部件10之金屬元素相同之金屬元素構成。另外,針對貫穿擴散層30而延伸至第二金屬部件20之晶粒11,侵入至第二金屬部件20之部分,其由與構成第二金屬部件20之金屬元素相同之金屬元素構成,侵入至擴散層30之部分,其由與構成擴散層30之金屬元素相同之金屬元素構成,未侵入至擴散層30之部分,其由與構成第一金屬部件10之金屬元素相同之金屬元素構成。The crystal grains 11 that have not penetrated into the diffusion layer 30 are composed of the same metal element as the metal element constituting the first metal component 10. In addition, for the portion of the crystal grain 11 that has penetrated into the diffusion layer 30 and that has penetrated into the diffusion layer 30, it is composed of the same metal element as the metal element constituting the diffusion layer 30, that is, the metal element constituting the first metal component 10 and the second metal element. The metal element of the metal component 20 is composed of the part that does not penetrate the diffusion layer 30, that is, the part from the diffusion layer 30 to the side of the first metal component 10, which is composed of the same metal element as the metal element constituting the first metal component 10. In addition, the portion of the crystal grain 11 that penetrates the diffusion layer 30 and extends to the second metal component 20 and penetrates into the second metal component 20 is composed of the same metal element as the metal element constituting the second metal component 20 and penetrates into The part of the diffusion layer 30 is composed of the same metal element as the metal element constituting the diffusion layer 30, and the part that does not penetrate into the diffusion layer 30 is composed of the same metal element as the metal element constituting the first metal member 10.

另外,在第2圖~第3圖所示之剖面中,第一柱狀結晶組織部12中的全部晶粒之中,具有0.50以下(超過0且0.50以下)的長寬比(短邊方向尺寸/長邊方向尺寸)之複數個晶粒所佔據的面積比率,其較佳是50%以上,更佳是80%以上,進一步較佳是90%以上。如此一來,若具有0.50以下的長寬比之複數個晶粒的面積比率,其佔據第一柱狀結晶組織部12中的50%以上,則第一柱狀結晶組織部12所包含的長寬比為0.50以下之晶粒11的含有比率增加,因此第一柱狀結晶組織部12的上述特性會進一步提升。其結果,即便擴散層30的平均厚度進一步縮減,第一金屬部件10與第二金屬部件20的接合強度也會進一步增加,於是金屬接合材料1的接合特性會進一步提升。In addition, in the cross-sections shown in FIGS. 2 to 3, all the crystal grains in the first columnar crystal structure portion 12 have an aspect ratio (short-side direction) of 0.50 or less (more than 0 and less than 0.50). The ratio of the area occupied by a plurality of crystal grains of the size/long-side direction size) is preferably 50% or more, more preferably 80% or more, and still more preferably 90% or more. In this way, if the area ratio of a plurality of crystal grains having an aspect ratio of 0.50 or less occupies more than 50% of the first columnar crystal structure portion 12, the length of the first columnar crystal structure portion 12 The content ratio of the crystal grains 11 having an aspect ratio of 0.50 or less increases, so the above-mentioned characteristics of the first columnar crystal structure portion 12 will be further improved. As a result, even if the average thickness of the diffusion layer 30 is further reduced, the bonding strength of the first metal member 10 and the second metal member 20 will be further increased, and the bonding characteristics of the metal bonding material 1 will be further improved.

晶粒的長寬比,其為晶粒的短邊方向尺寸相對於長邊方向尺寸之比。在第2圖~第3圖所示之剖面中,晶粒的長邊方向尺寸意指接合方向X的晶粒的最大尺寸,晶粒的短邊方向尺寸意指垂直於接合方向X之方向的晶粒的最大尺寸。在真圓狀的晶粒的情況下,長寬比為1。The aspect ratio of the crystal grain is the ratio of the size in the short-side direction of the crystal grain to the size in the long-side direction. In the cross-sections shown in Figures 2 to 3, the long-side dimension of the crystal grain means the maximum dimension of the crystal grain in the joining direction X, and the short-side dimension of the crystal grain means the direction perpendicular to the joining direction X The maximum size of the crystal grain. In the case of truly round crystal grains, the aspect ratio is 1.

例如,針對晶粒11,長邊方向尺寸為20μm以上且400μm以下程度,短邊方向尺寸為1μm以上且80μm以下程度。For example, regarding the crystal grain 11, the dimension in the longitudinal direction is approximately 20 μm or more and 400 μm or less, and the dimension in the short side direction is approximately 1 μm or more and 80 μm or less.

在第2圖~第3圖這樣的垂直於擴散層30之剖面中的金屬接合材料1的組織,其能夠由下述獲得:由使用高解析掃描式電子顯微鏡(high resolution scanning electron microscope)(日本電子股份有限公司製,JSM-7001FA)所附屬的EBSD檢測器而連續測定所獲得之結晶方位數據,使用分析軟體(TSL公司製,OIM Analysis)所算出之結晶方位分析數據。「EBSD」意指:電子背向散射繞射(Electron BackScatter Diffraction)的縮寫,為在掃描式電子顯微鏡(SEM)內利用對試料也就是金屬接合材料1照射電子束時所產生的反射電子菊池線繞射之結晶方位分析技術。「OIM Analysis」意指:藉由EBSD測定之數據分析軟體。觀察試料是針對垂直於擴散層30之剖面,利用電解研磨作鏡面精加工後之表面。觀察是在接合方向3mm×接合面方向3mm之視野中,以步長(step)尺寸2.0μm進行。將15°以上之方位差作為晶界,並將由2像素(pixel)以上所組成之晶粒作為分析對象。The structure of the metal bonding material 1 in the cross section perpendicular to the diffusion layer 30 as shown in FIGS. 2 to 3 can be obtained by using a high resolution scanning electron microscope (Japan The EBSD detector attached to Electronics Co., Ltd., JSM-7001FA) continuously measures the obtained crystal orientation data, and uses the crystal orientation analysis data calculated by the analysis software (TSL Corporation, OIM Analysis). "EBSD" means: Electron BackScatter Diffraction (Electron BackScatter Diffraction) abbreviation, which is used in a scanning electron microscope (SEM) to use the reflected electron Kikuchi line generated when the sample, that is, the metal bonding material 1 is irradiated with an electron beam Diffraction crystal orientation analysis technology. "OIM Analysis" means: data analysis software measured by EBSD. The observation sample is for the cross section perpendicular to the diffusion layer 30, and the surface after mirror finishing is made by electrolytic polishing. The observation was performed with a step size of 2.0 μm in a field of view of 3 mm in the bonding direction × 3 mm in the bonding surface direction. The azimuth difference of 15° or more is regarded as the grain boundary, and the crystal grain composed of 2 pixels or more is regarded as the analysis object.

另外,在第2圖~第3圖所示之剖面中,針對朝向從擴散層30遠離之方向而延伸之第一柱狀結晶組織部12的平均厚度,下限值較佳是50μm以上,更佳是100μm以上,進一步較佳是150μm以上,上限值較佳是500μm以下,更佳是400μm以下,進一步較佳是350μm以下。第一柱狀結晶組織部12的平均厚度意指:在第2圖~第3圖所示之剖面中,沿著接合方向X之平均長度尺寸。若第一柱狀結晶組織部12的平均厚度為50μm以上,則具有第一柱狀結晶組織部12之第一金屬部件10的機械強度會增加,因此金屬接合材料1的接合特性會進一步提升。另外,若第一柱狀結晶組織部12的平均厚度為500μm以下,則會抑制第一柱狀結晶組織部12的結晶尺寸的粗大化,而會抑制具有第一柱狀結晶組織部12之第一金屬部件10的機械強度的下降,因此金屬接合材料1的接合特性會良好。In addition, in the cross-sections shown in FIGS. 2 to 3, the lower limit of the average thickness of the first columnar crystal structure portion 12 extending in the direction away from the diffusion layer 30 is preferably 50 μm or more, and more It is preferably 100 μm or more, more preferably 150 μm or more, and the upper limit is preferably 500 μm or less, more preferably 400 μm or less, and still more preferably 350 μm or less. The average thickness of the first columnar crystal structure portion 12 means the average length dimension along the joining direction X in the cross-sections shown in FIGS. 2 to 3. If the average thickness of the first columnar crystalline structure portion 12 is 50 μm or more, the mechanical strength of the first metal component 10 having the first columnar crystalline structure portion 12 will increase, and therefore the bonding characteristics of the metal bonding material 1 will be further improved. In addition, if the average thickness of the first columnar crystal structure portion 12 is 500 μm or less, the coarsening of the crystal size of the first columnar crystal structure portion 12 is suppressed, and the first columnar crystal structure portion 12 having the first columnar crystal structure portion 12 is suppressed from coarsening. The mechanical strength of a metal component 10 is reduced, so the bonding characteristics of the metal bonding material 1 will be good.

此處,在垂直於擴散層之剖面影像中,將藉由後述的擴散層30的EPMA的線分析而特定之擴散層的10處位置加以連接,藉此來特定擴散層30與第一柱狀結晶組織部12之邊界。另外,如第2圖所示,藉由利用EBSD法來觀察垂直於擴散層之剖面,以特定將第一柱狀結晶組織部12與第二柱狀結晶組織部14分隔之邊界面15。藉由這二個邊界,來特定第一柱狀結晶組織部12的區域。Here, in the cross-sectional image perpendicular to the diffusion layer, 10 locations of the diffusion layer specified by the EPMA line analysis of the diffusion layer 30 described later are connected, thereby specifying the diffusion layer 30 and the first columnar shape. The boundary of the crystalline structure part 12. In addition, as shown in FIG. 2, by observing the cross section perpendicular to the diffusion layer by using the EBSD method, the boundary surface 15 separating the first columnar crystal structure portion 12 and the second columnar crystal structure portion 14 can be specified. By these two boundaries, the area of the first columnar crystal structure portion 12 is specified.

第一柱狀結晶組織部12的平均厚度,其為下述數值:觀察第2圖~第3圖所示之垂直於擴散層30之剖面的5處,分別測定各個剖面中的第一柱狀結晶組織部12的最大厚度與最小厚度,並算出(第一柱狀結晶組織部12的最大厚度+第一柱狀結晶組織部12的最小厚度)/2,將其合計值除以5所獲得之數值。The average thickness of the first columnar crystalline structure portion 12 is the following value: Observe the five cross-sections perpendicular to the diffusion layer 30 shown in Figs. 2 to 3, and measure the first columnar in each cross-section. The maximum thickness and minimum thickness of the crystalline structure part 12 are calculated (the maximum thickness of the first columnar crystalline structure part 12 + the minimum thickness of the first columnar crystalline structure part 12)/2, and the total value is divided by 5.的值。 The value.

另外,在第2圖~第3圖所示之剖面中,於第一金屬部件10與第二金屬部件20之間形成之擴散層30的平均厚度,其為50μm以下,較佳為40μm以下,更佳為30μm以下。如此般地,擴散層30的平均厚度為50μm以下,且越小越佳。擴散層30的平均厚度,其是在第2圖~第3圖所示之剖面中,沿著接合方向X所獲得之平均長度尺寸。若擴散層30的平均厚度為50μm以下,則平均厚度相較於以往更小,於是第一金屬部件10與第二金屬部件20的接合強度良好,金屬接合材料1的接合特性優良。In addition, in the cross-sections shown in FIGS. 2 to 3, the average thickness of the diffusion layer 30 formed between the first metal member 10 and the second metal member 20 is 50 μm or less, preferably 40 μm or less, More preferably, it is 30 μm or less. In this way, the average thickness of the diffusion layer 30 is 50 μm or less, and the smaller the better. The average thickness of the diffusion layer 30 is the average length dimension obtained along the joining direction X in the cross section shown in FIGS. 2 to 3. If the average thickness of the diffusion layer 30 is 50 μm or less, the average thickness is smaller than before, so the bonding strength of the first metal member 10 and the second metal member 20 is good, and the bonding characteristics of the metal bonding material 1 are excellent.

另外,在將金屬接合材料1作為電阻器而組裝之電子機器和電氣機器中,伴隨近年的高積體化,推進了金屬接合材料1的小型化。以往,由於在小型化的金屬接合材料中,擴散層30的平均厚度大和擴散層的厚度不均勻等,第一金屬部件及第二金屬部件之接合狀態不穩定,於是每個金屬接合材料的電阻值及電阻溫度係數會成為不穩定。在實施方式中,如上所述,金屬接合材料1的擴散層30的平均厚度相較於以往更小且更均勻,因此第一金屬部件10與第二金屬部件20之接合狀態會穩定化,而能夠抑制每個金屬接合材料1的電阻值及電阻溫度係數的離差。另外,由第一金屬部件10與第二金屬部件20的接合強度的觀點,擴散層30的平均厚度的下限值為例如1μm以上。In addition, in electronic equipment and electrical equipment assembled by using the metal bonding material 1 as a resistor, the miniaturization of the metal bonding material 1 has been promoted with the high integration in recent years. In the past, due to the large average thickness of the diffusion layer 30 and uneven thickness of the diffusion layer in miniaturized metal bonding materials, the bonding state of the first metal part and the second metal part was unstable, so the electrical resistance of each metal bonding material The value and the temperature coefficient of resistance will become unstable. In the embodiment, as described above, the average thickness of the diffusion layer 30 of the metal joining material 1 is smaller and more uniform than before, so the joining state of the first metal component 10 and the second metal component 20 is stabilized, and The dispersion of the resistance value and the temperature coefficient of resistance of each metal bonding material 1 can be suppressed. In addition, from the viewpoint of the bonding strength of the first metal member 10 and the second metal member 20, the lower limit of the average thickness of the diffusion layer 30 is, for example, 1 μm or more.

擴散層30藉由EPMA的線分析來特定。擴散層30的平均厚度,其在第2圖~第3圖所示之垂直於擴散層30的剖面影像中,測定EPMA的線分析的10處並求取其平均值。第4圖是第2圖的影像的EPMA的線分析結果。在第4圖所示之分析結果中,擴散層30的平均厚度為21μm。The diffusion layer 30 is specified by EPMA line analysis. The average thickness of the diffusion layer 30 is measured at 10 locations in the line analysis of EPMA in the cross-sectional images perpendicular to the diffusion layer 30 shown in FIGS. 2 to 3, and the average value is calculated. Figure 4 is the EPMA line analysis result of the image in Figure 2. In the analysis result shown in Fig. 4, the average thickness of the diffusion layer 30 is 21 μm.

另外,較佳是:在第2圖~第3圖所示之剖面中,第一金屬部件10及第二金屬部件20之中,僅第一金屬部件10,在第一柱狀結晶組織部12的擴散層30側的相反側,具有第二柱狀結晶組織部14,該第二柱狀結晶組織部14包含朝向從第一柱狀結晶組織部12遠離的方向而延伸之複數個晶粒13。第一柱狀結晶組織部12的擴散層30側的相反側,意指第一柱狀結晶組織部12的第一金屬部件10側。第二柱狀結晶組織部14,鄰接於第一金屬部件10側的第一柱狀結晶組織部12。In addition, it is preferable that in the cross-sections shown in FIGS. 2 to 3, among the first metal member 10 and the second metal member 20, only the first metal member 10 is in the first columnar crystal structure portion 12 On the opposite side of the diffusion layer 30 side, there is a second columnar crystal structure portion 14 including a plurality of crystal grains 13 extending in a direction away from the first columnar crystal structure portion 12 . The side opposite to the diffusion layer 30 side of the first columnar crystal structure portion 12 means the first metal member 10 side of the first columnar crystal structure portion 12. The second columnar crystal structure portion 14 is adjacent to the first columnar crystal structure portion 12 on the side of the first metal member 10.

第二柱狀結晶組織部14,由與構成第一金屬部件10之金屬元素相同之金屬元素構成。亦即,第二柱狀結晶組織部14大量包含之晶粒13,其由與構成第一金屬部件10之金屬元素相同之金屬元素構成。第二柱狀結晶組織部14大量包含之晶粒13,其從第一柱狀結晶組織部12朝向第一金屬部件10的方向而延伸,整體上沿著接合方向X而延伸。相較於第一金屬部件10的接合前的組織的晶粒,晶粒13為長形。The second columnar crystal structure portion 14 is composed of the same metal element as the metal element constituting the first metal member 10. That is, the crystal grains 13 contained in a large number of the second columnar crystal structure portion 14 are composed of the same metal element as the metal element constituting the first metal component 10. The second columnar crystal structure portion 14 includes a large number of crystal grains 13 that extend from the first columnar crystal structure portion 12 toward the first metal member 10 and extend along the joining direction X as a whole. Compared with the crystal grains of the structure of the first metal component 10 before joining, the crystal grains 13 are elongated.

藉由金屬接合材料1在第一金屬部件10內具有第二柱狀結晶組織部14,第一金屬部件10的抗拉強度和伸長量會提升。進一步,藉由第一金屬部件10內的第二柱狀結晶組織部14鄰接於第一柱狀結晶組織部12,第二柱狀結晶組織部14與第一柱狀結晶組織部12會接合,因此第一金屬部件10與第二金屬部件20的接合強度會進一步增加,於是金屬接合材料1的接合特性會進一步提升。進一步,由於第一金屬部件10與第二金屬部件20的接合強度提升,故能夠進一步縮減擴散層30的厚度,因此能夠進一步抑制每個金屬接合材料1的電阻值及電阻溫度係數的離差,而且金屬接合材料1的電阻調整進一步變得容易,也會成為非必須。Since the metal joining material 1 has the second columnar crystal structure portion 14 in the first metal component 10, the tensile strength and elongation of the first metal component 10 can be improved. Furthermore, since the second columnar crystal structure portion 14 in the first metal component 10 is adjacent to the first columnar crystal structure portion 12, the second columnar crystal structure portion 14 and the first columnar crystal structure portion 12 are joined, Therefore, the bonding strength of the first metal component 10 and the second metal component 20 will be further increased, and the bonding characteristics of the metal bonding material 1 will be further improved. Furthermore, since the bonding strength of the first metal member 10 and the second metal member 20 is improved, the thickness of the diffusion layer 30 can be further reduced, and therefore, the dispersion of the resistance value and the temperature coefficient of resistance of each metal bonding material 1 can be further suppressed. Furthermore, the resistance adjustment of the metal bonding material 1 becomes easier and becomes unnecessary.

此處,如上所述,第一金屬部件10在第二柱狀結晶組織部14的第一柱狀結晶組織部12側也就是在第一柱狀結晶組織部12與第二柱狀結晶組織部14之間具有邊界面15。因此,在利用如第2圖所示之EBSD法來觀察所獲得之影像中,相較於顯示第二柱狀結晶組織部14的第一金屬部件10側之邊界,顯示相反側也就是第二柱狀結晶組織部14的第一柱狀結晶組織部12側之邊界面15會更加明確。Here, as described above, the first metal component 10 is on the side of the first columnar crystal structure portion 12 of the second columnar crystal structure portion 14, that is, on the first columnar crystal structure portion 12 and the second columnar crystal structure portion. There is a boundary surface 15 between 14. Therefore, in the image obtained by observing the EBSD method as shown in Fig. 2, compared to the boundary on the side of the first metal member 10 showing the second columnar crystal structure portion 14, the opposite side is the second The boundary surface 15 of the columnar crystal structure portion 14 on the side of the first columnar crystal structure portion 12 is more clear.

在第2圖~第3圖所示之剖面中,在由邊界面15、平行於邊界面15且從邊界面15往與第二金屬部件20側為相反側之方向遠離400μm之第一基準線16、及第一金屬部件10的二條外形線17a,17b所劃分而成之第一區域18內,具有0.35以下(超過0且0.35以下)的長寬比之複數個晶粒所佔據的面積比率,其較佳是50%以上,更佳是70%以上,進一步較佳是80%以上。如此一來,若具有0.35以下的長寬比之複數個晶粒的面積比率佔據第一區域18中的50%以上,則第二柱狀結晶組織部14所包含的長寬比0.35以下的晶粒13的含有比率會增加,因此第二柱狀結晶組織部14的上述特性會進一步提升。其結果,即便擴散層30的平均厚度進一步縮減,第一金屬部件10與第二金屬部件20的接合強度也會進一步增加,於是金屬接合材料1的接合特性會進一步提升。In the cross-sections shown in Figures 2 to 3, the first reference line of 400μm is away from the boundary surface 15, parallel to the boundary surface 15, and from the boundary surface 15 to the side opposite to the second metal member 20 side. 16. In the first region 18 divided by the two outline lines 17a, 17b of the first metal component 10, the area ratio occupied by a plurality of crystal grains having an aspect ratio of 0.35 or less (more than 0 and less than 0.35) , It is preferably 50% or more, more preferably 70% or more, and still more preferably 80% or more. In this way, if the area ratio of a plurality of crystal grains having an aspect ratio of 0.35 or less occupies 50% or more of the first region 18, the second columnar crystal structure portion 14 contains crystals having an aspect ratio of 0.35 or less. The content ratio of the grains 13 will increase, so the above-mentioned characteristics of the second columnar crystal structure part 14 will be further improved. As a result, even if the average thickness of the diffusion layer 30 is further reduced, the bonding strength of the first metal member 10 and the second metal member 20 will be further increased, and the bonding characteristics of the metal bonding material 1 will be further improved.

在第2圖~第3圖所示之剖面中,第一基準線16意指平行於邊界面15且從邊界面15往第一金屬部件10的方向遠離400μm之基準線。另外,第一金屬部件10的外形線17a,17b意指沿著接合方向X而延伸之構成第一金屬部件10的輪廓的二條線。沿著接合方向X而延伸之第一金屬部件10的外形線17a,17b,其與邊界面15及第一基準線16相交。較佳是:在這種由邊界面15、第一基準線16、及二條外形線17a,17b所劃分而成之第一區域18中,具有0.35以下的長寬比之複數個晶粒的面積比率為50%以上。In the cross-sections shown in FIGS. 2 to 3, the first reference line 16 refers to a reference line parallel to the boundary surface 15 and away from the boundary surface 15 in the direction of the first metal component 10 by 400 μm. In addition, the outline lines 17a and 17b of the first metal component 10 mean two lines that extend along the joining direction X and constitute the outline of the first metal component 10. The outline lines 17 a and 17 b of the first metal component 10 extending along the joining direction X intersect the boundary surface 15 and the first reference line 16. Preferably: in the first region 18 divided by the boundary surface 15, the first reference line 16, and the two contour lines 17a, 17b, the area of a plurality of crystal grains having an aspect ratio of 0.35 or less The ratio is more than 50%.

另外,在第2圖~第3圖所示之剖面中,第一金屬部件10及第二金屬部件20之中,僅第二金屬部件20具有特定結晶組織部23,該特定結晶組織部23由擴散層30、平行於擴散層30之特定結晶基準線21、及第二金屬部件20的二條外形線22a,22b所劃分而成,且結晶方位為[001]之[001]結晶組織、結晶方位為[011]之[011]結晶組織、及結晶方位[111]之[111]結晶組織的合計面積所佔據的面積比率為50%以上,並且,擴散層30與特定結晶基準線21之間的平均間隔尺寸B1,其較佳是500μm以下。In addition, in the cross-sections shown in FIGS. 2 to 3, among the first metal member 10 and the second metal member 20, only the second metal member 20 has a specific crystal structure portion 23, and the specific crystal structure portion 23 consists of The diffusion layer 30, the specific crystal reference line 21 parallel to the diffusion layer 30, and the two contour lines 22a, 22b of the second metal member 20 are divided, and the crystal orientation is [001] of [001] crystal structure and crystal orientation The area ratio occupied by the total area of the [011] crystal structure of [011] and the [111] crystal structure of crystal orientation [111] is 50% or more, and the area between the diffusion layer 30 and the specific crystal reference line 21 The average interval size B1 is preferably 500 μm or less.

在第2圖~第3圖所示之剖面中,特定結晶基準線21意指平行於擴散層30且從擴散層30往第二金屬部件20的方向遠離之基準線。另外,第二金屬部件20的外形線22a,22b意指沿著接合方向X而延伸之構成第二金屬部件20的輪廓的二條線。沿著接合方向X而延伸之第二金屬部件20的外形線22a,22b,其與特定結晶基準線21及擴散層30相交。In the cross-sections shown in FIGS. 2 to 3, the specific crystal reference line 21 means a reference line parallel to the diffusion layer 30 and away from the diffusion layer 30 in the direction of the second metal member 20. In addition, the outline lines 22a, 22b of the second metal component 20 mean two lines that extend along the joining direction X and constitute the outline of the second metal component 20. The outline lines 22 a and 22 b of the second metal component 20 extending along the joining direction X intersect the specific crystal reference line 21 and the diffusion layer 30.

特定結晶組織部23至少包含:結晶方位為[001]之[001]結晶組織、結晶方位[011]之[011]結晶組織、及結晶方位[111]之[111]結晶組織。在由擴散層30、特定結晶基準線21、及二條外形線22a,22b所劃分而成之特定結晶組織部23中,[001]結晶組織、[011]結晶組織及[111]結晶組織的合計面積的面積比率,其較佳為50%以上。The specific crystal structure part 23 includes at least a [001] crystal structure with a crystal orientation of [001], a [011] crystal structure with a crystal orientation of [011], and a [111] crystal structure with a crystal orientation of [111]. In the specific crystal structure part 23 divided by the diffusion layer 30, the specific crystal reference line 21, and the two outline lines 22a, 22b, the total of [001] crystal structure, [011] crystal structure, and [111] crystal structure The area ratio of the area is preferably 50% or more.

針對[001]結晶組織、[011]結晶組織及[111]結晶組織的合計面積所佔據的面積比率為50%以上之特定結晶組織部23,若平均間隔尺寸B1為500μm以下,則藉由光纖雷射銲接,能夠輕易形成良好之第一柱狀結晶組織部12、及厚度小且均勻之擴散層30,因此第一金屬部件10與第二金屬部件20的接合強度良好,金屬接合材料1的接合特性優良。另外,在第一金屬部件10熔融後固化時,會伴隨其凝固及冷卻而造成內部應力的產生及體積的收縮,因此在擴散層30的附近,藉由第二金屬部件20的微小的潛變變形(creep deformation)緩和此內部應力,因此接合會容易形成。For the specific crystal structure part 23 whose total area occupied by the [001] crystal structure, [011] crystal structure and [111] crystal structure is 50% or more, if the average gap size B1 is 500 μm or less, the optical fiber Laser welding can easily form a good first columnar crystalline structure portion 12 and a small and uniform diffusion layer 30. Therefore, the bonding strength of the first metal component 10 and the second metal component 20 is good, and the metal bonding material 1 Excellent bonding characteristics. In addition, when the first metal member 10 is melted and solidified, internal stress and volume shrinkage are caused by its solidification and cooling. Therefore, in the vicinity of the diffusion layer 30, due to the slight creep of the second metal member 20 The creep deformation relaxes this internal stress, so the joint can be easily formed.

根據提升這種接合特性的觀點,在特定結晶組織部23的面積中佔據之[001]結晶組織、[011]結晶組織、及[111]結晶組織之合計面積的面積比率,其較佳為50%以上,更佳為80%以上,進一步較佳為90%以上。另外,擴散層30與特定結晶基準線21之間的平均間隔尺寸B1,其較佳為500μm以下,更佳為400μm以下,進一步較佳為300μm以下。From the viewpoint of improving the bonding characteristics, the area ratio of the total area of the [001] crystal structure, the [011] crystal structure, and the [111] crystal structure occupied in the area of the specific crystal structure portion 23 is preferably 50 % Or more, more preferably 80% or more, still more preferably 90% or more. In addition, the average spacing size B1 between the diffusion layer 30 and the specific crystal reference line 21 is preferably 500 μm or less, more preferably 400 μm or less, and still more preferably 300 μm or less.

特定結晶組織部23的結晶方位,其能夠由下述獲得:由使用高解析掃描式電子顯微鏡(日本電子股份有限公司製,JSM-7001FA)所附屬之EBSD檢測器連續測定所獲得之結晶方位數據,使用分析軟體(TSL公司製,OIM Analysis)所算出之結晶方位分析數據。另外,平均間隔尺寸B1,其為下述數值:觀察第2圖~第3圖所示之垂直於擴散層30之剖面的5處,分別測定各個剖面中的平均間隔尺寸B1的最大間隔尺寸與最小間隔尺寸,算出(最大間隔尺寸+最小間隔尺寸)/2,並將其合計值除以5所獲得之數值。The crystal orientation of the specific crystal structure part 23 can be obtained by continuously measuring the crystal orientation data obtained by using a high-resolution scanning electron microscope (manufactured by JEOL Co., Ltd., JSM-7001FA) attached EBSD detector , Use analysis software (made by TSL, OIM Analysis) to calculate the crystal orientation analysis data. In addition, the average gap size B1 is the following value: Observe the 5 locations of the cross section perpendicular to the diffusion layer 30 shown in Figures 2 to 3, and measure the maximum gap size and the average gap size B1 in each cross section. For the minimum interval size, calculate (maximum interval size + minimum interval size)/2, and divide the total value by 5.

另外,較佳是:在第2圖~第3圖所示之剖面中,第一金屬部件10及第二金屬部件20之中,僅第二金屬部件20可具有雙晶組織部25,該雙晶組織部25由擴散層30、平行於擴散層30之雙晶基準線24、及第二金屬部件20的二條外形線22a,22b所劃分而成,且雙晶組織所佔據的面積比率為50%以上,並且,擴散層30與雙晶基準線24之間的平均間隔尺寸B2,其較佳是500μm以下。在金屬接合材料1具有雙晶組織部25時,第二金屬部件20為銅系材料或SUS等鐵系材料。In addition, it is preferable that, in the cross-sections shown in FIGS. 2 to 3, among the first metal member 10 and the second metal member 20, only the second metal member 20 may have a twin crystal structure portion 25. The crystal structure part 25 is divided by the diffusion layer 30, the twin reference line 24 parallel to the diffusion layer 30, and the two outline lines 22a, 22b of the second metal member 20, and the area ratio occupied by the twin crystal structure is 50 % Or more, and the average spacing size B2 between the diffusion layer 30 and the twin reference line 24 is preferably 500 μm or less. When the metal bonding material 1 has the twin crystal structure portion 25, the second metal member 20 is made of a copper-based material or an iron-based material such as SUS.

在第2圖~第3圖所示之剖面中,雙晶基準線24意指平行於擴散層30且從擴散層30往第二金屬部件20的方向遠離之基準線。第二金屬部件20的外形線22a,22b,其與雙晶基準線24及擴散層30相交。雙晶組織部25至少包含雙晶組織。較佳是:在由擴散層30、雙晶基準線24、及二條外形線22a,22b所劃分而成之雙晶組織部25中,雙晶組織的面積比率為50%以上。In the cross-sections shown in FIGS. 2 to 3, the twin reference line 24 means a reference line parallel to the diffusion layer 30 and away from the diffusion layer 30 in the direction of the second metal component 20. The outline lines 22 a and 22 b of the second metal component 20 intersect the dual crystal reference line 24 and the diffusion layer 30. The twin crystal structure part 25 contains at least a twin crystal structure. It is preferable that the area ratio of the twin crystal structure in the twin crystal structure portion 25 divided by the diffusion layer 30, the twin crystal reference line 24, and the two outline lines 22a, 22b is 50% or more.

針對雙晶組織所佔據的面積比率為50%以上之雙晶組織部25,若平均間隔尺寸B2為500μm以下,則藉由光纖雷射銲接,能夠輕易形成良好之第一柱狀結晶組織部12、及厚度小且均勻之擴散層30,因此第一金屬部件10與第二金屬部件20的接合強度良好,於是金屬接合材料1的接合特性優良。另外,在第一金屬部件10熔融後固化時,會伴隨其凝固及冷卻而造成內部應力的產生及體積的收縮,因此在擴散層30的附近,藉由第二金屬部件20的微小的潛變變形來緩和此內部應力,因此接合會容易形成。For the twin crystal structure part 25 where the area ratio of the twin crystal structure is 50% or more, if the average gap size B2 is 500 μm or less, a good first columnar crystal structure part 12 can be easily formed by fiber laser welding. , And the diffusion layer 30 with a small thickness and uniformity. Therefore, the bonding strength of the first metal component 10 and the second metal component 20 is good, so the bonding characteristics of the metal bonding material 1 are excellent. In addition, when the first metal member 10 is melted and solidified, internal stress and volume shrinkage are caused by its solidification and cooling. Therefore, in the vicinity of the diffusion layer 30, due to the slight creep of the second metal member 20 Deformation relaxes this internal stress, so the joint can be easily formed.

由提升這種接合特性的觀點,在雙晶組織部25的面積中佔據之雙晶組織的面積比率,其較佳為50%以上,更佳為80%以上,進一步較佳為90%以上。另外,擴散層30與雙晶基準線24之間的平均間隔尺寸B2,其較佳為500μm以下,更佳為400μm以下,進一步較佳為300μm以下。From the viewpoint of improving the bonding characteristics, the area ratio of the twin crystal structure occupied in the area of the twin crystal structure portion 25 is preferably 50% or more, more preferably 80% or more, and still more preferably 90% or more. In addition, the average spacing size B2 between the diffusion layer 30 and the twin reference line 24 is preferably 500 μm or less, more preferably 400 μm or less, and still more preferably 300 μm or less.

雙晶組織部25的雙晶狀態,其能夠由下述獲得:由使用高解析掃描式電子顯微鏡(日本電子股份有限公司製,JSM-7001FA)所附屬之EBSD檢測器連續測定所獲得之結晶方位數據,使用分析軟體(TSL公司製,OIM Analysis)所算出之結晶方位分析數據。另外,平均間隔尺寸B2,其為下述數值:觀察第2圖~第3圖所示之垂直於擴散層30之剖面的5處,分別測定各個剖面中的平均間隔尺寸B2的最大間隔尺寸與最小間隔尺寸,算出(最大間隔尺寸+最小間隔尺寸)/2,並將其合計值除以5所獲得之數值。The twin crystal state of the twin crystal structure part 25 can be obtained by continuously measuring the crystal orientation obtained by using an EBSD detector attached to a high-resolution scanning electron microscope (manufactured by JEOL Ltd., JSM-7001FA) The data is the crystal orientation analysis data calculated by the analysis software (manufactured by TSL, OIM Analysis). In addition, the average gap size B2 is the following value: Observe the five positions of the cross section perpendicular to the diffusion layer 30 shown in Figures 2 to 3, and measure the maximum gap size and the average gap size B2 in each cross section. For the minimum interval size, calculate (maximum interval size + minimum interval size)/2, and divide the total value by 5.

另外,在25℃時,第二金屬部件20的熱傳導率λ2相對於第一金屬部件10的熱傳導率λ1之比(λ2/λ1),其較佳為10以上,更佳為15以上,進一步較佳為20以上,第一金屬部件10的熔點T1與第二金屬部件20的熔點T2之差ΔT,其較佳為10℃以上,更佳為50℃以上,進一步較佳為100℃以上。針對構成金屬接合材料1之第一金屬部件10與第二金屬部件20,若熱傳導率的比(λ2/λ1)及熔點的差ΔT在上述數值範圍內,則藉由光纖雷射銲接來製造具有良好的接合特性之金屬接合材料1會變得容易。特別是,能夠將晶粒11、第一柱狀結晶組織部12、晶粒13、第二柱狀結晶組織部14、邊界面15、第一區域18、特定結晶組織部23、雙晶組織部25、及擴散層30輕易地控制在上述數值範圍內。另外,以往,將10以上之熱傳導率比的金屬部件彼此接合是困難的,但藉由將光纖雷射銲接的條件適當化,能夠獲得上述接合特性優良之金屬接合材料1。In addition, at 25°C, the ratio of the thermal conductivity λ2 of the second metal component 20 to the thermal conductivity λ1 of the first metal component 10 (λ2/λ1) is preferably 10 or more, more preferably 15 or more, and furthermore It is preferably 20 or more, and the difference ΔT between the melting point T1 of the first metal component 10 and the melting point T2 of the second metal component 20 is preferably 10°C or more, more preferably 50°C or more, and still more preferably 100°C or more. Regarding the first metal component 10 and the second metal component 20 constituting the metal joining material 1, if the ratio of thermal conductivity (λ2/λ1) and the difference ΔT of melting point are within the above-mentioned numerical range, optical fiber laser welding is used to produce The metal bonding material 1 with good bonding characteristics becomes easy. In particular, the crystal grain 11, the first columnar crystal structure portion 12, the crystal grain 13, the second columnar crystal structure portion 14, the boundary surface 15, the first region 18, the specific crystal structure portion 23, the twin crystal structure portion 25, and the diffusion layer 30 are easily controlled within the above numerical range. In addition, conventionally, it has been difficult to join metal parts having a thermal conductivity ratio of 10 or higher to each other. However, by optimizing the conditions for optical fiber laser welding, it is possible to obtain a metal joining material 1 having excellent joining properties.

隨後,針對金屬接合材料1的製造方法作說明。Subsequently, the manufacturing method of the metal bonding material 1 will be described.

金屬接合材料1,其能夠藉由使第一金屬部件10與第二金屬部件20接合來製造。就第一金屬部件10與第二金屬部件20之接合而言,使用光纖雷射銲接。The metal joining material 1 can be manufactured by joining the first metal component 10 and the second metal component 20. For the joining of the first metal part 10 and the second metal part 20, optical fiber laser welding is used.

光纖雷射銲接,其為下述方法:以雷射光作為熱源,將雷射光集光後照射至金屬部件,使金屬部件局部熔融後凝固,藉此,將金屬部件彼此接合。光纖雷射銲接,其利用高能量密度的雷射光而能夠在短時間內接合金屬部件。Optical fiber laser welding is a method in which laser light is used as a heat source, the laser light is collected and irradiated to metal parts, the metal parts are partially melted and then solidified, thereby joining the metal parts to each other. Optical fiber laser welding uses high-energy-density laser light to join metal parts in a short time.

因為利用光學系統的透鏡集光至極小區域而獲得高能量密度的雷射光,故光纖雷射銲接具有下述多種特長:可高速的深熔銲接、熔接的熱影響極少、熔接變形少等。Because the lens of the optical system collects light to a very small area to obtain high-energy-density laser light, fiber laser welding has the following characteristics: high-speed deep penetration welding, minimal thermal influence of welding, and less welding distortion.

另一方面,光纖雷射銲接用的光源的高機能化,在此數年間積極推進。特別是雷射光的高輸出化相較於以往顯著改善。On the other hand, the high performance of light sources for optical fiber laser welding has been actively promoted in the past few years. In particular, the high output of laser light is significantly improved compared to the past.

另外,若金屬部件為鋁系材料和銅系材料,則金屬部件的雷射光的反射率高,因此雷射光的照射能量無法充分活用於金屬部件的熔融,而會提高雷射光的輸出。若提高雷射光的輸出,則在金屬接合材料的接合面會大量生成缺陷,因此金屬接合材料的連接可靠度會下降。In addition, if the metal parts are aluminum-based materials and copper-based materials, the reflectivity of the laser light of the metal parts is high, and therefore the irradiation energy of the laser light cannot be fully utilized for the melting of the metal parts, and the output of the laser light is increased. If the output of the laser light is increased, a large number of defects will be generated on the bonding surface of the metal bonding material, and therefore the connection reliability of the metal bonding material will decrease.

基於這種狀況,在實施方式中,藉由使用相較於以往為極高輸出化之光纖雷射,並將銲接條件適當化,能夠製造出接合可靠度優良之金屬接合材料1。Based on this situation, in the embodiment, by using an optical fiber laser with an extremely high output compared to the past, and by optimizing the welding conditions, it is possible to produce a metal bonding material 1 with excellent bonding reliability.

在實施方式中,於光纖雷射銲接中,在使第一金屬部件10與第二金屬部件20接觸之狀態下或在使第一金屬部件10與第二金屬部件20鄰近配置之狀態下,對第一金屬部件10側照射雷射光,而使第一金屬部件10與第二金屬部件20接合。In the embodiment, in the optical fiber laser welding, the first metal member 10 and the second metal member 20 are brought into contact with each other or the first metal member 10 and the second metal member 20 are arranged adjacent to each other. The side of the first metal member 10 is irradiated with laser light to join the first metal member 10 and the second metal member 20.

因為對相較於第二金屬部件20為低熱傳導率且雷射光吸收率高之第一金屬部件10照射雷射光,故雷射光造成的熔融由第一金屬部件10的熔融所支配。然後,藉由在熔融後急速冷卻,第一金屬部件10的熔融液的熱會以從雷射光的照射位置遠離的方式,在第一金屬部件10中及第二金屬部件20中傳遞,同時,熔融部會急速冷卻凝固,因此會在金屬接合材料1中形成上述柱狀結晶組織部等。進一步,因為能夠抑制傳遞至第二金屬部件20之熱的影響,故相較於以往,能夠使擴散層30的厚度更小且更均勻化,而且能夠抑制特定結晶組織部23和雙晶組織部25的擴大。因此,金屬接合材料1的接合特性會提升。Since the laser light is irradiated to the first metal member 10, which has a lower thermal conductivity and a higher laser light absorption rate than the second metal member 20, the melting caused by the laser light is dominated by the melting of the first metal member 10. Then, by rapidly cooling after melting, the heat of the molten liquid of the first metal component 10 is transferred to the first metal component 10 and the second metal component 20 in a manner away from the irradiation position of the laser light, and at the same time, The molten part is rapidly cooled and solidified, so the above-mentioned columnar crystal structure part and the like are formed in the metal joining material 1. Furthermore, since the influence of heat transferred to the second metal member 20 can be suppressed, the thickness of the diffusion layer 30 can be made smaller and more uniform than in the past, and the specific crystal structure portion 23 and the twin crystal structure portion can be suppressed. The expansion of 25. Therefore, the bonding characteristics of the metal bonding material 1 can be improved.

關於在第一金屬部件10與第二金屬部件20之光纖雷射銲接中的雷射光的輸出,下限值較佳是1kW以上,更佳是3kW以上,上限值較佳是10kW以下,更佳是6kW以下。若雷射光的輸出為1kW以上,則能夠良好地進行藉由雷射光實行之熔融。若雷射光的輸出是10kW以下,則能夠抑制傳遞至第二金屬部件20之熱的影響。Regarding the output of the laser light in the optical fiber laser welding of the first metal part 10 and the second metal part 20, the lower limit value is preferably 1kW or more, more preferably 3kW or more, and the upper limit value is preferably 10kW or less, and more Preferably, it is less than 6kW. If the output of the laser light is 1 kW or more, the melting by the laser light can be performed well. If the output of the laser light is 10 kW or less, the influence of heat transferred to the second metal member 20 can be suppressed.

依據以上說明之實施方式,藉由使用高輸出之光纖雷射,並將銲接條件和金屬部件的物性適當化,能夠獲得一種金屬接合材料,其具有第一柱狀結晶組織部和第二柱狀結晶組織部等,並具有厚度減少之擴散層。在金屬接合材料中,無論第一金屬部件與第二金屬部件之組合是同系材料或異系材料,抗拉強度和伸長量等接合特性皆良好,因此金屬部件彼此的接合可靠度優良。According to the embodiment described above, by using a high-output optical fiber laser and optimizing the welding conditions and the physical properties of the metal parts, it is possible to obtain a metal joining material having a first columnar crystal structure part and a second columnar crystal structure. Crystal structure, etc., and has a diffusion layer with reduced thickness. Among the metal joining materials, regardless of whether the combination of the first metal part and the second metal part is a homogenous material or a dissimilar material, the joining properties such as tensile strength and elongation are good, and therefore the joining reliability of the metal parts is excellent.

以上針對實施方式作了說明,但本發明並不限於上述實施方式,包括本揭示的概念及申請專利範圍所包含的一切態樣,在本揭示的範圍內能夠作各種改變。 [實施例]The embodiments are described above, but the present invention is not limited to the above embodiments, and includes the concepts of the present disclosure and all aspects included in the scope of the patent application, and various changes can be made within the scope of the present disclosure. [Example]

隨後,針對實施例及比較例作說明,但本揭示並不限於這些實施例。Subsequently, examples and comparative examples will be described, but the present disclosure is not limited to these examples.

(實施例1~18及比較例1~10) 首先,準備表1所示之第一金屬部件及第二金屬部件。第一金屬部件及第二金屬部件為板狀,板厚為2毫米(mm),寬度為10mm,長度為100mm。第一金屬部件及第二金屬部件的種類如下所述。(Examples 1-18 and Comparative Examples 1-10) First, the first metal part and the second metal part shown in Table 1 were prepared. The first metal part and the second metal part are plate-shaped, with a thickness of 2 millimeters (mm), a width of 10 mm, and a length of 100 mm. The types of the first metal component and the second metal component are as follows.

銅系材料使用下述。 ‧Cu-Mn-Ni系電阻材料用銅合金材料 ‧Cu-Mn-Sn系電阻材料用銅合金材料 ‧無氧銅(OFC):Cu含量為99.96質量%以上The following are used for copper-based materials. ‧Cu-Mn-Ni series of copper alloy materials for resistance materials ‧Copper alloy materials for Cu-Mn-Sn resistance materials ‧Oxygen-free copper (OFC): Cu content is 99.96 mass% or more

鋁系材料使用下述。 ‧Al1060 ‧Al7075The aluminum-based materials used are as follows. ‧Al1060 ‧Al7075

鐵系材料使用下述。 ‧SUS430 ‧SUS304The iron-based materials used are as follows. ‧SUS430 ‧SUS304

[表1]

Figure 02_image001
[Table 1]
Figure 02_image001

隨後,選定二個金屬部件,對合板厚為2mm且寬度為10mm之面,並在表2所示之條件下,將第一金屬部件及第二金屬部件作光纖雷射銲接來製造金屬接合材料。雷射光的波長為1070奈米(nm)。Then, two metal parts were selected, and the thickness of the plate was 2mm and the width was 10mm. Under the conditions shown in Table 2, the first metal part and the second metal part were welded by optical fiber laser to produce the metal joint material. . The wavelength of the laser light is 1070 nanometers (nm).

在實施例1~18中,如第5圖所示,以平行於第一金屬部件10及第二金屬部件20之對接面50也就是平行於第一金屬部件10及第二金屬部件20之接觸面的方式,對於從該面50往第一金屬部件側遠離h(單位:mm)之位置,一邊掃描並一邊照射雷射光。亦即,利用雷射光照射從第一金屬部件10及第二金屬部件20之對接面50遠離距離h之第一金屬部件10的位置。In Examples 1-18, as shown in Figure 5, the abutting surface 50 parallel to the first metal component 10 and the second metal component 20 is parallel to the contact between the first metal component 10 and the second metal component 20 For the surface method, the laser beam is irradiated while scanning at a position away from h (unit: mm) from the surface 50 to the first metal component side. That is, laser light is used to irradiate a position away from the abutting surface 50 of the first metal component 10 and the second metal component 20 by the distance h of the first metal component 10.

另一方面,在比較例1~10中則並非如實施例1~18般地利用雷射光照射第一金屬部件10側,而是利用雷射光照射第一金屬部件10及第二金屬部件20之對接面50。On the other hand, in Comparative Examples 1 to 10, instead of irradiating the first metal member 10 with laser light as in Examples 1 to 18, laser light was used to irradiate one of the first metal member 10 and the second metal member 20. Butt joint 50.

[表2]

Figure 02_image003
[Table 2]
Figure 02_image003

針對在上述實施例及比較例中所獲得之金屬接合材料,垂直於擴散層之剖面的影像,其由下述獲得:由高解析度掃描式電子顯微鏡(日本電子股份有限公司製,JSM-7001FA)所附屬之EBSD檢測器連續測定而得之結晶方位數據,使用分析軟體(TSL公司製,OIM Analysis)所算出之結晶方位分析數據。觀察試料設為:針對垂直於擴散層之剖面,利用電解研磨作鏡面精加工之表面。觀察,是在接合方向3mm×接合面方向3mm之視野中,以步長尺寸2.0µm進行。將15°以上之方位差作為晶界,並將由2像素以上所組成之晶粒作為分析的對象。基於如此獲得之影像,觀察垂直於擴散層之剖面之結果顯示於表3。For the metal bonding materials obtained in the above-mentioned examples and comparative examples, the images perpendicular to the cross-section of the diffusion layer were obtained as follows: by a high-resolution scanning electron microscope (manufactured by JEOL Co., Ltd., JSM-7001FA ) The crystal orientation data obtained by the continuous measurement of the attached EBSD detector is the crystal orientation analysis data calculated by the analysis software (manufactured by TSL, OIM Analysis). The observation sample is set as: for the cross-section perpendicular to the diffusion layer, the surface of the mirror finishing is made by electrolytic polishing. The observation was performed with a step size of 2.0 µm in a field of view of 3 mm in the bonding direction x 3 mm in the bonding surface direction. The azimuth difference of 15° or more is regarded as the grain boundary, and the crystal grain composed of 2 pixels or more is regarded as the object of analysis. Based on the image thus obtained, the results of observing the section perpendicular to the diffusion layer are shown in Table 3.

擴散層藉由EPMA的線分析來特定。擴散層的平均厚度,在垂直於擴散層之剖面影像中,測定10處的EPMA的線分析並作其平均值。The diffusion layer is specified by EPMA line analysis. The average thickness of the diffusion layer, in the cross-sectional image perpendicular to the diffusion layer, measure 10 EPMA line analysis and make the average value.

另外,在垂直於擴散層之剖面影像上,連接藉由擴散層之EPMA的線分析而特定之擴散層之10處位置,藉此,特定擴散層與第一柱狀結晶組織部之邊界。另外,由垂直於擴散層之剖面的上述影像,特定第一柱狀結晶組織部與第二柱狀結晶組織部之間的邊界面。如此般地,特定第一柱狀結晶組織部的區域。然後,第一柱狀結晶組織部的平均厚度設為下述數值:藉由上述EBSD法來觀察垂直於擴散層之剖面5處而特定第一柱狀結晶組織部的區域,分別測定各個剖面中的第一柱狀結晶組織部的最大厚度與最小厚度,算出(第一柱狀結晶組織部的最大厚度+第一柱狀結晶組織部的最小厚度)/2,並將其合計值除以5所獲得之數值。另外,求取第一柱狀結晶組織部中的全部晶粒之中具有0.50以下(超過0且0.50以下)的長寬比(短邊方向尺寸/長邊方向尺寸)之複數個晶粒所佔據的面積比率。In addition, on the cross-sectional image perpendicular to the diffusion layer, 10 locations of the diffusion layer specified by the EPMA line analysis of the diffusion layer are connected, thereby specifying the boundary between the diffusion layer and the first columnar crystal structure. In addition, the boundary surface between the first columnar crystal structure portion and the second columnar crystal structure portion is specified from the above-mentioned image perpendicular to the cross section of the diffusion layer. In this way, the region of the first columnar crystal structure is specified. Then, the average thickness of the first columnar crystalline structure was set to the following value: The area of the first columnar crystalline structure was determined by observing five cross-sections perpendicular to the diffusion layer by the above-mentioned EBSD method, and measuring the respective cross-sections Calculate the maximum thickness and minimum thickness of the first columnar crystal structure part of (maximum thickness of the first columnar crystal structure + minimum thickness of the first columnar crystal structure)/2, and divide the total value by 5. The value obtained. In addition, it is determined that a plurality of crystal grains having an aspect ratio (short-side direction size/long-side direction size) of 0.50 or less (more than 0 and 0.50 or less) among all the crystal grains in the first columnar crystal structure portion are occupied The area ratio.

另外,求取:在由第一柱狀結晶組織部與第二柱狀結晶組織部之間的邊界面15、平行於邊界面15且從邊界面15往與第二金屬部件20側為相反側之方向遠離400μm之第一基準線16、及第一金屬部件10的二條外形線17a,17b所劃分而成之第一區域18內所佔據的區域中,全部晶粒之中,具有0.35以下(超過0且0.35以下)的長寬比(短邊方向尺寸/長邊方向尺寸)之複數個晶粒所佔據的面積比率。In addition, it is determined that the boundary surface 15 between the first columnar crystal structure portion and the second columnar crystal structure portion is parallel to the boundary surface 15 and from the boundary surface 15 to the side opposite to the second metal member 20 side In the area occupied by the first region 18 divided by the first reference line 16 and the two outline lines 17a, 17b of the first metal component 10 in the direction of 400μm, all the crystal grains have 0.35 or less ( The ratio of the area occupied by a plurality of crystal grains with an aspect ratio (size in the short-side direction/size in the long-side direction) of more than 0 and 0.35 or less.

[表3]

Figure 02_image005
[table 3]
Figure 02_image005

[評估] 針對上述實施例及比較例中所獲得之金屬接合材料,進行以下的評估。將結果顯示於表4。[Evaluate] With respect to the metal bonding materials obtained in the above-mentioned Examples and Comparative Examples, the following evaluations were performed. The results are shown in Table 4.

[1]抗拉強度比 根據JIS Z 2214而進行抗拉試驗。然後,將金屬接合材料的抗拉強度相對於抗拉強度較低的一方之金屬部件的抗拉強度之比(金屬接合材料的抗拉強度/抗拉強度較低的一方之金屬部件的抗拉強度)作為抗拉強度比。並且,第一金屬部件及第二金屬部件為相同材料時,抗拉強度較低的一方之金屬部件設為第一金屬部件。全部金屬接合材料皆因為藉由雷射加熱軟化而導致抗拉強度相較於接合前的金屬部件更傾向於下降,但若抗拉強度比為0.80以上,則金屬接合材料判斷為良好,若抗拉強度比未滿0.80,則金屬接合材料判斷為不良。[1] Tensile strength ratio The tensile test was performed in accordance with JIS Z 2214. Then, the ratio of the tensile strength of the metal joining material to the tensile strength of the metal part with the lower tensile strength (the tensile strength of the metal joining material/the tensile strength of the metal part with the lower tensile strength) Strength) as the tensile strength ratio. In addition, when the first metal member and the second metal member are made of the same material, the metal member having the lower tensile strength is referred to as the first metal member. All metal joining materials are softened by laser heating, and the tensile strength tends to decrease compared with the metal parts before joining. However, if the tensile strength ratio is 0.80 or more, the metal joining material is judged to be good. If the tensile strength ratio is less than 0.80, the metal joining material is judged to be defective.

[2]伸長量比 根據JIS Z 2241進行抗拉試驗。然後,將金屬接合材料的伸長量相對於抗拉強度較低的一方之金屬部件的伸長量之比(金屬接合材料的伸長量/抗拉強度較低的一方之金屬部件的伸長量)作為伸長量比。全部金屬接合材料皆因為藉由雷射加熱軟化而導致伸長量相較於接合前的金屬部件更傾向於增加,但在接合狀態不良的情況下會因為伸長而斷裂。若伸長比為1.5以上,則金屬接合材料判斷為良好,若伸長比未滿1.5,則金屬接合材料判斷為不良。[2] Elongation ratio The tensile test is carried out according to JIS Z 2241. Then, the ratio of the elongation of the metal joining material to the elongation of the metal part of the lower tensile strength (elongation of the metal joining material/elongation of the metal part of the lower tensile strength) is defined as the elongation量比。 Volume ratio. All metal joining materials are softened by laser heating, and the elongation tends to increase compared to the metal parts before joining, but when the joining state is poor, the elongation will break due to the elongation. If the extension ratio is 1.5 or more, the metal joining material is judged to be good, and if the extension ratio is less than 1.5, the metal joining material is judged to be inferior.

[3]電阻值之離差 電阻值之離差,其是針對所獲得之金屬接合材料的電阻值距平均值有何種程度的差異的指標。針對實施例1~11及比較例1~3所獲得之金屬接合材料的10個樣本,測定在室溫(25°C)之電阻值,而獲得各個實施例及各個比較例中的測定值的平均值、最大值及最小值。然後,將金屬接合材料的電阻值的最大值與最小值之差相對於電阻值的平均值之比((金屬接合材料的電阻值的最大值-金屬接合材料的電阻值的最小值)/金屬接合材料的平均值)作為電阻值之離差。電阻值之離差越小,則金屬接合材料作為電阻器越良好。[3] Deviation of resistance value The dispersion of the resistance value is an index for how much the resistance value of the obtained metal bonding material differs from the average value. For 10 samples of the metal joining materials obtained in Examples 1 to 11 and Comparative Examples 1 to 3, the resistance values at room temperature (25°C) were measured to obtain the measured values in each Example and each Comparative Example Average, maximum, and minimum. Then, the ratio of the difference between the maximum value and the minimum value of the resistance value of the metal bonding material to the average value of the resistance value ((the maximum value of the resistance value of the metal bonding material-the minimum value of the resistance value of the metal bonding material)/metal The average value of the bonding material) is used as the dispersion of the resistance value. The smaller the dispersion of the resistance value, the better the metal bonding material as a resistor.

[表4]

Figure 02_image007
[Table 4]
Figure 02_image007

如表1~表4所示,在實施例1~18中,在垂直於金屬接合材料的擴散層之剖面中,僅第一金屬部件具有第一柱狀結晶組織部,且擴散層的平均厚度為50µm以下。因此,金屬接合材料的抗拉強度比及伸長量比良好。As shown in Tables 1 to 4, in Examples 1 to 18, in the cross section perpendicular to the diffusion layer of the metal joining material, only the first metal component has the first columnar crystal structure, and the average thickness of the diffusion layer It is less than 50µm. Therefore, the tensile strength ratio and elongation ratio of the metal joining material are good.

另外,實施例1~11及比較例1~3,其使用電阻材料用銅合金材料作為第一金屬部件,並測定了抗拉強度比及伸長量比還有電阻值的離差。實施例1~11的擴散層的平均厚度為50µm以下,相較於以往,擴散層的厚度更小且更均勻化,因此能夠抑制電阻值的離差。此暗示了實施例1~11的金屬接合材料適合作為分路電阻器等電阻器。In addition, in Examples 1 to 11 and Comparative Examples 1 to 3, a copper alloy material for resistance material was used as the first metal member, and the tensile strength ratio, elongation ratio, and resistance value dispersion were measured. The average thickness of the diffusion layers of Examples 1 to 11 is 50 μm or less. Compared with the past, the thickness of the diffusion layer is smaller and more uniform, so that the dispersion of the resistance value can be suppressed. This suggests that the metal bonding materials of Examples 1 to 11 are suitable for resistors such as shunt resistors.

另一方面,在比較例1~10中,沿著第一金屬部件及第二金屬部件之對接面照射了雷射光。因此,在垂直於擴散層之剖面中並未形成第一柱狀結晶組織部。進一步,擴散層的平均厚度大於50µm。其結果,在比較例的金屬接合材料中,抗拉強度比及伸長量比不良,另外,比較例1~3的電阻值的離差亦大。On the other hand, in Comparative Examples 1 to 10, laser light was irradiated along the butting surface of the first metal member and the second metal member. Therefore, the first columnar crystal structure part is not formed in the cross section perpendicular to the diffusion layer. Furthermore, the average thickness of the diffusion layer is greater than 50 µm. As a result, in the metal joining material of the comparative example, the tensile strength ratio and the elongation ratio were inferior, and the dispersion of the resistance values of the comparative examples 1 to 3 was also large.

1:金屬接合材料 10:第一金屬部件 11,13:晶粒 12:第一柱狀結晶組織部 14:第二柱狀結晶組織部 15:邊界面 16:第一基準線 17a,17b,22a,22b:外形線 18:第一區域 20:第二金屬部件 21:特定結晶基準線 23:特定結晶組織部 24:雙晶基準線 25:雙晶組織部 30:擴散層 50:對接面 B1,B2:平均間隔尺寸 h:距離 X:接合方向 Y:接合面方向1: Metal bonding material 10: The first metal part 11, 13: Die 12: The first columnar crystal structure 14: The second columnar crystal structure 15: boundary surface 16: The first baseline 17a, 17b, 22a, 22b: outline line 18: The first area 20: The second metal part 21: Specific crystallization baseline 23: Specific crystal structure department 24: Double crystal reference line 25: Double crystal organization department 30: diffusion layer 50: Butt surface B1, B2: average interval size h: distance X: Joint direction Y: direction of joint surface

第1圖是顯示實施方式的金屬接合材料的概要之斜視圖。 第2圖是利用電子背向散射繞射(EBSD)法來觀察實施方式的垂直於金屬接合材料的擴散層之剖面所獲得之影像。 第3圖是顯示第2圖的影像中的各個結構之概略圖。 第4圖是第2圖的影像的電子探針顯微分析(EPMA)的線分析結果。 第5圖是用於說明實施例中的雷射光的照射位置之斜視圖。Fig. 1 is a perspective view showing the outline of the metal bonding material of the embodiment. Figure 2 is an image obtained by observing the cross section of the diffusion layer perpendicular to the metal bonding material according to the embodiment using the electron backscatter diffraction (EBSD) method. Fig. 3 is a schematic diagram showing each structure in the image of Fig. 2. Figure 4 is the line analysis result of the electron probe microanalysis (EPMA) of the image in Figure 2. Fig. 5 is a perspective view for explaining the irradiation position of laser light in the embodiment.

國內寄存資訊(請依寄存機構、日期、號碼順序註記) 無 國外寄存資訊(請依寄存國家、機構、日期、號碼順序註記) 無Domestic deposit information (please note in the order of deposit institution, date and number) without Foreign hosting information (please note in the order of hosting country, institution, date, and number) without

1:金屬接合材料 1: Metal bonding material

10:第一金屬部件 10: The first metal part

12:第一柱狀結晶組織部 12: The first columnar crystal structure

14:第二柱狀結晶組織部 14: The second columnar crystal structure

15:邊界面 15: boundary surface

20:第二金屬部件 20: The second metal part

30:擴散層 30: diffusion layer

X:接合方向 X: Joint direction

Y:接合面方向 Y: direction of joint surface

Claims (16)

一種金屬接合材料,由第一金屬部件與第二金屬部件接合而成,該金屬接合材料的特徵在於: 前述第一金屬部件與前述第二金屬部件隔著擴散層而接合; 在垂直於前述擴散層之剖面中,前述第一金屬部件及前述第二金屬部件之中,僅前述第一金屬部件具有第一柱狀結晶組織部,該第一柱狀結晶組織部鄰接於前述擴散層且包含朝向從前述擴散層遠離的方向而延伸之複數個晶粒。A metal joining material is formed by joining a first metal part and a second metal part. The metal joining material is characterized in: The first metal component and the second metal component are joined via a diffusion layer; In the cross section perpendicular to the diffusion layer, among the first metal component and the second metal component, only the first metal component has a first columnar crystal structure portion, and the first columnar crystal structure portion is adjacent to the The diffusion layer includes a plurality of crystal grains extending in a direction away from the aforementioned diffusion layer. 如請求項1所述之金屬接合材料,其中,在前述剖面中,前述第一柱狀結晶組織部中的全部晶粒之中,具有0.50以下的長寬比之複數個晶粒所佔據的面積比率為50%以上。The metal joining material according to claim 1, wherein, in the cross section, among all the crystal grains in the first columnar crystal structure portion, the area occupied by a plurality of crystal grains having an aspect ratio of 0.50 or less The ratio is more than 50%. 如請求項1或2所述之金屬接合材料,其中,在前述剖面中,前述第一柱狀結晶組織部的平均厚度為50μm以上且500μm以下。The metal joining material according to claim 1 or 2, wherein in the cross section, the average thickness of the first columnar crystal structure portion is 50 μm or more and 500 μm or less. 一種金屬接合材料,由第一金屬部件與第二金屬部件接合而成,其中: 前述第一金屬部件與前述第二金屬部件隔著擴散層而接合,前述擴散層的平均厚度為50μm以下。A metal joining material is formed by joining a first metal part and a second metal part, wherein: The first metal member and the second metal member are joined via a diffusion layer, and the average thickness of the diffusion layer is 50 μm or less. 如請求項1~4中任一項所述之金屬接合材料,其中,在前述剖面中,前述第一金屬部件,在前述第一柱狀結晶組織部的前述擴散層側的相反側具有第二柱狀結晶組織部,該第二柱狀結晶組織部包含朝向從前述第一柱狀結晶組織部遠離的方向而延伸之複數個晶粒。The metal joining material according to any one of claims 1 to 4, wherein in the cross section, the first metal member has a second metal member on the opposite side of the diffusion layer side of the first columnar crystal structure part A columnar crystal structure portion, the second columnar crystal structure portion including a plurality of crystal grains extending in a direction away from the first columnar crystal structure portion. 如請求項5所述之金屬接合材料,其中,在前述剖面中,前述第一金屬部件,在前述第一柱狀結晶組織部與前述第二柱狀結晶組織部之間具有邊界面。The metal joining material according to claim 5, wherein in the cross section, the first metal member has a boundary surface between the first columnar crystal structure portion and the second columnar crystal structure portion. 如請求項6所述之金屬接合材料,其中,在前述剖面中,在由前述邊界面、平行於前述邊界面且從前述邊界面往與前述第二金屬部件側為相反側之方向遠離400μm之第一基準線、及前述第一金屬部件的二條外形線所劃分而成之第一區域內,具有0.35以下的長寬比之晶粒所佔據的面積比率為50%以上。The metal joining material according to claim 6, wherein, in the cross section, the distance is 400 μm away from the boundary surface, parallel to the boundary surface, and from the boundary surface to the opposite side to the second metal member side. In the first region divided by the first reference line and the two outline lines of the first metal component, the area ratio of the crystal grains having an aspect ratio of 0.35 or less is 50% or more. 如請求項1~7中任一項所述之金屬接合材料,其中,在25℃時,前述第二金屬部件的熱傳導率λ2相對於前述第一金屬部件的熱傳導率λ1之比(λ2/λ1)為10以上, 前述第一金屬部件的熔點T1與前述第二金屬部件的熔點T2之差ΔT為10℃以上。The metal joining material according to any one of claims 1 to 7, wherein the ratio of the thermal conductivity λ2 of the second metal component to the thermal conductivity λ1 of the first metal component at 25°C (λ2/λ1 ) Is 10 or more, The difference ΔT between the melting point T1 of the first metal member and the melting point T2 of the second metal member is 10° C. or more. 如請求項1~8中任一項所述之金屬接合材料,其中,前述第一金屬部件為鋁系材料,前述第二金屬部件為銅系材料。The metal joining material according to any one of claims 1 to 8, wherein the first metal member is an aluminum-based material, and the second metal member is a copper-based material. 如請求項1~8中任一項所述之金屬接合材料,其中,前述第一金屬部件為鐵系材料,前述第二金屬部件為銅系材料。The metal joining material according to any one of claims 1 to 8, wherein the first metal member is an iron-based material, and the second metal member is a copper-based material. 如請求項1~8中任一項所述之金屬接合材料,其中,前述第一金屬部件及前述第二金屬部件為鋁系材料。The metal joining material according to any one of claims 1 to 8, wherein the first metal member and the second metal member are aluminum-based materials. 如請求項1~8中任一項所述之金屬接合材料,其中,前述第一金屬部件及前述第二金屬部件為鐵系材料。The metal joining material according to any one of claims 1 to 8, wherein the first metal member and the second metal member are iron-based materials. 如請求項1~8中任一項所述之金屬接合材料,其中,前述第一金屬部件及前述第二金屬部件為銅系材料。The metal joining material according to any one of claims 1 to 8, wherein the first metal member and the second metal member are copper-based materials. 如請求項1~8中任一項所述之金屬接合材料,其中,前述第一金屬部件為電阻材料用銅合金材料, 前述第二金屬部件為導電率比前述第一金屬部件更高之銅系材料。The metal joining material according to any one of claims 1 to 8, wherein the first metal member is a copper alloy material for resistance materials, The second metal member is a copper-based material with a higher conductivity than the first metal member. 如請求項14所述之金屬接合材料,其中,前述第一金屬部件為電阻材料用銅合金材料,該電阻材料用銅合金材料具有一合金組成,該合金組成含有10.0質量%以上且14.0質量%以下的Mn、1.0質量%以上且3.0質量%以下的Ni,剩餘部分由Cu及無法避免的雜質組成。The metal joining material according to claim 14, wherein the first metal component is a copper alloy material for resistance material, the copper alloy material for resistance material has an alloy composition, and the alloy composition contains 10.0% by mass or more and 14.0% by mass The following Mn, 1.0% by mass or more and 3.0% by mass or less Ni, the remainder is composed of Cu and unavoidable impurities. 如請求項14所述之金屬接合材料,其中,前述第一金屬部件為電阻材料用銅合金材料,該電阻材料用銅合金材料具有一合金組成,該合金組成含有6.0質量%以上且8.0質量%以下的Mn、2.0質量%以上且4.0質量%以下的Sn,剩餘部分由Cu及無法避免的雜質組成。The metal joining material according to claim 14, wherein the first metal component is a copper alloy material for resistance material, the copper alloy material for resistance material has an alloy composition, and the alloy composition contains 6.0% by mass or more and 8.0% by mass The following Mn, 2.0% by mass or more and 4.0% by mass or less of Sn, the remainder is composed of Cu and unavoidable impurities.
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