TW202126577A - Method of manufacturing porous silicon particles and manufacturing equipment implementing such method - Google Patents

Abstract

The invention discloses a method of manufacturing a plurality of porous silicon particles and a manufacturing equipment implementing such method. The method according to the invention utilizes a plurality of silicon particles to react with a first magnesium vapor into a plurality of Mg-Si alloy particles. Then the method according to the invention is to heat the plurality of Mg-Si alloy particles such that the plurality of Mg-Si alloy particles are transformed into the plurality of porous silicon particles and a second magnesium vapor. Finally, the method according to the invention is to collect the plurality of porous silicon particles.

Description

Method for manufacturing porous silicon particles and manufacturing equipment for performing the method

The present invention relates to a method for manufacturing multiple porous silicon particles and manufacturing equipment for performing the method, and in particular, to a method for manufacturing multiple porous silicon particles without using a pickling process or even using silicon particles recovered from silicon mud waste And the manufacturing equipment that executes the method.

Porous silicon material has unique photoelectric properties, and its large specific surface area allows it to be used in various detectors, biological micro-sensors, photoelectric nano-devices, energy storage materials and other fields, especially as a negative electrode material for lithium batteries, which has attracted much attention in recent years. . Compared with traditional anode materials, silicon has an ultra-high theoretical specific capacity (4200mAh/g) and a lower delithiation potential (<0.5V). It is difficult to cause surface lithium deposition during charging and has better safety performance. At present, silicon has become one of the promising options for upgrading the carbon-based anode of lithium-ion batteries. However, the disadvantage of silicon as a negative electrode material for lithium-ion batteries is that its own conductivity is low. During the electrochemical loop, the volume expands and contracts by more than 300%. The mechanical force generated will gradually pulverize the material and cause the structure to collapse. , Resulting in greatly reduced battery loop performance. Therefore, micro-nanoization of silicon materials, improvement of microstructure, and conductivity are all very effective methods. Among them, the structure of micro-nanoporous silicon can effectively buffer volume expansion, improve initial efficiency, loop stability, and rate performance.

The prior art for manufacturing porous silicon particles is to first mix and heat polysilicon particles with magnesium raw materials to form magnesium-silicon alloy particles. In the prior art, the magnesium-silicon particles are heated in a nitrogen furnace atmosphere to allow the magnesium in the magnesium-silicon alloy particles to react into magnesium nitride particles. In the prior art, the magnesium nitride particles were removed by the pickling process to obtain more Pieces of porous silicon particles. Obviously, the prior art for manufacturing porous silicon particles has the time-consuming problem of moving the intermediate product out of the heating furnace, and the environmental protection problems of leaving the waste acid solution after the pickling process.

In addition, one of the main solid wastes in the photovoltaic industry is the silicon mud waste in the process of cutting silicon wafers from silicon ingots. In particular, the recycling of silica sludge waste has become an urgent problem because nearly 100,000 tons of silica sludge waste are generated every year.

In 2018, more than 100GW of silicon solar panels were produced. These silicon solar panels used about 400,000 tons of silicon. These silicon are mainly produced by the energy-intensive Siemens process. Ironically, during the wafer slicing process, approximately 30% to 40% of the high-purity silicon is discarded in the form of a slurry loss from chips. Nowadays, landfill is a common way to dispose of silica mud waste.

At present, many studies have tried many feasible applications after recycling silicon mud waste. However, since the purity and metal impurities of the recycled silica sludge waste have not yet reached the application requirements, there is still a long way to go for the feasible application of these silica sludge wastes after recycling. Therefore, in view of the purity and metal impurities of the recycled silica sludge waste after treatment, it is economically feasible and beneficial to purify the recycled silica sludge waste and finally use it in the manufacture of porous silicon particles. In addition to reducing waste, it is economically feasible and beneficial of.

Therefore, one of the technical problems that the present invention intends to solve is to provide a method for manufacturing multiple porous silicon particles without using a pickling process or even using silicon particles recovered from silicon sludge waste, and a manufacturing equipment for implementing the method.

The method for manufacturing multiple porous silicon particles in the first preferred embodiment of the present invention firstly prepares multiple silicon particles and a magnesium raw material, wherein the multiple silicon particles are placed on top of the magnesium raw material. Next, the method of the present invention is to heat the magnesium raw material to a first temperature in a passive furnace atmosphere to generate a first magnesium vapor, so that a plurality of silicon particles react with the first magnesium vapor to form a plurality of magnesium-silicon alloy particles. catch Therefore, the method of the present invention is to heat a plurality of magnesium-silicon alloy particles to a second temperature in a vacuum environment, so that the plurality of magnesium-silicon alloy particles are transformed into a plurality of porous silicon particles and a second magnesium vapor. Finally, the method of the present invention collects multiple porous silicon particles.

In the second preferred embodiment of the present invention, the method for manufacturing a plurality of porous silicon particles firstly prepares a plurality of silicon particles and a plurality of magnesium particles. Next, the method of the present invention is to mix a plurality of silicon particles with a plurality of magnesium particles. Next, the method of the present invention is to mix the silicon particles and the magnesium particles to a first temperature in a passive furnace atmosphere to generate the first magnesium vapor, causing the silicon particles to react with the first magnesium vapor Into multiple magnesium-silicon alloy particles. Next, the method of the present invention is to heat a plurality of magnesium-silicon alloy particles to a second temperature in a vacuum environment, so that the plurality of magnesium-silicon alloy particles are transformed into a plurality of porous silicon particles and a second magnesium vapor. Finally, the method of the present invention collects multiple porous silicon particles.

In a specific embodiment, the first temperature ranges from 700°C to 850°C.

In a specific embodiment, the second temperature ranges from 800°C to 900°C.

In a specific embodiment, the plurality of porous silicon particles have a particle size ranging from 0.1 μm to 5 μm.

The manufacturing equipment of the third preferred embodiment of the present invention includes a furnace body, a cooling jacket, at least one deposition substrate, a vacuum exhaust device, and a passive gas supply device. Alternatively, the magnesium raw material and multiple silicon particles are placed in the furnace body, and the multiple silicon particles are placed on the magnesium raw material, or multiple silicon particles and multiple magnesium particles are mixed and placed in the furnace body. The cooling jacket is arranged on the first top of the furnace body and communicates with the first top of the furnace body. The cooling jacket has a liquid storage cavity, a liquid inlet and a liquid outlet. At least one deposition substrate is placed in the cooling jacket and thermally coupled with the inner wall of the cooling jacket. The vacuum pumping device is in communication with the second top of the cooling jacket. Passive gas supply system and cooling The second top of the jacket communicates with each other. The passive gas supply device continuously operates to supply the passive gas to form a passive furnace atmosphere in the furnace body and the cooling jacket. The furnace body is then heated to the first temperature to generate the first magnesium vapor from the magnesium raw material or the plurality of magnesium particles, so that the plurality of silicon particles react with the first magnesium vapor to form a plurality of magnesium-silicon alloy particles. After the plurality of magnesium-silicon alloy particles are cooled, the vacuum exhaust device continues to operate to form a vacuum environment in the furnace body and the cooling jacket. The furnace body is then heated to a second temperature, so that the plurality of magnesium-silicon alloy particles are transformed into a plurality of porous silicon particles and a second magnesium vapor. The cooling liquid flows from the liquid inlet of the cooling jacket into the liquid storage chamber and flows out from the liquid outlet of the cooling jacket, so that the temperature of at least one deposition substrate is lower than the third temperature, so that the second magnesium vapor flowing through the cooling jacket is deposited on at least A magnesium deposit is formed on a deposition substrate.

Further, the manufacturing equipment according to the present invention further includes a first baffle plate. The first baffle is arranged above the space enclosed by at least one deposition substrate. The second magnesium vapor is also deposited on the first barrier.

Furthermore, the manufacturing equipment according to the present invention further includes a second baffle plate. The vacuum pumping device is communicated with the second top of the cooling jacket through a pipe. The second baffle is arranged in the cooling jacket close to the duct to prevent the second magnesium vapor from being drawn out of the cooling jacket.

Unlike the prior art, the method of the present invention does not use a pickling process or even uses silicon particles recovered from silicon mud waste to produce multiple porous silicon particles. The manufacturing equipment implementing the method of the present invention does not need to cool the intermediate product and then take it out during the manufacturing process, and can even recover the magnesium vapor for reuse.

The advantages and spirit of the present invention can be further understood from the following detailed description of the invention and the accompanying drawings.

1‧‧‧Method

S10~S16‧‧‧Process steps

2‧‧‧Method

S20~S28‧‧‧Process steps

3‧‧‧Manufacturing equipment

30‧‧‧Furnace body

300‧‧‧Second through hole

301‧‧‧Upper heating space

302‧‧‧First top

303‧‧‧Lower heating space

304‧‧‧Seat body

306‧‧‧Heater

31‧‧‧Partition

312‧‧‧First through hole

32‧‧‧Cooling Jacket

322‧‧‧Second top

324‧‧‧Liquid reservoir

326‧‧‧Liquid inlet

328‧‧‧Liquid outlet

33‧‧‧Deposition substrate

332‧‧‧Space

34‧‧‧Vacuum pumping device

342‧‧‧Conduit

35‧‧‧Passive gas supply device

36‧‧‧First stop

37‧‧‧Second stop

40‧‧‧Silicon particles

42‧‧‧Magnesium raw material

43‧‧‧First Magnesium Vapor

44‧‧‧Magnesium-silicon alloy particles

45‧‧‧Second Magnesium Vapor

46‧‧‧Porous silicon particles

47‧‧‧Magnesium deposits

5‧‧‧Crucible

L‧‧‧Cooling liquid

FIG. 1 is the flow of each program step of the method of the first preferred embodiment of the present invention picture.

Fig. 2 is a flowchart of each program step of the method of the second preferred embodiment of the present invention.

FIG. 3 is a schematic diagram of the structure of the manufacturing equipment of the third preferred embodiment of the present invention.

4 and 5 are schematic diagrams of the manufacturing equipment shown in FIG. 3 in different stages of manufacturing multiple porous silicon particles.

6 is a scanning electron microscope (SEM) photograph of the high-purity silicon powder recovered from the silicon mud used in the first example of the present invention.

FIG. 7 is an SEM photograph of a plurality of magnesium-silicon alloy particles obtained by an example of the present invention and the composition result of an X-ray energy dispersive analyzer (EDS).

FIG. 8 is the SEM photograph and EDS analysis result of multiple porous silicon particles obtained by heating to 800° C. in a vacuum environment and holding the temperature for 30 minutes in the first example of the present invention.

FIG. 9 is the SEM photograph and EDS analysis result of multiple porous silicon particles obtained by heating to 850° C. under a vacuum environment and holding the temperature for 60 minutes in the first example of the present invention.

Please refer to FIG. 1, which is a flowchart of method 1 according to the first preferred embodiment of the present invention. According to the method 1 of the first preferred embodiment of the present invention, the pickling process used in the prior art is not used to manufacture a plurality of porous silicon particles.

As shown in FIG. 1, the method 1 of the present invention firstly performs step S10 to prepare a plurality of silicon particles and a magnesium raw material, wherein the plurality of silicon particles are placed on the magnesium raw material.

In practical applications, multiple silicon powders can be recycled from silicon mud The high-purity silica powder. Silicon mud is obtained by cutting silicon crystal rods and silicon crystal ingots using wire cutting technology. The components of silicon mud include organic matter, metal substances, multiple silicon powders, and multiple silicon carbide powders. The prior art can recover silicon with very high purity from silicon sludge, so I will not repeat it here. The magnesium raw material may be granular or lumpy.

Next, the method 1 of the present invention executes step S12. In a passive furnace atmosphere, the magnesium raw material is heated to a first temperature to generate a first magnesium vapor, so that a plurality of silicon particles react with the first magnesium vapor to form a plurality of magnesium particles. Silicon alloy particles.

In a specific embodiment, the first temperature ranges from 700°C to 850°C.

In a specific embodiment, the passive atmosphere of the furnace is argon, and the volume flow rate of argon is in the range of 0.1L/min to 2L/min.

Next, the method 1 of the present invention executes step S14 in which a plurality of magnesium-silicon alloy particles are heated to a second temperature in a vacuum environment, so that the plurality of magnesium-silicon alloy particles are transformed into a plurality of porous silicon particles and a second magnesium vapor.

In a specific embodiment, the second temperature ranges from 800°C to 900°C.

In a specific embodiment, the vacuum degree of the vacuum environment is less than 1 torr.

Finally, the method 1 of the present invention executes step S16 to collect a plurality of porous silicon particles.

In a specific embodiment, the plurality of porous silicon particles have a particle size ranging from 0.1 μm to 5 μm.

Please refer to FIG. 2, which is a flowchart of method 2 according to a second preferred embodiment of the present invention. Similarly, the method 2 according to the second preferred embodiment of the present invention does not use the pickling process used in the prior art to produce multiple porous silicon particles.

As shown in FIG. 2, the method 2 of the present invention firstly performs step S20 to prepare a plurality of silicon particles and a plurality of magnesium particles.

In practical applications, high-purity silicon powder recovered from silicon mud can be used for multiple silicon powders. Silicon mud is obtained by cutting silicon crystal rods and silicon crystal ingots using wire cutting technology. The components of silicon mud include organic matter, metal substances, multiple silicon powders, and multiple silicon carbide powders. The prior art can recover silicon with very high purity from silicon sludge, so I will not repeat it here. The magnesium raw material may be granular or lumpy.

Next, the method 2 of the present invention executes step S22 to mix a plurality of silicon particles with a plurality of magnesium particles.

Next, the method 2 of the present invention executes step S24. In a passive furnace atmosphere, the mixed silicon particles and magnesium particles are heated to a first temperature to generate a first magnesium vapor, resulting in a plurality of silicon particles It reacts with the first magnesium vapor to form a plurality of magnesium-silicon alloy particles.

In a specific embodiment, the first temperature ranges from 700°C to 850°C.

Next, the method 2 of the present invention executes step S26 in which a plurality of magnesium-silicon alloy particles are heated to a second temperature in a vacuum environment, so that the plurality of magnesium-silicon alloy particles are transformed into a plurality of porous silicon particles and a second magnesium vapor.

In a specific embodiment, the second temperature ranges from 800°C to 900°C.

In a specific embodiment, the vacuum degree of the vacuum environment is less than 1 torr.

Finally, the method 2 of the present invention executes step S28 to collect a plurality of porous silicon particles.

In a specific embodiment, the plurality of porous silicon particles have a particle size ranging from 0.1 μm to 5 μm.

Please refer to FIG. 3, FIG. 4, and FIG. 5. FIG. 3, FIG. 4, and FIG. 5 schematically illustrate the structure of the manufacturing equipment 3 according to the third preferred embodiment of the present invention. In Figures 3, 4, and 5, some components and devices are shown in cross-sectional views.

As shown in FIGS. 3, 4, and 5, the manufacturing equipment 3 according to the third preferred embodiment of the present invention includes a furnace body 30, a cooling jacket 32, at least one deposition substrate 33, a vacuum exhaust device 34, and a blunt State gas supply device 35.

The furnace body 30 includes a thermally insulated base body 304 and at least one heater 306. In a specific embodiment, the base 304 may be made of carbon fiber, but it is not limited thereto. Alternatively, the magnesium raw material 42 and the multiple silicon particles 40 are placed in the furnace body 30, and the multiple silicon particles 40 are placed on the magnesium raw material 42, or the multiple silicon particles 40 and multiple magnesium particles ( (Not shown in the figure) After mixing, it is placed in the furnace body 30.

Also as shown in FIG. 3, the manufacturing equipment 3 according to the third preferred embodiment of the present invention further includes a partition 31. The partition 31 is placed in the furnace body 30 to partition the furnace body 30 into an upper heating space 301 and a lower heating space 303. The partition 31 has a plurality of first through holes 312. The case shown in FIG. 3 is to place a plurality of silicon particles 40 in the heating space 301 above the furnace body 30. The magnesium raw material 42 is placed in the heating space 303 under the furnace body. The plurality of first through holes 312 allow the upper heating space 301 to communicate with the lower heating space 303.

The case shown in FIG. 3 is that a plurality of silicon particles 40 and magnesium raw materials 42 can be placed in the crucible 5. The magnesium raw material 42 can be placed at the bottom of the crucible 5. The partition 31 may be installed in the middle part of the crucible 5. A plurality of silicon particles 40 can be placed on the partition 31. Then, the crucible 5 containing a plurality of first silicon particles 40 and magnesium raw materials 42 is placed in the furnace body 30, and at least one heater 306 surrounds the outer wall of the crucible 5. In a specific embodiment, the crucible 5 can be made of graphite, but it is not limited to this. In a specific embodiment, the diameter of each first through hole 312 of the separator 31 is smaller than the diameter of each silicon particle 40.

Alternatively, by using the manufacturing equipment 3 according to the third preferred embodiment of the present invention, a plurality of silicon particles 40 and a plurality of magnesium particles (not shown in the figure) can be mixed and placed in the crucible 5 , And then put the crucible 5 in the furnace body 30.

The cooling jacket 32 is arranged on the first top 302 of the furnace body 30 and communicates with the first top 302 of the furnace body 30. For example, as shown in FIG. 3, the first top 302 of the furnace body 30 has a plurality of second through holes 300. The plurality of second through holes 300 allow the cooling jacket 32 to communicate with the first top 302 of the furnace body 30.

The cooling jacket 32 has a liquid storage cavity 324, a liquid inlet 326 and a liquid outlet 328. The cooling liquid L flows from the liquid inlet 326 of the cooling jacket 32 into the liquid storage cavity 324 of the cooling jacket 32 and flows out from the liquid outlet 328 of the cooling jacket 32.

At least one deposition substrate 33 is placed in the cooling jacket 32 and thermally coupled with the inner wall of the cooling jacket 32. The vacuum exhaust device 34 is in communication with the second top 322 of the cooling jacket 32. The passive gas supply device 35 is in communication with the second top 322 of the cooling jacket 32.

Please refer to FIGS. 3, 4, and 5 again, using the manufacturing equipment 3 according to the third preferred embodiment of the present invention to manufacture a plurality of porous silicon particles 46 as described below.

As shown in FIG. 4, then, the passive gas supply device 35 continues to operate to supply a passive gas (for example, argon) to form a passive atmosphere in the furnace body 30 and the cooling jacket 32. Then, the furnace body 30 is heated to the first temperature and maintained for the first heating time, so that the magnesium raw material 42 (or a plurality of magnesium particles) evaporates into the first magnesium vapor 43. The first magnesium vapor 43 flows to the upper heating space 301 through the plurality of first through holes 312, so that the plurality of silicon particles 40 and the first magnesium vapor 43 react to form a plurality of magnesium-silicon alloy particles 44. The range of the first temperature is as described above, and will not be repeated here. The first heating time may be 2hr to 8hr.

As shown in FIG. 5, after the plurality of magnesium-silicon alloy particles 44 are cooled, the vacuum exhaust device 34 continues to operate to cool the interior of the furnace body 30 and A vacuum environment is formed in the jacket 32. The furnace body 30 is then heated to the second temperature and maintained for the second heating time, so that the plurality of magnesium-silicon alloy particles 44 are transformed into a plurality of porous silicon particles 46 and the second magnesium vapor 45.

The second magnesium vapor 45 passes through the second through hole 300 and flows into the cooling jacket 32. The second through hole 300 can also prevent the multiple silicon particles 40, the multiple magnesium-silicon alloy particles 44, or the multiple porous silicon particles 46 from splashing into the cooling jacket 32.

The cooling liquid L continues to flow from the liquid inlet 326 of the cooling jacket 32 into the liquid storage cavity 324 of the cooling jacket 32 and flows out from the liquid outlet 328 of the cooling jacket 32, so that the temperature of at least one deposition substrate 33 is lower than the third temperature, causing the flow The second magnesium vapor 45 in the cooling jacket 32 is deposited on at least one deposition substrate 33 to form a magnesium deposit 47. Finally, after the furnace body 30 is cooled, a plurality of porous silicon particles 46 and magnesium deposits 47 are taken out. The range of the second temperature and the degree of vacuum of the vacuum environment are as described above, and will not be repeated here. The second heating time may be 20 min to 2 hr.

In a specific embodiment, the cooling liquid L may be water, but it is not limited to this.

In a specific embodiment, the third temperature ranges from 400°C to 600°C.

Furthermore, as also shown in FIGS. 3, 4 and 5, the manufacturing equipment 3 according to the third preferred embodiment of the present invention further includes a first baffle plate 36. The first baffle 36 is disposed above the space 332 enclosed by at least one deposition substrate 33. The second magnesium vapor 45 is also deposited on the first baffle plate 36.

Furthermore, as also shown in FIGS. 3, 4 and 5, the manufacturing equipment 3 according to the third preferred embodiment of the present invention further includes a second baffle 37. The vacuum exhaust device 34 is communicated with the second top 322 of the cooling jacket 32 through a pipe 342. The second baffle plate 37 is arranged in the cooling jacket 32 close to the duct 342 to prevent the second magnesium vapor 45 from being drawn out of the cooling jacket 32.

In the first example, the method according to the first preferred embodiment of the present invention uses high-purity silicon powder recovered from silicon mud to produce a plurality of porous silicon particles. The SEM photo of the high-purity silica powder recovered from the silica mud is shown in Figure 6. Next, in the first example of the present invention, in an argon passive atmosphere, the magnesium raw material is heated to 800°C and held at the temperature for 5 hours to generate the first magnesium vapor, so that multiple silicon particles react with the first magnesium vapor to form multiple particles Magnesium-silicon alloy particles. The SEM photos and EDS analysis results of the multiple magnesium-silicon alloy particles obtained in the first example of the present invention are shown in FIG. 7. The EDS analysis result of FIG. 7 confirms that the magnesium/silicon ratio of the multiple magnesium-silicon alloy particles obtained in the first example of the present invention is 1.9, and there are particle aggregates with a size of about 100 μm. The remaining magnesium raw materials will produce MgO particles, and the composition test found that the MgO particles contained carbon and nickel. The first example of the present invention heats the obtained magnesium-silicon alloy particles to 800°C and holds the temperature for 30 minutes in a vacuum environment, so that the magnesium-silicon alloy particles are transformed into porous silicon particles and The second magnesium vapor. In the first example of the present invention, the SEM photographs and EDS analysis results of multiple porous silicon particles obtained by heating to 800° C. and holding the temperature for 30 minutes are shown in FIG. 8. The EDS analysis result of Fig. 8 confirms that the Mg/Si ratio of the porous silicon particles is 0.12, and the SEM photograph of Fig. 8 confirms that particle aggregation has been reduced. The first example of the present invention further heats the obtained magnesium-silicon alloy particles to 850°C and holds the temperature for 60 minutes in a vacuum environment, so that the magnesium-silicon alloy particles are transformed into porous silicon particles. And the second magnesium vapor. In the first example of the present invention, the SEM photographs and EDS analysis results of multiple porous silicon particles obtained by heating to 850° C. and holding the temperature for 60 minutes are shown in FIG. 9. The EDS analysis result of Fig. 9 confirms that the Mg/Si ratio of the porous silicon particles is 0.19, and the SEM photograph of Fig. 9 confirms that particle aggregation has been reduced.

In the second example, the method according to the second preferred embodiment of the present invention uses high-purity silicon powder recovered from silicon mud to produce a plurality of porous silicon particles. Next, in the second example of the present invention, a plurality of silicon particles and a plurality of magnesium particles are mixed in an argon passive atmosphere, and then heated to 800°C and held at the temperature for 5 hours to generate the first magnesium vapor, resulting in a plurality of silicon particles It reacts with the first magnesium vapor to form a plurality of magnesium-silicon alloy particles. EDS of multiple magnesium-silicon alloy particles obtained in the second example of the present invention The composition analysis results confirmed that the magnesium/silicon ratio of the magnesium-silicon alloy particles obtained in the second example of the present invention is 2.4. The second example of the present invention heats the obtained multiple magnesium-silicon alloy particles to 800°C and holds the temperature for 30 minutes under a vacuum environment, so that the multiple magnesium-silicon alloy particles are transformed into multiple porous silicon particles and The second magnesium vapor. In the second example of the present invention, the holes on the surface of multiple porous silicon particles obtained by heating to 800° C. and holding the temperature for 30 minutes are more obvious.

Compared with the prior art, the method of the present invention does not use the pickling process or even uses the silicon particles recovered from the silicon mud waste to produce multiple porous silicon particles. There is no environmental protection problem of the waste acid liquid treatment, and it can also reduce the waste of the silicon mud. It is transformed into an economically feasible and beneficial product. The manufacturing equipment implementing the method of the present invention does not need to cool the intermediate product and then take it out during the manufacturing process, and can even recover the magnesium vapor for reuse.

Based on the above detailed description of the preferred embodiments, it is hoped that the characteristics and spirit of the present invention can be described more clearly, rather than limiting the aspect of the present invention by the preferred embodiments disclosed above. On the contrary, its purpose is to cover various changes and equivalent arrangements within the scope of the patent for which the present invention is intended. Therefore, the aspect of the patent scope applied for by the present invention should be interpreted in the broadest way based on the above description, so as to cover all possible changes and equivalent arrangements.

1‧‧‧Method

S10~S16‧‧‧Process steps

Claims (10)

A method of manufacturing multiple porous silicon particles includes the following steps: Preparing a plurality of silicon particles and a magnesium raw material, wherein the plurality of silicon particles are placed above the magnesium raw material; In a passive furnace atmosphere, heating the magnesium raw material to a first temperature to generate a first magnesium vapor, so that the plurality of silicon particles and the first magnesium vapor react to form a plurality of magnesium-silicon alloy particles; In a vacuum environment, the plurality of magnesium-silicon alloy particles are heated to a second temperature, so that the plurality of magnesium-silicon alloy particles are transformed into the plurality of porous silicon particles and a second magnesium vapor; and the plurality of porous particles are collected Silicon particles. The method according to claim 1, wherein the first temperature ranges from 700°C to 850°C, and the second temperature ranges from 800°C to 900°C. The method according to claim 2, wherein the plurality of porous silicon particles have a particle size ranging from 0.1 μm to 5 μm. A method of manufacturing multiple porous silicon particles includes the following steps: Preparation of multiple silicon particles and multiple magnesium particles; Mixing the plurality of silicon particles with the plurality of magnesium particles; In a passive furnace atmosphere, the mixed silicon particles and the magnesium particles are heated to a first temperature to generate a first magnesium vapor, so that the silicon particles and the first magnesium vapor React into multiple magnesium-silicon alloy particles; In a vacuum environment, the plurality of magnesium-silicon alloy particles are heated to a second temperature, so that the plurality of magnesium-silicon alloy particles are transformed into the plurality of porous silicon particles and a second magnesium vapor; and the plurality of porous particles are collected Silicon particles. The method according to claim 4, wherein the first temperature ranges from 700°C To 850°C, the second temperature ranges from 800°C to 900°C. The method according to claim 5, wherein the plurality of porous silicon particles have a particle size ranging from 0.1 μm to 5 μm. A manufacturing equipment that includes: A furnace body, wherein a magnesium raw material and a plurality of silicon particles are placed in the furnace body, and the plurality of silicon particles are placed on the magnesium raw material, or the plurality of silicon particles and a plurality of silicon particles are placed above the magnesium raw material. The magnesium particles are mixed and placed in the furnace body; A cooling jacket arranged on a first top of the furnace body and communicating with the first top of the furnace body, the cooling jacket having a liquid storage cavity, a liquid inlet and a liquid outlet; At least one deposition substrate is placed in the cooling jacket and thermally coupled with an inner wall of the cooling jacket; A vacuum pumping device connected with a second top of the cooling jacket; and a passive gas supply device connected with the second top of the cooling jacket; The passive gas supply device continuously operates to supply a passive gas to form a passive furnace atmosphere in the furnace body and the cooling jacket; The furnace body is then heated to a first temperature to generate a first magnesium vapor from the magnesium raw material or the plurality of magnesium particles, so that the plurality of silicon particles react with the first magnesium vapor to form a plurality of magnesium-silicon alloy particles; After the plurality of magnesium-silicon alloy particles are cooled, the vacuum exhaust device continues to operate to form a vacuum environment in the furnace body and the cooling jacket; The furnace body is then heated to a second temperature, so that the plurality of magnesium-silicon alloy particles are transformed into the plurality of porous silicon particles and a second magnesium vapor; A cooling liquid flows from the liquid inlet into the liquid storage chamber and flows out from the liquid outlet, so that the temperature of the at least one deposition substrate is lower than a third temperature, so that the second magnesium vapor flowing through the cooling jacket is deposited on the A magnesium deposit is formed on at least one deposition substrate. The manufacturing equipment according to claim 7, wherein the range of the first temperature is from 700°C to 850°C, the range of the second temperature is from 800°C to 900°C, and the range of the third temperature is from 400°C to 600°C. The manufacturing equipment according to claim 8, wherein the plurality of porous silicon particles have a particle size ranging from 0.1 μm to 5 μm. The manufacturing equipment according to claim 8, further comprising a baffle plate disposed above one of the spaces enclosed by the at least one deposition substrate, wherein the second magnesium vapor is also deposited on the baffle plate.

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