TW202104840A - Inspection system - Google Patents

Abstract

An inspection system is disclosed, which is equipped with a detection unit that detects the inclination state of the lifting part provided for the article transport vehicle to lift freely, wherein the lifting part has a reference surface. The detection unit has a first camera device and a second camera device, and the position of the reference surface is used as a set reference surface position in a state where the lifting part is located at a prescribed set lifting position. The first and second camera devices are arranged as follows: an intersection at which the optical axis of the first camera device, that is, the first optical axis, and the axis of the second camera device, that is, the second optical axis intersect, is a position corresponding to a set reference surface position, furthermore, the first optical axis and the second optical axis are directions along the reference surface. The detection unit detects the tilt direction and tilt angle of the lifting part based on the images of the reference surface captured by the first camera device and second camera device.

Description

Check the system

The present invention relates to an inspection system provided with a detection unit that detects the inclination state of an elevating and lowering section of an article transport vehicle.

As such an inspection system, for example, what is described in JP 2017-095261 A is known. Hereinafter, in the description of the prior art, the symbols in parentheses are the symbols in the prior art documents. The inspection system described in Japanese Patent Laid-Open No. 2017-095261 is composed of: an inspection jig (Wb) is provided with an angle sensor (8), and the inspection jig (Wb) is supported by a lifting part ( The lifting body 22) is used to detect the inclination direction and the inclination angle of the lifting part (22) by the angle sensor (8).

However, in the inspection system of Japanese Patent Laid-Open No. 2017-095261, since the inspection jig (Wb) is supported on the lifting part (22), it is necessary to inspect the lifting part of a plurality of article transport vehicles (1). When the (22) is tilted, the inspection jig (Wb) must be moved between a plurality of article transport vehicles (1). That is, when detecting the inclination state of the lifting part (22) in each article transport vehicle (1), the inspection jig (Wb) must be supported on the lifting part (22) before detecting the lifting part (22). Tilt the direction and angle, and then remove the inspection jig (Wb) from the lifting part (22). Therefore, it may be difficult to efficiently check the tilted state of the lifter (22).

Therefore, it is desired to realize an inspection system capable of efficiently inspecting the tilted state of the lifter.

In view of the above, the characteristic structure of the inspection system lies in the following points: It is equipped with: a detection unit that detects the inclination state of the lifting unit that can be lifted and lowered by the article transport vehicle, The lift unit has a reference surface, the detection unit includes a first imaging device and a second imaging device, and the position of the reference surface in a state where the lift unit is at a predetermined set lift position is used as a set reference surface position, and the first imaging device The device and the second imaging device are arranged such that the intersection of the optical axis of the first imaging device, that is, the first optical axis, and the optical axis of the second imaging device, that is, the second optical axis, becomes a position corresponding to the position of the set reference plane And, the first optical axis and the second optical axis are in a direction along the reference plane, and the detection unit is based on an image of the reference plane captured by the first imaging device and the second imaging device , To detect the inclination direction and the inclination angle of the aforementioned lifting part.

According to this characteristic structure, since the image of the reference plane of the lifting part taken from two crossing directions by the first imaging device and the second imaging device is used to detect the inclination state of the lifting part, it is possible to appropriately detect the lifting The tilt direction and tilt angle of the part. In addition, according to this characteristic configuration, since the lifting part of the article transport vehicle is moved to a predetermined set lifting position, and in this state, the lifting part can be detected by the first and second imaging devices photographing the lifting part The tilted state, so there is no need to support the detection jigs on the lifting part. Therefore, even in the case of inspecting the tilting state of the lifting part of a plurality of article transport vehicles, it is not necessary to move inspection jigs and the like between the plurality of article transporting vehicles, and the tilting state of the lifting part can be efficiently performed. inspection.

The form used to implement the invention

1. Implementation form The embodiment of the article conveying equipment equipped with the inspection system will be explained based on the drawings. As shown in Figure 1, the article transport equipment is provided with: article transport vehicle 1, which walks along the walking path L near the ceiling to transport the article container W (refer to Figure 2); processing device 2, opposite to the container The substrate of the container W is processed; the support table 3 is set as the transport target position and is set on the ground in a state adjacent to the processing device 2; and the inspection system 4. In addition, in this embodiment, a FOUP (Front Opening Unified Pod) containing a semiconductor substrate is used as the container W (article).

Hereinafter, as shown in FIGS. 2 and 3, one side of the extending direction X in which the rail 5 provided along the traveling path L extends is referred to as the first extending direction side X1, and the opposite side is referred to as the extending direction second 2 sides X2. In addition, as shown in FIG. 3, the direction orthogonal to the extension direction X in the vertical direction Z is referred to as the width direction Y, and one side of the width direction Y is referred to as the first width direction. Side Y1, and the opposite side is called the second side Y2 in the width direction. In addition, in this example, the article transport vehicle 1 travels in a single direction from the second side X2 in the extending direction toward the first side X1 in the extending direction.

As shown in Figures 2 and 3, the article transport vehicle 1 is provided with: a walking portion 6 to walk on the rail 5 along the rail 5; a lifting portion 7 to support the container W in a suspended state; and a lifting device 8 to make The lifter 7 moves in the vertical direction Z. In this manner, the article transport vehicle 1 is provided with a lifter 7 that can be lifted and lowered freely.

The traveling section 6 includes a first traveling unit 6A and a second traveling unit 6B, and is located on the second side X2 in the extending direction with respect to the first traveling unit 6A. As shown in FIG. 3, the first traveling unit 6A includes a pair of wheels 11 that rotate on the rail 5 and a traveling motor 12 that rotates the pair of wheels 11. In addition, the second traveling unit 6B includes a pair of wheels 11 and a traveling motor 12 similarly to the first traveling unit 6A.

As shown in FIG. 2, the lifting device 8 includes: a winding body 14; a winding belt 15 wound on the winding body 14 and connected to the front end of the lifting portion 7; and a lifting motor 16 to make the winding body 14 Rotation drive. The lifting device 8 is configured to rotate the winding body 14 in the forward direction by driving the lifting motor 16 to feed out the winding belt 15, thereby lowering the lifting portion 7 and rotating the winding body 14 in the reverse direction. The take-up belt 15 is wound up, and the lifter 7 is raised.

The elevating part 7 includes a pair of gripping claws 18 that move freely in a direction approaching or away from each other along the horizontal direction; a gripping motor 19 that makes the pair of gripping claws 18 move in a direction approaching or away from each other; and a housing The body 20 houses the holding motor 19. The elevating part 7 is configured to move a pair of gripping claws 18 in the direction of approaching or moving away from each other by the driving of the gripping motor 19, thereby transferring the state to a state in which the container W is gripped by the pair of gripping claws 18 , And the state where the grip of the container W by the pair of grip claws 18 is released. In addition, as shown in FIG. 3, the elevating portion 7 has a reference plane F. In this embodiment, the housing 20 is formed in a rectangular parallelepiped shape, and the upper surface (upper surface) of the housing 20 is used as the reference plane F.

Next, the inspection system 4 will be described. When the inspection system 4 is used to detect the inclination state of the lifting part 7 of the article transport vehicle 1, as shown in FIG. 3, the inspection system 4 stops at the predetermined setting walking position when the traveling part 6 of the article transport vehicle 1 is stopped, and In a state where the position of the elevating portion 7 in the elevating direction is at a predetermined set elevating position, the inclination state of the elevating portion 7 is detected. In this manner, the position of the reference surface F in a state where the article transport vehicle 1 is located at a predetermined set traveling position and the lift unit 7 is located at a predetermined set lift position is set as the set reference surface position V. In a normal state in which the elevating portion 7 is not inclined in either of the extension direction X and the width direction Y, the reference plane F located at the set reference plane position V is in a horizontal posture.

As shown in FIGS. 3 and 4, the inspection system 4 includes a detection unit 22 that detects the inclination state of the lift unit 7 included in the article transport vehicle 1. In this embodiment, the detection unit 22 includes a first imaging device 23, a second imaging device 24, a first light projection device 25, a second light projection device 26, and a control unit 27 (see FIG. 4).

The first imaging device 23 and the second imaging device 24 are arranged such that the optical axis of the first imaging device 23, ie, the first optical axis L1, and the optical axis of the second imaging device 24, ie, the second optical axis L2, intersect the intersection point P corresponding to each other The position of the reference plane position V is set, and the first optical axis L1 and the second optical axis L2 are in a direction along the reference plane F. Here, the position corresponding to the set reference plane position V is set to: even if it deviates from the ideal set reference plane position V (in this embodiment, the reference plane F is located at a preset height and is in a horizontal posture. In the case of F position), it still falls within the imaging range of the imaging device. In detail, it is assumed that the inclined state of the lifter 7 is set within a predetermined distance range (for example, within a range of ±15 cm or less) with respect to the reference plane F located at the ideal setting reference plane position V. position. In this embodiment, the set transaction point P coincides with the reference plane F of the ideal set reference plane position V. In addition, the position of the reference surface F here is a reference position (point) in the reference surface F, and may be the center of gravity position of the reference surface F, for example. That is, in the present embodiment, it is set so that the intersection point P of the first optical axis L1 and the second optical axis L2 coincides with the reference position (for example, the center of gravity position) of the reference plane F. In addition, the direction along the reference plane F is an angle set within a predetermined angle range (for example, ±10° or less) with respect to the direction of the reference plane F along the ideal set reference plane position V. In this embodiment, it is set in the horizontal direction so that the reference plane F of the ideal setting reference plane position V becomes the same angle.

In the present embodiment, the first imaging device 23 is installed so as to be arranged on the second side Y2 in the width direction with respect to the set reference plane position V, and face the first side Y1 in the width direction to capture images. In addition, the second imaging device 24 is installed so as to be arranged on the second side X2 in the extension direction with respect to the set reference plane position V and face the first side X1 in the extension direction to capture images. In addition, the first optical axis L1 of the first imaging device 23 is arranged along the width direction Y. In addition, the second optical axis L2 of the second imaging device 24 is arranged along the extension direction X. In addition, in this embodiment, the first imaging device 23 and the second imaging device 24 are installed so that the first optical axis L1 and the second optical axis L2 are orthogonal to each other.

In addition, in the present embodiment, the first light projection device 25 is installed to project light toward the intersection point P from the side facing the first imaging device 23. In this embodiment, the first light projecting device 25 is installed so as to be arranged on the first side Y1 in the width direction with respect to the set reference plane position V, and project light toward the second side Y2 in the width direction. And, as shown in FIGS. 6 and 8, the first light projector 25 emits light in such a manner that the reference plane F is located at the first light projector 25 in a state where the reference plane F is located at the set reference plane position V. The projection range of A1 is within the width of the first projection range A1 in the upper and lower direction Z. In addition, as shown in FIG. 6, the reference surface F is located at the set reference surface position V, and the reference surface F is inclined downward as it goes to the first side Y1 in the width direction (the back side of the paper in FIG. 6) In the state of the reference plane F, the edge E on the second side Y2 (the front side of the paper in FIG. 6) in the width direction of the reference plane F will be captured by the first imaging device 23 as the boundary between light and shadow. 25 The light projected by the light, the aforementioned shadow is the shadow formed by shielding the light by the lifter 7. Also, as shown in FIG. 8, in a state where the reference surface F is located at the set reference surface position V, and the reference surface F is inclined downward as it goes to the second side Y2 in the width direction (the front side of the paper in FIG. 8), The edge E on the first side Y1 in the width direction of the reference plane F (the back side of the paper in FIG. 8) will be captured by the first imaging device 23 as a boundary between light and shadow, and the aforementioned light is projected from the first projection device 25 The aforementioned shadow is a shadow formed by shielding the light by the lifter 7.

The second light projection device 26 is installed to project light toward the intersection point P from the side facing the second imaging device 24. In this embodiment, the second light projector 26 is installed so as to be disposed on the first side X1 in the extending direction with respect to the set reference plane position V, and project light toward the second side X2 in the extending direction. In addition, the second light projection device 26 projects light as follows: in a state where the reference plane F is located at the set reference plane position V, the reference plane F is located in the projection range of the second light projection device 26, that is, the second projection range A2 is within the width of Z in the up and down direction. To be added, as shown in FIG. 7, the reference surface F is located at the set reference surface position V, and the reference surface F is inclined downward as it goes to the first side X1 in the extending direction (the back side of the paper in FIG. 7) In the state of the reference plane F, the edge E on the second side X2 (the front side of the paper in FIG. 7) in the extension direction of the reference plane F will be taken by the second imaging device 24 as a boundary between light and shadow. The aforementioned light is taken from the second light-emitting device 26 cast light, the aforementioned shadow is the shadow formed by the lifting part 7 shielding the light. Also, as shown in FIG. 9, in a state where the reference surface F is located at the set reference surface position V, and the reference surface F is inclined downward as it goes to the second side X2 in the extending direction (the front side of the paper in FIG. 9), The edge E on the first side X1 in the extension direction of the reference plane F (the back side of the paper in FIG. 9) will be captured by the second imaging device 24 as a boundary between light and shadow, and the aforementioned light is projected from the second light projection device 26 The aforementioned shadow is a shadow formed by shielding the light by the lifter 7.

The control unit 27 executes first imaging control, second imaging control, and detection control. In the first imaging control, the control unit 27 controls the first imaging device 23 so that the reference plane F is captured by the first imaging device 23. In addition, in the present embodiment, the control unit 27 also controls the first light projection device 25 in the first imaging control so that the first light projection device 25 irradiates light toward the reference plane F. In the second imaging control, the control unit 27 controls the second imaging device 24 so that the reference plane F is captured by the second imaging device 24. Furthermore, in the present embodiment, the control unit 27 also controls the second light projection device 26 in the second imaging control so that the second light projection device 26 irradiates light toward the reference plane F. In addition, in this embodiment, the control unit 27 performs the first imaging control and the second imaging control at the same time. Thereby, it is possible to shorten the time required for the inspection performed by the inspection system 4. In the detection control, the control unit 27 detects the tilt direction and the tilt angle of the lift unit 7 based on the image of the reference plane F captured by the first imaging device 23 and the second imaging device 24.

In the present embodiment, in the detection control, the control unit 27 detects the extension direction X (corresponding to the inclination of the edge E of the reference plane F included in the first image captured by the first imaging device 23). The inclination angle θ1 and the inclination direction of the elevating portion 7 in the first direction perpendicular to the first optical axis L1). In addition, in the detection control, the control unit 27 detects the inclination angle θ1 and the inclination direction relative to the horizontal in the extension direction X based on the inclination of the edge E included in the first image. Here, the “inclined direction” refers to which side of the extending direction X is inclined, and specifically, means that the first side X1 of the extending direction is above or below the second side X2 of the extending direction in the vertical direction Z. In addition, it may be configured such that the tilt angle θ1 is set as angle information having a positive and negative direction, so that the information on the tilt direction is included in the information on the tilt angle θ1.

In addition, in the detection control, the control unit 27 detects the width direction Y (corresponding to the inclination of the edge E of the reference plane F included in the second image captured by the second imaging device 24). The inclination angle θ2 and the inclination direction of the elevating portion 7 in the second direction perpendicular to the axis L2). In addition, in the detection control, the control unit 27 detects the inclination angle θ2 and the inclination direction relative to the horizontal in the width direction Y based on the inclination of the edge E included in the second image. Here, the oblique direction refers to which side of the width direction Y is inclined, and specifically refers to that the width direction first side Y1 is above or below the width direction second side Y2 in the vertical direction Z. In addition, it may be configured to set the inclination angle θ2 as angle information having a positive and negative direction, so that the information on the inclination angle θ2 includes information on the inclination direction.

In addition, in the detection control, the control unit 27 detects the lifter 7 based on the inclination angle θ1 and the inclination direction relative to the horizontal in the extension direction X, and the inclination angle θ2 and the inclination direction relative to the horizontal in the width direction Y. The three-dimensional tilt direction and tilt angle. Here, the control unit 27 is based on the inclination angle θ1 and the inclination direction in the extension direction X, the inclination angle θ2 and the inclination direction in the width direction Y, and the extension direction X (first direction) and the width direction Y (second direction) (Relative angle, 90° here), the three-dimensional inclination direction and inclination angle of the lifter 7 are calculated by calculation.

Next, the control of the control unit 27 will be described based on the flow chart of the inspection control shown in FIG. 5. In addition, the article transport vehicle 1 or the control device for controlling the article transport vehicle 1 is configured to stop the article transport vehicle 1 at a predetermined setting travel position at the traveling section 6 and the article transport vehicle 1 lift section 7 to stop at a predetermined setting In the state of the lifting position, a preparation completion signal is sent to the inspection system 4.

When the control unit 27 receives the preparation completion signal (S1: Yes), it executes the first imaging control to acquire the first image, and executes the second imaging control to acquire the second image (S2). In addition, the control unit 27 maintains standby before receiving the preparation completion signal (S1: No). And after the execution of the first imaging control and the second imaging control, the detection control is executed (S3). As described above, in the detection control, the inclination angle θ1 and the inclination direction of the reference plane F in the extension direction X are detected based on the first image, and the inclination of the reference plane F in the width direction Y is detected based on the second image. The angle θ2 and the inclination direction, and then the inclination direction and the inclination angle of the lifter 7 are detected based on these (S3). In addition, the control unit 27 sends an inspection completion signal indicating that the inspection is completed to the article transport vehicle 1 or the control device that controls the article transport vehicle 1 after the first imaging control and the second imaging control are completed. Thereby, the lifting of the lifting portion 7 and the traveling of the article transport vehicle 1 can be restarted.

2. Other implementation forms Next, another embodiment of this inspection system 4 will be described.

(1) In the above-mentioned embodiment, the configuration in which the reference plane F is the upper surface of the housing 20 has been described as an example. However, it is not limited to such a configuration. The reference plane F may be set as a surface other than the upper surface of the housing 20 in the lifter 7, for example, the lower surface or the side surface of the housing 20 may be used as the reference surface F, and the lower surface of the gripping claw 18 may be used as the reference Face F can also be used. However, in either case, the surface as the reference surface F is preferably a flat surface or a flat surface.

(2) In the above-mentioned embodiment, the configuration in which the detection unit 22 detects the inclination angle based on the inclination of the edge E of the reference plane F has been described as an example. However, it is not limited to such a configuration. For example, it may be configured as follows: a mark or pattern for angle detection is provided on the reference plane F, and the detection unit 22 is based on the mark on the reference plane F captured by the first imaging device 23 and the second imaging device 24 Or the position and angle of the figure to detect the tilt angle and tilt direction.

(3) In the above-mentioned embodiment, the configuration in which the inspection system 4 includes the first light projection device 25 and the second light projection device 26 has been described as an example. However, it is not limited to such a configuration. The number of light-emitting devices provided in the inspection system 4 can also be appropriately changed. For example, the third light projection device 28 may be provided to project light from the side facing the reference plane F. For example, as shown in FIG. 10, the lower surface of the housing 20 is used as the reference surface F, and the third light projection device 28 may be provided to project light from the lower side facing the reference surface F. Alternatively, one side surface of the casing 20 may be used as the reference surface F, and the third light projection device 28 may be provided to project light from the side opposite to the reference surface F. In addition, it is also possible to make the inspection system 4 not equipped with these light projection devices.

(4) In the above-mentioned embodiment, the first imaging device 23 and the second imaging device 24 are provided so that the first optical axis L1 and the second optical axis L2 are orthogonal to each other. However, it is not limited to such a configuration. For example, the first imaging device 23 and the second imaging device 24 may be installed so that the first optical axis L1 and the second optical axis L2 cross at an angle other than 90°, such as 45° or 120°.

(5) In the above-mentioned embodiment, the configuration in which the intersection point P where the first optical axis L1 crosses the second optical axis L2 coincides with the reference position of the reference plane F located at the ideal setting reference plane position V is taken as an example. Description. However, it is not limited to such a configuration. The point of intersection P only needs to be located at a position corresponding to the set reference plane position V. For example, it may be configured as follows: in a direction orthogonal to the first optical axis L1 and the second optical axis L2 (in the above-mentioned embodiment In the vertical direction Z), the intersection point P is located at a position separated only by a set distance with respect to the reference plane F located at the ideal set reference plane position V. The set distance is set within the above-mentioned prescribed distance range. In addition, in the above-mentioned embodiment, the reference position of the reference plane F is set as the center of gravity position of the reference plane F, but it is not limited to this. For example, the reference position of the reference plane F is set at the corner of the reference plane F. Other positions in face F are also possible.

(6) In the above-mentioned embodiment, the configuration in which both the first optical axis L1 and the second optical axis L2 are along the direction of the horizontal plane has been described as an example. This is because the reference plane F is a plane along the horizontal plane in a normal state. However, it is not limited to such a configuration. For example, a configuration in which any one of the first optical axis L1 and the second optical axis L2 is along the vertical direction Z may also be adopted. When the reference plane F is a plane along the up-down direction Z in a normal state, it is preferable to have such a configuration. Alternatively, one or both of the first optical axis L1 and the second optical axis L2 may be inclined with respect to the horizontal plane. The directions of the first optical axis L1 and the second optical axis L2 are preferably set in accordance with the direction of the reference plane F.

(7) In addition, the configuration disclosed in each of the above-mentioned embodiments can be applied in combination with the configuration disclosed in other embodiments as long as there is no contradiction. Regarding other configurations, the embodiments disclosed in this specification are merely examples in every respect. Therefore, various changes can be appropriately made without departing from the gist of the present disclosure.

3. Outline of the above-mentioned embodiment Hereinafter, the outline of the inspection system explained above will be explained.

The inspection system is equipped with: a detection part, which detects the inclination of the lifting part of the article transport vehicle, which can be raised and lowered freely. The lift unit has a reference surface, the detection unit includes a first imaging device and a second imaging device, and the position of the reference surface in a state where the lift unit is at a predetermined set lift position is used as a set reference surface position, and the first imaging device The device and the second imaging device are arranged such that the intersection of the optical axis of the first imaging device, that is, the first optical axis, and the optical axis of the second imaging device, that is, the second optical axis, becomes a position corresponding to the position of the set reference plane And, the first optical axis and the second optical axis are in a direction along the reference plane, and the detection unit is based on an image of the reference plane captured by the first imaging device and the second imaging device , To detect the inclination direction and the inclination angle of the aforementioned lifting part.

According to this configuration, since the image of the reference plane of the lifting part taken from the two crossing directions by the first imaging device and the second imaging device is used to detect the inclination state of the lifting part, the lifting part can be detected appropriately The inclination direction and angle of inclination. In addition, according to this characteristic configuration, since the lifting part of the article transport vehicle is moved to a predetermined set lifting position, and in this state, the lifting part can be detected by the first and second imaging devices photographing the lifting part The tilted state, so there is no need to support the detection jigs on the lifting part. Therefore, even in the case of inspecting the tilting state of the lifting part of a plurality of article transport vehicles, it is not necessary to move inspection jigs and the like between the plurality of article transporting vehicles, and the tilting state of the lifting part can be efficiently performed. inspection.

Here, the detection unit preferably detects the direction orthogonal to the first optical axis, that is, the first direction based on the inclination of the edge of the reference plane included in the first image captured by the first imaging device. The inclination angle of the elevating portion is detected based on the inclination of the edge of the reference plane included in the second image captured by the second imaging device to detect the direction orthogonal to the second optical axis, that is, the second The inclination angle of the aforementioned lifting part in the direction.

According to this configuration, it is possible to detect the inclination angle of the elevating part in the first direction and the inclination of the elevating part in the second direction based on the inclination of the edge of the reference plane photographed by the first imaging device and the second imaging device. Angle both. Therefore, the inclination direction and the inclination angle of the elevator body can be detected more appropriately.

Furthermore, it is preferable to further include: a first light projection device that projects light from the side facing the first imaging device toward the intersection point; and a second light projection device that projects light from the side facing the second imaging device toward the intersection point Cast light.

According to this structure, when viewed from the first imaging device, the surroundings of the reference surface are illuminated by the first light-emitting device, so the first imaging device can easily identify the boundary between the reference surface and the rest. image. Also, as viewed from the second imaging device, since the periphery of the reference surface is illuminated by the second light-emitting device, the second imaging device can capture an image that is easy to distinguish the boundary between the reference surface and the rest. . Therefore, the inclination direction and the inclination angle of the elevator body can be detected more appropriately.

In addition, it is better to prepare a third light projection device to project light from the side opposite to the aforementioned reference plane.

According to this configuration, since the reference surface is illuminated from the side opposite to the reference surface by the third light-emitting device, it is easy to distinguish between the reference surface and the removal by the first imaging device and the second imaging device. The image of the border beyond this. Therefore, the inclination direction and the inclination angle of the elevator body can be detected more appropriately.

Furthermore, it is preferable that the first imaging device and the second imaging device are arranged so that the first optical axis and the second optical axis are orthogonal to each other.

According to this configuration, the direction of detecting the inclination angle of the elevator based on the image taken by the first imaging device is orthogonal to the direction of detecting the inclination angle of the elevator based on the image taken by the second imaging device, so it is possible to It is easy to simplify the arithmetic processing when obtaining the inclination direction and the inclination angle of the lifting part based on these images. Industrial availability

The technology of the present disclosure can be used in an inspection system equipped with a detection unit that detects the inclination state of a liftable lifting unit provided in an article transport vehicle.

1: Item transport vehicle 2: Processing device 3: support table 4: Check the system 5: Orbit 6: Walking part 6A: The first traveling unit 6B: 2nd traveling unit 7: Lifting part 8: Lifting device 11: Wheel 12: Motor for walking 14: winding body 15: take-up tape 16: Lifting motor 18: holding claw 19: Control motor 20: shell 22: Inspection Department 23: The first camera 24: The second camera 25: The first projection device 26: 2nd projecting device 27: Control Department 28: 3rd Projector A1: The first projection range A2: 2nd projection range E: Edge F: Datum plane L: walking path L1: 1st optical axis L2: 2nd optical axis P: intersection V: Set the position of the reference plane W: container X: Extension direction (1st direction) X1: The first side in the extension direction X2: The second side in the extension direction Y: Width direction (2nd direction) Y1: The first side in the width direction Y2: The second side in the width direction Z: Up and down direction θ1, θ2: tilt angle

Fig. 1 is a plan view of the article conveying equipment. Fig. 2 is a side view of the article transport vehicle and the processing device. Fig. 3 is a perspective view of the article transport vehicle and the inspection system. Figure 4 is a control block diagram of the inspection system. Fig. 5 is a flowchart of inspection control. Fig. 6 is a diagram showing a reference surface for setting a reference surface position viewed from the second side in the width direction. Fig. 7 is a diagram showing a reference plane for setting a reference plane position viewed from the second side in the extending direction. Fig. 8 is a diagram showing a reference plane for setting a reference plane position viewed from the second side in the width direction. Fig. 9 is a diagram showing a reference plane for setting a reference plane position viewed from the second side in the extending direction. Fig. 10 is a side view of an inspection system of another embodiment.

1: Item transport vehicle

4: Check the system

5: Orbit

6: Walking part

6A: The first traveling unit

6B: 2nd traveling unit

7: Lifting part

11: Wheel

12: Motor for walking

15: take-up tape

20: shell

22: Inspection Department

23: The first camera

24: The second camera

25: The first projection device

26: 2nd projecting device

F: Datum plane

L: walking path

L1: 1st optical axis

L2: 2nd optical axis

P: intersection

V: Set the position of the reference plane

X: Extension direction (1st direction)

X1: The first side in the extension direction

X2: The second side in the extension direction

Y: Width direction (2nd direction)

Y1: The first side in the width direction

Y2: The second side in the width direction

Z: Up and down direction

Claims (7)

An inspection system with the following: The detection part detects the inclination state of the lifting part of the article transport vehicle which can be lifted and lowered freely, The aforementioned inspection system has the following characteristics: The aforementioned lifting part has a reference surface, The detection unit includes a first imaging device and a second imaging device, Taking the position of the reference surface in a state where the lifting portion is at a predetermined setting lifting position as the setting reference surface position, The first imaging device and the second imaging device are set such that the intersection of the first optical axis, which is the optical axis of the first imaging device, and the second optical axis, which is the optical axis of the second imaging device, becomes the reference for the setting The position of the surface position, and the first optical axis and the second optical axis are in a direction along the reference plane, The detection unit detects the tilt direction and the tilt angle of the lift unit based on the image of the reference plane captured by the first imaging device and the second imaging device. The inspection system according to claim 1, wherein the detection unit detects an edge perpendicular to the first optical axis based on the inclination of the edge of the reference plane included in the first image captured by the first imaging device The direction is the inclination angle of the lifter in the first direction, and is detected to be positive with the second optical axis based on the inclination of the edge of the reference plane included in the second image captured by the second imaging device. The direction of intersection is the inclination angle of the aforementioned lifter in the second direction. According to the inspection system of claim 1 or 2, further comprising: a first light projection device that projects light toward the intersection from a side opposite to the first imaging device; and a second light projection device that projects light from the side opposite to the second imaging device. The opposite side of the device projects light toward the aforementioned intersection. Such as the inspection system of claim 1 or 2, further equipped with: a third light projection device that projects light from the side opposite to the aforementioned reference plane. The inspection system of claim 1 or 2, wherein the first imaging device and the second imaging device are arranged such that the first optical axis and the second optical axis are orthogonal to each other. The inspection system according to claim 3, wherein the first imaging device and the second imaging device are arranged such that the first optical axis and the second optical axis are orthogonal to each other. The inspection system of claim 4, wherein the first imaging device and the second imaging device are arranged such that the first optical axis and the second optical axis are orthogonal to each other.

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