TW202126826A - Lead-free and copper-free tin alloy and tin balls for ball grid array package - Google Patents

Lead-free and copper-free tin alloy and tin balls for ball grid array package Download PDF

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TW202126826A
TW202126826A TW109146549A TW109146549A TW202126826A TW 202126826 A TW202126826 A TW 202126826A TW 109146549 A TW109146549 A TW 109146549A TW 109146549 A TW109146549 A TW 109146549A TW 202126826 A TW202126826 A TW 202126826A
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free
lead
copper
test
tin alloy
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TWI762119B (en
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張峻瑜
李志祥
文和 李
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昇貿科技股份有限公司
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Abstract

A lead-free and copper-free tin alloy contains 3.0 to 5.0 wt% silver, 0.01 to 3.5 wt% bismuth, 0.01 to 3.5 wt% antimony, 0.005 to 0.1 wt% nickel, 0.005~0.02 wt% germanium and the remaining amount of tin. The lead-free and copper-free tin alloy of the invention can be made into tin balls for ball grid array package. The solder bump formed by the tin ball can withstand the thermal stress caused by the temperature change of the electronic component itself or the environment, and at the same time has the ability to withstand high mechanical shock.

Description

無鉛無銅錫合金與用於球柵陣列封裝的錫球Lead-free copper-free tin alloy and tin balls for ball grid array packaging

本發明是有關於一種錫合金與由該錫合金所製成之用於球柵陣列封裝的錫球,特別是指一種無鉛無銅錫合金與由該無鉛無銅錫合金所製成之用於球柵陣列封裝的錫球。The invention relates to a tin alloy and a tin ball made of the tin alloy for ball grid array packaging, in particular to a lead-free copper-free tin alloy and a lead-free copper-free tin alloy made of the tin alloy for use in Solder balls for ball grid array packaging.

隨著半導體元件之I/O數(input/output)的提高,封裝技術由原本只能使用晶片周邊進行封裝的打線結合(wire bonding)演變成至今能使用晶片底部表面進行封裝的球柵陣列(ball grid array;簡稱BGA)封裝,其技術是對半導體元件進行IC焊墊重新佈局(I/O distribution),將焊墊分佈在半導體元件底部從而提高I/O密度。With the increase in the number of I/O (input/output) of semiconductor components, the packaging technology has evolved from wire bonding, which originally only used the periphery of the chip for packaging, into a ball grid array ( Ball grid array; referred to as BGA) package, its technology is to re-layout the IC solder pads (I/O distribution) of the semiconductor components, and the solder pads are distributed on the bottom of the semiconductor components to increase the I/O density.

球柵陣列封裝的導通方式可分為金屬凸塊、導電膠及導電膜等,其中又以屬於金屬凸塊技術之焊錫凸塊(solder bump)為主。而球柵陣列封裝又可分為非晶圓級封裝及晶圓級封裝。The conduction mode of the ball grid array package can be divided into metal bumps, conductive adhesives, and conductive films. Among them, solder bumps, which belong to the metal bump technology, are the main ones. The ball grid array packaging can be divided into non-wafer-level packaging and wafer-level packaging.

非晶圓級封裝是指矽晶片透過打線或覆晶(flip chip)的方式焊接在有機基板後,在矽晶片及有機基板之間灌入底部填膠(underfill),然後在有機基板的另一端焊接上錫球形成焊錫凸塊,以形成一電子元件。電子元件將在後續製程中與電路板焊接形成一構裝好的電路板。因為矽晶片、有機基板與電路板之間的膨脹係數差距過大,當構裝好的電路板本身或環境出現溫度變化時,由熱膨脹係數不匹配(mismatch in coefficient of thermal expansion)所帶來的熱應力會造成電子元件與電路板之間的焊點(焊錫凸塊)出現損壞,而有機基板和矽晶片之間的焊點因有底部填膠而通常不會出現損壞。Non-wafer-level packaging means that after the silicon chip is soldered to the organic substrate by wire bonding or flip chip, an underfill is poured between the silicon chip and the organic substrate, and then the other end of the organic substrate The solder balls are soldered to form solder bumps to form an electronic component. The electronic components will be welded with the circuit board in the subsequent manufacturing process to form a assembled circuit board. Because the difference in expansion coefficient between silicon chip, organic substrate and circuit board is too large, when the temperature of the assembled circuit board itself or the environment changes, the heat caused by the mismatch in coefficient of thermal expansion (mismatch in coefficient of thermal expansion) Stress can cause damage to the solder joints (solder bumps) between the electronic components and the circuit board, and the solder joints between the organic substrate and the silicon chip are usually not damaged due to underfill.

晶圓級封裝是指直接在矽晶圓上進行大部分或是全部的封裝測試程序後,再進行切割製成單顆晶片,晶片不通過有機基板,而是直接在晶片上進行IC焊墊重新佈局,然後焊接上錫球,以形成焊錫凸塊。由於封裝後的晶片尺吋與裸晶片幾乎一致,故稱為晶圓級晶片尺吋封裝(wafer level chip scale package;簡稱WLCSP)。然而,由於矽晶片和電路板的膨脹係數差距過大,作為兩者間之連接體的焊點(焊錫凸塊)需能承受電子元件本身或環境出現溫度變化時所帶來的熱應力,此外,因晶圓級封裝多運用在有輕薄短小的行動裝置上,故焊點(焊錫凸塊)也需具有承受高機械衝擊的能力。Wafer-level packaging means that most or all of the packaging and testing procedures are directly performed on the silicon wafer, and then diced into a single chip. The chip does not pass through the organic substrate, but directly performs IC pad renewal on the chip. Layout, and then solder balls to form solder bumps. Since the packaged chip size is almost the same as the bare chip, it is called a wafer level chip scale package (WLCSP for short). However, due to the large gap between the expansion coefficients of the silicon chip and the circuit board, the solder joints (solder bumps) that connect the two need to be able to withstand the thermal stress caused by the electronic component itself or when the temperature changes in the environment. In addition, Since wafer-level packaging is mostly used in light, thin and short mobile devices, solder joints (solder bumps) also need to be able to withstand high mechanical shocks.

因此,如何找到一種能製成用於球柵陣列(BGA)封裝之錫球的錫合金,且由該錫球所製得的焊錫凸塊能承受電子元件本身或環境出現溫度變化時所帶來的熱應力,以及同時具有承受高機械衝擊的能力,成為目前致力研究的目標。Therefore, how to find a tin alloy that can be made into the solder balls for ball grid array (BGA) packaging, and the solder bumps made from the solder balls can withstand the temperature changes of the electronic component itself or the environment The thermal stress and the ability to withstand high mechanical shock at the same time have become the target of current research.

因此,本發明之第一目的,即在提供一種無鉛無銅錫合金。該無鉛無銅錫合金能製成用於球柵陣列(BGA)封裝之錫球,且由該錫球所形成的焊錫凸塊能承受電子元件本身或環境出現溫度變化時所帶來的熱應力,以及同時具有承受高機械衝擊的能力。Therefore, the first object of the present invention is to provide a lead-free copper-free tin alloy. The lead-free copper-free tin alloy can be made into solder balls for ball grid array (BGA) packaging, and the solder bumps formed by the solder balls can withstand the thermal stress caused by the temperature changes of the electronic components themselves or the environment , And at the same time have the ability to withstand high mechanical shocks.

於是,本發明無鉛無銅錫合金,以該無鉛無銅錫合金的總重為100 wt%計,包含: 3.0~5.0 wt%的銀; 0.01~3.5 wt%的鉍; 0.01~3.5 wt%的銻; 0.005~0.1 wt%的鎳; 0.005~0.02 wt%的鍺;及 餘量的錫。Therefore, the lead-free copper-free tin alloy of the present invention, based on the total weight of the lead-free copper-free tin alloy being 100 wt%, contains: 3.0~5.0 wt% silver; 0.01~3.5 wt% bismuth; 0.01~3.5 wt% antimony; 0.005~0.1 wt% nickel; 0.005~0.02 wt% germanium; and The balance of tin.

因此,本發明之第二目的,即在提供一種用於球柵陣列封裝的錫球。由該錫球所形成的焊錫凸塊能承受電子元件本身或環境出現溫度變化時所帶來的熱應力,以及同時具有承受高機械衝擊的能力。Therefore, the second objective of the present invention is to provide a solder ball for ball grid array packaging. The solder bump formed by the solder ball can withstand the thermal stress caused by the temperature change of the electronic component itself or the environment, and at the same time has the ability to withstand high mechanical shock.

於是,本發明用於球柵陣列封裝的錫球,是由前述的無鉛無銅錫合金所製成。Therefore, the solder balls used in the ball grid array package of the present invention are made of the aforementioned lead-free and copper-free tin alloy.

本發明之功效在於:由於本發明的無鉛無銅錫合金同時包含3.0~5.0 wt%的銀、0.01~3.5 wt%的鉍、0.01~3.5 wt%的銻、0.005~0.1 wt%的鎳、0.005~0.02 wt%的鍺及餘量的錫。因此,本發明的無鉛無銅錫合金能製成用於球柵陣列(BGA)封裝之錫球,且由該錫球所形成之焊錫凸塊能承受電子元件本身或環境出現溫度變化時所帶來的熱應力,以及同時具有承受高機械衝擊的能力。The effect of the present invention is: because the lead-free copper-free tin alloy of the present invention contains 3.0~5.0 wt% silver, 0.01~3.5 wt% bismuth, 0.01~3.5 wt% antimony, 0.005~0.1 wt% nickel, 0.005 wt% ~0.02 wt% germanium and the balance tin. Therefore, the lead-free, copper-free and tin alloy of the present invention can be made into solder balls for ball grid array (BGA) packaging, and the solder bumps formed by the solder balls can withstand the electronic components themselves or when the environment undergoes temperature changes. Thermal stress, and the ability to withstand high mechanical shocks at the same time.

以下將就本發明內容進行詳細說明:The content of the present invention will be described in detail below:

本發明的無鉛無銅錫合金,以該無鉛無銅錫合金的總重為100 wt%計,包含3.0~5.0 wt%的銀、0.01~3.5 wt%的鉍、0.01~3.5 wt%的銻、0.005~0.1 wt%的鎳、0.005~0.02 wt%的鍺,及餘量的錫。The lead-free copper-free tin alloy of the present invention, based on the total weight of the lead-free copper-free tin alloy being 100 wt%, contains 3.0~5.0 wt% silver, 0.01~3.5 wt% bismuth, 0.01~3.5 wt% antimony, 0.005~0.1 wt% nickel, 0.005~0.02 wt% germanium, and the balance tin.

需先說明的是,本發明的無鉛無銅錫合金實質上不包含鉛(Pb)與銅(Cu)。前述實質上不包含鉛與銅是指原則上只要非蓄意在錫合金中添加鉛與銅者,例如於製造過程中無意但不可避免的雜質或接觸,因此,基於本發明主旨即可被視為實質上不包含鉛與銅,或可視為無鉛與無銅。wt%指的是重量百分比,本文以下wt%同指重量百分比。另外,本發明及專利範圍所述之數值範圍的限定總是包括端值。It should be noted that the lead-free copper-free tin alloy of the present invention does not substantially contain lead (Pb) and copper (Cu). The aforementioned substantially excluding lead and copper means that in principle, as long as lead and copper are not deliberately added to tin alloys, such as unintentional but unavoidable impurities or contact during the manufacturing process, it can be regarded as based on the spirit of the present invention. It does not substantially contain lead and copper, or can be regarded as lead-free and copper-free. wt% refers to weight percent, and weight percent in the text below also refers to weight percent. In addition, the limits of the numerical range stated in the present invention and the scope of the patent always include the end values.

此外,「餘量的錫」的用語為了避免誤解,不應被理解為排除其它於製造過程中無意但不可避免的雜質。因此,若假設雜質存在時,「餘量的錫」應被理解為補足該無鉛無銅錫合金至100 wt%的重量百分比例且是由錫加上不可避免的雜質所組成。In addition, in order to avoid misunderstanding, the term "surplus tin" should not be understood to exclude other unintentional but unavoidable impurities in the manufacturing process. Therefore, if it is assumed that impurities are present, the "surplus tin" should be understood to make up the lead-free copper-free tin alloy to a weight percentage of 100 wt% and is composed of tin plus unavoidable impurities.

較佳地,該無鉛無銅錫合金包含3.5~4.5 wt%的銀。更佳地,該無鉛無銅錫合金包含3.75~4.25 wt%的銀。Preferably, the lead-free copper-free tin alloy contains 3.5-4.5 wt% silver. More preferably, the lead-free copper-free tin alloy contains 3.75-4.25 wt% silver.

較佳地,該無鉛無銅錫合金包含2.5~3.5 wt%的鉍。更佳地,該無鉛無銅錫合金包含2.75~3.25 wt%的鉍。Preferably, the lead-free copper-free tin alloy contains 2.5-3.5 wt% bismuth. More preferably, the lead-free copper-free tin alloy contains 2.75-3.25 wt% of bismuth.

較佳地,該無鉛無銅錫合金包含0.5~1.5 wt%的銻。更佳地,該無鉛無銅錫合金包含0.75~1.25 wt%的銻。Preferably, the lead-free and copper-free tin alloy contains 0.5 to 1.5 wt% of antimony. More preferably, the lead-free, copper-free and tin alloy contains 0.75 to 1.25 wt% of antimony.

較佳地,該無鉛無銅錫合金包含0.045~0.055 wt%的鎳。更佳地,該無鉛無銅錫合金包含0.0475~0.0525 wt%的鎳。Preferably, the lead-free copper-free tin alloy contains 0.045 to 0.055 wt% nickel. More preferably, the lead-free, copper-free and tin alloy contains 0.0475 to 0.0525 wt% nickel.

較佳地,該無鉛無銅錫合金包含0.005~0.015 wt%的鍺。更佳地,該無鉛無銅錫合金包含0.0075~0.0125 wt%的鍺。Preferably, the lead-free copper-free tin alloy contains 0.005 to 0.015 wt% germanium. More preferably, the lead-free copper-free tin alloy contains 0.0075 to 0.0125 wt% germanium.

實施例Example 1~111~11 與比較例And comparative example 1~101~10

製備無鉛無銅錫合金Preparation of lead-free and copper-free tin alloy

實施例1~11與比較例1~10的無鉛無銅錫合金是依據下表1所示的金屬成分與重量百分比(wt%),以及下列步驟所製得:The lead-free, copper-free and tin alloys of Examples 1 to 11 and Comparative Examples 1 to 10 were prepared according to the metal composition and weight percentage (wt%) shown in Table 1 below, and the following steps:

步驟 (1) 依據對應的金屬成分及重量百分比,準備對應的金屬材料。 Step (1) : Prepare the corresponding metal material according to the corresponding metal composition and weight percentage.

步驟 (2) 將已經準備好的金屬材料加熱熔化及鑄造,形成實施例1~11與比較例1~10的無鉛無銅錫合金。 表1   金屬成分比例 (wt%) 性質測試結果 Sn Ag Bi Sb Ni Ge 推力 硬度 拉伸 冷熱循環 板階焊接 整體評核 實施例 1 餘量 4.0 3.0 1.0 0.05 0.01 實施例 2 餘量 3.0 3.0 1.0 0.05 0.01 實施例 3 餘量 5.0 3.0 1.0 0.05 0.01 實施例 4 餘量 4.0 0.01 1.0 0.05 0.01 實施例 5 餘量 4.0 3.5 1.0 0.05 0.01 實施例 6 餘量 4.0 3.0 0.01 0.05 0.01 實施例 7 餘量 4.0 3.0 3.50 0.05 0.01 實施例 8 餘量 4.0 3.0 1.0 0.005 0.01 實施例 9 餘量 4.0 3.0 1.0 0.1 0.01 實施例 10 餘量 4.0 3.0 1.0 0.05 0.005 實施例 11 餘量 4.0 3.0 1.0 0.05 0.02 比較例 1 餘量 2.0 3.0 1.0 0.05 0.01 X X X 比較例 2 餘量 6.0 3.0 1.0 0.05 0.01 X X X X X 比較例 3 餘量 4.0 0 1.0 0.05 0.01 X X X 比較例 4 餘量 4.0 4.0 1.0 0.05 0.01 X X 比較例 5 餘量 4.0 3.0 0 0.05 0.01 X X X 比較例 6 餘量 4.0 3.0 4.0 0.05 0.01 X X X X 比較例 7 餘量 4.0 3.0 1.0 0 0.01 X X 比較例 8 餘量 4.0 3.0 1.0 0.2 0.01 X X 比較例 9 餘量 4.0 3.0 1.0 0.05 0 X X 比較例 10 餘量 4.0 3.0 1.0 0.05 0.05 X X X 「餘量」為補足該無鉛無銅錫合金至100 wt%的重量百分比例。 Step (2) : heating, melting and casting the prepared metal materials to form the lead-free, copper-free and tin alloys of Examples 1-11 and Comparative Examples 1-10. Table 1 Metal composition ratio (wt%) Property test results Sn Ag Bi Sb Ni Ge thrust hardness Stretch Hot and cold cycle Step welding Overall assessment Example 1 margin 4.0 3.0 1.0 0.05 0.01 Example 2 margin 3.0 3.0 1.0 0.05 0.01 Example 3 margin 5.0 3.0 1.0 0.05 0.01 Example 4 margin 4.0 0.01 1.0 0.05 0.01 Example 5 margin 4.0 3.5 1.0 0.05 0.01 Example 6 margin 4.0 3.0 0.01 0.05 0.01 Example 7 margin 4.0 3.0 3.50 0.05 0.01 Example 8 margin 4.0 3.0 1.0 0.005 0.01 Example 9 margin 4.0 3.0 1.0 0.1 0.01 Example 10 margin 4.0 3.0 1.0 0.05 0.005 Example 11 margin 4.0 3.0 1.0 0.05 0.02 Comparative example 1 margin 2.0 3.0 1.0 0.05 0.01 X X X Comparative example 2 margin 6.0 3.0 1.0 0.05 0.01 X X X X X Comparative example 3 margin 4.0 0 1.0 0.05 0.01 X X X Comparative example 4 margin 4.0 4.0 1.0 0.05 0.01 X X Comparative example 5 margin 4.0 3.0 0 0.05 0.01 X X X Comparative example 6 margin 4.0 3.0 4.0 0.05 0.01 X X X X Comparative example 7 margin 4.0 3.0 1.0 0 0.01 X X Comparative example 8 margin 4.0 3.0 1.0 0.2 0.01 X X Comparative example 9 margin 4.0 3.0 1.0 0.05 0 X X Comparative example 10 margin 4.0 3.0 1.0 0.05 0.05 X X X The "surplus" is an example of a weight percentage that makes up the lead-free, copper-free tin alloy to 100 wt%.

合金性質測試Alloy property test

先說明的是,實施例與比較例的該無鉛無銅錫合金是藉由推力測試(ball shear test)評估焊接性;藉由硬度測試(hardness test)評估合金硬度;藉由拉伸測試(tensile test)評估合金延展性;藉由板階焊接測試(board level soldering test)評估抗氧化特性;藉由冷熱循環測試(thermal cycle test)評估焊點及接合結構對熱疲勞的抵抗能力。It should be noted that the lead-free copper-free tin alloy of the embodiment and the comparative example is evaluated by ball shear test for weldability; hardness test is used for evaluating alloy hardness; and tensile test (tensile test) is used to evaluate weldability. test) evaluate the ductility of the alloy; evaluate the oxidation resistance by the board level soldering test; evaluate the resistance of the solder joints and the joint structure to thermal fatigue by the thermal cycle test.

推力測試、硬度測試、拉伸測試、板階焊接測試及冷熱循環測試的測試方法如下:The test methods of thrust test, hardness test, tensile test, step welding test and thermal cycle test are as follows:

[[ 推力測試Thrust test ]]

參照JESD22-B117B標準測試方法,進行實施例與比較例之無鉛無銅錫合金的推力測試。首先於尺寸為14 mm×14 mm的BGA元件上塗佈助焊劑,然後以球徑為0.45 mm的實施例或比較例之無鉛無銅錫合金所製成的錫球,於BGA元件上進行植球作業(ball attach)。BGA元件的焊盤表面處理為裸銅,使用峰值溫度為240℃的迴焊曲線(reflow profile)進行焊接,完成後錫球會焊接於BGA元件上形成焊錫凸塊,然後以推力測試機進行焊錫凸塊之推力測試(推刀移動速度為100 μm/s)。With reference to the JESD22-B117B standard test method, the thrust test of the lead-free and copper-free tin alloy of the embodiment and the comparative example was carried out. First, apply flux to the BGA component with a size of 14 mm×14 mm, and then use the tin balls made of the lead-free copper-free tin alloy of the embodiment or the comparative example with a ball diameter of 0.45 mm to implant the BGA component. Ball attach. The surface treatment of the pad of the BGA component is bare copper, and the reflow profile with a peak temperature of 240℃ is used for soldering. After completion, the solder ball will be soldered on the BGA component to form a solder bump, and then the solder will be soldered with a thrust tester The thrust test of the bump (the moving speed of the push knife is 100 μm/s).

每組合金BGA樣本推15顆焊錫凸塊並記錄其推力強度,將15顆焊錫凸塊的推力強度取平均值為實驗結果,結果判定標準為:平均推力強度超過15牛頓則判定為植球焊接性良好並標示為「○」,平均推力強度介於12~15牛頓之間則判定為植球焊接性可接受並標示為「△」,平均推力強度小於12牛頓則判定為植球焊接性不足並標示為「X」。實施例與比較例之無鉛無銅錫合金的推力測試結果整理於表1中。Each combination of gold BGA samples pushes 15 solder bumps and records their thrust strength. Take the average of the 15 solder bumps’ thrust strength as the experimental result. The result judgment standard is: the average thrust strength exceeds 15 Newtons, and it is judged as ball soldering. Good performance and marked as "○". If the average thrust strength is between 12 and 15 Newtons, it is judged as acceptable and marked as "△". If the average thrust strength is less than 12 Newtons, it is judged as insufficient weldability. And mark it as "X". The thrust test results of the lead-free and copper-free tin alloys of the Examples and Comparative Examples are summarized in Table 1.

[[ 硬度測試Hardness Testing ]]

參照ASTM-E92-17標準測試方法進行,使用維氏硬度測量儀量測實施例與比較例之無鉛無銅錫合金的硬度。測試方法是將各合金製作為長20 mm、寬20 mm及高10 mm平的板形樣本,樣品的測試表面需先經過研磨拋光處理,接著以維氏硬度測量儀之標準測試壓頭對樣本進行壓痕測試(壓載條件為荷重500 g,荷重持續時間10秒),再經由合金樣本留下的壓痕尺寸計算出合金之硬度結果。According to the ASTM-E92-17 standard test method, the hardness of the lead-free, copper-free and tin alloys of the examples and the comparative examples were measured using a Vickers hardness tester. The test method is to make each alloy into a flat plate-shaped sample with a length of 20 mm, a width of 20 mm and a height of 10 mm. The test surface of the sample needs to be ground and polished, and then the standard test indenter of the Vickers hardness tester is applied to the sample. Carry out indentation test (ballast condition is 500 g load, load duration 10 seconds), and then calculate the alloy hardness result from the indentation size left by the alloy sample.

本測試中各合金進行三個硬度樣本的測試,再將所得三個硬度結果取平均值,判定標準為:平均硬度大於25 Hv則判定為合金具備良好硬度表現並標示為「○」,平均硬度介於22~25 Hv之間則判定為合金硬度表現可接受並標示為「△」,平均硬度小於22 Hv則判定為合金硬度表現不佳並標示為「X」。實施例與比較例之無鉛無銅錫合金的硬度測試結果整理於表1中。In this test, three hardness samples are tested for each alloy, and the three hardness results obtained are averaged. The judgment standard is: the average hardness is greater than 25 Hv, the alloy is judged to have good hardness performance and marked as "○", the average hardness If the alloy hardness is between 22~25 Hv, it is judged to be acceptable and marked as "△". If the average hardness is less than 22 Hv, it is judged to be poor and marked as "X". The hardness test results of the lead-free and copper-free tin alloys of the Examples and Comparative Examples are summarized in Table 1.

[[ 拉伸測試Tensile test ]]

參照ASTM-E8/E8M-16a,進行實施例與比較例之無鉛無銅錫合金的拉伸測試。拉伸速率為6 mm/min,以拉伸測試之伸長率結果比較合金的延展率。With reference to ASTM-E8/E8M-16a, the tensile test of the lead-free and copper-free tin alloys of the examples and the comparative examples were carried out. The tensile rate is 6 mm/min, and the elongation result of the tensile test is used to compare the elongation of the alloy.

本測試中各合金進行三個拉伸樣本的測試,再將所得三個伸長率結果取平均值,結果判定標準為:平均伸長率大於20%則判定為合金具備良好延展性並標示為「○」,平均伸長率介於17~20%之間則判定為合金延展性可接受並標示為「△」,平均伸長率小於17%則判定為合金延展性不佳並標示為「X」。實施例與比較例之無鉛無銅錫合金的拉伸測試結果整理於表1中。In this test, each alloy is tested on three tensile samples, and the three elongation results obtained are averaged. The result judgment standard is: if the average elongation is greater than 20%, it is judged that the alloy has good ductility and is marked as "○ If the average elongation is between 17% and 20%, the ductility of the alloy is judged to be acceptable and marked as "△". If the average elongation is less than 17%, the ductility of the alloy is judged to be poor and marked as "X". The tensile test results of the lead-free and copper-free tin alloys of the Examples and Comparative Examples are summarized in Table 1.

[[ 板階焊接測試Board level welding test ]]

首先於尺寸為35 mm×35 mm的BGA元件上塗佈助焊劑,然後以球徑為0.63 mm的實施例或比較例之無鉛無銅錫合金所製成的錫球,於BGA元件上進行植球作業(ball attach)。BGA元件的焊盤表面處理為裸銅,使用峰值溫度為240℃的迴焊曲線(reflow profile)進行焊接,完成後錫球會焊接於BGA元件上形成焊錫凸塊,然後將樣品在溫度85℃及相對濕度85%的環境下放置240小時加速焊錫凸塊的氧化,再將BGA元件焊接於相對應的電路板上,電路板的焊盤表面處理為有機保焊膜(organic solderability preservative;簡稱 OSP)。本測試目的是測試以實施例或比較例之無鉛無銅錫合金所製成的錫球於BGA元件形成焊錫凸塊後的抗氧化能力。合金的抗氧化能力會影響其焊錫凸塊與電路板焊接時的焊接性,若合金抗氧化能力不足而使得焊錫凸塊與電路板焊接時的焊接性不佳則會增加板階製程後發生焊接不良的發生率。First, solder flux is applied to the BGA component with a size of 35 mm×35 mm, and then the solder ball made of the lead-free copper-free tin alloy of the embodiment or the comparative example with a ball diameter of 0.63 mm is implanted on the BGA component Ball attach. The surface treatment of the pad of the BGA component is bare copper, and the reflow profile with a peak temperature of 240℃ is used for soldering. After completion, the solder ball will be soldered on the BGA component to form solder bumps, and then the sample is placed at a temperature of 85℃ And placed in an environment with a relative humidity of 85% for 240 hours to accelerate the oxidation of the solder bumps, and then solder the BGA components to the corresponding circuit board. The surface of the circuit board pad is treated with organic solderability preservative (OSP) ). The purpose of this test is to test the oxidation resistance of the solder balls made of the lead-free and copper-free tin alloy of the embodiment or the comparative example after forming the solder bumps on the BGA device. The oxidation resistance of the alloy will affect the solderability of the solder bumps and the circuit board. If the oxidation resistance of the alloy is insufficient, the solder bumps and the circuit board will be poorly welded, which will increase the soldering defects after the board-level process. The rate of occurrence.

本測試針對板階後樣本進行X-ray分析焊接不良的比例,判定標準為焊接不良發生比例小於10%則判定為板階焊接性良好並標示為「○」,焊接不良發生比例介於10~20%則判定為板階焊接性可接受並標示為「△」,焊接不良發生比例大於20%則判定為板階焊接性失敗並標示為「X」。實施例與比較例之無鉛無銅錫合金的板階焊接測試結果整理於表1中。In this test, X-ray analysis of the proportion of poor welding is performed on the sample after the board step. The judgment standard is that the rate of poor welding is less than 10%, and it is judged that the board step weldability is good and marked as "○". 20% is judged to be acceptable and marked as "△". If the proportion of welding defects is greater than 20%, it is judged to be a failure of plate step weldability and marked as "X". The results of the step welding test of the lead-free and copper-free tin alloys of the Examples and Comparative Examples are summarized in Table 1.

[[ 冷熱循環測試Hot and cold cycle test ]]

參照JESD22-A104E,進行進行實施例與比較例之無鉛無銅錫合金的冷熱循環測試。首先於尺寸為14 mm×14 mm的BGA元件上塗佈助焊劑,然後以球徑為0.45 mm的實施例或比較例之無鉛無銅錫合金所製成的錫球,於BGA元件上進行植球作業(ball attach)。BGA元件的焊盤表面處理為裸銅,使用峰值溫度為240℃的迴焊曲線(reflow profile)進行焊接,完成後錫球會焊接於BGA元件上形成焊錫凸塊,再將BGA元件焊接於相對應的電路板上,電路板的焊盤表面處理為有機保焊膜(OSP),然後對焊接好的電路板進行冷熱循環測試(測試條件為‒40~125℃,升、降溫速率為15 ℃/min,持溫時間為10分鐘,共進行1000循環)。冷熱循環測試進行前對針對各焊接好的電路板樣本測量電阻(初始電阻值),冷熱循環測試後再測試一次電阻(測試後電阻值)。本測試目是測試實施例或比較例之無鉛無銅錫合金錫球植球後所形成之焊錫凸塊以及焊錫凸塊與銅基材接合結構之熱疲勞抗性,若焊錫凸塊本身及對銅基材接合結構的熱疲勞抗性不足,則會導致焊點或接合結構於反覆冷熱循環應力下產生熱疲勞破壞,進而影響焊點可靠度。With reference to JESD22-A104E, the cold and hot cycle test of the lead-free and copper-free tin alloys of the examples and the comparative examples were carried out. First, apply flux to the BGA component with a size of 14 mm×14 mm, and then use the tin balls made of the lead-free copper-free tin alloy of the embodiment or the comparative example with a ball diameter of 0.45 mm to implant the BGA component. Ball attach. The surface treatment of the pad of the BGA component is bare copper, and the reflow profile with a peak temperature of 240°C is used for soldering. After completion, the solder ball will be soldered to the BGA component to form a solder bump, and then the BGA component is soldered to the phase On the corresponding circuit board, the surface of the circuit board pad is treated with organic solder protection film (OSP), and then the soldered circuit board is subjected to a cold and heat cycle test (test condition is ‒40~125℃, and the temperature rise and fall rate is 15 ℃ /min, the temperature holding time is 10 minutes, a total of 1000 cycles). The resistance (initial resistance value) of each soldered circuit board sample is measured before the heating and cooling cycle test, and the resistance (resistance value after the test) is tested again after the heating and cooling cycle test. The purpose of this test is to test the thermal fatigue resistance of the solder bumps and the bonding structure between the solder bumps and the copper substrate formed by the lead-free copper-free tin alloy tin balls of the examples or comparative examples. Insufficient thermal fatigue resistance of the copper substrate joint structure will result in thermal fatigue failure of the solder joint or joint structure under repeated cold and heat cycle stresses, thereby affecting the reliability of the solder joint.

本測試對冷熱循環後的電路板樣本進行電阻檢測,藉由比較樣本進行冷熱循環測試後的電阻變化評判焊錫凸塊及接合結構的熱疲勞抗性,電阻變化的定義為電阻變化值(測試後電阻值減去初始電阻值)與初始電阻值的比值。判定標準為:電阻變化低於10%則判定為合金焊點及接合結構的熱疲勞抗性良好並標示為「○」,電阻變化介於10~20%則判定為合金焊點及接合結構的熱疲勞抗性可接受並標示為「△」,電阻變化大於20%則判定為合金焊點及接合結構的熱疲勞抗性不佳並標示為「X」。This test conducts resistance testing on the circuit board samples after cold and heat cycles. The resistance changes of the comparison samples after the cold and heat cycle tests are used to evaluate the thermal fatigue resistance of the solder bumps and the joint structure. The resistance change is defined as the resistance change value (after the test). The ratio of the resistance value minus the initial resistance value) to the initial resistance value. The criterion is: if the resistance change is less than 10%, it is judged that the thermal fatigue resistance of the alloy solder joint and the joint structure is good and marked as "○". If the resistance change is between 10-20%, it is judged as the alloy solder joint and the joint structure. The thermal fatigue resistance is acceptable and marked as "△". If the resistance change is greater than 20%, it is judged that the thermal fatigue resistance of the alloy solder joint and the joint structure is poor and marked as "X".

針對圖1至3的說明如下:圖1的相片為實施例1所形成之正常焊點(焊錫凸塊)的切片,圖2的相片為比較例9所形成之不良焊點(焊錫凸塊)的切片,圖3的相片則為比較例9所形成之不良焊點(焊錫凸塊)的x-ray觀察結果。The description of Figs. 1 to 3 is as follows: the photo in Fig. 1 is a slice of the normal solder joint (solder bump) formed in Example 1, and the photo in Fig. 2 is the defective solder joint (solder bump) formed in Comparative Example 9. The section of Fig. 3 is the x-ray observation result of the bad solder joints (solder bumps) formed in Comparative Example 9.

另外說明的是,將同一實施例或同一比較例進行前述推力測試、硬度測試、拉伸測試、板階焊接測試及冷熱循環測試的五個測試,如果測試結果中出現任一個「X」,則於表1中「整體評核結果」欄位標示為「X」,代表此實施例或比較例不符合本發明的要求;如果測試結果中出現任一個「△」,則於表1中「整體評核結果」欄位標示為「△」,代表此實施例或比較例符合本發明的要求;如果全部測試結果中皆出現「○」,則於表1中「整體評核結果」欄位標示為「○」,代表此實施例不僅符合本發明的要求且為最佳實施例。In addition, if the same embodiment or the same comparative example is subjected to the aforementioned five tests of thrust test, hardness test, tensile test, step welding test, and cold and hot cycle test, if any "X" appears in the test result, then The "Overall Evaluation Results" column in Table 1 is marked as "X", which means that this embodiment or comparative example does not meet the requirements of the present invention; if any "△" appears in the test results, then "Overall Evaluation" in Table 1 The “assessment result” field is marked as “△”, which means that this embodiment or comparative example meets the requirements of the present invention; if “○” appears in all test results, mark it in the “overall evaluation result” column of Table 1 It is "○", which means that this embodiment not only meets the requirements of the present invention but also is the best embodiment.

合金性質測試結果與討論Alloy property test results and discussion

以下分別依據不同的銀含量、不同的鉍含量、不同的銻含量、不同的鎳含量,以及不同的鍺含量所得的結果分別進行討論。The following discussion is based on the results of different silver content, different bismuth content, different antimony content, different nickel content, and different germanium content.

[ 不同銀含量 ] 表2(節錄自表1)   金屬成分比例 (wt%) 性質測試結果 Sn Ag Bi Sb Ni Ge 推力 硬度 拉伸 冷熱循環 板階焊接 整體評核 實施例 1 餘量 4.0 3.0 1.0 0.05 0.01 實施例 2 餘量 3.0 3.0 1.0 0.05 0.01 實施例 3 餘量 5.0 3.0 1.0 0.05 0.01 比較例 1 餘量 2.0 3.0 1.0 0.05 0.01 X X X 比較例 2 餘量 6.0 3.0 1.0 0.05 0.01 X X X X X 「餘量」為補足該無鉛無銅錫合金至100 wt%的重量百分比例。 [ Different silver content ] Table 2 (Excerpt from Table 1) Metal composition ratio (wt%) Property test results Sn Ag Bi Sb Ni Ge thrust hardness Stretch Hot and cold cycle Step welding Overall assessment Example 1 margin 4.0 3.0 1.0 0.05 0.01 Example 2 margin 3.0 3.0 1.0 0.05 0.01 Example 3 margin 5.0 3.0 1.0 0.05 0.01 Comparative example 1 margin 2.0 3.0 1.0 0.05 0.01 X X X Comparative example 2 margin 6.0 3.0 1.0 0.05 0.01 X X X X X The "surplus" is an example of a weight percentage that makes up the lead-free, copper-free tin alloy to 100 wt%.

由表2可知,銀之重量百分比會影響合金硬度、其形成焊接後焊點及接合界面熱疲勞抗性與抗氧化特性,錫球抗氧化特性不足則會提高植球元件進行板階製程時發生雙球不良的機率。過低的銀之重量百分比會使得無鉛無銅錫合金無法通過硬度測試及冷熱循環測試。過高的銀之重量百分比雖然會有較高的合金硬度,但會導致無鉛無銅錫合金熔點上升及延展性下降,熔點上升會導致其在等同的溫度條件下進行植球焊接的焊接性變差,使得其無法通過推力測試,而合金延展性下降也會使其無法通過拉伸測試;此外,過高的銀之重量百分比還會導致無鉛無銅錫合金無法通過冷熱循環測試及板階焊接測試。It can be seen from Table 2 that the weight percentage of silver will affect the hardness of the alloy, the thermal fatigue resistance and oxidation resistance of the solder joint and the joint interface after the formation of the solder. Insufficient oxidation resistance of the solder ball will increase the occurrence of the ball implanted component during the board-level process. Probability of bad double ball. Too low the weight percentage of silver will make the lead-free copper-free tin alloy fail the hardness test and the hot and cold cycle test. Although the weight percentage of silver is too high, the alloy hardness will be higher, but it will cause the melting point of the lead-free copper-free tin alloy to increase and the ductility to decrease. The increase in the melting point will cause the solderability of the ball soldering under the same temperature conditions to change. Poor, making it unable to pass the thrust test, and the reduced ductility of the alloy will also make it unable to pass the tensile test; in addition, the excessively high weight percentage of silver will also cause the lead-free copper-free tin alloy to fail the hot and cold cycle test and the step welding test.

比較例1採用2.0 wt%的銀,其於硬度測試及冷熱循環測試標示為「X」,表示過低重量百分比(小於3.0 wt%)的銀會導致合金硬度表現與合金焊點及接合界面熱疲勞抗性不佳;比較例2採用6.0 wt%的銀,其於硬度測試雖然標示為「○」,然而於推力測試、拉伸測試、冷熱循環測試、板階焊接測試及「整體評核結果」欄位中的卻被標示為「X」,代表過量重量百分比(大於5.0 wt%)的銀會導致合金之焊點及接合界面熱疲勞抗性不佳與抗氧化特性不足,且無法通過推力測試及拉伸測試;實施例2採用3.0 wt%的銀、實施例1採用4.0 wt%的銀、實施例3採用5.0 wt%的銀,其於表2「整體評核結果」欄位皆標示為「△」或「○」,代表無鉛無銅錫合金中包含3.0~5.0 wt%的銀能符合本發明的要求。Comparative Example 1 uses 2.0 wt% silver, which is marked as "X" in the hardness test and thermal cycle test, indicating that too low weight percentage (less than 3.0 wt%) of silver will cause alloy hardness performance and alloy solder joints and joint interface heat Fatigue resistance is not good; Comparative Example 2 uses 6.0 wt% silver. Although it is marked as "○" in the hardness test, it is used in the thrust test, tensile test, thermal cycle test, step welding test and "overall evaluation result". ”In the field is marked as “X”, which means that excessive weight percentage (greater than 5.0 wt%) of silver will lead to poor thermal fatigue resistance and insufficient oxidation resistance of solder joints and joint interfaces of the alloy, and cannot pass thrust. Test and tensile test; Example 2 uses 3.0 wt% silver, Example 1 uses 4.0 wt% silver, and Example 3 uses 5.0 wt% silver, which are indicated in the "Overall Evaluation Results" column of Table 2 It is "△" or "○", which means that the lead-free copper-free tin alloy containing 3.0 to 5.0 wt% silver can meet the requirements of the present invention.

[ 不同鉍含量 ] 表3(節錄自表1)   金屬成分比例 (wt%) 性質測試結果 Sn Ag Bi Sb Ni Ge 推力 硬度 拉伸 冷熱循環 板階焊接 整體評核 實施例 1 餘量 4.0 3.0 1.0 0.05 0.01 實施例 4 餘量 4.0 0.01 1.0 0.05 0.01 實施例 5 餘量 4.0 3.5 1.0 0.05 0.01 比較例 3 餘量 4.0 0 1.0 0.05 0.01 X X X 比較例 4 餘量 4.0 4.0 1.0 0.05 0.01 X X 「餘量」為補足該無鉛無銅錫合金至100 wt%的重量百分比例。 [ Different bismuth content ] Table 3 (Excerpt from Table 1) Metal composition ratio (wt%) Property test results Sn Ag Bi Sb Ni Ge thrust hardness Stretch Hot and cold cycle Step welding Overall assessment Example 1 margin 4.0 3.0 1.0 0.05 0.01 Example 4 margin 4.0 0.01 1.0 0.05 0.01 Example 5 margin 4.0 3.5 1.0 0.05 0.01 Comparative example 3 margin 4.0 0 1.0 0.05 0.01 X X X Comparative example 4 margin 4.0 4.0 1.0 0.05 0.01 X X The "surplus" is an example of a weight percentage that makes up the lead-free, copper-free tin alloy to 100 wt%.

由表3可知,鉍之重量百分比會影響合金硬度與其形成焊接後焊點及接合界面熱疲勞抗性。過低的鉍之重量百分比會使得無鉛無銅錫合金無法通過硬度測試及冷熱循環測試;過高的鉍之重量百分比雖然會有較高的合金硬度,但會導致無鉛無銅錫合金的延展性下降而無法通過拉伸測試。It can be seen from Table 3 that the weight percentage of bismuth will affect the hardness of the alloy and the thermal fatigue resistance of the solder joint and the joint interface after the formation of welding. Too low weight percentage of bismuth will make the lead-free copper-free tin alloy fail to pass the hardness test and cold and hot cycle test; too high weight percentage of bismuth will have higher alloy hardness, but will lead to the ductility of lead-free copper-free tin alloy Falling down and failing the tensile test.

比較例3採用0 wt%的鉍,其於硬度測試及冷熱循環測試標示為「X」,表示過低重量百分比(小於0.01 wt%)的鉍會導致合金硬度表現與合金焊點及接合界面熱疲勞抗性不佳;比較例4採用4.0wt%的鉍,其於硬度測試雖然標示為「○」,然而於拉伸測試及「整體評核結果」欄位中的卻被標示為「X」,代表過量重量百分比(大於3.5 wt%)的鉍會導致合金無法通過拉伸測試;實施例4採用0.01 wt%的鉍、實施例1採用3.0 wt%的鉍、實施例5採用3.5 wt%的鉍,其於表3中「整體評核結果」欄位皆標示為「△」或「○」,代表無鉛無銅錫合金中包含0.01~3.5 wt%的鉍能符合本發明的要求。Comparative Example 3 uses 0 wt% bismuth, which is marked as "X" in the hardness test and the cold-heat cycle test, indicating that too low weight percentage (less than 0.01 wt%) of bismuth will cause alloy hardness performance and alloy solder joints and joint interface heat Fatigue resistance is not good; Comparative Example 4 uses 4.0wt% bismuth. Although it is marked as "○" in the hardness test, it is marked as "X" in the tensile test and the "Overall Evaluation Results" column , Representing an excessive weight percentage (greater than 3.5 wt%) of bismuth will cause the alloy to fail the tensile test; Example 4 uses 0.01 wt% of bismuth, Example 1 uses 3.0 wt% of bismuth, and Example 5 uses 3.5 wt% of bismuth. For bismuth, the "Overall Evaluation Results" column in Table 3 is marked as "△" or "○", which means that 0.01~3.5 wt% of bismuth in a lead-free, copper-free tin alloy can meet the requirements of the present invention.

[ 不同銻含量 ] 表4(節錄自表1)   金屬成分比例 (wt%) 性質測試結果 Sn Ag Bi Sb Ni Ge 推力 硬度 拉伸 冷熱循環 板階焊接 整體評核 實施例 1 餘量 4.0 3.0 1.0 0.05 0.01 實施例 6 餘量 4.0 3.0 0.01 0.05 0.01 實施例 7 餘量 4.0 3.0 3.50 0.05 0.01 比較例 5 餘量 4.0 3.0 0 0.05 0.01 X X X 比較例 6 餘量 4.0 3.0 4.0 0.05 0.01 X X X X 「餘量」為補足該無鉛無銅錫合金至100 wt%的重量百分比例。 [ Different antimony content ] Table 4 (Excerpt from Table 1) Metal composition ratio (wt%) Property test results Sn Ag Bi Sb Ni Ge thrust hardness Stretch Hot and cold cycle Step welding Overall assessment Example 1 margin 4.0 3.0 1.0 0.05 0.01 Example 6 margin 4.0 3.0 0.01 0.05 0.01 Example 7 margin 4.0 3.0 3.50 0.05 0.01 Comparative example 5 margin 4.0 3.0 0 0.05 0.01 X X X Comparative example 6 margin 4.0 3.0 4.0 0.05 0.01 X X X X The "surplus" is an example of a weight percentage that makes up the lead-free, copper-free tin alloy to 100 wt%.

由表4可知,銻之重量百分比會影響合金硬度、其形成焊接後焊點及接合界面熱疲勞抗性與抗氧化特性,錫球抗氧化特性不足則會提高植球元件進行板階製程時發生雙球不良的機率。過低的銻之重量百分比會使得無鉛無銅錫合金無法通過硬度測試及冷熱循環測試。過高的銻之重量百分比雖然會有較高的合金硬度,但會導致無鉛無銅錫合金熔點上升及延展性下降,熔點上升會導致其在等同的溫度條件下進行植球焊接的焊接性變差,使得其無法通過推力測試,而合金延展性下降也會使得其無法通過拉伸測試;此外,過高的銀之重量百分比還會導致無鉛無銅錫合金無法通過板階焊接測試。It can be seen from Table 4 that the weight percentage of antimony will affect the hardness of the alloy, the thermal fatigue resistance and oxidation resistance of the solder joints and the joint interface after the formation of soldering. Insufficient oxidation resistance of the solder ball will increase the occurrence of ball-planting components during the board-level process. Probability of bad double ball. Too low the weight percentage of antimony will make the lead-free copper-free tin alloy fail to pass the hardness test and the hot and cold cycle test. Although the weight percentage of antimony is too high, the alloy hardness will be higher, but it will cause the melting point of the lead-free copper-free tin alloy to increase and the ductility to decrease. The increase in the melting point will cause the solderability of the ball soldering under the same temperature conditions to change. Poor, making it unable to pass the thrust test, and the reduced ductility of the alloy will also make it unable to pass the tensile test; in addition, too high a weight percentage of silver will also cause the lead-free copper-free tin alloy to fail the plate-level welding test.

比較例5採用0 wt%的銻,其於硬度測試標示為「X」,表示過低重量百分比(小於0.01 wt%)的銻會導致合金硬度表現與合金焊點及接合界面熱疲勞抗性不佳;比較例6採用4.0 wt%的銻,其於硬度測試雖然標示為「○」,然而於推力測試、拉伸測試、板階焊接測試及「整體評核結果」欄位中的卻被標示為「X」,代表過量重量百分比(大於3.5 wt%)的銻會導致合金抗氧化特性不足,且無法通過推力測試及拉伸測試;實施例6採用0.01wt%的銻、實施例1採用1.0wt%的銻、實施例7採用3.5wt%的銻,其於表4中「整體評核結果」欄位皆標示為「△」或「○」,代表無鉛無銅錫合金中包含0.01~3.5 wt%的銻能符合本發明的要求。Comparative Example 5 uses 0 wt% antimony, which is marked as "X" in the hardness test, which means that too low weight percentage (less than 0.01 wt%) of antimony will cause the hardness of the alloy to be different from the thermal fatigue resistance of the alloy solder joints and the joint interface. Good; Comparative Example 6 uses 4.0 wt% antimony. Although it is marked as "○" in the hardness test, it is marked in the column of thrust test, tensile test, step welding test and "overall evaluation result" It is "X", which means excessive weight percentage (greater than 3.5 wt%) of antimony will result in insufficient oxidation resistance of the alloy and fail the thrust test and tensile test; Example 6 uses 0.01 wt% of antimony, and Example 1 uses 1.0 wt% of antimony. Example 7 uses 3.5wt% of antimony. The "Overall Evaluation Results" column in Table 4 is marked as "△" or "○", which means that the lead-free, copper-free tin alloy contains 0.01~3.5 The wt% antimony can meet the requirements of the present invention.

[ 不同鎳含量 ] 表5(節錄自表1)   金屬成分比例 (wt%) 性質測試結果 Sn Ag Bi Sb Ni Ge 推力 硬度 拉伸 冷熱循環 板階焊接 整體評核 實施例 1 餘量 4.0 3.0 1.0 0.05 0.01 實施例 8 餘量 4.0 3.0 1.0 0.005 0.01 實施例 9 餘量 4.0 3.0 1.0 0.1 0.01 比較例 7 餘量 4.0 3.0 1.0 0 0.01 X X 比較例 8 餘量 4.0 3.0 1.0 0.2 0.01 X X 「餘量」為補足該無鉛無銅錫合金至100 wt%的重量百分比例。 [ Different nickel content ] Table 5 (Excerpt from Table 1) Metal composition ratio (wt%) Property test results Sn Ag Bi Sb Ni Ge thrust hardness Stretch Hot and cold cycle Step welding Overall assessment Example 1 margin 4.0 3.0 1.0 0.05 0.01 Example 8 margin 4.0 3.0 1.0 0.005 0.01 Example 9 margin 4.0 3.0 1.0 0.1 0.01 Comparative example 7 margin 4.0 3.0 1.0 0 0.01 X X Comparative example 8 margin 4.0 3.0 1.0 0.2 0.01 X X The "surplus" is an example of a weight percentage that makes up the lead-free, copper-free tin alloy to 100 wt%.

由表5可知,鎳之重量百分比會影響其形成焊接後焊點及接合界面熱疲勞抗性。過低的鎳之重量百分比會使得無鉛無銅錫合金無法通過冷熱循環測試;過高的鎳之重量百分比雖然會有較好的焊點及接合界面熱疲勞抗性,但會導致無鉛無銅錫合金的延展性下降使得其無法通過拉伸測試。It can be seen from Table 5 that the weight percentage of nickel will affect the thermal fatigue resistance of the solder joint and the joint interface after welding. Too low weight percentage of nickel will make lead-free copper-free tin alloys unable to pass the thermal cycle test; too high weight percentage of nickel will have better resistance to thermal fatigue of solder joints and joint interfaces, but will lead to lead-free copper-free tin alloys The reduced ductility of the alloy makes it unable to pass the tensile test.

比較例7採用0 wt%的鎳,其於冷熱循環測試標示為「X」,表示過低重量百分比(小於0.005 wt%)的鎳會導致合金焊點及接合界面熱疲勞抗性不佳;比較例8採用0.2 wt%的鎳,其於冷熱循環測試雖然標示為「○」,然而於拉伸測試及「整體評核結果」欄位中的卻被標示為「X」,代表過量重量百分比(大於0.1 wt%)的鎳會導致合金無法通過拉伸測試;實施例8採用0.005 wt%的鎳、實施例1採用0.05 wt%的鎳、實施例9採用0.1 wt%的鎳,其於表5中「整體評核結果」欄位皆標示為「△」或「○」,代表無鉛無銅錫合金中包含0.005~0.1 wt%的鎳能符合本發明的要求。Comparative Example 7 uses 0 wt% nickel, which is marked as "X" in the thermal cycle test, indicating that too low weight percentage (less than 0.005 wt%) of nickel will lead to poor thermal fatigue resistance of alloy solder joints and joint interfaces; Example 8 uses 0.2 wt% nickel. Although it is marked as "○" in the thermal cycle test, it is marked as "X" in the tensile test and the "overall evaluation result" column, which represents the excess weight percentage ( More than 0.1 wt%) of nickel will cause the alloy to fail the tensile test; Example 8 uses 0.005 wt% of nickel, Example 1 uses 0.05 wt% of nickel, and Example 9 uses 0.1 wt% of nickel, which are shown in Table 5. In the "overall evaluation result" column, all marked as "△" or "○", which means that the lead-free copper-free tin alloy containing 0.005 to 0.1 wt% nickel can meet the requirements of the present invention.

[ 不同鍺含量 ] 表6(節錄自表1)   金屬成分比例 (wt%) 性質測試結果 Sn Ag Bi Sb Ni Ge 推力 硬度 拉伸 冷熱循環 板階焊接 整體評核 實施例 1 餘量 4.0 3.0 1.0 0.05 0.01 實施例 10 餘量 4.0 3.0 1.0 0.05 0.005 實施例 11 餘量 4.0 3.0 1.0 0.05 0.02 比較例 9 餘量 4.0 3.0 1.0 0.05 0 X X 比較例 10 餘量 4.0 3.0 1.0 0.05 0.05 X X X 「餘量」為補足該無鉛無銅錫合金至100 wt%的重量百分比例。 [ Different germanium content ] Table 6 (Excerpt from Table 1) Metal composition ratio (wt%) Property test results Sn Ag Bi Sb Ni Ge thrust hardness Stretch Hot and cold cycle Step welding Overall assessment Example 1 margin 4.0 3.0 1.0 0.05 0.01 Example 10 margin 4.0 3.0 1.0 0.05 0.005 Example 11 margin 4.0 3.0 1.0 0.05 0.02 Comparative example 9 margin 4.0 3.0 1.0 0.05 0 X X Comparative example 10 margin 4.0 3.0 1.0 0.05 0.05 X X X The "surplus" is an example of a weight percentage that makes up the lead-free, copper-free tin alloy to 100 wt%.

由表6可知,鍺之重量百分比會影響合金的抗氧化特性,錫球抗氧化特性不足則會提高植球元件進行板階製程時發生雙球不良的機率。過低的鍺之重量百分比會使得無鉛無銅錫合金無法通過板階焊接測試;過高的鍺之重量百分比會導致無鉛無銅錫合金的焊接性下降使得其無法通過推力測試,且同樣會使其無法通過板階焊接測試。It can be seen from Table 6 that the weight percentage of germanium will affect the anti-oxidation properties of the alloy, and the insufficient anti-oxidation properties of the solder balls will increase the probability of double-ball failure during the board-level process of the ball-planting component. Too low weight percentage of germanium will make the lead-free copper-free tin alloy fail the board-level soldering test; too high weight percentage of germanium will cause the solderability of the lead-free copper-free tin alloy to decrease, making it unable to pass the thrust test, and will also cause It cannot pass the board level welding test.

比較例9採用0 wt%的鍺,其於板階焊接測試標示為「X」,表示過低重量百分比(小於0.005 wt%)的鍺會導致合金抗氧化特性不足;比較例10採用0.05 wt%的鍺,其於推力測試、板階焊接測試及「整體評核結果」欄位中的卻被標示為「X」,代表過量重量百分比(大於0.02 wt%)的鍺會導致合金抗氧化特性不足,且無法通過推力測試;實施例10採用0.005 wt%的鍺、實施例1採用0.01 wt%的鍺、實施例11採用0.02 wt%的鍺,其於表6中「整體評核結果」欄位皆標示為「△」或「○」,代表無鉛無銅錫合金中包含0.005~0.02 wt%的鍺能符合本發明的要求。Comparative example 9 uses 0 wt% germanium, which is marked as "X" in the board-level welding test, which means that too low weight percentage (less than 0.005 wt%) of germanium will lead to insufficient oxidation resistance of the alloy; comparative example 10 uses 0.05 wt% Germanium is marked as "X" in the thrust test, step welding test and "overall evaluation result" column, which means that excessive weight percentage (greater than 0.02 wt%) of germanium will lead to insufficient oxidation resistance of the alloy , And failed to pass the thrust test; Example 10 uses 0.005 wt% germanium, Example 1 uses 0.01 wt% germanium, and Example 11 uses 0.02 wt% germanium. They are listed in the "Overall Evaluation Results" column in Table 6. All are marked as "△" or "○", which means that the lead-free copper-free tin alloy containing 0.005 to 0.02 wt% germanium can meet the requirements of the present invention.

[[ 總結Summarize ]]

根據前述的結果與討論可知,實施例1~11的無鉛無銅錫合金之「整體評核結果」欄位皆標示為「△」或「○」,表示其同時能通過推力測試、硬度測試、拉伸測試、板階焊接測試及冷熱循環測試,說明若以本發明的無鉛無銅錫合金(實施例1~11)製成用於球柵陣列(BGA)封裝之錫球,該錫球所形成之焊錫凸塊能承受電子元件本身或環境出現溫度變化時所帶來的熱應力,以及同時具有承受高機械衝擊的能力。According to the aforementioned results and discussion, the "overall evaluation results" of the lead-free copper-tin alloys of Examples 1-11 are marked as "△" or "○", indicating that they can pass the thrust test, hardness test, and test at the same time. The tensile test, the board step welding test and the thermal cycle test show that if the lead-free copper-free tin alloy (Examples 1 to 11) of the present invention is used to make a solder ball for ball grid array (BGA) packaging, the solder ball is The formed solder bumps can withstand the thermal stress caused by the electronic component itself or the environment when the temperature changes, and at the same time have the ability to withstand high mechanical shocks.

綜上所述,由於本發明的無鉛無銅錫合金同時包含3.0~5.0 wt%的銀、0.01~3.5 wt%的鉍、0.01~3.5 wt%的銻、0.005~0.1 wt%的鎳、0.005~0.02 wt%的鍺及餘量的錫。因此,本發明的無鉛無銅錫合金能製成用於球柵陣列(BGA)封裝之錫球,且由該錫球所形成之焊錫凸塊能承受電子元件本身或環境出現溫度變化時所帶來的熱應力,以及同時具有承受高機械衝擊的能力,故確實能達成本發明之目的。In summary, because the lead-free copper-free tin alloy of the present invention also contains 3.0~5.0 wt% silver, 0.01~3.5 wt% bismuth, 0.01~3.5 wt% antimony, 0.005~0.1 wt% nickel, 0.005~ 0.02 wt% germanium and the balance tin. Therefore, the lead-free, copper-free and tin alloy of the present invention can be made into solder balls for ball grid array (BGA) packaging, and the solder bumps formed by the solder balls can withstand the electronic components themselves or when the environment undergoes temperature changes. The thermal stress and the ability to withstand high mechanical shocks at the same time can indeed achieve the purpose of the invention.

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited by this, all simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the patent specification still belong to This invention patent covers the scope.

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中: 圖1是一相片,說明實施例1所形成之正常焊點(焊錫凸塊)的切片; 圖2是一相片,說明比較例9所形成之不良焊點(焊錫凸塊)的切片;及 圖3是一相片,說明比較例9所形成之不良焊點(焊錫凸塊)的x-ray觀察結果。Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: Figure 1 is a photograph illustrating a slice of a normal solder joint (solder bump) formed in Example 1; Figure 2 is a photograph illustrating a slice of a bad solder joint (solder bump) formed in Comparative Example 9; and FIG. 3 is a photograph illustrating the x-ray observation results of the defective solder joints (solder bumps) formed in Comparative Example 9.

Claims (6)

一種無鉛無銅錫合金,以該無鉛無銅錫合金的總重為100 wt%計,包含: 3.0~5.0 wt%的銀; 0.01~3.5 wt%的鉍; 0.01~3.5 wt%的銻; 0.005~0.1 wt%的鎳; 0.005~0.02 wt%的鍺;及 餘量的錫。A lead-free copper-free tin alloy, based on the total weight of the lead-free copper-free tin alloy as 100 wt%, comprising: 3.0~5.0 wt% silver; 0.01~3.5 wt% bismuth; 0.01~3.5 wt% antimony; 0.005~0.1 wt% nickel; 0.005~0.02 wt% germanium; and The balance of tin. 如請求項1所述的無鉛無銅錫合金,其中,該無鉛無銅錫合金包含2.5~3.5 wt%的鉍。The lead-free copper-free tin alloy according to claim 1, wherein the lead-free copper-free tin alloy contains 2.5 to 3.5 wt% of bismuth. 如請求項1所述的無鉛無銅錫合金,其中,該無鉛無銅錫合金包含0.5~1.5 wt%的銻。The lead-free copper-free tin alloy according to claim 1, wherein the lead-free copper-free tin alloy contains 0.5 to 1.5 wt% of antimony. 如請求項1所述的無鉛無銅錫合金,其中,該無鉛無銅錫合金包含0.045~0.055 wt%的鎳。The lead-free copper-free tin alloy according to claim 1, wherein the lead-free copper-free tin alloy contains 0.045 to 0.055 wt% nickel. 如請求項1所述的無鉛無銅錫合金,其中,該無鉛無銅錫合金包含0.005~0.015 wt%的鍺。The lead-free copper-free tin alloy according to claim 1, wherein the lead-free copper-free tin alloy contains 0.005 to 0.015 wt% germanium. 一種用於球柵陣列封裝的錫球,是由請求項1所述的無鉛無銅錫合金所製成。A tin ball used for ball grid array packaging is made of the lead-free copper-free tin alloy described in claim 1.
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