TW202128898A - Fluororesin-coated member - Google Patents

Fluororesin-coated member Download PDF

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TW202128898A
TW202128898A TW109141345A TW109141345A TW202128898A TW 202128898 A TW202128898 A TW 202128898A TW 109141345 A TW109141345 A TW 109141345A TW 109141345 A TW109141345 A TW 109141345A TW 202128898 A TW202128898 A TW 202128898A
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fluororesin
coating layer
melting point
coated member
coated
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松井良平
綿貫弘子
堀園拓磨
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日商東邦化成股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/30Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L27/00Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
    • C08L27/02Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
    • C08L27/12Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms

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  • Engineering & Computer Science (AREA)
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  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
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Abstract

The present invention provides a fluororesin-coated member which has a base material and a coating layer that covers at least a part of the base material, wherin the coating layer is formed of a fluororesin mixture containing at least a first fluororesin and a second fluororesin, the melting point of one fluororesin is higher than the melting point of the second fluororesin, the surface of the coating layer has a sea-island structure, and the island phase of the sea-island structure is composed mainly of the first fluororesin.

Description

被覆有氟樹脂之構件 Components coated with fluororesin

本發明係有關被覆有氟樹脂的構件,更詳言之,係有關具有由顯示撥水功能的氟樹脂形成之被覆層的構件。 The present invention relates to a member coated with a fluororesin, and more specifically, relates to a member having a coating layer formed of a fluororesin exhibiting a water-repellent function.

已知氟樹脂的表面具有撥水功能。 It is known that the surface of fluororesin has a water repellent function.

例如,專利文獻1係揭示經氟氣處理的聚四氟乙烯製水系清淨用輔助具(jig,又稱治具)。並且揭示聚四氟乙烯製水系清淨用輔助具的表面經氟氣處理的結果,具有使表面能量變小且排水優異之作用(參照專利文獻1之[摘要]、[0013]等)。 For example, Patent Document 1 discloses a fluorine gas-treated polytetrafluoroethylene water-based cleaning aid (jig, also called a jig). In addition, it is disclosed that the surface of the water-based cleaning aid made of polytetrafluoroethylene is treated with fluorine gas, which has the effect of reducing surface energy and excellent drainage (see Patent Document 1 [Abstract], [0013], etc.).

[先前技術文獻] [Prior Technical Literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本特開平7-142433號公報 [Patent Document 1] Japanese Patent Laid-Open No. 7-142433

由於專利文獻1揭示在和未處理的聚四氟乙烯製輔助具比較時,輔助具的排水性經由氟氣處理而改善,故雖然可認為經由氟氣處理而使輔助具的撥水功能有一定程度的改善,但是必須用相對較難操作的氟氣來另外處理成形品,有可能使製造步驟變複雜。 Since Patent Document 1 discloses that the drainage of the auxiliary device is improved by fluorine gas treatment when compared with the untreated PTFE auxiliary device, it can be considered that the water-repellent function of the auxiliary device is certain by the fluorine gas treatment. However, fluorine gas, which is relatively difficult to handle, must be used to separately treat the molded product, which may complicate the manufacturing steps.

另一方面,近年來要求具有撥水功能更高的表面。 On the other hand, in recent years, a surface with a higher water-repellent function is required.

通常,撥水功能的強度係以氟樹脂的表面和水之間的接觸角之大小來評估。因接觸角越大則疏水性越大,故顯示與水的接觸角大之表面係顯示有更高的撥水功能。因氟樹脂的表面和水之接觸角通常係80至115°,故必須更加提高其接觸角。 Generally, the strength of the water repellent function is evaluated by the size of the contact angle between the surface of the fluororesin and water. Since the greater the contact angle, the greater the hydrophobicity, so the surface showing a larger contact angle with water has a higher water repellent function. Since the contact angle between the surface of the fluororesin and water is usually 80 to 115°, the contact angle must be increased.

本發明的目的係提供一種具有優異的撥水功能之被覆有氟樹脂的構件,其無需特殊的改善撥水功能之處理步驟即可簡便地製造。該被覆有氟樹脂的構件因具有優異的撥水功能,故例如在和腐蝕性的藥液接觸時,可更提高耐腐蝕性,在和高溫的藥液接觸時,可更提高隔熱性。 The object of the present invention is to provide a fluororesin-coated member having an excellent water repellent function, which can be easily manufactured without special treatment steps for improving the water repellent function. Since the fluororesin-coated member has an excellent water repellent function, for example, when it comes into contact with a corrosive chemical solution, the corrosion resistance can be further improved, and when it comes into contact with a high temperature chemical solution, the thermal insulation can be further improved.

本發明人等深入探討的結果發現藉由將被覆有二種不同熔點的氟樹脂之混合物的構件在二種氟樹脂的熔點之間的溫度中煅燒,可得到和水的接觸角更大之被覆有氟樹脂的構件,該構件具有優異的撥水功能,遂完成本發明。 As a result of in-depth research, the inventors found that by calcining a member coated with a mixture of two fluororesins with different melting points at a temperature between the melting points of the two fluororesins, a coating with a larger contact angle with water can be obtained. There is a fluororesin component which has an excellent water repellent function, thus completing the present invention.

本說明書包含以下的實施型態。 This manual contains the following implementation types.

1.一種被覆有氟樹脂的構件,其具有基材、及被覆前述基材的至少一部分之被覆層,前述被覆層係以至少含有第一氟樹脂和第二氟樹脂的氟樹脂混合物形成,前述第一氟樹脂的熔點高於前述第二氟樹脂的熔點,前述 被覆層的表面具有海島結構,前述海島結構的島相係以前述第一氟樹脂作為主成分而構成。 1. A member coated with a fluororesin, comprising a substrate and a coating layer covering at least a part of the substrate, the coating layer being formed of a fluororesin mixture containing at least a first fluororesin and a second fluororesin, the aforementioned The melting point of the first fluororesin is higher than the melting point of the aforementioned second fluororesin, and the aforementioned The surface of the coating layer has a sea-island structure, and the island phase of the sea-island structure is composed of the first fluororesin as a main component.

2.一種被覆有氟樹脂的構件,其具有基材、及被覆前述基材的至少一部分之被覆層,前述被覆層係以至少含有第一氟樹脂和第二氟樹脂的氟樹脂混合物形成,前述被覆層表面和水滴之接觸角為120°以上。 2. A fluororesin-coated member comprising a substrate and a coating layer covering at least a part of the substrate, the coating layer being formed of a fluororesin mixture containing at least a first fluororesin and a second fluororesin, the aforementioned The contact angle between the surface of the coating layer and the water droplets is 120° or more.

3.一種被覆有氟樹脂的構件之製造方法,其具備:至少將第一氟樹脂和第二氟樹脂混合而得到氟樹脂混合物的混合步驟、在基材的至少一部分塗布前述氟樹脂混合物而得到塗布有氟樹脂之構件的塗布步驟、以及將前述塗布有氟樹脂的構件煅燒而得到被覆有氟樹脂之構件的煅燒步驟,其中,在前述煅燒步驟中,係在前述第一氟樹脂的熔點和前述第二氟樹脂的熔點之間的溫度中煅燒。 3. A method of manufacturing a fluororesin-coated member, comprising: a mixing step of mixing at least a first fluororesin and a second fluororesin to obtain a fluororesin mixture, and coating the aforementioned fluororesin mixture on at least a part of a substrate to obtain The coating step of the fluororesin-coated member and the firing step of calcining the fluororesin-coated member to obtain the fluororesin-coated member, wherein, in the firing step, the melting point of the first fluororesin and Calcined at a temperature between the melting point of the aforementioned second fluororesin.

本發明的實施型態之被覆有氟樹脂之構件係僅經被覆氟樹脂的步驟即具有優異的撥水功能。由於該被覆有氟樹脂的構件具有優異的撥水功能,故在例如和腐蝕性的藥液接觸時,可更提高耐腐蝕性,在和高溫的藥液接觸時,可更提高隔熱性。 The fluororesin-coated member of the embodiment of the present invention has an excellent water-repellent function only through the step of coating the fluororesin. Since the fluororesin-coated member has an excellent water-repellent function, for example, when it comes into contact with a corrosive chemical solution, the corrosion resistance can be further improved, and when it comes into contact with a high-temperature chemical solution, the thermal insulation can be further improved.

圖1A係顯示實施例4的被覆層之SEM圖像(表面形狀)。 FIG. 1A shows the SEM image (surface shape) of the coating layer of Example 4. FIG.

圖1B係顯示實施例4的被覆層之SEM圖像(氯的元素映射(elemental mapping))。 Figure 1B shows the SEM image of the coating layer of Example 4 (elemental mapping of chlorine).

圖2A係顯示實施例6的被覆層之SEM圖像(表面形狀)。 FIG. 2A shows the SEM image (surface shape) of the coating layer of Example 6. FIG.

圖2B係顯示實施例6的被覆層之SEM圖像(氯的元素映射)。 Fig. 2B shows the SEM image of the coating layer of Example 6 (elemental mapping of chlorine).

圖3係顯示在對實施例11的被覆有氟樹脂之構件、比較例4的被覆有氟樹脂之構件及比較例5的構件(基材(A2)本身)給予熱水(80℃)及水(20。℃)的熱履歷(熱循環)時之溫度變化。 Figure 3 shows that the fluororesin-coated member of Example 11, the fluororesin-coated member of Comparative Example 4, and the member (base material (A2) itself) of Comparative Example 5 were given hot water (80°C) and water (20. ℃) thermal history (thermal cycle) temperature change.

圖4係顯示浸泡在熱水(80℃)中的實施例11之被覆有氟樹脂的構件之照片。被覆層的表面形成有空氣層。 Figure 4 is a photograph showing the fluororesin-coated member of Example 11 immersed in hot water (80°C). An air layer is formed on the surface of the coating layer.

本發明的實施型態之被覆有氟樹脂的構件具有基材和被覆前述基材的至少一部分之被覆層,前述被覆層係以至少含有第一之氟樹脂(以下稱為「第一氟樹脂」)和第二之氟樹脂(以下稱為「第二氟樹脂」)之氟樹脂混合物形成。 The fluororesin-coated member of the embodiment of the present invention has a substrate and a coating layer covering at least a part of the substrate, and the coating layer contains at least the first fluororesin (hereinafter referred to as "first fluororesin"). ) And the second fluororesin (hereinafter referred to as the "second fluororesin") fluororesin mixture is formed.

本發明的實施型態中,「基材」係以可支撐被覆層,並且耐熱性及耐藥品性優異為佳,只要係可得到本發明的實施型態之被覆有氟樹脂的構件之基材即可,並無特別的限制。 In the embodiment of the present invention, the "substrate" is preferably one that can support the coating layer and is excellent in heat resistance and chemical resistance, as long as it is a substrate that can obtain the fluororesin-coated member of the embodiment of the present invention That is, there is no particular limitation.

該種基材可例示例如:鋁、不鏽鋼、鐵、其他的金屬或由數種該等金屬形成之合金等金屬、石英玻璃、陶瓷等無機化合物、聚醚醚酮(PEEK)、聚醚酮(PEK)等芳香族聚醚酮、聚醚碸(PES)、聚醯亞胺系樹脂、聚醯胺醯亞胺系樹脂等塑膠等,並以金屬及無機化合物為佳。因若使用金屬或無機化合物即可使耐熱性及耐久性高,此外,容易確保清潔性,故可適合用於作為半導體製造裝置等精密機器製造裝置之構件。只要可得到本發明的實 施型態之被覆有氟樹脂的構件,則基材的形狀、大小等並無特別的限制,可例示例如:板狀、棒狀、圓柱狀、圓錐狀、梳狀刀片狀等形狀,可配合被覆有氟樹脂的構件之用途而適當地選擇其形狀及大小。 Examples of such substrates include: aluminum, stainless steel, iron, other metals or alloys formed of several such metals, inorganic compounds such as quartz glass, ceramics, polyether ether ketone (PEEK), polyether ketone ( PEK) and other aromatic polyether ketones, polyether sulphur (PES), polyimide resins, polyimide resins and other plastics, etc., and metal and inorganic compounds are preferred. Since metal or inorganic compounds can be used to achieve high heat resistance and durability, and it is easy to ensure cleanliness, it can be suitably used as a component of precision machine manufacturing equipment such as semiconductor manufacturing equipment. As long as the practice of the present invention can be obtained There are no special restrictions on the shape and size of the base material for the fluororesin-coated member of the cast form. Examples are: plate, rod, cylinder, cone, comb blade shape, etc., which can be matched The shape and size of the fluororesin-coated member are appropriately selected for the purpose.

本發明的實施型態中,被覆層係被覆該基材的至少一部分。該被覆層係以至少含有第一氟樹脂和第二氟樹脂的氟樹脂混合物形成。 In an embodiment of the present invention, the coating layer covers at least a part of the substrate. The coating layer is formed of a fluororesin mixture containing at least a first fluororesin and a second fluororesin.

本發明的實施型態中,「第一氟樹脂」及「第二氟樹脂」係指通常可理解為氟樹脂的樹脂,且「第一氟樹脂」的熔點高於「第二氟樹脂」的熔點,只要可得到本發明的實施型態之被覆有氟樹脂的構件,即無特別的限制。又,「第一」和「第二」係為方便說明而附上者,並不限制此等之表達,意指其中任一種氟樹脂比其他氟樹脂有更高的熔點(二種氟樹脂的熔點不同,第一氟樹脂的熔點係和第二氟樹脂的熔點不同)。 In the embodiment of the present invention, "first fluororesin" and "second fluororesin" refer to resins that can be generally understood as fluororesin, and the melting point of "first fluororesin" is higher than that of "second fluororesin" The melting point is not particularly limited as long as the fluororesin-coated member of the embodiment of the present invention can be obtained. In addition, the terms "first" and "second" are attached for convenience of explanation and do not limit these expressions. It means that any one of the fluororesin has a higher melting point than the other fluororesin (the two kinds of fluororesin The melting point is different, the melting point of the first fluororesin is different from the melting point of the second fluororesin).

構成第一氟樹脂及第二氟樹脂的氟樹脂可例示例如:聚四氟乙烯(PTFE)(熔點:約327℃)、改質聚四氟乙烯(改質PTFE)(熔點:約327℃)、四氟乙烯/全氟烷基乙烯基醚共聚物(PFA)(熔點:約310℃)、四氟乙烯/六氟丙烯共聚物(FEP)(熔點:約260至275℃)、乙烯/四氟乙烯共聚物(ETFE)(熔點:約270℃)、乙烯/氯三氟乙烯共聚物(ECTFE)(熔點:約245℃)、聚氯三氟乙烯(PCTFE)(熔點:約210至220℃)、聚偏二氟乙烯(PVDF)(熔點:約156至178℃)及聚氟乙烯(PVF)(熔點:約203℃)等。 Examples of the fluororesin constituting the first fluororesin and the second fluororesin include: polytetrafluoroethylene (PTFE) (melting point: about 327°C), modified polytetrafluoroethylene (modified PTFE) (melting point: about 327°C) , Tetrafluoroethylene/perfluoroalkyl vinyl ether copolymer (PFA) (melting point: about 310°C), tetrafluoroethylene/hexafluoropropylene copolymer (FEP) (melting point: about 260 to 275°C), ethylene/tetrafluoroethylene Fluoroethylene copolymer (ETFE) (melting point: about 270°C), ethylene/chlorotrifluoroethylene copolymer (ECTFE) (melting point: about 245°C), polychlorotrifluoroethylene (PCTFE) (melting point: about 210 to 220°C) ), polyvinylidene fluoride (PVDF) (melting point: about 156 to 178°C) and polyvinyl fluoride (PVF) (melting point: about 203°C), etc.

本發明的實施型態中,氟樹脂係以具有粒子型態並具有500μm以下的平均粒徑為佳,以具有1至250μm的平均粒徑更佳,以具有3至50μm的平均粒徑又更佳,以具有5至25μm的平均粒徑特別佳。 In the embodiment of the present invention, the fluororesin is preferably in the form of particles and has an average particle diameter of 500 μm or less, preferably having an average particle diameter of 1 to 250 μm, and even more preferably having an average particle diameter of 3 to 50 μm. Preferably, it is particularly preferable to have an average particle size of 5 to 25 μm.

本說明書中,粒子的平均粒徑係指可利用雷射繞射散射式粒度分布裝置(日機裝製「MT3300II」)測定粒度分布而得之平均粒徑D50(表示由雷射繞射散射法求得的粒度分布中之累積值50%中的粒徑之中位徑)。 In this specification, the average particle size of the particles refers to the average particle size D 50 that can be obtained by measuring the particle size distribution using a laser diffraction scattering particle size distribution device (manufactured by Nikkiso "MT3300II"). The median diameter of the 50% of the cumulative value of the particle size distribution obtained by the method).

氟樹脂可使用一般的市售商品,該市售商品為可使用來作為被覆氟樹脂的塗料者。 As the fluororesin, general commercial products can be used, and the commercial products are those that can be used as coatings for coating the fluororesin.

第一氟樹脂的熔點和前述第二氟樹脂的熔點之差係以10℃以上為佳,以12至150℃更佳,以15至120℃又更佳。 The difference between the melting point of the first fluororesin and the melting point of the aforementioned second fluororesin is preferably 10°C or more, more preferably 12 to 150°C, and more preferably 15 to 120°C.

第一氟樹脂的熔點和前述第二氟樹脂的熔點之差為10℃以上時,有容易管控煅燒步驟的溫度、可提高生產性的有利效果。 When the difference between the melting point of the first fluororesin and the melting point of the aforementioned second fluororesin is 10° C. or more, there is an advantageous effect that the temperature of the firing step can be easily controlled, and productivity can be improved.

本發明的實施型態之被覆有氟樹脂之構件的被覆層,只要混合有第一氟樹脂和第二氟樹脂即可,其混合比雖然無特別限制,但以1:9至9:1(第一氟樹脂:第二氟樹脂)的質量比含有為佳,以2:8至9:1的質量比含有更佳。 The coating layer of the fluororesin-coated member of the embodiment of the present invention only needs to mix the first fluororesin and the second fluororesin. Although the mixing ratio is not particularly limited, it is from 1:9 to 9:1 ( The mass ratio of the first fluororesin: the second fluororesin) is preferably contained, and the mass ratio of 2:8 to 9:1 is more preferred.

被覆有氟樹脂的構件之被覆層若混合有第一氟樹脂和第二氟樹脂,則具有其撥水功能與各自單獨的撥水功能(接觸角的大小)相比,有所改善的有利效果。 If the coating layer of the fluororesin-coated member is mixed with the first fluororesin and the second fluororesin, the water-repellent function will be improved compared with the respective water-repellent function (the size of the contact angle). .

本發明的實施型態之被覆有氟樹脂的構件之被覆層的表面,係以具有相分離結構為佳。 The surface of the coating layer of the fluororesin-coated member of the embodiment of the present invention preferably has a phase separation structure.

本揭示中,相分離結構係指以前述第一氟樹脂作為主成分的第一相和以前述第二氟樹脂作為主成分的第二相不會有熔解而兩相完全混合之情形,而是兩相交雜存在的結構。第一相和第二相雖然均可熔解而形成光滑相,但以至少一方具有樹脂的粒狀形狀為佳。第一相係以含有50質量%以 上的上述第一氟樹脂為佳,以含有60質量%以上更佳,以含有70質量%以上又更佳,以含有80質量%以上再更佳。第二相係以含有50質量%以上的上述第二氟樹脂為佳,以含有60質量%以上更佳,以含有70質量%以上又更佳,以含有80質量%以上再更佳。 In the present disclosure, the phase-separated structure means that the first phase with the aforementioned first fluororesin as the main component and the second phase with the aforementioned second fluororesin as the main component will not melt and the two phases are completely mixed, but Two intersecting structures. Although both the first phase and the second phase can be melted to form a smooth phase, it is preferable that at least one of them has a granular shape of resin. The first phase contains more than 50% by mass The above-mentioned first fluororesin is preferable, more preferably 60% by mass or more, more preferably 70% by mass or more, and more preferably 80% by mass or more. The second phase system preferably contains 50% by mass or more of the above-mentioned second fluororesin, more preferably 60% by mass or more, more preferably 70% by mass or more, and even more preferably 80% by mass or more.

本發明的實施型態之被覆有氟樹脂的構件之被覆層的表面係以具有海島結構為佳。 The surface of the coating layer of the fluororesin-coated member of the embodiment of the present invention preferably has a sea-island structure.

本揭示中,海島結構係指由光滑且大致平坦的部分(稱為「海」)和明顯呈示凹凸起伏的部分(稱為「島」)之二種部分而成的結構。島部分的呈示凹凸起伏可為粒子的重疊。海部分和島部分的存在比不一定必須係海部分較多,島部分不一定必須被海部分包圍,島部分也可包圍海部分。光滑且平坦的海部分,例如可熔解而將島部分接著在基材,也可將被覆層固定在基材。 In the present disclosure, the sea-island structure refers to a structure composed of two parts: a smooth and substantially flat part (called "sea") and a part that clearly exhibits unevenness (called "island"). The presenting concave and convex of the island part can be the overlap of the particles. The existence ratio of the sea part and the island part does not necessarily have to be more than the sea part, the island part does not necessarily have to be surrounded by the sea part, and the island part can also surround the sea part. The smooth and flat sea part can be melted to adhere the island part to the base material, or the coating layer can be fixed to the base material.

海島結構的島相(島部分)較佳為以前述第一氟樹脂作為主成分而構成。 The island phase (island portion) of the sea-island structure is preferably composed of the aforementioned first fluororesin as a main component.

島相係以含有50質量%以上的上述第一氟樹脂為佳,以含有60質量%以上更佳,以含有70質量%以上又更佳,以含有80質量%以上再更佳。 The island phase system preferably contains 50% by mass or more of the above-mentioned first fluororesin, more preferably 60% by mass or more, more preferably 70% by mass or more, and more preferably 80% by mass or more.

海島結構的海相(海部分)較佳為以前述第二氟樹脂作為主成分而構成。 The sea phase (sea part) of the sea-island structure is preferably composed of the aforementioned second fluororesin as a main component.

海相係以含有50質量%以上的上述第二氟樹脂為佳,以含有60質量%以上更佳,以含有70質量%以上又更佳,以含有80質量%以上再更佳。 The marine system preferably contains 50% by mass or more of the above-mentioned second fluororesin, more preferably 60% by mass or more, more preferably 70% by mass or more, and even more preferably 80% by mass or more.

第一氟樹脂和第二氟樹脂的組合只要是上述的氟樹脂中有熔點差者的組合即無特別限制,可例示例如:聚四氟乙烯(PTFE)和四氟乙 烯/全氟烷基乙烯基醚共聚物(PFA)之組合、PTFE和聚氯三氟乙烯(PCTFE)的組合、PTFE和四氟乙烯/六氟丙烯共聚物(FEP)的組合、PTFE和乙烯/四氟乙烯共聚物(ETFE)的組合、改質聚四氟乙烯(改質PTFE)和PFA的組合、改質PTFE和PCTFE的組合、改質PTFE和FEP的組合、改質PTFE和ETFE的組合、PFA和PCTFE的組合、PFA和FEP的組合、PFA和ETFE的組合。 The combination of the first fluororesin and the second fluororesin is not particularly limited as long as it is a combination of those with a melting point difference among the above-mentioned fluororesins. Examples include: polytetrafluoroethylene (PTFE) and tetrafluoroethylene The combination of olefin/perfluoroalkyl vinyl ether copolymer (PFA), the combination of PTFE and polychlorotrifluoroethylene (PCTFE), the combination of PTFE and tetrafluoroethylene/hexafluoropropylene copolymer (FEP), the combination of PTFE and ethylene /The combination of tetrafluoroethylene copolymer (ETFE), the combination of modified polytetrafluoroethylene (modified PTFE) and PFA, the combination of modified PTFE and PCTFE, the combination of modified PTFE and FEP, the combination of modified PTFE and ETFE Combination, combination of PFA and PCTFE, combination of PFA and FEP, combination of PFA and ETFE.

第一氟樹脂和第二氟樹脂的組合係以PTFE和PFA的組合、PTFE和PTCFE的組合、改質PTFE和PFA的組合、改質PTFE和PTCFE的組合、PFA和PCTFE的組合為佳。 The combination of the first fluororesin and the second fluororesin is preferably a combination of PTFE and PFA, a combination of PTFE and PTCFE, a combination of modified PTFE and PFA, a combination of modified PTFE and PTCFE, and a combination of PFA and PCTFE.

本發明的實施型態之被覆有氟樹脂的構件之在被覆層表面的水滴之接觸角,係以120°以上為佳,以120°至170°更佳,以135°至170°又更佳,以150°至170°再更佳。 The contact angle of the water droplets on the surface of the coating layer of the fluororesin-coated member of the embodiment of the present invention is preferably 120° or more, more preferably 120° to 170°, and more preferably 135° to 170° , 150° to 170° is even better.

當在被覆層表面的水滴之接觸角為120°以上時,會因其撥水功能的改善而具有可減少持續和被覆表面接觸的液體之接觸狀態的有利效果。 When the contact angle of the water droplets on the surface of the coating layer is 120° or more, it has the advantageous effect of reducing the contact state of the liquid continuously in contact with the coating surface due to the improvement of its water repellent function.

所以,本發明的實施型態之被覆有氟樹脂的構件在使被覆層的表面和溶劑(例如,水系溶劑)接觸之用途中,隔熱性及耐溶劑性優異。此可認為係因被覆層對於水等溶劑(或媒體)的濕潤性低而抑制和溶劑之接觸,其結果使隔熱性及耐溶劑性優異。 Therefore, the fluororesin-coated member of the embodiment of the present invention has excellent heat insulation and solvent resistance in applications where the surface of the coating layer is brought into contact with a solvent (for example, an aqueous solvent). This is considered to be due to the low wettability of the coating layer with respect to solvents (or media) such as water, which inhibits contact with the solvent. As a result, the coating layer is excellent in heat insulation and solvent resistance.

本發明的實施型態中,提供被覆有氟樹脂的構件的製造方法,其具備 In an embodiment of the present invention, there is provided a method of manufacturing a member coated with a fluororesin, which includes

至少將第一氟樹脂和第二氟樹脂混合而得到氟樹脂混合物(或分散液、分散物)的混合步驟、 The mixing step of mixing at least the first fluororesin and the second fluororesin to obtain a fluororesin mixture (or dispersion or dispersion),

在基材的至少一部分塗布前述氟樹脂混合物而得到塗布有氟樹脂之構件的塗布步驟、及 The coating step of applying the aforementioned fluororesin mixture to at least a part of the substrate to obtain a fluororesin-coated member, and

將前述塗布有氟樹脂的構件煅燒而得到被覆有氟樹脂之構件的煅燒步驟,其中, The calcination step of calcining the aforementioned fluororesin-coated member to obtain the fluororesin-coated member, wherein:

前述煅燒步驟中,係在前述第一氟樹脂的熔點和前述第二氟樹脂的熔點之間的溫度中煅燒。 In the calcination step, calcination is performed at a temperature between the melting point of the first fluororesin and the melting point of the second fluororesin.

本發明的實施型態之被覆有氟樹脂的構件之製造方法係包含至少將第一氟樹脂和第二氟樹脂混合而得到氟樹脂混合物(或分散液、分散物)的混合步驟。 The manufacturing method of the fluororesin-coated member of the embodiment of the present invention includes a mixing step of mixing at least the first fluororesin and the second fluororesin to obtain a fluororesin mixture (or dispersion or dispersion).

第一氟樹脂及第二氟樹脂可參照上述的第一氟樹脂及第二氟樹脂之記載。 For the first fluororesin and the second fluororesin, refer to the description of the above-mentioned first fluororesin and the second fluororesin.

混合步驟中,混合方法及混合條件(混合溫度、混合速度、分散溶劑、混合濃度)等只要係可製造本發明的實施型態之被覆有氟樹脂的構件之範圍,即可適當地選擇。 In the mixing step, the mixing method and mixing conditions (mixing temperature, mixing speed, dispersing solvent, mixing concentration), etc., can be appropriately selected as long as the fluororesin-coated member of the embodiment of the present invention can be manufactured.

氟樹脂混合物只要混合有第一氟樹脂和第二氟樹脂即可,其混合比雖然無特別的限制,但以1:9至9:1(第一氟樹脂:第二氟樹脂)的質量比含有為佳,以2:8至9:1的質量比含有更佳。 The fluororesin mixture only needs to be mixed with the first fluororesin and the second fluororesin. Although the mixing ratio is not particularly limited, it should be in a mass ratio of 1:9 to 9:1 (first fluororesin: second fluororesin) The content is better, and the quality ratio of 2:8 to 9:1 is better.

被覆有氟樹脂的構件之被覆層若混合有第一氟樹脂和第二氟樹脂,則具有其撥水功能與各自單獨的撥水功能(接觸角的大小)相比,有所改善的有利效果。 If the coating layer of the fluororesin-coated member is mixed with the first fluororesin and the second fluororesin, the water-repellent function will be improved compared with the respective water-repellent function (the size of the contact angle). .

氟樹脂混合物中的第一氟樹脂和第二氟樹脂的熔點之差係以10℃以上為佳,以12至150℃更佳,以15至120℃又更佳。 The difference between the melting points of the first fluororesin and the second fluororesin in the fluororesin mixture is preferably 10°C or more, more preferably 12 to 150°C, and more preferably 15 to 120°C.

第一氟樹脂的熔點和前述第二氟樹脂的熔點之差為10℃以上時,有使煅燒步驟的溫度容易管控、可改善生產性的有利效果。 When the difference between the melting point of the first fluororesin and the melting point of the second fluororesin is 10° C. or more, the temperature of the calcination step can be easily controlled and productivity can be improved.

本發明的實施型態之被覆有氟樹脂的構件之製造方法包含在基材的至少一部分塗布前述氟樹脂混合物而得到塗布有氟樹脂之構件的塗布步驟。 The manufacturing method of the fluororesin-coated member of the embodiment of the present invention includes a coating step of applying the aforementioned fluororesin mixture to at least a part of the base material to obtain the fluororesin-coated member.

關於基材,可參照上述的基材相關之記載。 Regarding the substrate, refer to the above-mentioned description of the substrate.

塗布步驟中,塗布方法及塗布條件可適當地選擇粉體塗覆、噴塗覆等中之通常習知的條件。 In the coating step, the coating method and coating conditions can be appropriately selected from commonly known conditions in powder coating, spray coating, and the like.

本發明的實施型態之被覆有氟樹脂的構件之製造方法包含將前述塗布有氟樹脂之構件煅燒而得到被覆有氟樹脂之構件的煅燒步驟,前述煅燒步驟中包含在前述第一氟樹脂的熔點和前述第二氟樹脂的熔點之間的溫度中煅燒。 The method of manufacturing the fluororesin-coated member of the embodiment of the present invention includes a calcination step of calcining the fluororesin-coated member to obtain the fluororesin-coated member. The calcination step includes the first fluororesin-coated member. It is calcined at a temperature between the melting point and the melting point of the aforementioned second fluororesin.

煅燒步驟中,煅燒方法及煅燒條件可適當地選擇通常習知的條件。 In the calcination step, the calcination method and calcination conditions can be appropriately selected from conventionally known conditions.

煅燒溫度係前述第一氟樹脂的熔點和前述第二氟樹脂的熔點之間的溫度。據推測,可認為只要在此溫度範圍中進行煅燒,雖然第二氟樹脂即會熔融,但第一氟樹脂不會熔融,故儘管形成被覆層,被覆層的表面也可較佳地形成凹凸。 The firing temperature is a temperature between the melting point of the first fluororesin and the melting point of the second fluororesin. It is presumed that as long as the firing is performed in this temperature range, although the second fluororesin will melt, the first fluororesin will not melt. Therefore, despite the formation of the coating layer, the surface of the coating layer can preferably be uneven.

由於在被覆層的表面形成適度的凹凸,因此不需要特別的改善撥水功能之處理步驟即可容易地製造本發明的實施型態之被覆有氟樹脂的構件,儘管如此卻可表現優異的撥水功能,且可顯示優異的隔熱性、耐溶劑性等。又,雖然可認為本發明的實施型態之構件係因上述的理由而具有優異的效果,但本發明並不受限於此種理由。 Since moderate unevenness is formed on the surface of the coating layer, the fluororesin-coated member of the embodiment of the present invention can be easily manufactured without special processing steps to improve the water repellency function. Nevertheless, it can exhibit excellent repellency. Water function, and can show excellent heat insulation, solvent resistance, etc. In addition, although it is considered that the members of the embodiment of the present invention have excellent effects for the above-mentioned reasons, the present invention is not limited to such reasons.

本發明的實施型態之被覆有氟樹脂的構件可適合用於以往至今使用了被覆有氟樹脂之構件的用途。此外,本發明的實施型態之被覆有氟樹脂的構件,可適宜使用在需要耐熱性及耐溶劑性的用途上。 The fluororesin-coated member of the embodiment of the present invention can be suitably used for applications where a fluororesin-coated member has been used so far. In addition, the fluororesin-coated member of the embodiment of the present invention can be suitably used for applications requiring heat resistance and solvent resistance.

本發明的實施型態之被覆有氟樹脂的構件可適合用於例如半導體製造裝置、液晶製造裝置、太陽能電池製造裝置、醫藥品製造裝置及化學藥品製造裝置等。 The fluororesin-coated member of the embodiment of the present invention can be suitably used in, for example, semiconductor manufacturing equipment, liquid crystal manufacturing equipment, solar cell manufacturing equipment, pharmaceutical manufacturing equipment, chemical medicine manufacturing equipment, and the like.

[實施例] [Example]

以下,雖然係以實施例及比較例具體且詳細地說明本發明,但此等實施例僅係本發明的一型態,本發明並非侷限於此等例。 Hereinafter, although examples and comparative examples are used to specifically describe the present invention in detail, these examples are only one form of the present invention, and the present invention is not limited to these examples.

以下呈示本實施例中使用的成分。 The ingredients used in this example are shown below.

(A)基材 (A) Substrate

(A1)厚度2mm的鋁板(100mm×50mm)(亦稱「(A1)鋁基材」) (A1) 2mm thick aluminum plate (100mm×50mm) (also known as "(A1) aluminum substrate")

(A2)準備具備有在軸向一側的端部之中心所設之孔(Φ2mm×50mm)的圓柱狀SUS 304(Φ10mm×100mm)(亦稱「(A2)SUS基材」) (A2) Prepare cylindrical SUS 304 (Φ10mm×100mm) (also known as "(A2)SUS base material") with a hole (Φ2mm×50mm) provided in the center of the end on one side in the axial direction

(B)氟樹脂 (B) Fluorine resin

(B1)四氟乙烯/全氟烷基乙烯基醚共聚物(大金(Daikin)工業股份有限公司製造的Neoflon(註冊商標)PFA ACX-34(商品名)),熔點310℃,粒徑D50 25μm(「亦稱(B1)PFA」) (B1) Tetrafluoroethylene/perfluoroalkyl vinyl ether copolymer (Neoflon (registered trademark) PFA ACX-34 (trade name) manufactured by Daikin Industrial Co., Ltd.), melting point 310°C, particle size D 50 25μm ("also known as (B1)PFA")

(B2)聚氯三氟乙烯(大金工業股份有限公司製造的Neoflon(註冊商標)PCTFE M-300H(商品名),熔點220℃,粒徑D50 9μm(「亦稱(B2)PCTFE」) (B2) Polychlorotrifluoroethylene (Neoflon (registered trademark) PCTFE M-300H (trade name) manufactured by Daikin Industrial Co., Ltd., melting point 220°C, particle size D 50 9μm ("also known as (B2)PCTFE")

(B3)聚四氟乙烯(大金工業股份有限公司製造的Polyflon(註冊商標)PTFE Lubron(註冊商標)L-5(商品名)),熔點327℃,粒徑D50 6μm(「亦稱(B3)PTFE」) (B3) Polytetrafluoroethylene (Polyflon (registered trademark) PTFE Lubron (registered trademark) L-5 (trade name) manufactured by Daikin Industrial Co., Ltd.), melting point 327°C, particle size D 50 6μm ("also known as ( B3)PTFE'')

粒子的平均粒徑(D50)之測定 Determination of the average particle size (D 50 ) of particles

氟樹脂的平均粒徑(D50)係利用雷射繞射散射式粒度分布裝置(日機裝製「MT3300II」)測定粒子的粒度分布,而得到粒子的平均粒徑(D50)(表示由雷射繞射散射法求得的粒度分布中之累積值50%的粒徑之中位徑)。各粒子的平均粒徑(D50)係如上述。 The average particle size (D 50 ) of the fluororesin is measured by using a laser diffraction scattering particle size distribution device ("MT3300II" manufactured by Nikkiso) to obtain the average particle size (D 50 ) of the particles (indicated by The median diameter of 50% of the cumulative value of the particle size distribution obtained by the laser diffraction scattering method). The average particle diameter (D 50 ) of each particle is as described above.

實施例1的被覆有氟樹脂之構件的製造 Manufacture of the fluororesin-coated member of Example 1

將(B1)PFA和(B2)PCTFE以B1/B2=90/10(質量比)之比例加入乙二醇單丁基醚中並混合,製作成分散液。將該分散液噴塗在(A1)鋁基材,在(A1)鋁基材上獲得氟樹脂粉末的被覆層。在280℃的烤箱中將此被覆層煅燒60分鐘,獲得實施例1的被覆有氟樹脂之構件。由於被覆層係呈現海島結構,雖然其厚度不均勻,但約在25至50μm的範圍內。 (B1) PFA and (B2) PCTFE are added to ethylene glycol monobutyl ether at a ratio of B1/B2=90/10 (mass ratio) and mixed to prepare a dispersion. This dispersion liquid was sprayed on the (A1) aluminum substrate to obtain a coating layer of fluororesin powder on the (A1) aluminum substrate. The coating layer was fired in an oven at 280°C for 60 minutes to obtain the fluororesin-coated member of Example 1. Since the coating layer has a sea-island structure, although its thickness is not uniform, it is approximately in the range of 25 to 50 μm.

實施例2至9的被覆有氟樹脂之構件的製造 Manufacture of fluororesin-coated components of Examples 2-9

除了以表1所述之質量比使用表1所述之氟樹脂以外,使用和實施例1所述之方法同樣的方法,獲得實施例2至9的被覆有氟樹脂之構件。 Except that the fluororesin described in Table 1 was used at the mass ratio described in Table 1, the same method as that described in Example 1 was used to obtain the fluororesin-coated members of Examples 2 to 9.

實施例10的被覆有氟樹脂之構件的製造 Manufacture of the fluororesin-coated member of Example 10

除了使用(B3)PTFE取代(B1)PFA、將煅燒溫度從280℃變更為320℃以外,使用和實施例5所述之方法同樣的方法,製得實施例10的被覆有氟樹脂之構件。 Except that (B3) PTFE was used instead of (B1) PFA, and the calcination temperature was changed from 280°C to 320°C, the same method as that described in Example 5 was used to produce a fluororesin-coated member of Example 10.

比較例1的被覆有氟樹脂之構件的製造 Manufacture of the fluororesin-coated component of Comparative Example 1

除了不使用(B2)PCTFE並將煅燒溫度從280℃變更為320℃以外,使用和實施例1所述之方法同樣的方法,製得比較例1的被覆有氟樹脂之構件。 Except that (B2) PCTFE was not used and the calcination temperature was changed from 280°C to 320°C, the same method as that described in Example 1 was used to produce a fluororesin-coated member of Comparative Example 1.

比較例2的被覆有氟樹脂之構件的製造 Manufacture of the fluororesin-coated member of Comparative Example 2

除了不使用(B1)PFA以外,使用和實施例1所述之方法同樣的方法,製得比較例2的被覆有氟樹脂之構件。 Except that (B1) PFA was not used, the same method as that described in Example 1 was used to produce a fluororesin-coated member of Comparative Example 2.

比較例3的被覆有氟樹脂之構件的製造 Manufacture of the fluororesin-coated component of Comparative Example 3

除了將煅燒溫度從280℃變更為320℃以外,使用和實施例5所述之方法同樣的方法,製得比較例3的被覆有氟樹脂之構件。 Except that the calcination temperature was changed from 280°C to 320°C, the same method as that described in Example 5 was used to produce a fluororesin-coated member of Comparative Example 3.

接觸角的測定方法 Measuring method of contact angle

利用協和界面科學股份有限公司製的接觸角計「FACE CA-DT」(商品名),依據JIS R 3257進行測定。具體上,利用分注器(dispenser)將一定量的滴液(純水)滴在水平放置的試料表面上,求得「連結水滴接觸的試料表面之任一端點和水滴的頂點之直線」與「試料表面」之間的角度。將其設為2倍而計算出接觸角θ(θ/2法)。 The measurement was performed using a contact angle meter "FACE CA-DT" (trade name) manufactured by Kyowa Interface Science Co., Ltd. in accordance with JIS R 3257. Specifically, use a dispenser to drop a certain amount of liquid (pure water) on the surface of the sample placed horizontally, and obtain the "straight line connecting any end point of the sample surface contacted by the water droplet and the apex of the water droplet" and The angle between the "sample surface". The contact angle θ is calculated by setting it to twice (theta/2 method).

被覆層的表面形狀觀察及元素分析 Surface shape observation and element analysis of the coating

利用日立High-Technologies股份有限公司製造的附能量分散型X射線(EDX)分析裝置的掃描電子顯微鏡(SEM)「FrexSEM 1000」(商品名),對上述的實施例4及6的被覆有氟樹脂之構件進行被覆層的表面形狀觀察及元素分析。 Using a scanning electron microscope (SEM) "FrexSEM 1000" (trade name) with an energy dispersive X-ray (EDX) analyzer manufactured by Hitachi High-Technologies Co., Ltd., the above-mentioned Examples 4 and 6 were coated with fluororesin Observe the surface shape of the coating layer and analyze the elements of the components.

以加速電壓15.0kV、500倍進行表面形狀觀察之後,進行氯的元素映射。將實施例4的被覆層之表面形狀的圖像呈示於圖1A中,氯的元素映 射的圖像呈示於圖1B中。將實施例6的被覆層之表面形狀的圖像呈示於圖2A中,氯的元素映射的圖像呈示於圖2B中。 After observing the surface shape at an acceleration voltage of 15.0 kV and 500 times, the elemental mapping of chlorine was performed. The image of the surface shape of the coating layer of Example 4 is shown in FIG. 1A, the elemental reflection of chlorine The shot image is shown in Figure 1B. The image of the surface shape of the coating layer of Example 6 is shown in FIG. 2A, and the image of the elemental mapping of chlorine is shown in FIG. 2B.

隔熱性 Thermal insulation

使用(A2)SUS基材作為基材。 (A2) SUS substrate was used as the substrate.

將實施例5的被覆層(膜厚150μm)施予在基材的整個表面,獲得實施例11的被覆有氟樹脂之構件。 The coating layer (film thickness of 150 μm) of Example 5 was applied to the entire surface of the substrate to obtain a fluororesin-coated member of Example 11.

將比較例2的被覆層(膜厚150μm)施予在基材的整個表面,獲得比較例4的被覆有氟樹脂之構件。 The coating layer (film thickness of 150 μm) of Comparative Example 2 was applied to the entire surface of the substrate to obtain a fluororesin-coated member of Comparative Example 4.

將基材本身作為比較例5的構件。 The base material itself was used as a member of Comparative Example 5.

將熱電偶插入各構件的(A2)SUS基材之在軸向一側的端部所設之孔中,在熱水(80℃)中將軸向另一側的端部80mm浸泡15秒。然後,將軸向另一側的端部80mm浸泡在冷水(20℃)中15秒。重複此熱循環5次。 Insert the thermocouple into the hole provided at the end of the SUS substrate of each component (A2) on one side in the axial direction, and soak the end 80 mm on the other side of the axial direction in hot water (80°C) for 15 seconds. Then, the end portion 80 mm on the other side of the axial direction was immersed in cold water (20° C.) for 15 seconds. Repeat this thermal cycle 5 times.

將結果呈示於圖3中。由於實施例11的被覆有氟樹脂之構件係升溫速度及降溫速度的兩者均小,故可知隔熱效果高。此外,由於構件的溫度變化小,故可知被覆有氟樹脂的構件之由熱引起的應力較小。 The results are shown in Figure 3. Since the fluororesin-coated member of Example 11 has a low temperature increase rate and a low temperature decrease rate, it can be seen that the heat insulation effect is high. In addition, since the temperature change of the member is small, it can be seen that the fluororesin-coated member has less heat-induced stress.

又,將浸泡在熱水(80℃)中的實施例11之被覆有氟樹脂的構件的照片呈示於圖4中。可看出在被覆層的表面形成有空氣層。可期望此空氣層的形成亦有助於隔熱效果。 In addition, a photograph of the fluororesin-coated member of Example 11 immersed in hot water (80°C) is shown in FIG. 4. It can be seen that an air layer is formed on the surface of the coating layer. It is expected that the formation of this air layer will also contribute to the thermal insulation effect.

[表1]

Figure 109141345-A0202-12-0015-1
[Table 1]
Figure 109141345-A0202-12-0015-1

[表2]

Figure 109141345-A0202-12-0015-2
[Table 2]
Figure 109141345-A0202-12-0015-2

實施例1至11的被覆有氟樹脂之構件係:(i)具有基材和被覆前述基材的至少一部分之被覆層,前述被覆層係以至少含有第一氟樹脂和第二氟樹脂的氟樹脂混合物形成,前述第一氟樹脂的熔點高於前述第二氟樹脂的熔點,前述被覆層的表面具有海島結構,前述海島結構的島相係以前述第一氟樹脂作為主成分而構成;或(ii)具有基材和被覆前述基材的至少一部分之被覆層,前述被覆層係以至少含有第一氟樹脂和第二氟樹脂的氟樹脂混合物形成,前述被覆層表面的水滴之接觸角為120°以上。因此,實施例1至11的被覆有氟樹脂之構件的撥水性優異,並且隔熱性亦優異。 The fluororesin-coated members of Examples 1 to 11 are: (i) having a base material and a coating layer covering at least a part of the aforementioned base material, and the aforementioned coating layer is made of fluorine resin containing at least a first fluororesin and a second fluororesin. A resin mixture is formed, the melting point of the first fluororesin is higher than the melting point of the second fluororesin, the surface of the coating layer has a sea-island structure, and the island phase of the sea-island structure is composed of the first fluororesin as a main component; or (ii) Having a substrate and a coating layer covering at least a part of the substrate, the coating layer is formed of a fluororesin mixture containing at least a first fluororesin and a second fluororesin, and the contact angle of the water droplets on the surface of the coating is Above 120°. Therefore, the fluororesin-coated members of Examples 1 to 11 have excellent water repellency and excellent heat insulation properties.

相對於此,比較例1至4的被覆有氟樹脂之構件,由於不能滿足上述的(i)或(ii),故撥水性或隔熱性未必足夠。 In contrast, the fluororesin-coated members of Comparative Examples 1 to 4 did not satisfy the above-mentioned (i) or (ii), so the water repellency and heat insulation were not necessarily sufficient.

[產業上應用的可能性] [Possibility of industrial application]

本發明的實施型態之被覆有氟樹脂的構件僅通過被覆氟樹脂的步驟,即具有優異的撥水功能。該被覆有氟樹脂的構件因具有優異的撥水功能,故在例如和腐蝕性的藥液接觸時,可更提高耐腐蝕性,在和高溫的藥液接觸時,可更提高隔熱性。 The fluororesin-coated member of the embodiment of the present invention has an excellent water-repellent function only through the step of coating the fluororesin. Since the fluororesin-coated member has an excellent water repellent function, for example, when it comes in contact with a corrosive chemical solution, it can further improve the corrosion resistance, and when it comes into contact with a high-temperature chemical solution, it can further improve the thermal insulation.

相關申請案 Related applications

本申請案根據巴黎公約第4條主張2019年12月6日在日本提出的申請案編號2019-221571作為基礎申請案之優先權。該基礎申請案的內容係藉由參照而引用入本說明書中。 In accordance with Article 4 of the Paris Convention, this application claims the priority of the application number 2019-221571 filed in Japan on December 6, 2019 as the basic application. The content of the basic application is incorporated into this specification by reference.

Claims (6)

一種被覆有氟樹脂的構件,其具有基材、及被覆前述基材的至少一部分之被覆層, A member coated with a fluororesin, which has a base material and a coating layer covering at least a part of the aforementioned base material, 前述被覆層係以至少含有第一氟樹脂和第二氟樹脂的氟樹脂混合物形成, The aforementioned coating layer is formed of a fluororesin mixture containing at least a first fluororesin and a second fluororesin, 前述第一氟樹脂的熔點高於前述第二氟樹脂的熔點, The melting point of the first fluororesin is higher than the melting point of the second fluororesin, 前述被覆層的表面具有海島結構, The surface of the aforementioned coating layer has a sea-island structure, 前述海島結構的島相係以前述第一氟樹脂作為主成分而構成。 The island phase of the sea-island structure is composed of the first fluororesin as a main component. 如請求項1所述之被覆有氟樹脂的構件,其中,前述第一氟樹脂的熔點和前述第二氟樹脂的熔點之差為10℃以上。 The fluororesin-coated member according to claim 1, wherein the difference between the melting point of the first fluororesin and the melting point of the second fluororesin is 10°C or more. 一種被覆有氟樹脂的構件,其具有基材、及被覆前述基材的至少一部分之被覆層, A member coated with a fluororesin, which has a base material and a coating layer covering at least a part of the aforementioned base material, 前述被覆層係以至少含有第一氟樹脂和第二氟樹脂的氟樹脂混合物形成, The aforementioned coating layer is formed of a fluororesin mixture containing at least a first fluororesin and a second fluororesin, 前述被覆層表面的水滴之接觸角為120°以上。 The contact angle of the water droplets on the surface of the coating layer is 120° or more. 如請求項1至3中任一項所述之被覆有氟樹脂的構件,其中,前述氟樹脂混合物中的前述第一氟樹脂和前述第二氟樹脂之混合比係1:9至9:1。 The fluororesin-coated member according to any one of claims 1 to 3, wherein the mixing ratio of the first fluororesin and the second fluororesin in the fluororesin mixture is 1:9 to 9:1 . 一種半導體製造裝置、液晶製造裝置、太陽能電池製造裝置、醫藥品製造裝置或化學藥品製造裝置,其含有請求項1至4中任一項所述之被覆有氟樹脂的構件。 A semiconductor manufacturing device, a liquid crystal manufacturing device, a solar cell manufacturing device, a medical product manufacturing device, or a chemical drug manufacturing device, which contains the fluororesin-coated member described in any one of claims 1 to 4. 一種被覆有氟樹脂的構件之製造方法,其具備: A method for manufacturing a fluororesin-coated component, which includes: 至少將第一氟樹脂和第二氟樹脂混合而得到氟樹脂混合物的混合步驟、 The mixing step of mixing at least the first fluororesin and the second fluororesin to obtain a fluororesin mixture, 在基材的至少一部分塗布前述氟樹脂混合物而得到塗布有氟樹脂的構件之塗布步驟、以及 A coating step of applying the aforementioned fluororesin mixture to at least a part of the substrate to obtain a fluororesin-coated member, and 將前述塗布有氟樹脂的構件煅燒而得到被覆有氟樹脂的構件之煅燒步驟,其中, The calcination step of calcining the aforementioned fluororesin-coated member to obtain the fluororesin-coated member, wherein: 在前述煅燒步驟中,係在前述第一氟樹脂的熔點和前述第二氟樹脂的熔點之間的溫度中煅燒。 In the calcination step, calcination is performed at a temperature between the melting point of the first fluororesin and the melting point of the second fluororesin.
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