TW202125715A - Semiconductor device - Google Patents
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- G—PHYSICS
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- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/41—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
- G11C11/413—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction
- G11C11/417—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction for memory cells of the field-effect type
- G11C11/419—Read-write [R-W] circuits
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- G—PHYSICS
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- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
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- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/41—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
- G11C11/413—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction
- G11C11/417—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction for memory cells of the field-effect type
- G11C11/418—Address circuits
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
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Abstract
Description
本揭露係關於一種半導體裝置,特別是改善SRAM單元的讀取/寫入餘量的半導體裝置。This disclosure relates to a semiconductor device, particularly a semiconductor device that improves the read/write margin of an SRAM cell.
半導體積體電路(integrated circuit;IC)工業呈指數成長。在IC材料及IC設計的技術進步產生多個IC世代,每一個IC世代比上一個IC世代有更小及更複雜的電路。在IC發展過程中,製程可作出之幾何尺寸(例如:最小部件(或線路))會下降,而功能密度(例如:每一晶片區域的相連元件數量)通常都會增加。此微縮過程藉由增加生產效率及降低相關成本提供了優勢。此微縮亦增加了IC製程及製造的複雜性。The semiconductor integrated circuit (IC) industry is growing exponentially. Technological advances in IC materials and IC design have produced multiple IC generations, each of which has smaller and more complex circuits than the previous IC generation. In the process of IC development, the geometric dimensions (for example, the smallest component (or circuit)) that can be made by the process will decrease, and the functional density (for example: the number of connected components per chip area) will generally increase. This miniaturization process provides advantages by increasing production efficiency and reducing related costs. This miniaturization also increases the complexity of the IC manufacturing process and manufacturing.
靜態隨機存取記憶體(static random-access memory;SRAM)通常是指僅在施加功率時才能保留儲存的資料的任何記憶體或儲存裝置。為了節省功率並提高能量效率,並減少關閉(OFF)狀態下的漏電流,降低電源電壓通常是有助的。然而,電源電壓的降低受到最小閾值電壓(Vcc-min)的限制。當以接近或低於Vcc-min的電源電壓工作時,SRAM晶片可能會出現故障率增加甚至故障的情況。舉例來說,寫入操作的速度取決於放電速度,而放電速度又取決於施加的電壓。當電源電壓接近或低於Vcc-min時,這種放電變得沒效率,並且速度低及/或穩定性低。對於遠離電源的SRAM晶片週邊的位元元件(bit cell),這種挑戰更加嚴重。這是因為位元線的電阻進一步降低了施加在這些元件上的電壓。隨著製程持續微縮,位元線的電阻增加,進一步加劇了問題。Static random-access memory (SRAM) generally refers to any memory or storage device that can retain stored data only when power is applied. In order to save power and improve energy efficiency, and to reduce the leakage current in the OFF state, it is usually helpful to reduce the power supply voltage. However, the reduction of the power supply voltage is limited by the minimum threshold voltage (Vcc-min). When working with a power supply voltage close to or lower than Vcc-min, the SRAM chip may experience increased failure rate or even failure. For example, the speed of the write operation depends on the discharge speed, which in turn depends on the applied voltage. When the power supply voltage is close to or lower than Vcc-min, this discharge becomes inefficient, and the speed and/or stability are low. For the bit cells around the SRAM chip far away from the power supply, this challenge is even more serious. This is because the resistance of the bit line further reduces the voltage applied to these elements. As the manufacturing process continues to shrink, the resistance of the bit line increases, further exacerbating the problem.
本揭露提供一種半導體裝置。半導體裝置包括位元陣列、邊緣區域以及複數位元線驅動器。位元陣列以複數列和複數行排列,其中行由連接至行中的複數記憶體元件的複數位元線對定義。邊緣區域與位元陣列的邊緣列相鄰,其中邊緣列包括複數冗餘記憶體元件。複數位元線驅動器與位元陣列相鄰,並且與邊緣區域相對。冗餘記憶體元件包括用於位元線對之每一者的寫入輔助電路。The present disclosure provides a semiconductor device. The semiconductor device includes a bit array, an edge area, and a plurality of bit line drivers. The bit array is arranged in plural columns and plural rows, where the rows are defined by the plural bit line pairs connected to the plural memory elements in the rows. The edge area is adjacent to the edge row of the bit array, and the edge row includes a plurality of redundant memory elements. The plural bit line drivers are adjacent to the bit array and opposite to the edge area. The redundant memory device includes a write assist circuit for each of the bit line pairs.
本揭露提供一種半導體裝置。半導體裝置包括記憶體元件陣列、複數位元線對、複數字元線以及複數位元線驅動器。記憶體元件陣列包括複數記憶體元件,記憶體元件沿著第一方向排列成複數列,並且沿著與第一方向不同的第二方向排列成複數行。複數位元線對連接上述行之每一者中的記憶體元件。複數字元線連接上述列之每一者中的記憶體元件。複數位元線驅動器連接至位元線對的複數位元線,位元線驅動器與記憶體元件陣列的第一列相鄰。記憶體單元陣列包括複數冗餘元件的一列,與位元線驅動器相距一距離。冗餘元件之每一者從剩餘的記憶體元件修改,以包括連接至位元線對之每一者的至少一位元線的寫入輔助裝置。The present disclosure provides a semiconductor device. The semiconductor device includes an array of memory elements, a plurality of bit line pairs, a plurality of bit lines, and a plurality of bit line drivers. The memory element array includes a plurality of memory elements, the memory elements are arranged in a plurality of rows along a first direction, and are arranged in a plurality of rows along a second direction different from the first direction. A plurality of bit line pairs connect the memory elements in each of the above rows. The multiple-digit cell lines connect the memory elements in each of the above-mentioned lists. The multiple bit line drivers are connected to the multiple bit lines of the bit line pair, and the bit line drivers are adjacent to the first row of the memory element array. The memory cell array includes a row of redundant elements, which is a distance away from the bit line driver. Each of the redundant elements is modified from the remaining memory elements to include a write assist device connected to at least one bit line of each of the bit line pairs.
本揭露提供一種半導體裝置。半導體裝置包括基板、記憶體元件陣列、複數寫入輔助電路以及複數導線。基板具有第一區域和第二區域。記憶體元件陣列在第一區域中,記憶體元件陣列包括複數記憶體元件,記憶體元件沿著第一方向排列成複數列,並且沿著與第一方向不同的第二方向排列成複數行。複數寫入輔助電路在第二區域中。複數導線將記憶體元件陣列電性耦接至寫入輔助電路。導線之每一者將記憶體元件的一行電性耦接至寫入輔助電路之一者。第二區域是基板的冗餘區域,冗餘區域遠離用於在導線上驅動資料的驅動器電路,並且藉由記憶體元件陣列與驅動器電路分開。The present disclosure provides a semiconductor device. The semiconductor device includes a substrate, a memory element array, a plurality of write auxiliary circuits, and a plurality of wires. The substrate has a first area and a second area. The memory element array is in the first region. The memory element array includes a plurality of memory elements, the memory elements are arranged in a plurality of rows along a first direction, and are arranged in a plurality of rows along a second direction different from the first direction. The complex write auxiliary circuit is in the second area. The plurality of wires electrically couple the memory element array to the writing auxiliary circuit. Each of the wires electrically couples a row of the memory device to one of the write auxiliary circuits. The second area is a redundant area of the substrate. The redundant area is far away from the driver circuit for driving data on the wires, and is separated from the driver circuit by the memory element array.
本揭露提供許多不同的實施例或範例以實施本案的不同特徵。以下的揭露內容敘述各個構件及其排列方式的特定實施例,以簡化說明。當然,這些特定的範例並非用以限定。舉例來說,若是本揭露敘述了一第一特徵形成於一第二特徵之上或上方,即表示其可能包含上述第一特徵與上述第二特徵是直接接觸的實施例,亦可能包含了有附加特徵形成於上述第一特徵與上述第二特徵之間,而使上述第一特徵與第二特徵可能未直接接觸的實施例。另外,以下本揭露不同實施例可能重複使用相同的參考符號及/或標記。這些重複係為了簡化與清楚的目的,並非用以限定所討論的不同實施例及/或結構之間有特定的關係。This disclosure provides many different embodiments or examples to implement different features of the case. The following disclosure describes specific embodiments of each component and its arrangement in order to simplify the description. Of course, these specific examples are not meant to be limiting. For example, if the present disclosure describes that a first feature is formed on or above a second feature, it means that it may include an embodiment in which the first feature is in direct contact with the second feature, or it may include The additional feature is formed between the first feature and the second feature, and the first feature and the second feature may not be in direct contact with each other. In addition, the same reference symbols and/or marks may be used repeatedly in different embodiments of the present disclosure below. These repetitions are for the purpose of simplification and clarity, and are not used to limit the specific relationship between the different embodiments and/or structures discussed.
此外,其與空間相關用詞。例如“在…下方”、“下方”、“較低的”、“上方”、“較高的” 及類似的用詞,係為了便於描述圖示中一個元件或特徵與另一個(些)元件或特徵之間的關係。除了在圖式中繪示的方位外,這些空間相關用詞意欲包含使用中或操作中的裝置之不同方位。除此之外,設備可能被轉向不同方位(旋轉90度或其他方位),則在此使用的空間相關詞也可依此相同解釋。In addition, it is related to space terms. For example, "below", "below", "lower", "above", "higher" and similar terms are used to facilitate the description of one element or feature and another element(s) in the figure. Or the relationship between features. In addition to the orientations depicted in the drawings, these spatially related terms are intended to include different orientations of the device in use or operation. In addition, the device may be turned to different orientations (rotated by 90 degrees or other orientations), and the spatially related words used here can also be interpreted in the same way.
本揭露通常涉及半導體裝置和電路設計,並且更具體地涉及記憶體陣列,例如靜態隨機存取記憶體(SRAM)。The present disclosure generally relates to semiconductor device and circuit design, and more specifically relates to memory arrays, such as static random access memory (SRAM).
第1圖顯示了具有記憶體單元102的半導體裝置100。半導體裝置可以是微處理器、特殊應用積體電路(application specific integrated circuit;ASIC)、現場可程式化邏輯閘陣列(field programmable gate array;FPGA)或數位訊號處理器(digital signal processor;DSP)。記憶體單元102可以是單端口靜態隨機存取記憶體(SRAM)、雙端口SRAM巨集(macro)或其他類型記憶體。在本實施例中,記憶體單元102是用於半導體裝置100的嵌入式SRAM。應理解其他陣列類型的裝置,例如獨立的SRAM裝置,也可以從本揭露的一個或多個實施例中受益。FIG. 1 shows a
記憶體單元102包括用於儲存的一或多個記憶體位元區塊。半導體裝置100還包括與記憶體單元102相鄰的週邊邏輯電路,週邊邏輯電路用於實現各種功能,例如位址解碼、字元/位元選擇器、資料驅動器、記憶體自測試(memory self-testing)等。每一個記憶體位元和邏輯電路可以用各種P型金屬氧化物半導體(p-type metal oxide semiconductor;PMOS)和N型金屬氧化物半導體(n-type metal oxide semiconductor;NMOS)電晶體實現,例如平面電晶體、鰭式場效電晶體(Fin Field-Effect Transistor;FinFET)、磁式隨機存取記憶體(magnetic random access memory;MRAM)、環繞式閘極(gate-all-around;GAA)奈米片電晶體、GAA奈米線電晶體或其他類型電晶體。此外,記憶體單元102和邏輯電路可以包括用於連接電晶體的源極、汲極以及閘極電極(或端子(terminal))的各種接點(contact)特徵(或接點)、通孔以及金屬線,以形成積體電路。The
仍參照第1圖,出於示例目的,將記憶體單元102顯示為單一記憶體區塊,應理解根據需要可以有更多區塊。記憶體單元102包括邊緣區域104。在本實施例中,邊緣區域104位在記憶體單元的邊緣並且沿著方向X縱向定向。在本實施例中,邊緣區域104不包含記憶體位元,並且用於實現各種週邊電路,包括井拾取(well pick-up;WPU)區。WPU區提供用於向記憶體單元102中的N井和P井供應電壓(或偏壓)的井拾取結構。記憶體單元102還包括與邊緣區域104相鄰的記憶體位元陣列106。記憶體位元陣列106包含記憶體單元102的記憶體位元。記憶體單元102還包括用於位元線驅動器108的區域。位元線驅動器區提供用於位元線(位元線BL)和互補位元線(位元線BLB)的驅動器,每一個驅動器對用於記憶體單元102中的每一個記憶體位元。在本實施例中,位元線驅動器108與邊緣區域104設置在記憶體位元陣列106的兩側。Still referring to FIG. 1, for illustrative purposes, the
參照第2圖,為了簡化示例,根據圖式中所示的x-y軸,記憶體位元陣列106包括48個記憶體元件120,記憶體元件120以複數列和複數行排列。繼續本示例,每一個記憶體元件是連接至字元線WL和一對位元線BL和BLB的六電晶體(6T)記憶體元件。每一個位元線對(位元線BL、BLB)也連接至對應的一對位元線驅動器108。字元線WL由解碼的列位址(row address)選擇,使得在任何時候選擇單一列以用於讀取或寫入操作。Referring to FIG. 2, in order to simplify the example, according to the x-y axis shown in the figure, the
記憶體區塊(memory block)可以包括一或多個冗餘列的記憶體元件,並且在本實施例中,在記憶體位元陣列106的與邊緣區域104(第1圖)相鄰且與位元線驅動器108相對的邊緣上提供冗餘列128。此外,在本實施例中,記憶體元件的冗餘列128是一列的厚度(one-row thick),即它是單一列的冗餘記憶體元件。在其他實施例中,冗餘列128可以具有多列冗餘記憶體元件。The memory block (memory block) may include one or more redundant rows of memory elements, and in this embodiment, the
提供冗餘列的記憶體元件是有原因的。舉例來說,與記憶體位元陣列106的週邊區域相比,記憶體元件區的主動/隔離區通常具有差異。如此一來,與週邊區域(例如邊緣區域104)相鄰的記憶體元件的列通常是未使用的(冗餘的)。There are reasons for providing redundant rows of memory components. For example, compared with the peripheral area of the
對於記憶體寫入操作,位元線驅動器108使用要儲存在由對應字元線WL所選擇的特定列的記憶體元件120中的資料,來驅動其對應的位元線BL、BLB。提供箭頭130以顯示位元線BL、BLB的傳輸線效應。隨著技術的進步,位元線BL、BLB的線寬和厚度變得越來越小。同樣地,記憶體元件的列數以及位元線BL、BLB的長度也變得越來越長。箭頭130顯示包括電阻132,電阻132進一步表示位元線的傳輸線效應。意即,隨著每一個位元線BL、BLB延伸遠離其對應的驅動器,沿著該線具有對應的電流-電壓降(IR drop)。For the memory write operation, the
參照第3圖,在本實施例中,記憶體元件120是六電晶體(6T)SRAM。6T SRAM記憶體元件包括位在兩個傳輸電晶體T1、T2之間的正反器(flip-flop)140。傳輸電晶體T1、T2的閘極共同地連接到對應的字元線WL,使得字元線WL上的訊號142致能傳輸電晶體,以用於資料從正反器140流出或流入正反器140以進行讀取或寫入操作。傳輸電晶體T1的源極/汲極連接在位元線BL和正反器140之間,並且傳輸電晶體T2的源極/汲極連接在位元線BLB和正反器140之間。Referring to FIG. 3, in this embodiment, the
雖然在任何一次僅可致能一列記憶體元件,但是位元線的傳輸線效應受到不利影響,使得與相對接近位元線驅動器的記憶體元件的列相比,相對遠離位元線驅動器108(第2圖)的記憶體元件的列接收到改變的訊號。此再次由在位元線上所示的電阻144、146顯示。應理解所示的電阻代表位元線固有的傳輸線效應。Although only one column of memory elements can be enabled at any one time, the transmission line effect of the bit line is adversely affected, making it relatively far away from the bit line driver 108 (section 2) The row of memory devices receives the changed signal. This is again shown by the
如下面更詳細地討論,在本實施例中,在位元線BL上且與位元線驅動器108(BL)相對的一端上提供寫入輔助裝置150。同樣地,在位元線BLB上且與位元線驅動器108(BLB)相對的一端提供寫入輔助裝置160。在一個實施例中,寫入輔助裝置150、160是在對應的位元線和接地之間一直線連接的電晶體,並且每一個閘極個別連接至寫入輔助訊號152、162。同樣在本實施例中,個別地控制寫入輔助訊號152和162。在另一個實施例中,寫入輔助信號152、162是相同的,並且被提供給寫入輔助裝置150、160兩者。在此實施例中,兩個寫入輔助裝置150、160可以具有極性相反的電晶體。As discussed in more detail below, in this embodiment, a
寫入輔助訊號152、162由寫入輔助訊號驅動器168、169驅動,其可以位在邊緣區域104中。該電路可以基於提供給對應的位元線驅動器108的寫入資料(Data、DataB),以及指示要執行寫入操作的寫入訊號W。也就是說,如果將“0”寫入位元線BL,則將使用(assert)寫入訊號152,而不使用寫入輔助訊號162。同樣地,如果將“1”寫入位元線BL,則將使用寫入輔助訊號162,而不使用寫入輔助訊號152。這樣的驅動器可以由一或多個邏輯閘構成,該邏輯閘是要寫入的資料、寫入致能訊號和其他定時訊號(timing signal)的函數,如本技術領域中具有通常知識者所知的。The writing
寫入輔助裝置150、160被放置在冗餘列128(第2圖)的記憶體元件中。意即,可以修改冗餘列128中原本未使用的記憶體元件,而以最小的修改並且在尺寸上沒有增加或幾乎沒有增加的情況下提供寫入輔助驅動器/訊號功能。下面參照第4a圖和第4b圖描述對冗餘列中的記憶體元件的修改。The
在操作中,當期望將“0”(或接地或低)電壓寫入記憶體元件120時,藉由位元線驅動器108(BL)將“0”驅動到位元線BL上 。另外,使用寫入輔助訊號152,其也將“0”從寫入輔助裝置150驅動到位元線BL上。同時,另一位元線驅動器108(BLB)將“1”(或Vccmin或高)電壓驅動到位元線BLB上。在此操作期間,訊號142被提供在字元線WL上,使得來自位元線驅動器的資料通過個別的傳輸電晶體T1、T2並被儲存在正反器140中。In operation, when it is desired to write a "0" (or ground or low) voltage to the
應理解在本實施例中,僅有用於在對應位元線上寫入“0”的寫入輔助裝置/訊號,而沒有用於在位元線上寫入“1”的寫入輔助裝置/訊號。在另一個實施例中,寫入輔助裝置/訊號可以用於在對應的位元線上寫入“1”。在又一個實施例中,兩個寫入輔助驅動器/訊號可以用於每一條位元線,以根據需要寫入“0”或“1”。It should be understood that in this embodiment, there is only a writing auxiliary device/signal for writing "0" on the corresponding bit line, but no writing auxiliary device/signal for writing a "1" on the bit line. In another embodiment, the write assist device/signal can be used to write "1" on the corresponding bit line. In yet another embodiment, two write auxiliary drivers/signals can be used for each bit line to write "0" or "1" as needed.
現在參考第4a圖、第4b圖,顯示了記憶體單元102的一部分。值得注意的是,記憶體單元102從第1圖和第2圖中的示意圖旋轉了90度,記憶體單元102在記憶體位元陣列106中包括複數位元元件(bit cell),其具有如上面參照第3圖所述的電路。此電路包括在金屬層(例如:第零金屬層(M0))中水平延伸的多條線,其包括位元線對(位元線BL、BLB)和一對電源Vss、VDD。如圖式所示,這些多條線連接包括冗餘元件(dummy cell)的多個記憶體元件120。Referring now to FIGS. 4a and 4b, a part of the
記憶體元件的冗餘列128包括在上金屬層(例如:第一金屬層(M1))中垂直延伸的多條線,其包括兩個寫入輔助訊號152、162。如第4a圖所示,這些寫入輔助訊號連接冗餘列128中的多個冗餘元件。為了參照第4a圖,將兩個冗餘元件標識為冗餘元件128a和128b。The
對於冗餘列128中的每一個冗餘元件,存在(至少)兩個電性連接至電源Vss(M0)的源極/汲極區170、176。源極/汲極區170透過M0到基板的接點(M0-to-substrate contact)190連接至電源Vss(M0),且源極/汲極區176透過M0到基板的接點196連接至電源Vss(M0)。冗餘列128中的每一個冗餘元件還包括(至少)一個電性連接至位元線BLB(M0)的源極/汲極區172和一個電性連接至位元線BL(M0)的源極/汲極區174。源極/汲極區172透過M0到基板的接點192連接至位元線BLB(M0),且源極/汲極區176透過M0到基板的接點194連接至位元線BL(M0)。For each redundant element in the
在本實施例中,井拾取區(WPU)180包括在冗餘列128中相鄰冗餘元件之間的邊緣區域104中。在此實施例中,WPU 180是N井拾取區,儘管可以替代地使用P井拾取區。為每一個冗餘元件提供兩條冗餘線182、184,其在圖式中水平延伸。在本示例中,冗餘線182、184也在WPU 180上佈置。冗餘線182b,184b與冗餘元件128b相關。冗餘線182b透過M1到M0的通孔198連接至寫入輔助訊號152,並且透過M0到閘極的接點199連接至寫入輔助裝置150的閘極電極202。冗餘線184b透過M1到M0的通孔200連接至寫入輔助訊號162,並且透過M0到閘極的接點201連接至寫入輔助裝置160的閘極電極204。In this embodiment, the well picking area (WPU) 180 is included in the
在操作中,在將“0”寫入一或多個記憶體元件的記憶體寫入操作期間,使用寫入輔助訊號152。寫入輔助訊號152透過通孔198傳輸至冗餘線182b,並接著透過接點199傳輸至寫入輔助裝置150的閘極電極202。傳輸至閘極電極202的訊號的數值取決於各種設計選擇,但是出於示例的原因,閘極電極202用於寫入輔助裝置150的NMOS電晶體。在此示例中,寫入輔助訊號152為邏輯“1”,從而使寫入輔助裝置“開啟(on)”。在寫入輔助裝置150“開啟”的情況下,源極/汲極區174將透過通道電性連接至源極/汲極區176。如上面所述,源極/汲極區176透過接點196連接至電源Vss(“0”),並且源極/汲極區174透過接點194連接至位元線BL。如此一來,在冗餘元件128b的位元線BL將被驅動為“0”。同時,因為這是其中寫入“0”的記憶體寫入操作,所以對應的位元線驅動器108也將在位元線BL上驅動“0”(將在對應的位元線BLB上驅動“1”)。這意味著在位元線BL的兩個相對端驅動“0”,其有效地將傳輸線效應(例如:在線電阻(inline resistance))減小一半。In operation, the write
在將“1”寫入一或多個記憶體元件的記憶體寫入操作期間,使用寫入輔助訊號162。寫入訊號透過通孔200傳輸至冗餘線184b,並接著透過接點201傳輸至寫入輔助裝置160的閘極電極204。傳輸至閘極電極204的訊號的數值取決於各種設計選擇,但是出於示例的原因,閘極電極204用於寫輔助裝置160的NMOS電晶體。在此示例中,寫入輔助訊號162為邏輯“1”,從而使寫入輔助裝置“開啟”。在寫入輔助裝置160“開啟”的情況下,源極/汲極區172將透過通道電性連接至源極/汲極區170。如上面所述,源極/汲極區170透過接點190連接至電源Vss(“0”),並且源極/汲極區172透過接點192連接至位元線BBL。如此一來,在冗餘元件128b的位元線BLB將被驅動為“0”。同時,因為這是其中寫入“1”的記憶體寫入操作,所以對應的位元線驅動器108也將在位元線BLB上驅動“0”(將在對應的位元線BL上驅動“0”)。這意味著在位元線BLB的兩個相對端驅動“0”,其有效地將傳輸線效應(例如:在線電阻)減小一半。During a memory write operation in which "1" is written to one or more memory devices, the
在一些實施例中,值得注意的是,將位元線驅動為“0”或比當將位元線驅動為“1”時的傳輸線效應不利。對於這些實施例,僅需要輔助“0”位元線。然而,在其他實施例中,可以包括另一寫入輔助驅動器以輔助將位元線驅動為“1”。根據本揭露,可以以非常簡單的方式實現這種驅動器。舉例來說,寫入助訊號及/或電晶體的極性可以被切換以適用驅動“1”。在又一個實施例中,可以使用單一寫入輔助驅動器來適用驅動“0”和“1”兩者。In some embodiments, it is worth noting that driving the bit line to "0" or the transmission line effect is disadvantageous than when the bit line is driven to "1". For these embodiments, only auxiliary "0" bit lines are needed. However, in other embodiments, another write auxiliary driver may be included to assist in driving the bit line to "1". According to the present disclosure, such a driver can be implemented in a very simple manner. For example, the polarity of the write assist signal and/or the transistor can be switched to be suitable for driving "1". In yet another embodiment, a single write auxiliary driver may be used to accommodate both driving "0" and "1".
現在參照第5圖,在另一實施例中,記憶體單元102顯示為單一記憶體區塊,應理解根據需要可以有更多區塊。記憶體單元102包括在圖式的底側上所示的邊緣區域104和在圖式的頂側上所示的邊緣區域244。在本實施例中,邊緣區域104、244不包含記憶體位元,並且用於實現井拾取(WPU)結構。WPU結構提供用於向記憶體單元102中的N井和P井提供電壓(或偏壓)的井拾取結構。記憶體單元102還包括邊緣區域104、244的兩個WPU區之間的記憶體位元陣列106。記憶體位元陣列106包含記憶體單元102的記憶體位元。記憶體單元102還包括用於位元線驅動器108的區域。位元線驅動器區提供用於位元線BL、BLB的驅動器,每一個驅動器對用於記憶體單元102中的每一個記憶體位元。同樣在此實施例中,在記憶體位元陣列106的邊緣有與邊緣區域104、244相鄰的冗餘列。Referring now to FIG. 5, in another embodiment, the
在操作中, 第5圖的實施例的執行與第1圖至第4圖的實施例相似,除了位元線驅動器區中的位元線驅動器108可以沿任一方向或兩個方向驅動位元線(上和下,如圖式所示)。此實施例的優點在於,位元線已經是第一實施例中的位元線的一半(每一個實施例中給定相同列數)。同樣在此實施例中,寫入輔助驅動器和對應的電路可以提供在冗餘列兩者中,以進一步輔助將“0”及/或“1”寫入對應的記憶體元件。In operation, the implementation of the embodiment of FIG. 5 is similar to the embodiment of FIG. 1 to FIG. 4, except that the
藉由一或多個上述實施例實現了幾個優點。首先,寫入輔助電路提供了提升的寫入速度。這是因為從位元線驅動器到記憶體元件的最遠列的位元線長度被有效地切成兩半,從而減小了位元線的傳輸線效應。除了提升寫入速度,還為記憶體位元陣列提供了改善的最小電源(Vccmin)。其次,只需很少或不需要週邊電路的額外區域就可以實現這些改進。意即,藉由使用具有冗餘元件的邊緣電路,不會增加嵌入式記憶體陣列的整體尺寸。Several advantages are achieved by one or more of the above-mentioned embodiments. First, the write assist circuit provides an improved write speed. This is because the bit line length of the farthest column from the bit line driver to the memory device is effectively cut in half, thereby reducing the transmission line effect of the bit line. In addition to increasing the writing speed, it also provides an improved minimum power supply (Vccmin) for the memory bit array. Second, these improvements can be achieved with little or no additional area of peripheral circuitry. This means that by using edge circuits with redundant components, the overall size of the embedded memory array will not be increased.
在一個實施例中,提供了一種包括記憶體單元的半導體裝置。半導體裝置可以是記憶體裝置(例如靜態隨機存取記憶體(SRAM)),或者是具有嵌入式記憶體的另一裝置(例如嵌入式SRAM)。記憶體單元包括以複數列和複數行排列的位元陣列。行由連接至該行中的複數記憶體元件的複數位元線對定義。記憶體單元還包括與位元陣列的邊緣列相鄰的邊緣區域,其中邊緣列包括複數冗餘記憶體元件。記憶體單元還包括與位元陣列相鄰,並且與邊緣區域相對的複數位元線驅動器。位元線驅動器用於在寫入操作期間將具有資料的位元線驅動到記憶體元件。冗餘記憶體元件包括用於位元線對之每一者的寫入輔助電路。寫入輔助電路用於促進將位元線對上的資料寫入記憶體元件。In one embodiment, a semiconductor device including a memory cell is provided. The semiconductor device may be a memory device (such as static random access memory (SRAM)), or another device with embedded memory (such as embedded SRAM). The memory cell includes a bit array arranged in plural columns and plural rows. A row is defined by a plurality of bit line pairs connected to the plurality of memory devices in the row. The memory cell further includes an edge area adjacent to the edge row of the bit array, wherein the edge row includes a plurality of redundant memory elements. The memory cell also includes a plurality of bit line drivers adjacent to the bit array and opposite to the edge area. The bit line driver is used to drive the bit line with data to the memory device during the write operation. The redundant memory device includes a write assist circuit for each of the bit line pairs. The write auxiliary circuit is used to facilitate writing the data on the bit line pair into the memory device.
在一些實施例中,記憶體元件是靜態隨機存取記憶體元件。In some embodiments, the memory device is a static random access memory device.
在一些實施例中,寫入輔助電路包括用於在寫入操作期間將位元線對中之位元線選擇性地連接至電源的電晶體。電源可以是接地電源。In some embodiments, the write assist circuit includes a transistor for selectively connecting the bit line of the bit line pair to the power source during the write operation. The power source can be a grounded power source.
在一些實施例中,寫入輔助訊號連接至寫入輔助電路,使得當在位元線上寫入邏輯“0”時,寫入輔助電路將位元線連接至接地電源。另外,當在位元線上寫入邏輯“1”時,寫入輔助電路不將位元線連接至電源。In some embodiments, the write assist signal is connected to the write assist circuit such that when a logic "0" is written on the bit line, the write assist circuit connects the bit line to the ground power supply. In addition, when writing logic "1" on the bit line, the write auxiliary circuit does not connect the bit line to the power source.
在一些實施例中,電晶體包括連接至在位元陣列外部驅動的寫入輔助訊號的閘極。In some embodiments, the transistor includes a gate connected to a write assist signal driven outside the bit array.
在一些實施例中,電晶體包括連接至電源的第一源極/汲極和連接至位元線的第二源極/汲極。In some embodiments, the transistor includes a first source/drain connected to the power source and a second source/drain connected to the bit line.
在另一個實施例中,提供了一種包括記憶體元件陣列的半導體裝置。記憶體元件陣列包括複數記憶體元件,記憶體元件沿著第一方向排列成複數列,並且沿著與第一方向不同的第二方向排列成複數行。半導體裝置還包括連接行之每一者中的記憶體元件的複數位元線對和連接列之每一者中的記憶體元件的複數字元線。複數位元線驅動器連接至位元線對的複數位元線,位元線驅動器與記憶體元件陣列的第一列相鄰。記憶體單元陣列還包括複數冗餘元件的一列,與位元線驅動器相距一個距離,例如在記憶體元件陣列中與位元線驅動器相對的一側。從剩餘的記憶體元件修改冗餘元件之每一者,以包括連接至位元線對之每一者的至少一位元線的寫入輔助裝置。寫入輔助裝置之每一者可以藉由複數寫入操作期間使用的寫入輔助訊號控制。In another embodiment, a semiconductor device including an array of memory elements is provided. The memory element array includes a plurality of memory elements, the memory elements are arranged in a plurality of rows along a first direction, and are arranged in a plurality of rows along a second direction different from the first direction. The semiconductor device also includes a plurality of bit line pairs connecting the memory elements in each of the rows and a plurality of digital element lines connecting the memory elements in each of the rows. The multiple bit line drivers are connected to the multiple bit lines of the bit line pair, and the bit line drivers are adjacent to the first row of the memory element array. The memory cell array also includes a row of redundant elements, which is a distance away from the bit line driver, for example, on the side opposite to the bit line driver in the memory element array. Modify each of the redundant elements from the remaining memory elements to include at least one bit line write assist device connected to each of the bit line pairs. Each of the write assist devices can be controlled by a write assist signal used during a plurality of write operations.
在一些實施例中,寫入輔助裝置之每一者包括電晶體,電晶體具有連接至寫入輔助訊號的閘極電極。電晶體可以包括連接至電源(例如接地)的源極和連接至位元線對的位元線之一者的汲極。In some embodiments, each of the write assist devices includes a transistor having a gate electrode connected to the write assist signal. The transistor may include a source connected to a power source (for example, ground) and a drain connected to one of the bit lines of the bit line pair.
在一些實施例中,電源是接地電源。In some embodiments, the power source is a grounded power source.
在一些實施例中,半導體裝置更包括與冗餘元件列相鄰的邊緣區域。In some embodiments, the semiconductor device further includes an edge region adjacent to the redundant element column.
在一些實施例中,寫入輔助訊號被提供在第一金屬層中,並且透過位在邊緣區域的井拾取區中的第零金屬層連接至閘極電極。In some embodiments, the write assist signal is provided in the first metal layer and is connected to the gate electrode through the zeroth metal layer located in the well pick-up area in the edge area.
在一些實施例中,井拾取區位在相鄰的冗餘元件之間。In some embodiments, the well picking area is located between adjacent redundant elements.
在另一個實施例中,提供了一種SRAM半導體裝置。SRAM半導體裝置包括具有第一區域和第二區域的基板。基板包括在第一區域中的記憶體元件陣列,記憶體元件陣列包括複數記憶體元件,記憶體元件沿著第一方向排列成複數列,並且沿著與第一方向不同的第二方向排列成複數行。SRAM半導體裝置還包括在第二區域中的複數寫入輔助電路;以及將記憶體元件陣列電性耦接至寫入輔助電路的複數導線。導線之每一者將記憶體元件的一行電性耦接至寫入輔助電路之一者。第二區域是基板的冗餘區域,冗餘區域遠離驅動器電路,並且藉由記憶體元件陣列與驅動器電路分開。In another embodiment, an SRAM semiconductor device is provided. The SRAM semiconductor device includes a substrate having a first region and a second region. The substrate includes an array of memory elements in the first region. The array of memory elements includes a plurality of memory elements. The memory elements are arranged in a plurality of rows along a first direction and arranged in a second direction different from the first direction. Plural lines. The SRAM semiconductor device further includes a plurality of write auxiliary circuits in the second region; and a plurality of wires for electrically coupling the memory element array to the write auxiliary circuit. Each of the wires electrically couples a row of the memory device to one of the write auxiliary circuits. The second area is a redundant area of the substrate. The redundant area is far away from the driver circuit and is separated from the driver circuit by the memory element array.
在一些實施例中,導線之每一者是位元線,並且寫入輔助電路之每一者被配置以將對應的位元線的電壓準位設置為小於接地參考準位。In some embodiments, each of the wires is a bit line, and each of the write auxiliary circuits is configured to set the voltage level of the corresponding bit line to be less than the ground reference level.
在一些實施例中,第二區域與井條帶區相鄰。In some embodiments, the second area is adjacent to the well strip area.
在一些實施例中,第二區域是基板的邊緣區域。In some embodiments, the second area is an edge area of the substrate.
在一個實施例中,提供了一種用於操作包括記憶體單元的半導體裝置的方法。半導體裝置可以是記憶體裝置(例如靜態隨機存取記憶體(SRAM)),或者是具有嵌入式記憶體的另一裝置(例如嵌入式SRAM)。記憶體單元包括以複數列和複數行排列的位元陣列。行由連接至該行中的複數記憶體元件的複數位元線對定義。記憶體單元還包括與位元陣列的邊緣列相鄰的邊緣區域,其中邊緣列包括複數冗餘記憶體元件。記憶體單元還包括與位元陣列相鄰,並且與邊緣區域相對的複數位元線驅動器。位元線驅動器用於在寫入操作期間將具有資料的位元線驅動到記憶體元件。冗餘記憶體元件包括用於位元線對之每一者的寫入輔助電路。方法包括使用寫入輔助電路將寫入輔助訊號驅動到邊緣區域中。寫入輔助訊號選擇性地致能冗餘記憶體元件中的寫入輔助電路,以促進將位元線對上的資料寫入到記憶體元件。In one embodiment, a method for operating a semiconductor device including a memory cell is provided. The semiconductor device may be a memory device (such as static random access memory (SRAM)), or another device with embedded memory (such as embedded SRAM). The memory cell includes a bit array arranged in plural columns and plural rows. A row is defined by a plurality of bit line pairs connected to the plurality of memory devices in the row. The memory cell further includes an edge area adjacent to the edge row of the bit array, wherein the edge row includes a plurality of redundant memory elements. The memory cell also includes a plurality of bit line drivers adjacent to the bit array and opposite to the edge area. The bit line driver is used to drive the bit line with data to the memory device during the write operation. The redundant memory device includes a write assist circuit for each of the bit line pairs. The method includes using a write assist circuit to drive the write assist signal into the edge area. The write assist signal selectively enables the write assist circuit in the redundant memory device to facilitate writing the data on the bit line pair to the memory device.
前述內文概述了許多實施例的特徵,使本技術領域中具有通常知識者可以從各個方面更佳地了解本揭露。本技術領域中具有通常知識者應可理解,且可輕易地以本揭露為基礎來設計或修飾其他製程及結構,並以此達到相同的目的及/或達到與在此介紹的實施例等相同之優點。本技術領域中具有通常知識者也應了解這些相等的結構並未背離本揭露的發明精神與範圍。在不背離本揭露的發明精神與範圍之前提下,可對本揭露進行各種改變、置換或修改。The foregoing text outlines the features of many embodiments, so that those skilled in the art can better understand the present disclosure from various aspects. Those skilled in the art should understand, and can easily design or modify other processes and structures based on the present disclosure, and achieve the same purpose and/or the same as the embodiments introduced herein. The advantages. Those skilled in the art should also understand that these equivalent structures do not deviate from the spirit and scope of the present disclosure. Without departing from the spirit and scope of the present disclosure, various changes, substitutions or modifications can be made to the present disclosure.
100:半導體裝置
102:記憶體單元
104:邊緣區域/第一邊緣區域
106:記憶體位元陣列
108:位元線驅動器
120:記憶體元件
128:冗餘列
130:箭頭
132:電阻
BL,BLB:位元線
WL:字元線
T1、T2:傳輸電晶體
140:正反器
144,146:電阻
150:寫入輔助裝置
160:寫入輔助裝置
152,162:寫入輔助訊號
168,169:寫入輔助訊號驅動器
Data,DataB:寫入資料
W:寫入訊號
108(BL):位元線驅動器
108(BLB):位元線驅動器
142:訊號
Vss,VDD:電源
M0:第零金屬層
128a,128b:冗餘元件
170,176:源極/汲極區
190,192,194,196:接點
172,174:源極/汲極區
180:井拾取區
182,184,182a,182b,184b,184c:冗餘線
198:通孔
199:接點
202:閘極電極
200:通孔
201:接點
204:閘極電極
244:邊緣區域100: Semiconductor device
102: memory unit
104: edge area/first edge area
106: Memory bit array
108: bit line driver
120: Memory component
128: Redundant column
130: Arrow
132: Resistance
BL, BLB: bit line
WL: Character line
T1, T2: transmission transistor
140: Flip-flop
144,146: resistance
150: Write assist device
160: Write assist device
152,162: Write auxiliary signal
168,169: Write auxiliary signal driver
Data, DataB: write data
W: write signal
108(BL): bit line driver
108(BLB): bit line driver
142: Signal
Vss, VDD: power supply
M0: Zero
本揭露從後續實施例以及附圖可以更佳理解。須知示意圖係為範例,並且不同特徵並無示意於此。不同特徵之尺寸可能任意增加或減少以清楚論述。 第1圖是根據本揭露實施例之具有嵌入式記憶體的積體電路(IC)的示意圖。 第2圖是根據本揭露實施例之第1圖中的記憶體單元(memory unit)的一部分的俯視圖。 第3圖是根據本揭露實施例之第1圖的記憶體單元的記憶體元件(memory cell)的電路圖。 第4a圖和第4b圖是根據本揭露實施例之第1圖中的記憶體單元的兩個冗餘記憶體元件和井拾取區的一部分的示意圖。 第5圖是根據本揭露實施例之第1圖中的記憶體單元的一部分的俯視圖。This disclosure can be better understood from the subsequent embodiments and the accompanying drawings. Note that the schematic diagram is an example, and the different features are not shown here. The size of different features may be increased or decreased arbitrarily for clear discussion. FIG. 1 is a schematic diagram of an integrated circuit (IC) with embedded memory according to an embodiment of the disclosure. FIG. 2 is a top view of a part of the memory unit in FIG. 1 according to an embodiment of the present disclosure. FIG. 3 is a circuit diagram of a memory cell of the memory cell in FIG. 1 according to an embodiment of the present disclosure. Figures 4a and 4b are schematic diagrams of two redundant memory elements and a part of the well pick-up area of the memory cell in Figure 1 according to an embodiment of the present disclosure. FIG. 5 is a top view of a part of the memory cell in FIG. 1 according to an embodiment of the present disclosure.
無none
BL,BLB:位元線BL, BLB: bit line
WL:字元線WL: Character line
102:記憶體單元102: memory unit
106:記憶體位元陣列106: Memory bit array
108:位元線驅動器108: bit line driver
120:記憶體元件120: Memory component
128:冗餘列128: Redundant column
130:箭頭130: Arrow
132:電阻132: Resistance
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US62/907,393 | 2019-09-27 | ||
US16/922,270 | 2020-07-07 | ||
US16/922,270 US11211116B2 (en) | 2019-09-27 | 2020-07-07 | Embedded SRAM write assist circuit |
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TW202125715A true TW202125715A (en) | 2021-07-01 |
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