TW202100569A - Black photosensitive resin composition and uses thereof - Google Patents

Black photosensitive resin composition and uses thereof Download PDF

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TW202100569A
TW202100569A TW108122747A TW108122747A TW202100569A TW 202100569 A TW202100569 A TW 202100569A TW 108122747 A TW108122747 A TW 108122747A TW 108122747 A TW108122747 A TW 108122747A TW 202100569 A TW202100569 A TW 202100569A
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TW108122747A
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朱振忠
廖豪偉
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奇美實業股份有限公司
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Priority to CN202010558077.6A priority patent/CN112147842A/en
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials

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  • Materials For Photolithography (AREA)

Abstract

The invention relates to a black photosensitive resin composition, a black pattern formed by the black photosensitive resin composition, and a liquid crystal display element including the black pattern. The black photosensitive resin composition includes an alkali-soluble resin (A), a compound having an unsaturated ethylenically group (B), a photoinitiator (C), a solvent (D) and a black pigment (E). The black pattern formed by the black photosensitive resin composition has the advantages of improved taper angle and dryness.

Description

黑色感光性樹脂組成物及其應用Black photosensitive resin composition and its application

本發明係有關一種黑色感光性樹脂組成物,使用該黑色感光性樹脂組成物所形成之黑色圖案及包含該黑色圖案之液晶顯示元件;特別是提供一種黑色感光性樹脂組成物,該黑色感光性樹脂組成物所形成之黑色圖案具有錐度角及乾燥性佳之優點。The present invention relates to a black photosensitive resin composition, a black pattern formed by using the black photosensitive resin composition and a liquid crystal display element containing the black pattern; in particular, a black photosensitive resin composition is provided, the black photosensitive resin composition The black pattern formed by the resin composition has the advantages of a taper angle and good drying properties.

近年來,隨著液晶顯示裝置之各種技術的蓬勃發展,且為了提高液晶顯示裝置的對比度及顯示品質,通常會於液晶顯示裝置中之彩色濾光片的條紋(stripe)及點(dot)之間隙間設置黑色圖案,例如黑色矩陣(black matrix)。該黑色矩陣可防止畫素間之漏光(light leakage)引起的對比度(contrast ratio)下降及色純度(color purity)下降等缺陷。In recent years, with the vigorous development of various technologies of liquid crystal display devices, and in order to improve the contrast and display quality of the liquid crystal display device, the stripes and dots of the color filter in the liquid crystal display device are usually used. A black pattern, such as a black matrix, is arranged between the gaps. The black matrix can prevent defects such as a decrease in contrast ratio and a decrease in color purity caused by light leakage between pixels.

日本特開2008-268854揭示一種黑色矩陣用的感光性樹脂組成物。該感光性樹脂組成物包含具有羧酸基及供聚合的不飽和基的鹼可溶樹脂、含乙烯性不飽和基的光聚合單體、光聚合引發劑及黑色顏料。該專利通過使用特定的鹼可溶樹脂,來改善高含量黑色顏料的感光性樹脂組成所形成的黑色矩陣的圖案分辨率。此外,日本特開2009-145432揭示一種黑色矩陣用的感光性樹脂組成物。該感光性樹脂組成物包含含乙烯性不飽和基的單體、光聚合引發劑、黑色顏料及樹脂。該樹脂擇自於熱硬化樹脂、感光性樹脂、熱可塑性樹脂,或它們的組合。該專利通過感光性樹脂組成物的固形份中黑色顏料含量的調控,來改善高含量黑色顏料的感光性樹脂組成物於光刻製程感光性低及顯影性不佳的問題。JP 2008-268854 discloses a photosensitive resin composition for black matrix. The photosensitive resin composition includes an alkali-soluble resin having a carboxylic acid group and an unsaturated group for polymerization, an ethylenically unsaturated group-containing photopolymerizable monomer, a photopolymerization initiator, and a black pigment. This patent uses a specific alkali-soluble resin to improve the pattern resolution of the black matrix formed by a photosensitive resin composition with a high content of black pigments. In addition, Japanese Patent Application Publication No. 2009-145432 discloses a photosensitive resin composition for a black matrix. The photosensitive resin composition contains an ethylenically unsaturated group-containing monomer, a photopolymerization initiator, a black pigment, and a resin. The resin is selected from thermosetting resin, photosensitive resin, thermoplastic resin, or a combination thereof. The patent improves the low sensitivity and poor developability of the photosensitive resin composition with high content of black pigment during the photolithography process by adjusting the black pigment content in the solid content of the photosensitive resin composition.

然而,由於現在業界對黑色矩陣的遮光性要求愈來愈高,解決的辦法的就是增加黑色顏料的含量,來提高黑色矩陣的遮光性,然而,前述黑色感光性樹脂組成物所製得之黑色圖案的錐度角及乾燥性較差。錐度角不佳時,容易導致後續製程的彩色光阻形狀控制不易;而乾燥性不佳時,容易生成異物,導致缺陷產生。However, as the industry has increasingly higher requirements for the light-shielding properties of the black matrix, the solution is to increase the content of black pigments to improve the light-shielding properties of the black matrix. However, the black color produced by the aforementioned black photosensitive resin composition The taper angle and dryness of the pattern are poor. When the taper angle is not good, it is easy to control the shape of the color photoresist in the subsequent manufacturing process; and when the drying property is not good, it is easy to generate foreign matter and cause defects.

綜上所述,如何使黑色感光性樹脂組成物所製得之黑色圖案,如黑色矩陣,具有良好的錐度角及乾燥性,以達到目前業界的要求,為本發明所屬技術領域中努力研究之目標。In summary, how to make the black pattern made of the black photosensitive resin composition, such as the black matrix, have a good taper angle and dryness, so as to meet the current industry requirements, is the subject of hard work in the technical field of the present invention. the goal.

本發明提供含有特殊成分組合之黑色感光性樹脂組成物,而得到由此黑色感光性樹脂組成物所形成之具有良好的錐度角及乾燥性之黑色圖案。The present invention provides a black photosensitive resin composition containing a special combination of components, thereby obtaining a black pattern with good taper angle and drying properties formed by the black photosensitive resin composition.

因此,本發明提供一種黑色感光性樹脂組成物,包含: 鹼可溶性樹脂(A); 具有乙烯性不飽和基之化合物(B); 光起始劑(C); 溶劑(D);及 黑色顏料(E); 其中,該鹼可溶性樹脂(A)包含第一鹼可溶性樹脂(A-1),該第一鹼可溶性樹脂(A-1)係由第一混合物所聚合而得,該第一混合物包含式(1)所示之二醇化合物(a-1-1)、四羧酸或其酸二酐(a-1-2)及二羧酸或其酸酐(a-1-3);

Figure 02_image001
式(1) 式(1)中,A1 、A1 ’各自為Ra SRb ,所述Ra 為單鍵、C1 -C10 伸烷基(Alkylene)或C6 -C15 伸芳基(Arylene),所述Rb 為C1 -C10 烷基或C6 -C15 芳基;n為1至6的整數;A2 、A2 ’各自為氫、羥基、硫醇基、氨基、硝基或鹵素取代基; 該溶劑(D)包含式(2)所示之第一溶劑(D-1);
Figure 02_image003
式(2) 式(2)中,D1 為具直鏈或支鏈之C1 -C8 伸烷基,D2 為具直鏈或支鏈之C1 -C8 烷基;a為2至4的整數,且複數個D1 可相同或不同。Therefore, the present invention provides a black photosensitive resin composition comprising: an alkali-soluble resin (A); a compound having an ethylenically unsaturated group (B); a photoinitiator (C); a solvent (D); and a black pigment (E); Wherein, the alkali-soluble resin (A) comprises a first alkali-soluble resin (A-1), the first alkali-soluble resin (A-1) is obtained by polymerizing a first mixture, and the first mixture Comprising the diol compound (a-1-1) represented by formula (1), tetracarboxylic acid or its acid dianhydride (a-1-2) and dicarboxylic acid or its acid anhydride (a-1-3);
Figure 02_image001
Formula (1) In formula (1), A 1 and A 1 'are each Ra SR b , and the Ra is a single bond, C 1 -C 10 Alkylene or C 6 -C 15 Arylene Arylene, the R b is a C 1 -C 10 alkyl group or a C 6 -C 15 aryl group; n is an integer from 1 to 6; A 2 and A 2 'are each hydrogen, hydroxyl, thiol, Amino group, nitro group or halogen substituent; The solvent (D) contains the first solvent (D-1) represented by formula (2);
Figure 02_image003
Formula (2) In the formula (2), D 1 is a linear or branched C 1 -C 8 alkylene; D 2 is a linear or branched C 1 -C 8 alkyl; a is 2 An integer from to 4, and plural D 1 may be the same or different.

本發明另提供一種黑色圖案,其係藉由前述之黑色感光性樹脂組成物經一預烤處理、一曝光處理、一顯影處理及一後烤處理所形成。The present invention also provides a black pattern, which is formed by the aforementioned black photosensitive resin composition undergoing a pre-baking treatment, an exposure treatment, a development treatment and a post-baking treatment.

本發明又提供一種液晶顯示裝置,其包含前述之黑色圖案。The present invention also provides a liquid crystal display device including the aforementioned black pattern.

因此,本發明提供一種黑色感光性樹脂組成物,包含: 鹼可溶性樹脂(A); 具有乙烯性不飽和基之化合物(B); 光起始劑(C); 溶劑(D);及 黑色顏料(E); 其中,該鹼可溶性樹脂(A)包含第一鹼可溶性樹脂(A-1),該第一鹼可溶性樹脂(A-1)係由第一混合物所聚合而得,該第一混合物包含式(1)所示之二醇化合物(a-1-1)、四羧酸或其酸二酐(a-1-2)及二羧酸或其酸酐(a-1-3);

Figure 02_image001
式(1) 式(1)中,A1 、A1 ’各自為Ra SRb ,所述Ra 為單鍵、C1 -C10 伸烷基或C6 -C15 伸芳基,所述Rb 為C1 -C10 烷基或C6 -C15 芳基;n為1至6的整數;A2 、A2 ’各自為氫、羥基、硫醇基、氨基、硝基或鹵素取代基; 該溶劑(D)包含式(2)所示之第一溶劑(D-1);
Figure 02_image003
式(2) 式(2)中,D1 為具直鏈或支鏈之C1 -C8 伸烷基,D2 為具直鏈或支鏈之C1 -C8 烷基;a為2至4的整數,且複數個D1 可相同或不同。Therefore, the present invention provides a black photosensitive resin composition comprising: an alkali-soluble resin (A); a compound having an ethylenically unsaturated group (B); a photoinitiator (C); a solvent (D); and a black pigment (E); Wherein, the alkali-soluble resin (A) comprises a first alkali-soluble resin (A-1), the first alkali-soluble resin (A-1) is obtained by polymerizing a first mixture, and the first mixture Comprising the diol compound (a-1-1) represented by formula (1), tetracarboxylic acid or its acid dianhydride (a-1-2) and dicarboxylic acid or its acid anhydride (a-1-3);
Figure 02_image001
Formula (1) In the formula (1), A 1 and A 1 'are each Ra SR b , and the Ra is a single bond, C 1 -C 10 alkylene or C 6 -C 15 arylene, so Said R b is a C 1 -C 10 alkyl group or a C 6 -C 15 aryl group; n is an integer from 1 to 6; A 2 and A 2 'are each hydrogen, hydroxyl, thiol, amino, nitro or halogen Substituents; The solvent (D) includes the first solvent (D-1) represented by formula (2);
Figure 02_image003
Formula (2) In the formula (2), D 1 is a linear or branched C 1 -C 8 alkylene; D 2 is a linear or branched C 1 -C 8 alkyl; a is 2 An integer from to 4, and plural D 1 may be the same or different.

根據本發明之鹼可溶性樹脂(A)包含第一鹼可溶性樹脂(A-1),該第一鹼可溶性樹脂(A-1)係由第一混合物所聚合而得。該第一混合物可包含式(1)所示之二醇化合物(a-1-1)、四羧酸或其酸二酐(a-1-2)及二羧酸或其酸酐(a-1-3);

Figure 02_image001
式(1) 式(1)中,A1 、A1 ’各自為Ra SRb ,所述Ra 為單鍵、C1 -C10 伸烷基或C6 -C15 伸芳基,所述Rb 為C1 -C10 烷基或C6 -C15 芳基;n為1至6的整數;A2 、A2 ’各自為氫、羥基、硫醇基、氨基、硝基或鹵素取代基。The alkali-soluble resin (A) according to the present invention includes the first alkali-soluble resin (A-1), which is obtained by polymerizing the first mixture. The first mixture may comprise the diol compound (a-1-1) represented by formula (1), tetracarboxylic acid or its acid dianhydride (a-1-2) and dicarboxylic acid or its acid anhydride (a-1 -3);
Figure 02_image001
Formula (1) In the formula (1), A 1 and A 1 'are each Ra SR b , and the Ra is a single bond, C 1 -C 10 alkylene or C 6 -C 15 arylene, so Said R b is a C 1 -C 10 alkyl group or a C 6 -C 15 aryl group; n is an integer from 1 to 6; A 2 and A 2 'are each hydrogen, hydroxyl, thiol, amino, nitro or halogen Substituents.

C1 -C10 烷基是直鏈或支鏈,其實例可為甲基、乙基、丙基、異丙基、正丁基、第二丁基、異丁基、第三丁基、戊基、己基、庚基、2,4,4-三甲基戊基、2-乙基己基、辛基、壬基及癸基;C6 -C15 芳基可為例如苯基、萘基、蒽基、菲基等。C1 -C10 伸烷基及C6 -C15 伸芳基則可分別為與上述C1 -C10 烷基及C6 -C15 芳基相應之伸烷基及伸芳基。The C 1 -C 10 alkyl group is linear or branched, and examples thereof can be methyl, ethyl, propyl, isopropyl, n-butyl, second butyl, isobutyl, tertiary butyl, pentyl Yl, hexyl, heptyl, 2,4,4-trimethylpentyl, 2-ethylhexyl, octyl, nonyl and decyl; C 6 -C 15 aryl may be, for example, phenyl, naphthyl, Anthryl, phenanthryl, etc. The C 1 -C 10 alkylene group and the C 6 -C 15 arylene group may be the alkylene group and the arylene group corresponding to the aforementioned C 1 -C 10 alkyl group and C 6 -C 15 aryl group, respectively.

本發明之四羧酸或其酸二酐(a-1-2)包括含有氟原子的四羧酸、直鏈烴四羧酸、脂環式四羧酸、芳香族四羧酸,或上述四羧酸之二酐化合物,或其組合。The tetracarboxylic acid or its acid dianhydride (a-1-2) of the present invention includes tetracarboxylic acid containing fluorine atom, linear hydrocarbon tetracarboxylic acid, alicyclic tetracarboxylic acid, aromatic tetracarboxylic acid, or the above-mentioned tetracarboxylic acid The dianhydride compound of carboxylic acid, or a combination thereof.

該含有氟原子的四羧酸或其酸二酐的具體例包括4,4'-六氟亞異丙基二鄰苯二甲酸、1,4-二氟均苯四甲酸、1-單氟均苯四甲酸、1,4-二(三氟甲基)均苯四甲酸、3,3'-六氟亞異丙基二鄰苯二甲酸、5,5'-[2,2,2-三氟-1-[3-(三氟甲基)苯基]亞乙基]二鄰苯二甲酸、5,5'-[2,2,3,3,3-五氟-1-(三氟甲基)亞丙基]二鄰苯二甲酸、5,5'-氧基雙[4,6,7-三氟-均苯四甲酸]、3,6-雙(三氟甲基)均苯四甲酸、4-(三氟甲基)均苯四甲酸、1,4-雙(3,4-二羧酸三氟苯氧基)四氟苯等含氟的四羧酸,或上述四羧酸之二酐化合物,或上述化合物的組合。Specific examples of the fluorine atom-containing tetracarboxylic acid or its acid dianhydride include 4,4'-hexafluoroisopropylidene diphthalic acid, 1,4-difluoropyromellitic acid, 1-monofluoro Pyromellitic acid, 1,4-bis(trifluoromethyl)pyromellitic acid, 3,3'-hexafluoroisopropylidene diphthalic acid, 5,5'-[2,2,2-tris Fluoro-1-[3-(trifluoromethyl)phenyl]ethylene]diphthalic acid, 5,5'-[2,2,3,3,3-pentafluoro-1-(trifluoro (Methyl)propylene]diphthalic acid, 5,5'-oxybis[4,6,7-trifluoro-pyromellitic acid], 3,6-bis(trifluoromethyl) benzene Fluorine-containing tetracarboxylic acids such as tetracarboxylic acid, 4-(trifluoromethyl)pyromellitic acid, 1,4-bis(3,4-dicarboxylic acid trifluorophenoxy)tetrafluorobenzene, or the above-mentioned tetracarboxylic acids An acid dianhydride compound, or a combination of the above compounds.

該飽和直鏈烴四羧酸的具體例包括丁烷四羧酸、戊烷四羧酸、己烷四羧酸,或上述化合物的組合。飽和直鏈烴四羧酸亦可具有取代基。Specific examples of the saturated linear hydrocarbon tetracarboxylic acid include butanetetracarboxylic acid, pentanetetracarboxylic acid, hexanetetracarboxylic acid, or a combination of the foregoing compounds. The saturated linear hydrocarbon tetracarboxylic acid may have a substituent.

該脂環式四羧酸的具體例包括環丁烷四羧酸、環戊烷四羧酸、環已烷四羧酸,降冰片烷四羧酸,或上述化合物的組合。脂環式四羧酸亦可具有取代基。Specific examples of the alicyclic tetracarboxylic acid include cyclobutane tetracarboxylic acid, cyclopentane tetracarboxylic acid, cyclohexane tetracarboxylic acid, norbornane tetracarboxylic acid, or a combination of the foregoing compounds. The alicyclic tetracarboxylic acid may have a substituent.

該脂環式四羧酸之二酐化合物的具體例包括1,2,3,4-環丁烷四羧酸二酐、1,2,3,4-環戊烷四羧酸二酐、1,2,3,4-環己烷四羧酸二酐或3,3',4,4'-二苯碸四羧酸二酐,或上述化合物的組合。Specific examples of the dianhydride compound of the alicyclic tetracarboxylic acid include 1,2,3,4-cyclobutane tetracarboxylic dianhydride, 1,2,3,4-cyclopentane tetracarboxylic dianhydride, 1 , 2,3,4-cyclohexanetetracarboxylic dianhydride or 3,3',4,4'-diphenyl tetracarboxylic dianhydride, or a combination of the above compounds.

該芳香族四羧酸的具體例包括均苯四甲酸、二苯甲酮四羧酸、聯苯四羧酸、聯苯醚四羧酸、二苯基碸四羧酸、1,2,3,6-四氫鄰苯二甲酸,或上述化合物的組合。芳香族四羧酸亦可具有取代基。Specific examples of the aromatic tetracarboxylic acid include pyromellitic acid, benzophenone tetracarboxylic acid, biphenyl tetracarboxylic acid, diphenyl ether tetracarboxylic acid, diphenyl tetracarboxylic acid, 1,2,3, 6-Tetrahydrophthalic acid, or a combination of the above compounds. The aromatic tetracarboxylic acid may have a substituent.

該芳香族四羧酸之二酐化合物的具體例包括均苯四甲酸二酐,3,3',4,4'-聯苯四羧酸二酐、2,3,3',4'-聯苯四羧酸二酐,2,2',3,3'-聯苯四羧酸二酐、3,3',4,4'-二苯甲酮四羧酸二酐,2,2',3,3'-二苯甲酮四羧酸二酐、2,2-雙(3,4-二羧基苯基)丙烷二酐、2,2-雙(2,3-二羧基苯基)丙烷二酐、1,1-雙(3,4-二羧基苯基)乙烷二酐、1,1-雙(2,3-二羧基苯基)乙烷二酐、雙(3,4-二羧基苯基)甲烷二酐、雙(2,3-二羧基苯基)甲烷二酐、雙(3,4-二羧基苯基)碸二酐、雙(3,4-二羧基苯基)醚二酐、1,2,5,6-萘四甲酸二酐、9,9-雙(3,4-二羧基苯基)芴酸二酐、9,9-雙{4-(3,4-二羧基苯氧基)苯基}氟化二酐、2,3,6,7-萘四甲酸二酐、2,3,5,6-吡啶四羧酸二酐、3,4,9,10-苝四羧酸二酐、2,2-雙(3,4-二羧基苯基)六氟丙烷二酐,或上述化合物的組合。Specific examples of the aromatic tetracarboxylic dianhydride compound include pyromellitic dianhydride, 3,3',4,4'-biphenyltetracarboxylic dianhydride, 2,3,3',4'- Phenyltetracarboxylic dianhydride, 2,2',3,3'-biphenyltetracarboxylic dianhydride, 3,3',4,4'-benzophenonetetracarboxylic dianhydride, 2,2', 3,3'-benzophenone tetracarboxylic dianhydride, 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, 2,2-bis(2,3-dicarboxyphenyl)propane Dianhydride, 1,1-bis(3,4-dicarboxyphenyl)ethane dianhydride, 1,1-bis(2,3-dicarboxyphenyl)ethane dianhydride, bis(3,4-di Carboxyphenyl) methane dianhydride, bis(2,3-dicarboxyphenyl)methane dianhydride, bis(3,4-dicarboxyphenyl) dianhydride, bis(3,4-dicarboxyphenyl) ether Dianhydride, 1,2,5,6-naphthalenetetracarboxylic dianhydride, 9,9-bis(3,4-dicarboxyphenyl)fluorenic dianhydride, 9,9-bis(4-(3,4- Dicarboxyphenoxy)phenyl)fluorinated dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 2,3,5,6-pyridinetetracarboxylic dianhydride, 3,4,9,10 -Perylenetetracarboxylic dianhydride, 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, or a combination of the above compounds.

本發明之二羧酸或其酸酐(a-1-3)包括含有氟原子的二羧酸、飽和直鏈烴二羧酸、飽和環狀烴二羧酸、不飽和二羧酸、其他二羧酸或上述二羧酸化合物之酸酐,或上述化合物的組合。The dicarboxylic acid or its anhydride (a-1-3) of the present invention includes dicarboxylic acids containing fluorine atoms, saturated linear hydrocarbon dicarboxylic acids, saturated cyclic hydrocarbon dicarboxylic acids, unsaturated dicarboxylic acids, and other dicarboxylic acids Acid or anhydride of the aforementioned dicarboxylic acid compound, or a combination of the aforementioned compounds.

該含有氟原子的二羧酸或其酸酐的具體例包括3-氟鄰苯二甲酸、4-氟鄰苯二甲酸、四氟鄰苯二甲酸、3,6-二氟鄰苯二甲酸、四氟琥珀酸,或上述二羧酸之酸酐化合物,或上述化合物的組合。Specific examples of the fluorine atom-containing dicarboxylic acid or its anhydride include 3-fluorophthalic acid, 4-fluorophthalic acid, tetrafluorophthalic acid, 3,6-difluorophthalic acid, tetrafluorophthalic acid, Fluorosuccinic acid, or anhydride compounds of the above dicarboxylic acids, or a combination of the above compounds.

該飽和直鏈烴二羧酸的具體例包括丁二酸、乙醯基丁二酸、己二酸、壬二酸、檸蘋酸、丙二酸、戊二酸、檸檬酸、酒石酸、氧代戊二酸、庚二酸、癸二酸、辛二酸、二甘醇酸,或上述化合物的組合。飽和直鏈烴二羧酸中的烴基亦可被取代。Specific examples of the saturated linear hydrocarbon dicarboxylic acid include succinic acid, acetosuccinic acid, adipic acid, azelaic acid, citramalic acid, malonic acid, glutaric acid, citric acid, tartaric acid, oxo Glutaric acid, pimelic acid, sebacic acid, suberic acid, diglycolic acid, or a combination of the foregoing compounds. The hydrocarbon group in the saturated linear hydrocarbon dicarboxylic acid may also be substituted.

該飽和環狀烴二羧酸的具體例包括六氫鄰苯二甲酸、環丁烷二羧酸、環戊烷二羧酸、降冰片烷二羧酸、六氫偏苯三酸,或上述化合物的組合。飽和環狀烴二羧酸亦可為飽和烴經取代的脂環式二羧酸。Specific examples of the saturated cyclic hydrocarbon dicarboxylic acid include hexahydrophthalic acid, cyclobutane dicarboxylic acid, cyclopentane dicarboxylic acid, norbornane dicarboxylic acid, hexahydrotrimellitic acid, or the aforementioned compounds The combination. The saturated cyclic hydrocarbon dicarboxylic acid may also be alicyclic dicarboxylic acid substituted with saturated hydrocarbon.

該不飽和二羧酸的具體例包括馬來酸、衣康酸、鄰苯二甲酸、四氫鄰苯二甲酸、甲基橋亞甲基四氫鄰苯二甲酸、氯茵酸、偏苯三酸,或上述化合物的組合。Specific examples of the unsaturated dicarboxylic acid include maleic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, methyl bridge methylene tetrahydrophthalic acid, chlorendic acid, trimellitium Acid, or a combination of the above compounds.

該其他二羧酸或其酸酐的具體例包括三甲氧基矽烷基丙基丁二酸酐、三乙氧基矽烷基丙基丁二酸酐、甲基二甲氧基矽烷基丙基丁二酸酐、甲基二乙氧基矽烷基丙基丁二酸酐、三甲氧基矽烷基丁基丁二酸酐、三乙氧基矽烷基丁基丁二酸酐、甲基二乙氧基矽烷基丁基丁二酸酐、對(三甲氧基矽烷基)苯基丁二酸酐、對(三乙氧基矽烷基)苯基丁二酸酐、對(甲基二甲氧基矽烷基)苯基丁二酸酐、對(甲基二乙氧基矽烷基)苯基丁二酸酐、間(三甲氧基矽烷基)苯基丁二酸酐、間(三乙氧基矽烷基)苯基丁二酸酐、間(甲基二乙氧基矽烷基)苯基丁二酸酐等二羧酸酐,或上述二羧酸酐之二羧酸化合物,或上述化合物的組合。Specific examples of the other dicarboxylic acid or its anhydride include trimethoxysilyl propyl succinic anhydride, triethoxy silyl propyl succinic anhydride, methyl dimethoxy silyl propyl succinic anhydride, methane Diethoxysilyl propyl succinic anhydride, trimethoxysilyl butyl succinic anhydride, triethoxy silyl butyl succinic anhydride, methyl diethoxy silyl butyl succinic anhydride, P-(trimethoxysilyl)phenyl succinic anhydride, p(triethoxysilyl)phenyl succinic anhydride, p(methyldimethoxysilyl)phenyl succinic anhydride, p(methyl Diethoxysilyl) phenyl succinic anhydride, m (trimethoxysilyl) phenyl succinic anhydride, m (triethoxy silyl) phenyl succinic anhydride, m (methyl diethoxy) Dicarboxylic acid anhydrides such as silyl)phenyl succinic anhydride, or dicarboxylic acid compounds of the above-mentioned dicarboxylic acid anhydrides, or a combination of the above-mentioned compounds.

該第一鹼可溶性樹脂(A-1)的合成方法並無特別限制,只要將該式(1)所示之二醇化合物(a-1-1)、該四羧酸或其酸二酐(a-1-2)以及該二羧酸或其酸酐(a-1-3)反應即可獲得。The synthesis method of the first alkali-soluble resin (A-1) is not particularly limited, as long as the diol compound (a-1-1) represented by the formula (1), the tetracarboxylic acid or its acid dianhydride ( a-1-2) and the dicarboxylic acid or its anhydride (a-1-3) can be obtained.

然而,較佳係先將該式(1)所示之二醇化合物(a-1-1)與該四羧酸或其酸二酐(a-1-2)進行聚合反應,例如於100℃至130℃下,較佳於110℃至120℃下反應2小時至24小時,較佳反應4小時至12小時。However, it is preferable to polymerize the diol compound (a-1-1) represented by formula (1) and the tetracarboxylic acid or its acid dianhydride (a-1-2) first, for example at 100°C The reaction temperature is 130°C, preferably 110°C to 120°C, for 2 hours to 24 hours, preferably 4 hours to 12 hours.

基於該式(1)所示之二醇化合物(a-1-1)之使用量為100重量份,該四羧酸或其酸二酐(a-1-2)之使用量為5至40重量份,較佳為10重量份至30重量份,且更佳為10重量份至20重量份。Based on the usage amount of the diol compound (a-1-1) represented by the formula (1) being 100 parts by weight, the usage amount of the tetracarboxylic acid or its acid dianhydride (a-1-2) is 5 to 40 Parts by weight are preferably 10 parts by weight to 30 parts by weight, and more preferably 10 parts by weight to 20 parts by weight.

前述聚合反應開始後,再加入該二羧酸或其酸酐(a-1-3),例如於100℃至130℃下,較佳於110℃至120℃下反應30分鐘至4小時,較佳反應1小時至3小時。After the aforementioned polymerization reaction starts, the dicarboxylic acid or its anhydride (a-1-3) is added, for example, at 100°C to 130°C, preferably at 110°C to 120°C, for 30 minutes to 4 hours, preferably React for 1 hour to 3 hours.

基於該式(1)所示之二醇化合物(a-1-1)之使用量為100重量份,該二羧酸或其酸酐(a-1-3)之使用量為2至10重量份,較佳為2重量份至5重量份,且更佳為3重量份至5重量份。Based on the usage amount of the diol compound (a-1-1) represented by the formula (1) being 100 parts by weight, the usage amount of the dicarboxylic acid or its anhydride (a-1-3) is 2 to 10 parts by weight , Preferably 2 parts by weight to 5 parts by weight, and more preferably 3 parts by weight to 5 parts by weight.

上述第一鹼可溶性樹脂(A-1)藉由膠體滲透層析儀(Gel Permeation Chromatography, GPC)測定之重量平均分子量可為1,000 g/mol至100,000 g/mol,較佳為2,000 g/mol至50,000 g/mol,更佳為3,000 g/mol至10,000 g/mol。此外,上述第一鹼可溶性樹脂(A-1)藉由GPC測定之分散度可為1.0至5.0之範圍,較佳為1.5至4.0之範圍。The weight average molecular weight of the first alkali-soluble resin (A-1) measured by Gel Permeation Chromatography (GPC) can be 1,000 g/mol to 100,000 g/mol, preferably 2,000 g/mol to 50,000 g/mol, more preferably 3,000 g/mol to 10,000 g/mol. In addition, the dispersion degree of the first alkali-soluble resin (A-1) measured by GPC may be in the range of 1.0 to 5.0, preferably in the range of 1.5 to 4.0.

基於該鹼可溶性樹脂(A)之總使用量為100重量份,該第一鹼可溶性樹脂(A-1)之使用量為30至100重量份,較佳為40重量份至90重量份,且更佳為50重量份至90重量份。當未使用該第一鹼可溶性樹脂(A-1)時,本發明之黑色感光性樹脂組成物所製得之黑色圖案具有錐度角不佳之問題。Based on the total usage amount of the alkali soluble resin (A) being 100 parts by weight, the usage amount of the first alkali soluble resin (A-1) is 30 to 100 parts by weight, preferably 40 to 90 parts by weight, and More preferably, it is 50 parts by weight to 90 parts by weight. When the first alkali-soluble resin (A-1) is not used, the black pattern produced by the black photosensitive resin composition of the present invention has a problem of poor taper angle.

本發明之該鹼可溶性樹脂(A)另可包含第二鹼可溶性樹脂(A-2),該第二鹼可溶性樹脂(A-2)係由第二混合物聚合而得,且該第二混合物包括含有聚合性不飽和基的二醇化合物(a-2-1)、四羧酸或其酸二酐(a-2-2)以及二羧酸或其酸酐(a-2-3)。The alkali-soluble resin (A) of the present invention may further include a second alkali-soluble resin (A-2), the second alkali-soluble resin (A-2) is obtained by polymerizing a second mixture, and the second mixture includes Polymerizable unsaturated group-containing diol compound (a-2-1), tetracarboxylic acid or its acid dianhydride (a-2-2), and dicarboxylic acid or its acid anhydride (a-2-3).

本發明之含有聚合性不飽和基的二醇化合物(a-2-1)是由具有至少二個環氧基的環氧化合物及具有至少一個羧酸基及至少一個乙烯性不飽和基的化合物反應而得。The diol compound (a-2-1) containing a polymerizable unsaturated group of the present invention is composed of an epoxy compound having at least two epoxy groups and a compound having at least one carboxylic acid group and at least one ethylenically unsaturated group From the reaction.

該具有至少二個環氧基的環氧化合物包括式(a-2-1-1)所示的結構、式(a-2-1-2)所示的結構以及式(a-2-1-3)所示的結構,或上述三種結構。以下分別具體說明式(a-2-1-1)所示的結構、式(a-2-1-2)所示的結構、式(a-2-1-3)所示的結構。The epoxy compound having at least two epoxy groups includes the structure represented by formula (a-2-1-1), the structure represented by formula (a-2-1-2) and formula (a-2-1 -3) The structure shown, or the above three structures. The structure represented by the formula (a-2-1-1), the structure represented by the formula (a-2-1-2), and the structure represented by the formula (a-2-1-3) are specifically described below.

具體而言,該式(a-2-1-1)所表示的結構如下:

Figure 02_image007
式(a-2-1-1) 式(a-2-1-1)中,W1 、W2 、W3 以及W4 各自獨立表示氫原子、鹵素原子、碳數為1至5的烷基、碳數為1至5的烷氧基、碳數為6至12的芳基或碳數為6至12的芳烷基。Specifically, the structure represented by the formula (a-2-1-1) is as follows:
Figure 02_image007
Formula (a-2-1-1) In formula (a-2-1-1), W 1 , W 2 , W 3 and W 4 each independently represent a hydrogen atom, a halogen atom, an alkane having 1 to 5 carbon atoms Group, alkoxy group having 1 to 5 carbons, aryl group having 6 to 12 carbons, or aralkyl group having 6 to 12 carbons.

該含有式(a-2-1-1)所表示的結構的具有至少二個環氧基的環氧化合物可包括由雙酚茀型化合物與鹵化環氧丙烷反應而得的具有環氧基的雙酚茀型化合物。The epoxy compound having at least two epoxy groups containing the structure represented by the formula (a-2-1-1) may include an epoxy compound obtained by reacting a bisphenol phenolic compound with a halogenated propylene oxide Bisphenolic compound.

詳言之,該雙酚茀型化合物的具體例包括:9,9-雙(4-羥基苯基)茀、9,9-雙(4-羥基-3-甲基苯基)茀、9,9-雙(4-羥基-3-氯苯基)茀、9,9-雙(4-羥基-3-溴苯基)茀、9,9-雙(4-羥基-3-氟苯基)茀、9,9-雙(4-羥基-3-甲氧基苯基)茀、9,9-雙(4-羥基-3,5-二甲基苯基)茀、9,9-雙(4-羥基-3,5-二氯苯基)茀、9,9-雙(4-羥基-3,5-二溴苯基)茀或其類似物,或上述化合物之組合。In detail, specific examples of the bisphenol sulfonate type compound include: 9,9-bis(4-hydroxyphenyl)sulfonate, 9,9-bis(4-hydroxy-3-methylphenyl)sulfonate, 9, 9-bis(4-hydroxy-3-chlorophenyl) sulfone, 9,9-bis(4-hydroxy-3-bromophenyl) sulfone, 9,9-bis(4-hydroxy-3-fluorophenyl)茀, 9,9-bis(4-hydroxy-3-methoxyphenyl) 茀, 9,9-bis(4-hydroxy-3,5-dimethylphenyl) 茀, 9,9-bis( 4-hydroxy-3,5-dichlorophenyl) pyridium, 9,9-bis(4-hydroxy-3,5-dibromophenyl) pyridium or an analog thereof, or a combination of the foregoing compounds.

該鹵化環氧丙烷的具體例包括3-氯-1,2-環氧丙烷或3-溴-1,2-環氧丙烷或其類似物,或上述化合物之組合。Specific examples of the halogenated propylene oxide include 3-chloro-1,2-propylene oxide or 3-bromo-1,2-propylene oxide or the like, or a combination of the foregoing compounds.

該具有環氧基的雙酚茀型化合物的具體例包括(1)新日鐵化學製造的商品:例如ESF-300或其類似物;(2)大阪瓦斯製造之商品:例如PG-100、EG-210或其類似物;(3)S.M.S Technology Co.製造之商品:例如SMS-F9PhPG、SMS-F9CrG、SMS-F914PG或其類似物。Specific examples of the epoxy-containing bisphenol-type compound include (1) products manufactured by Nippon Steel Chemicals: such as ESF-300 or its analogs; (2) products manufactured by Osaka Gas: such as PG-100, EG -210 or its analogues; (3) Commodities manufactured by SMS Technology Co.: such as SMS-F9PhPG, SMS-F9CrG, SMS-F914PG or its analogues.

另外,具體而言,式(a-2-1-2)所表示的結構如下:

Figure 02_image009
式(a-2-1-2) 式(a-2-1-2)中,W5 至W18 各自獨立表示氫原子、鹵素原子、碳數為1至8的烷基或碳數為6至15的芳香基,s表示0至10的整數。In addition, specifically, the structure represented by formula (a-2-1-2) is as follows:
Figure 02_image009
Formula (a-2-1-2) In formula (a-2-1-2), W 5 to W 18 each independently represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbons, or a carbon number 6 To 15 aromatic groups, s represents an integer of 0-10.

含有式(a-2-1-2)所表示的結構的具有至少二個環氧基的環氧化合物可包括在鹼金屬氫氧化物存在下,使具有下式(a-2-1-2-I)結構的化合物與鹵化環氧丙烷進行反應而得。

Figure 02_image011
式(a-2-1-2-I) 在上式(a-2-1-2-I)中,W5 至W18 以及s的定義是分別與式(a-2-1-2)中的W5 至W18 以及s的定義相同,在此不另贅述。The epoxy compound having at least two epoxy groups containing the structure represented by the formula (a-2-1-2) may be included in the presence of an alkali metal hydroxide to have the following formula (a-2-1-2 -I) The compound of the structure is obtained by reacting with halogenated propylene oxide.
Figure 02_image011
Formula (a-2-1-2-I) In the above formula (a-2-1-2-I), W 5 to W 18 and s are defined respectively with the formula (a-2-1-2) The definitions of W 5 to W 18 and s are the same, and will not be repeated here.

該含有式(a-2-1-2)所表示的結構的具有至少二個環氧基的環氧化合物的合成方法可參考台灣公開號TW201508418之專利。The synthesis method of the epoxy compound with at least two epoxy groups containing the structure represented by formula (a-2-1-2) can refer to the patent of Taiwan Publication No. TW201508418.

上述含有式(a-2-1-2)所表示的結構的具有至少二個環氧基的環氧化合物的具體例包括商品名為NC-3000、NC-3000H、NC-3000S以及NC-3000P等由日本化藥製造的商品。Specific examples of the epoxy compound having at least two epoxy groups containing the structure represented by the formula (a-2-1-2) include the trade names NC-3000, NC-3000H, NC-3000S, and NC-3000P Such as products manufactured by Nippon Kayaku.

另外,具體而言,該式(a-2-1-3)所表示的結構如下:

Figure 02_image013
式(a-2-1-3) 式(a-2-1-3)中,Ar3 表示萘環,W19 表示氰基、鹵素或烴基,W20 表示烴基、烷氧基、環烷氧基、芳氧基、芳烷氧基、烷硫基、環烷硫基、芳硫基、芳烷硫基、醯基、鹵素、硝基、氰基或是經取代的氨基,W21 表示伸烷基,a表示0至4的整數,b以及c表示0或0以上的整數。In addition, specifically, the structure represented by the formula (a-2-1-3) is as follows:
Figure 02_image013
Formula (a-2-1-3) In formula (a-2-1-3), Ar 3 represents a naphthalene ring, W 19 represents a cyano group, a halogen or a hydrocarbyl group, and W 20 represents a hydrocarbyl group, an alkoxy group, or a cycloalkoxy group. Group, aryloxy group, aralkoxy group, alkylthio group, cycloalkylthio group, arylthio group, aralkylthio group, acyl group, halogen, nitro group, cyano group or substituted amino group, W 21 represents extension In the alkyl group, a represents an integer of 0 to 4, and b and c represent an integer of 0 or more.

上述含有式(a-2-1-3)所表示的結構的具有至少二個環氧基的環氧化合物的具體例包括:9,9-雙(縮水甘油氧基萘基)芴,且例如是9,9-雙(6-縮水甘油氧基-2-萘基)芴或9,9-雙(5-縮水甘油氧基-1-萘基)芴等類似之化合物。Specific examples of the epoxy compound having at least two epoxy groups and containing the structure represented by the formula (a-2-1-3) include: 9,9-bis(glycidyloxynaphthyl)fluorene, and for example It is 9,9-bis(6-glycidoxy-2-naphthyl)fluorene or 9,9-bis(5-glycidoxy-1-naphthyl)fluorene and similar compounds.

具有至少一個羧酸基及至少一個乙烯性不飽和基的化合物選自於由以下(1)至(3)所組成的族群的其中一種: (1)丙烯酸、甲基丙烯酸、2-甲基丙烯醯氧乙基丁二酸、2-甲基丙烯醯氧丁基丁二酸、2-甲基丙烯醯氧乙基己二酸、2-甲基丙烯醯氧丁基己二酸、2-甲基丙烯醯氧乙基六氫鄰苯二甲酸、2-甲基丙烯醯氧乙基馬來酸、2-甲基丙烯醯氧丙基馬來酸、2-甲基丙烯醯氧丁基馬來酸、2-甲基丙烯醯氧丙基丁二酸、2-甲基丙烯醯氧丙基己二酸、2-甲基丙烯醯氧丙基四氫鄰苯二甲酸、2-甲基丙烯醯氧丙基鄰苯二甲酸、2-甲基丙烯醯氧丁基鄰苯二甲酸、2-甲基丙烯醯氧丁基氫鄰苯二甲酸或其類似物; (2)由具有羥基之(甲基)丙烯酸酯與二元羧酸化合物反應而得的化合物,其中二元羧酸化合物的具體例包括己二酸、丁二酸、馬來酸、鄰苯二甲酸或其類似物;以及 (3)由具有羥基之(甲基)丙烯酸酯與羧酸酐化合物反應而得的半酯化合物,其中具有羥基的(甲基)丙烯酸酯的具體例包括2-羥基乙基丙烯酸酯、2-羥基乙基甲基丙烯酸酯、2-羥基丙基丙烯酸酯、2-羥基丙基甲基丙烯酸酯、4-羥基丁基丙烯酸酯、4-羥基丁基甲基丙烯酸酯、季戊四醇三甲基丙烯酸酯或其類似物。The compound having at least one carboxylic acid group and at least one ethylenically unsaturated group is selected from one of the following groups (1) to (3): (1) Acrylic acid, methacrylic acid, 2-methacryloxyethyl succinic acid, 2-methacryloxybutyl succinic acid, 2-methacryloxyethyl adipic acid, 2- Methacryloxybutyl adipic acid, 2-methacryloxyethyl hexahydrophthalic acid, 2-methacryloxyethyl maleic acid, 2-methacryloxypropyl horse Acid, 2-methacryloxybutyl maleic acid, 2-methacryloxypropyl succinic acid, 2-methacryloxypropyl adipic acid, 2-methacryloxypropyl Tetrahydrophthalic acid, 2-methacryloxypropyl phthalic acid, 2-methacryloxybutyl phthalic acid, 2-methacryloxybutylhydrophthalic acid Or its analogues; (2) A compound obtained by reacting a (meth)acrylate having a hydroxyl group with a dicarboxylic acid compound. Specific examples of the dicarboxylic acid compound include adipic acid, succinic acid, maleic acid, and phthalic acid. Formic acid or its analogues; and (3) A half-ester compound obtained by reacting a (meth)acrylate having a hydroxyl group with a carboxylic acid anhydride compound. Specific examples of the (meth)acrylate having a hydroxyl group include 2-hydroxyethyl acrylate and 2-hydroxyl Ethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate, 4-hydroxybutyl acrylate, 4-hydroxybutyl methacrylate, pentaerythritol trimethacrylate or the like Things.

另外,此處所述的羧酸酐化合物與以上所述之四羧酸二酐或二羧酸酐相同,在此不另贅述。In addition, the carboxylic anhydride compound described here is the same as the tetracarboxylic dianhydride or dicarboxylic anhydride described above, and will not be repeated here.

第二鹼可溶性樹脂(A-2)所使用之四羧酸或其酸二酐(a-2-2)以及二羧酸或其酸酐(a-2-3)的種類,可分別與前述第一鹼可溶性樹脂(A-1)所使用之四羧酸或其酸二酐(a-1-2)以及二羧酸或其酸酐(a-1-3)相同,故於此不再贅述。The types of tetracarboxylic acid or its acid dianhydride (a-2-2) and dicarboxylic acid or its acid anhydride (a-2-3) used in the second alkali-soluble resin (A-2) can be the same as those of the aforementioned first The tetracarboxylic acid or its acid dianhydride (a-1-2) and the dicarboxylic acid or its acid anhydride (a-1-3) used in the alkali-soluble resin (A-1) are the same, so they will not be repeated here.

該第二鹼可溶性樹脂(A-2)的合成方法並無特別限制,只要將該含有聚合性不飽和基的二醇化合物(a-2-1)、該四羧酸或其酸二酐(a-2-2)以及該二羧酸或其酸酐(a-2-3)反應即可獲得,並且可參考台灣公開號TW201508418之專利進行合成。The synthesis method of the second alkali-soluble resin (A-2) is not particularly limited, as long as the polymerizable unsaturated group-containing diol compound (a-2-1), the tetracarboxylic acid or its acid dianhydride ( a-2-2) and the dicarboxylic acid or its anhydride (a-2-3) can be obtained by reaction, and can be synthesized with reference to the patent of Taiwan Publication No. TW201508418.

上述第二鹼可溶性樹脂(A-2)藉由GPC測定之聚苯乙烯換算的數目平均分子量較佳為800至8000,更佳為1,000至6,000。The number average molecular weight of the second alkali-soluble resin (A-2) measured by GPC in terms of polystyrene is preferably 800 to 8,000, more preferably 1,000 to 6,000.

基於該鹼可溶性樹脂(A)之總使用量為100重量份,該第二鹼可溶性樹脂(A-2)之使用量為0至70重量份,較佳為10重量份至60重量份,且更佳為10重量份至50重量份。當使用該第一鹼可溶性樹脂(A-2)時,可進一步改善本發明之黑色感光性樹脂組成物所製得之黑色圖案的錐度角。Based on the total usage amount of the alkali-soluble resin (A) being 100 parts by weight, the usage amount of the second alkali-soluble resin (A-2) is 0 to 70 parts by weight, preferably 10 to 60 parts by weight, and More preferably, it is 10 to 50 parts by weight. When the first alkali-soluble resin (A-2) is used, the taper angle of the black pattern produced by the black photosensitive resin composition of the present invention can be further improved.

該具有乙烯性不飽和基之化合物(B)可選自於具有一個乙烯性不飽和基的化合物或具有二個以上(含二個)乙烯性不飽和基的化合物。The compound (B) having an ethylenically unsaturated group can be selected from a compound having one ethylenically unsaturated group or a compound having two or more (including two) ethylenically unsaturated groups.

前述具有一個乙烯性不飽和基之化合物可包含但不限於(甲基)丙烯醯胺、(甲基)丙烯醯嗎啉、(甲基)丙烯酸-7-胺基-3,7-二甲基辛酯、異丁氧基甲基(甲基)丙烯醯胺、(甲基)丙烯酸異冰片基氧乙酯、(甲基)丙烯酸異冰片酯、(甲基)丙烯酸-2-乙基己酯、乙基二乙二醇(甲基)丙烯酸酯、第三辛基(甲基)丙烯醯胺、二丙酮(甲基)丙烯醯胺、(甲基)丙烯酸二甲基胺基乙酯、(甲基)丙烯酸十二烷基酯、(甲基)丙烯酸二環戊烯氧基乙酯、(甲基)丙烯酸二環戊烯酯、N,N-二甲基(甲基)丙烯醯胺、(甲基)丙烯酸四氯苯酯、(甲基)丙烯酸-2-四氯苯氧基乙酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸四溴苯酯、(甲基)丙烯酸-2-四溴苯氧基乙酯、(甲基)丙烯酸-2-三氯苯氧基乙酯、(甲基)丙烯酸三溴苯酯、(甲基)丙烯酸-2-三溴苯氧基乙酯、2-羥基-(甲基)丙烯酸乙酯、2-羥基-(甲基)丙烯酸丙酯、乙烯基己內醯胺、N-乙烯基吡咯烷酮、(甲基)丙烯酸苯氧基乙酯、(甲基)丙烯酸五氯苯酯、(甲基)丙烯酸五溴苯酯、聚單(甲基)丙烯酸乙二酯、聚單(甲基)丙烯酸丙二酯或(甲基)丙烯酸冰片酯等之化合物。所述具有一個乙烯性不飽和基的化合物可單獨一種或混合複數種使用。The aforementioned compound having an ethylenically unsaturated group may include, but is not limited to, (meth)acrylamide, (meth)acrylamide, (meth)acrylic acid-7-amino-3,7-dimethyl Octyl ester, isobutoxymethyl (meth)acrylamide, isobornyloxyethyl (meth)acrylate, isobornyl (meth)acrylate, 2-ethylhexyl (meth)acrylate , Ethyl diethylene glycol (meth)acrylate, the third octyl (meth)acrylamide, diacetone (meth)acrylamide, dimethylaminoethyl (meth)acrylate, ( Lauryl meth)acrylate, dicyclopentenyloxyethyl (meth)acrylate, dicyclopentenyl (meth)acrylate, N,N-dimethyl(meth)acrylamide, Tetrachlorophenyl (meth)acrylate, 2-tetrachlorophenoxyethyl (meth)acrylate, tetrahydrofurfuryl (meth)acrylate, tetrabromophenyl (meth)acrylate, (meth) Acrylic acid-2-tetrabromophenoxyethyl, (meth)acrylic acid-2-trichlorophenoxyethyl, (meth)acrylic acid tribromophenyl ester, (meth)acrylic acid-2-tribromophenoxyethyl Ethyl ester, 2-hydroxy-(meth)ethyl acrylate, 2-hydroxy-(meth) propyl acrylate, vinyl caprolactam, N-vinyl pyrrolidone, (meth) phenoxy ethyl acrylate Ester, pentachlorophenyl (meth)acrylate, pentabromophenyl (meth)acrylate, poly(ethylene mono(meth)acrylate), poly(propylene mono(meth)acrylate or borneol (meth)acrylate) Compounds such as esters. The compound having one ethylenically unsaturated group can be used alone or in combination of plural kinds.

前述具有二個以上(含二個)乙烯性不飽和基之化合物可包含但不限於乙二醇二(甲基)丙烯酸酯、二(甲基)丙烯酸二環戊烯酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、三(2-羥基乙基)異氰酸二(甲基)丙烯酸酯、三(2-羥基乙基)異氰酸三(甲基)丙烯酸酯、己內酯改質之三(2-羥基乙基)異氰酸三(甲基)丙烯酸酯、三(甲基)丙烯酸三羥甲基丙酯、環氧乙烷(簡稱EO)改質之三(甲基)丙烯酸三羥甲基丙酯、環氧丙烷改質(簡稱PO)之三(甲基)丙烯酸三羥甲基丙酯、三丙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,4-丁二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、聚酯二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇四(甲基)丙烯酸酯、己內酯改質之二季戊四醇六(甲基)丙烯酸酯、己內酯改質之二季戊四醇五(甲基)丙烯酸酯、四(甲基)丙烯酸二三羥甲基丙酯、經環氧乙烷改質之雙酚A二(甲基)丙烯酸酯、經環氧丙烷改質之雙酚A二(甲基)丙烯酸酯、經環氧乙烷改質之氫化雙酚A二(甲基)丙烯酸酯、經環氧丙烷改質之氫化雙酚A二(甲基)丙烯酸酯、經環氧乙烷改質之雙酚F二(甲基)丙烯酸酯或酚醛清漆聚縮水甘油醚(甲基)丙烯酸酯等之化合物。所述具有二個以上(含二個)乙烯性不飽和基之化合物可單獨一種使用或混合複數種使用。The aforementioned compounds having two or more (including two) ethylenically unsaturated groups may include, but are not limited to, ethylene glycol di(meth)acrylate, dicyclopentenyl di(meth)acrylate, triethylene glycol two (Meth)acrylate, tetraethylene glycol di(meth)acrylate, tris(2-hydroxyethyl)isocyanate di(meth)acrylate, tris(2-hydroxyethyl)isocyanate (Meth) acrylate, caprolactone modification three (2-hydroxyethyl) isocyanate tri(meth)acrylate, tri(meth)acrylate trimethylol propyl ester, ethylene oxide ( (Referred to as EO) modified three (meth)acrylic acid trimethylol propyl ester, propylene oxide modification (abbreviated as PO) three (meth)acrylic acid trimethylol propyl ester, tripropylene glycol di(meth)acrylic acid Esters, neopentyl glycol di(meth)acrylate, 1,4-butanediol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, polyester di(meth)acrylate ) Acrylate, polyethylene glycol di(meth)acrylate, dipentaerythritol hexa(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol tetra(meth)acrylate, caprolactone modified Dipentaerythritol hexa(meth)acrylate, dipentaerythritol penta(meth)acrylate modified by caprolactone, ditrimethylol propyl tetra(meth)acrylate, modified with ethylene oxide Bisphenol A di(meth)acrylate, bisphenol A di(meth)acrylate modified with propylene oxide, hydrogenated bisphenol A di(meth)acrylate modified with ethylene oxide, Hydrogenated bisphenol A di(meth)acrylate modified by propylene oxide, bisphenol F di(meth)acrylate modified by ethylene oxide, or novolac polyglycidyl ether (meth)acrylate, etc. The compound. The compound having two or more (including two) ethylenic unsaturated groups can be used alone or in a mixture of plural kinds.

該具有乙烯性不飽和基的化合物(B)之具體例可包含但不限於:三丙烯酸三羥甲基丙酯、經環氧乙烷改質之三丙烯酸三羥甲基丙酯、經環氧丙烷改質之三丙烯酸三羥甲基丙酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇六丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇四丙烯酸酯、己內酯改質之二季戊四醇六丙烯酸酯、四丙烯酸二三羥甲基丙酯、經環氧丙烷改質之甘油三丙烯酸酯或上述化合物之任意組合。Specific examples of the compound (B) having an ethylenically unsaturated group may include but are not limited to: trimethylol propyl triacrylate, trimethylol propyl triacrylate modified with ethylene oxide, epoxy Propane modified trimethylol propyl triacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol hexaacrylate, dipentaerythritol pentaacrylate, dipentaerythritol tetraacrylate, caprolactone modified dipentaerythritol hexa Acrylate, ditrimethylolpropyl tetraacrylate, glycerol triacrylate modified by propylene oxide, or any combination of the above compounds.

該具有乙烯性不飽和基之化合物(B)較佳可為三丙烯酸三羥甲基丙酯、二季戊四醇四丙烯酸酯、二季戊四醇六丙烯酸酯或上述化合物之任意組合。The compound (B) having an ethylenically unsaturated group may preferably be trimethylol propyl triacrylate, dipentaerythritol tetraacrylate, dipentaerythritol hexaacrylate or any combination of the above compounds.

基於該鹼可溶性樹脂(A)之使用量為100重量份,該具有乙烯性不飽和基之化合物(B)之使用量為10重量份至100重量份,較佳為15重量份至90重量份,更佳為20重量份至80重量份。Based on the usage amount of the alkali-soluble resin (A) being 100 parts by weight, the usage amount of the ethylenically unsaturated group (B) is 10 parts by weight to 100 parts by weight, preferably 15 parts by weight to 90 parts by weight , More preferably 20 parts by weight to 80 parts by weight.

本發明之光起始劑(C)包含由式(3)所示之光起始劑(C-1):

Figure 02_image015
式(3) 其中R1 、R2 、R3 、R4 、R5 、R6 、R7 及R8 彼此獨立地為氫、C1 -C20 烷基、COR16 、或
Figure 02_image017
; 或R1 及R2 、R2 及R3 、R3 及R4 、R5 及R6 、R6 及R7 或R7 及R8 彼此獨立地共同為
Figure 02_image019
; 但條件為R1 及R2 、R2 及R3 、R3 及R4 、R5 及R6 、R6 及R7 或R7 及R8 中之至少一對為
Figure 02_image019
; R9 、R10 、R11 及R12 彼此獨立地為氫、C1 -C20 烷基,該C1 -C20 烷基是未經取代或經一或多個以下基團取代:鹵素、苯基; 或R9 、R10 、R11 及R12 彼此獨立地為未經取代之苯基或經一或多個以下基團取代之苯基:C1 -C6 烷基、鹵素; X表示CO或直接鍵; R13 表示C1 -C20 烷基,其未經取代或經一或多個以下基團取代:鹵素、R17 、COOR17 、OR17 ; 或R13 表示C2 -C20 烷基,其間雜有一或多個O或CO,其中該經間雜之C2 -C20 烷基是未經取代或經一或多個鹵素取代; 或R13 表示苯基或萘基,其各為未經取代或經一或多個以下基團取代:C1 -C20 烷基、C1 -C4 鹵代烷基; R14 表示氫、C1 -C20 烷氧基或C1 -C20 烷基; R15 是C6 -C20 芳基,其各是未經取代或經一或多個以下基團取代:鹵素、C1 -C4 鹵代烷基、OR17 、間雜有一或多個O之C2 -C20 烷基;或其各經C1 -C20 烷基取代,該C1 -C20 烷基是未經取代或經一或多個以下基團取代:鹵素、COOR17 、苯基、OR17 ; 或R15 表示氫、C3 -C8 環烷基;或R15 是C1 -C20 烷基,其是未經取代或經一或多個以下基團取代:鹵素、C3 -C8 環烷基; R16 表示C6 -C20 芳基,其各是未經取代或經一或多個以下基團取代:鹵素、C1 -C4 鹵代烷基、OR17 ;或其各經一或多個C1 -C20 烷基取代,該C1 -C20 烷基是未經取代或經一或多個以下基團取代:鹵素、OR17 ; R17 表示氫、C1 -C20 烷基,其是未經取代或經一或多個以下基團取代:鹵素或間雜有一或多個O之C3 -C20 環烷基; 或R17 表示C2 -C20 烷基,其間雜有一或多個O; 或R17 表示苯基,其各是未經取代或經一或多個以下基團取代:鹵素、C1 -C12 烷基、C1 -C12 烷氧基; 但條件為在式(3)中存在至少一個
Figure 02_image017
。The photoinitiator (C) of the present invention includes the photoinitiator (C-1) represented by formula (3):
Figure 02_image015
Formula (3) wherein R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 and R 8 are independently hydrogen, C 1 -C 20 alkyl, COR 16 , or
Figure 02_image017
; Or R 1 and R 2 , R 2 and R 3 , R 3 and R 4 , R 5 and R 6 , R 6 and R 7 or R 7 and R 8 are independently of each other and collectively are
Figure 02_image019
; But the condition is that at least one of R 1 and R 2 , R 2 and R 3 , R 3 and R 4 , R 5 and R 6 , R 6 and R 7 or R 7 and R 8 is
Figure 02_image019
; R 9 , R 10 , R 11 and R 12 are independently of each other hydrogen, C 1 -C 20 alkyl, and the C 1 -C 20 alkyl is unsubstituted or substituted with one or more of the following groups: halogen , Phenyl; or R 9 , R 10 , R 11 and R 12 independently of each other are unsubstituted phenyl or phenyl substituted with one or more of the following groups: C 1 -C 6 alkyl, halogen; X represents CO or a direct bond; R 13 represents C 1 -C 20 alkyl, which is unsubstituted or substituted with one or more of the following groups: halogen, R 17 , COOR 17 , OR 17 ; or R 13 represents C 2 -C 20 alkyl group with one or more O or CO interposed therebetween, wherein the intervening C 2 -C 20 alkyl group is unsubstituted or substituted with one or more halogens; or R 13 represents phenyl or naphthyl , Each of which is unsubstituted or substituted with one or more of the following groups: C 1 -C 20 alkyl, C 1 -C 4 haloalkyl; R 14 represents hydrogen, C 1 -C 20 alkoxy or C 1 -C 20 alkyl; R 15 is C 6 -C 20 aryl, each of which is unsubstituted or substituted with one or more of the following groups: halogen, C 1 -C 4 haloalkyl, OR 17 , or A plurality of O C 2 -C 20 alkyl groups; or each of them is substituted by a C 1 -C 20 alkyl group, the C 1 -C 20 alkyl group is unsubstituted or substituted with one or more of the following groups: halogen, COOR 17 , phenyl, OR 17 ; or R 15 represents hydrogen, C 3 -C 8 cycloalkyl; or R 15 is C 1 -C 20 alkyl, which is unsubstituted or has one or more of the following groups Substitution: halogen, C 3 -C 8 cycloalkyl; R 16 represents C 6 -C 20 aryl, each of which is unsubstituted or substituted with one or more of the following groups: halogen, C 1 -C 4 haloalkyl , OR 17 ; or each is substituted with one or more C 1 -C 20 alkyl groups, the C 1 -C 20 alkyl group is unsubstituted or substituted with one or more of the following groups: halogen, OR 17 ; R 17 represents hydrogen, C 1 -C 20 alkyl, which is unsubstituted or substituted with one or more of the following groups: halogen or C 3 -C 20 cycloalkyl with one or more O interspersed; or R 17 represents C 2 -C 20 alkyl group, with one or more O interposed therebetween; or R 17 represents a phenyl group, each of which is unsubstituted or substituted with one or more of the following groups: halogen, C 1 -C 12 alkyl, C 1 -C 12 alkoxy; but the condition is that there is at least one in formula (3)
Figure 02_image017
.

式(3)所示之光起始劑(C-1)之特徵在於其苯基環與咔唑部分稠合以形成「萘基」環,亦即其在咔唑部分上包含一或多個成環(annelated)不飽和環。換言之,R1 及R2 、R2 及R3 、R3 及R4 、R5 及R6 、R6 及R7 或R7 及R8 中至少一對為

Figure 02_image019
。The photoinitiator (C-1) represented by formula (3) is characterized in that its phenyl ring is fused with the carbazole moiety to form a "naphthyl" ring, that is, it contains one or more on the carbazole moiety Annealed unsaturated ring. In other words, at least one of R 1 and R 2 , R 2 and R 3 , R 3 and R 4 , R 5 and R 6 , R 6 and R 7 or R 7 and R 8 is
Figure 02_image019
.

C1 -C20 烷基是直鏈或支鏈,其實例可為甲基、乙基、丙基、異丙基、正丁基、第二丁基、異丁基、第三丁基、戊基、己基、庚基、2,4,4-三甲基戊基、2-乙基己基、辛基、壬基、癸基、十二基、十四基、十五基、十六基、十八基及二十基。The C 1 -C 20 alkyl group is linear or branched, and examples thereof can be methyl, ethyl, propyl, isopropyl, n-butyl, second butyl, isobutyl, tertiary butyl, pentyl Base, hexyl, heptyl, 2,4,4-trimethylpentyl, 2-ethylhexyl, octyl, nonyl, decyl, dodecyl, tetradecyl, pentadecyl, hexadecyl, Eighteen base and twenty base.

C1 -C4 鹵代烷基可為如上文所定義之C1 -C4 烷基,且其經如下文所定義之鹵素取代。烷基基團可為單或多鹵化,或所有氫原子可被替換為鹵素。其可為例如Cz Hx Haly ,其中x+y=2z+1且Hal為鹵素,較佳為F。具體實例是氯甲基、三氯甲基、三氟甲基或2-溴丙基,尤其為三氟甲基或三氯甲基。The C 1 -C 4 haloalkyl group may be a C 1 -C 4 alkyl group as defined above, and it is substituted with halogen as defined below. Alkyl groups can be mono- or polyhalogenated, or all hydrogen atoms can be replaced with halogens. It can be, for example, C z H x Hal y , where x+y=2z+1 and Hal is halogen, preferably F. Specific examples are chloromethyl, trichloromethyl, trifluoromethyl or 2-bromopropyl, especially trifluoromethyl or trichloromethyl.

間雜有一或多個O之C2 -C20 烷基例如可經O間雜1至9次、1至5次、1至3次或1次或2次。兩個O原子由至少一個伸甲基、較佳至少兩個伸甲基(即伸乙基)隔開。該等烷基可為直鏈或支鏈。舉例而言,可為以下結構單元:-CH2 -CH2 -O-CH2 CH3 、-[CH2 CH2 O]y -CH3 (其中y=l至9)、-(CH2 -CH2 O)7 -CH2 CH3 、-CH2 -CH(CH3 ) -O-CH2 -CH2 CH3 、-CH2 -CH(CH3 )-O-CH2 -CH3The C 2 -C 20 alkyl group interspersed with one or more O can be interspersed with O 1 to 9 times, 1 to 5 times, 1 to 3 times, or 1 or 2 times. The two O atoms are separated by at least one methylidene group, preferably at least two methylidene groups (ie, ethylidene groups). These alkyl groups can be straight or branched. For example, it can be the following structural units: -CH 2 -CH 2 -O-CH 2 CH 3 , -[CH 2 CH 2 O] y -CH 3 (where y=1 to 9), -(CH 2- CH 2 O) 7 -CH 2 CH 3 , -CH 2 -CH(CH 3 ) -O-CH 2 -CH 2 CH 3 , -CH 2 -CH(CH 3 )-O-CH 2 -CH 3 .

C1 -C12 烷氧基是經一個O原子取代之C1 -C12 烷基。C 1 -C 12 alkoxy is substituted by O atom of a C 1 -C 12 alkyl.

C6 -C20 芳基可為例如苯基、萘基、蒽基、菲基、芘基、䓛基、并四苯基、聯伸三苯基等,尤其為苯基或萘基,較佳為苯基。萘基是1-萘基或2-萘基。The C 6 -C 20 aryl group may be, for example, phenyl, naphthyl, anthryl, phenanthryl, pyrenyl, eryl, naphthyl, triphenylene, etc., especially phenyl or naphthyl, preferably Phenyl. Naphthyl is 1-naphthyl or 2-naphthyl.

經取代之芳基(苯基、萘基、C6 -C20 芳基)可分別經1至7次、1至6次或1至4次、尤其1次、2次或3次取代。顯而易見地,此處芳基所具有的取代基的數量不能多於其芳基環上之自由位置的數量。The substituted aryl groups (phenyl, naphthyl, C 6 -C 20 aryl) can be substituted 1 to 7, 1 to 6 or 1 to 4 times, especially 1, 2 or 3 times, respectively. Obviously, the number of substituents of the aryl group here cannot be more than the number of free positions on the aryl ring.

苯基環上之取代基較佳在苯基環上之位置4中,或呈3,4-、3,4,5-、2,6-、2,4-或2,4,6-組態。The substituents on the phenyl ring are preferably in position 4 on the phenyl ring, or in the group 3,4-, 3,4,5-, 2,6-, 2,4- or 2,4,6- state.

經間雜之基團例如可為經間雜1至19次、1至15次、1至12次、1至9次、1至7次、1至5次、1至4次、1至3次或1次或2次。顯而易見地,間雜之原子數取決於擬間雜基團之C原子數。經取代之基團例如可具有1至7個、1至5個、1至4個、1至3個或1個或2個相同或不同之取代基。The group of interspersed can be, for example, interspersed 1 to 19 times, 1 to 15 times, 1 to 12 times, 1 to 9 times, 1 to 7 times, 1 to 5 times, 1 to 4 times, 1 to 3 times or 1 time or 2 times. Obviously, the number of heteroatoms depends on the number of C atoms of the pseudoheterogroup. The substituted group may have, for example, 1 to 7, 1 to 5, 1 to 4, 1 to 3, or 1 or 2 substituents which are the same or different.

經取代之基團可具有一個取代基,或多個相同或不同之取代基。所述鹵素可為氟、氯、溴及碘,尤其為氟、氯及溴,較佳為氟及氯。若R1 及R2 、R2 及R3 、R3 及R4 或R5 及R6 、R6 及R7 、R7 及R8 彼此獨立地共同為

Figure 02_image022
,則形成例如以下(Ia)至(Ii)所示之結構:
Figure 02_image024
Figure 02_image026
Figure 02_image028
(Ia) (Ib) (Ic)
Figure 02_image030
Figure 02_image032
Figure 02_image034
(Id) (Ie) (If)
Figure 02_image036
Figure 02_image038
Figure 02_image040
(Ig) (Ih) (Ii)
,其中較佳為式(Ia)、(Ib)、(Ic),更佳為式(Ia)或(Ic)、或式(Ia)、(Ic)或(Id)、尤佳為式(Ia)。The substituted group may have one substituent, or multiple substituents that are the same or different. The halogen may be fluorine, chlorine, bromine and iodine, especially fluorine, chlorine and bromine, preferably fluorine and chlorine. If R 1 and R 2 , R 2 and R 3 , R 3 and R 4 or R 5 and R 6 , R 6 and R 7 , R 7 and R 8 are independently of each other and jointly are
Figure 02_image022
, For example, the following structures (Ia) to (Ii) are formed:
Figure 02_image024
Figure 02_image026
Figure 02_image028
(Ia) (Ib) (Ic)
Figure 02_image030
Figure 02_image032
Figure 02_image034
(Id) (Ie) (If)
Figure 02_image036
Figure 02_image038
Figure 02_image040
(Ig) (Ih) (Ii)
, Wherein the formula (Ia), (Ib), (Ic) is preferred, the formula (Ia) or (Ic), or the formula (Ia), (Ic) or (Id) is more preferred, and the formula (Ia) is more preferred. ).

於一實例中,R15 表示氫、苯基、萘基,其各未經取代或經C1 -C8 烷基、OR17 取代;或R15 表示C1 -C20 烷基;或R15 表示C2 -C20 烷基,其間雜有一或多個O。In an example, R 15 represents hydrogen, phenyl, or naphthyl, each of which is unsubstituted or substituted with C 1 -C 8 alkyl or OR 17 ; or R 15 represents C 1 -C 20 alkyl; or R 15 Represents a C 2 -C 20 alkyl group with one or more O interposed therebetween.

於一實例中,R16 表示C6 -C20 芳基(較佳為苯基或萘基,更佳為苯基),其各未經取代或經一或多個以下基團取代:鹵素、C1 -C4 鹵代烷基、OR17 ;或其各經一或多個C1 -C20 烷基取代,該C1 -C20 烷基未經取代或經一或多個以下基團取代:鹵素、OR17 。或者,R16 較佳為苯基或萘基,更佳為苯基或咔唑,其各未經取代或經一或多個以下基團取代:鹵素、C1 -C4 鹵代烷基、OR17 或C1 -C20 烷基。或者,R16 較佳為苯基或萘基,尤其為苯基,其各未經取代或經一或多個以下基團取代:鹵素、OR17 或C1 -C20 烷基。或者,R16 更佳為苯基,其未經取代或經一或多個以下基團取代:OR17 或C1 -C20 烷基。R16 尤佳為苯基,其經一或多個C1 -C20 烷基取代。In an example, R 16 represents a C 6 -C 20 aryl group (preferably phenyl or naphthyl, more preferably phenyl), each of which is unsubstituted or substituted with one or more of the following groups: halogen, C 1 -C 4 haloalkyl, OR 17 ; or each of them is substituted with one or more C 1 -C 20 alkyl groups, the C 1 -C 20 alkyl group is unsubstituted or substituted with one or more of the following groups: Halogen, OR 17 . Alternatively, R 16 is preferably phenyl or naphthyl, more preferably phenyl or carbazole, each of which is unsubstituted or substituted with one or more of the following groups: halogen, C 1 -C 4 haloalkyl, OR 17 Or C 1 -C 20 alkyl. Alternatively, R 16 is preferably phenyl or naphthyl, especially phenyl, each of which is unsubstituted or substituted with one or more of the following groups: halogen, OR 17 or C 1 -C 20 alkyl. Alternatively, R 16 is more preferably a phenyl group, which is unsubstituted or substituted with one or more of the following groups: OR 17 or C 1 -C 20 alkyl. R 16 is particularly preferably phenyl, which is substituted with one or more C 1 -C 20 alkyl groups.

於一實例中,R17 表示氫、C1 -C20 烷基,其未經取代或經一或多個以下基團取代:鹵素或間雜有一或多個O之C3 -C20 環烷基;或R17 表示苯基,其各未經取代或經一或多個以下基團取代:鹵素、C1 -C12 烷基、C1 -C12 烷氧基。In one example, R 17 represents hydrogen, C 1 -C 20 alkyl, which is unsubstituted or substituted with one or more of the following groups: halogen or C 3 -C 20 cycloalkyl with one or more O interspersed Or R 17 represents phenyl, each of which is unsubstituted or substituted with one or more of the following groups: halogen, C 1 -C 12 alkyl, C 1 -C 12 alkoxy.

式(3)所示之光起始劑(C-1)之實例包括下列由式(3-1)至式(3-22)所表示的化合物:

Figure 02_image042
Figure 02_image044
(3-1) (3-2)
Figure 02_image046
Figure 02_image048
(3-3) (3-4)
Figure 02_image050
Figure 02_image052
(3-5) (3-6)
Figure 02_image054
Figure 02_image056
(3-7) (3-8)
Figure 02_image058
Figure 02_image060
(3-9) (3-10)
Figure 02_image062
Figure 02_image064
(3-11) (3-12)
Figure 02_image066
Figure 02_image068
(3-13) (3-14)
Figure 02_image070
Figure 02_image072
(3-15) (3-16)
Figure 02_image074
Figure 02_image076
(3-17) (3-18)
Figure 02_image078
Figure 02_image080
(3-19) (3-20)
Figure 02_image082
Figure 02_image084
(3-21) (3-22) Examples of the photoinitiator (C-1) represented by formula (3) include the following compounds represented by formula (3-1) to formula (3-22):
Figure 02_image042
Figure 02_image044
(3-1) (3-2)
Figure 02_image046
Figure 02_image048
(3-3) (3-4)
Figure 02_image050
Figure 02_image052
(3-5) (3-6)
Figure 02_image054
Figure 02_image056
(3-7) (3-8)
Figure 02_image058
Figure 02_image060
(3-9) (3-10)
Figure 02_image062
Figure 02_image064
(3-11) (3-12)
Figure 02_image066
Figure 02_image068
(3-13) (3-14)
Figure 02_image070
Figure 02_image072
(3-15) (3-16)
Figure 02_image074
Figure 02_image076
(3-17) (3-18)
Figure 02_image078
Figure 02_image080
(3-19) (3-20)
Figure 02_image082
Figure 02_image084
(3-21) (3-22)

基於該光起始劑(C)之總使用量為100重量份,該式(3)所示之光起始劑(C-1)之使用量為5至50重量份,較佳為7重量份至45重量份,且更佳為10重量份至40重量份。當使用該式(3)所示之光起始劑(C-1)時,可進一步改善本發明之黑色感光性樹脂組成物所製得之黑色圖案的錐度角。Based on the total usage amount of the photoinitiator (C) being 100 parts by weight, the usage amount of the photoinitiator (C-1) represented by the formula (3) is 5 to 50 parts by weight, preferably 7 parts by weight Parts to 45 parts by weight, and more preferably 10 parts to 40 parts by weight. When the photoinitiator (C-1) represented by the formula (3) is used, the taper angle of the black pattern produced by the black photosensitive resin composition of the present invention can be further improved.

本發明之黑色感光性樹脂組成物另可選擇性添加其他光起始劑(C-2)。In the black photosensitive resin composition of the present invention, another photoinitiator (C-2) can be optionally added.

該其他光起始劑(C-2)的具體例包括其他氧-醯基肟類化合物(O-acyloxime)或非氧-醯基肟類光起始劑。Specific examples of the other photoinitiator (C-2) include other oxy-acyloxime compounds (O-acyloxime) or non-oxy-acyloxime photoinitiators.

該其它氧-醯基肟類化合物的具體例包括具體例包括1-[4-(苯基硫代)苯基]-丙烷-3-環戊烷-1,2-二酮2-(O-苯醯基肟)、1-[4-(苯基硫代)苯基]-庚烷-1,2-二酮2-(O-苯醯基肟)、1-[4-(苯基硫代)苯基]-辛烷-1,2-二酮-2-(O-苯醯基肟),或上述化合物的組合。1-[4-(苯基硫代)苯基]-辛烷-1,2-二酮-2-(O-苯醯基肟)可為由汽巴精化(Ciba Specialty Chemicals)有限公司製造,型號為IRGACURE OXE-01的商品。Specific examples of the other oxy-acetoxime compounds include specific examples including 1-[4-(phenylthio)phenyl]-propane-3-cyclopentane-1,2-dione 2-(O- Phenanyl oxime), 1-[4-(phenylthio)phenyl]-heptane-1,2-dione 2-(O-phenanyl oxime), 1-[4-(phenylsulfide) (O) phenyl]-octane-1,2-dione-2-(O-phenacyl oxime), or a combination of the above compounds. 1-[4-(Phenylthio)phenyl]-octane-1,2-dione-2-(O-phenyloxime) can be manufactured by Ciba Specialty Chemicals Co., Ltd. , The product model is IRGACURE OXE-01.

此外,該其他氧-醯基肟類化合物的具體例包括1-[4-(苯醯基)苯基]-庚烷-1,2-二酮-2-(O-苯醯基肟)、1-[9-乙基-6-(2-甲基苯醯基)-9H-咔唑-3-取代基]-乙烷酮-1-(O-乙醯基肟)、1-[9-乙基-6-(3-甲基苯醯基)-9H-咔唑-3-取代基]-乙烷酮-1-(O-乙醯基肟)、1-[9-乙基-6-苯醯基-9H-咔唑-3-取代基]-乙烷酮-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-4-四氫吡喃基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-5-四氫呋喃基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-5-四氫吡喃基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃基甲氧基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-4-四氫吡喃基甲氧基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-5-四氫呋喃基甲氧基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-5-四氫吡喃基甲氧基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧雜戊環基)苯醯基}-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧雜戊環基)甲氧基苯醯基}-9H-咔唑-3-取代基]-1-(O-乙醯基肟),或上述化合物的組合。1-[9-乙基-6-(2-甲基苯醯基)-9H-咔唑-3-取代基]-乙烷酮-1-(O-乙醯基肟)可為由汽巴精化有限公司製造,型號為IRGACURE OXE-02的商品。In addition, specific examples of the other oxy-phenyloxime compounds include 1-[4-(phenanyl)phenyl]-heptane-1,2-dione-2-(O-phenanyl oxime), 1-[9-Ethyl-6-(2-Methylphenanyl)-9H-carbazole-3-substituent]-Ethanone-1-(O-Acetyloxime), 1-[9 -Ethyl-6-(3-Methylphenanyl)-9H-carbazole-3-substituent]-Ethanone-1-(O-Acetyloxime), 1-[9-Ethyl- 6-Phenyl-9H-carbazole-3-substituent]-ethane ketone-1-(O-acetoxime), ethane ketone-1-[9-ethyl-6-(2-methyl -4-tetrahydrofuranylphenyl)-9H-carbazole-3-substituent)-1-(O-acetoxime), ethaneketone-1-[9-ethyl-6-(2- Methyl-4-tetrahydropyranylphenyl)-9H-carbazole-3-substituent)-1-(O-acetoxyoxime), ethyl ketone-1-[9-ethyl-6 -(2-Methyl-5-tetrahydrofuranylphenyl)-9H-carbazole-3-substituent)-1-(O-acetoxyoxime), ethaneketone-1-[9-ethyl- 6-(2-Methyl-5-tetrahydropyranylphenanyl)-9H-carbazole-3-substituent)-1-(O-acetyloxime), ethaneketone-1-[9 -Ethyl-6-(2-methyl-4-tetrahydrofuranylmethoxyphenanyl)-9H-carbazole-3-substituent)-1-(O-acetyloxime), ethane ketone- 1-[9-Ethyl-6-(2-methyl-4-tetrahydropyranylmethoxyphenanyl)-9H-carbazole-3-substituent]-1-(O-acetinyl Oxime), ethane ketone-1-[9-ethyl-6-(2-methyl-5-tetrahydrofuranylmethoxyphenanyl)-9H-carbazole-3-substituent)-1-(O -Acetyl oxime), ethane ketone-1-[9-ethyl-6-(2-methyl-5-tetrahydropyranylmethoxyphenacyl)-9H-carbazole-3-substituted Yl]-1-(O-acetyl oxime), ethane ketone-1-[9-ethyl-6-{2-methyl-4-(2,2-dimethyl-1,3-di Oxolane) phenanyl}-9H-carbazole-3-substituent]-1-(O-acetoxyoxime), ethaneketone-1-[9-ethyl-6-{2- Methyl-4-(2,2-dimethyl-1,3-dioxolanyl)methoxyphenacyl)-9H-carbazole-3-substituent)-1-(O-ethyl Oxime), or a combination of the above compounds. 1-[9-Ethyl-6-(2-Methylphenanyl)-9H-carbazole-3-substituent]-Ethanone-1-(O-Acetyloxime) can be made from Ciba A product manufactured by Jinghua Co., Ltd., with model number IRGACURE OXE-02.

該其他氧-醯基肟類化合物可單獨使用或組合多種來使用。The other oxy-oxime compounds can be used alone or in combination of multiple types.

該非氧-醯基肟類光起始劑的具體例包括三氮雜苯類化合物、苯乙烷酮類化合物、二咪唑類化合物、二苯甲酮類化合物、α-二酮類化合物、醇酮類化合物、醇酮醚類化合物、醯膦氧化物類化合物、醌類化合物、含鹵素類化合物、過氧化物,或上述化合物的組合。Specific examples of the non-oxygen-oxime photoinitiator include triazabenzene compounds, acetophenone compounds, diimidazole compounds, benzophenone compounds, α-diketone compounds, alcohol ketones Compounds, alcohol ketone ether compounds, phosphine oxide compounds, quinone compounds, halogen-containing compounds, peroxides, or a combination of the foregoing compounds.

該三氮雜苯類化合物的具體例包括乙烯基-鹵代甲基-s-三氮雜苯化合物、2-(萘并-1-取代基)-4,6-二(鹵代甲基)-s-三氮雜苯化合物、4-(對-胺基苯基)-2,6-二(鹵代甲基)-s-三氮雜苯化合物,或上述化合物的組合。Specific examples of the triazabenzene compound include vinyl-halomethyl-s-triazabenzene compound, 2-(naphtho-1-substituent)-4,6-bis(halomethyl) -s-triazabenzene compound, 4-(p-aminophenyl)-2,6-bis(halomethyl)-s-triazabenzene compound, or a combination of the foregoing compounds.

該乙烯基-鹵代甲基-s-三氮雜苯化合物的具體例包括2,4-二(三氯甲基)-6-對-甲氧基苯乙烯基-s-三氮雜苯、2,4-二(三氯甲基)-3-(1-對-二甲基胺基苯基-1,3-丁二烯基)-s-三氮雜苯、2-三氯甲基-3-胺基-6-對-甲氧基苯乙烯基-s-三氮雜苯,或上述化合物的組合。Specific examples of the vinyl-halomethyl-s-triazabenzene compound include 2,4-bis(trichloromethyl)-6-p-methoxystyryl-s-triazabenzene, 2,4-Bis(trichloromethyl)-3-(1-p-dimethylaminophenyl-1,3-butadienyl)-s-triazabenzene, 2-trichloromethyl -3-amino-6-p-methoxystyryl-s-triazabenzene, or a combination of the above compounds.

該2-(萘并-1-取代基)-4,6-二(鹵代甲基)-s-三氮雜苯化合物的具體例包括2-(萘并-1-取代基)-4,6-二(三氯甲基)-s-三氮雜苯、2-(4-甲氧基-萘并-1-取代基)-4,6-二(三氯甲基)-s-三氮雜苯、2-(4-乙氧基-萘并-1-取代基)-4,6-二(三氯甲基)-s-三氮雜苯、2-(4-丁氧基-萘并-1-取代基)-4,6-二(三氯甲基)-s-三氮雜苯、2-[4-(2-甲氧基乙基)-萘并-1-取代基]-4,6-二(三氯甲基)-s-三氮雜苯、2-[4-(2-乙氧基乙基)-萘并-1-取代基]-4,6-二(三氯甲基)-s-三氮雜苯、2-[4-(2-丁氧基乙基)-萘并-1-取代基]-4,6-二(三氯甲基)-s-三氮雜苯、2-(2-甲氧基-萘并-1-取代基)-4,6-二(三氯甲基)-s-三氮雜苯、2-(6-甲氧基-5-甲基-萘并-2-取代基)-4,6-二(三氯甲基)-s-三氮雜苯、2-(6-甲氧基-萘并-2-取代基)-4,6-二(三氯甲基)-s-三氮雜苯、2-(5-甲氧基-萘并-1-取代基)-4,6-二(三氯甲基)-s-三氮雜苯、2-(4,7-二甲氧基-萘并-1-取代基)-4,6-二(三氯甲基)-s-三氮雜苯、2-(6-乙氧基-萘并-2-取代基)-4,6-二(三氯甲基)-s-三氮雜苯、2-(4,5-二甲氧基-萘并-1-取代基)-4,6-二(三氯甲基)-s-三氮雜苯,或上述化合物的組合。Specific examples of the 2-(naphtho-1-substituent)-4,6-bis(halomethyl)-s-triazabenzene compound include 2-(naphtho-1-substituent)-4, 6-Bis(trichloromethyl)-s-triazabenzene, 2-(4-methoxy-naphtho-1-substituent)-4,6-bis(trichloromethyl)-s-tri Azabenzene, 2-(4-ethoxy-naphtho-1-substituent)-4,6-bis(trichloromethyl)-s-triazabenzene, 2-(4-butoxy- Naphtho-1-substituent)-4,6-bis(trichloromethyl)-s-triazabenzene, 2-[4-(2-methoxyethyl)-naphtho-1-substituent ]-4,6-bis(trichloromethyl)-s-triazabenzene, 2-[4-(2-ethoxyethyl)-naphtho-1-substituent]-4,6-di (Trichloromethyl)-s-Triazine, 2-[4-(2-Butoxyethyl)-naphtho-1-substituent)-4,6-bis(trichloromethyl)- s-Triazabenzene, 2-(2-methoxy-naphtho-1-substituent)-4,6-bis(trichloromethyl)-s-triazabenzene, 2-(6-methyl Oxy-5-methyl-naphtho-2-substituent)-4,6-bis(trichloromethyl)-s-triazabenzene, 2-(6-methoxy-naphtho-2- Substituent)-4,6-bis(trichloromethyl)-s-triazabenzene, 2-(5-methoxy-naphtho-1-substituent)-4,6-bis(trichloromethyl) Group)-s-triazabenzene, 2-(4,7-dimethoxy-naphtho-1-substituent)-4,6-bis(trichloromethyl)-s-triazabenzene, 2-(6-Ethoxy-naphtho-2-substituent)-4,6-bis(trichloromethyl)-s-triazabenzene, 2-(4,5-dimethoxy-naphthalene -1-Substituent)-4,6-bis(trichloromethyl)-s-triazabenzene, or a combination of the above compounds.

該4-(對-胺基苯基)-2,6-二(鹵代甲基)-s-三氮雜苯化合物的具體例包括4-[對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-甲基-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-甲基-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-(對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-[對-N,N-二(苯基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-(對-N-氯乙基羰基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-[對-N-(對-甲氧基苯基)羰基胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-溴-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-氯-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-氟-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-溴-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-氯-對-N,N-二(乙氧基羰基甲基)胺基苯基-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-氟-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-溴-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-氯-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-氟-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-溴-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-氯-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-氟-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-溴-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-氯-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-氟-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-溴-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-氯-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-氟-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-溴-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-氯-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-氟-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-溴-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-氯-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-氟-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、2,4-二(三氯甲基)-6-[3-溴-4-[N,N-雙(乙氧基羰基甲基)胺基]苯基]-1,3,5-三氮雜苯,或上述化合物的組合。三氮雜苯類化合物可單獨使用或組合多種來使用。Specific examples of the 4-(p-aminophenyl)-2,6-bis(halomethyl)-s-triazabenzene compound include 4-[p-N,N-bis(ethoxycarbonyl Methyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-methyl-p-N,N-bis(ethoxycarbonylmethyl) )Aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[p-N,N-bis(chloroethyl)aminophenyl]-2,6 -Bis(trichloromethyl)-s-triazabenzene, 4-[o-methyl-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis(trichloro Methyl)-s-triazine, 4-(p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazine, 4-(p- -N-ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[p-N,N-bis(phenyl)amino Phenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(p-N-chloroethylcarbonylaminophenyl)-2,6-bis(trichloromethyl) )-s-Triazabenzene, 4-[p-N-(p-methoxyphenyl)carbonylaminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene , 4-[m-N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m-bromo -P-N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m-chloro-p- N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m-fluoro-p-N,N -Bis(ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-bromo-p-N,N-bis( Ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-chloro-p-N,N-bis(ethoxy) Carbonylmethyl)aminophenyl-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-fluoro-p-N,N-bis(ethoxycarbonylmethyl) Aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-bromo-p-N,N-bis(chloroethyl)aminophenyl]- 2,6-Bis(trichloromethyl)-s-triazabenzene, 4-[o-chloro-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis( Trichloromethyl)-s-triazabenzene, 4-[o-fluoro-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis(trichloromethyl)- s-Triazabenzene, 4-[m-bromo-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene , 4-[m-chloro-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m- Fluoro-p-N,N-bis(chloroethyl)aminophenyl)-2,6-bis(trichloromethyl)-s- Triazabenzene, 4-(m-bromo-p-N-ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-( M-chloro-p-N-ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(m-fluoro-p-N- Ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(o-bromo-p-N-ethoxycarbonylmethylamino) Phenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(o-chloro-p-N-ethoxycarbonylmethylaminophenyl)-2,6- Bis(trichloromethyl)-s-triazabenzene, 4-(o-fluoro-p-N-ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)- s-Triazabenzene, 4-(m-bromo-p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(m -Chloro-p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(m-fluoro-p-N-chloroethylamine Phenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(o-bromo-p-N-chloroethylaminophenyl)-2,6-bis( Trichloromethyl)-s-triazabenzene, 4-(o-chloro-p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene Benzene, 4-(o-fluoro-p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 2,4-bis(trichloromethyl) Yl)-6-[3-bromo-4-[N,N-bis(ethoxycarbonylmethyl)amino]phenyl]-1,3,5-triazabenzene, or a combination of the above compounds. The triazine compound can be used alone or in combination of multiple types.

該三氮雜苯類化合物較佳為包括4-[間-溴-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、2,4-二(三氯甲基)-6-對-甲氧基苯乙烯基-s-三氮雜苯,或上述化合物的組合。The triazine compound preferably includes 4-[m-bromo-p-N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl) -s-triazabenzene, 2,4-bis(trichloromethyl)-6-p-methoxystyryl-s-triazabenzene, or a combination of the foregoing compounds.

該苯乙烷酮類化合物的具體例包括對二甲胺苯乙烷酮、α,α’-二甲氧基氧化偶氮苯乙烷酮、2,2’-二甲基-2-苯基苯乙烷酮、對-甲氧基苯乙烷酮、2-甲基-1-(4-甲基硫代苯基)-2-嗎啉代-1-丙酮、2-苄基-2-N,N-二甲胺-1-(4-嗎啉代苯基)-1-丁酮,或上述化合物的組合。Specific examples of the acetophenone compound include p-dimethylamine acetophenone, α,α'-dimethoxyazoacetophenone, 2,2'-dimethyl-2-phenyl Acetophenone, p-methoxyacetophenone, 2-methyl-1-(4-methylthiophenyl)-2-morpholino-1-propanone, 2-benzyl-2- N,N-dimethylamine-1-(4-morpholinophenyl)-1-butanone, or a combination of the above compounds.

該苯乙烷酮類化合物可單獨使用或組合多種來使用。The acetophenone compound can be used alone or in combination of multiple types.

該2-甲基-1-(4-甲基硫代苯基)-2-嗎啉代-1-丙酮可為由汽巴精化有限公司製造,型號為IRGACURE 907的商品。2-苄基-2-N,N-二甲胺-1-(4-嗎啉代苯基)-1-丁酮可為由汽巴精化有限公司製造,型號為IRGACURE 369的商品。The 2-methyl-1-(4-methylthiophenyl)-2-morpholino-1-propanone can be manufactured by Ciba Fine Chemicals Co., Ltd. with a model number of IRGACURE 907. 2-Benzyl-2-N,N-dimethylamine-1-(4-morpholinophenyl)-1-butanone can be manufactured by Ciba Fine Chemicals Co., Ltd., and the model is IRGACURE 369.

該苯乙烷酮類化合物較佳為包括2-甲基-1-(4-甲基硫代苯基)-2-嗎啉代-1-丙酮、2-苄基-2-N,N-二甲胺-1-(4-嗎啉代苯基)-1-丁酮,或上述化合物的組合。The acetophenone compound preferably includes 2-methyl-1-(4-methylthiophenyl)-2-morpholino-1-propanone, 2-benzyl-2-N,N- Dimethylamine-1-(4-morpholinophenyl)-1-butanone, or a combination of the above compounds.

該二咪唑類化合物的具體例包括2,2’-雙(鄰-氯苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(鄰-氟苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(鄰-甲基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(鄰-甲氧基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(鄰-乙基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(對-甲氧基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(2,2’,4,4’-四甲氧基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(2,4-二氯苯基)-4,4’,5,5’-四苯基二咪唑,或上述化合物的組合。Specific examples of the diimidazole compounds include 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(o-fluorobenzene) Group)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(o-methylphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(o-methoxyphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(o-ethylphenyl)-4,4 ',5,5'-tetraphenyldiimidazole, 2,2'-bis(p-methoxyphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'- Bis(2,2',4,4'-tetramethoxyphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(2-chlorophenyl)- 4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenyldiimidazole, or Combinations of the above compounds.

該二咪唑類化合物可單獨使用或組合多種來使用。The diimidazole compound can be used alone or in combination of multiple types.

該二咪唑類化合物較佳為2,2’-雙(2,4-二氯苯基)-4,4’,5,5’-四苯基二咪唑。The diimidazole compound is preferably 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenyldiimidazole.

該二苯甲酮類化合物的具體例包括噻噸酮、2,4-二乙基噻噸酮、噻噸酮-4-碸、二苯甲酮、4,4’-雙(二甲胺)二苯甲酮、4,4’-雙(二乙胺)二苯甲酮,或上述化合物的組合。二苯甲酮類化合物可單獨或混合使用。二苯甲酮類化合物較佳為4,4’-雙(二乙胺)二苯甲酮。Specific examples of the benzophenone compound include thioxanthone, 2,4-diethylthioxanthone, thioxanthone-4-sulfur, benzophenone, 4,4'-bis(dimethylamine) Benzophenone, 4,4'-bis(diethylamine)benzophenone, or a combination of the above compounds. Benzophenone compounds can be used alone or in combination. The benzophenone compound is preferably 4,4'-bis(diethylamine)benzophenone.

該α-二酮類化合物的具體例包括苯偶醯、雙乙醯,或上述化合物的組合。α-二酮類化合物可單獨使用或組合多種來使用。Specific examples of the α-diketone compound include benzil, diacetyl, or a combination of the foregoing compounds. The α-diketone compound can be used alone or in combination of multiple types.

該酮醇類化合物的具體例包括二苯乙醇酮。酮醇類化合物可單獨使用或組合多種來使用。Specific examples of the ketone alcohol compound include benzophenone. The ketone alcohol compound can be used alone or in combination of multiple types.

該酮醇醚類化合物的具體例包括二苯乙醇酮甲醚、二苯乙醇酮乙醚、二苯乙醇酮異丙醚,或上述化合物的組合。酮醇醚類化合物可單獨使用或組合多種來使用。Specific examples of the ketol ether compound include benzophenone methyl ether, benzophenone ethyl ether, benzophenone isopropyl ether, or a combination of the foregoing compounds. The ketol ether compound can be used alone or in combination of multiple types.

該醯膦氧化物類化合物的具體例包括2,4,6-三甲基苯醯基二苯基膦氧化物、雙(2,6-二甲氧基苯醯)-2,4,4-三甲基苯基膦氧化物,或上述化合物的組合。醯膦氧化物類化合物可單獨使用或組合多種來使用。Specific examples of the phosphine oxide compound include 2,4,6-trimethylphenydiphenylphosphine oxide, bis(2,6-dimethoxyphenylate)-2,4,4- Trimethylphenylphosphine oxide, or a combination of the above compounds. Phosphine oxide compounds can be used alone or in combination of multiple types.

該醌類化合物的具體例包括蒽醌、1,4-萘醌,或上述化合物的組合。醌類化合物可單獨使用或組合多種來使用。Specific examples of the quinone compound include anthraquinone, 1,4-naphthoquinone, or a combination of the foregoing compounds. The quinone compound can be used alone or in combination of multiple types.

該含鹵素類化合物的具體例包括苯醯甲基氯、三溴甲基苯碸、三(三氯甲基)-s-三氮雜苯,或上述化合物的組合。含鹵素類化合物可單獨使用或組合多種來使用。Specific examples of the halogen-containing compound include phenacyl chloride, tribromomethyl benzene, tris(trichloromethyl)-s-triazabenzene, or a combination of the foregoing compounds. The halogen-containing compounds can be used alone or in combination of multiple types.

該過氧化物的具體例包括二-第三丁基過氧化物等。過氧化物可單獨使用或組合多種來使用。Specific examples of this peroxide include di-tertiary butyl peroxide and the like. Peroxide can be used individually or in combination of multiple types.

基於該鹼可溶性樹脂(A)之使用量為100重量份,該光起始劑(C)之使用量為5至80重量份,較佳為7重量份至75重量份,且更佳為10重量份至70重量份。Based on the usage amount of the alkali-soluble resin (A) being 100 parts by weight, the usage amount of the photoinitiator (C) is 5 to 80 parts by weight, preferably 7 to 75 parts by weight, and more preferably 10 Parts by weight to 70 parts by weight.

本發明之溶劑(D)包含式(2)所示之第一溶劑(D-1):

Figure 02_image003
式(2) 式(2)中,D1 為具直鏈或支鏈之C1 -C8 伸烷基,D2 為具直鏈或支鏈之C1 -C8 烷基;a為2至4的整數,且複數個D1 可相同或不同。The solvent (D) of the present invention includes the first solvent (D-1) represented by formula (2):
Figure 02_image003
Formula (2) In the formula (2), D 1 is a linear or branched C 1 -C 8 alkylene; D 2 is a linear or branched C 1 -C 8 alkyl; a is 2 An integer from to 4, and plural D 1 may be the same or different.

第一溶劑(D-1)之實例包含但不限於二乙二醇甲醚乙酸酯、二乙二醇乙醚乙酸酯、二乙二醇丙醚乙酸酯、二乙二醇正丁醚乙酸酯、二乙二醇叔丁醚乙酸酯、二乙二醇正戊醚乙酸酯、二乙二醇異戊醚乙酸酯、二乙二醇正己醚乙酸酯、二乙二醇正庚醚乙酸酯、二乙二醇正辛醚乙酸酯、二乙二醇-1,1,3,3-四甲基丁醚乙酸酯、二丙二醇甲醚乙酸酯、二-1,2-丙二醇叔丁醚乙酸酯、二-1,3-丁二醇乙醚乙酸酯、二-2-甲基-1,3-丙二醇乙醚乙酸酯、二新戊二醇乙醚乙酸酯、二-2,4-己二醇乙醚乙酸酯、二-1,7-庚二醇乙醚乙酸酯、二-1,2-辛二醇乙醚乙酸酯、二-2,5-二甲基-2,5-己二醇乙醚乙酸酯、三乙二醇乙醚乙酸酯、四乙二醇乙醚乙酸酯、四-1,7-辛二醇正辛醚乙酸酯、乙二醇丙二醇正丁二醇新戊二醇叔丁醚乙酸酯、二乙二醇二丙二醇正己醚乙酸酯、二-3-甲基-1,4-戊二醇異戊醚乙酸酯等。Examples of the first solvent (D-1) include, but are not limited to, diethylene glycol methyl ether acetate, diethylene glycol ethyl ether acetate, diethylene glycol propyl ether acetate, diethylene glycol n-butyl ether ethyl Ester, diethylene glycol tert-butyl ether acetate, diethylene glycol n-pentyl ether acetate, diethylene glycol isoamyl ether acetate, diethylene glycol n-hexyl ether acetate, diethylene glycol n-heptane Ether acetate, diethylene glycol n-octyl ether acetate, diethylene glycol-1,1,3,3-tetramethyl butyl ether acetate, dipropylene glycol methyl ether acetate, di-1,2 -Propylene glycol tert-butyl ether acetate, di-1,3-butanediol ethyl ether acetate, di-2-methyl-1,3-propanediol ethyl ether acetate, dineopentyl glycol ethyl ether acetate, Di-2,4-hexanediol ethyl ether acetate, di-1,7-heptanediol ethyl ether acetate, di-1,2-octanediol ethyl ether acetate, di-2,5-dimethyl Base-2,5-hexanediol ethyl ether acetate, triethylene glycol ethyl ether acetate, tetraethylene glycol ethyl ether acetate, tetra-1,7-octanediol n-octyl ether acetate, ethylene glycol Propylene glycol n-butanediol neopentyl glycol tert-butyl ether acetate, diethylene glycol dipropylene glycol n-hexyl ether acetate, bis-3-methyl-1,4-pentanediol isoamyl ether acetate, etc.

基於該鹼可溶性樹脂(A)之總使用量為100重量份,該第一溶劑(D-1)之使用量為150至1500重量份,較佳為200重量份至1400重量份,且更佳為250重量份至1300重量份。當未使用該第一溶劑(D-1)時,本發明之黑色感光性樹脂組成物所製得之黑色圖案具有乾燥性不佳之問題。Based on the total usage amount of the alkali-soluble resin (A) being 100 parts by weight, the usage amount of the first solvent (D-1) is 150 to 1500 parts by weight, preferably 200 parts by weight to 1400 parts by weight, and more preferably It is 250 parts by weight to 1300 parts by weight. When the first solvent (D-1) is not used, the black pattern produced by the black photosensitive resin composition of the present invention has a problem of poor drying properties.

本發明之溶劑(D)另可包含式(4)所示之第二溶劑(D-2):

Figure 02_image087
式(4) 其中,D3 為具直鏈或支鏈的C1 -C3 烷基,D4 為具直鏈或支鏈的C1 -C4 烷基。The solvent (D) of the present invention may further include a second solvent (D-2) represented by formula (4):
Figure 02_image087
Formula (4) wherein D 3 is a linear or branched C 1 -C 3 alkyl group, and D 4 is a linear or branched C 1 -C 4 alkyl group.

第二溶劑(D-2)之實例包含但不限於乙酸甲酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、乙酸異丁酯、乙酸仲丁酯、乙酸叔丁酯、丙酸甲酯、丙酸乙酯、丙酸正丙酯、丙酸異丙酯、丙酸正丁酯、丙酸異丁酯、丙酸仲丁酯、丙酸叔丁酯、正丁酸甲酯、正丁酸乙酯、正丁酸正丙酯、正丁酸異丙酯、正丁酸正丁酯、正丁酸異丁酯、正丁酸仲丁酯、正丁酸叔丁酯、異丁酸甲酯、異丁酸乙酯、異丁酸正丙酯、異丁酸異丙酯、異丁酸正丁酯、異丁酸異丁酯、異丁酸仲丁酯、異丁酸叔丁酯、2-甲基丙酸甲酯、2-甲基丙酸乙酯、2-甲基丙酸正丙酯、2-甲基丙酸異丙酯、2-甲基丙酸正丁酯、2-甲基丙酸異丁酯、2-甲基丙酸仲丁酯、2-甲基丙酸叔丁酯等。Examples of the second solvent (D-2) include, but are not limited to, methyl acetate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, sec-butyl acetate, tert-butyl acetate Ester, methyl propionate, ethyl propionate, n-propyl propionate, isopropyl propionate, n-butyl propionate, isobutyl propionate, sec-butyl propionate, tert-butyl propionate, n-butyl Methyl acid, ethyl n-butyrate, n-propyl n-butyrate, isopropyl n-butyrate, n-butyl n-butyrate, isobutyl n-butyrate, sec-butyl n-butyrate, tert-butyl n-butyrate Ester, methyl isobutyrate, ethyl isobutyrate, n-propyl isobutyrate, isopropyl isobutyrate, n-butyl isobutyrate, isobutyl isobutyrate, sec-butyl isobutyrate, isobutyrate Tert-butyl butyrate, methyl 2-methylpropionate, ethyl 2-methylpropionate, n-propyl 2-methylpropionate, isopropyl 2-methylpropionate, 2-methylpropionic acid N-butyl ester, isobutyl 2-methylpropionate, sec-butyl 2-methylpropionate, tert-butyl 2-methylpropionate, etc.

基於該鹼可溶性樹脂(A)之總使用量為100重量份,該第二溶劑(D-2)之使用量為100至1300重量份,較佳為150重量份至1200重量份,且更佳為200重量份至1100重量份。當使用該第二溶劑(D-2)時,可進一步改善本發明之黑色感光性樹脂組成物所製得之黑色圖案之乾燥性。Based on the total usage amount of the alkali-soluble resin (A) being 100 parts by weight, the usage amount of the second solvent (D-2) is 100 to 1300 parts by weight, preferably 150 parts by weight to 1200 parts by weight, and more preferably It is 200 parts by weight to 1100 parts by weight. When the second solvent (D-2) is used, the dryness of the black pattern produced from the black photosensitive resin composition of the present invention can be further improved.

當該第一溶劑(D-1)及該第二溶劑(D-2)之使用比例(其定義為第一溶劑(D-1)之使用量除以第二溶劑(D-2)之使用量)為0.5至3時,較佳為0.8至2.5時,更佳為1.0至2.0時,可進一步改善本發明之黑色感光性樹脂組成物所製得之黑色圖案之乾燥性。When the usage ratio of the first solvent (D-1) and the second solvent (D-2) (which is defined as the usage of the first solvent (D-1) divided by the usage of the second solvent (D-2) When the amount) is 0.5 to 3, preferably 0.8 to 2.5, and more preferably 1.0 to 2.0, the dryness of the black pattern produced by the black photosensitive resin composition of the present invention can be further improved.

本發明之黑色感光性樹脂組成物另可選擇性添加其他溶劑(D-3)。In the black photosensitive resin composition of the present invention, other solvents (D-3) can be optionally added.

其他溶劑(D-3) 之實例包含但不限於乙二醇單甲醚、乙二醇單乙醚、二乙二醇單乙醚、二乙二醇單正丙醚、二乙二醇單正丁醚、三乙二醇單甲醚、三乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、二丙二醇單甲醚、二丙二醇單乙醚、二丙二醇單正丙醚、二丙二醇單正丁醚、三丙二醇單甲醚或三丙二醇單乙醚或其類似物;乙二醇甲醚醋酸酯、乙二醇乙醚醋酸酯或丙二醇甲醚醋酸酯或丙二醇乙醚醋酸酯或其類似物;二乙二醇二甲醚、二乙二醇甲乙醚、二乙二醇二乙醚或其類似物;甲乙酮、環己酮、2-庚酮、3-庚酮、二丙酮醇或其類似物;2-羥基-2-甲基丙酸甲酯、2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基醋酸乙酯、羥基醋酸乙酯、2-羥基-3-甲基丁酸甲酯、3-甲基-3-甲氧基丁基醋酸酯、3-甲基-3-甲氧基丁基丙酸酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯醋酸甲酯、乙醯醋酸乙酯、2-氧基丁酸乙酯或其類似物;甲苯、二甲苯或其類似物;N-甲基吡咯烷酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺或其類似物。Examples of other solvents (D-3) include but are not limited to ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether , Triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, Tripropylene glycol monomethyl ether or tripropylene glycol monoethyl ether or its analogues; ethylene glycol methyl ether acetate, ethylene glycol ethyl ether acetate or propylene glycol methyl ether acetate or propylene glycol ethyl ether acetate or its analogues; diethylene glycol two Methyl ether, diethylene glycol methyl ethyl ether, diethylene glycol diethyl ether or their analogs; methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone, diacetone alcohol or their analogs; 2-hydroxy-2 -Methyl methylpropionate, ethyl 2-hydroxy-2-methylpropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate , Ethyl 3-ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutyrate, 3-methyl-3-methoxybutyl acetate , 3-Methyl-3-methoxybutyl propionate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetyl acetate, ethyl acetyl acetate, 2-oxybutan Ethyl acid or its analogue; toluene, xylene or its analogue; N-methylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide or its analogue.

基於該鹼可溶性樹脂(A)之總使用量為100重量份,該溶劑(D)之使用量為250至5000重量份,較佳為350重量份至4800重量份,且更佳為450重量份至4600重量份。Based on the total usage amount of the alkali-soluble resin (A) being 100 parts by weight, the usage amount of the solvent (D) is 250 to 5000 parts by weight, preferably 350 parts by weight to 4800 parts by weight, and more preferably 450 parts by weight To 4600 parts by weight.

適用於本發明之黑色顏料(E)以具有耐熱性、耐光性以及耐溶劑性的黑色顏料為較佳。The black pigment (E) suitable for the present invention is preferably a black pigment having heat resistance, light resistance and solvent resistance.

前述之黑色顏料(E)之具體例如:二萘嵌苯黑(perylene black)、花青黑(cyanine black)、苯胺黑(aniline black)等黑色有機顏料;由紅、藍、綠、紫、黃色、花青(cyanine)、洋紅(magenta)等顏料中,選擇兩種或兩種以上的顏料進行混合,使其成近黑色化之混色有機顏料;碳黑(carbon black)、氧化鉻、氧化鐵、鈦黑(titanium black)、石墨等遮光材,其中前述之碳黑可包含但不限於C.I.pigment black 7等,前述之碳黑的具體例如三菱化學所製造之市售品(商品名MA100、MA230、MA8、#970、#1000、#2350、#2650)。前述之黑色顏料(F)一般可單獨一種或混合複數種使用。Specific examples of the aforementioned black pigment (E) are black organic pigments such as perylene black, cyanine black, and aniline black; consisting of red, blue, green, purple, and yellow Among the pigments such as cyanine, magenta, etc., select two or more pigments to mix to make them into a nearly black mixed color organic pigment; carbon black, chromium oxide, iron oxide , Titanium black (titanium black), graphite and other light-shielding materials, wherein the aforementioned carbon black may include but is not limited to CIpigment black 7, etc., and specific examples of the aforementioned carbon black are commercially available products manufactured by Mitsubishi Chemical (trade names MA100, MA230) , MA8, #970, #1000, #2350, #2650). The aforementioned black pigment (F) can generally be used singly or as a mixture of multiple types.

基於該鹼可溶性樹脂(A)的使用量為100重量份,該黑色顏料(E)之使用量為50至600重量份,較佳為60至550重量份,更佳為70至500重量份。Based on the usage amount of the alkali-soluble resin (A) being 100 parts by weight, the usage amount of the black pigment (E) is 50 to 600 parts by weight, preferably 60 to 550 parts by weight, more preferably 70 to 500 parts by weight.

在不影響本發明功效之前提下,本發明的黑色感光性樹脂組成物可進一步選擇性地添加添加劑(F)。該添加劑(F)之具體例可包含界面活性劑、填充劑、密著促進劑、抗氧化劑、防凝集劑或前述鹼可溶性樹脂(A)以外之其他能增加各種性質(例如機械性質)的聚合物。Without affecting the efficacy of the present invention, the black photosensitive resin composition of the present invention may further optionally add an additive (F). Specific examples of the additive (F) may include surfactants, fillers, adhesion promoters, antioxidants, anti-agglomeration agents, or polymerization that can increase various properties (such as mechanical properties) other than the aforementioned alkali-soluble resin (A) Things.

前述界面活性劑之具體例可包含陽離子型界面活性劑、陰離子型界面活性劑、非離子型界面活性劑、兩性界面活性劑、聚矽氧烷界面活性劑、氟素界面活性劑或上述界面活性劑之任意組合。Specific examples of the aforementioned surfactants may include cationic surfactants, anionic surfactants, nonionic surfactants, amphoteric surfactants, polysiloxane surfactants, fluorine surfactants, or the aforementioned surfactants. Any combination of agents.

該界面活性劑之具體例可包含但不限於聚乙氧基十二烷基醚、聚乙氧基硬酯醯醚或聚乙氧基油醚等之聚乙氧基烷基醚類;聚乙氧基辛基苯基醚或聚乙氧基壬基苯基醚等之聚乙氧基烷基苯基醚類;聚乙二醇二月桂酸酯或聚乙二醇二硬酸酯等之聚乙二醇二酯類;山梨糖醇酐脂肪酸酯化合物;脂肪酸改質的聚酯化合物;三級胺改質的聚胺基甲酸酯化合物;或者市售之商品。其中,該市售商品可為信越化學工業公司製造之產品,且其型號為KP;道康寧東麗股份有限公司(Dow Corning Toray Co., Ltd.)製造之產品,且其型號為SF-8427;共榮社油脂化學工業製造之產品,且其型號為Polyflow;得克姆股份有限公司(Tochem Products Co., Ltd.)製造之產品,且其型號為F-Top;大日本印墨化學工業製造之產品,且其型號為Megafac;住友3M製造之產品,且其型號為Fluorade;或者旭硝子公司製造之產品,且其型號為Asahi Guard或Surflon。該界面活性劑可單獨一種或混合複數種使用。Specific examples of the surfactant may include, but are not limited to, polyethoxyalkyl ethers such as polyethoxylauryl ether, polyethoxy stearyl ether or polyethoxy oleyl ether; polyethylene Polyethoxy alkyl phenyl ethers such as oxyoctyl phenyl ether or polyethoxy nonyl phenyl ether; polyethylene glycol dilaurate or polyethylene glycol distearate, etc. Ethylene glycol diesters; sorbitan fatty acid ester compounds; fatty acid modified polyester compounds; tertiary amine modified polyurethane compounds; or commercially available products. Among them, the commercially available product can be a product manufactured by Shin-Etsu Chemical Industry Co., and its model is KP; a product manufactured by Dow Corning Toray Co., Ltd. and its model is SF-8427; A product manufactured by Kyoeisha’s oleochemical industry, and its model is Polyflow; a product manufactured by Tochem Products Co., Ltd., and its model is F-Top; manufactured by Dainippon Ink Chemical Industry The product, and its model is Megafac; the product manufactured by Sumitomo 3M, and its model is Fluorade; or the product manufactured by Asahi Glass Company, and its model is Asahi Guard or Surflon. The surfactant can be used singly or in combination.

前述填充劑之具體例可包含玻璃或鋁等。Specific examples of the aforementioned filler may include glass or aluminum.

前述密著促進劑之具體例可包含乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、乙烯基三(2-甲氧基乙氧基)矽烷、N-(2-胺基乙基)-3-胺基丙基甲基二甲氧基矽烷、N-(2-胺基乙基)-3-胺基丙基三甲氧基矽烷、3-胺丙基三乙氧基矽烷、3-環氧丙氧基丙基三甲氧基矽烷(信越化學製造之商品,且其型號為KBM-403)、EPPN501H(日本化藥公司製)、EPIKOTE 152(殼牌化學公司製造)、3-環氧丙氧基丙基甲基二乙氧基矽烷、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-氯丙基甲基二甲氧基矽烷、3-氯丙基三甲氧基矽烷、3-甲基丙醯氧基丙基三甲氧基矽烷或3-巰丙基三甲氧基矽烷等之化合物,或者上述化合物之任意組合。Specific examples of the aforementioned adhesion promoter may include vinyl trimethoxysilane, vinyl triethoxy silane, vinyl tris (2-methoxyethoxy) silane, and N-(2-aminoethyl) -3-aminopropylmethyl dimethoxysilane, N-(2-aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3- Glycidoxypropyl trimethoxysilane (product manufactured by Shin-Etsu Chemical, and its model number is KBM-403), EPPN501H (manufactured by Nippon Kayaku Co.), EPIKOTE 152 (manufactured by Shell Chemical Co.), 3-epoxypropylene Oxyoxypropylmethyldiethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethyl Compounds such as oxysilane, 3-methylpropoxypropyltrimethoxysilane or 3-mercaptopropyltrimethoxysilane, or any combination of the above compounds.

前述抗氧化劑之具體例可包含2,2-硫代雙(4-甲基-6-第三丁基苯酚)、2,6-二-第三丁基苯酚或上述化合物之任意組合。Specific examples of the aforementioned antioxidants may include 2,2-thiobis(4-methyl-6-tertiary butylphenol), 2,6-di-tertiary butylphenol, or any combination of the foregoing compounds.

前述防凝集劑之具體例可包含聚丙烯酸鈉等之化合物。Specific examples of the aforementioned anti-aggregation agent may include compounds such as sodium polyacrylate.

基於該鹼可溶性樹脂(A)之使用量為100重量份,添加劑(F)中之填充劑、密著促進劑、抗氧化劑、防凝集劑或鹼可溶性樹脂(A)以外之聚合物的使用量係不超過10重量份,且較佳係不超過6重量份。Based on the usage amount of the alkali-soluble resin (A) being 100 parts by weight, the usage amount of the filler, adhesion promoter, antioxidant, anti-coagulant or polymer other than the alkali-soluble resin (A) in the additive (F) It does not exceed 10 parts by weight, and preferably does not exceed 6 parts by weight.

本發明之黑色感光性樹脂組成物一般係將上述之鹼可溶性樹脂(A)、具有乙烯性不飽和基的化合物(B)、光起始劑(C)、溶劑(D)、黑色顏料(E)放置於攪拌器中攪拌,使其均勻混合成溶液狀態,必要時亦可添加界面活性劑、填充劑、密著促進劑、架橋劑、抗氧化劑、防凝集劑等添加劑(F),予以均勻混合後,便可調製得呈溶液狀態之黑色感光性樹脂組成物。The black photosensitive resin composition of the present invention is generally composed of the above-mentioned alkali-soluble resin (A), compound having ethylenic unsaturated group (B), photoinitiator (C), solvent (D), black pigment (E) ) Place in a stirrer and stir to make it evenly mixed into a solution state. If necessary, add surfactants, fillers, adhesion promoters, bridging agents, antioxidants, anti-coagulants and other additives (F) for uniformity After mixing, a black photosensitive resin composition in a solution state can be prepared.

其次,本發明之黑色感光性樹脂組成物之製備方法並沒有特別的限定,例如,可將黑色顏料(E)直接加入黑色感光性樹脂組成物中分散而成,或者是事先將一部分的黑色顏料(E)分散於一部分的含有鹼可溶性樹脂(A)及溶劑(D)的媒介中,形成顏料分散液後,再混合具有乙烯性不飽和基的化合物(B)、光起始劑(C)、鹼可溶性樹脂(A)及溶劑(D)之其餘部份而製得。上述黑色顏料(E)之分散步驟則可藉由例如珠磨機(beads mill)或輥磨機(roll mill)等混合器混合上述成份而進行。Secondly, the preparation method of the black photosensitive resin composition of the present invention is not particularly limited. For example, the black pigment (E) can be directly added to the black photosensitive resin composition to be dispersed, or a part of the black pigment (E) Disperse in a part of a medium containing alkali-soluble resin (A) and solvent (D) to form a pigment dispersion, and then mix the compound (B) with ethylenic unsaturated group and the photoinitiator (C) , Alkali-soluble resin (A) and the rest of the solvent (D). The dispersing step of the above-mentioned black pigment (E) can be performed by mixing the above-mentioned components with a mixer such as a bead mill or a roll mill.

本發明亦提供一種黑色圖案(例如黑色矩陣),其係由前述之黑色感光性樹脂組成物所形成。The present invention also provides a black pattern (such as a black matrix), which is formed by the aforementioned black photosensitive resin composition.

該黑色圖案係由對如上所述的黑色感光性樹脂組成物依序施予預烤、曝光、顯影及曝後烤處理而製得,其中,於膜厚為1μm時,此黑色圖案之光學密度範圍為3.0以上。較佳地,於膜厚為1μm時,此黑色圖案之光學密度範圍為3.2至5.5;更佳地,於膜厚為1μm時,此黑色圖案之光學密度範圍為3.5至5.5。The black pattern is made by sequentially applying pre-bake, exposure, development, and post-exposure baking treatments to the black photosensitive resin composition as described above. When the film thickness is 1 μm, the optical density of the black pattern The range is 3.0 or more. Preferably, when the film thickness is 1 μm, the optical density of the black pattern is in the range of 3.2 to 5.5; more preferably, when the film thickness is 1 μm, the optical density of the black pattern is in the range of 3.5 to 5.5.

本發明之黑色圖案可以藉由旋轉塗佈或流延塗佈等塗佈方法,將前述之黑色感光性樹脂組成物塗佈在基板上,並以減壓乾燥及預烤處理將其中的溶劑去除,進而在基板上形成一預烤塗膜。其中,前述減壓乾燥及預烤之條件,依各成份的種類、配合比率而異,通常,減壓乾燥是在一小於200 mmHg之壓力下進行1秒至20秒,而預烤處理則是在70℃至110℃溫度下進行1分鐘至15分鐘。預烤後,將前述塗膜於指定之光罩下曝光,然後於23±2℃的溫度下浸漬於一顯影劑中,歷時15秒至5分鐘,以將不要之部份除去而形成特定的圖案。曝光所使用的光線,以g線、h線或i線等之紫外線為佳,而紫外線照射裝置可為(超)高壓水銀燈及金屬鹵素燈。The black pattern of the present invention can be coated with the aforementioned black photosensitive resin composition on a substrate by a coating method such as spin coating or cast coating, and the solvent can be removed by drying under reduced pressure and pre-baking. , And then form a pre-baked coating film on the substrate. Among them, the aforementioned vacuum drying and pre-baking conditions vary according to the types and mixing ratios of the ingredients. Generally, the vacuum drying is performed at a pressure of less than 200 mmHg for 1 to 20 seconds, while the pre-baking treatment is Perform 1 minute to 15 minutes at a temperature of 70°C to 110°C. After pre-baking, expose the aforementioned coating film under a specified mask, and then immerse it in a developer at a temperature of 23±2°C for 15 seconds to 5 minutes to remove unnecessary parts to form a specific pattern. The light used for exposure is preferably ultraviolet rays such as g-line, h-line or i-line, and the ultraviolet irradiation device can be (ultra) high pressure mercury lamp and metal halide lamp.

前述適用的顯影劑之具體例如:氫氧化鈉、氫氧化鉀、碳酸鈉、碳酸氫鈉、碳酸鉀、碳酸氫鉀、矽酸鈉、甲基矽酸鈉、氨水、乙胺、二乙胺、二甲基乙醇胺、氫氧化四甲胺、氫氧化四乙胺、膽鹼、吡咯、哌啶或1,8-二氮雜二環-[5,4,0]-7-十一烯等之鹼性化合物等。顯影液之濃度一般為0.001重量百分比(wt%)至10 wt%,較佳為0.005 wt%至5 wt%,更佳為0.01 wt%至1 wt%。Specific examples of the aforementioned applicable developer include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium bicarbonate, potassium carbonate, potassium bicarbonate, sodium silicate, sodium methyl silicate, ammonia, ethylamine, diethylamine, One of dimethylethanolamine, tetramethylamine hydroxide, tetraethylamine hydroxide, choline, pyrrole, piperidine or 1,8-diazabicyclo-[5,4,0]-7-undecene, etc. Basic compounds, etc. The concentration of the developer is generally 0.001 wt% (wt%) to 10 wt%, preferably 0.005 wt% to 5 wt%, more preferably 0.01 wt% to 1 wt%.

使用此等顯影劑時,一般係於顯影後以水洗淨,再以壓縮空氣或壓縮氮氣將圖案風乾後,再以熱板或烘箱等加熱裝置進行後烤處理。後烤溫度通常為150至250℃,其中,使用熱板之加熱時間為5分鐘至60分鐘,使用烘箱之加熱時間為15分鐘至150分鐘。經過以上之處理步驟後即可於基板上形成黑色圖案。When these developers are used, they are generally washed with water after development, then the pattern is dried with compressed air or compressed nitrogen, and then post-baked with heating devices such as hot plates or ovens. The post-baking temperature is usually 150 to 250°C, wherein the heating time using a hot plate is 5 minutes to 60 minutes, and the heating time using an oven is 15 minutes to 150 minutes. After the above processing steps, a black pattern can be formed on the substrate.

上述基材之具體例如:用於液晶顯示裝置等之無鹼玻璃、鈉鈣玻璃、硬質玻璃(派勒斯玻璃)、石英玻璃及於此等玻璃上附著透明導電膜者;或用於固體攝影裝置等之光電變換裝置基板(如:矽基板)等。Specific examples of the above-mentioned substrates are: alkali-free glass, soda lime glass, hard glass (Pyles glass), quartz glass, and transparent conductive film attached to these glasses for liquid crystal display devices; or for solid-state photography Photoelectric conversion device substrates (such as silicon substrates) for devices, etc.

本發明又提供一種彩色濾光片,係包含前述之黑色圖案。The present invention also provides a color filter, which contains the aforementioned black pattern.

本發明之彩色濾光片之形成方法可藉由迴轉塗佈、流延塗佈或輥式塗佈等塗佈方式,將混合成溶液狀態之彩色濾光片用感光性組成物塗佈在基板上,其中此基板已預先利用前述之黑色感光性樹脂組成物形成隔離各畫素著色層之黑色圖案。塗佈後,先以減壓乾燥之方式,去除大部分之溶劑,再以預烤(pre-bake)方式將溶劑去除而形成一預烤塗膜。其中,減壓乾燥及預烤之條件,依各成份之種類,配合比率而異,通常,減壓乾燥乃在0mmHg至200mmHg之壓力下進行1秒鐘至60秒鐘,而預烤乃在70℃至110℃溫度下進行1分鐘至15分鐘。預烤後,該預烤塗膜介於所指定之光罩(mask)間曝光,於23±2℃溫度下浸漬於前述之顯影液15秒至5分鐘進行顯影,不要之部分除去而形成具有圖案。曝光使用之光線,以g線、h線、i線等之紫外線為佳,而紫外線裝置可為(超)高壓水銀燈及金屬鹵素燈。The method of forming the color filter of the present invention can be applied to the substrate by coating the photosensitive composition for the color filter mixed into a solution state by coating methods such as spin coating, casting coating, or roll coating. Above, the substrate has previously used the aforementioned black photosensitive resin composition to form a black pattern separating the colored layers of each pixel. After coating, first remove most of the solvent by drying under reduced pressure, and then remove the solvent by pre-bake to form a pre-baked coating film. Among them, the conditions of reduced-pressure drying and pre-baking vary according to the types of ingredients and the mixing ratio. Generally, the reduced-pressure drying is carried out at a pressure of 0mmHg to 200mmHg for 1 to 60 seconds, and the pre-baking is at 70 ℃ to 110 ℃ temperature for 1 minute to 15 minutes. After pre-baking, the pre-baked coating film is exposed between the designated masks, and immersed in the aforementioned developer solution at a temperature of 23±2°C for 15 seconds to 5 minutes for development. Unnecessary parts are removed to form a pattern. The light used for exposure is preferably g-line, h-line, i-line and other ultraviolet rays, and the ultraviolet device can be (ultra) high pressure mercury lamps and metal halide lamps.

經上述顯像後以水洗淨,並以壓縮空氣或壓縮氮氣將圖案風乾後,再以熱板或烘箱等加熱裝置進行後烤處理,後烤處理的條件悉如前述,此處不贅述。After the above-mentioned development, it is washed with water, and the pattern is air-dried with compressed air or compressed nitrogen, and then post-baked with a heating device such as a hot plate or an oven. The conditions of the post-baked treatment are the same as described above and will not be repeated here.

各色(主要包括紅、綠、藍三色)重覆上述步驟,便可製得彩色濾光片之畫素層。其次,在畫素層上以220℃至250℃溫度之真空環境下,形成氧化銦錫(ITO)蒸鍍膜,必要時,對ITO鍍膜施行蝕刻暨佈線之後,再塗佈液晶配向膜用聚醯亞胺,進而燒成之,即可作為液晶顯示元件用之彩色濾光片。Repeating the above steps for each color (mainly including red, green and blue) can produce the pixel layer of the color filter. Secondly, form an indium tin oxide (ITO) vapor-deposited film on the pixel layer at a temperature of 220°C to 250°C in a vacuum environment. If necessary, after etching and wiring the ITO coating, apply the polyamide for the liquid crystal alignment film. Imine, and then fired, can be used as a color filter for liquid crystal display elements.

本發明再提供一種液晶顯示元件,係包含前述之彩色濾光片,及其中之黑色圖案。The present invention further provides a liquid crystal display element, which includes the aforementioned color filter and the black pattern therein.

本發明之液晶顯示元件,係藉由上述彩色濾光片之製造方法所形成之彩色濾光片基板,與設置有薄膜電晶體(thin film transistor, TFT)之驅動基板,在上述二片基板間介入間隙(晶胞間隔,cell gap)作對向配置,上述二片基板的周圍部位用封止劑貼合,在基板表面以及封止劑所區分出的間隙內充填注入液晶,封住注入孔而構成液晶晶胞(cell)。然後,在液晶晶胞的外表面,亦即構成液晶晶胞的各個基板的其他側面上,貼合偏光板後,而製得液晶顯示元件。The liquid crystal display element of the present invention is a color filter substrate formed by the above-mentioned color filter manufacturing method, and a drive substrate provided with thin film transistors (TFT), between the two substrates The intervening gap (cell gap) is arranged to face each other, and the surrounding parts of the two substrates are bonded with a sealant, and liquid crystal is filled in the gap between the surface of the substrate and the sealant, and the injection hole is sealed. It forms a liquid crystal cell (cell). Then, a polarizing plate is attached to the outer surface of the liquid crystal cell, that is, the other side surfaces of each substrate constituting the liquid crystal cell, and a liquid crystal display element is manufactured.

至於前述使用的液晶,亦即液晶化合物或液晶組成物,此處並未特別限定,惟可使用任何一種液晶化合物及液晶組成物。As for the liquid crystal used above, that is, the liquid crystal compound or the liquid crystal composition, there is no particular limitation here, but any liquid crystal compound and liquid crystal composition can be used.

再者,前述使用的液晶配向膜,係用於限制液晶分子之配向,此處並未特別限定,舉凡無機物或有機物任一者均可。至於形成液晶配向膜之技術為本發明所屬技術領域中任何具有通常知識者所熟知,且非為本發明的重點,故不另贅述。Furthermore, the aforementioned liquid crystal alignment film is used to restrict the alignment of liquid crystal molecules, and is not particularly limited here, and any inorganic or organic substance may be used. As for the technology of forming the liquid crystal alignment film, it is well known by anyone with ordinary knowledge in the technical field to which the present invention belongs, and is not the focus of the present invention, so it will not be repeated.

茲以下列實例予以詳細說明本發明,唯並不意謂本發明僅侷限於此等實例所揭示之內容。 <式(1)所示之二醇化合物(a-1-1)的製備例>The following examples are used to illustrate the present invention in detail, but it does not mean that the present invention is limited to the content disclosed in these examples. <Production example of the diol compound (a-1-1) represented by formula (1)>

步驟A:於三頸燒瓶設置迴流冷凝器及溫度計,加入42.5 g之9,9-雙酚芴,並定量注入220 mL之2-(氯甲基)環氧乙烷。加入100 mg之四丁基溴化銨後,攪拌並將升溫至90℃。確認未反應物之含量低於0.3%,而後進行減壓蒸餾。Step A: Set up a reflux condenser and thermometer in a three-necked flask, add 42.5 g of 9,9-bisphenol fluorene, and quantitatively inject 220 mL of 2-(chloromethyl)oxirane. After adding 100 mg of tetrabutylammonium bromide, stir and raise the temperature to 90°C. It was confirmed that the content of unreacted materials was less than 0.3%, and then vacuum distillation was performed.

步驟B:待降溫至30℃後,注入二氯甲烷並慢慢加入NaOH。以高效液相層析(HPLC)確認產率為96%以上,而後滴加5% HCl終止反應。分液萃取反應物,取有機相以水洗滌至中性。而後,以MgSO4 將有機層乾燥後,以迴旋濃縮儀進行減壓蒸餾並濃縮。於濃縮產物中加入二氯甲烷,升溫至40℃的同時,攪拌並加入甲醇,而後冷卻並攪拌溶液。過濾生成的固體在常溫下真空乾燥,得到52.7 g白色固體粉末(回收率94%),其結構以1 H NMR確認,如下式(1a)所示:

Figure 02_image089
式(1a)Step B: After cooling down to 30°C, inject dichloromethane and slowly add NaOH. High performance liquid chromatography (HPLC) confirmed that the yield was over 96%, and then 5% HCl was added dropwise to stop the reaction. The reactants were separated and extracted, and the organic phase was washed with water to neutrality. Then, after the organic layer was dried with MgSO 4 , it was distilled under reduced pressure with a cyclotron and concentrated. Dichloromethane was added to the concentrated product, and while heating to 40°C, methanol was stirred and added, and then the solution was cooled and stirred. The filtered solid was vacuum dried at room temperature to obtain 52.7 g of white solid powder (recovery rate of 94%), the structure of which was confirmed by 1 H NMR, as shown in the following formula (1a):
Figure 02_image089
Formula (1a)

CDCl3之1H NMR:7.75(2H),7.36至7.25(6H),7.09(4H),6.74(4H),4.13(2H),3.89(2H),3.30(2H),2.87(2H),2.71(2H)。1H NMR of CDCl3: 7.75(2H), 7.36 to 7.25(6H), 7.09(4H), 6.74(4H), 4.13(2H), 3.89(2H), 3.30(2H), 2.87(2H), 2.71(2H) ).

步驟C:於三頸燒瓶設置迴流冷凝器及溫度計,加入前述合成所得之式(1a)化合物1000 g、524 g苯硫酚及617 g乙醇並攪拌,續將328 g三乙胺逐滴加入反應溶液中。以HPLC確認反應物消失後,終止反應。反應完成後,減壓蒸餾除去乙醇。將有機物溶解於二氯甲烷中,續以水洗滌,減壓蒸餾除去二氯甲烷。將濃縮後之有機物溶解於乙酸乙酯中,滴加醚溶劑並攪拌30分鐘。而後,減壓蒸餾該化合物,得到945 g(產率64%)之淺黃色油狀物,其結構通過1H NMR確認,如下式(1b)所示:

Figure 02_image091
式(1b)Step C: Set up a reflux condenser and a thermometer in a three-necked flask, add 1000 g of the compound of formula (1a) obtained in the above synthesis, 524 g of thiophenol and 617 g of ethanol and stir, then add 328 g of triethylamine dropwise to the reaction In solution. After confirming the disappearance of the reactant by HPLC, the reaction was terminated. After the reaction was completed, ethanol was distilled off under reduced pressure. The organic matter was dissolved in dichloromethane, washed with water, and distilled under reduced pressure to remove dichloromethane. The concentrated organic matter was dissolved in ethyl acetate, ether solvent was added dropwise and stirred for 30 minutes. Then, the compound was distilled under reduced pressure to obtain 945 g (yield: 64%) of a light yellow oil whose structure was confirmed by 1H NMR, as shown in the following formula (1b):
Figure 02_image091
Formula (1b)

CDCl3之1H NMR:7.82(2H),7.38至6.72(20H),6.51(4H),4.00(2H),3.97(2H),3.89(2H),3.20(2H),3.01(2H),2.64(2H)。 <第一鹼可溶性樹脂(A-1)的製備例> <合成例A-1-1>1H NMR of CDCl3: 7.82(2H), 7.38 to 6.72(20H), 6.51(4H), 4.00(2H), 3.97(2H), 3.89(2H), 3.20(2H), 3.01(2H), 2.64(2H) ). <Preparation example of the first alkali-soluble resin (A-1)> <Synthesis example A-1-1>

於三頸燒瓶設置迴流冷凝器及溫度計,將前述合成所得之式(1b)化合物200 g溶解於50%丙二醇甲醚乙酸酯(propylene glycol methyl ether acetate, PGMEA)中,並加熱至115℃。於115℃下,滴加31.1 g之3,3',4,4'-聯苯四羧酸酐(Biphenyltetracarboxylic dianhydride)後,保持在115℃下,持續攪拌6小時。加入7.35 g之鄰苯二甲酸酐(Phthalic anhydride),並繼續攪拌2小時後,終止反應。冷卻後,得到重量平均分子量為3,500 g/mol之第一鹼可溶性樹脂A-1-1,其結構如下式(a-1-a)所示:

Figure 02_image093
式(a-1-a) <合成例A-1-2>A reflux condenser and a thermometer were set in a three-necked flask, and 200 g of the compound of formula (1b) obtained by the aforementioned synthesis was dissolved in 50% propylene glycol methyl ether acetate (PGMEA) and heated to 115°C. After dripping 31.1 g of 3,3',4,4'-biphenyltetracarboxylic dianhydride at 115°C, keep the temperature at 115°C and continue stirring for 6 hours. After adding 7.35 g of phthalic anhydride (Phthalic anhydride) and continuing to stir for 2 hours, the reaction was terminated. After cooling, the first alkali-soluble resin A-1-1 with a weight average molecular weight of 3,500 g/mol is obtained, and its structure is shown in the following formula (a-1-a):
Figure 02_image093
Formula (a-1-a) <Synthesis Example A-1-2>

將製備例1之31.1 g之3,3',4,4'-聯苯四羧酸酐替換為28.4 g之3,3',4,4'-二苯甲酮四羧酸二酐(Benzophenonetetracarboxylic dianhydride),其餘成分及條件皆與前述相同,得到重量平均分子量為5,000 g/mol之第一鹼可溶性樹脂A-1-2,其結構如下式(a-1-b)所示:

Figure 02_image095
式(a-1-b) <合成例A-1-3>31.1 g of 3,3',4,4'-biphenyltetracarboxylic anhydride in Preparation Example 1 was replaced with 28.4 g of 3,3',4,4'-benzophenonetetracarboxylic dianhydride (Benzophenonetetracarboxylic dianhydride) ), the rest of the components and conditions are the same as above, and the first alkali-soluble resin A-1-2 with a weight average molecular weight of 5,000 g/mol is obtained, and its structure is shown in the following formula (a-1-b):
Figure 02_image095
Formula (a-1-b) <Synthesis Example A-1-3>

將製備例1之31.1 g之3,3',4,4'-聯苯四羧酸酐替換為21.1 g之均苯四甲酸二酐(Pyromellitic dianhydride),其餘成分及條件皆與前述相同,得到重量平均分子量為4,500 g/mol之第一鹼可溶性樹脂A-1-3,其結構如下式(a-1-c)所示:

Figure 02_image097
式(a-1-c) <合成例A-1-4>Replace 31.1 g of 3,3',4,4'-biphenyltetracarboxylic anhydride in Preparation Example 1 with 21.1 g of Pyromellitic dianhydride, and the rest of the ingredients and conditions are the same as the above, and the weight is obtained The first alkali-soluble resin A-1-3 with an average molecular weight of 4,500 g/mol has the structure shown in the following formula (a-1-c):
Figure 02_image097
Formula (a-1-c) <Synthesis Example A-1-4>

將製備例1之31.1 g之3,3',4,4'-聯苯四羧酸酐替換為21.7 g之環己基二酐 (Cyclohexyl dianhydride),其餘成分及條件皆與前述相同,得到重量平均分子量為4,200 g/mol之第一鹼可溶性樹脂A-1-4,其結構如下式(a-1-d)所示:

Figure 02_image099
式(a-1-d) <合成例A-1-5>Replace 31.1 g of 3,3',4,4'-biphenyltetracarboxylic acid anhydride in Preparation Example 1 with 21.7 g of Cyclohexyl dianhydride, and the rest of the ingredients and conditions are the same as above, to obtain the weight average molecular weight The first alkali-soluble resin A-1-4 is 4,200 g/mol, and its structure is shown in the following formula (a-1-d):
Figure 02_image099
Formula (a-1-d) <Synthesis Example A-1-5>

將製備例1之31.1 g之3,3',4,4'-聯苯四羧酸酐替換為18.7 g之環丁基二酐(Cyclobutyl dianhydride),其餘成分及條件皆與前述相同,得到重量平均分子量為4,200 g/mol之第一鹼可溶性樹脂A-1-5,其結構如下式(a-1-e)所示:

Figure 02_image101
式(a-1-e) <含有聚合性不飽和基的二醇化合物(a-2-1)的製備例> <製備例1>Replace 31.1 g of 3,3',4,4'-biphenyltetracarboxylic anhydride in Preparation Example 1 with 18.7 g of Cyclobutyl dianhydride. The rest of the ingredients and conditions are the same as the above, and the weight average is obtained. The first alkali-soluble resin A-1-5 with a molecular weight of 4,200 g/mol has the structure shown in the following formula (a-1-e):
Figure 02_image101
Formula (a-1-e) <Production example of polymerizable unsaturated group-containing diol compound (a-2-1)><Production example 1>

首先,將100重量份的茀環氧化合物(型號ESF-300,新日鐵化學製造;環氧當量231)、30重量份的丙烯酸、0.3重量份的氯化苄基三乙基銨、0.1重量份的2,6-二第三丁基對甲酚以及130重量份的丙二醇甲醚醋酸酯以連續式添加方式加入至500毫升的四頸燒瓶中。入料速度控制在25重量份/分鐘,並且反應過程的溫度維持在100℃至110℃,反應15小時後,即可獲得固成分濃度為50重量%的淡黃色透明混合液。接著,使上述淡黃色透明混合液經受萃取、過濾及加熱烘乾的步驟,即可得固體成分含量為99.9重量%的製備例1的含有聚合性不飽和基的二醇化合物(a-2-1-a)。 <製備例2>First, 100 parts by weight of epoxy compound (model ESF-300, manufactured by Nippon Steel Chemical; epoxy equivalent 231), 30 parts by weight of acrylic acid, 0.3 parts by weight of benzyltriethylammonium chloride, 0.1 parts by weight Parts of 2,6-di-tert-butyl-p-cresol and 130 parts by weight of propylene glycol methyl ether acetate were added to a 500 ml four-necked flask in a continuous addition manner. The feeding rate is controlled at 25 parts by weight/minute, and the temperature during the reaction process is maintained at 100°C to 110°C. After 15 hours of reaction, a light yellow transparent mixed liquid with a solid content of 50% by weight can be obtained. Then, the light yellow transparent mixed liquid was subjected to the steps of extraction, filtration, and heating and drying to obtain the polymerizable unsaturated group-containing diol compound (a-2-) of Preparation Example 1 with a solid content of 99.9% by weight. 1-a). <Preparation Example 2>

首先,將100重量份的茀環氧化合物(型號PG-100,大阪瓦斯製造;環氧當量259)、35重量份的甲基丙烯酸、0.3重量份的氯化苄基三乙基銨、0.1重量份的2,6-二第三丁基對甲酚以及135重量份的丙二醇甲醚醋酸酯以連續添加方式加入至500毫升的四頸燒瓶中。入料速度控制在25重量份/分鐘,並且反應過程的溫度維持在100℃至110℃下,反應15小時後,即可獲得固體成分含量為50重量%的淡黃色透明混合液。使上述淡黃色透明混合液經受萃取、過濾及加熱烘乾的步驟,即可得固體成分含量為99.9重量%的製備例2的含有聚合性不飽和基的二醇化合物(a-2-1-b)。 <製備例3>First, 100 parts by weight of the epoxy compound (model PG-100, manufactured by Osaka Gas; epoxy equivalent 259), 35 parts by weight of methacrylic acid, 0.3 parts by weight of benzyltriethylammonium chloride, 0.1 parts by weight Parts of 2,6-di-tert-butyl-p-cresol and 135 parts by weight of propylene glycol methyl ether acetate were added to a 500 ml four-necked flask in a continuous addition manner. The feeding rate is controlled at 25 parts by weight/minute, and the temperature during the reaction process is maintained at 100°C to 110°C. After 15 hours of reaction, a light yellow transparent mixed liquid with a solid content of 50% by weight can be obtained. The light yellow transparent mixed liquid is subjected to the steps of extraction, filtration, and heating and drying to obtain the polymerizable unsaturated group-containing diol compound (a-2-1-) of Preparation Example 2 with a solid content of 99.9% by weight. b). <Preparation Example 3>

將100重量份的茀環氧化合物(型號ESF-300,新日鐵化學製造;環氧當量231)、100重量份的2-甲基丙烯醯乙氧基丁二酸酯、0.3重量份的氯化苄基三乙基銨、0.1重量份的2,6-二第三丁基對甲酚以及200重量份的丙二醇甲醚醋酸酯以連續添加方式加入至500毫升的四頸燒瓶中。入料速度控制在25重量份/分鐘,且反應過程的溫度維持在100℃至110℃下,反應15小時後,即可獲得固體成分含量為50重量%的淡黃色透明混合液。使上述淡黃色透明混合液經受萃取、過濾及加熱烘乾的步驟,可得固體成分含量為99.9重量%的製備例3的含有聚合性不飽和基的二醇化合物(a-2-1-c)。 <第二鹼可溶性樹脂(A-2)的製備例> <合成例A-2-1>100 parts by weight of epoxy compound (model ESF-300, manufactured by Nippon Steel Chemical; epoxy equivalent 231), 100 parts by weight of 2-methacrylic acid ethoxy succinate, and 0.3 parts by weight of chlorine Benzyltriethylammonium, 0.1 parts by weight of 2,6-di-tert-butyl-p-cresol, and 200 parts by weight of propylene glycol methyl ether acetate were added to a 500-ml four-necked flask in a continuous addition manner. The feeding rate is controlled at 25 parts by weight/minute, and the temperature during the reaction process is maintained at 100°C to 110°C. After 15 hours of reaction, a light yellow transparent mixed liquid with a solid content of 50% by weight can be obtained. The light yellow transparent mixed liquid was subjected to the steps of extraction, filtration, and heating and drying to obtain the polymerizable unsaturated group-containing diol compound (a-2-1-c) of Preparation Example 3 with a solid content of 99.9% by weight. ). <Preparation example of the second alkali-soluble resin (A-2)> <Synthesis Example A-2-1>

首先,將1.0莫耳製備例1的具有聚合性不飽和基的二醇化合物(a-2-1-a)、0.3莫耳的聯苯四羧酸(a-2-2-b)、1.4莫耳的丁二酸(a-2-3-d)、1.9克的氯化苄基三乙基銨、0.6克的2,6-二第三丁基對甲酚、700克的丙二醇甲醚醋酸酯以及100克的3-乙氧基丙酸乙酯以同時添加方式加入至500毫升的四頸燒瓶中,以形成反應溶液。在此,「同時添加」是指於相同反應時間添加四羧酸或其酸二酐(a-2-2)與二羧酸或其酸酐(a-2-3)。接著,將上述反應溶液加熱至110℃,並且反應2小時,即可得第二鹼可溶性樹脂A-2-1。 <合成例A-2-2>First, 1.0 mol of the diol compound (a-2-1-a) having a polymerizable unsaturated group of Preparation Example 1, 0.3 mol of biphenyltetracarboxylic acid (a-2-2-b), 1.4 Mole of succinic acid (a-2-3-d), 1.9 g of benzyl triethylammonium chloride, 0.6 g of 2,6-di-tert-butyl p-cresol, 700 g of propylene glycol methyl ether Acetate and 100 g of ethyl 3-ethoxypropionate were added to a 500-ml four-necked flask by simultaneous addition to form a reaction solution. Here, "simultaneous addition" means adding tetracarboxylic acid or its acid dianhydride (a-2-2) and dicarboxylic acid or its acid anhydride (a-2-3) at the same reaction time. Then, the above reaction solution is heated to 110° C. and reacted for 2 hours to obtain the second alkali-soluble resin A-2-1. <Synthesis example A-2-2>

將1.0莫耳製備例2的具有聚合性不飽和基的二醇化合物(a-2-1-b)、2.9克的氯化苄基三乙基銨以及950克的丙二醇甲醚醋酸酯加入至500毫升的四頸燒瓶中,以形成反應溶液。接著,添加0.6莫耳的二苯甲酮四羧酸二酐(a-2-2-c)並在90℃下反應2小時。然後,添加0.8莫耳的馬來酸(a-2-3-b),並在90℃下反應4小時。在此,「分段添加」是指於不同的反應時間分別添加四羧酸或其酸二酐(a-2-2)與二羧酸或其酸酐(a-2-3),亦即先添加四羧酸或其酸二酐(a-2-2),之後再添加二羧酸或其酸酐(a-2-3)。經上述合成步驟,可得具有不飽和基的樹脂A-2-2。 <合成例A-2-3、合成例A-2-5以及合成例A-2-6>1.0 mol of the diol compound (a-2-1-b) having a polymerizable unsaturated group of Preparation Example 2, 2.9 g of benzyltriethylammonium chloride, and 950 g of propylene glycol methyl ether acetate were added to 500 ml four-necked flask to form the reaction solution. Next, 0.6 mol of benzophenone tetracarboxylic dianhydride (a-2-2-c) was added and reacted at 90°C for 2 hours. Then, 0.8 mol of maleic acid (a-2-3-b) was added and reacted at 90°C for 4 hours. Here, "addition in stages" refers to adding tetracarboxylic acid or its dianhydride (a-2-2) and dicarboxylic acid or its anhydride (a-2-3) at different reaction times, that is, first Add tetracarboxylic acid or its acid dianhydride (a-2-2), and then add dicarboxylic acid or its acid anhydride (a-2-3). Through the above synthesis steps, resin A-2-2 with unsaturated groups can be obtained. <Synthesis Example A-2-3, Synthesis Example A-2-5, and Synthesis Example A-2-6>

合成例A-2-3、合成例A-2-5以及合成例A-2-6的具有不飽和基的樹脂是以與合成例A-2-2相同的步驟來製備,並且其不同處在於:改變具有不飽和基的樹脂的成分種類及其使用量、反應時間、反應溫度以及反應物添加時間(如表1所示)。 <合成例A-2-4>Synthesis Example A-2-3, Synthesis Example A-2-5, and Synthesis Example A-2-6 are prepared by the same procedure as Synthesis Example A-2-2, and their differences It lies in: changing the type of the components of the resin with unsaturated groups and their usage, reaction time, reaction temperature and reactant addition time (as shown in Table 1). <Synthesis example A-2-4>

合成例A-2-4的具有不飽和基的樹脂是以與合成例A-2-1相同的步驟來製備,並且其不同處在於:改變具有不飽和基的樹脂的成分種類及其使用量、反應時間、反應溫度以及反應物添加時間(如表1-1、表1-2所示)。 表1-1: 成分 合成例 A-2-1 A-2-2 A-2-3 聚合成分 含有聚合性不飽和基的二醇化合物 (a-2-1) (莫耳) a-2-1-a 1.0 - - a-2-1-b - 1.0 0.5 a-2-1-c - - 0.5 四羧酸或其酸二酐(a-2-2) (莫耳) a-2-2-a - - - a-2-2-b 0.3 - - a-2-2-c - 0.6 - a-2-2-d - - 0.5 二羧酸或其酸酐 (a-2-3) (莫耳) a-2-3-a - - - a-2-3-b - 0.8 - a-2-3-c - - 1.0 a-2-3-d 1.4 - - 單體入料方式 同時添加 分段添加 分段添加 觸媒 氯化苄基三乙基銨(克) 1.9 2.9 2.5 阻聚劑 2,6-二第三丁基對甲酚(克) 0.6 - - 溶劑 PGMEA(克) 700 950 900 EEP(克) 100 - - 反應溫度(℃) 110 90 90 反應時間(小時) 2 2 2 4 4 表1-2: 成分 合成例 A-2-4 A-2-5 A-2-6 聚合成分 含有聚合性不飽和基的二醇化合物 (a-2-1) (莫耳) a-2-1-a 1.0 - - a-2-1-b - 1.0 - a-2-1-c - - 1.0 四羧酸或其酸二酐(a-2-2) (莫耳) a-2-2-a 0.2 - - a-2-2-b 0.1 - - a-2-2-c - - 0.3 a-2-2-d - 0.1 0.5 二羧酸或其酸酐(a-2-3) (莫耳) a-2-3-a - 0.6 - a-2-3-b 0.4 1.0 - a-2-3-c 1.0 - 0.2 a-2-3-d    0.2 0.2 單體入料方式 同時添加 分段添加 分段添加 觸媒 氯化苄基三乙基銨(克) 1.9 1.1 2.4 阻聚劑 2,6-二第三丁基對甲酚(克) 0.6 0.4 0.8 溶劑 PGMEA(克) 750 600 100 EEP(克) - - 900 反應溫度(℃) 110 90 90 反應時間(小時) 2 2 2 3.5 4 表1-1、表1-2中: a-2-1-a 製備例1的含有聚合性不飽和基的二醇化合物(a-2-1-a) a-2-1-b 製備例2的含有聚合性不飽和基的二醇化合物(a-2-1-b) a-2-1-c 製備例3的含有聚合性不飽和基的二醇化合物(a-2-1-c) a-2-2-a    4,4'-六氟亞異丙基二鄰苯二甲酸二酐 (4,4'-hexafluoro isopropylidene diphthalic dianhydride;6FDA) a-2-2-b 聯苯四羧酸(Biphenyl tetracarboxylic acid) a-2-2-c    二苯甲酮四羧酸二酐 (Benzophenone tetracarboxylic dianhydride) a-2-2-d 均苯四甲酸二酐(Pyromellitic dianhydride) a-2-3-a 3-氟鄰苯二甲酸酐(3-fluorophthalic anhydride) a-2-3-b 馬來酸(Maleic acid) a-2-3-c 四氫鄰苯二甲酸酐(Tetrahydrophthalic anhydride) a-2-3-d 丁二酸(Succinic acid) PGMEA    丙二醇甲醚醋酸酯 (propylene glycol monomethyl ether acetate, PGMEA) EEP 3-乙氧基丙酸乙酯(Ethyl 3-ethoxypropionate, EEP) <黑色感光性樹脂組成物之實施例與比較例> <實施例1>The unsaturated group-containing resin of Synthesis Example A-2-4 was prepared by the same procedure as Synthesis Example A-2-1, and the difference was: the type of the unsaturated group-containing resin and the amount used , Reaction time, reaction temperature and reactant addition time (as shown in Table 1-1, Table 1-2). Table 1-1: ingredient Synthesis example A-2-1 A-2-2 A-2-3 Polymeric components Diol compound containing polymerizable unsaturated group (a-2-1) (mole) a-2-1-a 1.0 - - a-2-1-b - 1.0 0.5 a-2-1-c - - 0.5 Tetracarboxylic acid or its acid dianhydride (a-2-2) (mole) a-2-2-a - - - a-2-2-b 0.3 - - a-2-2-c - 0.6 - a-2-2-d - - 0.5 Dicarboxylic acid or its anhydride (a-2-3) (mole) a-2-3-a - - - a-2-3-b - 0.8 - a-2-3-c - - 1.0 a-2-3-d 1.4 - - Monomer feeding method Also add Add by section Add by section catalyst Benzyltriethylammonium chloride (g) 1.9 2.9 2.5 Polymerization inhibitor 2,6-Di-tert-butyl p-cresol (g) 0.6 - - Solvent PGMEA (g) 700 950 900 EEP (g) 100 - - Reaction temperature (℃) 110 90 90 Reaction time (hours) 2 2 2 4 4 Table 1-2: ingredient Synthesis example A-2-4 A-2-5 A-2-6 Polymeric components Diol compound containing polymerizable unsaturated group (a-2-1) (mole) a-2-1-a 1.0 - - a-2-1-b - 1.0 - a-2-1-c - - 1.0 Tetracarboxylic acid or its acid dianhydride (a-2-2) (mole) a-2-2-a 0.2 - - a-2-2-b 0.1 - - a-2-2-c - - 0.3 a-2-2-d - 0.1 0.5 Dicarboxylic acid or its anhydride (a-2-3) (mole) a-2-3-a - 0.6 - a-2-3-b 0.4 1.0 - a-2-3-c 1.0 - 0.2 a-2-3-d 0.2 0.2 Monomer feeding method Also add Add by section Add by section catalyst Benzyltriethylammonium chloride (g) 1.9 1.1 2.4 Polymerization inhibitor 2,6-Di-tert-butyl p-cresol (g) 0.6 0.4 0.8 Solvent PGMEA (g) 750 600 100 EEP (g) - - 900 Reaction temperature (℃) 110 90 90 Reaction time (hours) 2 2 2 3.5 4 In Table 1-1 and Table 1-2: a-2-1-a The polymerizable unsaturated group-containing diol compound (a-2-1-a) of Preparation Example 1 a-2-1-b The polymerizable unsaturated group-containing diol compound (a-2-1-b) of Preparation Example 2 a-2-1-c The polymerizable unsaturated group-containing diol compound (a-2-1-c) of Preparation Example 3 a-2-2-a 4,4'-hexafluoro isopropylidene diphthalic dianhydride (4,4'-hexafluoro isopropylidene diphthalic dianhydride; 6FDA) a-2-2-b Biphenyl tetracarboxylic acid a-2-2-c Benzophenone tetracarboxylic dianhydride (Benzophenone tetracarboxylic dianhydride) a-2-2-d Pyromellitic dianhydride (Pyromellitic dianhydride) a-2-3-a 3-fluorophthalic anhydride a-2-3-b Maleic acid a-2-3-c Tetrahydrophthalic anhydride a-2-3-d Succinic acid PGMEA Propylene glycol monomethyl ether acetate (PGMEA) EEP Ethyl 3-ethoxypropionate (Ethyl 3-ethoxypropionate, EEP) <Examples and comparative examples of black photosensitive resin composition><Example1>

將100重量份的第一鹼可溶性樹脂(A-1-1)、10重量份的乙二醇二甲基丙烯酸酯(簡稱為B-1)、10重量份的由式(3-1)所示之化合物(簡稱為C-1-1)、5重量份的IRGACURE OXE-02 (簡稱為C-2-1)、100重量份的黑色顏料MA100(簡稱為E-1)加入150重量份的二乙二醇乙醚乙酸酯(簡稱為D-1-1)及100重量份的丙二醇甲醚醋酸酯(簡稱為D-3)中,並且以搖動式攪拌器攪拌均勻後,即可製得實施例1的黑色感光性樹脂組成物。 <實施例2至12及比較例1至3>100 parts by weight of the first alkali-soluble resin (A-1-1), 10 parts by weight of ethylene glycol dimethacrylate (abbreviated as B-1), and 10 parts by weight of the formula (3-1) The compound shown (referred to as C-1-1), 5 parts by weight of IRGACURE OXE-02 (referred to as C-2-1), 100 parts by weight of black pigment MA100 (referred to as E-1) are added to 150 parts by weight Diethylene glycol ethyl ether acetate (referred to as D-1-1) and 100 parts by weight of propylene glycol methyl ether acetate (referred to as D-3), and stirred evenly with a shaking stirrer, can be prepared The black photosensitive resin composition of Example 1. <Examples 2 to 12 and Comparative Examples 1 to 3>

實施例2至12及比較例1至3的黑色感光性樹脂組成物是以與實施例1相同的步驟來製備,並且其不同處在於:改變黑色感光性樹脂組成物的成分種類及其使用量(如表2-1及表2-2所示),在此不另贅述。 <評價方式>黑色矩陣 The black photosensitive resin compositions of Examples 2 to 12 and Comparative Examples 1 to 3 were prepared in the same steps as in Example 1, and the difference lies in: changing the types of black photosensitive resin compositions and their usage amount (As shown in Table 2-1 and Table 2-2), I will not repeat them here. <Evaluation method> Black matrix

將上述各實施例及比較例製得的黑色矩陣用負型感光性樹脂組成物利用塗佈機(型號為MS-A150,購自新光貿易),以旋轉塗佈的方式,塗佈在長寬均為100公釐(mm)的玻璃基板上。然後,將上述之玻璃基板置於100℃下預烤2分鐘,以形成膜厚為1.2微米(μm)的預烤塗膜。然後,將上述預烤塗膜放置於特定的光罩下,並且利用50 mJ/cm2 的紫外光(曝光機型號AG500-4N;由M&R Nano Technology製造)進行曝光。接著,以0.045%氫氧化鉀水溶液於23℃下顯影1分鐘,將基板上未曝光部份的塗膜除去,然後,以水洗淨並以230℃對預烤塗膜進行後烤30分鐘,即可在玻璃基板上形成膜厚約為1.0微米具有特定的圖案的黑色矩陣。錐度角 The negative photosensitive resin composition for black matrix prepared in the above-mentioned Examples and Comparative Examples was applied on the length and width by spin coating using a coater (model: MS-A150, purchased from Shinko Trading) All are on a 100 mm (mm) glass substrate. Then, the above-mentioned glass substrate was pre-baked at 100° C. for 2 minutes to form a pre-baked coating film with a film thickness of 1.2 micrometers (μm). Then, the above-mentioned pre-baked coating film was placed under a specific mask and exposed with 50 mJ/cm 2 ultraviolet light (exposure machine model AG500-4N; manufactured by M&R Nano Technology). Next, develop with a 0.045% potassium hydroxide aqueous solution at 23°C for 1 minute to remove the unexposed part of the coating film on the substrate, then rinse with water and post-bake the pre-baked coating film at 230°C for 30 minutes. That is, a black matrix with a film thickness of about 1.0 μm and a specific pattern is formed on the glass substrate. Taper angle

錐度角之評價係藉由掃描式電子顯微鏡(Hitachi High-Technologies製作,且其型號為S-4800)觀察前述具有特定圖案之黑色矩陣,並量測其錐度角。請參照圖一,其係繪示根據本發明之一實施例之錐度角的評價方式所觀察之黑色矩陣的錐度角θ之剖面示意圖。其中,701係為玻璃基板,703係為黑色矩陣。依據所量測之錐度角θ,以下述之基準進行評價: ◎:30度≦錐度角≦40度 ○:40度<錐度角≦60度 △:60度<錐度角≦80度 ╳:錐度角>80度,或者錐度角<30度乾燥性 The taper angle is evaluated by observing the aforementioned black matrix with a specific pattern with a scanning electron microscope (made by Hitachi High-Technologies, and its model is S-4800), and measuring its taper angle. Please refer to FIG. 1, which is a schematic cross-sectional view of the taper angle θ of the black matrix observed according to the taper angle evaluation method of an embodiment of the present invention. Among them, the 701 series is a glass substrate, and the 703 series is a black matrix. Based on the measured taper angle θ, the evaluation is based on the following criteria: ◎: 30 degrees ≦ taper angle ≦ 40 degrees ○: 40 degrees <taper angle ≦ 60 degrees △: 60 degrees <taper angle ≦ 80 degrees ╳: taper angle > 80 degrees, or the taper angle <30 degrees dry

將玻璃片浸入前述黑色矩陣用負型感光性樹脂組成物中5秒鐘後,取出玻璃片並風乾55秒。再次將玻璃片浸漬並取出,重複該操作共120次,接著,用光學顯微鏡觀察浸漬區域的黑色光阻表面,並以下記之基準進行評價: ◎:完全無異物殘留於乾燥面上 ○:極少量異物殘留於乾燥面上 △:明顯有異物凝集並殘留於乾燥面上 X:大量異物殘留於乾燥面上 表2-1:

Figure 02_image103
表2-2:
Figure 02_image105
表1-1、表1-2中: B-1 乙二醇二甲基丙烯酸酯 B-2 三丙烯酸三羥甲基丙酯 B-3 二季戊四醇六丙烯酸酯 C-1-1 式(3-1)之化合物 C-1-2 式(3-4)之化合物 C-1-3 式(3-9)之化合物 C-1-4 式(3-11)之化合物 C-1-5 式(3-14)之化合物 C-1-6 式(3-22)之化合物 C-2-1 1-[9-乙基-6-(2-甲基苯醯基)-9H-咔唑-3-取代基]-乙烷酮-1-(O-乙醯基肟) (商品名IRGACURE OXE-02;汽巴精化有限公司製造) C-2-2 2-甲基-1-(4-甲基硫代苯基)-2-嗎啉代-1-丙酮 (商品名IRGACURE 907;汽巴精化有限公司製造) D-1-1 二乙二醇乙醚乙酸酯 D-1-2 二乙二醇正丁醚乙酸酯 D-1-3 二丙二醇甲醚乙酸酯 D-1-4 三乙二醇乙醚乙酸酯 D-1-5 四乙二醇乙醚乙酸酯 D-1-6 二新戊二醇乙醚乙酸酯 D-2-1 乙酸乙酯 D-2-2 乙酸異丁酯 D-2-3 丙酸正丙酯 D-2-4 丙酸正丁酯 D-2-5 正丁酸甲酯 D-2-6 2-甲基丙酸正丁酯 D-3 丙二醇甲醚醋酸酯 E-1 商品名MA100;三菱化學製造 E-2 商品名MA230;三菱化學製造 After the glass piece was immersed in the negative photosensitive resin composition for black matrix for 5 seconds, the glass piece was taken out and air-dried for 55 seconds. The glass slide was immersed again and taken out, and the operation was repeated 120 times in total. Then, the black photoresist surface of the immersed area was observed with an optical microscope and evaluated based on the following criteria: ◎: No foreign matter remained on the dry surface at all ○: Extremely A small amount of foreign matter remains on the dry surface △: Obviously foreign matter agglomerates and remains on the dry surface X: A large amount of foreign matter remains on the dry surface Table 2-1:
Figure 02_image103
Table 2-2:
Figure 02_image105
In Table 1-1 and Table 1-2: B-1 Ethylene glycol dimethacrylate B-2 Trimethylol Propyl Triacrylate B-3 Dipentaerythritol hexaacrylate C-1-1 Compound of formula (3-1) C-1-2 Compound of formula (3-4) C-1-3 Compound of formula (3-9) C-1-4 Compound of formula (3-11) C-1-5 Compound of formula (3-14) C-1-6 Compound of formula (3-22) C-2-1 1-[9-Ethyl-6-(2-Methylphenanyl)-9H-carbazole-3-substituent]-Ethanone-1-(O-Acetyloxime) (trade name IRGACURE OXE -02; manufactured by Ciba Fine Chemical Co., Ltd.) C-2-2 2-Methyl-1-(4-methylthiophenyl)-2-morpholino-1-acetone (trade name IRGACURE 907; manufactured by Ciba Fine Chemical Co., Ltd.) D-1-1 Diethylene glycol ethyl ether acetate D-1-2 Diethylene glycol n-butyl ether acetate D-1-3 Dipropylene glycol methyl ether acetate D-1-4 Triethylene glycol ethyl ether acetate D-1-5 Tetraethylene glycol ethyl ether acetate D-1-6 Dineopentyl glycol ethyl ether acetate D-2-1 Ethyl acetate D-2-2 Isobutyl acetate D-2-3 N-propyl propionate D-2-4 N-butyl propionate D-2-5 Methyl Butyrate D-2-6 N-Butyl 2-methylpropionate D-3 Propylene Glycol Methyl Ether Acetate E-1 Trade name MA100; manufactured by Mitsubishi Chemical E-2 Trade name MA230; manufactured by Mitsubishi Chemical

上述實施例僅為說明本發明之原理及其功效,而非限制本發明。習於此技術之人士對上述實施例所做之修改及變化仍不違背本發明之精神。本發明之權利範圍應如後述之申請專利範圍所列。The above-mentioned embodiments only illustrate the principles and effects of the present invention, but do not limit the present invention. Modifications and changes made by those skilled in this technology to the above-mentioned embodiments still do not violate the spirit of the present invention. The scope of rights of the present invention should be listed in the scope of patent application described later.

701:玻璃基板 703:黑色矩陣 θ:錐度角701: glass substrate 703: black matrix θ: Taper angle

圖一繪示根據本發明之一實施例之錐度角的評價方式所觀察之黑色矩陣的錐度角θ之剖面示意圖。FIG. 1 is a schematic cross-sectional view of the taper angle θ of the black matrix observed according to the taper angle evaluation method of an embodiment of the present invention.

701:玻璃基板 701: glass substrate

703:黑色矩陣 703: black matrix

θ:錐度角 θ: Taper angle

Claims (11)

一種黑色感光性樹脂組成物,包含: 鹼可溶性樹脂(A); 具有乙烯性不飽和基之化合物(B); 光起始劑(C); 溶劑(D);及 黑色顏料(E); 其中,該鹼可溶性樹脂(A)包含第一鹼可溶性樹脂(A-1),該第一鹼可溶性樹脂(A-1)係由第一混合物所聚合而得,該第一混合物包含式(1)所示之二醇化合物(a-1-1)、四羧酸或其酸二酐(a-1-2)及二羧酸或其酸酐(a-1-3);
Figure 03_image001
式(1) 式(1)中,A1 、A1 ’各自為Ra SRb ,所述Ra 為單鍵、C1 -C10 伸烷基或C6 -C15 伸芳基,所述Rb 為C1 -C10 烷基或C6 -C15 芳基;n為1至6的整數;A2 、A2 ’各自為氫、羥基、硫醇基、氨基、硝基或鹵素取代基; 該溶劑(D)包含式(2)所示之第一溶劑(D-1);
Figure 03_image003
式(2) 式(2)中,D1 為具直鏈或支鏈之C1 -C8 伸烷基,D2 為具直鏈或支鏈之C1 -C8 烷基;a為2至4的整數,且複數個D1 可相同或不同。
A black photosensitive resin composition comprising: an alkali-soluble resin (A); a compound having an ethylenically unsaturated group (B); a photoinitiator (C); a solvent (D); and a black pigment (E); The alkali-soluble resin (A) includes a first alkali-soluble resin (A-1), the first alkali-soluble resin (A-1) is obtained by polymerizing a first mixture, and the first mixture includes formula (1) The indicated diol compound (a-1-1), tetracarboxylic acid or its acid dianhydride (a-1-2) and dicarboxylic acid or its acid anhydride (a-1-3);
Figure 03_image001
Formula (1) In the formula (1), A 1 and A 1 'are each Ra SR b , and the Ra is a single bond, C 1 -C 10 alkylene or C 6 -C 15 arylene, so Said R b is a C 1 -C 10 alkyl group or a C 6 -C 15 aryl group; n is an integer from 1 to 6; A 2 and A 2 'are each hydrogen, hydroxyl, thiol, amino, nitro or halogen Substituents; The solvent (D) includes the first solvent (D-1) represented by formula (2);
Figure 03_image003
Formula (2) In the formula (2), D 1 is a linear or branched C 1 -C 8 alkylene; D 2 is a linear or branched C 1 -C 8 alkyl; a is 2 An integer from to 4, and plural D 1 may be the same or different.
如請求項1之黑色感光性樹脂組成物,其中該鹼可溶性樹脂(A)包含第二鹼可溶性樹脂(A-2),該第二鹼可溶性樹脂(A-2)係由第二混合物聚合而得,且該第二混合物包括含有聚合性不飽和基的二醇化合物(a-2-1)、四羧酸或其酸二酐(a-2-2)以及二羧酸或其酸酐(a-2-3)。The black photosensitive resin composition of claim 1, wherein the alkali-soluble resin (A) comprises a second alkali-soluble resin (A-2), and the second alkali-soluble resin (A-2) is polymerized from the second mixture And the second mixture includes a diol compound containing a polymerizable unsaturated group (a-2-1), a tetracarboxylic acid or its acid dianhydride (a-2-2), and a dicarboxylic acid or its anhydride (a -2-3). 如請求項1之黑色感光性樹脂組成物,其中該光起始劑(C)包含由式(3)所示之光起始劑(C-1):
Figure 03_image015
式(3) 其中R1 、R2 、R3 、R4 、R5 、R6 、R7 及R8 彼此獨立地為氫、C1 -C20 烷基、COR16 、或
Figure 03_image017
; 或R1 及R2 、R2 及R3 、R3 及R4 、R5 及R6 、R6 及R7 或R7 及R8 彼此獨立地共同為
Figure 03_image019
; 但條件為R1 及R2 、R2 及R3 、R3 及R4 、R5 及R6 、R6 及R7 或R7 及R8 中之至少一對為
Figure 03_image019
; R9 、R10 、R11 及R12 彼此獨立地為氫、C1 -C20 烷基,該C1 -C20 烷基是未經取代或經一或多個以下基團取代:鹵素、苯基; 或R9 、R10 、R11 及R12 彼此獨立地為未經取代之苯基或經一或多個以下基團取代之苯基:C1 -C6 烷基、鹵素; X表示CO或直接鍵; R13 表示C1 -C20 烷基,其未經取代或經一或多個以下基團取代:鹵素、R17 、COOR17 、OR17 ; 或R13 表示C2 -C20 烷基,其間雜有一或多個O或CO,其中該經間雜之C2 -C20 烷基是未經取代或經一或多個鹵素取代; 或R13 表示苯基或萘基,其各為未經取代或經一或多個以下基團取代:C1 -C20 烷基、C1 -C4 鹵代烷基; R14 表示氫、C1 -C20 烷氧基或C1 -C20 烷基; R15 是C6 -C20 芳基,其各是未經取代或經一或多個以下基團取代:鹵素、C1 -C4 鹵代烷基、OR17 、間雜有一或多個O之C2 -C20 烷基;或其各經C1 -C20 烷基取代,該C1 -C20 烷基是未經取代或經一或多個以下基團取代:鹵素、COOR17 、苯基、OR17 ; 或R15 表示氫、C3 -C8 環烷基;或R15 是C1 -C20 烷基,其是未經取代或經一或多個以下基團取代:鹵素、C3 -C8 環烷基; R16 表示C6 -C20 芳基,其各是未經取代或經一或多個以下基團取代:鹵素、C1 -C4 鹵代烷基、OR17 ;或其各經一或多個C1 -C20 烷基取代,該C1 -C20 烷基是未經取代或經一或多個以下基團取代:鹵素、OR17 ; R17 表示氫、C1 -C20 烷基,其是未經取代或經一或多個以下基團取代:鹵素或間雜有一或多個O之C3 -C20 環烷基; 或R17 表示C2 -C20 烷基,其間雜有一或多個O; 或R17 表示苯基,其各是未經取代或經一或多個以下基團取代:鹵素、C1 -C12 烷基、C1 -C12 烷氧基; 但條件為在式(3)中存在至少一個
Figure 03_image017
The black photosensitive resin composition of claim 1, wherein the photoinitiator (C) comprises a photoinitiator (C-1) represented by formula (3):
Figure 03_image015
Formula (3) wherein R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 and R 8 are independently hydrogen, C 1 -C 20 alkyl, COR 16 , or
Figure 03_image017
; Or R 1 and R 2 , R 2 and R 3 , R 3 and R 4 , R 5 and R 6 , R 6 and R 7 or R 7 and R 8 are independently of each other and collectively are
Figure 03_image019
; But the condition is that at least one of R 1 and R 2 , R 2 and R 3 , R 3 and R 4 , R 5 and R 6 , R 6 and R 7 or R 7 and R 8 is
Figure 03_image019
; R 9 , R 10 , R 11 and R 12 are independently of each other hydrogen, C 1 -C 20 alkyl, and the C 1 -C 20 alkyl is unsubstituted or substituted with one or more of the following groups: halogen , Phenyl; or R 9 , R 10 , R 11 and R 12 independently of each other are unsubstituted phenyl or phenyl substituted with one or more of the following groups: C 1 -C 6 alkyl, halogen; X represents CO or a direct bond; R 13 represents C 1 -C 20 alkyl, which is unsubstituted or substituted with one or more of the following groups: halogen, R 17 , COOR 17 , OR 17 ; or R 13 represents C 2 -C 20 alkyl group with one or more O or CO interposed therebetween, wherein the intervening C 2 -C 20 alkyl group is unsubstituted or substituted with one or more halogens; or R 13 represents phenyl or naphthyl , Each of which is unsubstituted or substituted with one or more of the following groups: C 1 -C 20 alkyl, C 1 -C 4 haloalkyl; R 14 represents hydrogen, C 1 -C 20 alkoxy or C 1 -C 20 alkyl; R 15 is C 6 -C 20 aryl, each of which is unsubstituted or substituted with one or more of the following groups: halogen, C 1 -C 4 haloalkyl, OR 17 , or A plurality of O C 2 -C 20 alkyl groups; or each of them is substituted by a C 1 -C 20 alkyl group, the C 1 -C 20 alkyl group is unsubstituted or substituted with one or more of the following groups: halogen, COOR 17 , phenyl, OR 17 ; or R 15 represents hydrogen, C 3 -C 8 cycloalkyl; or R 15 is C 1 -C 20 alkyl, which is unsubstituted or has one or more of the following groups Substitution: halogen, C 3 -C 8 cycloalkyl; R 16 represents C 6 -C 20 aryl, each of which is unsubstituted or substituted with one or more of the following groups: halogen, C 1 -C 4 haloalkyl , OR 17 ; or each is substituted with one or more C 1 -C 20 alkyl groups, the C 1 -C 20 alkyl group is unsubstituted or substituted with one or more of the following groups: halogen, OR 17 ; R 17 represents hydrogen, C 1 -C 20 alkyl, which is unsubstituted or substituted with one or more of the following groups: halogen or C 3 -C 20 cycloalkyl with one or more O interspersed; or R 17 represents C 2 -C 20 alkyl group, with one or more O interposed therebetween; or R 17 represents a phenyl group, each of which is unsubstituted or substituted with one or more of the following groups: halogen, C 1 -C 12 alkyl, C 1 -C 12 alkoxy; but the condition is that there is at least one in formula (3)
Figure 03_image017
.
如請求項1之黑色感光性樹脂組成物,其中該溶劑(D)另包含式(4)所示之第二溶劑(D-2):
Figure 03_image087
式(4) 其中,D3 為具直鏈或支鏈的C1 -C3 烷基,D4 為具直鏈或支鏈的C1 -C4 烷基。
The black photosensitive resin composition of claim 1, wherein the solvent (D) further comprises a second solvent (D-2) represented by formula (4):
Figure 03_image087
Formula (4) wherein D 3 is a linear or branched C 1 -C 3 alkyl group, and D 4 is a linear or branched C 1 -C 4 alkyl group.
如請求項1之黑色感光性樹脂組成物,其中基於該鹼可溶性樹脂(A)之總使用量為100重量份,該鹼可溶性樹脂(A-1)之使用量為30重量份至100重量份,該具有乙烯性不飽和基之化合物(B)之使用量為10重量份至100重量份,該光起始劑(C)之使用量為5重量份至80重量份,該溶劑(D)之總使用量為250重量份至5000重量份,該第一溶劑(D-1)之使用量為150重量份至1500重量份,且該黑色顏料(E)之使用量為50重量份至600重量份。The black photosensitive resin composition of claim 1, wherein the total usage amount based on the alkali-soluble resin (A) is 100 parts by weight, and the usage amount of the alkali-soluble resin (A-1) is 30 to 100 parts by weight , The usage amount of the compound (B) with ethylenic unsaturated group is 10 parts by weight to 100 parts by weight, the usage amount of the photoinitiator (C) is 5 parts by weight to 80 parts by weight, the solvent (D) The total usage amount is 250 parts by weight to 5000 parts by weight, the usage amount of the first solvent (D-1) is 150 parts by weight to 1500 parts by weight, and the usage amount of the black pigment (E) is 50 parts by weight to 600 parts by weight. Parts by weight. 如請求項2之黑色感光性樹脂組成物,其中基於該鹼可溶性樹脂(A)之總使用量為100重量份,該鹼可溶性樹脂(A-2)之使用量為10重量份至70重量份。The black photosensitive resin composition of claim 2, wherein the total usage amount based on the alkali soluble resin (A) is 100 parts by weight, and the usage amount of the alkali soluble resin (A-2) is 10 parts by weight to 70 parts by weight . 如請求項3之黑色感光性樹脂組成物,其中基於該鹼可溶性樹脂(A)之總使用量為100重量份,該式(3)所示之光起始劑(C-1)之使用量為5重量份至50重量份。The black photosensitive resin composition of claim 3, wherein the total usage amount based on the alkali-soluble resin (A) is 100 parts by weight, and the usage amount of the photoinitiator (C-1) represented by the formula (3) It is 5 parts by weight to 50 parts by weight. 如請求項4之黑色感光性樹脂組成物,其中基於該鹼可溶性樹脂(A)之總使用量為100重量份,該第二溶劑(D-2)之使用量為100重量份至1300重量份。The black photosensitive resin composition of claim 4, wherein the total usage amount based on the alkali-soluble resin (A) is 100 parts by weight, and the usage amount of the second solvent (D-2) is 100 parts by weight to 1300 parts by weight . 如請求項4之黑色感光性樹脂組成物,其中該第一溶劑(D-1)及該第二溶劑(D-2)之使用比例為0.5至3。The black photosensitive resin composition of claim 4, wherein the use ratio of the first solvent (D-1) and the second solvent (D-2) is 0.5 to 3. 一種黑色圖案,其係藉由請求項1至9中任一項之黑色感光性樹脂組成物經一預烤處理、一曝光處理、一顯影處理及一後烤處理所形成。A black pattern is formed by the black photosensitive resin composition of any one of claims 1 to 9 through a pre-baking treatment, an exposure treatment, a development treatment and a post-baking treatment. 一種液晶顯示裝置,其包含請求項10之黑色圖案。A liquid crystal display device comprising the black pattern of claim 10.
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